WO2019153456A1 - Filtre passe-bande térahertz - Google Patents

Filtre passe-bande térahertz Download PDF

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Publication number
WO2019153456A1
WO2019153456A1 PCT/CN2018/081093 CN2018081093W WO2019153456A1 WO 2019153456 A1 WO2019153456 A1 WO 2019153456A1 CN 2018081093 W CN2018081093 W CN 2018081093W WO 2019153456 A1 WO2019153456 A1 WO 2019153456A1
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WIPO (PCT)
Prior art keywords
resonator
terahertz
dielectric layer
strip
filter unit
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PCT/CN2018/081093
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English (en)
Chinese (zh)
Inventor
李程
郑渚
杨彬
丁庆
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深圳市太赫兹科技创新研究院有限公司
深圳市太赫兹科技创新研究院
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Publication of WO2019153456A1 publication Critical patent/WO2019153456A1/fr

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • H01P1/2005Electromagnetic photonic bandgaps [EPB], or photonic bandgaps [PBG]

Definitions

  • the present invention relates to the field of terahertz communications, and more particularly to a terahertz bandpass filter.
  • the terahertz wave refers to an electromagnetic wave between microwave and infrared rays having a frequency of 0.1 THz to 10 THz and a wavelength of 30 um to 3 mm.
  • the metamaterial is an artificial electromagnetic material composed of a periodically arranged subwavelength unit structure. Unlike conventional natural materials, it has special electromagnetic properties such as a negative refractive index and a negative magnetic permeability, and the shape and size of the metamaterial unit structure and The control of the material components enables tuning and control of electromagnetic waves.
  • terahertz filters There are various terahertz devices based on metamaterials, such as terahertz filters, terahertz absorbers, and terahertz tuners.
  • terahertz filters have attracted much attention due to their important application value in the fields of high frequency communication, safety detection and radiation detection.
  • most of the terahertz filters that are currently present are mostly single-band and multi-band or tunable single-band filters, and the filter band is narrow. In practical applications, such as broadband communication, it is severely restricted.
  • a terahertz band pass filter includes a filter unit structure including a first resonator, a dielectric layer, and a second resonator which are sequentially stacked; the first resonator includes a hollowed out a patterned metal plate, the hollow pattern including a first strip shape and a second strip shape extending from two ends of the first strip shape perpendicular to the first strip shape, the first resonator and the first The structure of the second resonator is the same.
  • the metal plate has a length of 155 um to 165 um, a thickness of 0.4 um to 0.6 um, a height of 165 um to 175 um, a direction of the length being a first direction, and a direction of the height being a second In a direction, the first strip extends in the second direction, and the second strip extends in the first direction.
  • the dielectric layer has a dielectric constant of 2.5.
  • the dielectric layer has a loss tangent of 0.002.
  • the dielectric layer has a magnetic permeability of one.
  • the material of the dielectric layer comprises at least one of silicon and quartz.
  • the dielectric layer has a length of 155 um to 165 um, a thickness of 40 um to 50 um, and a height of 165 um to 175 um.
  • the terahertz band pass filter includes a plurality of filter unit structures periodically arranged in a first direction and a second direction, the second strip extending in a direction of the first direction, The direction in which the first strip extends is the second direction.
  • the first resonator, the dielectric layer, and the second resonator are coincident by a normal to a respective geometric center.
  • the metal sheet is a metamaterial structure.
  • the filter unit structure is formed by using a first resonator-medium layer-second resonator provided with a hollow pattern, and then the filter unit structure is cycled in the first direction and the second direction
  • the terahertz bandpass filter is arranged to make the terahertz bandpass filter have metamaterial characteristics, and the wide filtering band of the terahertz bandpass filter is realized, and can be applied to broadband communication.
  • FIG. 1 is an exploded view showing the structure of a filter unit of a terahertz band pass filter in an embodiment
  • FIG. 2 is a schematic plan view showing a planar structure of a terahertz band pass filter in an embodiment
  • FIG. 3 is a plan mathematical model diagram of a filter unit structure in an embodiment
  • FIG. 4 is a graph showing a transmission characteristic of a terahertz band pass filter in an embodiment.
  • FIG. 1 and FIG. 2 are exploded views of a filter unit structure of a terahertz band pass filter and a planar structure diagram of a terahertz band pass filter.
  • a terahertz bandpass filter may include a filter unit structure 10, wherein the filter unit structure 10 may include a first resonator 100, a dielectric layer 200, and a second resonator 300. The first resonator 100, the dielectric layer 200, and the second resonator 300 are sequentially stacked.
  • the first resonator 100, the dielectric layer 200, and the second resonator 300 are coincident through the normal to the respective geometric centers. It can be understood that the structure of the first resonator 100 and the second resonator 300 are the same, in other words, the shapes and configurations of the first resonator 100 and the second resonator 300 are the same.
  • the first resonator 100 is a metal plate with a hollow pattern (not shown in FIG. 1), and the hollow pattern may include a first strip 110 and from the first Both ends of the strip are perpendicular to the second strip 120 extending from the first strip 110. In the embodiment shown in FIG.
  • the hollow pattern includes a first strip 110, a third strip 121, and a fourth strip 122.
  • the third strip 121, the fourth strip 122 and the first strip 110 together form an I-shape.
  • the first resonator 100 is an I-shaped slot resonator unit structure, which can be obtained by removing an I-shaped metal piece on a metal plate, and the removed I-shape can be obtained by photolithography, electroplating, or the like processing on the metal plate. Wherein, the metal plate coincides with the geometric center of the I-shaped metal piece.
  • the material of the metal plate may be any material well known to those skilled in the art, and those skilled in the art may select and adjust according to actual conditions and product performance.
  • the material of the preferred metal plate of the present invention is gold, aluminum, silver. Copper is more preferably gold, aluminum or silver, and most preferably gold or silver.
  • the shape of the metal plate is not particularly limited, and the shape is well known to those skilled in the art. Those skilled in the art can select and adjust according to the actual situation and the product performance.
  • the shape of the metal plate of the present invention is a rectangular parallelepiped or a cube.
  • the metal plate may have a length of 160 ⁇ m, a thickness of 0.5 ⁇ m, and a height of 170 ⁇ m.
  • the direction of the length of the metal plate may be the first direction
  • the direction of the height is the second direction
  • the first strip 110 extends in the second direction
  • the second strip extends in the first direction.
  • the first direction and the second direction herein may be a horizontal direction and a vertical direction.
  • the shape parameter of the metal plate may be a shape parameter well known to those skilled in the art, and those skilled in the art may select and adjust according to the actual situation and the product performance.
  • the shape parameter selection of the preferred metal plate of the present invention may be The length is 155um ⁇ 165um, the thickness is 0.4um ⁇ 0.6um, and the height is 165um ⁇ 175um. More preferably, the shape parameter of the metal plate has a length of 155 um to 160 um, a thickness of 0.4 um to 0.5 um, and a height of 165 um to 170 um. Most preferably, the shape parameter of the metal plate has a length of 160 um to 165 um and a thickness of 0.5 um to 0.6 um. The height is 170um ⁇ 175um.
  • the structure and material composition of the first resonator 100 and the second resonator 300 are obtained by removing the same-sized I-shaped metal piece from the same size metal plate, so the first resonator 100 and the second resonator
  • the structure and shape of the 300 are the same.
  • the shape and shape parameters of the first resonator 100 and the second resonator 200 reference may be made to the description of the shape and shape parameters of the metal plate before, and no further description is provided here.
  • a metal plate of a different size may be used to remove the same-sized I-shaped metal piece, and the I-shaped metal piece coincides with the geometric center of the metal plate, and the first resonator and the first formed are formed.
  • the geometric centers of the two resonators are on the same line.
  • the terahertz band pass filter may include a plurality of filter unit structures 10 periodically arranged in the first direction and the second direction, where the direction in which the second strip 120 extends is taken as the first direction, first The direction in which the strip 110 extends is taken as the second direction.
  • the number of the filter unit structures 10 arranged in the first direction and the number arranged in the second direction may be the same or different, for example, in the case of equal numbers: the filter unit structures 10 are arranged in the first direction by 10 10 are arranged in the second direction; the number is unequal: the filter unit structure 10 is arranged in 12 in the first direction and 13 in the second direction.
  • the number of the filter unit structure 10 arranged in the first direction and the second direction is not particularly limited, and can be selected and adjusted according to actual operation needs and product performance by a person skilled in the art. .
  • FIG. 3 is a planar mathematical model diagram of a filter unit structure in an embodiment.
  • model parameters of the filter unit structure in the present embodiment are represented by Lx, Ly, a, b, b1, w, respectively.
  • Lx represents the length of the filter unit structure 10.
  • Ly represents the height of the filter unit structure 10.
  • a represents the length of the third strip 121 and the fourth strip 122;
  • b represents the length of the first strip 110,
  • b1 represents the width of the third strip 121 and the fourth strip 122;
  • w represents the first strip 110 width.
  • model parameters of the filter unit structure 10 are not particularly limited, and the model parameters are well known to those skilled in the art, and those skilled in the art can select and adjust according to actual conditions and product performance, and the present invention preferably has 155um. ⁇ Lx ⁇ 165um, 165um ⁇ Ly ⁇ 175um, 115um ⁇ a ⁇ 125um, 105um ⁇ b ⁇ 115um, 18um ⁇ b1 ⁇ 22um, 30um ⁇ w ⁇ 34um, more preferably 155um ⁇ Lx ⁇ 160um, 165um ⁇ Ly ⁇ 170um, 115um ⁇ a ⁇ 120um, 105um ⁇ b ⁇ 110um, 18um ⁇ b1 ⁇ 20um, 30um ⁇ w ⁇ 32um, most preferably 160um ⁇ Lx ⁇ 165um, 165um ⁇ Ly ⁇ 170um, 120um ⁇ a ⁇ 125um, 110um ⁇ b ⁇ 115um , 20um ⁇ b1 ⁇ 22um, 32um ⁇ w ⁇ 34um.
  • Preferably such parameters may optimize the overall performance of the filter unit structure and, as the size is chosen to be on the order of microns, the overall size of the filter will not be oversized.
  • the dielectric layer 200 may be a non-conductor material.
  • the material of the dielectric layer 200 is not particularly limited in the present invention, and may be selected by those skilled in the art, and may be selected by those skilled in the art according to actual conditions and product performance.
  • the material of the dielectric layer of the present invention is silicon or quartz, most preferably silicon.
  • Some of the key parameters that typically measure the performance of a dielectric layer are dielectric constant, loss tangent, and magnetic permeability. When the medium is applied with an electric field, an induced charge is generated to weaken the electric field. The ratio of the electric field in the medium to the original applied electric field (in vacuum) is the relative permittivity (dielectric constant), also known as the induced electric rate. Frequency related.
  • the dielectric constant is the product of the relative dielectric constant and the absolute dielectric constant in vacuum, expressed as ⁇ r .
  • the loss tangent is also called the dielectric loss tangent, and the dielectric loss tangent.
  • a physical quantity that characterizes the dielectric loss of a dielectric material after application of an electric field expressed as tan ⁇ , which is the dielectric loss angle. It characterizes the ratio of the energy lost by the dielectric to its stored energy in each cycle.
  • the magnetic permeability indicates the physical quantity of magnetic properties of the magnetic medium.
  • the dielectric constant of the dielectric layer 200 is not particularly limited, and the dielectric constant is well known to those skilled in the art. Those skilled in the art can select and adjust according to the actual situation and product performance.
  • the preferred dielectric constant of the present invention Is 2.5.
  • the loss tangent of the dielectric layer 200 is not particularly limited, and the tangent tangent is well known to those skilled in the art. Those skilled in the art can select and adjust according to the actual situation and product performance.
  • the preferred loss tangent is 0.002.
  • the magnetic permeability of the dielectric layer 200 is not particularly limited, and the magnetic permeability is well known to those skilled in the art. Those skilled in the art can select and adjust according to actual conditions and product performance.
  • the preferred magnetic permeability of the present invention is 1.
  • the filter unit structure is formed by using a first resonator-medium layer-second resonator provided with a hollow pattern, and then the filter unit structure is cycled in the first direction and the second direction
  • the terahertz bandpass filter is arranged to make the terahertz bandpass filter have metamaterial characteristics, and the wide filtering band of the terahertz bandpass filter is realized, and can be applied to broadband communication.
  • FIG. 4 is a transmission characteristic diagram of a terahertz band pass filter in an embodiment.
  • a specific simulation condition is set, a magnetic field is applied in the X-axis direction, and an electric field is applied in the Y-axis direction, and the electromagnetic wave is incident perpendicularly to the filter.
  • the surface ie, the electromagnetic wave is incident on the filter surface along the Z-axis direction.
  • the transmission-frequency relationship of the terahertz bandpass filter of the present invention is obtained by simulation. As shown in FIG.
  • the center frequency f 0 is approximately equal to 1.07 THz
  • the 3 dB band-stop bandwidth of the filter is 440 GHz
  • the corresponding frequency is 0.85 THz to 1.29 THz
  • the corresponding wavelength is 23.2 mm to 35.3 mm.
  • the bandwidth encompasses the electromagnetic wave atmospheric window of 90 GHz.
  • the present invention is a band pass filter and can be applied to a millimeter wave point-to-point communication system.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)

Abstract

La présente invention concerne le domaine des communications térahertz. L'invention concerne un filtre passe-bande térahertz comprenant une structure d'unité de filtre, la structure d'unité de filtre comprenant un premier résonateur, une couche diélectrique et un second résonateur qui sont stratifiés de manière séquentielle. Le premier résonateur comprend une plaque métallique pourvue d'un motif creux, le motif creux comprend une première forme de barre et une seconde forme de barre s'étendant perpendiculairement à la première forme de barre à partir des deux extrémités de la première forme de barre, et le premier résonateur et le second résonateur ont la même structure. La présente invention permet d'obtenir la large bande de filtre du filtre passe-bande térahertz en adoptant un premier résonateur-couche diélectrique-second résonateur pourvu d'un motif creux pour former la structure d'unité de filtre, et peut être applicable à une communication à large bande.
PCT/CN2018/081093 2018-02-11 2018-03-29 Filtre passe-bande térahertz WO2019153456A1 (fr)

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Application Number Priority Date Filing Date Title
CN201810143227.XA CN108390133A (zh) 2018-02-11 2018-02-11 太赫兹带通滤波器
CN201810143227.X 2018-02-11

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112739186A (zh) * 2020-12-22 2021-04-30 博微太赫兹信息科技有限公司 一种用于增强吸收降低表面辐射的超材料吸波结构
CN115020946A (zh) * 2022-05-25 2022-09-06 桂林电子科技大学 S型金属结构带割口的带阻滤波器
CN116940093A (zh) * 2023-05-23 2023-10-24 安徽大学 一种宽频带微波吸波体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111896479B (zh) * 2020-09-07 2021-11-23 北京邮电大学 太赫兹手性鉴别器件及圆极化选择器
CN114126393B (zh) * 2021-11-29 2024-05-14 安徽大学 一种宽频带太赫兹吸波体

Citations (3)

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Publication number Priority date Publication date Assignee Title
CN202034461U (zh) * 2011-04-01 2011-11-09 中国计量学院 周期性工字形镂空结构的太赫兹波滤波器
CN103490125A (zh) * 2013-10-12 2014-01-01 电子科技大学 基于频率选择表面的多层互补结构太赫兹带通滤波器
CN106025454A (zh) * 2016-05-06 2016-10-12 中国工程物理研究院电子工程研究所 改进型Jerusalem十字单元的双层FSS结构

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202034461U (zh) * 2011-04-01 2011-11-09 中国计量学院 周期性工字形镂空结构的太赫兹波滤波器
CN103490125A (zh) * 2013-10-12 2014-01-01 电子科技大学 基于频率选择表面的多层互补结构太赫兹带通滤波器
CN106025454A (zh) * 2016-05-06 2016-10-12 中国工程物理研究院电子工程研究所 改进型Jerusalem十字单元的双层FSS结构

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112739186A (zh) * 2020-12-22 2021-04-30 博微太赫兹信息科技有限公司 一种用于增强吸收降低表面辐射的超材料吸波结构
CN112739186B (zh) * 2020-12-22 2023-08-22 博微太赫兹信息科技有限公司 一种用于增强吸收降低表面辐射的超材料吸波结构
CN115020946A (zh) * 2022-05-25 2022-09-06 桂林电子科技大学 S型金属结构带割口的带阻滤波器
CN115020946B (zh) * 2022-05-25 2023-09-29 桂林电子科技大学 S型金属结构带割口的带阻滤波器
CN116940093A (zh) * 2023-05-23 2023-10-24 安徽大学 一种宽频带微波吸波体

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