WO2019127688A1 - High-viscosity liquid supply and discharge device - Google Patents

High-viscosity liquid supply and discharge device Download PDF

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Publication number
WO2019127688A1
WO2019127688A1 PCT/CN2018/072860 CN2018072860W WO2019127688A1 WO 2019127688 A1 WO2019127688 A1 WO 2019127688A1 CN 2018072860 W CN2018072860 W CN 2018072860W WO 2019127688 A1 WO2019127688 A1 WO 2019127688A1
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nozzle
liquid
discharge
liquid supply
supply
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PCT/CN2018/072860
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French (fr)
Chinese (zh)
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孙超
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武汉华星光电半导体显示技术有限公司
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Publication of WO2019127688A1 publication Critical patent/WO2019127688A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work

Definitions

  • the invention relates to the field of flat panel display technology, in particular to a high viscosity liquid supply and discharge device.
  • liquid of the high-viscosity material is sent to the slit nozzle (Slit Nozzle) after the defoaming, and then sprayed and coated.
  • the liquid supply line is disposed above the slit nozzle.
  • the present invention provides a high-viscosity liquid supply and discharge device for solving the problem that the high-viscosity liquid after defoaming in the prior art is easy to generate bubbles in the liquid supply line and the nozzle, and the high-viscosity liquid material is lowered.
  • the number of bubbles after curing increases the coating quality.
  • the present invention provides a high viscosity liquid supply and discharge device comprising a nozzle, a liquid supply pipe, a discharge pipe, the liquid supply pipe being supplied with a high viscosity liquid; the nozzle having a cavity a bottom of the nozzle is provided with a liquid discharge end, and a liquid supply pipe is respectively connected to opposite side walls of the nozzle near the liquid discharge end, and one end of the liquid supply pipe extends into the nozzle a bubble sensor is disposed on the liquid supply pipe; the bubble discharge pipe is disposed at a top of the nozzle, and the exhaust pipe is disposed on the discharge pipe; the exhaust valve is used in the The bubble sensor detects opening of the liquid supply tube and/or the presence of air bubbles in the nozzle to discharge the air bubbles.
  • the liquid supply pipe is further provided with a flow regulating valve for adjusting the flow rate of the high viscosity liquid in the liquid supply pipe.
  • the exhaust valve and the bubble sensor are electrically connected to the control module; when the bubble sensor detects the presence of a bubble, the control module controls the exhaust valve to open to perform air bubbles.
  • the number of the bubble discharging tubes is two or more.
  • the height of the liquid supply pipe from the junction of the nozzle and the liquid discharge end is 100-200 mm.
  • the size of the liquid discharge end gradually decreases along the vertical direction from the top to the bottom of the nozzle.
  • the minimum size of the liquid discharge end is 0.1-0.2 mm.
  • the inner diameter of the liquid supply pipe is 10-20 mm.
  • the inner diameter of the bubble discharging tube is 5-8 mm.
  • the supply and discharge device further comprises a liquid reservoir, and the high viscosity liquid material in the liquid storage device is supplied into the liquid supply pipe.
  • the high viscosity liquid supply and discharge device comprises a nozzle, a liquid supply pipe and a discharge pipe, wherein the bottom of the nozzle is provided with a liquid discharge end, and is provided at two side walls of the nozzle near the liquid discharge end.
  • Two liquid supply pipes communicating with the cavity of the nozzle, the high viscosity liquid flowing into the nozzle from the liquid supply pipe on both sides of the nozzle, so that less bubbles are generated as the liquid flows.
  • a bubble sensor is further disposed on the liquid supply pipe; the top of the nozzle is provided with the bubble discharge pipe, and the discharge pipe is provided with an exhaust valve; even when the bubble sensor detects the liquid supply pipe And/or when there is a bubble in the nozzle, the exhaust valve on the bubble discharge tube is opened, the bubble floats and is discharged from the bubble discharge tube above the nozzle, and the bubble is not carried into the high viscosity liquid flowing from both sides of the nozzle. In this way, the high-viscosity liquid with no bubble inclusions is discharged from the liquid discharge end of the bottom of the nozzle, and then after coating and curing, a smooth and smooth film layer can be formed, and the coating quality of the high-viscosity liquid material is improved.
  • FIG. 1 is a schematic view showing the structure of a high viscosity liquid supply and discharge device according to an embodiment of the present invention.
  • an embodiment of the present invention provides a high-viscosity liquid supply and discharge device 10 , which includes a nozzle 1 , a liquid supply pipe, and a bubble discharge pipe 3 .
  • the nozzle 1 has a cavity, and the bottom of the nozzle 1 is provided with a liquid discharge end 11 .
  • Two liquid supply pipes 21 are connected to opposite side walls of the nozzle 1 near the liquid discharge end 11 .
  • And 22 (which may be referred to as a first liquid supply pipe 21 and a second liquid supply pipe 22, respectively), and one end of the two liquid supply pipes extends into the cavity of the nozzle 1 to communicate with the cavity of the nozzle 1. .
  • first liquid supply tube 21 and the second liquid supply tube 22 pass through the opposite side walls of the nozzle 1 and extend into the cavity of the nozzle 1 to communicate with the cavity of the nozzle 1 and first
  • the liquid supply pipe 21 and the second liquid supply pipe 22 are adjacent to the liquid discharge end.
  • the two supply pipes are supplied with a high-viscosity liquid such that the high-viscosity liquid flows into the cavity of the nozzle 1 from the liquid supply pipe on both sides of the nozzle 1, and is discharged through the liquid discharge end 11 at the bottom of the nozzle 1.
  • the first liquid supply tube 21 and the second liquid supply tube 22 are also respectively provided with bubble sensors 23 and 24 (which may be referred to as a first bubble sensor 23 and a second bubble sensor 24, respectively), and the bubble sensor is used for bubbles in the pipeline.
  • the detection is, for example, a bubble in two liquid supply tubes, and a bubble in the nozzle 1 communicating with the liquid supply tube.
  • the top of the nozzle 1 is provided with the discharge tube 3, and the discharge tube 3 is provided with an exhaust valve.
  • the exhaust valve on the bubble discharging tube 3 is used to open the exhaust valve on the bubble discharging tube 3 to discharge the air bubbles when the bubble sensor on the liquid supply tube detects the presence of air bubbles.
  • the number of the bubble discharging tubes 3 may be one, two or three or more.
  • the number of the discharge tubes 3 is three, which may be referred to as a first discharge tube 31, a second discharge tube 32, and a third discharge tube 33, respectively, and each of the discharge tubes is provided with a corresponding one. Vent. That is, the first exhaust pipe 31 is provided with a first exhaust valve 310, a second exhaust valve 320, and a third exhaust valve 330.
  • the first exhaust gas can be opened.
  • At least one of the valve 310, the second exhaust valve 320, and the third exhaust valve 330 performs bubble discharge.
  • the exhaust valves on all of the bubble discharge tubes 3 are simultaneously opened, so that the time required for the bubbles to be discharged is shorter, and the concept that the bubbles are wrapped into the high viscosity liquid is smaller.
  • the exhaust valve on the bubble discharging tube 3 may be a manual valve or an automatic valve (for example, a solenoid valve).
  • the first exhaust valve 310, the second exhaust valve 320, and the third exhaust valve 330 are both solenoid valves. This makes it easy to discharge the bubble tube 3 when there is a bubble generation, and there is almost no time delay.
  • the first bubble sensor 23 on the first liquid supply pipe 21, the second bubble sensor 24 on the second liquid supply pipe 22, and all the exhaust valves on the bubble discharge pipe 3 are all controlled. Modules (not shown) are electrically connected. When any one of the bubble sensors described above detects the presence of a bubble, the control module controls the exhaust valve on the drain pipe 3 to open and perform bubble discharge.
  • control module can be a control circuit board, and a central processing unit, a data memory, a demodulator or a converter function device is disposed on the control circuit board.
  • the first liquid supply pipe 21 and the second liquid supply pipe 22 are closer to the bottom of the nozzle 1, so that when the high-viscosity liquid flows in from both sides of the nozzle 1, the airflow generated by the liquid flow is less disturbed, and the air bubbles are Very few.
  • the height h of the first liquid supply tube 21 or the second liquid supply tube 22 from the bottom of the nozzle 1 is 15 mm (i.e., the height h from the junction of the nozzle 1 and the liquid outlet end 11).
  • the nozzle 1 is integrally formed with the liquid outlet end 11.
  • the junction of the nozzle and the liquid discharge end 11 can be understood as the starting point at which the size of the liquid discharge end 11 starts to decrease.
  • the height of the first liquid supply tube 21 or the second liquid supply tube 22 from the top of the nozzle 1 is 100-200 mm. That is, the distance between the nozzle and the discharge tube 3 is from the first liquid supply tube 21 or the second liquid supply tube 22 by a distance of 100 to 200 mm. For example, 120-180mm.
  • first liquid supply tube 21 and the second liquid supply tube 22 are disposed in parallel and on the same horizontal line.
  • the first liquid supply pipe 21 is provided with a first flow regulating valve 25, and the second liquid supply pipe 22 is provided with a second flow regulating valve 25, wherein the two flow regulating valves are used for adjusting corresponding The flow rate of the highly viscous liquid in the supply pipe. Further, the two flow regulating valves are electrically connected to the control module.
  • the size of the liquid discharge end 11 is gradually reduced along the vertical direction from the top to the bottom of the nozzle 1 (i.e., from the top to the bottom).
  • the liquid discharge end 11 (also referred to as a coating end) is a slit type, and the outlet width of the liquid discharge end 11 can be adjusted according to the thickness of the high viscosity material to be applied.
  • the outlet end 11 has an outlet width of 0.1-0.2 mm. That is, the minimum size of the liquid discharge end 11 is 0.1 to 0.2 mm from the top to the bottom.
  • the inner diameter of the first liquid supply tube 21 or the second liquid supply tube 22 ranges from 10 to 20 mm.
  • the inner diameter of the bubble discharging tube 3 ranges from 5 to 8 mm.
  • the supply and discharge device 10 further includes a reservoir 4 into which the high viscosity liquid material stored in the accumulator 4 is supplied. Further, a transfer pump 5 is further provided at the outlet of the accumulator 4, and the high-viscosity liquid material in the accumulator 4 is supplied to the above-described liquid supply pipe via the transfer pump 5.
  • the two side walls of the nozzle 1 are provided with a liquid supply pipe communicating with the cavity of the nozzle 1, a high viscosity liquid.
  • the liquid supply pipe from both sides of the nozzle 1 flows into the nozzle 1, so that bubbles are generated as the liquid flows.
  • a bubble sensor is further disposed on the liquid supply pipe; the top of the nozzle is provided with the bubble discharge pipe 3, and the discharge pipe 3 is provided with an exhaust valve; even when the bubble sensor detects the supply When there is a bubble in the liquid pipe and/or the nozzle, the exhaust valve on the bubble discharging pipe 3 is opened, the bubble floats up and is discharged from the bubble discharging pipe 3 above the nozzle 1, and the air bubbles are not carried into the both sides of the nozzle.
  • the high-viscosity liquid with no bubble inclusions is discharged from the liquid discharge end 11 at the bottom of the nozzle 1, and then, after coating and solidification, a smooth and smooth film layer can be formed, and the high-viscosity liquid is improved.
  • the coating quality of the material is improved.

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Abstract

Disclosed is a high-viscosity liquid supply and discharge device (10), comprising a nozzle (1), liquid supply pipes (21, 22) and a bubble discharge pipe (3), wherein the bottom of the nozzle (1) is provided with a liquid outlet end (11), the liquid supply pipes (21, 22) are respectively connected to opposite side walls of the nozzle (1) near the liquid outlet end (11), and each of the liquid supply pipes (21, 22) has one end thereof extending into a cavity of the nozzle (1); the liquid supply pipes (21, 22) are further provided with bubble sensors (23, 24); the bubble discharge pipe (3) is arranged at the top of the nozzle (1), and the bubble discharge pipe (3) is provided with bubble discharge valves (310, 320, 330); and the bubble discharge valves (310, 320, 330) are configured to be opened to discharge bubbles when the bubble sensors (23, 24) detect that bubbles exist in the liquid supply pipes (21, 22) and/or the nozzle (1). In the supply and discharge device (10), a high-viscosity liquid flows into the nozzle (1) from the liquid supply pipes (21, 22) at the two sides of the nozzle (1), and by means of the bubble sensors (23, 24) on the liquid supply pipes (21, 22) and the bubble discharge pipe (3) connected to the nozzle (1), the high-viscosity liquid without bubbles can be discharged via the liquid outlet end (11) at the bottom of the nozzle (1).

Description

一种高粘度液体供排装置High viscosity liquid supply and discharge device
本申请要求于2017年12月26日提交中国专利局、申请号为201711442725.6、发明名称为“一种高粘度液体供排装置”的中国专利申请的优先权,上述在先申请的内容以引入的方式并入本文本中。The present application claims priority to Chinese Patent Application No. 201711442725.6, entitled "A High Viscosity Liquid Supply and Discharge Device" on December 26, 2017, the contents of which are incorporated herein by reference. The way is incorporated into this text.
技术领域Technical field
本发明涉及平板显示技术领域,尤其涉及一种高粘度液体供排装置。The invention relates to the field of flat panel display technology, in particular to a high viscosity liquid supply and discharge device.
背景技术Background technique
在平板显示领域中,例如柔性有机电致发光器件中柔性衬底的制作,以及液晶显示器中液晶取向膜或框胶的制作中,通常会用到高粘度材料的涂布(如聚酰亚胺PI)。通常高粘度材料的液体是在脱泡后由供液管路输送至狭缝喷嘴(Slit Nozzle)再喷出、涂布,一般是将供液管路设在狭缝喷嘴的上方。当高粘度材料从喷嘴的上方注入时,管路中会产生一部分气泡,且部分气泡会残留在喷嘴里的高粘度液体材料中无法排出,进而在高粘度材料涂布后固化,气泡残留会影响涂布质量,进而造成显示器件的不良。In the field of flat panel display, for example, in the fabrication of flexible substrates in flexible organic electroluminescent devices, and in the fabrication of liquid crystal alignment films or sealants in liquid crystal displays, coating of highly viscous materials (such as polyimide) is generally used. PI). Usually, the liquid of the high-viscosity material is sent to the slit nozzle (Slit Nozzle) after the defoaming, and then sprayed and coated. Generally, the liquid supply line is disposed above the slit nozzle. When a high-viscosity material is injected from above the nozzle, a part of the air bubbles will be generated in the pipeline, and some of the bubbles will not be discharged in the high-viscosity liquid material remaining in the nozzle, and then solidified after coating the high-viscosity material, and the bubble residue may be affected. The quality of the coating, which in turn causes defects in the display device.
发明内容Summary of the invention
鉴于此,本发明提供了一种高粘度液体供排装置,用于解决现有技术中脱泡后的高粘度液体在供液管路、喷嘴中易产生气泡的问题,降低该高粘度液体材料固化后气泡数量,提高涂布质量。In view of the above, the present invention provides a high-viscosity liquid supply and discharge device for solving the problem that the high-viscosity liquid after defoaming in the prior art is easy to generate bubbles in the liquid supply line and the nozzle, and the high-viscosity liquid material is lowered. The number of bubbles after curing increases the coating quality.
具体地,本发明提供了一种高粘度液体供排装置,所述供排装置包括喷嘴、供液管、排泡管,所述供液管被供给高粘度液体;所述喷嘴具有一腔体,所述喷嘴的底部设有出液端,在靠近所述出液端处的所述喷嘴的相对两侧壁分别连接有供液管,所述供液管的一端伸入至所述喷嘴的腔体内;所述供液管上还设置有气泡传感器;所述排泡管设置在所述喷嘴的顶部,所述排泡管上设有排气阀;所述排气阀用于在所述气泡传感器检测到所述供液管和/或所述喷嘴内有气泡存在时打开以排出气泡。Specifically, the present invention provides a high viscosity liquid supply and discharge device comprising a nozzle, a liquid supply pipe, a discharge pipe, the liquid supply pipe being supplied with a high viscosity liquid; the nozzle having a cavity a bottom of the nozzle is provided with a liquid discharge end, and a liquid supply pipe is respectively connected to opposite side walls of the nozzle near the liquid discharge end, and one end of the liquid supply pipe extends into the nozzle a bubble sensor is disposed on the liquid supply pipe; the bubble discharge pipe is disposed at a top of the nozzle, and the exhaust pipe is disposed on the discharge pipe; the exhaust valve is used in the The bubble sensor detects opening of the liquid supply tube and/or the presence of air bubbles in the nozzle to discharge the air bubbles.
其中,所述供液管上还均设有流量调节阀,所述流量调节阀用于调节所述供液管中的高粘度液体的流量。Wherein, the liquid supply pipe is further provided with a flow regulating valve for adjusting the flow rate of the high viscosity liquid in the liquid supply pipe.
其中,所述排气阀与所述气泡传感器均与控制模块电连接;在所述气泡传感器检测到气泡存在时,所述控制模块控制所述排气阀打开进行排气泡。Wherein, the exhaust valve and the bubble sensor are electrically connected to the control module; when the bubble sensor detects the presence of a bubble, the control module controls the exhaust valve to open to perform air bubbles.
其中,所述排泡管的数量为两个以上。Wherein, the number of the bubble discharging tubes is two or more.
其中,所述供液管距所述喷嘴与所述出液端连接处的高度为100-200mm。Wherein, the height of the liquid supply pipe from the junction of the nozzle and the liquid discharge end is 100-200 mm.
其中,沿所述喷嘴的顶部向底部的竖直方向,所述出液端的尺寸逐渐缩小。Wherein, the size of the liquid discharge end gradually decreases along the vertical direction from the top to the bottom of the nozzle.
进一步地,所述出液端的最小尺寸为0.1-0.2mm。Further, the minimum size of the liquid discharge end is 0.1-0.2 mm.
其中,所述供液管的内径为10-20mm。Wherein, the inner diameter of the liquid supply pipe is 10-20 mm.
其中,所述排泡管的内径为5-8mm。Wherein, the inner diameter of the bubble discharging tube is 5-8 mm.
其中,所述供排装置还包括储液器,所述储液器中的高粘度液体材料被供给到所述供液管中。Wherein the supply and discharge device further comprises a liquid reservoir, and the high viscosity liquid material in the liquid storage device is supplied into the liquid supply pipe.
本发明提供的高粘度液体供排装置,包括喷嘴、供液管、排泡管,所述喷嘴的底部设有出液端,并在靠近所述出液端处的喷嘴的两侧壁设有与喷嘴的腔体连通的两个供液管,高粘度液体从所述喷嘴两侧的供液管流入所述喷嘴内, 这样随着液体的流动而产生的气泡较少。同时供液管上还设置有气泡传感器;所述喷嘴的顶部设有所述排泡管,所述排泡管上设有排气阀;即使在当所述气泡传感器检测到所述供液管和/或所述喷嘴内有气泡存在时,排泡管上的排气阀打开,气泡上浮并从喷嘴上方的排泡管排出,且气泡不会被带入从喷嘴两侧流入的高粘度液体中,这样无气泡夹杂的高粘度液体从喷嘴底部的出液端排出,进而后续在进行涂布、固化后,能形成平整、光滑的膜层,提高了高粘度液体材料的涂布质量。The high viscosity liquid supply and discharge device provided by the invention comprises a nozzle, a liquid supply pipe and a discharge pipe, wherein the bottom of the nozzle is provided with a liquid discharge end, and is provided at two side walls of the nozzle near the liquid discharge end. Two liquid supply pipes communicating with the cavity of the nozzle, the high viscosity liquid flowing into the nozzle from the liquid supply pipe on both sides of the nozzle, so that less bubbles are generated as the liquid flows. At the same time, a bubble sensor is further disposed on the liquid supply pipe; the top of the nozzle is provided with the bubble discharge pipe, and the discharge pipe is provided with an exhaust valve; even when the bubble sensor detects the liquid supply pipe And/or when there is a bubble in the nozzle, the exhaust valve on the bubble discharge tube is opened, the bubble floats and is discharged from the bubble discharge tube above the nozzle, and the bubble is not carried into the high viscosity liquid flowing from both sides of the nozzle. In this way, the high-viscosity liquid with no bubble inclusions is discharged from the liquid discharge end of the bottom of the nozzle, and then after coating and curing, a smooth and smooth film layer can be formed, and the coating quality of the high-viscosity liquid material is improved.
附图说明DRAWINGS
图1为本发明实施例中高粘度液体供排装置的结构示意图。1 is a schematic view showing the structure of a high viscosity liquid supply and discharge device according to an embodiment of the present invention.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述。显然,所描述的实施例是本发明的一部分实施例,而不是全部实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都应属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described in the following with reference to the accompanying drawings. It is apparent that the described embodiments are part of the embodiments of the invention, and not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of the present invention.
如图1所示,本发明实施例提供了一种高粘度液体供排装置10,所述供排装置10包括喷嘴1、供液管、排泡管3。所述喷嘴1具有一腔体,所述喷嘴1的底部设有出液端11,在靠近所述出液端11处,所述喷嘴1的相对两侧壁上连接有两根供液管21和22(可分别称作第一供液管21,第二供液管22),这两根供液管的一端均伸入至喷嘴1的腔体内,与所述喷嘴1的腔体相连通。即,第一供液管21,第二供液管22穿过所述喷嘴1的相对两侧壁,并伸入喷 嘴1的腔体内,与所述喷嘴1的腔体相连通,且第一供液管21,第二供液管22靠近所述出液端。这两根供液管被供给了高粘度液体,这样高粘度液体从所述喷嘴1两侧的供液管流入了所述喷嘴1的腔体内,并经由喷嘴1底部的出液端11排出。As shown in FIG. 1 , an embodiment of the present invention provides a high-viscosity liquid supply and discharge device 10 , which includes a nozzle 1 , a liquid supply pipe, and a bubble discharge pipe 3 . The nozzle 1 has a cavity, and the bottom of the nozzle 1 is provided with a liquid discharge end 11 . Two liquid supply pipes 21 are connected to opposite side walls of the nozzle 1 near the liquid discharge end 11 . And 22 (which may be referred to as a first liquid supply pipe 21 and a second liquid supply pipe 22, respectively), and one end of the two liquid supply pipes extends into the cavity of the nozzle 1 to communicate with the cavity of the nozzle 1. . That is, the first liquid supply tube 21 and the second liquid supply tube 22 pass through the opposite side walls of the nozzle 1 and extend into the cavity of the nozzle 1 to communicate with the cavity of the nozzle 1 and first The liquid supply pipe 21 and the second liquid supply pipe 22 are adjacent to the liquid discharge end. The two supply pipes are supplied with a high-viscosity liquid such that the high-viscosity liquid flows into the cavity of the nozzle 1 from the liquid supply pipe on both sides of the nozzle 1, and is discharged through the liquid discharge end 11 at the bottom of the nozzle 1.
第一供液管21,第二供液管22上还均分别设置了气泡传感器23和24(可分别称作第一气泡传感器23,第二气泡传感器24),气泡传感器用于管路中气泡的检测,例如两条供液管中的气泡、与供液管连通的喷嘴1内的气泡。The first liquid supply tube 21 and the second liquid supply tube 22 are also respectively provided with bubble sensors 23 and 24 (which may be referred to as a first bubble sensor 23 and a second bubble sensor 24, respectively), and the bubble sensor is used for bubbles in the pipeline. The detection is, for example, a bubble in two liquid supply tubes, and a bubble in the nozzle 1 communicating with the liquid supply tube.
所述喷嘴1的顶部设有所述排泡管3,所述排泡管3上设有排气阀。排泡管3上的排气阀用于供液管上的气泡传感器检测到有气泡存在时,打开排泡管3上的排气阀,排出气泡。The top of the nozzle 1 is provided with the discharge tube 3, and the discharge tube 3 is provided with an exhaust valve. The exhaust valve on the bubble discharging tube 3 is used to open the exhaust valve on the bubble discharging tube 3 to discharge the air bubbles when the bubble sensor on the liquid supply tube detects the presence of air bubbles.
可以理解的是,在本发明其他实施方式中,排泡管3的数量也可以为1个、2个或3个以上。图1中,排泡管3的数量为3个,可分别称作第一排泡管31、第二排泡管32、第三排泡管33,每个排泡管上均设有对应的排气阀。即,第一排泡管31上设有第一排气阀310、第二排气阀320、第三排气阀330。It can be understood that in other embodiments of the present invention, the number of the bubble discharging tubes 3 may be one, two or three or more. In Fig. 1, the number of the discharge tubes 3 is three, which may be referred to as a first discharge tube 31, a second discharge tube 32, and a third discharge tube 33, respectively, and each of the discharge tubes is provided with a corresponding one. Vent. That is, the first exhaust pipe 31 is provided with a first exhaust valve 310, a second exhaust valve 320, and a third exhaust valve 330.
当第一供液管21上的第一气泡传感器23和第二供液管22上气泡传感器24中的至少一处检测到上述管路中有气泡存在时,就可以打开所述第一排气阀310、第二排气阀320和第三排气阀330中的至少一处进行排气泡。优选地,同时打开所有排泡管3上的排气阀,这样气泡被排出所需时间较短,气泡被包裹进高粘度液体中的概念就更小。When at least one of the first bubble sensor 23 on the first liquid supply pipe 21 and the bubble sensor 24 on the second liquid supply pipe 22 detects the presence of a bubble in the above-mentioned pipe, the first exhaust gas can be opened. At least one of the valve 310, the second exhaust valve 320, and the third exhaust valve 330 performs bubble discharge. Preferably, the exhaust valves on all of the bubble discharge tubes 3 are simultaneously opened, so that the time required for the bubbles to be discharged is shorter, and the concept that the bubbles are wrapped into the high viscosity liquid is smaller.
可选地,排泡管3上的排气阀可以是手动阀,也可以是自动阀(例如电磁阀)。优选地,第一排气阀310、第二排气阀320和第三排气阀330均为电磁阀。这样可便于一但检测到有气泡产生时,排泡管3就能排气泡,几乎无时间 延迟。Alternatively, the exhaust valve on the bubble discharging tube 3 may be a manual valve or an automatic valve (for example, a solenoid valve). Preferably, the first exhaust valve 310, the second exhaust valve 320, and the third exhaust valve 330 are both solenoid valves. This makes it easy to discharge the bubble tube 3 when there is a bubble generation, and there is almost no time delay.
在本发明实施方式中,上述第一供液管21上的第一气泡传感器23、第二供液管22上的第二气泡传感器24、排泡管3上的所有排气阀均与一控制模块(图未示出)电连接。当上述气泡传感器中的任意一个检测到有气泡存在时,该控制模块就控制排液管3上的排气阀打开、进行排气泡。In the embodiment of the present invention, the first bubble sensor 23 on the first liquid supply pipe 21, the second bubble sensor 24 on the second liquid supply pipe 22, and all the exhaust valves on the bubble discharge pipe 3 are all controlled. Modules (not shown) are electrically connected. When any one of the bubble sensors described above detects the presence of a bubble, the control module controls the exhaust valve on the drain pipe 3 to open and perform bubble discharge.
可以理解的是,该控制模块可以是控制电路主板,控制电路主板上设置中央处理器、数据存储器、解调器或转换器功能器件。It can be understood that the control module can be a control circuit board, and a central processing unit, a data memory, a demodulator or a converter function device is disposed on the control circuit board.
本发明中,第一供液管21,第二供液管22较靠近喷嘴1的底部,这样高粘度液体从喷嘴1的两侧流入时,因液体流动而产生的气流扰动较少,气泡就很少。图1中,所述第一供液管21或第二供液管22距喷嘴1底部的高度h为(即,距喷嘴1与出液端11的连接处的高度h)15-30mm。In the present invention, the first liquid supply pipe 21 and the second liquid supply pipe 22 are closer to the bottom of the nozzle 1, so that when the high-viscosity liquid flows in from both sides of the nozzle 1, the airflow generated by the liquid flow is less disturbed, and the air bubbles are Very few. In Fig. 1, the height h of the first liquid supply tube 21 or the second liquid supply tube 22 from the bottom of the nozzle 1 is 15 mm (i.e., the height h from the junction of the nozzle 1 and the liquid outlet end 11).
在本发明其他实施方式中,所述喷嘴1与出液端11的一体成型的。此时,喷嘴与出液端11的连接处可以理解为出液端11的尺寸开始缩小的起点。可选地,所述第一供液管21或第二供液管22距喷嘴1顶部的高度为100-200mm。即,所述喷嘴与排泡管3的连接处距所述第一供液管21或第二供液管22的距离为100-200mm。例如为120-180mm。In other embodiments of the invention, the nozzle 1 is integrally formed with the liquid outlet end 11. At this time, the junction of the nozzle and the liquid discharge end 11 can be understood as the starting point at which the size of the liquid discharge end 11 starts to decrease. Optionally, the height of the first liquid supply tube 21 or the second liquid supply tube 22 from the top of the nozzle 1 is 100-200 mm. That is, the distance between the nozzle and the discharge tube 3 is from the first liquid supply tube 21 or the second liquid supply tube 22 by a distance of 100 to 200 mm. For example, 120-180mm.
可选地,所述第一供液管21和第二供液管22平行设置,且处于同一水平线上。Optionally, the first liquid supply tube 21 and the second liquid supply tube 22 are disposed in parallel and on the same horizontal line.
可选地,所述述第一供液管21上设有第一流量调节阀25,第二供液管22上设有第二流量调节阀25,这两个流量调节阀用于调节对应的供液管中的高粘度液体的流量。进一步地,这两个流量调节阀均与上述控制模块电连接。Optionally, the first liquid supply pipe 21 is provided with a first flow regulating valve 25, and the second liquid supply pipe 22 is provided with a second flow regulating valve 25, wherein the two flow regulating valves are used for adjusting corresponding The flow rate of the highly viscous liquid in the supply pipe. Further, the two flow regulating valves are electrically connected to the control module.
可选地,沿所述喷嘴1的顶部向底部的竖直方向(即,自上而下的方向), 所述出液端11的尺寸逐渐缩小。本实施例中,所述出液端11(也可称为涂布端)为狭缝型,所述出液端11的出口宽度可以根据需要涂布的高粘度材料的厚度来进行调整。可选地,所述出液端11的出口宽度为0.1-0.2mm。即,自上而下的方向,所述出液端11的最小尺寸为0.1-0.2mm。Alternatively, the size of the liquid discharge end 11 is gradually reduced along the vertical direction from the top to the bottom of the nozzle 1 (i.e., from the top to the bottom). In this embodiment, the liquid discharge end 11 (also referred to as a coating end) is a slit type, and the outlet width of the liquid discharge end 11 can be adjusted according to the thickness of the high viscosity material to be applied. Optionally, the outlet end 11 has an outlet width of 0.1-0.2 mm. That is, the minimum size of the liquid discharge end 11 is 0.1 to 0.2 mm from the top to the bottom.
可选地,所述第一供液管21或第二供液管22的内径范围为10-20mm。所述排泡管3的内径范围为5-8mm。Optionally, the inner diameter of the first liquid supply tube 21 or the second liquid supply tube 22 ranges from 10 to 20 mm. The inner diameter of the bubble discharging tube 3 ranges from 5 to 8 mm.
所述供排装置10还包括储液器4,所述储液器4中储存的高粘度液体材料被供给到上述第一供液管21和第二供液管22中。进一步地,在所述储液器4的出口处还设置有输送泵5,所述储液器4中的高粘度液体材料经该输送泵5被供给至上述供液管。The supply and discharge device 10 further includes a reservoir 4 into which the high viscosity liquid material stored in the accumulator 4 is supplied. Further, a transfer pump 5 is further provided at the outlet of the accumulator 4, and the high-viscosity liquid material in the accumulator 4 is supplied to the above-described liquid supply pipe via the transfer pump 5.
本发明实施例提供的高粘度液体供排装置10中,在靠近喷嘴1底部的出液端11处,喷嘴1的两侧壁设有与喷嘴1的腔体连通的供液管,高粘度液体从所述喷嘴1两侧的供液管流入喷嘴1内,这样随着液体的流动而产生的气泡较少。同时供液管上还设置有气泡传感器;所述喷嘴的顶部设有所述排泡管3,所述排泡管3上设有排气阀;即使在当所述气泡传感器检测到所述供液管和/或所述喷嘴内有气泡存在时,排泡管3上的排气阀打开,气泡上浮并从喷嘴1上方的排泡管3排出,且气泡不会被带入从喷嘴两侧流入的高粘度液体中,这样无气泡夹杂的高粘度液体从喷嘴1底部的出液端11排出,进而后续在进行涂布、固化后,能形成平整、光滑的膜层,提高了高粘度液体材料的涂布质量。In the high viscosity liquid supply and discharge device 10 provided by the embodiment of the present invention, at the liquid discharge end 11 near the bottom of the nozzle 1, the two side walls of the nozzle 1 are provided with a liquid supply pipe communicating with the cavity of the nozzle 1, a high viscosity liquid. The liquid supply pipe from both sides of the nozzle 1 flows into the nozzle 1, so that bubbles are generated as the liquid flows. At the same time, a bubble sensor is further disposed on the liquid supply pipe; the top of the nozzle is provided with the bubble discharge pipe 3, and the discharge pipe 3 is provided with an exhaust valve; even when the bubble sensor detects the supply When there is a bubble in the liquid pipe and/or the nozzle, the exhaust valve on the bubble discharging pipe 3 is opened, the bubble floats up and is discharged from the bubble discharging pipe 3 above the nozzle 1, and the air bubbles are not carried into the both sides of the nozzle. In the high-viscosity liquid flowing in, the high-viscosity liquid with no bubble inclusions is discharged from the liquid discharge end 11 at the bottom of the nozzle 1, and then, after coating and solidification, a smooth and smooth film layer can be formed, and the high-viscosity liquid is improved. The coating quality of the material.
以上所述是本发明的优选实施方式,但并不能因此而理解为对本发明专利范围的限制。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发 明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也视为本发明的保护范围。The above is a preferred embodiment of the present invention, but it is not to be construed as limiting the scope of the invention. It should be noted that a number of modifications and refinements may be made by those skilled in the art without departing from the principles of the invention, and such modifications and refinements are also considered to be within the scope of the invention.

Claims (15)

  1. 一种高粘度液体供排装置,其中,所述供排装置包括喷嘴、供液管、排泡管,所述供液管被供给高粘度液体;所述喷嘴具有一腔体,所述喷嘴的底部设有出液端,在靠近所述出液端处的所述喷嘴的相对两侧壁分别连接有供液管,所述供液管的一端伸入至所述喷嘴的腔体内;所述供液管上还设置有气泡传感器;所述排泡管设置在所述喷嘴的顶部,所述排泡管上设有排气阀;所述排气阀用于在所述气泡传感器检测到所述供液管和/或所述喷嘴内有气泡存在时打开以排出气泡。A high-viscosity liquid supply and discharge device, wherein the supply and discharge device comprises a nozzle, a liquid supply pipe, a discharge pipe, the liquid supply pipe is supplied with a high-viscosity liquid; the nozzle has a cavity, and the nozzle has a bottom end is provided with a liquid discharge end, and a liquid supply pipe is respectively connected to opposite side walls of the nozzle near the liquid discharge end, and one end of the liquid supply pipe extends into a cavity of the nozzle; a bubble sensor is further disposed on the liquid supply pipe; the discharge pipe is disposed at a top of the nozzle, and the exhaust pipe is provided with an exhaust valve; the exhaust valve is used to detect the bubble sensor The liquid supply tube and/or the presence of air bubbles in the nozzle open to discharge air bubbles.
  2. 如权利要求1所述的供排装置,其中,所述供液管上还均设有流量调节阀,所述流量调节阀用于调节所述供液管中的高粘度液体的流量。The supply and discharge device according to claim 1, wherein said liquid supply pipe is further provided with a flow regulating valve for regulating a flow rate of the high viscosity liquid in said liquid supply pipe.
  3. 如权利要求2所述的供排装置,其中,所述供液管对称连接在所述喷嘴的相对两侧壁上。The supply and discharge device according to claim 2, wherein said liquid supply pipe is symmetrically coupled to opposite side walls of said nozzle.
  4. 如权利要求1所述的供排装置,其中,所述排气阀和所述气泡传感器均与控制模块电连接;在所述气泡传感器检测到气泡存在时,所述控制模块控制所述排气阀打开进行排气泡。The supply and discharge device according to claim 1, wherein said exhaust valve and said bubble sensor are electrically connected to a control module; said control module controls said exhaust gas when said bubble sensor detects the presence of a bubble The valve opens to bubble out.
  5. 如权利要求1所述的供排装置,其中,所述排泡管的数量为两个以上,每个排泡管上均设有对应的排气阀。The supply and discharge device according to claim 1, wherein the number of the discharge tubes is two or more, and each of the discharge tubes is provided with a corresponding exhaust valve.
  6. 如权利要求1所述的供排装置,其中,所述供液管距所述喷嘴与所述出液端的连接处的高度为15-30mm。The supply and discharge device according to claim 1, wherein a height of the liquid supply pipe from the junction of the nozzle and the liquid discharge end is 15 to 30 mm.
  7. 如权利要求1所述的供排装置,其中,所述喷嘴与排泡管的连接处距所述供液管的距离为100-200mm。The supply and discharge device according to claim 1, wherein a distance between the nozzle and the discharge tube is from 100 to 200 mm from the liquid supply tube.
  8. 如权利要求1所述的供排装置,其中,沿所述喷嘴的顶部向底部的竖直方向,所述出液端的尺寸逐渐缩小。The supply and discharge device according to claim 1, wherein the size of the liquid discharge end is gradually reduced in a vertical direction from the top to the bottom of the nozzle.
  9. 如权利要求8所述的供排装置,其中,所述出液端的最小尺寸为0.1-0.2mm。The supply and discharge device according to claim 8, wherein said liquid discharge end has a minimum size of 0.1 to 0.2 mm.
  10. 如权利要求5所述的供排装置,其中,所述排泡管的数量为三个。The supply and discharge device according to claim 5, wherein the number of the discharge tubes is three.
  11. 如权利要求1所述的供排装置,其中,所述排气阀为电磁阀。The supply and discharge device according to claim 1, wherein the exhaust valve is a solenoid valve.
  12. 如权利要求1所述的供排装置,其中,所述供液管的内径为10-20mm。The supply and discharge device according to claim 1, wherein the liquid supply tube has an inner diameter of 10 to 20 mm.
  13. 如权利要求1所述的供排装置,其中,所述排泡管的内径为5-8mm。The supply and discharge device according to claim 1, wherein the discharge tube has an inner diameter of 5 to 8 mm.
  14. 如权利要求1所述的供排装置,其中,所述供排装置还包括储液器,所述储液器中的高粘度液体材料被供给到所述供液管中。The supply and discharge device according to claim 1, wherein said supply and discharge device further comprises an accumulator, and a high-viscosity liquid material in said accumulator is supplied into said liquid supply pipe.
  15. 如权利要求1所述的供排装置,其中,所述控制模块为控制电路主板,所述控制电路主板上设置中央处理器、数据存储器、解调器或转换器功能器件。The supply and discharge device according to claim 1, wherein the control module is a control circuit main board, and a central processing unit, a data memory, a demodulator or a converter function device is disposed on the main circuit of the control circuit.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113042308A (en) * 2020-12-11 2021-06-29 苏州特瑞特机器人有限公司 Two-component glue dispensing device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111434390B (en) * 2019-09-29 2021-09-24 杭州纤纳光电科技有限公司 Slit type coating device
CN111290178B (en) * 2020-02-25 2022-08-05 深圳市华星光电半导体显示技术有限公司 Liquid crystal dripping device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050068383A1 (en) * 2003-09-26 2005-03-31 Olympus Corporation Liquid supply apparatus
CN201339817Y (en) * 2009-02-05 2009-11-04 和舰科技(苏州)有限公司 Liquid detecting system in pipeline
CN203178635U (en) * 2013-04-27 2013-09-04 北京京东方光电科技有限公司 Spray device
CN203861966U (en) * 2014-04-29 2014-10-08 爱克发(无锡)印版有限公司 Degasser for dissolved gas in coating solution
CN104345504A (en) * 2014-10-09 2015-02-11 合肥鑫晟光电科技有限公司 Ink spraying type liquid crystal coating machine and exhaust method for nozzle of coating machine
CN104971522A (en) * 2014-04-11 2015-10-14 沈阳芯源微电子设备有限公司 Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100780718B1 (en) * 2004-12-28 2007-12-26 엘지.필립스 엘시디 주식회사 Slit coater having apparatus of supplying coating fluid
US20140322449A1 (en) * 2013-04-25 2014-10-30 Shenzhen China Star Optoelectronics Technology Co., Ltd. Photoresist Coating Device and Coating Method Thereof
KR101607521B1 (en) * 2014-07-08 2016-03-31 세메스 주식회사 Apparatus and Method for treating substrate
US20160038957A1 (en) * 2014-08-06 2016-02-11 Illinois Tool Works Inc. Remote bulk feed system for a dispensing system and method of supplying viscous material to a dispensing system
CN106004044B (en) * 2016-05-11 2017-12-22 京东方科技集团股份有限公司 Ink measuring system and printing device
CN206345266U (en) * 2016-11-29 2017-07-21 合肥通富微电子有限公司 Gas extraction system and its buffer storage for discharging bubble in liquid material
CN206567175U (en) * 2017-01-11 2017-10-20 钱春 A kind of dynamic vacuum adjustment quantitative glue feeder and system
CN106938222B (en) * 2017-02-09 2019-03-22 武汉华星光电技术有限公司 A kind of light blockage coating device and nozzle

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050068383A1 (en) * 2003-09-26 2005-03-31 Olympus Corporation Liquid supply apparatus
CN201339817Y (en) * 2009-02-05 2009-11-04 和舰科技(苏州)有限公司 Liquid detecting system in pipeline
CN203178635U (en) * 2013-04-27 2013-09-04 北京京东方光电科技有限公司 Spray device
CN104971522A (en) * 2014-04-11 2015-10-14 沈阳芯源微电子设备有限公司 Fluid bubble removal apparatus in semiconductor treatment system and bubble removal method thereof
CN203861966U (en) * 2014-04-29 2014-10-08 爱克发(无锡)印版有限公司 Degasser for dissolved gas in coating solution
CN104345504A (en) * 2014-10-09 2015-02-11 合肥鑫晟光电科技有限公司 Ink spraying type liquid crystal coating machine and exhaust method for nozzle of coating machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113042308A (en) * 2020-12-11 2021-06-29 苏州特瑞特机器人有限公司 Two-component glue dispensing device

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