WO2019085505A1 - 一种高真空用磁流体密封装置 - Google Patents

一种高真空用磁流体密封装置 Download PDF

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WO2019085505A1
WO2019085505A1 PCT/CN2018/091918 CN2018091918W WO2019085505A1 WO 2019085505 A1 WO2019085505 A1 WO 2019085505A1 CN 2018091918 W CN2018091918 W CN 2018091918W WO 2019085505 A1 WO2019085505 A1 WO 2019085505A1
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shaft
pole piece
magnetic fluid
gap
pole
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PCT/CN2018/091918
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English (en)
French (fr)
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杨小龙
陈帆
谢国进
孙彭
郝付详
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广西科技大学
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Publication of WO2019085505A1 publication Critical patent/WO2019085505A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force

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  • the invention belongs to the field of mechanical engineering sealing, and particularly relates to a magnetic fluid sealing device for high vacuum.
  • One of the methods for improving the pressure resistance of magnetic fluid seals in a high vacuum environment is by improving the magnetic fluid seal structure, such as the seal device described in Comparative Document 1 (patent number CN204805552U) and Comparative Document 2 (publication number CN104948744A).
  • the sealing device described in the patent can meet the requirements of vacuum equipment in an ordinary vacuum environment, its sealing performance cannot meet the requirements of high vacuum condition and high sealing reliability.
  • the magnetic fluid seal uses a permanent magnet to generate a magnetic field force in the seal gap to firmly fix the magnetic fluid in the seal gap, and resists the pressure difference between the two sides, thereby achieving the sealing effect.
  • the object of the present invention is to provide a magnetic fluid sealing device for high vacuum, thereby solving the problems of low pressure resistance and the like of the prior sealing device, and the sealing technology is successfully applied in the field of high vacuum and the like.
  • the high vacuum magnetic fluid sealing device comprises a stepped shaft, a casing, a left pole piece, a right pole piece, a permanent magnet ring, and the stepped shaft is set in the outer casing;
  • the stepped shaft includes a middle shaft having a largest diameter and a plurality of sets of secondary shafts having a diameter decreasing in sequence, wherein the secondary shaft is arranged along a side surface of the intermediate shaft, and is symmetrical with a middle radial section of the intermediate shaft as a boundary;
  • a permanent magnet ring is disposed on the inner wall of the outer casing corresponding to the outer circular surface of the intermediate shaft, and a gap is left between the permanent magnet ring and the outer circular outer surface of the intermediate shaft; the left pole shoe and the right pole shoe respectively.
  • the left pole shoe and the right pole shoe are symmetric with each other on the two sides of the permanent magnet ring; the end faces and the ring faces of the left pole shoe and the right pole shoe correspond to the outer and outer faces of the intermediate shaft and the secondary shaft respectively.
  • the end surface of the intermediate shaft, and the outer and outer surfaces of the secondary shaft are respectively provided with pole teeth extending in the radial direction or the axial direction, and the pole teeth are corresponding to the left pole piece and the right pole piece A gap is left between the end face and the annulus, and the magnetic fluid is located in the gap.
  • the number of said secondary shafts is a group.
  • the secondary shaft includes a secondary shaft and a tertiary shaft.
  • the left and right sides of the intermediate shaft are respectively provided with a secondary shaft and a tertiary shaft, and the diameters of the intermediate shaft, the secondary shaft and the third shaft are respectively arranged. Decrease in turn;
  • the left pole shoe and the right pole shoe are respectively provided with a toroidal surface I, an end surface I, a toroidal surface II, an end surface II, and a toroidal surface III;
  • the torus I corresponds to the outer circular surface of the tertiary shaft, and a gap is left between the annular surface I and the tertiary shaft; the outer circumference of the tertiary shaft is provided with a pole tooth I The pole tooth I extends radially to the toroidal surface I, leaving a gap between the toroidal surface I and the magnetic fluid is placed in the gap;
  • the end surface I corresponds to an end surface of the secondary shaft
  • the toroidal surface II corresponds to an outer circular surface of the secondary shaft
  • the end surface of the secondary shaft is provided with a pole tooth II
  • II extends axially toward the end surface I, leaving a gap between the end surface I and the magnetic fluid is placed in the gap
  • the outer circular surface of the secondary shaft is provided with a pole tooth III, and the pole tooth III Radially extending toward the toroidal surface II, leaving a gap with the toroidal surface II, in which magnetic fluid is placed;
  • the end face II corresponds to the end face of the intermediate shaft, and the annular face III corresponds to the outer circular face of the intermediate shaft; the end face of the intermediate shaft is provided with a pole tooth IV, and the pole tooth IV
  • the axial direction extends toward the end surface II, and a gap is left between the end surface II and the magnetic fluid is placed in the gap; a gap is left between the outer circular surface of the intermediate shaft and the annular surface III.
  • the secondary shaft further includes a three-tenth-order shaft whose diameter decreases successively, and the left pole shoe and the right pole shoe are correspondingly arranged; the third-third shaft upper pole tooth is arranged corresponding to the left pole shoe and the right pole shoe.
  • the pole teeth I, the pole teeth II, the pole teeth III, and the pole teeth IV are respectively composed of ⁇ pole teeth arranged at intervals.
  • the high vacuum magnetic fluid sealing device further includes a left magnetic isolation ring and a right magnetic isolation ring; the left magnetic isolation ring is disposed on the left side of the left pole piece, and is disposed close to the inner wall of the outer casing; The magnetic isolation ring is arranged on the left side of the right pole piece and is placed close to the inner wall of the outer casing.
  • the magnetic fluid sealing device for high vacuum further comprises a left bearing and a right bearing, wherein the left bearing is disposed on the left side of the left magnetic isolation ring and is disposed on the stepped shaft; the right bearing is disposed on the right magnetic isolation On the right side of the ring, fit on the stepped shaft.
  • the outer circular surfaces of the left pole piece and the right pole piece are respectively provided with a groove, and the groove is provided with a sealing ring.
  • the invention designs a stepped shaft and a stepped pole piece, opens axial and radial distributed pole teeth on the stepped shaft, and injects magnetic fluid into the radial and axial sealing gap formed by the pole piece and the stepped shaft.
  • a multi-directional combined three-dimensional seal is formed, thereby realizing a magnetic fluid seal for high vacuum, which can well cope with the magnetic fluid seal under high vacuum conditions.
  • the stepped shaft and the pole shoe and the pole tooth arrangement structure of the preferred embodiment of the present invention can better realize the technical effect of the multi-directional combined stereo seal, and can realize the effective use of the permanent magnet magnetic lines, and only a set of permanent magnets is needed. , it can achieve a very good high vacuum sealing effect, and the cost is lower.
  • the invention overcomes the problem that the existing sealing device can not achieve the sealing performance requirement of special working conditions such as high vacuum, and the sealing device not only saves manufacturing cost, reduces processing difficulty, and greatly reduces the loss of magnetic fluid in the case of sealing failure, The pressure resistance and sealing reliability of the magnetic fluid seal for high vacuum are further improved, and the safe working range is expanded.
  • Figure 1 is a schematic structural view of a sealing device according to the present invention.
  • the magnetic fluid sealing device for high vacuum comprises a stepped shaft 1, a casing 2, a left pole piece 3, a right pole piece 4, and a permanent magnet ring 5, and the stepped shaft 1 is set on the outer casing 2. within;
  • the stepped shaft 1 includes an intermediate shaft 101 having the largest diameter and a plurality of sets of secondary shafts whose diameters are sequentially decreased.
  • the secondary shafts are arranged along the side of the intermediate shaft 101, and the intermediate radial section of the intermediate shaft 101 is The boundary is symmetrical;
  • the inner wall of the outer casing 2 is provided with a permanent magnet ring 5 at a position corresponding to the outer circular surface of the intermediate shaft 101, and a gap is left between the permanent magnet ring 5 and the outer circular surface of the intermediate shaft 101; the left pole piece is 3.
  • the right pole piece 4 is respectively disposed on both sides of the permanent magnet ring 5, and the left pole piece 3 and the right pole piece 4 are symmetrical to each other; the end face and the ring face of the left pole piece 3 and the right pole piece 4 and the intermediate axis respectively
  • the outer surface and the end surface of the secondary shaft correspond to each other; the end surface of the intermediate shaft 101, and the outer and outer surfaces of the secondary shaft are respectively provided with pole teeth extending in the radial direction or the axial direction, A gap is left between the pole teeth and the corresponding left pole piece 3, the end face and the ring face on the right pole piece 4, and the magnetic fluid is located in the gap.
  • the number of secondary shafts is 2-10 sets.
  • the secondary shaft includes a secondary shaft 102 and a tertiary shaft 103.
  • the secondary shaft 102 and the tertiary shaft 103 are sequentially disposed on the left and right sides of the intermediate shaft 101, and the intermediate shaft 101 and the secondary shaft are respectively arranged. 102.
  • the diameter of the third-stage shaft 103 is sequentially decreased;
  • the left pole piece 3 and the right pole piece 4 are respectively provided with a toroidal surface I6, an end surface I7, a toroidal surface II8, an end surface II9, a toroidal surface III10;
  • the annular surface I6 corresponds to the outer circular surface of the tertiary shaft 103, and a gap is left between the annular surface I6 and the tertiary shaft 103; the outer circular surface of the tertiary shaft 103 is provided. a pole tooth I11; the pole tooth I11 extends radially to the annular surface I6, leaving a gap with the annular surface I6, magnetic fluid is placed in the gap;
  • the end surface I7 corresponds to the end surface of the secondary shaft 102
  • the annular surface II8 corresponds to the outer circular surface of the secondary shaft 102
  • the end surface of the secondary shaft 102 is provided with a pole tooth II12
  • the pole tooth II12 extends axially toward the end surface I7, leaving a gap between the end surface I7, and the magnetic fluid is placed in the gap
  • the outer circular surface of the secondary shaft 102 is provided with a pole tooth III13,
  • the pole tooth III13 extends radially to the annular surface II8, leaving a gap between the pole surface II8 and the magnetic fluid is placed in the gap;
  • the end surface II9 corresponds to the end surface of the intermediate shaft 101
  • the annular surface III10 corresponds to the outer circular surface of the intermediate shaft 101
  • the end surface of the intermediate shaft 101 is provided with a pole tooth IV14, the pole The tooth IV14 extends in the axial direction toward the end surface II9, leaving a gap between the end surface II9, and the magnetic fluid is placed in the gap; a gap is left between the outer circular surface of the intermediate shaft 101 and the annular surface III10.
  • the secondary shaft further includes a three-tenth-order shaft whose diameter decreases successively, and the left pole piece 3 and the right pole piece 4 are correspondingly disposed; the third-ten stage shaft upper teeth correspond to the left pole piece 3 and the right pole piece 4
  • the manner of setting is the same as that of claim 3.
  • the pole teeth I11, the pole teeth II12, the pole teeth III13, and the pole teeth IV14 are respectively composed of 1 to 10 pole teeth arranged at intervals.
  • the magnetic fluid sealing device for high vacuum further includes a left magnetic isolation ring 15 and a right magnetic isolation ring 16; the left magnetic isolation ring 15 is disposed on the left side of the left pole piece 3, and is disposed close to the inner wall of the outer casing 2.
  • the right magnetic isolation ring 16 is disposed on the left side of the right pole piece 4, and is disposed close to the inner wall of the outer casing 2.
  • the magnetic fluid sealing device for high vacuum further comprises a left bearing 17 and a right bearing 18, wherein the left bearing 17 is disposed on the left side of the left magnetic isolation ring 15 and is fitted on the stepped shaft 1; the right bearing 18 is disposed on the right side of the right magnetic isolation ring 16 and is set on the stepped shaft 1.
  • the outer circular surfaces of the left pole piece 3 and the right pole piece 4 are respectively provided with a groove 19, and the groove 19 is provided with a sealing ring 20.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Abstract

一种高真空用磁流体密封装置，包括阶梯轴（1）、外壳（2）、左极靴（3）、右极靴（4）、永磁体环（5）；所述的阶梯轴（1）包括直径最大的中间轴（101）和直径依次减小的多组次级轴；所述的外壳（21）的内壁上对应中间轴（101）外圆面的位置设置有永磁体环（5）；所述的左极靴（3）、右极靴（4）分别设于永磁体环（5）两侧，左极靴（3）、右极靴（4）相互对称；所述的左极靴（3）、右极靴（4）的端面和环面与分别与中间轴（101）和次级轴的外圆面和端面向对应；所述的中间轴（101）的端面，以及次级轴的外圆面和端面上分别设有沿径向或者轴向延伸的极齿，所述极齿与对应的左极靴（3）、右极靴（4）上的端面和环面之间留有间隙，磁流体位于该间隙内。高真空用磁流体密封装置能够解决现有密封装置存在的耐压性能较低的难题。

Description

一种高真空用磁流体密封装置 技术领域
本发明属于机械工程密封领域，具体涉及一种高真空用磁流体密封装置。
背景技术
当磁性流体密封技术应用在高真空环境中，普通磁流体密封结构的不合理设计往往导致密封的失效，因此提高高真空工况下磁性流体密封的耐压性能是当前研究的热点问题之一。
提高高真空环境下磁性流体密封耐压性能的方法之一是通过改进磁性流体密封结构，如对比文献1(公开号为CN204805552U的专利)所述的密封装置和对比文献2(公开号为CN104948744A的专利)所述的密封装置。尽管现有的密封结构能够满足普通真空环境中真空设备的需求，但其密封性能达不到高真空工况高较高密封可靠性要求。
磁流体密封是利用永磁体在密封间隙内产生磁场力将磁流体牢牢固定在密封间隙内，抵抗两侧的压差，从而达到密封的效果。
发明内容
本发明的目的是提供一种高真空用磁流体密封装置，从而解决现有密封装置存在的耐压性能较低等难题，使得该密封技术成功应用于高真空等领域中。
本发明的技术方案如下：
所述的高真空用磁流体密封装置，包括阶梯轴、外壳、左极靴、右极靴、永磁体环，所述的阶梯轴套装于外壳之内；
所述的阶梯轴包括直径最大的中间轴和直径依次减小的多组次级轴，所述的次级轴沿中间轴的侧面排布，以中间轴的中间径向截面为分界左右对称；
所述的外壳的内壁上对应中间轴外圆面的位置设置有永磁体环，所述的永磁体环与中间轴外圆面之间留有空隙；所述的左极靴、右极靴分别设于永磁体环两侧，左极靴、右极靴相互对称；所述的左极靴、右极靴的端面和环面与分别与中间轴和次级轴的外圆面和端面向对应；所述的中间轴的端面，以及次级轴的外圆面和端面上分别设有沿径向或者轴向延伸的极齿，所述的极齿与对应的左极靴、右极靴上的端面和环面之间留有间隙，磁流体位于该间隙内。
所述的次级轴的数量为-组。
所述的次级轴包括二级轴和三级轴，所述的中间轴的左右两侧分别依次设置二级轴和三级轴，所述的中间轴、二级轴、三级轴的直径依次减小；
所述的左极靴和右极靴上分别设有圆环面I、端面I、圆环面II、端面II、圆环面III；
所述的圆环面I与三级轴的外圆面相对应，所述的圆环面I与三级轴之间留有空隙；所述的三级轴的外圆面上设有极齿I；所述的极齿I沿径向向圆环面I延伸，与圆环面I之间留有间隙，磁流体置于该间隙中；
所述的端面I与二级轴的端面相对应，所述的圆环面II与二级轴的外圆面相对应；所述的二级轴的端面设有极齿II；所述的极齿II沿轴向向端面I延伸，与端面I之间留有间隙，磁流体置于该间隙中；所述的二级轴的外圆面上设有极齿III，所述的极齿III沿径向向圆环面II延伸，与圆环面II之间留有间隙，磁流体置于该间隙中；
所述的端面II与中间轴的端面相对应，所述的圆环面III与中间轴的外圆面相对应；所述的中间轴的端面上设有极齿Ⅳ，所述的极齿Ⅳ沿轴向向端面II延伸，与端面II之间留有间隙，磁流体置于该间隙中；所述的中间轴的的外圆面与圆环面III之间留有空隙。
所述的次级轴还包括直径依次递减的三-十级轴，左极靴和右极靴对应设置；三-十级轴上极齿与左极靴和右极靴相对应的设置方式与权利要求的方式一致。
所述的极齿I、极齿II、极齿III、极齿Ⅳ分别由间隔设置的～个极齿组成。
所述的高真空用磁流体密封装置，还包括左隔磁环和右隔磁环；所述的左隔磁环设于左极靴的左侧，紧贴外壳的内壁设置；所述的右隔磁环设于右极靴的左侧，紧贴外壳的内壁设置.
所述的高真空用磁流体密封装置，还包括左轴承和右轴承，所述的左轴承设于左隔磁环的左侧，套装于阶梯轴上；所述的右轴承设于右隔磁环的右侧，套装于阶梯轴上。
所述的左极靴和右极靴的外圆面上分别设有凹槽，所述的凹槽设有密封圈。
本发明通过设计一种阶梯式转轴和阶梯式极靴，在阶梯轴上开设轴向和径向分布的极齿，并在极靴与阶梯轴形成的径向和轴向密封间隙内注入磁流体，从而形成一种多方位的组合式立体密封，从而实现一种高真空用磁流体密封，能够很好的应对高真空度情况下的磁流体密封。
本发明优选方案的阶梯轴和极靴、极齿的设置结构，能够更好的实现多方位的组合式立体密封的技术效果，并且能够实现对永磁体磁力线的有效利用，只需要一组永磁体，就能够实现很好的高真空密封效果，成本更低。
本发明克服现有密封装置无法实现高真空等特殊工况密封性能要求的难题，采用该密封装置，不仅节约了制造成本，减少了加工难度，大大减少了在密封失效时磁性流体的损失，还进一步提高了高真空用磁性流体密封的耐压能力和密封可靠性，扩大了其安全工作范围。
附图说明
图1为本发明所述的密封装置的结构示意图；
图中各序号标示及对应的名称如下：
1-阶梯轴1，2-外壳，3-左极靴，4-右极靴，5-永磁体环，6-圆环面I，7-端面I，8-圆环面II，9-端面II，10-圆环面III，11-极齿I，12-极齿II，13-极齿III，14-极齿Ⅳ，15-左隔磁环，16-右隔磁环，17-左轴承，18-右轴承，19-凹槽19，20-密封圈。
101-中间轴，102-二级轴，103-三级轴。
具体实施方式
下面结合附图对本发明作进一步说明。
如图1所示,所述的高真空用磁流体密封装置，包括阶梯轴1、外壳2、左极靴3、右极靴4、永磁体环5，所述的阶梯轴1套装于外壳2之内；
所述的阶梯轴1包括直径最大的中间轴101和直径依次减小的多组次级轴，所述的次级轴沿中间轴101的侧面排布，以中间轴101的中间径向截面为分界左右对称；
所述的外壳2的内壁上对应中间轴101外圆面的位置设置有永磁体环5，所述的永磁体环5与中间轴101外圆面之间留有空隙；所述的左极靴3、右极靴4分别设于永磁体环5两侧，左极靴3、右极靴4相互对称；所述的左极靴3、右极靴4的端面和环面与分别与中间轴101和次级轴的外圆面和端面向对应；所述的中间轴101的端面，以及次级轴的外圆面和端面上分别设有沿径向或者轴向延伸的极齿，所述的极齿与对应的左极靴3、右极靴4上的端面和环面之间留有间隙，磁流体位于该间隙内。
所述的次级轴的数量为2-10组。
所述的次级轴包括二级轴102和三级轴103，所述的中间轴101的左右两侧分别依次设置二级轴102和三级轴103，所述的中间轴101、二级轴102、三级轴103的直径依次减小；
所述的左极靴3和右极靴4上分别设有圆环面I6、端面I7、圆环面II8、端面II9、圆环面III10；
所述的圆环面I6与三级轴103的外圆面相对应，所述的圆环面I6与三级轴103之间留有空隙；所述的三级轴103的外圆面上设有极齿I11；所述的极齿I11沿径向向圆环面I6延伸，与圆环面I6之间留有间隙，磁流体置于该间隙中；
所述的端面I7与二级轴102的端面相对应，所述的圆环面II8与二级轴102的外圆面相对应；所述的二级轴102的端面设有极齿II12；所述的极齿II12沿轴向向端面I7延伸，与端面I7之间留有间隙，磁流体置于该间隙中；所述的二级轴102的外圆面上设有极齿III13，所述的极齿III13沿径向向圆环面II8延伸，与圆环面II8之间留有间隙，磁流体置于该间隙中；
所述的端面II9与中间轴101的端面相对应，所述的圆环面III10与中间轴101的外圆面相对应；所述的中间轴101的端面上设有极齿Ⅳ14，所述的极齿Ⅳ14沿轴向向端面II9延伸，与端面II9之间留有间隙，磁流体置于该间隙中；所述的中间轴101的的外圆面与圆环面III10之间留有空隙。
所述的次级轴还包括直径依次递减的三-十级轴，左极靴3和右极靴4对应设置；三-十级轴上极齿与左极靴3和右极靴4相对应的设置方式与权利要求3的方式一致。
所述的极齿I11、极齿II12、极齿III13、极齿Ⅳ14分别由间隔设置的1～10个极齿组成。
所述的高真空用磁流体密封装置，还包括左隔磁环15和右隔磁环16；所述的左隔磁环15设于左极靴3的左侧，紧贴外壳2的内壁设置；所述的右隔磁环16设于右极靴4的左侧，紧贴外壳2的内壁设置.
所述的高真空用磁流体密封装置，还包括左轴承17和右轴承18，所述的左轴承17设于左隔磁环15的左侧，套装于阶梯轴1上；所述的右轴承18设于右隔磁环16的右侧，套装于阶梯轴1上。
所述的左极靴3和右极靴4的外圆面上分别设有凹槽19，所述的凹槽19设有密封圈20。
。

Claims (9)

  1. 一种高真空用磁流体密封装置，包括阶梯轴(1)、外壳(2)、左极靴(3)、右极靴(4)、永磁体环(5)，所述的阶梯轴(1)套装于外壳(2)之内，其特征在于：
    所述的阶梯轴(1)包括直径最大的中间轴(101)和直径依次减小的多组次级轴，所述的次级轴沿中间轴(101)的侧面排布，以中间轴(101)的中间径向截面为分界左右对称；
    所述的外壳(2)的内壁上对应中间轴(101)外圆面的位置设置有永磁体环(5)，所述的永磁体环(5)与中间轴(101)的外圆面之间留有空隙；所述的左极靴(3)、右极靴(4)分别设于永磁体环(5)两侧，左极靴(3)、右极靴(4)相互对称；所述的左极靴(3)、右极靴(4)的端面和环面分别与中间轴(101)或次级轴的外圆面和端面相对应；所述的中间轴(101)的端面，以及次级轴的外圆面和端面上分别设有沿径向或者轴向延伸的极齿，所述的极齿与对应的左极靴(3)、右极靴(4)上的端面和环面之间留有间隙，磁流体位于该间隙内。
  2. 如权利要求1所述的高真空用磁流体密封装置，其特征在于：所述的次级轴的数量为2-10组。
  3. 如权利要求1所述的高真空用磁流体密封装置，其特征在于：
    所述的次级轴包括二级轴(102)和三级轴(103)，所述的中间轴(101)的左右两侧分别依次设置二级轴(102)和三级轴(103)，所述的中间轴(101)、二级轴(102)、三级轴(103)的直径依次减小；
    所述的左极靴(3)和右极靴(4)上分别设有圆环面I(6)、端面I(7)、圆环面II(8)、端面II(9)、圆环面III(10)；
    所述的圆环面I(6)与三级轴(103)的外圆面相对应，所述的圆环面I(6)与三级轴(103)之间留有空隙；所述的三级轴(103)的外圆面上设有极齿I(11)；所述的极齿I(11)沿径向向圆环面I(6)延伸，与圆环面I(6)之间留有间隙，磁流体置于该间隙中；
    所述的端面I(7)与二级轴(102)的端面相对应，所述的圆环面II(8)与二级轴(102)的外圆面相对应；所述的二级轴(102)的端面设有极齿II(12)；所述的极齿II(12)沿轴向向端面I(7)延伸，与端面I(7)之间留有间隙，磁流体置于该间隙中；所述的二级轴(102)的外圆面上设有极齿III(13)，所述的极齿III(13)沿径向向圆环面II(8)延伸，与圆环面II(8)之间留有间隙，磁流体置于该间隙中；
    所述的端面II(9)与中间轴(101)的端面相对应，所述的圆环面III(10)与中间轴(101)的外圆面相对应；所述的中间轴(101)的端面上设有极齿Ⅳ(14)，所述的极齿 Ⅳ(14)沿轴向向端面II(9)延伸，与端面II(9))之间留有间隙，磁流体置于该间隙中；所述的中间轴(101)的的外圆面与圆环面III(10)之间留有空隙。
  4. 如权利要求3所述的高真空用磁流体密封装置，其特征在于：所述的次级轴还包括直径依次递减的三-十级轴，左极靴(3)和右极靴(4)对应设置；三-十级轴上极齿与左极靴(3)和右极靴(4)相对应的设置方式与权利要求3的方式一致。
  5. 如权利要求3所述的高真空用磁流体密封装置，其特征在于：所述的极齿I(11)、极齿II(12)、极齿III(13)、极齿Ⅳ(14)分别由间隔设置的3-5个极齿组成。
  6. 如权利要求3所述的高真空用磁流体密封装置，其特征在于：还包括左隔磁环(15)和右隔磁环(16)；所述的左隔磁环(15)设于左极靴(3)的左侧，紧贴外壳(2)的内壁设置；所述的右隔磁环(16)设于右极靴(4)的左侧，紧贴外壳(2)的内壁设置.
  7. 如权利要求6所述的高真空用磁流体密封装置，其特征在于：还包括左轴承(17)和右轴承(18)，所述的左轴承(17)设于左隔磁环(15)的左侧，套装于阶梯轴(1)上；所述的右轴承(18)设于右隔磁环(16)的右侧，套装于阶梯轴(1)上。
  8. 如权利要求1所述的高真空用磁流体密封装置，其特征在于：所述的左极靴(3)和右极靴(4)的外圆面上分别设有凹槽(19)，所述的凹槽(19)设有密封圈(20)。
  9. 如权利要求5所述的高真空用磁流体密封装置，其特征在于：还包括左隔磁环(15)和右隔磁环(16)；所述的左隔磁环(15)设于左极靴(3)的左侧，紧贴外壳(2)的内壁设置；所述的右隔磁环(16)设于右极靴(4)的左侧，紧贴外壳(2)的内壁设置.
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CN108266534A (zh) * 2018-02-11 2018-07-10 广西科技大学 一种单磁源磁流体密封结构
CN109027252B (zh) * 2018-09-03 2020-03-10 广西科技大学 一种分叉式磁流体密封装置
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