WO2019065418A1

WO2019065418A1 - Sampling device

Info

Publication number: WO2019065418A1
Application number: PCT/JP2018/034663
Authority: WO
Inventors: 明威田村
Original assignee: 東京エレクトロン株式会社
Priority date: 2017-09-29
Filing date: 2018-09-19
Publication date: 2019-04-04

Abstract

In order to enable the reliable collection of particles in a suctioned gas and prevent the discharge of water mist, this sampling device (10) is provided with a container (21), air intake holes (33) provided in the container (21), and an exhaust pipe (24). The air intake holes (33) extend downward with respect to an orthogonal surface (21B) that is orthogonal to the axial line (21A) of the container (21). A spiral flow of a gas and a liquid is formed inside the container (21) by exhausting the gas from the exhaust pipe (24), and a liquid film (40) is formed inside the container (21). An opening (33a) of each of the air intake holes (33) opens in a region other than the liquid film (40), and the suctioned gas is jetted from the air intake holes (33) toward the liquid film (40).

Description

Sampling device

The present disclosure relates to a sampling device that collects particles in a gas using a liquid film.

Conventionally, a sampling device provided with a container forming a cylindrical space is known. In this sampling device, particles in the intake gas are attached to the liquid film and collected (see Patent Document 1).

However, when the intake holes are opened in the vicinity of the liquid film, there is a problem that mist is generated from the liquid film by the intake gas, and this mist is released from the exhaust pipe to lower the collection efficiency. On the other hand, if the inspiratory gas from the inspiratory holes strikes a portion where the liquid film separated from the liquid film is not formed, particles in the inspiratory gas can not be reliably collected by the water film.

JP 2006-526401

The present disclosure has been made in consideration of such points, and it is an object of the present disclosure to provide a sampling device capable of reliably collecting particles in inhaled gas and in which mist is not released. .

The present disclosure relates to a sampling apparatus for collecting particles in a gas with a liquid, comprising: an upper end, a lower end, and a side wall extending between the upper end and the lower end, the rotational symmetric body having a central axis A container forming a space therein, an opening provided in the container, having an opening opening in the container, and an intake hole for taking in gas containing particles, and an exhaust pipe provided in the container And wherein the air inlet is inclined toward an orthogonal plane orthogonal to the central axis of the container and extends into the space.

According to the present disclosure, when the gas in the space of the container is exhausted by the exhaust pipe, the gas containing particles enters the space of the container from the air inlet, and the spiral flow of gas and liquid is generated in the space of the container. It is a sampling device which forms and forms a liquid film in the side wall inner surface.

The present disclosure is a sampling device in which the entire opening of the intake hole opens to a region other than the liquid film, and the gas sucked by the intake hole is ejected to the liquid film.

The present disclosure is a sampling device in which an exhaust mechanism is connected to the exhaust pipe.

The present disclosure is a sampling device, wherein the air inlet is provided at the upper end of the container.

The present disclosure is a sampling device, wherein the liquid film is formed to extend upward from the lower end of the container.

The present disclosure is a sampling device, wherein the container is provided with a plurality of intake holes.

The present disclosure is a sampling device in which the air intake hole is provided at the upper end of the container, and an opening thereof opens in the space of the container.

The present disclosure is a sampling device, wherein the intake hole is provided at the upper end of the container and has a projecting nozzle that protrudes from the surface of the upper end, and the opening is formed at the tip of the projecting nozzle. is there.

According to the present disclosure, the liquid can be used to reliably collect particles in the inspiratory gas, and the release of mist can be prevented in advance.

FIG. 1A is a side view showing a cyclone body of a sampling device according to a first embodiment. FIG. 1B is a bottom view of the lid taken along line A-A 'of FIG. 1A. FIG. 1C is a view showing a cyclone body, which is a cross-sectional view taken along line B-B 'of FIG. 1B. FIG. 2A is a side view showing a cyclone body of a sampling device according to a second embodiment. FIG. 2B is a bottom view of the lid taken along line A-A 'of FIG. 2A. FIG. 2C is a view showing a cyclone body, which is a cross-sectional view taken along line B-B 'of FIG. 2B. FIG. 3A is a side view showing a cyclone body of a sampling device according to a third embodiment. FIG. 3B is a bottom view of the lid taken along line A-A 'of FIG. 3A. FIG. 3C is a view showing a cyclone body, which is a cross-sectional view taken along line B-B 'of FIG. 3B. FIG. 4 is a perspective view showing a cyclone body. 5 (a) and 5 (b) are schematic diagrams showing the operation of the sampling device according to the present disclosure. FIG. 6A is a side view showing a cyclone body of a sampling device according to a fourth embodiment. FIG. 6B is a perspective view showing the cyclone body of the sampling device according to the fourth embodiment as viewed from the lower end side.

First Embodiment
Hereinafter, the first embodiment of the present disclosure will be described in detail. Note that the disclosed invention is not limited by the present embodiment. In addition, the embodiments described below can be combined appropriately as long as the processing contents do not contradict each other.

The sampling device 10 according to the present disclosure also includes a cyclone body 21. The cyclone body 21 is a rotationally symmetric body having a central axis (also referred to as an axis) 21A that is a symmetry axis. In the present specification, the terms "upper", "upper end", "lower" and "lower end" refer to the cyclone main body 21 of the sampling device 10 according to the present disclosure when the central axis 21A extends in the longitudinal direction. Means “upper”, “upper end”, “lower”, “lower end” (see FIGS. 1A to 1C).

Such a sampling device 10 collects particles to be detected in a gas to be inspected in a liquid and samples the particles, and has a portable structure.

In the present embodiment, as shown in FIGS. 1A to 1C, the sampling device 10 has a cyclone body (also referred to as a container) 21 and a gas introduction unit 22 for introducing a gas into the inside of the cyclone body 21.

The cyclone body 21 has a frusto-conical inner surface (hereinafter referred to as a wall surface), and is directed such that the end on the small diameter side is located below the end on the large diameter side.

The gas introducing portion 22 and the air intake hole 33 are provided to extend in the tangential direction of the wall surface of the cyclone body 21 in the upper portion of the cyclone body 21. Here, the tangential direction of the wall surface means that the wall surface of the cyclone body 21 is perpendicular to the axis at a portion where gas introduced as will be described later when viewed from above the axis abuts (collides on) the wall surface of the cyclone body 21. It is a tangential direction of a circle (this circle is referred to as “contact circle”) 50 which can be obtained by cutting in the horizontal direction (see FIG. 2B). In other words, when the wall surface of the cyclone body 21 is cut at a position between the upper end and the lower end of the cyclone body in the horizontal direction perpendicular to the axis of the cyclone body 21, the tangential direction of the contact circle 50 and the gas The gas introduction portion 22 and the intake hole 33 are arranged such that the direction of the central axis in the longitudinal direction of the intake hole 33 connected to the introduction portion 22 matches.
When there are a plurality of combinations (combinations) of the intake holes 33 and the gas introduction portions 22, they are arranged at equal intervals around the axis. When there are a plurality of combinations (combinations) of the intake holes 33 and the gas introduction portions 22, the center of the opening of each intake hole 33, that is, the central axis in the longitudinal direction of each intake hole 33 and the lid with the opening The point cloud intersecting with the lower surface of 32 is arranged concentrically with the contact circle 50 (assumed on the lower surface of the lid above the axis). In addition, when there are a plurality of combinations (combinations) of the intake holes 33 and the gas introduction portions 22, the axes in the longitudinal direction of the intake holes 33 are 360 degrees when viewed from above the axes. They are arranged concentrically at an angle divided by the number of 22 pairs (combinations). The inclination of the intake hole 33 with respect to the horizontal direction is determined by the distance L1 which is the difference between the contact position of the gas (the height position on the axis, and hence the height of the contact position and the lower surface of the lid with the opening). The tangent circle 50 is determined, and when viewed from above the axis, the distance L2 between the center of the opening of each intake hole 33 and the contact point at the time of drawing the tangent to the abutment circle 50 is determined. The tilt angle is determined from the tangent of the ratio.

In the present embodiment, in the upper part of the cyclone body 21, the inside of the cyclone body 21 is sucked and exhausted to reduce the pressure, and a suction and exhaust is caused to introduce gas so as to swirl in the circumferential direction from the gas introducing portion 22 by differential pressure. A tube 24 is provided.

The suction exhaust pipe 24 is coaxially inserted into the upper portion of the cyclone body 21. Further, an exhaust mechanism 41 including a suction and exhaust pump is connected to the suction and exhaust pipe (also referred to as an exhaust pipe) 24.

When the exhaust mechanism 41 is operated, the inside of the cyclone body 21 is sucked and exhausted via the suction and exhaust pipe 24 to be decompressed, and the pressure outside the cyclone body 21 is reduced by the pressure difference between the inside and the outside of the cyclone body 21 The gas is introduced into the inside of the cyclone body 21 from the gas inlet 22. The gas introduced into the inside of the cyclone body 21 is guided along the wall surface of the cyclone body 21 to form a gas flow that descends while swirling in the circumferential direction, that is, spirally swirls. At this time, since the particles to be detected in the gas have a relatively large specific gravity, they are separated on the wall surface side of the cyclone body 21 by centrifugal force.

On the other hand, the gas component having a relatively low specific gravity reverses the flow in the lower part of the cyclone body 21 by the frusto-conical shape of the wall surface of the cyclone body 21 and forms an upward flow on the central axis side of the cyclone body 21 , And is discharged to the outside through the suction exhaust pipe 24.

In this case, the inside of the cyclone body 21 is previously filled with the liquid, and the liquid is pushed outward by the air flow that swirls in the circumferential direction, and a liquid film is formed along the wall surface (inner surface) of the cyclone body 21 Mold 40

In the present embodiment, a water level detection unit 25 may be provided on the wall surface of the cyclone body 21 to detect the water level of the film-like liquid.

More specifically, the water level detection unit 25 includes a pair of electrodes exposed inside the cyclone body 21 and a measurement unit that measures the conductivity between the electrodes. When the liquid level of the liquid is higher than the height position of the pair of electrodes, the pair of electrodes is energized through the liquid, and the conductivity becomes relatively high. On the other hand, when the water level of the liquid is lower than the height position of the pair of electrodes, the pair of electrodes are insulated and the conductivity becomes relatively low. The measurement result in the case where the liquid level of the liquid is higher than the height position of the pair of electrodes and the measurement result in the case where it is low are obtained in advance by experiment, and a value between the two measurement results is determined as a threshold. Thereafter, when the measurement result of the measurement unit is higher than the threshold, it is determined that the water level of the liquid is higher than the height position of the pair of electrodes, and when the measurement result of the measurement unit is lower than the threshold, the water level of the liquid is higher than the pair of electrodes It is judged that it is lower than the height position.

The sampling device 10 will be further described with reference to FIGS. 1A-1C and FIG.

1A is a side view showing the cyclone body 21 of the sampling device 10, FIG. 1B is a bottom view of the lid viewed from the line AA 'in FIG. 1A, and FIG. 1C is a diagram showing the cyclone body 21. It is a BB 'line sectional view of 1B. FIG. 4 is a perspective view showing the cyclone body 21. As shown in FIG.

As described above, the sampling device 10 includes the cyclone body (also referred to as a container) 21 and the gas introducing unit 22 for introducing a gas into the cyclone body 21.

Specifically, as shown in FIG. 1A to FIG. 1C and FIG. 4, the cyclone body (container) 21 of the sampling device 10 includes a container body 31 forming a frusto-conical space 35 therein and a container body 31. And a lid 32 covering the upper opening. The cyclone body 21 having the container body 31 and the lid 32 is a rotationally symmetric body having a central axis 21A, and the axis 21A extends in the longitudinal direction. The cyclone main body 21 is not limited to the above structure having the container main body 31 and the lid 32 covering the upper opening of the container main body 31. The container main body 31 and the lid 32 are completely formed by a 3D printer or the like. It may have an integrally formed structure. In this case, the lid 32 of the cyclone body 21 constitutes the upper end of the cyclone body 21, and the frusto-conical side wall 31 b of the container body 31 constitutes the side wall 31 b of the cyclone body 21. Further, the lower end portion 31 a of the container body 31 constitutes the lower end portion 31 a of the cyclone body 21. Also in this case, the supply unit for supplying water in advance can be formed.

The container body 31 and the lid 32 of the cyclone body 21 can be separated from each other, and it is preferable to remove the lid 32 from the container body 31 and discharge the liquid in the container body 31 outward as described later. However, even in the case where the container main body 31 and the lid 32 are integrally formed, the liquid in the container main body 31 can be discharged outward from the discharge hole by providing the discharge hole in the lid 32. it can.

Further, the gas introducing portion 22 is connected to the lid portion 32 constituting the upper end portion of the cyclone body 21, and the connection end 33 b of the intake hole 33 formed in the lid portion 32 is connected to the gas introducing portion 22. In the present embodiment, four gas introducing portions 22 are connected all around the lid 32 along the tangential direction of the wall surface of the cyclone body 21, and each gas introducing portion 22 extends over the entire periphery of the lid 32. It is provided 90 degrees apart. For this reason, in the inside of the lid portion 32, four intake holes 33 are provided at intervals of 90 °, corresponding to the four gas introducing portions 22, respectively. Here, the tangential direction of the wall surface means the tangential direction of the circle formed in the horizontal direction which is perpendicular to the axis at the portion where the introduced gas abuts (collides) the wall surface of the cyclone body 21. In the case where there are four gas introducing parts 22, it is preferable that the gases introduced from these four lines abut (collide) on the wall surface of the cyclone main body 21 at the same height, and hence viewed from above the axis Preferably, it is along the tangent of the same circle. Further, the gas introducing portion 22 connected to the four intake holes 33 has a diameter larger than the diameter of the intake holes 33 and has a shape which is tapered toward the connection end 33 b of the intake holes 33. The four gas introducing portions 22 may be separated and independent from each other, or may be in communication with each other.

Further, an exhaust pipe 24 is attached at a central position of the lid 32. The exhaust pipe 24 extends upward from the space 35 of the container body 31 through the lid 32. The exhaust pipe 24 is connected to an exhaust mechanism 41 including an exhaust pump installed outside as described above.

Next, the four intake holes 33 provided in the lid 32 will be described. Each intake hole 33 extends in the lid 32 downward at an inclination angle θ of 5 ° to 15 ° with respect to the orthogonal plane 21B orthogonal to the axis 21A of the cyclone body 21. Each intake hole 33 has an opening 33 a that opens into the space 35 of the container body 31. The opening 33 a does not project downward from the lower surface 32 a of the lid 32, and opens in the same plane as the lower surface 32 a. The lower surface 32a extends parallel to the orthogonal plane 21B.

As described above, the container body 31 of the cyclone body 21 is pre-filled with liquid, and when gas is introduced into the cyclone body 21, a spiral flow of gas and liquid is formed in the cyclone body 21. When the liquid film 40 is formed on the inner surface of the cyclone body 21. The liquid film 40 is formed to extend from the lower end to the upper end of the container body 31, that is, across the side wall 31 b of the container body 31 directly under the lid 32 from the lower end 31 a of the container body 31. The lower surface 32 a of the portion 32 is not reached. The inner surface of the cyclone body 21 is preferably subjected to a hydrophilic treatment so that the liquid film 40 can be formed easily and reliably on the inner surface of the cyclone body 21.

On the other hand, the opening 33 a of the intake hole 33 provided in the lid 32 is a lower surface 32 a of the lid 32 and is open at a position separated from the side wall of the container body 31. For this reason, the liquid film 40 on the inner surface of the container main body 31 is not rolled up by the suctioned gas from the opening 33a of the suction hole 33, whereby the liquid film is not rolled up by the suctioned gas and mist is not generated.

On the other hand, since the intake holes 33 extend downward with respect to the orthogonal surface 21 B of the cyclone body 21, the intake gas ejected from the intake holes 33 contacts the liquid film 40 formed on the inner surface of the opposing container body 31. It will be in contact with you. As a result, particles contained in the intake gas can be reliably attached to the liquid film 40, and the particles can be reliably collected by the liquid film 40.

That is, when the intake gas ejected from the intake hole 33 can not contact the liquid film 40 in the container body 31, the particles in the intake gas can not adhere to the liquid film 40, and the particles are in the container body 31. It is also conceivable that it is rolled up and discharged from the exhaust pipe 24.

On the other hand, according to the present invention, the intake gas jetted from the suction holes 33 into the cyclone body 21 is jetted along the tangential direction of the wall surface of the cyclone body 21 in the portion where the gas abuts on the liquid film. In the cyclone body 21, a circumferentially rotating gas flow is formed. For this reason, the particles in the intake gas are directed to the side wall 31 b of the container body 31 by centrifugal force. Next, particles in the intake gas ejected from the intake holes 33 can be collected after being reliably brought into contact with the liquid film 40 and adhering to the liquid film 40.

Next, the operation of the present embodiment configured as described above will be described.

First, the lid 32 is removed from the container body 31, and the container body 31 is filled with a liquid (for example, water). Thereafter, the lid 32 is attached to the container body 31.

Next, as shown in FIG. 4, an exhaust mechanism 41 is connected to the exhaust pipe 24 of the sampling device 10, and a gas (for example, the atmosphere) is taken into the gas introduction unit 22 by the operation of the exhaust mechanism 41 to introduce the gas. It is introduced into the inside of the cyclone body 21 from the part 22.

The gas introduced into the inside of the cyclone main body 21 from the gas introduction part 22 is guided along the wall surface of the cyclone main body 21 to turn in the circumferential direction to form a spiral air flow inside the cyclone main body 21. . The liquid inside the cyclone body 21 forms a spiral flow with the gas, and is forced radially outward to form a liquid film 40 along the wall surface of the cyclone body 21.

The particles to be detected contained in the gas are separated on the wall surface side of the cyclone body 21 by centrifugal force and collected in the liquid film 40 formed in a film shape.

Next, the behavior of the gas in the cyclone body 21 will be described with reference to FIGS. 1A to 1C.

As shown in FIGS. 1A to 1C, the intake gas introduced from the gas introduction part 22 passes through the intake hole 33 provided in the lid 32 and from the opening 33a of the intake hole 33 into the space 35 of the container main body 31. It is spouted.

In this case, since the opening 33a of the intake hole 33 is separated from the side wall 31b of the container body 31 on which the liquid film 40 is formed, the liquid film formed on the inner surface of the container body 31 is caught by the intake gas. Mist does not occur.

Further, since the intake gas ejected from the opening 33a of the intake hole 33 abuts on the liquid film 40 formed on the inner surface of the container body 31, particles in the intake gas are reliably attached to the liquid film 40 and collected. be able to.

The liquid in which the particles to be detected are collected on the wall surface of the cyclone body 21 gradually flows downward by gravity and is stored in the lower end portion 31 a of the container body 31.

Next, the exhaust mechanism 41 is stopped, and as shown in FIG. 5A, the lid 32 is removed from the container main body 31, and the liquid containing particles stored in the container main body 31 is a sample container. It is poured into the tube 45.

Thereafter, as shown in FIG. 5 (b), various analysis tests such as pH test, RT-PCR (Reverse Transcription Polymerase Chain Reaction), LC-MS (Liquid Chromatography), etc. were performed on the liquid in the test tube 45. Applied to identify the type of particles in the liquid and its components.

As described above, according to the present embodiment, particles in the atmosphere can be reliably collected and sampled.

Second Embodiment
Next, referring to FIGS. 2A to 2C, a sampling device 10 according to a second embodiment will be described.

In the second embodiment shown in FIGS. 2A to 2C, the same parts as those of the first embodiment shown in FIGS. 1A to 1C and FIG. 4 are assigned the same reference numerals and detailed explanations thereof will be omitted.

Here, FIG. 2A is a side view showing the cyclone body 21 of the sampling device 10, FIG. 2B is a bottom view of the lid viewed from the line AA 'in FIG. 2A, and FIG. It is a BB 'line sectional view of 2B.

Specifically, as shown in FIGS. 2A to 2C, the cyclone body (container) 21 of the sampling device 10 has a container body 31 forming a frusto-conical space 35 therein and an upper opening of the container body 31. And a cover 32.

Further, the gas introducing portion 22 is connected to the lid portion 32 of the cyclone body 21, and the connection end 33 b of the intake hole 33 formed in the lid portion 32 is connected to the gas introducing portion 22. In the present embodiment, eight gas inlets 22 are connected all around the lid 32 along the tangential direction of the wall surface of the cyclone body 21, and each gas inlet 22 extends over the entire periphery of the lid 32. It is spaced 45 degrees apart. Therefore, eight intake holes 33 are provided at 45 ° intervals in the inside of the lid 32 corresponding to the eight gas introduction parts 22.

Further, an exhaust pipe 24 is attached to the lid 32. The exhaust pipe 24 penetrates the lid 32 from the space 35 of the container main body 31 and extends upward. Further, a water level detection unit 25 is provided at the upper part of the container body 31.

Next, the eight intake holes 33 provided in the lid 32 will be described. Each intake hole 33 extends in the lid 32 downward at an inclination angle θ of 45 ° to 60 ° with respect to the orthogonal plane 21 B orthogonal to the axis 21 A of the cyclone body 21. Each intake hole 33 has an opening 33 a that opens into the space 35 of the container body 31. The opening 33 a does not project downward from the lower surface 32 a of the lid 32 and opens at the same position as the lower surface 32 a.

On the inner surface of the cyclone body 21, a gas is introduced into the cyclone body 21 from the gas introduction unit 22, and a spiral flow is formed in the cyclone body 21 to form a liquid film 40. The liquid film 40 is formed to extend from the lower end to the upper end of the container body 31, that is, across the side wall 31 b of the container body 31 directly under the lid 32 from the lower end 31 a of the container body 31. The lower surface 32 a of the portion 32 is not reached.

On the other hand, the opening 33 a of the intake hole 33 provided in the lid 32 is a lower surface 32 a of the lid 32 and is open at a position separated from the inner surface of the container main body 31. For this reason, the liquid film 40 on the inner surface of the container main body 31 is not rolled up by the suctioned gas from the opening 33a of the suction hole 33, whereby the liquid film is not rolled up by the suctioned gas and water mist is not generated. .

On the other hand, since the intake holes 33 extend downward with respect to the orthogonal surface 21 B of the cyclone body 21, the intake gas ejected from the intake holes 33 contacts the liquid film 40 formed on the inner surface of the opposing container body 31. It will be in contact with you. Therefore, particles contained in the intake gas can be reliably attached to the liquid film 40, and the liquid film 40 can reliably collect the particles.

On the other hand, according to the present invention, after the suctioned gas spouted from the suction hole 33 is made to abut the liquid film 40 and the particles in the suctioned gas adhere to the liquid film 40, it is collected reliably. Can. As described above, according to the present embodiment, the angle θ of the intake holes 33 can be increased to increase the number of the intake holes 33, and the amount of gas that can be processed at one time can be increased. However, the collision position of the air flow to the wall surface is downward.

Third Embodiment
Next, a sampling device 10 according to a third embodiment will be described with reference to FIGS. 3A to 3C.

In the third embodiment shown in FIGS. 3A to 3C, the same parts as those in the first embodiment shown in FIGS. 1A to 1C and FIG. 4 are assigned the same reference numerals and detailed explanations thereof will be omitted.

Here, FIG. 3A is a side view showing the cyclone body 21 of the sampling device 10, FIG. 3B is a bottom view of the lid viewed from the line AA 'in FIG. 3A, and FIG. 3C is a diagram showing the cyclone body 21. It is a BB 'sectional view taken on the line 3B.

Specifically, as shown in FIGS. 3A to 3C, the cyclone body (container) 21 of the sampling device 10 has a container body 31 forming a frusto-conical space 35 therein and an upper opening of the container body 31. And a cover 32.

Further, the gas introducing portion 22 is connected to the lid portion 32 of the cyclone body 21, and the connection end 33 b of the intake hole 33 formed in the lid portion 32 is connected to the gas introducing portion 22. In the present embodiment, one gas inlet 22 is connected to the lid 32. However, a plurality of gas inlets 22, intake holes 33 and projecting nozzles 36 may be provided.

Next, the intake holes 33 provided in the lid 32 will be described. The intake holes 33 extend in the lid 32 downward at an inclination angle θ of 45 ° to 60 ° with respect to the orthogonal plane 21 B orthogonal to the axis 21 A of the cyclone body 21. Further, the intake hole 23 has a projecting nozzle 36 projecting from the lower surface 32a of the lid 32 to the space 35 of the container main body 31, and the lower end of the projecting nozzle 36 is opened to form an opening 33a. The opening 33 a is located at the lower end of the projecting nozzle 36 projecting downward from the lower surface 32 a of the lid 32.

A gas is introduced into the cyclone body 21 from the gas introduction portion 22 on the inner surface of the cyclone body 21, and a spiral flow is formed in the cyclone body 21 to form a liquid film 40. The liquid film 40 is formed so as to extend from the lower end to the upper end of the container body 31, that is, from the lower end of the container body 31 to the lower surface 32 a of the lid 32.

On the other hand, the opening 33a of the intake hole 33 provided in the lid 32 is located at the lower end of the projecting nozzle 36 projecting from the lower surface 32a of the lid 32 and opens at a position spaced from the inner surface of the container body 31 doing. For this reason, the liquid film 40 on the inner surface of the container main body 31 is not rolled up by the suctioned gas from the opening 33a of the suction hole 33, whereby the liquid film is not rolled up by the suctioned gas and mist is not generated.

On the other hand, according to the present invention, after the suctioned gas spouted from the suction hole 33 is made to abut the liquid film 40 and the particles in the suctioned gas adhere to the liquid film 40, it is collected reliably. Can.

Fourth Embodiment
Next, a sampling device 10 according to a fourth embodiment will be described with reference to FIGS. 6A and 6B.

In the fourth embodiment shown in FIGS. 6A and 6B, the same parts as those of the first embodiment shown in FIGS. 1A to 1C and FIG. 4 are assigned the same reference numerals and detailed explanations thereof will be omitted.

Here, FIG. 6A is a side view showing the cyclone body 21 of the sampling device 10, and FIG. 6B is a perspective view seen from the lower end side thereof.

Specifically, as shown in FIG. 6, the cyclone main body (container) 21 of the sampling device 10 has a container main body 31 formed of a rotationally symmetric body that forms a cylindrical space 35 inside and has a central axis 21A. ing. The container body 31 is sealed as a whole, and has a lower end 31a, an upper end 31c, and a side wall 31b extending between the lower end 31a and the upper end 31c.

Further, the gas introducing portion 22 is connected to the upper end portion 31 c of the container body 31 of the cyclone body 21, and the connection end 33 b of the intake hole 33 formed in the upper end portion 31 c is connected to the gas introducing portion 22. In the present embodiment, four gas introducing portions 22 are connected all around the upper end portion 31c along the tangential direction of the wall surface of the cyclone body 21, and each gas introducing portion 22 extends over the entire periphery of the upper end portion 31c. It is provided 90 degrees apart. For this reason, in the upper end portion 31c, four intake holes 33 are provided at intervals of 90 °, corresponding to the four gas introduction portions 22, respectively.

Further, an exhaust pipe 24 is attached to a central position of the upper end portion 31c, and the exhaust pipe 24 extends upward from the space 35 of the container body 31 through the upper end portion 31c. Further, a water level detection unit 25 is provided at the upper part of the container body 31.

Next, four intake holes 33 provided in the upper end portion 31 c of the container body 31 will be described. Each intake hole 33 extends in the lid 32 downward at an inclination angle θ of 5 ° to 15 ° with respect to the orthogonal plane 21B orthogonal to the axis 21A of the cyclone body 21. Each intake hole 23 has an opening 33 a that opens to the space 35 of the container body 31. The opening 33a does not project downward from the lower surface 31c1 of the upper end portion 31c, and opens in the same plane as the lower surface 31c1.

On the side wall 31 b of the cyclone body 21, a gas is introduced into the cyclone body 21 from the gas introduction unit 22, and a spiral flow is formed in the cyclone body 21, whereby a liquid film 40 is formed. The liquid film 40 is formed to extend from the lower end to the upper end of the side wall 31 b of the container body 31, but does not reach the lower surface 31 c 1 of the upper end portion 31 c.

On the other hand, the opening 33a of the intake hole 33 provided in the upper end 31c of the container body 31 is a lower surface 31c1 of the upper end 31c and is open at a position separated from the side wall 31b of the container body 31. For this reason, the liquid film 40 on the inner surface of the side wall 31b of the container main body 31 is not rolled up by the suctioned gas from the opening 33a of the suction hole 33, whereby the liquid film is rolled up by the suctioned gas and mist is generated. Absent.

On the other hand, since the intake holes 33 extend obliquely downward with respect to the orthogonal surface 21 B of the cyclone body 21, the intake gas ejected from the intake holes 33 is a liquid formed on the inner surface of the side wall 31 b of the opposing container body 31. It will be in contact with the membrane 40. Therefore, particles contained in the intake gas are directed to the liquid film 40 by centrifugal force, whereby the particles can be reliably adhered to the liquid film 40, and the particles can be reliably collected by the liquid film 40.

That is, when the intake gas ejected from the intake hole 33 can not contact the liquid film 40 on the inner surface of the side wall 31b of the container body 31, the particles in the intake gas can not adhere to the liquid film 40, and the particles It is also conceivable to be rolled up in the main body 31 and discharged from the exhaust pipe 24.

On the other hand, according to the present invention, after the suctioned gas spouted from the suction hole 33 is made to abut the liquid film 40 and the particles in the suctioned gas adhere to the liquid film 40, it is collected reliably. Can. The cyclone body 21 shown in FIG. 6 may be used by repeatedly pulling the upper end 31c and the lower end 31a up and down, and may bring the gas introduction portion 22 and the exhaust pipe 24 downward.

In the embodiment shown in FIGS. 6A and 6B, in order to discharge the liquid containing particles stored in the cyclone body 21 to the outside, a discharge hole 42 sealed at all times by the plug 43 is provided.

DESCRIPTION OF SYMBOLS 10 sampling apparatus 19 coarse dust removal part 21 cyclone main body 21A axis 21B orthogonal surface 22 gas introduction part 25 water level detection part 31 container body 31a lower end 31b side wall 31c upper end 32 lid 32a lower surface 33 intake hole 33a opening 33b connection end 35 space 36 projecting nozzle 40 liquid film 41 exhaust mechanism 42 exhaust hole 43 plug

Claims

In a sampling device for collecting particles in a gas with a liquid,
A container having an upper end, a lower end, and a side wall extending between the upper end and the lower end, the container being a rotationally symmetric body having a central axis and forming a space therein;
An air intake hole provided in the container, having an opening opening in the container, and inhaling a gas containing particles;
And an exhaust pipe provided in the container;
The sampling device according to claim 1, wherein the air inlet is inclined to an orthogonal plane perpendicular to a central axis of the container and extends into the space.
When the gas in the space of the container is exhausted by the exhaust pipe, the gas containing particles enters the space of the container from the air inlet and forms a spiral flow of gas and liquid in the space of the container. The sampling device according to claim 1, wherein a liquid film is formed on the inner surface of the side wall.
The sampling device according to claim 2, wherein the whole area of the opening of the intake hole is opened to a region other than the liquid film, and the gas sucked by the intake hole is ejected to the liquid film.
The sampling device according to any one of claims 1 to 3, wherein an exhaust mechanism is connected to the exhaust pipe.
The sampling device according to claim 1, wherein the intake hole is provided at the upper end of the container.
The sampling device according to any one of claims 2 to 5, wherein the liquid film is formed to extend upward from the lower end of the container.
The sampling device according to any one of claims 1 to 6, wherein the container is provided with a plurality of intake holes.
The sampling device according to any one of claims 5 to 7, wherein the intake hole is provided at the upper end of the container, and an opening of the intake hole is open to the space of the container.
The air intake hole is provided at the upper end portion of the container, and has a projecting nozzle projecting from the surface of the upper end portion, and the opening is formed at the tip of the projecting nozzle. The sampling device described.