WO2019044913A1 - Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid - Google Patents
Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid Download PDFInfo
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- WO2019044913A1 WO2019044913A1 PCT/JP2018/031975 JP2018031975W WO2019044913A1 WO 2019044913 A1 WO2019044913 A1 WO 2019044913A1 JP 2018031975 W JP2018031975 W JP 2018031975W WO 2019044913 A1 WO2019044913 A1 WO 2019044913A1
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- Prior art keywords
- liquid
- ufbs
- ultrafine
- bubble
- bubbles
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- 239000007788 liquid Substances 0.000 title claims abstract description 378
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- 238000000034 method Methods 0.000 title claims description 50
- 238000009835 boiling Methods 0.000 claims abstract description 68
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 174
- 239000007789 gas Substances 0.000 claims description 85
- 238000003860 storage Methods 0.000 claims description 51
- 238000010438 heat treatment Methods 0.000 claims description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 44
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 16
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 15
- 230000004087 circulation Effects 0.000 claims description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 7
- 239000011737 fluorine Substances 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 6
- 239000001569 carbon dioxide Substances 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 239000003960 organic solvent Substances 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000460 chlorine Substances 0.000 claims description 4
- 239000003792 electrolyte Substances 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 150000001805 chlorine compounds Chemical class 0.000 claims description 3
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 claims description 2
- 239000003570 air Substances 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000008246 gaseous mixture Substances 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 239000002075 main ingredient Substances 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 2
- 239000001294 propane Substances 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000010408 film Substances 0.000 description 91
- 239000008399 tap water Substances 0.000 description 67
- 235000020679 tap water Nutrition 0.000 description 67
- 239000000758 substrate Substances 0.000 description 66
- 230000007246 mechanism Effects 0.000 description 56
- 238000010586 diagram Methods 0.000 description 47
- 238000005259 measurement Methods 0.000 description 34
- 239000010410 layer Substances 0.000 description 23
- 238000004458 analytical method Methods 0.000 description 17
- 238000009826 distribution Methods 0.000 description 17
- 229910001873 dinitrogen Inorganic materials 0.000 description 16
- 238000012360 testing method Methods 0.000 description 15
- 239000011229 interlayer Substances 0.000 description 14
- 239000011259 mixed solution Substances 0.000 description 14
- 238000001165 gas chromatography-thermal conductivity detection Methods 0.000 description 13
- 239000012535 impurity Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 230000007704 transition Effects 0.000 description 9
- 238000007664 blowing Methods 0.000 description 7
- 230000005587 bubbling Effects 0.000 description 7
- 238000003379 elimination reaction Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 241000588724 Escherichia coli Species 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 241000191967 Staphylococcus aureus Species 0.000 description 5
- 235000011089 carbon dioxide Nutrition 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000009429 electrical wiring Methods 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000003643 water by type Substances 0.000 description 5
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- -1 hydrogen ions Chemical class 0.000 description 4
- 239000003595 mist Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 3
- 230000000844 anti-bacterial effect Effects 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Natural products CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 238000010790 dilution Methods 0.000 description 3
- 239000012895 dilution Substances 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 238000005338 heat storage Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000002101 nanobubble Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000005185 salting out Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- 229910004200 TaSiN Inorganic materials 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 230000001580 bacterial effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- BTANRVKWQNVYAZ-UHFFFAOYSA-N butan-2-ol Chemical compound CCC(C)O BTANRVKWQNVYAZ-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000012085 test solution Substances 0.000 description 2
- ZWVMLYRJXORSEP-UHFFFAOYSA-N 1,2,6-Hexanetriol Chemical compound OCCCCC(O)CO ZWVMLYRJXORSEP-UHFFFAOYSA-N 0.000 description 1
- 229940015975 1,2-hexanediol Drugs 0.000 description 1
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- 229940043375 1,5-pentanediol Drugs 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- COBPKKZHLDDMTB-UHFFFAOYSA-N 2-[2-(2-butoxyethoxy)ethoxy]ethanol Chemical compound CCCCOCCOCCOCCO COBPKKZHLDDMTB-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SXFJDZNJHVPHPH-UHFFFAOYSA-N 3-methylpentane-1,5-diol Chemical compound OCCC(C)CCO SXFJDZNJHVPHPH-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-M Bicarbonate Chemical compound OC([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-M 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 229910004490 TaAl Inorganic materials 0.000 description 1
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 125000005233 alkylalcohol group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000000975 bioactive effect Effects 0.000 description 1
- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- BMRWNKZVCUKKSR-UHFFFAOYSA-N butane-1,2-diol Chemical compound CCC(O)CO BMRWNKZVCUKKSR-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 150000004292 cyclic ethers Chemical class 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- 238000011978 dissolution method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- FHKSXSQHXQEMOK-UHFFFAOYSA-N hexane-1,2-diol Chemical compound CCCCC(O)CO FHKSXSQHXQEMOK-UHFFFAOYSA-N 0.000 description 1
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- HNJBEVLQSNELDL-UHFFFAOYSA-N pyrrolidin-2-one Chemical compound O=C1CCCN1 HNJBEVLQSNELDL-UHFFFAOYSA-N 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YODZTKMDCQEPHD-UHFFFAOYSA-N thiodiglycol Chemical compound OCCSCCO YODZTKMDCQEPHD-UHFFFAOYSA-N 0.000 description 1
- 229950006389 thiodiglycol Drugs 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
- JSPLKZUTYZBBKA-UHFFFAOYSA-N trioxidane Chemical class OOO JSPLKZUTYZBBKA-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
- B05B7/16—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed
- B05B7/1686—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas incorporating means for heating or cooling the material to be sprayed involving vaporisation of the material to be sprayed or of an atomising-fluid-generating product
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2373—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media for obtaining fine bubbles, i.e. bubbles with a size below 100 µm
- B01F23/2375—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media for obtaining fine bubbles, i.e. bubbles with a size below 100 µm for obtaining bubbles with a size below 1 µm
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
- A61L2/18—Liquid substances or solutions comprising solids or dissolved gases
- A61L2/183—Ozone dissolved in a liquid
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
- A61L2/20—Gaseous substances, e.g. vapours
- A61L2/202—Ozone
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/232—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles
- B01F23/2323—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids using flow-mixing means for introducing the gases, e.g. baffles by circulating the flow in guiding constructions or conduits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/237—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media
- B01F23/2373—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids characterised by the physical or chemical properties of gases or vapours introduced in the liquid media for obtaining fine bubbles, i.e. bubbles with a size below 100 µm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
- B01F33/3033—Micromixers using heat to mix or move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/90—Heating or cooling systems
- B01F35/93—Heating or cooling systems arranged inside the receptacle
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/78—Heating arrangements specially adapted for immersion heating
- H05B3/82—Fixedly-mounted immersion heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/90—Heating or cooling systems
- B01F2035/99—Heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/40—Filters located upstream of the spraying outlets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/52—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter for removal of clogging particles
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/78—Treatment of water, waste water, or sewage by oxidation with ozone
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2303/00—Specific treatment goals
- C02F2303/04—Disinfection
Abstract
Description
PTL 2: Japanese Patent No. 4456176
ΔP = 4σ/D (1)
F = 4πr3ρg/3 (2)
F = 6πηru (3)
u = (2/9)r2ρg/η (4)
r = a × {101325/(ρgh + 101325)}1/3 ... (5)
Total Number of Heaters = 1.0e4 (= 1.0 × 104)
Number of UFBs Generated = (1.0e4) × 10 × (1.0e4) × 60[s] × 60[min]
= 3.6e12 ((UFBs/L)/h)
Total Number of Heaters = 1.0e4 × 10 = 1.0e5 (= 1.0 × 105)
Number of UFBs Generated = (1.0e5) × 10 × (2.0e4) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Total Number of Heaters = 1.0e4 × 10 = 1.0e5 (= 1.0 × 105)
Number of UFBs Generated = (1.0e5) × 10 × (2.0e4) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Glycerol 10 wt%
Total Number of Heaters = 1.0e4 × 20 = 2.0e5 (= 2.0 × 105)
Number of UFBs Generated = (2.0e5) × 10 × (1.0e4) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Glycerol 5 wt%
Pure Water 60 wt%
Total Number of Heaters = 1.0e4 × 40 = 4.0e5 (= 4.0 × 105)
Number of UFBs Generated = (4.0e5) × 10 × (5.0e3) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Total Number of Heaters = 1.0e4 × 20 = 2.0e5 (= 2.0 × 105)
Number of UFBs Generated = (2.0e5) × 10 × (2.0e4) × 60[s]
= 2.4e12 ((UFBs/L)/min)
Total Number of Heaters = 1.0e4 × 30 = 3.0e5 (= 3.0 × 105)
Number of UFBs Generated = (3.0e5) × 10 × (2.0e4) × 60[s]
= 3.6e12 ((UFBs/L)/min)
Total Number of Heaters = 1.0e4 × 100 = 1.0e6 (= 1.0 × 106)
Number of UFBs Generated = (1.0e6) × 1.0 × (2.0e4) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Total Number of Heaters = 1.0e4 × 40 = 4.0e5 (= 4.0 × 105)
Number of UFBs Generated = (4.0e5) × 1.0 × (2.0e4) × 60[s]
= 2.88e13 ((UFBs/L)/h)
Total Number of Heaters = 1.0e4 × 100 = 1.0e6 (= 1.0 × 106)
Number of UFBs Generated = (1.0e6) × 1.0 × (2.0e4) × 60[s]
= 1.2e12 ((UFBs/L)/min)
Number of UFBs Generated = (1.0e7) × 1.0 × (2.0e4) × 60[s]
= 1.2e13 ((UFBs/L)/min)
Test Temperature:25°C
Test Period:5 Minutes
Test Container:Stainless Plate
Test Bacterial Species:Staphylococcus Aureus, Escherichia Coli
Test Bacterial Solution Density: 1.25e8 to 6.25e8 [cfu/ml]
Test Sample: 0.1 mL
Test Target A: 10 ml of UFB Water Manufactured in Seventh Embodiment (Ozone; 2.4 billion UFBs per ml)
Test Target B: 10 ml of UFB Water Manufactured in Ninth Embodiment (Nitrogen; 1.2 billion UFBs per ml)
Test Target C: 10 ml of UFB Water Manufactured in Tenth Embodiment (Ozone; 28.8 billion UFBs per ml)
Test Target D: 10 ml of UFB Water Manufactured in Eleventh Embodiment (Nitrogen; 2.4 billion UFBs per ml)
Test Target E: 10 ml of UFB Water Manufactured in Twelfth Embodiment (Nitrogen; 12.0 billion UFBs per ml)
Comparison Target A: 10 ml of Pure Water Used in Seventh Embodiment
Comparison Target B: 10 ml of Tap Water Used in Ninth Embodiment
Comparison target C: 10 ml of Tap Water Used in Tenth Embodiment
Comparison Target D: 10 ml of Tap Water Used in Eleventh Embodiment
Comparison Target E: 10 ml of Tap Water Used in Twelfth Embodiment
Total Number of Heaters = 1.0e4 × 20 = 2.0e5 (= 2.0 × 105)
Number of UFBs Generated = (2.0e5) × 10 × (2.0e4) × 60[s]
= 2.4e12 ((UFBs/L)/min)
2 heater
41 ultrafine bubble (UFB)
11 water flow channel
212 liquid ejection element
320 bubble
700 liquid ejection unit
Claims (31)
- An ultrafine bubble generating method, comprising generating ultrafine bubbles by causing film boiling in liquid.
- An ultrafine bubble generating method, comprising generating ultrafine bubbles in liquid by increasing a temperature of a surface of a heating portion provided inside liquid to 300°C or more and generating bubbles on the surface of the heating portion.
- The ultrafine bubble generating method according to claim 1, wherein a heating portion in contact with liquid is provided, the film boiling is caused by heating the heating portion, and bubbles are generated on a surface of the heating portion.
- The ultrafine bubble generating method according to claim 1 or 3, wherein the film boiling is caused intermittently.
- The ultrafine bubble generating method according to any one of claims 1 to 4, wherein the ultrafine bubbles are generated from gas dissolved in liquid.
- The ultrafine bubble generating method according to claim 2 or 3, wherein liquid contacts the heating portion in a shrinkage step after a growth process of the bubbles.
- The ultrafine bubble generating method according to any one of claims 1 to 6, comprising a step of injecting gas into liquid.
- The ultrafine bubble generating method according to claim 2 or 3, comprising a step of ejecting liquid from an ejection opening by using energy of bubbles generated on the surface of the heating portion.
- The ultrafine bubble generating method according to claim 2 or 3, wherein a period during which liquid is heated by the heating portion is 100 μsec or less.
- The ultrafine bubble generating method according to claim 2 or 3, wherein an area of a surface of the heating portion in contact with liquid is 25.0 mm2 or less.
- An ultrafine bubble-containing liquid manufacturing apparatus, comprising:
a storage unit configured to store liquid in a position including a predetermined region; and
a heating unit configured to generate ultrafine bubbles in liquid by heating liquid in the predetermined region and causing film boiling.
- The ultrafine bubble-containing liquid manufacturing apparatus according to claim 11, wherein the heating unit includes a heating resistance portion.
- The ultrafine bubble-containing liquid manufacturing apparatus according to claim 11 or 12, further comprising a control unit configured to heat the heating unit intermittently to cause the film boiling intermittently.
- The ultrafine bubble-containing liquid manufacturing apparatus according to any one of claims 11 to 13, further comprising a channel in which liquid flows through the predetermined region.
- The ultrafine bubble-containing liquid manufacturing apparatus according to any one of claims 11 to 13, further comprising a circulation channel configured to circulate liquid through the predetermined region.
- The ultrafine bubble-containing liquid manufacturing apparatus according to any one of claims 11 to 15, further comprising:
a pressure chamber including at least part of the predetermined region;
a supply channel for supplying liquid to the pressure chamber; and
an ejection opening communicating with the pressure chamber,
wherein liquid inside the pressure chamber is ejected from the ejection opening by energy of bubbles generated by film boiling in liquid.
- The ultrafine bubble-containing liquid manufacturing apparatus according to claim 16, further comprising a collection unit configured to collect liquid ejected from the ejection opening.
- The ultrafine bubble-containing liquid manufacturing apparatus according to any one of claims 11 to 17, further comprising an injection unit configured to inject gas into liquid.
- An ultrafine bubble-containing liquid manufacturing method, comprising:
a storage step of storing liquid in a position including a predetermined region; and
a heating step of generating ultrafine bubbles in liquid by heating liquid in the predetermined region and causing film boiling.
- An ultrafine bubble-containing liquid, wherein the number of ultrafine bubbles contained in liquid is 2.0 billion or more per ml.
- The ultrafine bubble-containing liquid according to claim 20, wherein 50% or more of the ultrafine bubbles contained in the liquid have a diameter ranging from 10 nm to 400 nm.
- The ultrafine bubble-containing liquid according to claim 20 or 21, wherein the ultrafine bubbles are reduced by 50% or less after a week.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 22, wherein the ultrafine bubbles including gas therein are contained in the liquid and the gas is thus contained in an amount equal to or greater than a saturation solubility of the gas dissolved in the liquid under atmospheric pressure.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 23, wherein the liquid includes water as a main ingredient.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 24, wherein the liquid includes an organic solvent.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 24, wherein the liquid includes a chlorine compound.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 24, wherein the liquid includes an electrolyte ion.
- The ultrafine bubble-containing liquid according to any one of claims 20 to 26, wherein the ultrafine bubbles include therein a gas selected from the group consisting of hydrogen, helium, oxygen, nitrogen, methane, fluorine, neon, carbon dioxide, ozone, argon, chlorine, ethane, propane, air, and gaseous mixtures thereof.
- An ultrafine bubble-containing liquid manufacturing apparatus used in an apparatus that makes use of ultrafine bubbles, the ultrafine bubble-containing liquid manufacturing apparatus comprising:
a liquid chamber configured to store liquid; and
a heating portion provided inside the liquid chamber and configured to generate ultrafine bubbles by heating liquid inside the liquid chamber and causing film boiling.
- An ultrafine bubble generating method used in an apparatus that makes use of ultrafine bubbles, wherein
a liquid chamber configured to store liquid and a heating portion provided inside the liquid chamber are comprised, and
ultrafine bubbles are generated in liquid by increasing a temperature of a surface of the heating portion to 300°C or more and generating bubbles on the surface of the heating portion.
- The ultrafine bubble generating method according to claim 30, wherein a period during which liquid is heated by the heating portion is 100 μsec or less.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201880055620.1A CN111050925B (en) | 2017-08-31 | 2018-08-29 | Method for generating ultrafine bubbles and apparatus for producing ultrafine bubble-containing liquid |
AU2018323492A AU2018323492A1 (en) | 2017-08-31 | 2018-08-29 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
RU2020108194A RU2759202C2 (en) | 2017-08-31 | 2018-08-29 | Method for generating ultrafine bubbles, device for producing and method for producing liquid containing ultrafine bubbles, and liquid containing ultrafine bubbles |
SG11202001745UA SG11202001745UA (en) | 2017-08-31 | 2018-08-29 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
EP18769815.4A EP3658293B1 (en) | 2017-08-31 | 2018-08-29 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
KR1020207005744A KR102453570B1 (en) | 2017-08-31 | 2018-08-29 | Ultra-fine bubble generation method, ultra-fine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultra-fine bubble-containing liquid |
US16/642,432 US11766685B2 (en) | 2017-08-31 | 2018-08-29 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
BR112020003906-3A BR112020003906B1 (en) | 2017-08-31 | 2018-08-29 | APPARATUS AND METHOD FOR MANUFACTURING LIQUID CONTAINING ULTRAFINE BUBBLE |
AU2022200611A AU2022200611A1 (en) | 2017-08-31 | 2022-01-31 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
Applications Claiming Priority (4)
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JP2017-167594 | 2017-08-31 | ||
JP2017167594 | 2017-08-31 | ||
JP2018148537A JP7271108B2 (en) | 2017-08-31 | 2018-08-07 | Apparatus for producing liquid containing ultra-fine bubbles and method for producing liquid containing ultra-fine bubbles |
JP2018-148537 | 2018-08-07 |
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WO2019044913A1 true WO2019044913A1 (en) | 2019-03-07 |
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ID=63586784
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PCT/JP2018/031975 WO2019044913A1 (en) | 2017-08-31 | 2018-08-29 | Ultrafine bubble generating method, ultrafine bubble-containing liquid manufacturing apparatus and manufacturing method, and ultrafine bubble-containing liquid |
Country Status (3)
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JP (1) | JP2023086897A (en) |
AU (1) | AU2022200611A1 (en) |
WO (1) | WO2019044913A1 (en) |
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