WO2019013118A1 - Vacuum pump, temperature adjustment control device applied to vacuum pump, inspection tool, and diagnosis method for temperature adjustment function unit - Google Patents

Abstract

[Problem] To provide: a vacuum pump that is capable of self-diagnosing a temperature adjustment function by a simple device and carrying out generic inspection without needing a large inspection device; a temperature adjustment control device applied to the vacuum pump; an inspection tool; and a diagnosis method for a temperature adjustment function unit. [Solution] In step 5, an inspection program determines whether or not a simulated temperature is 80 degrees by detecting, by use of a voltage value acquired through voltage-conversion, a fixed resistance R1 corresponding to a TMS temperature sensor 155. Upon detection that the simulated temperature is 80 degrees, the process advances to step 6, and a simulated output corresponding to turning-ON of a TMS heater 151 between a terminal 311 and a terminal 309 of a TMS control device 300 is performed. In step 7, the inspection program determines whether or not the simulated temperature is 150 degrees by detecting, by use of a voltage value acquired through voltage-conversion, a fixed resistance R2 corresponding to the TMS temperature sensor 155. Upon detection that the simulated temperature is 150 degrees, the process advances to step 8, and the output current flowing between the terminal 311 and the terminal 309 of the TMS control device 300 is cut.

Description

Vacuum pump, control device for temperature control applied to the vacuum pump, inspection jig, and diagnostic method for temperature control function unit

The present invention relates to a vacuum pump, a control device for temperature control applied to the vacuum pump, a jig for inspection, and a diagnostic method of a temperature control function part, and in particular, a large scale inspection device is unnecessary and the temperature control function is simplified. The present invention relates to a vacuum pump that can perform self-diagnosis using various devices and can perform inspection generally, a control device for temperature control applied to the vacuum pump, a testing jig, and a diagnosis method of a temperature control function unit.

With the development of electronics in recent years, the demand for semiconductors such as memories and integrated circuits is rapidly increasing.
These semiconductors are manufactured by doping impurities into a semiconductor substrate with extremely high purity to give electrical properties, or forming a fine circuit on the semiconductor substrate by etching or the like.

And these operations need to be performed in a high vacuum chamber to avoid the influence of dust and the like in the air. Generally, a vacuum pump is used to evacuate the chamber, but a turbo molecular pump, which is one of vacuum pumps, is widely used, particularly from the viewpoint of low residual gas and easy maintenance.

Also, in the semiconductor manufacturing process, there are many processes in which various process gases are applied to the semiconductor substrate, and the turbo molecular pump not only evacuates the chamber but also exhausts the process gases from the chamber. Is also used.

By the way, the process gas may be introduced into the chamber at a high temperature to enhance the reactivity. Then, these process gases may become solid at a certain temperature which is cooled when being exhausted and may deposit a product in an exhaust system. Then, this type of process gas may become solid at low temperature in the turbo molecular pump and adhere to and deposit inside the turbo molecular pump.

When deposits of process gas are deposited inside the turbo molecular pump, the deposits narrow the pump flow path and cause the performance of the turbo molecular pump to be degraded.

In order to solve this problem, conventionally, a heater or an annular water-cooled tube is wound around the outer periphery of a turbo molecular pump base or the like, and a temperature sensor (for example, a thermistor) is embedded in the base or the like. Control of heating by a heater or cooling by a water cooling pipe (hereinafter referred to as TMS (Temperature Management System)) is performed so as to maintain the temperature of the base part at a constant high temperature (preset temperature) based on a signal. , Patent Document 2).

It is desirable to make the set temperature as high as possible, as the set temperature of TMS is higher and the product is less likely to be deposited.
On the other hand, when the base portion is thus heated to a high temperature, the electronic circuit provided in the main body of the turbo molecular pump exceeds the limit temperature when the exhaust load changes or the ambient temperature changes to a high temperature, etc. There is a possibility that the storage means by the semiconductor memory may be destroyed. At this time, the semiconductor memory is broken and the maintenance information data such as the pump activation time and the error history disappears.

When the maintenance information data disappears, it is impossible to determine the maintenance inspection time, the replacement time of the turbo molecular pump, and the like. As a result, the operation of the turbo molecular pump is seriously hampered. For this reason, when it exceeds predetermined temperature, cooling by a water cooling pipe is performed.

An example of TMS control is shown in FIG.
In this example, the temperature of the base portion is measured by a temperature sensor (corresponding to a TMS temperature sensor described later), and a heating command is sent to the heater such that the measured temperature is equal to or lower than the preset allowable temperature of the base portion. , Open and close the solenoid valve to control the flow of water to the water cooling pipe. As an example, the target set temperature is 60 degrees.

That is, in FIG. 11, the control device turns on the heater and continues heating at the initial stage of the operation start, and turns off the heater when the measured temperature measured by the temperature sensor exceeds 60 degrees. During this time, the temperature of the base portion is heated by the heater since the solenoid valve continues to close.

From the relationship of heat capacity even after the heater is turned off at 60 degrees, the temperature of the base portion does not drop rapidly, and forms an overshoot curve. After that, when the measured temperature exceeds 63 degrees, the solenoid valve is opened to supply water from the water cooling pipe. When the temperature of the base portion falls to 60 degrees or less, the solenoid valve is closed. Thereafter, the heater is turned on again when the temperature of the base portion becomes 58 degrees or less.

In the control example of FIG. 11, one temperature sensor controls one heater and one solenoid valve, but as the pump capacity increases, more number of temperature sensors, heaters, and solenoid valves are disposed. Ru. The temperature for turning the heater on and off and the temperature for opening and closing the solenoid valve also differ. Hysteresis is taken into consideration in setting the temperature threshold and the logic is complicated.

International Publication No. 2011-021428 Japanese Patent Application Publication No. 2003-278692

By the way, conventionally, a dedicated inspection device is connected to the control device in order to check whether TMS control in which complicated operations are performed while considering hysteresis in time series is normally performed. An inspection was being conducted. This inspection system includes inspection jigs, I / O boards, and personal computers, but since application software etc. is configured according to the OS used on personal computers, each time the OS is upgraded In some cases, jigs for inspection, I / O boards and application software can not be used.

In addition, when the capacity of the pump is increased and the number of sensors and the number of heaters and solenoid valves to be controlled are increased, there is a possibility that the inspection apparatus has to be newly developed and prepared.
Furthermore, the inspection apparatus prepared in this way is not necessarily applied to all turbo molecular pumps in common, and in the case of expensive inspection equipment, there is a difficult aspect in that it is always provided in a service base or the like. The

Furthermore, as a general-purpose control device that monitors and controls the temperature of TMS as well as the inspection device so that it can respond even when the number of sensors, heaters, and solenoid valves changes depending on the target pump It is desirable to prepare.
However, in this case, depending on the operating environment and processing capacity of the pump, it is assumed that a terminal (channel) not connected to the sensor, heater, or solenoid valve will come out, and the noise associated with the disconnection broken through this terminal A short circuit may cause abnormal signal detection or erroneous control.

The present invention was made in view of such conventional problems, and does not require a large-scale inspection device, and can perform self-diagnosis with a simple device for temperature control function, and can perform inspection universally, the vacuum An object of the present invention is to provide a control device for temperature control applied to a pump, a jig for inspection, and a diagnostic method of a temperature control function part.

Therefore, the present invention (claim 1) is an invention of a vacuum pump, comprising: a control unit for monitoring and controlling a motor and a magnetic bearing built in the pump main body; and at least one temperature sensor provided in the pump main body In a vacuum pump having a temperature control function unit that measures the temperature of the pump body and controls at least one heater or a solenoid valve based on the temperature, the temperature control function unit can connect or disconnect the temperature sensor. Whether the input signal to the first terminal is normally input, or the second terminal has one terminal and the second terminal capable of connecting or disconnecting the heater or the solenoid valve. It is characterized by having a self-diagnosis unit capable of self-diagnosis as to whether or not it is output normally from the terminal.

It has a self-diagnosis unit that can self-diagnose whether the measurement signal from the temperature sensor is normally input separately from the temperature control function unit or whether the output to the heater or the solenoid valve is normally performed. The The software part of the temperature control function part is not examined at the self-diagnosis part because it has been sufficiently examined at the time of development. Therefore, in the inspection of the self-diagnosis unit, only the input path by the temperature sensor and the output path of the heater and the solenoid valve are inspected. The diagnostic program for the examination is simple. For this reason, since it can be configured at low cost and a large-scale inspection tool such as a personal computer incorporating a dedicated program is unnecessary, it can be easily introduced to each service base.
Further, since a personal computer is not required for the examination of the self-diagnosis unit, the application software can not be used each time the version of the OS is upgraded as in the prior art.

The present invention (claim 2) is the invention of a vacuum pump, in which the temperature control function unit is connected to the first terminal by a first load for dummy instead of the temperature sensor, A temperature determination unit that determines in a pseudo manner that the temperature sensor has reached a predetermined temperature value when the voltage applied to the load 1 is a preset voltage value, and the second terminal is replaced with the heater or the solenoid valve And output means connected to the second load for dummy and supplying or stopping a predetermined current to the second load based on the determination result of the temperature determination means, wherein the voltage value set in advance is set. Are prepared corresponding to ON and OFF of the heater or opening and closing of the solenoid valve, and the output means is configured independently for each heater or the solenoid valve.

Since the input path can be determined in a pseudo manner and the output path can also be determined in a pseudo manner, the inspection efficiency is high and simple.

Furthermore, the present invention (claim 3) is an invention of a vacuum pump, wherein the success or failure of the inspection is judged by judging ON and OFF of the heater or opening and closing of the solenoid valve in time series. It is characterized by

The accuracy of the pass / fail judgment is improved by judging ON / OFF of the heater or opening / closing of the solenoid valve in chronological order according to the actual operation sequence of the temperature control function unit.

Furthermore, the present invention (claim 4) is an invention of a vacuum pump, and it is determined in a pseudo manner that a predetermined output is performed to the heater or the solenoid valve when the predetermined current flows to the output means. And an output determination unit configured to

The accuracy of the pass / fail judgment is improved by confirming that a predetermined current has flowed to the output means.

Further, the present invention (claim 5) is an invention of a vacuum pump, wherein the first load is a resistor having a resistance value corresponding to ON and OFF of the heater, or the opening and closing of the solenoid valve. , And the resistors are switchable by switches.

This makes inspection cheap and easy.

Furthermore, the present invention (claim 6) is an invention of a vacuum pump, wherein the temperature control function unit enters an inspection mode when it is confirmed that the first load is in a short circuit state.

By intentionally creating a short circuit condition, it is possible to reliably enter the inspection mode.

Furthermore, the present invention (claim 7) is an invention of a vacuum pump, wherein the temperature control function unit is configured as a unit independent of the control unit.

Since the control unit and the temperature control function unit are separated, the capacity of the vacuum pump is large, and even if the number of sensors, heaters, and solenoid valves is large, remodeling to greatly expand the control device side Can reduce costs without the need.

Furthermore, the present invention (claim 8) is an invention of a vacuum pump, comprising judgment means for judging disconnection or short circuit of a cable with respect to the first terminal and the second terminal of the temperature control function unit, It is characterized in that when the determination means determines that a disconnection or a short circuit occurs, the input signal to the first terminal is not sensed, and control from the second terminal to the outside is not performed.

As a result, control setting for each terminal of the temperature control function unit can be performed automatically, and setting errors can be prevented. In addition, it is possible to prevent error output and erroneous control due to the abnormal input signal.

Further, the present invention (claim 9) is an invention of a vacuum pump, wherein the judging means carries out judgment of disconnection or short circuit when the temperature control function unit rises.

Furthermore, the present invention (claim 10) is an invention of a control device for temperature adjustment, comprising: a control unit for monitoring and controlling a motor and a magnetic bearing incorporated in a pump body; and at least one of the control body disposed in the pump body. It is a control device for temperature control provided with a temperature control function part which measures a temperature of the pump body by a temperature sensor and controls at least one heater or a solenoid valve based on the temperature, wherein the temperature control function part It has a first terminal to which a temperature sensor can be connected or detached, and a second terminal to which the heater or the solenoid valve can be connected or detached, and an input signal to the first terminal is normally input It is characterized by having a self-diagnosis part which can carry out self-diagnosis whether it was properly output from the 2nd terminal or not.

Furthermore, the present invention (claim 11) is an invention of a jig for inspection of a temperature control function unit, wherein the temperature of the pump body is measured by at least one temperature sensor disposed in the pump body, and It is a jig for inspection of the temperature control function part which controls at least one heater or a solenoid valve based on the above, and the temperature control function part is the 1st terminal which can connect or can remove the temperature sensor, the heater or the It has a second terminal to which a solenoid valve can be connected or disconnected, and whether or not an input signal to the first terminal is normally input or is normally output from the second terminal And a self-diagnosis unit capable of self-diagnosis.

Furthermore, the present invention (claim 12) is an invention of a method for diagnosing the presence or absence of an abnormality in the temperature control function unit, wherein the temperature of the pump body is measured by at least one temperature sensor disposed in the pump body; It is a method of diagnosing temperature existence of a temperature control function part which controls at least one heater or a solenoid valve based on the temperature and existence of an output, wherein the temperature control function part can connect or remove the temperature sensor. A first terminal, and a second terminal capable of connecting or disconnecting the heater or the solenoid valve, and whether or not the input signal to the first terminal is normally input, or the second It is possible to self-diagnose whether or not the output is normal from the terminal of the terminal, and instead of the temperature sensor, a first load for dummy is connected to the first terminal, and the heater or the solenoid valve is connected to the second terminal. Instead of When the voltage applied to the first load is a preset voltage value, it is determined that the temperature sensor has reached a predetermined temperature value in a pseudo manner, and the pseudo load is determined. Supply a predetermined current to the second load or control the stop based on the result, and the preset voltage value corresponds to ON / OFF of the heater or opening / closing of the solenoid valve It is characterized in that the control of the current to the second load is prepared independently for each of the heater or the solenoid valve.

As described above, according to the present invention (claim 1), it is possible to self-diagnose whether the measurement signal from the temperature sensor is normally input or whether the signal is normally output to the heater or the solenoid valve. Since the self-diagnosis unit is provided, only the input path by the temperature sensor and the output path of the heater and the solenoid valve are inspected. Thus, the diagnostic program for the examination is simple. For this reason, it can be configured at low cost, and a large-scale inspection tool such as a personal computer incorporating a dedicated program is unnecessary.

Overall system configuration diagram of the embodiment of the present invention Configuration diagram of turbo molecular pump Diagram showing the front and rear faces of the TMS controller housing Conceptual diagram of rotary switch Diagram explaining an input judgment method using a resistor for the thermistor dummy Method of detecting temperature based on voltage generated in dummy resistor (Part 1) Method of detecting temperature based on voltage generated in dummy resistor (Part 2) Flow chart describing the operation of an embodiment of the present invention Diagram explaining how to determine simulated output for heater and solenoid valve Image of the relationship between thermistor resistance and measured voltage An example of conventional TMS control

Hereinafter, embodiments of the present invention will be described. FIG. 1 shows an overall system configuration of an embodiment of the present invention, and FIG. 2 shows a configuration of a turbo molecular pump.
Although the control device 200 is described separately from the pump main body 100 in FIG. 1, the turbo molecular pump can be applied to this embodiment even if the pump main body 100 and the control device 200 are integrated. .

The control device 200 is supplied with 200 volts AC power. The control device 200 monitors and controls the state of a motor 121 and magnetic bearings 104, 105, 106, which will be described later, which are built in the pump main body 100. A dedicated inspection jig, an I / O board, a personal computer or the like can be connected to the port 201 at the control device 200.

A terminal 203 is disposed in the control device 200, and one end of an extension cable 211 is connected to the terminal 203. On the other hand, the other end of the extension cable 211 is connected to a terminal 301 of a TMS control device 300 which performs TMS control for temperature adjustment to the pump body 100. The TMS controller 300 is also supplied with 200 volt AC power. The extension cable 211 can be omitted depending on the connection when the control device 200 and the TMS control device 300 are provided.
The TMS controller 300 is provided with four channels, each of which receives an input signal and an output signal. In the channel 1, in order to measure the ambient temperature heated by the TMS heater 151, a signal from the TMS temperature sensor 155 provided near the disposition of the TMS heater 151 is input. Then, an AC power supply of 200 volts is turned on or off with respect to the TMS heater 151 disposed in the pump body 100.

Further, in this channel 2, a signal from a water cooling temperature sensor 157 provided in the vicinity of the arrangement of a water cooling pipe 152 described later for measuring a temperature cooled by opening and closing the solenoid valve 153 is inputted. It has become. Then, a 24 volt DC power supply is turned on or off with respect to a water cooling solenoid valve 153 disposed in the pump body 100.

In the channel 3, a signal from an exhaust port temperature sensor 161 provided near the disposition of the exhaust port heater 159 is input. An AC power supply of 200 volts is turned on or off with respect to the exhaust port heater 159 disposed on the side of the pump body 100.

Thus, the TMS controller 300 is configured to control one solenoid valve, two heaters, and three temperature sensors independently of the controller 200. Channel 4 is provided as a reserve for additional temperature control.
Although the number of channels has been described as four, it is not limited to this, and it is desirable to appropriately set according to the number of temperature control required. Further, the number of solenoid valves and heaters to be controlled is not limited to the above number, and it is possible to switch which of the channels is controlled by changing the setting in the channel.
Also, the temperature control function of the TMS control device 300 may be integrated into the control device 200.
Next, the pump body 100 will be described.

In FIG. 2, an intake port 101 is formed at the upper end of the cylindrical outer cylinder 127 of the pump body 100. Inside the outer cylinder 127, there is provided a rotary body 103 in which a plurality of rotary blades 102a, 102b, 102c.

A rotor shaft 113 is attached to the center of the rotating body 103, and the rotor shaft 113 is float-supported and position-controlled in the air by, for example, a so-called 5-axis control magnetic bearing.

In the upper radial electromagnet 104, four electromagnets are arranged in pairs in the X-axis and the Y-axis which are coordinate axes in the radial direction of the rotor shaft 113 and are orthogonal to each other. An upper radial sensor 107 consisting of four electromagnets is provided in proximity to and corresponding to the upper radial electromagnet 104. The upper radial sensor 107 detects the radial displacement of the rotor shaft 113 and sends it to the control device 200.

In the control device 200, based on the displacement signal detected by the upper radial direction sensor 107, the excitation of the upper radial electromagnet 104 is controlled via a compensation circuit having a PID adjustment function, and the radial position of the upper side of the rotor shaft 113 is determined. adjust.

The rotor shaft 113 is formed of a high magnetic permeability material (iron or the like) and is attracted by the magnetic force of the upper radial electromagnet 104. Such adjustment is independently performed in the X-axis direction and the Y-axis direction.

Also, the lower radial electromagnet 105 and the lower radial sensor 108 are disposed in the same manner as the upper radial electromagnet 104 and the upper radial sensor 107, and the lower radial position of the rotor shaft 113 is the upper radial position. It is adjusted in the same way.

Further, the axial electromagnets 106A and 106B are disposed above and below the disk-shaped metal disk 111 provided at the lower part of the rotor shaft 113. The metal disk 111 is made of a high magnetic permeability material such as iron. An axial sensor 109 is provided to detect an axial displacement of the rotor shaft 113, and the axial displacement signal is sent to the control device 200.

The axial electromagnets 106A and 106B are controlled to be excited based on the axial displacement signal via a compensation circuit having a PID adjustment function of the control device 200. The axial electromagnet 106A and the axial electromagnet 106B attract the metal disk 111 upward and downward, respectively, by the magnetic force.

Thus, the control device 200 appropriately adjusts the magnetic force exerted by the axial electromagnets 106A and 106B on the metal disk 111, magnetically floats the rotor shaft 113 in the axial direction, and holds the rotor shaft 113 in a noncontact manner. ing.

The motor 121 has a plurality of magnetic poles circumferentially arranged to surround the rotor shaft 113. Each magnetic pole is controlled by the control device 200 so as to rotationally drive the rotor shaft 113 via an electromagnetic force acting on the rotor shaft 113.

A plurality of fixed wings 123a, 123b, 123c,... Are disposed with a slight air gap from the rotary wings 102a, 102b, 102c,. The rotary wings 102a, 102b, 102c,... Are inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113 in order to transfer exhaust gas molecules downward by collision.

Further, the fixed wing 123 is similarly formed inclined at a predetermined angle from a plane perpendicular to the axis of the rotor shaft 113, and is disposed alternately with the step of the rotary wing 102 toward the inside of the outer cylinder 127. ing.
Further, one end of the fixed wing 123 is supported in a state of being fitted between the plurality of stacked fixed wing spacers 125a, 125b, 125c.

The fixed wing spacer 125 is a ring-shaped member, and is made of, for example, a metal such as aluminum, iron, stainless steel, copper or a metal such as an alloy containing such a metal as a component.

An outer cylinder 127 is fixed to the outer periphery of the fixed wing spacer 125 with a slight air gap. A base portion 129 is disposed at the bottom of the outer cylinder 127, and a threaded spacer 131 is disposed between the lower portion of the fixed wing spacer 125 and the base portion 129. An exhaust port 133 is formed in the lower portion of the threaded spacer 131 in the base portion 129 and is communicated with the outside. An exhaust port heater 159 is disposed around the exhaust port 133. An exhaust port temperature sensor 161 is disposed near the exhaust port heater 159.

The threaded spacer 131 is a cylindrical member made of a metal such as aluminum, copper, stainless steel, iron, or an alloy containing these metals as a component, and a plurality of helical screw grooves 131 a are formed on the inner peripheral surface thereof. It is paved.
The direction of the spiral of the thread groove 131 a is a direction in which the molecules of the exhaust gas are transferred toward the exhaust port 133 when the molecules of the exhaust gas move in the rotation direction of the rotating body 103.

At the lowermost portion following the rotary wings 102a, 102b, 102c, ... of the rotary body 103, a cylindrical portion 102d is suspended. The outer peripheral surface of the cylindrical portion 102d is cylindrical and protrudes toward the inner peripheral surface of the threaded spacer 131, and is adjacent to the inner peripheral surface of the threaded spacer 131 with a predetermined gap therebetween. There is. A TMS heater 151 is disposed on the threaded spacer 131. The TMS temperature sensor 155 is embedded in the threaded spacer 131. Although the threaded spacer 131 is directly heated in the present embodiment, it may be indirectly heated by heating the base 129.

The base part 129 is a disk-like member which comprises the base part of the turbo-molecular pump 10, and is generally comprised with metals, such as iron, aluminum, stainless steel. Further, a water cooling pipe 152 is embedded in an annular shape in the base portion 129. A water cooling temperature sensor 157 is disposed on the side of the water cooling pipe 152.

The base portion 129 physically holds the turbo molecular pump 10 and also functions as a heat conduction path, so metals such as iron, aluminum, copper, etc. having rigidity and high thermal conductivity are used. Is desirable.

In such a configuration, when the rotary vane 102 is driven by the motor 121 and rotates with the rotor shaft 113, the exhaust gas from the chamber is sucked through the inlet 101 by the action of the rotary vane 102 and the fixed wing 123.

The exhaust gas taken in from the intake port 101 passes between the rotary blade 102 and the fixed wing 123 and is transferred to the base portion 129. At this time, the temperature of the rotary blade 102 rises due to the frictional heat generated when the exhaust gas contacts or collides with the rotary blade 102, the conduction or radiation of the heat generated by the motor 121, etc. The conduction of the exhaust gas by gas molecules and the like is transmitted to the fixed blade 123 side.

The fixed wing spacer 125 is joined to each other at the outer peripheral portion, and the heat received by the fixed wing 123 from the rotary wing 102 or the frictional heat generated when the exhaust gas comes into contact with or collides with the fixed wing 123 It is transmitted to the attached spacer 131.
The exhaust gas transferred to the threaded spacer 131 is sent to the exhaust port 133 while being guided by the threaded groove 131a.

Next, the TMS control device 300 will be described.
The TMS control device 300 is a device having a temperature adjustment function of the pump main body 100, and the appearance of the front surface and the rear surface of the housing is shown in FIG. 3 as an explanation of the function. On the rear surface of this TMS control unit 300, in the normal operation, in addition to the TMS heater 151, the exhaust port heater 159 and the solenoid valve 153, there are terminals for the TMS temperature sensor 155, the water cooling temperature sensor 157 and the exhaust port temperature sensor 161. It is connected. On the other hand, at the time of the inspection of the temperature control function, the terminals for the heater, the solenoid valve and the sensor are removed from the rear surface. And instead, the terminal following the dummy circuit for a test | inspection corresponding to these heaters, a solenoid valve, and a sensor is connected. All dummy circuits are built in the inspection jig 400.

This inspection jig 400 does not require an external inspection device, and enables diagnosis of whether there is an abnormality in the input / output path in the temperature adjustment function.
The rotary switch 401 shown in FIG. 4 is disposed on the inspection jig 400. The rotary switch 401 is configured such that connection is switched from the contact 431 to the contact 434 by rotation of the operation shaft 405 around the common terminal 403.
When the operation shaft 405 contacts the contact point 431, the common terminal 403 and the terminal 407 are shorted. When the operation shaft 405 contacts the contact point 432, the fixed resistor R1 is connected between the common terminal 403 and the terminal 407. When the operation shaft 405 contacts the contact point 433, the fixed resistor R 2 is connected between the common terminal 403 and the terminal 407. When the operation shaft 405 contacts the contact point 434, the common terminal 403 and the terminal 407 are in an open state.

In inspection jig 400, common terminals 403 and terminals 407 on inspection jig 400 can be connected to terminals 303 and 305 on TMS controller 300, respectively, as shown in FIG. ing. Terminal 305 is grounded and terminal 303 is connected to a 3.3 volt DC power supply via resistor _R0 . The voltage of the terminal 303 is A / D converted and then input to the CPU 307. In FIG. 5, a resistor _RT is a simplified summary of the fixed resistor R1, the fixed resistor R2, and the like, and corresponds to a dummy resistor of a thermistor. That is, the resistance _RT is a resistance realized by simulating a certain temperature of a thermistor mounted inside the pump body 100.

Since the resistance value of the thermistor generally changes in accordance with the temperature, the temperature is determined if the resistance value is known. For this reason, as shown in the equivalent circuit of FIG. 6, it is possible to read the temperature value by measuring the voltage across the resistor _RT and reading the code obtained by converting the voltage value into a digital as shown in FIG. The resistance R ₀ or 3.3 V power supply does not change from that during operation, so if the temperature measured by the thermistor is simulated and replaced with the resistance value of the thermistor at this time, that temperature The same situation as when measuring

For example, the fixed resistance R1 in FIG. 4 corresponds to a temperature 80 degrees at which the TMS heater 151 is turned on when the lower limit temperature for TMS control is 80 degrees, and the fixed resistance R2 sets the upper limit temperature for TMS control 150 degrees In this case, the temperature corresponding to 150 degrees at which the TMS heater 151 is turned off is set. The short circuit condition corresponds to a temperature of 400 degrees on the temperature characteristic of a thermistor (not shown), and the open condition corresponds to a temperature of -60 degrees. The assumed temperature by the dummy resistance in the diagnosis is not limited to the above temperature, and is preferably set in accordance with the set temperature for driving the TMS heater and the solenoid valve.

Next, the operation of the embodiment of the present invention will be described.
FIG. 8 is a flow chart for explaining the operation of the embodiment of the present invention.
First, in step 1 (shown as S1 in the figure, and so forth), the power switch of the TMS control device 300 is turned on. In step 2, measurement is started, and in step 3, it is determined whether or not the terminals 303 and 305 shown in FIG. 5 are short circuited. Except when the inspection jig 400 is connected to the TMS control device 300 and the operation shaft 405 is in contact with the contact 431 in the rotary switch 401, it is incorporated in the TMS control device 300 in step 4. Proceed to a mode in which normal TMS temperature control is performed by the executed software. That is, when the inspection jig 400 is not connected to the TMS control device 300, the process proceeds to a mode in which normal TMS temperature control is performed by software in step 4.

On the other hand, when the operation shaft 405 is in contact with the contact point 431 and the terminal 303 and the terminal 305 are short-circuited, the process shifts to the self-diagnosis mode after step 5 and a test program independent of the normal temperature control program runs. The inspection program is also incorporated in the TMS controller 300. At this time, the power LED 421 provided on the front surface of the TMS control device 300 shown in FIG. During the test, the test program continues to monitor the voltage between terminal 303 and terminal 305.

Next, the rotary switch 401 of the inspection jig 400 is switched to the contact point 432. In step 6, measurement is performed, and the inspection program detects, for example, the fixed resistance R1 corresponding to the TMS temperature sensor 155 from the voltage value converted. In step 7, it is determined whether the pseudo temperature is 80 degrees based on this voltage value. Then, if it is detected that the pseudo temperature is 80 degrees, the process proceeds to the next step 8, and a simulated output equivalent to turning on the TMS heater 151 between the terminal 309 and the terminal 311 of the TMS control device 300 shown in FIG. Do.

In FIG. 9, a lamp 413 and a fixed resistor 415 are connected in series between the terminal 409 and the terminal 411 of the inspection jig 400. According to this structure, the lamp 413 is turned on only when a current equal to or greater than a predetermined current value flows. The terminal 311 on the TMS control device 300 side connected to the terminal 411 is grounded. The terminal 409 and the terminal 309 on the side of the TMS control device 300 are connected, and in step 8 a current sufficient for turning on the TMS heater 151 is supplied from the terminal 309. As a result, the lamp 413 disposed in the inspection jig 400 is turned on, so it can be determined that the TMS heater 151 has been turned on in a pseudo manner. In addition, although it demonstrated as arrange | positioning the lamp | ramp 413 here, an electric current meter etc. may be arrange | positioned.

Next, the rotary switch 401 of the inspection jig 400 is switched to the contact point 433. In step 9, measurement is performed, and the test program detects the fixed resistance R2 corresponding to the TMS temperature sensor 155 from the voltage value converted. In step 10, it is determined whether the pseudo temperature is 150 degrees based on the voltage value. Then, when it is detected that the pseudo temperature is 150 degrees, the process proceeds to the next step 11, and the output current flowing between the terminal 309 and the terminal 311 of the TMS control device 300 is disconnected. At this time, since the lamp 413 is turned off, it can be determined that the TMS heater 151 has been turned off in a pseudo manner.

Subsequently, when the open state is detected by switching the rotary switch 401 to the contact point 434 in step 13 by the measurement in step 12, the series of inspections are determined to be pass in step 14. In step 14, the LED lamp 422 disposed on the front surface of the TMS controller 300 shown in FIG. 3 is turned on to confirm that the series of input inspection and output inspection for the TMS temperature sensor 155 and the TMS heater 151 have passed. indicate.

That is, the rotary switch 401 is switched in the order of the short-circuited state at the contact 431, the state at the temperature 80 degrees at the contact 432, the state at the temperature 150 degrees at the contact 433 and the open state at the contact 434. I will not pass.
Similarly, the combination of the exhaust port temperature sensor 161 and the exhaust port heater 159 can be similarly inspected by the program of this self-diagnosis mode. In this case, since the operating temperature is different between the TMS temperature sensor 155 and the TMS heater 151, the resistance value of the fixed resistor R1 and the resistance value of the fixed resistor R2 are for inspection of the exhaust port temperature sensor 161 and the exhaust port heater 159. It has been changed to As to the combination of the exhaust port temperature sensor 161 and the exhaust port heater 159, the LED lamp 423 disposed on the front surface of the TMS control device 300 is turned on to indicate that the result is acceptable.

The same applies to the combination of the water cooling temperature sensor 157 and the solenoid valve 153. It is only necessary to change the resistance value of the fixed resistor R1 and the resistance value of the fixed resistor R2 to those for inspection of the water-cooled temperature sensor 157 and the solenoid valve 153. In this case, the LED lamp 424 disposed on the front surface of the TMS control device 300 is turned on to indicate that the result is acceptable. As described above, since the sensor and the output of the heater and the solenoid valve are in one-to-one correspondence and each combination is independent, the program of the self-diagnosis mode can be independently corresponded in various ways.
At the end of the self-diagnosis mode, the TMS controller 300 is turned off.
The processes of steps 5 to 14 in the self-diagnosis mode may be omitted as necessary.
For example, when switching to the contact point 431 to enter the self-diagnosis mode of step 5, if the pseudo temperature is determined to be 400 degrees and the OFF output is simultaneously performed, the processing from step 9 to step 11 is simultaneously performed. It is possible to reduce the number of steps in the self-diagnosis mode. Further, regarding the inspection jig 400, parts such as the fixed resistance R2, the contact point 433 and the lamp 413 can be omitted, and the jig can be simplified.

Here, in the inspection equipment of the conventional temperature control function unit, there is no self-diagnosis mode as in this embodiment, and in the flow of inspection whether normal temperature control by software is operating normally or not Overall system checks were conducted in the form of including input / output function inspections of heaters and solenoid valves.
However, the logic and software of temperature control are sufficiently evaluated only at the time of development check, and there is a high possibility that problems with programs will not occur thereafter. Therefore, it can be considered as sufficient as a test if it is possible to inspect only whether there is an abnormality in the input / output path portion mainly composed of the sensor, the heater and the hardware of the solenoid valve.

Therefore, in the temperature control function unit of the present embodiment, the self-diagnosis function of checking only the input / output path portion is incorporated in the TMS control device 300 separately from the normal temperature control program.
However, the temperature control program and the self-diagnosis function may be incorporated together in the control device 200 that controls the motor 121 and the magnetic bearing.

If the TMS control device 300 and the control device 200 are configured separately as in this embodiment, the control device 200 and the inspection jig 400 can be made common regardless of the capacity of the turbo molecular pump. For this reason, the TMS controller 300 may be provided only when the capacity of the turbo molecular pump is large and the number of sensors for temperature control and the number of heaters and solenoid valves are large.

That is, even if the capacity of the turbo molecular pump is increased, the TMS controller 300 having only the temperature control function can be added to the controller 200 used in the conventional model and expanded. The inspection at this time can also be performed by a simple device only by connecting the inspection jig 400. The self-diagnosis program for the inspection regarding the sensor and the heater and the input / output path part of the solenoid valve is also simple. As described above, whether or not the input / output path is normal can be easily determined by the simple jig and the detection circuit in the TMS controller 300.
Therefore, even if the capacity of the turbo molecular pump is large and the number of sensors, heaters, and solenoid valves is large, there is no need to remodel the control device 200 to significantly expand the side of the control device, and the cost can be reduced. . In addition, it becomes unnecessary to prepare an external inspection device when developing a new type of turbo molecular pump. It also leads to the reduction of the corresponding items in the production launch of new models.

The inspection jig 400 for inspecting the TMS control device 300 has a simple configuration, can be inexpensive, and a large-scale inspection tool such as a personal computer incorporating a dedicated program is unnecessary, so it is easy to each service point Can be introduced.

In addition, since a personal computer is not required to inspect the temperature adjustment function, application software can not be used each time the OS is upgraded as in the prior art.
However, if the extension cable 211 connected to the terminal 301 of the TMS control device 300 shown in FIG. 1 is used and connected to the PC via the I / O device, it is possible to confirm the operation of the temperature control function on the PC.

Next, when the TMS control device 300 is used for a general purpose as described above, a function that enables safer pump operation will be described.
When the TMS controller 300 is operated in a versatile manner, it is necessary to individually set channels to be used and channels not to be used, as described below, in accordance with specifications such as the operating condition and capacity of the turbo molecular pump.

For example, in the case of the TMS controller 300 of FIG. 1, the channels 1 to 3 are connected to the temperature sensor and the heater or the solenoid valve, while the channel 4 is not connected. At this time, unless setting the unused channel 4 is disabled, there is a possibility that an abnormal signal is output to the outside if there is an abnormal input signal to the TMS control device 300 for some reason after the pump operation starts. is there. In addition, there is a risk of forgetting to make settings if the above settings are manually disabled.

FIG. 10 shows an image diagram of the relationship between the thermistor resistance and the measured voltage. This measured voltage corresponds to the voltage between the terminal 303 and the terminal 305 shown in FIG. By reading the voltage between the terminal 303 and the terminal 305 at startup, it is determined whether or not a cable is connected between the terminal 303 and the terminal 305. That is, when the voltage between the terminal 303 and the terminal 305 of each channel is between 3 A of the power supply voltage (broken line judging region) from the arrow line A (corresponding to about 2.9 volts) in FIG. Judge as a state. On the other hand, when it is between 0 volt (short circuit determination area) from arrow B (corresponding to about 0.1 volt) in FIG. Then, when the voltage value is in the disconnection determination region or the short circuit determination region at the time of startup as described above, the control setting of the channel is invalidated. However, it is desirable that the setting of the disconnection determination region or the short circuit determination region be determined in consideration of the voltage drop or the margin of the circuit or the cable.

When the control setting of the channel is invalidated, the abnormality of the temperature sensor is not detected after the start of the pump operation. Moreover, control of the output device to the heater with respect to the said temperature sensor or a solenoid valve is not performed. In addition, after it is determined that the channel is in the disconnection state or the short circuit state, an alarm can be output that the corresponding channel is invalidated in the disconnection state or the short circuit state to the outside as needed.
Such judgment and invalidation settings can be set for all channels. That is, channels that are not used can be automatically turned off.
For example, when the cable of the outlet temperature sensor 161 is not connected to the channel, for example, by changing to a specification not using the outlet heater 159, the control setting of the outlet heater 159 in the TMS control device 300 is automatically performed. It becomes invalid and can prevent forgetting to change control settings.

In addition, since an abnormality in the temperature sensor such as disconnection, short circuit, low temperature, high temperature, etc. is not detected for the disconnected input channel, an error is displayed outside even if there is any abnormal signal input after the start of pump operation. And there is no wrong control.
The determination of the disconnection or short circuit state is performed at the time of activation of the TMS control device 300 (at the time of rising of the temperature control function unit), and resetting of those for which invalidation setting has been made once is performed by the TMS control device 300. It can be done by rebooting.
As described above, by adopting this function in the TMS control device 300, control setting for each channel of the TMS control device 300 can be performed automatically, and setting errors can be prevented. In addition, it is possible to prevent an error output or an erroneous control due to an abnormal input signal.
The present invention can be modified in various ways without departing from the spirit of the present invention, and it goes without saying that the present invention extends to those modified as well.

DESCRIPTION OF SYMBOLS 10 turbo molecular pump 100 pump main body 133 exhaust port 151 heater 152 water cooling pipe 153 solenoid valve 155 TMS temperature sensor 157 water cooling temperature sensor 159 exhaust port heater 161 exhaust port temperature sensor 200 control apparatus 300 TMS control apparatus 301, 303, 305, 309, 311 terminal 400 inspection jig 401 rotary switch 403 common terminal 405 operation shaft 407, 409, 411 terminal 413 lamp 415 fixed resistance 421, 422, 423, 424, 425 LED lamp 431, 432, 433, 434 contact point

Claims (12)

1. A control unit that monitors and controls a motor and a magnetic bearing built in the pump body;
   A vacuum pump having a temperature control function unit that measures the temperature of the pump body by at least one temperature sensor disposed in the pump body and controls at least one heater or a solenoid valve based on the temperature.
   The temperature control function unit includes a first terminal to which the temperature sensor can be connected or removed.
   And a second terminal capable of connecting or disconnecting the heater or the solenoid valve,
   A vacuum pump comprising a self-diagnosis unit capable of self-diagnosis as to whether or not an input signal to the first terminal is normally input or whether it is normally output from the second terminal.
2. The temperature control function unit
   A dummy first load is connected to the first terminal instead of the temperature sensor,
   Temperature determination means for determining in a pseudo manner that the temperature sensor has reached a predetermined temperature value when the voltage applied to the first load is a preset voltage value;
   A second load for dummy is connected to the second terminal instead of the heater or the solenoid valve, and a predetermined current is supplied to the second load based on the determination result of the temperature determination means, or And output means for stopping
   The preset voltage values are prepared corresponding to ON and OFF of the heater or opening and closing of the solenoid valve,
   The vacuum pump according to claim 1, wherein the output means is configured independently for each of the heater or the solenoid valve.
3. The vacuum pump according to claim 2, wherein the pass / fail of the inspection is judged by judging ON / OFF of the heater or opening / closing of the solenoid valve in time series.
4. 3. The apparatus according to claim 2, further comprising: an output determination unit that determines in a pseudo manner that a predetermined output is performed to the heater or the solenoid valve when the predetermined current flows in the output unit. The vacuum pump according to 3.
5. The first load is a resistor having a resistance value corresponding to each of ON and OFF of the heater, or a resistor having a resistance value corresponding to each of opening and closing of the solenoid valve, and each resistance is a switch The vacuum pump according to any one of claims 2 to 4, which is switchable.
6. The vacuum pump according to any one of claims 2 to 5, wherein the temperature control function unit enters an inspection mode when it is confirmed that the first load is in a short circuit state.
7. The vacuum pump according to any one of claims 1 to 6, wherein the temperature control function unit is configured as a unit independent of the control unit.
8. It comprises a determination means for determining a break or a short circuit of a cable to the first terminal and the second terminal of the temperature control function unit,
   When it is determined by the determination means that a disconnection or a short circuit occurs, the input signal to the first terminal is not sensed, and control from the second terminal to the outside is not performed. The vacuum pump according to any one of 1 to 7.
9. The judging means
   9. The vacuum pump according to claim 8, wherein when the temperature control function unit starts up, determination of disconnection or short circuit is performed.
10. A control unit that monitors and controls a motor and a magnetic bearing built in the pump body;
    A temperature control device comprising a temperature control function unit that measures the temperature of the pump body by at least one temperature sensor disposed in the pump body and controls at least one heater or a solenoid valve based on the temperature. There,
    The temperature control function unit includes a first terminal to which the temperature sensor can be connected or removed.
    And a second terminal capable of connecting or disconnecting the heater or the solenoid valve,
    It has a self-diagnosis unit capable of self-diagnosis as to whether or not an input signal to the first terminal is normally input or whether it is normally output from the second terminal. Control device.
11. A test jig for a temperature control function unit, which measures the temperature of the pump body by at least one temperature sensor disposed in the pump body and controls at least one heater or a solenoid valve based on the temperature,
    The temperature control function unit includes a first terminal to which the temperature sensor can be connected or removed.
    And a second terminal capable of connecting or disconnecting the heater or the solenoid valve,
    The temperature control characterized in that it has a self-diagnosis unit capable of self-diagnosis whether an input signal to the first terminal is normally input or whether it is normally output from the second terminal. Jig for inspection of function part.
12. At least one temperature sensor provided in the pump body measures the temperature of the pump body, and based on the temperature, determines whether there is an abnormality in the temperature determination and the output of the temperature control function unit that controls the at least one heater or solenoid valve. A method of diagnosis,
    The temperature control function unit includes a first terminal to which the temperature sensor can be connected or removed.
    And a second terminal capable of connecting or disconnecting the heater or the solenoid valve,
    It is possible to self-diagnose whether the input signal to the first terminal is normally input or whether it is normally output from the second terminal,
    A dummy first load is connected to the first terminal instead of the temperature sensor,
    Connecting a second load for dummy to the second terminal instead of the heater or the solenoid valve;
    When the voltage applied to the first load is a preset voltage value, it is determined in a pseudo manner that the temperature sensor has reached a predetermined temperature value,
    A predetermined current is supplied to the second load or a stop is controlled based on the result of the pseudo determination,
    Preparing the preset voltage value corresponding to ON and OFF of the heater or opening and closing of the solenoid valve;
    The control of the current to the second load is configured independently for each of the heater or the solenoid valve.
    
    

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