WO2019010741A1 - Method for preparing robot skin with high flexibility - Google Patents

Method for preparing robot skin with high flexibility Download PDF

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Publication number
WO2019010741A1
WO2019010741A1 PCT/CN2017/096554 CN2017096554W WO2019010741A1 WO 2019010741 A1 WO2019010741 A1 WO 2019010741A1 CN 2017096554 W CN2017096554 W CN 2017096554W WO 2019010741 A1 WO2019010741 A1 WO 2019010741A1
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Prior art keywords
thermoplastic elastomer
skin
preparing
coupling agent
flexible
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PCT/CN2017/096554
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French (fr)
Chinese (zh)
Inventor
袁柳淑
吴航
贺盟
唐家烨
柏爱华
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江苏申源新材料有限公司
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Priority to KR1020177027142A priority Critical patent/KR20200034841A/en
Publication of WO2019010741A1 publication Critical patent/WO2019010741A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/02Sensing devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes

Definitions

  • the invention relates to the field of bionic robot manufacturing, and in particular to a flexible high-strength robot skin preparation method.
  • Tactile sensation is a necessary medium for robots to directly interact with the environment. Tactile sensation itself has strong sensitivity and can directly measure various properties of objects and environments.
  • Tactile skin A new wearable, flexible, bionic tactile electronic skin that gives the robot a human, animal-like touch that makes it more intelligent and user-friendly. In order to cover complex three-dimensional surfaces such as robots and moving joint parts, the tactile skin usually must also have properties such as high flexibility and high elasticity.
  • the present invention discloses a flexible high-strength robot skin preparation method.
  • the present invention provides the following technical solutions:
  • a flexible high-strength robot skin preparation method comprising the following steps:
  • thermoplastic elastomer base material by using a plasma device to prepare a flexible elastic matrix having a repeating unit of 1-100 micrometers, micro-nano processing by photolithography, microfluidic, 3D printing The process, introducing particles on the surface of the repeating unit, realizes pre-preparation of micro-nano patterning of the surface of the flexible substrate.
  • the sensor electronic chip component is coated with a coupling agent, and the surface-treated pressure sensor electronic chip original is implanted into the thermoplastic elastomer matrix by embedding.
  • the thermoplastic elastomer base material in S1 is a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a diene-based thermoplastic elastomer, a vinyl chloride-based thermoplastic elastomer or a polyurethane-based thermoplastic elastomer.
  • the etching in S1 is performed at a pressure of 0.1-100 MPa and a power of 600-2000 W for 0.1-60 min.
  • the repeating unit in S1 is a lattice, a strip matrix or a strip grating with a pitch of 1-100 micrometers.
  • the concentration of the graphene or carbon nanotube solution in the S2 is from 0.001 to 100 mg/mL.
  • the conductive layer in the S2 has a thickness of 30-150 microns.
  • the coupling agent in the S3 is a silane coupling agent, a titanate coupling agent or a zirconium coupling agent.
  • the invention has the beneficial effects that the electronic chip and the matrix material of the invention can be effectively combined, which is beneficial to the performance of the chip, and is advantageous for expanding the application range of the electronic skin; the invention uses the thermoplastic elastomer as the outer layer of the skin, which is beneficial to the invention. Enhances skin elasticity, ductility and weatherability.
  • thermoplastic elastomers are abbreviated as TPE.
  • a flexible elastic matrix is prepared.
  • the flexible elastic matrix has a repeating unit of 1-100 ⁇ m, a 1-100 ⁇ m dot matrix, a strip matrix or a strip grating, and then passes through photolithography, microfluidics, and 3D printing.
  • the nano-machining process introduces 1-100 nm particles on the surface of the repeating unit, and further micro-nano patterning is designed on the surface of the pre-prepared flexible substrate.
  • a 0.001-100 mg/mL graphene or carbon nanotube solution is sprayed on the surface of the patterned substrate as a conductive layer, and the thickness of the control liquid layer is 30-150 ⁇ m.
  • the sensor electronic chip component is coated with a silane coupling agent, a titanate coupling agent or a zirconium coupling agent to improve the compatibility with the substrate, and the surface-treated pressure sensor is embedded by the embedding method.
  • the electronic chip original is implanted into the TPE matrix.
  • a plasma-based surface patterned TPE substrate with a repeating unit size of 10 ⁇ m and a pitch of 10 ⁇ m was prepared by treating the vinyl chloride-based TPE with a plasma device at 1000 W power and 10 MPa for 20 minutes, and then using light.
  • the surface is further micro-nano-processed by an etching method to obtain a micro-nano patterned substrate having uniformly distributed 50 nm particles at the lattice point.
  • a 10 mg/mL graphene solution was applied to the surface of the patterned substrate to control the thickness of the liquid layer to 50 microns.
  • the pressure sensitive electronic skin is prepared by treating the pressure sensor electronic chip with a titanate coupling agent and then implanting it into the TPE matrix by embedding.

Abstract

A method for preparing a robot skin with high flexibility comprises the following steps: S1: etching a substrate material of a thermoplastic elastomer by using a plasma device, so as to prepare a flexible elastic substrate, the repetitive unit of the flexible elastic substrate ranging from 1 micrometer to 100 micrometers, and introducing particles to the surface of the repetitive unit by means of micro-nano treatment processes related to photoetching, microfluidic control and 3D printing; S2: spraying graphene or a carbon nanotube solution on the surface of the micro-nano-patterned flexible substrate, serving as a conductive layer; and S3: coating a layer of coupling agent on an electronic chip element of a sensor, and implanting the electronic chip element of the pressure sensor on which surface treatment has been performed, into the substrate of thermoplastic elastomer by an embedding method. The electronic chip and the substrate material can be effectively combined, which facilitates the performance of the chip and helps to expand the application scope of the electronic skin.

Description

一种柔韧高强机器人皮肤制备方法Flexible and strong robot skin preparation method 技术领域Technical field
本发明涉及仿生机器人制造领域,尤其涉及一种柔韧高强机器人皮肤制备方法。The invention relates to the field of bionic robot manufacturing, and in particular to a flexible high-strength robot skin preparation method.
背景技术Background technique
随着信息化、工业化不断融合,以机器人科技为代表的智能产业蓬勃兴起。人们期待未来能够研发出与人和其他生物体更加接近的仿人仿生机器人。触觉是机器人等实现与环境直接作用的必需媒介,触觉本身有很强的敏感能力,可直接测量对象和环境的多种性质。触感皮肤新型可穿戴柔性且具有仿生触觉的电子皮肤,它能够赋予机器人具备人类、动物一样的触觉,使其变得更加智能化和人性化。为了覆盖机器人等复杂的三维表面和活动的关节部位,触感皮肤通常还必须具有高柔性与高弹性等性质。With the integration of informationization and industrialization, the intelligent industry represented by robotics technology is booming. People look forward to the development of humanoid bionic robots that are closer to people and other organisms in the future. Tactile sensation is a necessary medium for robots to directly interact with the environment. Tactile sensation itself has strong sensitivity and can directly measure various properties of objects and environments. Tactile skin A new wearable, flexible, bionic tactile electronic skin that gives the robot a human, animal-like touch that makes it more intelligent and user-friendly. In order to cover complex three-dimensional surfaces such as robots and moving joint parts, the tactile skin usually must also have properties such as high flexibility and high elasticity.
目前,日本和美国的部分研究组已经报道了基于有机场效应晶体管型、电容式和压阻式的电子皮肤,但却各有利弊,例如,刚性硅基材料的使用使得器件具有非透明和非柔性,电子芯片与基体材料不能有效结合的问题,这阻碍芯片效能的发挥,大大限制了电子皮肤的应用范围。具有柔性、高强度、高灵敏度且耐用的触感皮肤有待进一步的开发。At present, some research groups in Japan and the United States have reported electronic skin based on organic field effect transistor type, capacitive type and piezoresistive type, but each has its own advantages and disadvantages. For example, the use of rigid silicon-based materials makes the device non-transparent and non-transparent. Flexible, the problem that the electronic chip and the matrix material cannot be effectively combined, which hinders the performance of the chip, and greatly limits the application range of the electronic skin. A tactile skin with flexibility, high strength, high sensitivity and durability is yet to be further developed.
发明内容Summary of the invention
为解决上述问题,本发明公开了一种柔韧高强机器人皮肤制备方法。 In order to solve the above problems, the present invention discloses a flexible high-strength robot skin preparation method.
为了达到上述目的,本发明提供如下技术方案:In order to achieve the above object, the present invention provides the following technical solutions:
一种柔韧高强机器人皮肤制备方法,包含以下步骤:A flexible high-strength robot skin preparation method comprising the following steps:
S1:利用等离子体设备对热塑性弹性体基体材料进行刻蚀以制备柔性弹性基体,所述柔性弹性基体的重复单元为1-100微米,通过光刻蚀、微流控、3D打印的微纳米加工工艺、在重复单元表面引入颗粒,实现预制备好柔性基底表面的微纳米图案化。S1: etching a thermoplastic elastomer base material by using a plasma device to prepare a flexible elastic matrix having a repeating unit of 1-100 micrometers, micro-nano processing by photolithography, microfluidic, 3D printing The process, introducing particles on the surface of the repeating unit, realizes pre-preparation of micro-nano patterning of the surface of the flexible substrate.
S2:将石墨烯或碳纳米管溶液喷涂在微纳米图案化的柔性基底表面,作为导电层。S2: spraying a graphene or carbon nanotube solution on the surface of the micro-nano patterned flexible substrate as a conductive layer.
S3:传感器电子芯片元件上涂覆一层偶联剂,通过包埋法把表面处理过的压力传感器电子芯片原件植入到热塑性弹性体基体中。S3: The sensor electronic chip component is coated with a coupling agent, and the surface-treated pressure sensor electronic chip original is implanted into the thermoplastic elastomer matrix by embedding.
优选地,所述S1中的热塑性弹性体基体材料为苯乙烯类热塑性弹性体、烯烃类热塑性弹性体、二烯类热塑性弹性体、氯乙烯类热塑性弹性体或聚氨酯类热塑性弹性体。Preferably, the thermoplastic elastomer base material in S1 is a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, a diene-based thermoplastic elastomer, a vinyl chloride-based thermoplastic elastomer or a polyurethane-based thermoplastic elastomer.
优选地,所述S1中的刻蚀在0.1-100MPa的压力、600-2000W的功率下进行0.1-60min。Preferably, the etching in S1 is performed at a pressure of 0.1-100 MPa and a power of 600-2000 W for 0.1-60 min.
优选地,所述S1中的重复单元为间距1-100微米的点阵、条形矩阵或条状光栅。Preferably, the repeating unit in S1 is a lattice, a strip matrix or a strip grating with a pitch of 1-100 micrometers.
优选地,所述S2中的石墨烯或碳纳米管溶液的浓度为0.001-100mg/mL。Preferably, the concentration of the graphene or carbon nanotube solution in the S2 is from 0.001 to 100 mg/mL.
优选地,所述S2中的导电层厚度为30-150微米。Preferably, the conductive layer in the S2 has a thickness of 30-150 microns.
优选地,所述S3中的偶联剂为硅烷偶联剂、钛酸酯偶联剂或锆类偶联剂。 Preferably, the coupling agent in the S3 is a silane coupling agent, a titanate coupling agent or a zirconium coupling agent.
本发明的有益效果:本发明的电子芯片与基体材料能有效地进行结合,有利于芯片效能的发挥,有利于扩大电子皮肤的应用范围;本发明将热塑性弹性体作为皮肤的外层,有利于增强皮肤的弹性、延展性和耐候性。The invention has the beneficial effects that the electronic chip and the matrix material of the invention can be effectively combined, which is beneficial to the performance of the chip, and is advantageous for expanding the application range of the electronic skin; the invention uses the thermoplastic elastomer as the outer layer of the skin, which is beneficial to the invention. Enhances skin elasticity, ductility and weatherability.
具体实施方式Detailed ways
以下将结合具体实施例对本发明提供的技术方案进行详细说明,应理解下述具体实施方式仅用于说明本发明而不用于限制本发明的范围。The technical solutions provided by the present invention are described in detail below with reference to the specific embodiments, and the following detailed description is only to illustrate the invention and not to limit the scope of the invention.
以下热塑性弹性体简写为TPE。The following thermoplastic elastomers are abbreviated as TPE.
实施例1Example 1
一:利用等离子体设备对苯乙烯类TPE、烯烃类TPE、二烯类TPE、氯乙烯类TPE或聚氨酯类TPE基体材料在0.1-100兆帕压力、600-2000瓦功率下刻蚀0.1-60分钟,制备出柔性弹性基体,柔性弹性基体的重复单元为1-100微米,间距为1-100微米点阵、条形矩阵或条状光栅,然后通过光刻蚀、微流控、3D打印微纳米加工工艺在重复单元表面引入1-100nm颗粒,对预制备好柔性基底表面进行进一步微纳米图案化设计。A: Using plasmonic equipment to etch 0.1-60 of styrene TPE, olefinic TPE, diene TPE, vinyl chloride TPE or polyurethane TPE matrix material at a pressure of 0.1-100 MPa and 600-2000 watts. Minutes, a flexible elastic matrix is prepared. The flexible elastic matrix has a repeating unit of 1-100 μm, a 1-100 μm dot matrix, a strip matrix or a strip grating, and then passes through photolithography, microfluidics, and 3D printing. The nano-machining process introduces 1-100 nm particles on the surface of the repeating unit, and further micro-nano patterning is designed on the surface of the pre-prepared flexible substrate.
二:把0.001-100mg/mL石墨烯或碳纳米管溶液喷涂在图案化基体表面上作为导电层,控制液层厚度为30-150微米。Second, a 0.001-100 mg/mL graphene or carbon nanotube solution is sprayed on the surface of the patterned substrate as a conductive layer, and the thickness of the control liquid layer is 30-150 μm.
三:传感器电子芯片元件上涂覆一层硅烷偶联剂、钛酸酯偶联剂或锆类偶联剂,提高其与基体的相容性,通过包埋法把经表面处理过的压力传感器电子芯片原件植入到TPE基体中。 Third: the sensor electronic chip component is coated with a silane coupling agent, a titanate coupling agent or a zirconium coupling agent to improve the compatibility with the substrate, and the surface-treated pressure sensor is embedded by the embedding method. The electronic chip original is implanted into the TPE matrix.
实施例2Example 2
通过点阵设计程序,首先利用等离子体设备在1000W功率,10MPa压力处理氯乙烯类TPE 20分钟制得重复单元尺寸尺寸为10微米和间距为10微米点阵化表面图案化TPE基体,然后采用光刻蚀法对表面进一步微纳米加工,制得阵点上有均匀分布50nm颗粒的微纳米图案化基体。把10mg/mL石墨烯溶液涂敷在图案化基体表面上,控制液层厚度为50微米。利用钛酸酯偶联剂处理压力传感器电子芯片,然后通过包埋将其植入TPE基体中即可制得压力敏感性柔性电子皮肤。Through the dot matrix design process, firstly, a plasma-based surface patterned TPE substrate with a repeating unit size of 10 μm and a pitch of 10 μm was prepared by treating the vinyl chloride-based TPE with a plasma device at 1000 W power and 10 MPa for 20 minutes, and then using light. The surface is further micro-nano-processed by an etching method to obtain a micro-nano patterned substrate having uniformly distributed 50 nm particles at the lattice point. A 10 mg/mL graphene solution was applied to the surface of the patterned substrate to control the thickness of the liquid layer to 50 microns. The pressure sensitive electronic skin is prepared by treating the pressure sensor electronic chip with a titanate coupling agent and then implanting it into the TPE matrix by embedding.
测试1Test 1
对用实施例2制得的样品皮肤机国外常规产品进行综合性能测试,其结果如表1The comprehensive performance test of the conventional skin products of the sample skin machine prepared in Example 2 was carried out, and the results are shown in Table 1.
表1Table 1
Figure PCTCN2017096554-appb-000001
Figure PCTCN2017096554-appb-000001
由表1的检测结果可以看出:实施例2制得的产品的压力敏感度、压力检测极限、韧性、强度和耐候性均优于国内外常规产品,具有较高的市场价值。 It can be seen from the test results of Table 1 that the pressure sensitivity, pressure detection limit, toughness, strength and weather resistance of the product prepared in Example 2 are superior to conventional products at home and abroad, and have high market value.
本发明方案所公开的技术手段不仅限于上述实施方式所公开的技术手段,还包括由以上技术特征任意组合所组成的技术方案。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也视为本发明的保护范围。 The technical means disclosed in the solution of the present invention is not limited to the technical means disclosed in the above embodiments, and includes a technical solution composed of any combination of the above technical features. It should be noted that a number of modifications and refinements may be made by those skilled in the art without departing from the principles of the invention, and such modifications and refinements are also considered to be within the scope of the invention.

Claims (7)

  1. 一种柔韧高强机器人皮肤制备方法,其特征在于:包含以下步骤:A flexible high-strength robot skin preparation method, comprising: the following steps:
    S1:利用等离子体设备对热塑性弹性体基体材料进行刻蚀以制备柔性弹性基体,所述柔性弹性基体的重复单元为1-100微米,通过光刻蚀、微流控、3D打印的微纳米加工工艺、在重复单元表面引入颗粒,实现预制备好柔性基底表面的微纳米图案化;S1: etching a thermoplastic elastomer base material by using a plasma device to prepare a flexible elastic matrix having a repeating unit of 1-100 micrometers, micro-nano processing by photolithography, microfluidic, 3D printing Process, introducing particles on the surface of the repeating unit to realize pre-preparation of micro-nano patterning of the surface of the flexible substrate;
    S2:将石墨烯或碳纳米管溶液喷涂在微纳米图案化的柔性基底表面,作为导电层;S2: spraying a graphene or carbon nanotube solution on the surface of the micro-nano patterned flexible substrate as a conductive layer;
    S3:传感器电子芯片元件上涂覆一层偶联剂,通过包埋法把表面处理过的压力传感器电子芯片原件植入到热塑性弹性体基体中。S3: The sensor electronic chip component is coated with a coupling agent, and the surface-treated pressure sensor electronic chip original is implanted into the thermoplastic elastomer matrix by embedding.
  2. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S1中的热塑性弹性体基体材料为苯乙烯类热塑性弹性体、烯烃类热塑性弹性体、二烯类热塑性弹性体、氯乙烯类热塑性弹性体或聚氨酯类热塑性弹性体。The method for preparing a skin of a flexible high-strength robot according to claim 1, wherein the thermoplastic elastomer base material in the S1 is a styrene-based thermoplastic elastomer, an olefin-based thermoplastic elastomer, or a diene-based thermoplastic elastomer. , a vinyl chloride-based thermoplastic elastomer or a polyurethane-based thermoplastic elastomer.
  3. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S1中的刻蚀在0.1-100MPa的压力、600-2000W的功率下进行0.1-60min。The method for preparing a skin of a flexible high-strength robot according to claim 1, wherein the etching in the S1 is performed at a pressure of 0.1-100 MPa and a power of 600-2000 W for 0.1-60 min.
  4. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S1中的重复单元为间距1-100微米的点阵、条形矩阵或条状光栅。The method for preparing a flexible high-strength robot skin according to claim 1, wherein the repeating unit in the S1 is a dot matrix, a strip matrix or a strip grating with a pitch of 1-100 μm.
  5. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S2中的石墨烯或碳纳米管溶液的浓度为0.001-100mg/mL。 The method for preparing a flexible high-strength robot skin according to claim 1, wherein the concentration of the graphene or carbon nanotube solution in the S2 is 0.001-100 mg/mL.
  6. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S2中的导电层厚度为30-150微米。The method for preparing a flexible high-strength robot skin according to claim 1, wherein the conductive layer in the S2 has a thickness of 30 to 150 μm.
  7. 如权利要求1所述的一种柔韧高强机器人皮肤制备方法,其特征在于:所述S3中的偶联剂为硅烷偶联剂、钛酸酯偶联剂或锆类偶联剂。 The method for preparing a skin of a flexible high-strength robot according to claim 1, wherein the coupling agent in the S3 is a silane coupling agent, a titanate coupling agent or a zirconium coupling agent.
PCT/CN2017/096554 2017-07-14 2017-08-09 Method for preparing robot skin with high flexibility WO2019010741A1 (en)

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CN112175221A (en) * 2020-09-18 2021-01-05 郑州大学 Preparation method of surface-patterned piezoresistive electronic skin
CN116620446A (en) * 2023-07-26 2023-08-22 之江实验室 Humanoid robot thigh, humanoid robot and manufacturing method

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