WO2018165122A1 - Capteur de pression présentant un corps de compteur coplanaire doté d'une protection du capteur contre la surpression - Google Patents

Capteur de pression présentant un corps de compteur coplanaire doté d'une protection du capteur contre la surpression Download PDF

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Publication number
WO2018165122A1
WO2018165122A1 PCT/US2018/021096 US2018021096W WO2018165122A1 WO 2018165122 A1 WO2018165122 A1 WO 2018165122A1 US 2018021096 W US2018021096 W US 2018021096W WO 2018165122 A1 WO2018165122 A1 WO 2018165122A1
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WO
WIPO (PCT)
Prior art keywords
pressure
sensor
diaphragm
input
barrier
Prior art date
Application number
PCT/US2018/021096
Other languages
English (en)
Inventor
George Hershey
Ronald E. Beselt
Richard D. DAUGERT
Original Assignee
Honeywell International Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US15/632,005 external-priority patent/US20180259413A1/en
Application filed by Honeywell International Inc. filed Critical Honeywell International Inc.
Priority to EP18763768.1A priority Critical patent/EP3593104A4/fr
Priority to CN201880016952.9A priority patent/CN110402378B/zh
Publication of WO2018165122A1 publication Critical patent/WO2018165122A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G01L13/026—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms involving double diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0046—Fluidic connecting means using isolation membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

Definitions

  • This disclosure generally relates to pressure sensors. More specifically, this disclosure relates to a pressure sensor having a copianar meter body with sensor overpressure protection.
  • a differential pressure transmitter generally operates by providing two pressure values to a sensor.
  • the sensor converts a difference between the two pressure values into an electrical signal, which can then undergo additional signal processing.
  • the sensor may operate near a differential pressure that can cause failure of the sensor.
  • an overpressure mechanism can be employed to limit the differential pressure that is input to the sensor.
  • Various techniques have been developed for overpressure protection in differential pressure transmitters. However, these techniques are typically implemented using a "dual head" package. In a dual head package, a meter body has two opposing pressure heads, an overpressure mechanism is positioned between the pressure heads, and a sensor is mounted within or adjacent to the overpressure mechanism. While effective, tins approach can be expensive and heavy, due among other things to the unique materials often required to safely contain high pressure and corrosive process fluids. Also, multiple pressure heads and their associated bolts, nuts, gaskets, and other miscellaneous hardware are needed in this approach to connect to a manifold that carries the process fluids.
  • This disclosure provides a pressure sensor having a coplanar meter body with sensor overpressure protection.
  • an apparatus in a first embodiment, includes a sensor body and a sensor configured to measure differential pressure.
  • the apparatus also includes first and second coplanar pressure inputs in or on the sensor body, where the pressure inputs are configured to provide multiple input pressures to the sensor.
  • Each pressure input includes a harrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm.
  • a system in a second embodiment, includes a manifold and a pressure sensor mounted to the manifold.
  • the pressure sensor includes a sensor body and a sensor configured to measure differential pressure.
  • Hie pressure sensor also includes first and second coplanar pressure inputs in or on the sensor body, where the pressure inputs are configured to provide multiple input pressures to the sensor.
  • Each pressure input includes a barrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm.
  • a method in a third embodiment, includes conveying multiple input pressures to a sensor and measuring a differential pressure using the sensor.
  • the multiple input pressures are conveyed using first and second coplanar pressure inputs in or on a sensor body.
  • Each pressure input includes a barrier diaphragm configured to move in response to pressure and an overload diaphragm configured to limit movement of the barrier diaphragm.
  • FIGURE 1 illustrates an example industrial process control and automation system according to this disclosure
  • FIGURE 2 illustrates an example differential pressure sensor according to this disclosure
  • FIGURE 3 illustrates an example protection mechanism in a differential pressure sensor according to this disclosure
  • FIGURE 4 illustrates example operation of a differential pressure sensor with overpressure protection according to this disclosure
  • FIGURE 5 illustrates an example use of a differential pressure sensor with overpressure protection according to this disclosure.
  • FIGURE 6 illustrates an example method for overpressure protection of a pressure sensor having a coplanar meter body according to this disclosure.
  • FIGURES 1 through 6, discussed below, and the various embodiments used to describe the principles of the present invention in this patent document are by way of illustration only and should not be construed in any way to limit the scope of the invention. Those skilled in the art will understand that the principles of the invention may be implemented in any type of suitably arranged device or system.
  • FIGURE 1 illustrates an example industrial process control and automation system 100 according to this disclosure.
  • the system 100 includes various components that facilitate production or processing of at least one product or other material.
  • the system 100 can be used to facilitate control over components in one or multiple industrial plants.
  • Each plant represents one or more processing facilities (or one or more portions thereof), such as one or more manufacturing facilities for producing at least one product or other material.
  • each plant may implement one or more industrial processes and can individually or collectively be referred to as a process system.
  • a process system generally represents any system or portion thereof configured to process one or more products or other materials in some manner.
  • the system 100 includes one or more sensors 102a and one or more actuators 102b.
  • the sensors 102a and actuators 102b represent components in a process system that may perform any of a wide variety of functions.
  • the sensors 102a could measure a wide variety of characteristics in the process system, such as pressure, temperature, or flow rate.
  • the actuators 102b could alter a wide variety of characteristics in the process system.
  • Each of the sensors 102a includes any suitable structure for measuring one or more characteristics in a process system.
  • Each of the actuators 102b includes any suitable structure for operating on or affecting one or more conditions in a process system .
  • At least one network 104 is coupled to the sensors 102a and actuators 102b.
  • the network 104 facilitates interaction with the sensors 102a and actuators 102b.
  • the network 104 could transport measurement data from the sensors 102a and provide control signals to the actuators 102b.
  • the network 104 could represent any suitable network or combination of networks.
  • the network 104 could represent at least one Ethernet network, electrical signal network (such as a HART or FOUNDATION FIELDBUS network), pneumatic control signal network, or any other or additional type(s) of network(s),
  • the system 100 also includes various controllers 106.
  • the controllers 106 can be used in the system 100 to perform various functions in order to control one or more industrial processes. For example, a first set of controllers 106 may use measurements from one or more sensors 1 2a to control the operation of one or more actuators 102b. A second set of controllers 106 could be used to optimize the control logic or other operations performed by the first set of controllers. A third set of controllers 106 could be used to perform additional functions.
  • Controllers 106 are often arranged hierarchically in a system. For example, different controllers 106 could be used to control individual actuators, collections of actuators forming machines, collections of machines forming units, collections of units forming plants, and collections of plants forming an enterprise, A particular example of a hierarchical arrangement of controllers 106 is defined as the ' " Purdue " ' model of process control.
  • the controllers 106 in different hierarchical levels can communicate via one or more networks 108 and associated switches, firewalls, and other components.
  • Each controller 106 includes any suitable structure for controlling one or more aspects of an industrial process. At least some of the controllers 106 could, for example, represent proportional-integral-derivative (PID) controllers or multivariable controllers, such as Robust Multi variable Predictive Control Technology (RMPCT) controllers or other types of controllers implementing model predictive control or other advanced predictive control. As a particular example, each controller 106 could represent a computing device running a real-time operating system, a WINDOWS operating system, or other operating system.
  • PID proportional-integral-derivative
  • RPCT Robust Multi variable Predictive Control Technology
  • Each operator console 110 could be used to provide information to an operator and receive information from an operator.
  • each operator console 110 could provide information identifying a current state of an industrial process to the operator, such as values of various process variables and warnings, alarms, or other states associated with the industrial process.
  • Each operator console 110 could also receive information affecting how the industrial process is controlled, such as by receiving setpoints or control modes for process variables controlled by the controllers 106 or other information that alters or affects how the controllers 106 control the industrial process.
  • Each control room 112 could include any number of operator consoles 1 10 in any suitable arrangement.
  • multiple control rooms 112 can be used to control an industrial plant, such as when each control room 112 contains operator consoles 110 used to manage a discrete part of the industrial plant.
  • Each operator console 1 10 includes any suitable structure for displaying information to and interacting with an operator.
  • each operator console 1 10 could include one or more processing devices 114, such as one or more processors, microprocessors, microcontrollers, field programmable gate arrays, application specific integrated circuits, discrete logic devices, or other processing or control devices.
  • Each operator console 110 could also include one or more memories 116 storing instructions and data used, generated, or collected by the processing device(s) 1 14.
  • Each operator console 1 10 could further include one or more network interfaces 118 that facilitate communication over at least one wired or wireless network, such as one or more Ethernet interfaces or wireless transceivers.
  • At least one of the sensors 102a in FIGURE 1 could represent a differential pressure transmitter.
  • a differential pressure transmitter generally operates by providing two pressure values to a sensor, which converts a difference between the two pressure values into an electrical signal.
  • an overpressure mechanism can be employed to limit the differential pressure that is input to the sensor.
  • a differential pressure sensor having a copianar meter body with sensor overpressure protection is provided.
  • This approach allows overpressure protection to be provided in differential pressure sensors having copianar meter bodies.
  • This approach reduces the size of the pressure sensor compared to conventional pressure transmitters with "dual head” packages.
  • a pressure sensor with a copianar meter body and overpressure protection can achieve the same performance as pressure sensors with dual head packages, but the copianar meter body is smaller and lighter, resulting in easier installation and reduced cost.
  • a copianar meter body can be mounted directly to a manifold and thereby eliminate expensive corrosion-resistant pressure heads, bolts, and other miscellaneous hardware. This can again result in easier installation and reduced size and cost.
  • a copianar meter body can be mounted directly to a manifold, this can eliminate the use of two joints with gaskets, tliereby eliminating potential leak paths for toxic or corrosive process fluids.
  • providing overpressure protection can allow multiple piezo-resistive or other sensors to be used on a single integrated circuit chip or other structure, which allows for multiple or redundant sensor measurements to be captured.
  • the same integrated circuit chip could include sensors that output both differential and static pressure measurements.
  • FIGURE 1 illustrates one example of an industrial process control and automation system 100
  • various changes may be made to FIGURE 1.
  • industrial control and automation systems come in a wide variet ' of configurations.
  • the system 100 shown in FIGURE 1 is meant to illustrate one example operational environment in which a differential pressure sensor could be used.
  • FIGURE 2 illustrates an example differential pressure sensor 200 according to this disclosure.
  • the differential pressure sensor 200 may be described as being used in the industrial process control and automation system 100 of FIGURE 1.
  • the differential pressure sensor 200 could be used in any other suitable system, and the system need not relate to industrial process control and automation.
  • the differential pressure sensor 200 includes an adapter 202 and at least one sensor 204.
  • the adapter 202 denotes a portion of the differential pressure sensor 200 in which wires or other signal conductors can be connected to the sensor 204.
  • the outer surface of the adapter 202 can also be threaded or otherwise configured to facilitate attachment of the differential pressure sen sor 200 to a larger device or system.
  • the adapter 202 could be formed from any suitable material(s) and in any suitable manner. As a particular example, the adapter 202 could be formed from metal.
  • Tire sensor 204 denotes a structure that senses multiple input pressures and outputs a signal indicative of a difference between the input pressures.
  • the sensor 204 could output an electrical signal whose voltage or current varies proportionally with the difference between the input pressures.
  • the sensor 204 includes any suitable differential pressure sensor, such as a piezo-resistive or capacitive sensor.
  • multiple sensors 204 could also be used, such as sensors that output both differential and static pressure measurements.
  • the multiple sensors 204 may or may not be implemented on a single integrated circuit chip.
  • Each sensor 204 includes any suitable structure for measuring pressure.
  • the differential pressure sensor 200 also includes a coplanar body 206, which denotes a portion of the differential pressure sensor 200 in which multiple pressure inputs are located.
  • the pressure inputs are generally located on a common plane, which is why the body 206 is referred to as a "coplanar" body.
  • the coplanar body 206 could be formed from any suitable matenal(s) and in any suitable manner.
  • the coplanar body 206 could be formed from metal.
  • the adapter 202 and the coplanar body 206 could be formed integrally or as separate pieces that are connected together, such as by welding.
  • the pressure inputs in the differential pressure sensor 200 are implemented using a high-pressure barrier diaphragm 208 and a low-pressure barrier diaphragm 210.
  • Each of the barrier diaphragms 208 and 210 represents a barrier that allows pressure to be transmitted into the differential pressure sensor 200 while preventing process fluid (such as oil, gas, or other high pressure and corrosive fluid) from entering into the differential pressure sensor 200.
  • the barrier diaphragms 208 and 210 represent flexible membranes that can move up or down in FIGURE 2 based on the amount of pressure applied to the barrier diaphragms 208 and 210.
  • Each of the barrier diaphragms 2,08 and 210 denotes any suitable flexible membrane, such as a metallic membrane.
  • Each of the barrier diaphragms 208 and 210 could also have any suitable size, shape, and dimensions.
  • the barrier diaphragms 208 and 210 are small enough and spaced apart to fit within the established bolt pattern for industry-standard DIN manifolds. This allows the differential pressure sensor 200 to be mounted directly to a manifold.
  • Pressures from the barrier diaphragms 208 and 210 are transmitted to the sensor 204 via a fill fluid that travels through various passages 212.
  • the fill fluid could denote an incompressible fluid, so pressure applied by the barrier diaphragm 208 or 210 is conveyed by the fill fluid to the sensor 204.
  • the fill fluid denotes any suitable fluid for conveying pressure, such as silicone oil or other suitable fluid.
  • Each passage 212 denotes any suitable passageway for fill fluid.
  • the pressure sensor 200 may optionally contain fluid expansion compensation elements 214a-214b, which are used to reduce the thermal expansion effect of the fill fluid. In some embodiments, it may be necessary or desirable to reduce or minimize the fluid travel of the fill fluid through the passages 212. However, this may be complicated by the need to operate the pressure sensor 200 over a large temperature range. Since the fluid expansion properties of the fill fluid may greatly exceed those of the body 206, this results in a larger volume of fluid as the temperature increases. To help handle this issue, the fluid expansion compensation elements 214a-214b can be used and denote cylindrical or other components that encircle or surround various ones of the passages 212. The fluid expansion compensation elements 214a-214b can be formed using a low thermal expansion material, such as INVAR (FeNi36 or 64FeNi) or other material with low thermal expansion as compared to the material of the coplanar body 206.
  • INVAR FeNi36 or 64FeNi
  • Each barrier diaphragm 208 and 210 has an associated overload or overpressure protection mechanism 216 and 218, respectively.
  • the protection mechanisms 216 and 218 generally provide protection against overpressure conditions that can damage the differential pressure sensor 200.
  • a center diaphragm is positioned between and generally parallel to two opposing barrier diaphragms. This design is effective when the pressure inputs are on opposite sides of the meter body.
  • this conventional approach cannot be used cost-effectively in the differential pressure sensor 200 since the barrier diaphragms 208 and 210 are coplanar rather than on opposite sides of the body 206.
  • protection mechanisms 216 and 218 implement separate protection for the sensor 204.
  • Each of the protection mechanisms 216 and 218 includes any suitable structure for providing structural reinforcement and overpressure protection. Additional details regarding example operations of the protection mechanisms 216 and 218 are provided below with respect to FIGURE 4.
  • a coplanar meter body can be smaller and lighter than a "dual head" package.
  • the protection mechanisms 216 and 218 are capable of fitting into the reduced size of a coplanar meter body, so overpressure protection can be provided in a smaller pressure sensor.
  • a coplanar meter body can be mounted directly to a manifold that carries a process fluid. Not only does this approach result in lighter and more easily installed devices, this approach also saves the cost of corrosion- resistant pressure heads and associated hardware.
  • FIGURE 2 illustrates one example of a differential pressure sensor 200
  • various changes may be made to FIGURE 2.
  • the sizes, shapes, and relative dimensions of the components in FIGURE- 2 are for illustration only.
  • other arrangements of the components in FIGURE 2 could be used in a differential pressure sensor.
  • the overall form factor for the differential pressure sensor 200 could vary as needed or desired.
  • FIGURE 3 illustrates an example protection mechanism 216, 218 in a differential pressure sensor according to this disclosure.
  • the protection mechanism 216, 218 shown in FIGURE 3 is described with respect to the differential pressure sensor 200 of FIGURE 2, However, the protection mechanism 216, 218 could be used with any other suitable pressure sensor.
  • the protection mechanism 216, 218 is implemented as an additional diaphragm that is placed behind one of the barrier diaphragms 208, 210 between that barrier diaphragm and the body 206.
  • the protection mechanism 216, 218 could be thicker than the barrier diaphragm 208, 210.
  • the protection mechanism 216, 218 operates to protect the sensor 204 from damage. For example, the protection mechanism 216 will move with application of pressure and allow the barrier diaphragm 210 to move and lay against the protection mechanism 218, thus stopping the further input of pressure.
  • the protection mechanism 218 will move with application of pressure and allow the barrier diaphragm 208 to move and lay against the protection mechanism 216, thus stopping the further input of pressure. In this way, individual operation of each protection mechanism 216, 218 will protect the sensor 204 from damage due to overpressure from either pressure input.
  • the protection mechanism 216, 218 is attached to the body 206 of the differential pressure sensor 200.
  • the barrier diaphragm 208, 210 is then placed over the protection mechanism 216, 218 and attached to the body 206 of the differential pressure sensor 200.
  • the protection mechanism 216, 218 and the barrier diaphragm 208, 210 are attached to the body 206 using laser welds 302.
  • a weld or other seal ring 304 could be placed around the peripheries of the barrier diaphragm 208, 210 and the protection mechanism 216, 218,
  • the seal ring 304 can be used to house a gasket or O-ring 306 that seals an external manifold or other component that is used to input pressures to the sensor 200.
  • FIGURE 3 illustrates one example of a protection mechanism 216, 218 in a differential pressure sensor
  • various changes may be made to FIGURE 3.
  • the sizes, shapes, and relative dimensions of the components in FIGURE 3 are for illustration only.
  • FIGURE 4 illustrates example operation of a differential pressure sensor with overpressure protection according to this disclosure.
  • the operations shown in FIGURE, 4 are described with respect to the differential pressure sensor 200 of FIGURE 2. However, these operations could occur using any other suitable pressure sensor.
  • internal porting is implemented in the body 206 using the passages 212 to transfer two pressure inputs to the sensor 204.
  • a high- pressure port 402 provides a higher-pressure input to the sensor 204, and a low- pressure port.
  • 404 provides a lower-pressure input to the sensor 204.
  • a fill fluid 406 fills a gap between the barrier diaphragm 208 and the protection mechanism (overload diaphragm) 216.
  • the fill fluid 406 is ported via the port, 402 to both the high-pressure side of the sensor 204 and to a gap between the body 206 and the other protection mechanism (overload diaphragm) 218.
  • a fill fluid 408 fills the gap between the barrier diaphragm 210 and the protection mechanism (overload diaphragm) 218.
  • the fill fluid 408 is ported via the port 404 to both the low-pressure side of the sensor 204 and to a gap between the body 206 and the other protection mechanism (overload diaphragm) 216.
  • the pressure is transmitted from the barrier diaphragm 208 to the fill fluid 406 and then to the sensor 204 and to the gap between the other protection mechanism (overload diaphragm) 218 and the body 206.
  • This causes the protection mechanism 218 to deflect away from the body 206, increasing the gap between die body 206 and the protection mechanism 218. Meanwhile, the gap between the barrier diaphragm 208 and the protection mechanism 216 is reduced.
  • the pressure is transmitted from the barrier diaphragm 210 to the fill fluid 408 and then to the sensor 204 and to the gap between the other protection mechanism (overload diaphragm) 216 and the body 206.
  • This causes the protection mechanism 216 to deflect away from the body 206, increasing the gap between the body 206 and the protection mechanism 216. Meanwhile, the gap between the barrier diaphragm 210 and the protection mechanism 218 is reduced.
  • the barrier diaphragm 210 and the protection mechanism 218 nest together, and no additional pressure will be transmitted to the sensor 204, thus providing overpressure protection for the sensor 204.
  • FIGURE 4 illustrates one example of operation of a differential pressure sensor with overpressure protection
  • various changes may be made to FIGURE 4.
  • the sizes, shapes, and relative dimensions of the components in FIGURE 4 are for illustration only.
  • FIGURE 5 illustrates an example use of a differential pressure sensor 200 with overpressure protection according to this disclosure.
  • the use shown in FIGURE 5 is described with respect to the differential pressure sensor 200 of FIGURE 2.
  • the differential pressure sensor 200 could be used in any other suitable manner.
  • the differential pressure sensor 200 is mounted directly to a manifold 502.
  • the manifold 502 denotes any suitable structure that is configured to transport at least one process fluid 504.
  • the manifold 502 could be configured to transport one or more corrosive process fluids at high pressures.
  • the manifold 502 could have any suitable size, shape, and dimensions and could be formed from any suitable material(s).
  • the differential pressure sensor 200 can be mounted directly to openings 506 of the manifold 502.
  • the openings 506 could have any suitable size, shape, and dimensions and could be separated by any suitable distance.
  • the manifold 502 could denote an industry-standard DIN manifold, and the barrier diaphragms 208 and 210 can be small enough and spaced apart to fit within the established bolt partem, for the DIN manifold.
  • FIGURE 5 illustrates one example use of a differential pressure sensor 200 with overpressure protection
  • various changes may be made to FIGURE 5.
  • the differential pressure sensor 200 could be used in any other suitable manner and need not be used with a manifold.
  • FIGURE 6 illustrates an example method 600 for overpressure protection of a pressure sensor having a coplanar meter body according to this disclosure.
  • the method 600 shown in FIGURE 6 is described with respect to the differential pressure sensor 200 of FIGURE 2 operating as shown in FIGURE 4.
  • the method 600 could be used with any other suitable pressure sensor.
  • input pressures are received at barrier diaphragms of a differential pressure sensor at step 602.
  • This could include, for example, receiving input pressures at the barrier diaphragms 208 and 210 of the pressure sensor 200.
  • this could include receiving input pressures at the barrier diaphragms 208 and 210 of the pressure sensor 200 through openings 506 of the manifold 502.
  • the input pressures are transferred to at least one pressure sensor at step 604.
  • This could include, for example, the fill fluid 406 and 408 transferring the input pressures from the barrier diaphragms 208 and 210 to the at least one sensor 204 through the ports 402 and 404.
  • One or more pressure measurements are generated at step 606.
  • the process returns to step 602 so that additional pressure measurements can be generated.
  • the process includes additional steps used to protect the pressure sensor(s) from damage. For example, during an overpressure condition on a specified one of the barrier diaphragms, fill fluid is transferred out of a space between die specified barrier diaphragm and its associated overload diaphragm at step 610. This could include, for example, the fill fluid 406 between the barrier diaphragm 208 and the protection mechanism 236 moving via the port 402 to a gap between the body 206 and the other protection mechanism 218. This could also include the fill fluid 408 between the barrier diaphragm 210 and the protection mechanism 218 mo ving via the port 404 to a gap between the body 206 and the other protection mechanism 216.
  • die specified barrier diaphragm eventually nests against its associated overload diaphragm at step 612.
  • This could include, for example, the barrier diaphragm 208 contacting and resting against the protection mechanism 216 or the barrier diaphragm 230 contacting and resting against the protection mechanism 218.
  • This helps to prevent additional pressure from reaching the pressure sensor(s) at step 614.
  • This could include, for example, the associated protection mechanism 216, 218 preventing the specified barrier diaphragm 208, 230 from further movement inward, which could otherwise apply an excessive pressure via the fill fluid 406, 408 to the pressure sensor(s) 204.
  • FIGURE 6 illustrates one example of a method 600 for overpressure protection of a pressure sensor having a coplanar meter body
  • various changes may be made to FIGURE 6.
  • steps in FIGURE 6 could overlap, occur in parallel, occur in a different order, or occur any number of times.
  • steps 604-606 could occur at the same time as steps 608-634 so that overpressure protection is provided in parallel with the generation of pressure measurements.
  • phrases "at least one of,” when used with a list of items, means that different combinations of one or more of the listed items may be used, and only one item in the list may be needed.
  • “at least one of: A, B, and C” includes any of the following combinations: A, B, C, A and B, A and C, B and C, and A and B and C.

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  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La présente invention concerne un appareil comprenant un corps de capteur (206) et un capteur (204) conçu pour mesurer une pression différentielle. L'appareil comprend également des première et seconde entrées de pression coplanaires dans le corps de capteur ou sur le corps de capteur, les entrées de pression étant conçues pour fournir de multiples pressions d'entrée au capteur. Chaque entrée de pression comprend un diaphragme barrière (208, 210) conçu pour se déplacer en réponse à une pression et un diaphragme de surcharge (216, 218) conçu pour limiter le mouvement du diaphragme barrière. Des premier et second fluides de remplissage (406, 408) peuvent être conçus pour acheminer les pressions des diaphragmes barrières des entrées de pression au capteur en tant que première et seconde pressions d'entrée. Des passages (212, 402, 404) peuvent être conçus pour transporter le fluide de remplissage entre (i) des espaces entre les diaphragmes barrières et les diaphragmes de surcharge des entrées de pression et (ii) le capteur et les espaces entre les diaphragmes de surcharge et le corps de capteur.
PCT/US2018/021096 2017-03-10 2018-03-06 Capteur de pression présentant un corps de compteur coplanaire doté d'une protection du capteur contre la surpression WO2018165122A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP18763768.1A EP3593104A4 (fr) 2017-03-10 2018-03-06 Capteur de pression présentant un corps de compteur coplanaire doté d'une protection du capteur contre la surpression
CN201880016952.9A CN110402378B (zh) 2017-03-10 2018-03-06 具有带有传感器过压保护的共面仪表主体的压力传感器

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762470089P 2017-03-10 2017-03-10
US62/470,089 2017-03-10
US15/632,005 2017-06-23
US15/632,005 US20180259413A1 (en) 2017-03-10 2017-06-23 Pressure sensor having coplanar meter body with sensor overpressure protection

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021121969A1 (fr) 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle
WO2021122775A1 (fr) 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Capteur de pression différentielle permettant de déterminer la pression différentielle entre deux pressions
DE102019135476A1 (de) * 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020110728A1 (de) 2020-04-20 2021-10-21 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
WO2021213764A1 (fr) 2020-04-20 2021-10-28 Endress+Hauser SE+Co. KG Transducteur de pression différentielle permettant la mesure de la pression différentielle entre deux pressions
DE102020121584A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020121581A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020121582A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020121583A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020121585A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020121579A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020121580A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020133349A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Koplanarer Differenzdruckmessaufnehmer
DE102020133358A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Verfahren zur druck- und gasdichten Trennung von einem ersten und einem zweiten hydraulischen Pfad in einem Differenzdrucksensor
DE102020133380A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Koplanarer Druckmessaufnehmer zur Bestimmung des Druckmesswertes eines Mediums

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110418952A (zh) * 2017-03-10 2019-11-05 霍尼韦尔国际公司 具有整体防火安全机构的带流搬运的压力传感器
CN214793590U (zh) * 2020-10-18 2021-11-19 武汉飞恩微电子有限公司 一种芯体结构以及压力传感器

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539850A (en) * 1982-02-15 1985-09-10 Siemens Aktiengesellschaft Pressure or pressure-difference measuring apparatus with a pressure sensor device protected against overload
EP0636243B1 (fr) * 1992-04-14 1997-08-06 Rosemount Inc. Echangeur de pression modulaire avec collecteur coupe-flamme
WO2000003220A1 (fr) * 1998-07-09 2000-01-20 Honeywell Inc. Procedes et appareil permettant de detecter une pression differentielle et une pression statique de jauge dans un conduit d'ecoulement de fluide
US20020017143A1 (en) 2000-07-13 2002-02-14 Endress + Hauser Gmbh + Co. Differential pressure pickup
DE102012025070A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk
US20140209220A1 (en) * 2013-01-25 2014-07-31 Seiko Instruments Inc. Two-phase stainless steel, method of manufacturing the same, and diaphragm, pressure sensor, and diaphragm valve using two-phase stainless steel
US20160223420A1 (en) * 2015-01-30 2016-08-04 Omega Engineering, Inc. Differential Pressure Sensing Device with Overload Protection

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9010191B2 (en) * 2011-12-22 2015-04-21 Rosemount Inc. Pressure sensor module for sub-sea applications
US9038476B2 (en) * 2012-09-27 2015-05-26 Rosemount Inc. Pressure transmitter with fill tube
DE102012113042A1 (de) * 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk
DE102014102719A1 (de) * 2014-02-28 2015-09-03 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessaufnehmer

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539850A (en) * 1982-02-15 1985-09-10 Siemens Aktiengesellschaft Pressure or pressure-difference measuring apparatus with a pressure sensor device protected against overload
EP0636243B1 (fr) * 1992-04-14 1997-08-06 Rosemount Inc. Echangeur de pression modulaire avec collecteur coupe-flamme
WO2000003220A1 (fr) * 1998-07-09 2000-01-20 Honeywell Inc. Procedes et appareil permettant de detecter une pression differentielle et une pression statique de jauge dans un conduit d'ecoulement de fluide
US20020017143A1 (en) 2000-07-13 2002-02-14 Endress + Hauser Gmbh + Co. Differential pressure pickup
DE102012025070A1 (de) 2012-12-21 2014-06-26 Endress + Hauser Gmbh + Co. Kg Hydraulisches Messwerk mit koplanaren Druckeingängen und Differenzdrucksensor mit einem solchen Messwerk
US20140209220A1 (en) * 2013-01-25 2014-07-31 Seiko Instruments Inc. Two-phase stainless steel, method of manufacturing the same, and diaphragm, pressure sensor, and diaphragm valve using two-phase stainless steel
US20160223420A1 (en) * 2015-01-30 2016-08-04 Omega Engineering, Inc. Differential Pressure Sensing Device with Overload Protection

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3593104A4

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021121969A1 (fr) 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle
WO2021122775A1 (fr) 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Capteur de pression différentielle permettant de déterminer la pression différentielle entre deux pressions
DE102019135476A1 (de) * 2019-12-20 2021-06-24 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
CN115151801A (zh) * 2019-12-20 2022-10-04 恩德莱斯和豪瑟尔欧洲两合公司 用于确定两个压力的差压的差压测量传感器
DE102020110728A1 (de) 2020-04-20 2021-10-21 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
WO2021213764A1 (fr) 2020-04-20 2021-10-28 Endress+Hauser SE+Co. KG Transducteur de pression différentielle permettant la mesure de la pression différentielle entre deux pressions
DE102020121579A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
WO2022037861A1 (fr) 2020-08-17 2022-02-24 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle pour déterminer la pression différentielle entre deux pressions
DE102020121583A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020121585A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020121581A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer
DE102020121580A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
WO2022037860A1 (fr) 2020-08-17 2022-02-24 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle
WO2022037858A1 (fr) 2020-08-17 2022-02-24 Endress+Hauser SE+Co. KG Capteur de mesure de pression différentielle
WO2022037859A1 (fr) 2020-08-17 2022-02-24 Endress+Hauser SE+Co. KG Capteur de pression différentielle pour détermination de la pression différentielle entre deux pressions
DE102020121582A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020121584A1 (de) 2020-08-17 2022-02-17 Endress+Hauser SE+Co. KG Differenzdruckmessaufnehmer zur Bestimmung des Differenzdrucks von zwei Drücken
DE102020133358A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Verfahren zur druck- und gasdichten Trennung von einem ersten und einem zweiten hydraulischen Pfad in einem Differenzdrucksensor
DE102020133380A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Koplanarer Druckmessaufnehmer zur Bestimmung des Druckmesswertes eines Mediums
WO2022128399A1 (fr) 2020-12-14 2022-06-23 Endress+Hauser SE+Co. KG Transducteur de pression coplanaire pour détermination de valeur de mesure de pression d'un milieu
WO2022128397A1 (fr) 2020-12-14 2022-06-23 Endress+Hauser SE+Co. KG Transducteur de pression différentielle coplanaire
WO2022128398A1 (fr) 2020-12-14 2022-06-23 Endress+Hauser SE+Co. KG Procédé de séparation étanche à la pression et au gaz d'une première et d'une seconde voie hydraulique dans un capteur de pression différentielle
DE102020133349A1 (de) 2020-12-14 2022-06-15 Endress+Hauser SE+Co. KG Koplanarer Differenzdruckmessaufnehmer

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EP3593104A1 (fr) 2020-01-15

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