WO2018157823A1 - P-type perc double-sided solar cell, assembly thereof, system thereof and preparation method therefor - Google Patents

P-type perc double-sided solar cell, assembly thereof, system thereof and preparation method therefor Download PDF

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Publication number
WO2018157823A1
WO2018157823A1 PCT/CN2018/077590 CN2018077590W WO2018157823A1 WO 2018157823 A1 WO2018157823 A1 WO 2018157823A1 CN 2018077590 W CN2018077590 W CN 2018077590W WO 2018157823 A1 WO2018157823 A1 WO 2018157823A1
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Prior art keywords
laser grooving
laser
silicon wafer
solar cell
spine
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PCT/CN2018/077590
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French (fr)
Chinese (zh)
Inventor
林纲正
方结彬
陈刚
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广东爱旭科技股份有限公司
浙江爱旭太阳能科技有限公司
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Publication of WO2018157823A1 publication Critical patent/WO2018157823A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/022441Electrode arrangements specially adapted for back-contact solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/068Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • H01L31/0684Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells double emitter cells, e.g. bifacial solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to the field of solar cells, and more particularly to a P-type PERC double-sided solar cell, and a method for preparing the P-type PERC double-sided solar cell.
  • the solar cell module using the P-type PERC double-sided solar cell adopts the above-mentioned P-type Solar system for PERC double-sided solar cells.
  • a crystalline silicon solar cell is a device that effectively absorbs solar radiation energy and converts light energy into electrical energy by using a photovoltaic effect.
  • a new hole-electron pair is formed, and the electric field at the PN junction Under the action, the holes flow from the N zone to the P zone, and the electrons flow from the P zone to the N zone, and a current is formed after the circuit is turned on.
  • Conventional crystalline silicon solar cells basically use only front passivation technology, depositing a layer of silicon nitride on the front side of the silicon wafer by PECVD to reduce the recombination rate of the minority on the front surface, which can greatly increase the open circuit voltage and short circuit of the crystalline silicon battery. Current, thereby increasing the photoelectric conversion efficiency of the crystalline silicon solar cell. However, since the back side of the silicon wafer is not passivated, the improvement in photoelectric conversion efficiency is still limited.
  • the substrate adopts an N-type silicon wafer.
  • the carriers generated in the N-type silicon wafer pass through the silicon wafer having a thickness of about 200 ⁇ m, due to the N-type.
  • the silicon wafer has a low lifetime and low carrier recombination rate, and some carriers can reach the front pn junction; the front side of the solar cell is the main light-receiving surface, and its conversion efficiency accounts for a high proportion of the entire battery conversion efficiency; The effect is to greatly improve the conversion efficiency of the battery.
  • the price of N-type silicon wafer is high, and the process of N-type double-sided battery is complicated; therefore, how to develop high-efficiency and low-cost double-sided solar cells has become a hot spot for enterprises and researchers.
  • the industry has been studying the PERC back passivation solar cell technology.
  • the mainstream manufacturers in the industry mainly develop single-sided PERC solar cells.
  • the present invention combines PERC high-efficiency batteries and double-sided batteries to develop a PERC double-sided solar cell with higher integrated photoelectric conversion efficiency.
  • the present invention aims to propose a P-type PERC double-sided solar cell with simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
  • the technical problem to be solved by the present invention is to provide a P-type PERC double-sided solar cell with simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
  • the technical problem to be solved by the present invention is also to provide a preparation method of a P-type PERC double-sided solar cell, which has the advantages of simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
  • the technical problem to be solved by the present invention is also to provide a P-type PERC double-sided solar cell module, which has a simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
  • the technical problem to be solved by the present invention is also to provide a P-type PERC double-sided solar energy system with simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
  • the present invention provides a P-type PERC double-sided solar cell, which in turn comprises a back silver electrode, a back aluminum gate line, a back passivation layer, a P-type silicon, an N-type emitter, a front silicon nitride film. And a positive silver electrode, the back silver electrode is perpendicularly connected to the back aluminum grid line, the back aluminum grid line is provided with a grid line spine, and the grid line spine is connected with the back aluminum grid line;
  • the back aluminum grid line may also be curved, curved, wavy, or the like.
  • the first laser grooving zone comprises a plurality of sets of first laser grooving units arranged in a horizontal direction, and each set of first laser grooving units comprises one or more first laser grooving bodies arranged in a horizontal direction, the back
  • the aluminum grid line is perpendicular to the first laser slotted body.
  • the gate line spine is perpendicularly connected to the back aluminum grid line
  • a third laser grooving zone is disposed under the ridge of the grid line, the third laser grooving zone comprises a plurality of sets of third laser grooving units, and each set of the third laser grooving unit comprises one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gate line spine, wherein the gate line spine is connected to the P-type silicon through the third laser slotted body.
  • the first laser grooving units are disposed in parallel; in each of the first laser grooving units, the first laser grooving body is juxtaposed, and the first laser grooving The bodies are on the same level or staggered up and down;
  • the spacing between the first laser grooving units is 0.5-50 mm;
  • the spacing between the first laser grooving bodies is 0.5-50 mm;
  • the first laser grooving body has a length of 50-5000 microns and a width of 10-500 microns.
  • the number of the back aluminum grid lines is 30-500, and the number of the gate line spines is 30-500;
  • the width of the back aluminum grid line is 30-500 microns, and the width of the back aluminum grid line is smaller than the length of the first laser slotted body;
  • the width of the gate line spine is 30-500 microns, and the width of the grid line spine is smaller than the length of the third laser slotted body.
  • the pattern of the gridline spine is a continuous straight line or a dotted line composed of a plurality of line segments; the gridline spine is made of silver paste and has a width of 30-60 micrometers; or The gridline spine is made of aluminum paste and has a width of 50-500 microns.
  • the present invention also discloses a method for preparing a P-type PERC double-sided solar cell, comprising:
  • first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser slotted body including one or more horizontally disposed;
  • the method further includes:
  • the step (7) further includes:
  • the third laser grooving zone comprising a plurality of sets of third laser grooving units, each set of third laser grooving units comprising one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gridline spine.
  • the present invention also discloses a PERC solar cell module comprising a PERC solar cell and a packaging material, and the PERC solar cell is any of the P-type PERC double-sided solar cells described above.
  • the present invention also discloses a PERC solar energy system comprising a PERC solar cell, which is any of the P-type PERC double-sided solar cells described above.
  • the first laser grooved region is formed by laser grooving on the back passivation layer, and then the aluminum paste is printed in the vertical direction along the laser scribing direction, so that the aluminum paste is opened.
  • the trench region is connected to the P-type silicon to obtain a back aluminum gate line.
  • the PERC double-sided solar cell can prepare a battery grid structure on the front and back sides of the silicon wafer, and adopts a method different from the conventional printing aluminum paste. Since the width of the aluminum grid is much smaller than the length of the first laser grooved area, the aluminum can be omitted.
  • the precise alignment of the slurry and the first laser grooving zone simplifies the laser process and the printing process, reduces the difficulty of debugging the printing equipment, and is easy to industrialize large production.
  • the first laser grooved area outside the aluminum paste coverage area can increase the absorption of sunlight by the back surface of the battery, and improve the photoelectric conversion efficiency of the battery.
  • the present invention adds a gate line spine at the back aluminum gate line, and the gate line spine is connected with the back aluminum gate line, which provides a path for the electron flow to prevent the aluminum gate broken gate from causing the photoelectric conversion efficiency of the battery. The effect of avoiding the breakage of the EL test of the battery.
  • a third laser grooving zone may be disposed below the gridline spine, or a third laser grooving zone may not be provided.
  • the slurry and the third laser may not be needed.
  • the precise alignment of the slotted area simplifies the laser process and printing process, reducing the difficulty of debugging the printing equipment.
  • the third laser grooving zone outside the slurry coverage area can increase the absorption of sunlight by the back surface of the battery and improve the photoelectric conversion efficiency of the battery.
  • the invention has the advantages of simple structure, simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
  • Figure 1 is a cross-sectional view showing a P-type PERC double-sided solar cell of the present invention
  • FIG. 2 is a schematic view showing a first embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention
  • FIG. 3 is a schematic view showing a second embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention.
  • FIG. 4 is a schematic view showing a third embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention.
  • FIG. 5 is a schematic view showing an embodiment of a first laser grooving zone of a P-type PERC double-sided solar cell according to the present invention
  • Figure 6 is a schematic illustration of another embodiment of a first laser grooving zone of a P-type PERC double-sided solar cell of the present invention.
  • Figure 7 is a schematic illustration of a third laser grooving zone of a P-type PERC double-sided solar cell of the present invention.
  • the existing single-sided solar cell has an all-aluminum back electric field on the back surface of the battery covering the entire back surface of the silicon wafer.
  • the function of the all-aluminum back electric field is to increase the open circuit voltage Voc and the short-circuit current Jsc, forcing the minority carriers away from the surface. The minority carrier recombination rate is reduced, thereby improving battery efficiency as a whole.
  • the all-aluminum back electric field is opaque, the back side of the solar cell having an all-aluminum back electric field cannot absorb light energy, and only the front side can absorb light energy, and the integrated photoelectric conversion efficiency of the battery is difficult to be greatly improved.
  • the present invention provides a P-type PERC double-sided solar cell, which in turn includes a back silver electrode 1, a back aluminum gate line 2, a back passivation layer 3, a P-type silicon 4, and an N-type emitter. 5.
  • the front silicon nitride film 6 and the positive silver electrode 7, the back silver electrode 1 is vertically connected to the back aluminum gate line 2, and the back aluminum grid line 2 is provided with a grid line spine 10, the grid line ridge The bone 10 is connected to the back aluminum grid line 2.
  • a first laser grooving region 8 is formed by laser grooving of the back passivation layer 3, and the back aluminum gate line 2 is connected to the P-type silicon 4 through the first laser grooving region 8.
  • the positive silver electrode 7 includes a positive silver electrode main gate 7A and a positive silver electrode sub-gate 7B.
  • the back passivation layer 3 includes an aluminum oxide layer 31 and a silicon nitride layer 32.
  • the invention improves the existing single-sided PERC solar cell, no longer has an all-aluminum back electric field, but turns it into a plurality of back aluminum grid lines 2, which are opened on the back passivation layer 3 by laser grooving technology.
  • the first laser grooved area 8 is printed on the parallel first first laser grooved regions 8 so as to be in local contact with the P-type silicon 4, and the densely arranged rear aluminum gate lines 2 are arranged in parallel. It can not only improve the open circuit voltage Voc and the short circuit current Jsc, reduce the minority carrier recombination rate, and improve the photoelectric conversion efficiency of the battery.
  • the back surface of the silicon wafer is not completely covered, and sunlight can be projected from the back aluminum gate line 2 into the silicon wafer, thereby realizing absorption of light energy on the back surface of the silicon wafer and greatly improving the photoelectric conversion efficiency of the battery.
  • the first laser grooving area 8 includes a plurality of sets of first laser grooving units 81 disposed in a horizontal direction, and each set of first laser grooving units 81 includes one or more levels.
  • the first laser grooving body 82 is disposed in a direction, and the back aluminum grid line 2 is perpendicular to the first laser grooving body 82.
  • the dotted frame shown in FIGS. 5 and 6 is the first laser grooving unit 81, and each set of the first laser grooving unit 81 includes one or more first laser grooving bodies 82 disposed in the horizontal direction. .
  • the present invention adds a gate line spine 10 at the back aluminum gate line 2, and the grid line spine 10 is connected to the back aluminum gate line 2, providing a path for the flow of electrons to prevent the aluminum gate from being broken to the battery.
  • the gate line spine 10 is perpendicularly connected to the back aluminum grid line 2. It should be noted that the gate line spine 10 and the back aluminum grid line 2 may also be connected at a certain oblique angle, for example, 15°, 30°, 45° 60°, but are not limited thereto.
  • a third laser grooving zone 11 may be provided below the gridline spine 10, see the first embodiment of the backside structure shown in FIG.
  • the third laser grooving zone 11 may also be omitted below the gridline spine 10, see the second embodiment of the backside structure shown in FIG.
  • the pattern of the gridline spine is a continuous straight line or a plurality of line segments.
  • the gridline spine 10 shown in FIGS. 2 and 3 is a continuous straight line, and the gridline spine 10 shown in FIG. A dotted line composed of multiple line segments.
  • the third laser grooving zone 11 When the third laser grooving zone 11 is disposed below the gridline spine 10, as shown in FIG. 7, the third laser grooving zone 11 includes a plurality of sets of third laser grooving units 12, each of which is
  • the three-laser grooving unit 12 includes one or more third laser grooving bodies 13 disposed in a vertical direction, the third laser grooving body 13 being perpendicular to the grid-line spine 10, and the grid-line vertebral 10 passing through The three laser slotted bodies 13 are connected to P-type silicon.
  • a third laser grooving zone 11 is disposed below the gridline spine 10, which eliminates the need for precise alignment of the slurry and the third laser grooving zone 11, simplifies the laser process and the printing process, and reduces the debugging of the printing apparatus. Difficulty.
  • the third laser grooving zone 11 outside the slurry coverage area can increase the absorption of sunlight by the back surface of the battery and improve the photoelectric conversion efficiency of the battery.
  • the number of the gate line spines 10 is 30-500, the width of the grid line spine 10 is 30-500 microns, and the width of the grid line spine 10 is smaller than the third laser opening.
  • the length of the trough body 13 can greatly facilitate the printing problem of the grid line spine 10 in the case where the grid line spine 10 is perpendicular to the third laser slotted body 13. Without precise alignment, the gridline spine 10 can fall within the third laser grooving zone 11, simplifying the laser process and printing process, reducing the difficulty of debugging the printing equipment, and facilitating industrial production.
  • the grid line spine 10 can be made of either silver paste or aluminum paste.
  • the gridline spine 10 is made of silver paste, its width is 30-60 microns; when the gridline spine 10 is made of aluminum paste, its width is 50-500 microns.
  • the first laser grooving unit 81 has various embodiments, including:
  • Each of the first laser grooving units 81 includes a first laser grooving body 82 disposed in a horizontal direction. At this time, the first laser grooving unit 81 is a continuous linear grooving area, as shown in FIG. Show. The plurality of first laser grooving units 81 are arranged in the vertical direction.
  • Each group of the first laser grooving unit 81 includes a plurality of first laser grooving bodies 82 disposed in a horizontal direction.
  • the first laser grooving unit 81 is a line segment type non-continuous linear grooving area, specifically As shown in Figure 5.
  • the plurality of first laser grooving bodies 82 may be two, three, four or more, but are not limited thereto.
  • the plurality of first laser grooving units 81 are arranged in the vertical direction.
  • each set of the first laser grooving unit 81 includes a plurality of first laser grooving bodies 82 disposed in the horizontal direction, it is divided into the following cases:
  • the width, length and shape of the first laser slotted body 82 disposed in a plurality of horizontal directions are the same, and the size thereof is in the order of micrometers, and the length may be 50-5000 micrometers, but is not limited thereto;
  • the first laser grooving body may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
  • the width, length and shape of the first laser grooving body 82 disposed in a plurality of horizontal directions are the same, and the dimensions are in the order of millimeters, and the length may be 5-600 mm, but is not limited thereto;
  • the first laser grooving body may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
  • the width, length and/or shape of the first laser grooving body 82 disposed in a plurality of horizontal directions are different, and the combined design may be performed according to production needs. It should be noted that the first laser grooving bodies may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
  • the first laser grooving body is linear, which facilitates processing, simplifies the process, and reduces production costs.
  • the first laser grooving body may also be provided in other shapes, such as a curved shape, an arc shape, a wave shape, etc., and embodiments thereof are not limited to the embodiment of the present invention.
  • the first laser grooving units are arranged in parallel.
  • the first laser grooving bodies are arranged side by side, which simplifies the production process and is suitable for large-scale popularization and application.
  • the spacing between the first laser grooving units is 0.5-50 mm. In each of the first laser grooving units, the spacing between the first laser grooving bodies is 0.5-50 mm.
  • the first laser grooving body 82 has a length of 50-5000 microns and a width of 10-500 microns. Preferably, the first laser grooving body 82 has a length of 250-1200 microns and a width of 30-80 microns.
  • the length, width and spacing of the first laser grooving unit and the number and width of the aluminum grid are optimized on the basis of comprehensively considering the contact area of the aluminum grid and the P-type silicon, the opaque area of the aluminum grid, and the sufficient collection of electrons.
  • the purpose is to reduce the shading area of the back aluminum grid as much as possible, while ensuring a good current output, thereby improving the overall photoelectric conversion efficiency of the battery.
  • the back aluminum gate lines have a number of 30-500, the back aluminum gate lines have a width of 30-500 microns, and the back aluminum grid lines have a width much smaller than the length of the first laser slotted body.
  • the number of the back aluminum grid lines is 80-220, and the width of the back aluminum grid lines is 50-300 microns.
  • the width of the back aluminum grid line is much smaller than the length of the first laser slotted body. In the case where the aluminum grid is perpendicular to the first laser slotted body, the printing problem of the back aluminum grid line can be greatly facilitated. Without precise alignment, the aluminum grid can fall in the first laser grooving zone, which simplifies the laser process and printing process, reduces the difficulty of debugging the printing equipment, and is easy to industrialize and produce.
  • the invention forms the first laser grooving zone by laser grooving the back passivation layer, and then printing the aluminum paste in the vertical direction of the laser scribing direction, so that the aluminum paste is connected to the P-type silicon through the grooving zone to obtain the back aluminum. Grid line.
  • the PERC double-sided solar cell can prepare a battery grid structure on the front and back sides of the silicon wafer, and adopts a method different from the conventional printing aluminum paste, so that precise alignment of the aluminum paste and the first laser grooved area is not required, and the process is simple. Easy to industrialize large production.
  • the aluminum grid is parallel to the first laser slotted body, and the aluminum paste and the first laser slotted area need to be accurately aligned, which requires high precision and repeatability of the printing equipment, and the yield is difficult to control, and the defective products are more, resulting in The average photoelectric conversion efficiency decreases.
  • the yield can be increased to 99.5%.
  • the back passivation layer 3 includes an aluminum oxide layer 31 and a silicon nitride layer 32, the aluminum oxide layer 31 is connected to the P-type silicon 4, and the silicon nitride layer 32 is connected to the aluminum oxide layer 31;
  • the silicon nitride layer 32 has a thickness of 20-500 nm
  • the aluminum oxide layer 31 has a thickness of 2 to 50 nm.
  • the silicon nitride layer 32 has a thickness of 100-200 nm;
  • the aluminum oxide layer 31 has a thickness of 5 to 30 nm.
  • the present invention also discloses a method for preparing a P-type PERC double-sided solar cell, comprising:
  • the laser is grooved on the back side of the silicon wafer to form a first laser grooving area.
  • the first laser grooving area includes a plurality of sets of first laser grooving units disposed in a horizontal direction, and each set of the first laser grooving unit includes a first laser slotted body disposed in one or more horizontal directions;
  • the silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
  • S106 and S104, S105 can be interchanged, and S106 can be before S104 and S105.
  • the method further comprises: polishing the back surface of the silicon wafer.
  • the present invention may be provided with a backside polishing step or no backside polishing step.
  • the grid line spine is made of silver paste or aluminum paste.
  • S109 and S110 are separated into two steps; when the grid line spine is made of aluminum paste, S109 and S110 Merge into one step.
  • a third laser grooving zone may be disposed under the ridge of the grid line, or a third laser grooving zone may not be provided.
  • the step (7) further includes:
  • the third laser grooving zone comprising a plurality of sets of third laser grooving units, each set of third laser grooving units comprising one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gridline spine.
  • the present invention also discloses a PERC solar cell module comprising a PERC solar cell and a packaging material, and the PERC solar cell is any of the P-type PERC double-sided solar cells described above.
  • the PERC solar cell module the high-permeability tempered glass, the ethylene-vinyl acetate copolymer EVA, the PERC solar cell, the ethylene-vinyl acetate copolymer EVA, and the highly permeable tempered glass are sequentially connected from top to bottom. composition.
  • the present invention also discloses a PERC solar energy system comprising a PERC solar cell, which is any of the P-type PERC double-sided solar cells described above.
  • a PERC solar cell As a preferred embodiment of the PERC solar system, a PERC solar cell, a battery pack, a charge and discharge controller inverter, an AC power distribution cabinet, and a solar tracking control system are included.
  • the PERC solar system may be provided with a battery pack, a charge and discharge controller inverter, or a battery pack or a charge and discharge controller inverter, and those skilled in the art may set according to actual needs.
  • first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser grooving body comprising one or more horizontally disposed, the first laser grooving body having a length of 1000 microns and a width of 40 microns;
  • the gate line spine is selected from silver paste, the number of the gate line spine is 140, and the width is 60 micrometers;
  • the silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
  • first laser grooving zone comprising a plurality of sets of first laser grooving units arranged in a horizontal direction, each The first laser grooving unit comprises one or more first laser grooving bodies arranged in a horizontal direction, the first laser grooving body having a length of 500 microns and a width of 50 microns;
  • the third laser grooving area includes a plurality of sets of third laser grooving units, each set of third laser grooving units includes one or more third laser slotted bodies disposed in a vertical direction, and the third laser blasting unit
  • the length of the trough is 500 microns and the width is 50 microns;
  • the gate line spine is selected from silver paste, the number of the gate line spine is 190, and the width is 50 micrometers;
  • the silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
  • first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser grooving body comprising one or more horizontally disposed, the first laser grooving body having a length of 300 microns and a width of 30 microns;
  • the silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
  • first laser grooving zone comprising a plurality of sets of first laser grooving units arranged in a horizontal direction, each The first laser grooving unit comprises one or more first laser grooving bodies arranged in a horizontal direction, the first laser grooving body having a length of 1200 microns and a width of 200 microns;
  • the third laser grooving area includes a plurality of sets of third laser grooving units, each set of third laser grooving units includes one or more third laser slotted bodies disposed in a vertical direction, and the third laser blasting unit
  • the length of the trough is 1200 microns and the width is 200 microns;
  • the silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.

Abstract

A P-type PERC double-sided solar cell, comprising back sliver electrodes (1), back aluminum gate lines (2), a back passivation layer (3), P-type silicon (4), an N-type emitter (5), a front silicon nitride film (6), and a front silver electrode (7) in sequence. The back sliver electrodes are vertically connected to the back aluminum gate lines; gate line spines (10) are provided on the back aluminum gate lines and are connected to the back aluminum gate lines; a first laser grooving area (8) is formed by performing laser grooving on the back passivation layer; the back aluminum gate lines are connected to the P-type silicon by means of the first laser grooving area; the first laser grooving area comprises multiple groups of first laser grooving units (81) which are provided horizontally; each group of first laser grooving units comprises one or more first laser grooving bodies (82) which are provided horizontally; the back aluminum gate lines are vertical to the first laser grooving bodies. The solar cell is simple in structure, low in costs, easy to generalize, and high in photoelectric conversion efficiency.

Description

P型PERC双面太阳能电池及其组件、系统和制备方法P-type PERC double-sided solar cell and component, system and preparation method thereof 技术领域Technical field
本发明涉及太阳能电池领域,尤其涉及一种P型PERC双面太阳能电池、以及上述P型PERC双面太阳能电池的制备方法,采用上述P型PERC双面太阳能电池的太阳能电池组件,采用上述P型PERC双面太阳能电池的太阳能系统。The present invention relates to the field of solar cells, and more particularly to a P-type PERC double-sided solar cell, and a method for preparing the P-type PERC double-sided solar cell. The solar cell module using the P-type PERC double-sided solar cell adopts the above-mentioned P-type Solar system for PERC double-sided solar cells.
背景技术Background technique
晶硅太阳能电池是一种有效吸收太阳辐射能,利用光生伏打效应把光能转换成电能的器件,当太阳光照在半导体P-N结上,形成新的空穴-电子对,在P-N结电场的作用下,空穴由N区流向P区,电子由P区流向N区,接通电路后就形成电流。A crystalline silicon solar cell is a device that effectively absorbs solar radiation energy and converts light energy into electrical energy by using a photovoltaic effect. When the sun shines on the semiconductor PN junction, a new hole-electron pair is formed, and the electric field at the PN junction Under the action, the holes flow from the N zone to the P zone, and the electrons flow from the P zone to the N zone, and a current is formed after the circuit is turned on.
传统晶硅太阳能电池基本上只采用正面钝化技术,在硅片正面用PECVD的方式沉积一层氮化硅,降低少子在前表面的复合速率,可以大幅度提升晶硅电池的开路电压和短路电流,从而提升晶硅太阳电池的光电转换效率。但是由于硅片的背面没有钝化,光电转换效率的提升仍然受到限制。Conventional crystalline silicon solar cells basically use only front passivation technology, depositing a layer of silicon nitride on the front side of the silicon wafer by PECVD to reduce the recombination rate of the minority on the front surface, which can greatly increase the open circuit voltage and short circuit of the crystalline silicon battery. Current, thereby increasing the photoelectric conversion efficiency of the crystalline silicon solar cell. However, since the back side of the silicon wafer is not passivated, the improvement in photoelectric conversion efficiency is still limited.
现有技术的双面太阳能电池结构:基底采用N型硅片,当太阳光子照射电池背面时,在N型硅片中产生的载流子穿过厚度约为200微米的硅片,由于N型硅片少子寿命高,载流子复合速率低,部分载流子可以到达正面的p-n结;太阳能电池的正面为主要受光面,其转换效率占整个电池转换效率的比例很高;正背面的综合作用,从而大大提高电池的转换效率。但是,N型硅片价格高,N型双面电池工艺复杂;因此,如何开发高效低成本的双面太阳能电池成为企业和研究者关注的热点。Prior art double-sided solar cell structure: the substrate adopts an N-type silicon wafer. When the solar photon illuminates the back surface of the battery, the carriers generated in the N-type silicon wafer pass through the silicon wafer having a thickness of about 200 μm, due to the N-type. The silicon wafer has a low lifetime and low carrier recombination rate, and some carriers can reach the front pn junction; the front side of the solar cell is the main light-receiving surface, and its conversion efficiency accounts for a high proportion of the entire battery conversion efficiency; The effect is to greatly improve the conversion efficiency of the battery. However, the price of N-type silicon wafer is high, and the process of N-type double-sided battery is complicated; therefore, how to develop high-efficiency and low-cost double-sided solar cells has become a hot spot for enterprises and researchers.
另一方面,随着对晶硅电池的光电转换效率的要求越来越高,业界一直在研究PERC背钝化太阳电池技术。业界主流厂家主要在开发单面PERC太阳能电池,本发明将PERC高效电池和双面电池结合起来,旨在开发综合光电转换效率更高的PERC双面太阳能电池。On the other hand, with the increasing requirements for the photoelectric conversion efficiency of crystalline silicon cells, the industry has been studying the PERC back passivation solar cell technology. The mainstream manufacturers in the industry mainly develop single-sided PERC solar cells. The present invention combines PERC high-efficiency batteries and double-sided batteries to develop a PERC double-sided solar cell with higher integrated photoelectric conversion efficiency.
对于PERC双面太阳能电池,由于光电转换效率高,同时双面吸收太阳光,发电量更高,在实际应用中具有更大的使用价值。因此,本发明旨在提出一种工艺简单、成本较低、易于推广、光电转换效率高的P型PERC双面太阳能电池。For the PERC double-sided solar cell, the photoelectric conversion efficiency is high, and the solar energy is absorbed on both sides, and the power generation amount is higher, which has greater use value in practical applications. Therefore, the present invention aims to propose a P-type PERC double-sided solar cell with simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
发明内容Summary of the invention
本发明所要解决的技术问题在于,提供一种P型PERC双面太阳能电池,结构简单,成本较低、易于推广、光电转换效率高。The technical problem to be solved by the present invention is to provide a P-type PERC double-sided solar cell with simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
本发明所要解决的技术问题还在于,提供一种P型PERC双面太阳能电池的制备方法,工艺简单,成本较低、易于推广、光电转换效率高。The technical problem to be solved by the present invention is also to provide a preparation method of a P-type PERC double-sided solar cell, which has the advantages of simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
本发明所要解决的技术问题还在于,提供一种P型PERC双面太阳能电池组件,结构简单,成本较低、易于推广、光电转换效率高。The technical problem to be solved by the present invention is also to provide a P-type PERC double-sided solar cell module, which has a simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
本发明所要解决的技术问题还在于,提供一种P型PERC双面太阳能系统,结构简单,成本较低、易于推广、光电转换效率高。The technical problem to be solved by the present invention is also to provide a P-type PERC double-sided solar energy system with simple structure, low cost, easy promotion, and high photoelectric conversion efficiency.
为了解决上述技术问题,本发明提供了一种P型PERC双面太阳能电池,依次包括背银电极、背铝栅线、背面钝化层、P型硅、N型发射极、正面氮化硅膜和正银电极,所述背银电极与背铝栅线垂直连接,所述背铝栅线上设有栅线脊骨,所述栅线脊骨与背铝栅线连接;In order to solve the above technical problem, the present invention provides a P-type PERC double-sided solar cell, which in turn comprises a back silver electrode, a back aluminum gate line, a back passivation layer, a P-type silicon, an N-type emitter, a front silicon nitride film. And a positive silver electrode, the back silver electrode is perpendicularly connected to the back aluminum grid line, the back aluminum grid line is provided with a grid line spine, and the grid line spine is connected with the back aluminum grid line;
所述背铝栅线也可以是曲线形、弧形、波浪形等。The back aluminum grid line may also be curved, curved, wavy, or the like.
对背面钝化层通过激光开槽形成第一激光开槽区,所述背铝栅线通过第一激光开槽区与P型硅相连;Forming, by laser grooving, a first laser grooving region on the back passivation layer, wherein the back aluminum gate line is connected to the P-type silicon through the first laser grooving region;
所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述背铝栅线与第一激光开槽体垂直。The first laser grooving zone comprises a plurality of sets of first laser grooving units arranged in a horizontal direction, and each set of first laser grooving units comprises one or more first laser grooving bodies arranged in a horizontal direction, the back The aluminum grid line is perpendicular to the first laser slotted body.
作为上述方案的优选方式,所述栅线脊骨与背铝栅线垂直连接;As a preferred mode of the above solution, the gate line spine is perpendicularly connected to the back aluminum grid line;
所述栅线脊骨下方设有第三激光开槽区,所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体与栅线脊骨垂直,所述栅线脊骨通过第三激光开槽体与P型硅相连。a third laser grooving zone is disposed under the ridge of the grid line, the third laser grooving zone comprises a plurality of sets of third laser grooving units, and each set of the third laser grooving unit comprises one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gate line spine, wherein the gate line spine is connected to the P-type silicon through the third laser slotted body.
作为上述方案的优选方式,所述第一激光开槽单元之间为平行设置;每一 第一激光开槽单元中,所述第一激光开槽体为并列设置,所述第一激光开槽体处于同一水平面上或上下错开;In a preferred embodiment of the above aspect, the first laser grooving units are disposed in parallel; in each of the first laser grooving units, the first laser grooving body is juxtaposed, and the first laser grooving The bodies are on the same level or staggered up and down;
所述第一激光开槽单元之间的间距为0.5-50mm;The spacing between the first laser grooving units is 0.5-50 mm;
每一第一激光开槽单元中,所述第一激光开槽体之间的间距为0.5-50mm;In each of the first laser grooving units, the spacing between the first laser grooving bodies is 0.5-50 mm;
所述第一激光开槽体的长度为50-5000微米,宽度为10-500微米。The first laser grooving body has a length of 50-5000 microns and a width of 10-500 microns.
作为上述方案的优选方式,所述背铝栅线的根数为30-500条,所述栅线脊骨的根数为30-500条;As a preferred embodiment of the above solution, the number of the back aluminum grid lines is 30-500, and the number of the gate line spines is 30-500;
所述背铝栅线的宽度为30-500微米,所述背铝栅线的宽度小于所述第一激光开槽体的长度;The width of the back aluminum grid line is 30-500 microns, and the width of the back aluminum grid line is smaller than the length of the first laser slotted body;
所述栅线脊骨的宽度为30-500微米,所述栅线脊骨的宽度小于所述第三激光开槽体的长度。The width of the gate line spine is 30-500 microns, and the width of the grid line spine is smaller than the length of the third laser slotted body.
作为上述方案的优选方式,所述栅线脊骨的图案为一条连续的直线或多个线段组成的虚线;所述栅线脊骨由银浆制成,其宽度为30-60微米;或,所述栅线脊骨由铝浆制成,其宽度为50-500微米。As a preferred mode of the above aspect, the pattern of the gridline spine is a continuous straight line or a dotted line composed of a plurality of line segments; the gridline spine is made of silver paste and has a width of 30-60 micrometers; or The gridline spine is made of aluminum paste and has a width of 50-500 microns.
相应的,本发明还公开一种P型PERC双面太阳能电池的制备方法,包括:Correspondingly, the present invention also discloses a method for preparing a P-type PERC double-sided solar cell, comprising:
(1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
(2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
(3)去除扩散过程形成的正面磷硅玻璃和周边PN结;(3) removing the frontal phosphosilicate glass and the peripheral PN junction formed by the diffusion process;
(4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
(5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
(6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
(7)对硅片背面激光开槽,形成第一激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser slotted body including one or more horizontally disposed;
(8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
(9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,所述背铝栅线与第一激光开槽体垂直;(9) printing aluminum paste along the vertical direction of the laser grooving on the back side of the silicon wafer to obtain a back aluminum grid line, the back aluminum grid line being perpendicular to the first laser grooving body;
(10)在所述硅片背面印刷栅线脊骨;(10) printing a gridline spine on the back side of the silicon wafer;
(11)在所述硅片正面印刷正电极浆料;(11) printing a positive electrode paste on a front surface of the silicon wafer;
(12)对硅片进行高温烧结,形成背银电极和正银电极;(12) sintering the silicon wafer at a high temperature to form a back silver electrode and a positive silver electrode;
(13)对硅片进行抗LID退火。(13) Anti-LID annealing of the silicon wafer.
作为上述方案的优选方式,步骤(3)和(4)之间,还包括:As a preferred mode of the above solution, between steps (3) and (4), the method further includes:
对硅片背面进行抛光。Polish the back side of the wafer.
作为上述方案的优选方式,步骤(7)还包括:As a preferred mode of the above solution, the step (7) further includes:
对硅片背面激光开槽,形成第三激光开槽区,所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体与栅线脊骨垂直。Laser grooving the backside of the silicon wafer to form a third laser grooving zone, the third laser grooving zone comprising a plurality of sets of third laser grooving units, each set of third laser grooving units comprising one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gridline spine.
相应的,本发明还公开一种PERC太阳能电池组件,包括PERC太阳能电池和封装材料,所述PERC太阳能电池是上述任一的P型PERC双面太阳能电池。Correspondingly, the present invention also discloses a PERC solar cell module comprising a PERC solar cell and a packaging material, and the PERC solar cell is any of the P-type PERC double-sided solar cells described above.
相应的,本发明还公开一种PERC太阳能系统,包括PERC太阳能电池,所述PERC太阳能电池是上述任一的P型PERC双面太阳能电池。Correspondingly, the present invention also discloses a PERC solar energy system comprising a PERC solar cell, which is any of the P-type PERC double-sided solar cells described above.
实施本发明,具有如下有益效果:The implementation of the present invention has the following beneficial effects:
本发明通过在硅片背面形成背面钝化层后,对背面钝化层通过激光开槽形成第一激光开槽区,然后沿着激光划线方向的垂直方向印刷铝浆,使铝浆通过开槽区与P型硅相连,得到背铝栅线。该PERC双面太阳能电池通过在硅片正面和背面制备电池栅线结构,采用不同于常规印刷铝浆的方式,由于铝栅的宽度远小于第一激光开槽区的长度,可以不需要对铝浆和第一激光开槽区实施精确对准,简化了激光工艺和印刷工艺,降低了印刷设备调试的难度,易于产业化大生产。另外,铝浆覆盖区以外的第一激光开槽区可以增加电池背表面对太阳光的吸收,提高电池的光电转换效率。In the invention, after the back passivation layer is formed on the back surface of the silicon wafer, the first laser grooved region is formed by laser grooving on the back passivation layer, and then the aluminum paste is printed in the vertical direction along the laser scribing direction, so that the aluminum paste is opened. The trench region is connected to the P-type silicon to obtain a back aluminum gate line. The PERC double-sided solar cell can prepare a battery grid structure on the front and back sides of the silicon wafer, and adopts a method different from the conventional printing aluminum paste. Since the width of the aluminum grid is much smaller than the length of the first laser grooved area, the aluminum can be omitted. The precise alignment of the slurry and the first laser grooving zone simplifies the laser process and the printing process, reduces the difficulty of debugging the printing equipment, and is easy to industrialize large production. In addition, the first laser grooved area outside the aluminum paste coverage area can increase the absorption of sunlight by the back surface of the battery, and improve the photoelectric conversion efficiency of the battery.
此外,在印刷过程中,由于铝浆的粘度较大,网版的线宽又比较窄,会偶尔出现铝栅断栅的情况。铝栅断栅会导致EL测试的图像出现黑色断栅。同时,铝栅断栅又会影响电池的光电转换效率。因此,本发明在背铝栅线处增设栅线脊骨,所述栅线脊骨与背铝栅线连接,为电子的流动多提供了一条路径,防止铝栅断栅对电池光电转换效率造成的影响,同时避免电池的EL测试出现断栅。In addition, in the printing process, due to the large viscosity of the aluminum paste, the line width of the screen is relatively narrow, and occasionally an aluminum gate is broken. The aluminum gate breakage causes a black break in the image of the EL test. At the same time, the aluminum gate grid will affect the photoelectric conversion efficiency of the battery. Therefore, the present invention adds a gate line spine at the back aluminum gate line, and the gate line spine is connected with the back aluminum gate line, which provides a path for the electron flow to prevent the aluminum gate broken gate from causing the photoelectric conversion efficiency of the battery. The effect of avoiding the breakage of the EL test of the battery.
栅线脊骨的下方可以设有第三激光开槽区,也可以不设有第三激光开槽区,当其设有第三激光开槽区时,可以不需要对浆料和第三激光开槽区实施精确对准,简化了激光工艺和印刷工艺,降低了印刷设备调试的难度。另外,浆料覆盖区以外的第三激光开槽区可以增加电池背表面对太阳光的吸收,提高电池的 光电转换效率。A third laser grooving zone may be disposed below the gridline spine, or a third laser grooving zone may not be provided. When the third laser grooving zone is provided, the slurry and the third laser may not be needed. The precise alignment of the slotted area simplifies the laser process and printing process, reducing the difficulty of debugging the printing equipment. In addition, the third laser grooving zone outside the slurry coverage area can increase the absorption of sunlight by the back surface of the battery and improve the photoelectric conversion efficiency of the battery.
因此,本发明结构简单、工艺简单,成本较低、易于推广、光电转换效率高。Therefore, the invention has the advantages of simple structure, simple process, low cost, easy promotion, and high photoelectric conversion efficiency.
附图说明DRAWINGS
图1是本发明一种P型PERC双面太阳能电池的剖视图;Figure 1 is a cross-sectional view showing a P-type PERC double-sided solar cell of the present invention;
图2是本发明一种P型PERC双面太阳能电池的背面结构第一实施例的示意图;2 is a schematic view showing a first embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention;
图3是本发明一种P型PERC双面太阳能电池的背面结构第二实施例的示意图;3 is a schematic view showing a second embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention;
图4是本发明一种P型PERC双面太阳能电池的背面结构第三实施例的示意图;4 is a schematic view showing a third embodiment of a back structure of a P-type PERC double-sided solar cell according to the present invention;
图5是本发明一种P型PERC双面太阳能电池的第一激光开槽区一实施例的示意图;5 is a schematic view showing an embodiment of a first laser grooving zone of a P-type PERC double-sided solar cell according to the present invention;
图6是本发明一种P型PERC双面太阳能电池的第一激光开槽区另一实施例的示意图。Figure 6 is a schematic illustration of another embodiment of a first laser grooving zone of a P-type PERC double-sided solar cell of the present invention.
图7是本发明一种P型PERC双面太阳能电池的第三激光开槽区的示意图。Figure 7 is a schematic illustration of a third laser grooving zone of a P-type PERC double-sided solar cell of the present invention.
具体实施方式detailed description
为使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明作进一步地详细描述。In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings.
现有的单面太阳能电池在电池的背面设有全铝背电场覆盖在硅片的整个背面,全铝背电场的作用是提高了开路电压Voc和短路电流Jsc,迫使少数载流子远离表面,少数载流子复合率降低,从而整体上提高电池效率。然而,由于全铝背电场不透光,因此,具有全铝背电场的太阳能电池背面无法吸收光能,只能正面吸收光能,电池的综合光电转换效率难以大幅度的提高。The existing single-sided solar cell has an all-aluminum back electric field on the back surface of the battery covering the entire back surface of the silicon wafer. The function of the all-aluminum back electric field is to increase the open circuit voltage Voc and the short-circuit current Jsc, forcing the minority carriers away from the surface. The minority carrier recombination rate is reduced, thereby improving battery efficiency as a whole. However, since the all-aluminum back electric field is opaque, the back side of the solar cell having an all-aluminum back electric field cannot absorb light energy, and only the front side can absorb light energy, and the integrated photoelectric conversion efficiency of the battery is difficult to be greatly improved.
针对上述技术问题,结合图1,本发明提供一种P型PERC双面太阳能电池,依次包括背银电极1、背铝栅线2、背面钝化层3、P型硅4、N型发射极5、正面氮化硅膜6、正银电极7,所述背银电极1与背铝栅线2垂直连接,所述背铝栅线2处设有栅线脊骨10,所述栅线脊骨10与背铝栅线2连接。In view of the above technical problem, in conjunction with FIG. 1, the present invention provides a P-type PERC double-sided solar cell, which in turn includes a back silver electrode 1, a back aluminum gate line 2, a back passivation layer 3, a P-type silicon 4, and an N-type emitter. 5. The front silicon nitride film 6 and the positive silver electrode 7, the back silver electrode 1 is vertically connected to the back aluminum gate line 2, and the back aluminum grid line 2 is provided with a grid line spine 10, the grid line ridge The bone 10 is connected to the back aluminum grid line 2.
对背面钝化层3通过激光开槽形成第一激光开槽区8,所述背铝栅线2通过第一激光开槽区8与P型硅4相连。正银电极7包括正银电极主栅7A和正银电极副栅7B。所述背面钝化层3包括氧化铝层31和氮化硅层32。A first laser grooving region 8 is formed by laser grooving of the back passivation layer 3, and the back aluminum gate line 2 is connected to the P-type silicon 4 through the first laser grooving region 8. The positive silver electrode 7 includes a positive silver electrode main gate 7A and a positive silver electrode sub-gate 7B. The back passivation layer 3 includes an aluminum oxide layer 31 and a silicon nitride layer 32.
本发明对现有的单面PERC太阳能电池进行改进,不再设有全铝背电场,而是将其变成许多的背铝栅线2,采用激光开槽技术在背面钝化层3上开设第一激光开槽区8,而背铝栅线2印刷在这些平行设置的第一激光开槽区8上,从而能与P型硅4形成局部接触,密集平行排布的背铝栅线2不仅能起到提高开路电压Voc和短路电流Jsc,降低少数载流子复合率,提高电池光电转换效率的作用,可替代现有单面电池结构的全铝背电场,而且背铝栅线2并未全面遮盖硅片的背面,太阳光可从背铝栅线2之间投射至硅片内,从而实现硅片背面吸收光能,大幅提高电池的光电转换效率。The invention improves the existing single-sided PERC solar cell, no longer has an all-aluminum back electric field, but turns it into a plurality of back aluminum grid lines 2, which are opened on the back passivation layer 3 by laser grooving technology. The first laser grooved area 8 is printed on the parallel first first laser grooved regions 8 so as to be in local contact with the P-type silicon 4, and the densely arranged rear aluminum gate lines 2 are arranged in parallel. It can not only improve the open circuit voltage Voc and the short circuit current Jsc, reduce the minority carrier recombination rate, and improve the photoelectric conversion efficiency of the battery. It can replace the all-aluminum back electric field of the existing single-sided battery structure, and the back aluminum grid line 2 The back surface of the silicon wafer is not completely covered, and sunlight can be projected from the back aluminum gate line 2 into the silicon wafer, thereby realizing absorption of light energy on the back surface of the silicon wafer and greatly improving the photoelectric conversion efficiency of the battery.
如图2、3、4所示,所述第一激光开槽区8包括多组水平方向设置的第一激光开槽单元81,每一组第一激光开槽单元81包括一个或多个水平方向设置的第一激光开槽体82,所述背铝栅线2与第一激光开槽体82垂直。结合图5、6,图5、6所示的虚线框为第一激光开槽单元81,每一组第一激光开槽单元81包括一个或多个水平方向设置的第一激光开槽体82。As shown in FIGS. 2, 3, and 4, the first laser grooving area 8 includes a plurality of sets of first laser grooving units 81 disposed in a horizontal direction, and each set of first laser grooving units 81 includes one or more levels. The first laser grooving body 82 is disposed in a direction, and the back aluminum grid line 2 is perpendicular to the first laser grooving body 82. 5 and 6, the dotted frame shown in FIGS. 5 and 6 is the first laser grooving unit 81, and each set of the first laser grooving unit 81 includes one or more first laser grooving bodies 82 disposed in the horizontal direction. .
在印刷过程中,由于铝浆的粘度较大,网版的线宽又比较窄,会偶尔出现铝栅断栅的情况。铝栅断栅会导致EL测试的图像出现黑色断栅。同时,铝栅断栅又会影响电池的光电转换效率。因此,本发明在背铝栅线2处增设栅线脊骨10,所述栅线脊骨10与背铝栅线2连接,为电子的流动多提供了一条路径,防止铝栅断栅对电池光电转换效率造成的影响,同时避免电池的EL测试出现断栅。优选的,所述栅线脊骨10与背铝栅线2垂直连接。需要说明的是,所述栅线脊骨10与背铝栅线2还可以以一定的倾斜角度连接,例如15°、30°、45°60°,但不限于此。In the printing process, due to the large viscosity of the aluminum paste, the line width of the screen is relatively narrow, and occasionally an aluminum gate is broken. The aluminum gate breakage causes a black break in the image of the EL test. At the same time, the aluminum gate grid will affect the photoelectric conversion efficiency of the battery. Therefore, the present invention adds a gate line spine 10 at the back aluminum gate line 2, and the grid line spine 10 is connected to the back aluminum gate line 2, providing a path for the flow of electrons to prevent the aluminum gate from being broken to the battery. The effect of photoelectric conversion efficiency, while avoiding the grid breakage of the EL test of the battery. Preferably, the gate line spine 10 is perpendicularly connected to the back aluminum grid line 2. It should be noted that the gate line spine 10 and the back aluminum grid line 2 may also be connected at a certain oblique angle, for example, 15°, 30°, 45° 60°, but are not limited thereto.
栅线脊骨10的下方可以设有第三激光开槽区11,参见图3所示的背面结构的第一实施例。栅线脊骨10的下方也可以不设有第三激光开槽区11,参见图2所示的背面结构的第二实施例。A third laser grooving zone 11 may be provided below the gridline spine 10, see the first embodiment of the backside structure shown in FIG. The third laser grooving zone 11 may also be omitted below the gridline spine 10, see the second embodiment of the backside structure shown in FIG.
所述栅线脊骨的图案为一条连续的直线或多个线段组成的虚线,图2、3所示的栅线脊骨10为一条连续的直线,图4所示的栅线脊骨10为多个线段组成的虚线。The pattern of the gridline spine is a continuous straight line or a plurality of line segments. The gridline spine 10 shown in FIGS. 2 and 3 is a continuous straight line, and the gridline spine 10 shown in FIG. A dotted line composed of multiple line segments.
当栅线脊骨10的下方可以设有第三激光开槽区11时,如图7所示,所述第三激光开槽区11包括多组第三激光开槽单元12,每一组第三激光开槽单元12包括一个或多个竖直方向设置的第三激光开槽体13,所述第三激光开槽体13与栅线脊骨10垂直,所述栅线脊骨10通过第三激光开槽体13与P型硅相连。When the third laser grooving zone 11 is disposed below the gridline spine 10, as shown in FIG. 7, the third laser grooving zone 11 includes a plurality of sets of third laser grooving units 12, each of which is The three-laser grooving unit 12 includes one or more third laser grooving bodies 13 disposed in a vertical direction, the third laser grooving body 13 being perpendicular to the grid-line spine 10, and the grid-line vertebral 10 passing through The three laser slotted bodies 13 are connected to P-type silicon.
栅线脊骨10的下方设有第三激光开槽区11,可以不需要对浆料和第三激光开槽区11实施精确对准,简化了激光工艺和印刷工艺,降低了印刷设备调试的难度。另外,浆料覆盖区以外的第三激光开槽区11可以增加电池背表面对太阳光的吸收,提高电池的光电转换效率。A third laser grooving zone 11 is disposed below the gridline spine 10, which eliminates the need for precise alignment of the slurry and the third laser grooving zone 11, simplifies the laser process and the printing process, and reduces the debugging of the printing apparatus. Difficulty. In addition, the third laser grooving zone 11 outside the slurry coverage area can increase the absorption of sunlight by the back surface of the battery and improve the photoelectric conversion efficiency of the battery.
优选的,所述栅线脊骨10的根数为30-500条,所述栅线脊骨10的宽度为30-500微米,所述栅线脊骨10的宽度小于所述第三激光开槽体13的长度,在栅线脊骨10与第三激光开槽体13垂直的情况下,可以极大的方便栅线脊骨10的印刷问题。不需要精确对准,栅线脊骨10都可以落在第三激光开槽区11内,简化了激光工艺和印刷工艺,降低了印刷设备调试的难度,易于产业化大生产。Preferably, the number of the gate line spines 10 is 30-500, the width of the grid line spine 10 is 30-500 microns, and the width of the grid line spine 10 is smaller than the third laser opening. The length of the trough body 13 can greatly facilitate the printing problem of the grid line spine 10 in the case where the grid line spine 10 is perpendicular to the third laser slotted body 13. Without precise alignment, the gridline spine 10 can fall within the third laser grooving zone 11, simplifying the laser process and printing process, reducing the difficulty of debugging the printing equipment, and facilitating industrial production.
所述栅线脊骨10既可以由银浆制成,又可以由铝浆制成。当所述栅线脊骨10由银浆制成时,其宽度为30-60微米;当所述栅线脊骨10由铝浆制成时,其宽度为50-500微米。The grid line spine 10 can be made of either silver paste or aluminum paste. When the gridline spine 10 is made of silver paste, its width is 30-60 microns; when the gridline spine 10 is made of aluminum paste, its width is 50-500 microns.
需要说明的是,第一激光开槽单元81有多种实施方式,包括:It should be noted that the first laser grooving unit 81 has various embodiments, including:
(1)每一组第一激光开槽单元81包括一个水平方向设置的第一激光开槽体82,此时,第一激光开槽单元81为连续的直线开槽区,具体如图6所示。多个第一激光开槽单元81沿着竖直方向排列布置。(1) Each of the first laser grooving units 81 includes a first laser grooving body 82 disposed in a horizontal direction. At this time, the first laser grooving unit 81 is a continuous linear grooving area, as shown in FIG. Show. The plurality of first laser grooving units 81 are arranged in the vertical direction.
(2)每一组第一激光开槽单元81包括多个水平方向设置的第一激光开槽体82,此时,第一激光开槽单元81为线段式非连续的直线开槽区,具体如图5所示。该多个第一激光开槽体82可以是两个、三个、四个或以上,但不限于此。多个第一激光开槽单元81沿着竖直方向排列布置。(2) Each group of the first laser grooving unit 81 includes a plurality of first laser grooving bodies 82 disposed in a horizontal direction. At this time, the first laser grooving unit 81 is a line segment type non-continuous linear grooving area, specifically As shown in Figure 5. The plurality of first laser grooving bodies 82 may be two, three, four or more, but are not limited thereto. The plurality of first laser grooving units 81 are arranged in the vertical direction.
当每一组第一激光开槽单元81包括多个水平方向设置的第一激光开槽体82时,其分为以下几种情况:When each set of the first laser grooving unit 81 includes a plurality of first laser grooving bodies 82 disposed in the horizontal direction, it is divided into the following cases:
A、多个水平方向设置的第一激光开槽体82的宽度、长度和形状都是一样的,其尺寸单位为微米级别,长度可以为50-5000微米,但不限于此;需要说明的是,所述第一激光开槽体可以处于同一水平面上,也可以上下错开(即不在同一水平面)上,其错开分布的形貌根据生产需要而定。A. The width, length and shape of the first laser slotted body 82 disposed in a plurality of horizontal directions are the same, and the size thereof is in the order of micrometers, and the length may be 50-5000 micrometers, but is not limited thereto; The first laser grooving body may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
B、多个水平方向设置的第一激光开槽体82的宽度、长度和形状都是一样的,其尺寸单位为毫米级别,长度可以为5-600毫米,但不限于此;需要说明的是,所述第一激光开槽体可以处于同一水平面上,也可以上下错开(即不在同一水平面)上,其错开分布的形貌根据生产需要而定。B. The width, length and shape of the first laser grooving body 82 disposed in a plurality of horizontal directions are the same, and the dimensions are in the order of millimeters, and the length may be 5-600 mm, but is not limited thereto; The first laser grooving body may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
C、多个水平方向设置的第一激光开槽体82的宽度、长度和/或形状不一样的,其可以根据生产需要进行组合设计。需要说明的是,所述第一激光开槽体可以处于同一水平面上,也可以上下错开(即不在同一水平面)上,其错开分布的形貌根据生产需要而定。C. The width, length and/or shape of the first laser grooving body 82 disposed in a plurality of horizontal directions are different, and the combined design may be performed according to production needs. It should be noted that the first laser grooving bodies may be on the same horizontal plane, or may be staggered up and down (ie, not in the same horizontal plane), and the staggered distribution of the topography depends on production needs.
作为本发明优选的实施方式,所述第一激光开槽体为直线型,方便加工,简化工艺,降低生产成本。所述第一激光开槽体也可以设置为其他形状,例如曲线形、弧形、波浪形等,其实施方式并不局限于本发明所举实施例。As a preferred embodiment of the present invention, the first laser grooving body is linear, which facilitates processing, simplifies the process, and reduces production costs. The first laser grooving body may also be provided in other shapes, such as a curved shape, an arc shape, a wave shape, etc., and embodiments thereof are not limited to the embodiment of the present invention.
所述第一激光开槽单元之间为平行设置,每一第一激光开槽单元中,所述第一激光开槽体为并列设置,可以简化生产工艺,适合大规模推广应用。The first laser grooving units are arranged in parallel. In each of the first laser grooving units, the first laser grooving bodies are arranged side by side, which simplifies the production process and is suitable for large-scale popularization and application.
所述第一激光开槽单元之间的间距为0.5-50mm。每一第一激光开槽单元中,所述第一激光开槽体之间的间距为0.5-50mm。The spacing between the first laser grooving units is 0.5-50 mm. In each of the first laser grooving units, the spacing between the first laser grooving bodies is 0.5-50 mm.
所述第一激光开槽体82的长度为50-5000微米,宽度为10-500微米。优选的,所述第一激光开槽体82的长度为250-1200微米,宽度为30-80微米。The first laser grooving body 82 has a length of 50-5000 microns and a width of 10-500 microns. Preferably, the first laser grooving body 82 has a length of 250-1200 microns and a width of 30-80 microns.
第一激光开槽单元的长度、宽度和间距和铝栅的根数和宽度是在综合考虑铝栅与P型硅的接触面积、铝栅的遮光面积和充分搜集电子的的基础上优化而来,目的是尽可能降低背面铝栅的遮光面积,同时保证好的电流输出,进而提升电池的整体光电转换效率。The length, width and spacing of the first laser grooving unit and the number and width of the aluminum grid are optimized on the basis of comprehensively considering the contact area of the aluminum grid and the P-type silicon, the opaque area of the aluminum grid, and the sufficient collection of electrons. The purpose is to reduce the shading area of the back aluminum grid as much as possible, while ensuring a good current output, thereby improving the overall photoelectric conversion efficiency of the battery.
所述背铝栅线的根数为30-500条,所述背铝栅线的宽度为30-500微米,所述背铝栅线的宽度远小于所述第一激光开槽体的长度。优选的,所述背铝栅线的根数为80-220条,所述背铝栅线的宽度为50-300微米。The back aluminum gate lines have a number of 30-500, the back aluminum gate lines have a width of 30-500 microns, and the back aluminum grid lines have a width much smaller than the length of the first laser slotted body. Preferably, the number of the back aluminum grid lines is 80-220, and the width of the back aluminum grid lines is 50-300 microns.
所述背铝栅线的宽度远小于所述第一激光开槽体的长度,在铝栅与第一激光开槽体垂直的情况下,可以极大的方便背铝栅线的印刷问题。不需要精确对准,铝栅都可以落在第一激光开槽区内,简化了激光工艺和印刷工艺,降低了印刷设备调试的难度,易于产业化大生产。The width of the back aluminum grid line is much smaller than the length of the first laser slotted body. In the case where the aluminum grid is perpendicular to the first laser slotted body, the printing problem of the back aluminum grid line can be greatly facilitated. Without precise alignment, the aluminum grid can fall in the first laser grooving zone, which simplifies the laser process and printing process, reduces the difficulty of debugging the printing equipment, and is easy to industrialize and produce.
本发明通过对背面钝化层通过激光开槽形成第一激光开槽区,然后沿着激光划线方向的垂直方向印刷铝浆,使铝浆通过开槽区与P型硅相连,得到背铝 栅线。该PERC双面太阳能电池通过在硅片正面和背面制备电池栅线结构,采用不同于常规印刷铝浆的方式,可以不需要对铝浆和第一激光开槽区实施精确对准,工艺简单,易于产业化大生产。铝栅与第一激光开槽体平行,铝浆和第一激光开槽区需要实施精确对准,对印刷设备的精度和重复性要求很高,成品率难以得到控制,次品较多,造成平均光电转换效率的下降。采用本发明,可以将成品率提高至99.5%。The invention forms the first laser grooving zone by laser grooving the back passivation layer, and then printing the aluminum paste in the vertical direction of the laser scribing direction, so that the aluminum paste is connected to the P-type silicon through the grooving zone to obtain the back aluminum. Grid line. The PERC double-sided solar cell can prepare a battery grid structure on the front and back sides of the silicon wafer, and adopts a method different from the conventional printing aluminum paste, so that precise alignment of the aluminum paste and the first laser grooved area is not required, and the process is simple. Easy to industrialize large production. The aluminum grid is parallel to the first laser slotted body, and the aluminum paste and the first laser slotted area need to be accurately aligned, which requires high precision and repeatability of the printing equipment, and the yield is difficult to control, and the defective products are more, resulting in The average photoelectric conversion efficiency decreases. With the present invention, the yield can be increased to 99.5%.
进一步,所述背面钝化层3包括氧化铝层31和氮化硅层32,所述氧化铝层31与P型硅4连接,所述氮化硅层32与氧化铝层31连接;Further, the back passivation layer 3 includes an aluminum oxide layer 31 and a silicon nitride layer 32, the aluminum oxide layer 31 is connected to the P-type silicon 4, and the silicon nitride layer 32 is connected to the aluminum oxide layer 31;
所述氮化硅层32的厚度为20-500nm;The silicon nitride layer 32 has a thickness of 20-500 nm;
所述氧化铝层31的厚度为2-50nm。The aluminum oxide layer 31 has a thickness of 2 to 50 nm.
优选的,所述氮化硅层32的厚度为100-200nm;Preferably, the silicon nitride layer 32 has a thickness of 100-200 nm;
所述氧化铝层31的厚度为5-30nm。The aluminum oxide layer 31 has a thickness of 5 to 30 nm.
相应的,本发明还公开一种P型PERC双面太阳能电池的制备方法,包括:Correspondingly, the present invention also discloses a method for preparing a P-type PERC double-sided solar cell, comprising:
S101、在硅片正面和背面形成绒面,所述硅片为P型硅;S101, forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
S102、对硅片进行扩散,形成N型发射极;S102, diffusing the silicon wafer to form an N-type emitter;
S103、去除扩散过程形成的正面磷硅玻璃和周边PN结;S103, removing the frontal phosphorous silicon glass and the peripheral PN junction formed by the diffusion process;
S104、在硅片背面沉积三氧化二铝膜;S104, depositing an aluminum oxide film on the back side of the silicon wafer;
S105、在硅片背面沉积氮化硅膜;S105, depositing a silicon nitride film on the back side of the silicon wafer;
S106、在硅片正面沉积氮化硅膜;S106, depositing a silicon nitride film on the front side of the silicon wafer;
S107、对硅片背面激光开槽,形成第一激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体;S107. The laser is grooved on the back side of the silicon wafer to form a first laser grooving area. The first laser grooving area includes a plurality of sets of first laser grooving units disposed in a horizontal direction, and each set of the first laser grooving unit includes a first laser slotted body disposed in one or more horizontal directions;
S108、在所述硅片背面印刷背银主栅电极;S108, printing a back silver main gate electrode on the back side of the silicon wafer;
S109、在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,所述背铝栅线与第一激光开槽体垂直;S109, printing aluminum paste along the vertical direction of the laser grooving on the back surface of the silicon wafer to obtain a back aluminum grid line, the back aluminum grid line being perpendicular to the first laser grooving body;
S110、在所述硅片背面印刷栅线脊骨;S110, printing a gridline spine on the back of the silicon wafer;
S111、在所述硅片正面印刷正电极浆料;S111, printing a positive electrode slurry on a front surface of the silicon wafer;
S112、对硅片进行高温烧结,形成背银电极和正银电极。S112. The silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
S113、对硅片进行抗LID退火。S113, performing anti-LID annealing on the silicon wafer.
需要说明的是,S106与S104、S105的顺序可以互换,S106可以在S104、 S105之前。It should be noted that the order of S106 and S104, S105 can be interchanged, and S106 can be before S104 and S105.
S103和S104之间,还包括:对硅片背面进行抛光。本发明可以设有背面抛光步骤,也可以不设有背面抛光步骤。Between S103 and S104, the method further comprises: polishing the back surface of the silicon wafer. The present invention may be provided with a backside polishing step or no backside polishing step.
所述栅线脊骨由银浆或铝浆制成,当栅线脊骨由银浆制成时,S109和S110分开两个步骤;当栅线脊骨由铝浆制成时,S109和S110合并为一个步骤。The grid line spine is made of silver paste or aluminum paste. When the grid line spine is made of silver paste, S109 and S110 are separated into two steps; when the grid line spine is made of aluminum paste, S109 and S110 Merge into one step.
所述栅线脊骨下方可以设有第三激光开槽区,也可以不设有第三激光开槽区。当所述栅线脊骨下方可以设有第三激光开槽区时,步骤(7)还包括:A third laser grooving zone may be disposed under the ridge of the grid line, or a third laser grooving zone may not be provided. When the third laser slotted area can be disposed under the ridge of the grid line, the step (7) further includes:
对硅片背面激光开槽,形成第三激光开槽区,所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体与栅线脊骨垂直。Laser grooving the backside of the silicon wafer to form a third laser grooving zone, the third laser grooving zone comprising a plurality of sets of third laser grooving units, each set of third laser grooving units comprising one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gridline spine.
还需要说明的是,制备方法中的第一激光开槽区、第三激光开槽区和背铝栅线、栅线脊骨的具体参数设定,同上所述,在此不再赘述。It should be noted that the specific parameter setting of the first laser grooved area, the third laser grooved area, the back aluminum grid line, and the grid line spine in the preparation method is the same as that described above, and details are not described herein again.
相应的,本发明还公开一种PERC太阳能电池组件,包括PERC太阳能电池和封装材料,所述PERC太阳能电池是上述任一的P型PERC双面太阳能电池。具体的,作为PERC太阳能电池组件的一实施例,其由上至下依次连接的高透钢化玻璃、乙烯-醋酸乙烯共聚物EVA、PERC太阳能电池、乙烯-醋酸乙烯共聚物EVA和高透钢化玻璃组成。Correspondingly, the present invention also discloses a PERC solar cell module comprising a PERC solar cell and a packaging material, and the PERC solar cell is any of the P-type PERC double-sided solar cells described above. Specifically, as an embodiment of the PERC solar cell module, the high-permeability tempered glass, the ethylene-vinyl acetate copolymer EVA, the PERC solar cell, the ethylene-vinyl acetate copolymer EVA, and the highly permeable tempered glass are sequentially connected from top to bottom. composition.
相应的,本发明还公开一种PERC太阳能系统,包括PERC太阳能电池,所述PERC太阳能电池是上述任一的P型PERC双面太阳能电池。作为PERC太阳能系统的一优选实施例,包括PERC太阳能电池、蓄电池组,充放电控制器逆变器,交流配电柜和太阳跟踪控制系统。其中,PERC太阳能系统可以设有蓄电池组、充放电控制器逆变器,也可以不设蓄电池组、充放电控制器逆变器,本领域技术人员可以根据实际需要进行设置。Correspondingly, the present invention also discloses a PERC solar energy system comprising a PERC solar cell, which is any of the P-type PERC double-sided solar cells described above. As a preferred embodiment of the PERC solar system, a PERC solar cell, a battery pack, a charge and discharge controller inverter, an AC power distribution cabinet, and a solar tracking control system are included. The PERC solar system may be provided with a battery pack, a charge and discharge controller inverter, or a battery pack or a charge and discharge controller inverter, and those skilled in the art may set according to actual needs.
需要说明的是,PERC太阳能电池组件、PERC太阳能系统中,除了P型PERC双面太阳能电池之外的部件,参照现有技术设计即可。It should be noted that in the PERC solar cell module and the PERC solar system, components other than the P-type PERC double-sided solar cell may be designed with reference to the prior art.
下面以具体实施例进一步阐述本发明The invention is further illustrated by the following specific examples.
实施例1Example 1
(1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
(2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
(3)去除扩散过程形成的正面磷硅玻璃和周边PN结;(3) removing the frontal phosphosilicate glass and the peripheral PN junction formed by the diffusion process;
(4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
(5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
(6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
(7)对硅片背面激光开槽,形成第一激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述第一激光开槽体的长度为1000微米,宽度为40微米;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser grooving body comprising one or more horizontally disposed, the first laser grooving body having a length of 1000 microns and a width of 40 microns;
(8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
(9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,所述背铝栅线与第一激光开槽体垂直,背铝栅线的根数为150条,所述背铝栅线的宽度为150微米;(9) printing aluminum paste along the vertical direction of the laser grooving on the back surface of the silicon wafer to obtain a back aluminum grid line, the back aluminum grid line being perpendicular to the first laser grooving body, and the number of back aluminum grid lines 150 strips, the back aluminum grid line has a width of 150 microns;
(10)在所述硅片背面印刷栅线脊骨,所述栅线脊骨选用银浆,所述栅线脊骨的根数为140条,宽度为60微米;(10) printing a gridline spine on the back side of the silicon wafer, the gate line spine is selected from silver paste, the number of the gate line spine is 140, and the width is 60 micrometers;
(11)在所述硅片正面印刷正电极浆料;(11) printing a positive electrode paste on a front surface of the silicon wafer;
(12)对硅片进行高温烧结,形成背银电极和正银电极。(12) The silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
(13)对硅片进行抗LID退火。(13) Anti-LID annealing of the silicon wafer.
实施例2Example 2
(1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
(2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
(3)去除扩散过程形成的正面磷硅玻璃和周边PN结,并对硅片背面进行抛光;(3) removing the frontal phosphorous silicon glass and the peripheral PN junction formed by the diffusion process, and polishing the back surface of the silicon wafer;
(4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
(5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
(6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
(7)对硅片背面激光开槽,形成第一激光开槽区和第三激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述第一激光开槽体的长度为500微米,宽度为50微米;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone and a third laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged in a horizontal direction, each The first laser grooving unit comprises one or more first laser grooving bodies arranged in a horizontal direction, the first laser grooving body having a length of 500 microns and a width of 50 microns;
所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体的长 度为500微米,宽度为50微米;The third laser grooving area includes a plurality of sets of third laser grooving units, each set of third laser grooving units includes one or more third laser slotted bodies disposed in a vertical direction, and the third laser blasting unit The length of the trough is 500 microns and the width is 50 microns;
(8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
(9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,所述背铝栅线与第一激光开槽体垂直,背铝栅线的根数为200条,所述背铝栅线的宽度为200微米;(9) printing aluminum paste along the vertical direction of the laser grooving on the back surface of the silicon wafer to obtain a back aluminum grid line, the back aluminum grid line being perpendicular to the first laser grooving body, and the number of back aluminum grid lines 200 strips, the width of the back aluminum grid line is 200 microns;
(10)在所述硅片背面印刷栅线脊骨,所述栅线脊骨选用银浆,所述栅线脊骨的根数为190条,宽度为50微米;(10) printing a gridline spine on the back side of the silicon wafer, the gate line spine is selected from silver paste, the number of the gate line spine is 190, and the width is 50 micrometers;
(11)在所述硅片正面印刷正电极浆料;(11) printing a positive electrode paste on a front surface of the silicon wafer;
(12)对硅片进行高温烧结,形成背银电极和正银电极。(12) The silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
(13)对硅片进行抗LID退火。(13) Anti-LID annealing of the silicon wafer.
实施例3Example 3
(1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
(2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
(3)去除扩散过程形成的正面磷硅玻璃和周边PN结;(3) removing the frontal phosphosilicate glass and the peripheral PN junction formed by the diffusion process;
(4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
(5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
(6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
(7)对硅片背面激光开槽,形成第一激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述第一激光开槽体的长度为300微米,宽度为30微米;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser grooving body comprising one or more horizontally disposed, the first laser grooving body having a length of 300 microns and a width of 30 microns;
(8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
(9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,并沿着背铝栅线的垂直方向印刷栅线脊骨,所述栅线脊骨选用铝浆,背铝栅线与第一激光开槽体垂直,背铝栅线的根数为250条,背铝栅线的宽度为250微米,脊骨的根数为240条,宽度为100微米;(9) printing aluminum paste along the vertical direction of the laser grooving on the back side of the silicon wafer to obtain a back aluminum grid line, and printing the grid line spine along the vertical direction of the back aluminum grid line, the grid line spine Aluminum paste is used, the back aluminum grid line is perpendicular to the first laser slotted body, the number of back aluminum grid lines is 250, the width of the back aluminum grid line is 250 microns, the number of spine lines is 240, and the width is 100. Micron
(10)在所述硅片正面印刷正电极浆料;(10) printing a positive electrode paste on a front surface of the silicon wafer;
(11)对硅片进行高温烧结,形成背银电极和正银电极。(11) The silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
(12)对硅片进行抗LID退火。(12) Anti-LID annealing of the silicon wafer.
实施例4Example 4
(1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
(2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
(3)去除扩散过程形成的正面磷硅玻璃和周边PN结,并对硅片背面进行抛光;(3) removing the frontal phosphorous silicon glass and the peripheral PN junction formed by the diffusion process, and polishing the back surface of the silicon wafer;
(4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
(5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
(6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
(7)对硅片背面激光开槽,形成第一激光开槽区和第三激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述第一激光开槽体的长度为1200微米,宽度为200微米;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone and a third laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged in a horizontal direction, each The first laser grooving unit comprises one or more first laser grooving bodies arranged in a horizontal direction, the first laser grooving body having a length of 1200 microns and a width of 200 microns;
所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体的长度为1200微米,宽度为200微米;The third laser grooving area includes a plurality of sets of third laser grooving units, each set of third laser grooving units includes one or more third laser slotted bodies disposed in a vertical direction, and the third laser blasting unit The length of the trough is 1200 microns and the width is 200 microns;
(8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
(9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,并沿着背铝栅线的垂直方向印刷栅线脊骨,所述栅线脊骨选用铝浆,背铝栅线与第一激光开槽体垂直,背铝栅线的根数为300条,背铝栅线的宽度为300微米,脊骨的根数为280条,宽度为200微米;(9) printing aluminum paste along the vertical direction of the laser grooving on the back side of the silicon wafer to obtain a back aluminum grid line, and printing the grid line spine along the vertical direction of the back aluminum grid line, the grid line spine Aluminum paste is used, the back aluminum grid line is perpendicular to the first laser slotted body, the number of back aluminum grid lines is 300, the width of the back aluminum grid line is 300 microns, the number of spine lines is 280, and the width is 200. Micron
(10)在所述硅片正面印刷正电极浆料;(10) printing a positive electrode paste on a front surface of the silicon wafer;
(11)对硅片进行高温烧结,形成背银电极和正银电极。(11) The silicon wafer is sintered at a high temperature to form a back silver electrode and a positive silver electrode.
(12)对硅片进行抗LID退火。(12) Anti-LID annealing of the silicon wafer.
最后所应当说明的是,以上实施例仅用以说明本发明的技术方案而非对本发明保护范围的限制,尽管参照较佳实施例对本发明作了详细说明,本领域的普通技术人员应当理解,可以对本发明的技术方案进行修改或者等同替换,而不脱离本发明技术方案的实质和范围。It should be noted that the above embodiments are only intended to illustrate the technical solutions of the present invention and are not intended to limit the scope of the present invention, although the present invention will be described in detail with reference to the preferred embodiments, The technical solutions of the present invention may be modified or equivalently substituted without departing from the spirit and scope of the technical solutions of the present invention.

Claims (10)

  1. 一种P型PERC双面太阳能电池,其特征在于,依次包括背银电极、背铝栅线、背面钝化层、P型硅、N型发射极、正面氮化硅膜和正银电极,所述背银电极与背铝栅线垂直连接,所述背铝栅线上设有栅线脊骨,所述栅线脊骨与背铝栅线连接;A P-type PERC double-sided solar cell, comprising, in order, a back silver electrode, a back aluminum gate line, a back passivation layer, a P-type silicon, an N-type emitter, a front silicon nitride film, and a positive silver electrode, The back silver electrode is vertically connected to the back aluminum grid line, and the back aluminum grid line is provided with a grid line spine, and the grid line spine is connected with the back aluminum grid line;
    对背面钝化层通过激光开槽形成第一激光开槽区,所述背铝栅线通过第一激光开槽区与P型硅相连;Forming, by laser grooving, a first laser grooving region on the back passivation layer, wherein the back aluminum gate line is connected to the P-type silicon through the first laser grooving region;
    所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体,所述背铝栅线与第一激光开槽体垂直。The first laser grooving zone comprises a plurality of sets of first laser grooving units arranged in a horizontal direction, and each set of first laser grooving units comprises one or more first laser grooving bodies arranged in a horizontal direction, the back The aluminum grid line is perpendicular to the first laser slotted body.
  2. 如权利要求1所述P型PERC双面太阳能电池,其特征在于,所述栅线脊骨与背铝栅线垂直连接;The P-type PERC double-sided solar cell according to claim 1, wherein the gate line spine is vertically connected to the back aluminum gate line;
    所述栅线脊骨下方设有第三激光开槽区,所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体与栅线脊骨垂直,所述栅线脊骨通过第三激光开槽体与P型硅相连。a third laser grooving zone is disposed under the ridge of the grid line, the third laser grooving zone comprises a plurality of sets of third laser grooving units, and each set of the third laser grooving unit comprises one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gate line spine, wherein the gate line spine is connected to the P-type silicon through the third laser slotted body.
  3. 如权利要求1所述P型PERC双面太阳能电池,其特征在于,所述第一激光开槽单元之间为平行设置;每一第一激光开槽单元中,所述第一激光开槽体为并列设置,所述第一激光开槽体处于同一水平面上或上下错开;The P-type PERC double-sided solar cell according to claim 1, wherein the first laser grooving units are arranged in parallel; and in each of the first laser grooving units, the first laser grooving body For juxtaposition, the first laser grooving bodies are on the same horizontal plane or are staggered up and down;
    所述第一激光开槽单元之间的间距为0.5-50mm;The spacing between the first laser grooving units is 0.5-50 mm;
    每一第一激光开槽单元中,所述第一激光开槽体之间的间距为0.5-50mm;In each of the first laser grooving units, the spacing between the first laser grooving bodies is 0.5-50 mm;
    所述第一激光开槽体的长度为50-5000微米,宽度为10-500微米。The first laser grooving body has a length of 50-5000 microns and a width of 10-500 microns.
  4. 如权利要求1所述P型PERC双面太阳能电池,其特征在于,所述背铝栅线的根数为30-500条,所述栅线脊骨的根数为30-500条;The P-type PERC double-sided solar cell according to claim 1, wherein the number of the back aluminum grid lines is 30-500, and the number of the gate line spines is 30-500;
    所述背铝栅线的宽度为30-500微米,所述背铝栅线的宽度小于所述第一激光开槽体的长度;The width of the back aluminum grid line is 30-500 microns, and the width of the back aluminum grid line is smaller than the length of the first laser slotted body;
    所述栅线脊骨的宽度为30-500微米,所述栅线脊骨的宽度小于所述第三激光开槽体的长度。The width of the gate line spine is 30-500 microns, and the width of the grid line spine is smaller than the length of the third laser slotted body.
  5. 如权利要求4所述P型PERC双面太阳能电池,其特征在于,所述栅线脊骨的图案为一条连续的直线或多个线段组成的虚线;The P-type PERC double-sided solar cell according to claim 4, wherein the pattern of the gate line spine is a continuous straight line or a broken line composed of a plurality of line segments;
    所述栅线脊骨由银浆制成,其宽度为30-60微米;或,所述栅线脊骨由铝浆制成,其宽度为50-500微米。The gridline spine is made of silver paste having a width of 30-60 microns; or the gridline spine is made of aluminum paste having a width of 50-500 microns.
  6. 一种如权利要求1-5任一项所述的P型PERC双面太阳能电池的制备方法,其特征在于,包括:A method for preparing a P-type PERC double-sided solar cell according to any one of claims 1 to 5, comprising:
    (1)在硅片正面和背面形成绒面,所述硅片为P型硅;(1) forming a pile on the front and back sides of the silicon wafer, the silicon wafer being P-type silicon;
    (2)对硅片进行扩散,形成N型发射极;(2) diffusing the silicon wafer to form an N-type emitter;
    (3)去除扩散过程形成的正面磷硅玻璃和周边PN结;(3) removing the frontal phosphosilicate glass and the peripheral PN junction formed by the diffusion process;
    (4)在硅片背面沉积三氧化二铝膜;(4) depositing a cupric oxide film on the back side of the silicon wafer;
    (5)在硅片背面沉积氮化硅膜;(5) depositing a silicon nitride film on the back side of the silicon wafer;
    (6)在硅片正面沉积氮化硅膜;(6) depositing a silicon nitride film on the front side of the silicon wafer;
    (7)对硅片背面激光开槽,形成第一激光开槽区,所述第一激光开槽区包括多组水平方向设置的第一激光开槽单元,每一组第一激光开槽单元包括一个或多个水平方向设置的第一激光开槽体;(7) laser grooving the back surface of the silicon wafer to form a first laser grooving zone, the first laser grooving zone comprising a plurality of sets of first laser grooving units arranged horizontally, each set of first laser grooving units a first laser slotted body including one or more horizontally disposed;
    (8)在所述硅片背面印刷背银主栅电极;(8) printing a back silver main gate electrode on the back side of the silicon wafer;
    (9)在所述硅片背面,沿着激光开槽的垂直方向印刷铝浆,得到背铝栅线,所述背铝栅线与第一激光开槽体垂直;(9) printing aluminum paste along the vertical direction of the laser grooving on the back side of the silicon wafer to obtain a back aluminum grid line, the back aluminum grid line being perpendicular to the first laser grooving body;
    (10)在所述硅片背面印刷栅线脊骨;(10) printing a gridline spine on the back side of the silicon wafer;
    (11)在所述硅片正面印刷正电极浆料;(11) printing a positive electrode paste on a front surface of the silicon wafer;
    (12)对硅片进行高温烧结,形成背银电极和正银电极;(12) sintering the silicon wafer at a high temperature to form a back silver electrode and a positive silver electrode;
    (13)对硅片进行抗LID退火。(13) Anti-LID annealing of the silicon wafer.
  7. 如权利要求6所述P型PERC双面太阳能电池的制备方法,其特征在于,步骤(3)和(4)之间,还包括:The method of claim 6, wherein the step (3) and (4) further comprises:
    对硅片背面进行抛光。Polish the back side of the wafer.
  8. 如权利要求7所述P型PERC双面太阳能电池的制备方法,其特征在于,步骤(7)还包括:The method of claim 7, wherein the step (7) further comprises:
    对硅片背面激光开槽,形成第三激光开槽区,所述第三激光开槽区包括多组第三激光开槽单元,每一组第三激光开槽单元包括一个或多个竖直方向设置的第三激光开槽体,所述第三激光开槽体与栅线脊骨垂直。Laser grooving the backside of the silicon wafer to form a third laser grooving zone, the third laser grooving zone comprising a plurality of sets of third laser grooving units, each set of third laser grooving units comprising one or more vertical a third laser slotted body disposed in a direction, the third laser slotted body being perpendicular to the gridline spine.
  9. 一种PERC太阳能电池组件,其特征在于,包括PERC太阳能电池和封装材料,其特征在于,所述PERC太阳能电池是权利要求1-5任一项所述的P型PERC双面太阳能电池。A PERC solar cell module comprising a PERC solar cell and a packaging material, wherein the PERC solar cell is the P-type PERC double-sided solar cell according to any one of claims 1-5.
  10. 一种PERC太阳能系统,包括PERC太阳能电池,其特征在于,所述PERC太阳能电池是权利要求1-5任一项所述的P型PERC双面太阳能电池。A PERC solar energy system comprising a PERC solar cell, characterized in that the PERC solar cell is the P-type PERC double-sided solar cell according to any one of claims 1-5.
PCT/CN2018/077590 2017-03-03 2018-02-28 P-type perc double-sided solar cell, assembly thereof, system thereof and preparation method therefor WO2018157823A1 (en)

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