WO2018143426A1

WO2018143426A1 - Liquid supply system

Info

Publication number: WO2018143426A1
Application number: PCT/JP2018/003648
Authority: WO
Inventors: 森　浩一; 清隆古田
Original assignee: イーグル工業株式会社
Priority date: 2017-02-03
Filing date: 2018-02-02
Publication date: 2018-08-09
Also published as: JPWO2018143426A1; KR20190098226A; CN110177943A; EP3578819A1; US20200011322A1; RU2019122418A3; RU2019122418A

Abstract

Provided is a liquid supply system in which the occurrence of cavitation can be suppressed without an increase in device size. This liquid supply system comprises: a first pump chamber P1 formed by a space surrounding an outer peripheral surface of a first bellows 141; a second pump chamber P2 formed by a space surrounding an outer peripheral surface of a second bellows 142; a first check valve 160A that is provided in a flow path passing through the first pump chamber P1 and that prevents the backflow of a fluid; and a second check valve 160B that is provided in a flow path passing through the second pump chamber P2 and that prevents the backflow of a fluid. The first check valve 160A and the second check valve 160B are both provided in a container 130 and arranged on the opposite side, with respect to a shaft member 120, from a linear actuator 110 which drives the shaft member 120.

Description

Liquid supply system

The present invention relates to a liquid supply system for supplying a liquid.

A technique using a liquid supply system having a pump chamber formed of bellows in order to circulate liquid through a circulation channel is known (see Patent Document 1). In such a liquid supply system, a check valve for stopping a back flow of liquid is provided in a pipe connected to a container provided with a pump chamber.

In such a technique, the smaller the valve opening area of the check valve, the faster the flow velocity, and cavitation tends to occur on the downstream side of the valve. When cavitation occurs, it causes abnormal noise and vibration, and discharge efficiency by the pump decreases. In order to suppress the occurrence of cavitation, it is effective to increase the opening area of the valve. However, there is a limit to increasing the valve opening area of the check valve provided in the pipe connected to the container, or a thick pipe must be used, and the entire apparatus including the pipe is enlarged. End up.

International Publication No. 2015/050091 Japanese Unexamined Patent Publication No. 2016-37912 Japanese Patent Laid-Open No. 4-128578

An object of the present invention is to provide a liquid supply system capable of suppressing the occurrence of cavitation without increasing the size of the apparatus.

The present invention employs the following means in order to solve the above problems.

That is, the liquid supply system of the present invention is
A container provided with a pump chamber therein and provided with a fluid inlet and outlet;
A shaft member that reciprocates in the vertical direction in the container;
In the container, the first bellows and the second bellows that are arranged side by side in the vertical direction and expand and contract as the shaft member reciprocates,
A first pump chamber formed by a space surrounding an outer peripheral surface of the first bellows;
A second pump chamber formed by a space surrounding the outer peripheral surface of the second bellows;
A first check valve which is provided on a flow path passing through the first pump chamber and stops a back flow of fluid;
A second check valve which is provided on a flow path passing through the second pump chamber and stops a back flow of fluid;
A liquid supply system comprising:
The first check valve and the second check valve are both provided in the container, and are arranged on the opposite side to the shaft member with respect to the actuator that drives the shaft member. .

According to the present invention, the first check valve and the second check valve are provided in the container, and are disposed on the opposite side of the shaft member from the actuator. Therefore, compared with the case where a check valve is provided on the pipe connected to the container, it is easier to install the container on the container, and it is not necessary to enlarge the entire apparatus including the pipe. Further, the first check valve and the second check valve can be easily assembled without being obstructed by the actuator. Furthermore, it is easy to ensure a large space for arranging the first check valve and the second check valve, and it is easy to increase the opening area of these valves.

The first check valve includes an annular first valve body that opens while opening the valve while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member,
The second check valve may include an annular second valve body that opens while opening the valve while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member.

As a result, the opening area of the valve can be increased, and compared with a check valve (for example, a poppet valve) that opens and closes by a fluid flowing in the vertical direction, there is no resistance due to fluid flow, and the opening and closing of the valve Since the responsiveness is excellent, it is possible to prevent the occurrence of cavitation due to insufficient fluid flow into the pump chamber.

The first check valve and the second check valve may both be arranged coaxially with the shaft member in the container.

This enables easy assembly when assembling the member and container forming the pump chamber.

The diameter of the opening / closing part of the valve in the first valve body and the diameter of the opening / closing part of the valve in the second valve body may be the same.

This makes it possible to easily equalize the opening and closing periods of the first valve body and the second valve body.

Note that the above configurations can be combined as much as possible.

As described above, according to the present invention, the occurrence of cavitation can be suppressed without increasing the size of the apparatus.

FIG. 1 is a schematic configuration diagram of a liquid supply system according to an embodiment of the present invention. FIG. 2 is a partially broken sectional view of the check valve according to the embodiment of the present invention. FIG. 3 is an enlarged schematic cross-sectional view of the vicinity of the first check valve and the second check valve according to the embodiment of the present invention. FIG. 4 is a schematic cross-sectional view showing a state in which the check valve according to the embodiment of the present invention is closed. FIG. 5 is a schematic cross-sectional view showing a state in which the check valve according to the embodiment of the present invention is opened. FIG. 6 is a schematic cross-sectional view showing a state in which the valve in the check valve according to the embodiment of the present invention is being closed.

DETAILED DESCRIPTION Hereinafter, embodiments for carrying out the present invention will be exemplarily described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to those unless otherwise specified. .

(Example)
A liquid supply system according to an embodiment of the present invention will be described with reference to FIGS. The liquid supply system according to the present embodiment can be suitably used, for example, to maintain the superconducting device in an ultra-low temperature state. That is, in a superconducting device, it is necessary to always cool a superconducting coil or the like. Therefore, the apparatus to be cooled is always cooled by always supplying an ultra-low temperature liquid (liquid nitrogen or liquid helium) to the apparatus to be cooled provided with a superconducting coil. More specifically, by providing a circulation flow path that passes through the apparatus to be cooled, and by attaching the liquid supply system according to the present embodiment in the circulation flow path, the ultra low temperature liquid is circulated to It becomes possible to always cool.

<Overall configuration of liquid supply system>
FIG. 1 is a schematic configuration diagram of an entire liquid supply system according to an embodiment of the present invention, and is a diagram showing a schematic configuration of the entire liquid supply system in cross-section. The liquid supply system 10 according to the present embodiment includes a liquid supply system main body (hereinafter referred to as the system main body 100), a vacuum container 200 in which the system main body 100 is installed, and piping (a suction pipe 310 and a delivery pipe 320). And. Both the suction pipe 310 and the delivery pipe 320 enter the inside of the vacuum container 200 from the outside of the vacuum container 200 and are connected to the system main body 100. The inside of the vacuum container 200 is sealed, and the space outside the system main body 100, the suction pipe 310, and the delivery pipe 320 is maintained in a vacuum state in the vacuum container 200. Thereby, this space has a heat insulating function. The liquid supply system 10 is usually installed on a horizontal plane. In the state where the liquid supply system 10 is installed, the upper side in FIG. 1 is the upper side in the vertical direction, and the lower side in FIG. 1 is the lower side in the vertical direction.

The system main body 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that reciprocates in the vertical direction by the linear actuator 110, and a container 130. The linear actuator 110 may be fixed at an arbitrary location, and the location to be fixed may be fixed to the container 130 or may be fixed to another location not shown. The shaft member 120 is installed so as to enter the inside of the container from the outside of the container 130 through an opening 130 a provided in the ceiling portion of the container 130. In addition, a fluid suction port 130b and a delivery port 130c are provided at the bottom of the container 130. The suction pipe 310 is connected to a position where the suction port 130b is provided, and the delivery pipe 320 is connected to a position where the delivery port 130c is provided.

A plurality of members are provided inside the container 130, and a plurality of pump chambers, a liquid flow path, and a heat insulating vacuum chamber are formed by a plurality of spaces partitioned by the plurality of members. Yes. Hereinafter, the internal configuration of the container 130 will be described in more detail.

The shaft member 120 includes a shaft main body 121 having a hollow portion therein, a cylindrical portion 122 provided so as to surround the outer peripheral surface side of the shaft main body 121, and a connecting portion 123 that connects the shaft main body 121 and the cylindrical portion 122. And have. Further, an upper end side outward flange portion 122 a is provided at the upper end of the cylindrical portion 122, and a lower end side outward flange portion 122 b is provided at the lower end of the cylindrical portion 122.

The container 130 includes a substantially cylindrical body portion 130X and a bottom plate portion 130Y. The body portion 130X is provided with a first inward flange portion 130Xa provided near the center in the height direction and a second inward flange portion 130Xb provided above.

A plurality of first flow paths 130Xc extending in the axial direction are formed in the body portion 130X at intervals in the circumferential direction. In addition, a second flow path 130Xd formed of a cylindrical space extending in the axial direction is also provided inside the body portion 130X, further radially outside the region where the first flow path 130Xc is provided. Yes. Further, at the bottom of the container 130, a channel 130d that extends outward in the radial direction and is connected to the first channel 130Xc is uniformly formed in a circumferential shape. Further, the bottom plate portion 130Y of the container 130 is uniformly formed with a circular channel 130e extending radially outward. That is, the flow channel 130d and the flow channel 130e are configured so that fluid can flow radially in all directions from 360 ° toward the radially outer side.

In addition, a first bellows 141 and a second bellows 142 that are expanded and contracted with the reciprocation of the shaft member 120 are provided inside the container 130. The first bellows 141 and the second bellows 142 are arranged side by side in the vertical direction. The upper end side of the first bellows 141 is fixed to the upper end side outward flange portion 122a of the cylindrical portion 122 of the shaft member 120, and the lower end side of the first bellows 141 is fixed to the first inward flange portion 130Xa of the container 130. ing. The upper end side of the second bellows 142 is fixed to the first inward flange portion 130Xa of the container 130, and the lower end side of the second bellows 142 is connected to the lower end side outward flange portion 122b of the cylindrical portion 122 of the shaft member 120. It is fixed. A first pump chamber P1 is formed by a space surrounding the outer peripheral surface of the first bellows 141, and a second pump chamber P2 is formed by a space surrounding the outer peripheral surface of the second bellows 142.

In addition, a third bellows 151 and a fourth bellows 152 that are expanded and contracted with the reciprocating movement of the shaft member 120 are also provided inside the container 130. The upper end side of the third bellows 151 is fixed to the ceiling portion of the container 130, and the lower end side of the third bellows 151 is fixed to the shaft member 120. Thereby, the opening part 130a provided in the container 130 is closed. The upper end side of the fourth bellows 152 is fixed to a second inward flange portion 130 Xb provided in the container 130, and the lower end side of the fourth bellows 152 is fixed to the connecting portion 123 in the shaft member 120. The second space formed by the first space K1 formed by the hollow portion inside the shaft main body 121 of the shaft member 120, the outer peripheral surface side of the third bellows 151, the inner peripheral surface side of the fourth bellows 152, and the like. The space K2 and the third space K3 formed on the inner peripheral surface side of the first bellows 141 and the second bellows 142 are connected. A space formed by the first space K1, the second space K2, and the third space K3 is sealed. In the present embodiment, the sealed space formed by these is maintained in a vacuum state and has a heat insulating function.

Furthermore, inside the container 130, there are four check valves 160 (first check valve 160A, second check valve 160B, third check valve 160C and fourth check valve according to the position of attachment). A stop valve 160D). All of these four check valves 160 are arranged coaxially with the shaft member 120 in the container 130. That is, the central axis of the shaft member 120 and the central axis of each check valve 160 are designed to coincide. The first check valve 160A and the second check valve 160B are both provided in the container 130. The first check valve 160 A and the second check valve 160 B are both disposed on the opposite side (downward side) from the shaft member 120 with respect to the linear actuator 110. The third check valve 160C and the fourth check valve 160D are disposed above the first check valve 160A and the second check valve 160B.

The first check valve 160A and the third check valve 160C are provided on the flow path passing through the first pump chamber P1. The first check valve 160A and the third check valve 160C play a role of stopping the backflow of the fluid flowing by the pumping action by the first pump chamber P1. More specifically, the first check valve 160A is provided on the upstream side with respect to the first pump chamber P1, and the third check valve 160C is provided on the downstream side. More specifically, the first check valve 160 A is provided on a flow path 130 d formed at the bottom of the container 130. The third check valve 160C is provided on a flow path formed in the vicinity of the second inward flange portion 130Xb provided in the container 130.

The second check valve 160B and the fourth check valve 160D are provided on the flow path passing through the second pump chamber P2. The second check valve 160B and the fourth check valve 160D play a role of stopping the backflow of the fluid flowing by the pumping action by the second pump chamber P2. More specifically, the second check valve 160B is provided on the upstream side with respect to the second pump chamber P2, and the fourth check valve 160D is provided on the downstream side. More specifically, the second check valve 160B is provided on the flow path 130e formed in the bottom plate portion 130Y of the container 130. The fourth check valve 160D is provided on a flow path formed in the vicinity of the first inward flange portion 130Xa of the container 130.

<Operation description of the entire liquid supply system>
The overall operation of the liquid supply system will be described. When the shaft member 120 is lowered by the linear actuator 110, the first bellows 141 contracts and the second bellows 142 extends. At this time, since the fluid pressure in the first pump chamber P1 is low, the valve of the first check valve 160A is opened and the valve of the third check valve 160C is closed. Thereby, the fluid (see arrow S10) sent from the outside of the liquid supply system 10 through the suction pipe 310 is sucked into the container 130 from the suction port 130b and passes through the first check valve 160A (see arrow S11). ). Then, the fluid that has passed through the first check valve 160A is sent to the first pump chamber P1 through the first flow path 130Xc inside the body portion 130X of the container 130. Further, since the fluid pressure in the second pump chamber P2 is increased, the second check valve 160B is closed and the fourth check valve 160D is opened. As a result, the fluid in the second pump chamber P2 passes through the fourth check valve 160D (see arrow T12) and is sent to the second flow path 130Xd inside the body portion 130X. Thereafter, the fluid passes through the outlet 130 c and is sent out of the liquid supply system 10 through the delivery pipe 320.

When the shaft member 120 is raised by the linear actuator 110, the first bellows 141 is extended and the second bellows 142 is contracted. At this time, since the fluid pressure in the first pump chamber P1 is increased, the first check valve 160A is closed and the third check valve 160C is opened. As a result, the fluid in the first pump chamber P1 passes through the third check valve 160C (see arrow T11) and is sent to the second flow path 130Xd inside the body portion 130X. Thereafter, the fluid passes through the outlet 130 c and is sent out of the liquid supply system 10 through the delivery pipe 320. Further, since the fluid pressure in the second pump chamber P2 becomes low, the second check valve 160B is opened and the fourth check valve 160D is closed. Thus, the fluid (see arrow S10) sent from the outside of the liquid supply system 10 through the suction pipe 310 is sucked into the container 130 from the suction port 130b and passes through the second check valve 160B (see arrow S12). ). Then, the fluid that has passed through the second check valve 160B is sent to the second pump chamber P2.

As described above, in the liquid supply system 10 according to the present embodiment, the fluid can be flowed from the suction pipe 310 side to the delivery pipe 320 side when the shaft member 120 is lowered or raised. Therefore, so-called pulsation can be suppressed.

<Check valve>
In particular, the check valve 160 according to this embodiment will be described in more detail with reference to FIGS. The configurations of the first check valve 160A, the second check valve 160B, the third check valve 160C, and the fourth check valve 160D, and the valve structure including these check valves are basically the same. FIG. 2 is a partially broken cross-sectional view of a check valve according to an embodiment of the present invention, and shows a cross-sectional view cut along a plane including a central axis on the left side in the drawing. FIG. 3 is an enlarged schematic cross-sectional view of the vicinity of the first check valve and the second check valve according to the embodiment of the present invention. 4 to 6 are schematic cross-sectional views showing a basic configuration of a valve structure including a check valve according to this embodiment. 4 shows a state in which the check valve is closed, FIG. 5 shows a state in which the check valve is open, and FIG. 6 shows a state in the middle of closing the valve in the check valve.

The check valve 160 according to this embodiment includes an annular valve body 161 and a sub-valve body 162 provided above the valve body 161. The valve body 161 is configured to rise while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member 120 to open the valve. And the valve body 161 is provided in the cylindrical part 161a, the lower end side of the cylindrical part 161a, and the diameter-expanded part 161b diameter-expanded as it goes below, The outward flange part 161c provided in the upper end side of the cylindrical part 161a It has. The sub-valve body 162 is composed of a disk-shaped member having a through hole in the center, and the outer diameter thereof is larger than the inner diameter of the cylindrical portion 161a of the valve body 161, and the inner diameter is larger than the inner diameter of the cylindrical portion 161a. Designed to be smaller.

FIG. 3 shows an enlarged schematic cross-sectional view of a part of the valve structure including the first check valve 160A and the second check valve 160B. As illustrated, the first check valve 160A includes an annular valve body (first valve body 161A) and a first sub-valve body 162A provided above the first valve body 161A. The first valve body 161A includes a cylindrical portion 161Aa, an enlarged diameter portion 161Ab, and an outward flange portion 161Ac. Similarly, the second check valve 160B includes an annular valve body (second valve body 161B) and a second sub-valve body 162B provided above the second valve body 161B. The second valve body 161B includes a cylindrical portion 161Ba, an enlarged diameter portion 161Bb, and an outward flange portion 161Bc.

In the present embodiment, the first check valve 160A and the second check valve 160B have the same dimensions. Therefore, the diameter of the valve opening / closing portion in the first valve body 161A is the same as the diameter of the valve opening / closing portion in the second valve body 161B. In addition, the diameter of the opening / closing part of the valve corresponds to the diameter D of the tip of the enlarged diameter part 161b in the valve body 161 shown in FIG.

Although not specifically illustrated, the basic configurations of the third check valve 160C and the fourth check valve 160D are the same, and the basic configuration of the valve structure including these check valves is also the same. However, the diameter of the valve opening / closing portion in the valve body of the third check valve 160C and the diameter of the valve opening / closing portion in the valve body of the fourth check valve 160D are the same, but the first valve body 161A and the second valve body The valve body 161B is designed to be larger than the diameter of the valve opening / closing part.

Next, the opening and closing operation of the check valve 160 according to this embodiment will be described. As described above, the basic structure of the valve structure including the check valve is the same in any check valve. Therefore, the opening / closing operation of the check valve will be described with reference to FIGS. 4 to 6 showing the basic configuration.

The check valve 160 is attached to the attached portion 170. In addition, the to-be-attached part 170 is not necessarily comprised by 1 member. In the case of the first check valve 160 A, the attached portion 170 corresponds to the bottom portion of the container 130. In the case of the second check valve 160 B, the attached portion 170 corresponds to the bottom plate portion 130 Y in the container 130. In the case of the third check valve 160C, the attached portion 170 corresponds to a portion in the vicinity of the second inward flange portion 130Xb provided on the body portion 130X of the container 130. In the case of the fourth check valve 160D, the attached portion 170 corresponds to a portion in the vicinity where the first inward flange portion 130Xa provided on the body portion 130X of the container 130 is provided.

The attached portion 170 is provided with a flow path 171 extending radially outward and horizontally from the central axis side of the shaft member 120 and the check valve 160. The flow path 171 is uniformly formed in a circumferential shape. That is, the flow path 171 is configured such that fluid can flow radially in all directions from 360 ° toward the radially outer side.

Further, a guide surface 172 for guiding the moving direction of the valve body 161 is provided on the attached portion 170. The guide surface 172 is a cylindrical surface. A minute annular gap G is formed between the inner peripheral surface of the valve body 161 and the guide surface 172. That is, the valve body 161 is loosely fitted to the guide surface 172. Thereby, the valve body 161 can reciprocate in a substantially vertical direction without receiving sliding resistance.

In addition, the mounted portion 170 is provided with an annular groove 173 on the upper surface of the guide surface 172 in which the sub-valve body 162 is mounted. The sub-valve body 162 is attached to the annular groove 173 so that the inner peripheral surface thereof is slidable with respect to the groove bottom surface 173 a of the annular groove 173. Further, the auxiliary valve body 162 can reciprocate in the vertical direction within the range of the groove width of the annular groove 173. In the state where the valve body 161 is seated, the lower groove side surface 173b and the upper end surface 161c1 of the valve body 161 are designed to have the same height among the groove side surfaces of the annular groove 173. Accordingly, when the valve is closed by the check valve 160, the sub-valve body 162 is in contact with both the groove side surface 173b of the annular groove 173 and the upper end surface 161c1 of the valve body 161, and the annular gap G is closed. .

Furthermore, a valve seat 174 is provided on the mounted portion 170. The valve seat 174 is constituted by a horizontal plane. When the valve body 161 moves downward due to its own weight or fluid pressure, the tip of the enlarged diameter portion 161b of the valve body 161 is brought into close contact with the valve seat 174 and the valve is closed.

The operation of the valve structure configured as described above will be described. The fluid pressure on the upstream side is higher than that on the downstream side of the flow path via the check valve 160, and when these differential pressures exceed the weight of the check valve 160, the valve body 161 rises. At this time, the sub-valve element 162 is also pressed by the valve element 161 and rises by receiving the fluid pressure from the annular gap G. As a result, the valve is opened. At this time, fluid flows radially outward from the central axis side of the shaft member 120 and horizontally in the flow path 171 provided in the attached portion 170 (see the arrow in FIG. 5). Accordingly, the valve body 161 rises while opening the valve while receiving the pressure of the fluid flowing radially outward and horizontally from the central axis side of the shaft member 120.

When the differential pressure becomes lower than the weight of the check valve 160, the valve body 161 and the sub-valve body 162 are lowered by receiving their own weight or fluid pressure from above. Here, the valve body 161 does not receive sliding resistance (or has low sliding resistance), whereas the sub-valve body 162 receives sliding resistance from the groove bottom surface 173 a of the annular groove 173. Therefore, after the valve body 161 is first seated on the valve seat 174, the sub-valve body 162 comes into contact with both the groove side surface 173b of the annular groove 173 and the upper end surface 161c1 of the valve body 161. FIG. 6 shows a state in which the valve in the check valve 160 is in the middle of closing, and shows a state in which the valve body 161 is seated on the valve seat 174 and the sub-valve body 162 is in the middle of lowering.

According to the valve structure configured as described above, the responsiveness of opening and closing of the valve by the valve body 161 can be enhanced. This is because it is known as disclosed in Patent Document 1 described above, and the details thereof will be described. However, the momentum of the fluid acting on the valve body 161 can be reduced. Moreover, since the structure which closes a valve in 2 steps | paragraphs of the valve body 161 and the subvalve body 162 is employ | adopted, the water hammer by the backflow at the time of closing a valve can be suppressed. This is because the valve is completely closed by the sub-valve 162 after the reverse flow rate is reduced by the valve 161.

<Excellent points of the liquid supply system according to this embodiment>
According to the liquid supply system 10 according to the present embodiment, the first check valve 160A and the second check valve 160B are disposed coaxially with the shaft member 120 in the container 130. Further, each of the first check valve 160A and the second check valve 160B is a circle that rises while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member 120 to open the valve. Annular valve bodies (first valve body 161A and second valve body 161B) are configured to open and close the valves. Therefore, compared with the case where a check valve is provided in the pipe connected to the container, the opening area of the valve can be increased without increasing the size of the entire apparatus including the pipes (the suction pipe 310 and the delivery pipe 320). . Thereby, generation | occurrence | production of a cavitation can be suppressed, without enlarging an apparatus (the whole apparatus including piping).

Also, the first valve body 161A and the second valve body 161B are configured to open and open the valve while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member 120. Therefore, compared with a check valve (for example, a poppet valve) that opens and closes the valve by fluid flowing in the vertical direction, the valve opening and closing response is excellent.

Further, both the first check valve 160A and the second check valve 160B are arranged on the opposite side (lower side) to the shaft member 120 with respect to the linear actuator 110. Accordingly, the first check valve 160A and the second check valve 160B can be easily assembled without being obstructed by the linear actuator 110. In addition, it is easy to secure a wide space for arranging the first check valve 160A and the second check valve 160B, and it is easy to increase the opening area of these valves.

Further, in the present embodiment, the diameter of the valve opening / closing portion in the first valve body 161A and the diameter of the valve opening / closing portion in the second valve body 161B are the same. Thereby, the opening / closing periods of the valves of the first valve body 161A and the second valve body 161B can be easily equalized. Thereby, the discharge capability by the 1st pump chamber P1 and the discharge capability by the 2nd pump chamber P2 can be made equivalent easily. Therefore, pulsation can be more effectively suppressed.

(Other)
In the present embodiment, a configuration is adopted in which the outside of the system main body 100, the suction pipe 310, and the delivery pipe 320 is evacuated to provide a heat insulating function. Further, in this embodiment, a configuration is adopted in which the sealed space formed by the first space K1, the second space K2, and the third space K3 is evacuated to have a heat insulating function. However, it is also possible to maintain the temperature of the fluid flowing through the circulation flow path at a low temperature by flowing an ultra-low temperature liquid in these spaces.

DESCRIPTION OF SYMBOLS 10 Liquid supply system 100 System main body 110 Linear actuator 120 Shaft member 121 Shaft main body part 122 Cylindrical part 122a Upper end side outward flange part 122b Lower end side outward flange part 123 Connection part 130 Container

130a Opening part 130b Inlet 130c Outlet

130d Flow Road 130e Flow path 130X Body part 130Xa First inward flange part 130Xb Second inward flange part 130Xc First flow path 130Xd Second flow path 130Y Bottom plate part 141 First bellows 142 Second bellows 151 Third bellows 152 Fourth bellows 160 check valve 160A first check valve 160B second check valve 160C third check valve 160D fourth check valve 161 valve body 161A first valve body 161B second valve body 161a, 161Aa, 161Ba cylindrical portion 161b, 61Ab, 161Bb Enlarged portion 161c, 161Ac, 161Bc Outward flange portion 161c1

Upper end surface

162, 162A, 162B Subvalve body 170 Mounted portion 171 Channel 172 Guide surface 173 Annular groove 173a Groove bottom surface 173b Groove side surface 174 Valve seat 174 Container 310 Suction pipe 320 Delivery pipe G Annular gap P1 First pump chamber P2 Second pump chamber

Claims

A container provided with a pump chamber therein and provided with a fluid inlet and outlet;
A shaft member that reciprocates in the vertical direction in the container;
In the container, the first bellows and the second bellows that are arranged side by side in the vertical direction and expand and contract as the shaft member reciprocates,
A first pump chamber formed by a space surrounding an outer peripheral surface of the first bellows;
A second pump chamber formed by a space surrounding the outer peripheral surface of the second bellows;
A first check valve which is provided on a flow path passing through the first pump chamber and stops a back flow of fluid;
A second check valve which is provided on a flow path passing through the second pump chamber and stops a back flow of fluid;
A liquid supply system comprising:
The first check valve and the second check valve are both provided in the container, and are arranged on the opposite side to the shaft member with respect to the actuator that drives the shaft member. Liquid supply system.
The first check valve includes an annular first valve body that opens while opening the valve while receiving the pressure of fluid flowing radially outward and horizontally from the central axis side of the shaft member,
The second check valve includes an annular second valve body that rises while receiving the pressure of a fluid flowing radially outward and horizontally from the central axis side of the shaft member to open the valve. The liquid supply system according to claim 1.
3. The liquid supply system according to claim 1, wherein the first check valve and the second check valve are both arranged coaxially with the shaft member in the container.
4. The liquid supply system according to claim 1, wherein the diameter of the valve opening / closing portion of the first valve body is the same as the diameter of the valve opening / closing portion of the second valve body.
The liquid supply system according to any one of claims 1 to 4, wherein the fluid is a cryogenic fluid, a vacuum state is formed between the container and the pump chamber, and the actuator is disposed in the atmosphere.