WO2018139142A1 - Humidity sensor and humidity sensor device - Google Patents
Humidity sensor and humidity sensor device Download PDFInfo
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- WO2018139142A1 WO2018139142A1 PCT/JP2017/046407 JP2017046407W WO2018139142A1 WO 2018139142 A1 WO2018139142 A1 WO 2018139142A1 JP 2017046407 W JP2017046407 W JP 2017046407W WO 2018139142 A1 WO2018139142 A1 WO 2018139142A1
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- thermistor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
- G01N25/62—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers
- G01N25/64—Investigating or analyzing materials by the use of thermal means by investigating moisture content by psychrometric means, e.g. wet-and-dry bulb thermometers using electric temperature-responsive elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
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- the present invention relates to a humidity sensor and a humidity sensor device capable of detecting humidity with high accuracy.
- an absolute humidity sensor employs a structure in which two containers each having a thermistor disposed therein are installed.
- a humidity sensor one is called a standard chamber, and dry air is sealed inside the container.
- the other is called a detection chamber.
- the thermistor S1 in the detection chamber and the thermistor S2 in the standard chamber are connected in series, and two low resistances R1 and R2 are further configured as a bridge circuit, so that the thermistor in the detection chamber.
- the thermistor S1 in the detection chamber and the thermistor S2 in the standard chamber generate heat.
- the heat generation amount of these thermistors slightly varies depending on the thermal conductivity of the air around the thermistor, the heat generation amounts of the two thermistors S1 and S2 are shifted due to the difference in humidity between the detection chamber and the standard chamber. Accordingly, the output voltage in the circuit shown in FIG. 4 changes. Since the output voltage at this time is determined only by the absolute humidity regardless of the outside air temperature, the absolute humidity can be detected by measuring the output voltage.
- the absolute humidity is calculated from the output voltage by utilizing the characteristic that the output voltage in the bridge circuit is determined only by the absolute humidity and does not depend on the ambient temperature.
- a characteristic curve changes depending on the voltage applied to the thermistor
- the voltage applied to the thermistor is determined in advance, and the characteristics corresponding to the voltage are determined. It was necessary to use a curve. For this reason, if the voltage applied to the thermistor deviates from the design value due to a circuit change or the like, it is necessary to recheck the voltage applied to the thermistor and reselect the characteristic curve accordingly.
- the characteristic curve changes depending on the thermistor characteristics such as the resistance value at 25 ° C. and the B constant. Therefore, if a thermistor with a different characteristic is used when a humidity sensor is newly produced, the characteristic curve is also changed to a new one. There was a need to do.
- the present invention has been made in view of the above-described problems, and is capable of detecting humidity with high accuracy even when an applied voltage changes, when an arbitrary voltage is applied, or when a thermistor having different characteristics is used.
- An object is to provide a sensor.
- the humidity sensor according to the first aspect of the present invention includes a detection chamber portion, a first standard chamber portion, a separate gas chamber portion, and a second standard chamber portion that are arranged close to each other, and the detection chamber portion stores outside air inside.
- a first standard container comprising a detection container having a through-hole that can be introduced into a space, and a detection thermistor installed inside the detection container, wherein the first standard chamber is filled with dry air And a first standard thermistor installed inside the first standard container, wherein the second standard chamber includes a second standard container filled with dry air, and the second standard container.
- a second standard thermistor installed therein, and the separate gas chamber is provided in a separate gas container in which a gas having a thermal conductivity different from that of the dry air is enclosed, and in the separate gas container And a separate thermistor for gas.
- This humidity sensor includes a detection chamber, a first standard chamber, a separate gas chamber, and a second standard chamber that are arranged close to each other, and the separate gas chamber has a different thermal conductivity from that of dry air. Because it is equipped with a separate gas container enclosing the gas and a separate gas thermistor installed inside the separate gas container, it is used for detection based on the output characteristics of the second standard thermistor and the separate gas thermistor. Humidity detection with high accuracy even when the applied voltage changes or when any voltage is applied, or when thermistors with different characteristics are used, by offsetting the change in output characteristics between the thermistor and the first standard thermistor Is possible.
- a humidity sensor according to a second invention is characterized in that, in the first invention, the gas sealed in the separate gas container is nitrogen. That is, in this humidity sensor, since the gas enclosed in the separate gas container is nitrogen, stable measurement can be performed at low cost by nitrogen, which is an inexpensive and stable gas.
- a humidity sensor device includes a humidity sensor according to the first or second aspect, a first series circuit in which a first constant resistance and a second constant resistance are connected in series, the detection thermistor, A first bridge circuit configured in parallel with a second series circuit in which a first standard thermistor is connected in series; a third series circuit in which a third constant resistance and a fourth constant resistance are connected in series; A second bridge circuit connected in series with the fourth series circuit in which the separate thermistor for gas and the second standard thermistor are connected in series, and connected in series to the first bridge circuit, and the first connected in series.
- a computing unit that computes the humidity of the outside air based on a second output voltage value between a connection point between the thermistor and the second standard thermistor and a connection point between the third constant resistance and the fourth constant resistance; It is characterized by having.
- first output voltage value between the connection point of the detection thermistor and the first standard thermistor, and the connection point of the first constant resistance and the second constant resistance, and the separate gas thermistor And a calculation unit for calculating the humidity of the outside air based on the second output voltage value between the connection point of the second standard thermistor and the connection point of the third constant resistance and the fourth constant resistance.
- first output voltage value / second output voltage value is a value determined only by absolute humidity regardless of applied voltage or ambient temperature, humidity measurement can be performed without checking the applied voltage in advance. It becomes possible. Even when the value of the voltage applied to the thermistor during use changes gradually, the absolute humidity can be measured accurately.
- the “first output voltage value / second output voltage value” is a value that does not depend on the resistance value or B constant of the thermistor at 25 ° C., even if a thermistor having a different characteristic is newly designed, the characteristic curve High-precision humidity measurement is possible without changing the shape.
- the present invention has the following effects. That is, according to the humidity sensor and the humidity sensor device of the present invention, since the detection chamber portion, the first standard chamber portion, the separate gas chamber portion, and the second standard chamber portion that are arranged close to each other are provided. Based on the output characteristics of the standard thermistor and the separate gas thermistor, the change in the output characteristics of the detection thermistor and the first standard thermistor cancels the applied voltage, or an arbitrary voltage is applied. In this case, the humidity can be detected with high accuracy even when thermistors having different characteristics are used.
- FIG. 1 is a circuit diagram showing a humidity sensor device in an embodiment of a humidity sensor and a humidity sensor device according to the present invention.
- FIG. In this embodiment it is a simple sectional view showing a humidity sensor.
- it is a graph which shows the relationship between absolute humidity and -Va / Vb by changing temperature.
- It is a circuit diagram which shows the prior art example of the humidity sensor which concerns on this invention, and a humidity sensor apparatus.
- FIGS. 1 to 3 an embodiment of a humidity sensor and a humidity sensor device according to the present invention will be described with reference to FIGS. 1 to 3.
- the scale is appropriately changed in order to make each member recognizable or easily recognizable.
- the humidity sensor 1 of the present embodiment includes a detection chamber 2, a first standard chamber 3, a separate gas chamber 4, and a second standard chamber 5 that are arranged close to each other.
- the detection chamber 2 includes a detection container 6 having a through-hole 6 a through which outside air can be introduced into the internal space, and a detection thermistor 7 installed inside the detection container 6.
- the first standard chamber 3 includes a first standard container 8 filled with dry air and a first standard thermistor 9 installed inside the first standard container 8.
- the separate gas chamber section 4 includes a separate gas container 10 in which a gas having a thermal conductivity different from that of the dry air is sealed, and a separate gas thermistor 11 installed inside the separate gas container 10. .
- nitrogen is employ
- the second standard chamber 5 includes a second standard container 12 filled with dry air, and a second standard thermistor 13 installed in the second standard container 12.
- each of the thermistors for example, a chip type or flake type thermistor can be adopted.
- each said container has preferable insulating containers, such as ceramics.
- the detection chamber 2, the first standard chamber 3, the separate gas chamber 4, and the second standard chamber 5 are mounted side by side on the same circuit board, for example.
- the humidity sensor device 100 of the present embodiment includes the humidity sensor 1, a first series circuit in which a first constant resistor 14 and a second constant resistor 15 are connected in series, and for detection.
- a first bridge circuit B1 configured by connecting a thermistor 7 and a second standard circuit in which a first standard thermistor 9 is connected in series, a third constant resistor 16 and a fourth constant resistor 17 are connected in series.
- a second bridge circuit B2 in which the third series circuit thus formed and the fourth series circuit in which the separate gas thermistor 11 and the second standard thermistor 13 are connected in series are connected in parallel and connected in series to the first bridge circuit B1.
- connection point P1 between the detection thermistor 7 and the first standard thermistor 9 and the first constant resistor 14 Contact with the second constant resistance 15
- a calculation unit C that calculates the humidity of the outside air based on the second output voltage value Vb.
- the arithmetic unit C employs an IC, a computer, or the like that can calculate at least “first output voltage value Va / second output voltage value Vb”, and sets “first output voltage value Va / second output voltage value Vb”. The corresponding absolute humidity can be output.
- the thermistor temperatures of the detection thermistor 7 and the first standard thermistor 9 are T 1 and T 2.
- the heat dissipation amounts Q 1 and Q 2 are as shown in the following equation (2).
- ⁇ wet and ⁇ dry are the thermal conductivities of the detection room gas and the first standard room gas, respectively.
- the difference between the heat dissipation amount Q 1 and the heat dissipation amount Q 2 is determined by the contribution of the difference “ ⁇ wet ⁇ dry ” between the thermal conductivity ⁇ wet and the thermal conductivity ⁇ dry , the temperature T 1 of the detection thermistor 7 and the first When divided into the contribution of the difference “T 1 ⁇ T 2 ” from the temperature T 2 of the standard thermistor 9, the following equation (3) is obtained. ⁇ Formula (3)>
- Va / Vb is determined only by the thermal conductivities of the detection air (outside air) that is humid air, dry air, and another gas (nitrogen in this embodiment), and the thermistor temperature T 2 , currents i 12 , R 25, and The behavior does not depend on the B constant.
- Va / Vb is calculated using the thermal conductivities of detected air, dry air, and another gas, it is as shown in FIG.
- Curves 1-7 show thermistor temperature T and thermistor characteristics when the ambient temperature T ⁇ is constant.
- Curves 8-10 show thermistor temperature T and thermistor characteristics constant. The case where the atmospheric temperature T ⁇ is changed is shown.
- Va / Vb depends only on the humidity in the low humidity region, and does not depend on the thermistor temperature T and the thermistor characteristics. In addition, the influence of the ambient temperature T ⁇ is slight.
- the humidity sensor 1 of the present embodiment includes the detection chamber 2, the first standard chamber 3, the separate gas chamber 4, and the second standard chamber 5 that are arranged close to each other, and the separate gas chamber 4.
- the gas sealed in the separate gas container 10 is nitrogen, nitrogen, which is an inexpensive and stable gas, enables stable measurement at low cost.
- the first point between the connection point P1 between the detection thermistor 7 and the first standard thermistor 9 and the connection point P2 between the first constant resistor 14 and the second constant resistor 15 is used.
- the absolute humidity can be measured accurately. Furthermore, since the “first output voltage value / second output voltage value” (Va / Vb) is a value that does not depend on the resistance value or the B constant of the thermistor at 25 ° C., a thermistor having a different characteristic is newly designed. However, the shape of the characteristic curve does not change, and high-precision humidity measurement is possible.
- SYMBOLS 1 ... Humidity sensor, 2 ... Detection chamber part, 3 ... 1st standard chamber part, 4 ... Separate gas chamber part, 5 ... 2nd standard chamber part, 6 ... Detection container, 6a ... Through-hole, 7 ... Detection thermistor , 8 ... Container for first standard, 9 ... Thermistor for first standard, 10 ... Container for separate gas, 11 ... Thermistor for separate gas, 12 ... Container for second standard, 13 ... Thermistor for second standard, 100 ... Humidity Sensor device, B1 ... first bridge circuit, B2 ... second bridge circuit, C ... calculation unit, P1 ...
- connection point of the detection thermistor and first standard thermistor P2 ... first constant resistance and second constant resistance Connection point
- P3 connection point between the thermistor for another gas and the second standard thermistor
- P4 connection point between the third constant resistance and the fourth constant resistance
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Abstract
Provided is a humidity sensor that makes highly accurate humidity detection possible even if the applied voltage changes, an arbitrary voltage is applied, or thermistors having different characteristics are used. A humidity sensor according to the present invention is provided with a detection chamber part 2, a first standard chamber part 3, a separate gas chamber part 4, and a second standard chamber part 5 that are disposed so as to be close to each other. The detection chamber part is provided with a detection container having a through hole through which outside air can be introduced into the internal space of the detection container and a detection thermistor 7 installed inside the detection container. The first standard chamber part is provided with a first standard container having dry air sealed therein and a first standard thermistor 9 installed inside the first standard container. The second standard chamber part is provided with a second standard container having dry air sealed therein and a second standard thermistor 13 installed inside the second standard container. The separate gas chamber part is provided with a separate gas container having a gas sealed therein that has a different thermal conductivity from that of said dry air and a separate gas thermistor 11 installed inside the separate gas container.
Description
本発明は、高精度に湿度検出が可能な湿度センサ及び湿度センサ装置に関する。
The present invention relates to a humidity sensor and a humidity sensor device capable of detecting humidity with high accuracy.
従来、絶対湿度センサは、例えば特許文献１に記載されているように、サーミスタを内部に配置した容器を２つ設置した構造を採用している。このような湿度センサでは、一方は標準室と呼ばれ、容器内部には乾燥空気が封入されている。また、もう一方は検知室と呼ばれ、容器に孔を空けることで、測定対象となる空気が容器内部に流入可能とされている。
Conventionally, as described in, for example, Patent Document 1, an absolute humidity sensor employs a structure in which two containers each having a thermistor disposed therein are installed. In such a humidity sensor, one is called a standard chamber, and dry air is sealed inside the container. The other is called a detection chamber. By making a hole in the container, air to be measured can flow into the container.
従来の湿度センサでは、図４に示すように、検知室内のサーミスタＳ１と標準室内のサーミスタＳ２とを直列接続すると共に、さらに２つの低抵抗Ｒ１，Ｒ２とブリッジ回路を構成し、検知室内のサーミスタＳ１と標準室内のサーミスタＳ２とに電圧を印加することで、検知室内のサーミスタＳ１と標準室内のサーミスタＳ２とを発熱させている。このとき、これらサーミスタの発熱量は、サーミスタ周囲の空気の熱伝導度により僅かに異なるため、検知室と標準室との湿度の違いによって２つのサーミスタＳ１，Ｓ２の発熱量にずれが生じ、湿度に応じて図４に示す回路における出力電圧が変化する。このときの出力電圧は、外気温によらず、絶対湿度のみで決まることから、出力電圧を測定すれば絶対湿度を検出することができる。
In the conventional humidity sensor, as shown in FIG. 4, the thermistor S1 in the detection chamber and the thermistor S2 in the standard chamber are connected in series, and two low resistances R1 and R2 are further configured as a bridge circuit, so that the thermistor in the detection chamber. By applying a voltage to S1 and the thermistor S2 in the standard chamber, the thermistor S1 in the detection chamber and the thermistor S2 in the standard chamber generate heat. At this time, since the heat generation amount of these thermistors slightly varies depending on the thermal conductivity of the air around the thermistor, the heat generation amounts of the two thermistors S1 and S2 are shifted due to the difference in humidity between the detection chamber and the standard chamber. Accordingly, the output voltage in the circuit shown in FIG. 4 changes. Since the output voltage at this time is determined only by the absolute humidity regardless of the outside air temperature, the absolute humidity can be detected by measuring the output voltage.
上記従来の技術には、以下の課題が残されている。
従来の湿度センサでは、ブリッジ回路における出力電圧が絶対湿度のみで決まり、雰囲気温度には依存しないという特性を利用することで、出力電圧から絶対湿度を計算している。しかしながら、出力電圧と絶対湿度との関係（以下、特性曲線という）は、サーミスタにかかる電圧によって変化するため、従来の湿度センサでは、サーミスタにかかる電圧を予め決めておき、その電圧に応じた特性曲線を使用する必要があった。そのため、回路の変更等によってサーミスタにかかる電圧が設計時の値からずれてしまうと、サーミスタにかかる電圧を再度確認し、それに応じた特性曲線を選び直す必要があった。また、サーミスタの特性である２５℃における抵抗値やＢ定数といった値によっても特性曲線が変化するため、新たに湿度センサを作製する際に特性の異なるサーミスタを用いると、特性曲線も新しいものに変更する必要があった。 The following problems remain in the conventional technology.
In the conventional humidity sensor, the absolute humidity is calculated from the output voltage by utilizing the characteristic that the output voltage in the bridge circuit is determined only by the absolute humidity and does not depend on the ambient temperature. However, since the relationship between the output voltage and absolute humidity (hereinafter referred to as a characteristic curve) changes depending on the voltage applied to the thermistor, in the conventional humidity sensor, the voltage applied to the thermistor is determined in advance, and the characteristics corresponding to the voltage are determined. It was necessary to use a curve. For this reason, if the voltage applied to the thermistor deviates from the design value due to a circuit change or the like, it is necessary to recheck the voltage applied to the thermistor and reselect the characteristic curve accordingly. Also, the characteristic curve changes depending on the thermistor characteristics such as the resistance value at 25 ° C. and the B constant. Therefore, if a thermistor with a different characteristic is used when a humidity sensor is newly produced, the characteristic curve is also changed to a new one. There was a need to do.
従来の湿度センサでは、ブリッジ回路における出力電圧が絶対湿度のみで決まり、雰囲気温度には依存しないという特性を利用することで、出力電圧から絶対湿度を計算している。しかしながら、出力電圧と絶対湿度との関係（以下、特性曲線という）は、サーミスタにかかる電圧によって変化するため、従来の湿度センサでは、サーミスタにかかる電圧を予め決めておき、その電圧に応じた特性曲線を使用する必要があった。そのため、回路の変更等によってサーミスタにかかる電圧が設計時の値からずれてしまうと、サーミスタにかかる電圧を再度確認し、それに応じた特性曲線を選び直す必要があった。また、サーミスタの特性である２５℃における抵抗値やＢ定数といった値によっても特性曲線が変化するため、新たに湿度センサを作製する際に特性の異なるサーミスタを用いると、特性曲線も新しいものに変更する必要があった。 The following problems remain in the conventional technology.
In the conventional humidity sensor, the absolute humidity is calculated from the output voltage by utilizing the characteristic that the output voltage in the bridge circuit is determined only by the absolute humidity and does not depend on the ambient temperature. However, since the relationship between the output voltage and absolute humidity (hereinafter referred to as a characteristic curve) changes depending on the voltage applied to the thermistor, in the conventional humidity sensor, the voltage applied to the thermistor is determined in advance, and the characteristics corresponding to the voltage are determined. It was necessary to use a curve. For this reason, if the voltage applied to the thermistor deviates from the design value due to a circuit change or the like, it is necessary to recheck the voltage applied to the thermistor and reselect the characteristic curve accordingly. Also, the characteristic curve changes depending on the thermistor characteristics such as the resistance value at 25 ° C. and the B constant. Therefore, if a thermistor with a different characteristic is used when a humidity sensor is newly produced, the characteristic curve is also changed to a new one. There was a need to do.
本発明は、前述の課題に鑑みてなされたもので、印加する電圧が変化する場合や任意の電圧を印加する場合、また特性の異なるサーミスタを使用した場合でも高精度に湿度検出が可能な湿度センサを提供することを目的とする。
The present invention has been made in view of the above-described problems, and is capable of detecting humidity with high accuracy even when an applied voltage changes, when an arbitrary voltage is applied, or when a thermistor having different characteristics is used. An object is to provide a sensor.
本発明は、前記課題を解決するために以下の構成を採用した。すなわち、第１の発明に係る湿度センサは、互いに近接配置された検知室部と第１標準室部と別気体室部と第２標準室部とを備え、前記検知室部が、外気を内部空間に導入可能な貫通孔を有した検知用容器と、前記検知用容器の内部に設置された検知用サーミスタとを備え、前記第１標準室部が、乾燥空気を封入した第１標準用容器と、前記第１標準用容器の内部に設置された第１標準用サーミスタとを備え、前記第２標準室部が、乾燥空気を封入した第２標準用容器と、前記第２標準用容器の内部に設置された第２標準用サーミスタとを備え、前記別気体室部が、前記乾燥空気と異なる熱伝導度を有する気体を封入した別気体用容器と、前記別気体用容器の内部に設置された別気体用サーミスタとを備えていることを特徴とする。
The present invention employs the following configuration in order to solve the above problems. That is, the humidity sensor according to the first aspect of the present invention includes a detection chamber portion, a first standard chamber portion, a separate gas chamber portion, and a second standard chamber portion that are arranged close to each other, and the detection chamber portion stores outside air inside. A first standard container comprising a detection container having a through-hole that can be introduced into a space, and a detection thermistor installed inside the detection container, wherein the first standard chamber is filled with dry air And a first standard thermistor installed inside the first standard container, wherein the second standard chamber includes a second standard container filled with dry air, and the second standard container. A second standard thermistor installed therein, and the separate gas chamber is provided in a separate gas container in which a gas having a thermal conductivity different from that of the dry air is enclosed, and in the separate gas container And a separate thermistor for gas.
この湿度センサでは、互いに近接配置された検知室部と第１標準室部と別気体室部と第２標準室部とを備え、別気体室部が、乾燥空気と異なる熱伝導度を有する気体を封入した別気体用容器と、別気体用容器の内部に設置された別気体用サーミスタとを備えているので、第２標準用サーミスタと別気体用サーミスタとの出力特性に基づいて、検知用サーミスタと第１標準用サーミスタとの出力特性の変化を相殺することで、印加する電圧が変化する場合や任意の電圧を印加する場合、また特性の異なるサーミスタを使用した場合でも高精度に湿度検出が可能になる。
This humidity sensor includes a detection chamber, a first standard chamber, a separate gas chamber, and a second standard chamber that are arranged close to each other, and the separate gas chamber has a different thermal conductivity from that of dry air. Because it is equipped with a separate gas container enclosing the gas and a separate gas thermistor installed inside the separate gas container, it is used for detection based on the output characteristics of the second standard thermistor and the separate gas thermistor. Humidity detection with high accuracy even when the applied voltage changes or when any voltage is applied, or when thermistors with different characteristics are used, by offsetting the change in output characteristics between the thermistor and the first standard thermistor Is possible.
第２の発明に係る湿度センサは、第１の発明において、前記別気体用容器に封入された前記気体が、窒素であることを特徴とする。
すなわち、この湿度センサでは、別気体用容器に封入された前記気体が、窒素であるので、安価で安定した気体である窒素により低コストで安定した測定が可能になる。 A humidity sensor according to a second invention is characterized in that, in the first invention, the gas sealed in the separate gas container is nitrogen.
That is, in this humidity sensor, since the gas enclosed in the separate gas container is nitrogen, stable measurement can be performed at low cost by nitrogen, which is an inexpensive and stable gas.
すなわち、この湿度センサでは、別気体用容器に封入された前記気体が、窒素であるので、安価で安定した気体である窒素により低コストで安定した測定が可能になる。 A humidity sensor according to a second invention is characterized in that, in the first invention, the gas sealed in the separate gas container is nitrogen.
That is, in this humidity sensor, since the gas enclosed in the separate gas container is nitrogen, stable measurement can be performed at low cost by nitrogen, which is an inexpensive and stable gas.
第３の発明に係る湿度センサ装置は、第１又は第２の発明の湿度センサと、第１定抵抗と第２定抵抗とが直列接続された第１直列回路と、前記検知用サーミスタと前記第１標準用サーミスタとが直列接続された第２直列回路とが並列接続されて構成された第１ブリッジ回路と、第３定抵抗と第４定抵抗とが直列接続された第３直列回路と、前記別気体用サーミスタと前記第２標準用サーミスタとが直列接続された第４直列回路とが並列接続され前記第１ブリッジ回路に直列接続された第２ブリッジ回路と、直列接続された前記第１ブリッジ回路と前記第２ブリッジ回路とに定電圧を印加した状態で、前記検知用サーミスタと前記第１標準用サーミスタとの接続点と第１定抵抗と第２定抵抗との接続点との間の第１出力電圧値と、前記別気体用サーミスタと前記第２標準用サーミスタとの接続点と前記第３定抵抗と前記第４定抵抗との接続点との間の第２出力電圧値とに基づいて前記外気の湿度を演算する演算部とを備えていることを特徴とする。
すなわち、この湿度センサ装置では、検知用サーミスタと第１標準用サーミスタとの接続点と第１定抵抗と第２定抵抗との接続点との間の第１出力電圧値と、別気体用サーミスタと第２標準用サーミスタとの接続点と第３定抵抗と第４定抵抗との接続点との間の第２出力電圧値とに基づいて外気の湿度を演算する演算部を備えているので、例えば「第１出力電圧値／第２出力電圧値」が、印加する電圧や雰囲気温度によらず、絶対湿度のみで決まる値であることから、印加する電圧を予め調べなくても湿度測定が可能になる。また、使用中にサーミスタに印加される電圧の値が徐々に変化するような場合でも、絶対湿度を正確に測定可能である。さらに、「第１出力電圧値／第２出力電圧値」が、サーミスタの２５℃における抵抗値やＢ定数によらない値であるので、特性の異なるサーミスタで新たに設計しても、特性曲線の形状が変化せず、高精度な湿度測定が可能である。 A humidity sensor device according to a third aspect of the present invention includes a humidity sensor according to the first or second aspect, a first series circuit in which a first constant resistance and a second constant resistance are connected in series, the detection thermistor, A first bridge circuit configured in parallel with a second series circuit in which a first standard thermistor is connected in series; a third series circuit in which a third constant resistance and a fourth constant resistance are connected in series; A second bridge circuit connected in series with the fourth series circuit in which the separate thermistor for gas and the second standard thermistor are connected in series, and connected in series to the first bridge circuit, and the first connected in series. With a constant voltage applied to the 1 bridge circuit and the second bridge circuit, a connection point between the detection thermistor and the first standard thermistor and a connection point between the first constant resistance and the second constant resistance Between the first output voltage value and the other gas A computing unit that computes the humidity of the outside air based on a second output voltage value between a connection point between the thermistor and the second standard thermistor and a connection point between the third constant resistance and the fourth constant resistance; It is characterized by having.
That is, in this humidity sensor device, the first output voltage value between the connection point of the detection thermistor and the first standard thermistor, and the connection point of the first constant resistance and the second constant resistance, and the separate gas thermistor And a calculation unit for calculating the humidity of the outside air based on the second output voltage value between the connection point of the second standard thermistor and the connection point of the third constant resistance and the fourth constant resistance. For example, since “first output voltage value / second output voltage value” is a value determined only by absolute humidity regardless of applied voltage or ambient temperature, humidity measurement can be performed without checking the applied voltage in advance. It becomes possible. Even when the value of the voltage applied to the thermistor during use changes gradually, the absolute humidity can be measured accurately. Furthermore, since the “first output voltage value / second output voltage value” is a value that does not depend on the resistance value or B constant of the thermistor at 25 ° C., even if a thermistor having a different characteristic is newly designed, the characteristic curve High-precision humidity measurement is possible without changing the shape.
すなわち、この湿度センサ装置では、検知用サーミスタと第１標準用サーミスタとの接続点と第１定抵抗と第２定抵抗との接続点との間の第１出力電圧値と、別気体用サーミスタと第２標準用サーミスタとの接続点と第３定抵抗と第４定抵抗との接続点との間の第２出力電圧値とに基づいて外気の湿度を演算する演算部を備えているので、例えば「第１出力電圧値／第２出力電圧値」が、印加する電圧や雰囲気温度によらず、絶対湿度のみで決まる値であることから、印加する電圧を予め調べなくても湿度測定が可能になる。また、使用中にサーミスタに印加される電圧の値が徐々に変化するような場合でも、絶対湿度を正確に測定可能である。さらに、「第１出力電圧値／第２出力電圧値」が、サーミスタの２５℃における抵抗値やＢ定数によらない値であるので、特性の異なるサーミスタで新たに設計しても、特性曲線の形状が変化せず、高精度な湿度測定が可能である。 A humidity sensor device according to a third aspect of the present invention includes a humidity sensor according to the first or second aspect, a first series circuit in which a first constant resistance and a second constant resistance are connected in series, the detection thermistor, A first bridge circuit configured in parallel with a second series circuit in which a first standard thermistor is connected in series; a third series circuit in which a third constant resistance and a fourth constant resistance are connected in series; A second bridge circuit connected in series with the fourth series circuit in which the separate thermistor for gas and the second standard thermistor are connected in series, and connected in series to the first bridge circuit, and the first connected in series. With a constant voltage applied to the 1 bridge circuit and the second bridge circuit, a connection point between the detection thermistor and the first standard thermistor and a connection point between the first constant resistance and the second constant resistance Between the first output voltage value and the other gas A computing unit that computes the humidity of the outside air based on a second output voltage value between a connection point between the thermistor and the second standard thermistor and a connection point between the third constant resistance and the fourth constant resistance; It is characterized by having.
That is, in this humidity sensor device, the first output voltage value between the connection point of the detection thermistor and the first standard thermistor, and the connection point of the first constant resistance and the second constant resistance, and the separate gas thermistor And a calculation unit for calculating the humidity of the outside air based on the second output voltage value between the connection point of the second standard thermistor and the connection point of the third constant resistance and the fourth constant resistance. For example, since “first output voltage value / second output voltage value” is a value determined only by absolute humidity regardless of applied voltage or ambient temperature, humidity measurement can be performed without checking the applied voltage in advance. It becomes possible. Even when the value of the voltage applied to the thermistor during use changes gradually, the absolute humidity can be measured accurately. Furthermore, since the “first output voltage value / second output voltage value” is a value that does not depend on the resistance value or B constant of the thermistor at 25 ° C., even if a thermistor having a different characteristic is newly designed, the characteristic curve High-precision humidity measurement is possible without changing the shape.
本発明によれば、以下の効果を奏する。
すなわち、本発明に係る湿度センサ及び湿度センサ装置によれば、互いに近接配置された検知室部と第１標準室部と別気体室部と第２標準室部とを備えているので、第２標準用サーミスタと別気体用サーミスタとの出力特性に基づいて、検知用サーミスタと第１標準用サーミスタとの出力特性の変化を相殺することで、印加する電圧が変化する場合や任意の電圧を印加する場合、また特性の異なるサーミスタを使用した場合でも高精度に湿度検出が可能になる。 The present invention has the following effects.
That is, according to the humidity sensor and the humidity sensor device of the present invention, since the detection chamber portion, the first standard chamber portion, the separate gas chamber portion, and the second standard chamber portion that are arranged close to each other are provided. Based on the output characteristics of the standard thermistor and the separate gas thermistor, the change in the output characteristics of the detection thermistor and the first standard thermistor cancels the applied voltage, or an arbitrary voltage is applied. In this case, the humidity can be detected with high accuracy even when thermistors having different characteristics are used.
すなわち、本発明に係る湿度センサ及び湿度センサ装置によれば、互いに近接配置された検知室部と第１標準室部と別気体室部と第２標準室部とを備えているので、第２標準用サーミスタと別気体用サーミスタとの出力特性に基づいて、検知用サーミスタと第１標準用サーミスタとの出力特性の変化を相殺することで、印加する電圧が変化する場合や任意の電圧を印加する場合、また特性の異なるサーミスタを使用した場合でも高精度に湿度検出が可能になる。 The present invention has the following effects.
That is, according to the humidity sensor and the humidity sensor device of the present invention, since the detection chamber portion, the first standard chamber portion, the separate gas chamber portion, and the second standard chamber portion that are arranged close to each other are provided. Based on the output characteristics of the standard thermistor and the separate gas thermistor, the change in the output characteristics of the detection thermistor and the first standard thermistor cancels the applied voltage, or an arbitrary voltage is applied. In this case, the humidity can be detected with high accuracy even when thermistors having different characteristics are used.
以下、本発明に係る湿度センサ及び湿度センサ装置の一実施形態を、図１から図３を参照しながら説明する。なお、以下の説明に用いる各図面では、各部材を認識可能又は認識容易な大きさとするために縮尺を適宜変更している。
Hereinafter, an embodiment of a humidity sensor and a humidity sensor device according to the present invention will be described with reference to FIGS. 1 to 3. In each drawing used for the following description, the scale is appropriately changed in order to make each member recognizable or easily recognizable.
本実施形態の湿度センサ１は、図１及び図２に示すように、互いに近接配置された検知室部２と第１標準室部３と別気体室部４と第２標準室部５とを備えている。
上記検知室部２は、外気を内部空間に導入可能な貫通孔６ａを有した検知用容器６と、検知用容器６の内部に設置された検知用サーミスタ７とを備えている。
上記第１標準室部３は、乾燥空気を封入した第１標準用容器８と、第１標準用容器８の内部に設置された第１標準用サーミスタ９とを備えている。 As shown in FIGS. 1 and 2, thehumidity sensor 1 of the present embodiment includes a detection chamber 2, a first standard chamber 3, a separate gas chamber 4, and a second standard chamber 5 that are arranged close to each other. I have.
Thedetection chamber 2 includes a detection container 6 having a through-hole 6 a through which outside air can be introduced into the internal space, and a detection thermistor 7 installed inside the detection container 6.
The firststandard chamber 3 includes a first standard container 8 filled with dry air and a first standard thermistor 9 installed inside the first standard container 8.
上記検知室部２は、外気を内部空間に導入可能な貫通孔６ａを有した検知用容器６と、検知用容器６の内部に設置された検知用サーミスタ７とを備えている。
上記第１標準室部３は、乾燥空気を封入した第１標準用容器８と、第１標準用容器８の内部に設置された第１標準用サーミスタ９とを備えている。 As shown in FIGS. 1 and 2, the
The
The first
上記別気体室部４は、前記乾燥空気と異なる熱伝導度を有する気体を封入した別気体用容器１０と、別気体用容器１０の内部に設置された別気体用サーミスタ１１とを備えている。
なお、別気体用容器１０に封入された前記気体は、窒素が採用される。
上記第２標準室部５は、乾燥空気を封入した第２標準用容器１２と、第２標準用容器１２の内部に設置された第２標準用サーミスタ１３とを備えている。 The separategas chamber section 4 includes a separate gas container 10 in which a gas having a thermal conductivity different from that of the dry air is sealed, and a separate gas thermistor 11 installed inside the separate gas container 10. .
In addition, nitrogen is employ | adopted for the said gas enclosed with thecontainer 10 for another gas.
The secondstandard chamber 5 includes a second standard container 12 filled with dry air, and a second standard thermistor 13 installed in the second standard container 12.
なお、別気体用容器１０に封入された前記気体は、窒素が採用される。
上記第２標準室部５は、乾燥空気を封入した第２標準用容器１２と、第２標準用容器１２の内部に設置された第２標準用サーミスタ１３とを備えている。 The separate
In addition, nitrogen is employ | adopted for the said gas enclosed with the
The second
上記各サーミスタは、例えばチップ型やフレーク型のサーミスタが採用可能である。
また、上記各容器は、セラミックス等の絶縁性容器が好ましい。
上記検知室部２と第１標準室部３と別気体室部４と第２標準室部５とは、例えば同一の回路基板上に並べて実装されている。 As each of the thermistors, for example, a chip type or flake type thermistor can be adopted.
Moreover, each said container has preferable insulating containers, such as ceramics.
Thedetection chamber 2, the first standard chamber 3, the separate gas chamber 4, and the second standard chamber 5 are mounted side by side on the same circuit board, for example.
また、上記各容器は、セラミックス等の絶縁性容器が好ましい。
上記検知室部２と第１標準室部３と別気体室部４と第２標準室部５とは、例えば同一の回路基板上に並べて実装されている。 As each of the thermistors, for example, a chip type or flake type thermistor can be adopted.
Moreover, each said container has preferable insulating containers, such as ceramics.
The
また、本実施形態の湿度センサ装置１００は、図１に示すように、上記湿度センサ１と、第１定抵抗１４と第２定抵抗１５とが直列接続された第１直列回路と、検知用サーミスタ７と第１標準用サーミスタ９とが直列接続された第２直列回路とが並列接続されて構成された第１ブリッジ回路Ｂ１と、第３定抵抗１６と第４定抵抗１７とが直列接続された第３直列回路と、別気体用サーミスタ１１と第２標準用サーミスタ１３とが直列接続された第４直列回路とが並列接続され第１ブリッジ回路Ｂ１に直列接続された第２ブリッジ回路Ｂ２と、直列接続された第１ブリッジ回路Ｂ１と第２ブリッジ回路Ｂ２とに定電圧を印加した状態で、検知用サーミスタ７と第１標準用サーミスタ９との接続点Ｐ１と第１定抵抗１４と第２定抵抗１５との接続点Ｐ２との間の第１出力電圧値Ｖａと、別気体用サーミスタ１１と第２標準用サーミスタ１３との接続点Ｐ３と第３定抵抗１６と第４定抵抗１７との接続点Ｐ４との間の第２出力電圧値Ｖｂとに基づいて前記外気の湿度を演算する演算部Ｃとを備えている。
Further, as shown in FIG. 1, the humidity sensor device 100 of the present embodiment includes the humidity sensor 1, a first series circuit in which a first constant resistor 14 and a second constant resistor 15 are connected in series, and for detection. A first bridge circuit B1 configured by connecting a thermistor 7 and a second standard circuit in which a first standard thermistor 9 is connected in series, a third constant resistor 16 and a fourth constant resistor 17 are connected in series. A second bridge circuit B2 in which the third series circuit thus formed and the fourth series circuit in which the separate gas thermistor 11 and the second standard thermistor 13 are connected in series are connected in parallel and connected in series to the first bridge circuit B1. In addition, in a state where a constant voltage is applied to the first bridge circuit B1 and the second bridge circuit B2 connected in series, the connection point P1 between the detection thermistor 7 and the first standard thermistor 9 and the first constant resistor 14 Contact with the second constant resistance 15 The first output voltage value Va between the point P2 and the connection point P3 of the separate gas thermistor 11 and the second standard thermistor 13 and the connection point P4 of the third constant resistor 16 and the fourth constant resistor 17 And a calculation unit C that calculates the humidity of the outside air based on the second output voltage value Vb.
なお、直列接続された第１ブリッジ回路Ｂ１と第２ブリッジ回路Ｂ２とには、主電源１８により任意の電圧が抵抗１９を介して印加される。
上記検知用サーミスタ７、第１標準用サーミスタ９、第２標準用サーミスタ１３及び別気体用サーミスタ１１には、それぞれリード線２０が接続され、各リード線２０が各容器の外部に突出して対応する回路に接続されている。
上記演算部Ｃは、少なくとも「第１出力電圧値Ｖａ／第２出力電圧値Ｖｂ」を算出可能なＩＣやコンピュータ等が採用され、「第１出力電圧値Ｖａ／第２出力電圧値Ｖｂ」に対応した絶対湿度を出力可能である。 An arbitrary voltage is applied from themain power supply 18 via the resistor 19 to the first bridge circuit B1 and the second bridge circuit B2 connected in series.
Lead wires 20 are connected to the detection thermistor 7, the first standard thermistor 9, the second standard thermistor 13, and the separate gas thermistor 11, and each lead wire 20 protrudes to the outside of each container. Connected to the circuit.
The arithmetic unit C employs an IC, a computer, or the like that can calculate at least “first output voltage value Va / second output voltage value Vb”, and sets “first output voltage value Va / second output voltage value Vb”. The corresponding absolute humidity can be output.
上記検知用サーミスタ７、第１標準用サーミスタ９、第２標準用サーミスタ１３及び別気体用サーミスタ１１には、それぞれリード線２０が接続され、各リード線２０が各容器の外部に突出して対応する回路に接続されている。
上記演算部Ｃは、少なくとも「第１出力電圧値Ｖａ／第２出力電圧値Ｖｂ」を算出可能なＩＣやコンピュータ等が採用され、「第１出力電圧値Ｖａ／第２出力電圧値Ｖｂ」に対応した絶対湿度を出力可能である。 An arbitrary voltage is applied from the
The arithmetic unit C employs an IC, a computer, or the like that can calculate at least “first output voltage value Va / second output voltage value Vb”, and sets “first output voltage value Va / second output voltage value Vb”. The corresponding absolute humidity can be output.
図１に示す回路において、ブリッジ回路における抵抗素子の抵抗値を大きくすることで、検知用サーミスタ７、第１標準用サーミスタ９、別気体用サーミスタ１１及び第２標準用サーミスタ１３に流れる電流が全て等しい場合における出力電圧は、以下のように算出される。
サーミスタの温度がＴであったときのサーミスタからの放熱量Ｑは、雰囲気温度Ｔ∞における雰囲気ガスの熱伝導度λ（Ｔ∞）を用いて次の式（１）のように簡単に算出することができる。なお、定数Ｇは、検知用容器６、第１標準用容器８、第２標準用容器１２又は別気体用容器１０の空間容積等の形状で決まる定数である。
＜式（１）＞
In the circuit shown in FIG. 1, by increasing the resistance value of the resistance element in the bridge circuit, all the currents flowing through the detection thermistor 7, the first standard thermistor 9, the separate gas thermistor 11, and the second standard thermistor 13 are all. The output voltage in the case of being equal is calculated as follows.
The heat release amount Q from the thermistor when the temperature of the thermistor is T is simply calculated as the following equation (1) using the thermal conductivity λ (T ∞ ) of the atmospheric gas at the ambient temperature T ∞ . be able to. The constant G is a constant determined by the shape such as the space volume of thedetection container 6, the first standard container 8, the second standard container 12, or the separate gas container 10.
<Formula (1)>
サーミスタの温度がＴであったときのサーミスタからの放熱量Ｑは、雰囲気温度Ｔ∞における雰囲気ガスの熱伝導度λ（Ｔ∞）を用いて次の式（１）のように簡単に算出することができる。なお、定数Ｇは、検知用容器６、第１標準用容器８、第２標準用容器１２又は別気体用容器１０の空間容積等の形状で決まる定数である。
＜式（１）＞
The heat release amount Q from the thermistor when the temperature of the thermistor is T is simply calculated as the following equation (1) using the thermal conductivity λ (T ∞ ) of the atmospheric gas at the ambient temperature T ∞ . be able to. The constant G is a constant determined by the shape such as the space volume of the
<Formula (1)>
まず、検知用サーミスタ７及び第１標準用サーミスタ９における第１出力電圧値Ｖａを数値的に導出すると、検知用サーミスタ７及び第１標準用サーミスタ９のサーミスタ温度がＴ１，Ｔ２であるときの放熱量Ｑ１，Ｑ２は、次の式（２）のようになる。ここでλｗｅｔおよびλｄｒｙはそれぞれ検知室内ガスおよび第１標準室内ガスの熱伝導度である。
＜式（２）＞
First, when the first output voltage value Va in the detection thermistor 7 and the first standard thermistor 9 is numerically derived, the thermistor temperatures of the detection thermistor 7 and the first standard thermistor 9 are T 1 and T 2. The heat dissipation amounts Q 1 and Q 2 are as shown in the following equation (2). Here, λ wet and λ dry are the thermal conductivities of the detection room gas and the first standard room gas, respectively.
<Formula (2)>
＜式（２）＞
<Formula (2)>
放熱量Ｑ１と放熱量Ｑ２との差を、熱伝導度λｗｅｔと熱伝導度λｄｒｙとの差「λｗｅｔ－λｄｒｙ」の寄与と、検知用サーミスタ７の温度Ｔ１と第１標準用サーミスタ９の温度Ｔ２との差「Ｔ１－Ｔ２」の寄与とに分けると、以下の式（３）のようになる。
＜式（３）＞
The difference between the heat dissipation amount Q 1 and the heat dissipation amount Q 2 is determined by the contribution of the difference “λ wet −λ dry ” between the thermal conductivity λ wet and the thermal conductivity λ dry , the temperature T 1 of the detection thermistor 7 and the first When divided into the contribution of the difference “T 1 −T 2 ” from the temperature T 2 of the standard thermistor 9, the following equation (3) is obtained.
<Formula (3)>
＜式（３）＞
<Formula (3)>
一方、サーミスタの特性である２５℃における抵抗値Ｒ２５とＢ定数Ｂとを用いると、放熱量の差「Ｑ１－Ｑ２」はサーミスタに流れる電流ｉ１２を用いて次の式（４）のように記載することができる。
＜式（４）＞
On the other hand, when the resistance value R 25 at 25 ° C. and the B constant B, which are the characteristics of the thermistor, are used, the difference in heat dissipation “Q 1 -Q 2 ” is calculated using the current i 12 flowing through the thermistor as It can be described as follows.
<Formula (4)>
＜式（４）＞
<Formula (4)>
上記式（３）（４）から「Ｔ１－Ｔ２」を消去し、第１ブリッジ回路Ｂ１における第１出力電圧値Ｖａを求めると、次の式（５）に示すように空気の熱伝導度の寄与と、他の測定条件の寄与との積の形になる。
＜式（５）＞
When “T 1 -T 2 ” is deleted from the above equations (3) and (4) and the first output voltage value Va in the first bridge circuit B1 is obtained, the heat conduction of air as shown in the following equation (5) It takes the form of the product of the contribution of degree and the contribution of other measurement conditions.
<Formula (5)>
＜式（５）＞
<Formula (5)>
ただし、ここで（Ｔ１－Ｔ∞）≒（Ｔ２－Ｔ∞）とし、電流ｉ１２を次の式（６）によりサーミスタ温度Ｔ２に書き換える。
＜式（６）＞
However, here, (T 1 −T ∞ ) ≈ (T 2 −T ∞ ), and the current i 12 is rewritten to the thermistor temperature T 2 by the following equation (6).
<Formula (6)>
＜式（６）＞
<Formula (6)>
従来の湿度センサでは、上記式（５）の値が出力されるため、サーミスタの温度Ｔ２、すなわちサーミスタに流れる電流ｉ１２、サーミスタの抵抗Ｒ２５あるいはＢ定数に応じて出力が変化してしまうことがわかる。
一方、本実施形態の別気体用サーミスタ１１と第２標準用サーミスタ１３との第２ブリッジ回路Ｂ２における第２出力電圧値Ｖｂは、同様の計算により次の式（７）のようになる。
＜式（７）＞
In the conventional humidity sensor, since the value of the above equation (5) is output, the output changes according to the temperature T 2 of the thermistor, that is, the current i 12 flowing through the thermistor, the resistance R 25 of the thermistor or the B constant. I understand that.
On the other hand, the second output voltage value Vb in the second bridge circuit B2 of theseparate gas thermistor 11 and the second standard thermistor 13 of the present embodiment is expressed by the following equation (7) by the same calculation.
<Formula (7)>
一方、本実施形態の別気体用サーミスタ１１と第２標準用サーミスタ１３との第２ブリッジ回路Ｂ２における第２出力電圧値Ｖｂは、同様の計算により次の式（７）のようになる。
＜式（７）＞
On the other hand, the second output voltage value Vb in the second bridge circuit B2 of the
<Formula (7)>
ここで、式（５）と式（７）とを比較すると、以下の式（８）となる。
＜式（８）＞
Here, when equation (5) and equation (7) are compared, the following equation (8) is obtained.
<Formula (8)>
＜式（８）＞
<Formula (8)>
このＶａ／Ｖｂは、湿り空気である検知空気（外気）、乾燥空気及び別気体（本実施形態では窒素）の各熱伝導度によってのみ決定され、サーミスタ温度Ｔ２、電流ｉ１２、Ｒ２５及びＢ定数によらない挙動を示す。
ここで、検知空気、乾燥空気及び別気体の各熱伝導度を用いてＶａ／Ｖｂを計算すると、図３に示すようになる。なお、図中の曲線１～７は雰囲気温度Ｔ∞を一定にした状態でサーミスタの温度Ｔやサーミスタ特性を変更した場合、曲線８～１０はサーミスタの温度Ｔやサーミスタ特性を一定にした状態で、雰囲気温度Ｔ∞を変更した場合を示している。
この図から分かるように、Ｖａ／Ｖｂは、低湿度の領域において湿度のみに依存し、サーミスタ温度Ｔ、サーミスタ特性には依存しない。また、雰囲気温度Ｔ∞による影響もわずかである。 This Va / Vb is determined only by the thermal conductivities of the detection air (outside air) that is humid air, dry air, and another gas (nitrogen in this embodiment), and the thermistor temperature T 2 , currents i 12 , R 25, and The behavior does not depend on the B constant.
Here, when Va / Vb is calculated using the thermal conductivities of detected air, dry air, and another gas, it is as shown in FIG. Curves 1-7 show thermistor temperature T and thermistor characteristics when the ambient temperature T∞ is constant. Curves 8-10 show thermistor temperature T and thermistor characteristics constant. The case where the atmospheric temperature T∞ is changed is shown.
As can be seen from this figure, Va / Vb depends only on the humidity in the low humidity region, and does not depend on the thermistor temperature T and the thermistor characteristics. In addition, the influence of the ambient temperature T∞ is slight.
ここで、検知空気、乾燥空気及び別気体の各熱伝導度を用いてＶａ／Ｖｂを計算すると、図３に示すようになる。なお、図中の曲線１～７は雰囲気温度Ｔ∞を一定にした状態でサーミスタの温度Ｔやサーミスタ特性を変更した場合、曲線８～１０はサーミスタの温度Ｔやサーミスタ特性を一定にした状態で、雰囲気温度Ｔ∞を変更した場合を示している。
この図から分かるように、Ｖａ／Ｖｂは、低湿度の領域において湿度のみに依存し、サーミスタ温度Ｔ、サーミスタ特性には依存しない。また、雰囲気温度Ｔ∞による影響もわずかである。 This Va / Vb is determined only by the thermal conductivities of the detection air (outside air) that is humid air, dry air, and another gas (nitrogen in this embodiment), and the thermistor temperature T 2 , currents i 12 , R 25, and The behavior does not depend on the B constant.
Here, when Va / Vb is calculated using the thermal conductivities of detected air, dry air, and another gas, it is as shown in FIG. Curves 1-7 show thermistor temperature T and thermistor characteristics when the ambient temperature T∞ is constant. Curves 8-10 show thermistor temperature T and thermistor characteristics constant. The case where the atmospheric temperature T∞ is changed is shown.
As can be seen from this figure, Va / Vb depends only on the humidity in the low humidity region, and does not depend on the thermistor temperature T and the thermistor characteristics. In addition, the influence of the ambient temperature T∞ is slight.
このように本実施形態の湿度センサ１では、互いに近接配置された検知室部２と第１標準室部３と別気体室部４と第２標準室部５とを備え、別気体室部４が、乾燥空気と異なる熱伝導度を有する気体を封入した別気体用容器１０と、別気体用容器１０の内部に設置された別気体用サーミスタ１１とを備えているので、第２標準用サーミスタ１３と別気体用サーミスタ１１との出力特性に基づいて、検知用サーミスタ７と第１標準用サーミスタ９との出力特性の変化を相殺することで、印加する電圧が変化する場合や任意の電圧を印加する場合、また特性の異なるサーミスタを使用した場合でも高精度に湿度検出が可能になる。
As described above, the humidity sensor 1 of the present embodiment includes the detection chamber 2, the first standard chamber 3, the separate gas chamber 4, and the second standard chamber 5 that are arranged close to each other, and the separate gas chamber 4. Is provided with a separate gas container 10 filled with a gas having a thermal conductivity different from that of dry air, and a separate gas thermistor 11 installed inside the separate gas container 10, so that the second standard thermistor 13 and another gas thermistor 11, and the output characteristics of the detection thermistor 7 and the first standard thermistor 9 are offset to cancel the applied voltage or to change any voltage. Even when a thermistor having different characteristics is used, the humidity can be detected with high accuracy.
特に、別気体用容器１０に封入された前記気体が、窒素であるので、安価で安定した気体である窒素により低コストで安定した測定が可能になる。
また、本実施形態の湿度センサ装置１００では、検知用サーミスタ７と第１標準用サーミスタ９との接続点Ｐ１と第１定抵抗１４と第２定抵抗１５との接続点Ｐ２との間の第１出力電圧値Ｖａと、別気体用サーミスタ１１と第２標準用サーミスタ１３との接続点Ｐ３と第３定抵抗１６と第４定抵抗１７との接続点Ｐ４との間の第２出力電圧値Ｖｂとに基づいて外気の湿度を演算する演算部Ｃを備えているので、例えば「第１出力電圧値／第２出力電圧値」（Ｖａ／Ｖｂ）が、印加する電圧や雰囲気温度によらず、絶対湿度のみで決まる値であることから、印加する電圧を予め調べなくても湿度測定が可能になる。 In particular, since the gas sealed in theseparate gas container 10 is nitrogen, nitrogen, which is an inexpensive and stable gas, enables stable measurement at low cost.
Further, in thehumidity sensor device 100 of the present embodiment, the first point between the connection point P1 between the detection thermistor 7 and the first standard thermistor 9 and the connection point P2 between the first constant resistor 14 and the second constant resistor 15 is used. 1st output voltage value Va and the 2nd output voltage value between the connection point P3 of the thermistor 11 for another gas, and the 2nd standard thermistor 13, and the connection point P4 of the 3rd constant resistance 16 and the 4th constant resistance 17 Since the calculation unit C that calculates the humidity of the outside air based on Vb is provided, for example, “first output voltage value / second output voltage value” (Va / Vb) does not depend on the applied voltage or the ambient temperature. Since the value is determined only by the absolute humidity, the humidity can be measured without checking the applied voltage in advance.
また、本実施形態の湿度センサ装置１００では、検知用サーミスタ７と第１標準用サーミスタ９との接続点Ｐ１と第１定抵抗１４と第２定抵抗１５との接続点Ｐ２との間の第１出力電圧値Ｖａと、別気体用サーミスタ１１と第２標準用サーミスタ１３との接続点Ｐ３と第３定抵抗１６と第４定抵抗１７との接続点Ｐ４との間の第２出力電圧値Ｖｂとに基づいて外気の湿度を演算する演算部Ｃを備えているので、例えば「第１出力電圧値／第２出力電圧値」（Ｖａ／Ｖｂ）が、印加する電圧や雰囲気温度によらず、絶対湿度のみで決まる値であることから、印加する電圧を予め調べなくても湿度測定が可能になる。 In particular, since the gas sealed in the
Further, in the
また、使用中にサーミスタに印加される電圧の値が徐々に変化するような場合でも、絶対湿度を正確に測定可能である。さらに、「第１出力電圧値／第２出力電圧値」（Ｖａ／Ｖｂ）が、サーミスタの２５℃における抵抗値やＢ定数によらない値であるので、特性の異なるサーミスタで新たに設計しても、特性曲線の形状が変化せず、高精度な湿度測定が可能である。
Also, even when the voltage applied to the thermistor changes gradually during use, the absolute humidity can be measured accurately. Furthermore, since the “first output voltage value / second output voltage value” (Va / Vb) is a value that does not depend on the resistance value or the B constant of the thermistor at 25 ° C., a thermistor having a different characteristic is newly designed. However, the shape of the characteristic curve does not change, and high-precision humidity measurement is possible.
なお、本発明の技術範囲は上記実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲において種々の変更を加えることが可能である。
The technical scope of the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
１…湿度センサ、２…検知室部、３…第１標準室部、４…別気体室部、５…第２標準室部、６…検知用容器、６ａ…貫通孔、７…検知用サーミスタ、８…第１標準用容器、９…第１標準用サーミスタ、１０…別気体用容器、１１…別気体用サーミスタ、１２…第２標準用容器、１３…第２標準用サーミスタ、１００…湿度センサ装置、Ｂ１…第１ブリッジ回路、Ｂ２…第２ブリッジ回路、Ｃ…演算部、Ｐ１…検知用サーミスタと第１標準用サーミスタとの接続点、Ｐ２…第１定抵抗と第２定抵抗との接続点、Ｐ３…別気体用サーミスタと第２標準用サーミスタとの接続点、Ｐ４…第３定抵抗と第４定抵抗との接続点
DESCRIPTION OFSYMBOLS 1 ... Humidity sensor, 2 ... Detection chamber part, 3 ... 1st standard chamber part, 4 ... Separate gas chamber part, 5 ... 2nd standard chamber part, 6 ... Detection container, 6a ... Through-hole, 7 ... Detection thermistor , 8 ... Container for first standard, 9 ... Thermistor for first standard, 10 ... Container for separate gas, 11 ... Thermistor for separate gas, 12 ... Container for second standard, 13 ... Thermistor for second standard, 100 ... Humidity Sensor device, B1 ... first bridge circuit, B2 ... second bridge circuit, C ... calculation unit, P1 ... connection point of the detection thermistor and first standard thermistor, P2 ... first constant resistance and second constant resistance Connection point, P3: connection point between the thermistor for another gas and the second standard thermistor, P4: connection point between the third constant resistance and the fourth constant resistance
DESCRIPTION OF
Claims (3)
- 互いに近接配置された検知室部と第１標準室部と別気体室部と第２標準室部とを備え、
前記検知室部が、外気を内部空間に導入可能な貫通孔を有した検知用容器と、前記検知用容器の内部に設置された検知用サーミスタとを備え、
前記第１標準室部が、乾燥空気を封入した第１標準用容器と、前記第１標準用容器の内部に設置された第１標準用サーミスタとを備え、
前記第２標準室部が、乾燥空気を封入した第２標準用容器と、前記第２標準用容器の内部に設置された第２標準用サーミスタとを備え、
前記別気体室部が、前記乾燥空気と異なる熱伝導度を有する気体を封入した別気体用容器と、前記別気体用容器の内部に設置された別気体用サーミスタとを備えていることを特徴とする湿度センサ。 A detection chamber, a first standard chamber, a separate gas chamber, and a second standard chamber, which are arranged close to each other,
The detection chamber includes a detection container having a through-hole capable of introducing outside air into the internal space, and a detection thermistor installed inside the detection container,
The first standard chamber includes a first standard container filled with dry air, and a first standard thermistor installed in the first standard container.
The second standard chamber includes a second standard container filled with dry air, and a second standard thermistor installed in the second standard container;
The separate gas chamber includes a separate gas container in which a gas having a thermal conductivity different from that of the dry air is sealed, and a separate gas thermistor installed in the separate gas container. Humidity sensor. - 請求項１に記載の湿度センサにおいて、
前記別気体用容器に封入された前記気体が、窒素であることを特徴とする湿度センサ。 The humidity sensor according to claim 1,
The humidity sensor characterized in that the gas sealed in the separate gas container is nitrogen. - 請求項１に記載の湿度センサと、
第１定抵抗と第２定抵抗とが直列接続された第１直列回路と、前記検知用サーミスタと前記第１標準用サーミスタとが直列接続された第２直列回路とが並列接続されて構成された第１ブリッジ回路と、
第３定抵抗と第４定抵抗とが直列接続された第３直列回路と、前記別気体用サーミスタと前記第２標準用サーミスタとが直列接続された第４直列回路とが並列接続され前記第１ブリッジ回路に直列接続された第２ブリッジ回路と、
直列接続された前記第１ブリッジ回路と前記第２ブリッジ回路とに定電圧を印加した状態で、前記検知用サーミスタと前記第１標準用サーミスタとの接続点と第１定抵抗と第２定抵抗との接続点との間の第１出力電圧値と、前記別気体用サーミスタと前記第２標準用サーミスタとの接続点と前記第３定抵抗と前記第４定抵抗との接続点との間の第２出力電圧値とに基づいて前記外気の湿度を演算する演算部とを備えていることを特徴とする湿度センサ装置。 A humidity sensor according to claim 1;
A first series circuit in which a first constant resistance and a second constant resistance are connected in series, and a second series circuit in which the detection thermistor and the first standard thermistor are connected in series are connected in parallel. A first bridge circuit;
A third series circuit in which a third constant resistance and a fourth constant resistance are connected in series, and a fourth series circuit in which the separate gas thermistor and the second standard thermistor are connected in series are connected in parallel. A second bridge circuit connected in series to the one bridge circuit;
In a state where a constant voltage is applied to the first bridge circuit and the second bridge circuit connected in series, a connection point of the detection thermistor and the first standard thermistor, a first constant resistance, and a second constant resistance. Between the connection point of the third constant resistance and the fourth constant resistance, the first output voltage value between the connection point and the connection point of the separate gas thermistor and the second standard thermistor A humidity sensor device comprising: a calculation unit that calculates the humidity of the outside air based on the second output voltage value.
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| JP2004504598A (en) * | 2000-07-19 | 2004-02-12 | エルジー エレクトロニクス インコーポレーテッド | Absolute humidity sensor |
| US20050265422A1 (en) * | 2004-05-28 | 2005-12-01 | Honeywell International Inc. | Differetial thermal sensors |
| JP2016014622A (en) * | 2014-07-03 | 2016-01-28 | Tdk株式会社 | Sensor circuit |
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| JP2004504598A (en) * | 2000-07-19 | 2004-02-12 | エルジー エレクトロニクス インコーポレーテッド | Absolute humidity sensor |
| US20050265422A1 (en) * | 2004-05-28 | 2005-12-01 | Honeywell International Inc. | Differetial thermal sensors |
| JP2016014622A (en) * | 2014-07-03 | 2016-01-28 | Tdk株式会社 | Sensor circuit |
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