WO2018098510A1

WO2018098510A1 - Multilayer sensor arrangement for determining a substance content in an object being measured, in particular a body part

Info

Publication number: WO2018098510A1
Application number: PCT/AT2017/000078
Authority: WO
Inventors: Peter Hagl
Original assignee: Peter Hagl
Priority date: 2016-11-30
Filing date: 2017-11-28
Publication date: 2018-06-07

Abstract

The invention relates to a sensor arrangement (10) for determining the content of a substance in an object being measured, in particular in a body part, from which steam or vapour containing a substance is continuously discharged, the arrangement comprising a measurement chamber (3) that delimits an area of the surface of the object being measured, wherein the measurement chamber (3) comprises a front face (36) which can be set onto the object being measured, the sensor arrangement (10) comprises at least one sensor (4a) for sensing the content of at least one substance inside the measurement chamber (3), the measurement chamber (3) has a layered structure with at least two layers, each layer of the measurement chamber (3) is formed by a substrate (22a, 22b,...), the sensor arrangement (10) comprises another sensor (4b), in particular a plurality of other sensors (4b, 4c,...), the one sensor (4a) and the other sensor (4b) are arranged each on a different substrate (22a, 22b,...) and the substrates (22a, 22b,...) are fastened, preferably detachably fastened to each other, in particular above each other in the direction of flow of the substance.

Description

MULTILAYER SENSOR ARRANGEMENT FOR THE DETERMINATION OF A SUBSTANCE CONTENT IN A MEASURING SUBJECT, PARTICULARLY IN A BODY PART

The invention relates to a sensor arrangement according to the preamble of patent claim 1, a garment according to claim 45, a wristwatch according to claim 48 and a fastening band according to claim 49.

About the skin of a person or an animal leave the body continuously gases and liquids. These gases are different depending on the body region or body part, as the underlying organs or body regions fulfill different tasks and thus produce other metabolic products. The metabolic products produced by the organs or body cells are then removed from the organs or body regions via the bloodstream. Since the human body attempts to get rid of circulating substances in the bloodstream as quickly as possible, except for blood cells and platelets, the bloodstream is permeable and allows substances, for example gases, to diffuse through the blood membrane. The slower these substances are transported through the bloodstream, the faster the substances of the blood vessels diffuse into the environment or the tissue surrounding the blood vessels. Furthermore, waste products of the tissue are taken up by capillary blood vessels and transported away by them or, conversely, the tissue is supplied with necessary substances, such as oxygen. This creates a clear rule profile between blood vessel, capillary blood vessel and skin. The substances released to the tissue or the capillary blood vessels are thus also partially excreted from the body via the skin. Due to the different tasks of the body regions, the skin as well as the circulation of the individual body regions is regulated differently. Thus, depending on the body region and body site, the moisture exiting the skin and the substances exiting the skin are different and variable depending on the presence in the underlying capillaries. This results in different temperature levels of the skin resulting in a different rate of evaporation.

By "skin" in this text and the statements below is meant any external or internal surface of the body or part of the body, in particular skin surfaces, mucous membranes, conjunctivae, organ membranes, intestinal membranes and the like.

On the human or animal skin are particles, gases, and liquids as well as organic organisms such as bacteria, viruses and other organisms. In the surrounding air are also gases and other particles present, as well Liquids in the form of droplets, such as rain, which are optically visible on the skin.

Gas intake systems are known from the prior art, the gas injections preferably pumped perform via pneumatic tubes into the skin. It is the relative humidity measured and kept constant for a constant concentration and measured by means of a gas sensor, the gas reduction in the chamber. Furthermore Dehumirer are used which reduce the humidity appropriately.

Various measuring devices are known from the prior art, which measure the moisture exiting the skin, the so-called trans-epidermal water loss or TEWL value. Such gauges usually use internal calibration tables which limit the application and its evaluation. Furthermore, the known from the prior art measuring devices on a defined application parked structure, which can not be changed. This creates the disadvantage that different measuring devices exist on the market for each application, which provide the user with different knowledge and requirements with regard to the duration of the measurement and its operation.

It is therefore an object of the present invention to provide a sensor arrangement which achieves a broader and variable application possibility and can detect various particles, molecules and compounds, substances and substance groups and determines their quantity and their composition.

These objects are achieved by the characterizing features of claim 1. It is provided that the measuring chamber has a layered structure with at least two layers, wherein each layer of the measuring chamber is formed by a respective carrier, that the sensor arrangement comprises a further sensor, in particular a plurality of further sensors, wherein the one sensor and the further sensor , Are each arranged on a different carrier, and that the carriers to each other, in particular in the flow direction of the fabric one above the other, preferably releasably secured.

Due to the layered structure, it is possible to manufacture the individual layers in series on different machines. Depending on the intended use, the individual layers can then be stacked and connected. This creates a wide possibility to add the layers or carriers together and depending to produce different measuring chambers as required, which are each tuned to one or more uses. Individual layers can be produced in parallel on different machines, without contamination of the other layers and optimization of the work processes and thus an energy-efficient production is possible

The observation of molecules and / or an element measurement as well as the measurement of the molecules and molecular chains can be measured by the present invention in a particularly simple, low-energy and temporally accelerated manner.

By layering a precise arrangement of the sensors individual sensors in a compact design is possible and a miniaturization of elaborate measuring equipment possible, which can measure the smallest amounts of substances with low energy consumption by miniaturization.

Each of the layers can be manufactured with a different structure size. As a result, certain structures whose miniaturization would be very expensive can be made with greater resolution, others can be made smaller. Both layers can be subsequently joined together, resulting in, for example, a common channel or a common measuring chamber.

Another advantage of the device according to the invention is that in the prior art large appliances are in use, which must be cleaned or disposed of after use. The invention does with few small measuring elements (layers), which avoids waste and a complex and environmentally harmful cleaning. The burnout or annealing or sterilization is possible due to the miniaturization with low energy consumption.

Particularly advantageous embodiments of the sensor arrangement and of the method are defined in more detail by the features of the dependent claims:

A compact design is provided by the carriers forming the wall of the measuring chamber.

In order to provide a simpler measurement of the substances it can be provided that in each case at least one sensor is arranged on the carriers and the carriers are arranged such that the carriers span different levels with sensors. In order to separate individual substances from each other and easier to measure it can be provided that the measuring chamber is designed as a separation column or filter column, wherein a number of sensors are arranged in the measuring chamber. As a result, it is also possible to separate from the skin exiting reactive substances, such as methane or sulfur compounds, from each other and to prevent or delay the reaction.

Advantageously, it is provided that the sensors are arranged in different areas of the measuring chamber, that the sensors have different distances to the measuring object when the measuring chamber is placed on the measuring object. Due to the different defined distances of the sensors, the propagation speed of the substance can be measured by the time is detected at which the respective substance is detected at the individual sensors and so the substance via the assignment of the propagation velocities to the respective substances are easily determined.

Advantageously, it is provided that the carriers are identical and at least each have a continuous macroscopic recess, wherein the carrier are block-like superimposed, preferably releasably secured to each other, and wherein each of the recesses of all carriers are arranged in alignment.

A preferred embodiment of the sensor arrangement according to the invention is provided if in the recess of the carrier, in particular in the recess of each carrier, a light source and / or radiation source with predetermined spectrum, in particular an LED lamp is arranged, that an optical sensor is provided, the the carrier, in particular in the recess of each carrier, is arranged and directed along the diametrical course of the recess on the opposite inner surface of the recess of the carrier that the light source or radiation source with predetermined spectrum along the diametrical course of the recess on the opposite inner surface of the recess the carrier is directed to the light source or the radiation source, wherein the spectral regions in the optical sensor is sensitive and the emission spectrum of the light source or radiation source in an overlap region overlap and in particular the Ü is selected such that the absorption or reflection is increased or decreased in the presence of the substance in the recess against the absorption or reflection in the absence of the substance in the overlap region. In order to be able to easily carry out a plurality of different measuring methods with a sensor arrangement, it is provided that the measuring chamber is subdivided into a number of subregions, in particular gas-tight, at least one sensor and / or moisture sensor and in at least one of the subregions or within the subregions / or temperature sensor is arranged.

It is advantageously provided that the subregions are separated from one another by means of gas-tight webs, wherein the webs are designed such that the subregions are gas-tightly separated from one another when they rest on the measurement object.

In order to achieve the saturation of the individual partial regions at different times, it can be provided that the partial regions have such different dimensions relative to the measurement object that the respective sensors arranged in the partial regions have different distances from the measurement object.

The fabric is particularly easy to get from one to the next layer or carrier by at least one of the carrier has these fully penetrating pores or slots, the carriers are fluidly connected via the pores or slots.

An advantageous embodiment is provided by the sensor arrangement comprising a moisture sensor which is arranged such that the moisture within the measuring chamber can be measured.

Advantageously, it is provided that a processing unit downstream of the moisture sensor and the sensor is provided, to which the measured values of the sensor and the moisture sensor are fed, and wherein the processing unit determines the content of the substance within the measurement object by determining the determined content of the substance in the measuring chamber relates to the humidity determined in the measuring chamber. Since the skin evaporates more or less depending on temperature and humidity, the TEWL value can be easily determined by means of the moisture sensor and the substance can be normalized to temperature and humidity.

A particularly flexible construction of the sensor arrangement is provided if at least one of the carriers comprises at least one receptacle for plug-in modules or plug-in cards, wherein the sensor or the sensors are arranged on the plug-in modules or plug-in cards are, wherein the at least one receptacle is formed such that the bays or cards mechanically attached to the respective carrier, in particular pressed or held by spring force and / or chemically fixed, can, wherein the sensors protrude into the measuring chamber.

It is advantageously provided that the sensor arrangement has a number of contact electrodes, wherein the contact electrodes completely pass through the carrier or each carrier, wherein in particular the contact electrodes completely pass through each of the carriers, preferably one above the other, and form a continuous contact.

A simple and flexible layering of the sensor arrangement is provided if the measuring chamber is formed of several, in particular block-like, carriers, wherein the carriers are permeable to the substance, wherein between the carriers at least partially a cavity is formed, which with a material, in particular with a powder or powder or jelly or grains or sand or mixtures thereof, for permeability control is filled. One advantage of sand, for example, is that it is chemically inert and does not react at all.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a sensor layer, the sensor layer comprising a number of sensors arranged on the carrier and / or a moisture sensor and / or a temperature sensor.

An advantageous embodiment of a carrier provides that at least one of the carrier is formed as an insulating layer, wherein the insulating layer is formed such that the insulating layer of two insulating layers of the adjacent carrier thermally and / or acoustically and / or electrically insulated or the measuring chamber to the environment thermally and / or acoustically and / or electrically isolated and / or shields special wavelengths of light.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a separating layer, wherein the separating layer is formed such that the substance from the vapor or vapor is separable and / or several substances are separable, wherein the separation view in particular comprises palladium. For example, hydrogen can be easily separated by means of palladium. An advantageous embodiment of a carrier provides that at least one of the carriers is designed as an actuator layer, wherein the actuator layer has a defined opening which is covered by a movable element, wherein the movable element of a thermobimorphic material, in particular a shape memory alloy or of electroactive material , and, when heated, in particular by a heating element arranged in the actuator layer, releases the opening or defined parts of the opening, so that the substance can reach carriers adjacent to the actuator layer.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a contact layer, wherein the contact layer has a number of electrical contact surfaces, in particular contact electrodes, wherein the contact surfaces are formed such that through the contact layer, an electrical contact between two of the contact layer adjacent carriers can be formed and / or that the carrier has electrical contact surfaces which protrude into the environment of the respective carrier.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a distribution layer, wherein the distribution layer is formed such that a plurality of measurement signals of the sensors are bundled into a sum signal, or a measurement signal is distributed to multiple lines or by means of multiple, demultiplexer a signal switching and / or signal switching takes place.

In order to be able to prevent irritation of the skin, it is provided that at least one of the carriers consists of a biocompatible material.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a filter layer, wherein the filter layer comprises a filter, in particular a mechanical filter and / or sound filter and / or acoustic filter and / or ultrasonic filter.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a temperature layer, wherein the temperature layer comprises a heating or cooling element, in particular a heating coil or a Peltier element or channels with a medium flowing in the channels.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a fastening layer, wherein the attachment layer has a number of Includes fastening elements with which the attachment layer to the sensor assembly or a measuring device can be fastened, wherein in particular the attachment layer protrudes beyond the other layers. For example, an exact positioning can be effected by the attachment layer and the attachment layer can then be fastened by means of screws or plug connections in the housing or a measuring device.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a therapeutic layer, wherein the therapeutic layer comprises at least one therapeutic substance, in particular a care substance or barrier opening substances. For example, this substance may cover the measuring chamber and release the measuring chamber only after the substance has been completely released to the measuring object.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a separation column layer, wherein the separation column layer is formed as a separation column and in particular comprises one or more meandering channel or a number of pores formed in the respective carrier. By forming the profile or the cross section of the channel, the flow velocity of the substances or gases can also be increased or reduced in a targeted manner.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as an electronics layer, wherein the electronics layer, a measuring electronics and / or evaluation and / or a memory and / or a processor and / or a voltage source, in particular a battery, and / or a wafer blank. For example, it is easy to make a wafer blank from a third side and to integrate it in the layer as needed or to form the layer itself.

An advantageous embodiment of a carrier provides that at least one of the carriers (is formed as a measuring layer, wherein the measuring layer comprises a Meßelektrodengitter and a number of the fully penetrating holes, wherein the holes each have the diameter of individual selected atoms or molecules, wherein the measuring electrode grid applied to each hole is that when a molecule or atom that has the same dimensions as the hole has passed through the hole an electrical contact in the measuring electrode grid is closed and the permittivity and / or conductivity of the electrode line is changed. or the conductivity then allows an assignment of the size and type of an atom or Molecule. Since only small atoms and molecules can pass through the holes, the detection or detection is limited to these substances. If several different sizes of holes are formed in the layer, it is also possible by means of a corresponding arrangement of the electrodes to measure several substances with only one layer.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a binding layer, wherein the binding layer comprises at least one binding substance, in particular an activated carbon, can be bound with the volatile substances.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as an application layer, wherein the application layer is designed such that substances from the measuring chamber can be applied by means of vibrations, wherein the application layer in particular piezocrystals and / or electromechanical vibration generators and / or electromechanical Transducer includes. Thus, in particular multi-resistant germs can be removed from the device and they can be cleaned in such advantageous manner. If multiresistant germs are exposed to cleaning agents, this only causes them to adhere more strongly to the respective layer, but such germs can be discharged from the layers as a result of the vibration.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a spacer layer, wherein the spacer layer is designed to keep a defined distance between two spacer layers of adjacent carrier constant. Thus, by means of the spacer layer, the strength or stability of this layer can be tailored to the intended use.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as a manipulation layer, wherein the manipulation layer is designed such that signals are amplified or substances are dissolved or physical signals are converted into other physical signals, wherein the manipulation layer, voltage converter or solvent includes.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a mixed layer, wherein the mixed layer is formed such that concentration change of the substance can be generated, in particular the ambient air supplied or the flow of the substance is superimposed with a particle flow. An advantageous embodiment of a carrier provides that the carrier comprises a self-cleaning coating, in particular having a coating, wherein the coating consists of silicon dioxide with nano-sized nubs, a high roughness or wax layer is formed with wax crystals.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a cover layer, wherein the cover layer is gas-tight or liquid-tight, and in particular two adjacent layers gas-tight or liquid-tightly separated from each other.

An advantageous embodiment of a carrier provides that at least one of the carrier is formed as a spring layer, wherein the spring layer consists of a flexible material and is designed such that a compensation of unevenness or inequalities of adjacent layers, in particular normal to the end wall, can be compensated.

An advantageous embodiment of a carrier provides that at least one of the carriers is formed as a logic layer, wherein the logic layer is made of an electrically insulating material defined by the carrier has passing through recesses, which are contacted by the recesses adjacent layers by these recesses with each other. The insulating layer can be penetrated, for example, in the production by a targeted electrical current flow and so the recesses are made in the insulating layer.

An advantageous embodiment of a carrier provides that at least one of the carriers is designed as an energy layer, wherein the energy layer (X) comprises a voltage and / or energy source, in particular a battery or an accumulator, to ensure the energy supply of other views. Thus, a complicated wiring of the layers with an external energy source or a measuring device can be omitted and a particularly compact measuring device can be provided.

An advantageous embodiment of a carrier provides that the wall of the measuring chamber, in particular the carrier, is gas-permeable or comprises a number of channels which are designed such that the measuring chamber is connected to the surroundings of the sensor arrangement and gas from the measuring chamber into the Environment or from the environment into the measuring chamber can flow. An advantageous particularly compact design of a carrier provides that the layers, in particular the carrier has a thickness of less than 3mm, preferably less than 1 mm, more preferably less than 400μιτι having. As a result, for example, depending on the number of layers, the thickness can be selected to be different, so that a same total thickness of the sensor arrangement can be produced. The mechanical stability of the layers is advantageously determined by the sighting through the total thickness of the measuring chamber and not determined by the thickness of individual layers.

Advantageously, it is provided that the structures produced on the respective carriers have a spatial resolution of less than 100 nm, in particular between 4 nm and 32 nm.

The carriers can be easily attached to each other by the carriers are bonded together by gluing or pressing or by connecting elements.

A further aspect of the invention provides that a garment, in particular a T-shirt, comprises a number of sensor arrangements according to the invention.

In order to prevent the measuring chamber from being contaminated, provision can be made for the garment to have a gel or a superabsorbent, in particular surrounding the sensor arrangements, with which a user's perspiration and liquids can be absorbed.

It is advantageously provided that the sensor arrangements are arranged on a flexible film, the film being arranged on the inside of the item of clothing facing the user's skin, in particular by means of an adhesive layer or via a seam, the film being in particular in the form of a silicon wafer with a thickness of less than 100pm, in particular 75μιη is formed.

A further aspect of the invention provides that a wristwatch comprises a sensor arrangement according to the invention. Thus, a person can be easily measured for a long time and the evaluation of the measurements, for example in the electronics of the clock done. A further aspect of the invention is to provide a fastening band, in particular a bracelet or chest strap or ring or collar or headband, for fastening to the body, in particular the arm, the chest or the legs, of a human being, wherein the fastening band comprises a fixing means and a preferably extensible one , Band comprises, with which the fastening strap can be fastened to the body of the user, characterized in that the fastening strap comprises a sensor arrangement according to the invention. The variable possibility of arrangement on different body parts or regions makes it possible to make statements about the substances of the individual regions and to position the sensor arrangement at the relevant points as required.

Further advantages and embodiment of the invention will become apparent from the description and the accompanying drawings.

The invention is illustrated below with reference to particularly advantageous, but not limiting, exemplary embodiments in drawings schematically and will be described with reference to the drawings by way of example:

1 shows a first embodiment of the sensor arrangement with layered construction, FIG. 1 a shows a second embodiment of the sensor arrangement with different partial areas and layered construction,

FIG. 2 shows the one sensor arrangement with a layered structure, FIG.

3 to 6 show embodiments of carriers,

FIGS. 7 to 11 show a sequence of layers which form the wall of the measuring chamber or sensor arrangement,

12 and 13 show further embodiments of the measuring chamber consisting of different layers,

14 shows a detailed view of a connecting web,

15 shows different embodiments of measuring chambers,

16 to 18 show a possibility of fixing the carrier,

19 shows a further embodiment of the sensor arrangement,

FIG. 20 is a sectional view of a carrier; FIG.

21 shows an embodiment of the sensor arrangement with a plurality of different carriers,

22 and 23 show a layered sensor arrangement with a fixing layer,

FIGS. 24 and 25 show arrangements of the sensors on plug-in cards, 26 and 27 show embodiments of the slots on drums,

Fig. 28 and 29 show arrangements of the sensors on plug-in cards with a layered structure and

Fig. 30 shows a garment with a sensor arrangement according to the invention.

1 shows a schematic representation of a first embodiment of the sensor arrangement 10 according to the invention. The sensor arrangement 10 has a measuring chamber 3 which is of cuboid design and is delimited on five of the six surfaces by a wall 31 of a housing of the sensor arrangement 10. On the sixth surface of the cuboid measuring chamber 3, an opening is formed on the end face 36 of the measuring chamber 3, which connects the measuring chamber 3 with the surroundings of the sensor arrangement 10 or is placed on a measuring object. The sensor arrangement 10 comprises a sensor 4a, which is arranged within the measuring chamber 3 at the surface of the cuboid measuring chamber 3 opposite the opening of the measuring chamber 3. The sensor arrangement 10 further comprises a further sensor 4b, which is likewise arranged on the surface of the parallelepiped-shaped measuring chamber 3 opposite the opening in the surroundings of the sensor 4a and determines the content of at least one substance within the measuring chamber 3. The sensor 4a and the sensor 4b are readjusted by a processing unit 40 to which the detected measured values of the sensor 4a and of the sensor 4b are supplied. The processing unit 40 is connected in this embodiment via an electrical line 6 respectively to the sensor 4a and the sensor 4b. The content of the substance within the measuring chamber 3 determined by the sensor 4a is evaluated by the processing unit 40 and set, for example, in relation to the content of a further substance determined by the further sensor 4b. The sensor assembly 10 has a layered structure. Thus, the sensor arrangement 10 comprises four layers each consisting of a carrier 22a, 22b, 22c and 22d, which form the wall 31 of the measuring chamber 3.

In an optional embodiment it is provided that the measuring chamber 3 comprises a humidity sensor 2 or that the further sensor 4b is designed as a moisture sensor 2, with which the moisture within the measuring chamber 3 can be measured. The content of the substance within the measuring chamber 3 determined by the sensor 4 a can then be set by the processing unit 40 in relation to the determined humidity of the moisture sensor 2 and by means of which the content of the substance within a measuring object can be normalized or determined. The sensor arrangement 10 has a layered structure in the second embodiment shown in FIG. 1a. The sensor arrangement 10 has four layers each consisting of a carrier 22a, 22b, 22c and 22d, which form the measuring chamber 3. The layers have different recesses and thus form a number of subregions 34a, 34b, 34c of the measuring chamber 3. The measuring chamber 3 is divided into three sections 34a, 34b and 34c. In the partial region 34a, a sensor 4a is arranged on the cover surface of the partial region 34a opposite the opening of the measuring chamber 3. In the subregion 34b, a sensor 4b on the cover surface is likewise arranged in the region of the wall of the subregion 34b. In the partial area 34c, the sensor 4c is arranged. The sensors 4a to 4c are each arranged on different carriers 22a to 22c and thus on different layers of the measuring chamber 3. The partial regions 34a, 34b,... Are separated from one another by means of gastight webs 39, which are not permeable to gas during the period of the measurement. The extent of each portion 34a, 34b, 34c is different deep and may have identically formed or different sensors 4a to 4c.

When the measuring chamber 3 is placed on the object to be measured, the subregions 34a, 34b,..., In turn, separate submeasure chambers separate from each other in which different or identically formed sensors 4a to 4c can be arranged and so identical or different substances or gases are detected can.

Each subregion 34a, 34b,... Advantageously has a cross section with a width between 1 mm and 6 mm and / or a length between 1 mm and 6 mm. Further advantageously, the distance of the sensors 4a, 4b, from the end of the partial regions 34a, 34b, ... 0.2mm to 2mm amount.

Each carrier 22a to 22d may optionally consist of different carrier materials, wherein advantageously semiconductors and ceramic carriers can be combined and these can also be applied to a common carrier.

For example, gases or particles can be measured magnetically or electrically in separate partial regions 34a to 34c. The partial regions 34a to 34c or recesses may also be formed as continuous pores 44 in the parts or all carriers 22a to 22d and the gas pass through these pores 44 of the material into a higher plane to a sensor 4 farther from the measurement object. Such a design of the carrier 22a to 22c as a separating column layer (L) or as Separation column makes it possible further by different pore diameters of the layers or subregions or by arrangement of slots or channels to achieve a slowing down and / or acceleration of the particles and or substances and thus optionally to achieve a separation of the individual constituents of a gas or the individual substances.

FIG. 2 shows a further embodiment of the sensor arrangement 10. The sensor arrangement 10 has a layer-like construction, wherein the measuring chamber 3 is designed as a separation column. The measuring chamber 3 in each case comprises different sensors 4a to 4d in different layers. The sensors 4a to 4d are each arranged on carriers 22a to 22d, which are arranged one above the other and thus span different levels with sensors 4a, 4b,...

The sensors 4a to 4d can perform different measurements or detect different substances and gases or even the same substances and gases. As a result of the ever better manufacturing processes and the associated reduction in the layer thicknesses of the layers, it is possible to join layers with a thickness of from pm to mm as carriers 22. This results, for example, in a nanometer or micrometer-sized separation column, which in its entirety is thick for the purpose of mechanical stability.

The thickness of the layers, ie the thickness of the respective carriers 22a, 22b, .. of sensor arrangements 10 according to the invention is preferably less than 3 mm, preferably less than 1 mm, particularly preferably less than 400 pm.

For example, the distances of the sensors 4a, 4b,... From the measurement object can be defined by the defined predetermined thicknesses of the carriers 22a to 22d. As shown in FIG. 2, a macroscopic aligned recess 45 can be provided, via which the gas or the substance passes to the sensors. Alternatively, however, the pores 44 of the carrier body 22 itself serve as a recess or as channels and thus pass the gases or substances from one layer to the next.

Alternatively, the gases or substances can also be measured along an aligned recess 45 visually on several levels. Thus, the sensors 4a to 4d of Fig. 2 may also be optical sensors. In the recess 45 of each carrier 22a, 22b,..., A light source and / or a radiation source with a predetermined spectrum, in particular an LED lamp, can be arranged. The light source or radiation source is then along the diametrical course of the recess 45 on the opposite Inner surface of the recess 45 of the respective carrier 22 directed. The optical sensor 18 is arranged on the carrier 22 diametrically along the recess 45 with respect to the light source and directed to this.

The spectra of the optical sensor 18 and the light source or radiation source overlap in an overlap area. The overlapping area is chosen such that the absorption or reflection in the presence of the substance in the recess 45 is increased or reduced in relation to the absorption or reflection in the absence of the substance in the overlap region and so a substance or gas can be detected or measured in a layer , Furthermore, the wavelength of the light source or of the radiation source can optionally wobble, ie fluctuate by a defined mean, in particular between 2 and 40 nm.

The velocity of gases varies depending on the particle and chemical composition. For example, the gas cyclobutene C ₄ H ₆ differs from the gas cyclopropane C ₃ H ₆ by an additional carbon atom. By virtue of this difference in carbon and the difference in the propagation velocity caused thereby, the concentration of both gases can be determined by installing two identical sensors 4a, 4b at different distances from the measurement object in the measuring chamber 3 (FIG. 1). Due to the known difference of the distance of the sonoren or the sensor height difference, the height installation on the part of the measuring chamber 3 to the measuring object is no longer necessary for calculating the propagation speed. At different distances with different sensors 4a, 4b this makes it easier to measure faster gases or gas components as a result of the greater distance and gases and / or particles with a slower spread can be measured closer to the measurement object. The advantages lie in the easier measurement and more accurate determination of the propagation velocities and the ability to measure even volatile or decaying substances easier.

As a result of the measurement by means of sensors 4a, 4b, ... with different distances to each other, the determination of the composition of the substance is easily possible by smaller differences in the measured propagation velocity, can be determined at a greater distance. The distance of the sensor to the measurement object need not be known as long as the height difference of the sensors 4a, 4b,... Is known to one another. FIGS. 3 to 5 show further embodiments of the sensor arrangement 10. The measuring chamber 3 is formed from different carriers 22a, 22b,..., Which are stacked like a building block and connected to one another. The carriers 22a, 22b, ... may have different shapes or be formed the same.

FIG. 5 shows an advantageous carrier 22 with sensors 4a to 4d; such a layer is also called sensor layer (A). By means of two identical sensors 4a, 4b and 4c and 4d or moisture sensors 2a and 2b on both sides of the carrier 22a, 22b, ..., depending on the permeability of the carrier 22a, 22b, ... for certain particles or gases or Substances that are determined by measuring the concentration and time of entry and the concentration of the exit. As a result of defined pore sizes and or obstacles can be clearly concluded that the particle and / or gas and or the substance. The result is a separation column measuring chamber, which, depending on the number and thickness of the carrier 22a, 22b, ... and pore diameter, any gas or particles or material can detect. Alternatively, the sensor layer (A) in addition to or instead of the sensors 4a, 4b, ... have a temperature sensor.

As shown in FIGS. 3 to 6, each of the carriers 22a, 22b,... May have contact electrodes 37 which completely penetrate it and establish the contact between the individual carriers 22a, 22b, Meter allows. The contact electrodes 37 may have a circular cross section and may be arranged at the edges of the measuring chamber 3, which is rectangular or circular in cross section. Alternatively, the contact electrodes 37 may also limit a side wall of the measuring chamber 3 or be arranged on this side wall or be embedded in the wall 31 of the measuring chamber 3. A carrier 22a, 22b, ... with such contact electrodes 37 is also referred to as a contact layer (E).

As shown in FIG. 6, as a result of the structuring of the surface of the carrier, cavities of different heights are created, which can be filled with one or more materials 48. For example, these materials 48 may react with the fabric or gas or have a retarding or accelerating effect on their rate of propagation. The material 48 may be a powder or powder or jelly or granules or sand or mixtures thereof. The material 48 can optionally also be arranged in the pores 44 or louvers of the carriers 22a, 22b,.... FIGS. 7 to 11 show a plurality of successive carriers 22a to 22e or layers of a further embodiment of the sensor arrangement 10. Measuring chamber 3 or parts of the measuring chamber 3 are stacked in several layers. These layers or supports 22a to 22e may be porous or consist of a continuous material and / or include slots. Through these slots and / or continuous porous, in particular with holes, provided layers, gas diffuses into the next layers and thus reaches other sensors 4a to 4f. Each subregion 34a to 34e of the measuring chamber 3 may consist of a different material or a different material composition, for example to vary the pore size from layer to layer and thus to effect a filter property and / or barrier for certain particles and / or gases. It is advantageous if the layers or the carriers 22a, 22b,... Have a common frame and thus that the particles, substances or gases can not escape from the measuring chamber 3. Furthermore, it proves advantageous if each layer behind the sensor 4a, 4b,... Is filled with an insulator, in particular air, since then the temperature of one layer seals the following layer or the following sensors 4a, 4b,... unaffected. Thus, the sensor 4a, 4b, for example, by a heater or a Peltier element can be brought to temperature, without affecting the sensors 4a, 4b, ... in deeper layers.

In the embodiment shown in FIGS. 7 to 11, measurement takes place on three levels and a carrier 22a designed as a spacer layer (Q) for the measurement object (level 0, FIG. 7) and a cover layer (level 4, FIG. 11) delimit the measuring chamber 3, which can optionally be divided into several subareas. The individual layers (level 0 to level 4) or the carriers 22a to 22e are arranged one above the other in stacked layers. In level 1 (FIG. 8), which follows at level 0, where the carrier 22b is formed as a sensor layer, the sensors 4a, 4b are arranged on narrow webs or constrictions (FIG. 14) and therefore of the remaining material Measuring chamber 3 and the carrier 22b heat decoupled. In level 2 (FIG. 9) or support 22c which follows on level 1, the sensors 4c and 4d are also contactable only by webs and thus thermally insulated. On level 3, that is to say the carrier 22d (FIG. 10) designed as sensor layer (A), which follows on level 2, the sensors 4e to 4k are not connected to the wall 31 by narrow webs, but are more widely accessible. The cover layer on level 4, that is to say the support 22e, (FIG. 11), closes the measuring chamber 3 and can optionally also include sensors 4a, 4b,... Temperature sensors and / or moisture sensors 2. The spacer layer (Q) may for example be made of a hard material best and incompressible to the distance between two layers or carriers 22a, 22b, ... and / or the distance between the sensors 4a, 4b, ... to the end wall 36 exactly and keep it constant.

Optionally, in the individual carriers 22a, 22b,..., A plated-through connection can take place in order to transmit signals from one level to another level. For the stacking, for example, pins or rods can be used.

The via or the contact electrodes may be formed, for example by conductive powder that is heated and thus creates connections. Optionally, one or more layers or carriers 22a, 22b, ... may be made of optical layers, such as silicate or glass, to facilitate optical interactions or surveys. For example, coatings are also possible which act as mirrors or lenses.

Optionally, the measuring chamber 3 may be arranged axisymmetric and divided into two or more subregions 34a, 34b, .... One side can be heated and the other side cooled or maintained at different temperature levels. For example, this can be done by a Peltier element arranged in the measuring chamber 3 or on a carrier 22, which heats one side and cools the other side.

FIGS. 12 and 13 show further embodiments of the sensor arrangement 10 according to the invention. The carriers 22b and 22d are formed the same and form a spacer layer (Q). The spacer layer (Q) has a defined thickness or height and is made of a stiff material, whereby the distance of the spacer layer (Q) adjacent carrier 22a and 22c remains constant even under the influence of pressure. The carriers 22a and 22c are formed as sensor layers (A).

As shown in Fig. 12, the carriers 22a and 22c may have projections 41 on which the sensors are then arranged. Alternatively, the carriers 22a and 22c may also have recesses 42, as shown in FIG. Through the recesses 42 or elevations 41, the distance of any arranged on the recesses 42 or elevations 41 sensors can be specified and varied.

Alternatively, the carriers 22 may also have constrictions or connecting webs 43 (FIG. 14) around the region of the carrier 22 on which a sensor 4a, 4b, is thermally separated from the rest of the carrier 22 and to prevent unwanted heating or cooling.

FIG. 15 shows different embodiments of partial areas 34a to 34c in a detailed view. The different partial regions 34a to 34c have different expansions relative to the end wall 36 of the measuring chamber 3. The sensors 4 a to 4 c are each arranged in the subregions 34 a to 34 c and have a different distance from the end wall 36. Due to the different extent of the subregions 34a to 34c, for example, a different saturation behavior in the subregions 34a to 34c can be achieved and thus a different amount of the substances to be measured can be accumulated in the subregions 34a to 34c or at the same speed with which the substance is applied to the subsections 34a to 34c Subdivided 34a to 34c is a longer measurement period can be realized without saturation in the measuring chamber 3 and the partial areas 34a to 34c to achieve. Furthermore, each subregion 34a to 34c can be designed for a separate application and thus allow several measurements simultaneously

16 and 17 show a possibility of fixing the carrier 22. As shown in Fig. 16 and

For example, as shown in Figure 17, a carrier 22a can be attached to another carrier 22b by means of a clamping member 46, e.g. be attached via a weave or pressing. FIG.

18 shows an alternative attachment in which the layered supports 22a, 22b are pressed together via the clamping element 46. The clamping element 46 may, for example, as shown in Fig. 18, be screwed to a counter-plate 47.

By a clamping element 46 surrounding the supports 22a and 22b on all sides, a sealing of the side edges to the environment can also be achieved. Alternatively, it can be provided that the carriers 22a, 22b,... Are fixed to one another by means of a seal, in particular via an immersion bath or a coating or spray, and are sealed off from the surroundings of the sensor arrangement 10. Alternatively, it can further be provided that the sensor arrangement 10 has a housing, for example a plastic housing, in which the sensor arrangement 10 or individual supports 22a, 22b, ... are glued or screwed to it.

FIG. 19 shows a further embodiment of the sensor arrangement 10 with ventilation ducts 48. The measuring chamber 3 comprises four partial areas 34a to 34d, which are separated from one another by gastight webs 39. The partial areas 34a and 34d each have a ventilation channel 48, which connects the respective partial area 34a, 34d to the surroundings of the sensor arrangement 10. For example, through the ventilation channels 48 Fresh air penetrate into the subregions 34a, 34d or emerge from the subregions 34a, 34d by way of a defined amount of, for example, already measured substance. Alternatively it can be provided that the wall 31 of the measuring chamber 3 and / or the webs 39 or parts thereof are permeable to gas or breathable.

FIG. 20 shows a sectional view of a carrier 22 transversely to the course of the layer or carrier 22. The carrier 22 is designed as a separating column layer (L) and has a meandering channel 27. The channel 27 allows a longer distance to be traveled for the gas or the substance in its propagation, whereby gases or substances with a high propagation velocity of gases with a low propagation velocity are separated. Thus, for example, per layer or support 22a, 22b, ... a separation column of, for example, 20cm can be realized.

Alternatively, a separating column can also be realized by means of a channel course in a plurality of carriers 22a, 22b, with a continuous channel extending between a plurality of layers or carriers 22a, 22b,. Furthermore, a plurality of separating column layers (L) can also be stacked on top of each other and the end of the channel or the pores of a channel 27 of a carrier 22a, 22b, ... open into the beginning of a channel 27 of another carrier. Thus, total lengths of e.g. one meter in length in a very small space.

FIG. 21 shows an embodiment of the sensor arrangement 10 with a plurality of different carriers 22a to 22f. The carriers 22a to 22f are stacked on top of each other and together form the measuring chamber 3. The carriers 22a and 22c are designed as sensor layer (A). On the carrier 22a is a sensor 4a on the carrier 22c is another sensor 4b arranged The carrier 22b and 22f have an equal thickness and are formed as an insulating layer (B). The carrier 22b thermally and electrically isolates the carrier 22a from the carrier 22c and thus prevents thermal and electrical interference of the sensors 4a and 4b. The carrier 22f thermally and / or acoustically and / or electrically isolates the measuring chamber 3 from the surroundings, thereby negatively influencing which, for example, shields any charge present on the measuring object. A selection of suitable insulating materials or insulating materials are listed in Table 1. Table 1: Insulating materials or insulating materials of the measuring chamber

The carrier 22e is formed as a filter layer (H). The filter layer (H) filters out a part of the substances emerging from the measurement object or holds this back in the first part of the measurement chamber 3, whereby its entry into the deeper layer of the measurement chamber 3 is prevented. The filter layer (H) may comprise, for example, a mechanical filter and / or sound filter and / or acoustic filter and / or ultrasound filters and / or higher-frequency filters.

Optionally, it can be provided according to the invention that a plurality of carriers 22a, 22b, ... stacked one above the other are each formed as a filter layer (H), which have different filter properties. Thus, for example, the deeper the filter layer (H) lies, a finer filtration can take place in order to allow only certain diameters of particles, gases and substances to reach the deeper layers or selected sensors 4a, 4b,... FIGS. 22 and 23 show a further embodiment of a layered sensor arrangement 10 according to the invention with a carrier 22c designed as a fastening layer (J). The carrier 22c has a number of fasteners 49, with which the attachment layer (J) can be attached to the sensor assembly 10 or an essgerät. The carrier 22c or the attachment layer (J), projects laterally beyond the further carriers 22a, 22b, and 22. If, for example, the carriers 22a to 22d are fastened to one another by gluing, the measuring chamber 3 formed from the carriers 22a to 22d can be detachably fastened to other layers or measuring devices or the sensor arrangement 10 by screws, for example, by means of the fastening layer (J).

Figs. 26 and 27 show alternative embodiments of the sensor assembly 10. The sensors 4a, 4b, 4c, 4d, and the humidity sensor 2 are disposed on a shelf, in this embodiment a drum. The drum or the insert can then be plugged into the measuring chamber 3 in on the supports 22 formed corresponding receptacles. The arranged on the slot sensors 4a to 4d then protrude into the measuring chamber 3 and can detect the substances located in the measuring chamber 3. The insert can for example be pressed into the measuring chamber 3 or on the carrier 22 or held by spring force and / or, preferably by gluing, chemically fixed. By providing several different slots with different sensors, a quick change of sensors can be done without having to change the entire measuring chamber 3.

Alternatively, the bays can be formed as plug-in cards 1 10. As shown in FIGS. 26 and 27, these plug-in cards 110 may include a plurality of sensors formed on a carrier 22 and a board, respectively. In FIG. 26, three sensors 4a, 4b, 4c are formed on the plug-in card 110, the electrical contacts of which open into connection contacts 11.

When inserting the plug-in cards 1 10 in the measuring chamber 3 and on the carrier 22, the connection contacts 11 1 are connected to the lines 6, which lead to the processing unit 40. By selecting suitable sensors 4a, 4b,... On the individual plug-in cards 110, each plug-in card 110 can be adapted to the respective intended use or to the desired measurement. It can also be provided that a plurality of receptacles are provided on the carriers 22 or in the measuring chamber 3 or on each carrier 22, so that a plurality of plug-in cards 1 10 can be placed simultaneously in the measuring chamber 3 and analogously to those on the carriers themselves arranged sensors 4a, 4b, ... span multiple levels of sensors. The plug-in cards 1 10 can for example be pressed into the measuring chamber 3 or held by spring force and / or, preferably by gluing, be chemically fixed.

In a further embodiment, not shown, of the sensor arrangement 10, the sensor arrangement 10 according to the invention can be expanded by two contact electrodes 37, which are arranged in at least one wall 31 of the measuring chamber 3. In this case, the contact electrodes 37 are preferably arranged on the end face 36 of the surface of the measuring chamber 3 facing the surroundings, which is placed on the object to be measured. In the mounted state of the sensor arrangement on the measurement object, the electrodes allow an impedance measurement over the measurement object.

In Fig. 28 and 29, another embodiment of the plug-in card 1 10 is shown. The plug-in card 110 consists of three carriers 22a to 22d which are glued or fused together. The respective sensors 4a to 4c are arranged on the carriers 22a to 22c, and the connection contacts 11 are arranged on the carrier 22d at which the plug-in card into the measuring chamber 3 is introduced and connected to the electrical lines arranged there.

In Fig. 30 is a garment 300 according to the invention, in this embodiment, a T-shirt is shown schematically. The garment 300 comprises a number of sensor arrangements 10 according to the invention. The sensor arrangements 10 are applied to a flexible film 301, which is attached to the T-shirt by means of an adhesive layer or via a seam. The sensor assemblies 10 are respectively facing the skin of the user with the end wall 36 of the measuring chamber 3 so that they rest against the skin when the user wears the T-shirt on the body. The film 301 may preferably be in the form of a silicon wafer with a thickness of less than 100 pm, in particular 75 μm.

Optionally, the garment (300) may comprise a gel or superabsorbent, such as airgel, with which sweat and liquids of a user are absorbable, the superabsorbent of which the gel is advantageously disposed around the sensor assembly 10 so as to perspire or effectively from the sensor assemblies 10 can be kept away and the measurement be disturbed by entering large amounts of liquids or sweat in the measuring chamber. Advantageously, attached to the garment 300 sensor assembly 10 may have a special transition layer covering the measuring chamber 3 and the sensor assembly 10 and is not permeable to detergent and water and surfactants but permeable to the substances to be measured, so that the garment 300 in the washing machine can be washed, the sensors 4a, 4b, ... the measuring chamber 3 but not destroyed. Substances for which the transition layer is impermeable are: linear alkylbenzene sulphates (LAS), secondary alkanesulphonates (SAS), fatty alcohol sulphates (FAS), and methylester sulphonates (MES) and nonionic surfactants, eg fatty alcohol polyglycol ethers (FAE) and sugar surfactants, wash alkalis, ...

Another aspect of the invention provides that a sensor arrangement 10 according to the invention is contained in a wristwatch. The sensor assembly 10 is then arranged with the end wall 36 of the measuring chamber 3 such that it rests on the skin of the user and forms a measuring chamber 3 in the applied state.

A further application of the sensor arrangement 10 according to the invention provides that the sensor arrangement 10 is arranged in a fastening band, in particular a bracelet or chest strap or ring or collar or headband, for attachment to the body, in particular the arm, the chest or the legs of a human. The fastening tape has a fixing agent, e.g. a Velcro strap and a, preferably stretchable, band with which the fastening strap can be fastened to the body of the user. This allows easy and constant monitoring of patients, athletes and other people. When trained as a ring and fixed bands can be used with fixed sizes.

In the following, further types or designs of carriers 22a, 22b,... Are described that can be combined in different sequences with one another in the layered structure of the sensor arrangement 10, depending on the requirements of the application:

A carrier 22a, 22b,... Designed as a sensor layer (A) may, for example, consist of a ceramic, silicon or other materials and has at least one sensor arranged on the carrier 22a, 22b,.

Furthermore, it can be provided that at least one of the carriers 22a, 22b,... Is designed as a separating layer (C), wherein the separating layer (C) is designed such that the substance is separated from the vapor or vapor and / or several substances are separably separated from each other. For example, a carrier 22a, 22b,... Or the separating layer (C) may comprise or consist of palladium. If the palladium is then heated, for example by an adjacent temperature layer (I), hydrogen diffuses out of the gas mixture almost without resistance. The palladium thus acts in the separation layer (C) as a catalyst for molecular compounds in order to be able to measure them more easily. Furthermore, by the temperature layer (I), the measuring chamber 3 are heated and burned out germs or other harmful substances or killed.

A further optional embodiment of the carriers 22a, 22b,... Provides that the carrier 22a, 22b,... Is designed as an actuator layer (D). The actuator layer (D) has a defined opening, which is covered by a movable element. The opening may, for example, be in the form of a macroscopic recess 45 passing completely through the respective carrier 22a, 22b,..., Which is formed by a movable element consisting of a thermomorphic material, e.g. a shape memory alloy, is completely covered. The shape memory alloy is configured such that it completely covers the recess 45 at room temperature and undergoes a defined deformation when heated by a heating coil arranged in the actuator layer (D) and thus completely or partially releases the opening or the recess 45. Alternatively, it can be provided that the movable element is also heated by the temperature of the measurement object and only after the end wall 36 of the measurement chamber 3 has been applied to the measurement object assumes the temperature of the measurement object and thus opens the measurement chamber 3 or the opening or recess 45 ,

Furthermore, optionally, the opening of the actuator layer (D) through a cooling element, for example a Peltier element, is cooled down again after a defined measurement period and thus closes the opening again. Likewise, the opening can be opened analogously even with a cooling of the thermomorphic movable element. A further embodiment of an actuator layer (D) provides that in a carrier 22a, 22b,... By means of the movable element, an opening or closing mechanism similar to a valve is formed and, for example, open and close ventilation channels leading into the surroundings of the sensor arrangement 10 and generate such a gas flow or liquid flow. Shape memory alloys consisting of cryogenic materials such as NiTi (nickel-titanium, nitrinol), NiTiCu (nickel-titanium-copper) where the transition temperature is determined by the nickel content. Other materials include alloys of CuZn (copper-tin), CuZnAI (copper-tin aluminum), CuAINi (copper-aluminum nickel), FeNiAl (iron-nickel aluminum), FeMiSi (iron-manganese-silicon); ZnAuCu (zinc-gold, copper), or other known from the prior art thermobimorphic elements such as bimetallic strip.

Optionally, a support 22a, 22b, .. designed as a contact layer (E) may also have a number of electrical contact surfaces or contact electrodes 37. The contact surfaces are arranged, for example, respectively on the underside and the upper side of the carrier 22a, 22b,... And connected by means of an electrical line. The contact surfaces can thus produce an electrical contact between two further layers or the contact layer (E) and adjacent further carriers 22a, 22b,. Furthermore, by the positioning of the contact surfaces on the side of the respective layer or on projections protruding beyond the other supports 22a, 22b, .., it is possible to make contact with other electrical components of the sensor arrangement.

A further optional embodiment of the carriers 22a, 22b,... Provides that the carrier 22a, 22b,... Is designed as a temperature layer (i). a temperature layer (I) may comprise a heating or cooling element, in particular a heating coil or a Peltier element which are arranged on the support 22a, 22b,..., in order to fix the respective support 22a, 22b,. I) adjacent supports 22a, 22b, ... to heat or cool to a temperature or to keep the temperature of the supports 22a, 22b, ... or the measuring chamber 3 constant and thus to reduce measurement accuracies due to temperature fluctuations. Alternatively it can be provided that the carrier 22a, 22b, ... or the temperature layer (I) has channels with a medium flowing in the channels and regulates the temperature via the medium flowing in the channels. Furthermore, optionally each layer of the measuring chamber 3 and / or the carriers 22a, 22b, ... have a different thermal conductivity and thus the heat flow or the heat storage and insulation can be selected depending on the requirements.

For example, at least one layer or carrier 22a, 22b,... Completely or individual parts thereof may have a thermal conductivity equal to that of the substance, particle or gas to be measured. So is a homogeneous heat flow and a achieved constant temperature within the layers and very simply ensures that there is no or targeted turbulence in the substance or the substance mixture.

Optionally, it can be provided that at least one of the carriers 22a, 22b,... Is designed as a distribution layer (F). The distribution layer (F) is designed such that a plurality of measurement signals of the sensors 4a, 4b,... Are bundled into a sum signal, or a measurement signal is distributed over a plurality of lines. In this case, for example, a signal distribution or signal collection can take place by means of multiplexers or demultiplexers arranged on the carrier 22a, 22b,.

Furthermore, it can be provided that at least one of the carriers 22a, 22b, ... is designed as a therapeutic layer (K). A therapeutic layer (K) contains at least one therapeutic substance with which the carrier 22a, 22b,... Coated, coated or in this is stored. When applying the measuring chamber 3 then the delivery of the substance takes place either in the measuring chamber 3 and then via the measuring chamber 3 to the user or the therapeutic layer (k) is arranged as the lowest layer of the measuring chamber 3 and thus lies directly on the skin of the user and so can deliver the therapeutic substance to the user. The therapeutic substance may in particular be a care substance or barrier opening substance or a substance which stimulates the skin to perform certain reactions or to release substances. Optionally, it can be provided that a channel, in particular etched, runs through the therapeutic device, through which the therapeutic substance can be conducted to the surface of the respective carrier 22a, 22b,... Or into the measuring chamber.

Optionally, at least one of the carriers 22a, 22b,... Can be designed as an electronic layer (M). The electronic layer (M) comprises electronic circuits and / or components e.g. a measuring electronics and / or evaluation electronics and / or a memory and / or a processor and / or a voltage source, in particular a battery, and / or a wafer blank. By means of a wafer blank, electrical components from a third party, such as e.g. be integrated into the structure of a supplier.

Optionally, at least one of the carriers 22a, 22b,... Can be designed as a measuring layer (N). The measuring layer (N) comprises a measuring electrode grid and a number of holes passing completely through the carriers 22a, 22b,. The holes are each adapted to the diameter of individual selected atoms or molecules and only slightly larger or equal to this. The measuring electrode grid is applied to each of the holes when a molecule or atom or particle is the same Dimensions such as the respective hole has passed the hole, an electrical contact in the measuring electrode grid is closed and / or the permittivity and / or conductivity of the electrode line or the electrode grid is changed and the respective atom or molecule is detected. The holes of the measuring layer (N) can be produced for example by etching processes or lasers. Furthermore, the material, for. As airgel or foams, the respective carrier 22a, 22b, ... be porous or have a base porosity corresponding to the respective molecular or particle sizes. Alternatively, the support material, such as Al0 ₂ , heated in the production and then bombarded with those atoms or molecules for which the layer should be permeable. The thinner the respective carrier 22a, 22b,..., The more accurate the resulting holes become. Furthermore, a combination of a porous material with the bombardment, laser or etching is possible to form the holes in the carriers 22a, 22b,. In this way, sieve layers or the filter layers (H) can be produced.

Optionally, at least one of the carriers 22a, 22b,... May be formed as a bonding layer (O), the bonding layer (O) or the carrier 22, 22b,... Comprises a binding substance, in particular an activated carbon, with which the substance or Volatile substances can be bound and are kept available for the evaluation or measurement or for further uses.

Optionally, it is provided that at least one of the carriers 22a, 22b,... Is designed as an application layer (P). The application layer (P) comprises an electromechanical vibration generator or an electromechanical transducer. By means of the electromechanical vibration generator or the electromechanical transducer, the respective carrier 22a, 22b,..., The carrier 22a, 22b,... Adjacent layers and / or the entire measuring chamber 3 can be vibrated. The vibrations then microorganisms, viruses or unwanted substances from the measuring chamber 3 can be applied. This is very effective especially for adjacent layers that are sensitive to heating and are destroyed by high temperatures.

Optionally, it can be provided that at least one of the carriers 22a, 22b,... Is designed as a manipulation layer (R). The manipulation layer (R) in one embodiment comprises a ferrite layer with coil. This causes a translation of the voltage according to the number of turns whereby an amplification of the voltage signal takes place. Furthermore, it can be provided that in the manipulation layer (R) is a solvent is contained, which is filled during manufacture or introduced by means of a cartridge in the view. By way of pores 44 arranged in the respective carrier 22a, 22b,..., The gas penetrates to the solvent, but the solvent can not escape. The gas evaporates into the area of the solvent and is mixed with this. By reacting the gas with the solvent, individual substances can be deliberately dissolved out, or another gas which is formed by reaction of the old gas with the solvent, for example, can be passed on to a following sensor layer (A) and then analyzed there.

Optionally, it can further be provided that at least one of the carriers 22a, 22b,... Is designed as a mixed layer (S). The mixed layer (S) comprises, for example, channels with a defined medium or channels which are connected to the surroundings of the measuring chamber 3. Ambient air can be supplied through the channels, the stream of the substance being superimposed with a particle stream of the media arranged in the mixing hit. Optionally, for example, arranged in the channel changeable designed as a plug filter set a targeted influx of ambient air and prevent unwanted substances from entering into the measuring chamber 3.

Optionally, it is provided that at least one of the carriers 22a, 22b,... Is designed as a covering layer (U). The cover layer (U) is gas-tight or liquid-tight and separates two adjacent layers gas-tight or fluid-tight from each other. The cover view (U) can be, for example, the layer far away from the measurement object.

In an optional embodiment, one of the carriers 22a, 22b,... Is designed as a spring layer (V). The spring layer (V) made of a flexible material and is deformable during assembly of the individual layers. This makes it possible to compensate for any manufacturing tolerances and to compensate for unevenness or uneven thicknesses of individual layers or parts thereof in order to achieve a flat and straight structure of the layers in the direction of the end wall 36. Furthermore, the spring layer (V) can avoid damage that occurs due to excessive pressure or stresses when applying the measuring chamber 3 on the measurement object or when compressing, pressing or screwing the individual layers to the sensor assembly. Optionally, it can be provided that at least one of the carriers (22a, 22b,...) Is designed as a logic layer (W). The logic layer (W) is designed to be insulating, this insulation either by recesses which are produced by means of shooting or melting, the underlying or overlying layer or carrier 22a, 22b, .. connects. The logic layer may be widely doped at certain locations, or may include conductive particles. For example, a sensor layer (A) with many sensors 4a, 4b,... Can then be produced by the recesses, but only individual sensors can be connected to an electronic layer or the evaluation unit 40 for the evaluation of the measurement, as required. The logic layer (W) may for example be particularly thin and be realized for example by vapor deposition.

Optionally, at least one of the carriers 22a, 22b,... Is designed as an energy layer (X). The energy layer (X) has a voltage and / or energy source, in particular a battery or an accumulator. Thus, the energy supply of other layers can be ensured and eliminates an external power supply arranged outside the layers.

An alternative embodiment of the sensor arrangement 10 provides that at least one of the carriers 22a, 22b,... Consists of a biocompatible material. Thus, for example, the support 22a, 22b,... Facing the measurement object or the skin can consist of a biocompatible material and thus minimize or avoid irritation of the skin. Alternatively, the end wall 36 may be coated with a biocompatible material.

Optionally, it can be provided that the carriers 22a, 22b,... Comprise a self-cleaning coating, in particular have a coating, wherein the coating consists of silicon dioxide with nanometer-sized nubs, a high roughness or is formed as a wax layer with wax crystals.

Due to the layered structure, it is possible to manufacture the individual layers, eg the insulating layer, the filter layer and the sensor layer (A) in series on different machines. Depending on the intended use, the individual layers can then be stacked and connected. This creates a wide possibility of joining the layers or carriers 22a, 22b,... And, depending on requirements, of producing different measuring chambers 3, which are each tuned to one or more intended uses. Furthermore, it can be provided that at least one of the carriers 22a, 22b,... Or the sensor layer (A) consists wholly or partly of ALPHA iron, which is contacted with electrodes. In this embodiment, plastic properties of cubic body-centered metals, such as α iron, are used to determine carbon and nitrogen content in ranges of a few ppm and less. By measuring the real part of the initial permeability as a function of time after prior demagnetization of the sensors 4a, 4b, ... and / or the measuring chamber 3, the magnetic orientation effect of carbon in α-iron is measured.

Γ Δ,. ^'

1, 2.10 ^* ci,

L ('»). d 0 carbon concentration in at-pptn.)

^' Δμ.ν

5, 5.10 ^% c

_, μί ο) m

4 0 Stic fuel concentration in at-opm)

In this case, the permeability over time is measured at several points in time, it being also determined for the respective points in time how large the change Δμ of the permeability is compared to a preceding time, preferably with a constant time interval at the time of measurement.

This change Δμ depends on the change in the concentration of the substance to be measured in the region of the sensor 4a, 4b,... Relative to the last measuring time. For this reason, the total concentration of the substance in the sensor 4a, 4b,... Can be determined by summing the individual determined changes in concentration. The concentration changes further depend on an experimentally determined constant (see formulas above), on the characteristic of the measuring chamber 3 and on the maximum permeability of the material of the sensor 4a, 4b, ... at maximum saturation with the substance to be measured.

The concentration change c _[C] or c _[N] for carbon or nitrogen are determined using the two abovementioned formulas. By the above-mentioned procedure is also taken into account that the sensor in question has a non-vanishing permeability, even if no substance to be measured is in the range of the sensor.

The nitrogen of the ambient air can be determined, for example, at the beginning time and deducted accordingly, only to release the nitrogen of the To determine the object to be measured. The measurement of the magnetic aftereffect allows a simple determination of carbon and nitrogen concentrations.

A further embodiment uses non-dispersive infrared (NDIR) sensors, wherein by forming the integral of the permeability of the gas to be analyzed for infrared radiation over time and through peak area determination, the element or material and its concentration can be deduced.

Overall, it can be provided in all the measuring methods shown here that the sampling rate is adapted to the expected rate of change of the concentration. In the analysis of the evaporation of the skin, it is advantageous if a sampling rate in the range of more than 1 MHz, in particular more than 100 MHz is used.

Preferably, the structures fabricated on the respective supports 22a, 22b, ..., e.g. the sensors 4a, 4b, the electronic components, a spatial resolution of less than 100 nm, in particular between 4 nm and 32 nm.

As an alternative to the first to ninth embodiments shown in FIGS. 1 to 29, the measuring chamber 3 may also have other shapes, for example a bell, ball or pyramidal shape. The optional humidity sensor 2 may be configured as a sensor for detecting transepidermal water loss in the illustrated embodiments and may detect transepidermal water loss of a subject's skin. The sensor 4 or the sensors 4a, 4b, 4c,... Can be designed identically and detect the content of a single substance or be designed such that the content of a plurality of substances is determined. The sensor 4a or at least one of the further sensors 4b, 4c,... Can in the embodiments shown be a photomultiplier, in particular a micro photomultiplier, a gas sensor and / or a particle sensor and / or molecular sensor and / or an optical sensor and / or be a pH sensor.

The moisture sensor 2 can also be designed as a sensor for detecting the skin surface water. Preferably, the response speed of the humidity sensor 2 or the sensor for detecting the skin surface water is in the range of 0.5 ms to 1 ms, preferably between 1 ms and 200 ms. Skin Surface Water is the water that is on the skin surface. This changes depending on the temperature, sweating or can be applied externally, for example by creams or other substances on the skin. In order to be able to measure Skin Surface Water, a rapid response speed of the sensor is advantageous, otherwise the Skin Surface Water is mixed with the water leaving the test object or the skin or evaporated and can no longer be determined without error.

In addition, in the embodiments shown on the support 22 insulation, milling or louvers may be formed which cause a thermal separation of the sensors 4a, 4b, .. with each other and / or to the other sensors such as the temperature sensor or the humidity sensor 2.

Furthermore, the sensor arrangement 10 can have a timer or a timer with which the sequential scanning of the sensors 4a, 4b, 4c,... Of the humidity sensor 2 and / or the temperature sensor is enabled and coordinated. Furthermore, by means of the timer, the scanning of the individual sensors 4a, 4b, 4c .. be adapted to the gases or substances to be measured and the gases with higher propagation velocity or diffusion rate through the measurement object or the skin faster or before the gases with low propagation velocity or diffusion rate through the subject or skin.

The sensors 4a, 4b, 4c, .... may be designed as gas sensors, particle sensors or molecular sensors, wherein gas sensors known from the prior art, particle sensors or molecular sensors can be used. Preferably, the sensors 4a, 4b, 4c, ... are designed such that the following gases can be detected:

Ammonia NH ₃ , antimony hydrogen SbH ₃ , argon Ar, arsenic fluoride AsF ₅ , arsine AsH ₃ , bis (fluoroxy) perfluoromethane CF ₄ 0 ₂ , bismuthan BiH ₃ , boron trichloride BCI ₃ , boron trifluoride BF ₃ , bromochlorodifluoromethane CBrCIF ₂ , bromine chloride BrCl, bromodifluoroethylene C ₂ HBrF ₂ , bromodifluoromethane CHBrF ₂ , bromodifluorophosphane PBrF ₂ , bromothhene C ₂ H ₃ Br, bromoethine C ₂ HBr, bromofluoromethane CH ₂ BrF, bromoheptafluoropropane C ₃ BrF ₇ , bromopentafluoroethane C ₂ BrF ₅ , bromotrifluoroethene C ₂ BrF ₃ , bromotrifluoromethane CF ₃ Br, hydrogen bromide HBr, butadiene C ₄ H ₆ , butadiyne C ₄ H ₂ , butane-iso C ₄ Hi ₀ , butane-n C ₄ H ₁₀ , butene-1 C ₄ H ₈ , butene-2-cis C ₄ H ₈ , Butene-2-trans C ₄ H _a , butyne-1 C ₄ H ₆ , carbonylborane BH ₃ CO, carbonyl fluoride COF _2l carbonyl selenide COSe, carbonyl sulfide COS, chlorine Cl ₂ , cyanogen chloride CICN, chlorodifluoroamine NCIF ₂ , chlorodifluoroethane C ₂ H ₃ CIF ₂ , chlorodifluoroethene-2-1, 1 C ₂ HCIF ₂ , chlorodifluoromethane fluoromethane CHCIF ₂ , chlorodifluorophosphane PCIF ₂ ,

Chlorodifluorophosphorus oxide POCIF ₂ , chlorine dioxide CI0 ₂ , chloroethane C ₂ H ₅ Cl, chloroethene C ₂ H ₃ Cl, chloroethine C ₂ HCl, chlorofluoride CIF, chlorofluoromethane CH ₂ CIF, chloroheptafluoropropane-2 C ₃ CIF ₇ , chlorohexafluoropropane-1 -1, 1 , 2,3,3,3 C ₃ HCIF ₆ , chlorohexafluoropropane-2,, 1, 3,3,3 C ₃ HCIF ₆ , chloromethane CH ₃ Cl, chlorine monoxide Cl ₂ O, Chlorofluoroethane-1 -1 C ₂ H ₄ CIF, Chloropentafluoroacetone C ₃ CIF ₅ , Chloropentafluoroethane C ₂ CIF ₅ , Chloropentafluoride CIF ₅ , Chloropentafluoropropene-2-1, 1, 3,3,3-1 C ₃ CIF ₅ , Chlorotetrafluoroethane-1 -1, 1, 2.2 C ₂ HCIF ₄ , chlorotetrafluoroethane-2-1, 1, 1, 2 C ₂ HCIF ₄ , chlorotrifluoroethane-1-1, 1, 2 C ₂ H ₂ CIF ₃ , chlorotrifluoroethene C ₂ CIF ₃ , Chlorotrifluoromermanium, GeF ₃ Cl, Chlorotrifluoride CIF ₃ , Chlorotrifluoromethane CCIF _3, Chlortrifluorsiian CIF ₃ Si, Hydrogen chloride HCl, Chlorylfluorid CI0 ₂ F, Chloryltrifluorid CI0 ₂ F _3, Cyclobutane C ₄ H _8, Cyclobuten C ₄ H ₆ , Cyclopropane C ₃ H ₆ , cyclopropene C ₃ H _4, deuterium D _2, diazomethane CH ₂ N ₂ , diborane B ₂ H _6i dichlorodifluoromethane GeF ₂ Cl _2! Dichlorodifluoromethane CCI ₂ F _2i dichlorodifluorosilane CI ₂ F ₂ Si, dichlorofluoromethane CHCl ₂ F, dichlorofluorophosphane PCI ₂ F, dichlorosilane SiH ₂ Cl ₂ , dichlorotetrafluoroethane-1, 1 C ₂ Cl ₂ F ₄ , dichlorotetrafluoroethane-1,2-C ₂ Cl ₂ F _4i difluoroamine NHF ₂ difluorodiazine cis N ₂ F _2i difluorodiazine trans N ₂ F _2i difluorodioxide F ₂ _{O 2i} difluoroethane-1, 1 C ₂ H ₄ F _2i difluoroethane-1,2-C ₂ H ₄ F _2, difluoroethene-1, 1 C ₂ H ₂ F _2, difluoroethene-cis- 1, 2 C ₂ H ₂ F ₂ , difluoroethene-trans-1, 2 C ₂ H ₂ F _2, difluoromethane CH ₂ F _2, difluoropropane-1, 1 C ₃ H ₆ F _2i difluoropropane-2,2 C ₃ H ₆ F _2, dimethylamine C ₂ H ₇ N, dimethyldiazine cis C ₂ H ₆ N _2, dimethyldiazine trans C ₂ H ₆ N _2, dimethyl ether C ₂ H ₆ O, dimethyl peroxide C ₂ H ₆ 0 _{2 |} Dimethylpropane-2,2 C ₅ H _12, C ₂ H ₆ dimethylsilane Si, disilane Si ₂ H _{6 i} disilylmethane, CH _B Si _2i nitrous oxide N ₂ 0, dinitrogen trioxide N ₂ 0 _3, ethane C ₂ H _6, C ₂ H ₂ ethenone 0, ethyne C ₂ H ₂ , ethynylsilane C ₂ H ₄ Si, ethoxytrifluorosilane C ₂ H ₅ F ₃ OSi, ethylamine C ₂ H ₇ N, ethylene C ₂ H _4, ethylene oxide C ₂ H ₄ O, ethylmethyl ether C ₃ H ₈ 0 , Ethylnitrite C ₂ H ₅ N0 _2, ethyltrifluorosilane C ₂ H ₅ F ₃ Si, fluorine F _2, fluorobutadiene-2-, 3 C ₄ H ₅ F, fluorocane CFN, fluoroethane C ₂ H ₅ F, phosphorylthane C ₂ H ₃ F, fluoroformaldehyde CHFO, fluoromethane CH ₃ F, fluoronitrate FN0 _3, fluoroperchlorate FCI0 4i _{fluoropropane} -1 C ₃ H ₇ F, fluoropropane-2 C ₃ H ₇ F, fluoropropene-2 C ₃ H ₅ F, fluoropropene-3 C ₃ H ₅ F, hydrogen fluoride HF, formaldehyde CH ₂ O, gallane GaH _3i German GeH _4, germanium fluoride IV GeF _4, helium He, ³ He, heptafluoropropane 1, 1, 1, 2,3,3,3 C ₃ HF _{7 ,} Hexafluoroacetone C ₃ F ₆ O, hexafluorobutadiene-1, 1, 2,3,4,4-1, 3 C ₄ F _6, hexafluorobutin-1,1,1,4,4,4-2 C ₄ F _6, Hexafluorcyclobute n C ₄ F ₆ , hexafluoroethane C ₂ F _6, hexafluoromethanediamine CF ₆ N ₂ , hexafluoropropane 1, 1, 1, 2,2,3 C ₃ H ₂ F _6, hexafluoropropane 1, 1, 1, 2,3, 3 C ₃ H ₂ F _6, hexafluoropropane 1, 1, 1, 3,3,3 C ₃ H ₂ F _6, hexafluoropropane 1, 1, 2, 2, 3, 3 C ₃ H ₂ F _6, hexafluoropropene C ₃ F _6, hexafluoropropylene oxide C ₃ F ₆ O, hexafluorotrifluoromethylpropane 1, 1, 1, 3,3,3-2 C ₄ HF _9, iodine heptafluoride IF _7i hydrogen iodide H, carbon dioxide C0 _2i ³ C0 _2i carbon monoxide CO, krypton Kr, air dry methane CH _4, methanethiol CH ₅ , methylamine CH ₅ N, methylarsine CH5AS, methyl bromide CH ₃ Br, methylchlorosilane CH ₅ CISi, methylcyclopropane C ₄ H _8, ethylgerman CH ₆ Ge, methylnitrite CH ₃ NO ₂ , methylphosphine CH ₅ P, methylsilane CH ₆ Si, methylstannane CH ₆ Sn, methyltrifluoromethyl ether C ₂ H ₃ F ₃ O, methyl vinyl ether C ₃ H _e O, monochlorosilane SiH ₃ Cl, neon Ne, nitrilotyl chloride N0 ₂ Cl, nitrile fluoride N0 ₂ F, nitrosyl bromide NOBr, nitrosyl chloride NOCI, nitrosyl fluoride NOF, octafluorobutene-1-1, 1, 2,3,3,4,4,4 C ₄ F _8, octafluorocyclobutane C ₄ F _8, octafluoropropane C ₃ F _8, octafluorotetrahydrofuran C ₄ F ₈ O, Oxalic acid _dinitrile C ₂ N _2i ozone 0 _3, pentafluoroethane C ₂ HF _5i pentafluoromethoxyethane 1, 1, 1, 2,2-2 C ₃ H ₃ F ₅ O, pentafluoropropane 1, 1, 1, 2,2 C ₃ H ₃ F ₅ , pentafluoropropane-1 , 1, 1, 2,3 C3H ₃ F _5i pentafluoropropane- _1,1,3,3,3 C ₃ H ₃ F _5i perchloryl fluoride CIFO _3, perfluorobutane C ₄ F _10, perfluorobutene-2 C ₄ F _8i perfluorodimethoxymethane C ₃ F ₈ 0 _2, perfluoroethyl vinyl ether C ₄ F ₈ 0, perfluoroisobutane C ₄ F ₁₀ , perfluoroisobutene C ₄ F _8, perfluoroxysilane C ₃ F ₆ 0, perfluoroxetane C ₃ F ₆ 0, phosgene COCl ₂ , phosphonium chloride PH CI, phosphoryl chloride tetrafluoride PCIF ₄ , phosphorodibromotrifluoride PBr ₂ F _3, phosphorus pentafluoride PF _5i phosphorus trifluoride PF _3i phosphine PH _3i phosphoryl chloride POF ₃ _ phosphorodichlorotrifluoride PCL ₂ F _Si propadiene C ₃ H _4i propadienedione-1, 2-1, 3 C ₃ 0 ₂ propane C ₃ H _8, propene C ₃ H ₆ , Propyn C ₃ H ₄ , Radon Ra, Oxygen 0 ₂ , Oxygen Difluoride OF ₂ , Sulfur Bromine Pentafluoride SBrF _5> Sulfur Chloropentafluoride SCIF ₅ Sulfur dioxide S0 _2i sulfur hexafluoride SF ₆ , sulfur pentafluoride hypofluorite F ₅ SOF, sulfur tetrachloride SCI ₄ , sulfur tetrafluoride SF ₄ , hydrogen sulfide H ₂ S, selenium dioxide fluoride SeO ₂ F _2, selenium hexafluoride SeF ₆ , selenide H ₂ Se, silane SiH ₄ , silicon tetrafluoride SiF _4, nitrogen N _2, Nitric oxide NO, nitrogen trifluoride NF _3, sulfuryl fluoride S0 ₂ F _2, tellurium hexafluoride TeF ₆ , tellurium hydrogen TeH _2, tetraborane B ₄ H _10, tetrafluorodiborane B ₂ F _4i tetrafluorodimethyl _ether 1, 1, 1 ', 1' C ₂ H ₂ F ₄ 0 , Tetrafluoroethane-1, 1, 1, 2 C ₂ H ₂ F _4, tetrafluoroethane 1, 1, 2,2 C ₂ H ₂ F, tetrafluoroethene C ₂ F _4i tetrafluorohydrazine N ₂ F _{4 |} Tetrafluoromethane CF _4, tetrafluoropropene-2, 3,3,3 C ₃ H ₂ F ₄ , thionyl fluoride SOF ₂ , thiophosphorus chloride difluoride PSCIF _2, thiophosphorus trifluoride PSF _3i thiothionyl fluoride SSF _2, trichlorofluorosilane SiCI ₃ F, trifluoroacetonitrile C ₂ F ₃ N, trifluoroacetyl chloride C ₂ CIF ₃ 0, trifluoramine oxide NOF _3, trifluorobutane-1, 1, 1 C ₄ H ₇ F _3i trifluoroethane- _1,1,1 C ₂ H ₃ F _3, trifluoroethane-1,1,2 C ₂ H ₃ F _3, trifluoroethene C ₂ HF _3i trifluoroiodomethane CF ₃ I, trifluoromethane CHF _3, trifluoromethyldifluoromethyl ether C ₂ HF ₅ 0, trifluoromethylsulfurpentafluoride CF ₈ S, trifluoromethylsilane CH ₃ F ₃ Si, trifluoromethyltetrafluoroethylether-1, 1, 2, 2 C ₃ HF ₇ 0, trifluoropropane 1 , 1, 1 C ₃ H ₅ F ₃ , trifluoropropane-1, 2,2 C ₃ H ₅ F _3, trifluoropropene-3,3,3 C ₃ H ₃ F _3, trifluoropropyne-3,3,3-1 C ₃ HF ₃ , trifluorosilane SiHF _3, trimethylamine C ₃ H ₉ N, trimethylborane C ₃ H _g B, trimethylsilane C ₃ H ₁₀ Si, vinylacetylene C ₄ H _4, hydrogen-n H _2, hydrogen-p H _2i tungsten hexafluorideWF _6> xenon Xe , Tin tetr ahydride SnH _4,

In Table 2, in Column One, a selection of substances that may comprise the sensor 4 is shown, where Column Two shows the substances detectable therewith.

Table 2:

Substance 43 Measurable substance

• Moisture mixed with cobalt chloride

Silica gel (blue gel), which is at

Moisture in violet

or pink discolored. • salts

• conductive polymer

pH indicators (acid-base titrations) pH, e.g. Litmus, Bromthvmolblau or

Phenolphthalein.

Also biological substances usable:

Incorporation of red cabbage juice into the sensor

as a pH indicator.

Tea color depending on acidity: Will the

Black tea lemon juice added,

the color of the tea changes from

dark brown on light reddish brown.

Tea and / or red cabbage juice can by means of

Pipette applied and the water

evaporated. In consequence of the biological

Indicator selection is a direct contact

also possible with wounded skin.

e.g. Enzyme urease urea e.g. Platinum coil, NTC, PTC temperature

Carbon dioxide, acid-base indicator ammonia phenolphthalein

Fluorescence detection UV: UV (ultraviolet) phosphor LED (375 nm), PMT (425nm-550nm)

Light source at nitrogen

650 nm and 770 nm, PMT selective as

Detector in this area.

or

Ceramic metal oxides with Y-stabilized

zirconia (YSZ) which contains nitrogen 02-

high temperatures like 400 ° C and

detected over it.

High temperature selectors are necessary

like platinum, gold, paladium or others

Metal oxides. The voltage change

indicates the concentration of nitrogen.

e.g. Potassium Selective Valiomycin - PVC Na

membrane

HS ionophore:

3% by weight; softener

Disphenyl cresyl phosphate 67% weight

PVC 30% weight;

Execution: HS ionophore:

3% by weight; Plasticizer Tris (2-ethylhexyl phosphate has 67% weight

PVC 30% weight;

(by Störion can through

Potentiometric selection coefficient

other substances such as H +, Li +, Na +, K +,

Rb +, Cs +, NH4 +, Mg ² +, Ca ² +, Sr ² †, Ba + ²

etc can be determined.)

e.g. Na + selective PVC membrane with potassium

ionophores for K +

Micro: Electrogravimetry, this will add to the copper, lead silver, tin, nickel, zinc pores or around the filter

Cathode and an anode attached

preferably made of platinum.

PMT: 283.32nm and 405.78nm Pb

MOX (Metal Oxide Semiconductor) e.g. Zin (IV) - oxygen

oxide (Sn0 ₂ ) zinc oxide, titanium oxide or

organic semiconductor materials such as

PePTCDI

Infrared gas sensor; C0 ₂

Chemical gas sensor: coatings;

Polymer or heteropolysiloxanes

Pellistor, e.g. wound platinum wire hydrogen

embedded in ceramic pearl or silicon

with pm membrane, platinum electrodes

Enzymes (biochemical catalyst) Example Catalase: catalyzes the reaction

Group 1: oxidoreductases of two molecules of hydrogen peroxide too

• Group II: Transferases oxygen and two molecules of water and is thus at the degradation of reactive

• Group III: Hvdrolasen oxygen species involved. She needs

• Group IV: Lvases (synthases) heme iron (pronounced iron), it can be

• Group V: Isomerases detect iron deficiency.

• Group VI: Liqases (sufthetases)

Enzyme glucose oxidase (GOx), yeast glucose

and / or boronic acid,

Alkalis (oxides, soda-lime) hormones

PMT (200-260nm) lithium

amorphous carbon anesthetic propofol In the following, advantageous applications of the sensor arrangement 10 according to the invention for determining the content of a substance within a mister article are described by way of example:

Fij. 1 shows a sensor assembly 10 applied to the end wall 36 on a subject of measurement, in this embodiment, the skin of a subject. The wall 31 of the measuring chamber 3 has a scribed structure formed by the supports 22a to 22s, and lies gas-tight on the measuring object or skin and thus forms a gas-tight measuring chamber 3. From the skin or the object of measurement continuously occur water vapor and other substances that are enriched in the measuring chamber 3. Depending on the value of the transepidermal water loss (TEWL) value, more or less particles or gases will be released from the skin. The moisture sensor 2 detects the moisture value within the measuring chamber 3 and transmits it to the processing unit 40, for example a microcontroller. The sensors 4a and 4b detect the value of a substance within the measuring chamber 3, for example sulfur and carbon dioxide, and also forward these detected values to the processing unit 40. The processing unit 40 determines the TEWL value by means of the humidity measured by the moisture sensor 2 and normalizes it to predefined conditions, e.g. 20 ° C, 40% humidity. This makes it possible to eliminate special premises where measurements are carried out under identical measuring conditions in order to achieve comparability of the measured values. The processing unit 40 can then use the TEWL value and corresponding reference measurements or conversion tables stored on the measuring device to determine the content of the substance, e.g. of carbon dioxide and / or sulfur. Alternatively, the subject of the measurement may also be directly human or animal blood or other bodily fluids, and the sensor assembly 10 will determine particles and substances in the flow of the intestine and be located in that or other body orifices.

Table 2 gives a selection of gases which are measured, for example. Each of these gases has a different propagation speed. To determine which gas is determined, at least one selective sensor for the substance containing the gas is used. From the presence of this at least one substance and the specific propagation speed can then be deduced the exact gas and its concentration. Alternatively, two or more substances contained in a gas may be measured to detect more comparison values and, for example, to compensate for a less accurate propagation velocity measurement.

In one embodiment of the invention, for example, amino acids are determined, based on their isoelectric point and / or their hydrophobicity and / or their molar mass they can be determined. Such a measurement with a schichartigen measuring chamber 3 is illustrated by the example of the isoelectric point measurement:

The isoelectric point is an exact pH of an aqueous solution that balances the positive and negative charges of ampholytes or zwitterions. This characteristic size is defined exactly for each individual zwitterionic molecule; see Table 3:

Table 3:

The pK value is not a constant and depends on the temperature, the activity, the ionic strength and the immediate environment of the titratable group and can therefore vary widely (see Table 4).

Table 4: pKa values of amino acid side chains (for the free amino acid residues and in the protein)

The pKs values of the acid group and the amino group are known and allow a single amino acid to be calculated as follows:

For glycine, pK _S i = 2.4; pK _S2 = 9.8; pH = _(pK a pK i + _S2) / 2 = 6, 1

For example, the sensor layer (A) or the manipulation layer (R) may include one or more liquids, which are introduced together in time or separately. In particular, the liquid is distilled water for large changes in pKa values and / or weak-buffer buffer solutions, e.g. Acetate buffer, ammonium buffer.

In this case, a layer or at least one of the carriers 22a, 22b, .. of the sensor arrangement 10 is made of e.g. Cellulose is formed with at least 2 electrodes for applying a DC voltage and further comprises a heater, a Sprühungseinheit an optical sensor and optionally a pH sensor for an aqueous solution.

The measuring procedure is then carried out as follows: 1) moistening the treatment layer with a buffer solution, 2) placing the amino acid in the middle of the measuring chamber 3 by placing it on the object to be measured, 3) applying a DC voltage to the two electrodes; Polarity anode, cathode; 4) after a defined time the DC voltage will switch off; 5) turn on the heater to dry the treatment layer; 6) Liquid introduction of e.g. Ninhydrin solution (reagent on amino acids), 7) the heater is reactivated causing the amino acid to become visible as a purple spot; the distance to the anode or cathode measured by the optical sensor then defines the pH value, if no distance is detected there is an isoelectric state. 9) Optional rinsing or cleaning of the treatment layer or replacement of the sensor layer (A).

This arrangement is also suitable for measuring peptides and proteins. Advantageously, it is suitable to use several parallel measuring chambers, as well as different liquids and / or waiting times, reagents to set up several equations and thus to be able to measure a mixture consisting of several amino acids, peptides, proteins from the mixture. Every recognizable pH corresponds to a defined amino acid. As a reagent, the appropriate solution for the recognition of the respective amino acids is used.

Example: glycine

The pH change as described above can be measured by an optional pH sensor. The recognition of the respective amino acid, for example, with an optical sensor recognizes the respective color spectrum, for example violet carried out. The intensity of the spectrum measured reflects the number or amount of amino acid, for example, glycine.

Optionally, a TEWL sensor may accept the additional buffer fluid, e.g. Determine water vapor emitted by humans or determine the solution more accurately.

Other suitable measuring methods besides the measurement of the isolelectric point, the hydrophobicity and / or molar mass are also solubility measurements.

By using one or more binders contained in a bonding layer (O), one or more constituents of the gases which are not intended to be measured can be bound or delayed in time until the other more volatile substances have been measured.

Preferred transmissive or porous materials of the carriers 22a, 22b, ... are: silicon and polysilicon, graphene and alumina ceramics.

Silicon is less permeable to the materials, polysilicon selectively changeable permeable, graphene highly permeable, especially for small particles, AI203 less permeable but also permeable to larger particles depending on the setting in the manufacturing process (pore size).

By selecting the permeability, whether less permeable to the substance or more permeable, the flow path and the flow rate of the substances is set.

Further particularly suitable materials of the carriers 22a, 22b,... Are: silicon (Si), germanium (Ge), boron (B), selenium (Se), tellurium (Te), and their polytypes, such as polysilicon, polygermanium, gallium arsenide ( GaAs), indium phosphide (InP), indium antimonide (InSb), indium arsenide (InAs), gallium antimonide (GaSb), gallium nitride (GaN), gallium phosphide (GaP), cadmium sulfide (CdS), zinc oxide (ZnO), zinc sulfide (ZnS), silicon carbide ( SiC), phthalocyanine, tetracene, pentacene, polyvinylcarbazole, TCNQ, ceramics and / or ceramics such as Al 2 O 3, sapphire, SiO 2 glass, glasses, etc. In particular, these materials may be porous or selectively porous or produced with defined holes.

Optionally, the supports 22a, 22b, ... or each layer may also be divided so that e.g. a part of material 1 and a part of material 2, each of which is arranged on the support 22a, 22b, ... with each other and / or side by side. Advantage of juxtaposed parts of the supports 22a, 22b, ... is that such a task sharing or a task splitting e.g. an optical and electrical measurement on a support 22a, 22b, ... can be performed.

Claims

claims

1 . Sensor arrangement (10) for determining the content of a substance within a measurement object, in particular within a body part, from which continuously emerges vapor or vapor containing a substance, comprising a measuring chamber (3) bounding a region of the surface of the measurement object, wherein the measurement chamber (3) an end face (36) on which the measuring chamber (3) can be placed on the measuring object,

- wherein the sensor arrangement (10) comprises at least one sensor (4a) for detecting the content of at least one substance within the measuring chamber (3),

characterized in that

- That the measuring chamber (3) has a layer-like structure with at least two layers, each layer of the measuring chamber (3) by a respective carrier (22a, 22b, ...) is formed,

- That the sensor arrangement (10) comprises a further sensor (4b), in particular a plurality of further sensors (4b, 4c, ...), wherein the one sensor (4a) and the further sensor (4b), each on a different carrier (22a, 22b, ...) are arranged, and

- That the carrier (22 a, 22 b, ...) to each other, in particular in the flow direction of the fabric one above the other, preferably releasably attached.

2. Sensor arrangement (10) according to claim 1, characterized in that the carriers (22a, 22b, ...) form the wall (31) of the measuring chamber (3).

3. Sensor arrangement (10) according to one of the preceding claims, characterized in that in each case at least one sensor (4a, 4b,) is arranged on the carriers (22a, 22b, ...) and the carriers (22a, 22b, .. .) Are arranged such that the carriers (22a, 22b, ...) span different levels with sensors (4a, 4b, ...).

4. Sensor arrangement (10) according to one of the preceding claims, characterized in that the measuring chamber (3) is designed as a separation column or filter column, wherein in the measuring chamber (3) a number of sensors (4a, 4b, ..) are arranged.

5. Sensor arrangement (10) according to one of the preceding claims, characterized in that the sensors (4a, 4b, 4c, ..) are arranged in different areas of the measuring chamber (3) such that the sensors (4a, 4b, 4c, ..) with edition of Measuring chamber (3) have different distances to the measurement object on the measurement object.

6. Sensor arrangement (10) according to one of the preceding claims, characterized in that the carriers (22a, 22b, ...) are of identical design and have at least one continuous macroscopic recess (45) in each case,

- Wherein the supports (22a, 22b, ...) are like a block above each other, preferably releasably secured to each other, and

- Wherein each of the recesses (45) of all the carriers (22a, 22b, ...) are arranged in alignment.

7. Sensor arrangement according to claim 6, characterized in that in the recess (45) of the carrier (22), in particular in the recess (45) of each carrier (22a, 22b, ...), a light source (15) and / or Radiation source with predetermined spectrum, in particular an LED lamp is arranged,

- That an optical sensor (18) is provided, which on the support (22), in particular in the recess (45) of each support (22a, 22b, ...), is arranged and along the diametrical course of the recess (45) is directed to the opposite inner surface of the recess (45) of the carrier (22),

- That the light source (15) or radiation source with a predetermined spectrum along the diametrical course of the recess (45) on the opposite inner surface of the recess (45) of the carrier (22) is directed to the light source (15) or the radiation source,

- Wherein the spectral regions in because the optical sensor (18) is sensitive and the emission spectrum of the light source (15) or radiation source in an overlap region overlap and

- In particular, the overlap region is chosen such that the absorption or reflection is increased or decreased in the presence of the substance in the recess (45) against the absorption or reflection in the absence of the substance in the overlap region.

8. Sensor arrangement (10) according to one of the preceding claims, characterized in that the measuring chamber (3) in a number of, in particular gas-tight demarcated, subregions (34a, 34b, ...) is divided, wherein in at least one of the subregions (34a, 34b, ...) or within the subregions (34a, 34b, ...) at least one sensor (4) and / or moisture sensor (2) and / or temperature sensor is arranged.

9. Sensor arrangement (10) according to claim 8, characterized in that the subregions (34a, 34b, ...) are separated from each other by means of gas-tight webs (39), wherein the webs (38) are formed such that the subregions (34a , 34b, ...) are gas-tightly separated from each other when lying on the measurement object.

10. Sensor arrangement (10) according to one of claims 8 or 9, characterized in that the subregions (34a, 34b, ...) have such different expansions relative to the object of measurement that the subsections (34a, 34b, .. .) arranged sensors (4a, 4b, ...) have different distances to the measurement object.

11. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) has these completely penetrating pores (44) or slots, wherein the carriers (22a, 22b, ...) are fluidically connected via the pores or slots.

12. Sensor arrangement (10) according to one of the preceding claims, characterized in that the sensor arrangement (10) comprises a moisture sensor (2) and / or a temperature sensor is arranged such that the moisture within the measuring chamber (3) is measurable.

13. A sensor arrangement according to claim 12, characterized in that a the moisture sensor (2) and / or the temperature sensor and the sensor (4) downstream processing unit (40) is provided, the measured values of the sensor (4) and the humidity sensor (2 ) and / or the temperature sensor are supplied and

- wherein the processing unit (40) determines the content of the substance within the measurement subject by correlating or normalizing the determined content of the substance in the measurement chamber (3) to the humidity and / or temperature determined in the measurement chamber (3) ,

14. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) at least one receptacle for slots or plug-in cards (1 10), wherein the sensor (4) or the Sensors (4a, 4b, ...) on the inserts or plug-in cards (1 10) are arranged, wherein the at least one receptacle is designed such that the bays or plug-in cards (110) mechanically to the respective support (22a, 22b, ...) attached, in particular pressed or held by spring force and / or chemically fixed, can, wherein the sensors (4a, 4b, ...) into the measuring chamber ( 3) protrude.

15. Sensor arrangement (10) according to one of the preceding claims, characterized in that the sensor arrangement (10) has a number of contact electrodes, wherein the contact electrodes (37) the carrier (22) or each carrier (22a, 22b, ...) fully enforce

wherein, in particular, the contact electrodes (37) completely pass through each of the carriers (22a, 22b, ...), preferably one above the other, and form a continuous contact.

16. Sensor arrangement (10) according to one of the preceding claims, characterized in that the measuring chamber (3) is formed of a plurality of particular, block-like formed carriers (22a, 22b, ...), wherein the carriers (22a, 22b, .. .) are formed permeable to the substance, wherein between the carriers (22a, 22b, ...) at least partially a cavity is formed with a material (48), in particular with a powder or powder or jelly or grains or sand or Mixtures thereof, filled in for permeability control.

17. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a sensor layer (A), wherein the sensor layer (A) has a number on the carrier (22 ) arranged sensors (4a, 4b, ..) and / or a moisture sensor (2) and / or a temperature sensor (7).

18. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as an insulating layer (B), wherein the insulating layer (B) is formed such that the insulating layer (B) two of the insulating layer (B) adjacent supports (22a, 22b, ...) thermally and / or acoustically and / or electrically insulated from each other or the measuring chamber (3) to the environment thermally and / or acoustically and / or electrically isolated and / or special wavelengths of light shields.

19. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a separating layer (C), wherein the separating layer (C) is formed such that the substance from the Danpf or vapor is separable and / or several substances are separable, wherein the separation view (C) comprises in particular palladium.

20. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as an actuator layer (D), wherein the actuator layer (D) has a defined opening which a movable element is covered, wherein the movable element consists of a thermobimorphic material, in particular a shape memory alloy or of electroactive material, and when heated, in particular by a in the actuator layer (D) arranged heating element, the opening or defined parts of the opening releases so that the substance can reach carriers (22a, 22b, ..) adjacent to the actuator layer (D).

21. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a contact layer (E), wherein the contact layer (E) comprises a number of electrical contact surfaces, in particular contact electrodes ( 37), wherein the contact surfaces are formed such that through the contact layer (E) an electrical contact between two of the contact layer adjacent carriers (22a, 22b, ...) can be formed and / or that the carrier (22a, 22b, ...) has electrical contact surfaces which protrude into the environment of the respective carrier (22a, 22b, ...).

22. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a distribution layer (F), wherein the distribution layer (F) is formed such that a plurality of measurement signals the sensors (4a, 4b, ...) are bundled to form a sum signal, or a measuring signal is distributed over a plurality of lines, or a signal switching and / or signal switching takes place by means of multiplexers, demultiplexers.

23. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) consists of a biocompatible material.

24. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a filter layer (H), wherein the filter layer (H) a filter, in particular a mechanical filter and / or sound filters and / or acoustic filters and / or ultrasonic filters.

25. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a temperature layer (I), wherein the temperature layer (I) is a heating or cooling element, in particular a heating coil or a Peltier element or channels with a medium flowing in the channels comprises.

26. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a fastening layer (J), wherein the attachment layer (J) has a number of fastening elements (49). comprises, with which the attachment layer (J) to the sensor assembly (10) or a measuring device can be fastened, wherein in particular the attachment layer (J), projects beyond the other layers.

27. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a therapeutic layer (K), wherein the therapeutic layer (K) at least one therapeutic substance, in particular one Conditioner or barrier opening fabrics.

28. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a separation column layer (L), wherein the separation column layer (L) is formed as a separation column and in particular a or a plurality of meandering channels (27) or a number of pores (44) formed in the respective carrier (22a, 22b, ...).

29 sensor arrangement (10) according to any one of the preceding claims, characterized in that at least one of the carrier (22a, 22b, ...) is designed as an electronic layer (M), wherein the electronic layer (M) measuring electronics and / or evaluation and / or a memory and / or a processor and / or a voltage source, in particular a battery, and / or a wafer blank, wherein in particular a wafer Zuschn ^' rtt is integrated in the electronic layer (M).

30. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a measuring layer (N), wherein the measuring layer (N) comprises a measuring electrode grid and a number of the Carrier (22a, 22b, ...) completely penetrating holes, wherein the holes each have the diameter of individual selected atoms or molecules, wherein 4Q the measuring electrode grid is applied to each hole, that when a molecule or atom, dss has the same dimensions as the hole hole passes an electrical contact in the measuring electrode grid is closed and the permittivity and / or conductivity of the electrode line is changed.

31. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a bonding layer (O), the bonding layer (O) comprising at least one binding substance, in particular an activated carbon, includes can be bound with the volatile substances.

32. Sensor arrangement (10) according to any one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as Ausbringschicht (P), wherein the application layer (P) is formed such that by means of vibrations Substances from the measuring chamber (3) can be applied, wherein the application layer (P) in particular piezoelectric crystals and / or electromechanical vibration generators and / or electromechanical transducer comprises.

33. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a spacer layer (Q), wherein the spacer layer (Q) is formed such a defined distance of two the spacer layer (Q) of adjacent carriers (22a, 22b, ..) to keep constant.

34. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a manipulation layer (R), wherein the manipulation layer (R) is designed such that amplifies signals or substances are resolved or physical signals are converted into other physical signals, wherein the manipulation layer (R), voltage transformer or solvent comprises.

35. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a mixed layer (S), wherein the mixed layer (S) is formed such that concentration change of Substances are generated, in particular, the ambient air supplied or the flow of the substance is superimposed with a particle flow.

36. Sensor arrangement (10) according to one of the preceding claims, characterized in that the carriers (22a, 22b, ...) comprises a self-cleaning coating, in particular have a coating, wherein the coating of silicon dioxide with nanometer-sized nubs, a high Roughness or wax layer is formed with wax crystals.

37. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a covering layer (U), wherein the covering layer (U) is gas-tight or liquid-tight, and in particular separates two adjacent layers gas-tight or liquid-tight from each other,

38. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is designed as a spring layer (V), wherein the spring layer (V) consists of a flexible material and such is formed, that a compensation of unevenness or inequalities of adjacent layers, in particular normal to the end wall (36), can be compensated.

39. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) is formed as a logic layer (W), wherein the logic layer consists of an electrically insulating material, defined the carrier (22a, 22b, ...) has passing through recesses, wherein adjacent layers can be contacted by these recesses by the recesses.

40. Sensor arrangement (10) according to one of the preceding claims, characterized in that at least one of the carriers (22a, 22b, ...) as an energy layer (X) is formed, wherein the energy layer (X) is a voltage and / or energy source , in particular a battery or an accumulator, in order to ensure the power supply of other views.

41. Sensor arrangement (10) according to one of the preceding claims, characterized in that the wall of the measuring chamber (3), in particular the carrier (22a, 22b, ...), is gas-permeable or comprises a number of channels formed in such a way the measuring chamber (3) is connected to the surroundings of the sensor arrangement (10) and gas can flow from the measuring chamber (3) into the environment or from the environment into the measuring chamber.

42. Sensor arrangement (10) according to one of the preceding claims, characterized in that the layers, in particular the carriers (22a, 22b, ...) have a thickness of less than 3 mm, preferably less than 1 mm, particularly preferably less than 4Ο0μιη, having.

43. Sensor arrangement (10) according to one of the preceding claims, characterized in that on the respective carriers (22a, 22b, ...) fabricated structures have a spatial resolution of less than 100 nm, in particular between 4 nm and 32 nm ,

44. Sensor arrangement (10) according to one of the preceding claims, characterized in that the carriers (22a, 22b, ...) are connected to one another by means of gluing or pressing or by connecting elements.

45. Garment (300), in particular T-shirt, comprising a number of sensor arrangements (10) according to one of claims 1 to 44.

46. Garment (300) according to claim 45, characterized in that the garment comprises a, in particular the sensor assemblies (10) surrounding gel or a superabsorber, with the sweat and liquids of a user are absorbable.

47. Garment (300) according to claim 45 or 46, characterized in that the sensor arrangements (10) are arranged on a flexible film (301), wherein the film (301) points to the skin of the user facing inside of the garment, in particular by means of an adhesive layer or via a seam, wherein the film (301) in particular as a silicon wafer with a thickness of less than 100pm, in particular 75pm is formed.

48. Wristwatch comprising a sensor arrangement (10) according to one of claims 1 to 44.

49. fastening strap, in particular bracelet or chest strap or ring or collar or headband, for attachment to the body, in particular the arm, the chest or the legs of a human, wherein the fastening strap comprises a fixing means and a, preferably stretchable, band with which the Fastening tape on the body of the User is fastened, characterized in that the fastening strip comprises a sensor arrangement (10) according to one of claims 1 to 44.