WO2018092657A1 - Optical film, polarizing plate protection film, polarizing plate including these films, and display device including these films - Google Patents

Optical film, polarizing plate protection film, polarizing plate including these films, and display device including these films Download PDF

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Publication number
WO2018092657A1
WO2018092657A1 PCT/JP2017/040271 JP2017040271W WO2018092657A1 WO 2018092657 A1 WO2018092657 A1 WO 2018092657A1 JP 2017040271 W JP2017040271 W JP 2017040271W WO 2018092657 A1 WO2018092657 A1 WO 2018092657A1
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Prior art keywords
film
cyclic polyolefin
stress relaxation
polarizing plate
relaxation layer
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PCT/JP2017/040271
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French (fr)
Japanese (ja)
Inventor
千明 門馬
大石 清
鈴木 一生
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コニカミノルタ株式会社
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Priority to JP2018551586A priority Critical patent/JPWO2018092657A1/en
Publication of WO2018092657A1 publication Critical patent/WO2018092657A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02Physical, chemical or physicochemical properties
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors

Definitions

  • the present invention relates to an optical film, a polarizing plate protective film, a polarizing plate including these, and a display device including these.
  • the cyclic polyolefin film is liable to generate minute cracks at the end during punching or cutting. Such defects such as minute cracks at the ends and cracks caused by the cracks can cause display failure when a cyclic polyolefin film is used in a display device, for example.
  • a technique for improving the film strength has been studied as a cyclic polyolefin film for optical use.
  • JP-A-2004-67984 discloses an optical film obtained from a resin composition containing a norbornene resin and a cycloolefin resin having a specific structure. And the same literature discloses that transparency, moisture permeability, and strength can be improved by the optical film having this configuration.
  • Japanese Patent Application Laid-Open No. 2008-274136 discloses a cycloolefin-based resin film having an impact strength of 1000 J / m to 30000 J / m, and by using the film as an optical film, It is disclosed that the occurrence of cracks can be suppressed.
  • an object of the present invention is to provide a means capable of achieving both good crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness for a cyclic polyolefin film for optical use.
  • a cyclic polyolefin film A stress relieving layer disposed on the cyclic polyolefin film,
  • the stress relaxation layer contains silicon atoms (Si), oxygen atoms (O) and carbon atoms (C), and C—C, C—SiO, C—O, C ⁇ O and C ( ⁇ O) — at each measurement position, obtained from the depth profile of the C1s spectral region measured by X-ray photoelectron spectroscopy of the stress relaxation layer.
  • the average value X AVE in the thickness direction of the ratio X (%) of the peak intensity derived from the C—C bond to the sum of the peak intensity derived from each bond of O is 1% or more and 40% or less, Optical film.
  • One embodiment of the present invention includes a cyclic polyolefin film, and a stress relaxation layer disposed on the cyclic polyolefin film.
  • the average value X AVE in the thickness direction of the ratio X (%) of the peak intensity derived from the C—C bond to the total peak intensity derived from each bond of O and C ( ⁇ O) —O is 1% or more and 40 % Is an optical film.
  • the optical film which concerns on one form of this invention has a stress relaxation layer containing a silicon atom (Si), an oxygen atom (O), and a carbon atom (C) on a cyclic polyolefin film.
  • the stress relaxation layer is selected from the group consisting of C—C bonds, C—SiO, C—O, C ⁇ O, and C ( ⁇ O) —O as carbon-related bonds in the composition.
  • a C—C bond which is a soft bond, is included at a predetermined ratio.
  • the stress relaxation layer relieves stress applied from the outside at the time of punching or cutting, or stress generated upon self-deformation when the optical film is placed in a high temperature and high humidity environment. Furthermore, when placed in a high temperature and high humidity environment with the optical film and another member bonded, the stress applied from the outside when the other member is deformed over time, or the self deformation Relieve the generated stress. As a result, generation of cracks or expansion of cracks is suppressed, and crack resistance and durability in a high temperature and high humidity environment are improved.
  • X to Y indicating a range means “X or more and Y or less”.
  • the operation and physical properties are measured under conditions of room temperature (20 to 25 ° C.) / Relative humidity 40 to 50% RH.
  • FIG. 1 is a schematic cross-sectional view showing an example of an optical film according to the present invention.
  • 1 is an optical film
  • 2 is a cyclic polyolefin film
  • 3 is a stress relaxation layer.
  • the optical film according to the present invention is not limited to this structure.
  • the optical film which concerns on one form of this invention has a stress relaxation layer.
  • the stress relaxation layer is a layer containing silicon atoms (Si), oxygen atoms (O), and carbon atoms (C), and is obtained from a depth profile in the C1s spectral region measured by X-ray photoelectron spectroscopy.
  • Ratio of peak intensity derived from C—C bond to total sum of peak intensity derived from each bond of C—C, C—SiO, C—O, C ⁇ O and C ( ⁇ O) —O at each measurement position is a layer in which the average value XAVE in the thickness direction of X (%) (also referred to as CC bond ratio) is 1% or more and 40% or less.
  • the optical film has a cyclic polyolefin film and the stress relaxation layer disposed on the cyclic polyolefin film, it has been difficult to achieve with a cyclic polyolefin film alone, and has good crack resistance, high temperature and high temperature. It is possible to achieve both durability and adhesion in a wet environment.
  • composition of stress relaxation layer A layer that does not have any of silicon atoms (Si), oxygen atoms (O), and carbon atoms (C) cannot exhibit the effects of the present invention.
  • a layer having no carbon atom has insufficient crack resistance and durability under a high temperature and high humidity environment. This is because it is considered that a CC bond which is a flexible bond cannot be included and a stress relaxation effect cannot be exhibited. Further, a layer having no silicon atom or oxygen atom has insufficient durability and adhesiveness in a high temperature and high humidity environment.
  • the stress relaxation layer has silicon atoms (Si), oxygen atoms (O), and carbon atoms (C), as confirmed by the results of wide scan spectrum analysis in element distribution profile measurement by X-ray photoelectron spectroscopy, which will be described later. can do.
  • X AVE When X AVE is less than 1%, the crack resistance is insufficient. This is because it is considered that the C—C bond, which is a flexible bond, cannot be included in a sufficient amount, and the stress relaxation effect cannot be exhibited. From the viewpoint of further improving the stress relaxation effect and further improving the crack resistance, X AVE is preferably 2% or more. On the other hand, if XAVE is more than 40%, the adhesion is insufficient. This is because the content of silicon atoms or oxygen atoms becomes excessive, and gas such as water vapor and oxygen easily enters the layer in a high-temperature and high-humidity environment, and the oxidation of the layer forming material proceeds with water or oxygen.
  • X AVE is preferably 20% or less from the viewpoint of further enhancing the oxidation resistance of the layer or further strengthening the interaction due to the polarity between the optical film and other members and further improving the adhesion. . Accordingly, an example of a preferable XAVE range according to the present invention is 2% or more and 20% or less, but the present invention is not limited to this.
  • X (%) and X AVE (%) can be calculated from the result of a high resolution spectrum (narrow scan analysis) of C1s in the measurement of an element distribution profile by X-ray photoelectron spectroscopy described later.
  • the stress is measured based on the ratio of peak intensities derived from silicon atoms, oxygen atoms, and carbon atoms obtained by X-ray photoelectron spectroscopy at the depth measurement position in each layer thickness direction.
  • [C AVE ] (at%) which is an average value of the ratio of carbon atoms (also referred to as carbon composition ratio in this specification) [C] (at%) when the total amount of the composition ratio is 100 at%. From the viewpoint of further improving crack resistance, it is preferably 2 at% or more. This is because it is considered that the stress relaxation effect is further improved by including a sufficient amount of the C—C bond, which is a flexible bond.
  • [C AVE ] (at%) is more preferably 4 at% or more, and further preferably 5 at% or more.
  • [C AVE ] (at%) is preferably 30 at% or less from the viewpoint of further improving the adhesiveness.
  • the reason for this is that the content of silicon atoms or oxygen atoms is sufficient, and gas such as water vapor and oxygen hardly enters the layer in a high-temperature and high-humidity environment, and the oxidation of the layer-forming material is suppressed by water or oxygen. This is because the composition of the layer having good adhesiveness is considered to be maintained more firmly.
  • the layer forming material has a composition in which oxidation is difficult to occur due to the sufficient content of the C—C bond, and the oxidation of the layer forming material is suppressed by water, oxygen, etc.
  • the composition of the layer having the property is considered to be maintained more firmly. Or this reason is because it is thought that the interaction by the polarity between an optical film and another member may become stronger.
  • [C AVE ] (at%) is more preferably 24 at% or less.
  • [C] (at%) and [C AVE ] (at%) can be calculated from the result of wide scan spectrum analysis in the measurement of an element distribution profile by X-ray photoelectron spectroscopy, which will be described later.
  • the XPS depth profile can be measured, for example, under the following conditions to obtain a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve with respect to the distance from the surface of the thin film layer in the layer thickness direction.
  • Etching ion species Argon (Ar + ), Etching rate (SiO 2 thermal oxide equivalent value): 0.05 nm / sec, Etching interval (SiO 2 equivalent value): 2 nm, X-ray photoelectron spectrometer: manufactured by Thermo Fisher Scientific, model name “VG Theta Probe” Irradiation X-ray: Single crystal spectroscopy AlK ⁇ , X-ray spot and size: 800 ⁇ m ⁇ 400 ⁇ m oval.
  • the distribution curve obtained by such XPS depth profile measurement can be created, for example, with the vertical axis as the atomic ratio (at%) of each element and the horizontal axis as the etching time (sputtering time).
  • the atomic ratio (at%) in each region is a value obtained by etching values in the depth direction by XPS depth profile measurement and averaging values measured at intervals of 2 nm, for example.
  • a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve can be obtained by performing a wide scan spectrum analysis for measuring the entire stress relaxation layer.
  • the composition converted from the ratio of peak intensities derived from silicon atoms, oxygen atoms and carbon atoms obtained by X-ray photoelectron spectroscopy at each measurement position in the depth direction of the stress relaxation layer.
  • the ratio [C] (at%) of carbon atoms when the total amount of the ratio is 100 at% is calculated.
  • the average value [C AVE ] (at %) Is further calculated.
  • the bonding state of carbon is analyzed by a high resolution spectrum (narrow scan analysis) of C1s. Specifically, at each measurement position of the depth in the film thickness direction of the stress relaxation layer, (1) CC, (2) C-SiO, Dividing into five bonds such as (3) C—O, (4) C ⁇ O, and (5) C ( ⁇ O) —O, the peak intensity ratio of each spectrum is calculated. When the sum of the peak intensity ratios (1) to (5) above is 100% at each measurement position of the depth in the film thickness direction of the stress relaxation layer, it is derived from the CC bond of (1). The peak intensity ratio X (%) is calculated.
  • X AVE (%) which is an average value in the film thickness direction of X (%), is further calculated from the value of each X (%) at each measurement position of the depth of the stress relaxation layer in the layer thickness direction.
  • the analysis of the peak intensity can be performed using, for example, data analysis software PeakFit (manufactured by SYSSTAT Software Inc.).
  • the interface with the base material means “the stress relaxation layer when the composition ratio of oxygen atoms (O) as a part of the composition forming the stress relaxation layer is 30 at% or less”. "The position of the depth from the outermost surface side in the layer thickness direction”.
  • the composition ratio of oxygen atoms (O) can be calculated by the X-ray photoelectron spectroscopy described above.
  • the layer thickness of the stress relaxation layer according to one embodiment of the present invention (when the stress relaxation layer has a laminated structure of two or more layers on one surface side of the cyclic polyolefin film), the effect of the present invention Is preferably 1 nm or more, more preferably 5 nm or more, from the viewpoint of better expressing the above.
  • the thickness of the stress relaxation layer according to one embodiment of the present invention is preferably 300 nm or less, more preferably 150 nm or less, and further preferably 100 nm or less from the viewpoint of thinning.
  • the layer thickness of the stress relaxation layer is determined by measuring the depth from the outermost surface to the interface with the base material in the stacking direction of the stress relaxation layer by observing a cross section with a transmission electron microscope (TEM). be able to. In cross-sectional observation with a transmission electron microscope, the layer thickness is arbitrarily measured at 10 locations, and the average value is taken as the layer thickness of the stress relaxation layer.
  • TEM transmission electron microscope
  • ⁇ TEM image of cross section in layer thickness direction As a cross-sectional TEM observation, a thin piece is prepared for the observation sample by the following focused ion beam (FIB) processing apparatus, and then the TEM observation is performed.
  • FIB focused ion beam
  • the sample is continuously irradiated with the electron beam, a contrast difference appears between the portion that is damaged by the electron beam and the portion that is not damaged. Therefore, the thickness of the stress relaxation layer can be measured by the contrast difference.
  • ⁇ FIB processing ⁇ Apparatus SMI2050 manufactured by Seiko Instruments Inc. (SII), Processing ions: Ga (30 kV), Sample thickness: 100-200 nm, ⁇ TEM observation ⁇ Apparatus: JEM2000FX manufactured by JEOL Ltd. (acceleration voltage: 200 kV).
  • the stress relaxation layer according to an embodiment of the present invention is preferably formed by a plasma chemical vapor deposition method (plasma CVD, plasma-enhanced chemical vapor deposition (PECVD), hereinafter also simply referred to as “plasma CVD method”).
  • plasma CVD plasma chemical vapor deposition method
  • PECVD plasma-enhanced chemical vapor deposition
  • the vacuum plasma CVD method refers to a plasma CVD method in which a film is formed at a vacuum degree of 50 Pa or less.
  • the plasma CVD method may be a Penning discharge plasma type plasma CVD method.
  • a source gas containing an organosilicon compound and an oxygen gas by a discharge plasma chemical vapor deposition method (a roll-to-roll method) having a discharge space between rollers to which a magnetic field is applied.
  • a discharge plasma chemical vapor deposition method a roll-to-roll method having a discharge space between rollers to which a magnetic field is applied.
  • the discharge plasma chemical vapor deposition method it is possible to easily produce a stress relaxation layer in which the carbon atom ratio in each region is controlled within a certain range, and the stress balance in the layer is appropriate.
  • a stress relaxation layer can be produced.
  • the stress relaxation layer can be densified and the adhesion can be improved.
  • composition of the layer having good adhesiveness is such that gas such as water vapor or oxygen hardly enters the layer in a high temperature and high humidity environment, and the oxidation of the layer forming material is suppressed by water, oxygen, etc. This is because is considered to be maintained more firmly.
  • a stress relaxation layer according to one embodiment of the present invention is formed by a discharge plasma chemical vapor deposition method having a discharge space between rollers to which a magnetic field is applied, using a source gas containing an organosilicon compound and oxygen gas. A method will be described.
  • a plasma discharge in a space between a plurality of film forming rollers When generating plasma in the plasma CVD method, it is preferable to generate a plasma discharge in a space between a plurality of film forming rollers.
  • a pair of film forming rollers is used, and a cyclic polyolefin is used for each of the pair of film forming rollers.
  • a base material including a film here includes a form in which the base material is treated) is disposed, and plasma is generated by discharging between a pair of film forming rollers. More preferably, it is generated.
  • the substrate is preferably a cyclic polyolefin film alone, a laminate including the cyclic polyolefin film and an anchor coat layer described later, and more preferably a cyclic polyolefin film alone.
  • a film forming gas used in such a plasma CVD method a gas containing an organosilicon compound and oxygen is preferable.
  • FIG. 2 is a schematic diagram illustrating an example of a manufacturing apparatus that can be suitably used for manufacturing the stress relaxation layer according to an embodiment of the present invention.
  • the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted.
  • the 2 includes a feed roller 12, transport rollers 13 to 18, film forming rollers 19 and 20, a gas supply pipe 21, a plasma generating power source 22, and film forming rollers 19 and 20.
  • Magnetic field generators 23 and 24 and winding rollers 25 installed inside are provided.
  • at least the film forming rollers 19 and 20, the gas supply pipe 21, the plasma generating power source 22, and the magnetic field generating apparatuses 23 and 24 are provided in the film forming (vacuum) chamber 28.
  • the film forming chamber 28 is connected to a vacuum pump (not shown), and the pressure in the film forming chamber 28 can be appropriately adjusted by such a vacuum pump.
  • the delivery roller 12 and the transport roller 13 are disposed in the transport system chamber 27, and the winding roller 25 and the transport roller 18 are disposed in the transport system chamber 29.
  • the transfer system chambers 27 and 29 and the film forming chamber 28 are connected via connecting portions 30 and 31, respectively.
  • the film forming chamber 28 and the transfer system chambers 27 and 29 may be physically separated by providing a vacuum gate valve in the connecting portions 30 and 31.
  • the vacuum gate valve for example, only the film forming chamber 28 can be a vacuum system, and the transfer system chambers 27 and 29 can be in the atmosphere. Further, by physically separating the film forming chamber 28 and the transfer system chambers 27 and 29, it is possible to suppress the transfer system chambers 27 and 29 from being contaminated by particles generated in the film forming chamber 28. .
  • each film-forming roller 19 and 20 is a power source for plasma generation so that the pair of film-forming rollers (film-forming rollers 19 and 20) can function as a pair of counter electrodes. 22 is connected. Therefore, in such a manufacturing apparatus 10, it is possible to discharge to the space between the film forming roller 19 and the film forming roller 20 by supplying power from the plasma generating power source 22. Plasma can be generated in the space between the film roller 19 and the film formation roller 20.
  • the material and design may be changed as appropriate so that the film-forming roller 19 and the film-forming roller 20 can also be used as electrodes.
  • the pair of film forming rollers (film forming rollers 19 and 20) be arranged so that their central axes are substantially parallel on the same plane.
  • the film forming rate can be doubled as compared with a normal plasma CVD method that does not use a roller.
  • the stress relaxation layer 3 can be formed on the surface of the substrate 2 by the CVD method, and the stress relaxation layer is formed on the surface of the substrate 2 on the film forming roller 19. While depositing the material (hereinafter also referred to as stress relaxation layer component), the stress relaxation layer component can be deposited on the surface of the substrate 2 also on the film forming roller 20. The stress relaxation layer can be formed efficiently.
  • magnetic field generators 23 and 24 fixed so as not to rotate even when the film forming rollers 19 and 20 rotate are provided, respectively.
  • the magnetic field generators 23 and 24 provided in the film forming rollers 19 and 20 are respectively a magnetic field generator 23 provided in one film forming roller 19 and a magnetic field generator 24 provided in the other film forming roller 20. It is preferable to arrange the magnetic poles so that the magnetic field lines do not cross between each other and the magnetic field generators 23 and 24 form a substantially closed magnetic circuit.
  • the magnetic field generators 23 and 24 provided on the film forming rollers 19 and 20 respectively have racetrack-shaped magnetic poles that are long in the roller axis direction, and one magnetic field generator 23 and the other magnetic field generator 24 are It is preferable to arrange the magnetic poles so that the opposing magnetic poles have the same polarity.
  • each of the magnetic field generators 23 and 24 is opposed to the space along the length direction of the roller shaft without straddling the magnetic field generator on the roller side where the magnetic lines of force oppose each other.
  • a racetrack-like magnetic field can be easily formed in the vicinity of the roller surface facing the (discharge region), and the plasma can be focused on the magnetic field, so that a wide base wound around the roller width direction can be obtained.
  • the material 2 is excellent in that the stress relaxation layer 3 that is a vapor deposition film can be efficiently formed.
  • the tension on the substrate 2 in each of the film forming rollers 19 and 20 may all be the same, but only the tension in the film forming roller 19 or the film forming roller 20 may be increased.
  • the film forming rollers 19 and 20 known rollers can be used as appropriate. As such film forming rollers 19 and 20, it is preferable to use ones having the same diameter from the viewpoint of forming a thin film more efficiently. Further, the diameter of the film forming rollers 19 and 20 is preferably in the range of 300 to 1000 mm ⁇ , particularly in the range of 300 to 700 mm ⁇ , from the viewpoint of discharge conditions, chamber space, and the like. If the diameter of the film forming roller is 300 mm ⁇ or more, the plasma discharge space will not be reduced, so that the productivity will not be deteriorated and it is possible to avoid applying the total amount of heat of the plasma discharge to the substrate 2 in a short time. It is preferable because damage to the material 2 can be reduced.
  • each film-forming roller 19 and 20 may be provided with a nip roll, and by providing the nip roll, the adhesion of the base material 2 to the film-forming rollers 19 and 20 is improved. Thereby, heat exchange is efficiently performed between the base material 2 and the film forming rollers 19 and 20, and there is an advantage that film uniformity is improved and heat wrinkles are suppressed.
  • the base material 2 is disposed on a pair of film forming rollers (film forming rollers 19 and 20) so that the surfaces of the base material 2 face each other.
  • a pair of film-forming rollers film-forming rollers 19
  • the stress relaxation layer component is deposited on the surface of the substrate 2 on the film formation roller 19 by the plasma CVD method, and further, the stress relaxation layer is formed on the film formation roller 20. Since components can be deposited, a stress relaxation layer can be efficiently formed on the surface of the substrate 2.
  • the winding roller 25 is not particularly limited as long as the optical film 1 having the stress relaxation layer 3 formed on the substrate 2 can be wound, and a known roller may be used as appropriate. it can.
  • the feed roller 12 and the take-up roller 25 may be a turret type.
  • the turret may be multiaxial with two or more axes, and may have a structure in which only some of the axes can be opened to the atmosphere.
  • gas supply pipe 21 and the vacuum pump those capable of supplying or discharging the raw material gas at a predetermined speed can be appropriately used.
  • the gas supply pipe 21 serving as a gas supply means is preferably provided in one of the facing spaces (discharge region, film formation zone) between the film formation roller 19 and the film formation roller 20, and is a vacuum serving as a vacuum exhaust means.
  • a pump (not shown) is preferably provided on the other side of the facing space. In this way, by providing the gas supply pipe 21 as the gas supply means and the vacuum pump as the vacuum exhaust means, the film formation gas is efficiently supplied to the facing space between the film formation roller 19 and the film formation roller 20. It is excellent in that the film formation efficiency can be improved.
  • the gas supply pipe 21 is provided on the center line between the film formation roller 19 and the film formation roller 20.
  • the present invention is not limited to this. You may shift
  • the gas supply pipe 21 is closer to one film formation roller and farther from the other film formation roller.
  • the film composition formed on the film forming roller 19 and the film composition formed on the film forming roller 20 become different, and the position of the gas supply pipe 21 may be appropriately shifted when it is desired to change the film quality.
  • the gas supply pipe 21 may be appropriately separated from or closer to the film forming roller on the center line (the arrangement position may be moved on the center line in the vertical direction).
  • the arrangement position may be moved on the center line in the vertical direction.
  • particles can be prevented from adhering to the gas supply pipe 21 by moving the gas supply pipe 21 away from the center axis of the film forming roller and separating the gas supply pipe 21 from the discharge space.
  • the film forming rate can be improved by bringing the film closer to the discharge space on the central axis of the film forming roller.
  • FIG. 2 there is one gas supply pipe 21, but there may be a plurality of gas supply pipes 21, and different supply gases may be discharged from each nozzle.
  • the plasma generating power source 22 a known power source for a plasma generating apparatus can be used as appropriate.
  • a power source 22 for generating plasma supplies power to the film forming roller 19 and the film forming roller 20 connected thereto, and makes it possible to use them as a counter electrode for discharging.
  • a power source AC power source or the like
  • a power source AC power source or the like that can alternately reverse the polarity of a pair of film forming rollers is used. It is preferable to use it.
  • such a plasma generating power source 22 is preferably capable of performing plasma CVD more efficiently, so that the applied power is preferably in the range of 100 W to 20 kW, and in the range of 100 W to 10 kW. More preferably.
  • the plasma generating power source 22 it is possible to perform plasma CVD more efficiently, so that the AC frequency is preferably in the range of 50 Hz to 13.56 MHz, and in the range of 50 Hz to 500 kHz. More preferably.
  • a high frequency power source in which both the high frequency current wave and the voltage wave are sine waves may be used.
  • a single power source for generating plasma 22 supplies power to both film forming rollers 19 and 20 (both film forming roller power supply), but the present invention is not limited to such a configuration.
  • the film roller may be supplied with power (one-side film formation roller power supply) and the other film formation roller may be grounded.
  • a method for supplying power to the film forming roller it is possible to supply power from only one end of the roller, or to supply power from both ends of the roller. In the case of supplying a high frequency band, it is possible to supply both ends of the roller because uniform supply is possible.
  • two-frequency feeding may be performed in which different frequencies are applied, and one film-forming roller and the other film-forming roller may be applied even when two different frequencies are applied to one film-forming roller.
  • a different frequency may be applied.
  • the plasma emission intensity in the discharge space is monitored from the outside, and if the desired emission intensity is not obtained, the distance between the magnetic fields (distance between the opposing rollers), the magnetic field intensity, and the power applied to the power source.
  • a feedback circuit that adjusts the power supply frequency, the amount of supplied gas, and the like to obtain a desired plasma emission intensity may be provided. By having such a feedback circuit, film formation / production can be stabilized.
  • the magnetic field generators 23 and 24 known magnetic field generators can be used as appropriate.
  • the base material 2 what formed the stress relaxation layer 3 previously on the cyclic polyolefin film can be used. As described above, by using the substrate 2 in which the stress relaxation layer 3 is formed in advance, the thickness of the stress relaxation layer 3 can be increased.
  • a discharge is generated between a pair of film forming rollers (film forming rollers 19 and 20) while supplying a film forming gas (such as a raw material gas) into the film forming chamber 28.
  • a film forming gas such as a raw material gas
  • the film forming gas is decomposed by plasma, and the film forming layer is formed on the surface of the base material 2 on the film forming roller 19 and the surface of the base material 2 on the film forming roller 20 by the plasma CVD method. It is formed by.
  • a racetrack-shaped magnetic field is formed in the vicinity of the roller surface facing the facing space (discharge region) along the length direction of the roller axes of the film forming rollers 19 and 20, and the plasma is converged on the magnetic field.
  • a reactive gas may be used in addition to the source gas.
  • a gas that reacts with the raw material gas to become an inorganic compound such as an oxide can be appropriately selected and used.
  • the stress relaxation layer 3 contains oxygen, for example, oxygen and ozone can be used as the reactive gas, and oxygen is preferably used from the viewpoint of simplicity.
  • a reactive gas for forming a nitride may be used.
  • nitrogen or ammonia can be used.
  • a carrier gas may be used as necessary in order to supply the source gas into the film forming chamber 28.
  • a discharge gas may be used as necessary in order to generate plasma discharge.
  • carrier gas and discharge gas known ones can be used as appropriate, and for example, rare gases such as helium, argon, neon, xenon, hydrogen, and nitrogen can be used.
  • the above-described manufacturing apparatus 10 shown in FIG. 2 is used to contain a silicon atom (Si), an oxygen atom (O), and a carbon atom (C), and in the C1s spectral region measured by X-ray photoelectron spectroscopy. Derived from the C—C bond relative to the sum of peak intensities derived from each bond of C—C, C—SiO, C—O, C ⁇ O and C ( ⁇ O) —O at each measurement position, obtained from the depth profile It is possible to form a stress relaxation layer in which the average value X AVE in the thickness direction of the ratio X (%) of the peak intensity is 1% or more and 40% or less.
  • Method for controlling the composition of the stress relaxation layer that is, the type of atoms contained, the values of [C] (at%) and [C AVE ] (at%), and the values of X (%) and X AVE (%)
  • the power of the plasma generation power source, the conveyance speed, the type of source gas used, the amount of source gas used, the amount of oxygen gas used, the source gas and oxygen gas used It is preferable to use a method in which the ratio, the degree of vacuum in the vacuum chamber, the conveyance speed, and the like are appropriately combined and controlled.
  • the pressure in the vacuum chamber (degree of vacuum) can be adjusted as appropriate according to the type of source gas.
  • the degree of vacuum is preferably 0.5 Pa or more and 50 Pa or less.
  • the power of the plasma generating power source 22 can be appropriately adjusted according to the type of source gas, the pressure in the vacuum chamber, and the like.
  • an electrode drum in this embodiment, the film forming roller 19 connected to the plasma generating power source 22 for discharging between the film forming roller 19 and the film forming roller 20.
  • the electric power to be applied to the gas can be adjusted as appropriate according to the type of the source gas, the pressure in the vacuum chamber, and the like. On the other hand, it is preferable to set it as 1 kW or more and 10 kW or less, for example.
  • the conveyance speed (line speed) of the base material 2 can be appropriately adjusted according to the type of raw material gas, the pressure in the vacuum chamber, and the like.
  • the conveyance speed is preferably 0.25 m / min or more, and more preferably 0.5 m / min or more.
  • a conveyance speed shall be 100 m / min or less, and it is more preferable to set it as 60 m / min or less.
  • composition of the stress relaxation layer that is, the type of atoms contained, the values of [C] (at%) and [C AVE ] (at%), and the values of X (%) and X AVE (%) are, for example, It is particularly preferable to control within the scope of the present invention by employing the following methods (1) to (4).
  • Control by plasma CVD source gas It is possible to control by appropriately using plasma CVD source materials having different ratios of carbon, hydrogen, oxygen and silicon in the molecule.
  • an organosilicon compound having a low Si—C bond ratio in the molecule is preferably used as a raw material for plasma CVD.
  • the number of Si—C bonds in one molecule in these organosilicon compounds is preferably 2 or less, more preferably 1 or 0, per one Si atom in one molecule.
  • cyclic siloxanes such as octamethylcyclotetrasiloxane and tetramethylcyclotetrasiloxane, and Si such as tetramethoxysilane and methyltrimethoxysilane
  • Si such as tetramethoxysilane and methyltrimethoxysilane
  • An alkoxysilane containing one per molecule is preferably used. These compounds can be used individually by 1 type or in combination of 2 or more types.
  • the supply amount of oxygen gas is suppressed to the extent that it is not completely oxidized, and conversely It is preferable to control by supplying a certain amount of oxygen gas to the raw material gas so that excessive carbon does not remain in the stress relaxation layer.
  • [C AVE ] (at%) decreases as the supply amount of oxygen gas increases.
  • an inert gas such as nitrogen, argon, or helium is supplied as necessary, and the supply amount of this inert gas is adjusted to thereby reduce the stress relaxation layer. It is possible to control by stabilizing the plasma at the time of forming and adjusting the oxidation reaction.
  • the present invention is not limited to using an inert gas.
  • Control of distance between electrodes in plasma discharge It can also be controlled by continuously changing the distance between electrodes for generating plasma discharge.
  • the plasma space generated on the surface of the base material in contact with the electrodes is continuously changed, so that the distance between the electrodes is continuously changed.
  • the composition in the stress relaxation layer can be continuously changed by changing the film forming conditions.
  • the stress relaxation layer according to the present invention is formed by the plasma CVD method using the plasma CVD apparatus (roll-to-roll method) having the counter roller electrode shown in FIG. It is characterized by forming a film.
  • This is stress relaxation that can improve crack resistance, durability in high temperature and high humidity environment, and adhesion of cyclic polyolefin film when mass-produced using plasma CVD equipment (roll-to-roll system) with opposed roller electrode This is because the layer can be manufactured efficiently.
  • the optical film which concerns on one form of this invention has a cyclic polyolefin film.
  • the cyclic polyolefin film represents a film containing 50% by mass or more of the cyclic polyolefin with respect to the total mass of the resin film.
  • the “resin film” refers to a resin film itself that can be formed from a resin composition containing a cyclic polyolefin, and does not include a stress relaxation layer or other layers that can be optionally included.
  • the content of the cyclic polyolefin is less than 50% by mass, it is not possible to obtain excellent properties such as transparency, heat resistance and electrical characteristics derived from the cyclic polyolefin.
  • the content of the cyclic polyolefin is preferably 80% by mass or more, and more preferably 90% by mass or more (upper limit 100% by mass).
  • the cyclic polyolefin used in the present invention is made of a polymer resin containing an alicyclic structure.
  • the cyclic polyolefin may be one obtained by polymerizing or copolymerizing a cyclic olefin, or may be obtained by addition copolymerization of a cyclic olefin and a monomer other than the cyclic olefin.
  • the unsaturated bond in the molecule may be changed to a saturated bond.
  • the cyclic polyolefin is not particularly limited, and a known one can be used.
  • Examples of the cyclic polyolefin include paragraphs “0015” to “0062” of JP-A-2004-67984, paragraphs “0005” to “0007” of JP-A-2005-254812, and paragraphs of JP-A-2008-274136.
  • “0016” to “0052”, paragraphs “0017” to “0036” of Japanese Patent Application Laid-Open No. 2014-106338, paragraphs “0063” to “0066” of Japanese Patent Application Laid-Open No. 2015-209487, and International Publication No. 2007/043885 However, it is not limited to those described in paragraphs “0404” to “0421”.
  • cyclic olefin forming a cyclic olefin norbornene, dicyclopentadiene, tetracyclododecene, ethyl tetracyclododecene, ethylidene tetracyclododecene, tetracyclo [7.4.0.1 10,13.
  • the cyclic polyolefin according to one embodiment of the present invention is preferably a cyclic polyolefin having a polar group.
  • Examples of the polar group include a hydroxy group, an alkoxyl group having 1 to 10 carbon atoms, an acyloxy group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group, a cyano group, and an amide.
  • alkoxyl group examples include a methoxy group and an ethoxy group
  • examples of the acyloxy group include an alkylcarbonyloxy group such as an acetoxy group and a propionyloxy group
  • Arylcarbonyloxy groups such as benzoyloxy groups
  • examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups
  • examples of aryloxycarbonyl groups include phenoxycarbonyl groups, naphthyloxycarbonyl groups, and fullerenes.
  • Examples of the triorganosiloxy group include trimethylsiloxy group and triethylsiloxy group; examples of the triorganosilyl group include: Example, if a trimethylsilyl group, triethylsilyl group and the like; examples of the amino group, for example a primary amino group and the like; the alkoxysilyl group, for example a trimethoxysilyl group, triethoxysilyl group, and the like. Among these, an alkoxycarbonyl group is preferable and a methoxycarbonyl group is more preferable.
  • Examples of the cyclic polyolefin according to the present invention include (co) polymers represented by the following formula.
  • R 1 to R 4 each independently represents a hydrogen atom, a halogen atom, a substituted or unsubstituted hydrocarbon group having 1 to 30 carbon atoms or a polar group, and the number of substituted or unsubstituted carbon atoms.
  • the hydrocarbon group of 1 to 30 may be bonded via a linking group having an oxygen atom, a nitrogen atom, a sulfur atom or a silicon atom, and two of R 1 and R 2 or R 3 and R 4 are bonded. May form a divalent hydrocarbon group, may form a carbocycle or a heterocycle, and each of the plurality of R 1 to R 4 may be the same or different.
  • at least one of R 1 to R 4 is a polar group, and p and m each independently represents an integer of 0 or more.
  • the polar group is the same as that described above.
  • halogen atom examples include a fluorine atom, a chlorine atom and a bromine atom.
  • hydrocarbon group having 1 to 30 carbon atoms examples include alkyl groups such as methyl group, ethyl group and propyl group; cycloalkyl groups such as cyclopentyl group and cyclohexyl group; alkenyl groups such as vinyl group, allyl group and propenyl group. Groups; aromatic groups such as phenyl, biphenyl, naphthyl, and anthracenyl groups; These hydrocarbon groups may be substituted, and examples of the substituent include halogen atoms such as fluorine atom, chlorine atom and bromine atom, phenylsulfonyl group and the like.
  • the substituted or unsubstituted hydrocarbon group having 1 to 30 carbon atoms may be directly bonded to the ring structure or may be bonded via a linking group.
  • the linking group include a divalent hydrocarbon group having 1 to 10 carbon atoms such as an alkylene group represented by the formula: — (CH 2 ) m — (m is an integer of 1 to 10), or an oxygen atom.
  • linking group containing an oxygen atom, nitrogen atom, sulfur atom or silicon atom include a carbonyl group [—CO—], a carbonyloxy group [—COO—], an oxycarbonyl group [—OCO—], a sulfonyl group [ —SO 2 —], ether bond [—O—], thioether bond [—S—], imino group [—NH—], amide bond [—NHCO—, —CONH—], siloxane bond [—OSi (R 2 )-(Wherein R is an alkyl group such as a methyl group or an ethyl group)], and a group in which two or more of these groups are linked.
  • R 1 and R 2 or R 3 and R 4 may be bonded to form a divalent hydrocarbon group, which may form a carbocyclic or heterocyclic ring, but is preferably not formed.
  • the carbocyclic or heterocyclic ring may be a monocyclic structure or a polycyclic structure, and the carbocyclic ring or the heterocyclic ring may be an aromatic ring or a non-aromatic ring. A ring is preferred.
  • At least one of R 1 to R 4 is a polar group, and the group other than the polar group of R 1 to R 4 is preferably a hydrogen atom.
  • M is preferably an integer of 0 to 3
  • p is preferably an integer of 0 to 3
  • more preferably m + p 0 to 4
  • more preferably m + p 0 to 2
  • m 1.
  • P 0 is particularly preferred.
  • copolymerizable monomer used for producing the (co) polymer represented by the above formula examples include cycloolefins such as cyclobutene, cyclopentene, cycloheptene, cyclooctene, and dicyclopentadiene.
  • the number of carbon atoms of the cycloolefin is preferably within the range of 4 to 20, more preferably within the range of 5 to 12.
  • the cyclic polyolefin can be used alone or in combination of two or more.
  • the molecular weight of the cyclic polyolefin is preferably 0.2 to 5 dl / g, more preferably 0.3 to 3 dl / g in terms of intrinsic viscosity [ ⁇ ] inh , and 0.4 to 1.5 dl / g. More preferably.
  • the number average molecular weight (Mn) in terms of polystyrene measured by gel permeation chromatography (GPC) is preferably 8000 to 100,000, more preferably 10,000 to 80,000, and further preferably 12,000 to 50,000. .
  • the polystyrene-equivalent weight average molecular weight (Mw) measured by gel permeation chromatography (GPC) is preferably 20,000 to 300,000, more preferably 30,000 to 250,000, and further preferably 40,000 to 200,000. .
  • Inherent viscosity [ ⁇ ] inh , number average molecular weight and weight average molecular weight are in the above ranges, so that heat resistance, water resistance, chemical resistance, mechanical properties of cyclic polyolefin, and molding as a polarizing plate protective film of the present invention Workability is improved.
  • the glass transition temperature (Tg) of the cyclic polyolefin that can be used in one embodiment of the present invention is usually preferably 110 ° C. or higher, more preferably 110 to 350 ° C., and more preferably 120 to 250 ° C. Is more preferable, and 120 to 220 ° C. is particularly preferable.
  • Tg is 110 ° C. or higher, deformation is less likely to occur due to use under high temperature conditions or secondary processing such as coating or printing.
  • Tg is 350 ° C. or lower, the case where the molding process becomes difficult is more reliably avoided, and the possibility that the resin is deteriorated by the heat during the molding process is further suppressed.
  • cyclic polyolefin a commercially available product can be preferably used as the cyclic polyolefin.
  • commercial products include Arton (registered trademark) G (for example, Arton: registered trademark G7810), Arton (registered trademark) F, Arton (registered trademark) R, and Arton (registered trademark) from JSR Corporation. These are commercially available under the trade name RX and can be used.
  • the cyclic polyolefin may contain various additives as long as the effects of the present invention are not impaired.
  • an additive a well-known thing can be used without being restrict
  • Preferable additives include, for example, inorganic fine particles, plasticizers, ultraviolet absorbers and the like, but are not limited thereto.
  • the light transmittance is preferably 80% or more, more preferably 85% or more, and further preferably 90% or more (upper limit 100%).
  • the light transmittance is determined by measuring the total light transmittance and the amount of scattered light using the method described in JIS K 7105: 1981, that is, using an integrating sphere light transmittance measuring device, and subtracting the diffuse transmittance from the total light transmittance. Can be calculated.
  • the present invention is not limited to those satisfying the above light transmittance range.
  • the elastic modulus at 90 ° C. of the cyclic polyolefin film according to one embodiment of the present invention is preferably 1.7 GPa or more. Within this range, crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness become better. This is because the durability of the cyclic polyolefin film is further improved against the stress applied during processing of the optical film and the stress generated when the optical film is aged in a high-temperature and high-humidity environment. This is considered to be because expansion is suppressed.
  • the elastic modulus at 90 ° C. is preferably 1.9 GPa or more.
  • the elastic modulus at 90 ° C. of the cyclic polyolefin film according to one embodiment of the present invention is preferably 2.7 GPa or less. Within this range, crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness become better.
  • the reason for this is considered that the cyclic polyolefin film becomes moderately flexible, thereby improving the brittleness of the cyclic polyolefin film and suppressing the occurrence and expansion of cracks. And when placed in a high-temperature and high-humidity environment in a state where the optical film and other members are bonded, the cyclic polyolefin film can follow the expansion and contraction of the other members, and the generation and expansion of cracks, In addition, it is considered that stress concentration at the interface between the two is suppressed. From the same viewpoint, the elastic modulus at 90 ° C. is more preferably 2.5 GPa or less.
  • the elastic modulus at 90 ° C. is a value obtained based on the following measurement method. That is, the elastic modulus (Pa) at 90 ° C. was determined using a tensile tester, Tensilon RTA-100 manufactured by Orientec Co., Ltd., and a furnace heated to 90 ° C. in accordance with the method described in JIS K 7127: 1999. It can be obtained by conducting a tensile test in a furnace heated to 90 ° C.
  • control method of the elasticity modulus at 90 degreeC of the cyclic polyolefin film is described in the manufacturing method of the cyclic polyolefin film mentioned later.
  • the film thickness of the cyclic polyolefin film which concerns on one form of this invention is not restrict
  • a method for producing a cyclic polyolefin film for example, a production method such as an inflation method, a T-die method, a calendar method, a cutting method, a casting method, an emulsion method, or a hot press method can be used. From the viewpoint of suppression, suppression of optical defects such as die lines, etc., solution casting by casting is preferred.
  • the method for producing a cyclic polyolefin film may include a casting step in which a dope containing a cyclic polyolefin, an additive that can be optionally included, a solvent, and the like is cast on a moving support to form a cast film.
  • the casting process includes a drying process in which drying air is blown onto the casting film.
  • the organic solvent useful for the preparation of the dope can be used without limitation as long as it dissolves the cyclic polyolefin component and the additive that can be optionally contained at the same time.
  • dichloromethane and the like and as a non-chlorinated organic solvent, methyl acetate, ethyl acetate, amyl acetate, acetone, tetrahydrofuran, 1,3-dioxolane, 1,4-dioxane, cyclohexanone, ethyl formate 2,2,2-trifluoroethanol, 2,2,3,3-hexafluoro-1-propanol, 1,3-difluoro-2-propanol, 1,1,1,3,3,3-hexafluoro -2-Methyl-2-propanol, 1,1,1,3,3,3-hexafluoro-2-propanol, 2,2,3,3,3-pentafluoro-1-propanol, nitroethane, etc.
  • Dichloromethane, methyl acetate, ethyl acetate, and acetone can be preferably used.
  • the dope preferably contains a linear or branched aliphatic alcohol having 1 to 4 carbon atoms in the range of 1 to 40% by mass.
  • a linear or branched aliphatic alcohol having 1 to 4 carbon atoms in the range of 1 to 40% by mass.
  • the ratio of alcohol in the dope increases, the web gels and peeling from the metal support becomes easy.
  • the ratio of alcohol is small, the role of promoting the dissolution of cyclic polyolefin, etc. in a non-chlorine organic solvent system There is also.
  • linear or branched aliphatic alcohol having 1 to 4 carbon atoms examples include methanol, ethanol, n-propanol, iso-propanol, n-butanol, sec-butanol, tert-butanol, propylene glycol monomethyl ether Etc.
  • ethanol is preferable because it has excellent dope stability, has a relatively low boiling point, good drying properties, and no toxicity.
  • the content ratio of the solvent contained in the dope is preferably 1% by mass or more based on the total mass of the dope. By making the content rate of the solvent contained in dope 1 mass% or more, the fall of productivity by defect generation
  • the content ratio of the solvent contained in the dope is more preferably 90% by mass or less, further preferably 85% by mass or less, and particularly preferably 80% by mass or less.
  • the content ratio of the solvent component can be appropriately adjusted from the production conditions of the film, the film thickness of the film to be produced, and the like.
  • additives may be appropriately added to the dope.
  • Resin and additives are dissolved in the above solvent to prepare a dope.
  • the dope is filtered through a filter medium and then degassed. It is preferable to use a filter medium having a collected particle diameter of 0.5 to 5 ⁇ m and a drainage time of 10 to 25 seconds / 100 mL.
  • the cast film refers to a film formed by casting a dope from a casting die onto a support, and refers to a dope until a film is formed by a stretching process or a second drying process described later.
  • the dope is cast on a support from a casting die. Specifically, the dope is sent from the tank to the casting die by a liquid feeding pump such as a pressurized metering gear pump, and is cast from the casting port of the casting die.
  • a liquid feeding pump such as a pressurized metering gear pump
  • the casting die one having an adjustable discharge port shape is preferable.
  • a pressure die that can easily make the thickness of the cast film uniform is preferable.
  • the pressure die include a coat hanger die and a T die, and any of them is preferably used.
  • two or more pressure dies may be arranged side by side, and the dope may be divided and discharged.
  • the discharge speed for discharging the dope from the casting die is preferably, for example, about 30 to 150 m / min in consideration of the balance with the moving speed of the support and productivity.
  • the support is preferably formed endlessly by an endless belt.
  • the endless belt is rotated by a rotating roller driven and controlled by a power source, and the casting film on the support is moved.
  • the moving speed of the support (the rotational speed of the endless belt) is preferably 60 to 150 m / min. By setting the moving speed of the support within this range, the cyclic polyolefin film can be produced at a higher speed.
  • the support one having a mirror-finished surface can be preferably used.
  • a stainless steel belt hereinafter also referred to as a stainless steel belt
  • a drum whose surface is plated with a casting can be preferably used.
  • the cast width can be 1 to 4 m.
  • the surface temperature of the support in the casting step is preferably ⁇ 50 to 40 ° C., more preferably 0 to 40 ° C., and further preferably 5 to 30 ° C.
  • the method for controlling the temperature of the support is not particularly limited, and there are a method of blowing warm air or cold air, and a method of bringing hot water into contact with the back side of the support.
  • the casting step may include an evaporation suppressing step of blowing a main solvent gas containing the main solvent in the solvent onto the casting film cast on the support before the drying step.
  • the main solvent refers to the solvent when one kind of solvent is used, and refers to the solvent having the largest volume ratio when a mixed solvent composed of a plurality of solvents is used.
  • the drying process included in the casting process will be described.
  • the drying step is a step of drying the cast film as a soft film from the support to the extent that the cast film can be peeled by blowing dry air on the cast film that has undergone the evaporation suppression process.
  • this drying step it is possible to adjust the elastic modulus at 90 ° C. of the produced cyclic polyolefin film by adjusting the drying speed of the film.
  • the elastic modulus at 90 ° C. of the cyclic polyolefin film can be adjusted by changing the drying rate of the cast film at the time of film production by the material used, the solution casting method or the melt casting method. .
  • control by the drying rate is preferable, and control by the drying rate in the solution pouring method is more preferable.
  • shrinkage occurs due to drying of the solvent at the time of film formation, and the resin such as cyclic polyolefin is oriented.
  • the drying speed is increased, the orientation by drying shrinkage is oriented. It becomes stronger and the elastic modulus can be increased.
  • the drying speed is slowed, the orientation due to drying shrinkage becomes weak and the elastic modulus can be reduced.
  • the drying speed can be controlled by the environmental temperature during drying, the temperature of hot air, the air volume, and the like.
  • the residual solvent ratio when peeling the cast film from the support is preferably 20% by mass or more and 90% by mass or less.
  • the drying conditions are adjusted so as to be within such a range.
  • the drying method is not particularly limited, and for example, a nozzle or a punch plate can be used as a drying means.
  • the condition of the drying air is not particularly limited as long as the casting film on the support can be dried.
  • the temperature of the drying air is preferably 30 to 160 ° C. from the viewpoint of drying efficiency and suppression of foaming.
  • the relative humidity of the drying air is preferably 30% RH or less, more preferably 20% RH or less, and further preferably 10% RH or less (lower limit 0%) from the viewpoint of drying efficiency. RH).
  • As the drying air for example, air of 50 ° C. and 10% RH is preferably used.
  • the static pressure of the drying air is preferably 100 Pa or more. When the static pressure of the drying air is 100 Pa or more, it becomes easier to increase the elastic modulus of the cyclic polyolefin film at 90 ° C.
  • the static pressure of the drying air is preferably 1000 Pa or more, and preferably 1300 Pa or more. Moreover, it is preferable that the static pressure of a dry wind is 2500 Pa or less. When the static pressure of the drying air is 2500 Pa or less, it becomes easier to reduce the elastic modulus at 90 ° C. of the cyclic polyolefin film and control it within the range defined in the present invention. From the same viewpoint, the static pressure of the drying air is preferably 2000 Pa or less, and preferably 1900 Pa or less.
  • An example of preferable drying conditions includes blowing dry air at 50 ° C. and 10% RH at a static pressure of 1000 to 2500 Pa, but the present invention is not limited to these conditions.
  • the drying means may be provided on the downstream side of the air supply means along the moving direction of the support. Moreover, the drying means may be provided at a plurality of locations.
  • the dope preparation step is a step of preparing the dope cast on the support from the casting die in the casting step.
  • the method for preparing the dope is not particularly limited.
  • the dope can be prepared by adding a resin such as cyclic polyolefin into the above-described solvent using a melting pot.
  • the content of the resin in the dope is preferably 5% by mass or more as the solid content concentration. When the resin content is 5% by mass or more as the solid content concentration, it becomes possible to dry more sufficiently on the support, and a part of the cast film remains on the support at the time of peeling, thereby causing contamination of the support. The occurrence frequency is further reduced.
  • the content of the resin in the dope is preferably 10% by mass or more as a solid content concentration, more preferably 15% by mass or more, and further preferably 20% by mass or more. . Moreover, it is preferable that content of resin in dope is 99 mass% or less as solid content concentration.
  • the content of the resin in the dope is 99% by mass or less, the viscosity of the dope becomes moderately low, so that the pressure becomes too high when the filter is clogged in the dope preparation process or cast onto the support. As a result, the frequency at which extrusion from the casting die becomes difficult is further reduced.
  • the content of the resin in the dope is preferably 50% by mass or less, and more preferably 40% by mass or less as the solid content concentration.
  • a method of dissolving the resin in the solvent As a method of dissolving the resin in the solvent, a method of dissolving at normal pressure, a method of dissolving below the boiling point of the solvent, a method of dissolving above the boiling point of the solvent while applying pressure, JP-A-9-95544 and JP-A-9- As described in JP-A-95557 or JP-A-9-95538, a method of employing a cooling dissolution method, a method of dissolving at a high pressure as described in JP-A-11-21379, or the like may be employed. it can. In these, the method of melt
  • the obtained dope is filtered with a filter medium, defoamed, and then sent to a casting die with a liquid feed pump.
  • a filter medium having a collected particle diameter of 0.5 ⁇ m or more and 5 ⁇ m or less and a drainage time of 10 seconds / 100 mL or more and 25 seconds / 100 mL or less.
  • the dope prepared as described above is cast on a support from a casting die.
  • a peeling process is a process of peeling the cast film which formed the soft film through the drying process from a support body with a peeling roll.
  • the peeled soft film is then subjected to a second drying step, a stretching step, a heat treatment step, a winding step, and the like that can be optionally provided to produce a cyclic polyolefin film.
  • the temperature at the peeling position on the support is preferably 10 ° C. or higher and 40 ° C. or lower, more preferably 11 ° C. or higher and 30 ° C. or lower.
  • the peeling tension at the time of peeling the support and the casting film is preferably 245 N / m or less, but from the viewpoint that wrinkles at the time of peeling are more difficult to enter, it is 190 N / m or less. More preferably, it is more preferably 166.6 N / m or less, and particularly preferably 137.2 N / m or less. Further, from the viewpoint of obtaining better peelability, the peel tension is preferably 50 N / m or more.
  • the second drying step, stretching step, heat treatment step, and winding step are each a drying device that alternately conveys the peeled cast film with rollers arranged inside, and a tenter that holds and conveys both ends of the cast film. It is a step of producing a cyclic polyolefin film by performing drying, stretching, and heat treatment, respectively, using at least one of the stretching devices.
  • a winding process is a process of winding up the obtained cast film. Depending on the configuration of the apparatus, a plurality of steps may be performed simultaneously.
  • the drying process performed with respect to the soft film which peeled is called the 2nd drying process for the purpose of distinguishing from the said drying process.
  • a drying method in the second drying step a method of spraying hot air on both surfaces of the cast film is generally used, but a method of heating by applying microwaves instead of hot air can also be adopted. Since the cast film is likely to cause surface unevenness due to rapid drying, it is preferable to dry from the time when the residual solvent ratio becomes 15% by mass or less, and it is more preferable to dry from the time when the residual solvent rate becomes 8% by mass or less. preferable.
  • the drying temperature is preferably 40 to 250 ° C.
  • the tenter of the tenter stretching apparatus is not particularly limited, and a known tenter such as a pin tenter or a clip tenter can be used.
  • the stretching direction is not particularly limited, and may be a film transport direction, a direction perpendicular to the film transport direction, a film longitudinal direction, or a film width direction. Also good.
  • the stretching operation may be performed in multiple stages, or biaxial stretching may be performed in the longitudinal direction and the width direction.
  • biaxial stretching you may extend
  • simultaneous biaxial stretching includes a case of stretching in one direction and contracting the other while relaxing the tension.
  • the stretching ratio is not particularly limited, but the stretching ratio is 1.01 times (stretching ratio: 1%) or more and 1.50 times (stretching ratio: 50%) or less. It is more preferable that it is 1.01 times (stretching ratio: 1%) or more and 1.10 times (stretching ratio: 10%) or less, and 1.01 times (stretching ratio: 1%) or more and 1.05. It is more preferable that it is not more than double (stretching ratio: 5%).
  • the residual solvent ratio of the cast film when stretching with a tenter is preferably 3% by mass or more and 15% by mass or less, preferably 3% by mass or more and 8% by mass or less at the start of the tenter (at the start of stretching). It is more preferable to perform drying while applying a tenter until the residual solvent ratio of the cast film becomes 5% by mass or less.
  • the drying temperature when stretching with a tenter is preferably 30 ° C. or more, and the glass transition temperature of the cyclic polyolefin (in the case of including a plurality of cyclic polyolefins, the glass transition temperature of these cyclic polyolefins).
  • the temperature is not higher than the highest temperature ( ⁇ + 30 ° C.) 30 ° C. higher than ⁇ .
  • the temperature within such a range varies depending on the type of cyclic polyolefin, but as preferred stretching temperatures, 30 ° C. or higher and 190 ° C. or lower, 30 ° C. or higher and 160 ° C. or lower, 50 ° C. or higher and 150 ° C. or lower, 70 degreeC or more and 140 degrees C or less etc. are mentioned.
  • a winding process is a process of winding up with a winder as a cyclic polyolefin film.
  • the cyclic polyolefin film at the time of winding it is preferable that the residual solvent rate in a cast film is 1 mass% or less.
  • the winding method is not particularly limited, and a known winding method can be employed.
  • a constant torque method for example, a constant torque method, a constant tension method, a taper tension method, a program tension control method with a constant internal stress, or the like can be employed. .
  • the winding length is not particularly limited, but is preferably 100 m or more and 8000 m or less, and is usually wound in a roll shape. Moreover, it is preferable that the width
  • the optical film according to one embodiment of the present invention may have a known functional layer.
  • a hard coat layer As the functional layer, a hard coat layer, an anchor coat layer, a smooth layer, and the layers described in paragraphs “0036” to “0038” of JP-A-2006-289627 can be preferably used.
  • the optical film which concerns on one form of this invention may have as a hard-coat layer.
  • Known materials, methods, and the like can be appropriately employed as the constituent material and the forming method of the hard coat layer.
  • the formation place of the anchor coat layer is not particularly limited, but is preferably the outermost layer on the surface of the cyclic polyolefin film opposite to the surface on which the stress relaxation layer is present.
  • the optical film according to one embodiment of the present invention may have an anchor coat layer as an easily adhesive layer for the purpose of improving adhesiveness (adhesion).
  • an anchor coat layer As the constituent material and forming method of the anchor coat layer, the materials and methods disclosed in paragraphs “0229” to “0232” of JP2013-52561A can be appropriately employed.
  • the formation location of the anchor coat layer is not particularly limited, but is preferably the surface of the cyclic polyolefin film, and more preferably has a configuration in which the cyclic polyolefin film, the anchor coat layer, and the stress relaxation layer are in direct contact with each other in this order.
  • the optical film according to one embodiment of the present invention may have a smooth layer.
  • the smooth layer is for flattening the rough surface of the substrate on which protrusions and the like exist, or for filling the unevenness and pinholes generated in the stress relaxation layer with the protrusions existing on the resin substrate to flatten the surface. It is a layer to be provided.
  • the materials, methods, etc. disclosed in paragraphs “0233” to “0248” of JP2013-52561A are appropriately employed for the constituent material, forming method, surface roughness, layer thickness, etc. of the smooth layer.
  • the location where the smooth layer is formed is not particularly limited, but is preferably the surface of the cyclic polyolefin film, and more preferably has a configuration in which the cyclic polyolefin film, the smooth layer, and the stress relaxation layer are in direct contact with each other in this order.
  • the anchor coat layer described above may also function as a smooth layer.
  • the optical film according to one aspect of the present invention exhibits good crack resistance during punching and cutting of a film during polarizing plate processing, and is used in a durability test of a polarizing plate and a display device. It has high durability that can sufficiently suppress crack expansion over time in the environment.
  • the optical film according to one embodiment of the present invention has particularly good adhesiveness particularly when bonded to a hydrophilic member such as a polyvinyl alcohol polarizer.
  • the optical film according to one embodiment of the present invention is a polarizing plate protective film.
  • the polarizing plate according to one embodiment of the present invention includes the optical film according to one embodiment of the present invention or the polarizing plate protective film according to one embodiment of the present invention, and the polarizing plate protection according to one embodiment of the present invention. More preferably, it includes a film.
  • the polarizing plate according to one embodiment of the present invention preferably has a configuration having the optical film according to one embodiment of the present invention as a polarizing plate protective film on at least one surface of the polarizer, and on one surface of the polarizer. And having the optical film according to one embodiment of the present invention as a polarizing plate protective film, and having the optical film according to one embodiment of the present invention or the cellulose triacetate film as a polarizing plate protective film on the other surface of the polarizer. Is more preferable, and it is more preferable that the optical film according to one embodiment of the present invention is provided on both surfaces of the polarizer as a polarizing plate protective film.
  • the polarizing plate according to one embodiment of the present invention can be manufactured by a general method. It is preferable that the stress relaxation layer of the optical film according to one embodiment of the present invention is surface-treated by corona discharge treatment, plasma treatment, or the like and bonded to a polarizer using a known adhesive.
  • the present invention is not limited to this.
  • an easy adhesion treatment such as a corona discharge treatment is performed on the stress relaxation layer of the optical film.
  • the surface of a polarizer and the stress relaxation layer of the optical film which concerns on one form are bonded together using a well-known adhesive agent.
  • an optical film according to an embodiment of the present invention that has been subjected to easy adhesion treatment such as corona discharge treatment, or other known film, using a known adhesive on the other surface of the polarizer.
  • either film may be bonded first.
  • the cellulose acylate film is subjected to alkali saponification treatment, and at least the polarizer It is preferable to attach to one surface using a completely saponified polyvinyl alcohol aqueous solution (water paste).
  • the polarizer is formed by forming a polyvinyl alcohol aqueous solution into a film and dyeing it by uniaxial stretching, or by dyeing and then uniaxially stretching and then preferably performing a durability treatment with a boron compound. .
  • the thickness of the polarizer is preferably in the range of 5 to 30 ⁇ m, particularly preferably in the range of 10 to 20 ⁇ m.
  • the ethylene unit content described in JP 2003-248123 A, JP 2003-342322 A, etc. is in the range of 1 to 4 mol%
  • the polymerization degree is in the range of 2000 to 4000
  • the saponification degree is 99.
  • Ethylene-modified polyvinyl alcohol in the range of 0.0 to 99.99 mol% is also preferably used.
  • an ethylene-modified polyvinyl alcohol film having a hot water cutting temperature in the range of 66 to 73 ° C. is preferably used.
  • a polarizer using this ethylene-modified polyvinyl alcohol film has excellent polarization performance and durability performance, and has few color spots and is particularly preferably used for a display device.
  • a protective film is normally bonded by the both sides or one side.
  • Corona discharge treatment is treatment performed by applying a high voltage of 1 kV or more between electrodes at atmospheric pressure and discharging.
  • oxygen-containing polar groups hydroxy group, carbonyl group, carboxylic acid group, etc.
  • the corona discharge treatment can be performed using a commercially available apparatus manufactured by Kasuga Electric Co., Ltd. or Toyo Electric Co., Ltd.
  • the stress relaxation layer and the polarizer of the optical film according to one embodiment of the present invention are preferably bonded with an active energy ray-curable adhesive.
  • an active energy ray curable adhesive it is preferable to use an ultraviolet curable adhesive.
  • the ultraviolet curable adhesive composition constituting the ultraviolet curable adhesive includes a photo radical polymerization composition utilizing photo radical polymerization, a photo cation polymerization composition utilizing photo cation polymerization, and photo radical polymerization and light.
  • a hybrid composition using cationic polymerization is known.
  • the radical photopolymerizable composition includes a radically polymerizable compound containing a polar group such as a hydroxy group and a carboxy group described in JP-A-2008-009329 and a radically polymerizable compound not containing a polar group at a specific ratio. Composition) and the like are known.
  • a cationic photopolymerization type composition as disclosed in JP2011-08234A, ( ⁇ ) a cationic polymerizable compound, ( ⁇ ) a cationic photopolymerization initiator, and ( ⁇ ) a wavelength longer than 380 nm.
  • an ultraviolet curable adhesive composition containing each component of a photosensitizer exhibiting maximum absorption in the light of ( ⁇ ) and a naphthalene-based photosensitization aid.
  • other ultraviolet curable adhesives may be used.
  • the optical film according to an aspect of the present invention and the polarizing plate protective film according to an aspect of the present invention have excellent crack resistance and a high temperature and high humidity environment in addition to the excellent properties of the optical film used by the cyclic polyolefin film. Both durability and adhesiveness are achieved.
  • the optical film according to one embodiment of the present invention and the polarizing plate according to one embodiment of the present invention sufficiently suppress the crack expansion with time in a high-temperature and high-humidity environment used in a durability test of a display device or the like. High durability.
  • a display device includes the optical film according to one embodiment of the present invention or the polarizing plate according to one embodiment of the present invention.
  • the display device is not particularly limited, but is preferably an organic EL element or a liquid crystal display device, and more preferably a liquid crystal display device.
  • a liquid crystal display device includes a liquid crystal cell in which a liquid crystal is sandwiched between a transparent substrate and the other transparent substrate, and directly or on the outside of at least one of these transparent substrates.
  • the optical film according to one embodiment of the present invention or the polarizing plate according to one embodiment of the present invention is provided.
  • cyclic polyolefin film 1 A main dope having the following composition was prepared. First, dichloromethane and ethanol were added to the pressure dissolution tank. The cyclic polyolefin resin 1 was added to a pressure dissolution tank containing a mixed solution of dichloromethane and ethanol with stirring. This was completely dissolved with heating and stirring. This was designated as Azumi Filter Paper No. The main dope was prepared by filtration using 244. As cyclic polyolefin resin, ARTON (registered trademark) made by JSR Corporation G7810 was used. The cyclic polyolefin resin 1 is a resin having an alkoxycarbonyl group having a glass transition temperature of 178 ° C.
  • the dope was uniformly cast on a stainless steel belt support at a temperature of 31 ° C. and a width of 1800 mm.
  • the temperature of the stainless steel belt was controlled at 28 ° C.
  • the solvent was evaporated until the amount of residual solvent in the cast (cast) film reached 40% by mass.
  • drying air of 50 ° C. and 10% RH was sprayed at a static pressure of 1000 Pa.
  • the film was peeled off from the stainless steel belt support with a peeling tension of 110 N / m.
  • the peeled film was stretched 5% in the width direction using a tenter while applying heat at 140 ° C.
  • the residual solvent at the start of stretching was 15% by mass.
  • drying was completed while transporting the drying zone with a large number of rollers, and the ends sandwiched between tenter clips were trimmed, and then wound up.
  • the drying temperature was 130 ° C. and the transport tension was 100 N / m.
  • a cyclic polyolefin film 1 having a thickness of 25 ⁇ m was produced.
  • Cyclic polyolefin film 2 In the production of the cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed in the same manner except that the drying air at 50 ° C. and 10% RH was sprayed at a static pressure of 2500 Pa. A cyclic polyolefin film 2 having a thickness of 25 ⁇ m was produced.
  • Cyclic polyolefin film 3 In the production of the cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1300 Pa. A cyclic polyolefin film 3 having a thickness of 25 ⁇ m was prepared.
  • Cyclic polyolefin film 4 In the production of the above-mentioned cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1700 Pa. A cyclic polyolefin film 4 having a thickness of 25 ⁇ m was produced.
  • Cyclic polyolefin film 5 In the production of the above-mentioned cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1900 Pa. A cyclic polyolefin film 5 having a thickness of 25 ⁇ m was prepared.
  • roller CVD method Formation of stress relaxation layer: Roller CVD method
  • One of the produced cyclic polyolefin films was selected as the resin substrate.
  • this method is referred to as “roller CVD method”
  • one surface of the cyclic polyolefin film is brought into contact with the film forming roller. Then, a cyclic polyolefin film was attached to the apparatus.
  • the frequency of the power source for plasma generation is set to 70 kHz, the conveyance speed, the supply amount of tetramethylcyclotetrasiloxane (TMCTS) as a raw material gas, and the supply amount of oxygen gas (O 2 )
  • TCTS tetramethylcyclotetrasiloxane
  • O 2 oxygen gas
  • optical films according to Examples 1 to 15 and Comparative Examples 1 to 4 were produced.
  • the combinations of the cyclic polyolefin film and the stress relaxation layer used in forming each optical film are summarized in Table 1 below.
  • Table 1 the unit of the supply amount of the source gas and the supply amount of the oxygen gas was sccm (Standard Cubic Centimeter per Minute).
  • Etching ion species Argon (Ar + ) Etching rate (SiO 2 thermal oxide film equivalent value): 0.05 nm / sec, Etching interval (SiO 2 equivalent value): 2 nm
  • X-ray photoelectron spectrometer manufactured by Thermo Fisher Scientific, model name “VG Theta Probe”, -Irradiation X-ray: single crystal spectroscopy AlK ⁇ , X-ray spot and its size: 800 ⁇ m ⁇ 400 ⁇ m ellipse.
  • a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve were obtained by performing a wide scan spectrum analysis for measuring the entire region of the stress relaxation layer.
  • the depth from the outermost surface side in the layer thickness direction of the stress relaxation layer when the composition ratio of oxygen atoms (O) which is a part of the total composition forming the stress relaxation layer is 30 at% or less is calculated.
  • the silicon atom of the stress relaxation layer, the oxygen atom, and the carbon atom were analyzed as follows.
  • each stress relaxation layer contained silicon atoms (Si), oxygen atoms (O) and carbon atoms (C). It was confirmed to contain.
  • Table 2 shows the elastic modulus (GPa) at 90 ° C. of each cyclic polyolefin film, and [C AVE ] (at%) and X AVE (%) of each stress relaxation layer.
  • the thickness of each stress relaxation layer was measured by observing the depth from the outermost surface to the interface with the substrate in the stacking direction of the stress relaxation layer by cross-sectional observation using a transmission electron microscope (TEM). In this measurement, the layer thickness was measured arbitrarily at 10 locations, and the average value was taken as the layer thickness.
  • TEM transmission electron microscope
  • ⁇ FIB processing ⁇ Apparatus SMI2050 manufactured by Seiko Instruments Inc. (SII), ⁇ Processed ions: Ga (30 kV), Sample thickness: 100-200 nm.
  • Punching defect occurrence rate (%) is 0% or more and less than 5%.
  • the punching defect occurrence rate (%) is 5% or more and less than 15%.
  • Punching defect occurrence rate (%) is 15% or more and less than 25%.
  • the punching defect occurrence rate (%) is 25% or more and less than 35%.
  • the punching defect occurrence rate (%) is 35% or more.
  • each polarizing plate was produced using each of the obtained optical films as a polarizing plate protective film.
  • Each polarizing plate was created by the following method.
  • the produced optical film was prepared, and the surface of the stress relaxation layer was subjected to corona discharge treatment.
  • the corona discharge treatment was performed at a corona output intensity of 2.0 kW and a line speed of 18 m / min.
  • the prepared UV curable adhesive solution is applied to the surface of the stress-relieving layer subjected to the corona discharge treatment of the first polarizing plate protective film with a bar coater so that the film thickness after curing is about 3 ⁇ m.
  • the produced polarizer thickness 15 ⁇ m
  • the second polarizing plate protective film a film of the same type as the optical film was further prepared, and the surface of the stress relaxation layer was subjected to corona discharge treatment.
  • the conditions of the corona discharge treatment were a corona output intensity of 2.0 kW and a speed of 18 m / min.
  • the prepared ultraviolet curable adhesive liquid is applied with a bar coater so that the film thickness after curing is about 3 ⁇ m. Coating was performed to form an ultraviolet curable adhesive layer.
  • a polarizer bonded to one surface of the first polarizing plate protective film is bonded to the ultraviolet curable adhesive layer, and the first polarizing plate protective film / UV curable adhesive layer / polarizer.
  • the ultraviolet-ray curable adhesive layer / The laminated body with which the 2nd polarizing plate protective film was laminated
  • ultraviolet rays are irradiated from both sides of the laminate using an ultraviolet irradiation device with a belt conveyor (the lamp uses a D bulb manufactured by Fusion UV Systems) so that the integrated light quantity becomes 750 mJ / cm 2.
  • the ultraviolet curable adhesive layers was cured to produce a polarizing plate.
  • VA type liquid crystal display device 42 inch type, direct type backlight
  • the backlight side polarizing plate and the viewing side polarizing plate of the liquid crystal cell are peeled off.
  • Each polarizing plate produced in the same manner is bonded to both sides of the liquid crystal cell, and the polarizing direction of the polarizing plate is such that the absorption axis is oriented in the same direction as the previously bonded polarizing plate.
  • a liquid crystal display device was manufactured. Here, the polarizing plate bonded to the liquid crystal cell was the same on both sides.
  • Durability in a high temperature and high humidity environment is as follows.
  • the liquid crystal display device thus produced was subjected to a durability test for 500 hours after lighting a direct type backlight in a 40 ° C., 90% relative humidity environment. 24 hours after turning on the backlight at room temperature, the degree of light leakage when displaying the screen in black was observed and evaluated according to the following evaluation criteria.
  • the durability under a high temperature and high humidity environment represents a better result as the degree of light leakage is smaller, and rank 3 or higher is a desirable durability.
  • the optical film according to the present invention contains a cyclic polyolefin film and silicon atoms (Si), oxygen atoms (O) and carbon atoms (C) disposed thereon, and an average value of the C—C bond ratio. And a stress relaxation layer having X AVE of 1% to 40%. From the results of Table 2, the optical film according to each example of the present invention is more resistant to cracking than the optical film according to each comparative example in which the average value X AVE of the C—C bond ratio is outside the scope of the present invention. It was confirmed that the film was excellent in durability and adhesion under high temperature and high humidity.
  • the optical film according to the present invention has an elastic modulus at 90 ° C. of the cyclic polyolefin film of 1. It was confirmed that when it was 9 GPa or more and 2.5 GPa or less, it was further excellent in crack resistance, durability in a high temperature and high humidity environment, and adhesiveness.

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Abstract

The present invention provides a means which enables the achievement of good crack resistance, and durability and adhesiveness under a high-temperature and high-humidity environment of a cyclic polyolefin film for optics application. The present invention relates to an optical film comprising a cyclic polyolefin film and a stress relaxation layer disposed on the cyclic polyolefin film, wherein the stress relaxation film contains Si atoms, O atoms and C atoms, and an average value XAVE in a thickness direction of a ratio X(%) of a C-C bond to the sum total of peak intensities resulting from C-C, C-SiO, C-O, C=O and C(=O)-O bonds at each measurement position found from a depth profile of a C1s spectral region measured by X-ray photoelectron spectroscopy of the stress relaxation layer is 1-40% inclusive.

Description

光学フィルム、偏光板保護フィルム、およびこれらを含む偏光板、ならびにこれらを含む表示装置Optical film, polarizing plate protective film, polarizing plate including these, and display device including these
 本発明は、光学フィルム、偏光板保護フィルム、およびこれらを含む偏光板、ならびにこれらを含む表示装置に関する。 The present invention relates to an optical film, a polarizing plate protective film, a polarizing plate including these, and a display device including these.
 近年、表示デバイスである液晶表示装置や有機エレクトロルミネッセンス表示装置用の偏光板保護フィルムや位相差フィルム等の光学フィルムなど、高透明性、高機能性及び軽量化を実現した可撓性を有する樹脂フィルムへの要望は大きい。樹脂フィルムのなかでも、環状ポリオレフィンフィルムは、透明性、耐熱性、電気特性等に優れることから、光学フィルムとしての応用が検討されている。 In recent years, flexible resins that have achieved high transparency, high functionality, and light weight, such as polarizing film protective films and retardation films for liquid crystal display devices that are display devices and organic electroluminescence display devices. There is a great demand for film. Among resin films, the cyclic polyolefin film is excellent in transparency, heat resistance, electrical characteristics, and the like, and therefore, application as an optical film is being studied.
 しかしながら、環状ポリオレフィンフィルムは、打ち抜き加工や裁断加工時に、端部に微小なクラックが発生し易いことが知られている。この端部の微小なクラックや、これに起因して生じるひび割れ等の欠陥は、例えば環状ポリオレフィンフィルムを表示装置に使用した際に表示故障の原因となりうるものである。これより、光学用途の環状ポリオレフィンフィルムとしては、フィルム強度を改善する技術が検討されている。 However, it is known that the cyclic polyolefin film is liable to generate minute cracks at the end during punching or cutting. Such defects such as minute cracks at the ends and cracks caused by the cracks can cause display failure when a cyclic polyolefin film is used in a display device, for example. Thus, as a cyclic polyolefin film for optical use, a technique for improving the film strength has been studied.
 特開2004-67984号公報には、ノルボルネン系樹脂と、特定構造を有するシクロオレフィン系樹脂とを含有する樹脂組成物から得られる光学フィルムが開示されている。そして、同文献には、光学フィルムが当該構成を有することで、透明性、透湿性および強度が改善されうることが開示されている。 JP-A-2004-67984 discloses an optical film obtained from a resin composition containing a norbornene resin and a cycloolefin resin having a specific structure. And the same literature discloses that transparency, moisture permeability, and strength can be improved by the optical film having this configuration.
 また、特開2008-274136号公報には、衝撃強度が1000J/m~30000J/mである、シクロオレフィン系樹脂フィルムが開示されており、当該フィルムを光学フィルムとして用いることで、打ち抜き加工時のクラックの発生が抑制されうることが開示されている。 Japanese Patent Application Laid-Open No. 2008-274136 discloses a cycloolefin-based resin film having an impact strength of 1000 J / m to 30000 J / m, and by using the film as an optical film, It is disclosed that the occurrence of cracks can be suppressed.
 しかしながら、特開2004-67984号公報の技術は、フィルムの打ち抜き加工や裁断加工時におけるクラック発生、および高温高湿環境下における経時でのクラック拡大を十分に抑制することができないことから、表示故障が十分に抑制されないという問題がある。また、特開2008-274136号公報の技術は、高温高湿環境下における経時でのクラックの発生または拡大を十分に抑制することができないことから、表示故障が十分に抑制されないという問題がある。さらに、これらの技術は共に、環状ポリオレフィンフィルムと偏光子等の他の部材とを貼合した場合、屈曲時に環状ポリオレフィンフィルムと他の部材との間で層間剥離が発生するとの問題がある。 However, the technique disclosed in Japanese Patent Application Laid-Open No. 2004-67984 cannot sufficiently suppress crack generation at the time of film punching or cutting, and crack expansion over time in a high-temperature and high-humidity environment. There is a problem that is not sufficiently suppressed. In addition, the technique disclosed in Japanese Patent Application Laid-Open No. 2008-274136 has a problem that display failure is not sufficiently suppressed because generation or expansion of cracks over time in a high temperature and high humidity environment cannot be sufficiently suppressed. Furthermore, both of these techniques have a problem that when the cyclic polyolefin film and another member such as a polarizer are bonded, delamination occurs between the cyclic polyolefin film and the other member during bending.
 そこで本発明は、光学用途の環状ポリオレフィンフィルムについて、良好なクラック耐性、高温高湿環境下における耐久性、および接着性を両立させうる手段を提供することを目的とする。 Therefore, an object of the present invention is to provide a means capable of achieving both good crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness for a cyclic polyolefin film for optical use.
 本発明の上記課題は、以下の手段により解決される。 The above-mentioned problem of the present invention is solved by the following means.
 環状ポリオレフィンフィルムと、
 環状ポリオレフィンフィルム上に配置された応力緩和層と、を有し、
 前記応力緩和層は、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有し、かつ、
 前記応力緩和層のX線光電子分光法により測定されるC1sスペクトル領域のデプスプロファイルから求められる、各測定位置におけるC-C、C-SiO、C-O、C=OおよびC(=O)-Oの各結合に由来するピーク強度の総和に対するC-C結合に由来するピーク強度の割合X(%)の、厚さ方向の平均値XAVEが1%以上40%以下である、
光学フィルム。
A cyclic polyolefin film;
A stress relieving layer disposed on the cyclic polyolefin film,
The stress relaxation layer contains silicon atoms (Si), oxygen atoms (O) and carbon atoms (C), and
C—C, C—SiO, C—O, C═O and C (═O) — at each measurement position, obtained from the depth profile of the C1s spectral region measured by X-ray photoelectron spectroscopy of the stress relaxation layer. The average value X AVE in the thickness direction of the ratio X (%) of the peak intensity derived from the C—C bond to the sum of the peak intensity derived from each bond of O is 1% or more and 40% or less,
Optical film.
本発明に係る光学フィルムの一例を示す断面模式図である。It is a cross-sectional schematic diagram which shows an example of the optical film which concerns on this invention. 本発明に係る応力緩和層の形成に用いられる製造装置の一例を示す模式図である。It is a schematic diagram which shows an example of the manufacturing apparatus used for formation of the stress relaxation layer which concerns on this invention.
 本発明の一形態は、環状ポリオレフィンフィルムと、環状ポリオレフィンフィルム上に配置された応力緩和層と、を有し、前記応力緩和層は、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有し、かつ、前記応力緩和層のX線光電子分光法により測定されるC1sスペクトル領域のデプスプロファイルから求められる、各測定位置におけるC-C、C-SiO、C-O、C=OおよびC(=O)-Oの各結合に由来するピーク強度の総和に対するC-C結合に由来するピーク強度の割合X(%)の、厚さ方向の平均値XAVEが1%以上40%以下である、光学フィルムである。本発明の一形態によれば、光学用途の環状ポリオレフィンフィルムについて、良好なクラック耐性、高温高湿環境下における耐久性、および接着性を両立させうる手段が提供される。 One embodiment of the present invention includes a cyclic polyolefin film, and a stress relaxation layer disposed on the cyclic polyolefin film. The stress relaxation layer includes silicon atoms (Si), oxygen atoms (O), and carbon atoms ( C), and C—C, C—SiO, C—O, C = at each measurement position obtained from the depth profile of the C1s spectral region measured by X-ray photoelectron spectroscopy of the stress relaxation layer. The average value X AVE in the thickness direction of the ratio X (%) of the peak intensity derived from the C—C bond to the total peak intensity derived from each bond of O and C (═O) —O is 1% or more and 40 % Is an optical film. According to one aspect of the present invention, there is provided a means capable of achieving both good crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness for a cyclic polyolefin film for optical applications.
 本発明者らは、上記構成によって課題が解決されるメカニズムを以下のように推定している。本発明の一形態に係る光学フィルムは、環状ポリオレフィンフィルム上に、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有する応力緩和層を有する。そして、応力緩和層は、その組成中に、炭素が関係する結合として、C-C結合と、C-SiO、C-O、C=OおよびC(=O)-Oからなる群から選択される結合の少なくとも一つを有し、これらの中で、柔軟な結合であるC-C結合を所定の割合で含む。このとき、応力緩和層は打ち抜き加工や裁断加工の際に外部から印加される応力や、光学フィルムが高温高湿環境下に置かれた際に、自己の変形に際して発生する応力を緩和する。さらに、光学フィルムと他の部材とが貼合された状態で高温高湿環境下に置かれた際には、上記経時による他の部材の変形に際して外部から印加される応力や、自己の変形に際して発生する応力を緩和する。これらの結果、クラックの発生またはクラックの拡大が抑制され、クラック耐性、高温高湿環境下における耐久性が向上する。また、このとき、光学フィルムと他の部材とが貼合された状態で屈曲等の変形がなされた際に、光学フィルムと他の部材との貼合界面に集中する応力が緩和され、光学フィルムの界面近くの領域での破壊が抑制される。さらには、他の部材の種類によっては、光学フィルムと他の部材との間の極性による相互作用が高まる。これらの結果、接着性が向上する。なお、上記メカニズムは推測に基づくものであり、その正誤が本発明の技術的範囲に影響を及ぼすものではない。 The present inventors presume the mechanism by which the problem is solved by the above configuration as follows. The optical film which concerns on one form of this invention has a stress relaxation layer containing a silicon atom (Si), an oxygen atom (O), and a carbon atom (C) on a cyclic polyolefin film. The stress relaxation layer is selected from the group consisting of C—C bonds, C—SiO, C—O, C═O, and C (═O) —O as carbon-related bonds in the composition. Among these, a C—C bond, which is a soft bond, is included at a predetermined ratio. At this time, the stress relaxation layer relieves stress applied from the outside at the time of punching or cutting, or stress generated upon self-deformation when the optical film is placed in a high temperature and high humidity environment. Furthermore, when placed in a high temperature and high humidity environment with the optical film and another member bonded, the stress applied from the outside when the other member is deformed over time, or the self deformation Relieve the generated stress. As a result, generation of cracks or expansion of cracks is suppressed, and crack resistance and durability in a high temperature and high humidity environment are improved. Further, at this time, when deformation such as bending is performed in a state where the optical film and the other member are bonded, the stress concentrated on the bonding interface between the optical film and the other member is relieved, and the optical film Fracture in the region near the interface is suppressed. Furthermore, depending on the type of the other member, the interaction due to the polarity between the optical film and the other member is enhanced. As a result, the adhesiveness is improved. Note that the above mechanism is based on speculation, and its correctness does not affect the technical scope of the present invention.
 以下、本発明の好ましい実施形態を説明する。本明細書において、範囲を示す「X~Y」は「X以上Y以下」を意味する。また、特記しない限り、操作および物性等は、室温(20~25℃)/相対湿度40~50%RHの条件で測定する。 Hereinafter, preferred embodiments of the present invention will be described. In this specification, “X to Y” indicating a range means “X or more and Y or less”. Unless otherwise specified, the operation and physical properties are measured under conditions of room temperature (20 to 25 ° C.) / Relative humidity 40 to 50% RH.
 また、図面の寸法比率は、説明の都合上誇張されており、実際の比率とは異なる場合がある。 In addition, the dimensional ratio of the drawings is exaggerated for convenience of explanation and may be different from the actual ratio.
 図1は、本発明に係る光学フィルムの一例を示す断面模式図である。ここで1は光学フィルムを、2は環状ポリオレフィンフィルムを、3は応力緩和層をそれぞれ示す。なお、本発明に係る光学フィルムはこの構造に限定されるものではない。 FIG. 1 is a schematic cross-sectional view showing an example of an optical film according to the present invention. Here, 1 is an optical film, 2 is a cyclic polyolefin film, and 3 is a stress relaxation layer. The optical film according to the present invention is not limited to this structure.
 以下、光学フィルムの各構成要素について、詳細に説明する。 Hereinafter, each component of the optical film will be described in detail.
 <応力緩和層>
 本発明の一形態に係る光学フィルムは、応力緩和層を有する。応力緩和層とは、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有する層であって、X線光電子分光法により測定されるC1sスペクトル領域のデプスプロファイルから求められる、各測定位置におけるC-C、C-SiO、C-O、C=OおよびC(=O)-Oの各結合に由来するピーク強度の総和に対するC-C結合に由来するピーク強度の割合(本明細書では、C-C結合割合とも称する)X(%)の、厚さ方向の平均値XAVEが1%以上40%以下である層である。
<Stress relaxation layer>
The optical film which concerns on one form of this invention has a stress relaxation layer. The stress relaxation layer is a layer containing silicon atoms (Si), oxygen atoms (O), and carbon atoms (C), and is obtained from a depth profile in the C1s spectral region measured by X-ray photoelectron spectroscopy. Ratio of peak intensity derived from C—C bond to total sum of peak intensity derived from each bond of C—C, C—SiO, C—O, C═O and C (═O) —O at each measurement position ( In this specification, it is a layer in which the average value XAVE in the thickness direction of X (%) (also referred to as CC bond ratio) is 1% or more and 40% or less.
 光学フィルムが、環状ポリオレフィンフィルムと、環状ポリオレフィンフィルム上に配置された上記の応力緩和層と、を有することで、従来、環状ポリオレフィンフィルム単体では達成が困難であった、良好なクラック耐性、高温高湿環境下における耐久性、および接着性の両立を達成することができる。 Since the optical film has a cyclic polyolefin film and the stress relaxation layer disposed on the cyclic polyolefin film, it has been difficult to achieve with a cyclic polyolefin film alone, and has good crack resistance, high temperature and high temperature. It is possible to achieve both durability and adhesion in a wet environment.
 (応力緩和層の組成)
 ケイ素原子(Si)、酸素原子(O)および炭素原子(C)のいずれかを有さない層は、本発明の効果を奏することはできない。炭素原子を有さない層は、クラック耐性、および高温高湿環境下における耐久性が不十分となる。この理由は、柔軟な結合であるC-C結合を含むことができず、応力緩和効果を発現することができなくなると考えられるからである。また、ケイ素原子または酸素原子を有さない層は、高温高湿環境下における耐久性、および接着性が不十分となる。この理由は、高温高湿環境下で水蒸気や酸素等のガスが層内に入り易くなり、水や酸素等によって層形成材料の酸化が進行し、応力緩和効果および良好な接着性を有する層の組成が維持されなくなると考えられるからである。また、接着性が不十分となる理由は、これらの原子を含まない場合、光学フィルムと他の部材との間の極性による相互作用が弱まる場合もありうると考えられるからである。
(Composition of stress relaxation layer)
A layer that does not have any of silicon atoms (Si), oxygen atoms (O), and carbon atoms (C) cannot exhibit the effects of the present invention. A layer having no carbon atom has insufficient crack resistance and durability under a high temperature and high humidity environment. This is because it is considered that a CC bond which is a flexible bond cannot be included and a stress relaxation effect cannot be exhibited. Further, a layer having no silicon atom or oxygen atom has insufficient durability and adhesiveness in a high temperature and high humidity environment. The reason for this is that gases such as water vapor and oxygen easily enter the layer in a high-temperature and high-humidity environment, and the oxidation of the layer-forming material proceeds with water, oxygen, etc., and the layer having a stress relaxation effect and good adhesion This is because it is considered that the composition is not maintained. In addition, the reason why the adhesiveness is insufficient is that, when these atoms are not included, it is considered that the interaction due to the polarity between the optical film and the other member may be weakened.
 なお、応力緩和層がケイ素原子(Si)、酸素原子(O)および炭素原子(C)を有することは、後述するX線光電子分光法による元素分布プロファイルの測定におけるワイドスキャンスペクトル分析の結果より確認することができる。 Note that the stress relaxation layer has silicon atoms (Si), oxygen atoms (O), and carbon atoms (C), as confirmed by the results of wide scan spectrum analysis in element distribution profile measurement by X-ray photoelectron spectroscopy, which will be described later. can do.
 XAVEが1%未満であると、クラック耐性が不十分となる。この理由は、柔軟な結合であるC-C結合を十分な量として含むことができず、応力緩和効果を発現することができなくなると考えられるからである。応力緩和効果をより向上させ、クラック耐性をより向上させるとの観点から、XAVEは、2%以上であることが好ましい。また、XAVEが40%超であると、接着性が不十分となる。この理由は、ケイ素原子または酸素原子の含有量が過剰となり、高温高湿環境下で水蒸気や酸素等のガスが層内に入り易くなり、水や酸素等によって層形成材料の酸化が進行することで、良好な接着性を有する層の組成が維持されなくなると考えられるからである。または、この理由は、C-C結合の含有量が過剰となることで層形成材料が酸化容易な組成となり、水や酸素等によって層形成材料の酸化が進行し、良好な接着性を有する層の組成が維持されなくなると考えられるからである。または、この理由は、光学フィルムと他の部材との間の極性による相互作用が弱まる場合もありうると考えられるからである。層の酸化耐性をより高め、または光学フィルムと他の部材との間の極性による相互作用をより強め、接着性をより向上させるとの観点から、XAVEは、20%以下であることが好ましい。これより、本発明に係る好ましいXAVEの範囲の一例は、2%以上20%以下が挙げられるが、本発明はこれに限定されるものではない。 When X AVE is less than 1%, the crack resistance is insufficient. This is because it is considered that the C—C bond, which is a flexible bond, cannot be included in a sufficient amount, and the stress relaxation effect cannot be exhibited. From the viewpoint of further improving the stress relaxation effect and further improving the crack resistance, X AVE is preferably 2% or more. On the other hand, if XAVE is more than 40%, the adhesion is insufficient. This is because the content of silicon atoms or oxygen atoms becomes excessive, and gas such as water vapor and oxygen easily enters the layer in a high-temperature and high-humidity environment, and the oxidation of the layer forming material proceeds with water or oxygen. This is because it is considered that the composition of the layer having good adhesiveness is not maintained. Alternatively, the reason is that the layer-forming material has an easily oxidizable composition due to the excessive C—C bond content, and the layer-forming material is oxidized by water, oxygen, etc., and has good adhesion. This is because it is considered that the composition of is not maintained. Or this reason is because it is thought that the interaction by the polarity between an optical film and another member may weaken. X AVE is preferably 20% or less from the viewpoint of further enhancing the oxidation resistance of the layer or further strengthening the interaction due to the polarity between the optical film and other members and further improving the adhesion. . Accordingly, an example of a preferable XAVE range according to the present invention is 2% or more and 20% or less, but the present invention is not limited to this.
 なお、X(%)およびXAVE(%)は、後述するX線光電子分光法による元素分布プロファイルの測定におけるC1sの高分解能スペクトル(ナロースキャン分析)の結果より算出することができる。 X (%) and X AVE (%) can be calculated from the result of a high resolution spectrum (narrow scan analysis) of C1s in the measurement of an element distribution profile by X-ray photoelectron spectroscopy described later.
 本発明の一形態に係る応力緩和層において、各層厚方向の深さの測定位置の、X線光電子分光法によって求めたケイ素原子、酸素原子及び炭素原子に由来するピーク強度の比率より換算される組成比の合計量を100at%としたときの炭素原子の割合(本明細書では、炭素組成割合とも称する)[C](at%)の平均値である[CAVE](at%)は、クラック耐性をより向上させるとの観点から、2at%以上であることが好ましい。この理由は、柔軟な結合であるC-C結合を十分な量として含むことで、応力緩和効果がより向上すると考えられるからである。同様の観点から、[CAVE](at%)は、4at%以上であることがより好ましく、5at%以上であることがさらに好ましい。また、[CAVE](at%)は、接着性をより向上させるとの観点から、30at%以下であることが好ましい。この理由は、ケイ素原子または酸素原子の含有量が十分となり、高温高湿環境下で水蒸気や酸素等のガスが層内に入り難くなり、水や酸素等によって層形成材料の酸化が抑制されることで、良好な接着性を有する層の組成がより強固に維持されると考えられるからである。または、この理由は、C-C結合の含有量が十分となることで層形成材料は酸化が生じ難い組成となり、水や酸素等によって層形成材料の酸化が抑制されることで、良好な接着性を有する層の組成がより強固に維持されると考えられるからである。または、この理由は、光学フィルムと他の部材との間の極性による相互作用がより強まる場合もありうると考えられるからである。同様の観点から、[CAVE](at%)は、24at%以下であることがより好ましい。 In the stress relaxation layer according to an embodiment of the present invention, the stress is measured based on the ratio of peak intensities derived from silicon atoms, oxygen atoms, and carbon atoms obtained by X-ray photoelectron spectroscopy at the depth measurement position in each layer thickness direction. [C AVE ] (at%), which is an average value of the ratio of carbon atoms (also referred to as carbon composition ratio in this specification) [C] (at%) when the total amount of the composition ratio is 100 at%, From the viewpoint of further improving crack resistance, it is preferably 2 at% or more. This is because it is considered that the stress relaxation effect is further improved by including a sufficient amount of the C—C bond, which is a flexible bond. From the same viewpoint, [C AVE ] (at%) is more preferably 4 at% or more, and further preferably 5 at% or more. [C AVE ] (at%) is preferably 30 at% or less from the viewpoint of further improving the adhesiveness. The reason for this is that the content of silicon atoms or oxygen atoms is sufficient, and gas such as water vapor and oxygen hardly enters the layer in a high-temperature and high-humidity environment, and the oxidation of the layer-forming material is suppressed by water or oxygen. This is because the composition of the layer having good adhesiveness is considered to be maintained more firmly. Alternatively, this is because the layer forming material has a composition in which oxidation is difficult to occur due to the sufficient content of the C—C bond, and the oxidation of the layer forming material is suppressed by water, oxygen, etc. This is because the composition of the layer having the property is considered to be maintained more firmly. Or this reason is because it is thought that the interaction by the polarity between an optical film and another member may become stronger. From the same viewpoint, [C AVE ] (at%) is more preferably 24 at% or less.
 なお、[C](at%)および[CAVE](at%)は、後述するX線光電子分光法による元素分布プロファイルの測定におけるワイドスキャンスペクトル分析の結果より算出することができる。 [C] (at%) and [C AVE ] (at%) can be calculated from the result of wide scan spectrum analysis in the measurement of an element distribution profile by X-ray photoelectron spectroscopy, which will be described later.
 [X線光電子分光法]
 炭素分布曲線(応力緩和層の層厚方向における応力緩和層の最表面からの距離(L)と、炭素原子(C)、ケイ素原子(Si)及び酸素原子(O)の総原子数(100at%)に対する炭素原子数の比率(炭素原子比率)との関係を示す曲線)、ケイ素分布曲線(距離Lと、炭素原子、ケイ素原子及び酸素原子の総原子数(100at%)に対するケイ素原子数の比率(ケイ素原子比率)との関係を示す曲線)及び酸素分布曲線(距離Lと、炭素原子、ケイ素原子及び酸素原子の総原子数(100at%)に対する酸素原子数の比率(酸素原子比率)との関係を示す曲線)を、X線光電子分光法(X-ray Photoelectron Spectroscopy:XPS)の測定とアルゴン等の希ガスイオンスパッタとを併用することにより、試料内部を露出させつつ順次表面組成分析を行う、いわゆるXPSデプスプロファイル測定により作成することができる。
[X-ray photoelectron spectroscopy]
Carbon distribution curve (distance (L) from the outermost surface of the stress relaxation layer in the thickness direction of the stress relaxation layer and the total number of carbon atoms (C), silicon atoms (Si), and oxygen atoms (O) (100 at%) )), A silicon distribution curve (distance L and the ratio of the number of silicon atoms to the total number of atoms of carbon, silicon and oxygen atoms (100 at%)) (Curve showing the relationship with (silicon atom ratio)) and oxygen distribution curve (distance L and the ratio of the number of oxygen atoms to the total number of carbon atoms, silicon atoms and oxygen atoms (100 at%) (oxygen atom ratio) A curve indicating the relationship) using X-ray photoelectron spectroscopy (XPS) measurement and rare gas ion sputtering such as argon Ri, performs sequential surface composition analysis while exposing the internal sample can be made by so-called XPS depth profile measurement.
 ≪元素分布プロファイルの測定≫
 XPSデプスプロファイルの測定は、例えば、下記条件にて測定を行い、層厚方向の薄膜層の表面からの距離に対する、炭素分布曲線、ケイ素分布曲線及び酸素分布曲線を得ることができる。
≪Measurement of element distribution profile≫
The XPS depth profile can be measured, for example, under the following conditions to obtain a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve with respect to the distance from the surface of the thin film layer in the layer thickness direction.
 エッチングイオン種:アルゴン(Ar)、
 エッチングレート(SiO熱酸化膜換算値):0.05nm/sec、
 エッチング間隔(SiO換算値):2nm、
 X線光電子分光装置:Thermo Fisher Scientific社製、機種名「VG Theta Probe」、
 照射X線:単結晶分光AlKα、
 X線のスポット及びそのサイズ:800μm×400μmの楕円形。
Etching ion species: Argon (Ar + ),
Etching rate (SiO 2 thermal oxide equivalent value): 0.05 nm / sec,
Etching interval (SiO 2 equivalent value): 2 nm,
X-ray photoelectron spectrometer: manufactured by Thermo Fisher Scientific, model name “VG Theta Probe”
Irradiation X-ray: Single crystal spectroscopy AlKα,
X-ray spot and size: 800 μm × 400 μm oval.
 このようなXPSデプスプロファイル測定により得られる分布曲線は、例えば、縦軸を各元素の原子比率(at%)とし、横軸をエッチング時間(スパッタ時間)として作成することができる。 The distribution curve obtained by such XPS depth profile measurement can be created, for example, with the vertical axis as the atomic ratio (at%) of each element and the horizontal axis as the etching time (sputtering time).
 なお、各領域における原子比率(at%)は、XPSデプスプロファイル測定で深さ方向にエッチングして、例えば、2nm間隔で測定した値を平均化した値とする。 The atomic ratio (at%) in each region is a value obtained by etching values in the depth direction by XPS depth profile measurement and averaging values measured at intervals of 2 nm, for example.
 以上のように、応力緩和層全領域を測定するワイドスキャンスペクトル分析を行うことによって、炭素分布曲線、ケイ素分布曲線及び酸素分布曲線を得ることができる。 As described above, a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve can be obtained by performing a wide scan spectrum analysis for measuring the entire stress relaxation layer.
 本測定の結果から、応力緩和層の層厚方向の深さの各測定位置について、X線光電子分光法によって求めたケイ素原子、酸素原子及び炭素原子に由来するピーク強度の比率より換算される組成比の合計量を100at%としたときの炭素原子の割合[C](at%)を算出する。そして、応力緩和層の層厚方向の深さの各測定位置における各[C](at%)の値から、[C](at%)の膜厚方向での平均値[CAVE](at%)をさらに算出する。 From the result of this measurement, the composition converted from the ratio of peak intensities derived from silicon atoms, oxygen atoms and carbon atoms obtained by X-ray photoelectron spectroscopy at each measurement position in the depth direction of the stress relaxation layer. The ratio [C] (at%) of carbon atoms when the total amount of the ratio is 100 at% is calculated. Then, from the value of each [C] (at%) at each measurement position of the depth in the layer thickness direction of the stress relaxation layer, the average value [C AVE ] (at %) Is further calculated.
 ≪炭素原子の結合状態の分析≫
 炭素原子に関しては、C1sの高分解能スペクトル(ナロースキャン分析)により、炭素の結合状態を分析する。具体的には、応力緩和層の膜厚方向の深さの各測定位置について、炭素結合(C)に関して、C1sの波形解析に基づいて、(1)C-C、(2)C-SiO、(3)C-O、(4)C=O、(5)C(=O)-O、のように5つの結合に分けて、それぞれのスペクトルのピークの強度比を算出する。そして、応力緩和層の膜厚方向の深さの各測定位置について、上記(1)~(5)のピーク強度比の総和を100%としたとき、(1)のC-C結合に由来するピーク強度の割合X(%)を算出する。そして、応力緩和層の層厚方向の深さの各測定位置における各X(%)の値から、X(%)の膜厚方向での平均値であるXAVE(%)をさらに算出する。なお、ピーク強度の解析は、例えば、データ解析ソフトウェアPeakFit(SYSTAT Software Inc.製)を用いて行うことができる。
≪Analysis of bonding state of carbon atom≫
As for carbon atoms, the bonding state of carbon is analyzed by a high resolution spectrum (narrow scan analysis) of C1s. Specifically, at each measurement position of the depth in the film thickness direction of the stress relaxation layer, (1) CC, (2) C-SiO, Dividing into five bonds such as (3) C—O, (4) C═O, and (5) C (═O) —O, the peak intensity ratio of each spectrum is calculated. When the sum of the peak intensity ratios (1) to (5) above is 100% at each measurement position of the depth in the film thickness direction of the stress relaxation layer, it is derived from the CC bond of (1). The peak intensity ratio X (%) is calculated. Then, X AVE (%), which is an average value in the film thickness direction of X (%), is further calculated from the value of each X (%) at each measurement position of the depth of the stress relaxation layer in the layer thickness direction. The analysis of the peak intensity can be performed using, for example, data analysis software PeakFit (manufactured by SYSSTAT Software Inc.).
 X線光電子分光法による元素分布プロファイルの測定結果を用いた[CAVE](at%)およびXAVEの具体的な算出方法は実施例に記載している。また、[CAVE](at%)およびXAVEの制御方法は、後述する応力緩和層の製造方法に記載している。 The specific calculation method of [C AVE ] (at%) and X AVE using the measurement result of the element distribution profile by X-ray photoelectron spectroscopy is described in the examples. [C AVE ] (at%) and the control method of X AVE are described in the stress relaxation layer manufacturing method described later.
 また、本明細書において、「基材との界面」とは、「応力緩和層を形成する組成の一部である酸素原子(O)の組成比が、30at%以下となるときの応力緩和層の層厚方向の最表面側からの深さの位置」のことをいう。なお、酸素原子(O)の組成比は、上記したX線光電子分光法によって算出することができる。 Further, in this specification, “the interface with the base material” means “the stress relaxation layer when the composition ratio of oxygen atoms (O) as a part of the composition forming the stress relaxation layer is 30 at% or less”. "The position of the depth from the outermost surface side in the layer thickness direction". The composition ratio of oxygen atoms (O) can be calculated by the X-ray photoelectron spectroscopy described above.
 (応力緩和層の膜厚)
 本発明の一形態に係る応力緩和層の層厚(応力緩和層を環状ポリオレフィンフィルムの一方の面側に2層以上の積層構造として有する場合は、その合計層膜厚)は、本発明の効果をより良好に発現するとの観点から、1nm以上であることが好ましく、5nm以上であることがより好ましい。また、本発明の一形態に係る応力緩和層の層厚は、薄膜化の観点から、300nm以下であることが好ましく、150nm以下であることがより好ましく、100nm以下であることがさらに好ましい。
(Thickness of stress relaxation layer)
The layer thickness of the stress relaxation layer according to one embodiment of the present invention (when the stress relaxation layer has a laminated structure of two or more layers on one surface side of the cyclic polyolefin film), the effect of the present invention Is preferably 1 nm or more, more preferably 5 nm or more, from the viewpoint of better expressing the above. In addition, the thickness of the stress relaxation layer according to one embodiment of the present invention is preferably 300 nm or less, more preferably 150 nm or less, and further preferably 100 nm or less from the viewpoint of thinning.
 [応力緩和層の層厚の測定方法]
 応力緩和層の層厚は、応力緩和層の積層方向において、最表面から基材との界面までの深さを、透過型電子顕微鏡(Transmission Electron Microscope:TEM)による断面観察により測定することによって求めることができる。透過型電子顕微鏡による断面観察では、層厚を任意に10箇所測定し、平均した値を応力緩和層の層厚とする。
[Method for measuring the thickness of the stress relaxation layer]
The layer thickness of the stress relaxation layer is determined by measuring the depth from the outermost surface to the interface with the base material in the stacking direction of the stress relaxation layer by observing a cross section with a transmission electron microscope (TEM). be able to. In cross-sectional observation with a transmission electron microscope, the layer thickness is arbitrarily measured at 10 locations, and the average value is taken as the layer thickness of the stress relaxation layer.
 ≪層厚方向の断面のTEM画像≫
 断面のTEM観察として、観察試料を以下の集束イオンビーム(Focused Ion Beam:FIB)加工装置により薄片作製後、TEM観察を行う。ここで、試料に電子線を照射し続けると電子線ダメージを受ける部分とそうでない部分にコントラスト差が現れるため、そのコントラスト差によって応力緩和層の層厚を測定することができる。
≪TEM image of cross section in layer thickness direction≫
As a cross-sectional TEM observation, a thin piece is prepared for the observation sample by the following focused ion beam (FIB) processing apparatus, and then the TEM observation is performed. Here, when the sample is continuously irradiated with the electron beam, a contrast difference appears between the portion that is damaged by the electron beam and the portion that is not damaged. Therefore, the thickness of the stress relaxation layer can be measured by the contrast difference.
 ≪FIB加工≫
 装置:セイコーインスツル株式会社(SII)製SMI2050、
 加工イオン:Ga(30kV)、
 試料厚さ:100~200nm、
 ≪TEM観察≫
 装置:日本電子株式会社製JEM2000FX(加速電圧:200kV)。
≪FIB processing≫
Apparatus: SMI2050 manufactured by Seiko Instruments Inc. (SII),
Processing ions: Ga (30 kV),
Sample thickness: 100-200 nm,
≪TEM observation≫
Apparatus: JEM2000FX manufactured by JEOL Ltd. (acceleration voltage: 200 kV).
 [応力緩和層の製造方法]
 本発明の一形態に係る応力緩和層は、プラズマ化学気相成長法(プラズマCVD、PECVD(plasma-enhanced chemical vapor deposition)、以下、単に「プラズマCVD法」とも称する。)により形成することが好ましい。
[Method for producing stress relaxation layer]
The stress relaxation layer according to an embodiment of the present invention is preferably formed by a plasma chemical vapor deposition method (plasma CVD, plasma-enhanced chemical vapor deposition (PECVD), hereinafter also simply referred to as “plasma CVD method”). .
 プラズマCVD法としては、特に限定されないが、国際公開第2006/033233号に記載の大気圧又は大気圧近傍でのプラズマCVD法、対向ローラー電極を持つプラズマCVD装置を用いたプラズマCVD法、真空プラズマCVD法等が挙げられる。本明細書では、真空プラズマCVD法とは、50Pa以下の真空度におけて成膜を行うプラズマCVD法をいう。プラズマCVD法は、ペニング放電プラズマ方式のプラズマCVD法であってもよい。 Although it does not specifically limit as a plasma CVD method, Plasma CVD method in the atmospheric pressure or the atmospheric pressure vicinity of international publication 2006/033233, Plasma CVD method using a plasma CVD apparatus with a counter roller electrode, Vacuum plasma CVD method etc. are mentioned. In this specification, the vacuum plasma CVD method refers to a plasma CVD method in which a film is formed at a vacuum degree of 50 Pa or less. The plasma CVD method may be a Penning discharge plasma type plasma CVD method.
 中でも、有機ケイ素化合物を含む原料ガスと酸素ガスとを用いて、磁場を印加したローラー間に放電空間を有する(ロールtoロール方式の)放電プラズマ化学気相成長法により形成することが好ましい。上述したように、放電プラズマ化学気相成長法を用いることにより、各領域における炭素原子比率が一定範囲内に制御された応力緩和層を容易に作製可能であり、層内の応力バランスが適切な応力緩和層を作製することができる。さらに、放電プラズマ化学気相成長法を用いることにより、応力緩和層が緻密化し、接着性を向上させることができると考えられる。この理由は、高温高湿環境下で水蒸気や酸素等のガスが層内に入り難くなり、水や酸素等によって層形成材料の酸化が抑制されることで、良好な接着性を有する層の組成がより強固に維持されるからと考えられるからである。 In particular, it is preferable to use a source gas containing an organosilicon compound and an oxygen gas by a discharge plasma chemical vapor deposition method (a roll-to-roll method) having a discharge space between rollers to which a magnetic field is applied. As described above, by using the discharge plasma chemical vapor deposition method, it is possible to easily produce a stress relaxation layer in which the carbon atom ratio in each region is controlled within a certain range, and the stress balance in the layer is appropriate. A stress relaxation layer can be produced. Furthermore, it is considered that by using the discharge plasma chemical vapor deposition method, the stress relaxation layer can be densified and the adhesion can be improved. The reason for this is that the composition of the layer having good adhesiveness is such that gas such as water vapor or oxygen hardly enters the layer in a high temperature and high humidity environment, and the oxidation of the layer forming material is suppressed by water, oxygen, etc. This is because is considered to be maintained more firmly.
 以下、有機ケイ素化合物を含む原料ガスと酸素ガスとを用いて、磁場を印加したローラー間に放電空間を有する放電プラズマ化学気相成長法により、本発明の一形態に係る応力緩和層を形成する方法について説明する。 Hereinafter, a stress relaxation layer according to one embodiment of the present invention is formed by a discharge plasma chemical vapor deposition method having a discharge space between rollers to which a magnetic field is applied, using a source gas containing an organosilicon compound and oxygen gas. A method will be described.
 プラズマCVD法においてプラズマを発生させる際には、複数の成膜ローラーの間の空間にプラズマ放電を発生させることが好ましく、一対の成膜ローラーを用い、その一対の成膜ローラーのそれぞれに環状ポリオレフィンフィルムを含む基材(以下、単に基材とも称する。ここでいう基材には、基材が処理された形態も含む。)を配置して、一対の成膜ローラー間に放電してプラズマを発生させることがより好ましい。 When generating plasma in the plasma CVD method, it is preferable to generate a plasma discharge in a space between a plurality of film forming rollers. A pair of film forming rollers is used, and a cyclic polyolefin is used for each of the pair of film forming rollers. A base material including a film (hereinafter, also simply referred to as a base material. The base material here includes a form in which the base material is treated) is disposed, and plasma is generated by discharging between a pair of film forming rollers. More preferably, it is generated.
 ここで、基材は、環状ポリオレフィンフィルム単体、環状ポリオレフィンフィルムと後述するアンカーコート層とを含む積層体であることが好ましく、環状ポリオレフィンフィルム単体であることがより好ましい。 Here, the substrate is preferably a cyclic polyolefin film alone, a laminate including the cyclic polyolefin film and an anchor coat layer described later, and more preferably a cyclic polyolefin film alone.
 このようにして、一対の成膜ローラーを用い、その一対の成膜ローラー上に基材を配置して、かかる一対の成膜ローラー間に放電することにより、成膜時に一方の成膜ローラー上に存在する基材の表面部分を成膜しつつ、もう一方の成膜ローラー上に存在する基材の表面部分も同時に成膜することが可能となって効率よく薄膜を製造できる。加えて、ローラーを使用しない通常のプラズマCVD法と比較して成膜レートを倍にできる。 In this way, by using a pair of film forming rollers, placing a base material on the pair of film forming rollers, and discharging between the pair of film forming rollers, one film forming roller It is possible to form a film on the surface part of the base material existing on the other film, and simultaneously form the film on the surface part of the base material present on the other film forming roller, so that a thin film can be produced efficiently. In addition, the film formation rate can be doubled compared to a normal plasma CVD method that does not use a roller.
 また、このようにして一対の成膜ローラー間に放電する際には、一対の成膜ローラーの極性を交互に反転させることが好ましい。さらに、このようなプラズマCVD法に用いる成膜ガスとしては、有機ケイ素化合物と酸素とを含むものが好ましい。 Further, when discharging between the pair of film forming rollers in this way, it is preferable to reverse the polarities of the pair of film forming rollers alternately. Furthermore, as a film forming gas used in such a plasma CVD method, a gas containing an organosilicon compound and oxygen is preferable.
 以下、図2を参照しながら、本発明の一形態に係る応力緩和層の形成方法について、より詳細に説明する。なお、図2は、本発明の一形態に係る応力緩和層を製造するために好適に利用することが可能な製造装置の一例を示す模式図である。また、以下の説明及び図面中、同一又は相当する要素には同一の符号を付し、重複する説明は省略する。 Hereinafter, the stress relaxation layer forming method according to an embodiment of the present invention will be described in more detail with reference to FIG. FIG. 2 is a schematic diagram illustrating an example of a manufacturing apparatus that can be suitably used for manufacturing the stress relaxation layer according to an embodiment of the present invention. In the following description and drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted.
 図2に示す製造装置10は、送出しローラー12と、搬送ローラー13~18と、成膜ローラー19及び20と、ガス供給管21と、プラズマ発生用電源22と、成膜ローラー19及び20の内部にそれぞれ設置された磁場発生装置23及び24と、巻取りローラー25を備えている。また、このような製造装置10においては、少なくとも成膜ローラー19及び20と、ガス供給管21と、プラズマ発生用電源22と、磁場発生装置23及び24とが成膜(真空)チャンバー28内に配置されている。さらに、このような製造装置10において、成膜チャンバー28は図示を省略した真空ポンプに接続されており、かかる真空ポンプにより成膜チャンバー28内の圧力を適宜調整することが可能となっている。 2 includes a feed roller 12, transport rollers 13 to 18, film forming rollers 19 and 20, a gas supply pipe 21, a plasma generating power source 22, and film forming rollers 19 and 20. Magnetic field generators 23 and 24 and winding rollers 25 installed inside are provided. Further, in such a manufacturing apparatus 10, at least the film forming rollers 19 and 20, the gas supply pipe 21, the plasma generating power source 22, and the magnetic field generating apparatuses 23 and 24 are provided in the film forming (vacuum) chamber 28. Has been placed. Further, in such a manufacturing apparatus 10, the film forming chamber 28 is connected to a vacuum pump (not shown), and the pressure in the film forming chamber 28 can be appropriately adjusted by such a vacuum pump.
 送出しローラー12及び搬送ローラー13は、搬送系チャンバー27内に配置され、巻取りローラー25及び搬送ローラー18は、搬送系チャンバー29内に配置されている。搬送系チャンバー27及び29と成膜チャンバー28とは、それぞれ連結部30及び31を介して接続されている。例えば、連結部30及び31に真空ゲートバルブを設けて成膜チャンバー28と搬送系チャンバー27及び29とを物理的に隔離してもよい。真空ゲートバルブを用いることによって、例えば、成膜チャンバー28内のみを真空系とし、搬送系チャンバー27及び29内は大気下とすることができる。また、成膜チャンバー28と搬送系チャンバー27及び29とを物理的に隔離することにより、成膜チャンバー28内で発生したパーティクルによって搬送系チャンバー27及び29が汚染されることを抑制することができる。 The delivery roller 12 and the transport roller 13 are disposed in the transport system chamber 27, and the winding roller 25 and the transport roller 18 are disposed in the transport system chamber 29. The transfer system chambers 27 and 29 and the film forming chamber 28 are connected via connecting portions 30 and 31, respectively. For example, the film forming chamber 28 and the transfer system chambers 27 and 29 may be physically separated by providing a vacuum gate valve in the connecting portions 30 and 31. By using the vacuum gate valve, for example, only the film forming chamber 28 can be a vacuum system, and the transfer system chambers 27 and 29 can be in the atmosphere. Further, by physically separating the film forming chamber 28 and the transfer system chambers 27 and 29, it is possible to suppress the transfer system chambers 27 and 29 from being contaminated by particles generated in the film forming chamber 28. .
 このような製造装置においては、一対の成膜ローラー(成膜ローラー19及び20)を一対の対向電極として機能させることが可能となるように、各成膜ローラー19及び20がそれぞれプラズマ発生用電源22に接続されている。そのため、このような製造装置10においては、プラズマ発生用電源22により電力を供給することにより、成膜ローラー19と成膜ローラー20との間の空間に放電することが可能であり、これにより成膜ローラー19と成膜ローラー20との間の空間にプラズマを発生させることができる。なお、このように、成膜ローラー19と成膜ローラー20とを電極としても利用する場合には、電極としても利用可能なようにその材質や設計を適宜変更すればよい。 In such a manufacturing apparatus, each film-forming roller 19 and 20 is a power source for plasma generation so that the pair of film-forming rollers (film-forming rollers 19 and 20) can function as a pair of counter electrodes. 22 is connected. Therefore, in such a manufacturing apparatus 10, it is possible to discharge to the space between the film forming roller 19 and the film forming roller 20 by supplying power from the plasma generating power source 22. Plasma can be generated in the space between the film roller 19 and the film formation roller 20. In addition, when using the film-forming roller 19 and the film-forming roller 20 as electrodes as described above, the material and design may be changed as appropriate so that the film-forming roller 19 and the film-forming roller 20 can also be used as electrodes.
 また、このような製造装置10においては、一対の成膜ローラー(成膜ローラー19及び20)は、その中心軸が同一平面上において略平行となるようにして配置することが好ましい。このようにして、一対の成膜ローラー(成膜ローラー19及び20)を配置することにより、ローラーを使用しない通常のプラズマCVD法と比較して成膜レートを倍にできる。 Further, in such a manufacturing apparatus 10, it is preferable that the pair of film forming rollers (film forming rollers 19 and 20) be arranged so that their central axes are substantially parallel on the same plane. Thus, by arranging a pair of film forming rollers (film forming rollers 19 and 20), the film forming rate can be doubled as compared with a normal plasma CVD method that does not use a roller.
 このような製造装置10によれば、CVD法により基材2の表面上に応力緩和層3を形成することが可能であり、成膜ローラー19上において基材2の表面上に応力緩和層形成材料(以下、応力緩和層成分とも称する)を堆積させつつ、更に成膜ローラー20上においても基材2の表面上に応力緩和層成分を堆積させることもできるため、基材2の表面上に応力緩和層を効率よく形成することができる。 According to such a manufacturing apparatus 10, the stress relaxation layer 3 can be formed on the surface of the substrate 2 by the CVD method, and the stress relaxation layer is formed on the surface of the substrate 2 on the film forming roller 19. While depositing the material (hereinafter also referred to as stress relaxation layer component), the stress relaxation layer component can be deposited on the surface of the substrate 2 also on the film forming roller 20. The stress relaxation layer can be formed efficiently.
 成膜ローラー19及び20の内部には、成膜ローラー19及び20が回転しても回転しないようにして固定された磁場発生装置23及び24がそれぞれ設けられている。 In the film forming rollers 19 and 20, magnetic field generators 23 and 24 fixed so as not to rotate even when the film forming rollers 19 and 20 rotate are provided, respectively.
 成膜ローラー19及び20にそれぞれ設けられた磁場発生装置23及び24は、一方の成膜ローラー19に設けられた磁場発生装置23と他方の成膜ローラー20に設けられた磁場発生装置24との間で磁力線がまたがらず、それぞれの磁場発生装置23及び24がほぼ閉じた磁気回路を形成するように磁極を配置することが好ましい。このような磁場発生装置23及び24を設けることにより、各成膜ローラー19及び20の対向側表面付近に磁力線が膨らんだ磁場の形成を促進することができ、その膨出部にプラズマが収束されやすくなるため、成膜効率を向上させることができる点で優れている。 The magnetic field generators 23 and 24 provided in the film forming rollers 19 and 20 are respectively a magnetic field generator 23 provided in one film forming roller 19 and a magnetic field generator 24 provided in the other film forming roller 20. It is preferable to arrange the magnetic poles so that the magnetic field lines do not cross between each other and the magnetic field generators 23 and 24 form a substantially closed magnetic circuit. By providing such magnetic field generators 23 and 24, it is possible to promote the formation of a magnetic field in which magnetic lines of force swell in the vicinity of the opposing surfaces of the film forming rollers 19 and 20, and the plasma is converged on the bulging portion. Since it becomes easy, it is excellent at the point which can improve the film-forming efficiency.
 また、成膜ローラー19及び20にそれぞれ設けられた磁場発生装置23及び24は、それぞれローラー軸方向に長いレーストラック状の磁極を備え、一方の磁場発生装置23と他方の磁場発生装置24とは向かい合う磁極が同一極性となるように磁極を配置することが好ましい。このような磁場発生装置23及び24を設けることにより、それぞれの磁場発生装置23及び24について、磁力線が対向するローラー側の磁場発生装置にまたがることなく、ローラー軸の長さ方向に沿って対向空間(放電領域)に面したローラー表面付近にレーストラック状の磁場を容易に形成することができ、その磁場にプラズマを収束させることができため、ローラー幅方向に沿って巻き掛けられた幅広の基材2を用いて効率的に蒸着膜である応力緩和層3を形成することができる点で優れている。 The magnetic field generators 23 and 24 provided on the film forming rollers 19 and 20 respectively have racetrack-shaped magnetic poles that are long in the roller axis direction, and one magnetic field generator 23 and the other magnetic field generator 24 are It is preferable to arrange the magnetic poles so that the opposing magnetic poles have the same polarity. By providing such magnetic field generators 23 and 24, each of the magnetic field generators 23 and 24 is opposed to the space along the length direction of the roller shaft without straddling the magnetic field generator on the roller side where the magnetic lines of force oppose each other. A racetrack-like magnetic field can be easily formed in the vicinity of the roller surface facing the (discharge region), and the plasma can be focused on the magnetic field, so that a wide base wound around the roller width direction can be obtained. The material 2 is excellent in that the stress relaxation layer 3 that is a vapor deposition film can be efficiently formed.
 各成膜ローラー19及び20における基材2への張力は、全て同じであってもよいが、成膜ローラー19又は成膜ローラー20における張力のみ高くして成膜してもよい。成膜ローラー19及び20における基材2への張力を高くすることによって、基材2と成膜ローラー19及び20との密着性が向上し、熱交換が効率的に行われ、膜均一性が向上し、また、熱シワも抑制されるという利点がある。 The tension on the substrate 2 in each of the film forming rollers 19 and 20 may all be the same, but only the tension in the film forming roller 19 or the film forming roller 20 may be increased. By increasing the tension of the film forming rollers 19 and 20 to the base material 2, the adhesion between the base material 2 and the film forming rollers 19 and 20 is improved, heat exchange is efficiently performed, and film uniformity is improved. There is an advantage that heat wrinkles are also suppressed.
 成膜ローラー19及び20としては、適宜公知のローラーを用いることができる。このような成膜ローラー19及び20としては、より効率よく薄膜を形成させるという観点から、直径が同一のものを使うことが好ましい。また、このような成膜ローラー19及び20の直径としては、放電条件、チャンバーのスペース等の観点から、直径が300~1000mmφの範囲内、特に300~700mmφの範囲内が好ましい。成膜ローラーの直径が300mmφ以上であれば、プラズマ放電空間が小さくなることがないため生産性の劣化もなく、短時間でプラズマ放電の全熱量が基材2にかかることを回避できることから、基材2へのダメージを軽減でき好ましい。一方、成膜ローラーの直径が1000mmφ以下であれば、プラズマ放電空間の均一性等も含めて装置設計上、実用性を保持することができるため好ましい。各成膜ローラー19及び20は、ニップロールを備えていてもよく、ニップロールを備えることで、基材2の成膜ローラー19及び20への密着性が向上する。これにより、基材2と成膜ローラー19及び20との間で熱交換が効率的に行われ、膜均一性が向上し、また、熱シワも抑制されるという利点がある。 As the film forming rollers 19 and 20, known rollers can be used as appropriate. As such film forming rollers 19 and 20, it is preferable to use ones having the same diameter from the viewpoint of forming a thin film more efficiently. Further, the diameter of the film forming rollers 19 and 20 is preferably in the range of 300 to 1000 mmφ, particularly in the range of 300 to 700 mmφ, from the viewpoint of discharge conditions, chamber space, and the like. If the diameter of the film forming roller is 300 mmφ or more, the plasma discharge space will not be reduced, so that the productivity will not be deteriorated and it is possible to avoid applying the total amount of heat of the plasma discharge to the substrate 2 in a short time. It is preferable because damage to the material 2 can be reduced. On the other hand, if the diameter of the film forming roller is 1000 mmφ or less, it is preferable because practicality can be maintained in terms of apparatus design including uniformity of plasma discharge space. Each film-forming roller 19 and 20 may be provided with a nip roll, and by providing the nip roll, the adhesion of the base material 2 to the film-forming rollers 19 and 20 is improved. Thereby, heat exchange is efficiently performed between the base material 2 and the film forming rollers 19 and 20, and there is an advantage that film uniformity is improved and heat wrinkles are suppressed.
 このような製造装置10においては、基材2の表面がそれぞれ対向するように、一対の成膜ローラー(成膜ローラー19及び20)上に、基材2が配置されている。このようにして基材2を配置することにより、成膜ローラー19と成膜ローラー20との間の対向空間に放電を行ってプラズマを発生させる際に、一対の成膜ローラー(成膜ローラー19及び20)間に存在する基材2のそれぞれの表面を同時に成膜することが可能となる。すなわち、このような製造装置10によれば、プラズマCVD法により、成膜ローラー19上にて基材2の表面上に応力緩和層成分を堆積させ、更に成膜ローラー20上にて応力緩和層成分を堆積させることができるため、基材2の表面上に応力緩和層を効率よく形成することが可能となる。 In such a manufacturing apparatus 10, the base material 2 is disposed on a pair of film forming rollers (film forming rollers 19 and 20) so that the surfaces of the base material 2 face each other. By disposing the base material 2 in this manner, a pair of film-forming rollers (film-forming rollers 19) is formed when plasma is generated by performing discharge in the facing space between the film-forming roller 19 and the film-forming roller 20. And 20) it is possible to simultaneously form the respective surfaces of the substrate 2 existing between them. That is, according to such a manufacturing apparatus 10, the stress relaxation layer component is deposited on the surface of the substrate 2 on the film formation roller 19 by the plasma CVD method, and further, the stress relaxation layer is formed on the film formation roller 20. Since components can be deposited, a stress relaxation layer can be efficiently formed on the surface of the substrate 2.
 製造装置10に用いる送出しローラー12及び搬送ローラー13~18としては、適宜公知のローラーを用いることができる。また、巻取りローラー25としても、基材2上に応力緩和層3を形成した光学フィルム1を巻き取ることが可能なものであればよく、特に制限されず、適宜公知のローラーを用いることができる。また、送出しローラー12や巻取りローラー25は、ターレット式であってもよい。ターレットは、2軸以上の多軸であってもよく、そのうち一部の軸のみを大気開放できる構造であってもよい。 As the feed roller 12 and the transport rollers 13 to 18 used in the manufacturing apparatus 10, known rollers can be appropriately used. The winding roller 25 is not particularly limited as long as the optical film 1 having the stress relaxation layer 3 formed on the substrate 2 can be wound, and a known roller may be used as appropriate. it can. Further, the feed roller 12 and the take-up roller 25 may be a turret type. The turret may be multiaxial with two or more axes, and may have a structure in which only some of the axes can be opened to the atmosphere.
 また、ガス供給管21及び真空ポンプとしては、原料ガス等を所定の速度で供給又は排出することが可能なものを適宜用いることができる。 Further, as the gas supply pipe 21 and the vacuum pump, those capable of supplying or discharging the raw material gas at a predetermined speed can be appropriately used.
 また、ガス供給手段であるガス供給管21は、成膜ローラー19と成膜ローラー20との間の対向空間(放電領域、成膜ゾーン)の一方に設けることが好ましく、真空排気手段である真空ポンプ(図示せず。)は、対向空間の他方に設けることが好ましい。このようにガス供給手段であるガス供給管21と、真空排気手段である真空ポンプを配置することにより、成膜ローラー19と成膜ローラー20との間の対向空間に効率よく成膜ガスを供給することができ、成膜効率を向上させることができる点で優れている。 The gas supply pipe 21 serving as a gas supply means is preferably provided in one of the facing spaces (discharge region, film formation zone) between the film formation roller 19 and the film formation roller 20, and is a vacuum serving as a vacuum exhaust means. A pump (not shown) is preferably provided on the other side of the facing space. In this way, by providing the gas supply pipe 21 as the gas supply means and the vacuum pump as the vacuum exhaust means, the film formation gas is efficiently supplied to the facing space between the film formation roller 19 and the film formation roller 20. It is excellent in that the film formation efficiency can be improved.
 なお、図2においては、ガス供給管21は、成膜ローラー19と成膜ローラー20との間の中心線上に設けられているが、これに限定されず、例えば、成膜ローラー19と成膜ローラー20との間の中心線から、どちらか一方側にずれていてもよい(左右方向に中心線からずらしてもよい。)。ガス供給管21を成膜ローラー19と成膜ローラー20との間の中心線からずらすことによって、片方の成膜ローラーに近く、もう片方の成膜ローラーからは遠くなるため、原料ガスの供給が成膜ローラー19上で形成される膜組成と成膜ローラー20上で形成させる膜組成とが異なるようになり、膜質を変えたいときなどに適宜ガス供給管21の位置をずらせばよい。また、ガス供給管21は、適宜中心線上で成膜ローラーから離したり近づけたりしてもよい(上下方向に中心線上で配置位置を動かしてもよい。)。ガス供給管21を成膜ローラーの中心軸上で遠ざけ、放電空間からガス供給管21を離すことによって、ガス供給管21にパーティクルが付着することを抑制できるなどの利点があり、ガス供給管21を成膜ローラーの中心軸上で放電空間に近づけることによって成膜レートを向上させることができるなどの利点がある。 In FIG. 2, the gas supply pipe 21 is provided on the center line between the film formation roller 19 and the film formation roller 20. However, the present invention is not limited to this. You may shift | deviate to either one side from the centerline between the rollers 20, and you may shift | deviate from the centerline in the left-right direction. By shifting the gas supply pipe 21 from the center line between the film formation roller 19 and the film formation roller 20, the gas supply pipe 21 is closer to one film formation roller and farther from the other film formation roller. The film composition formed on the film forming roller 19 and the film composition formed on the film forming roller 20 become different, and the position of the gas supply pipe 21 may be appropriately shifted when it is desired to change the film quality. Further, the gas supply pipe 21 may be appropriately separated from or closer to the film forming roller on the center line (the arrangement position may be moved on the center line in the vertical direction). There is an advantage that particles can be prevented from adhering to the gas supply pipe 21 by moving the gas supply pipe 21 away from the center axis of the film forming roller and separating the gas supply pipe 21 from the discharge space. There is an advantage that the film forming rate can be improved by bringing the film closer to the discharge space on the central axis of the film forming roller.
 図2において、ガス供給管21は一つであるが、ガス供給管21は複数あってもよく、各ノズルから異なる供給ガスを放出する形態であってもよい。 In FIG. 2, there is one gas supply pipe 21, but there may be a plurality of gas supply pipes 21, and different supply gases may be discharged from each nozzle.
 さらに、プラズマ発生用電源22としては、適宜公知のプラズマ発生装置の電源を用いることができる。このようなプラズマ発生用電源22は、これに接続された成膜ローラー19と成膜ローラー20とに電力を供給して、これらを放電のための対向電極として利用することを可能とする。このようなプラズマ発生用電源22としては、より効率よくプラズマCVDを実施することが可能となることから、一対の成膜ローラーの極性を交互に反転させることが可能なもの(交流電源など)を利用することが好ましい。 Furthermore, as the plasma generating power source 22, a known power source for a plasma generating apparatus can be used as appropriate. Such a power source 22 for generating plasma supplies power to the film forming roller 19 and the film forming roller 20 connected thereto, and makes it possible to use them as a counter electrode for discharging. As such a plasma generation power source 22, since it is possible to perform plasma CVD more efficiently, a power source (AC power source or the like) that can alternately reverse the polarity of a pair of film forming rollers is used. It is preferable to use it.
 また、このようなプラズマ発生用電源22としては、より効率よくプラズマCVDを実施することが可能となることから、印加電力を100W~20kWの範囲内とすることが好ましく、100W~10kWの範囲内とすることがより好ましい。また、プラズマ発生用電源22としては、より効率よくプラズマCVDを実施することが可能となることから、交流の周波数を50Hz~13.56MHzの範囲内とすることが好ましく、50Hz~500kHzの範囲内とすることがより好ましい。 Further, such a plasma generating power source 22 is preferably capable of performing plasma CVD more efficiently, so that the applied power is preferably in the range of 100 W to 20 kW, and in the range of 100 W to 10 kW. More preferably. In addition, as the plasma generating power source 22, it is possible to perform plasma CVD more efficiently, so that the AC frequency is preferably in the range of 50 Hz to 13.56 MHz, and in the range of 50 Hz to 500 kHz. More preferably.
 また、プラズマプロセス安定化の点から、高周波電流波及び電圧波がどちらも正弦波となるような高周波電源を用いてもよい。 Also, from the viewpoint of stabilizing the plasma process, a high frequency power source in which both the high frequency current wave and the voltage wave are sine waves may be used.
 図2においては、一つのプラズマ発生用電源22で成膜ローラー19及び20の双方に給電している(両成膜ローラー給電)が、このような形態に限定されるものではなく、一方の成膜ローラーに給電し(片側成膜ローラー給電)、他方の成膜ローラーをアースする形態であってもよい。 In FIG. 2, a single power source for generating plasma 22 supplies power to both film forming rollers 19 and 20 (both film forming roller power supply), but the present invention is not limited to such a configuration. The film roller may be supplied with power (one-side film formation roller power supply) and the other film formation roller may be grounded.
 また、成膜ローラーへの給電方法としては、ローラー端の一方のみから給電するローラー片端給電でもよいし、ローラーの両端から給電するローラー両端給電であってもよい。高周波帯を供給する場合には、均一な供給が可能となることから、ローラー両端給電であってもよい。 Further, as a method for supplying power to the film forming roller, it is possible to supply power from only one end of the roller, or to supply power from both ends of the roller. In the case of supplying a high frequency band, it is possible to supply both ends of the roller because uniform supply is possible.
 また、給電方法としては、異なる周波数を印加する2周波給電を行ってもよく、一方の成膜ローラーに異なる2周波を印加する形態であっても、一方の成膜ローラーと他方の成膜ローラーとで異なる周波数を印加する形態であってもよい。このような2周波給電により、プラズマ密度が上がり、成膜速度を向上させることができる。 Further, as a feeding method, two-frequency feeding may be performed in which different frequencies are applied, and one film-forming roller and the other film-forming roller may be applied even when two different frequencies are applied to one film-forming roller. A different frequency may be applied. By such two-frequency power feeding, the plasma density can be increased and the film formation rate can be improved.
 また、図2には図示していないが、放電空間のプラズマ発光強度を外部からモニタリングし、所望の発光強度でない場合には、磁場間距離(対向ローラー間距離)、磁場強度、電源の印加電力、電源周波数、供給ガス量などを調整して所望のプラズマ発光強度とするフィードバック回路を有していてもよい。このようなフィードバック回路を有することによって、成膜/生産を安定にすることができる。 Although not shown in FIG. 2, the plasma emission intensity in the discharge space is monitored from the outside, and if the desired emission intensity is not obtained, the distance between the magnetic fields (distance between the opposing rollers), the magnetic field intensity, and the power applied to the power source In addition, a feedback circuit that adjusts the power supply frequency, the amount of supplied gas, and the like to obtain a desired plasma emission intensity may be provided. By having such a feedback circuit, film formation / production can be stabilized.
 また、磁場発生装置23及び24としては、適宜公知の磁場発生装置を用いることができる。さらに、基材2としては、環状ポリオレフィンフィルム上に応力緩和層3をあらかじめ形成させたものを用いることができる。このように、基材2として応力緩和層3をあらかじめ形成させたものを用いることにより、応力緩和層3の層厚を厚くすることも可能である。 Also, as the magnetic field generators 23 and 24, known magnetic field generators can be used as appropriate. Furthermore, as the base material 2, what formed the stress relaxation layer 3 previously on the cyclic polyolefin film can be used. As described above, by using the substrate 2 in which the stress relaxation layer 3 is formed in advance, the thickness of the stress relaxation layer 3 can be increased.
 図2に示す製造装置10を用いて、成膜ガス(原料ガス等)を成膜チャンバー28内に供給しつつ、一対の成膜ローラー(成膜ローラー19及び20)間に放電を発生させることにより、成膜ガス(原料ガス等)がプラズマによって分解され、成膜ローラー19上の基材2の表面上及び成膜ローラー20上の基材2の表面上に、成膜層がプラズマCVD法により形成される。この際、成膜ローラー19及び20のローラー軸の長さ方向に沿って対向空間(放電領域)に面したローラー表面付近にレーストラック状の磁場が形成されて、磁場にプラズマを収束させる。このプロセスを成膜条件の一つ又は複数を変化させて2回目の成膜層の形成、第3回目の成膜層の形成と、異なる条件による成膜を繰り返すことによって、層厚方向に各構成原子の組成が連続的に変化した応力緩和層を形成してもよい。 Using the manufacturing apparatus 10 shown in FIG. 2, a discharge is generated between a pair of film forming rollers (film forming rollers 19 and 20) while supplying a film forming gas (such as a raw material gas) into the film forming chamber 28. Thus, the film forming gas (raw material gas or the like) is decomposed by plasma, and the film forming layer is formed on the surface of the base material 2 on the film forming roller 19 and the surface of the base material 2 on the film forming roller 20 by the plasma CVD method. It is formed by. At this time, a racetrack-shaped magnetic field is formed in the vicinity of the roller surface facing the facing space (discharge region) along the length direction of the roller axes of the film forming rollers 19 and 20, and the plasma is converged on the magnetic field. By repeating this process by changing one or more of the film formation conditions to form a second film formation layer, a third film formation layer, and film formation under different conditions, You may form the stress relaxation layer from which the composition of the constituent atom changed continuously.
 次に、応力緩和層を形成させるための、成膜ガスについて説明する。 Next, the film forming gas for forming the stress relaxation layer will be described.
 成膜ガスとしては、原料ガスの他に反応ガスを用いてもよい。このような反応ガスとしては、原料ガスと反応して酸化物等の無機化合物となるガスを適宜選択して使用することができる。応力緩和層3は、酸素を含むことから、反応ガスとしては、例えば、酸素、オゾンを用いることができ、簡便性の観点から酸素を用いることが好ましい。また、その他、窒化物を形成するための反応ガスを用いてもよく、例えば、窒素、アンモニアを用いることができる。これらの反応ガスは、単独でも、又は2種以上を組み合わせても使用することができ、例えば、酸窒化物を形成する場合には、酸化物を形成するための反応ガスと窒化物を形成するための反応ガスとを組み合わせて使用することができる。 As the film forming gas, a reactive gas may be used in addition to the source gas. As such a reactive gas, a gas that reacts with the raw material gas to become an inorganic compound such as an oxide can be appropriately selected and used. Since the stress relaxation layer 3 contains oxygen, for example, oxygen and ozone can be used as the reactive gas, and oxygen is preferably used from the viewpoint of simplicity. In addition, a reactive gas for forming a nitride may be used. For example, nitrogen or ammonia can be used. These reaction gases can be used alone or in combination of two or more. For example, when forming an oxynitride, the reaction gas for forming an oxide and a nitride are formed. Can be used in combination with the reaction gas for
 成膜ガスとしては、原料ガスを成膜チャンバー28内に供給するために、必要に応じて、キャリアガスを用いてもよい。さらに、成膜ガスとしては、プラズマ放電を発生させるために、必要に応じて、放電ガスを用いてもよい。このようなキャリアガス及び放電ガスとしては、適宜公知のものを使用することができ、例えば、ヘリウム、アルゴン、ネオン、キセノン等の希ガス、水素及び窒素を用いることができる。 As the film forming gas, a carrier gas may be used as necessary in order to supply the source gas into the film forming chamber 28. Further, as a film forming gas, a discharge gas may be used as necessary in order to generate plasma discharge. As such carrier gas and discharge gas, known ones can be used as appropriate, and for example, rare gases such as helium, argon, neon, xenon, hydrogen, and nitrogen can be used.
 以上説明した図2に示す製造装置10を用いて、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有し、かつ、X線光電子分光法により測定されるC1sスペクトル領域のデプスプロファイルから求められる、各測定位置におけるC-C、C-SiO、C-O、C=OおよびC(=O)-Oの各結合に由来するピーク強度の総和に対するC-C結合に由来するピーク強度の割合X(%)の、厚さ方向の平均値XAVEが1%以上40%以下である応力緩和層を形成することができる。 The above-described manufacturing apparatus 10 shown in FIG. 2 is used to contain a silicon atom (Si), an oxygen atom (O), and a carbon atom (C), and in the C1s spectral region measured by X-ray photoelectron spectroscopy. Derived from the C—C bond relative to the sum of peak intensities derived from each bond of C—C, C—SiO, C—O, C═O and C (═O) —O at each measurement position, obtained from the depth profile It is possible to form a stress relaxation layer in which the average value X AVE in the thickness direction of the ratio X (%) of the peak intensity is 1% or more and 40% or less.
 応力緩和層の組成、すなわち、含有する原子の種類、[C](at%)および[CAVE](at%)の値、ならびにX(%)およびXAVE(%)の値を制御する方法は特に限定されるものではないが、プラズマ発生用電源の電力、搬送速度、用いられる原料ガスの種類、用いられる原料ガスの供給量、用いられる酸素ガスの供給量、用いられる原料ガスと酸素ガスとの比率、真空チャンバー内の真空度、搬送速度等を適宜組み合わせて制御する方法を用いることが好ましい。 Method for controlling the composition of the stress relaxation layer, that is, the type of atoms contained, the values of [C] (at%) and [C AVE ] (at%), and the values of X (%) and X AVE (%) Is not particularly limited, but the power of the plasma generation power source, the conveyance speed, the type of source gas used, the amount of source gas used, the amount of oxygen gas used, the source gas and oxygen gas used It is preferable to use a method in which the ratio, the degree of vacuum in the vacuum chamber, the conveyance speed, and the like are appropriately combined and controlled.
 真空チャンバー内の圧力(真空度)は、原料ガスの種類等に応じて適宜調整することができる。ここで、真空度は、0.5Pa以上50Pa以下とすることが好ましい。 The pressure in the vacuum chamber (degree of vacuum) can be adjusted as appropriate according to the type of source gas. Here, the degree of vacuum is preferably 0.5 Pa or more and 50 Pa or less.
 ここで、プラズマ発生用電源22の電力は上記したような交流電源を用いる場合は、原料ガスの種類や真空チャンバー内の圧力等に応じて適宜調整することができる。また、このようなプラズマCVD法において、成膜ローラー19と成膜ローラー20との間に放電するために、プラズマ発生用電源22に接続された電極ドラム(本実施形態においては、成膜ローラー19及び20に設置されている。)に印加する電力は、原料ガスの種類や真空チャンバー内の圧力等に応じて適宜調整することができるものであり一概にいえるものでないが、有効成膜幅1mに対して、例えば、1kW以上10kW以下とすることが好ましい。 Here, when the AC power source as described above is used, the power of the plasma generating power source 22 can be appropriately adjusted according to the type of source gas, the pressure in the vacuum chamber, and the like. Further, in such a plasma CVD method, an electrode drum (in this embodiment, the film forming roller 19) connected to the plasma generating power source 22 for discharging between the film forming roller 19 and the film forming roller 20. The electric power to be applied to the gas can be adjusted as appropriate according to the type of the source gas, the pressure in the vacuum chamber, and the like. On the other hand, it is preferable to set it as 1 kW or more and 10 kW or less, for example.
 基材2の搬送速度(ライン速度)は、原料ガスの種類や真空チャンバー内の圧力等に応じて適宜調整することができる。ここで、搬送速度は、0.25m/min以上とすることが好ましく、0.5m/min以上とすることがより好ましい。また、搬送速度は、100m/min以下とすることが好ましく、60m/min以下とすることがより好ましい。 The conveyance speed (line speed) of the base material 2 can be appropriately adjusted according to the type of raw material gas, the pressure in the vacuum chamber, and the like. Here, the conveyance speed is preferably 0.25 m / min or more, and more preferably 0.5 m / min or more. Moreover, it is preferable that a conveyance speed shall be 100 m / min or less, and it is more preferable to set it as 60 m / min or less.
 応力緩和層の組成、すなわち、含有する原子の種類、[C](at%)および[CAVE](at%)の値、ならびにX(%)およびXAVE(%)の値は、例えば、以下の方法(1)~(4)を採用することで本発明の範囲内に制御することが特に好ましい。 The composition of the stress relaxation layer, that is, the type of atoms contained, the values of [C] (at%) and [C AVE ] (at%), and the values of X (%) and X AVE (%) are, for example, It is particularly preferable to control within the scope of the present invention by employing the following methods (1) to (4).
 (1)プラズマCVD用原料ガスによる制御
 分子内に炭素、水素、酸素及びケイ素の比率の異なるプラズマCVD用原料を適切に使用することによって、制御することができる。
(1) Control by plasma CVD source gas It is possible to control by appropriately using plasma CVD source materials having different ratios of carbon, hydrogen, oxygen and silicon in the molecule.
 具体的には、プラズマCVD用原料としては、分子内にSi-C結合の比率が低い有機ケイ素化合物が好ましく用いられる。これらの有機ケイ素化合物における1分子中のSi-Cの結合は、1分子中のSi原子1個に対して2個以下が好ましく、より好ましくは、1個又は0個である。 Specifically, as a raw material for plasma CVD, an organosilicon compound having a low Si—C bond ratio in the molecule is preferably used. The number of Si—C bonds in one molecule in these organosilicon compounds is preferably 2 or less, more preferably 1 or 0, per one Si atom in one molecule.
 具体的には、ヘキサメチルジシロキサン、テトラメチルジシロキサン等のジシロキサン類よりも、オクタメチルシクロテトラシロキサン、テトラメチルシクロテトラシロキサン等の環状シロキサンや、テトラメトキシシラン、メチルトリメトキシシラン等のSiを1分子中に1個含有するアルコキシシランが好ましく用いられる。これらの化合物は、1種を単独で又は2種以上を組み合わせて使用することができる。 Specifically, rather than disiloxanes such as hexamethyldisiloxane and tetramethyldisiloxane, cyclic siloxanes such as octamethylcyclotetrasiloxane and tetramethylcyclotetrasiloxane, and Si such as tetramethoxysilane and methyltrimethoxysilane An alkoxysilane containing one per molecule is preferably used. These compounds can be used individually by 1 type or in combination of 2 or more types.
 ここで、原料ガスの供給量が大きくなると、XAVE(%)は大きくなる。 Here, as the supply amount of the source gas increases, X AVE (%) increases.
 (2)反応ガスである酸素ガスの供給量による制御
 CVD製膜時に供給する反応ガスである酸素ガスの供給量を増減させることによって、制御することができる。
(2) Control by supply amount of oxygen gas which is reaction gas It is possible to control by increasing / decreasing the supply amount of oxygen gas which is a reaction gas supplied during CVD film formation.
 具体的には、上記の好ましい原料を酸化してケイ素原子、酸素原子及び炭素原子を含有する応力緩和層を形成する際に、完全に酸化させない程度に酸素ガスの供給量を抑制し、逆に応力緩和層中に過剰な炭素が残存しない程度に原料ガスに対して、酸素ガスを一定量供給することによって制御することが好ましい。 Specifically, when forming the stress relaxation layer containing silicon atoms, oxygen atoms and carbon atoms by oxidizing the preferred raw materials, the supply amount of oxygen gas is suppressed to the extent that it is not completely oxidized, and conversely It is preferable to control by supplying a certain amount of oxygen gas to the raw material gas so that excessive carbon does not remain in the stress relaxation layer.
 ここで、酸素ガスの供給量が大きくなると[CAVE](at%)は小さくなる。 Here, [C AVE ] (at%) decreases as the supply amount of oxygen gas increases.
 (3)不活性ガスの添加量の制御
 成膜中に、必要に応じて窒素、アルゴン、ヘリウムなどの不活性ガスを供給し、この不活性ガスの供給量を調整することによって、応力緩和層を形成する際のプラズマを安定化させて、酸化反応を調整することで、制御することができる。ただし、本発明は、不活性ガスを使用するものに限られない。
(3) Control of addition amount of inert gas During film formation, an inert gas such as nitrogen, argon, or helium is supplied as necessary, and the supply amount of this inert gas is adjusted to thereby reduce the stress relaxation layer. It is possible to control by stabilizing the plasma at the time of forming and adjusting the oxidation reaction. However, the present invention is not limited to using an inert gas.
 (4)プラズマ放電における電極間の距離の制御
 プラズマ放電を生成するための電極間の距離を連続的に変化させることによっても、制御することができる。前述の一対のロール電極が対面する装置を用いる場合には、電極に接する基材表面で生成するプラズマ空間が連続的に変化することになるため、電極間の距離が連続的に変化することによる成膜条件の変化によって、応力緩和層内の組成を連続的に変化させることができる。
(4) Control of distance between electrodes in plasma discharge It can also be controlled by continuously changing the distance between electrodes for generating plasma discharge. In the case of using the apparatus in which the pair of roll electrodes face each other, the plasma space generated on the surface of the base material in contact with the electrodes is continuously changed, so that the distance between the electrodes is continuously changed. The composition in the stress relaxation layer can be continuously changed by changing the film forming conditions.
 上記したように、本実施形態のより好ましい態様としては、本発明に係る応力緩和層を、図2に示す対向ローラー電極を有するプラズマCVD装置(ロールtoロール方式)を用いたプラズマCVD法によって、成膜することを特徴とするものである。これは、対向ローラー電極を有するプラズマCVD装置(ロールtoロール方式)を用いて量産する場合に、環状ポリオレフィンフィルムのクラック耐性、高温高湿環境下における耐久性、および接着性を改善しうる応力緩和層を効率よく製造することができるためである。 As described above, as a more preferable aspect of the present embodiment, the stress relaxation layer according to the present invention is formed by the plasma CVD method using the plasma CVD apparatus (roll-to-roll method) having the counter roller electrode shown in FIG. It is characterized by forming a film. This is stress relaxation that can improve crack resistance, durability in high temperature and high humidity environment, and adhesion of cyclic polyolefin film when mass-produced using plasma CVD equipment (roll-to-roll system) with opposed roller electrode This is because the layer can be manufactured efficiently.
 <環状ポリオレフィンフィルム>
 本発明の一形態に係る光学フィルムは、環状ポリオレフィンフィルムを有する。本願明細書では、環状ポリオレフィンフィルムとは、環状ポリオレフィンを、樹脂フィルムの総質量に対して50質量%以上含むフィルムを表すものとする。なお、ここでいう「樹脂フィルム」とは、環状ポリオレフィンを含む樹脂組成物より形成されうる樹脂フィルムそのものを指し、応力緩和層や、任意に含まれうる他の層を含むものではない。環状ポリオレフィンの含有量が50質量%未満であると、環状ポリオレフィンに由来する優れた透明性、耐熱性、電気特性等の特性を得ることができないからである。同様の観点から、環状ポリオレフィンの含有量は、80質量%以上含むことが好ましく、90質量%以上含むことがより好ましい(上限100質量%)。
<Cyclic polyolefin film>
The optical film which concerns on one form of this invention has a cyclic polyolefin film. In this specification, the cyclic polyolefin film represents a film containing 50% by mass or more of the cyclic polyolefin with respect to the total mass of the resin film. Here, the “resin film” refers to a resin film itself that can be formed from a resin composition containing a cyclic polyolefin, and does not include a stress relaxation layer or other layers that can be optionally included. This is because when the content of the cyclic polyolefin is less than 50% by mass, it is not possible to obtain excellent properties such as transparency, heat resistance and electrical characteristics derived from the cyclic polyolefin. From the same viewpoint, the content of the cyclic polyolefin is preferably 80% by mass or more, and more preferably 90% by mass or more (upper limit 100% by mass).
 (環状ポリオレフィン)
 本発明に用いられる環状ポリオレフィンは脂環式構造を含有する重合体樹脂からなるものである。環状ポリオレフィンは、環状オレフィンを重合又は共重合したものであってもよく、環状オレフィンと環状オレフィン以外の単量体とを付加共重合したものであってもよく、またこれらを水素添加反応させて、分子中の不飽和結合を飽和結合に変えたものであってもよい。
(Cyclic polyolefin)
The cyclic polyolefin used in the present invention is made of a polymer resin containing an alicyclic structure. The cyclic polyolefin may be one obtained by polymerizing or copolymerizing a cyclic olefin, or may be obtained by addition copolymerization of a cyclic olefin and a monomer other than the cyclic olefin. The unsaturated bond in the molecule may be changed to a saturated bond.
 環状ポリオレフィンは、特に制限されず、公知のものを用いることができる。環状ポリオレフィンの例としては、特開2004-67984号公報の段落「0015」~「0062」、特開2005-254812号公報の段落「0005」~「0007」、特開2008-274136号公報の段落「0016」~「0052」、特開2014-106338号公報の段落「0017」~「0036」、特開2015-209487号公報の段落「0063」~「0066」、国際公開第2007/043885号公報の段落「0404」~「0421」に記載されたもの等が挙げられるが、これらに限定されるものではない。 The cyclic polyolefin is not particularly limited, and a known one can be used. Examples of the cyclic polyolefin include paragraphs “0015” to “0062” of JP-A-2004-67984, paragraphs “0005” to “0007” of JP-A-2005-254812, and paragraphs of JP-A-2008-274136. “0016” to “0052”, paragraphs “0017” to “0036” of Japanese Patent Application Laid-Open No. 2014-106338, paragraphs “0063” to “0066” of Japanese Patent Application Laid-Open No. 2015-209487, and International Publication No. 2007/043885. However, it is not limited to those described in paragraphs “0404” to “0421”.
 また、環状オレフィンを形成する環状オレフィンの例としては、ノルボルネン、ジシクロペンタジエン、テトラシクロドデセン、エチルテトラシクロドデセン、エチリデンテトラシクロドデセン、テトラシクロ〔7.4.0.110,13.02,7〕トリデカ-2,4,6,11-テトラエンなどの多環構造の不飽和炭化水素及びその誘導体;シクロブテン、シクロペンテン、シクロヘキセン、3,4-ジメチルシクロペンテン、3-メチルシクロヘキセン、2-(2-メチルブチル)-1-シクロヘキセン、シクロオクテン、3a,5,6,7a-テトラヒドロ-4,7-メタノ-1H-インデン、シクロヘプテン、シクロペンタジエン、シクロヘキサジエンなどの単環構造の不飽和炭化水素及びその誘導体等、ならびにこれらを水素添加反応させたもの等が挙げられるが、これらに限定されるものではない。 As examples of the cyclic olefin forming a cyclic olefin, norbornene, dicyclopentadiene, tetracyclododecene, ethyl tetracyclododecene, ethylidene tetracyclododecene, tetracyclo [7.4.0.1 10,13. 0 2,7 ] trideca-2,4,6,11-tetraene and other unsaturated hydrocarbons and derivatives thereof; cyclobutene, cyclopentene, cyclohexene, 3,4-dimethylcyclopentene, 3-methylcyclohexene, 2- Unsaturated hydrocarbons having a monocyclic structure such as (2-methylbutyl) -1-cyclohexene, cyclooctene, 3a, 5,6,7a-tetrahydro-4,7-methano-1H-indene, cycloheptene, cyclopentadiene, cyclohexadiene And derivatives thereof, and those obtained by hydrogenation reaction thereof, but are not limited thereto.
 本発明の一形態に係る環状ポリオレフィンは、極性基を有する環状ポリオレフィンであることが好ましい。 The cyclic polyolefin according to one embodiment of the present invention is preferably a cyclic polyolefin having a polar group.
 極性基としては、例えば、ヒドロキシ基、炭素原子数1~10のアルコキシル基、炭素原子数1~10のアシルオキシ基、炭素原子数2~10のアルコキシカルボニル基、アリールオキシカルボニル基、シアノ基、アミド基、イミド環含有基、トリオルガノシロキシ基、トリオルガノシリル基、アミノ基、アシル基、炭素原子数1~10のアルコキシシリル基、スルホニル含有基及びカルボキシ基等が挙げられる。これらの極性基について、更に具体的に説明すると、上記アルコキシル基としては、例えばメトキシ基、エトキシ基等が挙げられ;アシルオキシ基としては、例えばアセトキシ基、プロピオニルオキシ基等のアルキルカルボニルオキシ基、及びベンゾイルオキシ基等のアリールカルボニルオキシ基が挙げられ;アルコキシカルボニル基としては、例えばメトキシカルボニル基、エトキシカルボニル基等が挙げられ;アリールオキシカルボニル基としては、例えばフェノキシカルボニル基、ナフチルオキシカルボニル基、フルオレニルオキシカルボニル基、ビフェニリルオキシカルボニル基等が挙げられ;トリオルガノシロキシ基としては、例えばトリメチルシロキシ基、トリエチルシロキシ基等が挙げられ;トリオルガノシリル基としては、例えばトリメチルシリル基、トリエチルシリル基等が挙げられ;アミノ基としては、例えば第1級アミノ基が挙げられ;アルコキシシリル基としては、例えばトリメトキシシリル基、トリエトキシシリル基等が挙げられる。これらの中でも、アルコキシカルボニル基が好ましく、メトキシカルボニル基がより好ましい。 Examples of the polar group include a hydroxy group, an alkoxyl group having 1 to 10 carbon atoms, an acyloxy group having 1 to 10 carbon atoms, an alkoxycarbonyl group having 2 to 10 carbon atoms, an aryloxycarbonyl group, a cyano group, and an amide. Groups, imide ring-containing groups, triorganosiloxy groups, triorganosilyl groups, amino groups, acyl groups, alkoxysilyl groups having 1 to 10 carbon atoms, sulfonyl-containing groups, and carboxy groups. These polar groups will be described more specifically. Examples of the alkoxyl group include a methoxy group and an ethoxy group; examples of the acyloxy group include an alkylcarbonyloxy group such as an acetoxy group and a propionyloxy group; Arylcarbonyloxy groups such as benzoyloxy groups; examples of alkoxycarbonyl groups include methoxycarbonyl groups and ethoxycarbonyl groups; examples of aryloxycarbonyl groups include phenoxycarbonyl groups, naphthyloxycarbonyl groups, and fullerenes. Examples of the triorganosiloxy group include trimethylsiloxy group and triethylsiloxy group; examples of the triorganosilyl group include: Example, if a trimethylsilyl group, triethylsilyl group and the like; examples of the amino group, for example a primary amino group and the like; the alkoxysilyl group, for example a trimethoxysilyl group, triethoxysilyl group, and the like. Among these, an alkoxycarbonyl group is preferable and a methoxycarbonyl group is more preferable.
 本発明に係る環状ポリオレフィンとしては、例えば、下記式で表される(共)重合体が挙げられる。 Examples of the cyclic polyolefin according to the present invention include (co) polymers represented by the following formula.
Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001
(式中、R~Rは、それぞれ独立に、水素原子、ハロゲン原子、置換若しくは非置換の炭素原子数1~30の炭化水素基又は極性基を表し、置換若しくは非置換の炭素原子数1~30の炭化水素基は、酸素原子、窒素原子、イオウ原子又はケイ素原子を有する連結基を介して結合していても良い。RとR又はRとRの二つが結合して2価の炭化水素基を形成していても良く、炭素環又は複素環を形成していても良い。複数のR~Rの各々は同一であっても異なっていても良い。ただし、R~Rの少なくとも一つは極性基である。p及びmは、それぞれ独立に、0以上の整数を表す。)
 極性基としては、上記で挙げたものと同様である。
(Wherein R 1 to R 4 each independently represents a hydrogen atom, a halogen atom, a substituted or unsubstituted hydrocarbon group having 1 to 30 carbon atoms or a polar group, and the number of substituted or unsubstituted carbon atoms. The hydrocarbon group of 1 to 30 may be bonded via a linking group having an oxygen atom, a nitrogen atom, a sulfur atom or a silicon atom, and two of R 1 and R 2 or R 3 and R 4 are bonded. May form a divalent hydrocarbon group, may form a carbocycle or a heterocycle, and each of the plurality of R 1 to R 4 may be the same or different. And at least one of R 1 to R 4 is a polar group, and p and m each independently represents an integer of 0 or more.)
The polar group is the same as that described above.
 ハロゲン原子としては、フッ素原子、塩素原子及び臭素原子が挙げられる。 Examples of the halogen atom include a fluorine atom, a chlorine atom and a bromine atom.
 炭素原子数1~30の炭化水素基としては、例えば、メチル基、エチル基、プロピル基等のアルキル基;シクロペンチル基、シクロヘキシル基等のシクロアルキル基;ビニル基、アリル基、プロペニル基等のアルケニル基;フェニル基、ビフェニル基、ナフチル基、アントラセニル基等の芳香族基等が挙げられる。これらの炭化水素基は置換されていても良く、置換基としては例えばフッ素原子、塩素原子及び臭素原子等のハロゲン原子、フェニルスルホニル基等が挙げられる。 Examples of the hydrocarbon group having 1 to 30 carbon atoms include alkyl groups such as methyl group, ethyl group and propyl group; cycloalkyl groups such as cyclopentyl group and cyclohexyl group; alkenyl groups such as vinyl group, allyl group and propenyl group. Groups; aromatic groups such as phenyl, biphenyl, naphthyl, and anthracenyl groups; These hydrocarbon groups may be substituted, and examples of the substituent include halogen atoms such as fluorine atom, chlorine atom and bromine atom, phenylsulfonyl group and the like.
 また、置換又は非置換の炭素原子数1~30の炭化水素基は、直接環構造に結合していても良いし、連結基(linkage)を介して結合していても良い。連結基としては、例えば式:-(CH-(mは1~10の整数)で表されるアルキレン基等の炭素原子数1~10の2価の炭化水素基、又は、酸素原子、窒素原子、イオウ原子若しくはケイ素原子を含む連結基が挙げられる。酸素原子、窒素原子、イオウ原子又はケイ素原子を含む連結基の具体例としては、カルボニル基[-CO-]、カルボニルオキシ基[-COO-]、オキシカルボニル基[-OCO-]、スルホニル基[-SO-]、エーテル結合[-O-]、チオエーテル結合[-S-]、イミノ基[-NH-]、アミド結合[-NHCO-、-CONH-]、シロキサン結合[-OSi(R)-(式中、Rはメチル基、エチル基等のアルキル基)]、及びこれらの基が2種以上連結されてなる基等が挙げられる。 The substituted or unsubstituted hydrocarbon group having 1 to 30 carbon atoms may be directly bonded to the ring structure or may be bonded via a linking group. Examples of the linking group include a divalent hydrocarbon group having 1 to 10 carbon atoms such as an alkylene group represented by the formula: — (CH 2 ) m — (m is an integer of 1 to 10), or an oxygen atom. , A linking group containing a nitrogen atom, a sulfur atom or a silicon atom. Specific examples of the linking group containing an oxygen atom, nitrogen atom, sulfur atom or silicon atom include a carbonyl group [—CO—], a carbonyloxy group [—COO—], an oxycarbonyl group [—OCO—], a sulfonyl group [ —SO 2 —], ether bond [—O—], thioether bond [—S—], imino group [—NH—], amide bond [—NHCO—, —CONH—], siloxane bond [—OSi (R 2 )-(Wherein R is an alkyl group such as a methyl group or an ethyl group)], and a group in which two or more of these groups are linked.
 RとR又はRとRの二つが結合して2価の炭化水素基を形成しても良く、炭素環又は複素環を形成しても良いが形成していない方が好ましい。炭素環又は複素環は、単環構造であっても多環構造であっても良く、当該炭素環又は当該複素環は芳香環であっても非芳香環であっても良いが、非芳香族環の方が好ましい。 Two of R 1 and R 2 or R 3 and R 4 may be bonded to form a divalent hydrocarbon group, which may form a carbocyclic or heterocyclic ring, but is preferably not formed. The carbocyclic or heterocyclic ring may be a monocyclic structure or a polycyclic structure, and the carbocyclic ring or the heterocyclic ring may be an aromatic ring or a non-aromatic ring. A ring is preferred.
 R~Rの少なくとも一つは極性基であり、R~Rの極性基以外の基は、水素原子であることが好ましい。 At least one of R 1 to R 4 is a polar group, and the group other than the polar group of R 1 to R 4 is preferably a hydrogen atom.
 また、mが0~3の整数、pが0~3の整数であることが好ましく、m+p=0~4であることがより好ましく、m+p=0~2であることが更に好ましく、m=1、p=0である特に好ましい。 M is preferably an integer of 0 to 3, p is preferably an integer of 0 to 3, more preferably m + p = 0 to 4, more preferably m + p = 0 to 2, and m = 1. , P = 0 is particularly preferred.
 m=1、p=0である特定単量体は、得られる環状ポリオレフィンのガラス転移温度が高くかつ機械的強度も優れたものとなる点で好ましい。 The specific monomer with m = 1 and p = 0 is preferable in that the cyclic polyolefin obtained has a high glass transition temperature and excellent mechanical strength.
 上記式で表される(共)重合体の生成に用いられる共重合性単量体の具体例としては、シクロブテン、シクロペンテン、シクロヘプテン、シクロオクテン、ジシクロペンタジエン等のシクロオレフィンを挙げることができる。 Specific examples of the copolymerizable monomer used for producing the (co) polymer represented by the above formula include cycloolefins such as cyclobutene, cyclopentene, cycloheptene, cyclooctene, and dicyclopentadiene.
 シクロオレフィンの炭素原子数としては、4~20の範囲内が好ましく、更に好ましくは5~12の範囲内である。 The number of carbon atoms of the cycloolefin is preferably within the range of 4 to 20, more preferably within the range of 5 to 12.
 本発明において、環状ポリオレフィンは1種単独で、又は2種以上を併用することができる。 In the present invention, the cyclic polyolefin can be used alone or in combination of two or more.
 環状ポリオレフィンの好ましい分子量は、固有粘度〔η〕inhで0.2~5dl/gであることが好ましく、0.3~3dl/gであることがより好ましく、0.4~1.5dl/gであることがさらに好ましい。ゲルパーミエーションクロマトグラフィー(GPC)で測定したポリスチレン換算の数平均分子量(Mn)は、8000~100000であることが好ましく、10000~80000であることがより好ましく、12000~50000であることがさらに好ましい。ゲルパーミエーションクロマトグラフィー(GPC)で測定したポリスチレン換算の重量平均分子量(Mw)は、20000~300000であることが好ましく、30000~250000であることがより好ましく、40000~200000であることがさらに好ましい。 The molecular weight of the cyclic polyolefin is preferably 0.2 to 5 dl / g, more preferably 0.3 to 3 dl / g in terms of intrinsic viscosity [η] inh , and 0.4 to 1.5 dl / g. More preferably. The number average molecular weight (Mn) in terms of polystyrene measured by gel permeation chromatography (GPC) is preferably 8000 to 100,000, more preferably 10,000 to 80,000, and further preferably 12,000 to 50,000. . The polystyrene-equivalent weight average molecular weight (Mw) measured by gel permeation chromatography (GPC) is preferably 20,000 to 300,000, more preferably 30,000 to 250,000, and further preferably 40,000 to 200,000. .
 固有粘度〔η〕inh、数平均分子量及び重量平均分子量が上記範囲にあることによって、環状ポリオレフィンの耐熱性、耐水性、耐薬品性、機械的特性、及び本発明の偏光板保護フィルムとしての成形加工性が良好となる。 Inherent viscosity [η] inh , number average molecular weight and weight average molecular weight are in the above ranges, so that heat resistance, water resistance, chemical resistance, mechanical properties of cyclic polyolefin, and molding as a polarizing plate protective film of the present invention Workability is improved.
 本発明の一形態に用いられうる環状ポリオレフィンのガラス転移温度(Tg)としては、通常、110℃以上であることが好ましく、110~350℃であることがより好ましく、120~250℃であることがさらに好ましく、120~220℃であることが特に好ましい。Tgを110℃以上とすると、高温条件下での使用、又はコーティング、印刷等の二次加工により変形がより起こり難くなる。一方、Tgを350℃以下とすると、成形加工が困難になる場合をより確実に回避し、成形加工時の熱によって樹脂が劣化する可能性がより抑制される。 The glass transition temperature (Tg) of the cyclic polyolefin that can be used in one embodiment of the present invention is usually preferably 110 ° C. or higher, more preferably 110 to 350 ° C., and more preferably 120 to 250 ° C. Is more preferable, and 120 to 220 ° C. is particularly preferable. When Tg is 110 ° C. or higher, deformation is less likely to occur due to use under high temperature conditions or secondary processing such as coating or printing. On the other hand, when Tg is 350 ° C. or lower, the case where the molding process becomes difficult is more reliably avoided, and the possibility that the resin is deteriorated by the heat during the molding process is further suppressed.
 また、環状ポリオレフィンとしては、市販品を好ましく用いることができる。市販品の例としては、JSR株式会社からアートン(Arton:登録商標)G(例えば、Arton:登録商標 G7810等)、アートン(登録商標)F、アートン(登録商標)R、及びアートン(登録商標)RXという商品名で市販されており、これらを使用できる。 In addition, as the cyclic polyolefin, a commercially available product can be preferably used. Examples of commercial products include Arton (registered trademark) G (for example, Arton: registered trademark G7810), Arton (registered trademark) F, Arton (registered trademark) R, and Arton (registered trademark) from JSR Corporation. These are commercially available under the trade name RX and can be used.
 (添加剤)
 環状ポリオレフィンは、本発明の効果を損なわない範囲内で各種添加剤が含有されていても良い。添加剤としては、特に制限されずに公知のものを使用することができる。好ましい添加剤としては、例えば、無機微粒子、可塑剤、紫外線吸収剤等が挙げられるが、これらに限られるものではない。
(Additive)
The cyclic polyolefin may contain various additives as long as the effects of the present invention are not impaired. As an additive, a well-known thing can be used without being restrict | limited in particular. Preferable additives include, for example, inorganic fine particles, plasticizers, ultraviolet absorbers and the like, but are not limited thereto.
 (環状ポリオレフィンフィルムの特性)
 [光線透過率]
 本発明の一形態に係る環状ポリオレフィンフィルムを、液晶表示装置や有機EL素子等の表示装置に用いる場合は、環状ポリオレフィンフィルムは透明であることが好ましい。すなわち、光線透過率が80%以上であることが好ましく、85%以上がより好ましく、90%以上であることがさらに好ましい(上限100%)。光線透過率は、JIS K 7105:1981に記載された方法、すなわち、積分球式光線透過率測定装置を用いて全光線透過率及び散乱光量を測定し、全光線透過率から拡散透過率を引いて算出することができる。ただし、本発明の上記光線透過率の範囲を満たすものに限定されるものではない。
(Characteristics of cyclic polyolefin film)
[Light transmittance]
When using the cyclic polyolefin film which concerns on one form of this invention for display apparatuses, such as a liquid crystal display device and an organic EL element, it is preferable that a cyclic polyolefin film is transparent. That is, the light transmittance is preferably 80% or more, more preferably 85% or more, and further preferably 90% or more (upper limit 100%). The light transmittance is determined by measuring the total light transmittance and the amount of scattered light using the method described in JIS K 7105: 1981, that is, using an integrating sphere light transmittance measuring device, and subtracting the diffuse transmittance from the total light transmittance. Can be calculated. However, the present invention is not limited to those satisfying the above light transmittance range.
 [90℃での弾性率]
 本発明の一形態に係る環状ポリオレフィンフィルムの90℃での弾性率は、1.7GPa以上であることが好ましい。この範囲であると、クラック耐性、高温高湿環境下における耐久性、および接着性がより良好となる。かかる理由は、光学フィルムの加工時に印加される応力や光学フィルムを高温高湿環境下で経時させた際に発生する応力に対して、環状ポリオレフィンフィルムの耐久性がより向上し、クラックの発生や拡大が抑制されるからであると考えられる。そして、光学フィルムと他の部材とが貼合された状態においては、両者の界面に集中する応力に対する環状ポリオレフィンフィルムの耐久性がより向上し、環状ポリオレフィンフィルム中の両者の界面近傍の領域における破壊が抑制されると考えられるからである。同様の観点から、90℃での弾性率が1.9GPa以上であることが好ましい。また、本発明の一形態に係る環状ポリオレフィンフィルムの90℃での弾性率は、2.7GPa以下であることが好ましい。この範囲であると、クラック耐性、高温高湿環境下における耐久性、および接着性がより良好となる。かかる理由は、環状ポリオレフィンフィルムが適度に柔軟となることで環状ポリオレフィンフィルムの脆さが改善し、クラックの発生や拡大が抑制されるからであると考えられる。そして光学フィルムと他の部材とが貼合された状態において高温高湿環境下に置かれた際には、環状ポリオレフィンフィルムが他の部材の伸縮により追従できるようになり、クラックの発生および拡大、ならびに両者の界面における応力の集中が抑制されると考えられるからである。同様の観点から、90℃での弾性率が2.5GPa以下であることがより好ましい。
[Elastic modulus at 90 ° C]
The elastic modulus at 90 ° C. of the cyclic polyolefin film according to one embodiment of the present invention is preferably 1.7 GPa or more. Within this range, crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness become better. This is because the durability of the cyclic polyolefin film is further improved against the stress applied during processing of the optical film and the stress generated when the optical film is aged in a high-temperature and high-humidity environment. This is considered to be because expansion is suppressed. And in the state where the optical film and other members are bonded, the durability of the cyclic polyolefin film against the stress concentrated on the interface between the two is further improved, and the fracture in the region near the interface between the two in the cyclic polyolefin film It is because it is thought that is suppressed. From the same viewpoint, the elastic modulus at 90 ° C. is preferably 1.9 GPa or more. The elastic modulus at 90 ° C. of the cyclic polyolefin film according to one embodiment of the present invention is preferably 2.7 GPa or less. Within this range, crack resistance, durability in a high-temperature and high-humidity environment, and adhesiveness become better. The reason for this is considered that the cyclic polyolefin film becomes moderately flexible, thereby improving the brittleness of the cyclic polyolefin film and suppressing the occurrence and expansion of cracks. And when placed in a high-temperature and high-humidity environment in a state where the optical film and other members are bonded, the cyclic polyolefin film can follow the expansion and contraction of the other members, and the generation and expansion of cracks, In addition, it is considered that stress concentration at the interface between the two is suppressed. From the same viewpoint, the elastic modulus at 90 ° C. is more preferably 2.5 GPa or less.
 90℃での弾性率は、以下の測定方法に基づき得られた値である。すなわち、90℃での弾性率(Pa)は、JIS K 7127:1999に記載の方法に準じつつ、引っ張り試験器 株式会社オリエンテック製テンシロンRTA-100と、90℃に加熱した炉とを用い、90℃に加熱した炉内で引っ張り試験を行うことで得ることができる。 The elastic modulus at 90 ° C. is a value obtained based on the following measurement method. That is, the elastic modulus (Pa) at 90 ° C. was determined using a tensile tester, Tensilon RTA-100 manufactured by Orientec Co., Ltd., and a furnace heated to 90 ° C. in accordance with the method described in JIS K 7127: 1999. It can be obtained by conducting a tensile test in a furnace heated to 90 ° C.
 なお、環状ポリオレフィンフィルムの90℃での弾性率の制御方法は、後述する環状ポリオレフィンフィルムの製造方法に記載している。 In addition, the control method of the elasticity modulus at 90 degreeC of the cyclic polyolefin film is described in the manufacturing method of the cyclic polyolefin film mentioned later.
 (膜厚)
 本発明の一形態に係る環状ポリオレフィンフィルムの膜厚は、特に制限されないが、例えば、5μm以上125μm以下であることが好ましい。膜厚がこの範囲であると、環状ポリオレフィンフィルムが有する光学フィルム用途の優れた特性をより良好に発現し、かつクラックの発生および高温高湿環境下でのクラックの拡大がより低減される。
(Film thickness)
Although the film thickness of the cyclic polyolefin film which concerns on one form of this invention is not restrict | limited in particular, For example, it is preferable that they are 5 micrometers or more and 125 micrometers or less. When the film thickness is in this range, the excellent properties of the cyclic polyolefin film for optical film use are more favorably exhibited, and the generation of cracks and the expansion of cracks in a high-temperature and high-humidity environment are further reduced.
 <環状ポリオレフィンフィルムの製造方法>
 本発明の一形態に用いられうる環状ポリオレフィンフィルムの製造方法の例を説明するが、本発明はこれに限定されるものではない。環状ポリオレフィンフィルムの製造方法としては、例えば、インフレーション法、T-ダイ法、カレンダー法、切削法、流延法、エマルジョン法、ホットプレス法等の製造法が使用できるが、着色抑制、異物欠点の抑制、ダイライン等の光学欠点の抑制等の観点から流延法による溶液製膜が好ましい。
<Method for producing cyclic polyolefin film>
Although the example of the manufacturing method of the cyclic polyolefin film which can be used for one form of this invention is demonstrated, this invention is not limited to this. As a method for producing a cyclic polyolefin film, for example, a production method such as an inflation method, a T-die method, a calendar method, a cutting method, a casting method, an emulsion method, or a hot press method can be used. From the viewpoint of suppression, suppression of optical defects such as die lines, etc., solution casting by casting is preferred.
 環状ポリオレフィンフィルムの製造方法としては、移動する支持体上に、環状ポリオレフィン、任意に含まれうる添加剤及び溶媒等を含むドープを流延させて流延膜を形成する流延工程を有することが好ましい。さらに、当該流延工程には、流延膜に乾燥風を吹き付ける乾燥工程が含まれることが好ましい。 The method for producing a cyclic polyolefin film may include a casting step in which a dope containing a cyclic polyolefin, an additive that can be optionally included, a solvent, and the like is cast on a moving support to form a cast film. preferable. Furthermore, it is preferable that the casting process includes a drying process in which drying air is blown onto the casting film.
 溶液流延法で製造する場合においてドープの調製に有用な有機溶媒としては、上記環状ポリオレフィン成分及び任意に含まれうる添加剤を同時に溶解するものであれば制限なく用いることができる。 In the case of producing by the solution casting method, the organic solvent useful for the preparation of the dope can be used without limitation as long as it dissolves the cyclic polyolefin component and the additive that can be optionally contained at the same time.
 例えば、塩素系有機溶媒としては、ジクロロメタン等を、非塩素系有機溶媒としては、酢酸メチル、酢酸エチル、酢酸アミル、アセトン、テトラヒドロフラン、1,3-ジオキソラン、1,4-ジオキサン、シクロヘキサノン、ギ酸エチル、2,2,2-トリフルオロエタノール、2,2,3,3-ヘキサフルオロ-1-プロパノール、1,3-ジフルオロ-2-プロパノール、1,1,1,3,3,3-ヘキサフルオロ-2-メチル-2-プロパノール、1,1,1,3,3,3-ヘキサフルオロ-2-プロパノール、2,2,3,3,3-ペンタフルオロ-1-プロパノール、ニトロエタン等を挙げることができ、ジクロロメタン、酢酸メチル、酢酸エチル、アセトンを好ましく使用することができる。 For example, as a chlorinated organic solvent, dichloromethane and the like, and as a non-chlorinated organic solvent, methyl acetate, ethyl acetate, amyl acetate, acetone, tetrahydrofuran, 1,3-dioxolane, 1,4-dioxane, cyclohexanone, ethyl formate 2,2,2-trifluoroethanol, 2,2,3,3-hexafluoro-1-propanol, 1,3-difluoro-2-propanol, 1,1,1,3,3,3-hexafluoro -2-Methyl-2-propanol, 1,1,1,3,3,3-hexafluoro-2-propanol, 2,2,3,3,3-pentafluoro-1-propanol, nitroethane, etc. Dichloromethane, methyl acetate, ethyl acetate, and acetone can be preferably used.
 ドープには、上記有機溶媒の他に、1~40質量%の範囲内の炭素原子数1~4の直鎖又は分岐鎖状の脂肪族アルコールを含有させることが好ましい。ドープ中のアルコールの比率が高くなるとウェブがゲル化し、金属支持体からの剥離が容易になり、また、アルコールの割合が少ない場合は非塩素系有機溶媒系で環状ポリオレフィン等の溶解を促進する役割もある。 In addition to the organic solvent, the dope preferably contains a linear or branched aliphatic alcohol having 1 to 4 carbon atoms in the range of 1 to 40% by mass. When the ratio of alcohol in the dope increases, the web gels and peeling from the metal support becomes easy. Also, when the ratio of alcohol is small, the role of promoting the dissolution of cyclic polyolefin, etc. in a non-chlorine organic solvent system There is also.
 炭素原子数1~4の直鎖又は分岐鎖状の脂肪族アルコールとしては、例えば、メタノール、エタノール、n-プロパノール、iso-プロパノール、n-ブタノール、sec-ブタノール、tert-ブタノール、プロピレングリコールモノメチルエーテル等を挙げることができる。これらの中でも、ドープの安定性に優れ、沸点も比較的低く、乾燥性が良好であり、毒性がないことから等からエタノールが好ましい。 Examples of the linear or branched aliphatic alcohol having 1 to 4 carbon atoms include methanol, ethanol, n-propanol, iso-propanol, n-butanol, sec-butanol, tert-butanol, propylene glycol monomethyl ether Etc. Among these, ethanol is preferable because it has excellent dope stability, has a relatively low boiling point, good drying properties, and no toxicity.
 ドープ中に含まれる溶媒の含有割合は、ドープの総質量に対して1質量%以上であることが好ましい。ドープ中に含まれる溶媒の含有割合を1質量%以上とすることで、フィルムの脆性の低下、製造中のフィルムが裂ける等の欠陥発生による生産性の低下がより抑制される。同様の観点から、ドープ中に含まれる溶媒の含有割合は、50質量%以上であることがより好ましく、60質量%以上であることがさらに好ましい。また、ドープ中に含まれる溶媒の含有割合は、95質量%以下であることが好ましい。ドープ中に含まれる溶媒の含有割合を95質量%以下とすることで、フィルムの透明性の低下がより抑制される。同様の観点から、ドープ中に含まれる溶媒の含有割合は、90質量%以下であることがより好ましく、85質量%以下であることがさらに好ましく、80質量%以下であることが特に好ましい。溶媒成分の含有割合は、フィルムの生産条件、作製するフィルムの膜厚等から適宜調整可能である。 The content ratio of the solvent contained in the dope is preferably 1% by mass or more based on the total mass of the dope. By making the content rate of the solvent contained in dope 1 mass% or more, the fall of productivity by defect generation | occurrence | production, such as a fall of the brittleness of a film and a film to tear during manufacture, is suppressed more. From the same viewpoint, the content ratio of the solvent contained in the dope is more preferably 50% by mass or more, and further preferably 60% by mass or more. Moreover, it is preferable that the content rate of the solvent contained in dope is 95 mass% or less. By making the content ratio of the solvent contained in the dope 95% by mass or less, a decrease in transparency of the film is further suppressed. From the same viewpoint, the content ratio of the solvent contained in the dope is more preferably 90% by mass or less, further preferably 85% by mass or less, and particularly preferably 80% by mass or less. The content ratio of the solvent component can be appropriately adjusted from the production conditions of the film, the film thickness of the film to be produced, and the like.
 また、ドープには、適宜、上記した添加剤を配合しても良い。 In addition, the above-mentioned additives may be appropriately added to the dope.
 樹脂及び添加剤等は、上記した溶媒に溶解されてドープが調製される。ドープは、濾材で濾過され、その後、脱泡される。濾材としては、捕集粒子径が0.5~5μmで、濾水時間が10~25秒/100mLのものを用いることが好ましい。 Resin and additives are dissolved in the above solvent to prepare a dope. The dope is filtered through a filter medium and then degassed. It is preferable to use a filter medium having a collected particle diameter of 0.5 to 5 μm and a drainage time of 10 to 25 seconds / 100 mL.
 流延膜とは、流延ダイから支持体上にドープを流延することにより形成された膜をいい、後述する延伸工程や第二乾燥工程等によりフィルムを形成するまでのドープを指す。 The cast film refers to a film formed by casting a dope from a casting die onto a support, and refers to a dope until a film is formed by a stretching process or a second drying process described later.
 (流延工程)
 流延工程について説明する。まず、ドープは、流延ダイより支持体上に流延される。具体的には、ドープは、例えば加圧型定量ギヤポンプ等の送液ポンプによりタンクから流延ダイに送られ、流延ダイの流延口から流延される。
(Casting process)
The casting process will be described. First, the dope is cast on a support from a casting die. Specifically, the dope is sent from the tank to the casting die by a liquid feeding pump such as a pressurized metering gear pump, and is cast from the casting port of the casting die.
 流延ダイとしては、吐出口の形状が調整可能なものが好ましい。また、流延膜の膜厚を均一にしやすい加圧ダイが好ましい。加圧ダイの種類としては、コートハンガーダイやTダイ等があり、いずれも好ましく用いられる。製膜速度を上げるために、加圧ダイを2基以上並べて配設し、ドープを分割して吐出しても良い。流延ダイからドープを吐出する吐出速度は、支持体の移動速度との兼ね合いや生産性等を考慮して、例えば、30~150m/分程度であることが好ましい。 As the casting die, one having an adjustable discharge port shape is preferable. Further, a pressure die that can easily make the thickness of the cast film uniform is preferable. Examples of the pressure die include a coat hanger die and a T die, and any of them is preferably used. In order to increase the film forming speed, two or more pressure dies may be arranged side by side, and the dope may be divided and discharged. The discharge speed for discharging the dope from the casting die is preferably, for example, about 30 to 150 m / min in consideration of the balance with the moving speed of the support and productivity.
 支持体は、無端ベルトにより無端状に形成されていることが好ましい。電源により駆動制御された回転ローラーにより無端ベルトが回転し、支持体上の流延膜を移動させる。支持体の移動速度(無端ベルトの回転速度)としては、60~150m/分であることが好ましい。支持体の移動速度をこの範囲内とすることにより、環状ポリオレフィンフィルムをより高速で生産することができる。 The support is preferably formed endlessly by an endless belt. The endless belt is rotated by a rotating roller driven and controlled by a power source, and the casting film on the support is moved. The moving speed of the support (the rotational speed of the endless belt) is preferably 60 to 150 m / min. By setting the moving speed of the support within this range, the cyclic polyolefin film can be produced at a higher speed.
 支持体としては、表面を鏡面仕上げしたものを好ましく使用することができる。支持体としては、ステンレススティールベルト(以下、ステンレスベルトとも称する)又は鋳物で表面をメッキ仕上げしたドラムを好ましく使用することができる。キャストの幅は1~4mとすることができる。流延工程の支持体の表面温度としては、-50~40℃の温度が好ましく、より好ましくは0~40℃であり、更に好ましくは5~30℃である。支持体の温度を制御する方法は特に限定されず、温風又は冷風を吹きかける方法や、温水を支持体の裏側に接触させる方法がある。 As the support, one having a mirror-finished surface can be preferably used. As the support, a stainless steel belt (hereinafter also referred to as a stainless steel belt) or a drum whose surface is plated with a casting can be preferably used. The cast width can be 1 to 4 m. The surface temperature of the support in the casting step is preferably −50 to 40 ° C., more preferably 0 to 40 ° C., and further preferably 5 to 30 ° C. The method for controlling the temperature of the support is not particularly limited, and there are a method of blowing warm air or cold air, and a method of bringing hot water into contact with the back side of the support.
 [蒸発抑制工程]
 流延工程には、乾燥工程の前に、支持体上に流延された流延膜に前記溶媒中の主溶媒を含む主溶媒ガスを吹き付ける蒸発抑制工程が含まれていてもよい。主溶媒とは、1種類の溶媒を使用する際にはその溶媒をいい、複数の溶媒からなる混合溶媒を使用する際には、体積比で最も大きい溶媒をいう。
[Evaporation suppression process]
The casting step may include an evaporation suppressing step of blowing a main solvent gas containing the main solvent in the solvent onto the casting film cast on the support before the drying step. The main solvent refers to the solvent when one kind of solvent is used, and refers to the solvent having the largest volume ratio when a mixed solvent composed of a plurality of solvents is used.
 [乾燥工程]
 流延工程に含まれる乾燥工程について説明する。乾燥工程は、蒸発抑制工程を経た流延膜に乾燥風を吹き付けることにより、支持体から軟膜として流延膜を剥離可能な程度にまで乾燥させる工程である。この乾燥工程において、フィルムの乾燥速度を調整することにより、製造される環状ポリオレフィンフィルムの90℃での弾性率を調整することが可能である。
[Drying process]
The drying process included in the casting process will be described. The drying step is a step of drying the cast film as a soft film from the support to the extent that the cast film can be peeled by blowing dry air on the cast film that has undergone the evaporation suppression process. In this drying step, it is possible to adjust the elastic modulus at 90 ° C. of the produced cyclic polyolefin film by adjusting the drying speed of the film.
 環状ポリオレフィンフィルムの90℃での弾性率は、使用する材料や、溶液流延法又は溶融流延法等によるフィルム製造時における流延したフィルムの乾燥速度を変更することにより、調整することができる。これらの中でも、制御可能範囲がより広範であるとの観点から、乾燥速度による制御であることが好ましく、溶液流涎法における乾燥速度による制御であることがより好ましい。溶液流涎法における乾燥速度による制御においては、製膜時において溶剤が乾燥することにより収縮が発生し環状ポリオレフィンをはじめとする樹脂が配向するが、このとき、乾燥速度を速くすると乾燥収縮による配向が強くなり、弾性率を上昇させることができる。一方、乾燥速度を遅くすると、乾燥収縮による配向が弱くなり弾性率を低減させることができる。乾燥速度は、乾燥時の環境温度や、熱風の温度、風量等により制御することができる。 The elastic modulus at 90 ° C. of the cyclic polyolefin film can be adjusted by changing the drying rate of the cast film at the time of film production by the material used, the solution casting method or the melt casting method. . Among these, from the viewpoint that the controllable range is wider, control by the drying rate is preferable, and control by the drying rate in the solution pouring method is more preferable. In the control by the drying speed in the solution pouring method, shrinkage occurs due to drying of the solvent at the time of film formation, and the resin such as cyclic polyolefin is oriented. At this time, if the drying speed is increased, the orientation by drying shrinkage is oriented. It becomes stronger and the elastic modulus can be increased. On the other hand, when the drying speed is slowed, the orientation due to drying shrinkage becomes weak and the elastic modulus can be reduced. The drying speed can be controlled by the environmental temperature during drying, the temperature of hot air, the air volume, and the like.
 光学フィルムが良好な平面性を示すためには、支持体から流延膜を剥離する際の残留溶媒率が20質量%以上90質量%以下となっていることが好ましい。乾燥工程では、このような範囲に収まるよう乾燥条件を調整する。 In order for the optical film to exhibit good flatness, the residual solvent ratio when peeling the cast film from the support is preferably 20% by mass or more and 90% by mass or less. In the drying process, the drying conditions are adjusted so as to be within such a range.
 乾燥方法としては特に限定されず、例えば、乾燥手段としてノズルやパンチ板等を使用することができる。 The drying method is not particularly limited, and for example, a nozzle or a punch plate can be used as a drying means.
 乾燥風は、支持体上の流延膜を乾燥することができれば、その条件は特に制限されない。乾燥風の温度は、乾燥効率および発泡の抑制の観点から、30~160℃であることが好ましい。また、乾燥風の相対湿度は、乾燥効率の観点から、30%RH以下であることが好ましく、20%RH以下であることがより好ましく、10%RH以下であることがさらに好ましい(下限0%RH)。乾燥風としては、例えば、50℃10%RHの風を用いることが好ましい。乾燥風の静圧は、100Pa以上であることが好ましい。乾燥風の静圧が100Pa以上であると、環状ポリオレフィンフィルムの90℃での弾性率を増加させて本発明に規定される範囲内へと制御することがより容易となる。同様の観点から、乾燥風の静圧は、1000Pa以上であることが好ましく、1300Pa以上であることが好ましい。また、乾燥風の静圧は、2500Pa以下であることが好ましい。乾燥風の静圧が2500Pa以下であると、環状ポリオレフィンフィルムの90℃での弾性率を減少させて本発明に規定される範囲内へと制御することがより容易となる。同様の観点から、乾燥風の静圧は、2000Pa以下であることが好ましく、1900Pa以下であることが好ましい。好ましい乾燥条件の一例としては、50℃10%RHの乾燥風を静圧で1000~2500Paの条件で吹き付けることが挙げられるが、本発明はこの条件に限定されるものではない。 The condition of the drying air is not particularly limited as long as the casting film on the support can be dried. The temperature of the drying air is preferably 30 to 160 ° C. from the viewpoint of drying efficiency and suppression of foaming. The relative humidity of the drying air is preferably 30% RH or less, more preferably 20% RH or less, and further preferably 10% RH or less (lower limit 0%) from the viewpoint of drying efficiency. RH). As the drying air, for example, air of 50 ° C. and 10% RH is preferably used. The static pressure of the drying air is preferably 100 Pa or more. When the static pressure of the drying air is 100 Pa or more, it becomes easier to increase the elastic modulus of the cyclic polyolefin film at 90 ° C. and control it within the range defined in the present invention. From the same viewpoint, the static pressure of the drying air is preferably 1000 Pa or more, and preferably 1300 Pa or more. Moreover, it is preferable that the static pressure of a dry wind is 2500 Pa or less. When the static pressure of the drying air is 2500 Pa or less, it becomes easier to reduce the elastic modulus at 90 ° C. of the cyclic polyolefin film and control it within the range defined in the present invention. From the same viewpoint, the static pressure of the drying air is preferably 2000 Pa or less, and preferably 1900 Pa or less. An example of preferable drying conditions includes blowing dry air at 50 ° C. and 10% RH at a static pressure of 1000 to 2500 Pa, but the present invention is not limited to these conditions.
 乾燥手段は、支持体の移動方向に沿って給気手段の下流側に設けられていれば良い。また、乾燥手段は複数個所に設けられていても良い。 The drying means may be provided on the downstream side of the air supply means along the moving direction of the support. Moreover, the drying means may be provided at a plurality of locations.
 (その他の工程)
 [ドープの調製工程]
 ドープの調製工程について説明する。ドープの調製工程は、流延工程において流延ダイから支持体上に流延されるドープを調製する工程である。ドープの調製方法としては特に限定されず、例えば、溶解釜を使用して、上記した溶媒に環状ポリオレフィン等の樹脂を投入して調製することができる。ドープ中の樹脂の含有量は、固形分濃度として5質量%以上であることが好ましい。樹脂の含有量が固形分濃度として5質量%以上の場合、支持体上でのより充分な乾燥が可能となり、剥離時に流延膜の一部が支持体上に残ることにより支持体の汚染の発生頻度がより低減する。同様の観点から、ドープ中の樹脂の含有量としては、固形分濃度として10質量%以上であることが好ましく、15質量%以上であることがより好ましく、20質量%以上であることがさらに好ましい。また、ドープ中の樹脂の含有量は、固形分濃度として99質量%以下であることが好ましい。ドープ中の樹脂の含有量が99質量%以下の場合、ドープの粘度が適度に低くなることから、ドープの調製工程におけるフィルター詰まりの発生や、支持体上への流延時に圧力が高くなり過ぎることで流延ダイからの押し出しが困難となることが生じる頻度がより低減する。同様の観点から、ドープ中の樹脂の含有量としては、固形分濃度として50質量%以下であることが好ましく、40質量%以下であることがより好ましい。
(Other processes)
[Dope preparation process]
The dope preparation process will be described. The dope preparation step is a step of preparing the dope cast on the support from the casting die in the casting step. The method for preparing the dope is not particularly limited. For example, the dope can be prepared by adding a resin such as cyclic polyolefin into the above-described solvent using a melting pot. The content of the resin in the dope is preferably 5% by mass or more as the solid content concentration. When the resin content is 5% by mass or more as the solid content concentration, it becomes possible to dry more sufficiently on the support, and a part of the cast film remains on the support at the time of peeling, thereby causing contamination of the support. The occurrence frequency is further reduced. From the same viewpoint, the content of the resin in the dope is preferably 10% by mass or more as a solid content concentration, more preferably 15% by mass or more, and further preferably 20% by mass or more. . Moreover, it is preferable that content of resin in dope is 99 mass% or less as solid content concentration. When the content of the resin in the dope is 99% by mass or less, the viscosity of the dope becomes moderately low, so that the pressure becomes too high when the filter is clogged in the dope preparation process or cast onto the support. As a result, the frequency at which extrusion from the casting die becomes difficult is further reduced. From the same viewpoint, the content of the resin in the dope is preferably 50% by mass or less, and more preferably 40% by mass or less as the solid content concentration.
 樹脂を溶媒に溶解させる方法としては、常圧で溶解する方法、溶媒の沸点以下で溶解する方法、加圧しながら溶媒の沸点以上で溶解する方法、特開平9-95544号公報、特開平9-95557号公報または特開平9-95538号公報に記載されるように、冷却溶解法を採用する方法、特開平11-21379号公報に記載されるように高圧で溶解する方法等を採用することができる。これらの中では、加圧しながら溶媒の沸点以上で溶解する方法が好ましい。 As a method of dissolving the resin in the solvent, a method of dissolving at normal pressure, a method of dissolving below the boiling point of the solvent, a method of dissolving above the boiling point of the solvent while applying pressure, JP-A-9-95544 and JP-A-9- As described in JP-A-95557 or JP-A-9-95538, a method of employing a cooling dissolution method, a method of dissolving at a high pressure as described in JP-A-11-21379, or the like may be employed. it can. In these, the method of melt | dissolving above the boiling point of a solvent while pressurizing is preferable.
 得られたドープは、濾材で濾過され、脱泡された後、送液ポンプで流延ダイに送られる。濾過は、捕集粒子径が0.5μm以上5μm以下で、かつ濾水時間が10秒/100mL以上25秒/100mL以下である濾材を用いることが好ましい。濾過により、樹脂粒子の分散時に残存する凝集物等のみを除去することができる。 The obtained dope is filtered with a filter medium, defoamed, and then sent to a casting die with a liquid feed pump. For the filtration, it is preferable to use a filter medium having a collected particle diameter of 0.5 μm or more and 5 μm or less and a drainage time of 10 seconds / 100 mL or more and 25 seconds / 100 mL or less. By filtration, it is possible to remove only aggregates and the like remaining when the resin particles are dispersed.
 上記のとおり調製されたドープは、流延ダイより支持体上に流延される。 The dope prepared as described above is cast on a support from a casting die.
 [剥離工程]
 剥離工程について説明する。剥離工程は、乾燥工程を経て軟膜を形成した流延膜を剥離ロールにより支持体から剥離する工程である。剥離された軟膜は、その後、任意に設けられうる第二乾燥工程、延伸工程、熱処理工程、及び巻取工程等を経て環状ポリオレフィンフィルムが製造される。
[Peeling process]
The peeling process will be described. A peeling process is a process of peeling the cast film which formed the soft film through the drying process from a support body with a peeling roll. The peeled soft film is then subjected to a second drying step, a stretching step, a heat treatment step, a winding step, and the like that can be optionally provided to produce a cyclic polyolefin film.
 支持体上の剥離位置の温度は、10℃以上40℃以下であることが好ましく、より好ましくは11℃以上30℃以下である。支持体と流延膜とを剥離する際の剥離張力は、一般的には245N/m以下であることが好ましいが、剥離の際の皺がより入り難くなるとの観点から、190N/m以下であることがより好ましく、166.6N/m以下であることがさらに好ましく、137.2N/m以下あることが特に好ましい。また、より良好な剥離性を得るとの観点から、剥離張力は50N/m以上であることが好ましい。 The temperature at the peeling position on the support is preferably 10 ° C. or higher and 40 ° C. or lower, more preferably 11 ° C. or higher and 30 ° C. or lower. In general, the peeling tension at the time of peeling the support and the casting film is preferably 245 N / m or less, but from the viewpoint that wrinkles at the time of peeling are more difficult to enter, it is 190 N / m or less. More preferably, it is more preferably 166.6 N / m or less, and particularly preferably 137.2 N / m or less. Further, from the viewpoint of obtaining better peelability, the peel tension is preferably 50 N / m or more.
 [第二乾燥工程、延伸工程、熱処理工程、巻取工程]
 第二乾燥工程、延伸工程、熱処理工程、巻取工程について説明する。第二乾燥工程、延伸工程、および熱処理工程は、それぞれ、剥離された流延膜を内部に複数配置されたローラーで交互に搬送する乾燥装置、及び流延膜の両端を保持して搬送するテンター延伸装置の少なくとも一方を用いて、それぞれ、乾燥、延伸、及び熱処理を施し環状ポリオレフィンフィルムを作製する工程である。また、巻取工程は、得られた流延膜を巻き取る工程である。装置の構成によってはこれらのうち複数の工程が同時に行われることがある。なお、上記した流延工程においても乾燥工程を有していることから、当該乾燥工程と区別する目的で、剥離した軟膜に対して行う乾燥工程を第二乾燥工程と呼んでいる。
[Second drying process, stretching process, heat treatment process, winding process]
The second drying step, stretching step, heat treatment step, and winding step will be described. The second drying step, the stretching step, and the heat treatment step are each a drying device that alternately conveys the peeled cast film with rollers arranged inside, and a tenter that holds and conveys both ends of the cast film. It is a step of producing a cyclic polyolefin film by performing drying, stretching, and heat treatment, respectively, using at least one of the stretching devices. Moreover, a winding process is a process of winding up the obtained cast film. Depending on the configuration of the apparatus, a plurality of steps may be performed simultaneously. In addition, since it has a drying process also in the above-mentioned casting process, the drying process performed with respect to the soft film which peeled is called the 2nd drying process for the purpose of distinguishing from the said drying process.
 第二乾燥工程における乾燥方法としては、流延膜の両面に熱風を吹き付ける方法が一般的であるが、熱風の代わりにマイクロウェーブを当てて加熱する方法を採用することも可能である。流延膜は急激な乾燥により、表面ムラが発生しやすいため、残留溶媒率が15質量%以下となった時点から乾燥することが好ましく、8質量%以下となった時点から乾燥することがより好ましい。乾燥温度としては、40~250℃であることが好ましい。 As a drying method in the second drying step, a method of spraying hot air on both surfaces of the cast film is generally used, but a method of heating by applying microwaves instead of hot air can also be adopted. Since the cast film is likely to cause surface unevenness due to rapid drying, it is preferable to dry from the time when the residual solvent ratio becomes 15% by mass or less, and it is more preferable to dry from the time when the residual solvent rate becomes 8% by mass or less. preferable. The drying temperature is preferably 40 to 250 ° C.
 テンター延伸装置のテンターは、特に制限されず、ピンテンター、クリップテンター等、公知のテンターを用いることができる。 The tenter of the tenter stretching apparatus is not particularly limited, and a known tenter such as a pin tenter or a clip tenter can be used.
 なお、延伸方向は特に制限されず、フィルムの搬送方向であっても、フィルムの搬送方向と直行する方向であってもよく、フィルムの長手方向であっても、フィルムの幅手方向であってもよい。また、延伸操作は多段階に分割して実施しても良く、長手方向と幅手方向とに二軸延伸を実施してもよい。なお、二軸延伸を行う場合には同時に延伸しても良く、段階的に延伸しても良い。なお、本願明細書において、同時二軸延伸には、一方向に延伸し、もう一方を、張力を緩和して収縮させる場合も含まれる。 The stretching direction is not particularly limited, and may be a film transport direction, a direction perpendicular to the film transport direction, a film longitudinal direction, or a film width direction. Also good. In addition, the stretching operation may be performed in multiple stages, or biaxial stretching may be performed in the longitudinal direction and the width direction. In addition, when performing biaxial stretching, you may extend | stretch simultaneously and may extend in steps. In the specification of the present application, simultaneous biaxial stretching includes a case of stretching in one direction and contracting the other while relaxing the tension.
 テンター延伸装置を用いて幅方向に一軸延伸する場合は、特に制限されないが、延伸倍率は、1.01倍(延伸率:1%)以上1.50倍(延伸率:50%)以下であることが好ましく、1.01倍(延伸率:1%)以上1.10倍(延伸率:10%)以下であることがより好ましく、1.01倍(延伸率:1%)以上1.05倍(延伸率:5%)以下であることがさらに好ましい。 When uniaxially stretching in the width direction using a tenter stretching apparatus, the stretching ratio is not particularly limited, but the stretching ratio is 1.01 times (stretching ratio: 1%) or more and 1.50 times (stretching ratio: 50%) or less. It is more preferable that it is 1.01 times (stretching ratio: 1%) or more and 1.10 times (stretching ratio: 10%) or less, and 1.01 times (stretching ratio: 1%) or more and 1.05. It is more preferable that it is not more than double (stretching ratio: 5%).
 テンターによる延伸を行う場合の流延膜の残留溶媒率は、テンター開始時(延伸開始時)に3質量%以上15質量%以下であることが好ましく、3質量%以上8質量%以下であることがより好ましく、かつ流延膜の残留溶媒率が5質量%以下になるまでテンターをかけながら乾燥を行うことが好ましい。テンターによる延伸を行う場合の乾燥温度としては、30℃以上であることが好ましく、また、環状ポリオレフィンのガラス転移温度(複数の環状ポリオレフィンを含む場合は、これらの環状ポリオレフィンのガラス転移温度の中で最も高い温度)αよりも30℃高い温度(α+30℃)以下であることがより好ましい。このような範囲の温度としては、環状ポリオレフィンの種類に応じて変化するものではあるが、好ましい延伸温度としては、30℃以上190℃以下、30℃以上160℃以下、50℃以上150℃以下、70℃以上140℃以下等が挙げられる。 The residual solvent ratio of the cast film when stretching with a tenter is preferably 3% by mass or more and 15% by mass or less, preferably 3% by mass or more and 8% by mass or less at the start of the tenter (at the start of stretching). It is more preferable to perform drying while applying a tenter until the residual solvent ratio of the cast film becomes 5% by mass or less. The drying temperature when stretching with a tenter is preferably 30 ° C. or more, and the glass transition temperature of the cyclic polyolefin (in the case of including a plurality of cyclic polyolefins, the glass transition temperature of these cyclic polyolefins). It is more preferable that the temperature is not higher than the highest temperature (α + 30 ° C.) 30 ° C. higher than α. The temperature within such a range varies depending on the type of cyclic polyolefin, but as preferred stretching temperatures, 30 ° C. or higher and 190 ° C. or lower, 30 ° C. or higher and 160 ° C. or lower, 50 ° C. or higher and 150 ° C. or lower, 70 degreeC or more and 140 degrees C or less etc. are mentioned.
 巻取工程について説明する。巻取工程は、環状ポリオレフィンフィルムとして巻取り機により巻き取る工程である。巻き取られる際の環状ポリオレフィンフィルムは、流延膜中の残留溶媒率が1質量%以下であることが好ましい。 The winding process will be described. A winding process is a process of winding up with a winder as a cyclic polyolefin film. As for the cyclic polyolefin film at the time of winding, it is preferable that the residual solvent rate in a cast film is 1 mass% or less.
 巻き取り方法としては特に限定されず、公知の巻取方法を採用することができ、例えば定トルク法、定テンション法、テーパーテンション法、内部応力一定のプログラムテンションコントロール法等を採用することができる。 The winding method is not particularly limited, and a known winding method can be employed. For example, a constant torque method, a constant tension method, a taper tension method, a program tension control method with a constant internal stress, or the like can be employed. .
 巻取長さとしては、特に制限されないが、100m以上8000m以下であることが好ましく、通常はロール状に巻き取る。また、巻き取られた環状ポリオレフィンフィルムの幅は、1.3m以上3.0m以下であることが好ましい。 The winding length is not particularly limited, but is preferably 100 m or more and 8000 m or less, and is usually wound in a roll shape. Moreover, it is preferable that the width | variety of the wound cyclic polyolefin film is 1.3 m or more and 3.0 m or less.
 [表面処理工程]
 環状オレフィンフィルムの任意の面、特に応力緩和層を設ける側の面には、接着性向上のための公知の種々の処理、コロナ放電処理、火炎処理、酸化処理、プラズマ処理等を、必要に応じて組み合わせて行うことができる。
[Surface treatment process]
For various surfaces of the cyclic olefin film, particularly on the side where the stress relaxation layer is provided, various known treatments for improving adhesion, corona discharge treatment, flame treatment, oxidation treatment, plasma treatment, etc., as necessary Can be combined.
 <他の機能層>
 本発明の一形態に係る光学フィルムは、公知の機能層を有していてもよい。機能層については、ハードコート層、アンカーコート層および平滑層、ならびに特開2006-289627号公報の段落「0036」~「0038」に記載されている層等を好ましく採用することができる。
<Other functional layers>
The optical film according to one embodiment of the present invention may have a known functional layer. As the functional layer, a hard coat layer, an anchor coat layer, a smooth layer, and the layers described in paragraphs “0036” to “0038” of JP-A-2006-289627 can be preferably used.
 (ハードコート層)
 本発明の一形態に係る光学フィルムは、ハードコート層として有していてもよい。ハードコート層の構成材料、形成方法等は、公知の材料、方法等が適宜採用されうる。アンカーコート層の形成場所は、特に制限されないが、環状ポリオレフィンフィルムの、応力緩和層が存在する側の面とは反対側の面の最表層であることが好ましい。
(Hard coat layer)
The optical film which concerns on one form of this invention may have as a hard-coat layer. Known materials, methods, and the like can be appropriately employed as the constituent material and the forming method of the hard coat layer. The formation place of the anchor coat layer is not particularly limited, but is preferably the outermost layer on the surface of the cyclic polyolefin film opposite to the surface on which the stress relaxation layer is present.
 (アンカーコート層)
 本発明の一形態に係る光学フィルムは、接着性(密着性)の向上を目的として、アンカーコート層を易接着層として有していてもよい。アンカーコート層の構成材料、形成方法等は、特開2013-52561号公報の段落「0229」~「0232」に開示される材料、方法等が適宜採用されうる。アンカーコート層の形成場所は、特に制限されないが、環状ポリオレフィンフィルムの表面であることが好ましく、環状ポリオレフィンフィルムとアンカーコート層と応力緩和層とがこの順に直接接する構成を有することがより好ましい。
(Anchor coat layer)
The optical film according to one embodiment of the present invention may have an anchor coat layer as an easily adhesive layer for the purpose of improving adhesiveness (adhesion). As the constituent material and forming method of the anchor coat layer, the materials and methods disclosed in paragraphs “0229” to “0232” of JP2013-52561A can be appropriately employed. The formation location of the anchor coat layer is not particularly limited, but is preferably the surface of the cyclic polyolefin film, and more preferably has a configuration in which the cyclic polyolefin film, the anchor coat layer, and the stress relaxation layer are in direct contact with each other in this order.
 (平滑層)
 本発明の一形態に係る光学フィルムは、平滑層を有していてもよい。平滑層は、突起等が存在する基材の粗面を平坦化するために、又は、樹脂基材に存在する突起により、応力緩和層に生じた凹凸やピンホールを埋めて平坦化するために設けられる層である。平滑層の構成材料、形成方法、表面粗さ、層厚等は、特開2013-52561号公報の段落「0233」~「0248」に開示される材料、方法等が適宜採用される。平滑層の形成場所は、特に制限されないが、環状ポリオレフィンフィルムの表面であることが好ましく、環状ポリオレフィンフィルムと平滑層と応力緩和層とがこの順に直接接する構成を有することがより好ましい。なお、前述するアンカーコート層が平滑層としての機能を兼ねていてもよい。
(Smooth layer)
The optical film according to one embodiment of the present invention may have a smooth layer. The smooth layer is for flattening the rough surface of the substrate on which protrusions and the like exist, or for filling the unevenness and pinholes generated in the stress relaxation layer with the protrusions existing on the resin substrate to flatten the surface. It is a layer to be provided. The materials, methods, etc. disclosed in paragraphs “0233” to “0248” of JP2013-52561A are appropriately employed for the constituent material, forming method, surface roughness, layer thickness, etc. of the smooth layer. The location where the smooth layer is formed is not particularly limited, but is preferably the surface of the cyclic polyolefin film, and more preferably has a configuration in which the cyclic polyolefin film, the smooth layer, and the stress relaxation layer are in direct contact with each other in this order. The anchor coat layer described above may also function as a smooth layer.
 <偏光板保護フィルムおよび偏光板>
 本発明の一形態に係る光学フィルムは、偏光板加工時のフィルムの打ち抜き加工や裁断加工時において良好なクラック耐性を示し、および偏光板や表示装置の耐久性試験等で使用される高温高湿環境下における経時でのクラック拡大を十分に抑制しうる高い耐久性を有する。また、本発明の一形態に係る光学フィルムは、特にポリビニルアルコール系偏光子等の親水性部材と貼合した際に、特に良好な接着性を有するものである。
<Polarizing plate protective film and polarizing plate>
The optical film according to one aspect of the present invention exhibits good crack resistance during punching and cutting of a film during polarizing plate processing, and is used in a durability test of a polarizing plate and a display device. It has high durability that can sufficiently suppress crack expansion over time in the environment. In addition, the optical film according to one embodiment of the present invention has particularly good adhesiveness particularly when bonded to a hydrophilic member such as a polyvinyl alcohol polarizer.
 これより、本発明の一形態に係る光学フィルムは、偏光板保護フィルムである。また、本発明の一形態に係る偏光板は、本発明の一形態に係る光学フィルムまたは本発明の一形態に係る偏光板保護フィルムを含むものであり、本発明の一形態に係る偏光板保護フィルムを含むことがより好ましい。 Thus, the optical film according to one embodiment of the present invention is a polarizing plate protective film. Further, the polarizing plate according to one embodiment of the present invention includes the optical film according to one embodiment of the present invention or the polarizing plate protective film according to one embodiment of the present invention, and the polarizing plate protection according to one embodiment of the present invention. More preferably, it includes a film.
 本発明の一形態に係る偏光板は、偏光子の少なくとも一方の面に、本発明の一形態に係る光学フィルムを偏光板保護フィルムとして有する構成であることが好ましく、偏光子の一方の面に、本発明の一形態に係る光学フィルムを偏光板保護フィルムとして有し、偏光子の他方の面に本発明の一形態に係る光学フィルムまたはセルローストリアセテートフィルムを偏光板保護フィルムとして有する構成であることがより好ましく、偏光子の両方の面に、本発明の一形態に係る光学フィルムを偏光板保護フィルムとして有する構成であることがさらに好ましい。 The polarizing plate according to one embodiment of the present invention preferably has a configuration having the optical film according to one embodiment of the present invention as a polarizing plate protective film on at least one surface of the polarizer, and on one surface of the polarizer. And having the optical film according to one embodiment of the present invention as a polarizing plate protective film, and having the optical film according to one embodiment of the present invention or the cellulose triacetate film as a polarizing plate protective film on the other surface of the polarizer. Is more preferable, and it is more preferable that the optical film according to one embodiment of the present invention is provided on both surfaces of the polarizer as a polarizing plate protective film.
 (偏光板の製造方法)
 本発明の一形態に係る偏光板は、一般的な方法で製造することができる。本発明の一形態に係る光学フィルムの応力緩和層をコロナ放電処理、プラズマ処理等によって表面処理し、公知の接着剤を用いて、偏光子と貼合することが好ましい。
(Production method of polarizing plate)
The polarizing plate according to one embodiment of the present invention can be manufactured by a general method. It is preferable that the stress relaxation layer of the optical film according to one embodiment of the present invention is surface-treated by corona discharge treatment, plasma treatment, or the like and bonded to a polarizer using a known adhesive.
 偏光板の形成方法の好ましい一例としては、以下の方法が挙げられる。ただし、本発明はこれに限定されるものではない。 As a preferred example of the method for forming the polarizing plate, the following method may be mentioned. However, the present invention is not limited to this.
 本発明の一形態に係る光学フィルムを偏光板保護フィルムとして用いる場合、光学フィルムの応力緩和層に、コロナ放電処理等の易接着処理を行う。そして、偏光子の面と、一形態に係る光学フィルムの応力緩和層と、を、公知の接着剤を用いて貼合する。また、同様にして、コロナ放電処理等の易接着処理を行った本願発明の一形態に係る光学フィルムや、他の公知のフィルムを、偏光子のもう一方の面に公知の接着剤を用いて貼合する。この際、偏光子の一方の面に本発明の一形態に係る光学フィルムを、他方の面に他の公知のフィルムをそれぞれ貼合する場合、どちらのフィルムを先に貼合してもよい。ここで、本発明の一形態に係る光学フィルムを貼合した面とは反対側の面に、セルロースアシレートフィルムを用いる場合は、当該セルロースアシレートフィルムをアルカリケン化処理し、偏光子の少なくとも一方の面に、完全ケン化型ポリビニルアルコール水溶液(水糊)を用いて貼り合わせることが好ましい。 When the optical film according to one embodiment of the present invention is used as a polarizing plate protective film, an easy adhesion treatment such as a corona discharge treatment is performed on the stress relaxation layer of the optical film. And the surface of a polarizer and the stress relaxation layer of the optical film which concerns on one form are bonded together using a well-known adhesive agent. Similarly, an optical film according to an embodiment of the present invention that has been subjected to easy adhesion treatment such as corona discharge treatment, or other known film, using a known adhesive on the other surface of the polarizer. Paste. At this time, when the optical film according to one embodiment of the present invention is bonded to one surface of the polarizer and another known film is bonded to the other surface, either film may be bonded first. Here, when a cellulose acylate film is used on the surface opposite to the surface on which the optical film according to one embodiment of the present invention is bonded, the cellulose acylate film is subjected to alkali saponification treatment, and at least the polarizer It is preferable to attach to one surface using a completely saponified polyvinyl alcohol aqueous solution (water paste).
 偏光子は、ポリビニルアルコール水溶液を製膜し、これを一軸延伸させて染色したもの、あるいは染色した後、一軸延伸してから、好ましくはホウ素化合物で耐久性処理を行ったものが用いられている。偏光子の膜厚は5~30μmの範囲内が好ましく、特に10~20μmの範囲内であることが好ましい。また、特開2003-248123号公報、特開2003-342322号公報等に記載のエチレン単位の含有量が1~4モル%の範囲内、重合度が2000~4000の範囲内、鹸化度が99.0~99.99モル%の範囲内のエチレン変性ポリビニルアルコールも好ましく用いられる。中でも、熱水切断温度が66~73℃の範囲内であるエチレン変性ポリビニルアルコールフィルムが好ましく用いられる。このエチレン変性ポリビニルアルコールフィルムを用いた偏光子は、偏光性能および耐久性能に優れていることに加え、色斑が少なく、表示装置に特に好ましく用いられる。以上のようにして得られた偏光子は、通常、その両面または片面に保護フィルムが貼合される。 The polarizer is formed by forming a polyvinyl alcohol aqueous solution into a film and dyeing it by uniaxial stretching, or by dyeing and then uniaxially stretching and then preferably performing a durability treatment with a boron compound. . The thickness of the polarizer is preferably in the range of 5 to 30 μm, particularly preferably in the range of 10 to 20 μm. Further, the ethylene unit content described in JP 2003-248123 A, JP 2003-342322 A, etc. is in the range of 1 to 4 mol%, the polymerization degree is in the range of 2000 to 4000, and the saponification degree is 99. Ethylene-modified polyvinyl alcohol in the range of 0.0 to 99.99 mol% is also preferably used. Among them, an ethylene-modified polyvinyl alcohol film having a hot water cutting temperature in the range of 66 to 73 ° C. is preferably used. A polarizer using this ethylene-modified polyvinyl alcohol film has excellent polarization performance and durability performance, and has few color spots and is particularly preferably used for a display device. As for the polarizer obtained by making it above, a protective film is normally bonded by the both sides or one side.
 コロナ放電処理とは、大気圧下、電極間に1kV以上の高電圧を印加し、放電することで行う処理のことである。コロナ処理によって、フィルムの表面に酸素含有極性基(ヒドロキシ基、カルボニル基、カルボン酸基等)が発生し、表面が親水化される。コロナ放電処理は、春日電機株式会社製や株式会社トーヨー電機製の市販されている装置を用いて行うことができる。 Corona discharge treatment is treatment performed by applying a high voltage of 1 kV or more between electrodes at atmospheric pressure and discharging. By the corona treatment, oxygen-containing polar groups (hydroxy group, carbonyl group, carboxylic acid group, etc.) are generated on the surface of the film, and the surface is hydrophilized. The corona discharge treatment can be performed using a commercially available apparatus manufactured by Kasuga Electric Co., Ltd. or Toyo Electric Co., Ltd.
 本発明の一形態に係る光学フィルムの応力緩和層と偏光子とは、活性エネルギー線硬化性接着剤によって貼合されていることが好ましい。活性エネルギー線硬化型接着剤の中でも、紫外線硬化型接着剤を用いることが好ましい。紫外線硬化型接着剤を構成する紫外線硬化型接着剤組成物としては、光ラジカル重合を利用した光ラジカル重合型組成物、光カチオン重合を利用した光カチオン重合型組成物、並びに光ラジカル重合及び光カチオン重合を併用したハイブリッド型組成物が知られている。光ラジカル重合型組成物としては、特開2008-009329号公報に記載のヒドロキシ基やカルボキシ基等の極性基を含有するラジカル重合性化合物及び極性基を含有しないラジカル重合性化合物を特定割合で含む組成物)等が知られている。また、光カチオン重合型組成物としては、特開2011-028234号公報に開示されているような、(α)カチオン重合性化合物、(β)光カチオン重合開始剤、(γ)380nmより長い波長の光に極大吸収を示す光増感剤、及び(δ)ナフタレン系光増感助剤の各成分を含有する紫外線硬化型接着剤組成物が挙げられる。ただし、これ以外の紫外線硬化型接着剤が用いられてもよい。 The stress relaxation layer and the polarizer of the optical film according to one embodiment of the present invention are preferably bonded with an active energy ray-curable adhesive. Among the active energy ray curable adhesives, it is preferable to use an ultraviolet curable adhesive. The ultraviolet curable adhesive composition constituting the ultraviolet curable adhesive includes a photo radical polymerization composition utilizing photo radical polymerization, a photo cation polymerization composition utilizing photo cation polymerization, and photo radical polymerization and light. A hybrid composition using cationic polymerization is known. The radical photopolymerizable composition includes a radically polymerizable compound containing a polar group such as a hydroxy group and a carboxy group described in JP-A-2008-009329 and a radically polymerizable compound not containing a polar group at a specific ratio. Composition) and the like are known. In addition, as the cationic photopolymerization type composition, as disclosed in JP2011-08234A, (α) a cationic polymerizable compound, (β) a cationic photopolymerization initiator, and (γ) a wavelength longer than 380 nm. And an ultraviolet curable adhesive composition containing each component of a photosensitizer exhibiting maximum absorption in the light of (δ) and a naphthalene-based photosensitization aid. However, other ultraviolet curable adhesives may be used.
 <表示装置>
 本発明の一形態に係る光学フィルム、および本発明の一形態に係る偏光板保護フィルムは、環状ポリオレフィンフィルムが有する光学フィルム用途の優れた特性に加え、良好なクラック耐性、高温高湿環境下における耐久性、および接着性を両立するものである。また、本発明の一形態に係る光学フィルム、本願発明の一形態に係る偏光板は、表示装置の耐久性試験等で使用される高温高湿環境下における経時でのクラック拡大を十分に抑制しうる高い耐久性を有する。
<Display device>
The optical film according to an aspect of the present invention and the polarizing plate protective film according to an aspect of the present invention have excellent crack resistance and a high temperature and high humidity environment in addition to the excellent properties of the optical film used by the cyclic polyolefin film. Both durability and adhesiveness are achieved. In addition, the optical film according to one embodiment of the present invention and the polarizing plate according to one embodiment of the present invention sufficiently suppress the crack expansion with time in a high-temperature and high-humidity environment used in a durability test of a display device or the like. High durability.
 このため、本発明の一形態に係る表示装置は、本発明の一形態に係る光学フィルム、または本発明の一形態に係る偏光板を有するものである。 Therefore, a display device according to one embodiment of the present invention includes the optical film according to one embodiment of the present invention or the polarizing plate according to one embodiment of the present invention.
 表示装置としては、特に制限されないが、有機EL素子または液晶表示装置であることが好ましく、液晶表示装置であることがより好ましい。 The display device is not particularly limited, but is preferably an organic EL element or a liquid crystal display device, and more preferably a liquid crystal display device.
 本発明の一形態に係る液晶表示装置は、透明基板と他方の透明基板との間に液晶が挟持されている液晶セルを有し、これらの透明基板の少なくとも一方の外側に、直接、または他の部材を介して、本発明の一形態に係る光学フィルム、または本発明の一形態に係る偏光板を有するものである。 A liquid crystal display device according to one embodiment of the present invention includes a liquid crystal cell in which a liquid crystal is sandwiched between a transparent substrate and the other transparent substrate, and directly or on the outside of at least one of these transparent substrates. Through the member, the optical film according to one embodiment of the present invention or the polarizing plate according to one embodiment of the present invention is provided.
 本発明の効果を、以下の実施例および比較例を用いて説明する。ただし、本発明の技術的範囲が以下の実施例のみに制限されるわけではない。 The effect of the present invention will be described using the following examples and comparative examples. However, the technical scope of the present invention is not limited only to the following examples.
 <光学フィルムの作製>
 (環状ポリオレフィンフィルムの作製)
 [環状ポリオレフィンフィルム1]
 下記組成の主ドープを調製した。まず、加圧溶解タンクにジクロロメタンとエタノールを添加した。ジクロロメタンとエタノールの混合溶液の入った加圧溶解タンクに環状ポリオレフィン樹脂1を撹拌しながら投入した。これを加熱し、撹拌しながら、完全に溶解した。これを安積濾紙株式会社製の安積濾紙No.244を使用してろ過し、主ドープを調製した。環状ポリオレフィン樹脂としては、JSR株式会社製、ARTON(登録商標)
 G7810を用いた。当該環状ポリオレフィン樹脂1は、ガラス転移温度が178℃のアルコキシカルボニル基を有する樹脂である。
<Production of optical film>
(Production of cyclic polyolefin film)
[Cyclic polyolefin film 1]
A main dope having the following composition was prepared. First, dichloromethane and ethanol were added to the pressure dissolution tank. The cyclic polyolefin resin 1 was added to a pressure dissolution tank containing a mixed solution of dichloromethane and ethanol with stirring. This was completely dissolved with heating and stirring. This was designated as Azumi Filter Paper No. The main dope was prepared by filtration using 244. As cyclic polyolefin resin, ARTON (registered trademark) made by JSR Corporation
G7810 was used. The cyclic polyolefin resin 1 is a resin having an alkoxycarbonyl group having a glass transition temperature of 178 ° C.
 [主ドープの組成]
 ・環状ポリオレフィン樹脂(アートン(ARTON)(登録商標) G7810、JSR株式会社製、Mw=140000) 100質量部、
 ・ジクロロメタン(SP値:20) 200質量部、
 ・エタノール(SP値:26) 10質量部。
[Composition of main dope]
-Cyclic polyolefin resin (ARTON (registered trademark) G7810, manufactured by JSR Corporation, Mw = 140000) 100 parts by mass,
-Dichloromethane (SP value: 20) 200 parts by mass,
-Ethanol (SP value: 26) 10 mass parts.
 次いで、無端ベルト流延装置を用い、ドープを温度31℃、1800mm幅でステンレスベルト支持体上に均一に流延した。ステンレスベルトの温度は28℃に制御した。ステンレスベルト支持体上で、流延(キャスト)したフィルム中の残留溶媒量が40質量%になるまで溶媒を蒸発させた。このときの乾燥条件としては、50℃10%RHの乾燥風を静圧で1000Paの条件で吹き付けた。続いて、剥離張力110N/mでステンレスベルト支持体上からフィルムを剥離した。剥離したフィルムを、140℃の熱をかけながらテンターを用いて幅方向に5%延伸した。なお、延伸開始時の残留溶媒は15質量%であった。 Then, using an endless belt casting apparatus, the dope was uniformly cast on a stainless steel belt support at a temperature of 31 ° C. and a width of 1800 mm. The temperature of the stainless steel belt was controlled at 28 ° C. On the stainless steel belt support, the solvent was evaporated until the amount of residual solvent in the cast (cast) film reached 40% by mass. As drying conditions at this time, drying air of 50 ° C. and 10% RH was sprayed at a static pressure of 1000 Pa. Subsequently, the film was peeled off from the stainless steel belt support with a peeling tension of 110 N / m. The peeled film was stretched 5% in the width direction using a tenter while applying heat at 140 ° C. The residual solvent at the start of stretching was 15% by mass.
 そして、乾燥ゾーンを多数のローラーで搬送させながら乾燥を終了させ、テンタークリップで挟んだ端部をトリミングし、その後巻き取った。乾燥温度は130℃で搬送張力は100N/mとした。 Then, drying was completed while transporting the drying zone with a large number of rollers, and the ends sandwiched between tenter clips were trimmed, and then wound up. The drying temperature was 130 ° C. and the transport tension was 100 N / m.
 以上のようにして、厚さ25μmの環状ポリオレフィンフィルム1を作製した。 As described above, a cyclic polyolefin film 1 having a thickness of 25 μm was produced.
 [環状ポリオレフィンフィルム2]
 上記環状ポリオレフィンフィルム1の作製において、流延したフィルムのステンレスベルト支持体上での乾燥条件を、50℃10%RHの乾燥風を静圧で2500Paの条件で吹き付けるよう変更した以外は同様にして、厚さ25μmの環状ポリオレフィンフィルム2を作製した。
[Cyclic polyolefin film 2]
In the production of the cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed in the same manner except that the drying air at 50 ° C. and 10% RH was sprayed at a static pressure of 2500 Pa. A cyclic polyolefin film 2 having a thickness of 25 μm was produced.
 [環状ポリオレフィンフィルム3]
 上記環状ポリオレフィンフィルム1の作製において、流延したフィルムのステンレスベルト支持体上での乾燥条件を、50℃10%RHの乾燥風を静圧で1300Paの条件で吹き付けるよう変更した以外は同様にして、厚さ25μmの環状ポリオレフィンフィルム3を作製した。
[Cyclic polyolefin film 3]
In the production of the cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1300 Pa. A cyclic polyolefin film 3 having a thickness of 25 μm was prepared.
 [環状ポリオレフィンフィルム4]
 上記環状ポリオレフィンフィルム1の作製において、流延したフィルムのステンレスベルト支持体上での乾燥条件を、50℃10%RHの乾燥風を静圧で1700Paの条件で吹き付けるよう変更した以外は同様にして、厚さ25μmの環状ポリオレフィンフィルム4を作製した。
[Cyclic polyolefin film 4]
In the production of the above-mentioned cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1700 Pa. A cyclic polyolefin film 4 having a thickness of 25 μm was produced.
 [環状ポリオレフィンフィルム5]
 上記環状ポリオレフィンフィルム1の作製において、流延したフィルムのステンレスベルト支持体上での乾燥条件を、50℃10%RHの乾燥風を静圧で1900Paの条件で吹き付けるよう変更した以外は同様にして、厚さ25μmの環状ポリオレフィンフィルム5を作製した。
[Cyclic polyolefin film 5]
In the production of the above-mentioned cyclic polyolefin film 1, the drying conditions of the cast film on the stainless steel belt support were changed except that the drying air of 50 ° C. and 10% RH was blown at a static pressure of 1900 Pa. A cyclic polyolefin film 5 having a thickness of 25 μm was prepared.
 (応力緩和層の形成:ローラーCVD法)
 樹脂基材として、上記作製した環状ポリオレフィンフィルムの一つを選択した。図2に記載の磁場を印加したローラー間放電プラズマCVD装置(本明細書中、この方法をローラーCVD法と称す。)を用い、環状ポリオレフィンフィルムの一方の面が成膜ローラーと接触するようにして、環状ポリオレフィンフィルムを装置に装着した。次いで、成膜条件(プラズマCVD条件)として、プラズマ発生用電源の周波数を70kHzとし、搬送速度、原料ガスであるテトラメチルシクロテトラシロキサン(TMCTS)の供給量、酸素ガス(O)の供給量、真空チャンバー内の真空度、及び有効成膜幅1mに対するプラズマ発生用電源からの印加電力(印加電力)を下記表1の条件とすることにより成膜を行った。このようにして、環状ポリオレフィンフィルムの成膜ローラーと接触させた面とは反対側の面に、最終的な層厚が後述する膜厚の測定方法によって140nmとなるよう、応力緩和層を形成した。
(Formation of stress relaxation layer: Roller CVD method)
One of the produced cyclic polyolefin films was selected as the resin substrate. Using the inter-roller discharge plasma CVD apparatus to which the magnetic field shown in FIG. 2 is applied (this method is referred to as “roller CVD method”), one surface of the cyclic polyolefin film is brought into contact with the film forming roller. Then, a cyclic polyolefin film was attached to the apparatus. Next, as film formation conditions (plasma CVD conditions), the frequency of the power source for plasma generation is set to 70 kHz, the conveyance speed, the supply amount of tetramethylcyclotetrasiloxane (TMCTS) as a raw material gas, and the supply amount of oxygen gas (O 2 ) Film formation was performed under the conditions shown in Table 1 below, with the applied power (applied power) from the plasma generating power source for the degree of vacuum in the vacuum chamber and the effective film forming width of 1 m. In this way, a stress relaxation layer was formed on the surface opposite to the surface of the cyclic polyolefin film that was in contact with the film-forming roller so that the final layer thickness was 140 nm by a film thickness measurement method described later. .
 このようにして、実施例1~15および比較例1~4に係る光学フィルムを作製した。各光学フィルムの形成の際に用いた環状ポリオレフィンフィルムと応力緩和層との組み合わせを下記表1にまとめる。なお、表1において、原料ガスの供給量および酸素ガスの供給量の単位は、sccm(Standard Cubic Centimeter per Minute)とした。 Thus, optical films according to Examples 1 to 15 and Comparative Examples 1 to 4 were produced. The combinations of the cyclic polyolefin film and the stress relaxation layer used in forming each optical film are summarized in Table 1 below. In Table 1, the unit of the supply amount of the source gas and the supply amount of the oxygen gas was sccm (Standard Cubic Centimeter per Minute).
 <環状ポリオレフィンフィルムおよび応力緩和層の評価>
 (環状ポリオレフィンフィルムの90℃での弾性率)
 各環状ポリオレフィンフィルムの90℃での弾性率は、JIS K 7127:1999に記載の方法に準じつつ、引っ張り試験器 株式会社オリエンテック製テンシロンRTA-100と、90℃に加熱した炉とを用い、90℃に加熱した炉内で引っ張り試験を行うことで測定した。
<Evaluation of cyclic polyolefin film and stress relaxation layer>
(Elastic modulus of cyclic polyolefin film at 90 ° C)
The elastic modulus at 90 ° C. of each cyclic polyolefin film was determined according to the method described in JIS K 7127: 1999, using a tensile tester Tensilon RTA-100 manufactured by Orientec Co., Ltd., and a furnace heated to 90 ° C. The measurement was performed by performing a tensile test in a furnace heated to 90 ° C.
 (応力緩和層の組成分析)
 [元素分布プロファイルの測定]
 上記形成した各応力緩和層について、下記条件にてXPSデプスプロファイル測定を行い、層厚方向の薄膜層の表面からの距離に対する、炭素分布曲線、ケイ素分布曲線及び酸素分布曲線を得た。
(Composition analysis of stress relaxation layer)
[Measurement of element distribution profile]
For each of the formed stress relaxation layers, XPS depth profile measurement was performed under the following conditions to obtain a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve with respect to the distance from the surface of the thin film layer in the layer thickness direction.
 ≪XPSデプスプロファイル測定≫
 ・エッチングイオン種:アルゴン(Ar)、
 ・エッチングレート(SiO熱酸化膜換算値):0.05nm/sec、
 ・エッチング間隔(SiO換算値):2nm、
 ・X線光電子分光装置:Thermo Fisher Scientific社製、機種名「VG Theta Probe」、
 ・照射X線:単結晶分光AlKα、
 ・X線のスポット及びそのサイズ:800μm×400μmの楕円形。
≪XPS depth profile measurement≫
Etching ion species: Argon (Ar + )
Etching rate (SiO 2 thermal oxide film equivalent value): 0.05 nm / sec,
Etching interval (SiO 2 equivalent value): 2 nm
X-ray photoelectron spectrometer: manufactured by Thermo Fisher Scientific, model name “VG Theta Probe”,
-Irradiation X-ray: single crystal spectroscopy AlKα,
X-ray spot and its size: 800 μm × 400 μm ellipse.
 以上のようにして、応力緩和層の全層領域を測定するワイドスキャンスペクトル分析を行うことによって、炭素分布曲線、ケイ素分布曲線及び酸素分布曲線を得た。ここで、応力緩和層を形成する全組成の一部である酸素原子(O)の組成比が、30at%以下となるときの応力緩和層の層厚方向の最表面側からの深さを算出し、基材との界面の位置とした。そして、以下のとおり、応力緩和層のケイ素原子、酸素原子および炭素原子の分析を行った。 As described above, a carbon distribution curve, a silicon distribution curve, and an oxygen distribution curve were obtained by performing a wide scan spectrum analysis for measuring the entire region of the stress relaxation layer. Here, the depth from the outermost surface side in the layer thickness direction of the stress relaxation layer when the composition ratio of oxygen atoms (O) which is a part of the total composition forming the stress relaxation layer is 30 at% or less is calculated. And the position of the interface with the substrate. And the silicon atom of the stress relaxation layer, the oxygen atom, and the carbon atom were analyzed as follows.
 [応力緩和層のケイ素原子、酸素原子及び炭素原子の分析]
 X線光電子分光法によるケイ素原子、酸素原子及び炭素原子に由来するピーク強度が確認されたことから、各応力緩和層は、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有することが確認された。
[Analysis of silicon, oxygen and carbon atoms in stress relaxation layer]
Since the peak intensities derived from silicon atoms, oxygen atoms and carbon atoms were confirmed by X-ray photoelectron spectroscopy, each stress relaxation layer contained silicon atoms (Si), oxygen atoms (O) and carbon atoms (C). It was confirmed to contain.
 また、各応力緩和層の層厚方向の深さの各測定位置について、X線光電子分光法によって求めたケイ素原子、酸素原子及び炭素原子に由来するピーク強度の比率より換算される組成比の合計量を100at%としたときの炭素原子の割合[C](at%)を算出した。そして、応力緩和層の層厚方向の深さの各測定位置における各[C](at%)の値から、[C](at%)の膜厚方向での平均値[CAVE](at%)をさらに算出した。 In addition, for each measurement position of the depth in the layer thickness direction of each stress relaxation layer, the sum of the composition ratios converted from the ratio of the peak intensities derived from silicon atoms, oxygen atoms and carbon atoms obtained by X-ray photoelectron spectroscopy The ratio [C] (at%) of carbon atoms when the amount was 100 at% was calculated. Then, from the value of each [C] (at%) at each measurement position of the depth in the layer thickness direction of the stress relaxation layer, the average value [C AVE ] (at %) Was further calculated.
 そして、炭素原子に関しては、C1sの高分解能スペクトル(ナロースキャン分析)により、炭素の結合状態を分析した。具体的には、応力緩和層の層厚方向の深さの各測定位置について、(1)C-C、(2)C-SiO、(3)C-O、(4)C=O、および(5)C(=O)-Oのように5つの結合に分けて、それぞれスペクトルのピーク強度比を算出した。そして、応力緩和層の膜厚方向の各測定位置について、上記(1)~(5)のピーク強度比の総和を100%としたとき、(1)のC-C結合に由来するピーク強度の割合X(%)を算出した。そして、応力緩和層の層厚方向の深さの各測定位置における各X(%)の値から、X(%)の膜厚方向での平均値であるXAVE(%)をさらに算出した。本測定においては、ピーク強度の解析は、データ解析ソフトウェアPeakFit(SYSTAT Software Inc.製)を用いて行った。 And about the carbon atom, the binding state of carbon was analyzed by the high resolution spectrum (narrow scan analysis) of C1s. Specifically, for each measurement position of the depth in the thickness direction of the stress relaxation layer, (1) C—C, (2) C—SiO, (3) C—O, (4) C═O, and (5) The spectrum was divided into five bonds such as C (= O) -O, and the peak intensity ratio of each spectrum was calculated. For each measurement position in the film thickness direction of the stress relaxation layer, when the sum of the peak intensity ratios of (1) to (5) is 100%, the peak intensity derived from the CC bond in (1) The ratio X (%) was calculated. And XAVE (%) which is an average value in the film thickness direction of X (%) was further calculated from the value of each X (%) in each measurement position of the depth of the stress relaxation layer in the layer thickness direction. In this measurement, the analysis of peak intensity was performed using data analysis software PeakFit (manufactured by SYSSTAT Software Inc.).
 各環状ポリオレフィンフィルムの90℃での弾性率(GPa)、ならびに各応力緩和層の[CAVE](at%)およびXAVE(%)を下記表2に示す。 Table 2 below shows the elastic modulus (GPa) at 90 ° C. of each cyclic polyolefin film, and [C AVE ] (at%) and X AVE (%) of each stress relaxation layer.
 (応力緩和層の膜厚)
 各応力緩和層の層厚は、応力緩和層の積層方向において、最表面から基材との界面までの深さを、透過型電子顕微鏡(Transmission Electron Microscope:TEM)による断面観察により測定した。本測定では、層厚を任意に10箇所測定し、平均した値を層厚とした。
(Thickness of stress relaxation layer)
The thickness of each stress relaxation layer was measured by observing the depth from the outermost surface to the interface with the substrate in the stacking direction of the stress relaxation layer by cross-sectional observation using a transmission electron microscope (TEM). In this measurement, the layer thickness was measured arbitrarily at 10 locations, and the average value was taken as the layer thickness.
 [層厚方向の断面のTEM画像]
 断面のTEM観察として、観察試料を以下の集束イオンビーム(Focused Ion Beam:FIB)加工装置により薄片作製後、TEM観察を行った。ここで、試料に電子線を照射し続けると電子線ダメージを受ける部分とそうでない部分にコントラスト差が現れるため、コントラスト差によって応力緩和層の層厚を測定した。
[TEM image of cross section in layer thickness direction]
As a cross-sectional TEM observation, the observation sample was subjected to TEM observation after a thin piece was produced by the following focused ion beam (FIB) processing apparatus. Here, when the sample was continuously irradiated with the electron beam, a contrast difference appeared between the portion that received the electron beam damage and the portion that did not, so the thickness of the stress relaxation layer was measured based on the contrast difference.
 ≪FIB加工≫
 ・装置:セイコーインスツル株式会社(SII)製SMI2050、
 ・加工イオン:Ga(30kV)、
 ・試料厚さ:100~200nm。
≪FIB processing≫
Apparatus: SMI2050 manufactured by Seiko Instruments Inc. (SII),
・ Processed ions: Ga (30 kV),
Sample thickness: 100-200 nm.
 ≪TEM観察≫
 ・装置:日本電子株式会社製JEM2000FX(加速電圧:200kV)。
≪TEM observation≫
Apparatus: JEM2000FX (acceleration voltage: 200 kV) manufactured by JEOL Ltd.
 <光学フィルムの評価>
 (クラック耐性)
 上記得られた各光学フィルムを、それぞれ応力緩和層が上側に向くようして5枚重ね合わせて(同様な構成のもの)10cm角のトムソン刃で100枚打ち抜き、クラック、割れ、欠けなど打ち抜き不良が検出した隅の数(n)を観察した隅の数(m)で割り、打ち抜き不良発生率として、下記のように百分率で算出し、下記評価基準に従って評価した。クラック耐性は、打ち抜き不良発生率(%)の数値が小さいほど優れた結果を表し、ランク3以上が望ましいクラック耐性であるとする。これらの結果を下記表2に示す; 
<Evaluation of optical film>
(Crack resistance)
Five optical films obtained as described above are overlapped with the stress relieving layer facing upward (with the same configuration) and punched 100 with a 10 cm square Thomson blade. The number of detected corners (n) was divided by the number of observed corners (m), the punching defect occurrence rate was calculated as a percentage as follows, and evaluated according to the following evaluation criteria. The crack resistance represents a better result as the numerical value of the punching failure occurrence rate (%) is smaller, and rank 3 or higher is a desirable crack resistance. These results are shown in Table 2 below;
Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002
 ≪評価基準≫
 5:打ち抜き不良発生率(%)は、0%以上5%未満である、
 4:打ち抜き不良発生率(%)は、5%以上15%未満である、
 3:打ち抜き不良発生率(%)は、15%以上25%未満である、
 2:打ち抜き不良発生率(%)は、25%以上35%未満である、
 1:打ち抜き不良発生率(%)は、35%以上である。
≪Evaluation criteria≫
5: Punching defect occurrence rate (%) is 0% or more and less than 5%.
4: The punching defect occurrence rate (%) is 5% or more and less than 15%.
3: Punching defect occurrence rate (%) is 15% or more and less than 25%.
2: The punching defect occurrence rate (%) is 25% or more and less than 35%.
1: The punching defect occurrence rate (%) is 35% or more.
 (接着性)
 [偏光板の形成]
 ≪偏光子の作製≫
 厚さ70μmのポリビニルアルコールフィルムを、35℃の水で膨潤させた。得られたフィルムを、ヨウ素0.075g、ヨウ化カリウム5g及び水100gからなる水溶液に60秒間浸漬し、さらにヨウ化カリウム3g、ホウ酸7.5gおよび水100gからなる45℃の水溶液に浸漬した。得られたフィルムを、延伸温度55℃、延伸倍率5倍の条件で一軸延伸した。この一軸延伸フィルムを、水洗した後、乾燥させて、厚さ15μmの偏光子を得た。
(Adhesiveness)
[Formation of polarizing plate]
≪Production of polarizer≫
A 70 μm thick polyvinyl alcohol film was swollen with water at 35 ° C. The obtained film was immersed in an aqueous solution consisting of 0.075 g of iodine, 5 g of potassium iodide and 100 g of water for 60 seconds, and further immersed in an aqueous solution of 45 ° C. consisting of 3 g of potassium iodide, 7.5 g of boric acid and 100 g of water. . The obtained film was uniaxially stretched under conditions of a stretching temperature of 55 ° C. and a stretching ratio of 5 times. The uniaxially stretched film was washed with water and dried to obtain a polarizer having a thickness of 15 μm.
 ≪紫外線硬化型接着剤液の調製≫
 下記の各成分を混合した後、脱泡して、紫外線硬化型接着剤液を調製した。なお、トリアリールスルホニウムヘキサフルオロホスフェートは、50%プロピレンカーボネート溶液として配合し、下記にはトリアリールスルホニウムヘキサフルオロホスフェートの固形分量を表示した。
≪Preparation of UV curable adhesive liquid≫
Each of the following components was mixed and then defoamed to prepare an ultraviolet curable adhesive solution. Triarylsulfonium hexafluorophosphate was blended as a 50% propylene carbonate solution, and the solid content of triarylsulfonium hexafluorophosphate was shown below.
 ・3,4-エポキシシクロヘキシルメチル-3,4-エポキシシクロヘキサンカルボキシレート 45質量部、
 ・エポリード(登録商標)GT-301(株式会社ダイセル製の脂環式エポキシ樹脂) 40質量部、
 ・1,4-ブタンジオールジグリシジルエーテル 15質量部、
 ・トリアリールスルホニウムヘキサフルオロホスフェート 2.3質量部、
 ・9,10-ジブトキシアントラセン 0.1質量部、
 ・1,4-ジエトキシナフタレン 2.0質量部。
-45 parts by mass of 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate,
・ Epolide (registered trademark) GT-301 (Daicel Co., Ltd. alicyclic epoxy resin) 40 parts by mass,
・ 15 parts by mass of 1,4-butanediol diglycidyl ether,
-Triarylsulfonium hexafluorophosphate 2.3 parts by mass,
・ 9,10-dibutoxyanthracene 0.1 parts by mass,
・ 2.0 parts by mass of 1,4-diethoxynaphthalene.
 ≪偏光板の作製≫
 下記の方法に従って、上記得られた各光学フィルムを偏光板保護フィルムとして用いて、各偏光板を作製した。各偏光板は、以下の方法で作成した。
≪Preparation of polarizing plate≫
According to the following method, each polarizing plate was produced using each of the obtained optical films as a polarizing plate protective film. Each polarizing plate was created by the following method.
 まず、第一の偏光板保護フィルムとして、上記作製した光学フィルムを用意し、その応力緩和層の表面にコロナ放電処理を施した。なお、コロナ放電処理の条件は、コロナ出力強度2.0kW、ライン速度18m/分とした。次いで、第一の偏光板保護フィルムのコロナ放電処理を施した応力緩和層の表面に、上記調製した紫外線硬化型接着剤液を、硬化後の膜厚が約3μmとなるようにバーコーターで塗工して紫外線硬化型接着剤層を形成した。得られた紫外線硬化型接着剤層に、上記作製した偏光子(厚さ15μm)を貼合した。 First, as the first polarizing plate protective film, the produced optical film was prepared, and the surface of the stress relaxation layer was subjected to corona discharge treatment. The corona discharge treatment was performed at a corona output intensity of 2.0 kW and a line speed of 18 m / min. Next, the prepared UV curable adhesive solution is applied to the surface of the stress-relieving layer subjected to the corona discharge treatment of the first polarizing plate protective film with a bar coater so that the film thickness after curing is about 3 μm. To form an ultraviolet curable adhesive layer. The produced polarizer (thickness 15 μm) was bonded to the obtained ultraviolet curable adhesive layer.
 次いで、第二の偏光板保護フィルムとして、前記光学フィルムと同じ種類のフィルムをさらに用意し、その応力緩和層の表面にコロナ放電処理を施した。コロナ放電処理の条件は、コロナ出力強度2.0kW、速度18m/分とした。 Next, as the second polarizing plate protective film, a film of the same type as the optical film was further prepared, and the surface of the stress relaxation layer was subjected to corona discharge treatment. The conditions of the corona discharge treatment were a corona output intensity of 2.0 kW and a speed of 18 m / min.
 続いて、第二の偏光板保護フィルムのコロナ放電処理を施した応力緩和層の表面に、上記調製した紫外線硬化型接着剤液を、硬化後の膜厚が約3μmとなるようにバーコーターで塗工して紫外線硬化型接着剤層を形成した。 Subsequently, on the surface of the stress relaxation layer subjected to the corona discharge treatment of the second polarizing plate protective film, the prepared ultraviolet curable adhesive liquid is applied with a bar coater so that the film thickness after curing is about 3 μm. Coating was performed to form an ultraviolet curable adhesive layer.
 そして、この紫外線硬化型接着剤層に、第一の偏光板保護フィルムの片面に貼合された偏光子を貼合して、第一の偏光板保護フィルム/紫外線硬化型接着剤層/偏光子/紫外線硬化型接着剤層/第二の偏光板保護フィルムが積層された積層体を得た。その際に、第一の偏光板保護フィルムの製造時の長手方向と、偏光子の吸収軸(長手方向)とが互いに平行となるよう貼合した。 Then, a polarizer bonded to one surface of the first polarizing plate protective film is bonded to the ultraviolet curable adhesive layer, and the first polarizing plate protective film / UV curable adhesive layer / polarizer. / The ultraviolet-ray curable adhesive layer / The laminated body with which the 2nd polarizing plate protective film was laminated | stacked was obtained. In that case, it bonded so that the longitudinal direction at the time of manufacture of a 1st polarizing plate protective film and the absorption axis (longitudinal direction) of a polarizer might become mutually parallel.
 その後、この積層体の両面側から、ベルトコンベヤー付き紫外線照射装置(ランプは、フュージョンUVシステムズ社製のDバルブを使用)を用いて、積算光量が750mJ/cmとなるように紫外線を照射し、それぞれの紫外線硬化型接着剤層を硬化させ、偏光板を作製した。 Thereafter, ultraviolet rays are irradiated from both sides of the laminate using an ultraviolet irradiation device with a belt conveyor (the lamp uses a D bulb manufactured by Fusion UV Systems) so that the integrated light quantity becomes 750 mJ / cm 2. Each of the ultraviolet curable adhesive layers was cured to produce a polarizing plate.
 [接着性試験]
 上記作製した各偏光板について屈曲試験を行った。各偏光板の屈曲試験は、以下の方法で行った。
[Adhesion test]
A bending test was performed on each of the produced polarizing plates. The bending test of each polarizing plate was performed by the following method.
 まず、縦10cm横10cmのサイズに打ち抜いた偏光板を、一方の面側が凸となるよう100°に湾曲させるような動作を100回繰り返した。そして、屈曲試験後の偏光板について、偏光板保護フィルムと偏光子との接着性を下記評価基準に従って評価した。接着性は、偏光板保護フィルムと偏光子との剥離の程度が小さいほど優れた結果を表し、ランク3以上が望ましい接着性であるとする。これらの結果を下記表2に示す;
 ≪評価基準≫
 5:偏光板保護フィルムと偏光子とが全く剥離していない、
 4:偏光板保護フィルムの偏光子からの浮きが、周縁部でごくわずかに生じている、
 3:偏光板保護フィルムと偏光子とが、周縁部から5mm未満の範囲で剥離している、
 2:偏光板保護フィルムと偏光子とが、周縁部から5mm以上10mm未満の範囲で剥離している、
 1:偏光板保護フィルムと偏光子とが、周縁部から10mm以上の範囲で剥離している。
First, an operation of bending a polarizing plate punched out to a size of 10 cm in length and 10 cm in width to 100 ° so that one surface side is convex was repeated 100 times. And about the polarizing plate after a bending test, the adhesiveness of a polarizing plate protective film and a polarizer was evaluated in accordance with the following evaluation criteria. The adhesiveness represents a better result as the degree of peeling between the polarizing plate protective film and the polarizer is smaller, and rank 3 or higher is desirable adhesiveness. These results are shown in Table 2 below;
≪Evaluation criteria≫
5: The polarizing plate protective film and the polarizer are not peeled off at all.
4: Floating from the polarizer of the polarizing plate protective film is slightly generated at the peripheral edge,
3: The polarizing plate protective film and the polarizer are peeled off in a range of less than 5 mm from the peripheral portion.
2: The polarizing plate protective film and the polarizer are peeled in the range of 5 mm or more and less than 10 mm from the peripheral portion.
1: The polarizing plate protective film and the polarizer are separated within a range of 10 mm or more from the peripheral portion.
 (高温高湿環境下における耐久性)
 市販のVA型液晶表示装置(42インチ型、直下型バックライト)を用い、液晶セルのバックライト側偏光板及び視認側偏光板を剥がし、これに代えて、上記接着性評価に用いたものと同様にして作製した各偏光板を、それぞれ液晶セルの両面に貼合し、その際その偏光板の貼合の向きは、予め貼合されていた偏光板と同一方向に吸収軸が向くように行い、液晶表示装置を作製した。ここで、液晶セルに貼合した偏光板は、両面で同じのものとした。
(Durability under high temperature and high humidity)
A commercially available VA type liquid crystal display device (42 inch type, direct type backlight) is used, and the backlight side polarizing plate and the viewing side polarizing plate of the liquid crystal cell are peeled off. Each polarizing plate produced in the same manner is bonded to both sides of the liquid crystal cell, and the polarizing direction of the polarizing plate is such that the absorption axis is oriented in the same direction as the previously bonded polarizing plate. A liquid crystal display device was manufactured. Here, the polarizing plate bonded to the liquid crystal cell was the same on both sides.
 高温高湿環境下における耐久性は、このようにして作製した液晶表示装置を40℃、90%相対湿度環境下で、直下型バックライトを点灯して500時間の耐久性試験をした後、更に室温でバックライトを点灯して24時間後、画面を黒表示する際の光漏れ程度を観察し、下記評価基準に従って評価した。高温高湿環境下における耐久性は、光漏れの程度が小さいほど優れた結果を表し、ランク3以上が望ましい耐久性であるとする。これらの結果を下記表2に示す;
 ≪評価基準≫
 4:光漏れがほとんど視認できないレベルである、
 3:光漏れが若干視認できるが、許容できるレベルである、
 2:光漏れが視認でき、許容できないレベルである、
 1:光漏れが明確に視認でき、許容できないレベルである。
Durability in a high temperature and high humidity environment is as follows. The liquid crystal display device thus produced was subjected to a durability test for 500 hours after lighting a direct type backlight in a 40 ° C., 90% relative humidity environment. 24 hours after turning on the backlight at room temperature, the degree of light leakage when displaying the screen in black was observed and evaluated according to the following evaluation criteria. The durability under a high temperature and high humidity environment represents a better result as the degree of light leakage is smaller, and rank 3 or higher is a desirable durability. These results are shown in Table 2 below;
≪Evaluation criteria≫
4: At a level where light leakage is hardly visible,
3: Light leakage is slightly visible but at an acceptable level.
2: The light leakage is visible and is an unacceptable level.
1: Light leakage is clearly visible and is not acceptable.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
 本発明に係る光学フィルムは、環状ポリオレフィンフィルムと、その上に配置された、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有し、かつC-C結合割合の平均値XAVEが1%以上40以下%である、応力緩和層とを有する。表2の結果より、本発明の各実施例に係る光学フィルムは、C-C結合割合の平均値XAVEが本発明の範囲外である各比較例に係る光学フィルムと比較して、クラック耐性、高温高湿下における耐久性および接着性に優れることが確認された。 The optical film according to the present invention contains a cyclic polyolefin film and silicon atoms (Si), oxygen atoms (O) and carbon atoms (C) disposed thereon, and an average value of the C—C bond ratio. And a stress relaxation layer having X AVE of 1% to 40%. From the results of Table 2, the optical film according to each example of the present invention is more resistant to cracking than the optical film according to each comparative example in which the average value X AVE of the C—C bond ratio is outside the scope of the present invention. It was confirmed that the film was excellent in durability and adhesion under high temperature and high humidity.
 また、実施例である光学フィルム3、7、12および16からなる群、実施例である光学フィルム4、8、13および17からなる群、実施例である光学フィルム9および14からなる群、ならびに実施例である光学フィルム5、10、15および18からなる群の、それぞれ同一群内の評価結果の比較から、本発明に係る光学フィルムは、環状ポリオレフィンフィルムの90℃での弾性率が1.9GPa以上2.5GPa以下の際に、クラック耐性、高温高湿環境下における耐久性および接着性にさらに優れることが確認された。 Further, a group consisting of optical films 3, 7, 12, and 16 as examples, a group consisting of optical films 4, 8, 13, and 17 as examples, a group consisting of optical films 9 and 14 as examples, and From the comparison of the evaluation results within the same group of the group consisting of optical films 5, 10, 15 and 18 as examples, the optical film according to the present invention has an elastic modulus at 90 ° C. of the cyclic polyolefin film of 1. It was confirmed that when it was 9 GPa or more and 2.5 GPa or less, it was further excellent in crack resistance, durability in a high temperature and high humidity environment, and adhesiveness.
 本出願は、2016年11月18日に出願された日本国特許出願番号2016-225322号に基づいており、その開示内容は、参照により全体として組み入れられている。 This application is based on Japanese Patent Application No. 2016-225322 filed on November 18, 2016, the disclosure of which is incorporated by reference in its entirety.
 1 光学フィルム、
 2 基材、
 3 応力緩和層、
 10 製造装置、
 12 送出しローラー、
 13~18 搬送ローラー、
 19、20 成膜ローラー、
 21 ガス供給管、
 22 プラズマ発生用電源、
 23、24 磁場発生装置、
 25 巻取りローラー、
 27、29 搬送系チャンバー、
 28 成膜チャンバー、
 30、31 連結部。
1 optical film,
2 base material,
3 Stress relaxation layer,
10 Production equipment,
12 Feeding roller,
13-18 transport rollers,
19, 20 Deposition roller,
21 gas supply pipe,
22 Power source for plasma generation,
23, 24 Magnetic field generator,
25 take-up roller,
27, 29 Transport system chamber,
28 Deposition chamber,
30, 31 connection part.

Claims (6)

  1.  環状ポリオレフィンフィルムと、
     前記環状ポリオレフィンフィルム上に配置された応力緩和層と、を有し、
     前記応力緩和層は、ケイ素原子(Si)、酸素原子(O)および炭素原子(C)を含有し、かつ、
     前記応力緩和層のX線光電子分光法により測定されるC1sスペクトル領域のデプスプロファイルから求められる、各測定位置におけるC-C、C-SiO、C-O、C=OおよびC(=O)-Oの各結合に由来するピーク強度の総和に対するC-C結合に由来するピーク強度の割合X(%)の、厚さ方向の平均値XAVEが1%以上40%以下である、光学フィルム。
    A cyclic polyolefin film;
    A stress relieving layer disposed on the cyclic polyolefin film,
    The stress relaxation layer contains silicon atoms (Si), oxygen atoms (O) and carbon atoms (C), and
    C—C, C—SiO, C—O, C═O and C (═O) — at each measurement position, obtained from the depth profile of the C1s spectral region measured by X-ray photoelectron spectroscopy of the stress relaxation layer. An optical film having an average value X AVE in the thickness direction of a ratio X (%) of peak intensities derived from C—C bonds to a sum of peak intensities derived from each bond of O being 1% or more and 40% or less.
  2.  前記環状ポリオレフィンフィルムは、90℃での弾性率が1.9GPa以上2.5GPa以下である、請求項1に記載の光学フィルム。 The optical film according to claim 1, wherein the cyclic polyolefin film has an elastic modulus at 90 ° C of 1.9 GPa or more and 2.5 GPa or less.
  3.  前記XAVEが2%以上20%以下である、請求項1または2に記載の光学フィルム。 The optical film according to claim 1, wherein the X AVE is 2% or more and 20% or less.
  4.  請求項1~3のいずれか1項に記載の光学フィルムからなる偏光板保護フィルム。 A polarizing plate protective film comprising the optical film according to any one of claims 1 to 3.
  5.  偏光子と、
     請求項1~3のいずれか1項に記載の光学フィルム、または請求項4に記載の偏光板保護フィルムと、
    を有する偏光板。
    A polarizer,
    The optical film according to any one of claims 1 to 3, or the polarizing plate protective film according to claim 4,
    A polarizing plate having
  6.  請求項1~3のいずれか1項に記載の光学フィルム、または請求項5に記載の偏光板を有する、表示装置。 A display device comprising the optical film according to any one of claims 1 to 3 or the polarizing plate according to claim 5.
PCT/JP2017/040271 2016-11-18 2017-11-08 Optical film, polarizing plate protection film, polarizing plate including these films, and display device including these films WO2018092657A1 (en)

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