WO2018004088A1

WO2018004088A1 - Vacuum degree measurement sensor using graphene nanoribbon

Info

Publication number: WO2018004088A1
Application number: PCT/KR2016/014801
Authority: WO
Inventors: 안성일; 조황덕; 노태화; 김동규; 이창희; 손재홍
Original assignee: 신라대학교 산학협력단
Priority date: 2016-06-27
Filing date: 2016-12-16
Publication date: 2018-01-04
Also published as: KR20180001225A; KR101847269B1

Abstract

The present invention relates to a vacuum degree measurement sensor using a graphene nanoribbon, which comprises a thin graphene nanoribbon film configured by at least two graphene nanoribbon layers and senses the degree of a vacuum by using a resistance value of each of the graphene nanoribbon layers. A vacuum degree measurement sensor using a graphene nanoribbon according to the present invention uses a graphene nanoribbon and thus has a short cross-sectional distance and a resistance value that significantly changes according to a curved state thereof. Therefore, the vacuum degree measurement sensor has increased sensitivity and allows gas molecules trapped between graphene layers to be diffused in a short distance, so that the sensor can have an increased response speed according to the degree of a vacuum.

Description

Vacuum measurement sensor using graphene nanoribbons

The present invention relates to a vacuum measuring sensor, and more particularly, to a vacuum measuring sensor using a graphene nanoribbon that detects a vacuum pressure by using a phenomenon in which the bending of the graphene nanoribbons and the resistance value change according to the vacuum degree. It is about.

Gauges for measuring vacuum are classified into direct and indirect measuring gauges, and direct gauges are liquid-type barometers, McLeod gauges, Bourdon gauges, diaphragm gauges, and capacitive types, which are mainly used in low vacuum (1 to 10 torr at normal pressure). Gauges. Indirect measuring gauges use the thermal characteristics of the gas, including thermocouple gauges, pyrani gauges, and convection gauges. In addition, there are hot cathode ion gauges and the like using gauges of gas ions.

In general, the resistance or current change value is very small depending on the degree of vacuum, so that it is difficult to measure precisely. If the precision is severe from 10% or more, there may be an error of 30% or more depending on the vacuum range. In addition, in order to detect minute resistance or change in current value, a complicated system configuration is often used, and a large system is often configured.

Graphite, one of the most well-known structures of carbon, is a structure in which two-dimensional graphene sheets of plate-like carbon atoms are stacked in a hexagonal shape with only sp2 hybrids. Recently, one or more layers of graphene sheets have been peeled off from graphite, and the properties of the sheets have been investigated and found to have very high conductivity. The mobility of the graphene sheet known to date is known to have a high value of about 20,000 to 50,000 cm ² / Vs.

The graphene sheet has a certain space between the upper and lower layers during film formation. When incompletely reduced graphene is present between layers, there is an interlayer, that is, a gap between carbons, and an empty space of one or two carbons exists between the graphene pieces and the pieces stacked.

The intermolecular attraction, commonly called van der Waals forces, begins at about 2.5 times the diameter of carbon in the case of graphene, so the attraction between the layers of graphene is at work. At atmospheric pressure, however, the presence of air molecules between the graphene layers prevents deformation due to attraction. When under vacuum, most of the air molecules are released, which greatly increases the intermolecular attraction. In this case, attractive force is generated around the empty space and deformation of the graphene fragments in the thin film may occur.

Since conductivity becomes large when the mobility of electrons is large, the mobility of the electrons is disturbed when there is a bend, so that the conductivity is greatly reduced or the resistance value increases. When applied to a vacuum sensor or a vacuum gauge, it is possible to measure a very precise vacuum pressure only by changing the resistance value. However, the higher the vacuum, the slower the diffusion of molecules trapped in the graphene layer and the smaller the change value, so there is a problem that the sensitivity of the sensor is reduced.

Therefore, a large change in the electric resistance value is required to measure the precision vacuum, and at the same time, there is a need for a vacuum sensor and a vacuum gauge excellent in the sensitivity of the sensor.

[Preceding technical literature]

(Patent Document 1) 1. Korean Registered Patent No. 10-1391158

(Patent Document 2) 2. Korean Patent Publication No. 10-2012-0111607

The technical problem of the present invention is to provide a vacuum measurement sensor using a graphene nanoribbons to detect the vacuum pressure by using the phenomenon that the bend of the graphene nanoribbons change according to the vacuum degree and the resistance value changes. have.

In particular, using graphene nanoribbons with a short cross-sectional distance, the resistance value is large due to the bending state. Accordingly, the sensitivity of the sensor increases, and the diffusion of gas molecules trapped between the graphene layers occurs at a short distance. The object is to provide a vacuum measuring sensor that can increase the response speed.

However, these problems are exemplary, and the technical idea of the present invention is not limited thereto.

Vacuum measurement sensor using the graphene nanoribbons according to the technical idea of the present invention for achieving the technical problem includes a graphene nanoribbon thin film consisting of two or more graphene nanoribbons layer, the graphene nanoribbon layer of The resistance value can detect the degree of vacuum.

In some embodiments of the present invention, the resistance value may vary depending on the bending state of the graphene nanoribbon layer.

In some embodiments of the present invention, the graphene nanoribbon thin film may have an interlayer spacing (d002) of greater than 0.335 nm and less than 10 nm.

In some embodiments of the present invention, the bent state in the atmospheric pressure to high vacuum (10 ^-4 torr to 10 ^-7 torr) section may be caused by the amount of air and the intermolecular attraction between the graphene nanoribbon layer.

In some embodiments of the present invention, at low temperatures below 45 ° C., the amount of graphene nanoribbon interlayer air decreases as the degree of vacuum increases between atmospheric pressure and high vacuum (10 ⁻⁴ torr to 10 ⁻⁷ torr). The degree of vacuum can be detected by detecting a resistance value that decreases as the attractive force acts on the entire layer.

In some embodiments of the present invention, at a high temperature of 45 ° C. or higher, the amount of air between the graphene nanoribbon layers decreases as the degree of vacuum increases in a range of atmospheric pressure to low vacuum (1 to 10 torr at normal pressure), thereby reducing the resistance value. In the medium vacuum (1 ~ 10torr to 10 ^-4 torr) to high vacuum (10 ^-4 torr to 10 ^-7 torr) the resistance value that increases with the bending caused by the nano-ribbon attraction of the graphene nanoribbon layer By detecting the degree of vacuum can be detected.

In some embodiments of the present invention, the graphene nanoribbon thin film may be a film made of graphene nanoribbons or a composite film made of graphene nanoribbons and a polymer.

In some embodiments of the present invention, the composite film may include 100 parts by weight of the graphene nanoribbons and 1 to 100 parts by weight of the polymer.

Vacuum gauge using a graphene nanoribbon according to the technical idea of the present invention for achieving the technical problem may include a heating means connected to one surface of the vacuum sensor and the vacuum sensor.

In some embodiments of the present invention, the degree of vacuum may be measured according to the temperature through the heating means.

In some embodiments of the present disclosure, the apparatus may further include a vacuum connection unit connected to a vacuum chamber provided with a vacuum, a signal conversion unit converting the measured resistance into a vacuum degree, and a display unit displaying measurement information.

According to the technical spirit of the present invention, the vacuum sensor may detect the vacuum pressure by using a phenomenon in which the bend of the graphene nanoribbon is changed and the resistance value is changed according to the vacuum degree.

In particular, the vacuum sensor according to the technical concept of the present invention is very large resistance value change depending on the bending state using a graphene nanoribbon with a short cross-sectional distance, thereby increasing the sensitivity of the sensor at the same time between the graphene nanoribbon layer Diffusion of trapped gas molecules occurs in a short distance, which can increase the response speed according to the degree of vacuum.

In addition, the vacuum gauge including the graphene nanoribbon thin film is simple and small in size, the electrical resistance value is large, it is possible to measure the precision vacuum degree.

The effects of the present invention described above have been described by way of example, and the scope of the present invention is not limited by these effects.

1 is a view showing the graphene surface bending in the normal pressure to high vacuum section of the vacuum sensor using a graphene nanoribbon according to an embodiment of the present invention.

Figure 2 is a graph showing the X-ray diffraction pattern of graphite, reduced graphene and graphene oxide.

Figure 3 is a vacuum-resistance graph measured in the normal pressure to low vacuum section at 30 ℃ using a vacuum measuring sensor using a graphene nanoribbon according to an embodiment of the present invention.

Figure 4 is a sheet resistance graph measured at 30 ℃, 50 ℃, 75 ℃ and 100 ℃ using a vacuum measuring sensor using a graphene nanoribbon according to an embodiment of the present invention.

5 is a view showing a laminated structure of a vacuum gauge using a graphene nanoribbon according to an embodiment of the present invention.

6 is a view showing the configuration of a vacuum gauge using a graphene nanoribbon according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Embodiments of the present invention are provided to more fully explain the technical idea of the present invention to those skilled in the art, and the following embodiments may be modified in many different forms, and The scope of the technical idea is not limited to the following examples. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the inventive concept to those skilled in the art. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. Like numbers refer to like elements all the time. Furthermore, various elements and regions in the drawings are schematically drawn. Therefore, the technical idea of the present invention is not limited by the relative size or spacing drawn in the accompanying drawings.

Vacuum measurement sensor using a graphene nanoribbon according to the present invention includes a graphene nanoribbon thin film consisting of two or more graphene nanoribbon layer, it can detect the vacuum degree by the resistance value of the graphene nanoribbon layer, The resistance value may vary depending on the bending state of the graphene nanoribbon layer.

The graphene nanoribbons have high shape anisotropy due to increased length to width ratio. Typically, the aromatic base of graphene nanoribbons is typically in the form of a strip having a width of less than 50 nm, and the aspect ratio (ie, length to width ratio) of graphene nanoribbons is at least 10. It may preferably have an aspect ratio of 10 to 1000. If the aspect ratio is 1000 or more, it is difficult to form a uniform thin film due to the high aspect ratio, and thus the sensitivity may be lower than that of the sensor including the graphene nanoribbons having an appropriate aspect ratio of 10 to 1000.

1 is a view showing the graphene surface bending in the normal pressure to high vacuum section of the vacuum sensor using a graphene nanoribbon according to an embodiment of the present invention. Graphene nanoribbons can reduce one side more than 100 times compared to the size of normal oxidized or reduced graphene, facilitating the diffusion of gas molecules trapped in layers under high vacuum, and the small channel of charge transfer involved in electrical conduction. If there is a sharp drop in conductivity can be produced a very sensitive sensor.

The graphene nanoribbon thin film may have an interlayer spacing (d002) calculated from X-ray diffraction measurements in a range larger than 0.335 nm and smaller than 10 nm. Figure 2 is a graph showing the X-ray diffraction pattern of graphite, reduced graphene and graphene oxide. The average interlayer spacing of graphene calculated from 002 diffraction lines measured by X-ray diffraction was measured by using an X-ray diffractometer (RINT3000, manufactured by Rigak Co., Ltd.), and the sample was placed in air (X-ray: CuKα rays, targets). It is the value measured in: Cu). In addition, the average interlayer spacing was computed by Bragg's formula of 2 dsin (theta) = (lambda).

When the interlayer spacing of the (002) plane is included in the above range during X-ray diffraction measurement, the graphene layer is bent due to the amount of air and intermolecular attraction between the graphene layers by maintaining an appropriate interlayer spacing. The degree of vacuum can be detected by detecting a resistance value that varies depending on the state of bending.

The calculated average interlayer distance is 0.3354 nm in the case of single crystal graphite, and the closer to this value, the more favorable graphite is considered. In this case, it has low resistance and low precision, so it does not have meaning as a vacuum measurement sensor. In addition, the interlayer spacing of the conventional graphene oxide is 10 nm, and the vacuum is measured using the resistance value change while using a graphene thin film having an interlayer spacing (d002) of more than 0.335 nm and less than 10 nm. It is possible to manufacture a vacuum measuring sensor having a response speed.

In particular, the interlayer spacing of the graphene nanoribbons may be 0.35 to 0.85 nm. The spacing of Van der Waals attraction force of 2.5 σ or more is about 85 nm when calculated based on a 2.5 mm * 3.5 mm size plane, and the interlayer spacing of the graphene nanoribbons may be 0.35 to 0.85 nm.

3 is a sheet resistance graph measured in a high vacuum section from the atmospheric pressure at 30 ℃ using a vacuum sensor using a graphene nanoribbon according to an embodiment of the present invention. The bending state may be generated by the amount of air between the graphene nanoribbon layers and the intermolecular attraction in the normal pressure to high vacuum (10 ⁻⁴ torr to 10 ⁻⁷ torr). In the present invention, the low vacuum is 1 to 10 torr at normal pressure, the medium vacuum is 1 to 10 torr to 10 ^-4 torr, and the high vacuum is 10 to ⁴ torr to 10 ^-7 torr.

At low temperatures below 45 ° C, the amount of air between the graphene nanoribbons decreases as the degree of vacuum increases between atmospheric pressure and high vacuum (10 ^-4 torr to 10 ^-7 torr), and as the attraction force throughout the nanographene layer increases. By detecting the decreasing resistance value, the degree of vacuum can be detected. Experimentally, at low temperatures below 45 ° C, as the degree of vacuum increases from normal pressure to high vacuum (10 ^-4 torr to 10 ^-7 torr), the distance between the graphene nanoribbons is reduced by the attractive force acting on the entire graphene nanoribbon thin film. Therefore, it was confirmed that the degree of vacuum can be detected by detecting the decreasing resistance value.

Further, in the above 45 ℃ temperature from atmospheric pressure to low vacuum reducing the amount of according to (1 ~ 10 torr (normal pressure)), the degree of vacuum increase in the interval graphene nanoribbons interlayer air to decrease the resistance value, and the Medium vacuum (1 ~ 10torr 10 ^{- 4} torr) to high vacuum (10 ^-4 torr to 10 ^-7 torr) the vacuum degree can be detected by detecting a resistance value that increases with the bending caused by the nano-ribbon attraction of the graphene nanoribbon layer .

Experimentally, when the temperature is higher than 45 ℃, the resistance value decreases due to the decrease of the amount of air between the graphene nanoribbons as the degree of vacuum increases in the range from normal pressure to low vacuum (1 ~ 10 torr at normal pressure). As the degree of vacuum increases in the range of 10 ^-4 torr) to high vacuum (10 ^-4 torr to 10 ^-7 torr), the bending state of the reduced graphene layer is generated by the intermolecular attraction between the reduced graphene layers, and the reduced graphene It was confirmed that the degree of vacuum can be detected by detecting the resistance value increasing with the bending state of the layer.

As such, the electrical resistance generated by the air layer disappears to have an inflection point of the resistance at 1 to 10 torr. In order to measure the degree of vacuum for the whole area by having the inflection point of the resistance between 1 to 10 torr of vacuum degree, it is necessary to distinguish between normal pressure, low vacuum and medium vacuum and high vacuum section, and the low pressure and high vacuum parts are switched to normal pressure. To vacuum in the high vacuum region can be measured.

In particular, in the medium vacuum (1 ~ 10torr to 10 ^-4 torr) to high vacuum (10 ^-4 torr to 10 ^-7 torr) section, the change of resistance value tends to increase according to the temperature increase, so precise measurement is possible at higher temperature. Confirmed.

The graphene nanoribbons thin film may be a film made of graphene nanoribbons or a composite film made of graphene nanoribbons and a polymer. The polymer is a polymer that can be dissolved in an aqueous solution, it may be a vinyl-based polymer. The vinyl polymer is a compound having a different chain of atoms or atoms (X) as a side chain on a hydrocarbon chain (-CH2CH-) as a main chain, and polyvinylchloride, polyvinylfluoride, and polyvinylacetate. , Polyvinylalcohol, polyacrylic acid, polyacrylamide, polyacrylonitrile, polystyrene, polyacrylates, and the like may be used.

Power (P) is a relationship proportional to the square of the current (I ² ) and the resistance (R), when the polymer is included, the sensitivity can be increased by increasing the size of the resistance value in a certain range during device cleaning This has the advantage of reducing the amount of current consumed during measurement.

In addition, when the sheet resistance of 100 kW / sq to 1 MΩ / sq, the output signal of the vacuum measuring sensor using the graphene nanoribbons can be stabilized. The composite membrane may include 100 parts by weight of the graphene nanoribbons and 1 to 100 parts by weight of the polymer in order to satisfy a sheet resistance of 100 μs / sq to 1 MΩ / sq.

When 100 parts by weight of graphene nanoribbons, when the polymer exceeds 100 parts by weight, a large amount of polymer residues remain between the graphene nanoribbons layer, a precise device is required to measure the change in resistance value, which is added more than In this case, the resistance is so large that it is not energized and resistance measurement is impossible.

When the graphene nanoribbons 100 parts by weight, less than 1 part by weight of the polymer, the effect of the addition of the polymer does not appear, there is a problem that the sensitivity is very low due to the sheet resistance of less than 100 s / sq.

5 is a view showing a laminated structure of a vacuum gauge using a graphene nanoribbon according to an embodiment of the present invention. The vacuum gauge using the graphene nanoribbons according to the present invention may include a heating means 130 connected to the vacuum degree measuring sensor 110 and one surface of the vacuum degree measuring sensor 110. The heating means 130 removes the gas remaining in the middle portion of the graphene nanoribbon thin film layer is difficult to escape gas by heating the graphene nanoribbon thin film layer, in this case the residual gas between the middle portion and the edge of the graphene nanoribbon thin film layer It is possible to reduce the error of vacuum measurement by reducing the resistance difference, and to reduce the time for data stabilization to enable rapid vacuum measurement.

In addition, the degree of vacuum may be measured according to the temperature through the heating means 130. As shown in FIG. 4, in the medium vacuum (1-10 tor to 10 ^-4 torr) to the high vacuum (10 ^-4 torr to 10 ^-7 torr), the change in the resistance value tends to increase with increasing temperature, so that the higher the temperature, the more accurate measurement This is possible.

6 is a view showing the configuration of a vacuum gauge using a graphene nanoribbon according to an embodiment of the present invention. The vacuum gauge 100 according to the present invention may further include a vacuum connection unit 160, a signal conversion unit 170, and a display unit 180. The vacuum connection unit 160 may be connected to a vacuum chamber provided with a vacuum, and the display unit 180 may display measurement information. The signal converter 170 may convert the measured resistance into a vacuum degree.

Vacuum measuring sensor manufacturing method using a graphene nanoribbon according to the present invention includes a carbon nanotube providing step, graphene nanoribbon solution manufacturing step, graphene nanoribbon thin film forming step, reduction step.

The carbon nanotube providing step is a step of providing a plurality of carbon nanotubes, the graphene nanoribbon solution manufacturing step is to prepare a oxidized graphene nanoribbon solution by reacting the plurality of carbon nanotubes and an oxidant. . The graphene nanoribbons may be prepared by oxidizing carbon nanotubes, but may be prepared using other conventional graphene nanoribbons.

The graphene nanoribbon thin film forming step is a step of forming a graphene nanoribbon thin film by coating the graphene nanoribbon solution on the electrode layer capable of measuring resistance, the reduction step is vacuum heat treatment of the graphene nanoribbon thin film It is a step of reducing.

Hereinafter, the details of the process of the present invention through the Examples and Experimental Examples.

1. 그래핀 나노리본 제조1. Graphene Nano Ribbon Manufacturing

Add 10% phosphoric acid and concentrated sulfuric acid to the carbon nanotube and mix well. The solution is cooled to low temperature (about 5 ° C or less) with ice water, and potassium permanganate is slowly added to the powder. After that, remove the ice bath, adjust to room temperature, depending on the type of carbon nanotubes can raise the temperature from 50 ℃ to 80 ℃. After maintaining this reaction for 24 hours, distilled water is slowly added to dilute. The reaction time can be reduced or increased in order to control the degree of oxidation. Hydrogen peroxide solution is added to remove KMnO ₄ that remains unreacted. The solution containing the synthesized carbon nanotubes and graphene nanoribbons is centrifuged to remove the solution containing sulfuric acid and manganese residue. Then add 10% hydrochloric acid, shake well, and centrifuge to remove the upper solution. Thereafter, distilled water is diluted to an amount of 100 ml / 1 g of carbon, placed in a dialysis membrane, and dialyzed for one week using distilled water flowing. Then, the dialysis membrane is removed, the obtained solution is centrifuged to separate the residues, and a solution containing the graphene nanoribbons dispersed in the upper layer is obtained.

2. 그래핀 나노리본 막 제조 2. Graphene Nanoribbon Membrane Manufacturing

Ethyl alcohol is mixed at a ratio of 1: 1 by volume to the graphene nanoribbon-dispersed solution, followed by spin coating on a glass substrate to obtain a graphene nanoribbon film with an appropriate thickness. After drying for 1 hour at 100 ℃, heat treatment for 1 hour in the temperature range of 200 ℃ ~ 250 ℃ after the vacuum heat treatment at 400 ℃ or more, vacuum degree 0.001 torr or less 1 hour or more to reduce the graphene nanoribbon film.

In order to obtain a homogeneous membrane in the preparation of the spin coating solution, solvents such as dimethylformamide, ethylene glycol monomethyl ether and the like other than ethyl alcohol may be added and used. As the coating method, a film using the solution can be obtained using any one of spin coating, inkjet printing, spray coating, dispenser method, and the like, and is not limited to the spin coating method.

3 shows the operation characteristics of the vacuum sensor using the graphene nanoribbon prepared according to the embodiment. The data measured from the normal pressure to the range of 10 ^-7 torr shows that the degree of vacuum can be measured even at higher vacuum pressures.

3. 그래핀 나노리본/고분자 복합막 제조3. Graphene Nanoribbon / Polymer Composite Membrane Manufacturing

A solution in which the polymer having a vinyl group is dissolved at 0.01 wt% to 3 wt% in an aqueous solution containing 0.01 wt% to 3 wt% or an organic solvent mixed with water is prepared. The graphene nanoribbon dispersed solution and the polymer solution having a vinyl group are mixed by ratio so as to have a viscosity required by the coating method, thereby obtaining a final mixed solution.

In this case, the polymer content of the graphene nanoribbons is made by the ratio of graphene nanoribbons 1: polymer 1 to graphene nanoribbons 1: polymer 0.01 by weight. When the polymer is added, the magnitude of the resistance value increases and the sensitivity increases. In addition, the amount of current consumed during the measurement is reduced. On the other hand, if too many polymers are contained, a large amount of polymer residues are left between the final graphene layers, and a precise device is required to measure the change in resistance value.

Ethyl alcohol was mixed in a 1: 1 ratio of the graphene nanoribbon / polymer composite solution volume to the solution, followed by spin coating on a glass substrate to obtain a graphene oxide film having an appropriate thickness. After drying for 1 hour at 100 ℃, 30 minutes heat treatment at 200 ℃ to 250 ℃ temperature section after 400 ℃ or more, vacuum heat treatment at a vacuum degree of 0.001 torr or less for 1 hour to reduce the graphene nanoribbon film.

In order to obtain a homogeneous membrane in the preparation of the spin coating solution, solvents such as dimethylformamide, ethylene glycol monomethyl ether and the like other than ethyl alcohol may be added and used. As a coating method, the film using the said solution can be obtained using one of methods, such as spin coating, inkjet printing, spray coating, and the dispenser method, and is not limited to a spin coating method.

4. 진공도 측정 센서 소자 제조 4. Manufacturing of vacuum measuring sensor element

The graphene nanoribbon solution or the graphene nanoribbon / polymer composite coating solution is coated on the patterned electrode layer by performing at least one pattern printing or spin coating, as shown in FIG. 5, and dried at 100 ° C. for 1 hour and then at 200 ° C. After heat treatment for 30 minutes in the temperature section of ~ 250 ℃ temperature is vacuum treated at least 400 ℃, vacuum degree 0.001 torr or less for 1 hour to reduce the graphene nanoribbon film.

As in the laminated structure of the vacuum gauge of FIG. 5, a glass plate cap or an alumina plate cap or a quartz plate cap may be put on the reduced film to avoid external contamination. At this time, the material of the protective film 140 is not important, and can be used as long as the substrate can be protected from a general external scratch. In addition, the line width of the electrode, the number of electrodes, the shape, etc. in the structure is not important, the structure of the device can be a vacuum pressure measuring device if the shape can simply measure the resistance.

In order to effectively remove residual gas that may be present between the graphene nanoribbon layers of the vacuum measurement sensor, a heating means 130 which may be heated between 100 ° C. and 250 ° C. under the sensor may be included as shown in FIG. 5. have. In addition, by using the heating means 130 can be configured to measure the vacuum pressure according to the temperature up to 200 ℃ as well as room temperature.

The vacuum measurement sensor using graphene nanoribbons according to the present invention uses a graphene nanoribbon that has a shorter cross-sectional distance than graphene, and thus has a large change in resistance value due to a bent state. The diffusion of gas molecules trapped in the gas can be produced in a short distance to increase the response speed according to the degree of vacuum.

In addition, it is possible to manufacture a very small vacuum gauge by reducing the sensor portion extremely compared to the conventional vacuum gauge, it is possible to provide a vacuum gauge that can measure the precision vacuum degree large change in the electrical resistance value.

The technical spirit of the present invention described above is not limited to the above-described embodiment and the accompanying drawings, and various substitutions, modifications, and changes can be made without departing from the technical spirit of the present invention. It will be apparent to those of ordinary skill in the art.

[Description of the code]

10: graphene nanoribbon thin film

20: electrode 100: vacuum gauge

110: vacuum degree measuring sensor 120: support substrate

130: heating means 140: protective film

150: fixing screw 160: vacuum connection

170: signal conversion unit 180: display unit

Claims

Including a graphene nanoribbon thin film consisting of two or more graphene nanoribbon layer, the vacuum measurement sensor using a graphene nanoribbon to detect the vacuum degree by the resistance value of the graphene nanoribbon layer.
The method of claim 1,

The resistance value is a vacuum measurement sensor using a graphene nanoribbon characterized in that it changes according to the bending state of the graphene nanoribbon layer.
The method of claim 1,

The graphene nanoribbons thin film is an interlayer spacing (d002) vacuum sensor using a graphene nanoribbon in the range of more than 0.335nm and less than 10nm.
The method of claim 2,

The curved state in the normal pressure to high vacuum (10 -4 torr to 10 -7 torr) section is a vacuum measurement sensor using the graphene nanoribbons generated by the amount of air between the graphene nanoribbon layer and the intermolecular attraction.
The method of claim 4, wherein

At low temperatures below 45 ° C, the amount of air between the graphene nanoribbons decreases as the degree of vacuum increases between atmospheric pressure and high vacuum (10 -4 torr to 10 -7 torr), and as the attraction force throughout the nanographene layer increases. Vacuum measurement sensor using graphene nanoribbons to detect the degree of vacuum by detecting a decreasing resistance value.
The method of claim 4, wherein

In the above 45 ℃ temperature from atmospheric pressure to low vacuum reducing the amount of according to (1 ~ 10 torr (normal pressure)) increase the degree of vacuum in the interval of graphene nanoribbons interlayer air to decrease the resistance value, and the Medium vacuum (1 ~ 10torr 10 -4 torr ) Graphene nanoribbons to detect the degree of vacuum by detecting an increase in resistance caused by the attraction between the nanoribbons of the graphene nanoribbon layer in the high vacuum (10 -4 torr to 10 -7 torr) interval Vacuum sensor using the sensor.
The method of claim 1,

The graphene nanoribbons thin film is a vacuum measurement sensor using a graphene nanoribbon or a composite film consisting of graphene nanoribbons and a composite film made of graphene nanoribbons and polymers.
The method of claim 7, wherein

The composite membrane is a vacuum measurement sensor using a graphene nanoribbon including 100 parts by weight of the graphene nanoribbon, 1 to 100 parts by weight of the polymer.
The vacuum gauge using the graphene nanoribbon comprising a vacuum measuring sensor of claim 1 and heating means connected to one surface of the vacuum measuring sensor.
The method of claim 9,

Vacuum gauge using a graphene nanoribbon to measure the degree of vacuum in accordance with the temperature through the heating means.
The method of claim 9,

A vacuum connection unit connected to a vacuum chamber in which a vacuum is provided;

A signal conversion unit for converting the measured resistance into a vacuum;

Vacuum gauge using a graphene nanoribbon further comprises a display for displaying the measurement information.