WO2017213482A1 - Nano-pattern forming apparatus and nano-pattern forming method - Google Patents

Abstract

The present application relates to a nano-pattern forming apparatus and a nano-pattern forming method, which form a target metal pattern after attaching water-soluble salt molecules, to which catalytic metal nano-particles are attached, onto a substrate, thereby being able to form a polygonal-shaped nano-pattern at low cost, in a short amount of time and in an environmentally friendly manner even without the use of a template on the substrate.

Description

Nano pattern forming apparatus and forming method

The present application relates to a nanopattern forming apparatus and a forming method.

Precious metal nanoparticles with inherent physicochemical properties have significant potential for the application of optoelectronic devices, including data storage devices that require fine patterning of metal nanoparticles on desired substrates. However, in addition to the synthesis of nanoparticles themselves, spatial control must also be taken into account, so that direct positioning of the particles is very complicated.

Nano-fabrication through nano-patterning of conductors and dielectrics on substrates by conventional lithography has been previously reported. However, lithography is expensive, complex, and time consuming. Therefore, a method for overcoming these limitations is being sought through the synthesis and sequential patterning of a wide range of materials in pretreated substrates and templates.

Electroless Deposition (ELD) is known as a representative metal layer production method for forming thin films and fine patterns due to the low cost and simplicity of the process. Pattern formation through electroless plating requires pretreatment for site selective plating to increase its applicability. In order to provide a catalyst capable of reducing metal ions to atoms in the reactor, direct patterning of the catalyst / seed as an initiator and electroless plating as an initiator is required since the dielectric surface must be pretreated with precious metal particles prior to electroless plating. Complementary, this leads to regioselective growth of the metal layer. Representative pretreatment methods for most electroless plating are wet single or double composed Sn-sensitization and palladium-activation processes. However, the degradation of the purity of the metal layer through additional wet chemical steps and the environmental hazards of the process still remain challenges.

The present application provides a nanopattern forming apparatus and method for forming a nanopattern in a polygonal shape at low cost, short time, and environmentally friendly without using a template on a substrate.

The present application relates to a nano pattern forming apparatus. According to the exemplary nanopattern forming apparatus of the present application, after attaching a water-soluble salt molecule to which a catalytic metal nanoparticle is attached onto a substrate, a target metal pattern is formed, thereby making it possible to realize low cost, short time, and eco-friendliness without using a template on the substrate. To form a nano pattern of a polygonal shape.

As used herein, the term "nano" may mean a size in nanometers (nm), for example, may mean a size of 1 to 1,000 nm, but is not limited thereto. In addition, the term "nanoparticle" in the present specification may mean a particle having an average particle diameter of the nanometer (nm) unit, for example, may mean a particle having an average particle diameter of 1 to 1,000 nm, It is not limited. In addition, the term "nano pattern" in the present specification may mean a pattern having a width or height in the unit of nanometers (nm), for example, may mean a pattern having a width or height of 1 to 1,000 nm. However, the present invention is not limited thereto.

Hereinafter, the nanopattern forming apparatus of the present application will be described with reference to the accompanying drawings, and the accompanying drawings are exemplary, and the nanopattern forming apparatus of the present application is not limited to the accompanying drawings.

1 is a diagram showing the structure of a nano-pattern forming apparatus according to an embodiment of the present application by way of example.

As shown in FIG. 1, the nanopattern forming apparatus of the present application includes a discharge part 100 and a spray part 200.

In one embodiment, the discharge unit 100 includes a pair of conductive rods 110 and a power supply unit 120 for applying a voltage to the pair of conductive rods, respectively.

The pair of conductive rods 110 are spaced apart from each other at predetermined intervals, whereby the pair of conductive rods may form a gap. As used herein, the term "gap" or "gap" means a gap between two moving or fixed parts, for example, the gap means a gap between a pair of conductive rods that are spaced apart from each other.

The material constituting the conductive rod 110 is not particularly limited as long as it is a rod-shaped object through which electricity can flow. For example, the conductive rod 110 may include palladium, platinum, gold, silver, copper, One or more catalytic metals selected from the group consisting of ruthenium, rhodium, iridium, rhenium and osmium, preferably the conductive rod may be a palladium rod, but is not limited thereto.

The power supply unit 120 is a part for applying a voltage to each of the conductive rods. In one example, the voltage applied to the conductive rods from the power supply unit may be 0.5 to 20 kV, and the amount of current may be 0.005 to 100 mA. However, the present invention is not limited thereto. For example, the power supply unit 120 may constantly adjust the voltage applied to the pair of conductive rods 110. Accordingly, by quantitatively supplying the metal nanoparticles, the metal nanoparticles can be manufactured with excellent supply stability.

In one example, the power supply unit 120 may include an electrical circuit for applying a high voltage to the conductive rod 110. The electrical circuit has a constant high voltage source structure consisting of a high voltage source (HV), an external capacitor (C), and a resistor (R), and enables a high-speed switching of a plurality of resistors, a plurality of capacitors, and a circuit current. By using the size of the metal nanoparticles can be adjusted.

Although not shown, the nanopattern forming apparatus of the present application may include a gas supply device such as a carrier air supply system and a flow meter such as a mass flow controller (MFC). In addition, inert gas or nitrogen may be quantitatively supplied at intervals between the pair of conductive rods by the gas supply device and the flow meter.

When a high voltage is applied to the conductive rod 110, the catalyst metal is vaporized and condensed by spark discharge, and then granulated through the spray metal according to the inert gas or nitrogen flow flowing through the gap between the rods. Can be delivered. For example, when a voltage is applied to the conductive rod 110 of the discharge part 100, the catalyst metal is vaporized at an interval between the pair of conductive rods 110 of the discharge part 100, and an inert gas or The metal vaporized by moving along a carrier gas such as nitrogen is condensed as it goes out of the gap, thereby forming catalytic metal nanoparticles.

In addition, the gap between the conductive rods 110, for example, the electrode gap (the shortest distance between the conductive rods 110), the smaller the distance, the lower the ignition demand voltage, and the larger the distance is. High voltage is required. In addition, narrower electrode gaps reduce the voltage required to generate sparks, but shorter sparks can deliver ignition minimum energy to the mixer and cause misfire, so it is necessary to set the appropriate distance by experiment. In one example, the gap between the electrodes may be 0.1 to 10 mm, but is not limited thereto.

The particle diameter of the catalytic metal nanoparticles generated from the discharge part 100 may be controlled in a wide range from several nanometers to several hundred nanometers according to the flow rate or flow rate of the inert gas or nitrogen. For example, when the flow rate or flow rate of the supplied inert gas or nitrogen is increased, as the concentration of the catalyst metal nanoparticles is reduced, the aggregation phenomenon between the particles is also reduced, and through this process, the size of the catalyst metal nanoparticles is reduced. Can be reduced. In addition, the particle diameter, shape, and density of the catalytic metal nanoparticles may include spark generation conditions such as an applied voltage, a frequency, a current, a resistance, and a capacitance value; Type and flow rate of the inert gas; Or by the shape of the spark electrode or the like. The particle diameter of the catalytic metal nanoparticles generated from the conductive rod is not particularly limited, and for example, the particle diameter of the catalytic metal nanoparticles may be 5 nm to 20 nm, and may also be 7 nm to 18 nm and 9 nm to. 16 nm or 11 nm to 14 nm, but is not limited thereto.

Argon (Ar), neon (Ne) or helium (He) may be exemplified as the inert gas, but is not limited thereto.

The spray unit 200 is a portion for attaching the metal nanoparticles to the water-soluble salt molecules by spraying a solution containing a water-soluble salt to the catalyst metal nanoparticles. For example, injecting a water-soluble salt to the catalyst metal nanoparticles generated in the conductive rod 110, a collision occurs between the catalyst metal nanoparticles and the water-soluble salts, the catalyst metal nanoparticles are attached to the surface of the water-soluble salt molecules Can be. Accordingly, the water-soluble salt in the state where the catalyst metal nanoparticles are attached can be attached onto the substrate described later.

As the water-soluble salt, salts having a crystal form of a polygonal form can be used. For example, the water-soluble salt may be sodium nitrate (NaNO ₃ ), potassium nitrate (KNO ₃ ), or ammonium nitrate (NH ₄ NO ₃ ). , Magnesium nitrate (MG (NO ₃ ) ₂ ), barium nitrate (Ba (NO ₃ ) ₂ ), calcium nitrate (Ca (NO ₃ ) ₂ ), lead nitrate (Pb (NO ₃ ) ₂ ), silver nitrate (AgNO ₃ ) , Sodium chloride (NaCl), potassium chloride (KCl), ammonium chloride (NH ₄ Cl), magnesium chloride (MgCl ₂ ), barium chloride (BaCl ₂ ), calcium chloride (CaCl ₂ ), sodium sulfide (Na ₂ S), potassium sulfide ( K ₂ S), ammonium sulfide ((NH ₄ ) ₂ S), magnesium sulfide (MgS), barium sulfide (BaS), calcium sulfide (CaS), sodium sulfate (Na ₂ SO ₄ ), potassium sulfate (K ₂ SO ₄ ) , Consisting of ammonium sulfate ((NH ₄ ) ₂ SO ₄ ), magnesium sulfate (MgSO ₄ ), sodium carbonate (Na ₂ CO ₃ ), potassium carbonate (K ₂ CO ₃ ) and ammonium carbonate ((NH ₄ ) ₂ CO ₃ ) It may include one or more selected from the group.

When the water-soluble salt molecules to which the catalytic metal nanoparticles are attached are attached on the substrate as described above, the catalytic metal nanoparticles may act as a catalyst in the electroless plating, which will be described later, and thus, the target metal after the plating is completed. Environmentally friendly patterning is possible without a separate cleaning or etching operation to remove other by-products, and due to the polygonal crystal structure of the water-soluble salt, an aspherical pattern can be easily formed without a separate template.

In one example, as shown in FIG. 1, an exemplary nano pattern forming apparatus of the present application may further include an attachment part 300.

In the attachment part 300, a water-soluble salt to which catalytic metal nanoparticles are attached may be attached onto the substrate 310. The substrate 310 may be silicon, glass, metal, acrylic resin, polycarbonate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), polyamide (PA), polytetrafluoroethylene At least one selected from the group consisting of (PTFE), polyurethane (PU), polyarylate (PA), polyethersulfone (PES), fluorene polyester (FPE), cyclo olefin resin, epoxy resin and ester resin can do.

In another example, although not shown, an exemplary nano pattern forming apparatus of the present application may further include a pattern forming unit.

In the pattern forming unit, as the substrate on which the water-soluble salt with the catalyst metal nanoparticles is attached is dried, the water-soluble salts are removed, thereby forming a pattern of the catalyst metal nanoparticles on the substrate. In this case, since the aforementioned water-soluble salts have a crystal structure of polygonal form, the catalytic metal nanoparticles are patterned on the substrate in the form of the crystal structure of the water-soluble salt, for example, the catalyst metal nanoparticles of polygonal form on the substrate. Particle patterns can be formed.

For example, the substrate to which the water-soluble salt is attached may be dried at 50 ° C. to 350 ° C., whereby the adhesion between the metal nanoparticles and the substrate may be increased, and the water-soluble salt may be removed.

The cross-sectional shape of the pattern of the catalytic metal nanoparticles formed on the substrate may be determined according to the crystal structure of the water-soluble salt. For example, the cross-section of the pattern of the catalytic metal nanoparticles formed on the substrate may be triangular, square, pentagonal and It may be one or more polygons selected from the group consisting of hexagons, but is not limited thereto.

In one embodiment, although not shown, the exemplary nano pattern forming apparatus of the present application may further include a reactor.

In the reactor, a solution containing a target metal for final patterning is stored. In one example, the reactor may be provided to impregnate a substrate in which a pattern of catalytic metal nanoparticles is formed in the solution. For example, the substrate in which the pattern of the catalytic metal nanoparticles is formed may be impregnated in a reaction tank in which a solution including the target metal is stored, and the target metal may be patterned through an electroless plating method. In one example, the electroless plating method may be performed by impregnating the substrate on which the pattern of the catalytic metal nanoparticles is formed at room temperature in a reaction tank containing a solution containing the target metal for 1 to 60 minutes, preferably. Preferably, the substrate may be formed by impregnating the substrate on which the pattern of the catalytic metal nanoparticles is formed at room temperature for 5 to 20 minutes in a reaction vessel in which a solution containing the target metal is stored. As such, by impregnating the substrate in which the pattern of the catalytic metal nanoparticles is formed in the reaction tank in which the solution containing the target metal is stored, the metal layer is formed along the pattern of the catalytic metal nanoparticles in which the solution containing the target metal is formed on the substrate. As a result, it is possible to form a non-spherical nano-pattern in a low cost, short time and environmentally friendly without the use of a template.

In the present specification, the "target metal" means, for example, the target metal finally patterned when the patterning process is performed by an electroless plating method using the catalyst metal nanoparticles as a catalyst. In addition, in the present specification, "Electroless Deposition (ELD)" is a self-catalytic catalyst of the primary target metal layer after the primary target metal layer is formed on the substrate by the reducing force of the catalytic metal particles without external electrical energy. In general, it means a method of producing the target metal layer on the surface of the substrate through the continuous reduction.

Examples of the target metal include gold (Au), silver (Ag), platinum (Pt), copper (Cu), chromium (Cr), nickel (Ni), iron (Fe), cobalt (Co), and scandium ( Sc, Yttrium (Y), Hafnium (Hf), Rutherfordium (Rf), Titanium (Ti), Zirconium (Zr), Tantalum (Ta), Dubnium (Db), Vanadium (V), Niobium (Nb), Tungsten (W), Borborium (Sg), Chromium (Cr), Molybdenum (Mo), Rhenium (Re), Bolium (Bh), Manganese (Mn), Technetium (Tc), Osmium (Os), Hassium (Hs) ), Iron (Fe), Ruthenium (Ru), Iridium (Ir), Mitenerium (Mt), Rhodium (Rh), Darmium (Ds), Palladium (Pd), Rentenium (Rg), Mercury (Hg) ), At least one selected from the group consisting of copernium (Cn), zinc (Zn) and cadmium (Cd).

The present application also relates to a method of forming a nanopattern. The method of forming a nanopattern of the present application may be performed by the nanopattern forming apparatus described above, and thus, descriptions overlapping with those described in the nanopattern forming apparatus will be omitted. According to an exemplary method of forming a nanopattern of the present application, by attaching catalytic metal nanoparticles to a water-soluble salt, it is possible to form a nanopattern in a polygonal form at low cost, short time, and environmentally friendly without using a template on a substrate.

Exemplary methods of forming nanopatterns of the present application include generating catalytic metal nanoparticles and attaching the catalytic metal nanoparticles to a water soluble salt.

The generating of the catalytic metal nanoparticles may be performed in the discharge part of the pattern forming apparatus described above, and in one example, by applying a voltage to each of the pair of conductive rods, the catalyst metal may be formed from the pair of conductive rods. Generating nanoparticles. The pair of conductive rods are spaced apart from each other at predetermined intervals, and thus the pair of conductive rods may form a gap. In the step of generating the metal nanoparticles, when a high voltage is applied to the conductive rod, the catalyst metal is vaporized and condensed by spark discharge, which is then granulated, and then inert gas or nitrogen flowing through the gap between the rods. According to the flow can be delivered to the spray. For example, when a voltage is applied to the conductive rod of the discharge portion, the catalyst metal is vaporized at an interval between the pair of conductive rods of the discharge portion, and moves along the carrier gas such as an inert gas or nitrogen, thereby allowing the opportunity metal. As it deviates from the gap, it condenses, thereby forming catalytic metal nanoparticles.

The material constituting the conductive rod is not particularly limited as long as it is a rod or rod-shaped object through which electricity can flow. For example, the conductive rod may be palladium, platinum, gold, silver, copper, ruthenium, rhodium, It may comprise one or more catalytic metals selected from the group consisting of iridium, rhenium and osmium.

Attaching the catalytic metal nanoparticles to the water-soluble salt may be performed in the spraying unit of the pattern forming apparatus described above, and in one example, spraying a solution containing a water-soluble salt to the generated metal nanoparticles. Include. For example, injecting a solution containing a water-soluble salt into the catalyst metal nanoparticles generated from the conductive rod generates a diffusion force or electrostatic attraction between the catalyst metal nanoparticles and the water-soluble salt molecules, thereby providing a catalyst on the surface of the water-soluble salt molecules. Metal nanoparticles may be attached. Accordingly, the water-soluble salt in the state where the catalyst metal nanoparticles are attached can be attached onto the substrate described later.

As the water-soluble salt, a salt having a crystal form of a polygonal form may be used, and the water-soluble salt may be sodium nitrate (NaNO ₃ ), potassium nitrate (KNO ₃ ), ammonium nitrate (NH ₄ NO ₃ ), magnesium nitrate ( MG (NO ₃ ) ₂ ), barium nitrate (Ba (NO ₃ ) ₂ ), calcium nitrate (Ca (NO ₃ ) ₂ ), lead nitrate (Pb (NO ₃ ) ₂ ), silver nitrate (AgNO ₃ ), sodium chloride (NaCl ), Potassium chloride (KCl), ammonium chloride (NH ₄ Cl), magnesium chloride (MgCl ₂ ), barium chloride (BaCl ₂ ), calcium chloride (CaCl ₂ ), sodium sulfide (Na ₂ S), potassium sulfide (K ₂ S) , Ammonium sulfide ((NH ₄ ) ₂ S), magnesium sulfide (MgS), barium sulfide (BaS), calcium sulfide (CaS), sodium sulfate (Na ₂ SO ₄ ), potassium sulfate (K ₂ SO ₄ ), ammonium sulfate ( (NH ₄ ) ₂ SO ₄ ), magnesium sulfate (MgSO ₄ ), sodium carbonate (Na ₂ CO ₃ ), potassium carbonate (K ₂ CO ₃ ) and ammonium carbonate ((NH ₄ ) ₂ CO ₃ ) It may contain the above.

In one example, an exemplary method of forming a nanopattern of the present application may further include attaching a water-soluble salt to which the catalytic metal nanoparticles are attached on a substrate. Examples of the substrate include silicon, glass, metal, acrylic resin, polycarbonate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), polyamide (PA), and polytetrafluoroethylene (PTFE). ), Polyurethane (PU), polyarylate (PA), polyethersulfone (PES), fluorene polyester (FPE), cyclo olefin resin, epoxy resin and ester resin can be used at least one selected from the group .

In another example, an exemplary method of forming a nanopattern of the present application further comprises drying the substrate to which the water-soluble salt is attached and removing the water-soluble salt to form a pattern of catalytic metal nanoparticles on the substrate. It may include. The forming of the pattern may be performed in the pattern forming unit of the pattern forming apparatus described above.

For example, the substrate to which the water-soluble salt is attached may be dried at 50 ° C. to 350 ° C., thereby increasing adhesion between the catalytic metal nanoparticles and the substrate and removing the water-soluble salt.

The cross-sectional shape of the pattern of the catalyst metal nanoparticles formed on the substrate may vary depending on the crystal structure of the water-soluble salt. For example, the cross-section of the pattern of the metal nanoparticles formed on the substrate may be triangular, square, pentagonal and hexagonal. One or more polygons selected from the group consisting of, but is not limited thereto.

In another example, an exemplary method of forming a nanopattern of the present application may further include reacting a target metal on a substrate on which a pattern of metal nanoparticles is formed. The target metal may be attached in the reaction tank of the pattern forming apparatus described above. For example, the substrate in which the pattern of the catalytic metal nanoparticles is formed may be impregnated in a reaction tank in which a solution including the target metal is stored, and the target metal may be patterned through an electroless plating method.

According to the nanopattern forming apparatus of the present application, after attaching a water-soluble salt molecule having catalytic metal nanoparticles attached onto a substrate, a target metal pattern is formed, thereby enabling a low cost, short time and environmentally friendly polygonal form without using a template on the substrate. Can form a nano-pattern.

1 is a view schematically showing a nano-pattern forming apparatus according to an embodiment of the present application.

2 is a diagram schematically showing a method of forming a nanopattern of the present application.

3 and 4 are low and high magnification scanning electron microscopy images of the nanopatterns formed in the examples.

5 is a low magnification and high magnification scanning electron microscope image of the nanopattern formed in the comparative example.

6 is a transmission electron microscope image of water soluble salt-palladium hybrid particles electrostatically attached onto a silicon substrate in an embodiment.

FIG. 7 is an element map image of water soluble salt-palladium hybrid particles electrostatically attached onto a silicon substrate in an embodiment. FIG.

FIG. 8 is a transmission electron microscope image of ethylene glycol-palladium hybrid particles electrostatically attached onto a silicon substrate in a comparative example.

<Description of the code>

100: discharge part

110: conductive rod

120: power supply

200: spraying unit

300: attachment

Hereinafter, the above-described contents will be described in more detail with reference to Examples and Comparative Examples, but the scope of the present application is not limited by the contents given below.

Example  One

Preparation of Solutions Containing Water Soluble Salts

A sodium chloride solution was prepared by mixing 0.001 part by weight of sodium chloride (NaCl) as a water-soluble salt, relative to 100 parts by weight of water as a solvent.

Formation of Nano Patterns

Using the nano-pattern forming apparatus of FIG. 1, nano-patterns were formed according to the same process as in FIG. 2.

As shown in FIG. 1, a pair of conductive rods including a palladium (Pd) metal having a particle diameter of 3 mm and a length of 100 mm are spaced apart from each other to form a gap in a chamber through which nitrogen gas flows, and a power supply part included in a discharge part. Is electrically connected to each of the conductive rods, and voltage is applied to the pair of conductive rods and spark discharged to obtain a total number of 4.76 × 10 ⁷ particles / cm ³ of palladium-catalyzed metal nanoparticles having an average particle diameter of 12.0 nm. Total number concentration and geometric standard deviation of 1.54. At this time, when a voltage was applied to the conductive rod, the voltage was quantitatively controlled to 4 kV through the power supply unit. The shape and crystallinity of the nanoparticles were measured using a transmission electron microscope (TEM, JEM-3010, JEOL, Japan).

The palladium metal nanoparticles generated in the conductive rods were moved to the spraying unit along with nitrogen gas, and in the spraying unit, the water-soluble water prepared above was produced to the metal nanoparticles flowing along the nitrogen gas through a Collison Atomizer. A solution containing a salt was sprayed at a spray amount of 3 L / min to attach metal nanoparticles to the water-soluble salt to prepare a hybrid droplet. The solvent-derived droplets were injected into an Aerosol Charge Neutralizer (4530, HCT, Korea) and injected into a Nanodifferential Mobility Analyzer (Nanodifferential Mobility Analyzer, NDMA, 3085, TSI, US). The nanoparticle separator was operated at a fixed input voltage by an electrostatic classifier and classified into particles having equivalent electrical mobility. The droplets were injected into an electrostatic collector.

The hybrid droplets moved along the nitrogen gas into the deposition chamber and deposited on the silicon substrate.

The hybrid droplets deposited on the silicon substrate were dried at 200 ° C. for 5 minutes to increase adhesion of the catalytic metal nanoparticles on the substrate, and the water-soluble salts were removed to form a square palladium nanopattern on the substrate. .

The rectangular nano-pattern-formed substrate was impregnated with a solution containing 0.1 parts by weight of silver (Ag) as a target metal with respect to 100 parts by weight of distilled water as a solvent and impregnated at room temperature for 10 minutes. The silver pattern was grown along the palladium catalyst nanopattern formed on the substrate through sea plating.

The height of the silver pattern was 80 ± 5 nm, and the lengths of the horizontal and vertical were measured at 180 nm and 190 nm, respectively.

Example 2

Except for using potassium chloride (KCl) as a water-soluble salt, the same method as in Example 1 was 35 nm in height, and the horizontal and vertical length of 40 nm and 60 nm, respectively, to form a rectangular nano-pattern.

Comparative example

A ring-shaped nanopattern having a diameter of 90 nm was formed in the same manner as in Example 1, except that an ethylene glycol (EG) solution was sprayed instead of a solution containing a water-soluble salt.

Claims (16)

1. A pair of conductive rods and one pair of conductive rods spaced apart from each other to form a gap, and including at least one catalytic metal selected from the group consisting of palladium, platinum, gold, silver, copper, ruthenium, rhodium, iridium, rhenium, and osmium A discharge unit including a power supply unit for applying a voltage to the conductive rods of the respective circuits; And

   And a spraying unit spraying a water-soluble salt to the catalyst metal nanoparticles generated from the conductive rod to attach the catalyst metal nanoparticles to the water-soluble salt.
2. The method of claim 1, wherein the water-soluble salt is sodium nitrate (NaNO ₃ ), potassium nitrate (KNO ₃ ), ammonium nitrate (NH ₄ NO ₃ ), magnesium nitrate (Mg (NO ₃ ) ₂ ), barium nitrate (Ba (NO ₃₎ ) ₂ ), calcium nitrate (Ca (NO ₃ ) ₂ ), lead nitrate (Pb (NO ₃ ) ₂ ), silver nitrate (AgNO ₃ ), sodium chloride (NaCl), potassium chloride (KCl), ammonium chloride (NH ₄ Cl), Magnesium chloride (MgCl ₂ ), barium chloride (BaCl ₂ ), calcium chloride (CaCl ₂ ), sodium sulfide (Na ₂ S), potassium sulfide (K ₂ S), ammonium sulfide ((NH ₄ ) ₂ S), magnesium sulfide ( MgS), barium sulfide (BaS), calcium sulfide (CaS), sodium sulfate (Na ₂ SO ₄ ), potassium sulfate (K ₂ SO ₄ ), ammonium sulfate ((NH ₄ ) ₂ SO ₄ ), magnesium sulfate (MgSO ₄ ) At least one selected from the group consisting of sodium carbonate (Na ₂ CO ₃ ), potassium carbonate (K ₂ CO ₃ ), and ammonium carbonate ((NH ₄ ) ₂ CO ₃ ).
3. The nano pattern forming apparatus of claim 1, further comprising an attachment portion to which the water-soluble salt to which the catalytic metal nanoparticles are attached is attached.
4. The method of claim 3, wherein the water-soluble salt to which the catalytic metal nanoparticles are attached is attached onto a substrate, the substrate comprising silicon, glass, metal, acrylic resin, polycarbonate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN). ), Polyimide (PI), polyamide (PA), polytetrafluoroethylene (PTFE), polyurethane (PU), polyarylate (PA), polyethersulfone (PES), fluorene polyester (FPE) At least one selected from the group consisting of cycloolefin resins, epoxy resins and ester resins.
5. The nanopattern forming apparatus of claim 3, further comprising a pattern forming unit configured to dry the substrate to which the water-soluble salt is attached and to remove the water-soluble salt to form a pattern of catalytic metal nanoparticles on the substrate.
6. The apparatus of claim 5, wherein the cross section of the pattern of catalytic metal nanoparticles is one or more polygons selected from the group consisting of triangles, squares, pentagons, and hexagons.
7. The nanopattern forming apparatus according to claim 5, further comprising a reaction tank in which a solution containing a target metal is stored, and the substrate having the pattern of catalytic metal nanoparticles formed therein is impregnated with the solution.
8. The method of claim 7, wherein the target metal is gold (Au), silver (Ag), platinum (Pt), copper (Cu), chromium (Cr), nickel (Ni), iron (Fe), cobalt (Co), Scandium (Sc), Yttrium (Y), Hafnium (Hf), Rutherfordium (Rf), Titanium (Ti), Zirconium (Zr), Tantalum (Ta), Dubnium (Db), Vanadium (V), Niobium (Nb) ), Tungsten (W), chevron (Sg), chromium (Cr), molybdenum (Mo), rhenium (Re), borium (Bh), manganese (Mn), technetium (Tc), osmium (Os), and calcium (Hs), Iron (Fe), Ruthenium (Ru), Iridium (Ir), Mitenerium (Mt), Rhodium (Rh), Darmstadtium (Ds), Palladium (Pd), Rentenium (Rg), Mercury (Hg), copernium (Cn), zinc (Zn) and cadmium (Cd) at least one selected from the group consisting of nano pattern forming apparatus.
9. Spaced apart from each other to form a gap, and a voltage is applied to a pair of conductive rods each including one or more catalytic metals selected from the group consisting of palladium, platinum, gold, silver, copper, ruthenium, rhodium, iridium, rhenium, and osmium. Applying to generate catalytic metal nanoparticles from the pair of conductive rods; And

   Method of forming a nano-pattern comprising the step of attaching the catalyst metal nanoparticles to the water-soluble salts by spraying a solution containing a water-soluble salt to the generated catalyst metal nanoparticles.
10. 10. The method of claim 9, wherein the water soluble salt is sodium nitrate (NaNO ₃ ), potassium nitrate (KNO ₃ ), ammonium nitrate (NH ₄ NO ₃ ), magnesium nitrate (MG (NO ₃ ) ₂ ), barium nitrate (Ba (NO ₃₎ ) ₂ ), calcium nitrate (Ca (NO ₃ ) ₂ ), lead nitrate (Pb (NO ₃ ) ₂ ), silver nitrate (AgNO ₃ ), sodium chloride (NaCl), potassium chloride (KCl), ammonium chloride (NH ₄ Cl), Magnesium chloride (MgCl ₂ ), barium chloride (BaCl ₂ ), calcium chloride (CaCl ₂ ), sodium sulfide (Na ₂ S), potassium sulfide (K ₂ S), ammonium sulfide ((NH ₄ ) ₂ S), magnesium sulfide ( MgS), barium sulfide (BaS), calcium sulfide (CaS), sodium sulfate (Na ₂ SO ₄ ), potassium sulfate (K ₂ SO ₄ ), ammonium sulfate ((NH ₄ ) ₂ SO ₄ ), magnesium sulfate (MgSO ₄ ) , Sodium carbonate (Na ₂ CO ₃ ), potassium carbonate (K ₂ CO ₃ ) and ammonium carbonate ((NH ₄ ) ₂ CO ₃ ) A method of forming a nano-pattern selected from the group consisting of.
11. 10. The method of claim 9, further comprising attaching a water soluble salt having catalytic metal nanoparticles attached thereto on the substrate.
12. The method of claim 11, wherein the substrate is silicon, glass, metal, acrylic resin, polycarbonate, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide (PI), polyamide (PA), polytetrafluoro At least one selected from the group consisting of polyethylene (PTFE), polyurethane (PU), polyarylate (PA), polyethersulfone (PES), fluorene polyester (FPE), cycloolefin resin, epoxy resin and ester resin Method of forming a nano pattern comprising a.
13. The method of claim 11, further comprising drying the substrate to which the water-soluble salt is attached and removing the water-soluble salt to form a pattern of catalytic metal nanoparticles on the substrate.
14. The method of claim 13, wherein the cross section of the pattern of catalytic metal nanoparticles is one or more polygons selected from the group consisting of triangles, squares, pentagons, and hexagons.
15. The method of claim 13, further comprising reacting a target metal on a substrate on which a pattern of catalytic metal nanoparticles is formed, wherein the reacting is performed by an electroless plating method using the catalytic metal nanoparticles as a catalyst metal. Method of forming nanopatterns.
16. The method of claim 15, wherein the target metal is gold (Au), silver (Ag), platinum (Pt), copper (Cu), chromium (Cr), nickel (Ni), iron (Fe), cobalt (Co), Scandium (Sc), Yttrium (Y), Hafnium (Hf), Rutherfordium (Rf), Titanium (Ti), Zirconium (Zr), Tantalum (Ta), Dubnium (Db), Vanadium (V), Niobium (Nb) ), Tungsten (W), chevron (Sg), chromium (Cr), molybdenum (Mo), rhenium (Re), borium (Bh), manganese (Mn), technetium (Tc), osmium (Os), and calcium (Hs), iron (Fe), ruthenium (Ru), iridium (Ir), mitenerium (Mt), rhodium (Rh), darmstadtium (Ds), palladium (Pd), rentgenium (Rg), mercury (Hg), copernium (Cn), zinc (Zn) and cadmium (Cd) of at least one selected from the group consisting of nano-pattern forming method.

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