WO2017200136A1 - Device and method for analyzing concentration of chemical solution - Google Patents

Abstract

The present invention relates to a device and a method for analyzing the concentration of a chemical solution, the device and the method collecting, in real time from a processing device, the concentration of a specific component within a corresponding solution composition during a process of using a chemical solution, thereby enabling the concentration to be quickly and accurately measured by using an RGB color sensor.

Description

[Correction according to Rule 26. 21.07.2016] 장치 Chemical solution concentration analysis device and method

The present invention relates to an apparatus and method for analyzing a concentration of a chemical solution, and more particularly, a chemical that can quickly and accurately measure the concentration of a specific component in a corresponding solution composition in real time from a process apparatus in a process using a chemical solution. A device and method for analyzing the concentration of a solution.

The etching liquid of the liquid crystal substrate manufacturing process must be strictly controlled in composition and concentration in accordance with the high precision of the pattern. In the analysis of concentration of specific components of chemical solution such as etching solution, it is common for a user to collect chemicals directly and analyze them by wet analysis in an analysis room or using an analytical instrument. It was impossible to do.

For example, as a conventional method of analyzing the phosphoric acid concentration, ascorbic acid reduction method is used, for example, by diluting a sample pretreated in a laboratory, mixing the ascorbic acid with molybdate, and developing a spectrophotometer capable of absorbance measurement ( It is known to analyze the concentration of phosphoric acid by measuring the absorbance using an analytical device such as spectrophotometer.

In addition, as a method for analyzing the copper concentration, for example, chelate titration, the sample should be diluted, and a predetermined amount of ammonium ammonium chloride buffer, methanol, and pan indicator should be mixed and titrated with EDTA standard solution to calculate the copper concentration. The method of wet analysis has a limitation in inaccuracy.

As a method for analyzing the concentration of iron, for example, by using atomic absorption spectrophotometry, an ionized sample is taken in an appropriate amount of beaker, boiled with nitric acid to produce a precipitate, the precipitate is dissolved in hydrochloric acid of a predetermined concentration, and the solution is filtered through a filter paper, The absorbance should be measured using an absorbance analyzer to analyze the iron concentration.

As described above, in order to accurately analyze the concentration of a specific component in the chemical solution, an expensive analytical instrument is necessary, the analysis method is complicated, and the analysis takes a considerable time, so it is inline in various processes using the chemical solution. It was difficult to analyze and manage the concentration of necessary ingredients in real time.

The present invention is to solve the above problems, one object of the present invention is a chemical solution that can quickly and accurately measure the concentration of a specific component in the chemical solution in real time in various processes using the chemical solution It is to provide an apparatus and method for analyzing the concentration of.

Another object of the present invention is to take a portion of the chemical solution as a sample, and to automatically and accurately control the process of transferring, supplying, and mixing the reagents required for pretreatment such as color development, and measuring from the sample using an RGB color sensor. It is to provide an apparatus and method for analyzing the concentration of a chemical solution that can analyze the concentration of a specific component in real time using the obtained RGB value.

One aspect of the present invention for achieving the above object is

A storage unit for storing the added solution; Transfer unit for transferring the sample to be analyzed to the mixing unit; Mixing unit for mixing the sample to be analyzed and the addition solution; A measuring unit for measuring the concentration of specific components from the mixed solution; A control unit which receives a measurement value of a specific component from the measuring unit and controls a transfer unit; And a user operation unit for displaying an operation signal input by the user and a concentration measurement value.

The measuring unit includes an RGB color sensor for measuring the concentration of the sample, and measures the RGB color sensor measured value of the deionized water and the RGB color sensor measured value of the known sample, converts it into a numerical value, and sends it to the controller. The control unit controls the RGB color sensor measured values I (R0), I (G0), I (B0) and the RGB color sensor measured values I (Rx), I (Gx) and I ( After receiving Bx), calculate the R ', G', B 'value corrected for the deionized water color for the known concentration of the component whose concentration is to be measured by the following formula, and then linearize the data in linear form. Select one of the RGB as the calibration curve to configure the reference data, and convert the measured values of RGB color sensor I (Rx), I (Gx) and I (Bx) into numerical values. The concentration value corresponding to the reference data is compared with the reference data on the calibration curve. It relates to a chemical solution of a concentration analysis device being configured to calculate a concentration of the substance.

[Equation]

Another aspect of the present invention includes measuring RGB color sensor measurements I (R0), I (G0), I (B0) of deionized water;

Adding and adding an additive solution containing a coloring reagent to a plurality of samples having a known concentration, and measuring and measuring RGB color sensor measurements I (Rx), I (Gx) and I (Bx);

Calculating RGB color sensor measurements R ', G', B 'of a sample of known concentration, corrected for deionized water color using the following formula:

[Equation]

Linear data is calculated by calculating the relationship between the color change according to the concentration change of the sample using the R ', G', and B 'values measured using an RGB color sensor for a sample of known concentration corrected for the deionized water color. Doing;

 Select one of R ', G', and B 'linear data to compose the reference data, and measure the RGB color sensor measured values I (Rx), I (Gx), and I (Bx) of the unknown target substance in the sample. And a step of calculating a concentration value corresponding to the reference data as a concentration of the measurement target material, by comparing the converted value with reference data on the calibration curve.

      According to the present invention, it is possible to analyze the concentration by measuring the RGB color sensor measurement value by using the RGB color sensor of the measuring unit in real time extracted the chemical solution, it is possible to configure a relatively low-cost device, Concentrations can be measured inline quickly and accurately in real time, making it easier to analyze and manage the concentrations of the necessary components of the process chemical.

In addition, according to the present invention, the concentration can be measured for all process chemicals capable of expressing color by changing color or developing color according to a change in concentration.

According to the method of the present invention, each of the RGB color sensor measured values I (R0), I (G0), I (B0) measured by adding deionized water to the measuring unit, and I (Rx), By measuring both I (Gx) and I (Bx) values, the measurement of the light source such as the measurement value is changed by contamination of the light emitting part and the light receiving sensor part, change of light quantity, change of current and voltage, and deterioration thereof. Even if the change occurs due to the change of condition, the concentration can be measured and analyzed accurately without any error in the concentration measurement.

1 is a schematic block diagram of a chemical solution concentration analysis apparatus according to an embodiment of the present invention.

Figure 2 is a detailed block diagram of the measuring unit of the chemical solution concentration analysis apparatus according to the present invention.

3 is a calibration curve graph showing the change of R ', B', G 'value according to the change in phosphoric acid concentration calculated in Example 1 of the present invention.

4 is a calibration curve graph showing the change of R ', B', G 'value according to the change in the concentration of copper in Example 2 of the present invention.

FIG. 5 is a calibration curve graph illustrating changes in R ', B', and G 'values according to iron ion concentration changes in Example 3 of the present invention.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

In the present invention, "± RGB color sensor measured value" ± means a value obtained by quantifying the energy spectral intensity of light received after passing through a sample in the analysis vessel.

“° Deionized RGB Color Sensor Measurement Values I (R ₀ ), I (G ₀ ), I (B ₀ )” ± indicate the color of deionized water using the RGB color sensor. It means the electric signal value.

1 is a schematic block diagram of a chemical solution concentration analysis apparatus according to an embodiment of the present invention, Figure 2 is a detailed block diagram of a measuring unit of the chemical solution concentration analysis apparatus according to the present invention.

1 and 2, the chemical solution concentration analysis device of the present invention storage unit 500 for storing the added solution; Transfer unit 400 for transferring the sample to be analyzed to the mixing unit; Mixing unit 600 for mixing the sample to be analyzed and the addition solution; A measuring unit 700 for measuring the concentration of specific components from the mixed solution; A control unit 300 for receiving a measurement value of a specific component from the measuring unit and controlling a transfer unit; And a user manipulation unit 200 for displaying an operation signal input by the user and a concentration measurement value.

The measuring unit 700 includes an RGB color sensor 720 for measuring the concentration of the sample, and measures the RGB color sensor measurement value of the deionized water and the RGB color sensor measurement value of the sample having a known density. Converts and transmits the RGB color sensor measured values I (R0), I (G0), I (B0) of the deionized water and the RGB color sensor measured values I (Rx), I of the sample whose density is known. After receiving (Gx), I (Bx) and calculating the corrected R ', G', and B 'values for the deionized water color for the known concentration of the component whose concentration is to be measured by the following formula, 1 Linear data is formed in the form of a difference function, and one of the RGB is selected as a calibration curve to configure the reference data, and the RGB color sensor measured values I (Rx), I (Gx), and I (Bx) of the unknown target substance in the sample are The concentration value corresponding to the reference data is compared with the reference data on the calibration curve. It is configured to calculate the concentration of the material to be measured.

[Equation]

The calibration curve can be selected as the calibration curve with the greatest slope among RGB.

The concentration analyzer according to the present invention can be operated alone, but may be used as a concentration analyzer that can be installed in addition to a process apparatus using a chemical solution. The concentration distribution device of the present invention may further include a means for transferring the chemical solution directly from the processing device.

As shown in FIG. 2, when the mixed solution is transferred from the mixing unit 600 to the analysis container 740, the light emitted from the light emitting part 730 passes through the mixed solution in the analysis container 740. The light is received by the photodiodes 750 equipped with the respective red and green blue filters included in the RGB color sensor 720, and current is generated in the respective photodiodes 750. At this time, the generated current varies depending on the amount of light received through the photodiode 750 through the analysis vessel, where the amount of light reaching the photodiode is changed by the absorbance amount of the sample in the analysis vessel. . In addition, since the absorbance depends on the concentration factor of the mixed solution in the analytical container, a difference occurs in the amount of light reaching the photodiode according to the concentration of the process solution. The concentration of the component can be calculated. That is, I (R), I (G), and I (B) values of samples of known concentrations can be known by using the difference in absorbance according to the concentration of the solution. ), The concentration of the sample can be calculated by measuring the I (G) and I (B) values.

As shown in FIG. 2, the light emitting unit 730, the analysis container 740, and the RGB color sensor 720 of the measuring unit 700 may be protected from interference of external light by the housing 710.

The measuring unit 700 includes a housing 710, a light emitting unit 730, an RGB color sensor 720, and an analysis container 740 in the housing. The light of the light emitting unit 730 may be configured to be independently irradiated with the tricolor light of RGB mixed with white light, or may be composed of a halogen lamp, tungsten lamp, or irradiated in the form of white light using a yellow phosphor to the blue LED. have.

The front part of the light emitting part 730 and the front part of the RGB color sensor 720 for receiving light are composed of transparent glass 770 so that the light from the light emitting part 730 can reach the RGB color sensor 720. do. The transparent glass 770 may be any material as long as the material has good light transmittance and chemical resistance other than glass. For example, quartz, sapphire, or the like may be used.

The RGB color sensor 720 and the light emitter 730 are preferably disposed at positions facing each other with respect to the analysis container 740, but are not limited thereto. The RGB color sensor includes photodiodes 750 including respective red, green, and blue filters, and a converter 760 for converting a current signal generated from each photodiode into a form of computed spectral intensity. It is composed. The intensity of the R wavelength band (hereinafter referred to as I (R)), the intensity of the G wavelength band (hereinafter referred to as I (G)), and the intensity of the B wavelength band (hereinafter referred to as I (B)) are controlled by the controller 300. Is sent. The control unit 300 calculates the concentration of the process chemicals using the values of I (R), I (G), and I (B) transmitted from the RGB color sensor 720 of the measuring unit 700 to control the user operation unit 200. Mark on.

The color sensor 720 separates the light received through the analysis vessel into three wavelengths of R, G, and B, and converts the intensity of each wavelength band (by color) into an electrical signal by the converter 760. . Converter 760 may generally be configured as an analog to digital converter, and converts the intensity of received light into a digital electrical signal.

Calculate the concentration of the component to be measured in the sample using the RGB color sensor measured values I (R), I (G) and I (B), but respond to changes in values due to deterioration of light sources and other components. In the present invention, I (R), I (G), I (B) values measured by adding deionized water to the measuring unit (hereinafter referred to as I (R0), I (G0), I (B0) respectively) and Measure the values of I (R), I (G), and I (B) (hereinafter referred to as I (Rx), I (Gx), and I (Bx), respectively) of the developed sample. It adopts the method to get ', B' value.

[Equation]

When the absorbance value of the substance to be measured is measured using this method, each of the I (R0), I (G0) and I (B0) values measured by adding deionized water to the measuring unit and the chemical solution to be measured By measuring the values of I (Rx), I (Gx) and I (Bx) together, a constant value of R ', B', and G 'can be obtained even if a change occurs due to a change in the condition of the light source. As a result, a concentration measurement error does not occur due to a change in the condition of the light source, and thus more accurate concentration measurement may be performed.

The chemical solution concentration analyzer of the present invention may include a washing function including washing chemicals for washing the mixing unit and the measuring unit. The mixed solution of which the measurement is completed in the measuring unit 700 is drained, and a washing function of the mixing unit 600 and the measuring unit 700 may be added to measure the next concentration.

As shown in FIG. 1, the process chemical is performed in a state accommodated in the solution storage tank 100 of the process apparatus, and circulated by the circulation pump 110. The circulating pipe of the process chemical circulated by the circulation pump 110 and the transfer unit 400 are connected to each other, the process chemical is circulated from the process unit to the transfer unit 400 of the analysis apparatus of the present invention, and thus the transfer unit ( In 400, process chemicals requiring analysis can be collected in real time.

In addition, the transfer unit 400 receives a solution taking control signal from the control unit 300 and at the same time serves to quantify the process chemicals in the circulation pipe of the process chemicals to supply to the mixing unit 600.

Here, the transfer unit 400 receives a chemical supply control signal for analyzing the process concentration from the control unit 300 and at the same time receives the corresponding solution from the storage unit 500 composed of a plurality of storage vessels. It consists of a plurality of drug quantitative supply device for supplying 600).

On the other hand, as a quantitative means and supply, the transfer means applied to the transfer unit 400, including all devices having a quantitative pump, syringe pump, tubing pump, gear pump and other quantitative sampling and supply, transfer function, and supply accordingly Rhodo can also use chemically resistant tubing and tubes, including Teflon, silicone, and Viton.

The storage unit 500 may store various additives such as reagents required for pretreatment such as deionized water and color development, and may be configured to store a plurality of additive solutions according to a target sample.

In the mixing unit 600, the collected process chemicals and the additive solution transferred from the storage unit 500 are mixed, and the mixed liquid causes a difference in RGB values according to the concentration of the component to be analyzed in the process solution.

The mixed liquid of the mixing unit 600 is moved to the measuring unit 700 through the valve.

The valve can be any valve operated by electric signals or air pressure, such as solenoid valve or electric valve. The control of the valve may be configured to be operable at a user manipulation unit.

The control unit 300 is based on the I (R), I (G), I (B) value received from the measuring unit 700, the corresponding solution as an unknown sample in contrast to the calibration curve prepared based on the sample of the known concentration in advance Calculate the concentration of and display it on the user control panel.

Another aspect of the invention relates to a method for analyzing the concentration of a chemical solution. According to the method of the present invention, first, the RGB color sensor measured values I (R0), I (G0), and I (B0) of deionized water are measured, and then, an additional solution containing a color developing reagent in a plurality of samples having known concentrations. After mixing and coloring by adding, the RGB color sensor measured values I (Rx), I (Gx) and I (Bx) are measured. Subsequently, the RGB color sensor measured values R ', G', and B 'of the sample whose density is corrected for the deionized water color are calculated using the following formula.

[Equation]

Linear data is calculated by calculating the relationship between the color change according to the concentration change of the sample using the R ', G', and B 'values measured using an RGB color sensor for a sample of known concentration corrected for the deionized water color. do. Select one of R ', G', and B 'linear data to configure the reference data, and measure the RGB color sensor measured values I (Rx), I (Gx), and I (Bx) of the unknown target substance in the sample. The concentration value corresponding to the reference data is calculated as the concentration of the measurement target substance by comparing the converted value with the reference data on the calibration curve. When the intensity of the substance to be measured in the chemical solution is measured by the color sensor, the measured value may be converted into numerical values to calculate the concentration in comparison with the reference data. Data derived by chemical solutions with known deionized water and concentration can be generated as linear data in the form of linear functions. Here, the calibration curve may select a value having the largest slope among RGB as the calibration curve.

In the method of the present invention, the deionized water is added to the measuring unit, and the measured value and the RGB color sensor measured value of the colored sample having known concentrations are measured and corrected by a formula, so as to change the condition of the light source such as deterioration of the component. Even if a change occurs, constant R ', G', and B 'values can be obtained. As a result, a concentration measurement error does not occur due to a change in the condition of the light source, so that the concentration can be measured more accurately.

Hereinafter, the present invention will be described in more detail with reference to Examples. However, these examples are for illustrative purposes only, and the present invention is not limited to the following examples.

Example 1 Measurement of Phosphoric Acid Concentration

Phosphoric acid concentrations in process chemicals containing phosphoric acid were measured using the methods and apparatus of the present invention. First, the deionized water of the storage unit is transferred to the mixing unit from the transfer unit, and then transferred to the measuring unit again to measure and drain I (R0), I (G0), and I (B0) of the deionized water. The measured deionized water I (R0), I (G0), and I (B0) are transmitted to the control unit. The transfer unit transfers the process chemicals from the circulation pipe and the additive solution from the storage unit to the mixing unit, respectively. Here, the addition solution is deionized water, ascorbic acid and molybdate, and deionized water is transferred in an amount of 1500 times dilution of the process chemical, and ascorbic acid and molybdate are transferred at a ratio of 1: 5. Drug delivery was performed using a syringe pump. In the mixing part, the process chemical and the added solution are mixed and developed for 10 minutes, and at this time, air is injected to generate bubbles to allow sufficient mixing. After this process, the phosphoric acid-containing solution is colored in blue, and the mixed solution which has been colored is transferred to the measuring unit, and the values of I (Rx), I (Gx) and I (Bx) are measured and transmitted to the controller. The control unit uses Equation 1 as the R ', B', and G 'values from the transmitted values of I (R0), I (G0), I (B0), and I (Rx), I (Gx), and I (Bx). Calculate

[Equation 1]

R ', G' according to the phosphoric acid concentration in Table 1 and FIG. The result of calculating B 'value is shown. As shown in Figure 3, R ', G'. Both B ′ values increased linearly with phosphoric acid concentrations, yielding linear data in the form of one-dimensional functions.

Phosphoric Acid Concentration (g / L)	R '	B '	G '
0	0.000	0.000	0.000
30	0.200	0.166	0.115
60	0.390	0.320	0.222
90	0.574	0.472	0.323

In this example, the R 'value having the largest slope was used for analysis of phosphoric acid concentration of an unknown sample. From the analysis of samples with known concentrations, the calibration curve was composed of linear data in the form of linear functions by expressing phosphate concentration (g / L) = 156.84816 * R'-0.06428. In the formula, Y 'may be defined as a standard conversion value, and x' may be defined as a concentration value corresponding to the standard conversion value. From the basic data thus obtained, the R 'value of the unknown concentration sample was measured to obtain a phosphoric acid concentration calculation result. Pearson's momentum correlation coefficient of the above equation was 0.99982, indicating linearity.

Example 2 Measurement of Copper Concentration in Copper-Containing Aqueous Solution

The copper concentration of the micro etching solution containing copper ions was measured using the method and apparatus of the present invention. First, the deionized water from the storage unit is transferred to the mixing unit, and then transferred to the measuring unit again to measure and drain the RGB color sensor measured values I (R0), I (G0), and I (B0) of the deionized water. The measured values of R (0), I (G0), I (B0) and I (Rx), I (Gx) and I (Bx) are transmitted to the controller. The transfer unit again transfers from the circulation pipe the transfer unit transfers 100 ml of the process chemical from the circulation pipe to the mixing unit. No dilution was done, and the transfer was done using a syringe pump. The chemicals of the mixing unit are transferred to the measuring unit again, and the measuring unit measures I (Rx), I (Gx) and I (Bx) RGB values and transmits them to the control unit. The control unit uses the transmitted I (R0), I (G0), I (B0) values, and I (Rx), I (Gx), and I (Bx) values according to Equation 1 to R ', B', and G '. Calculate the value.

Table 1 and Figure 3 shows the results of measuring the R ', B', G 'value according to the copper concentration. The values of R ', B', and G 'all changed very linearly with the copper concentration. For the measurement of the samples with unknown concentration, the R' value with the highest slope was used to analyze the copper concentration of the unknown concentration solution. Was used.

Copper concentration (g / L)	R '	B '	G '
0	0.000	0.000	0.000
One	0.055	0.02	0.007
3	0.148	0.043	0.015
5	0.227	0.058	0.025
7	0.300	0.072	0.032
9	0.369	0.087	0.040
12	0.455	0.103	0.047

Example 3. Iron Concentration Measurement

Iron ions (Fe ^{+ 3)} iron ion concentration of the ferric chloride etching solution that contains a was measured by using the method and apparatus of the present invention. First, the deionized water from the storage unit is transferred to the mixing unit, and then transferred to the measuring unit to measure and drain the RGB color sensor measured values I (R0), I (G0), and I (B0) of the deionized water. The RGB color sensor measured values I (R0), I (G0) and I (B0) of the measured deionized water are transmitted to the control unit. The transfer unit transfers the process chemicals from the circulation pipe and the additive solution from the storage unit to the mixing unit, respectively. The addition solution here is deionized water and is transferred in an amount that dilutes the process chemical 1000 times. The process chemical and deionized water are mixed and diluted in the mixing section, and the diluted solution is transferred to a measuring unit to measure the values and the values of I (Rx), I (Gx) and I (Bx). The measured values and the values of I (Rx), I (Gx) and I (Bx) are transmitted to the controller. The controller calculates R ', B', and G 'values using the transmitted values of I (R0), I (G0), I (B0), and I (Rx), I (Gx), and I (Bx). .

Table 1 and Figure 3 shows the results of calculating the R ', B', G 'value according to the iron ion concentration. The values of R ', B', and G 'were all linear according to the iron ion concentration, and were used for analyzing the iron ion concentration of the unknown concentration using the G' value with the largest slope.

Iron Ion Concentration (g / L)	R '	B '	G '
10	0.019	0.047	0.098
15	0.034	0.07	0.186
20	0.050	0.088	0.265
25	0.072	0.109	0.340
30	0.090	0.130	0.410

According to the method and apparatus of the present invention, I (R0), I (G0), and I (B0) values measured by adding deionized water to the measuring unit, and I (Rx) and I (Gx) of the chemical solution to be measured, respectively. ), By measuring the I (Bx) value together, the change according to the change of the condition of the light source whose measurement value is changed by contamination, light quantity change, current and voltage change, and deterioration of the light emitting part and the light receiving sensor part in the measuring unit. Can be measured and analyzed accurately without error in concentration measurement.

The embodiments of the present invention described above are merely illustrative of the technical idea of the present invention, and the protection scope of the present invention should be interpreted by the following claims. In addition, one of ordinary skill in the art to which the present invention pertains will be capable of various modifications and variations without departing from the essential characteristics of the present invention, all technical ideas within the scope equivalent to the present invention of the present invention It should be interpreted as being included in the scope of rights.

Claims (12)

1. A storage unit for storing the added solution; Transfer unit for transferring the sample to be analyzed to the mixing unit; Mixing unit for mixing the sample to be analyzed and the addition solution; A measuring unit for measuring the concentration of specific components from the mixed solution; A control unit which receives a measurement value of a specific component from the measuring unit and controls a transfer unit; And a user operation unit for displaying an operation signal input by the user and a concentration measurement value.

   The measuring unit includes an RGB color sensor for measuring the concentration of the sample, and measures the RGB color sensor measured value of the deionized water and the RGB color sensor measured value of the known sample, converts it into a numerical value, and sends it to the controller. The control unit controls the RGB color sensor measured values I (R0), I (G0), I (B0) and the RGB color sensor measured values I (Rx), I (Gx) and I ( After receiving Bx), calculate the R ', G', B 'value corrected for the deionized water color for the known concentration of the component whose concentration is to be measured by the following formula, and then linearize the data in linear form. Select one of the RGB as the calibration curve to configure the reference data, and convert the measured values of RGB color sensor I (Rx), I (Gx) and I (Bx) into numerical values. The concentration value corresponding to the reference data is compared with the reference data on the calibration curve. Chemical solution concentration analysis device being configured to calculate a concentration of the substance.

   [Equation]

   
2. The chemical solution concentration analysis apparatus of claim 1, wherein the controller is configured to select a value having the largest slope among RGB as the calibration curve.
3. According to claim 1, wherein the measuring unit is a housing, an analysis vessel for receiving a sample to be analyzed, the light emitting unit consisting of a light source for irradiating light to the sample; And an RGB color sensor comprising a light emitting diode which receives light irradiated to the sample part and separates the light into RGB elements, and a converter which converts the received light into an electric signal.
4. The chemical solution concentration analysis apparatus of claim 3, wherein the light source comprises a red light source, a blue light source, and a green light source.
5. 4. The chemical solution concentration analyzer of claim 3, wherein the light source is a halogen lamp or a tungsten lamp.
6. The method of claim 3, wherein the light source is a chemical solution concentration analysis device, characterized in that the light source to implement the white light using a phosphor on the blue LED.
7. The apparatus of claim 1, wherein the apparatus further comprises means for washing the mixing section and the measuring unit.
8. The apparatus of claim 1, wherein the transfer unit comprises a metering pump, a syringe pump, a tubing pump, or a gear pump for metering.
9. The chemical solution concentration analysis apparatus of claim 1, wherein the storage unit is configured to store a plurality of additive solutions according to a sample to be measured.
10. The apparatus of claim 1, wherein the apparatus further comprises means for transferring the chemical solution directly from the process apparatus.
11. Measuring RGB color sensor measurements I (R0), I (G0), I (B0) of deionized water;

    Adding and adding an additive solution containing a coloring reagent to a plurality of samples having known concentrations, and mixing and developing the RGB color sensor measurement values I (Rx), I (Gx), and I (Bx);

    Calculating RGB color sensor measurements R ', G', B 'of a sample of known concentration, corrected for deionized water color using the following formula:

    [Equation]

    

    Linear data is calculated by calculating the relationship between the color change according to the concentration change of the sample using the R ', G', and B 'values measured using an RGB color sensor for a sample of known concentration corrected for the deionized water color. Doing;

     Selecting a calibration curve having a largest slope among R ', G', and B 'linear data; And

    The concentration value corresponding to the reference data by comparing the RGB color sensor measured values I (Rx), I (Gx), and I (Bx) of the unknown substance to be measured in the sample with the reference data on the calibration curve. Method of analyzing the concentration of the chemical solution comprising the step of calculating the concentration of the measurement target material.
12. The method of claim 11, wherein the calibration curve selects a value having the largest slope among RGB as the calibration curve.

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