WO2017198369A1 - Procédé et élément micromécanique - Google Patents

Procédé et élément micromécanique Download PDF

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Publication number
WO2017198369A1
WO2017198369A1 PCT/EP2017/056824 EP2017056824W WO2017198369A1 WO 2017198369 A1 WO2017198369 A1 WO 2017198369A1 EP 2017056824 W EP2017056824 W EP 2017056824W WO 2017198369 A1 WO2017198369 A1 WO 2017198369A1
Authority
WO
WIPO (PCT)
Prior art keywords
method step
amplitude
drive mass
time
micromechanical component
Prior art date
Application number
PCT/EP2017/056824
Other languages
German (de)
English (en)
Inventor
Guangzhao Zhang
Francesco Diazzi
Ruslan KHALILYULIN
Andrea Visconti
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2017198369A1 publication Critical patent/WO2017198369A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Definitions

  • the invention is based on a method according to the preamble of claim 1.
  • US 2014/0305207 A1 and US 2014/0266474 A1 disclose such methods.
  • a drive mass of the sensor is offset from a rest position to a steady motion or vibration during the starting process of the sensor. In this case, then the steady movement of the drive mass must be controlled so that the drive mass moves in the sense of the steady movement in the further operation of the sensor.
  • the known from the prior art sensors for controlling the movement of the drive mass usually comprise a drive control unit within an ASIC (application-specific integrated circuit or application-specific integrated circuit), wherein the drive control unit measures the position of the drive mass and based on this information Voltsignale generated with certain phase and amplitude to move the drive mass from the rest position and to maintain a movement of the drive mass upright.
  • ASIC application-specific integrated circuit or application-specific integrated circuit
  • US 2014/0305207 A1 discloses a possible drive circuit
  • US 2014/0266474 A1 discloses a possibility to reduce the start time of a sensor or to reduce the time required to move the drive mass of the sensor from the rest position into a steady movement. put.
  • the object is achieved by determining a time end of the first method step and a time start of the second method step by an amplitude controller of the micromechanical component. This advantageously makes it possible for the transition from the first method step to the second method step to be based on information received from the surroundings of the micromechanical component by the amplitude controller and / or information from the technological process within the micromechanical component received from the amplitude regulator by the amplitude controller is controllable.
  • first driver used in the first method step to be specifically configured for the start phase of the drive mass, and for the second driver used in the second method step to be targeted to the remaining operating time or specifically to a steady state
  • Operating mode of the micromechanical device is configurable.
  • the drive mass is advantageously driven for the start phase and in the second method step, the drive mass for the steady-state operating mode of the micromechanical device is advantageously driven.
  • the first driver for the start phase and the second driver for the retracted operating mode can each be specifically configured energy-efficient.
  • the time of the starting phase of the drive mass can be reduced in comparison with the prior art and, at the same time, the power consumed for the steady-state operating mode can be kept relatively low compared to the prior art.
  • the time end of the first method step and the time start of the second method step fall on the time at which a predetermined amplitude of movement is achieved by the temporally increasing movement amplitude. This advantageously makes it possible to regulate the transition from the first method step to the second method step on the basis of the movement amplitude of the drive mass.
  • the first driver provides an essentially constant first voltage amplitude for driving the drive mass. This is advantageously allows the drive mass from The rest position can be placed in a vibration with temporally increasing movement amplitude by means of a temporally constant first voltage amplitude and substantially unregulated voltage amplitude.
  • an at least partially substantially time-constant second voltage amplitude for driving the drive mass is provided by the second driver such that the second voltage amplitude is less than the first voltage amplitude.
  • the starting phase or the first method step can be significantly shortened and at the same time, in contrast to prior art high-voltage methods, the steady-state operating mode is energy efficient with particularly low-cost low-voltage circuits manufactured using silicon technology processes - operated within the ASICs.
  • Another object of the present invention is a micromechanical device for driving a drive mass of the micromechanical device, wherein the micromechanical device is configured such that - in a first process step, the drive mass is driven by a first driver of the micromechanical device such that the drive mass of a Rest position is placed in a vibration with temporally increasing movement amplitude, wherein - In a second method step, the drive mass is driven by a second driver of the micromechanical device such that the drive mass is placed in a vibration with substantially constant time motion amplitude, wherein the micromechanical device is configured such that a time end of the first process step and a temporal beginning of the second process step is determined by an amplitude controller of the micromechanical device.
  • the micromechanical component is configured such that the end of time of the first method step and the beginning of the second method step coincide with the time at which a predetermined amplitude of movement is reached by the time-increasing amplitude of movement.
  • the micromechanical component is configured such that in the first method step, the first driver provides an essentially constant first voltage amplitude for driving the drive mass.
  • the micromechanical component is configured such that in the second method step, the second driver provides an at least partially substantially time-constant second voltage amplitude for driving the drive mass such that the second voltage amplitude is less than the first voltage amplitude is.
  • Figure 1 Figure 1 and Figure 3 show in schematic representations exemplary embodiments of the present invention.
  • FIG. 1, FIG. 2, and FIG. 3 show schematic representations of exemplary embodiments of the present invention.
  • FIG. 1 shows a method according to the invention for driving a drive mass 1 of a micromechanical component 3, the method comprising a first method step 101 and a second method step 102. According to the invention, it is provided that
  • the drive mass 1 is driven by a first driver 5 of the micromechanical device 3 such that the drive mass 1 is offset from a rest position into a vibration with temporally increasing amplitude of movement.
  • the invention provides that
  • the drive mass 1 is driven by a second driver 7 of the micromechanical device 3 such that the drive mass 1 is placed in a vibration with a substantially constant time motion amplitude.
  • an end of time of the first method step 101 and a start of the second method step 102 by an amplitude regulator 9 of the micromechanical component 3 is determined.
  • the temporal end of the first method step 101 and the temporal beginning of the second method step 102 preferably fall on the point in time at which a predetermined movement amplitude 25 is reached by the time-increasing movement amplitude.
  • the first driver 5 preferably provides an essentially constant first voltage amplitude for driving the drive mass 1.
  • an at least partially substantially time-constant second voltage amplitude for driving the drive mass 1 is provided by the second driver 7 such that the second voltage amplitude is less than the first voltage amplitude.
  • FIG. 2 shows by way of example a micromechanical component 3 according to the invention, the micromechanical component 3 comprising a drive mass 1, a first driver 5, a second driver 7 and an amplitude regulator 9. The micromechanical component 3 shown by way of example in FIG.
  • the gyroscope 1 1 comprises, in addition to the drive mass 1, a first capacitor 13 and a second capacitor 15.
  • the micromechanical component 3 comprises by way of example a read circuit 17, preferably a capacitance-voltage converter, a phase regulator 19 and a mixing unit 21.
  • the micromechanical component 3 for driving the drive mass 1 is configured such that in the first method step 101 the drive mass 1 is driven by the first driver 5 of the micromechanical component 3 such that the drive mass 1 changes from a rest position into a vibration is offset with time-increasing amplitude of movement.
  • the micromechanical component 3 is configured such that in the second method step 102 Drive mass 1 is driven by the second driver 7 of the micromechanical device 3 such that the drive mass 1 is placed in a vibration with a movement time substantially constant in time.
  • FIG. 2 shows micromechanical component 3 shown by way of example in such a way that a temporal end of the first method step 101 and a time start of the second method step 102 are determined by the amplitude regulator 9 of the micromechanical component 3.
  • the micromechanical component 3 is configured such that the time end of the first method step 101 and the beginning of the second method step 102 coincide with the time at which a predetermined movement amplitude 25 is reached by the chronologically increasing movement amplitude.
  • the micromechanical component 3 is configured, for example, such that in the first method step 101, the first driver 5 provides a substantially constant first voltage amplitude for driving the drive mass 1.
  • the first driver 5 is preferably designed as a high-voltage amplifier (HV booster).
  • HV booster high-voltage amplifier
  • the first driver 5 is designed such that the essentially constant first voltage amplitude is greater than a predetermined voltage amplitude 27.
  • the predetermined voltage amplitude 27 is preferably the voltage amplitude of a voltage source of the micromechanical component 3.
  • the micromechanical component 3 is also configured such that in the second method step 102, an at least partially substantially time constant second voltage amplitude for driving the drive mass 1 is provided by the second driver 7 such that the second voltage amplitude is less than the first Voltage amplitude is.
  • the second driver 7 is preferably designed as an energy-efficient low-voltage amplifier (LV driver).
  • LV driver energy-efficient low-voltage amplifier
  • the second Driver 7 is formed such that the at least partially substantially temporally constant second voltage amplitude is equal to zero or greater than zero and equal to the predetermined voltage amplitude 27 or less than the predetermined voltage amplitude 27.
  • the position of the drive mass 1 is measured by the reading circuit 17 exemplified in FIG. 2 and position information is generated.
  • a potential signal is preferably transmitted from the second capacitor 15 due to a deflection of the drive mass 1 to the read circuit.
  • the position information is transmitted from the read circuit 17 to the amplitude controller 9 and to the phase controller 19 and processed by the amplitude controller 9 and the phase controller 19.
  • the mixing unit 21 is controlled by the phase controller 19 such that the mixing unit 21 is a phase-controlled waveform or a waveform with a predetermined phase, preferably a rectangular waveform or a sinusoidal waveform generated, and preferably with a
  • the amplification voltage applied to the mixing unit 23 is amplified in such a way that an energy transfer from the mixing unit 21 or from the first driver 5 or from the second driver 7 to the drive mass via the first capacitor 13 is optimized.
  • the second voltage amplitude which is at least partially substantially constant in time, is preferably selected and provided for driving the drive mass 1, preferably on the basis of the processed position information and the predetermined movement amplitude 25.
  • the at least partially substantially time constant second voltage amplitude is provided such that the at least partially substantially time constant second voltage amplitude of the amplitude controller 9 is temporally varied such that the energy transfer from the mixing unit 21 and the second driver 7 at the drive mass 1 via the first capacitor 13 from the amplitude controller.
  • 9 is adjustable and a steady operating state of the micromechanical device 3 in the vibration with the predetermined amplitude of movement 25 is made possible.
  • the first driver 5 is preferably selected by the amplitude controller 9 temporally before the first method step 101 or during a start operation of the gyroscope 1 1.
  • the micromechanical component 1 is configured such that in the first method step 101, the drive mass 1 is driven by the first driver 5 with maximum drive energy.
  • the micromechanical component 3 is preferably designed such that the drive mass 1 is driven in the first method step 101 by means of an open timing chain.
  • the processed position information or a temporally increasing movement amplitude of the drive mass derived from the position information from the amplitude controller 9 is preferably compared with the predetermined movement amplitude 25 by the amplitude controller 9 during the first method step 101.
  • the predetermined movement amplitude 25 is a movement amplitude of the steady-state drive mass 1.
  • the second driver 7 is preferably used by the amplitude controller 9 as the voltage source for the drive Drive mass 1 selected.
  • the micromechanical device 1 is configured such that in the second method step 102, the drive mass is driven by the second driver 7 with a precise voltage control.
  • the micromechanical component 3 is preferably designed such that the drive mass 1 is driven in the second method step 102 by means of a closed control circuit.
  • FIG. 3 shows an exemplary time profile of the movement amplitude 29 of the drive mass 1 and the amplifier voltage 23 applied to the mixing unit. In this case, too, the temporal courses of the first method step 101 and the second method step 102 as well as the predetermined movement amplitude 25 and the predetermined voltage amplitude 27 are.
  • the first period of time (T1) comprises the first method step (101) and the second method step (102).
  • the first method step (101) and the second method step (102) are preferably carried out, preferably at least partially, during the first time duration (T1).
  • neither the first method step (101) nor the second method step (102) is preferably carried out during the second time duration.
  • the first time duration (T1) during which a measurement is preferably carried out is defined by the startup time or by the time duration of the first method step (101) of the micromechanical component (3) or of the sensor.
  • the time duration of the first method step (101) and thus the startup time of the micromechanical component (1) are reduced.
  • a further power reduction or energy saving is advantageously possible.

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  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un procédé d'entraînement d'une masse d'entraînement d'un élément micromécanique. Dans une première étape de procédé, la masse d'entraînement est entraînée par un premier élément d'entraînement de l'élément micromécanique de telle sorte que la masse d'entraînement est mise en mouvement à partir d'une position de repos de façon à effectuer une oscillation à amplitude de mouvement croissante au cours du temps. Dans une deuxième étape de procédé, la masse d'entraînement est entraînée par un deuxième élément d'entraînement de l'élément micromécanique de telle sorte que la masse d'entraînement est mise en mouvement suivant une oscillation à amplitude de mouvement sensiblement constante au cours du temps. La fin de la première étape de procédé et le début de la deuxième étape de procédé sont déterminés par un régulateur d'amplitude de l'élément micromécanique.
PCT/EP2017/056824 2016-05-18 2017-03-22 Procédé et élément micromécanique WO2017198369A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016208504.2 2016-05-18
DE102016208504.2A DE102016208504A1 (de) 2016-05-18 2016-05-18 Verfahren und mikromechanisches Bauelement

Publications (1)

Publication Number Publication Date
WO2017198369A1 true WO2017198369A1 (fr) 2017-11-23

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DE (1) DE102016208504A1 (fr)
WO (1) WO2017198369A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140266474A1 (en) 2013-03-15 2014-09-18 Freescale Semiconductor, Inc. System and method for improved mems oscillator startup
US20140305207A1 (en) 2013-04-10 2014-10-16 Em Microelectronic-Marin Sa Electronic drive circuit for a mems type resonator device and method for actuating the same
US20150345946A1 (en) * 2014-04-24 2015-12-03 Freescale Semiconductor, Inc. Drive circuitry and method for a vibration gyroscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140266474A1 (en) 2013-03-15 2014-09-18 Freescale Semiconductor, Inc. System and method for improved mems oscillator startup
US20140305207A1 (en) 2013-04-10 2014-10-16 Em Microelectronic-Marin Sa Electronic drive circuit for a mems type resonator device and method for actuating the same
US20150345946A1 (en) * 2014-04-24 2015-12-03 Freescale Semiconductor, Inc. Drive circuitry and method for a vibration gyroscope

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