WO2017181912A1 - Lead-free piezoelectric ceramic material and lead-free piezoelectric component - Google Patents

Lead-free piezoelectric ceramic material and lead-free piezoelectric component Download PDF

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WO2017181912A1
WO2017181912A1 PCT/CN2017/080593 CN2017080593W WO2017181912A1 WO 2017181912 A1 WO2017181912 A1 WO 2017181912A1 CN 2017080593 W CN2017080593 W CN 2017080593W WO 2017181912 A1 WO2017181912 A1 WO 2017181912A1
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piezoelectric ceramic
lead
ceramic material
free piezoelectric
component
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PCT/CN2017/080593
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French (fr)
Chinese (zh)
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李�权
聂泳忠
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西人马(厦门)科技有限公司
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    • C04B35/01Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/46Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
    • C04B35/462Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
    • C04B35/475Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on bismuth titanates
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    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
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    • H10N30/8561Bismuth-based oxides
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    • C04B2235/3231Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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Definitions

  • the present disclosure relates to electronic ceramic materials, and more particularly to tantalum layered lead-free piezoelectric ceramic materials and piezoelectric elements.
  • piezoelectric ceramic materials that can be used in high temperature (greater than 400 ° C) environment at home and abroad mainly use lead-free piezoelectric ceramics with bismuth layer structure.
  • the piezoelectric activity of conventional lead-free piezoelectric materials with bismuth layer structure is related to temperature. The drift is large and is not suitable for high temperature working environments.
  • a lead-free piezoelectric ceramic material including a base material which is a bismuth layer structure compound, and the base material is doped with at least one of a component lanthanum and a component lanthanum Kind.
  • a lead-free piezoelectric element including a lead-free piezoelectric ceramic material, wherein the lead-free piezoelectric ceramic material includes a base material, the base material is a bismuth layer structure compound, and the base body The material is doped with at least one of component hydrazine and component hydrazine.
  • the bismuth layered lead-free piezoelectric ceramic material and the lead-free piezoelectric element according to the present disclosure have good piezoelectric properties under high temperature conditions, and thus are suitable for use in a high temperature environment.
  • FIG. 1 is a schematic structural view showing a tantalum layered lead-free piezoelectric ceramic material according to some exemplary embodiments of the present disclosure
  • FIG. 2 is a flow chart illustrating a method of preparing a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure
  • FIG. 3 is a more detailed flowchart showing a method of preparing a bismuth layered lead-free piezoelectric ceramic material according to further exemplary embodiments of the present disclosure
  • FIG. 4 is a graph showing an aging rate as a composite doping content of a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure
  • FIG. 5 is a graph showing sensitivity drift-temperature characteristics of a tantalum layered lead-free piezoelectric ceramic material before and after doping substitution modification, according to some exemplary embodiments of the present disclosure.
  • the lead-free piezoelectric ceramic material according to the present disclosure includes a base material that is a bismuth layered structural compound, and the base material is doped with at least one of a component lanthanum and a component lanthanum.
  • the base material is doped and modified by at least one of the component ⁇ and the component ,, and thus has good piezoelectric properties under high temperature conditions, thereby being suitable for Use in high temperature environment.
  • the piezoelectric ceramic material includes a base material 100 which is a bismuth layer structure including a perovskite structure layer 101 and a ruthenium oxide layer 102, wherein the perovskite structure layer 101 The silicon oxide layer 102 is staggered.
  • the perovskite-type structural layer 101 and the tantalum oxide layer 102 are staggered along the c-axis direction of the base material 100, wherein between each two layers of the silicon oxide layer 102 to There is one layer of perovskite structure.
  • the piezoelectric activity of the piezoelectric ceramic material increases, and the structure tends to be single crystal, and the Curie point Tc High, the lower the aging rate, the higher the resistivity.
  • the base material may be a bismuth layer structure having the general formula (Bi 2 O 2 ) 2+ (A m-1 B m O 3m+1 ) 2- , wherein (Bi 2 O 2 2+ represents a ruthenium oxide layer, (A m- 1 B m O 3m+1 ) 2- represents a perovskite-type structural layer, and wherein m represents between every two layers (Bi 2 O 2 ) 2+ ( A m-1 B m O 3m+1 ) The number of 2- .
  • the base material 100 may be Na 0.5 Bi 4.5 Ti 4 O 15 , which has the general formula (Bi 2 O 2 ) 2+ (Na 0.5 Bi 2.5 Ti 4 O 13 ) 2- , Perovskite-type structural layer (Na 0.5 Bi 2.5 Ti 4 O 13 ) 2- and bismuth oxide layer (Bi 2 O 2 ) 2+ are staggered along the c-axis direction, and there are 4 layers of calcium between each two layers of bismuth oxide layer. Titanium ore layer.
  • the base material 100 may be Na 0.5 Bi 3.5 Ti 3 O 12 , which has the formula (Bi 2 O 2 ) 2+ (Na 0.5 Bi 1.5 Ti 3 O 10 ) 2- , and the structure is It is formed by staggering the perovskite structure layer (Na 0.5 Bi 1.5 Ti 3 O 10 ) 2- and the bismuth oxide layer (Bi 2 O 2 ) 2+ along the c-axis direction, and there are 3 layers between each two layers of ⁇ oxygen layer. Perovskite layer.
  • the base material 100 may be doped by at least one of the outer doping component ⁇ Nb and the component ⁇ Ce.
  • the component ⁇ Nb may be derived from yttrium oxide Nb 2 O 5 and the doping amount of the component ⁇ Nb is converted to Nb 2 O 5 .
  • the component ⁇ Ce may be derived from cerium oxide CeO 2 and the composition ⁇ Ce doping amount is converted in terms of CeO 2 . It should be understood that although Nb, Ce is exemplified by Nb 2 O 5 , CeO 2 in the present disclosure, it is not limited to this specific oxide, and other ruthenium compounds and ruthenium compounds may be employed.
  • the base material 100 may be doped with ruthenium oxide or ruthenium oxide alone, or the base material 100 may be doped with both ruthenium oxide and ruthenium oxide.
  • the doping amount of cerium oxide may be not more than 7 mol%, and the doping amount of cerium oxide may be not more than 2 wt%. It should be understood that mol% is a mole percent and wt% is a weight percent, both relative to the matrix material.
  • the piezoelectric ceramic material in the case where the base material 100 is doped with yttrium oxide Nb 2 O 5 alone, the piezoelectric ceramic material can be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 , where 0 ⁇ x ⁇ 7 . Further, in the case where the base material 100 is doped with CeO 2 alone, the piezoelectric ceramic material may be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 + y wt% CeO 2 , where 0 ⁇ y ⁇ 2.
  • the piezoelectric ceramic material may be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 + x mol% Nb 2 O 5 + y wt % CeO 2 , Where 0 ⁇ x ⁇ 7;0 ⁇ y ⁇ 2, the composite doping of Nb 2 O 5 and CeO 2 can make the piezoelectric constant d 33 of the matrix Na 0.5 Bi 4.5 Ti 4 O 15 reach 35 pC/N, piezoelectric activity Significant improvements have been made.
  • the base material 100 may also be substituted with at least one of the component ⁇ Sr and the component ⁇ Ba, and the ⁇ Sr may be taken from strontium carbonate SrCO 3 , which may be taken from Barium carbonate BaCO 3 .
  • a portion of Na + in the base material 100 may be substituted with at least one of Sr 2+ and Ba 2+ . That is, part of the Na ions may be substituted by Sr 2+ , or part of the Na ions may be substituted by Ba 2+ , or part of the partial Na ions may be substituted by Sr 2+ and the other part by Ba 2+ .
  • Sr, Ba is exemplified by SrCO 3 and BaCO 3 in the present disclosure, the present disclosure is not limited thereto, and other ruthenium compounds and ruthenium compounds may be employed.
  • the piezoelectric ceramic material can be expressed as (Na 0.5- z Sr z ) Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 +y wt%CeO 2 , where 0 ⁇ x ⁇ 7, 0 ⁇ y ⁇ 2, 0 ⁇ z ⁇ 0.5).
  • the piezoelectric ceramic material can be expressed as (Na 0.5- w Ba w )Bi 4.5 Ti 4 O 15 +x mol%Nb 2 O 5 +y wt%CeO 2 , wherein 0 ⁇ x ⁇ 7, 0 ⁇ y ⁇ 2, 0 ⁇ w ⁇ 0.5).
  • the piezoelectric ceramic material in the case where the base material 100 is doped with both Nb 2 O 5 and CeO 2 , part of the partial Na + is replaced by Sr 2+ , and the other part is substituted by Ba 2+ ,
  • the piezoelectric ceramic material can be expressed as (Na 0.5-zw Sr z Ba w )Bi 4.5 Ti 4 O 15 +x mol%Nb 2 O 5 +y wt%CeO 2 (0 ⁇ x ⁇ 7,0 ⁇ y ⁇ 2, 0 ⁇ z ⁇ 0.5, 0 ⁇ w ⁇ 0.5, 0 ⁇ z + w ⁇ 0.5)
  • the composite doped and substituted matrix material Na 0.5 Bi 4.5 Ti 4 O 15 piezoelectric constant d 33 value can reach 28pC /N, then the piezoelectric ceramic material is aged at 550 ° C for 48 h, and then subjected to high temperature and low temperature -55 ° C ⁇ 120 ° C cycle aging treatment,
  • outer doping in the present disclosure means that although the doping element enters into the matrix material, it does not occupy the lattice position of any existing element; and “substitution doping” refers to not only the doping ion but also the dopant ion. Will enter the matrix material and will also occupy the lattice location of the particular element (eg Na + ).
  • “External doping” and “substitute doping” are two doping methods for doping modification of the lead-free piezoelectric ceramic material in the present disclosure, and the compound participating in the doping modification is not limited to the doping described in the examples. Miscellaneous methods.
  • those skilled in the art may also substitute the piezoelectric ceramic compound for doping modification using at least one of cerium oxide or cerium oxide.
  • the art The skilled person can externally dope the piezoelectric ceramic material with at least one of cesium carbonate or cesium carbonate. Doping modification of piezoelectric ceramic materials by Nb, Ce, Sr and Ba elements is not limited to a specific doping method.
  • the base material may also be other bismuth layered lead-free piezoelectric ceramic material, such as Na 0.5 Bi 3.5 Ti 3 O 12 , doped outside the base material Na 0.5 Bi 3.5 Ti 3 O 12 .
  • the piezoelectric ceramic material can be expressed as (Na 0.5 -z- w Sr z Ba w )Bi 3.5 Ti 3 O 12 +x mol%Nb 2 O 5 +y wt%CeO 2 (0 ⁇ x ⁇ 7,0 ⁇ y ⁇ 2,0 ⁇ z ⁇ 0.5,0 ⁇ w ⁇ 0.5,0 ⁇ z+w ⁇ 0.5), the piezoelectric ceramic material Na 0.5 Bi 3.5 Ti 3 O 12 is doped and modified by Nb, Ce, Sr and Ba elements to improve the piezoelectric properties of piezoelectric ceramic materials. .
  • the piezoelectric activity of the piezoelectric ceramic material and the piezoelectric element due to the doping component ⁇ and/or component ⁇ in the base material Can be improved.
  • the substitution of Na + in the matrix material by Sr 2+ and/or Ba 2+ improves the high-temperature anti-aging property and high-temperature insulation resistance of the piezoelectric ceramic material and the piezoelectric element.
  • FIG. 2 is a flow chart showing a method 100 of preparing a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure. As shown in FIG. 2, piezoelectric preparation according to an embodiment of the present disclosure
  • the method 200 of ceramic material includes the following steps S201-S206.
  • step S201 at least one of a predetermined proportion of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are thoroughly mixed.
  • step S202 the sufficiently mixed material is pre-sintered.
  • step S203 the pre-sintered block is mashed and finely ground.
  • step S204 the finely ground material is granulated.
  • step S205 the granulated powder is press-formed.
  • step S206 the molded body is subjected to high temperature sintering.
  • the piezoelectric ceramic material prepared according to the method of the embodiments of the present disclosure can be suitably used in a high temperature, high frequency environment.
  • FIG. 3 is a more detailed flowchart showing a method of preparing a bismuth layered lead-free piezoelectric ceramic material according to some exemplary embodiments of the present disclosure, and the same or equivalent steps of FIG. 3 and FIG. 2 use the same reference numerals.
  • step S201 at least one of a predetermined proportion of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are thoroughly mixed.
  • the percentage of each raw material is calculated according to the molecular formula of the lead-free piezoelectric ceramic material to be obtained, and the corresponding amounts of various raw materials are weighed.
  • step of sufficiently mixing in step S201 may further include:
  • step S2011 at least one of a predetermined ratio of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are initially mixed.
  • the preliminary mixing can be performed by using a ball milling method.
  • the ball mill was mixed at a speed of 90 rpm.
  • the ball milling time can be, for example, 6 to 8 hours. It should be understood that in the case of ball mill mixing, it is also necessary to dry the ball milled material.
  • the mixed material was placed in a blast drying oven and dried at 80 °C. The drying time can be, for example, 12 to 14 hours.
  • step S2012 the preliminary mixed material is crushed and compacted.
  • the briquetting treatment can be carried out at a pressure of 0.8 to 1 t/cm 2 .
  • step S2011-S2012 a well mixed material is obtained.
  • the sufficiently mixed material is pre-sintered.
  • the pre-sintering temperature can be pre-fired at 830-870 ° C, for example 850 ° C for 2 to 3 h.
  • step S203 the pre-sintered block is mashed and finely ground.
  • the pre-sintered mass is chopped and the chopped powder is finely ground.
  • the ball milling time can be, for example, 22 to 26 hours. It should be understood that in the case of ball mill mixing, it is also necessary to dry the ball milled material. As an example, the mixed material was placed in a blast drying oven and dried at 80 °C. The drying time can be, for example, 12 to 14 hours.
  • the finely ground material is granulated.
  • a binderless granulation technique can be employed.
  • a granulation technique using a binder can be employed.
  • the binder used may be, for example, polyvinyl alcohol PVA.
  • the finely pulverized material may be added to 5 to 6% of polyvinyl alcohol PVA for granulation.
  • step S205 the granulated powder is press-formed.
  • the granulated powder is dry-formed under a pressure of 1.5 to 2 t/cm 2 .
  • step S206 the molded body is subjected to high temperature sintering.
  • the formed green body is placed in a heating furnace, raised to a temperature of 300 ° C / h to 1100 ⁇ 1150 ° C, and kept for 2 h. After cooling with the furnace, a piezoelectric ceramic material is obtained.
  • the molded body after press molding is subjected to a low temperature displacement treatment to remove the binder.
  • the formed blank is placed in a heating furnace, raised to 100 ° C at a heating rate of less than 100 ° C / h, held for 1 h, and then heated to 500 ° C at the same heating rate,
  • the adhesive is basically removed.
  • heating can be continued until the temperature is raised to 850 ° C and kept for 1 h.
  • a piezoelectric ceramic material having a bismuth layer structure as a base and externally doped with at least one of cerium oxide and cerium oxide can be prepared, and the piezoelectric ceramic material can be adapted to high temperature and high frequency. Used in the environment. It should be understood that the specific preparation conditions in the respective steps are described above by way of examples, but it should be understood that these are merely examples, and the disclosure is not limited to the specific Value.
  • the piezoelectric ceramic material in order to further enhance the performance of the piezoelectric ceramic material in a high-temperature high-frequency environment, it is also possible to add a raw material such as barium carbonate and/or barium carbonate in the mixing step to obtain a germanium and/or a germanium which is doped externally.
  • the element is a piezoelectric ceramic material in which sodium Na ions are replaced by strontium Sr and/or strontium Ba ions.
  • cerium oxide, cerium oxide and cerium oxide are 99.9%, and the purity of anhydrous sodium carbonate, titanium dioxide, cesium carbonate, cesium carbonate and absolute ethanol can be analytically pure.
  • the obtained material may be machined into a standard wafer and subjected to treatment by silver, silver burning, polarization, high temperature aging, or the like.
  • Table 1 shows a piezoelectric ceramic material (Na 0.5-z- w Sr z Ba w )Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 +y wt%CeO obtained according to an exemplary embodiment of the present disclosure. 2 (10 ⁇ x ⁇ 7, 0 ⁇ y ⁇ 2 , 0 ⁇ z ⁇ 0.5, 0 ⁇ w ⁇ 0.5, 0 ⁇ z + w ⁇ 0.5) the main performance parameters.
  • a piezoelectric ceramic material obtained by externally doping a lanthanum and/or lanthanum element and replacing a part of sodium Na ions with yt Sr and/or yt Ba ions has a Curie of 730 ° C according to an exemplary embodiment of the present disclosure.
  • the normal temperature equivalent piezoelectric constant d 33 is 23 to 25 pC / N, and the piezoelectric properties of the piezoelectric ceramic material and the piezoelectric element are remarkably improved, so that it can be suitably used for high temperature use.
  • the relative dielectric constant is low, the piezoelectric ceramic material and the piezoelectric element have good dielectric properties at high frequencies, and can be adapted for use at high frequencies.
  • FIG. 4 is a graph showing an aging rate as a function of doping content of a composite doped and substituted bismuth layered lead-free piezoelectric ceramic material, according to some exemplary embodiments of the present disclosure.
  • the composite doping in FIG. 4 means that the base material is doped with at least one of cerium oxide, cerium oxide, cerium carbonate, and cerium carbonate.
  • the composite doping amount is 0.3 to 0.7% by weight
  • the aging rate of Na 0.5 Bi 4.5 Ti 4 O 15 is 25% or less, so that the stability of the piezoelectric material is good.
  • the aging rate of Na 0.5 Bi 4.5 Ti 4 O 15 decreases first and then increases with the composite doping amount.
  • the composite doping amount is 0.5 (wt)%, the aging rate is the lowest, which is stability. A better piezoelectric ceramic material.
  • FIG. 5 is a graph showing sensitivity drift-temperature characteristics of a tantalum layered lead-free piezoelectric ceramic material before and after doping substitution modification, according to some exemplary embodiments of the present disclosure.
  • Fig. 5 shows that from about 250 ° C to 500 ° C, the sensitivity drift of the bismuth layered lead-free piezoelectric ceramic material increases with increasing temperature, and after the composite doping substitution modification of the matrix material, the temperature exceeds At 250 ° C, the sensitivity drift of the piezoelectric ceramic material is significantly improved.
  • the piezoelectric ceramic material Na 0.5 Bi 3.5 Ti 3 O 12 is doped with yttrium and/or lanthanum elements and is modified by replacing some sodium ions with ⁇ Sr and/or ⁇ Ba ions.
  • the piezoelectric properties of the piezoelectric ceramic material and the piezoelectric element are significantly improved. Used in high temperature.
  • the piezoelectric ceramic material has a low relative dielectric constant of 120 to 140 after high temperature aging treatment, so the piezoelectric ceramic material and the piezoelectric element have good dielectric properties at high frequencies, and can be adapted to high frequency. Used in.
  • the present disclosure describes a piezoelectric ceramic material and a piezoelectric element which can be externally doped by Nb, Ce, Sr, and Ba in a matrix material of a bismuth layered structure. And/or ion substitution, so that piezoelectric ceramic materials and piezoelectric elements have better piezoelectric activity, time and temperature stability, and high-temperature insulation resistance values even in a high-temperature environment, thereby making piezoelectric ceramic materials and piezoelectrics
  • the component can be applied to high temperature rings such as high temperature piezoelectric devices In the realm.

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Abstract

A lead-free piezoelectric ceramic material and lead-free piezoelectric component. The piezoelectric ceramic material comprises a substrate. The substrate is a layered bismuth-based compound. The substrate is doped with at least one of the following: a niobium component and a cerium component.

Description

无铅压电陶瓷材料和无铅压电元件Lead-free piezoelectric ceramic materials and lead-free piezoelectric components 技术领域Technical field
本公开涉及电子陶瓷材料,尤其涉及铋层状无铅压电陶瓷材料和压电元件。The present disclosure relates to electronic ceramic materials, and more particularly to tantalum layered lead-free piezoelectric ceramic materials and piezoelectric elements.
背景技术Background technique
随着科学技术的发展,很多工业设备对压电器件的使用范围和使用条件要求越来越苛刻,在大功率超声器件、高温物体超声波、高温物体的振动、加速度和压力测定都必须选用高温压电材料。目前,国内外可用于高温(大于400℃)环境的压电陶瓷材料主要采用铋层状结构无铅压电陶瓷,然而,传统的铋层状结构无铅压电陶瓷材料的压电活性随温度的漂移较大,不适用于高温工作环境。With the development of science and technology, many industrial equipments have become more and more demanding on the use range and use conditions of piezoelectric devices. High-power ultrasonic devices, high-temperature ultrasonic waves, high-temperature object vibration, acceleration and pressure measurement must be selected with high temperature pressure. Electrical material. At present, piezoelectric ceramic materials that can be used in high temperature (greater than 400 ° C) environment at home and abroad mainly use lead-free piezoelectric ceramics with bismuth layer structure. However, the piezoelectric activity of conventional lead-free piezoelectric materials with bismuth layer structure is related to temperature. The drift is large and is not suitable for high temperature working environments.
发明内容Summary of the invention
根据本公开的一方面,提供一种无铅压电陶瓷材料,包括基体材料,该基体材料为铋层状结构化合物,并且该基体材料中掺杂有组分铌和组分铈中的至少一种。According to an aspect of the present disclosure, a lead-free piezoelectric ceramic material is provided, including a base material which is a bismuth layer structure compound, and the base material is doped with at least one of a component lanthanum and a component lanthanum Kind.
根据本公开的另一方面,提供一种无铅压电元件,包括无铅压电陶瓷材料,其中,无铅压电陶瓷材料包括基体材料,该基体材料为铋层状结构化合物,并且该基体材料中掺杂有组分铌和组分铈中的至少一种。According to another aspect of the present disclosure, a lead-free piezoelectric element including a lead-free piezoelectric ceramic material, wherein the lead-free piezoelectric ceramic material includes a base material, the base material is a bismuth layer structure compound, and the base body The material is doped with at least one of component hydrazine and component hydrazine.
根据本公开的铋层状无铅压电陶瓷材料和无铅压电元件,在高温条件下具有良好的压电性能,因此适合用于高温环境。The bismuth layered lead-free piezoelectric ceramic material and the lead-free piezoelectric element according to the present disclosure have good piezoelectric properties under high temperature conditions, and thus are suitable for use in a high temperature environment.
附图说明DRAWINGS
通过参考附图会更加清楚地理解本公开实施例的特征和优点,并且附图仅是示意性的,不应理解为对本公开进行任何限制,在附图中: The features and advantages of the embodiments of the present disclosure will be more clearly understood by reference to the accompanying drawings.
图1是示出了根据本公开一些示例性实施例的铋层状无铅压电陶瓷材料的结构示意图;1 is a schematic structural view showing a tantalum layered lead-free piezoelectric ceramic material according to some exemplary embodiments of the present disclosure;
图2是示出了根据本公开一些示例性实施例的制备铋层状无铅压电陶瓷材料的方法的流程图;2 is a flow chart illustrating a method of preparing a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure;
图3是示出了根据本公开另一些示例性实施例的制备铋层状无铅压电陶瓷材料的方法的更详细的流程图;3 is a more detailed flowchart showing a method of preparing a bismuth layered lead-free piezoelectric ceramic material according to further exemplary embodiments of the present disclosure;
图4是示出了根据本公开一些示例性实施例的铋层状无铅压电陶瓷材料的老化率随复合掺杂含量变化的曲线;4 is a graph showing an aging rate as a composite doping content of a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure;
图5是示出了根据本公开一些示例性实施例的铋层状无铅压电陶瓷材料在掺杂取代改性前后灵敏度漂移-温度特性曲线图。FIG. 5 is a graph showing sensitivity drift-temperature characteristics of a tantalum layered lead-free piezoelectric ceramic material before and after doping substitution modification, according to some exemplary embodiments of the present disclosure.
具体实施方式detailed description
下面对本发明的实施例的详细描述涵盖了许多具体细节,以便提供对本发明的全面理解。但是,对于本领域技术人员来说显而易见的是,本发明可以在不需要这些具体细节中的一些细节的情况下实施。下面对实施例的描述仅仅是为了通过示出本公开的示例来提供对实施例更清楚的理解。本公开绝不限于下面所提出的任何具体配置,而是在不脱离本公开的精神的前提下覆盖了相关元素、部件的任何修改、替换和改进。The detailed description of the embodiments of the present invention is intended to However, it will be apparent to those skilled in the art that the present invention may be practiced without some of these details. The following description of the embodiments is merely intended to provide a further understanding of the embodiments. The present disclosure is in no way limited to any specific configuration, which is set forth below, but without departing from the spirit and scope of the disclosure.
在一些实施例中,根据本公开的无铅压电陶瓷材料包括基体材料,该基体材料为铋层状结构化合物,并且基体材料中外掺杂有组分铌和组分铈中的至少一种。根据本公开的无铅压电陶瓷材料和压电元件,基体材料通过组分铌和组分铈中的至少一种掺杂改性,因而在高温条件下具有良好的压电性能,从而适合于高温环境下使用。In some embodiments, the lead-free piezoelectric ceramic material according to the present disclosure includes a base material that is a bismuth layered structural compound, and the base material is doped with at least one of a component lanthanum and a component lanthanum. According to the lead-free piezoelectric ceramic material and the piezoelectric element of the present disclosure, the base material is doped and modified by at least one of the component 铌 and the component ,, and thus has good piezoelectric properties under high temperature conditions, thereby being suitable for Use in high temperature environment.
下面将结合图1来说明本公开一些实施例的铋层状无铅压电陶瓷材料。如图1所示,压电陶瓷材料包括基体材料100,该基体材料100为铋层状结构,这种结构包括钙钛矿型结构层101和铋氧层102,其中钙钛矿型结构层101和铋氧层102交错排列。A layered lead-free piezoelectric ceramic material according to some embodiments of the present disclosure will now be described with reference to FIG. As shown in FIG. 1, the piezoelectric ceramic material includes a base material 100 which is a bismuth layer structure including a perovskite structure layer 101 and a ruthenium oxide layer 102, wherein the perovskite structure layer 101 The silicon oxide layer 102 is staggered.
继续参考图1,在一些实施例中,钙钛矿型结构层101和铋氧层102沿该基体材料100的c轴方向交错排列,其中,每两层铋氧层102之间至 少有一层钙钛矿型结构层。一般来说,随着每两层铋氧层102之间的钙钛矿型结构层数量的增加,该压电陶瓷材料的压电活性越高,结构越趋于单晶,居里点Tc越高,老化率越低,电阻率越高。With continued reference to FIG. 1, in some embodiments, the perovskite-type structural layer 101 and the tantalum oxide layer 102 are staggered along the c-axis direction of the base material 100, wherein between each two layers of the silicon oxide layer 102 to There is one layer of perovskite structure. In general, as the number of perovskite-type structural layers between each two layers of the tantalum oxide layer 102 increases, the piezoelectric activity of the piezoelectric ceramic material increases, and the structure tends to be single crystal, and the Curie point Tc High, the lower the aging rate, the higher the resistivity.
在一些实施例中,基体材料可以为铋层状结构,其结构通式为(Bi2O2)2+(Am-1BmO3m+1)2-,其中,(Bi2O2)2+代表铋氧层,(Am- 1BmO3m+1)2-代表钙钛矿型结构层,并且其中,m表示每两层(Bi2O2)2+之间的(Am-1BmO3m+1)2-的数量。In some embodiments, the base material may be a bismuth layer structure having the general formula (Bi 2 O 2 ) 2+ (A m-1 B m O 3m+1 ) 2- , wherein (Bi 2 O 2 2+ represents a ruthenium oxide layer, (A m- 1 B m O 3m+1 ) 2- represents a perovskite-type structural layer, and wherein m represents between every two layers (Bi 2 O 2 ) 2+ ( A m-1 B m O 3m+1 ) The number of 2- .
在一些实施例中,基体材料100可以为Na0.5Bi4.5Ti4O15,其通式为(Bi2O2)2+(Na0.5Bi2.5Ti4O13)2-,这种结构是由钙钛矿型结构层(Na0.5Bi2.5Ti4O13)2-和铋氧层(Bi2O2)2+沿c轴方向交错排列而成,每两层铋氧层间有4层钙钛矿层。In some embodiments, the base material 100 may be Na 0.5 Bi 4.5 Ti 4 O 15 , which has the general formula (Bi 2 O 2 ) 2+ (Na 0.5 Bi 2.5 Ti 4 O 13 ) 2- , Perovskite-type structural layer (Na 0.5 Bi 2.5 Ti 4 O 13 ) 2- and bismuth oxide layer (Bi 2 O 2 ) 2+ are staggered along the c-axis direction, and there are 4 layers of calcium between each two layers of bismuth oxide layer. Titanium ore layer.
在另一些实施例中,基体材料100可以为Na0.5Bi3.5Ti3O12,其通式为(Bi2O2)2+(Na0.5Bi1.5Ti3O10)2-,这种结构是由钙钛矿型结构层(Na0.5Bi1.5Ti3O10)2-和铋氧层(Bi2O2)2+沿c轴方向交错排列而成,每两层铋氧层间有3层钙钛矿层。In other embodiments, the base material 100 may be Na 0.5 Bi 3.5 Ti 3 O 12 , which has the formula (Bi 2 O 2 ) 2+ (Na 0.5 Bi 1.5 Ti 3 O 10 ) 2- , and the structure is It is formed by staggering the perovskite structure layer (Na 0.5 Bi 1.5 Ti 3 O 10 ) 2- and the bismuth oxide layer (Bi 2 O 2 ) 2+ along the c-axis direction, and there are 3 layers between each two layers of 铋 oxygen layer. Perovskite layer.
如上所述,根据本公开的压电陶瓷材料,基体材料100可以通过外掺杂组分铌Nb和组分铈Ce中的至少一种掺杂改性。在一些实施例中,组分铌Nb可以取自氧化铌Nb2O5,且组分铌Nb的掺杂量按Nb2O5换算。在一些实施例中,组分铈Ce可以取自氧化铈CeO2,且组分铈Ce掺杂量按CeO2来换算。应理解,虽然在本公开中Nb,Ce以Nb2O5,CeO2为例来说明,但是并不限于此具体氧化物,而是可以采用其他铌化合物和铈化合物。As described above, according to the piezoelectric ceramic material of the present disclosure, the base material 100 may be doped by at least one of the outer doping component 铌Nb and the component 铈Ce. In some embodiments, the component 铌Nb may be derived from yttrium oxide Nb 2 O 5 and the doping amount of the component 铌Nb is converted to Nb 2 O 5 . In some embodiments, the component 铈Ce may be derived from cerium oxide CeO 2 and the composition 铈Ce doping amount is converted in terms of CeO 2 . It should be understood that although Nb, Ce is exemplified by Nb 2 O 5 , CeO 2 in the present disclosure, it is not limited to this specific oxide, and other ruthenium compounds and ruthenium compounds may be employed.
在一些实施例中,基体材料100可以单独掺杂氧化铌或氧化铈,或者基体材料100也可以掺杂氧化铌和氧化铈二者。氧化铌的掺杂量可以不大于7mol%范围内,氧化铈的掺杂量可以不大于2wt%。应理解,mol%为摩尔百分比,wt%为重量百分比,均为相对于基体材料的含量。In some embodiments, the base material 100 may be doped with ruthenium oxide or ruthenium oxide alone, or the base material 100 may be doped with both ruthenium oxide and ruthenium oxide. The doping amount of cerium oxide may be not more than 7 mol%, and the doping amount of cerium oxide may be not more than 2 wt%. It should be understood that mol% is a mole percent and wt% is a weight percent, both relative to the matrix material.
例如,基体材料100单独外掺杂氧化铌Nb2O5的情形中,压电陶瓷材料可以被表示为Na0.5Bi4.5Ti4O15+x mol%Nb2O5,其中0<x≤7。此外,基体材料100单独外掺杂CeO2的情形中,压电陶瓷材料可以被表示为 Na0.5Bi4.5Ti4O15+y wt%CeO2,其中0<y≤2。此外,基体材料100外掺杂Nb2O5和CeO2的情形中,压电陶瓷材料可以被表示为Na0.5Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2,其中,0<x≤7;0<y≤2,复合掺杂Nb2O5和CeO2可以使基体Na0.5Bi4.5Ti4O15的压电常数d33值达到35pC/N,压电活性得到显著的提高。For example, in the case where the base material 100 is doped with yttrium oxide Nb 2 O 5 alone, the piezoelectric ceramic material can be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 , where 0<x≤7 . Further, in the case where the base material 100 is doped with CeO 2 alone, the piezoelectric ceramic material may be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 + y wt% CeO 2 , where 0 < y ≤ 2. Further, in the case where the base material 100 is doped with Nb 2 O 5 and CeO 2 , the piezoelectric ceramic material may be expressed as Na 0.5 Bi 4.5 Ti 4 O 15 + x mol% Nb 2 O 5 + y wt % CeO 2 , Where 0<x≤7;0<y≤2, the composite doping of Nb 2 O 5 and CeO 2 can make the piezoelectric constant d 33 of the matrix Na 0.5 Bi 4.5 Ti 4 O 15 reach 35 pC/N, piezoelectric activity Significant improvements have been made.
在一些实施例中,所述基体材料100中还可以被取代掺杂有组分锶Sr和组分钡Ba中的至少一种,并且锶Sr可以取自碳酸锶SrCO3,钡Ba可以取自碳酸钡BaCO3。在此情况中,基体材料100中的部分Na+可以被Sr2+和Ba2+中的至少一种取代。也就是说,部分Na离子可以由Sr2+取代,或者部分Na离子可以由Ba2+取代,或者,部分Na离子的其中一部分由Sr2+取代,另一部分由Ba2+取代。虽然在本公开中Sr,Ba以SrCO3,BaCO3为例来说明,但是本公开并不限于此,而是可以采用其他锶化合物和钡化合物。In some embodiments, the base material 100 may also be substituted with at least one of the component 锶Sr and the component 钡Ba, and the 锶Sr may be taken from strontium carbonate SrCO 3 , which may be taken from Barium carbonate BaCO 3 . In this case, a portion of Na + in the base material 100 may be substituted with at least one of Sr 2+ and Ba 2+ . That is, part of the Na ions may be substituted by Sr 2+ , or part of the Na ions may be substituted by Ba 2+ , or part of the partial Na ions may be substituted by Sr 2+ and the other part by Ba 2+ . Although Sr, Ba is exemplified by SrCO 3 and BaCO 3 in the present disclosure, the present disclosure is not limited thereto, and other ruthenium compounds and ruthenium compounds may be employed.
作为一个示例,在基体材料100外掺杂了Nb2O5和CeO2二者的情形中,Sr2+取代部分Na+,此时,压电陶瓷材料可以被表示为(Na0.5- zSrz)Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2,其中0<x≤7,0<y≤2,0<z<0.5)。As an example, in the case where the base material 100 is doped with both Nb 2 O 5 and CeO 2 , Sr 2+ replaces the portion Na + , and at this time, the piezoelectric ceramic material can be expressed as (Na 0.5- z Sr z ) Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 +y wt%CeO 2 , where 0<x≤7, 0<y≤2, 0<z<0.5).
作为另一个示例,在基体材料100外掺杂了Nb2O5和CeO2二者的情形中,Ba2+取代部分Na+,此时,压电陶瓷材料可以被表示为(Na0.5- wBaw)Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2,其中,0<x≤7,0<y≤2,0<w<0.5)。As another example, in the case where the base material 100 is doped with both Nb 2 O 5 and CeO 2 , Ba 2+ replaces the portion Na + , and at this time, the piezoelectric ceramic material can be expressed as (Na 0.5- w Ba w )Bi 4.5 Ti 4 O 15 +x mol%Nb 2 O 5 +y wt%CeO 2 , wherein 0<x≤7, 0<y≤2, 0<w<0.5).
在又一个示例中,在基体材料100外掺杂了Nb2O5和CeO2二者的情形中,部分Na+中的其中一部分被Sr2+取代,其中另一部分被Ba2+取代,此时,压电陶瓷材料可以被表示为(Na0.5-z-wSrzBaw)Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2(0<x≤7,0<y≤2,0<z<0.5,0<w<0.5,0<z+w<0.5),经复合掺杂和取代的基体材料Na0.5Bi4.5Ti4O15压电常数d33值可以达到28pC/N,随后将压电陶瓷材料经高温550℃老化48h,再经高低温-55℃~120℃循环老化处理后,d33值为24pC/N;最后升温至480℃保温24h后,高温绝缘电阻值大于1.4Ω,压电陶瓷材料和压电元件的压电性能 在高温抗老化性能、高温绝缘电阻值以及压电活性多方面都得到显著提高。In yet another example, in the case where the base material 100 is doped with both Nb 2 O 5 and CeO 2 , part of the partial Na + is replaced by Sr 2+ , and the other part is substituted by Ba 2+ , In time, the piezoelectric ceramic material can be expressed as (Na 0.5-zw Sr z Ba w )Bi 4.5 Ti 4 O 15 +x mol%Nb 2 O 5 +y wt%CeO 2 (0<x≤7,0<y ≤ 2, 0 < z < 0.5, 0 < w < 0.5, 0 < z + w < 0.5), the composite doped and substituted matrix material Na 0.5 Bi 4.5 Ti 4 O 15 piezoelectric constant d 33 value can reach 28pC /N, then the piezoelectric ceramic material is aged at 550 ° C for 48 h, and then subjected to high temperature and low temperature -55 ° C ~ 120 ° C cycle aging treatment, d 33 value is 24 pC / N; finally heated to 480 ° C for 24 h, high temperature insulation The resistance value is greater than 1.4 Ω, and the piezoelectric properties of the piezoelectric ceramic material and the piezoelectric element are significantly improved in high temperature anti-aging properties, high-temperature insulation resistance values, and piezoelectric activity.
应注意,Sr2+和Ba2+只是取代部分Na+,因此在二者都存在情况下,二者所占的摩尔总数不能超过被取代的Na+摩尔总数。It should be noted that Sr 2+ and Ba 2+ are only substituted for part of Na + , so in the presence of both, the total number of moles of the two cannot exceed the total number of moles of Na + substituted.
应注意,本公开中的“外掺杂”指代掺杂元素虽然会进入到基体材料中,但是不会占据任何现有元素的晶格位置;而“取代掺杂”指代掺杂离子不但会进入到基体材料中,而且还将占据特定元素(例如Na+)所在的晶格位置。“外掺杂”和“取代掺杂”是对本公开中的无铅压电陶瓷材料掺杂改性的两种掺杂方法,参与掺杂改性的化合物并不局限于实施例所述的掺杂方法。在本公开的另一些实施例中,本领域技术人员还可以使用氧化铌或氧化铈中的至少一种对压电陶瓷化合物取代掺杂改性,在本公开的再一些实施例中,本领域技术人员可以使用碳酸锶或碳酸钡中的至少一种对压电陶瓷材料外掺杂改性。通过Nb、Ce、Sr和Ba元素对压电陶瓷材料进行掺杂改性,并不局限于具体的掺杂方法。It should be noted that "outer doping" in the present disclosure means that although the doping element enters into the matrix material, it does not occupy the lattice position of any existing element; and "substitution doping" refers to not only the doping ion but also the dopant ion. Will enter the matrix material and will also occupy the lattice location of the particular element (eg Na + ). "External doping" and "substitute doping" are two doping methods for doping modification of the lead-free piezoelectric ceramic material in the present disclosure, and the compound participating in the doping modification is not limited to the doping described in the examples. Miscellaneous methods. In other embodiments of the present disclosure, those skilled in the art may also substitute the piezoelectric ceramic compound for doping modification using at least one of cerium oxide or cerium oxide. In still other embodiments of the present disclosure, the art The skilled person can externally dope the piezoelectric ceramic material with at least one of cesium carbonate or cesium carbonate. Doping modification of piezoelectric ceramic materials by Nb, Ce, Sr and Ba elements is not limited to a specific doping method.
在本公开的其他一些实施例中,基体材料也可以是其他铋层状无铅压电陶瓷材料,例如Na0.5Bi3.5Ti3O12,在基体材料Na0.5Bi3.5Ti3O12外掺杂了Nb2O5和CeO2二者的情形中,部分Na+中的其中一部分被Sr2+取代,其中另一部分被Ba2+取代,此时,压电陶瓷材料可以被表示为(Na0.5-z- wSrzBaw)Bi3.5Ti3O12+x mol%Nb2O5+y wt%CeO2(0<x≤7,0<y≤2,0<z<0.5,0<w<0.5,0<z+w<0.5),通过Nb、Ce、Sr和Ba元素对压电陶瓷材料Na0.5Bi3.5Ti3O12进行掺杂改性,提高压电陶瓷材料的压电性能。In some other embodiments of the present disclosure, the base material may also be other bismuth layered lead-free piezoelectric ceramic material, such as Na 0.5 Bi 3.5 Ti 3 O 12 , doped outside the base material Na 0.5 Bi 3.5 Ti 3 O 12 . In the case of both Nb 2 O 5 and CeO 2 , part of the Na + is replaced by Sr 2+ , and the other part is substituted by Ba 2+ , at which time the piezoelectric ceramic material can be expressed as (Na 0.5 -z- w Sr z Ba w )Bi 3.5 Ti 3 O 12 +x mol%Nb 2 O 5 +y wt%CeO 2 (0<x≤7,0<y≤2,0<z<0.5,0<w<0.5,0<z+w<0.5), the piezoelectric ceramic material Na 0.5 Bi 3.5 Ti 3 O 12 is doped and modified by Nb, Ce, Sr and Ba elements to improve the piezoelectric properties of piezoelectric ceramic materials. .
如上所述,根据本公开实施例的无铅压电陶瓷材料和压电元件,由于在基体材料中外掺杂组分铌和/或组分铈,压电陶瓷材料和压电元件的压电活性得以提高。此外,通过Sr2+和/或Ba2+对基体材料中Na+的取代,提高了压电陶瓷材料、压电元件的高温抗老化性能和高温绝缘电阻。As described above, according to the lead-free piezoelectric ceramic material and the piezoelectric element of the embodiment of the present disclosure, the piezoelectric activity of the piezoelectric ceramic material and the piezoelectric element due to the doping component 铌 and/or component 铈 in the base material Can be improved. In addition, the substitution of Na + in the matrix material by Sr 2+ and/or Ba 2+ improves the high-temperature anti-aging property and high-temperature insulation resistance of the piezoelectric ceramic material and the piezoelectric element.
下面结合附图2-3详细描述本公开一些实施例的制备压电陶瓷材料的过程。应注意,这些实施例并不是用来限制本公开的范围。The process of preparing a piezoelectric ceramic material according to some embodiments of the present disclosure will be described in detail below with reference to FIGS. 2-3. It should be noted that these examples are not intended to limit the scope of the disclosure.
图2是示出了根据本公开一些示例性实施例的制备铋层状无铅压电陶瓷材料的方法100的流程图。如图2所示,根据本公开实施例的制备压电 陶瓷材料的方法200包括以下步骤S201-S206。2 is a flow chart showing a method 100 of preparing a bismuth layered lead-free piezoelectric ceramic material, in accordance with some exemplary embodiments of the present disclosure. As shown in FIG. 2, piezoelectric preparation according to an embodiment of the present disclosure The method 200 of ceramic material includes the following steps S201-S206.
在步骤S201,将预定比例量的氧化铌和氧化铈中的至少一种、氧化铋、无水碳酸钠及二氧化钛粉末进行充分混合。In step S201, at least one of a predetermined proportion of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are thoroughly mixed.
在步骤S202,将充分混合的物料进行预烧结。In step S202, the sufficiently mixed material is pre-sintered.
在步骤S203,将预烧结后的块体捣碎并进行细磨。In step S203, the pre-sintered block is mashed and finely ground.
在步骤S204,将细磨后的物料进行造粒。In step S204, the finely ground material is granulated.
在步骤S205,将造粒好的粉料进行压置成型。In step S205, the granulated powder is press-formed.
在步骤S206,将成型后的坯体进行高温烧结。In step S206, the molded body is subjected to high temperature sintering.
根据本公开实施例的方法制备得到的压电陶瓷材料能够适合于在高温、高频环境中使用。The piezoelectric ceramic material prepared according to the method of the embodiments of the present disclosure can be suitably used in a high temperature, high frequency environment.
图3是示出了根据本公开一些示例性实施例的制备铋层状无铅压电陶瓷材料的方法的更详细的流程图,图3与图2相同或等同的步骤使用相同的标号。3 is a more detailed flowchart showing a method of preparing a bismuth layered lead-free piezoelectric ceramic material according to some exemplary embodiments of the present disclosure, and the same or equivalent steps of FIG. 3 and FIG. 2 use the same reference numerals.
在步骤S201,将预定比例量的氧化铌和氧化铈中的至少一种、氧化铋、无水碳酸钠及二氧化钛粉末进行充分混合。In step S201, at least one of a predetermined proportion of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are thoroughly mixed.
在此步骤中,首先根据想要获得的无铅压电陶瓷材料的分子式来计算各原料的百分含量,并称取相应量的各种原料。In this step, first, the percentage of each raw material is calculated according to the molecular formula of the lead-free piezoelectric ceramic material to be obtained, and the corresponding amounts of various raw materials are weighed.
在一些实施例中,步骤S201中的充分混合步骤还可以包括:In some embodiments, the step of sufficiently mixing in step S201 may further include:
在步骤S2011,将预定比例的氧化铌和氧化铈中的至少一种、氧化铋、无水碳酸钠及二氧化钛粉末进行初步混合。In step S2011, at least one of a predetermined ratio of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide powder are initially mixed.
在一个示例中,初步混合可以通过利用球磨法进行混合。作为示例,将所称取的预定量的氧化铌和氧化铈中的至少一种、氧化铋、无水碳酸钠及二氧化钛原料按照原料∶磨球∶酒精=1∶2∶0.7的比例装入球磨罐内,以90转/分的转速进行球磨混料。球磨时间例如可以为6~8h。应理解,在采用球磨混合的情况下,还需要对球磨后的物料进行烘干处理。作为示例,混合后的物料被置于鼓风干燥箱中以80℃烘干。烘干时间例如可以为12~14h。In one example, the preliminary mixing can be performed by using a ball milling method. As an example, at least one of the weighed predetermined amount of cerium oxide and cerium oxide, cerium oxide, anhydrous sodium carbonate, and titanium dioxide raw material is loaded into the ball mill according to the ratio of raw material: grinding ball: alcohol = 1:2:0.7. In the tank, the ball mill was mixed at a speed of 90 rpm. The ball milling time can be, for example, 6 to 8 hours. It should be understood that in the case of ball mill mixing, it is also necessary to dry the ball milled material. As an example, the mixed material was placed in a blast drying oven and dried at 80 °C. The drying time can be, for example, 12 to 14 hours.
在步骤S2012,将初步混合后的物料捣碎并压块。在一个示例中,压块处理可在0.8~1t/cm2的压力下进行。 In step S2012, the preliminary mixed material is crushed and compacted. In one example, the briquetting treatment can be carried out at a pressure of 0.8 to 1 t/cm 2 .
经过步骤S2011-S2012,获得了充分混合的物料。After step S2011-S2012, a well mixed material is obtained.
在步骤S202,将充分混合的物料进行预烧结。在一个示例中,预烧结的温度可以在830~870℃,例如850℃的条件下预烧2~3h。In step S202, the sufficiently mixed material is pre-sintered. In one example, the pre-sintering temperature can be pre-fired at 830-870 ° C, for example 850 ° C for 2 to 3 h.
在步骤S203,将预烧结后的块体捣碎并进行细磨。In step S203, the pre-sintered block is mashed and finely ground.
在一个示例中,将预烧结后的块体捣碎,并将捣碎的粉料进行细磨。例如,将捣碎的粉料按粉料∶磨球∶酒精=1∶1.5∶0.7的比例装入球磨罐内,以90转/分的转速为进行粉料细磨。球磨时间例如可以为22~26h。应理解,在采用球磨混合的情况下,还需要对球磨后的物料进行烘干处理。作为示例,混合后的物料被置于鼓风干燥箱中以80℃烘干。烘干时间例如可以为12~14h。In one example, the pre-sintered mass is chopped and the chopped powder is finely ground. For example, the pulverized powder is placed in a ball mill tank at a ratio of powder:grinding ball:alcohol = 1:1.5:0.7, and the powder is finely ground at a number of revolutions of 90 rpm. The ball milling time can be, for example, 22 to 26 hours. It should be understood that in the case of ball mill mixing, it is also necessary to dry the ball milled material. As an example, the mixed material was placed in a blast drying oven and dried at 80 °C. The drying time can be, for example, 12 to 14 hours.
在步骤S204,将细磨后的物料进行造粒。在一些实施例中,可以采用无粘合剂的造粒技术。在一些实施例中,可以采用利用粘合剂的造粒技术。此时,所使用的粘合剂例如可以为聚乙烯醇PVA。作为示例,在造粒处理中,可以将细磨后的物料加入5~6%的聚乙烯醇PVA进行造粒。In step S204, the finely ground material is granulated. In some embodiments, a binderless granulation technique can be employed. In some embodiments, a granulation technique using a binder can be employed. At this time, the binder used may be, for example, polyvinyl alcohol PVA. As an example, in the granulation treatment, the finely pulverized material may be added to 5 to 6% of polyvinyl alcohol PVA for granulation.
在步骤S205,将造粒好的粉料进行压置成型。作为示例,在该步骤中,造粒好的粉料在压强为1.5~2t/cm2的压力下干压成型。In step S205, the granulated powder is press-formed. As an example, in this step, the granulated powder is dry-formed under a pressure of 1.5 to 2 t/cm 2 .
在步骤S206,将成型后的坯体进行高温烧结。作为示例,在该步骤中,将成型后的坯体放在加热炉中,以300℃/h的升温速率升至1100~1150℃,保温2h。随炉冷却后,便得到压电陶瓷材料。In step S206, the molded body is subjected to high temperature sintering. As an example, in this step, the formed green body is placed in a heating furnace, raised to a temperature of 300 ° C / h to 1100 ~ 1150 ° C, and kept for 2 h. After cooling with the furnace, a piezoelectric ceramic material is obtained.
应理解,在采用利用粘合剂进行造粒的情况中,为了避免粘合剂的影响,压置成型后的坯体还需进行低温排塑处理,以去除粘合剂。It should be understood that in the case of granulation using an adhesive, in order to avoid the influence of the adhesive, the molded body after press molding is subjected to a low temperature displacement treatment to remove the binder.
作为示例,在排塑处理中,将成型好的坯体放在加热炉中,以小于100℃/h的升温速率升至100℃,保温1h,然后以相同的升温速率升温至500℃,此时粘合剂基本已排除干净。为了提高坯体强度,可以继续加热,直至升温至850℃,保温1h。As an example, in the plasticizing treatment, the formed blank is placed in a heating furnace, raised to 100 ° C at a heating rate of less than 100 ° C / h, held for 1 h, and then heated to 500 ° C at the same heating rate, The adhesive is basically removed. In order to increase the strength of the green body, heating can be continued until the temperature is raised to 850 ° C and kept for 1 h.
根据上述实施例的方法能够制备得到以铋层状结构为基体并以氧化铌和氧化铈中的至少一者外掺杂的压电陶瓷材料,该压电陶瓷材料能够适合于在高温、高频环境中使用。应理解,上面以示例的形式描述了各步骤中的具体制备条件,但是应理解这些仅是示例,本公开并不限于这些具体的 数值。在一些示例中,为了进一步增强压电陶瓷材料在高温高频环境下的性能,还可以在混合步骤中添加碳酸锶和/或碳酸钡等原料,来获得既外掺杂了铌和/或铈元素又以锶Sr和/或钡Ba离子取代钠Na离子的压电陶瓷材料。According to the method of the above embodiment, a piezoelectric ceramic material having a bismuth layer structure as a base and externally doped with at least one of cerium oxide and cerium oxide can be prepared, and the piezoelectric ceramic material can be adapted to high temperature and high frequency. Used in the environment. It should be understood that the specific preparation conditions in the respective steps are described above by way of examples, but it should be understood that these are merely examples, and the disclosure is not limited to the specific Value. In some examples, in order to further enhance the performance of the piezoelectric ceramic material in a high-temperature high-frequency environment, it is also possible to add a raw material such as barium carbonate and/or barium carbonate in the mixing step to obtain a germanium and/or a germanium which is doped externally. The element is a piezoelectric ceramic material in which sodium Na ions are replaced by strontium Sr and/or strontium Ba ions.
上述各原料均没有经过纯化处理。氧化铋、氧化铌、氧化铈纯度为99.9%,无水碳酸钠、二氧化钛、碳酸锶、碳酸钡、无水乙醇等纯度均可采用分析纯。None of the above raw materials were subjected to purification treatment. The purity of cerium oxide, cerium oxide and cerium oxide is 99.9%, and the purity of anhydrous sodium carbonate, titanium dioxide, cesium carbonate, cesium carbonate and absolute ethanol can be analytically pure.
为了测试根据上述制备方法得到的压电陶瓷材料的各种性能,可以将所获得的材料机械加工成标准圆片,并进行被银、烧银、极化、高温老化等处理。In order to test various properties of the piezoelectric ceramic material obtained according to the above production method, the obtained material may be machined into a standard wafer and subjected to treatment by silver, silver burning, polarization, high temperature aging, or the like.
下表1示出了根据本公开示例性实施例得到的压电陶瓷材料(Na0.5-z- wSrzBaw)Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2(0<x≤7,0<y≤2,0<z<0.5,0<w<0.5,0<z+w<0.5)的主要性能参数。Table 1 below shows a piezoelectric ceramic material (Na 0.5-z- w Sr z Ba w )Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 +y wt%CeO obtained according to an exemplary embodiment of the present disclosure. 2 (10 < x ≤ 7, 0 < y ≤ 2 , 0 < z < 0.5, 0 < w < 0.5, 0 < z + w < 0.5) the main performance parameters.
表1Table 1
Figure PCTCN2017080593-appb-000001
Figure PCTCN2017080593-appb-000001
从上表1可见,根据本公开示例性实施例得到外掺杂有铌和/或铈元素 并且以锶Sr和/或钡Ba离子取代部分钠Na离子的压电陶瓷材料具有730℃的居里点,并且高温550℃老化48h后常温等价压电常数d33为23~25pC/N,压电陶瓷材料和压电元件的压电性能显著提高,因此能够很好地适合于高温使用。并且因为相对介电常数较低,压电陶瓷材料和压电元件在高频下具有良好的介电性能,能够适于在高频中的使用。As can be seen from the above Table 1, a piezoelectric ceramic material obtained by externally doping a lanthanum and/or lanthanum element and replacing a part of sodium Na ions with yt Sr and/or yt Ba ions has a Curie of 730 ° C according to an exemplary embodiment of the present disclosure. At a high temperature of 550 ° C for 48 hours, the normal temperature equivalent piezoelectric constant d 33 is 23 to 25 pC / N, and the piezoelectric properties of the piezoelectric ceramic material and the piezoelectric element are remarkably improved, so that it can be suitably used for high temperature use. And because the relative dielectric constant is low, the piezoelectric ceramic material and the piezoelectric element have good dielectric properties at high frequencies, and can be adapted for use at high frequencies.
另外,图4是示出了根据本公开一些示例性实施例的经复合掺杂和取代的铋层状无铅压电陶瓷材料随掺杂含量变化的老化率曲线。图4中的复合掺杂是指对基体材料掺杂有氧化铌、氧化铈、碳酸锶和碳酸钡中的至少一种。如图4所示,当复合掺杂量在0.3~0.7(wt)%时,Na0.5Bi4.5Ti4O15的老化率在25%以下,因此压电材料的稳定性较好。此外,如图4所示,Na0.5Bi4.5Ti4O15的老化率随复合掺杂量先降低再升高,当复合掺杂量为0.5(wt)%时,老化率最低,是稳定性较好的压电陶瓷材料。In addition, FIG. 4 is a graph showing an aging rate as a function of doping content of a composite doped and substituted bismuth layered lead-free piezoelectric ceramic material, according to some exemplary embodiments of the present disclosure. The composite doping in FIG. 4 means that the base material is doped with at least one of cerium oxide, cerium oxide, cerium carbonate, and cerium carbonate. As shown in FIG. 4, when the composite doping amount is 0.3 to 0.7% by weight, the aging rate of Na 0.5 Bi 4.5 Ti 4 O 15 is 25% or less, so that the stability of the piezoelectric material is good. In addition, as shown in FIG. 4, the aging rate of Na 0.5 Bi 4.5 Ti 4 O 15 decreases first and then increases with the composite doping amount. When the composite doping amount is 0.5 (wt)%, the aging rate is the lowest, which is stability. A better piezoelectric ceramic material.
另外,图5是示出了根据本公开一些示例性实施例的铋层状无铅压电陶瓷材料在掺杂取代改性前后灵敏度漂移-温度特性曲线图。如图5所示,从约250℃至500℃,铋层状无铅压电陶瓷材料的灵敏度漂移随温度升高而增大,而在对基体材料复合掺杂取代改性以后,在温度超过250℃时,压电陶瓷材料的灵敏度漂移得到明显的改善。In addition, FIG. 5 is a graph showing sensitivity drift-temperature characteristics of a tantalum layered lead-free piezoelectric ceramic material before and after doping substitution modification, according to some exemplary embodiments of the present disclosure. As shown in Fig. 5, from about 250 ° C to 500 ° C, the sensitivity drift of the bismuth layered lead-free piezoelectric ceramic material increases with increasing temperature, and after the composite doping substitution modification of the matrix material, the temperature exceeds At 250 ° C, the sensitivity drift of the piezoelectric ceramic material is significantly improved.
在本公开的另一些实施例中,压电陶瓷材料Na0.5Bi3.5Ti3O12在外掺杂有铌和/或铈元素并且以锶Sr和/或钡Ba离子取代部分钠Na离子进行改性后具有670℃的居里点,并且高温550℃老化48h后常温等价压电常数d33为17~20pC/N,压电陶瓷材料和压电元件的压电性能得到明显的提高,能够适于在高温中的使用。并且高温老化处理后测得压电陶瓷材料的相对介电常数较低,为120~140,所以压电陶瓷材料和压电元件在高频下具有良好的介电性能,能够适于在高频中的使用。In still other embodiments of the present disclosure, the piezoelectric ceramic material Na 0.5 Bi 3.5 Ti 3 O 12 is doped with yttrium and/or lanthanum elements and is modified by replacing some sodium ions with 锶Sr and/or 钡Ba ions. After having a Curie point of 670 ° C, and the normal temperature equivalent piezoelectric constant d 33 is 17 to 20 pC / N after aging at 550 ° C for 48 h, the piezoelectric properties of the piezoelectric ceramic material and the piezoelectric element are significantly improved. Used in high temperature. And the piezoelectric ceramic material has a low relative dielectric constant of 120 to 140 after high temperature aging treatment, so the piezoelectric ceramic material and the piezoelectric element have good dielectric properties at high frequencies, and can be adapted to high frequency. Used in.
如上所述,本公开描述了一种压电陶瓷材料和压电元件,该压电陶瓷材料和压电元件可以在铋层状结构的基体材料中通过Nb、Ce、Sr和Ba进行外掺杂和/或离子取代,从而使得压电陶瓷材料和压电元件即使在高温环境中也具有更理想的压电活性、时间和温度稳定性以及高温绝缘电阻值,进而使得压电陶瓷材料和压电元件能够适用于诸如高温压电器件等高温环 境中。As described above, the present disclosure describes a piezoelectric ceramic material and a piezoelectric element which can be externally doped by Nb, Ce, Sr, and Ba in a matrix material of a bismuth layered structure. And/or ion substitution, so that piezoelectric ceramic materials and piezoelectric elements have better piezoelectric activity, time and temperature stability, and high-temperature insulation resistance values even in a high-temperature environment, thereby making piezoelectric ceramic materials and piezoelectrics The component can be applied to high temperature rings such as high temperature piezoelectric devices In the realm.
本领域技术人员在考虑说明书及实践这里公开的实施例方案后,将容易想到本公开的其它实施方案。本申请旨在涵盖这些实施例的任何变型、替代或者适应性变化,这些变型、替代或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。Other embodiments of the present disclosure will be apparent to those skilled in the <RTIgt; The present application is intended to cover any variations, alternatives, or adaptations of these embodiments, which are in accordance with the general principles of the present disclosure and include common general knowledge or conventional techniques in the art that are not disclosed in the present disclosure. means.
应当理解的是,本公开并不局限于上面已经描述并在附图中示出的精确结构,并且可以在不脱离其范围进行各种修改和改变。说明书和实施例仅被视为示例性的。本公开的范围仅由所附的权利要求来限制。 It is to be understood that the invention is not limited to the details of the details and The description and examples are to be considered as illustrative only. The scope of the disclosure is to be limited only by the appended claims.

Claims (10)

  1. 一种无铅压电陶瓷材料,包括:基体材料,所述基体材料为铋层状化合物,并且所述基体材料中,掺杂有组分铌和组分铈中的至少一种。A lead-free piezoelectric ceramic material comprising: a base material which is a bismuth layer compound, and the base material is doped with at least one of a component lanthanum and a component lanthanum.
  2. 如权利要求1所述的无铅压电陶瓷材料,其中,所述基体材料为Na0.5Bi4.5Ti4O15或Na0.5Bi3.5Ti3O12The lead-free piezoelectric ceramic material according to claim 1, wherein the base material is Na 0.5 Bi 4.5 Ti 4 O 15 or Na 0.5 Bi 3.5 Ti 3 O 12 .
  3. 如权利要求2所述的无铅压电陶瓷材料,其中,所述组分铌取自氧化铌Nb2O5,所述组分铈取自氧化铈CeO2The lead-free piezoelectric ceramic material according to claim 2, wherein said component is extracted from cerium oxide Nb 2 O 5 and said component is extracted from cerium oxide CeO 2 .
  4. 如权利要求1所述的无铅压电陶瓷材料,其中,所述组分铌的含量按Nb2O5计,所述Nb2O5相对于所述基体材料的含量不大于7mol%。The lead-free piezoelectric ceramic material as claimed in claim 1, wherein said component content of niobium Nb 2 O 5 by the meter, the Nb 2 O 5 with respect to the content of the base material is not more than 7mol%.
  5. 如权利要求1所述的无铅压电陶瓷材料,其中,所述组分铈的含量按CeO2计,所述CeO2相对于所述基体材料的含量不大于2wt%。The lead-free piezoelectric ceramic material according to claim 1, wherein a content of the component cerium is not more than 2% by weight based on the CeO 2 content of the CeO 2 relative to the matrix material.
  6. 如权利要求2所述的无铅压电陶瓷材料,其中,所述基体材料掺杂有组分锶和组分钡中的至少一种,所述组分锶取自碳酸锶SrCO3,所述组分钡取自碳酸钡BaCO3The lead-free piezoelectric ceramic material according to claim 2, wherein said base material is doped with at least one of a component lanthanum and a component lanthanum, said component being extracted from strontium carbonate SrCO 3 The component is extracted from barium carbonate BaCO 3 .
  7. 如权利要求6所述的无铅压电陶瓷材料,所述基体材料中的部分Na+被Sr2+和Ba2+中的至少一者取代。The lead-free piezoelectric ceramic material according to claim 6, wherein a part of Na + in the base material is substituted with at least one of Sr 2+ and Ba 2+ .
  8. 如权利要求3所述的无铅压电陶瓷材料,其分子式为:Na0.5Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2,其中,0<x≤7,0<y≤2。The lead-free piezoelectric ceramic material according to claim 3, which has a molecular formula of: Na 0.5 Bi 4.5 Ti 4 O 15 + x mol% Nb 2 O 5 + y wt % CeO 2 , wherein 0 < x ≤ 7, 0 <y ≤ 2.
  9. 如权利要求7所述的无铅压电陶瓷材料,其分子式为:(Na0.5-z- wSrzBaw)Bi4.5Ti4O15+x mol%Nb2O5+y wt%CeO2,其中,0<x≤7,0<y≤2,0<z<0.5,0<w<0.5,0<z+w<0.5。The lead-free piezoelectric ceramic material according to claim 7, which has a molecular formula of: (Na 0.5-z- w Sr z Ba w )Bi 4.5 Ti 4 O 15 +x mol% Nb 2 O 5 +y wt%CeO 2 Where 0<x≤7, 0<y≤2, 0<z<0.5, 0<w<0.5, 0<z+w<0.5.
  10. 一种无铅压电元件,包括权利要求1-9中任一项所述的无铅压电陶瓷材料。 A lead-free piezoelectric element comprising the lead-free piezoelectric ceramic material according to any one of claims 1-9.
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