WO2017163978A1

WO2017163978A1 - Linear motor and stage device

Info

Publication number: WO2017163978A1
Application number: PCT/JP2017/009968
Authority: WO
Inventors: 池田　隆; 道太郎臼井; 康太郎和田; 敦志柳川
Original assignee: 住友重機械工業株式会社
Priority date: 2016-03-23
Filing date: 2017-03-13
Publication date: 2017-09-28
Also published as: JP2017175764A; JP6956469B2; TW201735500A; TWI647895B

Abstract

In this linear motor, a stator 20 includes: a field magnet 24 that is provided facing a movable element; a base yoke 28 that is provided on a first direction side, removed from the field magnet 24; and a back yoke 23a to which the field magnet 24 is fixed. The back yoke 23a is fixed to an end surface 28a of the base yoke 28 by fastening a fastening implement to a fastening section, said fastening section being provided to the end surface 28a of the base yoke 28. When the back yoke 23a is a lever and a magnetic attractive force that the field magnet 24 generates is a load at a point of effort, the fastening section sandwiches a fulcrum manifesting on the end surface 28 and exhibits a fastening force that is a load at a point of load to balance with the load at the point of effort, and the fastening section is provided to the opposite side as the side on which the fulcrum manifests, when the end surface 28 is bisected in the first direction.

Description

Linear motor, stage device

The present invention relates to a linear motor.

A linear motor is used to convert electrical energy into linear motion. For example, Patent Document 1 describes a linear motor including a stator and a mover that are arranged to face each other via a magnetic gap.

The linear motor described in Patent Document 1 includes a flat field yoke on a stator and a plurality of field magnets fixed side by side on the field yoke. The field yoke includes a center yoke and a pair of side yokes extending upward from both ends of the center yoke, and the plurality of field magnets are fixed to the inner side surfaces of the pair of side yokes. In the linear motor described in Patent Document 1, the amount of bending of the side yoke is reduced by devising the shape of the center yoke.

Japanese Patent Laid-Open No. 2005-237087

For a stator of a linear motor having a base yoke and a back yoke extending upward from both ends of the base yoke, a configuration in which the back yoke is fastened to both end surfaces of the base yoke by bolts can be considered. However, in such a configuration, if the fastening force of the bolt is insufficient, there is a problem that the back yoke falls down due to the magnetic attractive force of the field magnet provided on the inner side surface of the back yoke. When the back yoke falls inward, the path of the mover becomes narrow at that portion, and in the worst case, there is a concern that the mover contacts the field magnet.

In the linear motor having such a configuration, it is conceivable to increase the total fastening force by increasing the number of fastening bolts in order to reduce the back yoke falling due to the magnetic attractive force of the field magnet. However, when the number of fastening bolts is increased, there is a problem of an increase in the weight of the linear motor, and a problem that productivity is lowered due to an increase in the number of processing holes and the number of fastening bolts.
That is, the conventional linear motor has room for improvement from the viewpoint of suppressing the fall of the back yoke due to the attractive force of the field magnet while suppressing an increase in weight and a decrease in productivity.

One of the objects of the present invention is to provide a linear motor capable of suppressing the fall of the back yoke due to the attractive force of the field magnet while suppressing an increase in weight and a decrease in productivity.

In order to solve the above problems, a linear motor according to an aspect of the present invention includes a field magnet provided to face the mover, a base yoke provided to be separated from the field magnet in the first direction side, And a stator including a back yoke to which the magnets are fixed. The back yoke is fixed to the end surface of the base yoke by coupling a fastener to a fastening portion provided on the end surface of the base yoke, and the magnetic attraction force generated by the field magnet using the back yoke as an insulator is used as a power point load. The fastening portion exerts a fastening force that is an action point load that balances the force point load across the fulcrum appearing on the end surface, and the fastening portion is opposite to the side on which the fulcrum appears when the end surface is divided in the first direction. Provided on the side.

According to this aspect, since the fastening portion is provided on the side opposite to the side where the fulcrum of the end surface appears, the distance from the fulcrum of the fastening portion can be increased.

A stage apparatus according to another aspect of the present invention includes the linear motor described above.

According to the present invention, it is possible to provide a linear motor that can suppress the back yoke from falling due to the attractive force of the field magnet.

It is a perspective view of the linear motor which concerns on embodiment. It is a top view of the stator which concerns on embodiment. It is sectional drawing of the stator which concerns on embodiment. It is sectional drawing of the base yoke which concerns on embodiment. It is sectional drawing of the stator which concerns on a comparative example. It is sectional drawing of the base yoke which concerns on a comparative example. It is a top view of the stage apparatus using the linear motor which concerns on embodiment. It is sectional drawing of the stator which concerns on a 1st modification. It is sectional drawing of the base yoke which concerns on a 1st modification. It is sectional drawing of the stator which concerns on a 2nd modification. It is a fragmentary sectional view of the base yoke part concerning the 2nd modification.

Hereinafter, the present invention will be described based on preferred embodiments with reference to the drawings. The same or equivalent components, members, and processes shown in the drawings are denoted by the same reference numerals, and repeated descriptions are omitted as appropriate. In addition, the dimensions of the members in each drawing are appropriately enlarged or reduced for easy understanding. Also, in the drawings, some of the members that are not important for describing the embodiment are omitted. The embodiments do not limit the invention but are exemplifications, and all features and combinations thereof described in the embodiments are not necessarily essential to the invention.

(Embodiment)
FIG. 1 is a perspective view of a linear motor 2 according to an embodiment. The linear motor 2 includes a stator 20 and a mover 10. The stator 20 mainly includes a field magnet 24, a base yoke 28, and

back yokes

23a and 23b. The field magnet 24 includes a main magnet 25 and an auxiliary magnet 26. The stator 20 forms a field magnetic field in the magnetic gap 34. The mover 10 is provided in the magnetic gap 34 of the stator 20 so as to be movable in the movable direction. Hereinafter, description will be made based on the XYZ orthogonal coordinate system. The X-axis direction corresponds to the horizontal left-right direction, the Y-axis direction corresponds to the horizontal front-back direction, and the Z-axis direction corresponds to the vertical up-down direction. The Y-axis direction and the Z-axis direction are each orthogonal to the X-axis direction. The X-axis direction may be referred to as the left direction or the right direction, the Y-axis direction may be referred to as the forward direction or the rear direction, and the Z-axis direction may be referred to as the upward direction or the downward direction. FIG. 1 shows a state in which the movable direction of the mover 10 is set in the horizontal direction (X-axis direction), and a base yoke 28 described later is disposed below the field magnet 24. Note that such direction notation does not limit the use posture of the linear motor 2, and the linear motor 2 can be used in any posture.

(stator)
FIG. 2 is a plan view of the stator 20 according to the embodiment. The base yoke 28 and the

back yokes

23 a and 23 b constitute the yoke 22. The yoke 22 supports the field magnet 24 and constitutes a magnetic circuit as a back yoke of the field magnet 24. The field magnet 24 is provided to face the mover 10 (see also FIG. 1). The base yoke 28 is provided apart from the field magnet 24 on the Z axis direction side which is the first direction. A field magnet 24 is fixed to each of the

back yokes

23a and 23b. The

back yokes

23a and 23b and the base yoke 28 will be described later.

The main magnet 25 forms a magnetic field in the magnetic gap 34. The auxiliary pole magnet 26 forms a Halbach array structure together with the main magnet 25 and reinforces the magnetic field of the magnetic gap 34. A plurality of main magnets 25 are bonded and fixed inside the

back yokes

23a and 23b (on the magnetic gap 34 side) in a plurality of straight lines in the movable direction (X-axis direction) of the mover 10. The auxiliary pole magnet 26 is fixed between two adjacent main magnets 25. For example, the field magnet 24 is formed of a magnetic material containing a rare earth element by a sintering method. The field magnet 24 may have a surface layer such as a plating layer. The field magnet 24 is formed in a rectangular plate shape, for example. In the present invention, it is not essential to provide the supplementary magnet 26.

The main magnet 25 has a rectangular parallelepiped shape that is thin in the Y-axis direction, and has a front surface and a back surface on which magnetic pole surfaces are respectively formed, and the back surfaces are fixed to the inner side surfaces S1a and S1b of the

back yokes

23a and 23b ( (See also FIG. 1). That is, the magnetization direction 25m of the main magnet 25 is formed parallel to the Y axis. The auxiliary pole magnet 26 has a thin rectangular parallelepiped shape in the Y-axis direction, and has a front surface and a back surface parallel to the X-axis, and the back surface is fixed to the inner side surfaces S1a and S1b of the

back yokes

23a and 23b (see FIG. (See also 1). Magnetic pole surfaces are formed on both side surfaces of the auxiliary magnet 26, respectively. That is, the magnetization direction 26m of the auxiliary pole magnet 26 is formed parallel to the X axis.

As shown in FIG. 2, magnetic poles having opposite polarities are provided in front of the two field magnets 24 facing each other with the magnetic gap 34 therebetween. For this reason, these field magnets 24 generate a magnetic attractive force attracting each other. Due to this magnetic attraction force, loads in the inward direction are input to the back yokes 23a and 23b facing each other through the magnetic gap 34.

It is desirable that the magnetic circuit of the linear motor has a configuration capable of concentrating the magnetic field of the main magnet 25 on the magnetic gap 34 side in order to improve the motor characteristics while suppressing the saturation of the

back yokes

23a and 23b. Therefore, the magnetization direction 26m of the supplementary magnet 26 according to the embodiment is formed in a direction different from the magnetization direction 25m of the main magnet 25 by 90 °. By configuring in this way, the main magnet 25 and the auxiliary pole magnet 26 form a Halbach array structure, and the magnetic field of the main magnet 25 can be collected on the magnetic gap 34 side.

(Back yoke)
FIG. 3 is a cross-sectional view taken along line AA of the stator 20 according to the embodiment. The back yokes 23a and 23b are provided so as to sandwich the mover 10 in the Y-axis direction. Field magnets 24 are provided on the inner side surfaces of the

back yokes

23a and 23b, and the field magnets 24 are provided to face each other with a magnetic gap 34 therebetween. The back yokes 23a and 23b are plate-like members extending in the left-right direction (X-axis direction) and the up-down direction (Z-axis direction). Each of the

back yokes

23a and 23b may be formed in a substantially rectangular shape that is long in the X-axis direction, for example. Each of the

back yokes

23a and 23b is provided with a yoke hole 23h into which a bolt 29 as a fastener is fitted. The yoke hole 23h is provided so as to penetrate in the Y-axis direction.

(Base yoke)
FIG. 4 is an enlarged cross-sectional view of the base yoke 28 according to the embodiment. The base yoke 28 is sandwiched between the back yokes 23 a and 23 b on the lower side of the field magnet 24. The base yoke 28 is provided in the negative direction on the Z axis that is the first direction side of the field magnet 24 so as to maintain the distance between the

back yokes

23a and 23b. That is, the back yokes 23 a and 23 b are fixed to both end surfaces of the base yoke 28 to maintain a predetermined interval. The base yoke 28 is a member having a long rectangular parallelepiped shape that is long in the X-axis direction. The base yoke 28 has a substantially rectangular shape in longitudinal section along the Y axis. The base yoke 28 has end faces 28a at both ends in the Y-axis direction. The back yokes 23 a and 23 b are fixed to the end surface 28 a of the base yoke 28 by coupling bolts 29 that are fasteners to holes 28 h that are fastening portions provided on the end surface 28 a of the base yoke 28. The hole 28 h is formed in the end surface 28 a of the base yoke 28. The end surface 28a extends along the Z-axis direction and the X-axis direction. The hole 28h may be a through hole in the Y-axis direction or a non-through hole. A female screw 28s is formed in the hole 28h. A bolt 29 as a fastener is screwed into the female screw 28s of the hole 28h. The back yokes 23a and 23b are fixed to the end surface 28a of the base yoke 28 by inserting bolts 29 from the outside of the yoke holes 23h and screwed into the holes 28h.

(Comparative example)
First, the base yoke 528 according to the comparative example will be described. FIG. 5 is a cross-sectional view taken along line AA of the stator 20 including the base yoke 528 of the comparative example. FIG. 6 is an enlarged cross-sectional view of a base yoke 528 of a comparative example. The base yoke 528 is different in that the position of the hole 28h is different from the base yoke 28, and the other configurations are the same. Therefore, the description will be mainly described with the overlapping description omitted. In the base yoke 528, the hole 28h is formed above the center 28m in the vertical range of the end face 28a. In particular, the center 28n of the vertical range of the hole 28h in the end surface 28a is located above the center 28m of the end surface 28a. That is, as shown in FIG. 6, the distance Ln from the upper end 28u of the end surface 28a of the base yoke 28 to the center 28n of the hole 28h is smaller than the distance Lm from the upper end 28u to the center 28m of the end surface 28a.

When such a base yoke 528 is used for the stator 20, the fastening force Ft that is the force with which the bolt 29 presses the back yokes 23a and 23b against the base yoke 28 side may be insufficient. If the fastening force Ft of the bolt 29 is insufficient, there is a problem that the

back yokes

23a and 23b are tilted inward by the magnetic attractive force Fm of the field magnet 24. Therefore, it is conceivable to increase the number of fastening bolts 29 and increase the fastening force Ft obtained by adding them. However, when the number of the bolts 29 is increased, the man-hours for processing the yoke holes 23h and the hole portions 28h are increased, and the man-hours for mounting the bolts 29 are increased, resulting in a problem that productivity is lowered.

Based on the above consideration of the comparative example, the stator 20 according to the embodiment of the present invention will be described. The relationship between the attractive force Fm and the fastening force Ft is that when the

back yokes

23a and 23b are respectively insulators and the magnetic attractive force Fm generated by the field magnet 24 is a force point load, the fastening force Ft is a fulcrum that appears on the end face 28a. It can be understood as an action point load that balances with a suction force Fm that is a force point load. This fulcrum is, for example, the upper end portion 28u of the end surface 28a of the base yoke 28. That is, the hole 28h serving as a fastening portion and the bolt 29 serving as a fastener exert a fastening force Ft that is a load balanced with the attractive force Fm of the field magnet 24 based on the lever principle. In this case, if the load and the distance on the force point side are constant, the distance on the action point side from the fulcrum to the action point can be increased to balance the suction force Fm with a smaller fastening force Ft. That is, by increasing the distance on the action point side from the upper end portion 28u of the end surface 28a of the base yoke 28 to the hole portion 28h that is the fastening portion, it is possible to reduce the equilibrating fastening force Ft.

Refer to FIGS. 3 and 4 again. The hole 28h, which is a fastening portion, is provided on the side opposite to the side on which the fulcrum appears when the end surface 28a is divided into two in the first Z-axis direction. In particular, in the Z-axis direction, the center of the hole 28h, which is a fastening portion on the end surface 28a, is located on the opposite side to the side on which the fulcrum appears when the end surface 28a is divided into two. That is, when the fulcrum is the upper end portion 28u of the end surface 28a of the base yoke 28, the center 28n of the vertical range of the hole 28h in the end surface 28a of the base yoke 28 is lower than the center 28m of the Z-axis direction range of the end surface 28a. Located on the side. As shown in FIG. 4, the distance Ln from the upper end 28u of the end surface 28a of the base yoke 28 to the center 28n of the hole 28h is larger than the distance Lm from the upper end 28u to the center 28m of the end surface 28a. Since the center 28n of the hole 28h is located away from the upper end 28u, the distance on the side of the above-mentioned action point can be increased, and the fastening force Ft that can be balanced can be reduced.

From the viewpoint of reducing the fastening force Ft that can be balanced, it is desirable that the distance on the side of the above-mentioned action point is larger. Therefore, in the stator 20 of the embodiment, the vertical range of the hole portion 28h in the end surface 28a of the base yoke 28 is located below the center 28m of the vertical range of the end surface 28a. Since the range of the hole 28h is located below the center 28m, the above-mentioned distance on the action point side becomes larger, and the fastening force Ft that can be balanced can be made smaller.

From the viewpoint of further reducing the equilibrium fastening force Ft, it is desirable that the distance on the side of the above-mentioned action point is larger. Therefore, in the stator 20 according to the embodiment, the hole 28h of the base yoke 28 is positioned below the center 28m of the vertical range of the end surface 28a of the base yoke 28 as a whole. That is, since the entire hole 28h is located below the center 28m, the distance on the side of the above-mentioned action point is further increased, and the fastening force Ft that can be balanced can be further reduced.

Next, features of the linear motor 2 of the embodiment configured as described above will be described.
In the linear motor 2, the hole 28h, which is a fastening portion, is provided on the side opposite to the side where the fulcrum appears when the end surface 28a is divided into the first Z-axis direction, so the side where the hole 28h appears. The back yokes 23a and 23b can be pressed to the base yoke 28 side at a position further away from the fulcrum as compared with the case where the back yoke 23a is provided. As a result, the fastening force Ft that can balance the attractive force Fm of the field magnet 24 can be reduced. Since the equilibrating fastening force Ft is small, the number of bolts 29 for fastening the back yokes 23a and 23b can be reduced. By reducing the number of bolts 29, it is possible to suppress an increase in the weight of the linear motor 2, and it is possible to reduce the man-hours for processing the yoke holes 23h and the holes 28h and the man-hours for mounting the bolts 29. In addition, a smaller bolt 29 can be used. That is, it is possible to suppress the fall of the

back yokes

23a and 23b due to the attractive force Fm of the field magnet 24 while suppressing a decrease in productivity.

In the linear motor 2, since the center of the hole 28h in the end surface 28a is located on the opposite side to the side where the fulcrum appears when the end surface 28a is divided into two in the Z-axis direction, which is the first direction, the back yokes 23a and 23b are It can be pressed against the base yoke 28 at a lower position.

Next, the use of the linear motor 2 will be described. FIG. 7 is a plan view of the stage apparatus 100 using the linear motor 2 according to the embodiment. This stage apparatus 100 is called an XY stage, and positions an object in the X direction and the Y direction.

The stage apparatus 100 mainly includes a Y stage 120, an X stage 130, and a surface plate 140. The Y stage 120 includes a pair of sliders 124 and a horizontal member 122 that extends horizontally between the pair of sliders 124. An X linear motor 2X that moves the X stage 130 in the X direction is provided on the horizontal member 122. The X linear motor 2 </ b> X includes a stator 20 that is fixed to the horizontal member 122 and extends in the X direction, and a mover (coil) 10 that is coupled to the lower surface of the X stage 130. Thus, by controlling the mover 10 of the X linear motor 2X, the X stage 130 is positioned in the X direction.

A pair of Y linear motors 2Y are provided at both ends of the surface plate 140. Each of the Y linear motors 2Y includes a mover 10 and a stator 20. The slider 124 is fixed to the stator 20 of the Y linear motor 2Y. The Y stage 120 is positioned in the Y direction by controlling the mover 10 of the Y linear motor 2Y.

The above is the configuration of the stage apparatus 100. The linear motor 2 according to the embodiment can be suitably used for the X linear motor 2X or the Y linear motor 2Y of the stage apparatus 100. The stage apparatus 100 can be used for positioning a wafer or a glass substrate in an exposure apparatus, or can be used for an actuator used in a scanning electron microscope (SEM).

The description has been given above based on the embodiment of the present invention. It is to be understood by those skilled in the art that these embodiments are illustrative, and that various modifications and changes are possible within the scope of the claims of the present invention, and that such modifications and changes are also within the scope of the claims of the present invention. It is understood. Accordingly, the description and drawings herein are to be regarded as illustrative rather than restrictive.

(First modification)
Next, a first modification will be described. FIG. 8 is a cross-sectional view taken along line AA of the stator 20 including the base yoke 28 according to the first modification. FIG. 9 is an enlarged cross-sectional view of the base yoke 28 of the first modification. In FIG. 9, the vertical range of the end surface 28 a of the base yoke 28 is divided into three regions 28 aa, 28 ab, and 28 ac that are divided into three equal parts by a trisection line 28 t 1 and a trisection line 28 t 2. As shown in FIG. 8, in the base yoke 28 according to this modification, the center 28n of the hole 28h, which is a fastening portion in the end face 28a, is divided into three equal parts in the Z-axis direction that is the first direction. Is located in the region 28ac farthest from the region where the fulcrum appears. As shown in FIG. 8, in this modification, in the Z-axis direction, the range of the bolt 29 that is a fastener is included in the range opposite to the side where the fulcrum appears when the end face 28a is divided into two. That is, the bolt 29 is positioned below the center 28m of the vertical range of the end surface 28a including the head 29a. Also in this modification, the same effect can be obtained in the configuration common to the embodiment. In addition, according to the base yoke 28 of this modification, the distance on the side of the above-mentioned action point is further increased, and the equilibrating fastening force Ft can be further reduced.

(Second modification)
In the description of the embodiment, the example in which the back yokes 23a and 23b are fastened to the both end surfaces 28a of the base yoke 28 by the bolts 29 is described, but the present invention is not limited thereto. One back yoke may be formed integrally with the base yoke. That is, the other I-shaped back yoke may be coupled to the L-shaped yoke in which the back yoke and the base yoke are integrally formed. FIG. 10 is a cross-sectional view of a stator 220 according to a second modification. FIG. 11 is a partial cross-sectional view of the base yoke portion 228 of the yoke 223, mainly showing the periphery of the end face 28a. 10 corresponds to FIG. 3 and FIG. 11 corresponds to FIG. 4. These same or equivalent components are denoted by the same reference numerals. The yoke 223 is an L-shaped yoke including a back yoke part 223b and a base yoke part 228. The stator 220 is different from the stator 20 of the embodiment in that a back yoke portion 223b and a base yoke portion 228 are integrally formed, and other configurations are the same. That is, the back yoke part 223b has the same characteristics as the back yoke 23b of the embodiment, and the base yoke part 228 has the same characteristics as the base yoke 28 of the embodiment. Therefore, the overlapping description will be omitted and the differences will be described mainly.

As shown in FIG. 10, the back yoke 23 a has a bolt 29 as a fastener inserted from the outside of the yoke hole 23 h and is screwed into the hole 28 h that is a fastening portion, whereby the base yoke portion 228 of the yoke 223 is inserted. It is fixed to the end face 28a. The hole 28h is provided on the side opposite to the side where the fulcrum appears when the end face 28a is divided into two in the Z-axis direction. In particular, in the Z-axis direction, the center of the hole 28h, which is a fastening portion on the end surface 28a, is located on the opposite side to the side on which the fulcrum appears when the end surface 28a is divided into two. That is, when the fulcrum is the upper end portion 28u of the end surface 28a of the base yoke portion 228, the center 28n of the vertical range of the hole 28h in the end surface 28a of the base yoke portion 228 is the center 28m of the end surface 28a in the Z-axis direction range. Located on the lower side. As shown in FIG. 11, the distance Ln from the upper end 28u of the end face 28a of the base yoke 228 to the center 28n of the hole 28h is larger than the distance Lm from the upper end 28u to the center 28m of the end face 28a. Since the center 28n of the hole 28h is located away from the upper end 28u, the distance on the side of the above-mentioned action point can be increased, and the fastening force Ft that can be balanced can be reduced. Also in this modification, the same effect can be obtained in the configuration common to the embodiment. In addition, according to the stator 220 of this modified example, since the back yoke portion 223b and the base yoke portion 228 are integrally formed, the number of processing steps for holes for connecting them and the number of mounting steps for bolts are reduced. It becomes possible.

(Other variations)
In the description of the embodiment, the example in which the fastening portion is the hole 28h having the female screw 28s and the fastener is the bolt 29 has been described, but the present invention is not limited thereto, and these may be other types of fastening means. . For example, the fastener may be a rivet and the fastening portion may be a rivet hole.
In the description of the embodiment, the example in which the hole 28h is provided in parallel to the Y-axis direction has been described. However, the present invention is not limited to this. For example, the hole 28h may be provided to be inclined.
In the description of the embodiment, the example in which the back yokes 23a and 23b are fixed to the end surface 28a of the base yoke 28 by the bolts 29 is described, but the present invention is not limited to this. In addition to the bolts 29, auxiliary fixing means such as an adhesive may be used in combination.

In the drawings used for the description, in order to clarify the relationship between the members, the cross sections of some of the members are hatched, but the hatching does not limit the materials and materials of these members.

2 ・・ Linear motor, 10 ・・ Motor, 20 ・・ Stator, 23a ・ Back yoke, 24 ・ Field magnet, 25 ・ Main magnet, 26 ・・ Pole magnet, 28 ・・ Base yoke, 28h ... hole, 29 ... bolt, 100 ... stage device.

The present invention can be used for a linear motor.

Claims

A field magnet provided facing the mover;
A base yoke that is spaced apart from the field magnet in the first direction side;
A back yoke to which the field magnet is fixed;
Including a stator including
The back yoke is fixed to the end surface of the base yoke by coupling a fastener to a fastening portion provided on the end surface of the base yoke,
When the magnetic attraction force generated by the field magnet using the back yoke as a lever is a power point load,
The fastening portion exerts a fastening force that is an action point load that balances the force point load across a fulcrum that appears on the end face,
The said fastening part is provided in the opposite side to the side in which the said fulcrum appears when the said end surface is divided into the said 1st direction.
2. The linear motor according to claim 1, wherein, in the first direction, the center of the fastening portion on the end surface is located on a side opposite to a side where the fulcrum appears when the end surface is divided into two.
The center of the said fastening part in the said end surface in the said 1st direction is located in the area | region furthest from the area | region where the said fulcrum appears when the said end surface is divided into three equal parts. Linear motor.
4. The linear device according to claim 1, wherein in the first direction, the range of the fastener is included in a range opposite to a side where the fulcrum appears when the end face is divided into two. 5. motor.
5. The linear motor according to claim 1, wherein the fastening portion is a screw hole drilled in the end face, and the fastener is a bolt screwed into the screw hole.
A stage apparatus comprising the linear motor according to any one of claims 1 to 5.