WO2017124864A1 - 一种基于无液氦室温孔超导磁体的强磁场扫描探针显微镜 - Google Patents

一种基于无液氦室温孔超导磁体的强磁场扫描探针显微镜 Download PDF

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WO2017124864A1
WO2017124864A1 PCT/CN2016/110236 CN2016110236W WO2017124864A1 WO 2017124864 A1 WO2017124864 A1 WO 2017124864A1 CN 2016110236 W CN2016110236 W CN 2016110236W WO 2017124864 A1 WO2017124864 A1 WO 2017124864A1
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Prior art keywords
superconducting magnet
scanning probe
probe microscope
room temperature
magnetic field
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PCT/CN2016/110236
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English (en)
French (fr)
Inventor
吴施伟
孙泽元
张帅
黄迪
周盛予
殷立峰
高春雷
沈健
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复旦大学
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Priority to US16/070,909 priority Critical patent/US10539590B2/en
Publication of WO2017124864A1 publication Critical patent/WO2017124864A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/18—Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C3/00—Vessels not under pressure
    • F17C3/02—Vessels not under pressure with provision for thermal insulation
    • F17C3/08—Vessels not under pressure with provision for thermal insulation by vacuum spaces, e.g. Dewar flask
    • F17C3/085—Cryostats
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F6/00—Superconducting magnets; Superconducting coils
    • H01F6/04—Cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/068—Special properties of materials for vessel walls
    • F17C2203/0687—Special properties of materials for vessel walls superconducting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F17C2223/0161—Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG

Definitions

  • the invention belongs to the technical field of scanning probe microscopy, and particularly relates to a strong magnetic field scanning probe microscope using a liquid-free ⁇ room temperature hole superconducting magnet.
  • Scanning Probe Microscope is a general term for various scanning probe microscopes including scanning tunneling microscopes and atomic force microscopes. They all work by using various interactions between the probe of the microscope and the surface of the sample to be tested, such as tunneling current, chemical and electrostatic forces. When the probe is scanned on the surface of the sample, the interaction between the probe and the sample can reflect the rich information of the sample, such as surface topography, electronic density distribution and surface potential.
  • SPM Scanning Probe Microscope
  • the object of the present invention is to provide a strong magnetic field scanning probe microscope based on a liquid-free ⁇ room temperature hole superconducting magnet, and at the same time, the scanning probe microscope has a low vibration environment for achieving atomic resolution.
  • the invention discloses a strong magnetic field scanning probe microscope based on a liquid-free ⁇ room temperature hole superconducting magnet, comprising a room temperature hole superconducting magnet without liquid helium consumption, a scanning probe microscope and a computer control circuit system; wherein the liquid free ⁇ The room temperature hole superconducting magnet consumed includes: an liquid-free closed-loop refrigerator, a superconducting magnet, and a chamber having a room temperature hole; the scanning probe microscope includes: a scanning head, a microscope vacuum chamber, and a vibration isolation platform on which the microscope is placed .
  • the liquid-free closed-loop refrigerator is used for cooling a superconducting magnet to meet the low temperature conditions required for the superconducting magnet to operate.
  • the specific cooling method can connect the cold end of the refrigerator and the superconducting magnet to form a thermal contact to pass the cold through a metal with excellent heat conductivity such as oxygen-free copper, and can also liquefy the helium gas and maintain the liquid helium through the refrigerator in the superconducting chamber.
  • the superconducting magnet is immersed in the liquid helium to satisfy the operating temperature of the superconducting magnet.
  • the superconducting magnet itself is composed of a solenoid or a discrete coil composed of a superconducting coil.
  • the strongest point of the magnetic field of the superconducting magnet is at the center of the superconducting magnet and also at the center of the room temperature chamber.
  • the room temperature hole of the room temperature chamber requires sufficient space to accommodate the scanning head of the scanning probe microscope and its partial vacuum chamber, but there must be no physical contact between the two to prevent the vibration of the refrigerator from being directly transmitted to the scanning probe microscope. .
  • the entire liquid-free ⁇ -free room temperature hole superconducting magnet is fixed to the floor or ceiling or wall by a separate bracket.
  • the mechanical vibration inherent in the closed-loop refrigerator should be as small as possible, such as a pulse-type refrigerator with less vibration.
  • the type of the closed cycle refrigerator is not limited to a pulse tube refrigerator, and includes a Gifford-McMahon refrigerator, a Stirling type refrigerator, and an improved refrigerator based thereon. The selection requirements depend on the vibration isolation requirements of the scanning probe microscope.
  • the scanning head In the scanning probe microscope, the scanning head will be in operation at the center of the room temperature hole superconducting magnet without liquid helium. Scanning probe microscopy can also be used theoretically in the atmosphere. If in a vacuum or even an ultra-high vacuum environment, a portion of the microscope vacuum chamber needs to pass through the room temperature hole of the superconducting magnet, but it cannot physically contact the cavity of the magnet. In order to avoid the influence of strong magnetic field environment on the work of scanning probe microscope, and to be able to sample and probe Applying a magnetic field to the needle, scanning the probe microscope system and the cavity through the room temperature hole of the magnet requires the use of a non-magnetic or weakly magnetic material. In order to isolate the mechanical vibration of the ground, the scanning probe microscope and its vacuum chamber are placed on the vibration isolation platform.
  • the computer control circuitry is remotely coupled to the scanning probe microscope to control the operational operation of the scanning probe microscope.
  • the operating temperature of the scanning probe microscope is independent of the low temperature environment required for the operation of the superconducting magnet, and can be selected from room temperature operation, or can be equipped with a liquid helium thermostat, a continuous flow thermostat or mechanical vibration isolation.
  • the liquid helium cryostat operates at low or variable temperatures. Therefore, the temperature of the scanning probe microscope is not subject to the low temperature environment required for the operation of the superconducting magnet.
  • the vacuum chamber of the scanning probe microscope can be conveniently baked at a high temperature to realize an ultra-high vacuum environment.
  • the strong magnetic field scanning probe microscope of the present invention adopts a room temperature hole superconducting magnet without liquid helium consumption, and is free from the dependence of the conventional strong magnetic field scanning probe system on liquid helium;
  • the operation of the scanning probe microscope in the present invention is independent of the low temperature environment required for the operation of the superconducting magnet, and the temperature of the scanning probe microscope is not required to be low temperature required for the working operation of the superconducting magnet, and the scanning head is applied with a strong magnetic field. Can perform large-scale temperature measurement;
  • the scanning probe microscope and the vacuum chamber thereof can be baked at a high temperature independently of the room temperature hole superconducting magnet, and the condition for achieving ultra-high vacuum can be satisfied.
  • FIG. 1 is a schematic view showing the structure of a strong magnetic field scanning probe microscope based on a liquid-free ⁇ -consuming room temperature hole superconducting magnet according to the present invention.
  • FIG. 2 is a schematic view showing an embodiment of the present invention applied to a hyperthermia magnetic field ultra-high vacuum scanning tunneling microscope which is cooled by a continuous flow Dewar method.
  • FIG. 3 is a schematic view showing an embodiment of the present invention applied to a low-temperature strong magnetic field ultra-high vacuum scanning tunneling microscope based on refrigeration of a closed cycle refrigerator.
  • the invention proposes a solution for realizing a strong magnetic field scanning probe microscope by using a room temperature hole superconducting magnet without liquid helium consumption to provide a strong magnetic field environment.
  • the room temperature pore superconducting magnet 1 is cooled by the closed cycle refrigerator 2 to satisfy the superconducting state of the superconducting magnet during operation.
  • the magnetic field of the superconducting magnet has the strongest point in the center of the room temperature chamber, which accommodates the scanning head 3 of the scanning probe microscope and part of the vacuum chamber 4.
  • the room temperature hole superconducting magnet and the scanning probe microscope have no physical contact to prevent the vibration of the closed cycle refrigerator for the cooled superconducting magnet from being directly transmitted to the scanning probe microscope.
  • the entire liquid-free ⁇ -free room temperature hole superconducting magnet is fixed to the floor or the ceiling or the wall by the independent bracket 5.
  • the mechanical vibration inherent in the closed-loop refrigerator should be as small as possible, such as a pulse-type refrigerator with less vibration.
  • the type of the closed cycle refrigerator is not limited to a pulse tube refrigerator, and includes a Gifford-McMahon refrigerator, a Stirling type refrigerator, and an improved refrigerator based thereon.
  • the selection requirements depend on the vibration isolation requirements of the scanning probe microscope.
  • the scanning probe microscope and its vacuum chamber are placed on the vibration isolation platform 6.
  • the computer control circuitry 7 is remotely coupled to the scanning probe microscope scan head 3 to control the operational operation of the scanning probe microscope.
  • the strong magnetic field scanning probe microscope proposed by the invention can realize atomic level spatial resolution. Because scanning tunneling microscopy is the most important member of the family of scanning probe microscopes, its resolution can reach atomic resolution. We describe below in conjunction with two specific embodiments based on scanning tunneling microscopy.
  • One embodiment is applied to a hyperthermia magnetic field ultra-high vacuum scanning tunneling microscope using continuous flow Dewar refrigeration, see Figure 2.
  • the scanning tunneling microscope is placed in an ultra-high vacuum In the cavity, the ultra-high vacuum environment is realized and maintained by the ion pump 8 or the like.
  • the scanning head 3 of the scanning tunneling microscope is suspended by the damper spring at the cold end of the continuous flow Dewar 9.
  • This unit is moved by the hollow linear introducer 10, and can be positioned at the center of the room temperature hole superconducting magnet 1 or at other positions of the ultra-high vacuum chamber 4 for changing samples and tips.
  • the temperature of the scanning tunneling microscope is controlled by the operation of the continuous flow Dewar 9, completely independent of the low temperatures required for superconducting magnet operation. Therefore, the temperature of the scanning tunneling microscope can be higher than the superconducting temperature required for the superconducting magnet.
  • Another embodiment is an ultra-high vacuum scanning tunneling microscope for low temperature and strong magnetic field based on refrigeration of a closed cycle refrigerator, as shown in FIG.
  • the low temperature environment of the scanning tunneling microscope is also achieved with another closed cycle refrigerator 11, completely rid of the dependence on liquid helium.
  • the mechanical vibration of the closed cycle refrigerator 11 for the refrigeration scanning tunneling microscope is isolated by the cooling and vibration isolating interface 12 based on the helium exchange gas.
  • the closed cycle refrigerator itself also requires a separate bracket 13 to be fixed to the ground or ceiling or wall. Combined with the room temperature hole superconducting magnet without liquid helium consumption, the whole set of high magnetic field low temperature ultra-high vacuum scanning tunneling microscope is not dependent on liquid helium.
  • the temperature of the scanning tunneling microscope is not subject to the low temperature environment required for the operation of the superconducting magnet, and may be higher or lower than the temperature of the superconducting magnet.
  • the room temperature hole superconducting magnet that realizes the strong magnetic field environment adopts the closed cycle refrigerator without liquid helium consumption, and gets rid of the dependence on the liquid helium.
  • the mechanical vibration of the refrigerator will not be directly transmitted to the scanning tunneling microscope, and the atomic resolution of the scanning probe microscope can be realized.
  • the operation of the scanning tunneling microscope is independent of the low temperature environment required for the operation of the superconducting magnet, and its temperature is not dependent on the low temperature required for the operation of the superconducting magnet.
  • the scanning tunneling microscope and its vacuum chamber can be baked at a high temperature independently of the room temperature hole superconducting magnet to meet the conditions for achieving ultra-high vacuum.

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Abstract

一种基于无液氦消耗室温孔超导磁体的强磁场扫描探针显微镜，属于扫描探针显微镜技术领域。包括：无液氦消耗的室温孔超导磁体(1)、扫描探针显微镜和计算机控制电路系统(7)；所述室温孔超导磁体(1)包括无液氦消耗的闭循环制冷机(2)、超导磁体和具备室温孔的腔室；所述扫描探针显微镜包括扫描头(3)、真空腔室(4)、隔振平台(6)。该方案采用由闭循环制冷机(2)制冷的室温孔超导磁体(1)，摆脱了强磁场运行对液氦的依赖；与闭循环制冷机(2)相连的超导磁体和扫描探针显微镜之间无物理接触，制冷机(2)的机械振动不会直接传到扫描探针显微镜上，可以实现扫描探针显微镜的原子级分辨能力；扫描探针显微镜的温度不受制于超导磁体工作运行时要求的低温条件；扫描探针显微镜及其真空腔体(4)可以独立于超导磁体进行高温烘烤，满足实现超高真空的条件。

Description

一种基于无液氦室温孔超导磁体的强磁场扫描探针显微镜 技术领域
本发明属于扫描探针显微镜技术领域，具体涉及应用无液氦室温孔超导磁体实现强磁场扫描探针显微镜。
背景技术
扫描探针显微镜(Scanning Probe Microscope,SPM)是包括扫描隧道显微镜、原子力显微镜等在内的各类扫描探针显微镜的总称。它们的工作原理均利用显微镜的探针与待测样品表面之间的各种相互作用如隧穿电流、化学力和静电力等。当探针在样品表面进行扫描时，探针和样品之间的相互作用变化可以反映样品丰富的信息，如表面形貌、电子态密度分布和表面势等。经过过去三十多年的发展，扫描探针显微镜的家族成员不断扩充和完善，并已成为表面科学、材料科学、物理学、化学和生命科学等多个领域中不可或缺的研究工具。在发展过程中，各类扫描探针显微镜通常需要放置在不同环境下，如超高真空，低温、磁场、电场、微波和光场等。在环境参量的改变和调控下，扫描探针显微镜的功能更强大，测量更精密。就强磁场下的扫描探针显微镜来说，待测样品在外加强磁场的作用下会发生许多物理过程和现象，如电子自旋甚至原子核自旋开始进动、翻转等。在现有的技术条件下，强磁场的实现大都需要利用超导材料的零电阻效应制成超导线圈磁体。而这样的超导磁体由于超导态的转变温度均较低(一般小于10K)，需要低温环境来保障。在扫描探针显微镜领域，由于探针和样品之间的距离很近，甚至控制到单原子尺度大小，这些仪器对外界的振动和噪音都极端敏感。因此，在强磁场环境下的扫描探针显微镜，超导磁体大都放置在液氦杜瓦恒温器中，通过液氦在4.2K的相变潜热来实现制冷，满足超导磁体的超导相变温度，引入大电流产生强磁场。这一方式因为液氦自身无振动产生，往往又可以和扫描探针显微镜直接集成，形成低温强磁场扫描探针显微镜。但是，液氦是一种全球稀缺资源，价格极其昂贵。近年来，由于氦资源的不可再生性，液氦价格更是节节攀升。有鉴于此，国际上纷纷开始利用无需液氦消耗的闭循环制冷机如吉福特-麦克马洪制冷机和脉管式制冷机等来对超导磁体进行致冷降温。然而，由于常规的闭循环制冷机具有较强的机械振动和噪音，对振动和噪音极端敏感的扫描探针显微镜目前还未采用闭循环制冷机降温的超导磁体。所以，如果能够利用无需液氦消耗 的闭循环制冷机，实现强磁场环境的扫描探针显微镜将具有十分重要的意义。
发明内容
本发明的目的在于提出一种基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，与此同时扫描探针显微镜具备实现原子级分辨的低振动环境。
本发明提出的基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，包括无液氦消耗的室温孔超导磁体、扫描探针显微镜和计算机控制电路系统；其中，所述无液氦消耗的室温孔超导磁体包括：无液氦闭循环制冷机、超导磁体和具备室温孔的腔室；所述扫描探针显微镜包括：扫描头、显微镜真空腔室、放置显微镜的隔振平台。
所述无液氦消耗的室温孔超导磁体中，无液氦闭循环制冷机用于制冷超导磁体，以满足超导磁体在工作时所需的低温条件。具体制冷方式可通过无氧铜等导热优良的金属把制冷机的冷端和超导磁体相连形成热接触传导致冷；也可以在超导腔室中通过制冷机液化氦气并维持液氦，使超导磁体浸泡在液氦中满足超导磁体的工作温度。超导磁体本身由超导线圈组成的螺线管或分立线圈构成。它可以是一维的强磁场，也可以组成二维或三维的矢量强磁场。超导磁体的磁场最强点位于超导磁体的中心，也同时是室温孔腔室的中心。室温孔腔室的室温孔需要有足够空间容纳扫描探针显微镜的扫描头及其部分真空腔体，但两者之间不能有任何物理接触，以防止制冷机的振动直接传递至扫描探针显微镜。整个无液氦消耗的室温孔超导磁体通过独立支架固定于地面或天花板或墙壁等。为避免无液氦闭循环制冷机的振动通过地面等其他间接的方式传递到扫描探针显微镜，闭循环制冷机固有的机械振动应尽可能小，如选用振动较小的脉管式制冷机。但所述闭循环制冷机的类型不限于脉管式制冷机，还包括吉福特-麦克马洪制冷机、斯特林式制冷机、以及基于这些的改良型制冷机等。选型要求视扫描探针显微镜的隔振要求而定。
所述扫描探针显微镜中，扫描头在工作时将位于无液氦消耗的室温孔超导磁体的中心。扫描探针显微镜理论上也可在大气下使用。如果在真空甚至超高真空环境下，显微镜真空腔体的一部分需要穿过超导磁体的室温孔，但不能物理接触磁体的腔体。为避免强磁场环境影响扫描探针显微镜的工作，并能够对样品和探 针施加磁场，扫描探针显微镜系统和穿过磁体室温孔的腔体需要使用无磁性或弱磁性的材料。为隔离地面的机械振动，扫描探针显微镜及其真空腔体放置于隔振平台上。
所述计算机控制电路系统与扫描探针显微镜远程连接，控制扫描探针显微镜的操作运行。
本发明中，所述扫描探针显微镜的运行温度独立于超导磁体运行所需要的低温环境，既可选择室温运行，又可配以液氦恒温器、连续流恒温器或机械振动隔离的无液氦低温恒温器在低温或变温条件下运行。因此，扫描探针显微镜的温度不受制于超导磁体工作运行时要求的低温环境。
本发明中，所述扫描探针显微镜的真空腔体和室温孔超导磁体之间由于无物理接触，扫描探针显微镜的真空腔体可以方便地进行高温烘烤，实现超高真空环境。
本发明具有以下有益效果：
1、本发明中的强磁场扫描探针显微镜采用了无液氦消耗的室温孔超导磁体，摆脱了常规强磁场扫描探针系统运行对液氦的依赖；
2、本发明中与闭循环制冷机相连的超导磁体和扫描探针显微镜之间无物理接触，制冷机的机械振动不会直接传到扫描探针显微镜上，可以实现扫描探针显微镜的原子级分辨能力；
3、本发明中扫描探针显微镜的运行独立于超导磁体运行所需的低温环境，扫描探针显微镜的温度不受制于超导磁体工作运行时要求的低温，扫描头在施加强磁场的同时能进行大范围变温测量；
4、本发明中扫描探针显微镜及其真空腔体可以独立于室温孔超导磁体进行高温烘烤，满足实现超高真空的条件。
附图说明
图1是本发明提出的基于无液氦消耗室温孔超导磁体的强磁场扫描探针显微镜的结构示意图。
图2是本发明应用于通过连续流杜瓦方式致冷的变温强磁场超高真空扫描隧道显微镜的一种实施例示意图。
图3是本发明应用于基于闭循环制冷机致冷的低温强磁场超高真空扫描隧道显微镜的一种实施例示意图。
图中标号：1-室温孔超导磁体，2-闭循环制冷机，3-扫描探针显微镜扫描头，4-扫描探针显微镜真空腔体，5-室温孔超导磁体支架，6-减振平台，7-扫描探针显微镜计算机控制电路系统；8-离子泵，9-连续流杜瓦，10-中空直线导入器；11-闭循环制冷机，12-基于氦气交换气的致冷隔振界面，13-固定闭循环制冷机的独立支架。
具体实施方式
下面结合具体实施例，并参照附图，对本发明进一步详细说明。
本发明提出了利用无液氦消耗的室温孔超导磁体提供强磁场环境实现强磁场扫描探针显微镜的方案。在本发明中，室温孔超导磁体1通过闭循环制冷机2制冷，以满足超导磁体在工作时的超导态。超导磁体的磁场最强点位于室温孔腔室的中心，正好容纳扫描探针显微镜的扫描头3及部分真空腔体4。但室温孔超导磁体和扫描探针显微镜在物理上没有任何接触，以防止制冷超导磁体用的闭循环制冷机的振动直接传递到扫描探针显微镜上。为此，整个无液氦消耗的室温孔超导磁体通过独立支架5固定于地面或天花板或墙壁等。为避免无液氦制冷机的振动通过地面等其他间接的方式传递到扫描探针显微镜，闭循环制冷机固有的机械振动应尽可能小，如选用振动较小的脉管式制冷机。但所述闭循环制冷机的类型不限于脉管式制冷机，还包括吉福特-麦克马洪制冷机、斯特林式制冷机、以及基于这些的改良型制冷机等。选型要求视扫描探针显微镜的隔振要求而定。为隔离地面的机械振动，扫描探针显微镜及其真空腔体放置于隔振平台6上。所述计算机控制电路系统7与扫描探针显微镜扫描头3远程连接，控制扫描探针显微镜的操作运行。
本发明提出的强磁场扫描探针显微镜可以实现原子级空间分辨。由于扫描隧道显微镜是扫描探针显微镜家族中的最主要成员，且其分辨率可以达到原子级分辨。我们下面结合两种基于扫描隧道显微镜的具体实施例加以说明。
一种实施例是应用于采用连续流杜瓦方式致冷的变温强磁场超高真空扫描隧道显微镜，参见图2所示。在这一实施例中，扫描隧道显微镜放置于超高真空 腔体中，超高真空环境由离子泵8等实现和维持。扫描隧道显微镜的扫描头3通过减震弹簧悬挂于连续流杜瓦9的冷端。这一整体通过中空直线导入器10移动，既可以定位在室温孔超导磁体1的中心，又可以定位在超高真空腔体4的其他位置，用于更换样品和针尖等。扫描隧道显微镜的温度通过连续流杜瓦9的操作控制，完全独立于超导磁体运行所需要的低温。因此，扫描隧道显微镜的温度可以高于超导磁体要求的超导温度。
另一种实施例是应用于基于闭循环制冷机致冷的低温强磁场超高真空扫描隧道显微镜，参见图3所示。在这一实施例中，扫描隧道显微镜的低温环境也利用另一闭循环制冷机11实现，完全摆脱对液氦的依赖。用于制冷扫描隧道显微镜的闭循环制冷机11的机械振动通过基于氦气交换气的致冷隔振界面12来隔离。闭循环制冷机本身同样需要独立支架13固定于地面或天花板或墙壁等。结合无液氦消耗的室温孔超导磁体，整套强磁场低温超高真空扫描隧道显微镜均不依赖液氦实现。和上一实施例中类似，扫描隧道显微镜的温度不受制于超导磁体工作运行时要求的低温环境，可以高于或低于超导磁体的温度。
在以上两种实施例中，实现强磁场环境的室温孔超导磁体采用了无液氦消耗的闭循环制冷机制冷，摆脱了对液氦的依赖。超高真空扫描隧道显微镜与室温孔超导磁体之间无物理接触，制冷机的机械振动不会直接传到扫描隧道显微镜上，可以实现扫描探针显微镜的原子级分辨能力。扫描隧道显微镜的运行独立于超导磁体运行所需的低温环境，其温度不受制于超导磁体工作运行时要求的低温。扫描隧道显微镜及其真空腔体独立于室温孔超导磁体可以进行高温烘烤，满足实现超高真空的条件。
以上所述的两种具体实施例，对本发明的目的、技术方案和有益效果做了进一步的描述说明。所应理解的是，以上所述仅为本发明的具体实施例而已，并不限于本发明。凡是在本发明精神和原则之内，所做的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。

Claims (5)

  1. 一种基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，其特征在于，包括无液氦消耗的室温孔超导磁体、扫描探针显微镜和计算机控制电路系统；所述无液氦消耗的室温孔超导磁体包括：无液氦消耗的闭循环制冷机、超导磁体和具备室温孔的腔室；所述扫描探针显微镜包括：扫描头、显微镜真空腔室、放置显微镜的隔振平台；其中：
    所述无液氦消耗的室温孔超导磁体中，无液氦闭循环制冷机用于制冷超导磁体，以满足超导磁体在工作时所需的低温条件；超导磁体本身由超导线圈组成的螺线管或分立线圈构成，该超导磁体的磁场最强点位于超导磁体的中心，也同时是室温孔腔室的中心；室温孔腔室的室温孔有足够空间容纳扫描探针显微镜的扫描头及其部分真空腔体，但两者之间没有任何物理接触，以防止制冷机的振动直接传递至扫描探针显微镜；整个无液氦消耗的室温孔超导磁体通过独立支架固定于地面、天花板或墙壁等；
    所述扫描探针显微镜中，扫描头在工作时位于无液氦消耗的室温孔超导磁体的中心；在真空甚至超高真空环境下，显微镜真空腔体的一部分穿过超导磁体的室温孔，但不与超导磁体的腔体有物理接触；扫描探针显微镜和超导磁体室温孔的腔体使用无磁性或弱磁性的材料；扫描探针显微镜及其真空腔体放置于隔振平台上；
    所述计算机控制电路系统与扫描探针显微镜远程连接，控制扫描探针显微镜的操作运行。
  2. 根据权利要求1所述的基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，其特征在于，所述超导磁体是一维的强磁场，或者是二维、三维的矢量强磁场。
  3. 根据权利要求1所述的基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，其特征在于，所述闭循环制冷机选自脉管式制冷机、吉福特-麦克马洪制冷机、斯特林式制冷机、以及基于这些制冷机的改良型制冷机。
  4. 根据权利要求1所述的基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，其特征在于，所述扫描探针显微镜的运行温度独立于超导磁体运行所需要的低温环境，既可选择室温运行，又可配以液氦恒温器、连续流恒温器或机械振 动隔离的无液氦低温恒温器在低温或变温条件下运行。
  5. 根据权利要求1所述的基于无液氦室温孔超导磁体的强磁场扫描探针显微镜，其特征在于，所述扫描探针显微镜及其真空腔体可以独立于超导磁体进行高温烘烤，满足实现超高真空的条件。
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