WO2017103962A1 - Actionneur de balayage optique, dispositif de balayage optique, et procédé de fabrication d'un actionneur de balayage optique - Google Patents

Actionneur de balayage optique, dispositif de balayage optique, et procédé de fabrication d'un actionneur de balayage optique Download PDF

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Publication number
WO2017103962A1
WO2017103962A1 PCT/JP2015/006329 JP2015006329W WO2017103962A1 WO 2017103962 A1 WO2017103962 A1 WO 2017103962A1 JP 2015006329 W JP2015006329 W JP 2015006329W WO 2017103962 A1 WO2017103962 A1 WO 2017103962A1
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Prior art keywords
ferrule
optical scanning
light
steps
hole
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PCT/JP2015/006329
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English (en)
Japanese (ja)
Inventor
雅史 山田
矢島　浩義
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オリンパス株式会社
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Priority to PCT/JP2015/006329 priority Critical patent/WO2017103962A1/fr
Publication of WO2017103962A1 publication Critical patent/WO2017103962A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present invention relates to an optical scanning actuator that optically scans an object, an optical scanning device that includes the optical scanning actuator, and a method for manufacturing the optical scanning actuator.
  • a piezoelectric element provided on each side surface of a square columnar ferrule holding an optical fiber is known (for example, Patent Document 1).
  • the driving of the piezoelectric element vibrates the ferrule and thus the tip of the optical fiber, and the light emitted from the tip of the optical fiber is scanned on the object along a predetermined scanning path.
  • the size of the ferrule and the piezoelectric element is generally small, it is very difficult to accurately arrange the piezoelectric element at a desired position on the ferrule. If the piezoelectric element is arranged at a position deviated from the desired position on the ferrule, there is a possibility that the vibration characteristic of the optical fiber as expected and the scanning locus cannot be obtained.
  • an object of the present invention made by paying attention to this point is that an optical scanning actuator and an optical scanning device in which the placement accuracy of the piezoelectric element on the ferrule is improved, and the placement accuracy of the piezoelectric element on the ferrule can be improved.
  • An object of the present invention is to provide a method for manufacturing an optical scanning actuator.
  • An optical scanning actuator that scans light from a light source on an object, An optical fiber for guiding the light from the light source; A ferrule having a through-hole holding the light emitting end from the light source so as to vibrate in a state where the optical fiber is inserted, and having one or more steps on the side surface; A piezoelectric element having a position defined by the one or more steps and secured to a side surface of the ferrule; It has.
  • the piezoelectric element is preferably applied to the one or more steps.
  • the side surface of the ferrule is provided with a pair of steps at positions facing each other through the through hole, and the shape of the pair of steps is rotationally symmetric with respect to the central axis of the through hole. Is preferred.
  • a portion of the side surface of the ferrule adjacent to the step, to which the piezoelectric element is fixed extends in parallel to the central axis direction of the through hole.
  • An invention of an optical scanning device that achieves the above object
  • the optical scanning actuator that scans light from a light source on an object; and
  • a light detection unit that detects light obtained from the object by irradiation with the light and converts the light into an electrical signal;
  • a signal processing unit that generates an image signal based on an electrical signal from the light detection unit; It has.
  • a method of manufacturing an optical scanning actuator that achieves the above-described object is as follows.
  • a method of manufacturing an optical scanning actuator that scans light from a light source on an object A ferrule forming step that has a through hole that holds the light emission end of the light source from the light source in a state where the optical fiber is inserted in a vibrated manner and that has one or more steps on the side surface, and forms a ferrule; Holding the optical fiber inside the through-hole of the ferrule, holding an optical fiber;
  • a piezoelectric element fixing step wherein a position of the piezoelectric element is defined by the one or more steps, and the piezoelectric element is fixed to a side surface of the ferrule; including.
  • the ferrule is preferably formed by press working or casting.
  • an optical scanning actuator and an optical scanning device in which the placement accuracy of the piezoelectric element on the ferrule is improved, and a manufacturing method of the optical scanning actuator capable of improving the placement accuracy of the piezoelectric element on the ferrule. can do.
  • FIG. 1 is a block diagram illustrating a schematic configuration of an optical scanning device according to a first embodiment.
  • FIG. 2 is an overview diagram schematically showing the scope of FIG. 1. It is sectional drawing of the front-end
  • FIG. 4A is a perspective view illustrating a ferrule
  • FIG. 4B is a diagram illustrating an optical scanning actuator including the ferrule illustrated in FIG. It is a perspective view which shows an actuator.
  • FIG. 5A is a perspective view showing a ferrule
  • FIG. 5B is a view for optical scanning including the ferrule of FIG. 5A. It is a perspective view which shows an actuator.
  • FIG. 6A is a perspective view showing a ferrule
  • FIG. 6A is a perspective view showing a ferrule
  • FIG. 6B is a view for optical scanning including the ferrule of FIG. 6A. It is a perspective view which shows an actuator.
  • FIG. 7A is a perspective view showing a ferrule
  • FIG. 7B is a view for optical scanning including the ferrule of FIG. 7A.
  • FIG. 8A is a perspective view showing a ferrule
  • FIG. 8B is a view for optical scanning including the ferrule of FIG. 8A.
  • FIG. 9A is a perspective view illustrating a ferrule
  • FIG. 9B illustrates an optical scanning actuator including the ferrule of FIG. 9A. It is a perspective view shown.
  • FIG. 1 is a block diagram illustrating a schematic configuration of an optical scanning endoscope apparatus as the optical scanning apparatus according to the first embodiment.
  • the optical scanning endoscope apparatus 10 includes a scope 20, a control device main body 30, and a display 40.
  • the control device main body 30 includes a control unit 31 that controls the entire optical scanning endoscope apparatus 10, a light emission timing control unit 32, lasers 33R, 33G, and 33B (light sources), a coupler 34, and a drive control unit 38.
  • a photodetector 35 photodetection unit
  • an ADC analog-digital converter
  • the lasers 33R, 33G, and 33B constitute a light source that selectively emits light of a plurality of different wavelengths (in this embodiment, wavelengths of three colors R, G, and B) according to control by the light emission timing control unit 32. ing.
  • “selectively emitting light of a plurality of different wavelengths” means that the timing selected by the light emission timing control unit 32 is the light of any one wavelength selected by the light emission timing control unit 32. It means to inject at.
  • a DPSS laser semiconductor excitation solid-state laser
  • a laser diode can be used as the lasers 33R, 33G, and 33B.
  • the light emission timing control unit 32 controls the light emission timing of the light source according to the control signal from the control unit 31. For example, the light emission timing control unit 32 switches the wavelengths of R, G, and B light from the light source at predetermined time intervals (light emission cycles) in a predetermined light emission order during scanning.
  • the laser beams emitted from the lasers 33R, 33G, and 33B are incident on the illumination optical fiber 11 that is a single mode fiber as illumination light through an optical path that is coaxially combined by the coupler 34.
  • the coupler 34 is configured using, for example, a fiber multiplexer or a dichroic prism.
  • the lasers 33R, 33G, and 33B and the coupler 34 may be housed in a separate housing from the control device main body 30 that is connected to the control device main body 30 by a signal line.
  • the light incident on the illumination optical fiber 11 from the coupler 34 is guided to the distal end portion of the scope 20 and irradiated onto the object 100.
  • the drive control unit 38 of the control device main body 30 drives the optical scanning actuator 21 of the scope 20 by vibration to drive the tip of the illumination optical fiber 11 by vibration.
  • the illumination light emitted from the illumination optical fiber 11 is two-dimensionally scanned on the observation surface of the object 100 along a predetermined scanning path such as a spiral shape.
  • Light such as reflected light and scattered light obtained from the object 100 by irradiation of illumination light is received at the tip of the detection optical fiber bundle 12 constituted by a multimode fiber, passes through the scope 20, and the control device main body 30. It is guided to.
  • the light detector 35 detects light obtained by irradiation with light of any wavelength (color) of R, G, or B from the object 100 through the detection optical fiber bundle 12 for each light emission period of the light source. Then, an analog signal (electric signal) is output.
  • the ADC 36 converts the analog signal from the photodetector 35 into a digital signal (electric signal) and outputs it to the signal processing unit 37.
  • the signal processing unit 37 sequentially stores the digital signal corresponding to each wavelength input from the ADC 36 for each light emission period in association with the light emission timing and the scanning position in a memory (not shown). Information on the light emission timing and the scanning position is obtained from the control unit 31. In the control unit 31, information on the scanning position is calculated from information such as the amplitude and phase of the oscillating voltage applied by the drive control unit 38. Then, the signal processing unit 37 performs image processing such as enhancement processing, ⁇ processing, interpolation processing, and the like as necessary based on each digital signal input from the ADC 36 after scanning or during scanning. The image of the object 100 is generated and displayed on the display 40.
  • FIG. 2 is a schematic view schematically showing the scope 20.
  • the scope 20 includes an operation unit 22 and an insertion unit 23.
  • the operation unit 22 is connected to the illumination optical fiber 11, the detection optical fiber bundle 12, and the wiring cable 13 from the control device main body 30.
  • the illumination optical fiber 11, the detection optical fiber bundle 12, and the wiring cable 13 pass through the insertion portion 23 and extend to the distal end portion 24 of the insertion portion 23 (the portion in the broken line portion in FIG. 2).
  • FIG. 3 is an enlarged cross-sectional view showing the distal end portion 24 of the insertion portion 23 of the scope 20 of FIG.
  • the distal end portion 24 of the insertion portion 23 of the scope 20 includes an optical scanning actuator 21 that scans light from the light source on the object 100, a projection lens 25 (optical system), and a detection optical fiber bundle 12. Is provided.
  • the optical scanning actuator 21 includes an illumination optical fiber 11 that guides light from a light source, a ferrule 29 that holds the illumination optical fiber 11, and one or more (in this example) provided on a side surface of the ferrule 29. 4) piezoelectric elements 71 to 74 are provided.
  • the detection optical fiber bundle 12 is disposed so as to pass through the outer peripheral side portion of the insertion portion 23, and extends to the distal end of the distal end portion 24.
  • a detection lens (not shown) is provided at the tip of each fiber of the detection optical fiber bundle 12.
  • the projection lens 25 and the detection lens are arranged at the forefront of the distal end portion 24 of the insertion portion 23 of the scope 20.
  • the projection lens 25 is configured so that laser light emitted from the distal end portion 11 c of the illumination optical fiber 11 is irradiated onto the object 100 and is substantially condensed.
  • the detection lens is configured such that the laser light collected on the object 100 is reflected or scattered by the object 100 or the fluorescence generated by the irradiation of the laser light collected on the object 100 ( The light obtained from the object 100) is taken in, and is arranged so as to be condensed and coupled to the detection optical fiber bundle 12 arranged after the detection lens.
  • the projection lens 25 is not limited to a single lens configuration as in this example, and may be configured by a plurality of lenses.
  • FIG. 4A is a perspective view showing the ferrule 29 in this example
  • FIG. 4B is a perspective view showing the optical scanning actuator 21 of this example provided with the ferrule 29 of FIG. 4A. It is.
  • the rear end side portion of the insertion portion 23 of the ferrule 29 is fixed to the actuator holder 26, and the inside of the insertion portion 23 of the scope 20 is interposed via the actuator holder 26. It is fixed.
  • the ferrule 29 has a through-hole 29a, and the illumination optical fiber 11 is inserted into the through-hole 29a, and the light emission end from the light source in the illumination optical fiber 11 (that is, the illumination optical fiber).
  • the ferrule 29 is preferably made of a conductive material such as a metal (for example, nickel or kovar), but is not limited thereto.
  • a metal thin film is formed on a part or the entire surface of a nonmetallic member by plating or vapor deposition. You may be comprised with what was formed.
  • the illumination optical fiber 11 has an outer diameter smaller than the inner diameter of the through hole 29 a of the ferrule 29 and extends almost on the central axis of the through hole 29 a of the ferrule 29.
  • the adhesive 70 is fixed and held by the adhesive 70 in the through hole 29 a of the ferrule 29, and further extends from the through hole 29 a of the ferrule 29 to the distal end side of the insertion portion 23.
  • a portion from the fixed end 11a held by the ferrule 29 to the tip end portion 11c in the illumination optical fiber 11 is a vibrating portion 11b held so as to be able to vibrate.
  • the piezoelectric elements 71 to 74 have a rectangular parallelepiped shape in this example, and are configured by, for example, PZT (piezo elements). However, the piezoelectric elements 71 to 74 may have a shape other than a rectangular parallelepiped shape.
  • the ferrule 29 of this example has a substantially quadrangular prism shape (when viewed except for a groove described later), and the center axis of the ferrule 29 and the through hole for the illumination optical fiber 11
  • the central axis line of 29a coincides.
  • the central axis direction of the through hole 29a of the ferrule 29 (that is, the longitudinal direction of the ferrule 29) is the Z-axis direction, and the directions perpendicular to each other in a plane perpendicular to the Z-axis direction are the X-axis directions.
  • the Y-axis direction is the directions perpendicular to each other in a plane perpendicular to the Z-axis direction.
  • the side surface of the ferrule 29 (that is, the outer peripheral surface of the ferrule 29) has a pair of side surfaces 201 and 202 facing the positive side and the negative side in the X-axis direction, and the positive side and negative side in the Y-axis direction, respectively. And a pair of facing side surfaces 203 and 204.
  • the ferrule 29 may have an arbitrary column shape such as a prism shape other than the quadrangular column shape or a cylindrical shape.
  • grooves 201g, 202g, 203g, and 204g extending in parallel with the central axis direction (Z-axis direction) of the through hole 29a of the ferrule 29 are respectively extended over the entire length of the ferrule 29. Is formed.
  • the grooves 201g, 202g, 203g, and 204g in this example have a U-shaped cross-sectional shape in the XY plane direction, that is, the groove walls 201g, 202g, 203g, and 204g facing each other and the grooves
  • the bottom surfaces are perpendicular to each other.
  • steps 201a, 202a, 203a, and 204a Two groove wall surfaces of the grooves 201g, 202g, 203g, and 204g facing each other form steps 201a, 202a, 203a, and 204a, respectively. That is, in this example, two steps 201a, 202a, 203a, and 204a facing each other are provided on the side surfaces 201 to 204 of the ferrule 29, respectively.
  • the “step” refers to a surface that is adjacent to the fixing surface for the piezoelectric element on the side surface (outer peripheral surface) of the ferrule and is raised to the outer peripheral side of the ferrule with respect to the fixing surface for the piezoelectric element. And has the function of defining the position of the piezoelectric element.
  • the shapes of the grooves 201g, 202g, 203g, and 204g, and the shapes of the steps 201a, 202a, 203a, and 204a provided on the side surfaces 201 to 204 of the ferrule 29, respectively, are the center of the through hole 29a. It is rotationally symmetric with respect to the axis. That is, the steps 201a, 202a, 203a, 204a provided in the ferrule 29 are configured to be able to overlap each other when the ferrule 29 is rotated around the central axis of the through hole 29a.
  • the two steps 201a, 202a, 203a, and 204a that are provided on the side surfaces 201 to 204 and that face each other are viewed comprehensively as one step.
  • the piezoelectric elements 71 to 74 are fitted in the grooves 201g, 202g, 203g, and 204g of the ferrule 29, respectively.
  • the groove depth that is, the step heights of the steps 201a, 202a, 203a, and 204a
  • the groove width that is, the two steps 201a, 202a, 203a, and 204a that face each other
  • the total length of the grooves (that is, the total length of the steps 201a, 202a, 203a, and 204a) are substantially the same as the thickness, width, and total length of the piezoelectric elements 71 to 74, respectively.
  • the groove depths of the grooves 201g, 202g, 203g, and 204g may be smaller than the thickness of the piezoelectric elements 71 to 74 adhered to the bottom surfaces of the grooves.
  • the thickness is preferably equal to or less than the thickness of the piezoelectric elements 71 to 74.
  • the ferrule 29 can easily expand and contract, and the amplitude can be increased. This is advantageous.
  • the total length of the piezoelectric elements 71 to 74 may be shorter than the total length of the steps 201a, 202a, 203a, 204a.
  • the piezoelectric elements 71 to 74 have their back surfaces in a state where their positions are defined (that is, applied) to the two steps 201a, 202a, 203a, and 204a that face each other on both sides in the width direction. (That is, the surface on the side of the illumination optical fiber 11 in the piezoelectric elements 71 to 74) is adjacent to the two steps 201a, 202a, 203a, 204a on the side of the illumination optical fiber 11 on the side surfaces 201 to 204 of the ferrule 29, respectively.
  • Portions 201b, 202b, 203b, and 204b (in this example, groove bottom surfaces of the grooves 201g, 202g, 203g, and 204g sandwiched between two steps; hereinafter, also referred to as “fixing surfaces for piezoelectric elements”). It is fixed.
  • the state in which the piezoelectric element is “applied to the step” means that the piezoelectric element is applied to the step via some member, or the piezoelectric element is directly applied to the step without any member. Refers to one of the attached states. In the example of FIG.
  • the side surfaces on both sides in the width direction of the piezoelectric elements 71 to 74 are applied to the two steps 201a, 202a, 203a, 204a via an electric insulating material 82 such as an electric insulating adhesive. It has been. Further, the back surfaces of the piezoelectric elements 71 to 74 are fixed to the fixing surfaces 201b, 202b, 203b for the piezoelectric elements 71 to 74 through a conductive fixing material 83 such as solder or a conductive adhesive (for example, silver paste). It is fixed to 204b.
  • a conductive fixing material 83 such as solder or a conductive adhesive (for example, silver paste).
  • Steps 201a, 202a, 203a, and 204a provided on the side surfaces 201 to 204 of the ferrule 29 have a function of positioning the piezoelectric elements 71 to 74 at predetermined positions on the side surfaces 201 to 204 of the ferrule 29.
  • the positioning function of the steps 201a, 202a, 203a, 204a, the center position in the width direction of each of the piezoelectric elements 71, 72 on both sides in the X-axis direction with respect to the through hole 29a, and the central axis of the through hole 29a are arranged on the same XZ plane, and the center positions in the width direction of the piezoelectric elements 73 and 74 on both sides in the Y-axis direction with respect to the through-hole 29a and the central axis of the through-hole 29a are the same YZ. Arranged on a plane.
  • Electrodes 80 formed by gold vapor deposition or the like are provided on the front side surfaces of the piezoelectric elements 71 to 74 (that is, the outer peripheral surface of the ferrule 29 in the piezoelectric elements 71 to 74) over almost the entire front side surface. It has been.
  • the wiring cable 13 from the drive control unit 38 of the control device body 30 is bonded to the electrode 80 by a conductive bonding material 81 such as solder or conductive adhesive (silver paste or the like).
  • the piezoelectric elements 71 to 74 are driven by the voltage application.
  • the piezoelectric elements 71 and 72 on both sides in the X-axis direction with respect to the through-hole 29a of the ferrule 29 are always applied with voltages having the opposite polarity and the same amplitude and frequency.
  • one of the piezoelectric elements 71 and 72 extends in the Z-axis direction and the other contracts in the Z-axis direction, whereby the ferrule 29 and thus the vibration part 11b of the illumination optical fiber 11 is vibrated in the X-axis direction.
  • the piezoelectric elements 73 and 74 on both sides in the Y-axis direction with respect to the through hole 29a of the ferrule 29 are always applied with voltages having the opposite polarity and the same amplitude and frequency.
  • one of the piezoelectric elements 73 and 74 extends in the Z-axis direction and the other contracts in the Z-axis direction, whereby the ferrule 29 and thus the vibration part 11b of the illumination optical fiber 11 vibrate in the Y-axis direction. Is done.
  • the drive control unit 38 applies a voltage to the piezoelectric elements 71 and 72 for driving in the X-axis direction and the piezoelectric elements 73 and 74 for driving in the Y-axis direction to drive them by vibration, the vibration of the optical fiber 11 for illumination is vibrated.
  • the portion 11b vibrates and the tip portion 11c is deflected.
  • the laser light emitted from the distal end portion 11 c is sequentially two-dimensionally scanned along the predetermined scanning path on the surface of the object 100.
  • This predetermined scanning path can be, for example, spiral, raster, or Lissajous.
  • the through hole 29a of the ferrule 29 is formed as in this example.
  • the shape of a pair of steps at positions facing each other in the predetermined direction (in this example, the shape of a pair of steps 201a, 202a at positions facing each other in the X-axis direction through the through hole 29a, and The shapes of the pair of steps 203a and 204a at positions facing each other in the Y axis direction through the through hole 29a are preferably rotationally symmetric with respect to the central axis of the through hole 29a.
  • the piezoelectric elements of the side surfaces 201 to 204 of the ferrule 29 are as in this example.
  • the fixing surfaces 201b, 202b, 203b, 204b for 71 to 74 preferably extend in parallel to the central axis direction of the through hole 29a of the ferrule 29. Thereby, the distance between the piezoelectric elements 71 to 74 and the illumination optical fiber 11 can be made constant along the longitudinal direction of the piezoelectric elements 71 to 74.
  • the characteristics of the piezoelectric elements 71 to 74 can be individually adjusted by adjusting the dimensions and materials of the piezoelectric elements 71 to 74, the frequency and amplitude of the voltage applied to the piezoelectric elements 71 to 74, and the like. However, from the viewpoint of realizing the vibration drive in the predetermined direction of the vibration part 11b of the illumination optical fiber 11 by the piezoelectric elements 71 to 74, the positions facing each other in the predetermined direction through the through hole 29a.
  • a pair of piezoelectric elements are, for example, dimensions, materials, and applied voltages.
  • the characteristics are preferably the same, for example, by making the frequency and the amplitude of the applied voltage the same.
  • the optical scanning actuator 21 has a through hole 29a for the illumination optical fiber 11, and one or more steps 201a, 202a, 203a, 204a (and fixing surfaces 201b, 202b, 203b, 204b for piezoelectric elements) on the side surfaces 201-204.
  • the provided ferrule 29 is formed (ferrule forming step).
  • a method of forming the ferrule 29 by pressing or casting is preferable from the viewpoint of achieving high shape accuracy of the ferrule 29 and ease of manufacture.
  • the side surfaces 201 to 204 after performing a build-up plating process around the rod for forming the through hole 29a, the side surfaces 201 to 204 (steps 201a, 202a, 201a, 202a, 203a, 204a and the fixing surfaces 201b, 202b, 203b, 204b for the piezoelectric elements) may be used.
  • the illumination optical fiber 11 is inserted into the through hole 29a of the ferrule 29, and the exit end (that is, the vibration part 11b) of the illumination optical fiber 11 is held so as to be capable of vibration (optical fiber holding step).
  • the illumination optical fiber 11 is previously inserted into the through-hole 29 a by a certain length from the rear end side of the ferrule 29, and then the adhesive 70 is positioned at the rear end of the ferrule 29.
  • the illumination optical fiber 11 is applied to the portion of the illumination optical fiber 11 to be advanced, and the illumination optical fiber 11 is further advanced in the through hole 29a, and the vibrating portion 11b of the illumination optical fiber 11 is drawn from the through hole 29a to the distal end side of the insertion portion 23. In this state, the adhesive 70 is cured.
  • the positions of the piezoelectric elements 71 to 74 are defined by the steps 201a, 202a, 203a, and 204a (that is, applied to the steps), and further In this state, it is fixed to the side surfaces 201 to 204 of the ferrule 29 (piezoelectric element fixing step). More specifically, for example, the side surfaces of the piezoelectric elements 71 to 74 are applied to the steps 201a, 202a, 203a, and 204a via the electrical insulating material 82, and the back side surfaces of the piezoelectric elements 71 to 74 are electrically conductive.
  • the piezoelectric elements 71 to 74 can be positioned by the steps 201a, 202a, 203a, and 204a when the piezoelectric elements 71 to 74 are fixed to the side surfaces 201 to 204 of the ferrule 29.
  • the placement accuracy of the piezoelectric elements 71 to 74 on the side surfaces 201 to 204 can be improved.
  • the electrodes 80 on the piezoelectric elements 71 to 74 and the wiring cable 13 are bonded together by the conductive bonding material 81.
  • the electrode 80 is formed on the piezoelectric elements 71 to 74 in advance, for example, before the piezoelectric element fixing step.
  • a part or all of the steps 201a, 202a, 203a, 204a are removed by cutting a part of the ferrule 29 (for example, a corner extending in the longitudinal direction of the ferrule 29). It may be removed.
  • the piezoelectric element fixing step it is not necessary to provide the electrical insulating material 82 between the portions of the steps 201a, 202a, 203a, and 204a to be removed later and the piezoelectric elements 71 to 74.
  • the piezoelectric elements 71 to 74 are provided on the side surfaces 201 to 204 of the ferrule 29, the two steps 201a, 202a, 203a, and 204a provided on the side surfaces 201 to 204 of the ferrule 29, respectively, Since the elements 71 to 74 are positioned from both sides in the width direction, the arrangement accuracy of the piezoelectric elements 71 to 74 on the side surfaces 201 to 204 of the ferrule 29 can be increased. Thereby, the vibration characteristic of the illumination optical fiber 11 as expected and the scanning trajectory can be realized more reliably.
  • the ferrule 29 and the total length of the piezoelectric elements 71 to 74 are matched, the ferrule is fixed in the piezoelectric element fixing step. 29 and the piezoelectric elements 71 to 74 are pressed from both sides in the longitudinal direction so that both ends thereof are aligned, the placement accuracy of the piezoelectric elements 71 to 74 on the side surfaces 201 to 204 of the ferrule 29 can be further increased.
  • the first embodiment has been described above, but the present invention includes various modifications.
  • modified examples of the optical scanning actuator will be described focusing on differences from the first embodiment.
  • FIG. 5 shows a first modification of the optical scanning actuator 21 and corresponds to FIG.
  • a substantially U-shaped groove extending in a cross section in the XY plane direction extending in parallel to the central axis direction of the through hole 29a of the ferrule 29 on each of the side surfaces 201 to 204 of the substantially square columnar ferrule 29.
  • Each of 201g, 202g, 203g, and 204g extends from one end (front end in the example in the figure) of the ferrule 29 and terminates before reaching the other end (rear end in the example in the figure).
  • the end wall surfaces that connect the two groove wall surfaces at the ends of the grooves 201g, 202g, 203g, and 204g are respectively steps 201a, 202a, 203a, and 204a are configured.
  • the steps 201a, 202a, 203a, and 204a are substantially U-shaped.
  • the groove bottom surfaces of the grooves 201g, 202g, 203g, and 204g extend in parallel to the central axis direction (Z-axis direction) of the through hole 29a of the ferrule 29.
  • the piezoelectric elements 71 to 74 are provided on the side surfaces 201 to 204 of the ferrule 29 (piezoelectric element fixing step), the substantially U-shaped steps 201a, 202a, 203a, 204a in plan view are used.
  • the piezoelectric elements 71 to 74 can be positioned from both sides in the width direction and one side in the extending direction (the rear end side in the example in the figure).
  • the shapes of the pair of steps 201a and 202a located at positions facing each other in the X-axis direction through the through-hole 29a of the ferrule 29 and in the Y-axis direction through the through-hole 29a are rotationally symmetric with respect to the central axis of the through hole 29a.
  • the length in the longitudinal direction of the pair of steps 201a and 202a located opposite to each other in the X-axis direction through the through-hole 29a of the ferrule 29 is More than the length in the Z-axis direction of the pair of steps 203a and 204a located opposite to each other in the Y-axis direction through the through-hole 29a (and hence the length in the longitudinal direction of the piezoelectric elements 73 and 74 for driving in the Y-axis direction).
  • a material suitable for smaller amplitude driving is selected than the material of the piezoelectric elements 73 and 74 for driving in the Y-axis direction.
  • FIG. 6 shows a second modification of the optical scanning actuator 21 and corresponds to FIG.
  • each of the ferrules 29 having a substantially quadrangular prism shape (more specifically, a shape obtained by removing a thin rectangular plate-like portion in contact with a clockwise surface from each side surface of the quadrangular columnar ferrule 29).
  • Ends extending in the Z-axis direction from the longitudinal direction one end of the ferrule 29 to the side surfaces 201 to 204, bent at a right angle before reaching the other Z-axis direction of the ferrule 29, and extending in the Z-axis direction in the ferrule 29
  • Steps 201a, 202a, 203a, 204a are provided to reach the edges.
  • the steps 201a, 202a, 203a, and 204a are substantially L-shaped when the side surfaces 201 to 204 of the ferrule are viewed in plan.
  • the portions 201b, 202b, 203b, and 204b (which are adjacent to the steps 201a, 202a, 203a, and 204a on the side of the illumination optical fiber 11 of the ferrule 29 and to which the piezoelectric elements 71 to 74 are fixed)
  • the fixing surface for the piezoelectric element extends in parallel to the central axis direction (Z-axis direction) of the through hole 29a of the ferrule 29.
  • the piezoelectric elements 71 to 74 are provided on the side surfaces 201 to 204 of the ferrule 29 (piezoelectric element fixing step), by the substantially L-shaped steps 201a, 202a, 203a, 204a in plan view,
  • the piezoelectric elements 71 to 74 can be positioned from one side in the width direction and one side in the extending direction.
  • the shapes of the pair of steps 203a and 204a at the opposite positions are rotationally symmetric with respect to the central axis of the through hole 29a.
  • the piezoelectric elements 71 and 72 for driving in the X-axis direction and the piezoelectric elements 73 and 74 for driving in the Y-axis direction are made of the same material and dimensions.
  • FIG. 7 shows a third modification of the optical scanning actuator 21 and corresponds to FIG.
  • substantially L-shaped steps 201a, 202a, 203a, and 204a are provided on the side surfaces 201 to 204 of the substantially square columnar ferrule 29 in a plan view similar to the second modified example (FIG. 6). Yes.
  • the steps 201a, 202a, 203a, 204a provided on the pair of side surfaces 201 to 204 are oriented symmetrically with respect to a virtual plane passing through the central axis of the through hole 29a of the ferrule 29 and the edges of the ferrule 29 connecting the pair of side surfaces 201-204. This is different from the second modified example.
  • the shapes of the pair of steps 201a and 202a at positions facing each other in the X-axis direction through the through-hole 29a of the ferrule 29, and the Y-axis direction through the through-hole 29a are rotationally symmetric with respect to the central axis of the through hole 29a.
  • the fixed portions 201b, 202b, 203b, and 204b of the piezoelectric elements 71 to 74 (for piezoelectric elements)
  • the fixing surface of the ferrule 29 extends in parallel to the central axis direction (Z-axis direction) of the through hole 29 a of the ferrule 29.
  • the piezoelectric elements 71 and 72 for driving in the X-axis direction and the piezoelectric elements 73 and 74 for driving in the Y-axis direction are made of the same material and dimensions.
  • FIG. 8 shows a fourth modification of the optical scanning actuator 21 and corresponds to FIG.
  • the side surface 201 of the substantially cylindrical ferrule 29 (that is, the outer peripheral surface of the ferrule 29) is substantially U-shaped in the cross section in the XY plane direction, and is arranged at equal intervals in the circumferential direction.
  • the two grooves 201g, 202g, 203g, and 204g extend in the Z-axis direction over the entire length of the ferrule 29, respectively.
  • Two groove wall surfaces facing each other of the grooves 201g, 202g, 203g, and 204g constitute steps 201a, 202a, 203a, and 204a, respectively.
  • the portions 201b, 202b, 203b, 204b to which the piezoelectric elements 71 to 74 are fixed that is, for piezoelectric elements
  • the groove bottom surfaces of the grooves 201g, 202g, 203g, and 204g extend in parallel to the central axis direction (Z-axis direction) of the through hole 29a of the ferrule 29.
  • the piezoelectric elements 71 to 74 are provided on the side surface 201 of the ferrule 29 (piezoelectric element fixing step), the two stages 201a, 202a, 203a, and 204a facing each other cause the piezoelectric elements 71 to 74 to be arranged. Can be positioned from both sides in the width direction.
  • the shapes of the pair of steps 203a and 204a at the opposite positions are rotationally symmetric with respect to the central axis of the through hole 29a.
  • the piezoelectric elements 71 and 72 for driving in the X-axis direction and the piezoelectric elements 73 and 74 for driving in the Y-axis direction are made of the same material and dimensions.
  • the present invention is not limited to the above-described examples, and any number of steps 201a, 202a, 203a, and 204a can be provided on the side surfaces 201 to 204 of the ferrule 29 as long as the positioning function of the piezoelectric elements 71 to 74 can be exhibited. It may be provided, and may extend continuously or intermittently in any direction.
  • the steps 201a, 202a, 203a, and 204a do not need to be configured as flat wall surfaces, and are adjacent to the fixing surface for the piezoelectric element and the ferrule 29 with respect to the fixing surface for the piezoelectric element.
  • the steps 201a, 202a, 203a, and 204a include one or more (four in the illustrated example) protrusions 201p, 202p, and 203p provided on the side surfaces 201 to 204 of the ferrule 29 as in the example illustrated in FIG. 204p may be configured as a surface portion facing the piezoelectric elements 71 to 74.
  • the light source of the optical scanning endoscope apparatus 10 is not limited to the light source provided with the lasers 33R, 33G, and 33B, and for example, a light source provided with a white light source may be used.
  • the optical scanning device of the present invention may be configured not only as an optical scanning endoscope device but also as other optical scanning devices such as an optical scanning microscope.
  • Optical scanning endoscope device (optical scanning device) 11 Optical fiber for illumination (optical fiber) 11a Fixed end of illumination optical fiber 11b Vibrating portion of illumination optical fiber 11c Tip portion of illumination optical fiber 12 Optical fiber bundle for detection 13 Wiring cable 20 Scope 21 Optical scanning actuator 22 Operation unit 23 Insertion unit 24 Insertion unit 24 Tip portion 25 Projection lens 26 Actuator holder 29 Ferrule through hole 30 Control device body 31 Control portion 32 Light emission timing control portion 33R, 33G, 33B Laser (light source) 34 Coupler 35 Photodetector (photodetector) 36 ADC 37 Signal Processing Unit 38 Drive Control Unit 40 Display 70 Adhesive 71-74 Piezoelectric Element 80 Electrode 81 Conductive Bonding Material 82 Electrical Insulating Material 83 Conductive Fixing Material 100 Object 201-204 Ferrule Sides 201a, 202a, 203a, 204a Step 201b, 202b, 203b, 204b Bonding surface for piez

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Abstract

Un actionneur de balayage optique 21 comporte : une fibre optique 11 ; une virole 29, qui comprend un trou traversant 29a contenant, dans un état dans lequel la fibre optique passe à travers le trou traversant, une extrémité de sortie 11c de lumière de telle sorte que l'extrémité de sortie optique peut vibrer, ladite lumière ayant été émise à partir de sources lumineuses 33R, 33G, 33B, et dans laquelle un ou plusieurs crans 201a, 202a, 203a, 204a sont disposés dans des surfaces latérales 201-204 ; et des éléments piézoélectriques 71-74, les positions desquels étant spécifiées par le ou les crans, et qui sont fixés aux surfaces latérales de la virole.
PCT/JP2015/006329 2015-12-18 2015-12-18 Actionneur de balayage optique, dispositif de balayage optique, et procédé de fabrication d'un actionneur de balayage optique WO2017103962A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108803009A (zh) * 2017-11-22 2018-11-13 成都理想境界科技有限公司 一种光纤扫描器连接结构
US11391942B2 (en) * 2016-12-26 2022-07-19 Olympus Corporation Endoscope having optical fiber scanning apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008009129A (ja) * 2006-06-29 2008-01-17 Kyocera Corp 光終端器
WO2013105329A1 (fr) * 2012-01-11 2013-07-18 オリンパスメディカルシステムズ株式会社 Dispositif d'irradiation lumineuse, dispositif d'endoscope de balayage, et procédés de fabrication de ceux-ci
JP2016009012A (ja) * 2014-06-23 2016-01-18 オリンパス株式会社 光走査用アクチュエータ、光走査装置、及び光走査用アクチュエータの製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008009129A (ja) * 2006-06-29 2008-01-17 Kyocera Corp 光終端器
WO2013105329A1 (fr) * 2012-01-11 2013-07-18 オリンパスメディカルシステムズ株式会社 Dispositif d'irradiation lumineuse, dispositif d'endoscope de balayage, et procédés de fabrication de ceux-ci
JP2016009012A (ja) * 2014-06-23 2016-01-18 オリンパス株式会社 光走査用アクチュエータ、光走査装置、及び光走査用アクチュエータの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11391942B2 (en) * 2016-12-26 2022-07-19 Olympus Corporation Endoscope having optical fiber scanning apparatus
CN108803009A (zh) * 2017-11-22 2018-11-13 成都理想境界科技有限公司 一种光纤扫描器连接结构

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