WO2017090871A1

WO2017090871A1 - Axial offset measuring apparatus using parallel beams

Info

Publication number: WO2017090871A1
Application number: PCT/KR2016/010068
Authority: WO
Inventors: 이우송; 김병창
Original assignee: 주식회사 선진기술
Priority date: 2015-11-26
Filing date: 2016-09-08
Publication date: 2017-06-01
Also published as: KR20170061268A; KR101759971B1

Abstract

The present invention relates to a novel axial offset measuring apparatus using parallel beams, the apparatus comprising a light source unit, a microlens array, a photographing device unit, and a controller and, specifically, enabling the photographing device unit to photograph, as a plurality of spots, the parallel beams irradiated from the light source unit through the additional provision of the microlens array, and enabling a straightness error, a flatness error, and a rotation error of a moving device unit to be quantitatively calculated through the continuous calculation of the displacement of the plurality of spots.

Description

Axis error measuring device using parallel light

The present invention relates to an axial error measuring apparatus, and more particularly, to quantitatively calculate accurate straightness, flatness, and rotational error of an exercise machine part using parallel light, while dividing the photosensitive image for measuring the error into three or more. The present invention relates to an axial error measuring apparatus according to a new form to more accurately determine the inclination information for each position by providing a spot.

In general, a 3D printer, a machine tool, or a three-dimensional measuring instrument is provided with a moving mechanism moving along three orthogonal axes, and a tool, a nozzle, a measuring system, or the like is provided at the end of the moving mechanism, and the movement of the moving mechanism is performed. The position is changed by means of performing each operation (eg, a print job, a workpiece machining job, a three-dimensional measurement job, etc.).

However, the larger the size of the workpiece (or the measuring object) or the table (or frame) for guiding while guiding the movement mechanism, the lower the central part is due to the weight of the table, or the error during machining. Considering that the back is present, even if the movement mechanism is precisely operated in the programmed direction and displacement, the error of the operation position due to the above-described error is inevitably generated.

In the related art, a laser interferometer continuously irradiates a laser to a moving exercise device, and at the same time, continuously receives a laser beam reflected from the exercise device, thereby measuring various errors and thereby correcting the error in real time. However, this type of laser interferometer is not only a very expensive equipment but also used only for calibration and not for real time measurement.

In recent years, Patent No. 10-1119876 provides a technology that enables linearity, flatness and three-dimensional precision measurement at low cost while using parallel light.

In other words, the above-described conventional technique is fixed to the parallel light generator at a predetermined position, and the photographing mechanism is installed in the exercise mechanism unit to take a photosensitive image of the reference parallel light irradiated from the parallel light generator and then based on the displacement of the photosensitive image. The error can be confirmed.

However, in the above-described prior art, the measurement of the displacement of a single spot has been limited to the measurement of displacements in various directions other than the X, Y, and Z axes, as the error is determined. Of course, in the above-described prior art, there was a further effort to check the error based on the displacements of the two spots through the additional provision of the optical separation mechanism, but this also has difficulty in measuring the error in more various directions or precisely.

The present invention has been made to solve the various problems according to the prior art described above, an object of the present invention is to measure such error while quantitatively calculating the correct straightness, flatness and rotational error with respect to the exercise machine using parallel light. The present invention provides an axial error measuring apparatus according to a new form in which a photosensitive image is provided as a spot divided into a plurality of three or more, so that the inclination information for each position can be more accurately determined.

Axial error measuring apparatus using the parallel light of the present invention for achieving the above object is a light source unit for irradiating parallel light while fixedly installed at a position capable of irradiating parallel light toward the path of the movement mechanism unit; A microlens array installed in the movement mechanism part installed to be movable and having three or more microlenses and dividing the parallel light emitted from the light source into a plurality of spots; An imaging mechanism unit configured to form a plurality of spots while passing through the microlens array; And a controller for checking the displacement according to the arrangement of the spots from the image photographed by the photographing mechanism unit to calculate each operation error of the exercise device unit.

Here, the exercise mechanism unit comprises at least two or more exercise mechanisms of the X-axis movement mechanism portion moved to the X-axis, the Y-axis movement mechanism portion moved to the Y-axis, and the Z-axis movement mechanism portion moved to the Z-axis, The microlens array and the photographing mechanism part are respectively provided in each of the exercise mechanism parts.

The light source unit may be provided in the same quantity as that of each of the exercise equipment units, and installed to provide parallel light for each of the microlens arrays provided in each of the exercise equipment units.

In addition, the light source unit may be provided as one and provided to provide parallel light to any one of the exercise device units, and a part of the parallel light irradiated from the light source unit may be separated on the front side of the microlens array provided to the any one of the exercise device units. A half mirror further reflects to the microlens array.

The light source unit may include a laser generator providing a laser light source, a pinhole sheet formed at a side of the laser irradiation direction of the laser generator, and having a pinhole through which a laser light source passes, and positioned between the laser generator and the pinhole. A condenser lens for condensing a light source generated from a laser generator to pass through the pinhole, and a laser light source passing through the pinhole at a rear end of the pinhole to form a light source having a Gaussian intensity distribution shape To be characterized in that it comprises a collimating lens (collimating lens).

In addition, each microlens of the microlens array is arranged to be arranged regularly, having a plurality of columns and a plurality of rows

As described above, the axial error measuring apparatus using the parallel light according to the present invention divides the laser light source into a plurality of spots rather than a method of measuring the axial error by checking the displacement of one or two light sources, and collectively dividing each of the divided spots. By checking the slope of the laser wavefront through the confirmation and analysis of the conventional displacement, it is possible to measure the linearity error, the flatness error, and the rotational error of the moving parts accurately and more variously.

In addition, the light source unit of the axial error measuring apparatus using the parallel light of the present invention comprises a pinhole sheet, a condensing lens and a collimating lens to stabilize the optical characteristics of the laser light provided from the laser generator. Therefore, it is possible to generate high quality parallel light, which has the effect of achieving more precise compensation of the axial error.

In addition, the axial error measuring apparatus using the parallel light of the present invention can provide a parallel light for measuring the straightness, flatness and rotation in a plurality of axial direction through the additional provision of a half mirror, thereby providing a structure Has the effect of achieving the simplification and the simplification of control.

1 is a state diagram schematically shown to explain an axial error measuring apparatus using parallel light according to an embodiment of the present invention.

Figure 2 is a state diagram briefly shown to explain the detailed structure of the light source unit of the axial error measurement apparatus using parallel light according to an embodiment of the present invention

Figure 3 is an enlarged view of the main portion briefly shown to explain the installation structure of the microlens array of the axial error measuring apparatus using parallel light according to an embodiment of the present invention

Figure 4 is a front view briefly shown to explain the structure of the microlens array of the axial error measuring apparatus using parallel light according to an embodiment of the present invention

5 is a state diagram schematically shown to explain an example of a photosensitive image photographed on a photographing mechanism of an axial error measuring apparatus using parallel light according to an exemplary embodiment of the present invention;

6 is a state diagram schematically shown to explain an installation structure for each exercise device part of the axial error measuring apparatus using parallel light according to an embodiment of the present invention.

7 is a side view schematically showing an installation example of an axial error measurement apparatus using parallel light according to an embodiment of the present invention.

Hereinafter, a preferred embodiment of an axial error measuring apparatus using parallel light of the present invention will be described with reference to FIGS. 1 to 7.

Prior to the description of the embodiment, the axial error measuring apparatus using the parallel light of the present invention can measure the axial error for the movement mechanism parts (21, 22, 23) moved horizontally or vertically along the upper surface of the table (10). For example, the device is configured to be.

1 is a state diagram schematically illustrating an axial error measuring apparatus using parallel light according to an embodiment of the present invention, and FIG. 2 is a axial error measuring apparatus using parallel light according to an embodiment of the present invention. FIG. 3 is an enlarged view illustrating a detailed structure of the light source unit, and FIG. 3 is an enlarged view illustrating main parts of the microlens array of the axial error measuring apparatus using parallel light according to an exemplary embodiment of the present invention. 4 is a front view briefly shown to explain a structure of a microlens array of an axial error measuring apparatus using parallel light according to an exemplary embodiment of the present invention.

As shown in these drawings, the axial error measuring apparatus according to the embodiment of the present invention includes a light source unit 100, a microlens array 200, a photographing apparatus unit 300, and a controller 400. In particular, the additional provision of the microlens array 200 enables parallel light emitted from the light source unit 100 to be photographed by the photographing apparatus unit 300 in a plurality of spots, and continuous displacement calculation for the plurality of spots. Through this, the linearity error and the flatness error and the rotational error for the

exercise unit

21, 22, 23 can be quantitatively calculated.

This will be described in more detail for each configuration.

First, the light source unit 100 is a portion for irradiating parallel light.

The light source unit 100 is fixedly installed at a position at which the parallel light can be irradiated toward the path of the

movement mechanism units

21, 22, and 23 of the upper surface of the table 10.

In addition, the light source unit 100 includes a laser generator 110, a pinhole sheet 120, a condenser lens 130, and a collimating lens 140.

Here, the laser generator 110 is a portion for generating and providing a laser light source, and the pinhole sheet 120, the condenser lens 130, and the collimating lens 140 generate parallel light through the wavelength uniformity of the laser light source. It is a part to achieve.

In this case, the pinhole sheet 120 is a sheet formed with a pinhole 121 through which a laser light source passes while being positioned on the laser irradiation direction side of the laser generator 110, and the condenser lens 130 is the laser generator ( Located between the 110 and the pinhole 121 serves to condense the light source generated from the laser generator 110 to pass through the pinhole 121, and the collimating lens 140 is the pinhole 121. The laser light source that passes through the pinhole 121 while being positioned at the rear end of the c) serves to achieve parallel light having a Gaussian intensity distribution.

Next, the microlens array 200 is a portion for dividing the parallel light emitted from the light source unit 100 into a plurality of spots.

The microlens array 200 is disposed on the

exercise device units

21, 22, and 23 that are horizontally or vertically movable along the table 10, and is arranged to receive parallel light emitted from the light source unit 100. .

In particular, as shown in FIGS. 3 and 4, the microlens array 200 has three or more microlenses 210 and divides parallel light emitted from the light source unit 100 into a plurality of spots. In addition to each of these microlenses 210 is proposed to be arranged regularly with a plurality of columns and a plurality of rows. That is, in the exemplary embodiment of the present invention, the three-

dimensional exercise device

21, 22, 23 is not calculated by calculating the straightness, flatness, and rotational error at the same time based on the displacement of one or two light sources. The straightness, flatness and rotational error of) can be understood more precisely.

At this time, each of the microlenses 210 provided in the microlens array 200 is disposed so that its convex direction is directed to the photographing mechanism unit 300 to be described later, whereby the laser light source passing through each of the microlenses 210 is According to the inclination of the microlens 210 is transmitted vertically from the convex surface can be provided in a state focused on the photographing mechanism unit 300 to be described later.

Next, the photographing mechanism unit 300 is a portion photographed while forming a plurality of spots formed while passing through the microlens array 200.

The embodiment of the present invention suggests that the photographing mechanism part 300 is formed of a CCD camera, and the photographing mechanism part 300 has the controller 400 and data so that the photographing image can be provided to the controller 400 to be described later. The communication is configured to enable the connection.

In particular, as shown in FIG. 5, the photographing mechanism unit 300 is configured such that the plurality of

spots

510 and 520 are collectively photographed on a lattice plane having a predetermined resolution including a plurality of pixels.

Next, the controller 400 receives a captured image from the photographing mechanism unit 300, and calculates an operation error of the

exercise device units

21, 22, and 23 by confirming the displacement according to the arrangement of the spots from the image. It is a part to do.

In particular, in the embodiment of the present invention, the controller 400 is programmed to calculate the inclination of the parallel light wavefront based on the displacement according to the arrangement of the spots based on the Shack-Hartmann sensor. By calculating the slope of the parallel light wave surface calculated in this way, the linearity error, the flatness error and the rotational error with respect to the

exercise device parts

21, 22 and 23 are programmed to be quantitatively calculated.

Here, the 샥 -Heartman sensor method is a wavefront measurement sensor method that calculates the local slope of the wavefront formed by the laser light using the arrangement of the plurality of microlenses 210 and measures the degree of distortion of the wavefront therefrom.

Hereinafter, the axial error measuring process by the axial error measuring apparatus using the parallel light according to the embodiment of the present invention described above will be described in more detail.

First, parallel light is irradiated toward the microlens array 200 installed in the

exercise device units

21, 22, and 23 through the operation control of the light source unit 100 fixed to the upper surface of the table 10.

In this case, the laser irradiated from the laser generator 110 constituting the light source unit 100 passes through the pinhole 121 of the pinhole sheet 120 while being condensed while passing through the condenser lens 130, and subsequently collie. The light is provided to the microlens array 200 as parallel light having a shape of a Gaussian intensity distribution while passing through a collimating lens 130.

In addition, the parallel light provided to the microlens array 200 passes through a plurality of microlenses 210 provided in the microlens array 200, and is divided into a plurality of spots that form regular rows and columns, and then into a CCD camera. The photosensitive image formed in the imaging device 300 is formed, and then the plurality of divided spots (reference spots) 510 are imaged and provided to the controller through data communication.

In addition, when the

exercise device unit

21, 22, 23 is operated while the above process is in progress, the microlens array 200 and the photographing device unit 300 provided in the

exercise device unit

21, 22, 23 are operated. The location also changes continuously.

Accordingly, each spot (variable spot) 520 which is divided into a plurality of parts while passing through each microlens 210 of the microlens array 200 and is formed in the photographing mechanism part 300 is the

exercise mechanism part

21, 22,. According to the straightness or the flatness in the direction in which 23) is operated, it has a different displacement from the reference spot 510, as shown in FIG. 5.

Therefore, the controller 400 continuously receiving the photosensitive image from which the position of each spot (variable spot) 520 is photographed from the photographing mechanism unit 300 is the position of the reference spot 510 stored as a reference state. After confirming the displacement according to the arrangement of the respective variation spots 520 on the basis of, the slope of the parallel light wavefront based on the displacement according to the arrangement of the variation spots 520 based on the Shack-Hartmann sensor. By calculating the operation can be confirmed in real time the straightness error, flatness error and rotational error of the corresponding exercise mechanism unit (21, 22, 23), by performing the motion compensation according to each of the identified errors in

real time

21, 22, and 23 can perform very precise operations.

Meanwhile, FIG. 6 shows an axial error measuring apparatus using parallel light according to another embodiment of the present invention. In another embodiment of the present invention, the

exercise device parts

21, 22, and 23 move on the X axis. At least two or more of the exercise mechanism portion of the X-axis exercise mechanism portion 21, the Y-axis movement mechanism portion 22 to be moved to the Y-axis, and the Z-axis movement mechanism portion 23 to be moved to the Z-axis, the micro It is proposed that the lens array 200 and the photographing mechanism part 300 are provided in each of the

exercise mechanism parts

21, 22, and 23, respectively.

That is, in the embodiment of the present invention, the

exercise mechanisms

21, 22, and 23 are not limited to tools or nozzles, or portions where the measuring instrument is directly installed, but the X of the tool or nozzle or measuring instrument is not limited thereto. , Y, Z-axis means that the portion is operated horizontally or vertically, so that any one of the tool (21), 22, 23 of the exercise device (21, 22, 23) to the tool (tool), nozzle, or measuring instrument is installed Is done.

In particular, when the exercise device unit is composed of the X-axis exercise unit 21, the Y-axis exercise unit 22 and the Z-axis exercise unit 23 as described above, the light source unit to all the exercise unit (21, 22, 23) It is comprised so that the parallel light parallel to the operation direction (movement direction) of the said sports equipment part may be provided.

To this end, in the embodiment of the present invention while being provided with only one light source unit 100 is provided to provide parallel light to any one of the exercise unit (eg, X-axis exercise unit) 21 and the X-axis exercise unit 21 The front side of the microlens array 200 provided in the) is separated from the parallel light irradiated from the light source unit 100 and reflected to the microlens array 200 of the other exercise device (eg, Z-axis exercise device) 23. Since the half mirror 610 is further provided, the parallel light is also provided to the microlens array 200 of the Z-axis motion mechanism unit 23.

In this case, the microlens array 200 of the Z-axis movement mechanism unit 23 is configured to be positioned on the side of the direction in which parallel light is reflected through the half mirror 610, as shown in FIG. The microlens array 200 of the Z-axis motion mechanism unit 23 may be configured to be positioned in a direction perpendicular to the direction in which the parallel light is reflected, in which case the parallel light is reflected through the half mirror 610. The direction side may further include a reflection mirror 620 for reflecting the parallel light back to the microlens array 200.

Of course, although not shown, the light source unit 100 is provided in the same quantity as the quantity of each of the

exercise equipment units

21, 22, and 23, and is provided in the respective

exercise machine units

21, 22, and 23, respectively. Each of the microlens arrays 200 of the

mechanical parts

21, 22, and 23 may be provided to provide parallel light.

As described above, the axial error measuring apparatus using the parallel light according to the present invention divides the laser light source into a plurality of spots rather than a method of measuring the axial error by checking the displacement of one or two light sources, thereby collectively displacing the divided spots. By checking the slope of the laser wavefront through the confirmation and analysis of the linearity error, the flatness error and the rotational error of the movement mechanism parts (21, 22, 23) can be more accurately and more variously measured.

In addition, the light source unit 100 of the axial error measuring apparatus using the parallel light of the present invention comprises a pinhole sheet 120, a condenser lens 130 and a collimating lens (140) by a laser generator The optical characteristics of the laser light provided from 110 can be stabilized to generate high quality parallel light, thereby achieving more accurate compensation of the axial error.

In addition, the axial error measuring apparatus using the parallel light of the present invention can provide a parallel light for measuring the straightness, flatness and rotation in a plurality of axial direction through the additional provision of the half mirror 610, This simplifies the structure and simplifies the control.

Claims

A light source unit fixedly installed at a position capable of irradiating parallel light toward a path in which the exercise device is operated;

A microlens array installed in the movement mechanism part installed to be movable and having three or more microlenses and dividing the parallel light emitted from the light source into a plurality of spots;

An imaging mechanism unit configured to form a plurality of spots while passing through the microlens array; And,

And a controller for checking each displacement of the spots according to the arrangement of the spots from the image photographed by the photographing mechanism unit to calculate each operation error of the exercise apparatus.
The method of claim 1,

The exercise device unit

It comprises at least two or more of the exercise mechanism portion of the X axis movement mechanism portion moved to the X axis, the Y axis movement mechanism portion moved to the Y axis, and the Z axis movement mechanism portion moved to the Z axis,

And the microlens array and the photographing mechanism part are provided in all of the exercise mechanism parts, respectively.
The method of claim 2,

The light source unit is provided in the same quantity as the quantity of each of the sports equipment portion, the axis error measurement apparatus using parallel light, characterized in that installed to provide each parallel light for each microlens array provided in the sports equipment.
The method of claim 2,

The light source unit is provided as one and provided to provide parallel light to any one of the sports equipment units, and the front side of the microlens array provided in one of the sports equipment units separates a part of the parallel light emitted from the light source unit to separate the microlenses of the other sports equipment. An axial error measuring apparatus using parallel light, characterized in that the half mirror further reflects to the array.
The method according to any one of claims 1 to 4,

The light source unit

A laser generator providing a laser light source,

A pinhole sheet formed with a pinhole through which a laser light source passes while being positioned at a laser irradiation direction side of the laser generator;

A condenser lens positioned between the laser generator and the pinhole and condensing a light source generated from the laser generator to pass through the pinhole;

Parallel light, characterized in that it comprises a collimating lens positioned at the rear end of the pinhole and passing through the pinhole to form a light source having a Gaussian intensity distribution shape. Axial error measurement device using.
The method according to any one of claims 1 to 4,

And each microlens of the microlens array is arranged to be regularly arranged with a plurality of columns and a plurality of rows.