WO2017090129A1

WO2017090129A1 - Charged particle beam device

Info

Publication number: WO2017090129A1
Application number: PCT/JP2015/083085
Authority: WO
Inventors: 猛川▲崎▼
Original assignee: 株式会社日立製作所
Priority date: 2015-11-25
Filing date: 2015-11-25
Publication date: 2017-06-01

Abstract

The purpose of the present invention is to provide a charged particle beam device capable of continuous stable operation with low noise and high efficiency. In the charged particle beam device, a high-voltage power source (103) and a charged particle gun (114) containing a charged particle source are connected through a high-voltage cable (106). The charged particle beam device comprises: a power-receiving coil of a power-send-receive device (124) installed in a hollow portion of the high-voltage cable (106) and supplying the power used in the charged particle gun (114); and a power-sending coil of the power-send-receive device (124) installed on the outer side of the high-voltage cable (106) and sending power. The power is transmitted by magnetic field resonance coupling between the power-sending coil and the power-receiving coil.

Description

Charged particle beam equipment

The present invention relates to a charged particle beam apparatus.

The charged particle source or charged particle gun placed in the high potential part of the charged particle beam device includes a vacuum pump, a magnetic lens, an electrostatic lens, a deflector, a charged particle for heating the charged particle source or using the charged particle gun. Power supply is required to operate the fine movement device and the like of the source.

In Patent Document 1, in a high voltage generator of a charged particle beam apparatus, in order to avoid the influence of noise due to a capacitive coupling current between a transformer and a shield of a power transmission circuit, an electric for charging / discharging a secondary battery or the like is performed. A DC power supply using the element is installed, and the transmission switch is operated to the transmission ON / OFF switch arranged at the ground potential to switch to the conventional DC high voltage generation circuit using a transformer, and high resolution is required. Data acquisition is performed using a DC power source using a secondary battery, and a technique is disclosed in which a secondary battery is charged by a charging circuit while a conventional DC high voltage generation circuit is used.

In Patent Document 2, the electric power for heating the filament can be supplied from the ground potential portion to the filament in the high potential portion without using the motor direct-coupled generator device. A cylindrical non-magnetic metal electrostatic shield body that is provided in the tank to relieve electric field concentration around the high voltage application section, a power transmission coil provided in the ground potential section in the tank, and a high frequency that supplies high frequency power thereto An electron beam irradiation apparatus is disclosed that includes a power source and a power receiving coil that is provided in the body of the electrostatic shield and receives power transmitted from the power transmitting coil by electromagnetic induction and supplies the power to the filament.

Further, in Patent Document 3, an AC or pulse power source for instantaneously heating the field emission cathode is installed outside the relay tank, and the heating current from the power source is installed inside and outside the electron microscope body in an electromagnetic coupling relationship. There is disclosed a field emission electron microscope that supplies FE-Tip through a heating insulating transformer composed of primary and secondary coils.

JP 2006-156155 A JP 2014-127296 A JP-A 63-78440

The problems of the above prior art that cannot be solved simultaneously for future demands for charged particle beam devices are summarized as follows.
1) In the method of transmitting power by connecting one or a plurality of insulating transformers in the power transmission circuit of Patent Document 1, common mode noise propagates due to the stray capacitance of the insulating transformer, and the stability of high voltage is lowered.
2) The method of supplying electric power to the high potential part of Patent Document 1 with a storage battery is most advantageous for the high voltage stability obtained, but the operation time of the apparatus is limited by the capacity of the storage battery. Moreover, the maintenance cost of a storage battery is a problem. Moreover, noise becomes a problem in continuous use while charging.
3) In the method of performing spatial power transmission using a power transmission / reception coil in the vicinity of a charged particle source as in Patent Documents 2 and 3 (electromagnetic induction), high-frequency signals are transmitted and received in a high-pressure insulating tank, so that an electronic circuit is connected on the high voltage side Affects the high voltage stability. When a shield is provided in an electronic circuit, heat is generated due to eddy current, and effective high-frequency electromagnetic shielding is difficult.

An object of the present invention is to provide a charged particle beam apparatus capable of continuous operation with low noise and high efficiency.

As one embodiment for achieving the above object, a high voltage power source and a charged particle source or a charged particle gun including a charged particle source are connected via a high voltage cable and generated from the charged particle source placed at a high potential. A charged particle beam apparatus that accelerates and uses charged particles,
The center of the high-voltage cable is a hollow portion, and a receiving coil for supplying power to be used in the charged particle gun placed in the high-potential portion is installed in the hollow portion, and power is supplied to the outside of the high-voltage cable. A charged particle beam apparatus comprising: a power transmission coil for power transmission; a high frequency power source connected to the power transmission coil; and power transmission from a ground potential side to a high potential side power source by magnetic resonance coupling between the power transmission and reception coils And

A charged particle beam apparatus comprising: a charged particle gun including a charged particle source; a high voltage power source; and a high voltage cable having a hollow portion disposed between the high voltage power source and the charged particle gun. And
The high-voltage cable incorporates a power transmission / reception device,
The power transmission / reception device is disposed in the hollow portion on the high potential side of the high-voltage cable and surrounds the outer periphery of the high-voltage cable on the ground potential side, and a power reception coil for supplying power used in the charged particle gun And a power transmission coil for transmitting power to the power reception coil.

According to the present invention, it is possible to provide a charged particle beam apparatus capable of continuous operation with low noise and high efficiency.

1 is a schematic configuration diagram (partially sectional view) of a charged particle beam apparatus (ultra-high voltage field emission electron microscope) according to a first embodiment of the present invention. It is a schematic block diagram of the power transmission / reception apparatus provided in the hollow resistance high voltage | pressure cable of the charged particle beam apparatus shown in FIG. 1, The left figure is a longitudinal cross-sectional view (partial block diagram), The right figure is a cross-sectional view. 3 is a cross-sectional view of a power transmitter / receiver that supplies four DC outputs in the power transmitter / receiver shown in FIG. It is a schematic structure front view of the charged particle beam apparatus (general purpose electron microscope) which concerns on 2nd Example of this invention. It is a schematic block diagram for demonstrating the procedure in the case of performing simultaneously power transmission, control, and transmission of status information on the ground potential side and the high potential side in the charged particle beam apparatus according to the third embodiment of the present invention.

The inventors decided to introduce a high voltage from a high voltage power source to the apparatus main body via a high voltage cable in the charged particle beam apparatus. This high-voltage cable has a hollow structure inside the insulating layer, and a power receiving coil, a capacitor, and a rectifying / smoothing circuit for transmitting and receiving power from the ground potential side to the high potential side are provided in the hollow portion of the cable. Install and wrap the transmission coil around the corresponding location outside the high voltage cable. DC power that is rectified by transmitting high-frequency power between power transmission and reception coils is supplied to a charged particle source or a charged particle gun in a high potential portion of the apparatus body. Here, the side having a potential with respect to the ground potential (whether the sign is positive or negative) is referred to as a high potential side.

By providing a power transmission / reception unit in the middle of the high-voltage cable, power is transmitted and received at a location away from the main high potential unit, and the charged particle source or charged particle gun is not directly exposed to high frequency electromagnetic waves, and the main unit high potential Since DC power is supplied to the unit, noise can be prevented from being mixed into the high-voltage power supply output that requires high stability, and there is no deterioration in the performance of the device due to electromagnetic noise. Since power can be transmitted while the apparatus is operating, the apparatus operating time is not limited. Further, by increasing or decreasing the number of the power transmission / reception coils or the coil length, it is possible to supply the necessary electric energy at the high potential portion. Furthermore, the power transmission / reception coil and the rectifying / smoothing circuit incorporated in the high-voltage cable can be reduced in size, and the high-potential portion can be reduced in size and weight as compared with the prior art. Since there is no drive unit like a generator, there is no vibration.

The present invention is particularly effective for a high-voltage device exceeding 1 MV, but can be applied to a general-purpose device of 0.5 MV or several hundred KV or less.

Hereinafter, the case where the charged particles are electrons and the charged particle beam apparatus is an electron microscope will be described. However, it is clear that the same argument holds even if the electrons are replaced with ions and the electron microscope is replaced with a beam irradiation apparatus or the like. In addition, the same code | symbol shows the same component.

A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic configuration diagram of a charged particle beam apparatus according to the present embodiment. The charged particle beam apparatus described in this embodiment is an ultrahigh voltage field emission electron microscope having an acceleration voltage of 1 MV, and has three pressure tanks.

The right pressure tank 101 has Cockcroft Walton circuit 102 for high pressure generation, which is configured by combining the multistage is housed a condenser and the diode, the tank insulating gas SF ₆ is filled. The AC high voltage transferred from the high-voltage transformer 103 is boosted by the Cockcroft-Walton circuit 102 to obtain a DC high voltage −1MV.

A terminal (one end) 104 of a high voltage cable 106 is inserted inside the pressure tank 101, and the DC high voltage −1 MV is introduced into the central pressure tank 105. The high-voltage cable 106 is a so-called CV cable, which is a high-voltage resistance cable having a semiconductive layer 170 having resistance inside an insulating layer 169 made of cross-linked polyethylene and having a hollow center (FIG. 2).

Inside the pressure tank 105, the field emission on the insulating support cradle 108 which is supported by a plurality of insulator 107 (F ield E mission; FE ) FE power supply 109 is a DC power supply for the electron gun driving is installed A potential of DC-1 MV is applied to the FE power source 109 on the insulating support base 108 from the terminal (the other end) 110 of the right high voltage cable 106. The insulating support base 108 and the FE power source 109 are entirely covered with a plurality of hoops 111 and a discharge prevention shield 112 so that the acute angle portion is not exposed.

The FE power supply 109 supplies a direct current output for driving the field emission electron gun 114 and the acceleration lens electrostatic lens 115 inside the left pressure tank 113. DC output of FE power supply 109 (voltage output for ion pump drive, output for electron source fine movement mechanism, deflection coil, astigmatism correction coil, current output for electron gun magnetic field lens, extraction voltage output, voltage output for acceleration tube electrostatic lens, etc. ) Is connected to the field emission electron gun 114 inside the left pressure tank 113 and the electrostatic lens 115 of the accelerating tube through the core of the high voltage multi-core cable 116.

Also, a reference resistor 117 and a filter capacitor 118 are installed in the central pressure tank 105. The current flowing through the reference resistor 117 is fed back to the drive power supply 180. The drive power supply 180 incorporates an acceleration voltage stabilization circuit, detects the deviation from the AC noise component of the feedback current and the set acceleration voltage, and modulates the drive output to the high-voltage transformer 103 so that the acceleration voltage is stabilized. To stabilize the acceleration voltage.

Since the electromagnetic wave generated in the cockcroft Walton circuit 102 inside the right pressure tank 101 due to the division of the pressure tank is not directly exposed to the reference resistor 117 inside the central pressure tank 105, no noise is introduced into the feedback current and the acceleration voltage Does not adversely affect stabilization. Further, since the voltage ripple of the transfer frequency is attenuated by the high-voltage resistance cable 106, high voltage stability of 10 ⁻⁷ units can be obtained. At this time, the energy width of the accelerating electrons is almost equal to the energy width of the field emission electrons, and can be used without impairing the monochromatic high-brightness characteristics of the field emission electron gun.

Inside the left pressure tank 113, a field emission electron gun 114 is installed on the acceleration tube 119. The acceleration tube 119 has a multistage structure in which ceramics and electrodes are stacked, and the inside is evacuated to an ultrahigh vacuum of 10 ⁻⁸ Pa level. A cylindrical suspension base 121 is coupled to the bottom plate 120 of the pressure tank 113 and is integrated with the bottom plate 120. The mirror body 122 of the electron microscope is assembled using the bottom of the suspension base 121 as a base. In order to block external vibration to the electron microscope, a vibration isolation mount 123 is placed on a concrete foundation (not shown) and supports the entire electron microscope at the four corners of the pressure tank bottom plate 120.

The electron beam exiting the field emission electron gun 114 is accelerated to an energy of 1 MeV by the acceleration tube 119. The first stage potential of the acceleration tube 119 is V _1, which is the same potential as the field emission electron gun 114, and the potential V ₂ is applied to the second stage of the acceleration tube 119 from the FE power source 109, and the static potential between the first stage and the second stage An electric lens 115 is formed. From the third stage of the acceleration tube to the final stage, a voltage obtained by equally dividing the remainder of the acceleration voltage with a resistor is applied to each stage.

The electron beam accelerated to an energy of 1 MeV with an acceleration voltage of −1 MV enters the mirror body 122 and forms an appropriate irradiation condition with a condenser lens and is irradiated onto the sample. A magnified image of the sample is formed by an objective lens, and further magnified up to about 1 million times by an intermediate lens and a projection lens, and an image with an atomic order resolution is recorded on a camera or film.

The amount of power supplied to the FE power source 109 inside the central pressure tank 105 is 50 W when a field emission electron gun or a field-emission electron gun equipped with an electron gun lens is driven as in this embodiment. A degree is required. A LaB ₆ thermal electron gun or the like that heats the filament requires several watts, and about 10 W is required to operate the electron gun ion pump. The FE power source 109 can supply a plurality of DC voltages and currents as described above.

The DC output from the power transmission / reception device 124 installed in the high-voltage resistance cable 106 is supplied to the FE power source 109. FIG. 2 shows a longitudinal section and a transverse section of a schematic configuration of the power transmission / reception device 124 installed in the high-voltage resistance cable 106. Usually, a high voltage CV cable has a semiconductive layer inside and outside an insulating layer. The inner semiconductive layer functions to alleviate the surface potential gradient of the conductor, to form a uniform electric field, and to keep the conductor and the semiconductive layer at the same potential to prevent partial discharge. In this embodiment, the conductor of the high voltage CV cable is extracted and made hollow, and used as a resistance cable having an inner semiconductive layer as a resistor.

As shown in FIG. 2, a power transmission coil 161 is wound around the high voltage resistance cable 106 to form a power transmitter 163 together with the resonance capacitor 162. The power transmitter 163 is connected to a high frequency power supply 164 and supplied with high frequency power. The frequency of the high frequency power supply 164 can be varied by an oscillator 165. The high-voltage resistance cable 106 has a sheath 166 for protecting the cable on the outermost side, a shield 167 wound with metal tape on the inner side, an outer semiconductive layer 168 on the inner side, a cross-linked polyethylene (CV) insulating layer 169, and an inner semiconductive layer. 170 is provided and the center is hollow. The hollow portion insulating gas SF ₆ is filled. A power receiver 174 including a power receiving coil 171, a resonant capacitor 172, and a rectifying / smoothing circuit 173 is installed at a position corresponding to the power transmitter 163 in the cable hollow portion. The high frequency power received by the power receiving coil 171 is rectified by the rectifying / smoothing circuit 173 and becomes a direct current output, which is connected to the direct current input of the FE power source 109 inside the central pressure tank 105 via a conducting wire in the hollow cable. In addition, it is desirable that the transmission distance between the power transmission coil and the power reception coil be 50 mm or less in consideration of transmission efficiency. Needless to say, the value should be equal to or higher than a value capable of withstanding a desired high voltage. The self-inductance of the power transmission coil 161 _{L 1,} the self-inductance of the power receiving coil 171 _{L 2,} the capacitance _{C 1} of the transmission-side resonant capacitor 162, a capacitance _{C 2} of the power receiving-side resonance capacitor 172. In order to magnetically resonate the power transmitter / receiver at the angular frequency ω ₀ , the capacities of the resonant capacitors C1 and C2 are selected so as to satisfy Equation (1).

At this time, the transmission efficiency η of power transmission / reception is expressed by Expression (2).

Here, the mutual inductance between the power transmitting and receiving coils is M, the load resistance R _L of the FE power source 109 connected to the power receiver, the power transmitting side coil resistance R ₁ , and the power receiving side coil resistance R ₂ . For example, the diameter D ₁ of the power transmission coil 161 = 140 mm, the number of turns N ₁ = 50 turns, the wire diameter 2 mm, the coil length d = 100 mm, the diameter D ₂ of the power receiving coil 171 = 35 mm, the number of turns N ₂ = 50 turns, and the coil length d Assuming that = 100 mm, considering the skin effect, the coil resistance has a resonance frequency of 100 kHz, the power transmission coil resistance R ₁ is about 0.32Ω, and the power reception coil resistance R ₂ is about 0.08Ω.

Self-inductance _{L 1} of the power transmission coil 161 Nagaoka coefficient as _{k N,} represented by formula (3).

The mutual inductance M between the concentric double-winding coils is expressed by Expression (4).

Thus, L ₁ = 328 μH, L ₂ = 48 μH, and the mutual inductance is about M = 16 μH.

In order to set the resonance frequency to 100 kHz, the capacitance C ₁ of the power transmission side resonance capacitor may be set to 7723 pF, and the capacitance C ₂ of the power reception side resonance capacitor may be set to 0.053 μF. In practice, it is possible to use a component having a standard close to these values, scan the frequency, determine the resonance frequency, and use it in the vicinity.

When the load resistance _RL is 50Ω, the transmission efficiency η is expected to be 0.86, and the input / output voltage ratio of the received voltage / sending voltage is expected to be about 4.3. Although the obtained DC power is slightly reduced by the efficiency of the rectifying and smoothing circuit, high-efficiency power transmission of about 0.8 can be expected as the overall power transmission efficiency.

If a high frequency power supply of 100 kHz, AC15V, 5A is used, and the above power transmitter / receiver and rectifier are used, it is sufficiently possible to ensure the input of the FE power supply 109 of about 50 W at 48 VDC. When the FE power source 109 requires DC input of a plurality of voltages, for example, when

DC

48V, 24V, 15V, and 5V inputs are required, four pairs of power transmitters and receivers can be independently installed on a high voltage cable ( FIG. 3). Or you may use the power transmitter which has the coil length of the grade which arranged four power receivers.

At this time, one set of the high-frequency power source 164 and the oscillator 165 may be used, and four different DC voltages are output by adjusting the constants and output resistance of the power receiving coil and the resonant capacitor on the power receiver side. The resonance frequency can be from kHz to GHz if the capacitance of the resonance capacitor is selected, but a frequency as far as possible as the driving frequency of the cockcroft Walton circuit 102 is selected so that noise can be easily separated. Since the circuit design becomes complicated when the frequency becomes too high, the frequency is set to 100 kHz in this embodiment. However, it may be determined by calculating and considering the inductance from the dimensions of the installable power transmitting and receiving coils.

Since the power transmission / reception device 124 can be installed sufficiently far away from the electron microscope mirror 122 and the electron gun unit (field emission electron gun) 114, high-frequency noise generated by power transmission does not affect the observation of the electron microscope. It is easy to do so. When high-frequency noise becomes a problem, electromagnetically shield the coil on the power transmission side and the high-frequency power supply, and cut off the high-frequency noise by passing a stabilization circuit or storage battery between the DC output after rectifying and smoothing on the power receiving side and the power supply for the electron gun. can do.

Alternatively, a deflection coil, an astigmatism correction coil, an electron gun magnetic field lens current output, an extraction voltage output, and an acceleration tube electrostatic lens voltage output that require a highly stable DC output are supplied from a storage battery drive power source. Only the ion pump power supply that requires less power but consumes more power may be driven by the transmission power using the magnetic resonance coupling described in this embodiment.

As described above, according to the present embodiment, it is possible to provide a charged particle beam device capable of continuous operation with low noise and high efficiency by attaching a power transmission / reception device using electromagnetic induction to a hollow high-voltage resistance cable. . Further, the power transmission / reception coil and the rectifying / smoothing circuit incorporated in the high-voltage cable can be reduced in size, and the high potential portion can be reduced in size and weight.

A charged particle beam apparatus according to a second embodiment of the present invention will be described with reference to FIG. Note that the matters described in the first embodiment and not described in the present embodiment can be applied to the present embodiment as long as there is no special circumstances.

FIG. 4 is a front view of a schematic configuration of the charged particle beam apparatus. The charged particle beam apparatus shown in FIG. 4 is a general-purpose field emission electron microscope of a class having an acceleration voltage of 300 kV or less. The configuration of the electron microscope is basically the same as that of the first embodiment. The electron microscope is roughly composed of three parts and is connected by two high-voltage cables.

The left electron microscope body 130 has a height of about 3 m or less, an electron gun housing 131 is installed at the top, a field emission electron gun is housed inside, and an insulating gas is enclosed. A high voltage multi-core cable 132 is connected to the electron gun housing 131, and one is connected to the FE tank 133. An FE power source is accommodated in the FE tank 133. The high voltage power supply 134 that supplies the acceleration voltage and the FE tank 133 are connected by a hollow resistance cable 135.

The power transmission / reception device 124 is attached to a portion of the hollow resistance cable 135 close to the high voltage power supply 134 (distant from the FE tank 133 and the mirror body 130). Thereby, the same effect as Example 1 can be acquired. In addition, in the conventional general-purpose field emission electron microscope of this class, an FE power supply is supplied using an insulating transformer. However, since an insulating transformer is not necessary, the FE tank 133 is reduced to about 1/2. There is. Further, since the acceleration voltage is lower than that of the first embodiment, the length of the acceleration tube is short, and even if the vacuum pump is installed at the ground potential below the acceleration tube and evacuated from below, the area around the field emission electron gun is required for field emission. A good vacuum of about ^-8 Pa can be maintained. Since the electron gun deflector also has a short accelerating tube length, even if an electron gun magnetic field lens is mounted, the output of the FE power source of about several W smaller than that of the first embodiment is required, so the power transmission / reception device 124 is also small.

As described above, according to the present embodiment, the same effects as those of the first embodiment can be obtained. Further, the charged particle beam apparatus including the FE tank can be downsized as compared with the case where an insulating transformer is used for the FE power source.

A charged particle beam apparatus according to a third embodiment of the present invention will be described with reference to FIG. Note that matters described in the first or second embodiment but not described in the present embodiment can also be applied to the present embodiment unless there are special circumstances.

FIG. 5 is a high-frequency power source in the charged particle beam apparatus described in the first embodiment, and a modulation circuit is added to exchange information such as the current value of the ion pump and the current value of the deflector between the ground potential side and the high potential side. It is a block diagram which shows an example to make it do. The CPU 140 on the ground potential side sends a control signal to the modulation circuit 142 in response to a control command to the FE power supply 141 on the high potential side, and applies amplitude modulation to the output of the high frequency power supply 143. On the power reception side (high potential side), this modulation is read by the detection circuit 144, restored as a control signal, sent to the CPU 145 of the FE power supply 141, and the FE power supply 141 is controlled. On the other hand, the CPU 145 sends a signal to the load fluctuation circuit 146 that changes the load resistance _RL in accordance with the output state of the FE power supply 141, and modulates the load resistance _RL on the power receiving side. The output impedance changes due to the change of the load resistance _RL and can be detected by the detection circuit 147 on the power transmission side (ground potential side), whereby the output state of the FE power supply 141 can be known on the ground potential side. Since the transmission voltage fluctuates slightly while data is being transmitted and received, a stabilization circuit 148 is provided on the input side of the FE power supply 141 so that input fluctuations do not affect the output of the FE power supply 141.

The rule of data exchange may be determined in advance, and for example, the high potential side may transmit the state of the FE power supply in the form of returning a request from the ground potential side. Conventionally, control signals to the FE power source and data on the output state of the power source have been transmitted by spatial light transmission or optical fiber communication. The use of optical fiber and spatial light transmission reduces the risk of high-voltage discharge, but increases the power consumption of the FE power supply due to the use of infrared rays and lasers. In the present embodiment, since control and status information can be transmitted simultaneously with power transmission, there is an advantage that the configuration of the communication mechanism of the FE power supply can be simplified and the power consumption can be reduced as compared with the conventional system.

As described above, according to the present embodiment, the same effects as those of the first embodiment can be obtained. In addition, by adding a modulation circuit and exchanging information such as the current value of the ion pump and the current value of the deflector between the ground potential side and the high potential side, the configuration of the communication mechanism of the FE power supply can be simplified and the power consumption can be reduced. can do.

In addition, this invention is not limited to the above-mentioned Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of a certain embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of a certain embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

DESCRIPTION OF SYMBOLS 101 ... Pressure tank, 102 ... Cockcroft-Walton circuit, 103 ... High pressure transformer, 104 ... High pressure cable terminal, 105 ... Pressure tank, 106 ... High pressure resistance cable, 107 ... Insulator, 108 ... Insulation support stand, 109 ... FE power supply, 110 DESCRIPTION OF SYMBOLS ... High voltage cable terminal, 111 ... Hoop, 112 ... Shield, 113 ... Pressure tank, 114 ... Field emission electron gun, 115 ... Electrostatic lens, 116 ... High voltage multi-core cable, 117 ... Reference resistor, 118 ... Filter capacitor, 119 DESCRIPTION OF SYMBOLS ... Acceleration tube, 120 ... Bottom plate, 121 ... Suspension mount, 122 ... Mirror body, 123 ... Anti-vibration mount, 124 ... Power transmission / reception device, 130 ... Mirror body, 131 ... Electron gun housing, 132 ... High-voltage multi-core cable, 133 ... FE tank, 134 ... high-voltage power supply, 135 ... hollow resistance cable, 140 ... CPU, 14 ... FE power supply, 142 ... modulation circuit, 143 ... high frequency power supply, 144 ... detection circuit, 145 ... CPU, 146 ... load fluctuation circuit, 147 ... detection circuit, 148 ... stabilization circuit, 161 ... power transmission coil, 162 ... resonance capacitor, 163 ... Power transmitter, 164 ... High frequency power supply, 165 ... Oscillator, 166 ... Sheath, 167 ... Shield, 168 ... External semiconductive layer, 169 ... Insulating layer, 170 ... Internal semiconductive layer, 171 ... Receiving coil, 172 ... Resonant capacitor 173, a rectifying / smoothing circuit, 174, a power receiver, 180, a driving power source.

Claims

A charged particle beam that uses a high voltage power source and a charged particle source or a charged particle gun including a charged particle source via a high voltage cable to accelerate and use charged particles generated from the charged particle source at a high potential. A device,
The center of the high-voltage cable is a hollow portion, and a receiving coil for supplying power to be used in the charged particle gun placed in the high-potential portion is installed in the hollow portion, and power is supplied to the outside of the high-voltage cable. A charged particle beam apparatus comprising: a power transmission coil for power transmission; a high frequency power source connected to the power transmission coil; and power transmission from a ground potential side to a high potential side power source by magnetic resonance coupling between the power transmission and reception coils .
The charged particle beam apparatus according to claim 1, wherein the power receiving coil and a rectifying / smoothing circuit are installed together in the hollow portion of the high-voltage cable, and DC power is supplied to a high potential side.
Control from the ground potential side of the high potential power source is performed by modulating the output of the high frequency power source, and detection of the output state of the high potential power source is performed by modulating the load resistance on the high potential side. The charged particle beam apparatus according to claim 1.
The charged particle beam apparatus according to claim 1, wherein charged particles generated from the charged particle source are accelerated to 1 MV or more.
The charged particle beam device according to claim 1, wherein a distance between the power transmission coil and the power reception coil is not less than a value capable of withstanding a desired high voltage and not more than 50 mm.
A charged particle beam apparatus comprising a charged particle gun including a charged particle source, a high voltage power source, and a high voltage cable having a hollow portion disposed between the high voltage power source and the charged particle gun,
The high-voltage cable incorporates a power transmission / reception device,
The power transmission / reception device is disposed in the hollow portion on the high potential side of the high-voltage cable and surrounds the outer periphery of the high-voltage cable on the ground potential side, and a power reception coil for supplying power used in the charged particle gun And a power transmission coil for transmitting electric power to the power reception coil.
The charged particle beam device according to claim 6, wherein the power transmitting / receiving device transmits electric power from the ground potential side to the high potential side by magnetic resonance coupling.
The power transmitted to the high potential side by the power transmission / reception device is used by at least one of a vacuum pump, a magnetic lens, an electrostatic lens, a deflector and a fine movement device of the charged particle source used in the charged particle gun. The charged particle beam apparatus according to claim 6, wherein:
The electric power transmitted to the high potential side by the power transmission / reception device is sent to a vacuum pump, a magnetic lens, an electrostatic lens, a deflector and a fine movement device of the charged particle source used in the charged particle gun using a high-voltage multicore cable. The charged particle beam device according to claim 8, wherein the charged particle beam device is supplied.