WO2017069846A1 - Manipulator in automatic test equipment - Google Patents
Manipulator in automatic test equipment Download PDFInfo
- Publication number
- WO2017069846A1 WO2017069846A1 PCT/US2016/048299 US2016048299W WO2017069846A1 WO 2017069846 A1 WO2017069846 A1 WO 2017069846A1 US 2016048299 W US2016048299 W US 2016048299W WO 2017069846 A1 WO2017069846 A1 WO 2017069846A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pneumatic cylinders
- manipulator
- air
- test head
- reservoir
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Program-controlled manipulators
- B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0416—Connectors, terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/317—Testing of digital circuits
- G01R31/3181—Functional testing
- G01R31/319—Tester hardware, i.e. output processing circuits
- G01R31/31903—Tester hardware, i.e. output processing circuits tester configuration
- G01R31/31905—Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture
Definitions
- This specification relates generally to a manipulator for use in automatic test equipment (ATE).
- ATE automatic test equipment
- ATE Automatic test equipment
- DUT device under test
- DIB device interface board
- the test head mates to the DIB in order to establish electrical connections to the DUTs and, through those connections, perform various tests.
- a manipulator is a device that transports the test head, and that brings the test head into contact with the DIB or other peripheral device that holds the DUTs. A certain amount of force is required to achieve contact between the test head and the DIB. However, too much force can damage the DIB and, possibly, the DUTs.
- springs were used in the manipulator to control the amount of force used to achieve contact between the test head and the DIB.
- the pneumatic cylinders may be mounted on a structure that is attached to, and configured to move along with, the arm along the track.
- the structure may comprise a first plate and a second plate.
- the pneumatic cylinders may be connected to the first plate and the second plate.
- Each of the pneumatic cylinders may comprise: a housing to receive and to hold air generating air pressure; and a rod that is movable within the housing and between the first plate and the second plate, with movement of the rod being affected by the air pressure to control movement of the arm.
- the amount of force may be between 20 Newtons/millimeter (N/mm) and 60 N/mm.
- the pneumatic cylinders may be adjustable to support a test head having a weight within a range of 800 pounds (lbs) to 2600 lbs.
- An example system comprises: a test head configured to interface to a device interface board (DIB) connected to a device under test (DUT), with the test head comprising electronics to test the DUT; and a manipulator to bring the test head into contact with the DIB.
- the manipulator comprises: an arm to enable support for the test head, with the arm being configured to move vertically relative to the DIB; one or more motors to drive vertical movement of the arm; and pneumatic cylinders to control movement of the arm to cause the test head to apply an amount of force to the DIB.
- the example manipulator may also include one or more of the following features, either alone or in combination.
- Each pneumatic cylinder may comprise: a housing to receive and to hold air generating air pressure; and a rod that is movable within the housing, with movement of the rod being affected based on the air pressure.
- the manipulator may comprise a controller that is settable to adjust the amount of force to be applied by the pneumatic cylinders by adjusting air pressure in one or more of the pneumatic cylinders.
- the manipulator may comprise a reservoir to receive a hose for supplying air, with the reservoir comprising one or more conduits connecting the reservoir to the pneumatic cylinders for transferring the air to the pneumatic cylinders.
- the reservoir may comprise a check valve to receive the hose, with the check valve being configured to inhibit release of air upon removal of the hose from the check valve.
- the manipulator may comprise an air regulator, with the air regulator comprising a pressure release button, and with at least one of the reservoir or the pneumatic cylinders being responsive to selection of the pressure release button to release air from the at least one of the reservoir or the pneumatic cylinders.
- the pneumatic cylinders may be mounted on a structure that is attached to, and configured to move along with, the arm along the track.
- the structure may comprise a first plate and a second plate.
- the pneumatic cylinders may be connected to the first plate and the second plate, with each of the pneumatic cylinders comprising: a housing to receive and to hold air generating air pressure; and a rod that is movable within the housing and between the first plate and the second plate, with movement of the rod being affected by the air pressure to control movement of the arm.
- the amount of force may be between 20 Newtons/millimeter (N/mm) and 60 N/mm.
- the pneumatic cylinders may be adjustable to support a test head having a weight within a range of 800 pounds (lbs) to 2600 lbs.
- test systems and techniques described herein, or portions thereof can be implemented as/controlled by a computer program product that includes instructions that are stored on one or more non-transitory machine-readable storage media, and that are executable on one or more processing devices to control (e.g., coordinate) the operations described herein.
- the test systems and techniques described herein, or portions thereof can be implemented as an apparatus, method, or electronic system that can include one or more processing devices and memory to store executable instructions to implement various operations.
- Fig. 1 is a perspective view of an example manipulator.
- Fig. 2 is a cut-away, side view of the example manipulator.
- Fig. 3 is a cut-away, side view of the example manipulator connecting a test head to a device interface board (DIB).
- DIB device interface board
- Fig. 4 is a close-up, cut-away, side view of a part the example manipulator that includes a pneumatic cylinder.
- Fig. 5 is a close-up, cut-away, perspective view of a part the example manipulator that includes a pneumatic cylinder.
- Fig. 6 is a close-up perspective view of a part the example manipulator that shows three pneumatic cylinders
- Fig. 7 is a close-up, cut-away, top view of a part the example manipulator that shows three pneumatic cylinders.
- Fig. 8 is a close-up perspective of a part the example manipulator that shows three pneumatic cylinders from behind.
- Fig. 9 is a perspective view of an example pneumatic cylinder.
- Fig. 10 is a close-up perspective view of a part the example manipulator that shows an air reservoir.
- Fig. 1 1 is a block diagram of example automatic test equipment (ATE) that may be used with the example manipulator.
- ATE automatic test equipment
- a manipulator for connecting a test head to a device under test (DUT).
- the DUT is connected to a device interface board (DIB), which provides an electrical and mechanical interface between the test head and the DUT.
- DIB device interface board
- the manipulator brings the test head into contact with the DIB in order to form an electrical and mechanical connection between the two, and thereby enable communication between test electronics in the test head and the DUT.
- the manipulator includes pneumatic cylinders to control the amount of force with which the test head contacts the DIB (called the compliance force).
- the pneumatic cylinders are controllable to adjust the amount of that force, making them usable with test heads and DIBs that require different amounts of force.
- the manipulator described herein may be more flexible than manipulators that rely on springs to control the amount of force, since springs are not typically controllable to the extent that the pneumatic cylinders are controllable.
- Figs. 1 and 2 show an example implementation of a manipulator 10.
- Manipulator 10 includes a base 1 1 , a tower 12, tracks 13 (including track 13a and track 13b), and arms 14 (including arm 14a and arm 14b).
- tower 12 is fixed to base 1 1 , and is not movable relative thereto.
- Base 1 1 is configured to move along a surface, such as the test room floor.
- Tower 12 includes two tracks 13a, 13b, one of which is on each side of the manipulator (track 13b is not wholly visible in Fig. 1 or Fig. 2). In some
- Tracks 13a, 13b are arranged along a vertical length of tower 12, as shown in Figs. 1 and 2. In some implementations, tracks 13a, 13b are arranged along the tower's entire vertical length, and in some
- tracks 13a, 13b are arranged along only part of (e.g., less than the whole of) the tower's vertical length.
- Arms 14 are mounted on tracks 13 via a support structure 18.
- the support structure is connected to the tracks, and the arms are connected to the support structure.
- the support structure is configured to move vertically along the tracks, thus also causing the arms to move vertically relative to the tracks.
- One or more motors (not shown) drive movement of the support structure, and thus the arms, along the tracks.
- Arms 14 are connected, via arrangement 19, to the test head holder 20.
- Test head holder 20 is configured to hold a test head 21 .
- Test head 21 is part of automatic test equipment (ATE).
- Test head 21 includes test electronics, such as pin electronics or the like, for use in testing a device under test (DUT) connected to the test head.
- DUT device under test
- a DUT is connected to a DIB, which provides electrical and mechanical connections between the DUT and the test head.
- the test head contacts, and connects to, the DIB. Different DIBs may require different amounts of force to make the appropriate connections.
- manipulator 10 is movable to align test head 21 to appropriate locations relative to the DIB, and to apply the appropriate amount of force to connect the test head to the DIB both electrically and mechanically.
- Fig. 3 shows an example in which test head 21 and DIB 26 are in contact.
- the manipulator described herein may be configured to mate the test head to a DIB that is above the test head.
- three pneumatic cylinders 26 (including pneumatic cylinders 26a, 26b, and 26c) are constructed and arranged to generate an appropriate amount of force (the compliance force) to connect the test head to the DIB.
- the compliance force is typically applied after the test head is moved into an appropriate location above or below the DIB.
- the manipulator is not limited to use with three pneumatic cylinders; any appropriate number of pneumatic cylinders may be used, e.g., one, two, three, four, five, six, and so forth.
- the force is applied downward by the manipulator to drive the test head to connect to the DIB. In some implementations, the force is applied upward by the manipulator to drive the test head to connect to the DIB. In some implementations, as noted, the connection is not made to a DIB, but rather to any other appropriate peripheral device.
- each pneumatic cylinder 26 is mounted to a plate 29 connected to, and movable with, support structure 18.
- Support structure 18 is also mounted to a lead screw or shaft 25 (in addition to its mounting on tracks 13), along which the motor(s) drive vertical movement of the support structure.
- each of the pneumatic cylinders includes a housing 33 to receive and to hold air for generating air pressure; and a rod 34 that is movable within the housing and between the first plate and the second plate.
- the amount of air pressure in the housing corresponds to the amount of friction within the housing, and therefore affects how easily the rod moves within the housing.
- the pneumatic cylinders are connected in the same manner to plates 29 and 32. Accordingly, the connection and operation of only one of the pneumatic cylinders 26a is described. Housing 33 of pneumatic cylinder 26a is connected, and fixed, to plate 29. Rod 34 is connected to plate 32, which is likewise connected to arm 14a of structure 18. A motor (now shown) controls the vertical movement of rod 34, represented by arrow 38, within the housing of pneumatic cylinder 26a. As that vertical movement occurs, arms 14, which are connected together, and which are connected to rod 34 through plate 32 and structure 18, move vertically, e.g., either upward or downward relative to a horizontal surface, such as a test floor, on which the manipulator is located.
- the pneumatic cylinders are controllable and/or configurable to, as a group, apply a compliance force that is between 20
- the amount of compliance force may be 20 N/mm, 21 N/mm, 22 N/mm, 23 N/mm, 24 N/mm, 25 N/mm, 26 N/mm, 27 N/mm, 28 N/mm, 29 N/mm, 30 N/mm, 31 N/mm, 32 N/mm, 33 N/mm, 34 N/mm, 35 N/mm, 36 N/mm, 37 N/mm, 38 N/mm, 39 N/mm, 40 N/mm, 41 N/mm, 42 N/mm, 43 N/mm, 44 N/mm, 45 N/mm, 46 N/mm, 47 N/mm, 48 N/mm, 49 N/mm, 50 N/mm, 51 N/mm, 52 N/mm, 53 N/mm, 54 N/mm, 55 N/mm, 5 N/mm, 57 N/mm, 58 N/mm, 59 N/mm, or 60 N/mm.
- the pneumatic cylinders are not limited to applying amounts of compliance forces within this
- the pneumatic cylinders are controllable and/or configurable to support a test head having a weight within a range of 800 pounds (lbs) to 2600 lbs.
- the test head may weight 800 lbs, 900 lbs, 1000 lbs, 1 100 lbs, 1200 lbs, 1300 lbs, 1400 lbs, 1500 lbs, 1600 lbs, 1700 lbs, 1800 lbs, 1900 lbs, 2000 lbs, 2100 lbs, 2200 lbs, 2300 lbs, 2400 lbs, 2500 lbs, or 2600 lbs.
- each pneumatic cylinder can be controlled and/or configured by adjusting the amount of air pressure held in its housing.
- housing 33 holds air at a specified pressure. An amount of air may be introduced into the housing to generate that air pressure.
- Rod 34 is movable within the housing, as described herein. The movement of rod 34 is affected by the pressure within the housing. For example, in some implementations, the higher the air pressure is in the housing, the more difficult movement of rod 34 will be, resulting in more applied force by the cylinder. Likewise, in some
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Manipulator (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
Description
Claims
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201680059260.3A CN108139431A (en) | 2015-10-23 | 2016-08-24 | Executor in automatic test equipment |
| JP2018517534A JP6970664B2 (en) | 2015-10-23 | 2016-08-24 | Manipulator for automatic test equipment |
| KR1020187009982A KR102621341B1 (en) | 2015-10-23 | 2016-08-24 | Manipulators in automated test equipment |
| SG11201802457VA SG11201802457VA (en) | 2015-10-23 | 2016-08-24 | Manipulator in automatic test equipment |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/921,557 | 2015-10-23 | ||
| US14/921,557 US10094854B2 (en) | 2015-10-23 | 2015-10-23 | Manipulator in automatic test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2017069846A1 true WO2017069846A1 (en) | 2017-04-27 |
Family
ID=58557887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2016/048299 Ceased WO2017069846A1 (en) | 2015-10-23 | 2016-08-24 | Manipulator in automatic test equipment |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10094854B2 (en) |
| JP (1) | JP6970664B2 (en) |
| KR (1) | KR102621341B1 (en) |
| CN (1) | CN108139431A (en) |
| SG (1) | SG11201802457VA (en) |
| WO (1) | WO2017069846A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108776240A (en) * | 2018-06-22 | 2018-11-09 | 湖北泰和电气有限公司 | A kind of detector of lightning arrester |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10634718B2 (en) * | 2016-10-10 | 2020-04-28 | Reid-Ashman Manufacturing, Inc. | Manipulator for moving a test head |
| CN108750654B (en) * | 2018-07-24 | 2024-05-03 | 昆山赛腾平成电子科技股份有限公司 | Manipulator transport test equipment |
| CN110967529A (en) * | 2018-09-28 | 2020-04-07 | 苏州能讯高能半导体有限公司 | Drive crimping test fixture and power amplifier tube performance test system |
| US11498207B2 (en) * | 2021-01-08 | 2022-11-15 | Teradyne, Inc. | Test head manipulator configured to address uncontrolled test head rotation |
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| US5528158A (en) * | 1994-04-11 | 1996-06-18 | Xandex, Inc. | Probe card changer system and method |
| WO1996026446A1 (en) * | 1995-02-23 | 1996-08-29 | Aesop, Inc. | Manipulator for automatic test equipment test head |
| JP2000199776A (en) * | 1998-10-13 | 2000-07-18 | Samsung Electronics Co Ltd | Integrated test system and integrated test method using the same |
| US6766996B1 (en) * | 2001-07-16 | 2004-07-27 | Reid-Ashman Manufacturing, Inc. | Manipulator |
| US20060156836A1 (en) * | 2000-09-22 | 2006-07-20 | Ny Nil O | Apparatus and method for balancing and for providing a compliant range to a test head |
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| JPH07263517A (en) * | 1994-03-24 | 1995-10-13 | Hitachi Electron Eng Co Ltd | IC socket positioning device |
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| WO2003005045A1 (en) * | 2001-07-05 | 2003-01-16 | Heigl, Cornelia | Handling device, especially for positioning a test head on a testing device |
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| US7312604B2 (en) | 2005-07-29 | 2007-12-25 | Nextest Systems Corporation | Portable manipulator for stackable semiconductor test system |
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| CN103157636B (en) * | 2013-03-14 | 2015-08-26 | 南通贝特医药机械有限公司 | A kind of Liftable type barrel cleaning device |
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2015
- 2015-10-23 US US14/921,557 patent/US10094854B2/en active Active
-
2016
- 2016-08-24 SG SG11201802457VA patent/SG11201802457VA/en unknown
- 2016-08-24 KR KR1020187009982A patent/KR102621341B1/en active Active
- 2016-08-24 CN CN201680059260.3A patent/CN108139431A/en active Pending
- 2016-08-24 WO PCT/US2016/048299 patent/WO2017069846A1/en not_active Ceased
- 2016-08-24 JP JP2018517534A patent/JP6970664B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5528158A (en) * | 1994-04-11 | 1996-06-18 | Xandex, Inc. | Probe card changer system and method |
| WO1996026446A1 (en) * | 1995-02-23 | 1996-08-29 | Aesop, Inc. | Manipulator for automatic test equipment test head |
| JP2000199776A (en) * | 1998-10-13 | 2000-07-18 | Samsung Electronics Co Ltd | Integrated test system and integrated test method using the same |
| US20060156836A1 (en) * | 2000-09-22 | 2006-07-20 | Ny Nil O | Apparatus and method for balancing and for providing a compliant range to a test head |
| US6766996B1 (en) * | 2001-07-16 | 2004-07-27 | Reid-Ashman Manufacturing, Inc. | Manipulator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108776240A (en) * | 2018-06-22 | 2018-11-09 | 湖北泰和电气有限公司 | A kind of detector of lightning arrester |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6970664B2 (en) | 2021-11-24 |
| CN108139431A (en) | 2018-06-08 |
| SG11201802457VA (en) | 2018-05-30 |
| KR102621341B1 (en) | 2024-01-05 |
| US20170115327A1 (en) | 2017-04-27 |
| US10094854B2 (en) | 2018-10-09 |
| JP2019502897A (en) | 2019-01-31 |
| KR20180061224A (en) | 2018-06-07 |
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