WO2017043942A1

WO2017043942A1 - Method for analyzing three-dimensional specimen

Info

Publication number: WO2017043942A1
Application number: PCT/KR2016/010251
Authority: WO
Inventors: 유규상; 김완섭; 김수방; 정광환; 민원자; 김승균; 박경수; 안승엽; 김좌순; 심창식
Original assignee: 케이맥(주)
Priority date: 2015-09-10
Filing date: 2016-09-12
Publication date: 2017-03-16
Also published as: KR101753146B1; KR20170030775A

Abstract

The present invention relates to a method for analyzing a three-dimensional specimen, the method comprising: a component measurement step for measuring components constituting a three-dimensional specimen by identifying an energy spectrum generated when an ion beam incident to the three-dimensional specimen collides with the three-dimensional specimen.

Description

How to Analyze Stereoscopic Specimens

The present invention relates to a method for analyzing three-dimensional specimens, and more particularly, three-dimensional specimens capable of measuring the components constituting the three-dimensional specimens by checking the energy spectrum generated when the ion beam incident on the three-dimensional specimens collide with the three-dimensional specimens. It is about how to analyze.

As the IT industry develops today, numerous highly integrated electronic devices are being developed. However, technology for analyzing highly integrated electronic devices does not support this. For example, a semiconductor, which is a representative high-density electronic device, is described as an example. According to the International Semiconductor Technology Roadmap (ITRS), the thickness of the oxide layer is increased as the high density increases, such that the thickness of the silicon oxide layer must be reduced to 1 nm or less in the 100 nm technology generation. Although thinning is required, conventional surface analysis methods have a problem in that they do not have resolution for ultra-thin film thickness or only a part of a structure or composition can be identified.

In addition, the doped layer of semiconductors is even thinner, allowing secondary ion mass spectroscopy (SIMS) or electron beams to analyze the cations or anions emitted while hitting the surface with the primary ions that have been used. The above problems are further highlighted in that CD-SEM (Critical Dimension-Secondary Electron Microscopy) technology is no longer accessible. Moreover, in the past, highly integrated electronic devices including semiconductors described above may have been used for two-dimensional analysis, but today, the structure is complicated and requires three-dimensional analysis. Techniques for analyzing three-dimensional specimens will have to be developed.

The problem to be solved by the present invention is a method for analyzing a three-dimensional specimen having a high resolution, by measuring the energy spectrum generated when the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen to determine the components constituting the three-dimensional specimen To provide a method for analyzing three-dimensional specimens.

In order to solve the problem to be solved as described above, the method for analyzing a three-dimensional specimen according to the present invention, by configuring the three-dimensional specimen by confirming the energy spectrum generated as the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen It comprises a component measuring step of measuring the component to be.

Here, the component measuring step may include measuring at least one of component concentration or thickness of the three-dimensional specimen, the ion beam incident process for injecting the ion beam to the three-dimensional specimen; A spectrum checking step of checking an energy spectrum of the scattered ion beam when the ion beam incident through the ion beam incident process is scattered as it collides with the three-dimensional specimen; And a component measurement process of measuring at least one of component concentration or thickness of the three-dimensional specimen from the energy spectrum identified through the spectrum identification process.

In addition, the component measurement process, at least any one of the component concentration or thickness of the three-dimensional specimen by comparing the energy spectrum identified through the spectrum confirmation process and the energy spectrum previously confirmed according to the component concentration and thickness of the three-dimensional specimen. One can be measured.

In this case, when the three-dimensional specimen has a radially unfolded structure with respect to one point, the energy spectrum and the spectrum identified in accordance with the thickness of the outer region and the component concentration of the inner region in the part spaced apart from one point of the three-dimensional specimen By comparing the energy spectrum identified through the process with each other, at least one of the component concentration or the thickness of the three-dimensional specimen is measured, wherein the predetermined energy spectrum is an outer region at a portion spaced from one point of the three-dimensional specimen. The thicker is the energy of the scattered ion beam may be smaller.

In addition, in the case where the three-dimensional specimen has a radially unfolded structure based on one point, the energy spectrum and the spectrum confirmation that have been previously determined according to the thickness of the outer zone and the component concentration of the inner zone in the spaced portion at one point of the three-dimensional specimen. By comparing the energy spectra identified through the process, at least one of the component concentration or the thickness of the three-dimensional specimen is measured, wherein the predetermined energy spectrum is an inner region at a portion spaced from one point of the three-dimensional specimen. The higher the component concentration of, the higher the detection intensity of the scattered ion beams.

On the other hand, if the three-dimensional specimen is a polyhedral structure formed with a thin film on the surface of the three-dimensional specimen, the energy spectrum confirmed through the spectrum and the energy spectrum identified in accordance with the component concentration and thickness of the thin film formed on the three-dimensional specimen By comparing with each other, at least one of the component concentration or thickness of the thin film formed on the three-dimensional specimen is measured, wherein the predetermined energy spectrum is fixed at least one of the component concentration or thickness of the thin film formed on the three-dimensional specimen While changing one value, the energy spectrum may be previously identified for each of the top, bottom, and side surfaces of the three-dimensional specimen.

In this case, the predetermined energy spectrum may be characterized in that the detection intensity of the scattered ion beam is increased as the component concentration is higher when the thickness of the thin film formed on the three-dimensional specimen is confirmed in advance while changing the component concentration. .

In addition, the predetermined energy spectrum is fixed at an angle in which the ion beam is incident on the basis of a coordinate system defining one surface of the three-dimensional specimen while changing the component concentration while fixing the thickness of the thin film formed on the three-dimensional specimen. When the ion beam is incident in advance at 90 degrees (azimuth angle = 90 °), the energy of the ion beam scattered in the order of the top, side, and bottom of the three-dimensional specimen may be large.

In addition, the pre-determined energy spectrum is an angle toward the direction in which the ion beam is incident on the basis of a coordinate system defining one surface of the three-dimensional specimen while changing the concentration of components while fixing the thickness of the thin film formed on the three-dimensional specimen. When the ion beam is incident in advance at 0 degrees (azimuth angle = 0 °), the energy of the ion beam scattered from the side surfaces of the three-dimensional specimen may be greater than that of the side surface. In this case, the energy of the ion beam scattered from the side of the three-dimensional specimen will be smaller toward the lower side of the side from the upper side of the three-dimensional specimen.

In addition, when the predetermined energy spectrum is checked in advance by changing the thickness of the thin film formed on the three-dimensional specimen while changing the thickness of the thin film of the three-dimensional specimen, the thicker the thickness of the thin film of the three-dimensional specimen of the energy compared to the detection intensity of the scattered ion beam It can be characterized by a large amount of change.

In this case, the thinner the thickness of the side thin film of the three-dimensional specimen, the energy spectrum of the ion beam scattered from the side of the three-dimensional specimen and the energy of the ion beam scattered from the other side of the three-dimensional specimen through the side of the three-dimensional specimen The spectrum will be divided.

On the other hand, the method for analyzing three-dimensional specimens according to the present invention, may further comprise a shape definition step of defining the shape of the three-dimensional specimens before the component measurement step.

Here, in the shape defining step, the shape of the three-dimensional specimen may be defined by confirming an energy spectrum generated when the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen.

The shape defining step may include a coordinate arrangement process of arranging the three-dimensional specimen in virtual three-dimensional coordinates; An ion beam incident process of injecting an ion beam into the three-dimensional specimen at an incident angle that may be defined based on the virtual three-dimensional coordinates; A spectrum checking step of checking an energy spectrum of the scattered ion beam when the ion beam incident through the ion beam incident process is scattered as it collides with the three-dimensional specimen; And a shape definition process for defining the shape of the three-dimensional specimen from the energy spectrum identified through the spectrum identification process.

In this case, the shape definition process, by comparing the energy spectrum identified according to the shape of the three-dimensional specimen and the energy spectrum confirmed through the spectrum identification process, the height, length, width or the three-dimensional specimen of the three-dimensional specimen When composed of a plurality of three-dimensional specimen unit may define at least one of the spacing between the three-dimensional specimen unit.

Here, when the three-dimensional specimen is a radially unfolded structure with respect to one point, the predetermined energy spectrum is scattered in the inner region as the thickness of the inner region in the portion spaced apart from one point of the three-dimensional specimen is thicker. The greater the amount of change in the energy of the ion beam, and the thicker the outer zone in the portion spaced from one point of the three-dimensional specimen, the smaller the energy of the ion beam scattered in the inner zone.

In addition, when the three-dimensional specimen has a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower end to the upper end of the three-dimensional specimen is called the height of the three-dimensional specimen, the horizontal direction of the three-dimensional specimen is called the length, When the longitudinal direction of the specimen is referred to as the width, the predetermined energy spectrum is parallel to the coordinate axis defining the width of the three-dimensional specimen with respect to the coordinate axis defining the height of the three-dimensional specimen in the virtual three-dimensional coordinates. When the ion beam is incident in advance to face the lower end of the three-dimensional specimen, the higher the height of the three-dimensional specimen may be characterized in that the detection intensity of the scattered ion beam is greater.

In addition, when the three-dimensional specimen is a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower to the upper end of the three-dimensional specimen is called the height of the three-dimensional specimen, the horizontal direction of the three-dimensional specimen is called the length, When the longitudinal direction of a three-dimensional specimen is referred to as a width, the predetermined energy spectrum is parallel to a coordinate axis defining a width of the three-dimensional specimen based on a coordinate axis defining a height of the three-dimensional specimen in the virtual three-dimensional coordinates. When the ion beam is incident in advance so as to face the lower end of the three-dimensional specimen, the smaller the width of the three-dimensional specimen may be characterized in that the energy of the scattered ion beam is larger.

Further, when the three-dimensional specimen is a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower end to the upper end of the three-dimensional specimen is called the height of the three-dimensional specimen, the horizontal direction of the three-dimensional specimen is called the length, The longitudinal direction of the specimen is referred to as width, and when the three-dimensional specimen units are arranged along the width direction when the three-dimensional specimen is composed of a plurality of three-dimensional specimen units, the predetermined energy spectrum is the virtual three-dimensional coordinates. In the case of checking in advance when the ion beam is incident to the lower end of the three-dimensional specimen in parallel to the coordinate axis defining the width of the three-dimensional specimen relative to the coordinate axis defining the height of the three-dimensional specimen, the interval between the three-dimensional specimen unit is The larger the detection intensity of the scattered ion beam may be characterized.

According to the method for analyzing three-dimensional specimens according to the present invention, the component constituting the three-dimensional specimen can be measured by checking the energy spectrum generated when the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen, and from this, Three-dimensional specimens can be analyzed.

1 is a flow chart showing an embodiment of a method for analyzing three-dimensional specimens according to the present invention.

FIG. 2 is a flowchart illustrating an example of the shape definition step S300 in the flowchart of FIG. 1.

3 is a perspective view briefly illustrating an example (a radially unfolded structure based on one point) of a three-dimensional specimen analyzed through one embodiment of a method for analyzing a three-dimensional specimen according to the present invention.

4 is an energy spectrum previously identified in relation to a shape definition step when applying an embodiment of the method for analyzing a three-dimensional specimen according to the present invention with respect to the example of the three-dimensional specimen shown in FIG. 3.

5 and 6 are energy spectra identified in relation to the component analysis process when applying an embodiment of the method for analyzing a three-dimensional specimen according to the present invention with respect to the example of the three-dimensional specimen shown in FIG.

7 is a perspective view briefly showing an example (polyhedral structure in which a thin film is formed on the surface of a three-dimensional specimen) of another three-dimensional specimen analyzed through one embodiment of a method for analyzing a three-dimensional specimen according to the present invention.

FIG. 8 is a perspective view illustrating an orthogonal coordinate axis together with an example of the three-dimensional specimen illustrated in FIG. 7 to define a direction in which an ion beam is incident in an embodiment of a method of analyzing a three-dimensional specimen according to the present invention.

9 to 11 are energy spectra identified in relation to the shape definition step when applying an embodiment of the method for analyzing a three-dimensional specimen according to the present invention with respect to the example of the three-dimensional specimen shown in FIG.

12 to 22 are energy spectra identified in relation to the component analysis process when applying an embodiment of the method of analyzing the three-dimensional specimen according to the present invention with respect to the example of the three-dimensional specimen shown in FIG.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, in describing the present invention, descriptions of already known functions or configurations will be omitted to clarify the gist of the present invention. In addition, in describing the embodiments of the present invention, terms premised on directionality such as horizontal, vertical, upper, and lower sides are described to facilitate understanding of the present invention by those skilled in the art, and do not limit the scope of the present invention. Of course.

First, the configuration of an embodiment of a method for analyzing three-dimensional specimens according to the present invention will be described in detail with reference to FIGS. 1 to 22. 1 to 22 are the same as those described in the above [Brief Description of Drawings].

As shown in Figure 1 and 2, one embodiment of the method for analyzing three-dimensional specimens according to the present invention comprises a component measuring step (S200), in some cases, the shape definition step (S300) further It can be configured to include.

At this time, whether or not the shape defining step (S300) needs to proceed may vary depending on the result of the shape checking step (S100) for confirming that the shape of the three-dimensional specimen is defined, and the shape definition step (S300) will be described. This will be described in more detail before.

In one embodiment of the method for analyzing a three-dimensional specimen according to the present invention, the component measurement step (S200), by confirming the energy spectrum for the scattered ion beam as it collides with the three-dimensional specimen when the ion beam is incident on the three-dimensional specimen, It is a step of measuring the components constituting.

At this time, regardless of whether the component of the portion corresponding to the core (core) of the components constituting the three-dimensional specimen or the component of the portion corresponding to the surface (surface) is measured, the factor (factor) to be measured is also the component concentration, Of course, it can be varied, such as thickness, it is natural that the scope of rights is not limited. However, an embodiment of the method for analyzing three-dimensional specimens according to the present invention is most likely to be used to measure at least any one of the component concentration or the thickness of the portion formed on the wafer surface in the semiconductor, In the following will be described in detail with respect to the present invention.

As described above, the component measurement step (S200) of measuring the components constituting the three-dimensional specimen (particularly, at least one of the component concentration or the thickness) is performed when the ion beam is incident on the three-dimensional specimen. If the spectrum can be determined by measuring the components constituting the three-dimensional specimen, it may be measured by any process. However, for example, for more detailed description, as shown in FIG. 1, the component measurement step S200 includes an ion beam incidence process S210, a spectral verification process S220, and a component analysis process S230. It may be configured, and in some cases may further comprise a data storage process (S240).

Here, the ion beam incident process (S210) is a process of injecting the ion beam into the three-dimensional specimen, it is advantageous to inject the ion beam so that it is easy to check the energy spectrum for the scattered ion beam. Therefore, it is natural that the ion beam incident process S210 may vary the type of incident ion beam and the incident direction (incidence angle) according to the type and shape of the three-dimensional specimen.

On the other hand, the spectrum confirmation process (S220) is a process of confirming the energy spectrum for the scattered ion beam when the ion beam incident through the ion beam incident process (S210) collided with the three-dimensional specimen to be scattered.

At this time, the type of the energy spectrum may be varied without limitation, but it is advantageous to check the energy (energy) and intensity (intensity) for the scattered ion beam in the component analysis process (S230) to be described later. will be. This means that when the component is analyzed in comparison with the previously confirmed energy spectrum in the component analysis process (S230), the same as the type of the previously confirmed energy spectrum increases the convenience of the analysis process. This is because it is often presented to confirm the energy and intensity of the scattered ion beam as shown in FIGS. 5, 6 and 12 to 22.

On the other hand, the component analysis process (S230) is a process of measuring at least one of the concentration or thickness of the component of the three-dimensional specimen from the energy spectrum confirmed through the spectrum confirmation process (S220), this process also through the spectrum confirmation process (S220) As long as at least one of the component concentration or the thickness of the three-dimensional specimen can be measured from the identified energy spectrum, it may proceed in any way.

However, the method of measuring at least one of the component concentration or thickness of the three-dimensional specimen by comparing the energy spectrum confirmed through the spectrum confirmation process (S220) and the energy spectrum previously confirmed according to the component concentration or thickness of the three-dimensional specimen It's a way to save time and money.

At this time, the predetermined energy spectrum may be an energy spectrum previously confirmed by pre-simulation through software, or may be an energy spectrum stored through a data storage process S240 which will be described later while the component measuring step S200 is performed. That is, the previously confirmed energy spectrum will be said to include all the energy spectra acquired in advance so as to be compared with the energy spectrum confirmed through the spectral check process (S220) in the component analysis process (S230).

In addition, it is natural that the predetermined energy spectrum may vary depending on the structure and shape of the three-dimensional specimen. However, examples of the three-dimensional specimens shown in FIGS. 3 and 7 will be described as an example for a more detailed description of the present invention.

Here, one example of the three-dimensional specimen shown in FIG. 3 is a radially unfolded structure based on one point, and one example of the three-dimensional specimen shown in FIG. 7 is a polyhedral structure in which a thin film is formed on the surface of the three-dimensional specimen. In particular, one example of the three-dimensional specimen shown in Figure 7 will be referred to as a form similar to the Fin-FET (Field Effect Transistor) that is in the spotlight as a technology for maximizing low power.

The previously confirmed energy spectrum of the example of the three-dimensional specimen is as shown in Figures 5, 6, 12 to 22, and will be identified below for each of the predetermined energy spectrum. However, at this time, the numerical values described in the respective drawings are relative and do not affect the scope of rights.

First, with reference to FIGS. 5 and 6, the energy spectra shown in FIGS. 5 and 6 are confirmed energy spectra associated with an example of the three-dimensional specimen shown in FIG. 3. That is, the predetermined energy spectrum as shown in FIG. 5 is an energy spectrum previously identified for a three-dimensional specimen formed in a radially unfolded structure based on one point (c), and is an outer region of a part spaced apart from one point (c). (Cshell) As the thickness d2 is larger, the energy spectrum of the scattered ion beam is smaller.

In addition, the predetermined energy spectrum as shown in FIG. 6 is also an energy spectrum previously confirmed for a three-dimensional specimen formed in a radially unfolded structure based on one point (c), and an inner region of a portion spaced apart from one point (c). Consisting of PbS The higher the concentration of the component, the higher the energy intensity of the scattered ion beam.

On the other hand, in the above-described predetermined energy spectrum, the outer region and the inner region are relative, and the region farther from the one point (c) based on the part spaced from the one point (c) of the three-dimensional specimen will be referred to as the outer region, The zone close to one point (c) will be referred to as the inner zone. That is, in the example of the three-dimensional specimen shown in FIG. 3, the boundary surface of the zone composed of Cshell and PbS will be referred to as a part spaced apart from one point (c). In the case of three or more different layers, the parts spaced at one point (c) may be variously designated as the boundary of each layer, and accordingly, the outer and inner zones will be relatively determined. It will be appreciated that the present invention is not limited thereto. Next, with reference to FIGS. 12 to 22, the energy spectra shown in FIGS. 12 to 22 are confirmed energy spectra associated with an example of the three-dimensional specimen shown in FIG. 7.

That is, FIGS. 12 to 22 are energy spectra previously confirmed with respect to a three-dimensional specimen of a polyhedral structure having a thin film formed on its surface, and at least one value of a component concentration or thickness of the thin film formed on the three-dimensional specimen is fixed and the other value is fixed. While varying, the energy spectra previously identified for each of the top (t), bottom (b), and side (s) of the three-dimensional specimen.

At this time, since the three-dimensional specimen is formed of a polyhedral structure, unlike the three-dimensional specimen formed in a radially unfolded structure based on one point (c), the energy spectrum may be differently determined according to the angle at which the ion beam is incident. The angle of incidence will also be an important factor in explaining the known energy spectrum.

Therefore, with reference to FIG. 8 shown in advance to explain the shape defining step (S300), the angle at which the ion beam is incident is first defined as follows. As shown in FIG. 8, when the three-dimensional specimen is placed in the virtual three-dimensional coordinates, an angle at which the ion beam is incident on the three-dimensional coordinates may be defined in three directions, but one direction is a direction in which the three-dimensional specimen is placed. Are defined as angles in two directions.

One is the direction toward the lower end (b) of the three-dimensional specimen (in FIG. 8, the x-axis direction) with respect to the coordinate axis (corresponding to the z-axis in FIG. 8) defining the height from the lower end (b) to the upper end (t) of the three-dimensional specimen. Can be defined as a polar angle to the side, and the other is a φ angle towards the direction in which the ion beam is incident between two coordinate axes (x-axis, y-axis) perpendicular to the coordinate axis defining the height of the three-dimensional specimen. It can be defined as (azimuth angle).

Assuming the angles of the two directions defined as described above, the energy spectra shown in Figs. 12 to 22 are explained in order as follows. 12 to 14, the predetermined energy spectrum, when the angle of θ is 45 degrees, the angle of φ is 90 degrees, the thickness of the thin film is fixed with respect to the three-dimensional specimen of the polyhedral structure with a thin film formed on the surface It is an energy spectrum that is confirmed in advance while changing the component concentration, and the higher the component concentration of the thin film, the higher the energy intensity can be confirmed that the detection intensity of the scattered ion beam.

More specifically, FIG. 12 confirms in advance that the detection intensity of the scattered ion beam increases as the thin film component concentration at the top of the three-dimensional specimen is increased, and FIG. 13 is the scattering as the thin film component concentration at the bottom of the three-dimensional specimen is increased. It is confirmed in advance that the detection intensity of the ion beam is increased, and FIG. 14 confirms in advance that the detection intensity of the scattered ion beam is increased as the thin film component concentration of the three-dimensional specimen side (s) is increased.

On the other hand, the predetermined energy spectrum as shown in Figs. 15 to 17, when the θ angle is 25 degrees, the φ angle is 0 degrees, the thickness of the thin film is fixed to the three-dimensional specimen of the polyhedral structure with a thin film formed on the surface It is an energy spectrum which is confirmed beforehand by changing the component concentration, and it is an energy spectrum which can confirm that the detection intensity of the scattered ion beam increases as the component concentration of a thin film is high.

More specifically, FIG. 15 confirms in advance that the detection intensity of the scattered ion beam increases as the thin film component concentration at the top of the three-dimensional specimen t is increased, and FIG. 16 is the scattering as the thin film component concentration at the bottom of the three-dimensional specimen b is increased. It is confirmed in advance that the detection intensity of the ion beam is increased, and FIG. 17 confirms in advance that the detection intensity of the scattered ion beam is increased as the thin film component concentration of the three-dimensional specimen side (s) is increased.

12 to 17, the energy spectra of the polyhedral specimens having a thin film formed on the surface of the polyhedral structure were previously confirmed by fixing the thickness of the thin film and changing the concentration of components. At this time, it will be appreciated that the higher the concentration of the component, the higher the detection intensity of the scattered ion beam.

In addition, when the φ angle is different from each other, that is, when the contents related to FIGS. 12 to 14 and the contents related to FIGS. 15 to 17 are compared and arranged, when the angle φ is 90 degrees, the upper end t of the three-dimensional specimen is t. It can be seen that the energy of the ion beam scattered in the order of the side (s) and the bottom (b) is large, but when the angle of φ is 0 degrees, the energy of the scattered ion beam is the top (t) and It can be seen that the energy of the ion beam scattered at the bottom (b) is large.

On the other hand, the predetermined energy spectrum as shown in Fig. 18, for the three-dimensional specimen of the polyhedron structure in which a thin film is formed on the surface under the same conditions as in Figs. As the energy spectrum confirmed in advance, the energy of the ion beam scattered from the three-dimensional specimen side (s) is an energy spectrum that can be confirmed to decrease toward the lower side (s3) of the side surface of the three-dimensional specimen (s1).

On the other hand, the predetermined energy spectrum as shown in Figs. 19 and 20, when the θ angle is 45 degrees, the φ angle is 90 degrees, the component concentration of the thin film with respect to the three-dimensional specimen of the polyhedral structure with a thin film formed on the surface An energy spectrum that has been fixed and fixed in advance by changing the thickness. The energy spectrum that can be confirmed that the greater the thickness of the thin film at the top (t) and the bottom (b) of the three-dimensional specimen, the greater the change in energy compared to the detection intensity of the scattered ion beam. to be.

In this case, the large amount of energy change relative to the detection intensity of the scattered ion beam means that the width of the energy spectrum is larger on the axis representing the magnitude of energy in FIGS. 19 and 20. More specifically, FIG. 19 confirms in advance that the thicker the thickness of the thin film at the top t of the three-dimensional specimen, the greater the width of the energy spectrum is on the axis representing the energy size of the scattered ion beam. As the thickness of the thin film in b) increases, the width of the energy spectrum increases in advance on the axis representing the energy size of the scattered ion beam.

On the other hand, the predetermined energy spectrum as shown in Figure 21, when the θ angle is 65 degrees, the φ angle is 90 degrees, the component concentration of the thin film is fixed with respect to the three-dimensional specimen of the polyhedral structure with a thin film formed on the surface It is an energy spectrum which is confirmed beforehand by changing thickness, and it is an energy spectrum which can confirm that the change of energy with respect to the detection intensity of the scattered ion beam is large, so that the thickness of the thin film in the side surface s of a three-dimensional specimen is thickened. That is, similar to FIGS. 21 and 19 and 20, it can be confirmed in advance that the width of the energy spectrum is increased on the axis representing the energy magnitude, and from this, the ion beam scattered as the thickness of the thin film on the side surface s of the three-dimensional specimen is thickened. It is confirmed that the amount of change in energy compared to the detection intensity is large.

Meanwhile, in FIG. 21, the thinner the thin film thickness on the side surface s of the three-dimensional specimen, the energy spectrum of the ion beam and the ion beam scattered on the side surface s of the three-dimensional specimen pass through the side surface s of the three-dimensional specimen. It is further confirmed that the energy spectrum of the ion beam scattered from the other side (s') of the three-dimensional specimen is divided.

This can be more clearly seen with reference to FIG. 22, which is an energy spectrum in which the thickness of the thin film on the side surface s of the three-dimensional specimen is 4 times different and the scale of each axis is smaller. In this case, in addition to making the thickness of the thin film four times different, the composition concentration of the thin film is also four times different, but it is natural that the scope of rights is not limited by this. With reference to FIG. In the case of the energy spectrum indicated by the dotted line, it can be seen that the energy spectrum is divided from the energy spectrum indicated by the solid line. In the vicinity of 84 keV, the detection intensity is largely scattered from the side (s) of the three-dimensional specimen. The energy spectrum of the ion beam, where the detection intensity is large near 82 keV, is the energy spectrum of the ion beam scattered from the other side (s') of the three-dimensional specimen.

The previously confirmed energy spectrum related to the example of the three-dimensional specimen illustrated in FIG. 7 as described above with reference to FIGS. 12 to 22 may be adjusted to the conditions at the time of confirming the energy spectrum as described above. Although some may vary according to the present invention, it is natural that those skilled in the art can easily substitute or change, and therefore, all of them are included in the scope of the present invention.

On the other hand, in addition to the ion beam incident process (S210), spectrum confirmation process (S220), component analysis process (S230) in the component measurement step (S200), the data storage process (S240), which may be further included in some cases, is a spectrum confirmation process. The process of storing the energy spectrum to be confirmed while proceeding (S220).

However, the present invention is not limited to storing the identified energy spectrum as the previously confirmed energy spectrum while the spectrum checking process S220 is performed, and the whole process of the component measuring step S200 may be stored, and the medium to be stored is not limited. It can be varied without.

As described above, the component measuring step S200 may be performed immediately according to the result of the shape checking step S100 as described above, but may be performed after the shape defining step S300 is performed. That is, when it is confirmed that the shape of the three-dimensional specimen is defined in advance through the shape checking step (S100), the components constituting the three-dimensional specimen can be measured immediately corresponding to the defined shape, but the three-dimensional through the shape checking step (S100). If it is confirmed that the shape of the specimen is not defined in advance, the shape must be defined through the shape definition step (S300) so that the components constituting the three-dimensional specimen can be measured correspondingly.

At this time, the shape confirmation step (S100) may be any process as long as it confirms that the shape of the three-dimensional specimen is defined in advance, it is natural that the scope of rights is not limited thereby. As an example, if the information on the shape of the three-dimensional specimen stored in advance through the data storage process (S350) of the shape definition step (S300) to be described later will be seen that the shape of the three-dimensional specimen is defined in advance.

On the other hand, if it is confirmed in the shape confirmation step (S100) that the shape of the three-dimensional specimen is not defined in advance, the shape definition step (S300) proceeds, wherein the shape definition step (S300) is three-dimensional before the component measurement step (S200) If the shape of the specimen can be defined, it will be said that all including the process belongs to the scope of the present invention.

However, for example, the shape definition step S300 includes a process of defining a shape of a three-dimensional specimen by checking an energy spectrum generated when an ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen. can do. More specifically, the shape definition step S300 may include a coordinate arrangement process S310, an ion beam incident process S320, a spectrum verification process S330, and a shape definition process S340. May be configured to further include a data storage process (S350). Here, the coordinate arrangement process (S310) is a process of placing the three-dimensional specimen in the virtual three-dimensional coordinates, which is to present a criterion for defining the shape of the three-dimensional specimen.

At this time, the coordinate arrangement process (S310) is not limited at all, such as the type and scale of the virtual three-dimensional coordinates, because only need to present a reference when the shape of the three-dimensional specimen is defined through the shape definition process (S340) to be described later Of course. For example, the polar coordinate system may be used in the example of the three-dimensional specimen shown in FIG. 3, and the rectangular coordinate system may be used in the example of the three-dimensional specimen illustrated in FIG. 7.

On the other hand, the ion beam incident process (S320), the spectrum confirmation process (S330), the shape definition process (S340), the data storage process (S350) is the ion beam incident process (S210), the spectrum check described in the above-described component measurement step (S200) The process (S220), shape definition process (S230), data storage process (S240) will be similar. That is, the ion beam incident process (S320) is a process of injecting an ion beam into a three-dimensional specimen, and the spectral identification process (S330) is an ion beam scattered when scattered as the ion beam incident through the ion beam incident process (S320) collides with the three-dimensional specimen. The process of checking the energy spectrum for the shape definition process (S340) is a process of defining the shape of the three-dimensional specimen from the energy spectrum identified through the spectrum confirmation process (S330), the data storage process (S350) is the spectrum confirmation process The process of storing the energy spectrum identified during the operation (S330).

In this case, in the case of the ion beam incident process (S320), as the three-dimensional specimen is already disposed in the virtual three-dimensional coordinates in the coordinate arrangement process (S310), when defining the incident angle of the ion beam, it is defined based on the virtual three-dimensional coordinates described above. It will be more convenient to those skilled in the art.

In addition, in the case of the shape definition process (S340), there may be a number of ways to define the shape of the three-dimensional specimen from the energy spectrum confirmed through the spectrum confirmation process (S330), it is natural that the scope of rights is not limited by this. However, similar to the component measurement process (S230), if using a method of comparing with each other using a predetermined energy spectrum, it will be more convenient to those skilled in the art because it uses a similar method. That is, through the shape definition process (S340), by comparing the energy spectrum identified according to the shape of the three-dimensional specimen and the energy spectrum confirmed through the spectrum identification process (S330), the height, length, width or three-dimensional specimen of the three-dimensional specimen When composed of a plurality of three-dimensional specimen unit will be able to define at least one of the spacing between the three-dimensional specimen unit.

However, it is obvious that there is a difference from the above-described component measurement process (S230) in the previously confirmed energy spectrum, and as described above, an example of the three-dimensional specimen shown in FIGS. 3 and 7 for the detailed description of the present invention. This will be described as an example.

First, referring to the three-dimensional specimen of the radially unfolded structure based on one point (c) as shown in FIG. 3, there may be a predetermined energy spectrum as shown in FIG. 4. That is, the predetermined energy spectrum shown in FIG. 4 has a larger energy change amount of the ion beam scattered in the inner region as the thickness d1 of the inner region in the portion spaced from one point (c) of the three-dimensional specimen is larger, The thicker the thickness d2 of the outer zone in the spaced apart portion at one point (c) of the specimen, the smaller the energy spectrum of the ion beam scattered in the inner zone.

Subsequently, when a three-dimensional specimen having a polyhedral structure in which a thin film is formed on a surface of the three-dimensional specimen as illustrated in FIG. 7 is described as an example, there may be a predetermined energy spectrum as illustrated in FIGS. 9 to 11. In this case, before explaining the predetermined energy spectrum as shown in FIGS. 9 to 11, the three-dimensional specimen illustrated in FIG. 7 defines and describes the shape of the three-dimensional specimen in any direction unlike the three-dimensional specimen illustrated in FIG. 3. Since it may vary depending on whether or not, the three-dimensional specimen shown in FIG. 7 will be described first based on FIG. 8.

As shown in FIG. 8, when the three-dimensional specimen illustrated in FIG. 7, which is formed in a polyhedral structure having a thin film formed on the surface thereof, is placed in a rectangular coordinate system, the three-dimensional specimen may be steered from the lower end (b) to the upper end (t) in the z-axis direction. The height of the specimen (h), the longitudinal direction of the three-dimensional specimen in the y-axis direction can be referred to as the width (l), the horizontal direction of the three-dimensional specimen in the x-axis direction can be referred to as the length (not shown). It may be referred to as the interval (w) between each of the plurality of three-dimensional specimen units arranged in the longitudinal direction.

With respect to the three-dimensional specimen shown in FIG. 7, the predetermined energy spectrum shown in FIG. 9 defines the width l of the three-dimensional specimen based on the coordinate axis (z-axis) that defines the height h of the three-dimensional specimen. This is an energy spectrum previously confirmed when the ion beam is incident toward the lower end (b) of the three-dimensional specimen in parallel to the coordinate axis (y-axis). As the height h of the three-dimensional specimen increases, the detection intensity of the scattered ion beam increases. Energy spectrum.

On the other hand, the predetermined energy spectrum shown in Figure 10 is a three-dimensional parallel to the coordinate axis (y axis) defining the width (l) of the three-dimensional specimen relative to the coordinate axis (z axis) that defines the height (h) of the three-dimensional specimen This is an energy spectrum that is confirmed in advance when the ion beam is incident toward the lower end (b) of the specimen. The smaller the width l of the three-dimensional specimen, the larger the energy spectrum of the scattered ion beam is.

On the other hand, the predetermined energy spectrum shown in Figure 11 is a three-dimensional parallel to the coordinate axis (y axis) defining the width (l) of the three-dimensional specimen relative to the coordinate axis (z axis) that defines the height (h) of the three-dimensional specimen This is an energy spectrum that is confirmed in advance when the ion beam is incident toward the lower end (b) of the specimen. The larger the distance w between the three-dimensional specimen units, the smaller the energy intensity of the scattered ion beam.

As described above, the predetermined energy spectrum may vary depending on the shape of the three-dimensional specimen, but the present invention is not limited thereto, and may vary depending on how and in which direction the ion beam is incident on the three-dimensional specimen. Of course it is not limited.

Next, the operation and the effect of the embodiment of the method for analyzing the three-dimensional specimen according to the present invention configured as described above will be described in detail in time series with reference to FIGS. 1 and 2 again.

One embodiment of the method for analyzing three-dimensional specimens according to the present invention starts from the shape checking step (S100) to check whether the shape of the three-dimensional specimen is defined, the shape of the three-dimensional specimen is defined through the shape checking step (S100) If it is confirmed that the component measurement step (S200) is continued, otherwise, after the shape definition step (S300) proceeds, the component measurement step (S200) proceeds.

At this time, whether the shape of the three-dimensional specimen is defined in the shape checking step (S100) can be checked whether there is data related to the shape of the three-dimensional specimen stored through the data storage process (S350), and through a separate simulation It may also be determined whether data related to the shape of the identified three-dimensional specimen is stored in a separate storage medium.

First, a description will be given on the premise that the shape of the three-dimensional specimen is not defined. Hereinafter, the shape definition step S300 is performed prior to the component measurement step S200, and the shape definition step S300 is a coordinate arrangement process. (S310), the ion beam incident process (S320), the spectrum confirmation process (S330), the shape definition process (S340), the data storage process (S350) can be performed in this order.

That is, first, the three-dimensional specimen is disposed at the virtual three-dimensional coordinates, and then the ion beam is incident on the three-dimensional specimen at an incident angle that may be defined based on the virtual three-dimensional coordinates. When the ion beam is incident as described above, the incident ion beam collides with the three-dimensional specimen and is scattered. In this case, the energy spectrum of the scattered ion beam can be confirmed.

Thereafter, the shape of the three-dimensional specimen is defined from the identified energy spectrum of the scattered ion beam. In this case, the shape of the three-dimensional specimen may be defined by mutual comparison with the previously confirmed energy spectrum. In addition, it is natural that all of the related information may be stored through the data storage process (S350).

Here, the predetermined energy spectrum may be a previously confirmed energy spectrum stored through the data storage process S350, or may be an energy spectrum previously confirmed through a separate simulation, examples of which are illustrated in FIGS. 4 and 9 to 9. As shown in FIG.

On the other hand, after the shape of the three-dimensional specimen is defined through the shape definition step (S300), the component measurement step (S200) is then proceeded. If the component measurement step (S200) can measure the components constituting the three-dimensional specimen by checking the energy spectrum generated when the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen, the process as well as the following series of processes as well as other processes It's okay.

However, in order to explain the present invention in more detail, for example, the component measurement step (S200) is an ion beam incidence process (S210), a spectrum confirmation process (S220), a component analysis process (S230), a data storage process (S240). It may proceed in order.

That is, the component measurement step (S200) may be performed by first injecting an ion beam into a three-dimensional specimen, in which the ion beam may inject two or more ion beams, and the two or more ion beams may have different incidence angles. have. As such, by injecting two or more ion beams having different incidence angles, the component measuring step S200 may be performed more accurately and efficiently.

As such, the ion beam incident through the ion beam incident process (S210) collides with the three-dimensional specimen and is scattered. At this time, the energy spectrum of the scattered ion beam may be confirmed, and at least any one of the component concentration or thickness of the three-dimensional specimen. You will measure one. In this case, at least one of the component concentration or the thickness of the three-dimensional specimen may be measured by comparing the energy spectra determined according to the shape of the three-dimensional specimen, and all information related thereto may be stored through the data storage process (S240). Of course it is. Here, the previously confirmed energy spectrum may be a previously confirmed energy spectrum stored through the data storage process S240, or may be an energy spectrum previously confirmed through a separate simulation, examples of which are illustrated in FIGS. 5, 6 and As shown in FIGS. 12 to 22.

As described above, the present invention for analyzing a three-dimensional specimen by proceeding to a step or a process that has not been presented in the prior art includes a component constituting the three-dimensional specimen by checking an energy spectrum generated when an ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen. Can be analyzed with high resolution.

On the other hand, in one embodiment of the method for analyzing three-dimensional specimens according to the present invention in the order described above in some cases, each step or each process may be performed at the same time or the order may be changed in part, from this right Of course, the scope is not limited. In addition, although specific embodiments of the present invention have been described and illustrated above, the present invention is not limited to the described embodiments, and various modifications and changes may be made without departing from the spirit and scope of the present invention. It is obvious to those who have knowledge. Therefore, such modifications or variations are not to be understood individually from the technical spirit or point of view of the present invention, all will belong to the claims of the present invention.

Claims

And a component measuring step of measuring the components constituting the three-dimensional specimen by identifying an energy spectrum generated when the ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen.
The method of claim 1, wherein the component measuring step measures at least one of component concentration or thickness of the three-dimensional specimen.
The method of claim 2, wherein the measuring component comprises: an ion beam incident process of injecting an ion beam into the three-dimensional specimen; A spectrum checking step of checking an energy spectrum of the scattered ion beam when the ion beam incident through the ion beam incident process is scattered as it collides with the three-dimensional specimen; And a component measurement process of measuring at least one of the component concentration and the thickness of the three-dimensional specimen from the energy spectrum identified through the spectrum identification process.
According to claim 3, The component measurement process, by comparing the energy spectrum identified in accordance with the previously confirmed energy spectrum according to the concentration and thickness of the component of the three-dimensional specimen, the component concentration of the three-dimensional specimen or A method for analyzing three-dimensional specimens, characterized in that at least one of the thickness is measured.
According to claim 4, wherein when the three-dimensional specimen has a radially unfolded structure based on one point, the energy spectrum previously determined according to the thickness of the outer zone and the component concentration of the inner zone in the spaced portion from one point of the three-dimensional specimen By comparing the energy spectrum confirmed through the spectral identification process with each other, at least one of the concentration or the thickness of the component of the three-dimensional specimen is measured, wherein the predetermined energy spectrum is at a portion spaced from one point of the three-dimensional specimen The thicker the outer zone, the smaller the energy of the ion beam scattered in the inner zone.
According to claim 4, wherein when the three-dimensional specimen has a radially unfolded structure based on one point, the energy spectrum previously determined according to the thickness of the outer zone and the component concentration of the inner zone in the spaced portion from one point of the three-dimensional specimen By comparing the energy spectrum confirmed through the spectral identification process with each other, at least one of the concentration or the thickness of the component of the three-dimensional specimen is measured, wherein the predetermined energy spectrum is at a portion spaced from one point of the three-dimensional specimen The higher the concentration of the components in the inner region of the detection intensity (intensity) of the scattered ion beams, characterized in that the method of analyzing three-dimensional specimens.
The method according to claim 4, wherein when the three-dimensional specimen has a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the energy spectrum and the spectrum identification process are determined according to the concentration and thickness of the thin film formed on the three-dimensional specimen. By comparing the energy spectra with each other, at least one of the component concentration or thickness of the thin film formed on the three-dimensional specimen is measured, wherein the predetermined energy spectrum is at least one of the component concentration or thickness of the thin film formed on the three-dimensional specimen. Method of analyzing a three-dimensional specimen, characterized in that the energy spectrum is confirmed in advance for each of the upper, lower, and side surfaces of the three-dimensional specimen while fixing the value while changing another value.
The method according to claim 7, wherein the predetermined energy spectrum is fixed when the thickness of the thin film formed on the three-dimensional specimen is fixed while changing the component concentration, the higher the component concentration, the higher the detection intensity of the scattered ion beam is characterized in that A method of analyzing a three-dimensional specimen.
The method according to claim 7, wherein the predetermined energy spectrum is a direction in which the ion beam is incident on the basis of a coordinate system defining one surface of the three-dimensional specimen while changing the concentration of components while fixing the thickness of the thin film formed on the three-dimensional specimen. When the ion beam is incident in advance at 90 degrees (azimuth angle = 90 °) at an angle toward, the energy of the ion beam scattered in the order of the top, the side, and the bottom of the three-dimensional specimen is large, analyzing the three-dimensional specimen Way.
The method according to claim 7, wherein the predetermined energy spectrum is a direction in which the ion beam is incident on the basis of a coordinate system defining one surface of the three-dimensional specimen while changing the concentration of components while fixing the thickness of the thin film formed on the three-dimensional specimen. When the ion beam is incident in advance at an angle toward 0 ° (azimuth angle = 0 °), the energy of the ion beam scattered from the side of the top and bottom of the three-dimensional specimen is larger than the side, the method of analyzing a three-dimensional specimen .
The method of claim 10, wherein the energy of the ion beam scattered from the side of the three-dimensional specimen is smaller as it goes from the top of the side to the bottom of the side of the three-dimensional specimen.
The method according to claim 7, wherein the predetermined energy spectrum is detected in the ion beam scattered as the thickness of the thin film of the three-dimensional specimen is thicker when the thickness of the thin film of the three-dimensional specimen is confirmed beforehand while fixing the component concentration of the thin film formed on the three-dimensional specimen. Method for analyzing three-dimensional specimens, characterized in that the amount of change in energy relative to the intensity.
The method of claim 12, wherein the thinner the side thin film of the three-dimensional specimen, the energy spectrum of the ion beam scattered from the side of the three-dimensional specimen and the ion beam passes through the side of the three-dimensional specimen and scattered from the other side of the three-dimensional specimen Method for analyzing three-dimensional specimens, characterized in that the energy spectrum of the ion beam is divided.
The method of any one of claims 1 to 13, further comprising a shape definition step of defining the shape of the three-dimensional specimen before the component measuring step.
15. The three-dimensional specimen of claim 14, wherein the shape defining step defines a shape of the three-dimensional specimen by identifying an energy spectrum generated when an ion beam incident on the three-dimensional specimen collides with the three-dimensional specimen. How to analyze.
The method of claim 15, wherein the shape defining step comprises: a coordinate arrangement process of disposing the three-dimensional specimen in virtual three-dimensional coordinates; An ion beam incident process of injecting an ion beam into the three-dimensional specimen at an incident angle that may be defined based on the virtual three-dimensional coordinates; A spectrum checking step of checking an energy spectrum of the scattered ion beam when the ion beam incident through the ion beam incident process is scattered as it collides with the three-dimensional specimen; And a shape definition process for defining the shape of the three-dimensional specimen from the energy spectrum identified through the spectrum identification process.
17. The method of claim 16, wherein the shape definition process, by comparing the energy spectrum identified according to the shape of the three-dimensional specimen and the energy spectrum identified through the spectrum identification process, the height, length, width or When the three-dimensional specimen is composed of a plurality of three-dimensional specimen unit, characterized in that at least any one of the spacing between the three-dimensional specimen unit, a method for analyzing a three-dimensional specimen.
18. The method of claim 17, wherein when the three-dimensional specimen is a radially unfolded structure with respect to one point, the predetermined energy spectrum has a higher thickness of the inner region at a portion spaced from one point of the three-dimensional specimen. Analysis of three-dimensional specimens, characterized in that the amount of change in the energy of the ion beam scattered in the zone, the greater the thickness of the outer zone in the portion spaced from one point of the three-dimensional specimen is smaller the energy of the ion beam scattered in the inner zone How to.
18. The method of claim 17, wherein when the three-dimensional specimen has a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower end to the upper end of the three-dimensional specimen is referred to as the height of the three-dimensional specimen, and the horizontal direction of the three-dimensional specimen is referred to as length. When the longitudinal direction of the three-dimensional specimen is referred to as a width, the predetermined energy spectrum defines a width of the three-dimensional specimen based on a coordinate axis defining a height of the three-dimensional specimen in the virtual three-dimensional coordinates. When the ion beam is previously confirmed when the ion beam is incident to the lower end of the three-dimensional specimen parallel to the coordinate axis, the higher the height of the three-dimensional specimen, characterized in that the detection intensity of the scattered ion beam is larger, the method of analyzing a three-dimensional specimen.
18. The method of claim 17, wherein when the three-dimensional specimen has a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower end to the upper end of the three-dimensional specimen is referred to as the height of the three-dimensional specimen, and the horizontal direction of the three-dimensional specimen is referred to as length. When the longitudinal direction of the three-dimensional specimen is referred to as a width, the predetermined energy spectrum defines a width of the three-dimensional specimen based on a coordinate axis defining a height of the three-dimensional specimen in the virtual three-dimensional coordinate. When the ion beam is confirmed in advance when the ion beam is incident in parallel to the lower surface of the three-dimensional specimen, the smaller the width of the three-dimensional specimen, characterized in that the energy of the scattered ion beam is larger, the method of analyzing a three-dimensional specimen.
18. The method of claim 17, wherein when the three-dimensional specimen has a polyhedral structure with a thin film formed on the surface of the three-dimensional specimen, the lower end to the upper end of the three-dimensional specimen is referred to as the height of the three-dimensional specimen, and the horizontal direction of the three-dimensional specimen is referred to as length. The longitudinal direction of the three-dimensional specimen is referred to as a width, and when the three-dimensional specimen units are arranged along the width direction when the three-dimensional specimen is composed of a plurality of three-dimensional specimen units, the predetermined energy spectrum is determined by the virtual image. The three-dimensional specimen unit in advance when the ion beam is incident to the lower end of the three-dimensional specimen in parallel to the coordinate axis defining the width of the three-dimensional specimen in the three-dimensional coordinates to define the height of the three-dimensional specimen, The detection intensity of the scattered ion beam is smaller as the distance between the larger, method of analyzing a three-dimensional specimen.