WO2017034138A1

WO2017034138A1 - Apparatus for manufacturing graphene film

Info

Publication number: WO2017034138A1
Application number: PCT/KR2016/006733
Authority: WO
Inventors: 김용기
Original assignee: 주식회사 참트론
Priority date: 2015-08-27
Filing date: 2016-06-24
Publication date: 2017-03-02

Abstract

The present invention relates to an apparatus for manufacturing a graphene film and, more particularly, to an apparatus for manufacturing a graphene film which deposits graphene while transferring a catalytic metal film in a roll-to-roll manner, comprising: an upper roll chamber for supplying a catalytic metal film rolled onto an unloading bobbin to a deposition chamber; a deposition chamber connected to the upper roll chamber to deposit graphene on the catalytic metal film; a lower roll chamber connected to the deposition chamber to roll the graphene-deposited catalytic metal film onto a loading bobbin; and a frame to which each of the chambers are fixed.

Description

Graphene Film Manufacturing Equipment

The present invention relates to a graphene film manufacturing apparatus, and more particularly, to maintain a constant tension in the manufacturing process of the graphene film to protect the graphene film, and to more effectively deposit graphene on the catalytic metal film, It relates to a graphene film manufacturing apparatus that is easy to cool the pin deposited film.

In general, graphene is a material in which carbon is connected to each other in a hexagonal shape to form a honeycomb two-dimensional planar structure, and its thickness is very thin and transparent, and has great electrical conductivity. Attempts have been made to apply graphene to transparent displays or flexible displays using these features.

Conventional graphene film production method is described in Korean Patent Publication No. 10-2012-0111659 (film manufacturing method including graphene, published October 10, 2012).

In the above published patent, the transfer film is formed on one surface of the catalyst metal film on which graphene is formed while transferring the catalyst metal film in one direction in a roll-to-roll method for mass production. It is described with respect to the step of forming, and the mechanical configuration required for each step has been described.

Specifically, a winding roller and a winding roller for winding and transporting a catalyst metal film, and a graphene formation space for supplying a carbon supply gas to the catalyst metal film and depositing graphene, are described.

However, graphene is manufactured by chemical vapor deposition (CVD), thermochemical vapor deposition (TCVD), rapid thermal chemical vapor deposition (RTCVD), and the like, and the catalytic metal film passes through the graphene forming space and continuously produces graphene. In order to be possible, the vacuum state of the graphene formation space must be maintained, which is not mentioned in the above-mentioned patent configuration.

When such a device is used, it is difficult to form graphene formed by vapor deposition, and it is possible to sufficiently predict a problem that a process defect occurs due to inflow of foreign matter. In addition, there is a possibility that damage occurs to the graphene deposited on the catalytic metal film in the deposition chamber because the deposition chamber is horizontal.

The problem to be solved by the present invention in view of the above problems, in the manufacturing apparatus for producing a graphene film in a roll-to-roll method, the movement of air or gas between the deposition chamber and the surrounding chamber for depositing graphene By minimizing, it is possible to maintain the vacuum state of each chamber, to provide a graphene film manufacturing apparatus that can prevent the foreign material from entering.

In addition, another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus is attached to the protective film to prevent damage to the graphene deposited and to protect the graphene.

In addition, another object of the present invention is to provide a graphene film manufacturing apparatus capable of dispersing the force acting between each chamber.

In addition, another object of the present invention is to provide a graphene film production apparatus that can lower the temperature of the film in the process of discharging the film is deposited graphene.

In addition, another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus that can prevent the phenomenon that the catalytic metal film on which graphene is deposited sag by its own weight.

In addition, another problem to be solved by the present invention is to provide a graphene film manufacturing apparatus for allowing the catalytic metal film to be wound while maintaining a constant tension.

In addition, another problem to be solved by the present invention, by using the heat supplied to the deposition chamber efficiently graphene film production apparatus that can increase the deposition efficiency of the graphene and prevent the damage of the deposited graphene In providing.

In order to achieve the above object, the present invention is a graphene film manufacturing apparatus for depositing graphene while transferring the catalytic metal film in a roll-to-roll method, the catalyst metal film rolled on the unloading bobbin An upper roll chamber for supplying to the deposition chamber; A deposition chamber connected to the upper roll chamber and having graphene deposited on the catalyst metal film; A lower roll chamber connected to the deposition chamber, in which a catalytic metal film on which graphene is deposited is rolled on a loading bobbin; And a frame in which each chamber is fixed to each other.

The upper roll chamber in the present invention, the upper roll chamber body; An unloading bobbin seated on a rotating roller mounted inside the upper roll chamber body to unload a catalyst metal film; A first guide roller positioned in front of the unloading bobbin and configured to guide the catalytic metal film supplied from the unloading bobbin; A feed roller positioned in front of the first guide roller and configured to supply the catalyst metal film supplied from the first guide roller to the deposition chamber while maintaining a constant tension; And a vacuum pump mounted on an outer side of the upper roll chamber body to maintain a degree of vacuum inside the upper roll chamber body. The feed roller is composed of a driving roller driven by a motor, and an adhesion roller for engaging the driving roller and giving a constant tension to the catalytic metal film. The driving roller cools the catalyst metal film by introducing and discharging the coolant into the roller, and the contact roller may be in close contact with the driving roller by a constant elastic force to give a constant tension to the catalyst metal film.

Deposition chamber of the present invention, the deposition chamber body connected to the upper roll chamber in the lower portion of the upper roll chamber; A heater unit mounted inside the deposition chamber body and configured to deposit graphene on the catalyst metal film in front and rear of the catalyst metal film supplied from the upper roll chamber; A shield plate mounted inside the deposition chamber to prevent heat generated from the heater part from being transferred to the chamber body; A process gas supply pipe mounted to an outside of the deposition chamber body and configured to inject a process gas into the deposition chamber body; A process gas exhaust pipe mounted to an outside of the deposition chamber body and configured to discharge the process gas from the inside of the deposition chamber body; And a vacuum pump mounted on an outside of the deposition chamber body to maintain a degree of vacuum inside the chamber body.

In the present invention, the heater portion of the deposition chamber may be formed of a zigzag heating plate and disposed on the front and rear surfaces of the catalytic metal film, or may be formed of a surface heating plate and disposed on the front and rear surfaces of the catalytic metal film. The heating plate may be formed of tungsten, graphite, silicon carbide or carbon nanotubes.

In the present invention, the shield plate may be formed by overlapping the metal plate, it may be composed of a molybdenum plate adjacent to the catalytic metal film, and at least one stainless plate laminated at a predetermined interval from the rear surface of the molybdenum plate. The outermost plate formed of the stainless plate may be formed by bending the edge of the plate to the inside or the outside.

In the present invention, the door is formed in front or rear of the deposition chamber body, it is possible to maintain the inside of the deposition chamber body. In addition, a shield plate is formed inside the door. The shield plate is composed of a molybdenum plate adjacent to the catalytic metal film and at least one stainless plate laminated at a predetermined interval from the rear surface of the molybdenum plate.

The deposition chamber body of the present invention is vertically connected to the upper roll chamber and the lower roll chamber, and the catalytic metal film is moved from the top to the bottom of the deposition chamber body to deposit graphene.

The lower roll chamber in the present invention, the lower roll chamber body connected to the deposition chamber at the bottom of the deposition chamber; A second guide roller mounted inside the lower roll chamber body to change a direction of the catalytic metal film supplied from the deposition chamber; A third guide roller mounted below the second guide roller to prevent a sharp angle change by the second guide roller; A protective film bobbin mounted on one side of the third guide roller and having a protective film wound around the graphene deposited on the catalytic metal film; A first film attachment roller and a second film attachment roller for attaching the protective film to the catalytic metal film on which the graphene is deposited; And a winding bobbin on which the catalytic metal film on which the graphene is deposited is wound, and a winding roller for winding the catalytic metal film on the loading bobbin with a constant tension.

In the second guide roller of the present invention, cooling water is introduced into and discharged from the inside of the roller to cool the catalytic metal film.

The winding roller of the present invention is mounted on the drive shaft of the drive motor and is driven, characterized in that it is a tension holding roller that does not rotate even when the drive motor is operated above a certain tension.

In the present invention, any one side of the upper roll chamber and the lower roll chamber is characterized in that the door is mounted.

In the present invention, the upper roll chamber or the lower roll chamber is characterized in that it is mounted to be elastically supported on the frame.

The present invention can maintain the degree of vacuum in each chamber to prevent the movement of air flow between each chamber can improve the process stability, there is an effect that can ensure the reliability of graphene manufacturing.

In addition, the present invention by maintaining a constant tension, has the effect of preventing damage to the catalytic metal film deposited graphene.

In addition, the present invention is because each chamber is supported by an elastic member, it is possible to minimize the load acting on each other, and has the effect of preventing the deformation or damage of the chamber due to the expansion of the volume due to the thermal change, and the like. .

In addition, the present invention by attaching a protective film on one surface of the deposited graphene film, there is an effect that can prevent the graphene is damaged during storage or transportation of the film.

In addition, the present invention has an effect that can prevent the damage to the graphene by preventing the catalyst metal film from sagging due to its own weight because the chamber is formed upright.

In addition, the present invention has the advantage that the heater portion of the deposition chamber can be formed in a zig-zag-shaped planar heating plate is easy to install and can be installed in close proximity to the catalytic metal film to increase the thermal efficiency.

In addition, since the shield plate is formed in the deposition chamber body, heat is prevented from being radiated to the outside and heat is reflected from the inside, thereby increasing the deposition efficiency of graphene on the catalytic metal film.

In addition, the present invention has the advantage that the maintenance in the chamber body is easy because the door is formed in front or rear of the chamber body.

1 is an overall perspective view of a graphene film manufacturing apparatus according to a preferred embodiment of the present invention.

Figure 2 is a front side perspective view of the upper roll chamber which is a preferred embodiment of the present invention.

3 is a rear side perspective view of FIG. 2;

4 is a side perspective view of FIG. 2;

5 is a perspective view of the fixing support of the upper roll chamber of FIG.

Figure 6 is a perspective view of the door opening of the deposition chamber of a preferred embodiment of the present invention.

Figure 7 is a rear side perspective view of the door of the deposition chamber of Figure 6 opened.

8 is a perspective view of a state in which the door of FIG. 6 is removed.

9 is a front side perspective view of a state in which the door of FIG. 6 is removed.

10 is a front side perspective view of a lower roll chamber which is a preferred embodiment of the present invention.

11 is a perspective view of a state in which the door of the lower roll chamber of FIG. 10 is removed.

12 is a rear side perspective view of FIG. 10;

13 is a perspective view of the fixing support of the lower roll chamber of FIG.

Best Mode for Carrying Out the Invention In the graphene film production apparatus for depositing graphene while transferring a catalytic metal film in a roll-to-roll manner, the catalytic metal rolled on an unloading bobbin An upper roll chamber for supplying a film to the deposition chamber; A deposition chamber connected to the upper roll chamber and having graphene deposited on the catalyst metal film; A lower roll chamber connected to the deposition chamber, in which a catalytic metal film on which graphene is deposited is rolled on a loading bobbin; And a frame in which each of the chambers is fixed.

Hereinafter, the present invention graphene film manufacturing apparatus will be described in detail with reference to the accompanying drawings.

1 is an overall perspective view of a graphene film manufacturing apparatus according to a preferred embodiment of the present invention, Figure 2 is a front side perspective view of the upper roll chamber which is a preferred embodiment of the present invention, Figure 3 is a rear side perspective view of Figure 2, Figure 4 is a side perspective view of Figure 2, Figure 5 is a perspective view of the fixing support of the upper roll chamber of Figure 2, Figure 6 is a perspective view of the door of the deposition chamber of the preferred embodiment of the present invention opened, Figure 7 6 is a rear side perspective view of the door of the deposition chamber of FIG. 6, FIG. 8 is a perspective view of the door of FIG. 6, and FIG. 9 is a front side perspective view of the door of FIG. 6, and FIG. Is a front side perspective view of a lower roll chamber, which is a preferred embodiment of FIG. 11, FIG. 11 is a perspective view of the lower roll chamber of FIG. 10 with the door removed, FIG. 12 is a rear side perspective view of FIG. 10, and FIG. 13 is a lower roll of FIG. 10. On the fixed support of the chamber It is a perspective view.

1 is an overall perspective view of a graphene film manufacturing apparatus according to an embodiment of the present invention. As shown in the drawing, the graphene film manufacturing apparatus 1 includes an upper roll chamber 100 mounted on an upper portion of the frame 10 and a deposition chamber mounted on the frame 10 below the upper roll chamber 100. And a lower roll chamber 300 mounted on the lower frame 10 of the deposition chamber 200. Frame 10 is a box-shaped configuration connected to the channel, each chamber is fixed to each chamber from the top to the bottom.

2 to 5 is a view of the upper roll chamber 100 of the graphene film manufacturing apparatus according to the present invention. As shown in FIG. 2, the upper roll chamber 100 includes a chamber body 101, a rotating roller 113 mounted inside the chamber body 101, and a catalyst metal rotated while being mounted on the rotating roller 113. Unloading bobbin 112 for supplying the film 20, the rotary roller support 114 for supporting the rotation of the rotary roller 113, and the tension to the catalyst metal film 20 in front of the unloading bobbin 112 To supply the first guide roller 115 and the catalyst metal film 20 supplied from the first guide roller 115 to the deposition chamber in front of the first guide roller 115 to give a predetermined tension. It consists of a roller 120. The door 130 is required to maintain the inner configuration of the chamber body 101 and to replace the unloading bobbin 112 on which the catalytic metal film 20 is rolled. In addition, a fixing support 102 for fixing the upper roll chamber 100 to the frame 10 is attached to the outside of the chamber body 101. In addition,

holes

109a and 109b and

service holes

109c and 109d connected to the vacuum pump are provided to maintain the inside of the chamber under vacuum. The supply roller 120 is composed of a driving roller 121 and the contact roller 123. The driving roller 121 is fixedly supported by the driving roller support 122, and the contact roller 123 is installed to push the contact roller 123 toward the driving roller 121 so as to be in close contact with the drive roller 121. . Therefore, the contact roller 123 is fixed on both sides of the roller rotation support 124, both ends of the rotation support 124 is fixed to the axis of rotation 126, the axis of rotation 126 is supported on both sides of the axis of rotation shaft 125 It is fixed to be able to rotate by the rotary shaft 126, the rotary shaft support 125 is fixed to the upper surface of the shaft fixing plate 127 to support the rotary shaft 126. In addition, one side is connected to the shaft fixing plate 127 and the other side is equipped with an elastic member 128 connected to the contact roller rotating support 124, the contact roller 123 by the elastic member 128 drive roller 121 ) To make it more tight. In addition, the partition wall 111 may be installed between the first guide roller 115 and the supply roller 120 to block the supply of heat to some extent. A hole is formed between the dividing walls 111, and the catalyst metal film 20 is supplied to the supply roller 120 through the first guide roller 115.

As shown in FIG. 3, the back side of the upper roll chamber 100 is shown. As shown in the figure, the motor 104 for driving the driving roller 121, the rotating disk 105 connected to the motor 104 and the belt, and the driving roller through the central portion of the rotating disk 105 ( A cooling water supply pipe 106 connected to the inside of the 121 and a driving roller support shaft 107 for supporting the driving roller 121 are provided. The rotating disk 105 is mounted on the driving roller support shaft 107, and the rotating disk 105 is linked with the driving roller 121 to transmit the rotational force of the motor to the driving roller 105. The rotation speed of the motor may be reduced according to the diameter of the rotating disk 105. Cooling water is supplied into the driving roller 121 through the cooling water supply pipe 106, and the cooling water cools the driving roller 121, and the driving roller 121 contacts the driving roller 121 with a catalytic metal film ( 20) to cool. In addition, the rotating roller support shaft 108 is formed on the rear side for supporting and easy replacement of the rotating roller 113 on which the unloading bobbin 112 is mounted.

4 is a view seen from the rear side in the state in which the door is opened. As shown in the figure, one side of the door 130 is fixed to the chamber body 101, the other side is connected to the hinge 134 is fixed to the door 130, the other side of the door 130 is a fastener A formed lock knob 133 is provided to be fixed to the chamber body 101. In addition, the front of the door 130, the sight glass (132a, 132b) is mounted so that the worker can see the inside. Since other configurations are the same as those described above, repeated descriptions will be omitted.

5 shows a view of the fixed support 102. The fixed support 102 is mounted to the frame 10, and the fixed support 102 receives the load of the upper roll chamber 100 as it is. Therefore, the load acting on the fixed support 102 is transferred to the frame as it is, the fixed support 102 is fixed to the frame elastic to be elastically supported in consideration of the torsion caused by the load or deformation due to thermal stress, etc. The member 102-1 is mounted together. In detail, the fixing support 102 has a hole formed in the fixing support so that the bolt 102-2 is mounted. As the bolt 102-2 rotates, the upper roll chamber 100 is connected to the frame 10 by a screw thread. In the spaced apart state, the load is supported by the bolt 102-2 and the spring 102-1, which is an elastic member. In addition, any one of the bolts may be mounted without being threaded to serve as a guide for the spring. The figure shows a pair of bolts and a spring on both sides.

6 to 9 are diagrams of the deposition chamber 200. As shown in FIG. 6, the deposition chamber 200 includes a chamber body 201, a catalyst metal film through hole 202 formed in an upper surface of the chamber body 201, and both sides of the chamber body 201. Shield plates 210a for blocking heat generated by the

doors

220a and 220b and the zigzag heater unit 250 and the heater unit 250 formed inside the chamber body 201. , 210b, 240a, 240b).

7 is a perspective view of the back side of the deposition chamber 200. As shown in the figure, a pair of supply pipes 208a for injecting process gas into the back side of the chamber body 201 and process gas exhaust pipes 208b exhausted after being deposited on the catalytic metal film are provided. Accordingly, a plurality of process gas supply pipes and exhaust pipes may be formed. In the figure, a plurality of process gas supply pipes 208a and exhaust pipes 208b are formed. In addition, a pair of

vacuum exhaust holes

203a and 203b for exhausting the vacuum pump are formed, and a plurality of

service holes

203c, 203d, 203e and 203f are formed. A fixing support 206 for fixing to the frame 10 is mounted at the lower end of the chamber body 201, and the fixing support 206 is fixed to the frame using bolts or the like.

Cooling water flow pipes 204 are formed on the top and bottom and side surfaces of the chamber body 201. By forming the coolant flow pipe 204, the heat is transferred to the outside to prevent damage to the operator, such as burns. The coolant flow pipe 204 is connected to the coolant supply pipe 204a and the discharge pipe 204b.

The

doors

220a and 220b are formed at both sides of the chamber body 201. By forming the doors at both sides, maintenance in the chamber body can be made more smoothly. Looking at the configuration of the door 220a, the door body 221a, the sight glass (224-1a, 224-2a) formed up and down on the door body 221a, and one side is attached to the chamber body 201 and the other The sides of the hinges 225-1a and 225-2a attached to the door body 221a, the locking handle 223a for opening and closing the door body 221a to the chamber body 201, and the locking handle 223a. It consists of the clamps 222-1a and 222-2a formed in the edge part. Said sight glasses 224-1a and 224-2a refer to glass that allows the inside to be viewed from the side. In addition, as shown in FIG. 6, the shield plate 230a is formed inside the door body 221a, and the shield plate 230b is formed on the door 220b on the other side.

8 is a perspective view of a state in which a door is removed from the deposition chamber 200. Looking at the reference numerals that are not described as shown in the drawings, the lifting lug 205 attached to the side of the chamber body 201, and the clamping fasteners 207 to which the clamps 222-1 and 222-2 are fixed. Is further shown. Since other configurations have been described with reference to FIGS. 6 and 7, detailed descriptions thereof will be omitted.

9 is a perspective view seen from the front of the deposition chamber 200. As shown in the drawing, the heater unit 250 includes a heater fixing rod 253 for supplying main power,

power connection units

252a and 252b to which power is connected from the main power supply unit 253, and a power connection unit ( The heater 251 is connected to the 252a and 252b. The heater fixing rod 253 may be formed of stainless or graphite (Graphite) rod. When the heater fixing rod 253 is formed of stainless or graphite, the heater fixing rod 253 should be insulated with silicon (SiC). That is, the insulation should prevent the current flowing to the chamber body 201 through the heater fixing rod 253. The heater 251 is formed on the front and rear surfaces of the catalytic metal film, and is formed up and down by a zig-zag type heating plate. In detail, the heater 251 is configured as a zigzag heating plate having one end connected to the upper power connection part 252a in a plurality of forms and the other end connected to the lower power connection part 252b. The heater 251 may also be formed in the form of a planar heating plate (not shown). That is, the heater 251 may be formed in the form of a planar heating plate to apply heat to the front and rear surfaces of the catalytic metal film 20. The heating plate may be made of tungsten, graphite, graphite, silicon carbide, or carbon nanotubes. The heater unit 250 is formed on both sides of the catalyst metal film 20 so that graphene from the process gas can be easily deposited on the catalyst metal film. The heater 250 heats the inside of the deposition chamber at a temperature of 1000 to 1500 ° C. Preferably, the heater unit 250 heats the catalyst metal film 20 at a temperature of 1000 to 1500 ° C. in proximity to the front and rear surfaces of the catalyst metal film 20.

Shield plates

210a, 210b, 230a, 230b, 240a and 240b are formed on the top, bottom, left, and right sides of the zigzag heater 251 of the heater unit 250. 210b,

door shield plates

230a and 230b formed in the door 220, and upper and lower shield plates 240a and 240b mounted on the upper and lower inner sides of the chamber body 201. Shield plate supports 211a and 211b for supporting the

shield plates

210a and 210b are mounted on the back side of the

shield plates

210a and 210b, and the other side of the shield plate supports 211a and 211b is chamber body 201. It is mounted inside of. The

shield plates

210a, 210b, 230a, 230b, 240a, and 240b are configured in such a manner that a plurality of layers are stacked at predetermined intervals. Specifically, the

shield plates

210a, 210b, 230a, 230b, 240a, and 240b include a molybdenum plate adjacent to the catalytic metal film and one or more stainless plates stacked at predetermined intervals on the rear surface of the molybdenum plate. In addition, the outermost stainless plate can be bent inward or outward to prevent deformation by heat. The chamber body fixing support 206 mounted at the bottom of the chamber body 201 is mounted to the frame, and thus the deposition chamber 200 is fixed to the frame. Instead of the molybdenum plate, it is also possible to use a metal having a high melting point as with molybdenum.

10-13 are views of the lower roll chamber. As shown in FIG. 10, the lower roll chamber 300 includes a chamber body 301, a door 330 formed on the front surface of the chamber body 301, and a lower side formed on both sides of the chamber body 301. The roll chamber fixing support 302, the hinge 334 is connected to the door 330 and the chamber body 301, and the sight glass 305 is formed on the side of the chamber body 301. In addition, the door 330 is composed of a door body 331, the sight glass (332a, 332b) formed in the door body 331, the locking handle 333, the locking handle 333 is the chamber body 301 The lock handle is fixed to the fixing portion 303, the door 330 is opened when the lock is released. In addition, a sight glass 304 may be further formed below the chamber body 301.

11 illustrates a configuration mounted in the chamber body 301. First, the second guide roller 311 for changing the direction of the catalytic metal film 20, the third guide roller 312 for preventing sudden change of direction by the second guide roller 311, and graphene are deposited. Protective film bobbin 321, the protective film for protecting the catalytic metal film is rolled, the protective film bobbin roller 321 for the protective film bobbin 321 is mounted and rotated, the protective film rotary roller 320 And a support film 322 for supporting the rotation thereof, a first film attachment roller 313 and a second film attachment roller 315 for attaching the protective film 30 to the catalyst metal film 20, and a protective film 30. ) And a winding roller 323 for winding the catalyst metal film 20 attached thereto, and a loading bobbin 324 mounted to the winding roller 323. The protective film rotating roller 320 is rotatably supported by the protective film rotating roller support 322, and the winding roller 323 is rotatably supported by the winding roller support 325. In addition, in order to maintain the vacuum in the chamber, vacuum

tube connecting holes

305a and 305b are further formed to be connected to the vacuum pump for evacuating, and the remaining holes 305c and 305d serve as service holes.

12 is a rear side view of the chamber body 301. As shown in the figure, a cooling water supply pipe 307-1 through which the cooling water is supplied is inserted into the rear end of the second guide roller 311 to supply the cooling water to the second guide roller 311. The supplied cooling water cools the catalytic metal film 20. In addition, a second guide roller rotating support 307-2 that rotatably supports the second guide roller 311 to the outside of the cooling water supply pipe 307-1 is mounted outside the chamber body 301. The motor 309-1 formed outside the center of the chamber body 301 drives the first film attachment roller 313, and the motor 309-1 is fixedly supported by the motor support 309-4. In addition, the motor 309-1 is connected to the rotating disk 309-3, which is connected by a belt, and may perform a deceleration function according to the diameter of the rotating disk 309-3. The first film attachment roller 313 is rotated by the rotation of the rotating disk 309-3. In addition, the take-up roller 323 is mounted to the drive shaft of the drive motor is driven, but is configured as a tension holding roller that does not rotate even when the drive motor is operated above a certain tension. As shown in the figure, the motor 308-1 is interlocked with the take-up roller 323 by the belt 308-2, and the tension holding device 308 to prevent the tension roller from acting on the take-up roller 323 above a certain level. -3) is mounted. That is, the tension holding device 308-3 rotates in conjunction with the motor 308-1 and the belt 308-2. The motor 308-1 and the tension holding device 308-3 are fixed to the fixed support plate 308-4.

13 shows a view of the fixed support 302. The fixed support 302 is mounted to the frame 10, and the fixed support 302 receives the load of the lower roll chamber 300 as it is. Therefore, the load acting on the fixed support 302 is transmitted to the frame as it is, the fixed support 302 is fixed to the frame 10 to be elastically supported in consideration of the torsion caused by the load or deformation due to thermal stress, etc. The elastic member 302-1 is mounted together to be able to. Specifically, the fixing support 302 is a hole is formed in the fixing support 302 is mounted bolt 302-2, the lower roll chamber 300 by the thread as the bolt 302-2 rotates the frame ( 10), and in the spaced state, the load is supported by the bolt 302-2 and the spring 302-1 which is an elastic member. In addition, any one of the bolts may be mounted without being threaded to serve as a guide for the spring. The figure shows a pair of bolts and a spring on both sides.

It will be apparent to those skilled in the art that the present invention is not limited to the above embodiments and may be variously modified and modified without departing from the technical spirit of the present invention. will be.

The present invention is to protect the graphene film by maintaining a constant tension in the manufacturing process of the graphene film, it is possible to more effectively deposit the graphene on the catalytic metal film, graphene film is easy to cool the graphene film deposited The present invention relates to a manufacturing apparatus and is an invention having high industrial applicability.

Claims

In the graphene film manufacturing apparatus for depositing graphene while transferring the catalytic metal film in a roll-to-roll (roll to roll) method,

An upper roll chamber for supplying the catalytic metal film rolled to the unloading bobbin to the deposition chamber;

A deposition chamber connected to the upper roll chamber and having graphene deposited on the catalyst metal film;

A lower roll chamber connected to the deposition chamber, in which a catalytic metal film on which graphene is deposited is rolled on a loading bobbin; And

A frame to which each of the chambers is fixed;

Graphene film production apparatus, characterized in that consisting of.
The method of claim 1,

The upper roll chamber,

Upper roll chamber body;

An unloading bobbin seated on a rotating roller mounted inside the upper roll chamber body to unload a catalyst metal film;

A first guide roller positioned in front of the unloading bobbin and configured to guide the catalytic metal film supplied from the unloading bobbin;

A feed roller positioned in front of the first guide roller and configured to supply the catalyst metal film supplied from the first guide roller to the deposition chamber while maintaining a constant tension; And

A vacuum pump mounted on an outer side of the upper roll chamber body to maintain a degree of vacuum inside the upper roll chamber body;

Graphene film manufacturing apparatus, characterized in that consisting of.
The method of claim 2,

The feed roller,

Graphene film production apparatus comprising a drive roller driven by a motor, and a contact roller for engaging the drive roller to give a predetermined tension to the catalytic metal film.
The method of claim 3,

The driving roller is a graphene film manufacturing apparatus, characterized in that the cooling water flows into and out of the roller to cool the catalyst metal film.
The method of claim 3,

The adhesion roller is in close contact with the driving roller by a predetermined elastic force graphene film manufacturing apparatus, characterized in that to give a predetermined tension to the catalytic metal film.
The method of claim 1,

The deposition chamber is,

A deposition chamber body connected to the upper roll chamber at a lower portion of the upper roll chamber;

A heater unit mounted inside the deposition chamber body and configured to deposit graphene on the catalyst metal film in front and rear of the catalyst metal film supplied from the upper roll chamber;

A shield plate mounted inside the deposition chamber to prevent heat generated from the heater part from being transferred to the chamber body;

A process gas supply pipe mounted to an outside of the deposition chamber body and configured to inject a process gas into the deposition chamber body;

A process gas exhaust pipe mounted to an outside of the deposition chamber body and configured to discharge the process gas from the inside of the deposition chamber body; And

A vacuum pump mounted on an outer side of the deposition chamber body to maintain a degree of vacuum inside the chamber body;

Graphene film manufacturing apparatus characterized in that consisting of
The method of claim 6,

The heater unit is formed of a zigzag heating plate, the deposition chamber of the graphene film manufacturing apparatus, characterized in that disposed on the front and rear of the catalytic metal film.
The method of claim 6,

The heater unit is formed of a planar heating plate, the deposition chamber of the graphene film manufacturing apparatus, characterized in that disposed on the front and back of the catalytic metal film.
The method according to claim 7 or 8,

The heating plate is a deposition chamber of the graphene film production apparatus, characterized in that formed of tungsten, graphite, silicon carbide or carbon nanotubes.
The method of claim 6,

The shield plate is a deposition chamber of the graphene film production apparatus, characterized in that the metal plate is formed overlapping.
The method of claim 10,

The shield plate is a deposition chamber of the graphene film production apparatus, characterized in that the molybdenum plate adjacent to the catalytic metal film, and a stainless plate laminated at least one at a predetermined interval from the rear surface of the molybdenum plate.
The method of claim 11,

The outermost plate formed of the stainless plate, the deposition chamber of the graphene film manufacturing apparatus, characterized in that the edge of the plate is formed bent inward or outward.
The method of claim 6,

The deposition chamber of the graphene film manufacturing apparatus, characterized in that the door is formed in front or rear of the deposition chamber body, the maintenance of the inside of the deposition chamber body.
The method of claim 13,

The deposition chamber of the graphene film production apparatus, characterized in that the shield plate is formed inside the door.
The method of claim 14,

The shield plate is a deposition chamber of the graphene film production apparatus, characterized in that the molybdenum plate adjacent to the catalytic metal film, and a stainless plate laminated at least one at a predetermined interval from the rear surface of the molybdenum plate.
The method of claim 6,

The deposition chamber body is vertically connected to the upper roll chamber and the lower roll chamber, the catalyst metal film is graphene film deposition apparatus characterized in that the graphene is deposited while moving from the top of the deposition chamber body to the bottom Deposition chamber.
The method of claim 1,

The lower roll chamber,

A lower roll chamber body connected to the deposition chamber below the deposition chamber;

A second guide roller mounted inside the lower roll chamber body to change a direction of the catalytic metal film supplied from the deposition chamber;

A third guide roller mounted below the second guide roller to prevent a sharp angle change by the second guide roller;

A protective film bobbin mounted on one side of the third guide roller and having a protective film wound around the graphene deposited on the catalytic metal film;

A first film attachment roller and a second film attachment roller for attaching the protective film to the catalytic metal film on which the graphene is deposited; And

A loading bobbin on which the catalytic metal film on which graphene is deposited is wound, and a winding roller for winding the catalytic metal film in a constant tension on the loading bobbin;

Graphene film manufacturing apparatus, characterized in that consisting of.
The method of claim 17,

The second guide roller is a graphene film manufacturing apparatus, characterized in that the cooling water flows into and out of the roller to cool the catalyst metal film.
The method of claim 17,

The winding roller is a graphene film manufacturing apparatus, characterized in that the drive is mounted on the drive shaft of the drive motor, the tension maintaining roller does not rotate even when the drive motor is operated above a certain tension.
The method of claim 1,

Graphene film manufacturing apparatus, characterized in that the door is mounted on one side of the upper roll chamber and the lower roll chamber.
The method of claim 1,

The upper roll chamber or the lower roll chamber is graphene film manufacturing apparatus, characterized in that mounted to be elastically supported on the frame.