WO2017023903A1 - Métamatériaux à transformation de phase et échangeables - Google Patents

Métamatériaux à transformation de phase et échangeables Download PDF

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WO2017023903A1
WO2017023903A1 PCT/US2016/045107 US2016045107W WO2017023903A1 WO 2017023903 A1 WO2017023903 A1 WO 2017023903A1 US 2016045107 W US2016045107 W US 2016045107W WO 2017023903 A1 WO2017023903 A1 WO 2017023903A1
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soft
metamaterial
pressure
substructure
holes
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PCT/US2016/045107
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English (en)
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Dian Yang
Lihua JIN
Ramses V. MARTINEZ
Katia Bertoldi
George M. Whitesides
Zhigang Suo
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President And Fellows Of Harvard College
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/006—Resulting in heat recoverable alloys with a memory effect

Definitions

  • This technology relates generally to metamaterials.
  • this invention relates to elastomeric materials with meso- or macro-scale features.
  • the technology also relates phase changing and switchable metamaterials.
  • phase transitions transformations that exhibit discontinuity in the first derivative of the free energy with respect to some thermodynamic variable are characterized by large changes in thermodynamic properties (e.g. melting of a solid, smectic- A to nematic transition in liquid crystals, etc.), and are called first-order phase transitions. Transformations that exhibit continuity in the first derivatives of the free energy but discontinuity in the second derivative are called second-order phase transitions. Examples include those in ferroelectrics, ferromagnetism, shape memory alloys, ferrorelastics, superconductivity, and superfluidity. A similar definition could be applied to higher-order phase transitions.
  • phase transitions involve structural rearrangements at the atomic/molecular scale
  • phase transitions at the meso and macroscale include colloidal suspensions, 2D arrays of polymeric spheres, heat-shrinkable polymer patterns, mesoscale silicon rods embedded in a hydrogel, and slabs of elastomer with an array of holes.
  • an emerging opportunity in materials science and engineering is to create phase-transforming materials by integrating materials— elastomers, liquids, metals, and even open spaces— through geometry and mechanics, at meso or macro scale.
  • Ferroelasticity is the mechanical analogue of ferroelectricity and ferromagnetism, and it is the underlying mechanism of shape-memory alloys.
  • Ferroelastic materials are defined by its property of exhibiting a spontaneous strain under certain external stimulus. This spontaneous strain results in switchable variants of the material, which may be switched on application of an external field, such as stress.
  • an external field such as stress.
  • a ferroelastic material can develop spontaneous strains, and is said to be in a "ferroelastic phase”.
  • These microscopic spontaneous strain states— a.k.a. "variants”— are equivalent crystal structures in different orientations.
  • an example of such variants is the different orientations of a tetragonal unit cell where the long axis points at different directions.
  • a macroscopic external stress can induce "switching" between these variants throughout the material.
  • the bulk material can be molded into different macroscopic shapes depending on its history of loading, while maintaining a memory of its grain arrangements.
  • the spontaneous strain disappears, and the material is said to be in a "paraelastic" or the "parent phase”.
  • the different variants become one, and the material assumes a higher crystallographic symmetry.
  • the tetragonal unit cell discussed above becomes cubic. As a result, the material returns to its original shape, and thus generates a shape-memory effect.
  • a soft metamaterial includes a bulk elastic material having a substructure contained within the material, the substructure having a repeat unit of a size one or more orders of magnitude smaller than the bulk material, wherein the substructure is made of a material that is responsive to an external stimulus, and wherein a response of the substructure to an external stimulus induces in a mechanical deformation of the bulk elastic material.
  • the external stimulus is selected from the group consisting of a change in ambient pressure, salt concentration/osmotic pressure, temperature, PH, applied external electric field, mechanical pressure, hydrostatic pressure and magnetic field.
  • the repeat unit has a size in the range of about 1 ⁇ to about 1 m, or a repeat unit has a size in the range of about 1 ⁇ to about 1 cm, or a repeat unit has a size in the range of about 1 ⁇ to about 1 mm. In one or more embodiments, the repeat unit has a size in the range of about 100 ⁇ to 1 cm.
  • the substructure includes a regular array of sealed holes or voids in an elastomeric body, wherein the array of holes or voids is isolated from the environment.
  • the array of holes or voids includes an alternating arrangement of larger and smaller holes or voids.
  • the internal pressure inside the array of holes or voids is at a sub-atmospheric pressure.
  • the array of holes or voids are in an expanded state when the external pressure matches the sub-atmospheric pressure of the holes or voids and in a collapsed state when the external pressure is greater than the sub-atmospheric pressure of the of holes or voids.
  • the substructure comprises a regular array of hydrogel pellets, wherein the hydrogel pellets are in communication with the environment and/or with one another.
  • the hydrogel pellets are in a resting expanded state when the environment is at a first condition, e.g., salt concentration/osmotic pressure, temperature, PH, applied external electric field, that forms a hydrated hydrogel pellet and in a collapsed state when the environment is at a second condition, e.g., salt
  • concentration/osmotic pressure, temperature, PH, applied external electric field, that form a dehydrated or less hydrated hydrogel pellet concentration/osmotic pressure, temperature, PH, applied external electric field, that form a dehydrated or less hydrated hydrogel pellet.
  • the array of hydrogel pellets comprises an alternating arrangement of larger and smaller hydrogel pellets.
  • the substructure comprises an array of solid pellets with a high degree of thermal expansion.
  • the array of solid pellets comprises an alternating arrangement of larger and smaller solid pellets.
  • the solid pellets are in an expanded state at a first higher temperature and in a collapsed state at a second lower temperature.
  • a method of deforming a bulk material includes providing a soft metamaterial, comprising an elastic material having a substructure contained within the material, the substructure having repeat unit of size one or more orders of magnitude smaller than the bulk material, wherein the substructure is made of a material that is responsive to an external stimulus, and exposing the soft metamaterial to an external stimulus, wherein a response of the substructure to an external stimulus induces in a mechanical deformation of the bulk elastic material.
  • the external stimulus is selected from the group of a change in ambient pressure, salt concentration/osmotic pressure, temperature, PH, applied external electric field or magnetic field.
  • the substructure is selected from the group of sealed air pockets, hydrogel pellets and solid thermally expanding solid pellets.
  • the substructure comprises an array of holes having an internal pressure, wherein the holes are in an expanded state when the external pressure matches the internal pressure of the of holes and in a collapsed state when the external pressure is greater than the internal pressure of the of holes; and changing the external pressure to induce a phase change from the expanded state to the collapsed state (or vice versa) in the material.
  • a method of inducing a phase change in a material includes providing a bulk elastic material having a substructure contained within the material, the substructure having repeat unit of a size one or more orders of magnitude smaller than the bulk material, wherein the substructure comprises an alternating arrangement of larger and smaller compressible elements, wherein the bulk elastic material is capable of taking on two different orientations when the bulk elastic material is under an internally generated compression; and applying a first external force to the bulk elastic material, wherein the material switches between orientations.
  • a method of inducing a phase change in a material includes providing a bulk elastic material having a substructure contained within the material, the substructure having repeat unit of a size one or more orders of magnitude smaller than the bulk material, wherein the substructure comprises an array of holes having an alternating arrangement of larger and smaller holes, the hole maintained at a pressure less than the ambient pressure, wherein the bulk elastic material is capable of taking on two different orientations when the bulk elastic material is under ambient pressure; and applying a first external force to the bulk elastic material, wherein the material switches between orientations.
  • the bulk elastic material retains the new orientation after release of the first applied external force.
  • the bulk elastic material reverts to the initial orientation upon application of a force perpendicular to the first applied external force.
  • the compressible elements comprise hydrogel pellets with are in a tensile state due to dehydration, and the internal compressive forces arise from the transition of the hydrogel pellet from an expanded state to a contracted state.
  • Figure 1A illustrates phase transformation of the structure with an array of open holes of the same size; and the switching between two different variants in an elastomeric meta- structure with through-holes by applying pressure mechanically in the plane of the slab.
  • Figure IB illustrates phase transformation of a structure with an array of isolated air pockets of alternating-sized illustrating the ability to both phase transform between the parent phase and the ferroelastic phase and switch between two different variants.
  • Figure 2 illustrates fabrication of the ferroelastic metamaterial.
  • Ecoflex silicone resin is cast into a 3D printed mold to generate the desired structure.
  • the elastomeric slab containing the array of holes was then removed from the mold.
  • Two thin sheets of Ecoflex were used to cover the holes, and the structure glued and cured at reduced pressure (25 kPa).
  • reduced pressure 25 kPa
  • Figures 3A-3D show phase transformation of the metamaterial in a vacuum chamber as external pressure decreases.
  • Figure 3A shows the experimental images show the phase transformation from the ferroelastic phase to the parent phase. The scale bars are 2 cm long.
  • Figure 3B shows simulation results of the same phase transition show a qualitative agreement with the experimental data.
  • Figure 3C shows simulation results for the dependence of the total volume on the difference between the external and internal pressure, with the total volume V as an order parameter characterizing the phase transition.
  • Figure 4A shows the switching by applying a load in the long axis, the rectangle sample is able to switch between its two variants and leaving with a spontaneous deformation even after the removal of the load.
  • Figure 4B shows the bulk stress-strain curve of the rectangle sample during switching recorded by Instron. The scale bars are 2-cm long.
  • Figures 5A-5B show simulation of switching behavior.
  • Figure 5A shows the ferroelastic phase with horizontal variant was realized by applying an external pressure (state (1)).
  • a vertical compressive stress ⁇ was then added.
  • Figure 5B shows simulated relation of the compressive stress ⁇ and the compressive strain ⁇ of a unit cell during domain switching.
  • Figures 6A-6F show the metamaterial exhibit different domain patterns.
  • Figure 6A shows a single domain structure.
  • Figure 6B shows a two-domain structure with a horizontal domain boundary.
  • Figures 6C and 6D show a three-domain structure with two horizontal boundaries.
  • Figure 6E shows a two-domain structure with a 45-degree domain boundary.
  • Figure 6F shows a three-domain structure with two 45-degree domain boundaries. Domain boundaries are marked with a dotted line. Scale bars are 2 cm long.
  • Figures 7A-7C show shape-memory effect in the metamaterial.
  • Figure 7A shows a long piece of metamaterial was glued to a block of same elastomer (Ecoflex) to demonstrate the effect. By bending of the sample, the metamaterial was compressed, and forced into in its vertical variant.
  • Figure 7B shows that when environmental pressure decreased, the metamaterial transformed from the ferroelastic phase into the parent phase, and the block returned to being straight.
  • Figure 7C shows that when the environmental pressure was again raised, the material transitioned back into the ferroelastic phase. The restoring force in the elastomer block favored the horizontal variant. Scale bars are 2 cm long.
  • metals is traditionally used in optics to describe materials that contain microscopic features with similar or smaller sizes compared to the wavelength of light involved.
  • the materials are usually arranged in repeating patterns, often at micron or smaller scales that are smaller than the wavelengths of the phenomena they influence.
  • Metamaterials derive their properties not from the properties of the base materials, but from their designed structure. Their precise shape, geometry, size, orientation and arrangement give them their properties.
  • metal is used herein to describe a structure that contains a substructure with feature sizes that are orders of magnitudes smaller than the bulk material itself, e.g., greater than 1 or greater than 2 orders of magnitude, but orders of magnitude larger than the molecular or atomic scale e.g., greater than 1, or greater than 2 orders of magnitude.
  • the bulk material behaves like a uniform structure, and only an average effect of the sub-structures manifest in bulk.
  • the unit cell of the repeating substructure that contains the features is on the order of millimeters.
  • a soft metamaterial is provided. These soft
  • metamaterials are made up of stretchable or flexible materials, which allow the overall bulk structure, e.g., soft metamaterial, to deform.
  • the soft metamaterial includes an elastomer.
  • the sub-structures of these soft metamaterials form repeating units, similar to how unit cells are repeated in crystalline materials at the molecular or atomic level.
  • the substructures are flexible, stretchable or capable of deformation or collapse.
  • the sub-structure also contains hard components, which don't deform itself, but are connected to the stretchable or flexible components, enabling the entire structure to deform.
  • the soft metamaterials change shape through interactions of the smaller scale meta-structure within itself. These interactions can resemble those between atoms and molecules in crystalline materials. This technique of reproducing atomic or molecular level material properties with meso-scale structural properties opens the door to engineering new soft materials with new properties and functions.
  • the substructure for the metamaterial can be varied depending on the external stimulus selected for the mechanical deformation.
  • the soft metamaterial can be made of a soft elastomeric matrix and sealed air pockets embedded therein, which are arranged in a repeating pattern.
  • ambient pressure can be used to control the volume of the air pockets: increasing the ambient pressure collapses the air pods, and decreasing the ambient pressure expands the air pods. As the air pockets expand and contract, the bulk material is subject to a mechanical deformation.
  • the soft metamaterial can be made of a soft elastomeric matrix and hydrogel pellets, which are accessible to the surface of the bulk material so that water can be exchanged with the environment.
  • the ambient salt concentration/osmotic pressure can be used to control the volume of the hydrogel pellets: increasing the ambient salt concentration/osmotic pressure results in an outflow of the water content from the hydrogel pellet.
  • the hydrogel shrinks in size and the volume occupied by the hydrogen collapses. Decreasing the ambient salt concentration/osmotic pressure results in an inflow of the water into the hydrogel pellet, and expands them.
  • the hydrogel pellets are coupled to the soft elastomeric matrix so that the expansion and contraction of the hydrogel pellet brings about a mechanical deformation of the bulk material.
  • the hydrogel pellets are in a tensile state due to dehydration (the hydrogel pellet may be dehydrated or less hydrated), and the internal compressive forces arises from the transition of the hydrogel pellet from an expanded state to a contracted state.
  • the hydrogel pellets can be flexible, stretchable or capable of deformation or collapse. In this way, osmotic pressure serves a similar function to ambient pressure in the previous example.
  • the soft metamaterial is made of a soft elastomeric matrix and soft or solid pellets with a high coefficient of thermal expansion.
  • the ambient temperature can be used to control the volume of the soft or solid pellets. Increasing the ambient temperature results in expansion of the pellets; decreasing the ambient temperature results in contraction of the pellets.
  • the soft or solid pellets are coupled to the soft elastomeric matrix so that the expansion and contraction of the soft or solid pellet brings about a mechanical deformation of the bulk material.
  • phase change By designing the shape and arrangement of the air pockets, pellets, etc. inside the soft metamaterial that respond to stimuli to generate forces that mechanically deform the bulk structure, different macroscopic effects can happen as a result of their change of volume.
  • the rearrangement of the substructures or unit cells in response to mechanical deformation is referred to as a phase change.
  • phase transition is achieved using the pressure differential between internal void spaces and external pressure.
  • Other stimuli are contemplated, such as salt
  • phase change is accomplished without an external mechanical compression.
  • an elastic metamaterial also possesses shape-memory properties, which requires their ferroelastic phase to have spontaneous strains.
  • the elastic material is capable of switching between two variants, or orientations.
  • a soft metamaterial is prepared from an elastic material containing a regular array of holes or voids in an elastomeric body.
  • the array of holes is prepared using an alternating arrangement of holes of different sizes.
  • the array of holes can be on the meso-scale or macro-scale.
  • the holes can be as on the micron scale or smaller, or as large as meter scale, e.g., millimetre or centimetre scale, but remains one, two, or more orders of magnitude smaller than the size of the bulk material.
  • the holes or voids are isolated from the environment, so that a change in external pressure exerts a force on the body. For example, when the external pressure is greater than the internal pressure, the void space experiences a compression. Alternatively, when the external pressure is less than the internal pressure, the void space experiences an expansion.
  • the void spaces are at sub-atmospheric pressure.
  • a soft metamaterial can mimic the mechanism of a one-way shape memory alloy.
  • An exemplary shape memory material is shown in Figure IB.
  • the block elastic structure includes a slab of polymeric elastomer having a regular array of holes with two sizes that is sealed within a thin elastomeric membrane with a sub-atmospheric pressure inside.
  • the soft metamaterial has an array of cylindrical sealed air pockets embedded in a slab of elastomer.
  • the air pockets have two sizes, and these two kinds of air pockets are arranged in a checkerboard pattern in the square array. In some sense this material mimics an A+X- crystalline lattice, in which A+ and X- have different radii.
  • the holes collapse when exposed to atmospheric pressure tha tis greater than the internal pressue of the holes or cylinders (resting in the ferroelastic phase), and open under low external pressure that is less than the internal pressure of the holes or cylinders (transforming to the parent phase).
  • This design makes it possible to apply compressive stress isotropically to the structure simply by changing the external pressure (using a pressure-controlled chamber).
  • the air pockets are arranged close enough so that the they are able to collapse into slits upon increasing the ambient pressure.
  • the repeating unit of an undeformed material has a square shape originally. But as the cylindrical air pockets deforms into slits, the material shrinks and become rectangular.
  • the long axis of the longer slits (that is slits that come from the larger air pockets) will also be the long axis of the now deformed material. This is illustrated in Variant I and Variant II of Figure IB, in which the two long axes are in different directions for the two variants.
  • These holes can either stay open and form a square lattice, or be collapsed and skew the lattice into a rectangular shape, depending on the differential pressure between the atmosphere and the pressure sealed inside the holes.
  • This change of geometry of the unit cells (square to rectangle) closely is analogous to the "parent phase” to "ferroelastic phase” transformation in ferroelastic materials (cubic to tetragonal); however, unlike conventional ferroelastic materials, the transformation is dependent on external pressure instead of temperature.
  • the analogy can be extended to switching between "variants”—the two rectangular skewed "variants” of this lattice of holes in an elastomer can be switched through a uniaxial compression (from tall rectangle to wide rectangle), in a process similar to that in which different microscopic variants of a ferroelastic material can be switched by external loading (between three different tetragonal unit cells). Similar behavior can be observed with other systems, such as hydrogel pellets, which are flexible, stretchable or capable of deformation or collapse.
  • Figure 2 sketches the method used to fabricate the elastomeric structure capable of phase transformation and switching in one or more embodiments.
  • the structures are fabricated by casting elastomers in a mold.
  • the mold is designed using a computer-aided design (CAD) software (Solidworks).
  • CAD computer-aided design
  • a 3D printer (StrataSys Fortus 250mc) generated the masters in acrylonitrile butadiene styrene (ABS) plastic.
  • ABS acrylonitrile butadiene styrene
  • Pouring Ecoflex prepolymer into the template and curing it at 20 °C for 12 hours generated an elastomeric slab with the designed pattern of holes. The slab is removed carefully from the mold.
  • the mold did not require surface treatment to aid release of the cured Ecoflex, as this silicone polymer does not adhere to the ABS.
  • the large and small holes in the structure had diameters of 5 mm and 3 mm respectively.
  • the centers of all the holes formed a square lattice of unit length 5 mm.
  • Two 1 mm-thick sheets of Ecoflex were glued to this slab to seal the holes.
  • a homogenous body is formed.
  • the entire structure was cured in a desiccator at a pressure of 25 kPa under 20 °C for 12 hours. After removing the fully cured material from the vacuum chamber, all the internal holes collapse due to the hydrostatic force applied by the atmosphere. The material then develops a spontaneous strain and enters the ferroelastic phase.
  • Figures 3A-3D show the experiment and simulation of the phase transition from the ferroelastic phase to the parent phase of a block of this metamaterial, as the external pressure decreases.
  • the collapsed sample was placed in a vacuum chamber, and the pressure was slowly lowered; the changes in the structure of the slab was observed with changing pressure.
  • the metamaterial can switch from the vertical variant to the horizontal variant under a compressive load in the vertical direction ( Figures 4A-4B.
  • the switching occurs through a nucleation process in which one variant suddenly appears inside the other, forming domains of different variants, and seen at the 'domain wall' of Figure 4A.
  • the formation of domains of different variants is accompanied by a "snap through" from one variant into the other.
  • the horizontal domain expands and the vertical domain shrinks, while the domain wall moves.
  • the domain wall can be seen in the middle of the material. By the end, the domain wall disappears and the switching from the vertical variant to the horizontal variant is complete (Figure 4A).
  • the new state remains stable even after removal of the compressive load, and left a spontaneous deformation.
  • the phase state change occurs without transition through a stable parent phase.
  • the bulk stress- strain curve of a rectangular sample during switching using an Instron is shown n Figure 4B, where (1), (2), (3), and (4), correspond to images in Figure 4A.
  • the multiple nucleation points can be seen as bumps in this plot.
  • the original vertical domain can be regenerated by application of a compressive force in the direction orthogonal to that used to generate the horizontal domain.
  • FIG. 5A The switching between variants using the finite element method is simulated, as shown in Figures 5A and 5B).
  • a simulated unit cell (the smallest repeating unit in our structure) can be placed in the ferroelastic phase (as opposed to the parent phase in a stress free state) by applying a hydrostatic differential pressure between the external boundary and the inside of the holes.
  • Figure 5B plots the compressive stress ⁇ as a function of the compressive strain ⁇ of a unit cell. As the strain ⁇ increased, the compressive stress ⁇ first increased, then dropped below zero, and then increased again— this curve indicates that a "snap through" happens during the compression process. The results are consistent with the experiments.
  • the switching demonstrates that different variants can coexist under the ferroelastic phase. Furthermore, these different variants can divide a piece of material into domains of different shapes, and form domain boundaries ( Figures 6A-6F).
  • the material can demonstrate a single crystal structure, if all parts of the structure are in the same variants in the ferroelastic phase, as shown in Figure 6A.
  • the single-crystal structure can transform into a structure with two variants divided by a horizontal boundary under uniaxial loading, as shown in Figure 6B. More complicated loadings can lead to many more different domain patterns (See, e.g., Figures 6C-6F). These domain patterns are highly similar in ferromagnetic domain patterns, which are induced by ferromagnetic phase transitions.
  • Figures 7A-7C demonstrate the shape-memory effect of this metamaterial.
  • a long piece of the metamaterial is glued to a horizontally positioned block made of same elastomer (Ecoflex 00-30). Under high external pressure, the metamaterial transforms to the ferroelastic phase. The material was then bent manually. By bending of the sample, the metamaterial is compressed, and forced into in its vertical variant, as shown in Figure 7A. The material can be returned to its parent state by placing the bent composite sample into a vacuum chamber, and lowering the pressure. The decrease in environmental pressure induced a phase transition of the metamaterial from the ferroelastic phase back to the parent phase.
  • Meso-scale materials offer opportunities to control structure and properties beyond those in atomic and molecular materials. Although most of the familiar examples of phase transitions happen at the molecular or atomic scale, there are only a limited number of chemical elements (e.g. the atoms of the periodic table) that are available to form materials. There are an essentially unlimited number of options in the type of materials, geometry and interactions among which to choose, in generating new materials. Thus, more structures and functionalities are, in principle, possible using meso- or macro-scale materials than with atoms and molecules.
  • a metamaterial capable of phase transforming from the parent phase to the ferroelastic phase is described. This material exhibits a spontaneous strain and can be switched between its two different variants in the ferroelastic phase. These mechanisms are conceptually the same as those in a one-way shape-memory alloy, but happen in a very different length scale.
  • first, second, third, etc. may be used herein to describe various elements, these elements are not to be limited by these terms. These terms are simply used to distinguish one element from another. Thus, a first element, discussed below, could be termed a second element without departing from the teachings of the exemplary embodiments.
  • the apparatus may be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly. Further still, in this disclosure, when an element is referred to as being “on,” “connected to,” “coupled to,” “in contact with,” etc., another element, it may be directly on, connected to, coupled to, or in contact with the other element or intervening elements may be present unless otherwise specified.

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Abstract

L'invention concerne une nouvelle structure souple qui utilise une instabilité élastique à l'échelle mésoscopique ou macroscopique pour produire un effet mémoire similaire à celui d'un matériau ferroélastique. La métastructure souple présente une transition de phase, un échange de variants et une mémoire de forme. Les matériaux de la classe présentée sont utiles, car ils sont "des alliages à mémoire de forme" de module arbitrairement faible importants et de déformation résiduelle arbitrairement grande.
PCT/US2016/045107 2015-08-03 2016-08-02 Métamatériaux à transformation de phase et échangeables WO2017023903A1 (fr)

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CN108897087A (zh) * 2018-06-13 2018-11-27 电子科技大学中山学院 一种可提高非对称传输的纳米结构及其制备方法
CN112701490A (zh) * 2020-12-17 2021-04-23 哈尔滨理工大学 一种基于TiNi形状记忆合金薄膜的可动态调控的多功能太赫兹超材料器件
WO2023121567A3 (fr) * 2021-12-21 2023-09-14 National University Of Singapore Métamatériau mécanique à verrouillage critique pour profilage moléculaire hyper-sensible

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108897087A (zh) * 2018-06-13 2018-11-27 电子科技大学中山学院 一种可提高非对称传输的纳米结构及其制备方法
CN108897087B (zh) * 2018-06-13 2019-08-23 电子科技大学中山学院 一种可提高非对称传输的纳米结构及其制备方法
CN112701490A (zh) * 2020-12-17 2021-04-23 哈尔滨理工大学 一种基于TiNi形状记忆合金薄膜的可动态调控的多功能太赫兹超材料器件
CN112701490B (zh) * 2020-12-17 2022-02-08 哈尔滨理工大学 一种基于TiNi形状记忆合金薄膜的可动态调控的多功能太赫兹超材料器件
WO2023121567A3 (fr) * 2021-12-21 2023-09-14 National University Of Singapore Métamatériau mécanique à verrouillage critique pour profilage moléculaire hyper-sensible

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