WO2017018063A1 - Esd protection element - Google Patents

Esd protection element Download PDF

Info

Publication number
WO2017018063A1
WO2017018063A1 PCT/JP2016/067002 JP2016067002W WO2017018063A1 WO 2017018063 A1 WO2017018063 A1 WO 2017018063A1 JP 2016067002 W JP2016067002 W JP 2016067002W WO 2017018063 A1 WO2017018063 A1 WO 2017018063A1
Authority
WO
WIPO (PCT)
Prior art keywords
discharge
electrode
auxiliary electrode
esd protection
protection element
Prior art date
Application number
PCT/JP2016/067002
Other languages
French (fr)
Japanese (ja)
Inventor
足立　淳
鷲見　高弘
Original Assignee
株式会社村田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to JP2017531065A priority Critical patent/JP6394808B2/en
Publication of WO2017018063A1 publication Critical patent/WO2017018063A1/en

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T1/00—Details of spark gaps
    • H01T1/20—Means for starting arc or facilitating ignition of spark gap
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T2/00—Spark gaps comprising auxiliary triggering means
    • H01T2/02—Spark gaps comprising auxiliary triggering means comprising a trigger electrode or an auxiliary spark gap
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T4/00—Overvoltage arresters using spark gaps
    • H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T4/00—Overvoltage arresters using spark gaps
    • H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
    • H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed

Definitions

  • the present invention relates to an ESD protection element device.
  • ESD Electro-Static Discharge
  • the ESD protection element is an element that prevents an excessive current generated during discharging from being applied to an electronic device.
  • the ESD protection element has a structure in which a pair of discharge electrodes are spaced apart from each other, and when an excessive voltage is applied, discharge occurs between the discharge electrodes, leading to static electricity to the ground side and protecting the circuit.
  • electronic devices driven at a lower voltage have been widely used, and accordingly, an element having a low discharge start voltage that can be discharged at a lower voltage is also required for the ESD protection element.
  • Patent Document 1 discloses an ESD protection element in which a discharge auxiliary electrode including a conductive member is provided between spaced apart discharge electrodes in order to provide an ESD protection element having a low discharge start voltage.
  • the ESD protection element is likely to cause creeping discharge due to the conductive member included in the discharge auxiliary electrode, and as a result, can be discharged at a lower voltage.
  • an object of the present invention is to provide an ESD protection element that can further lower the discharge start voltage and improve the insulation deterioration resistance.
  • an ESD protection element is: A ceramic body, A discharge auxiliary electrode embedded in the ceramic body; A first discharge electrode embedded in the ceramic body and bonded to one main surface of the discharge auxiliary electrode; A second discharge electrode embedded in the ceramic body and joined to one main surface of the discharge auxiliary electrode so as to be separated from the first discharge electrode;
  • the discharge auxiliary electrode is A first discharge auxiliary electrode comprising a conductive member, to which the first discharge electrode is joined and extending toward the second discharge electrode; A second discharge auxiliary electrode comprising fewer conductive members than the first discharge auxiliary electrode; It is characterized by including.
  • the first discharge auxiliary electrode including a conductive member more than the second discharge auxiliary electrode is joined to the first discharge electrode, the first discharge electrode is the first discharge electrode. Discharge tends to occur at the contact portion of the discharge auxiliary electrode.
  • the second discharge auxiliary electrode includes fewer conductive members than the first discharge auxiliary electrode, insulation deterioration is suppressed.
  • the second discharge auxiliary electrode is joined to the second discharge electrode and extends to the first discharge electrode side. If it does in this way, in the element which makes the 1st discharge electrode the cathode side, it can make it easy to produce discharge in the contact part of the 1st discharge auxiliary electrode on the cathode side.
  • An ESD protection element includes an extension length that extends to the second discharge electrode side of the first discharge auxiliary electrode, and an extension length that extends to the first discharge electrode side of the second discharge auxiliary electrode.
  • the extension length is different. If it does in this way, it becomes possible to set extension length suitably according to a required characteristic, and can adjust the voltage value and insulation degradation inhibitory effect which a discharge produces.
  • an extension length of the first discharge auxiliary electrode extending to the second discharge electrode side extends to the first discharge electrode side of the second discharge auxiliary electrode. Greater than extended length. If it does in this way, in the element which makes the 1st discharge electrode the cathode side, it can make it easier to produce discharge in the contact part of the 1st discharge auxiliary electrode on the cathode side.
  • the ceramic body has a cavity, and at least one main surface located between the first discharge electrode and the second discharge electrode is exposed in the cavity. .
  • an air discharge is generated in the cavity, so that the discharge is more likely to occur.
  • discharging in the hollow portion it is possible to discharge when necessary without being affected by the external environment such as moisture, so that stable operation can be ensured.
  • the ESD protection element includes a seal layer having a higher sintering temperature than the ceramic body between the discharge auxiliary electrode and the ceramic body. If it does in this way, at the time of manufacture and the time of discharge, mixing to the discharge auxiliary electrode of the ingredient contained in the ceramic base object can be controlled.
  • the ESD protection element of a form of the present invention is covered with the seal layer. If it does in this way, at the time of manufacture and the time of discharge, mixing to the said discharge auxiliary electrode of the component contained in the said ceramic element
  • the conductive member includes a metal material and a semiconductor material. If it does in this way, it will become possible to meet a wide demand by selecting a metal material and a semiconductor material suitably according to a required characteristic, and adjusting each content rate.
  • the ESD protection element of the present invention configured as described above, it is possible to provide an ESD protection element that can further lower the discharge start voltage and improve the insulation deterioration resistance.
  • FIG. 2 is a longitudinal sectional view (a sectional view parallel to a plane including a Z axis) taken along line B-B ′ of FIG. 1.
  • FIG. 2 is a longitudinal sectional view taken along line A-A ′ of FIG. 1. It is a cross-sectional view which expands and shows a part of FIG. It is a longitudinal cross-sectional view which expands and shows a part of FIG.
  • FIG. 2 It is a cross-sectional view which shows the structure of the ESD protection element of Embodiment 2 which concerns on this invention, and has expanded and showed a part of cross section of the ESD protection element of Embodiment 2.
  • FIG. 2 It is a longitudinal cross-sectional view which shows the structure of the ESD protection element of Embodiment 2, and expands and shows a part of longitudinal section of the ESD protection element of Embodiment 2.
  • FIG. 3 shows the structure of the ESD protection element of Embodiment 2 which concerns on this invention, and has expanded and shown a part of cross section of the ESD protection element of Embodiment 3.
  • FIG. 11 is a longitudinal sectional view taken along line A-A ′ of FIG. 10.
  • FIG. The ESD protection element 10 according to the first embodiment of the present invention is embedded in the ceramic body 8, the discharge auxiliary electrode 5 embedded in the ceramic body 8, and the ceramic body 8, as shown in FIG.
  • the first discharge electrode 1 and the second discharge electrode 3 that is electrically separated from the first discharge electrode 1 and embedded in the ceramic body 8 are included.
  • the ceramic body 8 has a rectangular parallelepiped shape, and external electrodes 1a and 3a are formed at both ends thereof.
  • the end portion of the ceramic body 8 where the external electrode 1a is formed is referred to as a first end portion
  • the end portion where the external electrode 3a is formed is referred to as a second end portion.
  • first discharge electrode 1 is connected to the external electrode 1a, and the other end is positioned closer to the second end portion beyond the longitudinal center plane (YZ plane including the center) including the center of the ceramic body 8. For example, it is formed in a certain width.
  • the second discharge electrode 3 is formed with a certain width, for example, so that one end is connected to the external electrode 3 a and the other end is positioned closer to the first end portion than the longitudinal center plane of the ceramic body 8. .
  • the first discharge electrode 1 and the second discharge electrode 3 are positioned on a horizontal center plane (XY plane including the center) including the center of the ceramic body 8 and have the same width so that the longitudinal directions thereof are parallel to each other. And is formed to a thickness.
  • a side surface and a second side of a portion having a predetermined length from the other end of the first discharge electrode 1 faces on the lateral center plane.
  • the discharge auxiliary electrode 5 is formed so that one main surface is located on the lateral center plane, and the lower surface of the opposing portion of the first discharge electrode 1 and the lower surface of the opposing portion of the second discharge electrode 3 are the discharge auxiliary electrode 5. It is joined to one of the main surfaces.
  • the discharge auxiliary electrode 5 has a predetermined distance t between the lower end of the side surface of the first facing portion and the lower end of the side surface of the second facing portion. Are provided so as to face each other on one main surface.
  • the ceramic body 8 has a cavity 9.
  • the cavity 9 has a discharge space formed on at least one main surface of the discharge auxiliary electrode 5 located between the first opposing portion of the first discharge electrode 1 and the second opposing portion of the second discharge electrode 3. Is provided.
  • the discharge auxiliary electrode 5 includes a conductive member.
  • creeping discharge is likely to occur, and the discharge start voltage is increased. Can be lowered.
  • the content of the conductive member of the discharge auxiliary electrode 5 is increased, or the interval t between the lower end of the side surface of the first facing portion and the lower end of the side surface of the second facing portion is decreased. Further, the insulation deteriorates due to repeated discharge, and it becomes difficult to satisfy the insulation deterioration resistance.
  • the ESD protection element 10 of Embodiment 1 includes a discharge including the first discharge auxiliary electrode 5a including a conductive member and the second discharge auxiliary electrode 5b having a lower content of the conductive member than the first discharge auxiliary electrode 5a.
  • the auxiliary electrode 5 is used.
  • the first discharge auxiliary electrode 5a is made of an insulating material including a relatively large number of conductive members in order to lower the discharge start voltage.
  • the first discharge electrode on the cathode side is joined to form the second discharge electrode.
  • the second discharge auxiliary electrode 5b is made of an insulating material whose conductive member content is lower than that of the first discharge auxiliary electrode 5a in order to improve the insulation deterioration resistance, and the second discharge electrode 3 is joined to the first discharge auxiliary electrode 5b. It extends to the discharge electrode 1 side.
  • the first discharge auxiliary electrode 5a extends to the second discharge electrode 3 side (first extension length) and the second discharge auxiliary electrode 5b extends to the first discharge electrode 1 side.
  • the first extension length and the second extension length are made equal to each other, so that the length (second extension length) of the first and second opposing portions is 1 ⁇ 2 of the distance t between the first opposing portion and the second opposing portion. .
  • the ESD protection element 10 of the first embodiment configured as described above is a contact portion (triple point) side of the first discharge electrode 1 on the cathode side, the first discharge auxiliary electrode 5a, and the cavity 9 serving as a starting point of creeping discharge.
  • the content of the conductive member of the first discharge auxiliary electrode 5a is large. This facilitates the emission of electrons from the triple point, facilitates the formation of an ionization region where an electron avalanche occurs at the tip of the discharge, and the subsequent formation of a streamer consisting of a plasma state region, and a leader following the streamer. Can be lowered.
  • the second discharge auxiliary electrode 5b having a small content of the conductive member is present.
  • the second discharge auxiliary electrode 5b with a small content of the conductive member is unlikely to cause dielectric breakdown due to discharge, it can maintain high insulation even when the discharge is repeated, and can improve insulation deterioration resistance. become.
  • the ESD protection element 10 of the first embodiment it is possible to provide an ESD protection element that can reduce the discharge start voltage and improve the insulation deterioration resistance.
  • the first extension length of the first discharge auxiliary electrode 5a and the second extension length of the second discharge auxiliary electrode 5b are made equal, but the present invention is limited to this. Instead, as will be described later, the first extension length of the first discharge auxiliary electrode 5a and the second extension length of the second discharge auxiliary electrode 5b may be different.
  • FIG. 1 the ESD protection element 20 of Embodiment 2 according to the present invention is the same as that of Embodiment 1 except that the configuration of the discharge auxiliary electrode 25 is different from that of the discharge auxiliary electrode 5 of Embodiment 1.
  • the configuration is the same as that of the ESD protection element 10.
  • the discharge auxiliary electrode 25 of the second embodiment includes two first discharge auxiliary electrodes 25a1 and 25a2 made of an insulating material including a relatively large number of conductive members in order to lower the discharge start voltage.
  • the second discharge auxiliary is located between the first discharge auxiliary electrode 25a1 and the first discharge auxiliary electrode 25a2 and has a lower conductive material content than the first discharge auxiliary electrodes 25a1 and 25a2 in order to improve the insulation deterioration resistance.
  • An electrode 25b is located between the first discharge auxiliary electrode 25a1 and the first discharge auxiliary electrode 25a2 and has a lower conductive material content than the first discharge auxiliary electrodes 25a1 and 25a2 in order to improve the insulation deterioration resistance.
  • the second discharge auxiliary electrode 25b is provided at a position away from the lower end of the side surface of the first opposing portion of the first discharge electrode by a predetermined distance and away from the lower end of the side surface of the second opposing portion of the second discharge electrode by a predetermined distance.
  • the first discharge auxiliary electrode 25a1 joins the first discharge electrode 1 and extends to the second discharge auxiliary electrode 25b.
  • the first discharge auxiliary electrode 25a2 joins the second discharge electrode 3 and extends to the second discharge auxiliary electrode 25b.
  • an ESD protection element 20 of the second embodiment configured as described above, similarly to the ESD protection element 10 of the first embodiment, an ESD protection element that can reduce the discharge start voltage and can improve the resistance to insulation deterioration. It becomes possible to provide.
  • the ESD protection element 20 joins the first discharge auxiliary electrode 25a1 having a conductive material content higher than that of the second discharge auxiliary electrode 25b to the first discharge electrode 1 and moves toward the second discharge electrode 3 side.
  • the first discharge auxiliary electrode 25a2 is extended by the first extension length t1 and the conductive material content is higher than that of the second discharge auxiliary electrode 25b.
  • the first discharge auxiliary electrode 25a2 is joined to the second discharge electrode 3, and the first discharge electrode 1 side is One extension length t1 is extended. Thereby, there is no directionality in input / output, and the discharge start voltage can be lowered regardless of which of the first discharge electrode 1 and the second discharge electrode 3 is the cathode side.
  • the ESD protection element 20 of Embodiment 2 has a first extension length t1 that extends the first discharge auxiliary electrode 25a1 to the second discharge electrode 3 side, and the first discharge auxiliary electrode 25a2 to the first discharge electrode 1 side.
  • the ESD protection element 30 includes a first extended length t1 of the first discharge auxiliary electrode 5a and a second discharge auxiliary electrode 5b in the discharge auxiliary electrode 5.
  • the second extending length t2 is different from that of the ESD protection element 10 of the first embodiment except that the second extending length t2 is different. More specifically, in the ESD protection element 30 of the third embodiment, the first extension length t1 of the first discharge auxiliary electrode 5a is longer than the second extension length t2 of the second discharge auxiliary electrode 5b.
  • an ESD protection element 30 of the third embodiment configured as described above, similarly to the ESD protection element 10 of the first embodiment, an ESD protection element that can reduce the discharge start voltage and can improve the insulation deterioration resistance. It becomes possible to provide.
  • the first extension length t1 of the first discharge auxiliary electrode 5a is longer than the second extension length t2 of the second discharge auxiliary electrode 5b.
  • the discharge of electrons from the contact portion (triple point) between the first discharge electrode 1, the first discharge auxiliary electrode 5a, and the cavity 9 and the growth of creeping discharge become easier, and the discharge start voltage can be further reduced.
  • Embodiment 4 FIG.
  • the ESD protection element 40 according to the fourth embodiment of the present invention is different from the fourth embodiment except that a seal layer 41 surrounding the discharge auxiliary electrode 5 and the cavity 9 is formed as shown in FIGS. 1 of the ESD protection element 10.
  • the seal layer 41 is a layer having a function of suppressing components contained in the ceramic body 8 from being mixed into the first discharge electrode 1, the second discharge electrode 2, and the discharge auxiliary electrode 5. It is made of an insulating material with a high bonding temperature. Thereby, mixing of the ceramic body 8 components during manufacture into the first discharge electrode 1, the second discharge electrode 2 and the discharge auxiliary electrode 5 can be suppressed, and manufacturing variation can be reduced. Also.
  • the discharge auxiliary electrode 5 is particularly affected by the mixing of components contained in the ceramic body 8, and it is preferable to provide a seal layer 41 at least between the discharge auxiliary electrode 5 and the ceramic body, more preferably.
  • the ESD protection element 40 of the fourth embodiment configured as described above, as with the ESD protection element 10 of the first embodiment, the ESD protection element that can lower the discharge start voltage and improve the resistance to insulation deterioration. It becomes possible to provide an ESD protection element with small manufacturing variation.
  • the ESD protection element 40 is formed by further forming the seal layer 41 on the ESD protection element 10 of the first embodiment.
  • the ESD protection element 20 of 2 and the ESD protection element 30 of the third embodiment may be further provided with a seal layer similar to that of the fourth embodiment. In this way, it is possible to reduce manufacturing variations such as the discharge start voltage and the insulation string, and it is possible to provide an ESD protection element with more stable quality.
  • the cavity 9 is provided.
  • the present invention is not limited to this, and the configuration of the discharge auxiliary electrode according to the present invention is the ESD protection without the cavity 9. It can also be applied to elements.
  • the conductive member included in the discharge auxiliary electrode may be a metal material, a semiconductor material, or both a metal material and a semiconductor material. Also good.
  • metal material one or two or more simple substances selected from Cu, Ag, Pd, Pt, Al, Ni, W, and Mo, or an alloy thereof can be used. Moreover, the thing of the form coat
  • semiconductor materials include metal semiconductors such as silicon and germanium, carbides such as silicon carbide, titanium carbide, zirconium carbide, molybdenum carbide, and tungsten carbide, and nitrides such as titanium nitride, zirconium nitride, chromium nitride, vanadium nitride, and tantalum nitride.
  • metal semiconductors such as silicon and germanium
  • carbides such as silicon carbide, titanium carbide, zirconium carbide, molybdenum carbide, and tungsten carbide
  • nitrides such as titanium nitride, zirconium nitride, chromium nitride, vanadium nitride, and tantalum nitride.
  • Titanium silicide, zirconium silicide, tungsten silicide, molybdenum silicide, chromium silicide, chromium silicide, and other silicides titanium boride, zirconium boride, chromium boride, lanthanum boride, molybdenum boride, Borides such as tungsten boride, oxides such as zinc oxide and strontium titanate can be used.
  • silicon and silicon carbide are particularly preferable because they are relatively inexpensive and various particle size variations are commercially available. These semiconductor materials may be used alone or in admixture of two or more.
  • the insulating material is not particularly limited, and foresterite added with glass, CaZrO 3 added with glass, or the like can be used.
  • Example 1 an ELD protection element according to Embodiment 4 was produced as follows.
  • a BAS material containing Ba, Al, and Si is prepared as a material for the ceramic body 8.
  • BaO, Al 2 O 3 and SiO 2 were first prepared and mixed in such a ratio that the relative dielectric constant ⁇ r was 4 to 9, and calcined at 800-1000 ° C.
  • the obtained calcined powder was pulverized with a zirconia ball mill for 12 hours to obtain a ceramic powder.
  • an organic solvent such as toluene and echinene was added and mixed.
  • a binder and a plasticizer are added and mixed to obtain a slurry.
  • the three thus obtained was molded by the doctor blade method to obtain a ceramic green sheet having a thickness of 50 ⁇ m.
  • the first discharge auxiliary electrode is made of a mixture of Cu / SiC / Al 2 O 3. .
  • Cu powder having an average particle diameter of 0.5 ⁇ m, SiC powder having an average particle diameter of 0.3 ⁇ m, and Al 2 O 3 powder having an average particle diameter of 0.3 ⁇ m are 20% by volume: 60% by volume:
  • a mixed powder was obtained by blending at a ratio of 20% by volume.
  • a first discharge auxiliary electrode paste was obtained by stirring and mixing 60% by weight of the mixed powder and 40% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol with three rolls.
  • the second discharge auxiliary electrode is made of a mixture of Cu / SiC / Al 2 O 3 , and the ratio of Cu, SiC, and Al 2 O 3 is different from that of the first discharge auxiliary electrode.
  • Cu powder having an average particle diameter of 0.5 ⁇ m, SiC powder having an average particle diameter of 0.3 ⁇ m, and Al 2 O 3 powder having an average particle diameter of 0.3 ⁇ m are 20% by volume: 20% by volume:
  • a mixed powder was obtained by blending at a ratio of 60% by volume.
  • a first discharge auxiliary electrode paste was obtained by stirring and mixing 60% by weight of the mixed powder and 40% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol with three rolls.
  • seal layer paste 80% by weight of Al 2 O 3 powder having an average particle diameter of 1 ⁇ m and 200% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol are mixed and mixed by a three-roll. By doing so, the paste for seal layers was produced.
  • Example 1 in the fired element, the distance between the first discharge electrode and the second discharge electrode is 20 ⁇ m, the first extension length of the first discharge auxiliary electrode 5a is 10 ⁇ m, and the second discharge auxiliary electrode second
  • the application range of each paste was set in consideration of the firing shrinkage so that the extension length was 10 ⁇ m.
  • the ESD protection element of Example 1 was produced as described above.
  • Example 2 As the ESD protection element of Example 2, an ESD protection element having the discharge auxiliary electrode 25 having the configuration shown in FIGS. 6 and 7 and having the sealing layer shown in FIGS. 10 and 11 was produced.
  • the distance between the first discharge electrode and the second discharge electrode is 20 ⁇ m
  • the first extension length of the first discharge auxiliary electrode 5a is 15 ⁇ m
  • the second discharge auxiliary electrode has a second length.
  • the application range of each paste was set in consideration of the firing shrinkage rate so that the extension length was 5 ⁇ m.
  • the ESD protection element of Example 2 was fabricated so that the other configuration was the same as that of Example 1.
  • Comparative Example 1 As the ESD protection element of Comparative Example 1, an ESD protection element in which the discharge auxiliary electrode was formed only by the first discharge auxiliary electrode in the ESD protection element of Example 1 was produced.
  • Comparative Example 2 As an ESD protection element of Comparative Example 2, an ESD protection element in which the discharge auxiliary electrode was formed only by the second discharge auxiliary electrode in the ESD protection element of Example 1 was produced.
  • the ESD protection element of Example 1 above, the ESD protection element of Example 2, the ESD protection element of Comparative Example 1 and the ESD protection element of Comparative Example 2 were evaluated for the discharge start voltage and insulation degradation resistance. The results are shown below. Regarding the discharge start voltage, the ESD protection element of Example 2 and the ESD protection element of Comparative Example 1 were the lowest, then the ESD protection element of Example 1 was the lowest, and the ESD protection element of Comparative Example 2 was the highest. . With respect to insulation degradation resistance, the ESD protection element of Example 1, the ESD protection element of Example 2, and the ESD protection element of Comparative Example 2 were good results, but the ESD protection element of Comparative Example 1 was greatly deteriorated. .
  • the ESD protection element according to the present invention can lower the discharge start voltage and improve the insulation deterioration resistance, it can be applied to a wide variety of electronic devices.

Abstract

Provided is an ESD protection element with which it is possible to lower the discharge initiating voltage and improve resistance to the deterioration of insulating properties. This ESD protection element is provided with: a ceramic element body; a discharge auxiliary electrode embedded in the ceramic element body; a first discharge electrode that is embedded in the ceramic element body and is bonded to one main surface of the discharge auxiliary electrode; and a second discharge electrode that is embedded in the ceramic element body and is bonded to one main surface of the discharge auxiliary electrode so as to be separated from the first discharge electrode. The discharge auxiliary electrode contains: a first discharge auxiliary electrode that comprises a conductive member, is bonded to the first discharge electrode, and extends to the second discharge electrode side; and a second discharge auxiliary electrode comprising a conductive member that is smaller than that of the first discharge auxiliary electrode.

Description

ＥＳＤ保護素子ESD protection element
　　本発明は、ＥＳＤ保護素子デバイスに関する。 The present invention relates to an ESD protection element device.
　ＥＳＤ（Electro-Static Discharge；静電気放電）とは、例えば、人体等が、電子機器等に接触したときに発生する放電現象であり、電子機器の損傷や誤作動の原因になる。ＥＳＤ保護素子は、放電時に発生する過大な電流が電子機器に加わらないようにする素子である。 ESD (Electro-Static Discharge) is a discharge phenomenon that occurs when, for example, a human body comes into contact with an electronic device or the like, which may cause damage or malfunction of the electronic device. The ESD protection element is an element that prevents an excessive current generated during discharging from being applied to an electronic device.
　ＥＳＤ保護素子は、一対の放電電極を離間して対向させた構造を有し、過大な電圧が加わると、放電電極間で放電が発生し、静電気をグランド側に導き、回路を保護する。近年、より低電圧で駆動する電子機器が広く用いられるようになってきており、これに伴いＥＳＤ保護素子にもより低い電圧で放電させることができる放電開始電圧の低い素子が求められている。 The ESD protection element has a structure in which a pair of discharge electrodes are spaced apart from each other, and when an excessive voltage is applied, discharge occurs between the discharge electrodes, leading to static electricity to the ground side and protecting the circuit. In recent years, electronic devices driven at a lower voltage have been widely used, and accordingly, an element having a low discharge start voltage that can be discharged at a lower voltage is also required for the ESD protection element.
　特許文献１には、放電開始電圧の低いＥＳＤ保護素子を提供するために、離間した放電電極間に、導電性部材を含む放電補助電極を設けたＥＳＤ保護素子が開示されている。このＥＳＤ保護素子は、放電補助電極に含まれる導電性部材により沿面放電が生じやすくなり、その結果より低い電圧で放電させることができるとされている。 Patent Document 1 discloses an ESD protection element in which a discharge auxiliary electrode including a conductive member is provided between spaced apart discharge electrodes in order to provide an ESD protection element having a low discharge start voltage. The ESD protection element is likely to cause creeping discharge due to the conductive member included in the discharge auxiliary electrode, and as a result, can be discharged at a lower voltage.
ＷＯ２００８－１４６５１４WO2008-146514
　しかしながら、近年、より低電圧で放電させることができるとともに、絶縁性劣化耐性の高いＥＳＤ保護素子が求められている。 However, in recent years, there is a demand for an ESD protection element that can be discharged at a lower voltage and has high resistance to insulation deterioration.
　そこで、本発明は、より放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することを目的とする。 Therefore, an object of the present invention is to provide an ESD protection element that can further lower the discharge start voltage and improve the insulation deterioration resistance.
　以上の課題を解決するために、本発明に係るＥＳＤ保護素子は、
　セラミック素体と、
　前記セラミック素体に埋設された放電補助電極と、
　前記セラミック素体に埋設され、前記放電補助電極の一方の主面に接合された第１放電電極と、
　前記セラミック素体に埋設され、前記第１放電電極から分離するように前記放電補助電極の一方の主面に接合された第２放電電極と、
　を備え、
　前記放電補助電極は、
　導電性部材を含んでなり、前記第１放電電極が接合されかつ前記第２放電電極側に延在する第１放電補助電極と、
　前記第１放電補助電極より少ない導電性部材を含んでなる第２放電補助電極と、
　を含むことを特徴とする。 In order to solve the above problems, an ESD protection element according to the present invention is:
A ceramic body,
A discharge auxiliary electrode embedded in the ceramic body;
A first discharge electrode embedded in the ceramic body and bonded to one main surface of the discharge auxiliary electrode;
A second discharge electrode embedded in the ceramic body and joined to one main surface of the discharge auxiliary electrode so as to be separated from the first discharge electrode;
With
The discharge auxiliary electrode is
A first discharge auxiliary electrode comprising a conductive member, to which the first discharge electrode is joined and extending toward the second discharge electrode;
A second discharge auxiliary electrode comprising fewer conductive members than the first discharge auxiliary electrode;
It is characterized by including.
　以上のように構成されたＥＳＤ保護素子は、第２放電補助電極より多く導電性部材を含む第１放電補助電極が第１放電電極に接合されているので、前記第１放電電極が前記第１放電補助電極の接触部において放電が生じやすくなる。
　また、第２放電補助電極は、前記第１放電補助電極より少ない導電性部材を含むので、絶縁劣化が抑制される。 In the ESD protection element configured as described above, since the first discharge auxiliary electrode including a conductive member more than the second discharge auxiliary electrode is joined to the first discharge electrode, the first discharge electrode is the first discharge electrode. Discharge tends to occur at the contact portion of the discharge auxiliary electrode.
In addition, since the second discharge auxiliary electrode includes fewer conductive members than the first discharge auxiliary electrode, insulation deterioration is suppressed.
　本発明のある形態のＥＳＤ保護素子では、前記第２放電補助電極は、前記第２放電電極に接合されかつ前記第１放電電極側に延在する。
　このようにすると、前記第１放電電極を陰極側とする素子において、陰極側の前記第１放電補助電極の接触部において放電を生じやすくできる。 In the ESD protection element of one form of the present invention, the second discharge auxiliary electrode is joined to the second discharge electrode and extends to the first discharge electrode side.
If it does in this way, in the element which makes the 1st discharge electrode the cathode side, it can make it easy to produce discharge in the contact part of the 1st discharge auxiliary electrode on the cathode side.
　本発明のある形態のＥＳＤ保護素子は、前記第１放電補助電極の前記第２放電電極側に延在する延在長と、前記第２放電補助電極の前記第１放電電極側に延在する延在長とが異なる。
　このようにすると、要求特性に合わせて適宜延在長を設定することが可能になり、放電が生じる電圧値と絶縁劣化抑制効果を調整することができる。 An ESD protection element according to an aspect of the present invention includes an extension length that extends to the second discharge electrode side of the first discharge auxiliary electrode, and an extension length that extends to the first discharge electrode side of the second discharge auxiliary electrode. The extension length is different.
If it does in this way, it becomes possible to set extension length suitably according to a required characteristic, and can adjust the voltage value and insulation degradation inhibitory effect which a discharge produces.
　本発明のある形態のＥＳＤ保護素子は、前記第１放電補助電極の前記第２放電電極側に延在する延在長が、前記第２放電補助電極の前記第１放電電極側に延在する延在長より大きい。
　このようにすると、前記第１放電電極を陰極側とする素子において、陰極側の前記第１放電補助電極の接触部においてより放電を生じやすくできる。 In an ESD protection element according to an aspect of the present invention, an extension length of the first discharge auxiliary electrode extending to the second discharge electrode side extends to the first discharge electrode side of the second discharge auxiliary electrode. Greater than extended length.
If it does in this way, in the element which makes the 1st discharge electrode the cathode side, it can make it easier to produce discharge in the contact part of the 1st discharge auxiliary electrode on the cathode side.
　本発明のある形態のＥＳＤ保護素子は、前記セラミック素体は空洞を有し、少なくとも前記第１放電電極と前記第２放電電極の間に位置する前記一方の主面が前記空洞内に露出する。
　このようにすると、放電補助電極に沿った沿面放電に加えて、空洞内において気中放電が生じるのでより放電が生じやすくなる。
　また、この空洞部分で放電させることにより、湿気等の外部環境に影響されることなく必要な時に放電できるので、安定した動作が確保できる。 In an ESD protection element according to an aspect of the present invention, the ceramic body has a cavity, and at least one main surface located between the first discharge electrode and the second discharge electrode is exposed in the cavity. .
In this way, in addition to the creeping discharge along the discharge auxiliary electrode, an air discharge is generated in the cavity, so that the discharge is more likely to occur.
Further, by discharging in the hollow portion, it is possible to discharge when necessary without being affected by the external environment such as moisture, so that stable operation can be ensured.
　本発明のある形態のＥＳＤ保護素子は、前記放電補助電極と前記セラミック素体の間に、前記セラミック素体より焼結温度の高いシール層を含む。
　このようにすると、製造時及び放電時において、前記セラミック素体に含まれる成分の前記放電補助電極への混入を抑制することができる。 The ESD protection element according to an aspect of the present invention includes a seal layer having a higher sintering temperature than the ceramic body between the discharge auxiliary electrode and the ceramic body.
If it does in this way, at the time of manufacture and the time of discharge, mixing to the discharge auxiliary electrode of the ingredient contained in the ceramic base object can be controlled.
　本発明のある形態のＥＳＤ保護素子は、前記シール層に覆われている。
　このようにすると、製造時及び放電時において、前記セラミック素体に含まれる成分の前記放電補助電極への混入をより効果的に抑制することができる。 The ESD protection element of a form of the present invention is covered with the seal layer.
If it does in this way, at the time of manufacture and the time of discharge, mixing to the said discharge auxiliary electrode of the component contained in the said ceramic element | base_body can be suppressed more effectively.
　本発明のある形態のＥＳＤ保護素子は、前記導電性部材は、金属材料と半導体材料を含む。
　このようにすると、要求特性に合わせて適宜金属材料と半導体材料を選択し、各含有率を調整することにより幅広い要求にこたえることが可能になる。 In one form of the ESD protection element of the present invention, the conductive member includes a metal material and a semiconductor material.
If it does in this way, it will become possible to meet a wide demand by selecting a metal material and a semiconductor material suitably according to a required characteristic, and adjusting each content rate.
　以上のように構成された本発明に係るＥＳＤ保護素子によれば、より放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することが可能になる。 According to the ESD protection element of the present invention configured as described above, it is possible to provide an ESD protection element that can further lower the discharge start voltage and improve the insulation deterioration resistance.
本発明に係る実施形態１のＥＳＤ保護素子の構成を示す横断面図（ＸＹ平面に平行な断面図）である。It is a cross-sectional view (cross-sectional view parallel to the XY plane) showing the configuration of the ESD protection element of Embodiment 1 according to the present invention. 図１のＢ－Ｂ’線についての縦断面図（Ｚ軸を含む平面に平行な断面図）である。FIG. 2 is a longitudinal sectional view (a sectional view parallel to a plane including a Z axis) taken along line B-B ′ of FIG. 1. 図１のＡ－Ａ’線についての縦断面図である。FIG. 2 is a longitudinal sectional view taken along line A-A ′ of FIG. 1. 図１の一部を拡大して示す横断面図である。It is a cross-sectional view which expands and shows a part of FIG. 図３の一部を拡大して示す縦断面図である。It is a longitudinal cross-sectional view which expands and shows a part of FIG. 本発明に係る実施形態２のＥＳＤ保護素子の構成を示す横断面図であり、実施形態２のＥＳＤ保護素子の横断面の一部を拡大して示している。It is a cross-sectional view which shows the structure of the ESD protection element of Embodiment 2 which concerns on this invention, and has expanded and showed a part of cross section of the ESD protection element of Embodiment 2. FIG. 実施形態２のＥＳＤ保護素子の構成を示す縦断面図であり、実施形態２のＥＳＤ保護素子の縦断面の一部を拡大して示している。It is a longitudinal cross-sectional view which shows the structure of the ESD protection element of Embodiment 2, and expands and shows a part of longitudinal section of the ESD protection element of Embodiment 2. 本発明に係る実施形態３のＥＳＤ保護素子の構成を示す横断面図であり、実施形態３のＥＳＤ保護素子の横断面の一部を拡大して示している。It is a cross-sectional view which shows the structure of the ESD protection element of Embodiment 3 which concerns on this invention, and has expanded and shown a part of cross section of the ESD protection element of Embodiment 3. FIG. 実施形態３のＥＳＤ保護素子の構成を示す縦断面図であり、実施形態３のＥＳＤ保護素子の縦断面の一部を拡大して示している。実施形態１の変形例１に係るＥＳＤ保護素子の一部を拡大して示す縦断面図である。It is a longitudinal cross-sectional view which shows the structure of the ESD protection element of Embodiment 3, and expands and shows a part of longitudinal section of the ESD protection element of Embodiment 3. 6 is an enlarged longitudinal sectional view showing a part of an ESD protection element according to Modification 1 of Embodiment 1. FIG. 本発明に係る実施形態４のＥＳＤ保護素子の構成を示す横断面図である。It is a cross-sectional view which shows the structure of the ESD protection element of Embodiment 4 which concerns on this invention. 図１０のＡ－Ａ’線についての縦断面図である。FIG. 11 is a longitudinal sectional view taken along line A-A ′ of FIG. 10.
　以下、図面を参照しながら本発明に係る実施形態のＥＳＤ保護素子について説明する。 Hereinafter, an ESD protection element according to an embodiment of the present invention will be described with reference to the drawings.
　実施形態１．
　本発明に係る実施形態１のＥＳＤ保護素子１０は、図１等に示すように、セラミック素体８と、セラミック素体８に埋設された放電補助電極５と、セラミック素体８に埋設された第１放電電極１と、第１放電電極１と電気的に分離されてセラミック素体８に埋設された第２放電電極３と、を含む。実施形態１において、セラミック素体８は直方体形状を成し、その両端部に外部電極１ａ，３ａが形成されている。以下、セラミック素体８の外部電極１ａが形成されている端部を第１端部といい、外部電極３ａが形成されている端部を第２端部という。 Embodiment 1. FIG.
The ESD protection element 10 according to the first embodiment of the present invention is embedded in the ceramic body 8, the discharge auxiliary electrode 5 embedded in the ceramic body 8, and the ceramic body 8, as shown in FIG. The first discharge electrode 1 and the second discharge electrode 3 that is electrically separated from the first discharge electrode 1 and embedded in the ceramic body 8 are included. In the first embodiment, the ceramic body 8 has a rectangular parallelepiped shape, and external electrodes 1a and 3a are formed at both ends thereof. Hereinafter, the end portion of the ceramic body 8 where the external electrode 1a is formed is referred to as a first end portion, and the end portion where the external electrode 3a is formed is referred to as a second end portion.
　第１放電電極１は、一端が外部電極１ａに接続され、他端がセラミック素体８の中心を含む縦中心面（中心を含むＹＺ平面）を越えて第２端部寄りに位置するように、例えば、一定の幅に形成される。第２放電電極３は、一端が外部電極３ａに接続され、他端がセラミック素体８の縦中心面を越えて第１端部寄りに位置するように、例えば、一定の幅に形成される。第１放電電極１と第２放電電極３は、例えば、セラミック素体８の中心を含む横中心面（中心を含むＸＹ平面）上に位置しかつ長手方向が互いに平行になるように同一の幅と厚さに形成される。以上のように構成された第１放電電極１と第２放電電極３において、第１放電電極１の他端から所定の長さの部分（以下、第１対向部という。）の側面と第２放電電極３の他端から所定の長さの部分（以下、第２対向部という。）の側面とが横中心面上で対向する。 One end of the first discharge electrode 1 is connected to the external electrode 1a, and the other end is positioned closer to the second end portion beyond the longitudinal center plane (YZ plane including the center) including the center of the ceramic body 8. For example, it is formed in a certain width. The second discharge electrode 3 is formed with a certain width, for example, so that one end is connected to the external electrode 3 a and the other end is positioned closer to the first end portion than the longitudinal center plane of the ceramic body 8. . For example, the first discharge electrode 1 and the second discharge electrode 3 are positioned on a horizontal center plane (XY plane including the center) including the center of the ceramic body 8 and have the same width so that the longitudinal directions thereof are parallel to each other. And is formed to a thickness. In the first discharge electrode 1 and the second discharge electrode 3 configured as described above, a side surface and a second side of a portion having a predetermined length from the other end of the first discharge electrode 1 (hereinafter referred to as a first facing portion). A side surface of a portion having a predetermined length (hereinafter referred to as a second facing portion) from the other end of the discharge electrode 3 faces on the lateral center plane.
　放電補助電極５は、一方の主面が横中心面上に位置するように形成され、第１放電電極１の対向部の下面と第２放電電極３の対向部の下面とが放電補助電極５の一方の主面に接合される。以上のようにして、実施形態１の第１放電電極１と第２放電電極３は、第１対向部の側面の下端と第２対向部の側面の下端が所定の間隔ｔで放電補助電極５の一方の主面上で対向するように設けられる。 The discharge auxiliary electrode 5 is formed so that one main surface is located on the lateral center plane, and the lower surface of the opposing portion of the first discharge electrode 1 and the lower surface of the opposing portion of the second discharge electrode 3 are the discharge auxiliary electrode 5. It is joined to one of the main surfaces. As described above, in the first discharge electrode 1 and the second discharge electrode 3 of the first embodiment, the discharge auxiliary electrode 5 has a predetermined distance t between the lower end of the side surface of the first facing portion and the lower end of the side surface of the second facing portion. Are provided so as to face each other on one main surface.
　また、実施形態１のＥＳＤ保護素子１０において、セラミック素体８は空洞９を有している。この空洞９は、少なくとも第１放電電極１の第１対向部と第２放電電極３の第２対向部の間に位置する放電補助電極５の一方の主面上に放電空間が形成されるように設けられる。このように空洞９を形成することにより、放電補助電極５に沿った沿面放電に加えて、空洞内において気中放電が生じるのでより放電が生じやすくなる。また、この空洞９で放電させることにより、湿気等の外部環境に影響されることなく必要な時に放電できるので、安定した動作が確保できる。 Further, in the ESD protection element 10 of the first embodiment, the ceramic body 8 has a cavity 9. The cavity 9 has a discharge space formed on at least one main surface of the discharge auxiliary electrode 5 located between the first opposing portion of the first discharge electrode 1 and the second opposing portion of the second discharge electrode 3. Is provided. By forming the cavity 9 in this manner, in addition to the creeping discharge along the discharge auxiliary electrode 5, an air discharge is generated in the cavity, so that the discharge is more likely to occur. Further, by discharging in the cavity 9, it is possible to discharge when necessary without being affected by the external environment such as moisture, so that stable operation can be ensured.
　以上のように構成された実施形態１のＥＳＤ保護素子１０において、放電補助電極５は、導電性部材を含んでおり、放電補助電極５を設けることにより、沿面放電が生じやすくなり、放電開始電圧を低くすることができる。
　しかしながら、放電開始電圧を低くしようとして、放電補助電極５の導電性部材の含有量を多くしたり、第１対向部の側面の下端と第２対向部の側面の下端間の間隔ｔを小さくすると、放電を重ねることにより絶縁性が悪化し、絶縁性劣化耐性を満足させることが困難になる。 In the ESD protection element 10 of the first embodiment configured as described above, the discharge auxiliary electrode 5 includes a conductive member. By providing the discharge auxiliary electrode 5, creeping discharge is likely to occur, and the discharge start voltage is increased. Can be lowered.
However, in order to lower the discharge start voltage, the content of the conductive member of the discharge auxiliary electrode 5 is increased, or the interval t between the lower end of the side surface of the first facing portion and the lower end of the side surface of the second facing portion is decreased. Further, the insulation deteriorates due to repeated discharge, and it becomes difficult to satisfy the insulation deterioration resistance.
　そこで、本実施形態１のＥＳＤ保護素子１０は、導電性部材を含む第１放電補助電極５ａと第１放電補助電極５ａより導電性部材の含有量が少ない第２放電補助電極５ｂとを含む放電補助電極５を用いて構成している。 Therefore, the ESD protection element 10 of Embodiment 1 includes a discharge including the first discharge auxiliary electrode 5a including a conductive member and the second discharge auxiliary electrode 5b having a lower content of the conductive member than the first discharge auxiliary electrode 5a. The auxiliary electrode 5 is used.
　第１放電補助電極５ａは、放電開始電圧を低くするために比較的多くの導電性部材を含む絶縁性材料により構成し、例えば、陰極側である第１放電電極を接合して第２放電電極３側に延在させる。第２放電補助電極５ｂは、絶縁性劣化耐性を向上させるために導電性部材の含有量が第１放電補助電極５ａより少ない絶縁性材料により構成し、第２放電電極３を接合して第１放電電極１側に延在させる。 The first discharge auxiliary electrode 5a is made of an insulating material including a relatively large number of conductive members in order to lower the discharge start voltage. For example, the first discharge electrode on the cathode side is joined to form the second discharge electrode. Extend to 3 sides. The second discharge auxiliary electrode 5b is made of an insulating material whose conductive member content is lower than that of the first discharge auxiliary electrode 5a in order to improve the insulation deterioration resistance, and the second discharge electrode 3 is joined to the first discharge auxiliary electrode 5b. It extends to the discharge electrode 1 side.
　実施形態１のＥＳＤ保護素子１０では、第１放電補助電極５ａを第２放電電極３側に延在させる長さ（第１延在長）及び第２放電補助電極５ｂを第１放電電極１側に延在させる長さ（第２延在長）をそれぞれ第１対向部と第２対向部間の間隔ｔの１／２とし、第１延在長と第２延在長を等しくしている。 In the ESD protection element 10 according to the first embodiment, the first discharge auxiliary electrode 5a extends to the second discharge electrode 3 side (first extension length) and the second discharge auxiliary electrode 5b extends to the first discharge electrode 1 side. The first extension length and the second extension length are made equal to each other, so that the length (second extension length) of the first and second opposing portions is ½ of the distance t between the first opposing portion and the second opposing portion. .
　以上のように構成された実施形態１のＥＳＤ保護素子１０は、沿面放電の起点となる、陰極側の第１放電電極１と第１放電補助電極５ａと空洞９の接触部（三重点）側の第１放電補助電極５ａの導電性部材の含有量が大きい。これにより、三重点からの電子が放出されやすくなり、放電先端の電子雪崩が生じる電離領域、それに続くプラズマ状態の領域からなるストリーマの形成及びストリーマに続くリーダーの形成が容易になり、放電開始電圧を低くできる。
　また、一旦、三重点から電子が放出されてストリーマとリーダーが形成されると、導電性部材の含有量が少ない第２放電補助電極５ｂが存在しても沿面放電の成長は実質的に阻害されることはない。
　さらに、導電性部材の含有量が少ない第２放電補助電極５ｂは、放電による絶縁破壊が生じにくいので、放電が繰り返されても高い絶縁性が保持でき、絶縁性劣化耐性を向上させることが可能になる。 The ESD protection element 10 of the first embodiment configured as described above is a contact portion (triple point) side of the first discharge electrode 1 on the cathode side, the first discharge auxiliary electrode 5a, and the cavity 9 serving as a starting point of creeping discharge. The content of the conductive member of the first discharge auxiliary electrode 5a is large. This facilitates the emission of electrons from the triple point, facilitates the formation of an ionization region where an electron avalanche occurs at the tip of the discharge, and the subsequent formation of a streamer consisting of a plasma state region, and a leader following the streamer. Can be lowered.
Further, once electrons are emitted from the triple point to form a streamer and a leader, the growth of creeping discharge is substantially inhibited even if the second discharge auxiliary electrode 5b having a small content of the conductive member is present. Never happen.
Furthermore, since the second discharge auxiliary electrode 5b with a small content of the conductive member is unlikely to cause dielectric breakdown due to discharge, it can maintain high insulation even when the discharge is repeated, and can improve insulation deterioration resistance. become.
　したがって、実施形態１のＥＳＤ保護素子１０によれば、放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することが可能になる。 Therefore, according to the ESD protection element 10 of the first embodiment, it is possible to provide an ESD protection element that can reduce the discharge start voltage and improve the insulation deterioration resistance.
　以上の実施形態１のＥＳＤ保護素子１０では、第１放電補助電極５ａの第１延在長と第２放電補助電極５ｂの第２延在長を等しくしたが、本発明はこれに限定されるものではなく、後述するように、第１放電補助電極５ａの第１延在長と第２放電補助電極５ｂの第２延在長とは異なっていても良い。 In the ESD protection element 10 of Embodiment 1 described above, the first extension length of the first discharge auxiliary electrode 5a and the second extension length of the second discharge auxiliary electrode 5b are made equal, but the present invention is limited to this. Instead, as will be described later, the first extension length of the first discharge auxiliary electrode 5a and the second extension length of the second discharge auxiliary electrode 5b may be different.
　実施形態２．
　本発明に係る実施形態２のＥＳＤ保護素子２０は、図６及び図７に示すように、放電補助電極２５の構成が実施形態１の放電補助電極５と異なっている以外は、実施形態１のＥＳＤ保護素子１０と同様に構成される。
　具体的には、実施形態２の放電補助電極２５は、放電開始電圧を低くするために比較的多くの導電性部材を含む絶縁性材料により構成された２つの第１放電補助電極２５ａ１，２５ａ２と、第１放電補助電極２５ａ１と第１放電補助電極２５ａ２の間に位置し、絶縁性劣化耐性を向上させるために導電性材料の含有量が第１放電補助電極２５ａ１，２５ａ２より少ない第２放電補助電極２５ｂとを含む。 Embodiment 2. FIG.
As shown in FIGS. 6 and 7, the ESD protection element 20 of Embodiment 2 according to the present invention is the same as that of Embodiment 1 except that the configuration of the discharge auxiliary electrode 25 is different from that of the discharge auxiliary electrode 5 of Embodiment 1. The configuration is the same as that of the ESD protection element 10.
Specifically, the discharge auxiliary electrode 25 of the second embodiment includes two first discharge auxiliary electrodes 25a1 and 25a2 made of an insulating material including a relatively large number of conductive members in order to lower the discharge start voltage. The second discharge auxiliary is located between the first discharge auxiliary electrode 25a1 and the first discharge auxiliary electrode 25a2 and has a lower conductive material content than the first discharge auxiliary electrodes 25a1 and 25a2 in order to improve the insulation deterioration resistance. An electrode 25b.
　第２放電補助電極２５ｂは、第１放電電極の第１対向部側面の下端から所定の距離だけ離れ、第２放電電極の第２対向部側面の下端から所定の距離だけ離れた位置に設ける。第１放電補助電極２５ａ１は、第１放電電極１を接合して第２放電補助電極２５ｂまで延在させる。第１放電補助電極２５ａ２は、第２放電電極３を接合して第２放電補助電極２５ｂまで延在させる。 The second discharge auxiliary electrode 25b is provided at a position away from the lower end of the side surface of the first opposing portion of the first discharge electrode by a predetermined distance and away from the lower end of the side surface of the second opposing portion of the second discharge electrode by a predetermined distance. The first discharge auxiliary electrode 25a1 joins the first discharge electrode 1 and extends to the second discharge auxiliary electrode 25b. The first discharge auxiliary electrode 25a2 joins the second discharge electrode 3 and extends to the second discharge auxiliary electrode 25b.
　以上のように構成された実施形態２のＥＳＤ保護素子２０によっても、実施形態１のＥＳＤ保護素子１０と同様、放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することが可能になる。 According to the ESD protection element 20 of the second embodiment configured as described above, similarly to the ESD protection element 10 of the first embodiment, an ESD protection element that can reduce the discharge start voltage and can improve the resistance to insulation deterioration. It becomes possible to provide.
　また、実施形態２のＥＳＤ保護素子２０は、導電性材料の含有量が第２放電補助電極２５ｂより多い第１放電補助電極２５ａ１を第１放電電極１に接合して第２放電電極３側に第１延在長ｔ１だけ延在させ、導電性材料の含有量が第２放電補助電極２５ｂより多い第１放電補助電極２５ａ２を第２放電電極３に接合して第１放電電極１側に第１延在長ｔ１だけ延在させている。これにより、入出力に方向性がなく、第１放電電極１及び第２放電電極３のどちらを陰極側とした場合であっても放電開始電圧を低くできる。 Further, the ESD protection element 20 according to the second embodiment joins the first discharge auxiliary electrode 25a1 having a conductive material content higher than that of the second discharge auxiliary electrode 25b to the first discharge electrode 1 and moves toward the second discharge electrode 3 side. The first discharge auxiliary electrode 25a2 is extended by the first extension length t1 and the conductive material content is higher than that of the second discharge auxiliary electrode 25b. The first discharge auxiliary electrode 25a2 is joined to the second discharge electrode 3, and the first discharge electrode 1 side is One extension length t1 is extended. Thereby, there is no directionality in input / output, and the discharge start voltage can be lowered regardless of which of the first discharge electrode 1 and the second discharge electrode 3 is the cathode side.
　また、実施形態２のＥＳＤ保護素子２０は、第１放電補助電極２５ａ１を第２放電電極３側に延在させる第１延在長ｔ１、第１放電補助電極２５ａ２を第１放電電極１側に延在させる第１延在長ｔ１及び第２放電補助電極２５ｂの幅Ｗを適宜設定することにより、放電開始電圧及び絶縁性劣化耐性を要求特性に合わせて設定できる。 Further, the ESD protection element 20 of Embodiment 2 has a first extension length t1 that extends the first discharge auxiliary electrode 25a1 to the second discharge electrode 3 side, and the first discharge auxiliary electrode 25a2 to the first discharge electrode 1 side. By appropriately setting the first extension length t1 to be extended and the width W of the second discharge auxiliary electrode 25b, the discharge start voltage and the insulation deterioration resistance can be set according to the required characteristics.
　実施形態３．
　本発明に係る実施形態３のＥＳＤ保護素子３０は、図８及び図９に示すように、放電補助電極５において、第１放電補助電極５ａの第１延在長ｔ１と第２放電補助電極５ｂの第２延在長ｔ２が異なっている以外は、実施形態１のＥＳＤ保護素子１０と同様に構成される。より具体的には、実施形態３のＥＳＤ保護素子３０では、第１放電補助電極５ａの第１延在長ｔ１を第２放電補助電極５ｂの第２延在長ｔ２より長くしている。 Embodiment 3. FIG.
As shown in FIGS. 8 and 9, the ESD protection element 30 according to the third embodiment of the present invention includes a first extended length t1 of the first discharge auxiliary electrode 5a and a second discharge auxiliary electrode 5b in the discharge auxiliary electrode 5. The second extending length t2 is different from that of the ESD protection element 10 of the first embodiment except that the second extending length t2 is different. More specifically, in the ESD protection element 30 of the third embodiment, the first extension length t1 of the first discharge auxiliary electrode 5a is longer than the second extension length t2 of the second discharge auxiliary electrode 5b.
　以上のように構成された実施形態３のＥＳＤ保護素子３０によっても、実施形態１のＥＳＤ保護素子１０と同様、放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することが可能になる。 According to the ESD protection element 30 of the third embodiment configured as described above, similarly to the ESD protection element 10 of the first embodiment, an ESD protection element that can reduce the discharge start voltage and can improve the insulation deterioration resistance. It becomes possible to provide.
　また、実施形態２のＥＳＤ保護素子２０は、第１放電補助電極５ａの第１延在長ｔ１を第２放電補助電極５ｂの第２延在長ｔ２より長くしているので、陰極側の第１放電電極１と第１放電補助電極５ａと空洞９の接触部（三重点）からの電子の放出及び沿面放電の成長がより容易になり、放電開始電圧をさらに低くできる。 In the ESD protection element 20 of the second embodiment, the first extension length t1 of the first discharge auxiliary electrode 5a is longer than the second extension length t2 of the second discharge auxiliary electrode 5b. The discharge of electrons from the contact portion (triple point) between the first discharge electrode 1, the first discharge auxiliary electrode 5a, and the cavity 9 and the growth of creeping discharge become easier, and the discharge start voltage can be further reduced.
　実施形態４．
　本発明に係る実施形態４のＥＳＤ保護素子４０は、図１０及び図１１に示すように、放電補助電極５及び空洞９を取り囲むシール層４１を形成している点で異なっている以外は実施形態１のＥＳＤ保護素子１０と同様に構成される。
　このシール層４１は、セラミック素体８に含まれる成分が第１放電電極１、第２放電電極２及び放電補助電極５への混入を抑制する機能を有する層であり、セラミック素体８より焼結温度の高い絶縁材料により構成される。これにより、製造時におけるセラミック素体８成分の第１放電電極１、第２放電電極２及び放電補助電極５への混入を抑制することができ、製造バラツキを小さくできる。また。放電時に生じる熱によるセラミック素体８成分の第１放電電極１、第２放電電極２及び放電補助電極５への混入を抑制することができるので、ＥＳＤ特性の劣化を抑制でき、かつ長寿命化が図れる。 Embodiment 4 FIG.
The ESD protection element 40 according to the fourth embodiment of the present invention is different from the fourth embodiment except that a seal layer 41 surrounding the discharge auxiliary electrode 5 and the cavity 9 is formed as shown in FIGS. 1 of the ESD protection element 10.
The seal layer 41 is a layer having a function of suppressing components contained in the ceramic body 8 from being mixed into the first discharge electrode 1, the second discharge electrode 2, and the discharge auxiliary electrode 5. It is made of an insulating material with a high bonding temperature. Thereby, mixing of the ceramic body 8 components during manufacture into the first discharge electrode 1, the second discharge electrode 2 and the discharge auxiliary electrode 5 can be suppressed, and manufacturing variation can be reduced. Also. Since it is possible to prevent the ceramic body 8 component from being mixed into the first discharge electrode 1, the second discharge electrode 2 and the discharge auxiliary electrode 5 due to heat generated at the time of discharge, it is possible to suppress the deterioration of ESD characteristics and extend the life. Can be planned.
　このセラミック素体８に含まれる成分の混入によりとりわけ大きな影響を受けるものは放電補助電極５であり、少なくとも放電補助電極５とセラミック素体の間にシール層４１を設けることが好ましく、より好ましくは、セラミック素体８に含まれる成分の放電補助電極への混入、空洞９内に露出する第１放電電極１及び第２放電電極３への混入を抑制するように空洞９に面するセラミック素体８の表面全体がシール層４１により覆われていることが好ましい。 The discharge auxiliary electrode 5 is particularly affected by the mixing of components contained in the ceramic body 8, and it is preferable to provide a seal layer 41 at least between the discharge auxiliary electrode 5 and the ceramic body, more preferably. The ceramic body facing the cavity 9 to suppress mixing of components contained in the ceramic body 8 into the discharge auxiliary electrode and mixing into the first discharge electrode 1 and the second discharge electrode 3 exposed in the cavity 9. It is preferable that the entire surface of 8 is covered with the sealing layer 41.
　以上のように構成された実施形態４のＥＳＤ保護素子４０によれば、実施形態１のＥＳＤ保護素子１０と同様、放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるＥＳＤ保護素子を提供することが可能になることに加え、製造バラツキの小さいＥＳＤ保護素子を提供することが可能になる。 According to the ESD protection element 40 of the fourth embodiment configured as described above, as with the ESD protection element 10 of the first embodiment, the ESD protection element that can lower the discharge start voltage and improve the resistance to insulation deterioration. It becomes possible to provide an ESD protection element with small manufacturing variation.
　本発明に係る実施形態４では、実施形態１のＥＳＤ保護素子１０にさらにシール層４１を形成してＥＳＤ保護素子４０を構成したが、これに限定されるものではないことは言うまでもなく、実施形態２のＥＳＤ保護素子２０及び実施形態３のＥＳＤ保護素子３０にさらに実施形態４と同様のシール層を設けるようにしてもよい。このようにすると、放電開始電圧や絶縁列か耐性等の製造バラツキを小さくでき、品質のより安定したＥＳＤ保護素子を提供することが可能になる。 In the fourth embodiment according to the present invention, the ESD protection element 40 is formed by further forming the seal layer 41 on the ESD protection element 10 of the first embodiment. However, it is needless to say that the embodiment is not limited thereto. The ESD protection element 20 of 2 and the ESD protection element 30 of the third embodiment may be further provided with a seal layer similar to that of the fourth embodiment. In this way, it is possible to reduce manufacturing variations such as the discharge start voltage and the insulation string, and it is possible to provide an ESD protection element with more stable quality.
　以上の実施形態１～４のＥＳＤ保護素子では、空洞９を設けるようにしたが、本発明はこれに限定されるものではなく、本発明に係る放電補助電極の構成は空洞９のないＥＳＤ保護素子にも適用できる。 In the ESD protection elements of Embodiments 1 to 4 described above, the cavity 9 is provided. However, the present invention is not limited to this, and the configuration of the discharge auxiliary electrode according to the present invention is the ESD protection without the cavity 9. It can also be applied to elements.
　本発明に係る実施形態において、放電補助電極に含有させる導電性部材は、金属材料であっても良いし、半導体材料であっても良いし、金属材料及び半導体材料の両方を含むものであってもよい。 In the embodiment according to the present invention, the conductive member included in the discharge auxiliary electrode may be a metal material, a semiconductor material, or both a metal material and a semiconductor material. Also good.
　金属材料としては、Ｃｕ、Ａｇ、Ｐｄ、Ｐｔ、Ａｌ、Ｎｉ、Ｗ、Ｍｏから選択される１又は２以上の単体又はこれらの合金を用いることができる。また、これらの金属のコート粉やコアシェル粉と呼ばれる絶縁物で被覆された形態のものでもよい。 As the metal material, one or two or more simple substances selected from Cu, Ag, Pd, Pt, Al, Ni, W, and Mo, or an alloy thereof can be used. Moreover, the thing of the form coat | covered with the insulator called these metal coat powders or core-shell powder may be sufficient.
　半導体材料としては、例えば、シリコン、ゲルマニウム等の金属半導体、炭化ケイ素、炭化チタン、炭化ジルコニウム、炭化モリブデン、炭化タングステン等の炭化物、窒化チタン、窒化ジルコニウム、窒化クロム、窒化バナジウム、窒化タンタル等の窒化物、ケイ化チタン、ケイ化ジルコニウム、ケイ化タングステン、ケイ化モリブデン、ケイ化クロム、ケイ化クロム等のケイ化物、ホウ化チタン、ホウ化ジルコニウム、ホウ化クロム、ホウ化ランタン、ホウ化モリブデン、ホウ化タングステン等のホウ化物、酸化亜鉛、チタン酸ストロンチウム等の酸化物を用いることができる。特に、比較的安価で、かつ、各種粒径のバリエーションが市販されていることから、シリコンや炭化ケイ素が特に好ましい。これらの半導体材料は、適宜、単独または２種類以上を混合して使用してもよい。 Examples of semiconductor materials include metal semiconductors such as silicon and germanium, carbides such as silicon carbide, titanium carbide, zirconium carbide, molybdenum carbide, and tungsten carbide, and nitrides such as titanium nitride, zirconium nitride, chromium nitride, vanadium nitride, and tantalum nitride. , Titanium silicide, zirconium silicide, tungsten silicide, molybdenum silicide, chromium silicide, chromium silicide, and other silicides, titanium boride, zirconium boride, chromium boride, lanthanum boride, molybdenum boride, Borides such as tungsten boride, oxides such as zinc oxide and strontium titanate can be used. In particular, silicon and silicon carbide are particularly preferable because they are relatively inexpensive and various particle size variations are commercially available. These semiconductor materials may be used alone or in admixture of two or more.
　また、絶縁性材料としては、特に限定されるものではないが、フォレステライトにガラスを加えたものや、ＣａＺｒＯ３にガラスを加えたものなどを使用することができる。 Moreover, the insulating material is not particularly limited, and foresterite added with glass, CaZrO 3 added with glass, or the like can be used.
　実施例１．
　実施例１として、実施形態４に係るＥＬＤ保護素子を以下のようにして作製した。
（１）セラミックス素体８用材料の準備
　セラミックス素体８用材料として、Ｂａ、Ａｌ、Ｓｉを含むＢＡＳ材を準備する。
　具体的には、まず、比誘電率εrが４～９になるような割合で、ＢａＯ、Ａｌ２Ｏ３及びＳｉＯ２を調合、混合し、８００－１０００℃で仮焼した。
　得られた仮焼粉末をジルコニアボールミルで１２時間粉砕し、セラミックス粉末を得た。
　このセラミックス粉末に、トルエン・エキネンなどの有機溶媒を加え混合した。
　さらにバインダー及び可塑剤を加えて混合しスラリーを得る。このようにして得るスリーをドクターブレード法により成形し、厚さ50umのセラミックスグリーンシートを得た。 Example 1.
As Example 1, an ELD protection element according to Embodiment 4 was produced as follows.
(1) Preparation of material for ceramic body 8 A BAS material containing Ba, Al, and Si is prepared as a material for the ceramic body 8.
Specifically, BaO, Al 2 O 3 and SiO 2 were first prepared and mixed in such a ratio that the relative dielectric constant εr was 4 to 9, and calcined at 800-1000 ° C.
The obtained calcined powder was pulverized with a zirconia ball mill for 12 hours to obtain a ceramic powder.
To this ceramic powder, an organic solvent such as toluene and echinene was added and mixed.
Further, a binder and a plasticizer are added and mixed to obtain a slurry. The three thus obtained was molded by the doctor blade method to obtain a ceramic green sheet having a thickness of 50 μm.
（２）印刷用ペースト材料の準備
（２－１）放電電極ペーストの準備
　平均粒径１μｍのＣｕ粉末４０重量％と、平均粒径３μｍのＣｕ粉末４０重量％と、エチルセルロースをターピネオールに溶解して作製した有機ビヒクル２０重量％とを調合し、三本ロールにより混合することにより、放電電極用ペーストを作製した。 (2) Preparation of printing paste material (2-1) Preparation of discharge electrode paste 40 wt% Cu powder with an average particle diameter of 1 μm, 40 wt% Cu powder with an average particle diameter of 3 μm, and ethyl cellulose dissolved in terpineol The prepared organic vehicle was mixed with 20% by weight and mixed with three rolls to prepare a discharge electrode paste.
（２－２）補助電極ペーストの準備
（２－２－１）第１放電補助電極用ペースト（半導体比率リッチ）の準備
　第１放電補助電極は、Ｃｕ／ＳｉＣ／Ａｌ２Ｏ３の混合物からなる。
　具体的には、平均粒径が０．５μｍのＣｕ粉末、平均粒径が０．３μｍのＳｉＣ粉末、平均粒径が０．３μｍのＡｌ２Ｏ３粉末を、２０体積％：６０体積％：２０体積％の割合で調合して混合粉末を得た。この混合粉末６０重量％と、エチルセルロースをターピネオールに溶解して作製した有機ビヒクル４０重量％とを、三本ロールで撹拌、混合することにより第１放電補助電極用ペースト得た。 (2-2) Preparation of Auxiliary Electrode Paste (2-2-1) Preparation of First Discharge Auxiliary Electrode Paste (Semiconductor Ratio Rich) The first discharge auxiliary electrode is made of a mixture of Cu / SiC / Al 2 O 3. .
Specifically, Cu powder having an average particle diameter of 0.5 μm, SiC powder having an average particle diameter of 0.3 μm, and Al 2 O 3 powder having an average particle diameter of 0.3 μm are 20% by volume: 60% by volume: A mixed powder was obtained by blending at a ratio of 20% by volume. A first discharge auxiliary electrode paste was obtained by stirring and mixing 60% by weight of the mixed powder and 40% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol with three rolls.
（２－２－２）第２放電補助電極用ペースト（絶縁体比率リッチ）
　第２放電補助電極は、Ｃｕ／ＳｉＣ／Ａｌ２Ｏ３の混合物からなり、Ｃｕ、ＳｉＣ、Ａｌ２Ｏ３の割合が第１放電補助電極とは異なる。
　具体的には、平均粒径が０．５μｍのＣｕ粉末、平均粒径が０．３μｍのＳｉＣ粉末、平均粒径が０．３μｍのＡｌ２Ｏ３粉末を、２０体積％：２０体積％：６０体積％の割合で調合して混合粉末を得た。この混合粉末６０重量％と、エチルセルロースをターピネオールに溶解して作製した有機ビヒクル４０重量％とを、三本ロールで撹拌、混合することにより第１放電補助電極用ペースト得た。 (2-2-2) Second discharge auxiliary electrode paste (rich in insulator ratio)
The second discharge auxiliary electrode is made of a mixture of Cu / SiC / Al 2 O 3 , and the ratio of Cu, SiC, and Al 2 O 3 is different from that of the first discharge auxiliary electrode.
Specifically, Cu powder having an average particle diameter of 0.5 μm, SiC powder having an average particle diameter of 0.3 μm, and Al 2 O 3 powder having an average particle diameter of 0.3 μm are 20% by volume: 20% by volume: A mixed powder was obtained by blending at a ratio of 60% by volume. A first discharge auxiliary electrode paste was obtained by stirring and mixing 60% by weight of the mixed powder and 40% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol with three rolls.
（２－３）空洞形成用ペーストの準備
　平均粒径１μｍの架橋アクリル樹脂ビーズ３８重量％と、ターピネオール中にエトセル樹脂を１０重量％溶解した有機ビヒクル６２重量％とを調合し、三本ロールにより混合することにより、空洞形成用ペーストを作製した。 (2-3) Preparation of Cavity-Forming Paste 38% by weight of crosslinked acrylic resin beads having an average particle diameter of 1 μm and 62% by weight of an organic vehicle in which 10% by weight of ethocell resin is dissolved in terpineol are mixed with three rolls. By mixing, a paste for forming a cavity was produced.
（２－４）シール層用ペーストの準備
　平均粒径１μｍのＡｌ２Ｏ３粉末８０重量％と、エチルセルロースをターピネオールに溶解して作製した有機ビヒクル２０0重量％とを調合し、三本ロールにより混合することにより、シール層用ペーストを作製した。 (2-4) Preparation of seal layer paste 80% by weight of Al 2 O 3 powder having an average particle diameter of 1 μm and 200% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol are mixed and mixed by a three-roll. By doing so, the paste for seal layers was produced.
（２－５）外部電極用ペーストの準備
　平均粒径が約１μｍのＣｕ粉末を８０重量％と、転移点６２０℃、軟化点７２０℃で平均粒径が約１μｍのホウケイ酸アルカリ系ガラスフリットを５重量％と、エチルセルロースをターピネオールに溶解して作製した有機ビヒクル１５重量％とを調合し、三本ロールにより混合することにより、外部端子電極用ペーストを作製した。 (2-5) Preparation of External Electrode Paste An 80% by weight Cu powder having an average particle size of about 1 μm, an alkali borosilicate glass frit having a transition point of 620 ° C., a softening point of 720 ° C. and an average particle size of about 1 μm An external terminal electrode paste was prepared by blending 5% by weight and 15% by weight of an organic vehicle prepared by dissolving ethyl cellulose in terpineol and mixing them with three rolls.
（３）スクリーン印刷による放電部形成
（３－１）図１０及び図１１に示した実施形態４のＥＳＤ保護素子の放電部を形成する。
　具体的には、まず、先ず、セラミックスグリーンシート上へシール層ペーストを塗布した。
　次に、シール層上へ第１放電補助電極用ペーストおよび第２放電補助電極ペーストを図１０に示すように、所定の範囲に塗布した。
　次に放電電極用ペーストを、図１０に示すように、所定の範囲に塗布した。
　そして、放電電極間を覆うように空洞形成用ペーストを塗布した。
　最後に放電部全体を覆うようにシール層ペーストを再度塗布した。 (3) Discharge part formation by screen printing (3-1) The discharge part of the ESD protection element of Embodiment 4 shown in FIGS. 10 and 11 is formed.
Specifically, first, a seal layer paste was applied onto a ceramic green sheet.
Next, the 1st discharge auxiliary electrode paste and the 2nd discharge auxiliary electrode paste were apply | coated to the predetermined range on the sealing layer, as shown in FIG.
Next, the discharge electrode paste was applied in a predetermined range as shown in FIG.
Then, a cavity forming paste was applied so as to cover between the discharge electrodes.
Finally, the seal layer paste was applied again so as to cover the entire discharge part.
　本実施例１では、焼成後の素子において、第１放電電極と第２放電電極間の距離が２０μｍ、第１放電補助電極５ａの第１延在長が１０μｍ、第２放電補助電極の第２延在長が１０μｍとなるように、焼成収縮率を考慮して上記各ペーストの塗布範囲を設定した。 In Example 1, in the fired element, the distance between the first discharge electrode and the second discharge electrode is 20 μm, the first extension length of the first discharge auxiliary electrode 5a is 10 μm, and the second discharge auxiliary electrode second The application range of each paste was set in consideration of the firing shrinkage so that the extension length was 10 μm.
（４）積層、圧着
　通常のセラミックス多層基板を作製する方法と同様にして、セラミックスグリーンシートを積層し、圧着する。ここでは焼成後の厚みが０．３ｍｍとなるように積層した。 (4) Lamination and pressure bonding Ceramic green sheets are stacked and pressure-bonded in the same manner as a method for producing a normal ceramic multilayer substrate. Here, lamination was performed so that the thickness after firing was 0.3 mm.
（５）切断
　ここまでは多数の素子を集合した状態で作製しているので、ここで各素子ごとに切断する。ここでは、焼成後の大きさが１．０ｍｍ×０．５ｍｍになるように焼成収縮率を考慮して切断した。 (5) Cutting Since a large number of elements have been assembled so far, each element is cut here. Here, it cut | disconnected in consideration of the baking shrinkage so that the magnitude | size after baking might be set to 1.0 mm x 0.5 mm.
（６）焼成
　次いで、通常のセラミック多層基板と同様に、Ｎ２雰囲気中で焼成した。酸化しない電極材料の場合には、大気雰囲気でも構わない。 (6) Firing Next, firing was performed in an N 2 atmosphere in the same manner as a normal ceramic multilayer substrate. In the case of an electrode material that is not oxidized, an air atmosphere may be used.
（７）外部電極塗布、焼き付け
　焼成後、端面に電極ペーストを塗布し、焼き付けることで外部電極１ａ，３ａを形成した。 (7) External electrode application and baking After baking, the electrode paste was apply | coated to the end surface, and the external electrodes 1a and 3a were formed by baking.
（８）めっき
　外部電極１ａ，３ａ上に電解Ｎｉ－Ｓｎめっきした。 (8) Plating Electrolytic Ni—Sn plating was performed on the external electrodes 1a and 3a.
　以上のようにして実施例１のＥＳＤ保護素子を作製した。 The ESD protection element of Example 1 was produced as described above.
　実施例２．
　実施例２のＥＳＤ保護素子として、図６及び図７に示す構成の放電補助電極２５を有し、図１０及び図１１に示すシール層を形成したＥＳＤ保護素子を作製した。
　本実施例２では、焼成後の素子において、第１放電電極と第２放電電極間の距離が２０μｍ、第１放電補助電極５ａの第１延在長が１５μｍ、第２放電補助電極の第２延在長が５μｍとなるように、焼成収縮率を考慮して上記各ペーストの塗布範囲を設定した。
　その他の構成は、実施例１と同様になるように、実施例２のＥＳＤ保護素子を作製した。 Example 2
As the ESD protection element of Example 2, an ESD protection element having the discharge auxiliary electrode 25 having the configuration shown in FIGS. 6 and 7 and having the sealing layer shown in FIGS. 10 and 11 was produced.
In Example 2, in the fired element, the distance between the first discharge electrode and the second discharge electrode is 20 μm, the first extension length of the first discharge auxiliary electrode 5a is 15 μm, and the second discharge auxiliary electrode has a second length. The application range of each paste was set in consideration of the firing shrinkage rate so that the extension length was 5 μm.
The ESD protection element of Example 2 was fabricated so that the other configuration was the same as that of Example 1.
　比較例１．
　比較例１のＥＳＤ保護素子として、実施例１のＥＳＤ保護素子において、放電補助電極を第１放電補助電極のみで形成したＥＳＤ保護素子を作製した。 Comparative Example 1
As the ESD protection element of Comparative Example 1, an ESD protection element in which the discharge auxiliary electrode was formed only by the first discharge auxiliary electrode in the ESD protection element of Example 1 was produced.
　比較例２．
　比較例２のＥＳＤ保護素子として、実施例１のＥＳＤ保護素子において、放電補助電極を第２放電補助電極のみで形成したＥＳＤ保護素子を作製した。 Comparative Example 2
As an ESD protection element of Comparative Example 2, an ESD protection element in which the discharge auxiliary electrode was formed only by the second discharge auxiliary electrode in the ESD protection element of Example 1 was produced.
　評価
　以上の実施例１のＥＳＤ保護素子、実施例２のＥＳＤ保護素子、比較例１のＥＳＤ保護素子及び比較例２のＥＳＤ保護素子の放電開始電圧及び絶縁劣化耐性を評価した。その結果を以下に示す。
　放電開始電圧については、実施例２のＥＳＤ保護素子及び比較例１のＥＳＤ保護素子が最も低く、次に、実施例１のＥＳＤ保護素子が低く、比較例２のＥＳＤ保護素子が最も高くなった。
　絶縁劣化耐性については、実施例１のＥＳＤ保護素子、実施例２のＥＳＤ保護素子、比較例２のＥＳＤ保護素子は良好な結果であるが、比較例１のＥＳＤ保護素子は劣化が大きくなった。 Evaluation The ESD protection element of Example 1 above, the ESD protection element of Example 2, the ESD protection element of Comparative Example 1 and the ESD protection element of Comparative Example 2 were evaluated for the discharge start voltage and insulation degradation resistance. The results are shown below.
Regarding the discharge start voltage, the ESD protection element of Example 2 and the ESD protection element of Comparative Example 1 were the lowest, then the ESD protection element of Example 1 was the lowest, and the ESD protection element of Comparative Example 2 was the highest. .
With respect to insulation degradation resistance, the ESD protection element of Example 1, the ESD protection element of Example 2, and the ESD protection element of Comparative Example 2 were good results, but the ESD protection element of Comparative Example 1 was greatly deteriorated. .
　以上のように、本発明に係るＥＳＤ保護素子は、放電開始電圧を低くでき、絶縁性劣化耐性を向上させることができるので、幅広く種々の電子機器に適用できる。 As described above, since the ESD protection element according to the present invention can lower the discharge start voltage and improve the insulation deterioration resistance, it can be applied to a wide variety of electronic devices.
　１　第１放電電極
　１ａ，３ａ　外部電極
　３　第２放電電極
　５，２５　放電補助電極
　５ａ，２５ａ１，２５ａ２　第１放電補助電極
　５ｂ，２５ｂ　第２放電補助電極
　８　セラミック素体
　９　空洞
　１０，２０，３０，４０　ＥＳＤ保護素子１０
　４１　シール層 DESCRIPTION OF SYMBOLS 1 1st discharge electrode 1a, 3a External electrode 3 2nd discharge electrode 5,25 Discharge auxiliary electrode 5a, 25a1, 25a2 1st discharge auxiliary electrode 5b, 25b 2nd discharge auxiliary electrode 8 Ceramic element | base_body 9 Cavity 10, 20, 30 40 ESD protection element 10
41 Sealing layer

Claims (8)

  1. 　セラミック素体と、
    　前記セラミック素体に埋設された放電補助電極と、
    　前記セラミック素体に埋設され、前記放電補助電極の一方の主面に接合された第１放電電極と、
    　前記セラミック素体に埋設され、前記第１放電電極から分離するように前記放電補助電極の一方の主面に接合された第２放電電極と、
    　を備え、
    　前記放電補助電極は、
    　導電性部材を含んでなり、前記第１放電電極が接合されかつ前記第２放電電極側に延在する第１放電補助電極と、
    　前記第１放電補助電極より少ない導電性部材を含んでなる第２放電補助電極と、
    　を含むことを特徴とするＥＳＤ保護素子。     A ceramic body,
    A discharge auxiliary electrode embedded in the ceramic body;
    A first discharge electrode embedded in the ceramic body and bonded to one main surface of the discharge auxiliary electrode;
    A second discharge electrode embedded in the ceramic body and joined to one main surface of the discharge auxiliary electrode so as to be separated from the first discharge electrode;
    With
    The discharge auxiliary electrode is
    A first discharge auxiliary electrode comprising a conductive member, to which the first discharge electrode is joined and extending toward the second discharge electrode;
    A second discharge auxiliary electrode comprising fewer conductive members than the first discharge auxiliary electrode;
    An ESD protection element comprising:
  2. 　前記第２放電補助電極は、前記第２放電電極に接合されかつ前記第１放電電極側に延在する請求項１記載のＥＳＤ保護素子。 The ESD protection element according to claim 1, wherein the second discharge auxiliary electrode is joined to the second discharge electrode and extends toward the first discharge electrode.
  3. 　前記第１放電補助電極の前記第２放電電極側に延在する延在長と、前記第２放電補助電極の前記第１放電電極側に延在する延在長とが異なる請求項２に記載のＥＳＤ保護素子。 The extension length that extends to the second discharge electrode side of the first discharge auxiliary electrode is different from the extension length that extends to the first discharge electrode side of the second discharge auxiliary electrode. ESD protection element.
  4. 　前記第１放電補助電極の前記第２放電電極側に延在する延在長が、前記第２放電補助電極の前記第１放電電極側に延在する延在長より大きい請求項３に記載のＥＳＤ保護素子。 4. The extension length of the first discharge auxiliary electrode extending to the second discharge electrode side is larger than the extension length of the second discharge auxiliary electrode extending to the first discharge electrode side. ESD protection element.
  5. 　前記セラミック素体は空洞を有し、少なくとも前記第１放電電極と前記第２放電電極の間に位置する前記一方の主面が前記空洞内に露出する請求項１～４のいずれか１つに記載のＥＳＤ保護素子。 The ceramic body according to any one of claims 1 to 4, wherein the ceramic body has a cavity, and at least the one main surface located between the first discharge electrode and the second discharge electrode is exposed in the cavity. The ESD protection element as described.
  6. 　前記放電補助電極と前記セラミック素体の間に、前記セラミック素体に含まれる成分の前記放電補助電極への混入を抑制するシール層を含む請求項１～５のいずれか１つに記載のＥＳＤ保護素子。 The ESD according to any one of claims 1 to 5, further comprising a seal layer between the discharge auxiliary electrode and the ceramic element body that suppresses mixing of components contained in the ceramic element body into the discharge auxiliary electrode. Protective element.
  7. 　前記空洞内の前記セラミック素体の表面がさらに、前記シール層に覆われている請求項６に記載のＥＳＤ保護素子。 The ESD protection element according to claim 6, wherein the surface of the ceramic body in the cavity is further covered with the seal layer.
  8. 　前記導電性部材は、金属材料と半導体材料を含む請求項１～７のいずれか１つに記載のＥＳＤ保護素子。 The ESD protection element according to any one of claims 1 to 7, wherein the conductive member includes a metal material and a semiconductor material.
PCT/JP2016/067002 2015-07-24 2016-06-08 Esd protection element WO2017018063A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2017531065A JP6394808B2 (en) 2015-07-24 2016-06-08 ESD protection element

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015-146903 2015-07-24
JP2015146903 2015-07-24

Publications (1)

Publication Number Publication Date
WO2017018063A1 true WO2017018063A1 (en) 2017-02-02

Family

ID=57884648

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/067002 WO2017018063A1 (en) 2015-07-24 2016-06-08 Esd protection element

Country Status (2)

Country Link
JP (1) JP6394808B2 (en)
WO (1) WO2017018063A1 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012248326A (en) * 2011-05-25 2012-12-13 Tdk Corp Electrostatic protection component
JP2012248329A (en) * 2011-05-25 2012-12-13 Tdk Corp Electrostatic protection component

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012248326A (en) * 2011-05-25 2012-12-13 Tdk Corp Electrostatic protection component
JP2012248329A (en) * 2011-05-25 2012-12-13 Tdk Corp Electrostatic protection component

Also Published As

Publication number Publication date
JP6394808B2 (en) 2018-09-26
JPWO2017018063A1 (en) 2017-12-28

Similar Documents

Publication Publication Date Title
US8760830B2 (en) ESD protection device
WO2010067503A1 (en) Esd protection device
WO2009098944A1 (en) Esd protection device
US8503147B2 (en) ESD protection device
JP5741708B2 (en) ESD protection device
US8711537B2 (en) ESD protection device and method for producing the same
US10381806B2 (en) ESD protection device and manufacturing method for same
JP6107945B2 (en) ESD protection device
CN104521079B (en) ESD protection device
JP5614315B2 (en) ESD protection device
US10292250B2 (en) ESD protection device
JP6394808B2 (en) ESD protection element
JP5403075B2 (en) ESD protection device
US20150131193A1 (en) Esd protection device
WO2014188791A1 (en) Esd protection device
JP6390816B2 (en) ESD protection device
US10403584B2 (en) ESD protection device and method for producing the same

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16830168

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2017531065

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16830168

Country of ref document: EP

Kind code of ref document: A1