WO2016204101A1 - Ld light source device and light source device - Google Patents

Ld light source device and light source device Download PDF

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Publication number
WO2016204101A1
WO2016204101A1 PCT/JP2016/067477 JP2016067477W WO2016204101A1 WO 2016204101 A1 WO2016204101 A1 WO 2016204101A1 JP 2016067477 W JP2016067477 W JP 2016067477W WO 2016204101 A1 WO2016204101 A1 WO 2016204101A1
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Prior art keywords
light
light source
source device
laser
lds
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PCT/JP2016/067477
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French (fr)
Japanese (ja)
Inventor
蕪木　清幸
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ウシオ電機株式会社
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Publication of WO2016204101A1 publication Critical patent/WO2016204101A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/04—Optical design
    • F21V7/09—Optical design with a combination of different curvatures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/30—Elements containing photoluminescent material distinct from or spaced from the light source
    • F21V9/32—Elements containing photoluminescent material distinct from or spaced from the light source characterised by the arrangement of the photoluminescent material
    • F21V9/35—Elements containing photoluminescent material distinct from or spaced from the light source characterised by the arrangement of the photoluminescent material at focal points, e.g. of refractors, lenses, reflectors or arrays of light sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/04—Prisms

Definitions

  • the present invention relates to an LD light source device including a plurality of LDs and a light source device including the LD light source device.
  • LD laser diode
  • a light source unit in which a plurality of LDs are arranged vertically and horizontally, and the distance between the central axes of the beam bundles of laser beams from each LD are set.
  • An apparatus including a compression optical system for compression is known (see Patent Document 1).
  • the compression optical system in this LD light source device is composed of two step-like mirrors each having a plurality of light reflecting surfaces arranged in a step shape.
  • the light from the LD light source device can be easily transmitted by the condensing optical system. Can be condensed.
  • the structure of the step-like mirror that constitutes the compression optical system is complicated, and therefore the work of producing the compression optical system and the work of incorporating the compression optical system into the device are complicated. There is a problem that it is difficult to reduce the size of the apparatus. In addition, it is difficult to use light other than light that travels along the central axis of the light beam among the laser light emitted from the LD.
  • An object of the present invention is to two-dimensionally compress the distance between the central axes of the beam bundles of the laser beams emitted from each of the LDs in the light source unit, and to have a simple structure and reduce the size of the apparatus. It is an object to provide an LD light source device and a light source device including the LD light source device. In addition to the above object, another object of the present invention is to provide an LD light source device having a high utilization rate of light emitted from an LD and a light source device including the LD light source device.
  • the LD light source device of the present invention has three directions orthogonal to each other as an x direction, a y direction, and a z direction.
  • a light source unit configured such that a plurality of LD arrays, each of which is arranged in a state where a plurality of LDs emitting laser beams in the z direction are arranged apart from each other in the x direction, are arranged apart from each other in the y direction;
  • a compression optical system that two-dimensionally compresses the distance between the central axes of the beam bundles of the laser beams emitted from each of the LDs in the light source unit;
  • the compression optical system comprises an integral prism,
  • the prism includes a light incident surface facing each light emitting surface of the LD;
  • a plurality of light reflecting surfaces which are formed corresponding to each of the LD groups composed of the plurality of LDs arranged in the y direction, reflect each of the beam bundles of the laser light incident on the light incident surface in the x direction
  • a primary reflection mechanism A secondary reflection mechanism that compresses the distance between the central axes of the light beams of the laser beam reflected by the primary reflection mechanism in the y direction;
  • Each of the light reflection surfaces in the primary reflection mechanism includes a central axis of a light beam bundle of a laser beam reflected by the light reflection surface and a central axis of a light beam bundle of a laser beam reflected by an adjacent light reflection surface. The distance between them in the z direction is smaller than the distance between the centers of the light emitting surfaces of the LDs adjacent in the x direction.
  • the light reflecting surfaces adjacent to each other in the primary reflecting mechanism are continuous via a plane parallel to the light incident surface.
  • the secondary reflection mechanism includes a first light reflection surface that reflects in the y direction each of the beam bundles of the laser light reflected by the light reflection surface in the primary reflection mechanism, and the second light reflection surface is reflected by the first light reflection surface. It is preferable that the second light reflecting surface that reflects each of the beam bundles of the laser beam thus produced in the x direction is formed.
  • the light source unit includes a frame for fixing each of the LDs.
  • a reference surface extending along one plane is formed on one surface of the frame, and the prism is arranged so that the light incident surface faces the reference surface.
  • a collimating lens portion may be provided on the light incident surface of the prism corresponding to each of the LDs.
  • the light source device of the present invention includes the LD light source device described above, And a condensing optical member for condensing the laser light from the LD light source device.
  • the light source device of the present invention may have a fluorescent member that emits fluorescence when the laser light from the LD light source device is irradiated through the condensing optical member.
  • a light source device preferably has a condensing mirror that condenses the fluorescence from the fluorescent member.
  • the distance between the central axes of the beam bundles of the laser beams emitted from the LDs in the light source unit can be two-dimensionally compressed by the compression optical system.
  • the compression optical system is composed of an integral prism, the apparatus can be downsized with a simple structure.
  • the laser light emitted from the LD is along the central axis of the light beam. Since the light other than the traveling light is reflected by the plane between the adjacent light reflecting surfaces, a high light utilization rate can be obtained.
  • FIG. 1 It is a top view which shows the structure in an example of LD light source device of this invention. It is AA sectional drawing of the LD light source device shown in FIG. It is explanatory drawing which shows the structure in an example of the fiber irradiation type light source device carrying the light source device of this invention. It is explanatory drawing which shows the compression optical system provided with the collimating lens part. It is explanatory drawing which shows the modification of a compression optical system. It is explanatory drawing which shows the other modification of a compression optical system. It is explanatory drawing which shows the structure in the other example of LD light source device of this invention.
  • FIG. 1 is a plan view showing a configuration in an example of an LD light source device of the present invention.
  • FIG. 2 is a cross-sectional view taken along the line AA of the LD light source device shown in FIG. 1 and 2, the x direction, the y direction, and the z direction indicated by arrows are three directions orthogonal to each other.
  • This LD light source device 10 compresses two-dimensionally the distance between the central axes of a light bundle by a light source unit 11 having a plurality of LDs (laser diodes) 12 and laser light emitted from each of the LDs 12 in the light source unit 11.
  • the compression optical system 20 formed of an integral prism and a frame-shaped fixing member 40 that fixes the compression optical system 20 are configured. In FIG. 2, illustration of the fixing member 40 is omitted for convenience.
  • a plurality of (four in the illustrated example) LDs 12 that emit laser light in the z direction are arranged in a state of being spaced apart from each other in the x direction, whereby the x direction An LD array 13 extending in the direction is formed.
  • a plurality (two in the illustrated example) of the LD rows 13 are arranged apart from each other in the y direction.
  • the light source unit 11 is provided with a rectangular plate-like frame 15 that fixes each of the LDs 12. Specifically, a plurality of through holes 16 are formed in the frame 15 according to a pattern corresponding to the arrangement pattern of the LDs 12, and the LD 12 is fixed in each through hole 16.
  • a collimating lens 17 is disposed in each through hole 16 of the frame 15 so as to face the light emitting surface of the LD 12.
  • the collimating lens 17 is held by a holding member 18.
  • a reference surface S extending along one plane is formed on one surface (the upper surface in FIG. 2) of the frame 15 and serves as a reference for arranging the prisms constituting the compression optical system 20.
  • aluminum alloy such as ADC, cast iron such as FC, or the like can be used as a material constituting the frame 15.
  • the prism constituting the compression optical system 20 has a light incident surface 21 on which the laser light from each of the LDs 12 is incident and a light emitting surface 22 on which the laser light is emitted.
  • the light incident surface 21 is formed to face each light emitting surface of the LD 12 along a plane perpendicular to the z direction (a plane extending in the x direction and the y direction).
  • the prism constituting the compression optical system 20 is disposed in a state where the light incident surface 21 faces the reference surface S formed by one surface of the frame 15 in parallel.
  • the surface roughness Ra of the light incident surface 21 is preferably, for example, 50 nm or less.
  • the light emission surface 22 is formed by one end surface of the prism in the x direction, and is a plane perpendicular to the x direction. Further, the light incident surface 21 and the light emitting surface 22 are preferably provided with a non-reflective coating.
  • the prism constituting the compression optical system 20 has a primary reflection mechanism 25 composed of a plurality of light reflection surfaces 26.
  • Each of the light reflection surfaces 26 in the primary reflection mechanism 25 is formed in a state of being separated from each other in the x direction corresponding to each of the LD groups 14 including a plurality of LDs 12 arranged in the y direction.
  • These light reflecting surfaces 26 reflect each of the beam bundles of the laser light incident on the light incident surface 21 from each of the LDs 12 in the LD group 14 in the x direction from the z direction. It is formed in an inclined state at an angle of 45 °.
  • the surface roughness Ra of the light reflecting surface 26 is preferably, for example, 50 nm or less.
  • Each of the light reflecting surfaces 26 in the primary reflecting mechanism 25 includes a central axis Lc of the light beam reflected by the laser light reflected by the light reflecting surface 26 and a light beam emitted by the laser light reflected by the adjacent light reflecting surface 26.
  • the distance p2 in the z direction from the center axis Lc of the laser diode is formed to be smaller than the distance p1 between the centers of the light emitting surfaces of the LDs 12 adjacent in the x direction.
  • the ratio (p2 / p1) between the distance p2 between the center axes Lc of the light beams and the center distance p1 between the light emitting surfaces of the LDs 12 is, for example, 0.15 to 0.6.
  • the center-to-center distance p1 between the light emitting surfaces of the LDs 12 adjacent in the x direction is 11 mm, and the divergence angle of the emitted laser light is small (parallel to the junction surface of the stacked crystal of the LD element).
  • the distance p1 between the centers of the light emitting surfaces of the LDs 12 adjacent to each other in the x direction is 11 mm, and the fast axis direction in which the emitted laser light has a large divergence angle (the direction perpendicular to the junction surface of the stacked crystal of the LD element) is the x direction.
  • the former configuration that is, the configuration in which each of the LDs 12 in the light source unit 11 is arranged so that the slow axis direction is the x direction is preferable. .
  • the light reflection surfaces 26 adjacent to each other are continuously formed via a plane 27 parallel to the light incident surface 21.
  • the two side edges 26a and 26b extending in the y direction on the light reflecting surface 26 one side edge 26a spaced from the light incident surface 21 and two side edges on the adjacent light reflecting surface 26 26a and 26b, the other side edge 26b that is close to the light incident surface 21 has the same distance from the light incident surface 21.
  • a plane 27 parallel to the light incident surface 21 is formed between one side edge 26 a of the light reflecting surface 26 and the other side edge 26 b of the adjacent light reflecting surface 26.
  • the prism constituting the compression optical system 20 has a secondary reflection mechanism 30 that compresses the distance between the central axes of the respective light bundles reflected by the respective light reflecting surfaces 26 in the y direction.
  • the secondary reflecting mechanism 30 includes a first light reflecting surface 31 that reflects in the y direction each of the beam bundles of the laser beams traveling in the x direction reflected by the light reflecting surface 26, and the first light reflecting surface 31 reflects the light beams.
  • a second light reflecting surface 35 that reflects each of the beam bundles of the laser beam traveling in the y direction in the x direction.
  • each of the first light reflecting surfaces 31 is symmetrical with respect to a plane perpendicular to the y direction (a plane extending in the x direction and the z direction) including the central position between the two LD rows 13. In such a manner, they are formed apart from each other while being inclined at an angle of 45 ° with respect to a plane perpendicular to the x direction (a plane extending in the y direction and the z direction).
  • Each of the second light reflecting surfaces 35 is formed in a state of facing the first light reflecting surface 31 in parallel.
  • H is a cavity.
  • a part of the outer side of the light bundle by the laser beam traveling in the x direction emitted from the LD 12 of one LD array 13 and the LD 12 of the other LD array 13 are emitted.
  • a part of the outer side of the light beam by the laser beam traveling in the x direction is reflected by each of the first light reflecting surfaces 31 so as to approach each other in the y direction, and is further reflected by each of the second light reflecting surfaces 35 in the x direction. Is reflected.
  • the distance between the central axes of the light beams traveling in the x direction is substantially compressed in the y direction.
  • the light reflecting surface 26 is preferably formed using a sol-gel method.
  • the sol-gel method is a method of obtaining a solid glass from a metal alkoxide solution through a sol state and a gel state. By using this method to form the light reflecting surface 26, the light reflecting surface 26 and the flat surface 27 are formed. The boundary edge (ridge line) between them can be formed sharply.
  • an example of a method for manufacturing a prism using the sol-gel method will be described.
  • silica (SiO 2 ) particles for example, nanometer size
  • ethanol distilled water
  • hydrochloric acid or ammonia water at respective concentrations.
  • a dispersion sol
  • the dispersion is poured into a mold having a predetermined shape, and TEOS is hydrolyzed and polymerized to form a wet gel.
  • the wet gel is gradually heated to form a porous wet gel that can be transported, and this is placed in a furnace and sintered at 1300 ° C. or higher to produce a transparent quartz glass prism. .
  • each of the laser beams is incident on the light incident surface 21 of the prism constituting the compression optical system 20 via the collimating lens 17.
  • each of the light beams by the laser light that is incident on the light incident surface 21 and travels in the z direction is reflected in the x direction by each of the light reflecting surfaces 26 in the primary reflection mechanism 25.
  • the distance between the central axes of the beam bundles of the laser light traveling in the x direction is compressed in the z direction.
  • each of the beam bundles of the laser light traveling in the x direction is reflected in the y direction by each of the first light reflecting surfaces 31 in the secondary reflection mechanism 30.
  • the beam bundle of the laser beam related to the LD 12 in one LD row 13 and the beam bundle of the laser beam related to the LD 12 in the other LD row 13 approach each other in the y direction by each of the first light reflecting surfaces 31. Reflected to do.
  • each of the beam bundles of the laser light traveling in the y direction is reflected in the x direction by each of the second light reflecting surfaces 35.
  • the distance between the central axes of the beam bundles of the laser beam traveling in the x direction is compressed in the y direction. In this way, each of the beam bundles of the laser light traveling in the x direction, in which the distance between the central axes is two-dimensionally compressed, is emitted from the light emitting surface 22.
  • FIG. 3 is an explanatory diagram showing a configuration of an example of a fiber irradiation type light source device equipped with the light source device of the present invention.
  • This light source device has a housing 50, and the LD light source device 10 having the configuration shown in FIG.
  • a light reflecting member 51 that reflects the laser light L1 emitted from the LD light source device 10 in the x direction in the z direction is disposed in front of the emission surface of the compression optical system 20 in the LD light source device 10.
  • a condensing optical member 52 that condenses the laser light L ⁇ b> 1 from the light reflecting member 51 is provided in the housing 50.
  • the condensing optical member 52 is arranged such that its optical axis extends in the z direction.
  • a fluorescent member 53 that emits fluorescence L2 when the laser light L1 from the LD light source device 10 is irradiated through the condensing optical member 52 is disposed at the focal point of the condensing optical member 52.
  • a condensing mirror 55 made of an elliptical reflecting mirror that condenses the fluorescent light L2 from the fluorescent member 53 is disposed so as to be positioned at one focal point.
  • the fluorescent member 53 is held by the heat transfer plate 54.
  • an optical fiber 56 that receives and guides the fluorescent light L2 from the condensing mirror 55 is provided so as to extend from the inside of the housing 50 to the outside through the housing 50. .
  • the optical fiber 56 is disposed so that the incident end face thereof is positioned at the other focal point of the condenser mirror 55, and is fixed by the fixing member 57 in this state.
  • the LD light source device 10 is fixed to a heat sink 58 that radiates heat generated in the light source unit 11.
  • a cooling fan 59 for cooling the heat sink 58 is provided behind the heat sink 58.
  • the laser light L1 emitted from the LD light source device 10 in the x direction is reflected by the light reflecting member 51 in the z direction. Then, the laser light L1 traveling in the z direction is condensed by the condensing optical member 52 and is incident on the fluorescent member 53, whereby the fluorescent member 53 emits the fluorescent light L2.
  • the fluorescence L2 emitted from the fluorescent member 53 is collected by the condenser mirror 55 and is incident on the incident end face of the optical fiber 56.
  • the fluorescence L2 incident on the incident end face of the optical fiber 56 is guided by the optical fiber 56 and emitted from the exit end face.
  • the compression optical system 20 can two-dimensionally compress the distance between the central axes of the light beams by the laser light emitted from each of the LDs 12 in the light source unit 11. Moreover, since the compression optical system 20 is composed of an integral prism, the apparatus can be downsized with a simple structure.
  • the light reflecting surfaces 26 adjacent to each other in the primary reflecting mechanism 25 are continuous via a plane 27 parallel to the light incident surface 21, so that the central axis of the light beam out of the laser light emitted from the LD 12. Since light other than the light traveling along is reflected by the plane 27 between the adjacent light reflecting surfaces 26, a high light utilization rate is obtained.
  • the LD light source device of the present invention is not limited to the above embodiment, and various modifications can be made as follows.
  • the light incident surface 21 of the prism constituting the compression optical system 20 is provided with a collimating lens portion 23 protruding from the light incident surface 21 corresponding to each LD 12. May be.
  • the protruding height of the collimating lens part 23 from the light incident surface 21 is, for example, 2 mm.
  • the specific configuration of the secondary reflection mechanism 30 is not limited to that shown in FIG. 1 as long as the distance between the central axes of the beam bundles of the laser beam traveling in the x direction is compressed in the y direction. .
  • two first light reflecting surfaces 31 that are formed corresponding to each of the LD rows 13 and reflect each of the beam bundles of the laser beams traveling in the x direction in the same y direction. Even if the secondary reflection mechanism 30 is formed by the single second light reflecting surface 35 that reflects each of the beam bundles of the laser beams traveling in the y direction from the first light reflecting surfaces 31 in the x direction. Good.
  • a first light reflecting surface 31 that reflects only the light beam by the laser beam related to the LD 12 of one LD array 13 from the x direction to the y direction, and the first light reflecting surface 31 to the y direction.
  • the secondary reflecting mechanism 30 may be formed by the single second light reflecting surface 35 that reflects each of the light beams by the laser light traveling to the x direction in the x direction.
  • the two LD rows 13 are provided.
  • the number of LD rows 13 is not limited to two.
  • LD row 13 may be provided.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
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Abstract

Provided are: an LD light source device having a simple structure and which can be reduced in size wherein the distances between the central axes of bundles of rays from laser light emitted from an LD, are compressed two-dimensionally; and a light source device equipped with the LD light source device. This LD light source device includes: a light source portion comprising a plurality of LDs, each emitting laser light in a z direction, disposed so as to be spaced in an x direction to constitute a plurality of LD columns which are disposed so as to be spaced in a y direction; and a compression optical system for compressing two-dimensionally the distances between the central axes of the bundles of rays, each resulting from the laser light emitted from each of the LDs. The compression optical system comprises a single-body prism having: a light entrance surface facing the LDs; a primary reflection mechanism comprising a plurality of light reflection surfaces allowing a bundle of rays from laser light corresponding to an LD group containing the plurality of LDs arranged in the y direction to be reflected in the x direction; and a secondary reflection mechanism allowing the distances between the central axes of the bundles of rays from the primary reflection mechanism to be compressed in the y direction. The distances in the z direction between the central axes of the neighboring bundles of rays from the laser lights and reflected by the light reflection surface is smaller than the distances between the centers of the light emitting surfaces of LDs that are adjacent in the x direction.

Description

ＬＤ光源装置および光源装置LD light source device and light source device
　本発明は、複数のＬＤを備えたＬＤ光源装置およびこのＬＤ光源装置を備えた光源装置に関する。 The present invention relates to an LD light source device including a plurality of LDs and a light source device including the LD light source device.
　近年、光源装置においては、省エネルギー化および小型化の要請により、光源としてＬＤ（レーザダイオード）等が利用されている。このようなＬＤを有するＬＤ光源装置としては、高出力化を図るために、複数のＬＤが縦横に並ぶよう配置された光源部と、各ＬＤからのレーザ光による光線束の中心軸間距離を圧縮する圧縮光学系とを備えてなるものが知られている（特許文献１参照。）。このＬＤ光源装置における圧縮光学系は、それぞれ複数の光反射面が階段状に配置された、２つの階段状ミラーによって構成されている。
　このようなＬＤ光源装置によれば、圧縮光学系によって、各ＬＤからのレーザ光による光線束の中心軸間距離が圧縮されるため、当該ＬＤ光源装置からの光を、集光光学系によって容易に集光することができる。 In recent years, in light source devices, LD (laser diode) or the like is used as a light source in response to demands for energy saving and downsizing. As an LD light source device having such an LD, in order to increase output, a light source unit in which a plurality of LDs are arranged vertically and horizontally, and the distance between the central axes of the beam bundles of laser beams from each LD are set. An apparatus including a compression optical system for compression is known (see Patent Document 1). The compression optical system in this LD light source device is composed of two step-like mirrors each having a plurality of light reflecting surfaces arranged in a step shape.
According to such an LD light source device, since the distance between the central axes of the beam bundles of the laser beams from the respective LDs is compressed by the compression optical system, the light from the LD light source device can be easily transmitted by the condensing optical system. Can be condensed.
特許第５１５７９６１号Patent No. 5,157,961
　しかしながら、上記のＬＤ光源装置においては、圧縮光学系を構成する階段状ミラーの構造が複雑であるため、圧縮光学系を作製する作業や、圧縮光学系を装置に組み込む作業が煩雑であり、しかも、装置の小型化を図ることが困難である、という問題がある。
　また、ＬＤから出射されたレーザ光のうち、光線束の中心軸に沿って進む光以外の光を利用することが困難である。 However, in the LD light source device described above, the structure of the step-like mirror that constitutes the compression optical system is complicated, and therefore the work of producing the compression optical system and the work of incorporating the compression optical system into the device are complicated. There is a problem that it is difficult to reduce the size of the apparatus.
In addition, it is difficult to use light other than light that travels along the central axis of the light beam among the laser light emitted from the LD.
　本発明の目的は、光源部におけるＬＤの各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮することができ、しかも、構造が簡単で、装置の小型化を図ることができるＬＤ光源装置およびこれを備えた光源装置を提供することにある。
　本発明の他の目的は、上記の目的に加えて、ＬＤから出射された光の利用率が高いＬＤ光源装置およびこれを備えた光源装置を提供することにある。 An object of the present invention is to two-dimensionally compress the distance between the central axes of the beam bundles of the laser beams emitted from each of the LDs in the light source unit, and to have a simple structure and reduce the size of the apparatus. It is an object to provide an LD light source device and a light source device including the LD light source device.
In addition to the above object, another object of the present invention is to provide an LD light source device having a high utilization rate of light emitted from an LD and a light source device including the LD light source device.
　本発明のＬＤ光源装置は、互いに直交する３つの方向をｘ方向、ｙ方向およびｚ方向としたとき、
　それぞれｚ方向にレーザ光を出射する複数のＬＤがｘ方向に互いに離間して並んだ状態で配置されてなるＬＤ列の複数が、ｙ方向に離間して配置されて構成された光源部と、
　前記光源部における前記ＬＤの各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮する圧縮光学系と
を備えてなり、
　前記圧縮光学系は、一体のプリズムよりなり、
　前記プリズムは、前記ＬＤの各々の発光面に対向する光入射面と、
　ｙ方向に並ぶ複数の前記ＬＤからなるＬＤ群の各々に対応して形成された、前記光入射面に入射されたレーザ光による光線束の各々をｘ方向に反射する複数の光反射面からなる一次反射機構と、
　前記一次反射機構によって反射されたレーザ光による光線束の各々の中心軸間距離をｙ方向において圧縮する二次反射機構とを有し、
　前記一次反射機構における前記光反射面の各々は、当該光反射面によって反射されたレーザ光による光線束の中心軸と、隣接する光反射面によって反射されたレーザ光による光線束の中心軸との間のｚ方向の距離が、ｘ方向に隣接する前記ＬＤの各々の発光面の中心間距離よりも小さくなるよう形成されていることを特徴とする。 The LD light source device of the present invention has three directions orthogonal to each other as an x direction, a y direction, and a z direction.
A light source unit configured such that a plurality of LD arrays, each of which is arranged in a state where a plurality of LDs emitting laser beams in the z direction are arranged apart from each other in the x direction, are arranged apart from each other in the y direction;
A compression optical system that two-dimensionally compresses the distance between the central axes of the beam bundles of the laser beams emitted from each of the LDs in the light source unit;
The compression optical system comprises an integral prism,
The prism includes a light incident surface facing each light emitting surface of the LD;
A plurality of light reflecting surfaces, which are formed corresponding to each of the LD groups composed of the plurality of LDs arranged in the y direction, reflect each of the beam bundles of the laser light incident on the light incident surface in the x direction. A primary reflection mechanism;
A secondary reflection mechanism that compresses the distance between the central axes of the light beams of the laser beam reflected by the primary reflection mechanism in the y direction;
Each of the light reflection surfaces in the primary reflection mechanism includes a central axis of a light beam bundle of a laser beam reflected by the light reflection surface and a central axis of a light beam bundle of a laser beam reflected by an adjacent light reflection surface. The distance between them in the z direction is smaller than the distance between the centers of the light emitting surfaces of the LDs adjacent in the x direction.
　本発明のＬＤ光源装置においては、前記一次反射機構における互いに隣接する前記光反射面は、前記光入射面と平行な平面を介して連続していることが好ましい。
　また、前記二次反射機構は、前記一次反射機構における前記光反射面によって反射されたレーザ光による光線束の各々をｙ方向に反射する第１光反射面と、当該第１光反射面によって反射されたレーザ光による光線束の各々をｘ方向に反射する第２光反射面とにより構成されていることが好ましい。
　また、前記光源部は、前記ＬＤの各々を固定するフレームを有してなり、
　当該フレームの一面には、一平面に沿って延びる基準面が形成され、当該基準面に対して前記光入射面が対向するよう、前記プリズムが配置されていることが好ましい。
　また、前記プリズムの光入射面には、前記ＬＤの各々に対応してコリメートレンズ部が設けられていてもよい。 In the LD light source device of the present invention, it is preferable that the light reflecting surfaces adjacent to each other in the primary reflecting mechanism are continuous via a plane parallel to the light incident surface.
Further, the secondary reflection mechanism includes a first light reflection surface that reflects in the y direction each of the beam bundles of the laser light reflected by the light reflection surface in the primary reflection mechanism, and the second light reflection surface is reflected by the first light reflection surface. It is preferable that the second light reflecting surface that reflects each of the beam bundles of the laser beam thus produced in the x direction is formed.
The light source unit includes a frame for fixing each of the LDs.
It is preferable that a reference surface extending along one plane is formed on one surface of the frame, and the prism is arranged so that the light incident surface faces the reference surface.
In addition, a collimating lens portion may be provided on the light incident surface of the prism corresponding to each of the LDs.
　本発明の光源装置は、上記のＬＤ光源装置と、
　このＬＤ光源装置からのレーザ光を集光する集光光学部材と
を備えてなることを特徴とする。 The light source device of the present invention includes the LD light source device described above,
And a condensing optical member for condensing the laser light from the LD light source device.
　本発明の光源装置においては、前記ＬＤ光源装置からのレーザ光が前記集光光学部材を介して照射されることによって、蛍光を発する蛍光部材を有するものであってもよい。
　このような光源装置においては、前記蛍光部材からの蛍光を集光する集光ミラーを有することが好ましい。 The light source device of the present invention may have a fluorescent member that emits fluorescence when the laser light from the LD light source device is irradiated through the condensing optical member.
Such a light source device preferably has a condensing mirror that condenses the fluorescence from the fluorescent member.
　本発明によれば、圧縮光学系によって、光源部におけるＬＤの各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮することができる。しかも、圧縮光学系は一体のプリズムよりなるため、簡単な構造で、装置の小型化を図ることができる。
　また、一次反射機構における互いに隣接する光反射面が、光入射面と平行な平面を介して連続している構成によれば、ＬＤから出射されたレーザ光のうち、光線束の中心軸に沿って進む光以外の光が、隣接する光反射面の間の平面によって反射されるため、高い光の利用率が得られる。 According to the present invention, the distance between the central axes of the beam bundles of the laser beams emitted from the LDs in the light source unit can be two-dimensionally compressed by the compression optical system. Moreover, since the compression optical system is composed of an integral prism, the apparatus can be downsized with a simple structure.
Further, according to the configuration in which the light reflecting surfaces adjacent to each other in the primary reflecting mechanism are continuous via a plane parallel to the light incident surface, the laser light emitted from the LD is along the central axis of the light beam. Since the light other than the traveling light is reflected by the plane between the adjacent light reflecting surfaces, a high light utilization rate can be obtained.
本発明のＬＤ光源装置の一例における構成を示す平面図である。It is a top view which shows the structure in an example of LD light source device of this invention. 図１に示すＬＤ光源装置のＡ－Ａ断面図である。It is AA sectional drawing of the LD light source device shown in FIG. 本発明の光源装置を搭載したファイバ照射型の光源装置の一例における構成を示す説明図である。It is explanatory drawing which shows the structure in an example of the fiber irradiation type light source device carrying the light source device of this invention. コリメートレンズ部が設けられた圧縮光学系を示す説明図である。It is explanatory drawing which shows the compression optical system provided with the collimating lens part. 圧縮光学系の変形例を示す説明図である。It is explanatory drawing which shows the modification of a compression optical system. 圧縮光学系の他の変形例を示す説明図である。It is explanatory drawing which shows the other modification of a compression optical system. 本発明のＬＤ光源装置の他の例における構成を示す説明図である。It is explanatory drawing which shows the structure in the other example of LD light source device of this invention.
　以下、本発明の実施の形態について説明する。
　図１は、本発明のＬＤ光源装置の一例における構成を示す平面図である。図２は、図１に示すＬＤ光源装置のＡ－Ａ断面図である。図１および図２において、それぞれ矢印で示すｘ方向、ｙ方向およびｚ方向は、互いに直交する３つの方向である。
　このＬＤ光源装置１０は、複数のＬＤ（レーザダイオード）１２を有する光源部１１と、この光源部１１におけるＬＤ１２の各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮する、一体のプリズムよりなる圧縮光学系２０と、この圧縮光学系２０を固定する枠状の固定部材４０とにより構成されている。図２においては、便宜上、固定部材４０の図示が省略されている。 Embodiments of the present invention will be described below.
FIG. 1 is a plan view showing a configuration in an example of an LD light source device of the present invention. FIG. 2 is a cross-sectional view taken along the line AA of the LD light source device shown in FIG. 1 and 2, the x direction, the y direction, and the z direction indicated by arrows are three directions orthogonal to each other.
This LD light source device 10 compresses two-dimensionally the distance between the central axes of a light bundle by a light source unit 11 having a plurality of LDs (laser diodes) 12 and laser light emitted from each of the LDs 12 in the light source unit 11. The compression optical system 20 formed of an integral prism and a frame-shaped fixing member 40 that fixes the compression optical system 20 are configured. In FIG. 2, illustration of the fixing member 40 is omitted for convenience.
　光源部１１においては、それぞれｚ方向にレーザ光を出射する複数（図示の例では４つ）のＣＡＮパッケージ型のＬＤ１２がｘ方向に互いに離間して並んだ状態で配置されることによって、ｘ方向に伸びるＬＤ列１３が形成されている。このＬＤ列１３の複数（図示の例では２列）が、ｙ方向に離間して配置されている。
　光源部１１には、ＬＤ１２の各々を固定する矩形の板状のフレーム１５が設けられている。具体的に説明すると、フレーム１５には、ＬＤ１２の配置パターンに対応するパターンに従って複数の貫通孔１６が形成されており、各貫通孔１６内にＬＤ１２が固定されている。
　また、フレーム１５の各貫通孔１６内には、コリメートレンズ１７がＬＤ１２の発光面に対向するよう配置されている。このコリメートレンズ１７は、保持部材１８によって保持されている。
　また、フレーム１５の一面（図２において上面）には、圧縮光学系２０を構成するプリズムを配置するための基準となる、一平面に沿って延びる基準面Ｓが形成されている。
　フレーム１５を構成する材料としては、ＡＤＣ等のアルミニウム合金、ＦＣ等の鋳鉄などを用いることができる。 In the light source unit 11, a plurality of (four in the illustrated example) LDs 12 that emit laser light in the z direction are arranged in a state of being spaced apart from each other in the x direction, whereby the x direction An LD array 13 extending in the direction is formed. A plurality (two in the illustrated example) of the LD rows 13 are arranged apart from each other in the y direction.
The light source unit 11 is provided with a rectangular plate-like frame 15 that fixes each of the LDs 12. Specifically, a plurality of through holes 16 are formed in the frame 15 according to a pattern corresponding to the arrangement pattern of the LDs 12, and the LD 12 is fixed in each through hole 16.
A collimating lens 17 is disposed in each through hole 16 of the frame 15 so as to face the light emitting surface of the LD 12. The collimating lens 17 is held by a holding member 18.
Also, a reference surface S extending along one plane is formed on one surface (the upper surface in FIG. 2) of the frame 15 and serves as a reference for arranging the prisms constituting the compression optical system 20.
As a material constituting the frame 15, aluminum alloy such as ADC, cast iron such as FC, or the like can be used.
　圧縮光学系２０を構成するプリズムは、ＬＤ１２の各々からのレーザ光が入射される光入射面２１およびレーザ光が出射される光出射面２２を有する。
　光入射面２１は、ｚ方向に垂直な平面（ｘ方向およびｙ方向に延びる平面）に沿って、ＬＤ１２の各々の発光面に対向するよう形成されている。具体的には、圧縮光学系２０を構成するプリズムは、その光入射面２１がフレーム１５の一面によって形成された基準面Ｓに平行に対向した状態で配置されている。光入射面２１の表面粗さＲａは、例えば５０ｎｍ以下であることが好ましい。
　光出射面２２は、プリズムにおけるｘ方向の一端面によって形成され、ｘ方向に垂直な平面とされている。
　また、光入射面２１および光出射面２２には、無反射コートが施されていることが好ましい。 The prism constituting the compression optical system 20 has a light incident surface 21 on which the laser light from each of the LDs 12 is incident and a light emitting surface 22 on which the laser light is emitted.
The light incident surface 21 is formed to face each light emitting surface of the LD 12 along a plane perpendicular to the z direction (a plane extending in the x direction and the y direction). Specifically, the prism constituting the compression optical system 20 is disposed in a state where the light incident surface 21 faces the reference surface S formed by one surface of the frame 15 in parallel. The surface roughness Ra of the light incident surface 21 is preferably, for example, 50 nm or less.
The light emission surface 22 is formed by one end surface of the prism in the x direction, and is a plane perpendicular to the x direction.
Further, the light incident surface 21 and the light emitting surface 22 are preferably provided with a non-reflective coating.
　また、圧縮光学系２０を構成するプリズムは、複数の光反射面２６よりなる一次反射機構２５を有する。一次反射機構２５における光反射面２６の各々は、ｙ方向に並ぶ複数のＬＤ１２からなるＬＤ群１４の各々に対応して、ｘ方向に互いに離間した状態で形成されている。これらの光反射面２６は、ＬＤ群１４におけるＬＤ１２の各々から光入射面２１に入射されたレーザ光による光線束の各々を、ｚ方向からｘ方向に反射するものであり、光入射面２１に対して４５°の角度で傾斜した状態で形成されている。光反射面２６の表面粗さＲａは、例えば５０ｎｍ以下であることが好ましい。 The prism constituting the compression optical system 20 has a primary reflection mechanism 25 composed of a plurality of light reflection surfaces 26. Each of the light reflection surfaces 26 in the primary reflection mechanism 25 is formed in a state of being separated from each other in the x direction corresponding to each of the LD groups 14 including a plurality of LDs 12 arranged in the y direction. These light reflecting surfaces 26 reflect each of the beam bundles of the laser light incident on the light incident surface 21 from each of the LDs 12 in the LD group 14 in the x direction from the z direction. It is formed in an inclined state at an angle of 45 °. The surface roughness Ra of the light reflecting surface 26 is preferably, for example, 50 nm or less.
　そして、一次反射機構２５における光反射面２６の各々は、当該光反射面２６によって反射されたレーザ光による光線束の中心軸Ｌｃと、隣接する光反射面２６によって反射されたレーザ光による光線束の中心軸Ｌｃとの間のｚ方向の距離ｐ２が、ｘ方向に隣接するＬＤ１２の各々の発光面の中心間距離ｐ１よりも小さくなるよう形成されている。このような構成とすることにより、各ＬＤ１２からｚ方向に出射されたレーザ光による光線束の各々が各光反射面２６によってｘ方向に反射されたときに、ｘ方向に進む光線束の各々の中心軸間距離がｚ方向において圧縮される。 Each of the light reflecting surfaces 26 in the primary reflecting mechanism 25 includes a central axis Lc of the light beam reflected by the laser light reflected by the light reflecting surface 26 and a light beam emitted by the laser light reflected by the adjacent light reflecting surface 26. The distance p2 in the z direction from the center axis Lc of the laser diode is formed to be smaller than the distance p1 between the centers of the light emitting surfaces of the LDs 12 adjacent in the x direction. With such a configuration, when each of the light bundles of the laser light emitted from each LD 12 in the z direction is reflected in the x direction by each light reflecting surface 26, each of the light bundles traveling in the x direction. The distance between the central axes is compressed in the z direction.
　上記の各光線束の中心軸Ｌｃの間の距離ｐ２と各ＬＤ１２の発光面の中心間距離ｐ１との比（ｐ２／ｐ１）は、例えば０．１５～０．６である。
　具体的な一例を示すと、ｘ方向に隣接するＬＤ１２の発光面の中心間距離ｐ１が１１ｍｍで、出射されるレーザ光の発散角度が小さいスロー軸方向（ＬＤ素子の積層結晶の接合面に平行な方向）がｘ方向となるよう、各ＬＤ１２が配置され、コリメートレンズ１７の焦点距離が４．７ｍｍである場合には、隣接する光反射面２６によって反射されたレーザ光による光線束の中心軸Ｌｃとの間のｚ方向の距離ｐ２が２ｍｍ（ｐ２／ｐ１＝０．１８２）である。
　一方、ｘ方向に隣接するＬＤ１２の発光面の中心間距離ｐ１が１１ｍｍで、出射されるレーザ光の発散角度が大きいファスト軸方向（ＬＤ素子の積層結晶の接合面に垂直な方向）がｘ方向となるよう、各ＬＤ１２が配置された場合には、隣接する光反射面２６によって反射されたレーザ光による光線束の中心軸Ｌｃとの間のｚ方向の距離ｐ２が５ｍｍ（ｐ２／ｐ１＝０．４５４）である。
　圧縮光学系２０を構成するプリズムのｚ方向の厚さを小さくするためには、前者の構成、すなわち光源部１１におけるＬＤ１２の各々が、スロー軸方向がｘ方向となるよう配置された構成が好ましい。 The ratio (p2 / p1) between the distance p2 between the center axes Lc of the light beams and the center distance p1 between the light emitting surfaces of the LDs 12 is, for example, 0.15 to 0.6.
As a specific example, the center-to-center distance p1 between the light emitting surfaces of the LDs 12 adjacent in the x direction is 11 mm, and the divergence angle of the emitted laser light is small (parallel to the junction surface of the stacked crystal of the LD element). When the respective LDs 12 are arranged so that the x direction becomes the x direction and the focal length of the collimating lens 17 is 4.7 mm, the central axis of the light beam by the laser light reflected by the adjacent light reflecting surface 26 The distance p2 in the z direction from Lc is 2 mm (p2 / p1 = 0.182).
On the other hand, the distance p1 between the centers of the light emitting surfaces of the LDs 12 adjacent to each other in the x direction is 11 mm, and the fast axis direction in which the emitted laser light has a large divergence angle (the direction perpendicular to the junction surface of the stacked crystal of the LD element) is the x direction. When the LDs 12 are arranged such that the distance p2 in the z direction between the laser beam reflected by the adjacent light reflecting surfaces 26 and the central axis Lc of the light beam is 5 mm (p2 / p1 = 0) 454).
In order to reduce the thickness in the z direction of the prism constituting the compression optical system 20, the former configuration, that is, the configuration in which each of the LDs 12 in the light source unit 11 is arranged so that the slow axis direction is the x direction is preferable. .
　また、一次反射機構２５においては、互いに隣接する光反射面２６は、光入射面２１と平行な平面２７を介して連続して形成されている。具体的に説明すると、光反射面２６におけるｙ方向に伸びる２つの側縁２６ａ，２６ｂのうち、光入射面２１から離間した一方の側縁２６ａと、隣接する光反射面２６における２つの側縁２６ａ，２６ｂのうち、光入射面２１に接近した他方の側縁２６ｂとは、光入射面２１からの離間距離が同一とされている。そして、光反射面２６における一方の側縁２６ａと、隣接する光反射面２６における他方の側縁２６ｂとの間に、光入射面２１と平行な平面２７が形成されている。 Further, in the primary reflection mechanism 25, the light reflection surfaces 26 adjacent to each other are continuously formed via a plane 27 parallel to the light incident surface 21. Specifically, of the two side edges 26a and 26b extending in the y direction on the light reflecting surface 26, one side edge 26a spaced from the light incident surface 21 and two side edges on the adjacent light reflecting surface 26 26a and 26b, the other side edge 26b that is close to the light incident surface 21 has the same distance from the light incident surface 21. A plane 27 parallel to the light incident surface 21 is formed between one side edge 26 a of the light reflecting surface 26 and the other side edge 26 b of the adjacent light reflecting surface 26.
　また、圧縮光学系２０を構成するプリズムは、各光反射面２６によって反射された各光線束の中心軸間距離をｙ方向において圧縮する二次反射機構３０を有する。この二次反射機構３０は、光反射面２６によって反射されたｘ方向に進むレーザ光による光線束の各々をｙ方向に反射する第１光反射面３１と、この第１光反射面３１によって反射されたｙ方向に進むレーザ光による光線束の各々をｘ方向に反射する第２光反射面３５とにより構成されている。 Further, the prism constituting the compression optical system 20 has a secondary reflection mechanism 30 that compresses the distance between the central axes of the respective light bundles reflected by the respective light reflecting surfaces 26 in the y direction. The secondary reflecting mechanism 30 includes a first light reflecting surface 31 that reflects in the y direction each of the beam bundles of the laser beams traveling in the x direction reflected by the light reflecting surface 26, and the first light reflecting surface 31 reflects the light beams. And a second light reflecting surface 35 that reflects each of the beam bundles of the laser beam traveling in the y direction in the x direction.
　この例の二次反射機構３０においては、２つのＬＤ列１３に対応して、２つの第１光反射面３１および第２光反射面３５が形成されている。具体的に説明すると、第１光反射面３１の各々は、２つのＬＤ列１３の間の中央位置を含む、ｙ方向に垂直な平面（ｘ方向およびｚ方向に延びる平面）に対して互いに対称となるよう、ｘ方向に垂直な平面（ｙ方向およびｚ方向に延びる平面）に対して４５°の角度に傾斜した状態で、互いに離間して形成されている。また、第２光反射面３５の各々は、第１光反射面３１に平行に対向する状態で形成されている。図１において、Ｈは空洞である。このような構成とすることにより、一方のＬＤ列１３のＬＤ１２から出射された、ｘ方向に進むレーザ光による光線束のうち外側の一部と、他方のＬＤ列１３におけるＬＤ１２から出射された、ｘ方向に進むレーザ光による光線束のうち外側の一部とが、第１光反射面３１の各々によってｙ方向に互いに接近するよう反射され、更に、第２光反射面３５の各々によってｘ方向に反射される。これにより、ｘ方向に進む光線束の各々の中心軸間距離が実質的にｙ方向において圧縮される。 In the secondary reflection mechanism 30 of this example, two first light reflection surfaces 31 and second light reflection surfaces 35 are formed corresponding to the two LD rows 13. More specifically, each of the first light reflecting surfaces 31 is symmetrical with respect to a plane perpendicular to the y direction (a plane extending in the x direction and the z direction) including the central position between the two LD rows 13. In such a manner, they are formed apart from each other while being inclined at an angle of 45 ° with respect to a plane perpendicular to the x direction (a plane extending in the y direction and the z direction). Each of the second light reflecting surfaces 35 is formed in a state of facing the first light reflecting surface 31 in parallel. In FIG. 1, H is a cavity. By adopting such a configuration, a part of the outer side of the light bundle by the laser beam traveling in the x direction emitted from the LD 12 of one LD array 13 and the LD 12 of the other LD array 13 are emitted. A part of the outer side of the light beam by the laser beam traveling in the x direction is reflected by each of the first light reflecting surfaces 31 so as to approach each other in the y direction, and is further reflected by each of the second light reflecting surfaces 35 in the x direction. Is reflected. As a result, the distance between the central axes of the light beams traveling in the x direction is substantially compressed in the y direction.
　圧縮光学系２０を構成するプリズムにおいて、光反射面２６は、ゾルゲル法を利用して形成されていることが好ましい。ゾルゲル法は、金属アルコキシドの溶液からゾル状態、ゲル状態を経て固体のガラスを得る方法であり、この方法を利用して光反射面２６を形成することによって、光反射面２６と平面２７との間の境界縁（稜線）をシャープに形成することができる。
　以下、ゾルゲル法を利用したプリズムの作製方法の一例を示す。
　シリカ（ＳｉＯ2 ）粒子（例えばナノメートルサイズのもの）、ＴＥＯＳ（Ｓｉ（ＯＣ2 Ｈ5 ）4 ：テトラエトキシシラン）、エタノール、蒸留水、および塩酸若しくはアンモニア水を、各々の濃度で混合することによって、分散液（ゾル）を調製する。この分散液を、所定形状のモールドに注入し、ＴＥＯＳの加水分解、重合を行うことにより、湿潤ゲルを形成する。次いで、湿潤ゲルを徐々に加温し、運搬が可能な多孔質湿潤ゲルを形成し、これを炉に入れ、１３００℃以上で焼結させることによって、透明な石英ガラスのプリズムを作ることができる。 In the prism constituting the compression optical system 20, the light reflecting surface 26 is preferably formed using a sol-gel method. The sol-gel method is a method of obtaining a solid glass from a metal alkoxide solution through a sol state and a gel state. By using this method to form the light reflecting surface 26, the light reflecting surface 26 and the flat surface 27 are formed. The boundary edge (ridge line) between them can be formed sharply.
Hereinafter, an example of a method for manufacturing a prism using the sol-gel method will be described.
Mix silica (SiO 2 ) particles (for example, nanometer size), TEOS (Si (OC 2 H 5 ) 4 : tetraethoxysilane), ethanol, distilled water, and hydrochloric acid or ammonia water at respective concentrations. To prepare a dispersion (sol). The dispersion is poured into a mold having a predetermined shape, and TEOS is hydrolyzed and polymerized to form a wet gel. Then, the wet gel is gradually heated to form a porous wet gel that can be transported, and this is placed in a furnace and sintered at 1300 ° C. or higher to produce a transparent quartz glass prism. .
　上記のＬＤ光源装置１０においては、光源部１１における各ＬＤ１２からレーザ光がｚ方向に出射される。このレーザ光の各々は、コリメートレンズ１７を介して、圧縮光学系２０を構成するプリズムの光入射面２１に入射される。
　圧縮光学系２０を構成するプリズムにおいては、光入射面２１に入射されてｚ方向に進むレーザ光による光線束の各々は、一次反射機構２５における光反射面２６の各々によってｘ方向に反射される。このとき、ｘ方向に進むレーザ光による光線束の各々の中心軸間距離がｚ方向において圧縮される。
　次いで、ｘ方向に進むレーザ光による光線束の各々は、二次反射機構３０における第１光反射面３１の各々によってｙ方向に反射される。このとき、一方のＬＤ列１３におけるＬＤ１２に係るレーザ光による光線束と、他方のＬＤ列１３におけるＬＤ１２に係るレーザ光による光線束とは、第１光反射面３１の各々によってｙ方向に互いに接近するよう反射される。その後、ｙ方向に進むレーザ光による光線束の各々は、第２光反射面３５の各々によってｘ方向に反射される。これにより、ｘ方向に進むレーザ光による光線束の各々の中心軸間距離がｙ方向において圧縮される。
　このようにして、中心軸間距離が二次元的に圧縮された、ｘ方向に進むレーザ光による光線束の各々は、光出射面２２から出射される。 In the LD light source device 10 described above, laser light is emitted in the z direction from each LD 12 in the light source unit 11. Each of the laser beams is incident on the light incident surface 21 of the prism constituting the compression optical system 20 via the collimating lens 17.
In the prism constituting the compression optical system 20, each of the light beams by the laser light that is incident on the light incident surface 21 and travels in the z direction is reflected in the x direction by each of the light reflecting surfaces 26 in the primary reflection mechanism 25. . At this time, the distance between the central axes of the beam bundles of the laser light traveling in the x direction is compressed in the z direction.
Next, each of the beam bundles of the laser light traveling in the x direction is reflected in the y direction by each of the first light reflecting surfaces 31 in the secondary reflection mechanism 30. At this time, the beam bundle of the laser beam related to the LD 12 in one LD row 13 and the beam bundle of the laser beam related to the LD 12 in the other LD row 13 approach each other in the y direction by each of the first light reflecting surfaces 31. Reflected to do. Thereafter, each of the beam bundles of the laser light traveling in the y direction is reflected in the x direction by each of the second light reflecting surfaces 35. As a result, the distance between the central axes of the beam bundles of the laser beam traveling in the x direction is compressed in the y direction.
In this way, each of the beam bundles of the laser light traveling in the x direction, in which the distance between the central axes is two-dimensionally compressed, is emitted from the light emitting surface 22.
　図３は、本発明の光源装置を搭載したファイバ照射型の光源装置の一例における構成を示す説明図である。この光源装置は、筐体５０を有し、この筐体５０内には、図１に示す構成のＬＤ光源装置１０が配置されている。ＬＤ光源装置１０における圧縮光学系２０の出射面の前方には、ＬＤ光源装置１０からｘ方向に出射されたレーザ光Ｌ１をｚ方向に反射する光反射部材５１が配置されている。
　また、筐体５０内には、光反射部材５１からのレーザ光Ｌ１を集光する集光光学部材５２が設けられている。この集光光学部材５２は、その光軸がｚ方向に伸びるよう配置されている。集光光学部材５２の焦点には、ＬＤ光源装置１０からのレーザ光Ｌ１が集光光学部材５２を介して照射されることによって、蛍光Ｌ２を発する蛍光部材５３が配置され、この蛍光部材５３が一方の焦点に位置するよう、蛍光部材５３からの蛍光Ｌ２を集光する、楕円反射鏡よりなる集光ミラー５５が配置されている。蛍光部材５３は、伝熱板５４に保持されている。
　また、この光源装置には、集光ミラー５５からの蛍光Ｌ２を受光して導光する光ファイバ５６が、筐体５０の内部から当該筐体５０を貫通して外部に伸びるよう設けられている。この光ファイバ５６は、その入射端面が集光ミラー５５の他方の焦点に位置するよう配置され、この状態で、固定部材５７によって固定されている。
　また、ＬＤ光源装置１０は、光源部１１に生ずる熱を放熱するヒートシンク５８に固定されている。このヒートシンク５８の背後には、ヒートシンク５８を冷却する冷却ファン５９が設けられている。 FIG. 3 is an explanatory diagram showing a configuration of an example of a fiber irradiation type light source device equipped with the light source device of the present invention. This light source device has a housing 50, and the LD light source device 10 having the configuration shown in FIG. A light reflecting member 51 that reflects the laser light L1 emitted from the LD light source device 10 in the x direction in the z direction is disposed in front of the emission surface of the compression optical system 20 in the LD light source device 10.
A condensing optical member 52 that condenses the laser light L <b> 1 from the light reflecting member 51 is provided in the housing 50. The condensing optical member 52 is arranged such that its optical axis extends in the z direction. A fluorescent member 53 that emits fluorescence L2 when the laser light L1 from the LD light source device 10 is irradiated through the condensing optical member 52 is disposed at the focal point of the condensing optical member 52. A condensing mirror 55 made of an elliptical reflecting mirror that condenses the fluorescent light L2 from the fluorescent member 53 is disposed so as to be positioned at one focal point. The fluorescent member 53 is held by the heat transfer plate 54.
Further, in this light source device, an optical fiber 56 that receives and guides the fluorescent light L2 from the condensing mirror 55 is provided so as to extend from the inside of the housing 50 to the outside through the housing 50. . The optical fiber 56 is disposed so that the incident end face thereof is positioned at the other focal point of the condenser mirror 55, and is fixed by the fixing member 57 in this state.
The LD light source device 10 is fixed to a heat sink 58 that radiates heat generated in the light source unit 11. A cooling fan 59 for cooling the heat sink 58 is provided behind the heat sink 58.
　この光源装置においては、ＬＤ光源装置１０からｘ方向に出射されたレーザ光Ｌ１は、光反射部材５１によってｚ方向に反射される。そして、ｚ方向に進むレーザ光Ｌ１は、集光光学部材５２によって集光されて蛍光部材５３に入射され、これにより、蛍光部材５３から蛍光Ｌ２が放射される。蛍光部材５３から放射された蛍光Ｌ２は、集光ミラー５５によって集光されて光ファイバ５６の入射端面に入射される。そして、光ファイバ５６の入射端面に入射された蛍光Ｌ２は、当該光ファイバ５６によって導光されて出射端面から出射される。 In this light source device, the laser light L1 emitted from the LD light source device 10 in the x direction is reflected by the light reflecting member 51 in the z direction. Then, the laser light L1 traveling in the z direction is condensed by the condensing optical member 52 and is incident on the fluorescent member 53, whereby the fluorescent member 53 emits the fluorescent light L2. The fluorescence L2 emitted from the fluorescent member 53 is collected by the condenser mirror 55 and is incident on the incident end face of the optical fiber 56. The fluorescence L2 incident on the incident end face of the optical fiber 56 is guided by the optical fiber 56 and emitted from the exit end face.
　本発明のＬＤ光源装置１０によれば、圧縮光学系２０によって、光源部１１におけるＬＤ１２の各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮することができる。しかも、圧縮光学系２０は一体のプリズムよりなるため、簡単な構造で、装置の小型化を図ることができる。
　また、一次反射機構２５における互いに隣接する光反射面２６が、光入射面２１と平行な平面２７を介して連続していることにより、ＬＤ１２から出射されたレーザ光のうち、光線束の中心軸に沿って進む光以外の光が、隣接する光反射面２６の間の平面２７によって反射されるため、高い光の利用率が得られる。 According to the LD light source device 10 of the present invention, the compression optical system 20 can two-dimensionally compress the distance between the central axes of the light beams by the laser light emitted from each of the LDs 12 in the light source unit 11. Moreover, since the compression optical system 20 is composed of an integral prism, the apparatus can be downsized with a simple structure.
In addition, the light reflecting surfaces 26 adjacent to each other in the primary reflecting mechanism 25 are continuous via a plane 27 parallel to the light incident surface 21, so that the central axis of the light beam out of the laser light emitted from the LD 12. Since light other than the light traveling along is reflected by the plane 27 between the adjacent light reflecting surfaces 26, a high light utilization rate is obtained.
　本発明のＬＤ光源装置は、上記の実施の形態に限定されず、以下のように、種々の変更を加えることが可能である。 The LD light source device of the present invention is not limited to the above embodiment, and various modifications can be made as follows.
（１）図４に示すように、圧縮光学系２０を構成するプリズムの光入射面２１には、ＬＤ１２の各々に対応して、当該光入射面２１から突出するコリメートレンズ部２３が設けられていてもよい。コリメートレンズ部２３の光入射面２１からの突出高さは、例えば２ｍｍである。 (1) As shown in FIG. 4, the light incident surface 21 of the prism constituting the compression optical system 20 is provided with a collimating lens portion 23 protruding from the light incident surface 21 corresponding to each LD 12. May be. The protruding height of the collimating lens part 23 from the light incident surface 21 is, for example, 2 mm.
（２）二次反射機構３０の具体的な構成は、ｘ方向に進むレーザ光による光線束の各々の中心軸間距離をｙ方向において圧縮するものであれば、図１に示すものに限定されない。
　例えば、図５に示すように、ＬＤ列１３の各々に対応して形成された、それぞれｘ方向に進むレーザ光による光線束の各々を同一のｙ方向に反射する２つの第１光反射面３１と、各第１光反射面３１からｙ方向に進むレーザ光による光線束の各々をｘ方向に反射する単一の第２光反射面３５とによって、二次反射機構３０が形成されていてもよい。 (2) The specific configuration of the secondary reflection mechanism 30 is not limited to that shown in FIG. 1 as long as the distance between the central axes of the beam bundles of the laser beam traveling in the x direction is compressed in the y direction. .
For example, as shown in FIG. 5, two first light reflecting surfaces 31 that are formed corresponding to each of the LD rows 13 and reflect each of the beam bundles of the laser beams traveling in the x direction in the same y direction. Even if the secondary reflection mechanism 30 is formed by the single second light reflecting surface 35 that reflects each of the beam bundles of the laser beams traveling in the y direction from the first light reflecting surfaces 31 in the x direction. Good.
　また、図６に示すように、一方のＬＤ列１３のＬＤ１２に係るレーザ光による光線束のみをｘ方向からｙ方向に反射する第１光反射面３１と、第１光反射面３１からｙ方向に進むレーザ光による光線束の各々をｘ方向に反射する単一の第２光反射面３５とによって、二次反射機構３０が形成されていてもよい。 In addition, as shown in FIG. 6, a first light reflecting surface 31 that reflects only the light beam by the laser beam related to the LD 12 of one LD array 13 from the x direction to the y direction, and the first light reflecting surface 31 to the y direction. The secondary reflecting mechanism 30 may be formed by the single second light reflecting surface 35 that reflects each of the light beams by the laser light traveling to the x direction in the x direction.
（３）図１に示すＬＤ光源装置１０においては、２列のＬＤ列１３が設けられているが、ＬＤ列１３の数は２列に限定されず、例えば図７に示すように、４列のＬＤ列１３が設けられていてもよい。 (3) In the LD light source device 10 shown in FIG. 1, the two LD rows 13 are provided. However, the number of LD rows 13 is not limited to two. For example, as shown in FIG. LD row 13 may be provided.
１０　ＬＤ光源装置
１１　光源部
１２　ＬＤ
１３　ＬＤ列
１４　ＬＤ群
１５　フレーム
１６　貫通孔
１７　コリメートレンズ
１８　保持部材
２０　圧縮光学系
２１　光入射面
２２　光出射面
２３　コリメートレンズ部
２５　一次反射機構
２６　光反射面
２６ａ，２６ｂ　側縁
２７　平面
３０　二次反射機構
３１　第１光反射面
３５　第２光反射面
４０　固定部材
５０　筐体
５１　光反射部材
５２　集光光学部材
５３　蛍光部材
５４　伝熱板
５５　集光ミラー
５６　光ファイバ
５７　固定部材
５８　ヒートシンク
５９　冷却ファン
Ｈ　　空洞
Ｌｃ　光線束の中心軸
Ｌ１　レーザ光
Ｌ２　蛍光
Ｓ　　基準面 10 LD light source device 11 Light source unit 12 LD
13 LD array 14 LD group 15 Frame 16 Through-hole 17 Collimating lens 18 Holding member 20 Compression optical system 21 Light incident surface 22 Light emitting surface 23 Collimating lens unit 25 Primary reflection mechanism 26 Light reflecting surfaces 26a and 26b Side edge 27 Plane 30 Second Next reflecting mechanism 31 First light reflecting surface 35 Second light reflecting surface 40 Fixing member 50 Housing 51 Light reflecting member 52 Condensing optical member 53 Fluorescent member 54 Heat transfer plate 55 Condensing mirror 56 Optical fiber 57 Fixing member 58 Heat sink 59 Cooling fan H Cavity Lc Center axis L1 of light beam Laser light L2 Fluorescence S Reference plane

Claims (8)

  1. 　互いに直交する３つの方向をｘ方向、ｙ方向およびｚ方向としたとき、
    　それぞれｚ方向にレーザ光を出射する複数のＬＤがｘ方向に互いに離間して並んだ状態で配置されてなるＬＤ列の複数が、ｙ方向に離間して配置されて構成された光源部と、
    　前記光源部における前記ＬＤの各々から出射されたレーザ光による光線束の中心軸間距離を二次元的に圧縮する圧縮光学系と
    を備えてなり、
    　前記圧縮光学系は、一体のプリズムよりなり、
    　前記プリズムは、前記ＬＤの各々の発光面に対向する光入射面と、
    　ｙ方向に並ぶ複数の前記ＬＤからなるＬＤ群の各々に対応して形成された、前記光入射面に入射されたレーザ光による光線束の各々をｘ方向に反射する複数の光反射面からなる一次反射機構と、
    　前記一次反射機構によって反射されたレーザ光による光線束の各々の中心軸間距離をｙ方向において圧縮する二次反射機構とを有し、
    　前記一次反射機構における前記光反射面の各々は、当該光反射面によって反射されたレーザ光による光線束の中心軸と、隣接する光反射面によって反射されたレーザ光による光線束の中心軸との間のｚ方向の距離が、ｘ方向に隣接する前記ＬＤの各々の発光面の中心間距離よりも小さくなるよう形成されていることを特徴とするＬＤ光源装置。     When three directions orthogonal to each other are defined as an x direction, a y direction, and a z direction,
    A light source unit configured such that a plurality of LD arrays, each of which is arranged in a state where a plurality of LDs emitting laser beams in the z direction are arranged apart from each other in the x direction, are arranged apart from each other in the y direction;
    A compression optical system that two-dimensionally compresses the distance between the central axes of the beam bundles of the laser beams emitted from each of the LDs in the light source unit;
    The compression optical system comprises an integral prism,
    The prism includes a light incident surface facing each light emitting surface of the LD;
    A plurality of light reflecting surfaces, which are formed corresponding to each of the LD groups composed of the plurality of LDs arranged in the y direction, reflect each of the beam bundles of the laser light incident on the light incident surface in the x direction. A primary reflection mechanism;
    A secondary reflection mechanism that compresses the distance between the central axes of the light beams of the laser beam reflected by the primary reflection mechanism in the y direction;
    Each of the light reflection surfaces in the primary reflection mechanism includes a central axis of a light beam bundle of a laser beam reflected by the light reflection surface and a central axis of a light beam bundle of a laser beam reflected by an adjacent light reflection surface. An LD light source device, wherein the distance in the z direction is smaller than the distance between the centers of the light emitting surfaces of the LDs adjacent in the x direction.
  2. 　前記一次反射機構における互いに隣接する前記光反射面は、前記光入射面と平行な平面を介して連続していることを特徴とする請求項１に記載のＬＤ光源装置。 2. The LD light source device according to claim 1, wherein the light reflecting surfaces adjacent to each other in the primary reflecting mechanism are continuous via a plane parallel to the light incident surface.
  3. 　前記二次反射機構は、前記一次反射機構における前記光反射面によって反射されたレーザ光による光線束の各々をｙ方向に反射する第１光反射面と、当該第１光反射面によって反射されたレーザ光による光線束の各々をｘ方向に反射する第２光反射面とにより構成されていることを特徴とする請求項１または請求項２に記載のＬＤ光源装置。 The secondary reflection mechanism is reflected by the first light reflection surface, the first light reflection surface reflecting in the y direction each of the light beams by the laser light reflected by the light reflection surface in the primary reflection mechanism, and the second light reflection surface 3. The LD light source device according to claim 1, wherein the LD light source device is configured by a second light reflecting surface that reflects each of the beam bundles of the laser light in the x direction.
  4. 　前記光源部は、前記ＬＤの各々を固定するフレームを有してなり、
    　当該フレームの一面には、一平面に沿って延びる基準面が形成され、当該基準面に対して前記光入射面が対向するよう、前記プリズムが配置されていることを特徴とする請求項１乃至請求項３のいずれかに記載のＬＤ光源装置。     The light source unit includes a frame for fixing each of the LDs.
    A reference surface extending along one plane is formed on one surface of the frame, and the prism is arranged so that the light incident surface faces the reference surface. The LD light source device according to claim 3.
  5. 　前記プリズムの光入射面には、前記ＬＤの各々に対応してコリメートレンズ部が設けられていることを特徴とする請求項１乃至請求項４のいずれかに記載のＬＤ光源装置。 The LD light source device according to any one of claims 1 to 4, wherein a collimating lens portion is provided on the light incident surface of the prism corresponding to each of the LDs.
  6. 　請求項１乃至請求項５のいずれかに記載のＬＤ光源装置と、
    　このＬＤ光源装置からのレーザ光を集光する集光光学部材と
    を備えてなることを特徴とする光源装置。     The LD light source device according to any one of claims 1 to 5,
    A light source device comprising: a condensing optical member that condenses laser light from the LD light source device.
  7. 　前記ＬＤ光源装置からのレーザ光が前記集光光学部材を介して照射されることによって、蛍光を発する蛍光部材を有することを特徴とする請求項６に記載の光源装置。 The light source device according to claim 6, further comprising a fluorescent member that emits fluorescence when the laser light from the LD light source device is irradiated through the condensing optical member.
  8. 　前記蛍光部材からの蛍光を集光する集光ミラーを有することを特徴とする請求項７に記載の光源装置。 The light source device according to claim 7, further comprising a condensing mirror that condenses the fluorescence from the fluorescent member.
PCT/JP2016/067477 2015-06-17 2016-06-13 Ld light source device and light source device WO2016204101A1 (en)

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