WO2016133189A1 - Composition for forming biocompatible coating film - Google Patents

Composition for forming biocompatible coating film Download PDF

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Publication number
WO2016133189A1
WO2016133189A1 PCT/JP2016/054799 JP2016054799W WO2016133189A1 WO 2016133189 A1 WO2016133189 A1 WO 2016133189A1 JP 2016054799 W JP2016054799 W JP 2016054799W WO 2016133189 A1 WO2016133189 A1 WO 2016133189A1
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coating film
group
substrate
composition
carbon atoms
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PCT/JP2016/054799
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French (fr)
Japanese (ja)
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高広 岸岡
横山 義之
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日産化学工業株式会社
富山県
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Priority to JP2017500748A priority Critical patent/JP6706728B2/en
Publication of WO2016133189A1 publication Critical patent/WO2016133189A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D133/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/04Homopolymers or copolymers of esters
    • C09D133/14Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D133/00Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Coating compositions based on derivatives of such polymers
    • C09D133/24Homopolymers or copolymers of amides or imides
    • C09D133/26Homopolymers or copolymers of acrylamide or methacrylamide
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D201/00Coating compositions based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D7/00Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
    • C09D7/40Additives
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers

Definitions

  • the present invention relates to a composition for forming a biocompatible coating film.
  • coating materials having biocompatibility that are harmless to biological substances have attracted attention.
  • examples of the use include a coating material for forming a coating film having an ability to suppress adhesion of biological substances, a coating material used for a cell culture substrate that improves cell culture efficiency, and the like.
  • Patent Document 1 describes a method for producing a plate for cell culture, which includes using a photosensitive resin composition containing an alcohol-based organic solvent (S).
  • biocompatible fibers and the like can be produced using a composition containing a specific polymer compound capable of forming a crosslinked structure using an acid as a catalyst (international patent).
  • synthetic resins plastics
  • the solvent that can dissolve the polymer compound is limited.
  • An object of the present invention is to provide a coating film forming composition or the like that can form a biocompatible coating film without eroding the substrate.
  • the present invention is as follows.
  • a biocompatible coating film-forming composition comprising (A) an organic polymer and (D) methoxy alcohol having 2 to 5 carbon atoms as a solvent.
  • (D) the methoxy alcohol having 2 to 5 carbon atoms is 2-methoxyethanol.
  • the organic polymer (A) is (A1) General formula (1):
  • R 1 represents a hydrogen atom or a methyl group
  • Q 1 represents an ester bond or an amide bond
  • R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms.
  • An aromatic hydrocarbon group is shown.
  • the (A1) organic polymer is General formula (2):
  • R 3 represents a hydrogen atom or a methyl group
  • R 4 and R 5 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydroxy group or a carboxy group.
  • [8] The base material according to [7], wherein the base material includes polystyrene.
  • a method for producing a substrate having a coating film on the surface comprising a step of forming a coating film on the surface of the substrate using the composition according to any one of [1] to [6].
  • a substrate having on the surface a pattern formed using the composition according to [6].
  • a pattern including a step of forming a coating film on the surface of the substrate using the composition according to [6], a step of irradiating the coating film with light, and a step of developing the coating film after exposure A manufacturing method of a substrate with a mark.
  • the composition for forming a biocompatible coating film of the present invention (hereinafter, also simply referred to as “the composition of the present invention”) is used, the biocompatible coating is performed without eroding the substrate (particularly, the resin substrate).
  • a film can be formed.
  • the composition of this invention contains a photo-acid generator, it can form the coating film which has photosensitivity.
  • a biocompatible coating film pattern can be formed by photolithography.
  • the said base material with a pattern can be manufactured.
  • the composition of this invention can form the coating film which has temperature responsiveness, for example, when the temperature responsive organic polymer containing the structural unit represented by following General formula (2) is used. In this case, a specific patterned substrate having temperature responsiveness can be manufactured and provided.
  • FIG. 2 is a graph showing the results of a sensitivity test of the composition for forming a coating film obtained in Example 1.
  • the vertical axis represents the film thickness (nm) of the coating film
  • the horizontal axis represents the exposure dose (mJ / cm 2 ).
  • 3 is a graph showing the results of a patterning test of the coating film forming composition obtained in Example 1.
  • FIG. The vertical axis shows the thickness (nm) of the part with the pattern (coating film) and the part without the pattern (nm)
  • the horizontal axis shows the width ( ⁇ m) of the part with the pattern (coating film) and the part without the pattern.
  • the biocompatible coating film-forming composition of the present invention is mainly characterized in that it contains (A) an organic polymer and (D) methoxy alcohol having 2 to 5 carbon atoms as a solvent.
  • the organic polymer is not particularly limited as long as it can be used in the composition for forming a coating film, but is preferably at least one selected from a hydroxy group, a hydroxymethyl group, and an alkoxymethyl group having 1 to 5 carbon atoms. It is an organic polymer containing a structural unit having a seed organic group in the side chain.
  • Examples of the (A) organic polymer include vinyl polymer polymer reacted with olefin, polyamide, polyester, polycarbonate, polyurethane, (meth) acryl polymer polymerized (meth) acrylate compound, and the like. Not limited.
  • (A) organic polymers are preferably those obtained by radical polymerization, but those obtained by polycondensation or polyaddition reaction can also be used.
  • a vinyl polymer polymer reacted with an olefin or a (meth) acryl polymer polymerized with a (meth) acrylate compound is particularly desirable.
  • the (meth) acrylate compound refers to both an acrylate compound and a methacrylate compound.
  • (meth) acrylic acid refers to acrylic acid and methacrylic acid.
  • alkoxymethyl group having 1 to 5 carbon atoms may be either linear or branched, and specific examples thereof include methoxymethyl group, ethoxymethyl group, n-propoxymethyl group, Propoxymethyl group, n-butoxymethyl group, isobutoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group, n-pentoxymethyl group, isopentoxymethyl group, neopentoxymethyl group, tert-pentoxy Examples thereof include a methyl group, 1-ethylpropoxymethyl group, 2-methylbutoxymethyl group and the like.
  • the number of carbon atoms of the alkoxymethyl group is preferably 1 to 4, more preferably 1 to 3.
  • Component A1 (A)
  • the organic polymer is preferably represented by the general formula (1):
  • R 1 represents a hydrogen atom or a methyl group
  • Q 1 represents an ester bond or an amide bond
  • R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms.
  • An aromatic hydrocarbon group is shown.
  • R 1 represents a hydrogen atom or a methyl group.
  • Q 1 represents an ester bond or an amide bond.
  • R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms.
  • An aromatic hydrocarbon group is shown.
  • the “alkoxymethyl group having 1 to 5 carbon atoms” may be linear or branched, and specific examples thereof are the same as those described above, and suitable carbon atoms are the same as described above. It is.
  • alkyl group having 1 to 10 carbon atoms may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, Isobutyl group, sec-butyl group, tert-butyl group, n-pentyl group, isopentyl group, neopentyl group, tert-pentyl group, 1-ethylpropyl group, n-hexyl group, isohexyl group, 1,1-dimethylbutyl group 2,2-dimethylbutyl group, 3,3-dimethylbutyl group, 2-ethylbutyl group, hexyl group, pentyl group, octyl group, nonyl group, decyl group and the like.
  • the number of carbon atoms of the alkyl group is preferably 1-6, more preferably 1-4.
  • Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms in R 2 include a phenyl group, a 1-naphthyl group, and a 2-naphthyl group.
  • R 2 is formed using the composition of the present invention when the composition of the present invention contains a photoacid generator (B) described later and imparts photosensitivity to a coating film formed using the photo acid generator.
  • a photoacid generator (B) described later and imparts photosensitivity to a coating film formed using the photo acid generator.
  • at least one hydrogen atom is a hydroxy group, a hydroxymethyl group, or a carbon atom from the viewpoint of allowing (B) a photoacid generator as a catalyst to act as a reactive crosslinking reaction site after exposure of the applied coating film.
  • An alkyl group having 1 to 10 (more preferably 1 to 6, particularly preferably 1 to 4) carbon atoms substituted by an alkoxymethyl group having 1 to 5 carbon atoms (more preferably a hydroxy group), or at least one A phenyl group in which a hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms (more preferably a hydroxy group).
  • R 1 is a hydrogen atom or a methyl group
  • Q 1 is an ester bond
  • R 2 is substituted with at least one hydrogen atom by a hydroxy group.
  • the alkyl group is preferably an alkyl group having 1 to 10 carbon atoms (more preferably 1 to 6, particularly preferably 1 to 4).
  • the structural unit represented by the general formula (1) is preferably a structural unit represented by the general formula (1A).
  • Component A1 may contain one type of structural unit represented by general formula (1), or may contain two or more types.
  • Component A1 may contain structural units other than the structural unit represented by general formula (1) as long as the object of the present invention is not impaired, and is represented by general formula (1) for all structural units of component A1.
  • the content of the structural unit is preferably 5 mol% or more, more preferably 15 mol% or more, from the viewpoint of efficiently performing the crosslinking reaction.
  • Component A1 is further represented by general formula (2):
  • R 3 represents a hydrogen atom or a methyl group
  • R 4 and R 5 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydroxy group or a carboxy group.
  • Component A1 may contain one type of structural unit represented by general formula (2), or may contain two or more types.
  • the “alkyl group having 1 to 4 carbon atoms” in R 4 and R 5 in the general formula (2) may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, n -Propyl group, isopropyl group, n-butyl group and isobutyl group can be mentioned.
  • “may be substituted with a hydroxy group or a carboxy group” means that part or all of the hydrogen atoms contained in the above “alkyl group having 1 to 4 carbon atoms” are substituted with a hydroxy group or a carboxy group. Indicates that it may be.
  • R 3 is more preferably a hydrogen atom or a methyl group
  • both R 4 and R 5 are more preferably a methyl group.
  • the weight average molecular weight of component A1 is preferably in the range of 1,000 to 1,000,000, more preferably in the range of 5,000 to 500,000, particularly from the viewpoint of forming an appropriate coating film thickness.
  • the range is preferably 10,000 to 200,000.
  • “weight average molecular weight” means a molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).
  • Component A1 may be used alone or in combination of two or more.
  • Component A1 can be produced by a method known per se or a method analogous thereto.
  • a monomer corresponding to each structural unit (a monomer corresponding to the structural unit represented by the general formula (1), a structural unit other than the structural unit represented by the general formula (1) (preferably the general formula The monomer corresponding to the structural unit represented by (2)) in a suitable solvent (eg, propylene glycol monoethyl ether, etc.) and a suitable polymerization initiator (eg, 2,2′-azobis).
  • a suitable solvent eg, propylene glycol monoethyl ether, etc.
  • a suitable polymerization initiator eg, 2,2′-azobis
  • Examples of the monomer corresponding to the structural unit represented by the general formula (1) include 2-hydroxyethyl (meth) acrylate (for example, a compound having CAS number: 868-77-9), 2-hydroxypropyl ( (Meth) acrylate (for example, a compound having CAS number: 923-26-2), 4-hydroxybutyl (meth) acrylate (for example, a compound having CAS number: 2478-10-6), N-hydroxymethyl (meth) acrylamide ( For example, a compound having CAS number: 923-02-4), N- (2-hydroxyethyl) (meth) acrylamide (for example, a compound having CAS number: 5238-56-2), N- (2-hydroxypropyl) ( (Meth) acrylamide (for example, a compound having CAS number: 26099-09-2), p-hydroxy (meth) actyl Examples include ruanilide (for example, a compound having CAS number: 19243-95-9), N-methoxymethyl (meth) acryl
  • 2-hydroxyethyl (meth) acrylate 2-hydroxy Propyl (meth) acrylate, N-methoxymethyl (meth) acrylamide or N-butoxymethyl (meth) acrylamide is preferred, and 2-hydroxyethyl (meth) acrylate is most preferred.
  • Examples of the monomer corresponding to the structural unit represented by the general formula (2) include N-isopropyl (meth) acrylamide, N- (1-methylpropyl) (meth) acrylamide, and N- (1-ethylpropyl). ) (Meth) acrylamide, N- (1-propylbutyl) (meth) acrylamide, N- (1-butylpentyl) (meth) acrylamide, 2-carboxyisopropyl (meth) acrylamide, 2-hydroxyisopropyl (meth) acrylamide, etc.
  • N-isopropyl (meth) acrylamide, 2-carboxyisopropyl (meth) acrylamide or 2-hydroxyisopropyl (meth) acrylamide is most preferable.
  • component A1 has a structural unit represented by general formula (2)
  • the coating film formed using the composition of the present invention has temperature responsiveness.
  • the content ratio of the structural unit represented by the general formula (2) with respect to all the structural units of the component A1 is preferably 60 to 95 mol%.
  • the coating film formed using the composition of the present invention has temperature responsiveness, so that, for example, a coating film pattern whose size changes with temperature can be formed.
  • a drug delivery system that allows water or a drug to stay in or release from the coating film or application to a drug sheet, and (ii) control the hydrophobicity / hydrophilicity of the surface. This is advantageous in that application to devices that can control the adhesion of substances is expected.
  • Component A1 may further contain an arbitrary structural unit in addition to the structural unit represented by the general formula (1) and the structural unit represented by the general formula (2).
  • Such an arbitrary structural unit does not impair the performance of the coating film formed using the composition of the present invention, and the monomer corresponding to the structural unit represented by the general formula (1) and the general formula (2) If it is a structural unit derived from the monomer which can superpose
  • Examples of such monomers include (meth) acrylic acid esters having 1 to 10 carbon atoms in the alkyl group, benzyl (meth) acrylate, acrylamides (eg, acrylamide, N-alkylacrylamide, N- Arylacrylamide, N, N-dialkylacrylamide, N, N-diarylacrylamide, N-methyl-N-phenylacrylamide, N-2-acetamidoethyl-N-acetylacrylamide, etc.), methacrylamides (eg, methacrylamide, N -Alkyl methacrylamide, N-aryl methacrylamide, N, N-dialkyl methacrylamide, N, N-diaryl methacrylamide, N-methyl-N-phenyl methacrylamide, N-ethyl-N-phenyl methacrylamide, etc.) It is done.
  • acrylamides eg, acrylamide, N-alkylacrylamide, N- Arylacrylamide, N
  • component A1 may be used alone or in combination of two or more.
  • a (meth) acrylic acid ester having 1 to 10 carbon atoms in the alkyl group having a hydrophobic side chain or benzyl (meth) acrylate is used, the hydrophilicity / hydrophobicity balance of component A1 can be adjusted. it can.
  • the content of component A in the coating film forming composition of the present invention is suitable for forming a coating film with an appropriate thickness and for coating film formation excluding the solvent from the viewpoint of storage stability of the coating film forming composition of the present invention.
  • the amount is preferably 60 to 95% by weight, more preferably 70 to 90% by weight, based on the solid content of the composition.
  • the coating film forming composition of the present invention may contain (B) a photoacid generator (hereinafter also simply referred to as “component B”).
  • Component B is not particularly limited as long as it is a compound that generates an acid directly or indirectly upon exposure.
  • a diazomethane compound, an onium salt compound, a sulfonimide compound, a nitrobenzyl compound, an iron arene complex, a benzoin tosylate compound, Examples include halogen-containing triazine compounds, cyano group-containing oxime sulfonate compounds, and naphthalimide compounds.
  • diazomethane compound examples include bis (p-toluenesulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, and bis (2,4-dimethylphenylsulfonyl) diazomethane. .
  • onium salt compound examples include bis (4-tert-butylphenyl) iodonium trifluoromethanesulfonate, triphenylsulfonium trifluoromethanesulfonate, and the like.
  • sulfonimide compound examples include N- (trifluoromethanesulfonyloxy) succinimide, N- (nonafluoro-normalbutanesulfonyloxy) succinimide, N- (camphorsulfonyloxy) succinimide, N- (trifluoromethanesulfonyloxy) naphthalimide, and the like. Is mentioned.
  • nitrobenzyl compound examples include 2-nitrobenzyl p-toluenesulfonate, 2,6-dinitrobenzyl p-toluenesulfonate, 2,4-dinitrobenzyl p-toluenesulfonate, and the like.
  • iron arene complex examples include biscyclopentadienyl- ( ⁇ 6-isopropylbenzene) -iron (II) hexafluorophosphate.
  • benzoin tosylate compound examples include benzoin tosylate and ⁇ -methylbenzoin tosylate.
  • halogen-containing triazine compound examples include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl) -4,6-bis. (Trichloromethyl) -1,3,5-triazine, 2- [2- (2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- [2- ( 5-methyl-2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine and the like.
  • Examples of the cyano group-containing oxime sulfonate compound include ⁇ - (methylsulfonyloxyimino) -4-methoxybenzyl cyanide, ⁇ - (trifluoromethylsulfonyloxyimino) -4-methoxybenzyl cyanide, ⁇ - (ethyl And sulfonyloxyimino) -4-methoxybenzyl cyanide, ⁇ - (propylsulfonyloxyimino) -4-methylbenzyl cyanide, and the like.
  • naphthalimide compounds include 6- (n-butylthio) -2- (perfluorobutylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione, 6- (n-butylthio) -2 -(Trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione and 6- (isopropylthio) -2- (trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1, 3-dione and the like can be mentioned.
  • the photoacid generator is preferably a naphthalimide compound, more preferably 6- (n-butylthio) -2- (perfluorobutylsulfonyloxy) -2-aza-2H-phenalene-1,3. -Dione, 6- (n-butylthio) -2- (trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione and 6- (isopropylthio) -2- (trifluoromethylsulfonyloxy) ) -2-aza-2H-phenalene-1,3-dione.
  • the content of (B) the photoacid generator is such that the coating film forming composition of the present invention obtains good patterning performance by exposure.
  • the solid content of the composition for forming a coating film excluding the solvent it is preferably 0.1 to 20% by weight, more preferably 0.5 to 15% by weight, and still more preferably 1 to 13% by weight.
  • composition for forming a coating film of the present invention contains (B) a photoacid generator, only one type of (B) photoacid generator may be used, or two or more types may be used in combination.
  • the composition for forming a coating film of the present invention preferably contains (C) a cross-linking agent (hereinafter also simply referred to as “component C”) that reacts with a reactive group in the presence of an acid.
  • component C a cross-linking agent
  • a crosslinking agent may use only 1 type and may use 2 or more types together.
  • the organic polymer can be crosslinked without a crosslinking agent (self-crosslinking).
  • the composition for forming a coating film of the present invention may not contain (C) a crosslinking agent.
  • Component C is not particularly limited as long as it reacts with the reactive group in the presence of an acid, and those usually used in the field of photosensitive compositions can be used in the present invention.
  • component C examples include glycoluril compounds and melamine compounds.
  • glycoluril compound examples include 1,3,4,6-tetrakis (methoxymethyl) glycoluril, 1,3,4,6-tetrakis (ethoxymethyl) glycoluril, 1,3,4,6-tetrakis ( And propoxymethyl) glycoluril and 1,3,4,6-tetrakis (butoxymethyl) glycoluril.
  • Examples of the melamine compound include hexamethoxymethyl melamine, hexaethoxymethyl melamine, hexapropoxymethyl melamine, hexabutoxymethyl melamine and the like.
  • Component C is preferably a glycoluril compound, more preferably 1,3,4,6-tetrakis (methoxymethyl) glycoluril, 1,3,4,6-tetrakis (ethoxymethyl) glycoluril, It is at least one selected from the group consisting of 3,4,6-tetrakis (propoxymethyl) glycoluril and 1,3,4,6-tetrakis (butoxymethyl) glycoluril, more preferably 1,3,4 , 6-tetrakis (methoxymethyl) glycoluril.
  • component C When component C is used, its content is preferably 0.1 to 40, based on the solid content of the coating film forming composition excluding the solvent, in order to obtain good patterning characteristics and sufficient temperature responsiveness.
  • % By weight, more preferably 0.5 to 30% by weight, still more preferably 1 to 20% by weight.
  • composition for forming a coating film of the present invention contains (D) a methoxy alcohol having 2 to 5 carbon atoms (hereinafter also simply referred to as “component D”) as a solvent.
  • component D a methoxy alcohol having 2 to 5 carbon atoms
  • the composition of the present invention can form a biocompatible coating film without particularly eroding the resin substrate.
  • methoxy alcohol having 2 to 5 carbon atoms examples include methoxymethanol (CAS number; 4461-52-3), 2-methoxyethanol (CAS number; 109-86-4), 2-methoxy-1-propanol. (CAS number; 1589-47-5), 3-methoxy-1-propanol (CAS number; 1589-49-7), 2-methoxy-1-butanol (CAS number; 15467-25-1), 3-methoxy -1-butanol (CAS number; 2517-43-3) and the like.
  • the number of carbon atoms of the methoxy alcohol is preferably 2-4, more preferably 3-4.
  • Component D is preferably 2-methoxyethanol (CAS number; 109-86-4, alternatively named ethylene glycol monomethyl ether, methyl cellosolve, methyl glycol).
  • the content of component D is Preferably, it is 50 to 99.5% by weight, more preferably 70 to 99.5% by weight, and still more preferably 85 to 99% by weight.
  • the content ratio of component A in the coating film forming composition of the present invention (that is, the content of component A based on the composition for forming a coating film) is suitable for the production of a coating film having an appropriate thickness or the coating film of the present invention. From the viewpoint of storage stability of the forming composition, 0.1 to 90% by weight is preferable, and 0.5 to 70% by weight is more preferable.
  • the content ratio of component B in the composition for forming a coating film (that is, the content of component B based on the composition for forming a coating film) is: From the viewpoint of maintaining the characteristics of the temperature-responsive resin, it is preferably 0.01 to 50% by weight, more preferably 0.05 to 40% by weight, and particularly preferably 0.1 to 20% by weight.
  • the weight ratio of component A and component B (weight of component A / weight of component B) contained in the composition for forming a coating film of the present invention is: From the viewpoint of reaction efficiency between component A and component B, 0.01 to 50 is preferable, and 0.1 to 40 is more preferable.
  • the content ratio of component C in the composition for forming a coating film of the present invention (that is, the content of component C based on the composition for forming a coating film) Is preferably from 0.01 to 15% by weight, more preferably from 0.03 to 10% by weight, particularly preferably from 0.05 to 5% by weight, from the viewpoint of reaction efficiency with Component A.
  • the coating film-forming composition of the present invention may contain additives as necessary in addition to the components A to D as long as the object of the present invention is not significantly impaired.
  • the additive include a surfactant, a rheology modifier, a drug, and fine particles.
  • composition for forming a coating film of the present invention is prepared by mixing component A and component D, and optionally mixing component B and / or component C, or further mixing the above additives.
  • the mixing method is not particularly limited, and may be mixed by a method known per se or a method analogous thereto.
  • the substrate having a coating film formed using the coating film forming composition of the present invention on at least a part of the surface is obtained by applying the coating film forming composition of the present invention by a method such as spin coating or slit coating. It can manufacture by forming a coating film in at least one part of the surface of a base material by apply
  • the present invention also provides a substrate having such a coating film.
  • the patterned substrate of the present invention is a step of forming a coating film on at least a part of the surface of the substrate using the coating film forming composition of the present invention containing at least Component A, Component B and Component D, It can be manufactured by a manufacturing method including a patterning step by photolithography (specifically, a step of irradiating the coating film with light and a step of developing the coating film after exposure).
  • the present invention also provides such a patterned substrate.
  • the substrate with a pattern of the present invention may be a substrate having one type of pattern produced using only one type of composition for forming a coating film of the present invention.
  • the base material which has 2 or more types of patterns manufactured using 2 or more types may be sufficient.
  • the shape of the pattern is not particularly limited, and when observed from the upper side of the substrate, for example, a square shape, a round shape, a linear shape, a line and space, and the like can be mentioned. When two or more patterns having different response temperatures exist, they may be formed adjacent to each other or may be formed apart from each other. There is no particular limitation on the size of the pattern observed from above and the height observed from the pattern cross section.
  • the size of the pattern (that is, the width of one side of the square, the diameter of the circle, the width of the line, the line and space line width and space width, etc.) is, for example, 0.1 to 1000 ⁇ m, and the height of the pattern is, for example, 5 nm to 1000 ⁇ m.
  • the shape of these patterns can be controlled by using a plurality of masks having different shapes of transmitted light during the exposure process.
  • the patterned substrate of the present invention can be produced by a method known per se, for example, the method described below.
  • the composition for forming a coating film of the present invention containing at least Component A, Component B, and Component D is applied to a substrate by a method such as spin coating or slit coating, and the solvent is removed to remove the surface of the substrate.
  • a coating film is formed on at least a part.
  • g-line (wavelength 436 nm), h-line (wavelength 405 nm), i-line (wavelength 365 nm), ultraviolet light, deep ultraviolet light, electron beam, various lasers (eg, KrF excimer laser (wavelength 248 nm), ArF excimer)
  • light such as laser (wavelength 193 nm)
  • excimer laser such as F2 excimer laser (wavelength 157 nm)
  • mercury lamp light, LED light, etc. is irradiated through a mask in order to obtain a desired pattern, the acid is exposed only at the exposed portion. Is generated, thereby causing cross-linking (curing).
  • g-line (wavelength 436 nm), h-line (wavelength 405 nm), i-line (wavelength 365 nm), ultraviolet rays, deep ultraviolet rays, and electron beams are preferably used for the coating film of the present invention.
  • PEB post-exposure baking
  • the coated film after exposure is developed with a developer or the like, and an unexposed portion (uncured portion of the coating film) is removed to produce a substrate with a pattern.
  • the base material which has 2 or more types of patterns can be manufactured by repeating the said operation for every composition for coating film formation from which a composition differs.
  • Examples of the base material used for the base material having a coating film and the base material with a pattern include metals, metalloids, metal-containing compounds, metalloid-containing compounds, and resins.
  • a biocompatible coating film can be formed without eroding the resin substrate, and therefore the present invention is particularly useful when a resin substrate is used.
  • metal or semimetal examples include aluminum, nickel titanium, stainless steel (SUS304, SUS316, SUS316L, etc.), silicon, and the like.
  • metal-containing compound or metalloid-containing compound examples include ceramics, metal oxide or metalloid oxide (glass, silicon oxide, alumina, etc.), metal carbide or metalloid carbide, metal nitride or metalloid nitride (nitriding). Silicon, etc.), metal borides, metalloid borides and the like.
  • the resin may be a natural resin, a modified natural resin, or a synthetic resin.
  • natural resins include cellulose.
  • modified natural resin include cellulose triacetate (CTA), cellulose on which dextran sulfate is immobilized, and the like.
  • Examples of the synthetic resin include polyacrylonitrile (PAN), polyester polymer alloy (PEPA), polystyrene (PS), polysulfone (PSF), polyethylene terephthalate (PET), polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), Examples include polyurethane (PU), ethylene vinyl alcohol (EVAL), polyethylene (PE), polyester (PE), polypropylene (PP), polyvinylidene fluoride (PVDF), polyethersulfone (PES), and poly-N-isopropylacrylamide.
  • PAN polyacrylonitrile
  • PEPA polyester polymer alloy
  • PS polystyrene
  • PSF polysulfone
  • PET polyethylene terephthalate
  • PMMA polymethyl methacrylate
  • PVA polyvinyl alcohol
  • Examples include polyurethane (PU), ethylene vinyl alcohol (EVAL), polyethylene (PE), polyester (PE), polypropylene (PP), polyvinylidene fluoride (PVDF),
  • the content of the structural unit derived from N-isopropylacrylamide with respect to all the structural units of the organic polymer 1 is 80 mol%, and the structure derived from 2-hydroxyethyl acrylate.
  • the content ratio of the unit is 20 mol%.
  • the weight average molecular weight of the organic polymer 1 was 19,000 in terms of polystyrene.
  • Organic polymer 1 0.5 g, crosslinking agent (1,3,4,6-tetrakis (methoxymethyl) glycoluril) 0.035 g, photoacid generator (6- (n-butylthio) -2- (tri Fluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione) (0.075 g) and 2-methoxyethanol (50.2 g) were added to obtain a coating film forming composition 1.
  • Coating film-forming compositions 2 to 18 were obtained in the same manner as in Example 1 except that 2-methoxyethanol in Example 1 was changed to the solvents shown in Table 1.
  • the coating film forming composition 1 was applied onto a silicon wafer using a spin coater, and pre-baked on a hot plate at 80 ° C. for 1 minute to form a coating film on the silicon wafer.
  • the coating film was exposed using an i-line aligner PLA-501 (manufactured by Canon Inc.) while changing the exposure amount. It was then post-exposure baked (PEB) in an oven at 80 ° C. for 20 hours. After the exposure, the baked coating film was exposed to isopropyl alcohol for 1 minute, and then rinsed with shaking at 60 ° C. for 3 minutes. Thereafter, the coating film was dried at 60 ° C. for 10 minutes, and the thickness of the coating film in the exposure area was measured. The results are shown in FIG. In addition, the same result as the above was obtained also when it carried out like the above except having changed the time of post-exposure baking (PEB) from 20 hours to 5 hours.
  • PEB post-exposure baking
  • the coating film forming composition 1 was applied onto a Nunc Thermonox cover slip (made of polyester) (Thermo Fisher Scientific, Inc.) using a spin coater, and prebaked on a hot plate at 80 ° C. for 1 minute. A coating film was formed on the wafer.
  • a line pattern mask with an interval of 20 ⁇ m that is, a mask with an opening width of 20 ⁇ m and a mask width of 20 ⁇ m
  • PEB post-exposure baked
  • the baked coating film was exposed to isopropyl alcohol for 1 minute, and then rinsed with shaking at 60 ° C. for 3 minutes. Then, it was made to dry at 60 degreeC for 10 minute (s), and the base material with a pattern was obtained.
  • the surface of the substrate with the pattern is observed using an atomic force microscope (AFM) (“Dimension Icon” manufactured by Bruker AXS Co., Ltd.). The thickness and width of the missing part were measured. The results are shown in FIG.
  • the base material (base material with a pattern) which has a favorable pattern (a line and space pattern with a line width of 20 ⁇ m and a space width of 20 ⁇ m) was obtained from the coating film forming composition 1.
  • composition for forming a biocompatible coating of the present invention is particularly useful when a biocompatible coating film is formed on a resin substrate.

Abstract

The present invention provides a composition for forming a biocompatible coating film on a substrate (e.g., resinous substrate). The present invention relates to a composition for forming biocompatible coating films which comprises (A) an organic polymer and (D) a C2-5 methoxy alcohol as a solvent. The organic polymer (A) preferably includes a structural unit having, in a side chain, at least one organic group selected from among a hydroxy group, a hydroxymethyl group, and C1-5 alkoxymethyl groups.

Description

生体適合性塗布膜形成用組成物Biocompatible coating film forming composition
 本発明は、生体適合性塗布膜形成用組成物に関する。 The present invention relates to a composition for forming a biocompatible coating film.
 近年、生体物質(細胞やたんぱく質)等に無害である生体適合性を有する塗布材料が注目されている。その用途としては、生体物質の付着抑制能を有する塗布膜を形成する塗布材料や、細胞培養効率を向上させる細胞培養基材に使用する塗布材料等が挙げられる。 In recent years, coating materials having biocompatibility that are harmless to biological substances (cells and proteins) have attracted attention. Examples of the use include a coating material for forming a coating film having an ability to suppress adhesion of biological substances, a coating material used for a cell culture substrate that improves cell culture efficiency, and the like.
 特許文献1には、アルコール系有機溶剤(S)を含む感光性樹脂組成物を使用することを含む、細胞培養用プレートの作製方法が記載されている。 Patent Document 1 describes a method for producing a plate for cell culture, which includes using a photosensitive resin composition containing an alcohol-based organic solvent (S).
特開2014-23508号公報JP 2014-23508 A
 本出願人によって、酸を触媒として架橋構造を形成し得る特定の高分子化合物を含む組成物を用いて、生体適合性を有する繊維等を製造し得ることが既に見出されている(国際特許出願PCT/JP2014/077716)。 It has already been found by the present applicant that biocompatible fibers and the like can be produced using a composition containing a specific polymer compound capable of forming a crosslinked structure using an acid as a catalyst (international patent). Application PCT / JP2014 / 0777716).
 上記の組成物を塗布する材料(基材)としては、その用途、ハンドリングの観点から、合成樹脂(プラスチック)製のものが主流となっているが、合成樹脂を侵食せず、かつ上記特定の高分子化合物を溶解できる溶剤は限られている。 As a material (base material) to which the above composition is applied, synthetic resins (plastics) are mainly used from the viewpoint of its use and handling. The solvent that can dissolve the polymer compound is limited.
 本発明の目的は、基材を侵食することなく、生体適合性塗布膜を形成できる塗布膜形成用組成物等を提供することにある。 An object of the present invention is to provide a coating film forming composition or the like that can form a biocompatible coating film without eroding the substrate.
 即ち、本発明は以下の通りである。 That is, the present invention is as follows.
[1](A)有機重合体と、溶剤として(D)炭素原子数2~5のメトキシアルコールとを含む、生体適合性塗布膜形成用組成物。
[2]上記(D)炭素原子数2~5のメトキシアルコールが、2-メトキシエタノールである、[1]記載の組成物。
[3]上記(A)有機重合体が、ヒドロキシ基、ヒドロキシメチル基及び炭素原子数1~5のアルコキシメチル基から選ばれる少なくとも1種の有機基を側鎖に有する構造単位を含む有機重合体を含む、[1]又は[2]記載の組成物。
[4]上記(A)有機重合体が、
(A1)一般式(1):
[1] A biocompatible coating film-forming composition comprising (A) an organic polymer and (D) methoxy alcohol having 2 to 5 carbon atoms as a solvent.
[2] The composition according to [1], wherein (D) the methoxy alcohol having 2 to 5 carbon atoms is 2-methoxyethanol.
[3] The organic polymer (A) wherein the organic polymer comprises a structural unit having at least one organic group selected from a hydroxy group, a hydroxymethyl group and an alkoxymethyl group having 1 to 5 carbon atoms in the side chain. The composition according to [1] or [2].
[4] The organic polymer (A) is
(A1) General formula (1):
Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003
〔式中、
 Rは、水素原子又はメチル基を示し、
 Qは、エステル結合又はアミド結合を示し、
 Rは、少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基で置換されている炭素原子数1~10のアルキル基又は炭素原子数6~10の芳香族炭化水素基を示す。〕
で表される構造単位を含む有機重合体を含む、[1]~[3]のいずれか1つに記載の組成物。
[5]上記(A1)有機重合体が、
 一般式(2):
[Where,
R 1 represents a hydrogen atom or a methyl group,
Q 1 represents an ester bond or an amide bond,
R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms. An aromatic hydrocarbon group is shown. ]
The composition according to any one of [1] to [3], comprising an organic polymer comprising a structural unit represented by:
[5] The (A1) organic polymer is
General formula (2):
Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004
〔式中、
 Rは、水素原子又はメチル基を示し、
 RおよびRは、同一または異なっていてもよく、水素原子又はヒドロキシ基若しくはカルボキシ基で置換されていてもよい炭素原子数1~4のアルキル基を示す。〕
で表される構造単位をさらに含む、[4]記載の組成物。
[6]さらに(B)光酸発生剤を含む、[1]~[5]のいずれか1つに記載の組成物。
[7][1]~[6]のいずれか1つに記載の組成物で形成された塗布膜を表面に有する基材。
[8]基材がポリスチレンを含む、[7]記載の基材。
[9]基材の表面に、[1]~[6]のいずれか1つに記載の組成物を用いて塗布膜を形成する工程を含む、表面に塗布膜を有する基材の製造方法。
[10]基材がポリスチレンを含む、[9]記載の製造方法。
[11][6]記載の組成物を用いて形成されたパターンを表面に有する基材。
[12]基材の表面に、[6]記載の組成物を用いて塗布膜を形成する工程、該塗布膜に光を照射する工程、及び露光後の塗布膜を現像する工程を含む、パターン付き基材の製造方法。
[13]基材の表面に、[6]記載の組成物を用いて塗布膜を形成する工程、該塗布膜に光を照射する工程、及び露光後の塗布膜を現像する工程を含む、パターン形成方法。
[Where,
R 3 represents a hydrogen atom or a methyl group,
R 4 and R 5 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydroxy group or a carboxy group. ]
The composition according to [4], further comprising a structural unit represented by:
[6] The composition according to any one of [1] to [5], further comprising (B) a photoacid generator.
[7] A substrate having on its surface a coating film formed of the composition according to any one of [1] to [6].
[8] The base material according to [7], wherein the base material includes polystyrene.
[9] A method for producing a substrate having a coating film on the surface, comprising a step of forming a coating film on the surface of the substrate using the composition according to any one of [1] to [6].
[10] The production method according to [9], wherein the substrate contains polystyrene.
[11] A substrate having on the surface a pattern formed using the composition according to [6].
[12] A pattern including a step of forming a coating film on the surface of the substrate using the composition according to [6], a step of irradiating the coating film with light, and a step of developing the coating film after exposure A manufacturing method of a substrate with a mark.
[13] A pattern including a step of forming a coating film on the surface of the substrate using the composition according to [6], a step of irradiating the coating film with light, and a step of developing the coating film after exposure Forming method.
 本発明の生体適合性塗布膜形成用組成物(以下、単に「本発明の組成物」とも称する)を用いれば、基材(特に、樹脂製基材)を侵食することなく、生体適合性塗布膜が形成可能である。
 また本発明の組成物は、光酸発生剤を含有する場合、感光性を有する塗布膜を形成し得る。この場合、フォトリソグラフィ法にて生体適合性塗布膜パターンの形成が可能である。また当該特定のパターン付き基材を製造できる。
 また本発明の組成物は、例えば、下記一般式(2)で表される構造単位を含む、温度応答性の有機重合体を用いた場合、温度応答性を有する塗布膜を形成し得る。この場合、温度応答性を有する特定のパターン付き基材を製造し提供することができる。
When the composition for forming a biocompatible coating film of the present invention (hereinafter, also simply referred to as “the composition of the present invention”) is used, the biocompatible coating is performed without eroding the substrate (particularly, the resin substrate). A film can be formed.
Moreover, when the composition of this invention contains a photo-acid generator, it can form the coating film which has photosensitivity. In this case, a biocompatible coating film pattern can be formed by photolithography. Moreover, the said base material with a pattern can be manufactured.
Moreover, the composition of this invention can form the coating film which has temperature responsiveness, for example, when the temperature responsive organic polymer containing the structural unit represented by following General formula (2) is used. In this case, a specific patterned substrate having temperature responsiveness can be manufactured and provided.
実施例1で得られた塗布膜形成用組成物の感度試験の結果を示すグラフである。縦軸は塗布膜の膜厚(nm)を示し、横軸は露光量(mJ/cm)を示す。2 is a graph showing the results of a sensitivity test of the composition for forming a coating film obtained in Example 1. The vertical axis represents the film thickness (nm) of the coating film, and the horizontal axis represents the exposure dose (mJ / cm 2 ). 実施例1で得られた塗布膜形成用組成物のパターンニング試験の結果を示すグラフである。縦軸はパターン(塗布膜)がある部分およびパターンが無い部分の厚さ(nm)を示し、横軸はパターン(塗布膜)がある部分およびパターンが無い部分の幅(μm)を示す。3 is a graph showing the results of a patterning test of the coating film forming composition obtained in Example 1. FIG. The vertical axis shows the thickness (nm) of the part with the pattern (coating film) and the part without the pattern (nm), and the horizontal axis shows the width (μm) of the part with the pattern (coating film) and the part without the pattern.
<塗布膜形成用組成物>
 本発明の生体適合性塗布膜形成用組成物は、(A)有機重合体と、溶剤として(D)炭素原子数2~5のメトキシアルコールとを含むことが主たる特徴である。
<Composition for forming coating film>
The biocompatible coating film-forming composition of the present invention is mainly characterized in that it contains (A) an organic polymer and (D) methoxy alcohol having 2 to 5 carbon atoms as a solvent.
(成分A)
 (A)有機重合体は、塗布膜形成用組成物に使用可能であれば、特に制限されないが、好ましくはヒドロキシ基、ヒドロキシメチル基及び炭素原子数1~5のアルコキシメチル基から選ばれる少なくとも1種の有機基を側鎖に有する構造単位を含む有機重合体である。当該(A)有機重合体としては、例えば、オレフィンが反応したビニル重合ポリマー、ポリアミド、ポリエステル、ポリカーボネート、ポリウレタン、(メタ)アクリレート化合物を重合させた(メタ)アクリルポリマー等が挙げられるが、これらに制限されない。これらの(A)有機重合体は、ラジカル重合して得られたものが望ましいが、重縮合、重付加反応させたものも使用できる。これらの中でも特にオレフィンが反応したビニル重合ポリマー又は(メタ)アクリレート化合物を重合させた(メタ)アクリルポリマーが望ましい。
 なお、本発明では(メタ)アクリレート化合物とは、アクリレート化合物とメタクリレート化合物の両方をいう。例えば(メタ)アクリル酸は、アクリル酸とメタクリル酸をいう。
(Component A)
(A) The organic polymer is not particularly limited as long as it can be used in the composition for forming a coating film, but is preferably at least one selected from a hydroxy group, a hydroxymethyl group, and an alkoxymethyl group having 1 to 5 carbon atoms. It is an organic polymer containing a structural unit having a seed organic group in the side chain. Examples of the (A) organic polymer include vinyl polymer polymer reacted with olefin, polyamide, polyester, polycarbonate, polyurethane, (meth) acryl polymer polymerized (meth) acrylate compound, and the like. Not limited. These (A) organic polymers are preferably those obtained by radical polymerization, but those obtained by polycondensation or polyaddition reaction can also be used. Among these, a vinyl polymer polymer reacted with an olefin or a (meth) acryl polymer polymerized with a (meth) acrylate compound is particularly desirable.
In the present invention, the (meth) acrylate compound refers to both an acrylate compound and a methacrylate compound. For example, (meth) acrylic acid refers to acrylic acid and methacrylic acid.
 ここで、「炭素原子数1~5のアルコキシメチル基」は、直鎖状又は分岐鎖状のいずれでもよく、その具体例としては、メトキシメチル基、エトキシメチル基、n-プロポキシメチル基、イソプロポキシメチル基、n-ブトキシメチル基、イソブトキシメチル基、sec-ブトキシメチル基、tert-ブトキシメチル基、n-ペントキシメチル基、イソペントキシメチル基、ネオペントキシメチル基、tert-ペントキシメチル基、1-エチルプロポキシメチル基、2-メチルブトキシメチル基等が挙げられる。該アルコキシメチル基の炭素原子数は、好ましくは1~4であり、より好ましくは1~3である。 Here, the “alkoxymethyl group having 1 to 5 carbon atoms” may be either linear or branched, and specific examples thereof include methoxymethyl group, ethoxymethyl group, n-propoxymethyl group, Propoxymethyl group, n-butoxymethyl group, isobutoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group, n-pentoxymethyl group, isopentoxymethyl group, neopentoxymethyl group, tert-pentoxy Examples thereof include a methyl group, 1-ethylpropoxymethyl group, 2-methylbutoxymethyl group and the like. The number of carbon atoms of the alkoxymethyl group is preferably 1 to 4, more preferably 1 to 3.
(成分A1)
 (A)有機重合体は、好ましくは、一般式(1):
(Component A1)
(A) The organic polymer is preferably represented by the general formula (1):
Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005
〔式中、
 Rは、水素原子又はメチル基を示し、
 Qは、エステル結合又はアミド結合を示し、
 Rは、少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基で置換されている炭素原子数1~10のアルキル基又は炭素原子数6~10の芳香族炭化水素基を示す。〕
で表される構造単位を含む有機重合体(以下、単に「成分A1」とも称する)を含む。より好ましくは、(A)有機重合体は、成分A1である。
[Where,
R 1 represents a hydrogen atom or a methyl group,
Q 1 represents an ester bond or an amide bond,
R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms. An aromatic hydrocarbon group is shown. ]
The organic polymer containing the structural unit represented by (Hereinafter, it is also only called "component A1."). More preferably, the (A) organic polymer is component A1.
 一般式(1)における各基の定義について、以下に詳述する。 The definition of each group in the general formula (1) will be described in detail below.
 Rは、水素原子又はメチル基を示す。 R 1 represents a hydrogen atom or a methyl group.
 Qは、エステル結合又はアミド結合を示す。 Q 1 represents an ester bond or an amide bond.
 Rは、少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基で置換されている炭素原子数1~10のアルキル基又は炭素原子数6~10の芳香族炭化水素基を示す。
 「炭素原子数1~5のアルコキシメチル基」は、直鎖状又は分岐鎖状のいずれでもよく、その具体例としては、上記と同様のものが挙げられ、好適な炭素原子数も上記と同様である。
 「炭素原子数1~10のアルキル基」は、直鎖状又は分岐鎖状のいずれでもよく、その具体例としては、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基、sec-ブチル基、tert-ブチル基、n-ペンチル基、イソペンチル基、ネオペンチル基、tert-ペンチル基、1-エチルプロピル基、n-ヘキシル基、イソヘキシル基、1,1-ジメチルブチル基、2,2-ジメチルブチル基、3,3-ジメチルブチル基、2-エチルブチル基、ヘキシル基、ペンチル基、オクチル基、ノニル基、デシル基等が挙げられる。該アルキル基の炭素原子数は、好ましくは1~6であり、より好ましくは1~4である。
 また、Rにおける炭素原子数6~10の芳香族炭化水素基としては、例えば、フェニル基、1-ナフチル基、2-ナフチル基等が挙げられる。
 Rは、本発明の組成物に後述の(B)光酸発生剤を含有させ、これを用いて形成された塗布膜に感光性を付与した場合に、本発明の組成物を用いて形成された塗布膜の露光後に、(B)光酸発生剤を触媒として反応性を有する架橋反応部位として作用させる観点から、好ましくは、少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基(より好ましくはヒドロキシ基)で置換されている炭素原子数1~10(より好ましくは1~6、特に好ましくは1~4)のアルキル基、又は少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基(より好ましくはヒドロキシ基)で置換されているフェニル基である。
R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms. An aromatic hydrocarbon group is shown.
The “alkoxymethyl group having 1 to 5 carbon atoms” may be linear or branched, and specific examples thereof are the same as those described above, and suitable carbon atoms are the same as described above. It is.
The “alkyl group having 1 to 10 carbon atoms” may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, Isobutyl group, sec-butyl group, tert-butyl group, n-pentyl group, isopentyl group, neopentyl group, tert-pentyl group, 1-ethylpropyl group, n-hexyl group, isohexyl group, 1,1-dimethylbutyl group 2,2-dimethylbutyl group, 3,3-dimethylbutyl group, 2-ethylbutyl group, hexyl group, pentyl group, octyl group, nonyl group, decyl group and the like. The number of carbon atoms of the alkyl group is preferably 1-6, more preferably 1-4.
Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms in R 2 include a phenyl group, a 1-naphthyl group, and a 2-naphthyl group.
R 2 is formed using the composition of the present invention when the composition of the present invention contains a photoacid generator (B) described later and imparts photosensitivity to a coating film formed using the photo acid generator. Preferably, at least one hydrogen atom is a hydroxy group, a hydroxymethyl group, or a carbon atom from the viewpoint of allowing (B) a photoacid generator as a catalyst to act as a reactive crosslinking reaction site after exposure of the applied coating film. An alkyl group having 1 to 10 (more preferably 1 to 6, particularly preferably 1 to 4) carbon atoms substituted by an alkoxymethyl group having 1 to 5 carbon atoms (more preferably a hydroxy group), or at least one A phenyl group in which a hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms (more preferably a hydroxy group).
 一般式(1)で表される構造単位は、Rが、水素原子又はメチル基であり、Qが、エステル結合であり、Rが、少なくとも1個の水素原子がヒドロキシ基で置換されている炭素原子数1~10(より好ましくは1~6、特に好ましくは1~4)のアルキル基であることが好ましい。 In the structural unit represented by the general formula (1), R 1 is a hydrogen atom or a methyl group, Q 1 is an ester bond, and R 2 is substituted with at least one hydrogen atom by a hydroxy group. The alkyl group is preferably an alkyl group having 1 to 10 carbon atoms (more preferably 1 to 6, particularly preferably 1 to 4).
 一般式(1)で表される構造単位は、好ましくは、一般式(1A)で表される構造単位である。 The structural unit represented by the general formula (1) is preferably a structural unit represented by the general formula (1A).
Figure JPOXMLDOC01-appb-C000006
Figure JPOXMLDOC01-appb-C000006
 〔式中、Rは上記Rと同義であり、Rは上記Rと同義である。〕 [Wherein R 6 has the same meaning as R 1 above, and R 7 has the same meaning as R 2 above. ]
 成分A1は、一般式(1)で表される構造単位を1種単独で含んでもよいし、2種以上含んでもよい。 Component A1 may contain one type of structural unit represented by general formula (1), or may contain two or more types.
 成分A1は、本発明の目的を損なわない限り、一般式(1)で表される構造単位以外の構造単位を含んでもよく、成分A1の全構造単位に対する、一般式(1)で表される構造単位の含有割合は、架橋反応を効率的に行わせる観点から、5モル%以上が好ましく、15モル%以上がより好ましい。 Component A1 may contain structural units other than the structural unit represented by general formula (1) as long as the object of the present invention is not impaired, and is represented by general formula (1) for all structural units of component A1. The content of the structural unit is preferably 5 mol% or more, more preferably 15 mol% or more, from the viewpoint of efficiently performing the crosslinking reaction.
 成分A1は、さらに一般式(2): Component A1 is further represented by general formula (2):
Figure JPOXMLDOC01-appb-C000007
Figure JPOXMLDOC01-appb-C000007
〔式中、
 Rは、水素原子又はメチル基を示し、
 RおよびRは、同一または異なっていてもよく、水素原子又はヒドロキシ基若しくはカルボキシ基で置換されていてもよい炭素原子数1~4のアルキル基を示す。〕
で表される構造単位を含むことが望ましい。
[Where,
R 3 represents a hydrogen atom or a methyl group,
R 4 and R 5 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydroxy group or a carboxy group. ]
It is desirable to contain the structural unit represented by these.
 成分A1は、一般式(2)で表される構造単位を1種単独で含んでもよいし、2種以上含んでもよい。 Component A1 may contain one type of structural unit represented by general formula (2), or may contain two or more types.
 一般式(2)のRおよびRにおける「炭素原子数1~4のアルキル基」は、直鎖状又は分岐鎖状のいずれでもよく、その具体例としては、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、イソブチル基を挙げることができる。
 本発明において「ヒドロキシ基若しくはカルボキシ基で置換されていてもよい」とは上記「炭素原子数1~4のアルキル基」に含まれる水素原子の一部又は全部がヒドロキシ基若しくはカルボキシ基で置換されていてもよいことを示す。
 一般式(2)で表される構造単位は、Rが、水素原子又はメチル基であり、RおよびRがともにメチル基であるのがより好ましい。
The “alkyl group having 1 to 4 carbon atoms” in R 4 and R 5 in the general formula (2) may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, n -Propyl group, isopropyl group, n-butyl group and isobutyl group can be mentioned.
In the present invention, “may be substituted with a hydroxy group or a carboxy group” means that part or all of the hydrogen atoms contained in the above “alkyl group having 1 to 4 carbon atoms” are substituted with a hydroxy group or a carboxy group. Indicates that it may be.
In the structural unit represented by the general formula (2), R 3 is more preferably a hydrogen atom or a methyl group, and both R 4 and R 5 are more preferably a methyl group.
 成分A1の重量平均分子量は、適切な塗布膜厚形成の観点から、好ましくは1,000~1,000,000の範囲であり、より好ましくは5,000~500,000の範囲であり、特に好ましくは10,000~200,000の範囲である。本発明において「重量平均分子量」とは、ゲルパーミエーションクロマトグラフィー(GPC)にて測定される、ポリスチレン換算の分子量をいう。 The weight average molecular weight of component A1 is preferably in the range of 1,000 to 1,000,000, more preferably in the range of 5,000 to 500,000, particularly from the viewpoint of forming an appropriate coating film thickness. The range is preferably 10,000 to 200,000. In the present invention, “weight average molecular weight” means a molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).
 成分A1は単独で用いても、2種以上を併用してもよい。 Component A1 may be used alone or in combination of two or more.
 成分A1は、自体公知の方法又はそれに準ずる方法によって製造することができる。例えば、各構造単位に対応する単量体(一般式(1)で表される構造単位に対応する単量体、一般式(1)で表される構造単位以外の構造単位(好ましくは一般式(2)で表される構造単位)に対応する単量体)を、適当な溶媒(例、プロピレングリコールモノエチルエーテル等)中で、適当な重合開始剤(例、2,2’-アゾビスイソブチロニトリル等)を使用して重合すること等により製造できるが、これに限定されない。また、市販品を使用してもよい。 Component A1 can be produced by a method known per se or a method analogous thereto. For example, a monomer corresponding to each structural unit (a monomer corresponding to the structural unit represented by the general formula (1), a structural unit other than the structural unit represented by the general formula (1) (preferably the general formula The monomer corresponding to the structural unit represented by (2)) in a suitable solvent (eg, propylene glycol monoethyl ether, etc.) and a suitable polymerization initiator (eg, 2,2′-azobis). Although it can manufacture by superposing | polymerizing using isobutyronitrile etc.), it is not limited to this. Moreover, you may use a commercial item.
 一般式(1)で表される構造単位に対応する単量体としては、例えば、2-ヒドロキシエチル(メタ)アクリレート(例えば、CAS番号:868-77-9の化合物)、2-ヒドロキシプロピル(メタ)アクリレート(例えば、CAS番号:923-26-2の化合物)、4-ヒドロキシブチル(メタ)アクリレート(例えば、CAS番号:2478-10-6の化合物)、N-ヒドロキシメチル(メタ)アクリルアミド(例えば、CAS番号:923-02-4の化合物)、N-(2-ヒドロキシエチル)(メタ)アクリルアミド(例えば、CAS番号:5238-56-2の化合物)、N-(2-ヒドロキシプロピル)(メタ)アクリルアミド(例えば、CAS番号:26099-09-2の化合物)、p-ヒドロキシ(メタ)アクリルアニリド(例えば、CAS番号:19243-95-9の化合物)、N-メトキシメチル(メタ)アクリルアミド、N-ブトキシメチル(メタ)アクリルアミド等が挙げられ、2-ヒドロキシエチル(メタ)アクリレート、2-ヒドロキシプロピル(メタ)アクリレート、N-メトキシメチル(メタ)アクリルアミド又はN-ブトキシメチル(メタ)アクリルアミドが好ましく、2-ヒドロキシエチル(メタ)アクリレートが最も好ましい。 Examples of the monomer corresponding to the structural unit represented by the general formula (1) include 2-hydroxyethyl (meth) acrylate (for example, a compound having CAS number: 868-77-9), 2-hydroxypropyl ( (Meth) acrylate (for example, a compound having CAS number: 923-26-2), 4-hydroxybutyl (meth) acrylate (for example, a compound having CAS number: 2478-10-6), N-hydroxymethyl (meth) acrylamide ( For example, a compound having CAS number: 923-02-4), N- (2-hydroxyethyl) (meth) acrylamide (for example, a compound having CAS number: 5238-56-2), N- (2-hydroxypropyl) ( (Meth) acrylamide (for example, a compound having CAS number: 26099-09-2), p-hydroxy (meth) actyl Examples include ruanilide (for example, a compound having CAS number: 19243-95-9), N-methoxymethyl (meth) acrylamide, N-butoxymethyl (meth) acrylamide, and the like. 2-hydroxyethyl (meth) acrylate, 2-hydroxy Propyl (meth) acrylate, N-methoxymethyl (meth) acrylamide or N-butoxymethyl (meth) acrylamide is preferred, and 2-hydroxyethyl (meth) acrylate is most preferred.
 一般式(2)で表される構造単位に対応する単量体としては、例えば、N-イソプロピル(メタ)アクリルアミド、N-(1-メチルプロピル)(メタ)アクリルアミド、N-(1-エチルプロピル)(メタ)アクリルアミド、N-(1-プロピルブチル)(メタ)アクリルアミド、N-(1-ブチルペンチル)(メタ)アクリルアミド、2-カルボキシイソプロピル(メタ)アクリルアミド、2-ヒドロキシイソプロピル(メタ)アクリルアミド等が挙げられ、N-イソプロピル(メタ)アクリルアミド、2-カルボキシイソプロピル(メタ)アクリルアミド又は2-ヒドロキシイソプロピル(メタ)アクリルアミドが最も好ましい。
 成分A1が、一般式(2)で表される構造単位を有する場合、本発明の組成物を用いて形成された塗布膜は温度応答性を有する。この場合、成分A1の全構造単位に対する、一般式(2)で表される構造単位の含有割合は、60~95モル%が好ましい。なお、本発明の組成物を用いて形成された塗布膜は、温度応答性を有することで、例えば、温度に応じて大きさが変化する塗布膜パターンを形成することができ、当該塗布膜及び塗布膜パターンは、例えば(i)水や薬剤等を塗布膜内に留まらせたり、放出したりできるドラッグデリバリーシステム(DDS)や薬剤シートへの応用、(ii)表面の疎水/親水を制御することで、物質の付着性を制御できるデバイス等への応用等が期待される点で有利である。
Examples of the monomer corresponding to the structural unit represented by the general formula (2) include N-isopropyl (meth) acrylamide, N- (1-methylpropyl) (meth) acrylamide, and N- (1-ethylpropyl). ) (Meth) acrylamide, N- (1-propylbutyl) (meth) acrylamide, N- (1-butylpentyl) (meth) acrylamide, 2-carboxyisopropyl (meth) acrylamide, 2-hydroxyisopropyl (meth) acrylamide, etc. N-isopropyl (meth) acrylamide, 2-carboxyisopropyl (meth) acrylamide or 2-hydroxyisopropyl (meth) acrylamide is most preferable.
When component A1 has a structural unit represented by general formula (2), the coating film formed using the composition of the present invention has temperature responsiveness. In this case, the content ratio of the structural unit represented by the general formula (2) with respect to all the structural units of the component A1 is preferably 60 to 95 mol%. Note that the coating film formed using the composition of the present invention has temperature responsiveness, so that, for example, a coating film pattern whose size changes with temperature can be formed. For example, (i) a drug delivery system (DDS) that allows water or a drug to stay in or release from the coating film or application to a drug sheet, and (ii) control the hydrophobicity / hydrophilicity of the surface. This is advantageous in that application to devices that can control the adhesion of substances is expected.
 成分A1は、一般式(1)で表される構造単位及び一般式(2)で表される構造単位に加え、さらに任意の構造単位を含んでいてもよい。かかる任意の構造単位は、本発明の組成物を用いて形成された塗布膜の性能を損なわず、上記一般式(1)で表される構造単位に対応する単量体及び一般式(2)で表される構造単位に対応する単量体と重合することができる単量体由来の構造単位であれば特に制限は無い。このような単量体としては、例えば、アルキル基の炭素原子数が1~10の(メタ)アクリル酸エステル類、ベンジル(メタ)アクリレート、アクリルアミド類(例、アクリルアミド、N-アルキルアクリルアミド、N-アリールアクリルアミド、N,N-ジアルキルアクリルアミド、N,N-ジアリールアクリルアミド、N-メチル-N-フェニルアクリルアミド、N-2-アセトアミドエチル-N-アセチルアクリルアミド等)、メタクリルアミド類(例、メタクリルアミド、N-アルキルメタクリルアミド、N-アリールメタクリルアミド、N,N-ジアルキルメタクリルアミド、N,N-ジアリールメタクリルアミド、N-メチル-N-フェニルメタクリルアミド、N-エチル-N-フェニルメタクリルアミド等)が挙げられる。これらはいずれか1種を単独で用いても、2種以上を併用してもよい。
 例えば疎水性の側鎖を有する、アルキル基の炭素原子数が1~10の(メタ)アクリル酸エステル類やベンジル(メタ)アクリレート等を使用した場合、成分A1の親疎水バランスを調整することができる。
Component A1 may further contain an arbitrary structural unit in addition to the structural unit represented by the general formula (1) and the structural unit represented by the general formula (2). Such an arbitrary structural unit does not impair the performance of the coating film formed using the composition of the present invention, and the monomer corresponding to the structural unit represented by the general formula (1) and the general formula (2) If it is a structural unit derived from the monomer which can superpose | polymerize with the monomer corresponding to the structural unit represented, there will be no restriction | limiting in particular. Examples of such monomers include (meth) acrylic acid esters having 1 to 10 carbon atoms in the alkyl group, benzyl (meth) acrylate, acrylamides (eg, acrylamide, N-alkylacrylamide, N- Arylacrylamide, N, N-dialkylacrylamide, N, N-diarylacrylamide, N-methyl-N-phenylacrylamide, N-2-acetamidoethyl-N-acetylacrylamide, etc.), methacrylamides (eg, methacrylamide, N -Alkyl methacrylamide, N-aryl methacrylamide, N, N-dialkyl methacrylamide, N, N-diaryl methacrylamide, N-methyl-N-phenyl methacrylamide, N-ethyl-N-phenyl methacrylamide, etc.) It is done. These may be used alone or in combination of two or more.
For example, when a (meth) acrylic acid ester having 1 to 10 carbon atoms in the alkyl group having a hydrophobic side chain or benzyl (meth) acrylate is used, the hydrophilicity / hydrophobicity balance of component A1 can be adjusted. it can.
 本発明の塗布膜形成用組成物における成分Aの含有量は、適度な厚さの塗布膜形成や、本発明の塗布膜形成組成物の保存安定性の観点から、溶剤を除く塗布膜形成用組成物の固形分を基準に、好ましくは60~95重量%であり、より好ましくは70~90重量%である。 The content of component A in the coating film forming composition of the present invention is suitable for forming a coating film with an appropriate thickness and for coating film formation excluding the solvent from the viewpoint of storage stability of the coating film forming composition of the present invention. The amount is preferably 60 to 95% by weight, more preferably 70 to 90% by weight, based on the solid content of the composition.
(成分B)
 本発明の塗布膜形成組成物は、(B)光酸発生剤(以下、単に「成分B」とも称する)を含んでいてもよい。成分Bは、露光により直接若しくは間接的に酸を発生する化合物であれば特に制限はなく、例えば、ジアゾメタン化合物、オニウム塩化合物、スルホンイミド化合物、ニトロベンジル化合物、鉄アレーン錯体、ベンゾイントシラート化合物、ハロゲン含有トリアジン化合物、シアノ基含有オキシムスルホナート化合物及びナフタルイミド系化合物等が挙げられる。
(Component B)
The coating film forming composition of the present invention may contain (B) a photoacid generator (hereinafter also simply referred to as “component B”). Component B is not particularly limited as long as it is a compound that generates an acid directly or indirectly upon exposure. For example, a diazomethane compound, an onium salt compound, a sulfonimide compound, a nitrobenzyl compound, an iron arene complex, a benzoin tosylate compound, Examples include halogen-containing triazine compounds, cyano group-containing oxime sulfonate compounds, and naphthalimide compounds.
 ジアゾメタン化合物としては、例えば、ビス(p-トルエンスルホニル)ジアゾメタン、ビス(1,1-ジメチルエチルスルホニル)ジアゾメタン、ビス(シクロヘキシルスルホニル)ジアゾメタン、ビス(2,4-ジメチルフェニルスルホニル)ジアゾメタン等が挙げられる。 Examples of the diazomethane compound include bis (p-toluenesulfonyl) diazomethane, bis (1,1-dimethylethylsulfonyl) diazomethane, bis (cyclohexylsulfonyl) diazomethane, and bis (2,4-dimethylphenylsulfonyl) diazomethane. .
 オニウム塩化合物としては、例えば、ビス(4-tert-ブチルフェニル)ヨードニウムトリフルオロメタンスルホネート、トリフェニルスルホニウムトリフルオロメタンスルホネート等が挙げられる。 Examples of the onium salt compound include bis (4-tert-butylphenyl) iodonium trifluoromethanesulfonate, triphenylsulfonium trifluoromethanesulfonate, and the like.
 スルホンイミド化合物としては、例えば、N-(トリフルオロメタンスルホニルオキシ)スクシンイミド、N-(ノナフルオロ-ノルマルブタンスルホニルオキシ)スクシンイミド、N-(カンファースルホニルオキシ)スクシンイミド、N-(トリフルオロメタンスルホニルオキシ)ナフタルイミド等が挙げられる。 Examples of the sulfonimide compound include N- (trifluoromethanesulfonyloxy) succinimide, N- (nonafluoro-normalbutanesulfonyloxy) succinimide, N- (camphorsulfonyloxy) succinimide, N- (trifluoromethanesulfonyloxy) naphthalimide, and the like. Is mentioned.
 ニトロベンジル化合物としては、例えば、p-トルエンスルホン酸2-ニトロベンジル、p-トルエンスルホン酸2,6-ジニトロベンジル、p-トルエンスルホン酸2,4-ジニトロベンジル等が挙げられる。 Examples of the nitrobenzyl compound include 2-nitrobenzyl p-toluenesulfonate, 2,6-dinitrobenzyl p-toluenesulfonate, 2,4-dinitrobenzyl p-toluenesulfonate, and the like.
 鉄アレーン錯体としては、例えば、ビスシクロペンタジエニル-(η6-イソプロピルベンゼン)-鉄(II)ヘキサフルオロホスフェート等が挙げられる。 Examples of the iron arene complex include biscyclopentadienyl- (η6-isopropylbenzene) -iron (II) hexafluorophosphate.
 ベンゾイントシラート化合物としては、例えば、ベンゾイントシラート、α-メチルベンゾイントシラート等が挙げられる。 Examples of the benzoin tosylate compound include benzoin tosylate and α-methylbenzoin tosylate.
 ハロゲン含有トリアジン化合物としては、例えば、2-(4-メトキシフェニル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-(4-メトキシナフチル)-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-[2-(2-フリル)エテニル]-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン、2-[2-(5-メチル-2-フリル)エテニル]-4,6-ビス(トリクロロメチル)-1,3,5-トリアジン等が挙げられる。 Examples of the halogen-containing triazine compound include 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl) -4,6-bis. (Trichloromethyl) -1,3,5-triazine, 2- [2- (2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- [2- ( 5-methyl-2-furyl) ethenyl] -4,6-bis (trichloromethyl) -1,3,5-triazine and the like.
 シアノ基含有オキシムスルホナート化合物としては、例えば、α-(メチルスルホニルオキシイミノ)-4-メトキシベンジルシアニド、α-(トリフルオロメチルスルホニルオキシイミノ)-4-メトキシベンジルシアニド、α-(エチルスルホニルオキシイミノ)-4-メトキシベンジルシアニド、α-(プロピルスルホニルオキシイミノ)-4-メチルベンジルシアニド等が挙げられる。 Examples of the cyano group-containing oxime sulfonate compound include α- (methylsulfonyloxyimino) -4-methoxybenzyl cyanide, α- (trifluoromethylsulfonyloxyimino) -4-methoxybenzyl cyanide, α- (ethyl And sulfonyloxyimino) -4-methoxybenzyl cyanide, α- (propylsulfonyloxyimino) -4-methylbenzyl cyanide, and the like.
 ナフタルイミド系化合物としては、例えば、6-(n-ブチルチオ)-2-(パーフルオロブチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオン、6-(n-ブチルチオ)-2-(トリフルオロメチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオンおよび6-(イソプロピルチオ)-2-(トリフルオロメチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオン等が挙げられる。 Examples of naphthalimide compounds include 6- (n-butylthio) -2- (perfluorobutylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione, 6- (n-butylthio) -2 -(Trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione and 6- (isopropylthio) -2- (trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1, 3-dione and the like can be mentioned.
 (B)光酸発生剤は、好ましくはナフタルイミド系化合物であり、より好ましくは6-(n-ブチルチオ)-2-(パーフルオロブチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオン、6-(n-ブチルチオ)-2-(トリフルオロメチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオンおよび6-(イソプロピルチオ)-2-(トリフルオロメチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオンである。 (B) The photoacid generator is preferably a naphthalimide compound, more preferably 6- (n-butylthio) -2- (perfluorobutylsulfonyloxy) -2-aza-2H-phenalene-1,3. -Dione, 6- (n-butylthio) -2- (trifluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione and 6- (isopropylthio) -2- (trifluoromethylsulfonyloxy) ) -2-aza-2H-phenalene-1,3-dione.
 本発明の組成物が(B)光酸発生剤を含有する場合、(B)光酸発生剤の含有量は、本発明の塗布膜形成用組成物が露光による良好なパターニング性能を得るために、溶剤を除く塗布膜形成用組成物の固形分を基準に、好ましくは0.1~20重量%、より好ましくは0.5~15重量%、さらに好ましくは1~13重量%である。 When the composition of the present invention contains (B) a photoacid generator, the content of (B) the photoacid generator is such that the coating film forming composition of the present invention obtains good patterning performance by exposure. Based on the solid content of the composition for forming a coating film excluding the solvent, it is preferably 0.1 to 20% by weight, more preferably 0.5 to 15% by weight, and still more preferably 1 to 13% by weight.
 本発明の塗布膜形成用組成物が(B)光酸発生剤を含有する場合、(B)光酸発生剤は1種のみを使用してもよく、2種以上を併用してもよい。 When the composition for forming a coating film of the present invention contains (B) a photoacid generator, only one type of (B) photoacid generator may be used, or two or more types may be used in combination.
(成分C)
 本発明の塗布膜形成用組成物は、酸存在下で反応性基と反応する(C)架橋剤(以下、単に「成分C」とも称する)を含有することが好ましい。(C)架橋剤は1種のみを使用してもよく、2種以上を併用してもよい。なお、(A)有機重合体中に互いに反応する2種以上の反応性基が存在する場合には、(A)有機重合体は架橋剤無しで架橋することができる(自己架橋)。このような場合には、本発明の塗布膜形成用組成物は(C)架橋剤を含まなくてもよい。
(Component C)
The composition for forming a coating film of the present invention preferably contains (C) a cross-linking agent (hereinafter also simply referred to as “component C”) that reacts with a reactive group in the presence of an acid. (C) A crosslinking agent may use only 1 type and may use 2 or more types together. When (A) two or more types of reactive groups that react with each other are present in the organic polymer, (A) the organic polymer can be crosslinked without a crosslinking agent (self-crosslinking). In such a case, the composition for forming a coating film of the present invention may not contain (C) a crosslinking agent.
 成分Cは、酸存在下で反応性基と反応するものである限り、特に制限は無く、感光性組成物の分野で通常使用されているものを、本発明でも使用することができる。 Component C is not particularly limited as long as it reacts with the reactive group in the presence of an acid, and those usually used in the field of photosensitive compositions can be used in the present invention.
 成分Cとしては、例えば、グリコールウリル化合物、メラミン化合物等が挙げられる。 Examples of component C include glycoluril compounds and melamine compounds.
 グリコールウリル化合物としては、例えば、1,3,4,6-テトラキス(メトキシメチル)グリコールウリル、1,3,4,6-テトラキス(エトキシメチル)グリコールウリル、1,3,4,6-テトラキス(プロポキシメチル)グリコールウリル、1,3,4,6-テトラキス(ブトキシメチル)グリコールウリル等が挙げられる。 Examples of the glycoluril compound include 1,3,4,6-tetrakis (methoxymethyl) glycoluril, 1,3,4,6-tetrakis (ethoxymethyl) glycoluril, 1,3,4,6-tetrakis ( And propoxymethyl) glycoluril and 1,3,4,6-tetrakis (butoxymethyl) glycoluril.
 メラミン化合物としては、例えば、ヘキサメトキシメチルメラミン、ヘキサエトキシメチルメラミン、ヘキサプロポキシメチルメラミン、ヘキサブトキシメチルメラミン等が挙げられる。 Examples of the melamine compound include hexamethoxymethyl melamine, hexaethoxymethyl melamine, hexapropoxymethyl melamine, hexabutoxymethyl melamine and the like.
 成分Cは、好ましくは、グリコールウリル化合物であり、より好ましくは1,3,4,6-テトラキス(メトキシメチル)グリコールウリル、1,3,4,6-テトラキス(エトキシメチル)グリコールウリル、1,3,4,6-テトラキス(プロポキシメチル)グリコールウリル、および1,3,4,6-テトラキス(ブトキシメチル)グリコールウリルからなる群から選ばれる少なくとも一つであり、さらに好ましくは1,3,4,6-テトラキス(メトキシメチル)グリコールウリルである。 Component C is preferably a glycoluril compound, more preferably 1,3,4,6-tetrakis (methoxymethyl) glycoluril, 1,3,4,6-tetrakis (ethoxymethyl) glycoluril, It is at least one selected from the group consisting of 3,4,6-tetrakis (propoxymethyl) glycoluril and 1,3,4,6-tetrakis (butoxymethyl) glycoluril, more preferably 1,3,4 , 6-tetrakis (methoxymethyl) glycoluril.
 成分Cを使用する場合、その含有量は、良好なパターニング特性および充分な温度応答性を得るために、溶剤を除く塗布膜形成用組成物の固形分を基準に、好ましくは0.1~40重量%、より好ましくは0.5~30重量%、さらに好ましくは1~20重量%である。 When component C is used, its content is preferably 0.1 to 40, based on the solid content of the coating film forming composition excluding the solvent, in order to obtain good patterning characteristics and sufficient temperature responsiveness. % By weight, more preferably 0.5 to 30% by weight, still more preferably 1 to 20% by weight.
(成分D)
 本発明の塗布膜形成用組成物は、溶剤として、(D)炭素原子数2~5のメトキシアルコール(以下、単に「成分D」とも称する)を含む。当該成分Dが溶剤として用いられることで、本発明の組成物は、特に樹脂製基材を侵食することなく、生体適合性塗布膜を形成できる。
(Component D)
The composition for forming a coating film of the present invention contains (D) a methoxy alcohol having 2 to 5 carbon atoms (hereinafter also simply referred to as “component D”) as a solvent. By using the component D as a solvent, the composition of the present invention can form a biocompatible coating film without particularly eroding the resin substrate.
 炭素原子数2~5のメトキシアルコールの具体例としては、メトキシメタノール(CAS番号;4461-52-3)、2-メトキシエタノール(CAS番号;109-86-4)、2-メトキシ-1-プロパノール(CAS番号;1589-47-5)、3-メトキシ-1-プロパノール(CAS番号;1589-49-7)、2-メトキシ-1-ブタノール(CAS番号;15467-25-1)、3-メトキシ-1-ブタノール(CAS番号;2517-43-3)等が挙げられる。該メトキシアルコールの炭素原子数は、好ましくは2~4であり、より好ましくは3~4である。 Specific examples of the methoxy alcohol having 2 to 5 carbon atoms include methoxymethanol (CAS number; 4461-52-3), 2-methoxyethanol (CAS number; 109-86-4), 2-methoxy-1-propanol. (CAS number; 1589-47-5), 3-methoxy-1-propanol (CAS number; 1589-49-7), 2-methoxy-1-butanol (CAS number; 15467-25-1), 3-methoxy -1-butanol (CAS number; 2517-43-3) and the like. The number of carbon atoms of the methoxy alcohol is preferably 2-4, more preferably 3-4.
 成分Dは、好ましくは2-メトキシエタノール(CAS番号;109-86-4、別名称としてエチレングリコールモノメチルエーテル、メチルセルソルブ、メチルグリコール)である。 Component D is preferably 2-methoxyethanol (CAS number; 109-86-4, alternatively named ethylene glycol monomethyl ether, methyl cellosolve, methyl glycol).
 成分Dの含有量は、塗布膜の膜厚をコントロールするため、および本発明の塗布膜形成用組成物が感光性を有する場合、良好なパターニング特性を得るために、塗布膜形成用組成物を基準に、好ましくは50~99.5重量%、より好ましくは70~99.5重量%、さらに好ましくは85~99重量%である。 In order to control the film thickness of the coating film and to obtain good patterning characteristics when the coating film forming composition of the present invention has photosensitivity, the content of component D is Preferably, it is 50 to 99.5% by weight, more preferably 70 to 99.5% by weight, and still more preferably 85 to 99% by weight.
 本発明の塗布膜形成用組成物における成分Aの含有割合(即ち、塗布膜形成用組成物を基準する成分Aの含有量)は、適度な厚さの塗布膜製造や、本発明の塗布膜形成組成物の保存安定性の観点から、0.1~90重量%が好ましく、0.5~70重量%がより好ましい。
 本発明の塗布膜形成用組成物が成分Bを含有する場合、当該塗布膜形成用組成物における成分Bの含有割合(即ち、塗布膜形成用組成物を基準する成分Bの含有量)は、温度応答性樹脂の特性を保つ観点から、0.01~50重量%が好ましく、0.05~40重量%がより好ましく、0.1~20重量%が特に好ましい。
 本発明の塗布膜形成用組成物が成分Bを含有する場合、本発明の塗布膜形成用組成物に含まれる成分Aと成分Bの重量比(成分Aの重量/成分Bの重量)は、成分Aと成分Bとの反応効率の観点から、0.01~50が好ましく、0.1~40がより好ましい。
 本発明の塗布膜形成用組成物が成分Cを含有する場合、本発明の塗布膜形成用組成物における成分Cの含有割合(即ち、塗布膜形成用組成物を基準する成分Cの含有量)は、成分Aとの反応効率の観点から、0.01~15重量%が好ましく、0.03~10重量%がより好ましく、0.05~5重量%が特に好ましい。
The content ratio of component A in the coating film forming composition of the present invention (that is, the content of component A based on the composition for forming a coating film) is suitable for the production of a coating film having an appropriate thickness or the coating film of the present invention. From the viewpoint of storage stability of the forming composition, 0.1 to 90% by weight is preferable, and 0.5 to 70% by weight is more preferable.
When the composition for forming a coating film of the present invention contains component B, the content ratio of component B in the composition for forming a coating film (that is, the content of component B based on the composition for forming a coating film) is: From the viewpoint of maintaining the characteristics of the temperature-responsive resin, it is preferably 0.01 to 50% by weight, more preferably 0.05 to 40% by weight, and particularly preferably 0.1 to 20% by weight.
When the composition for forming a coating film of the present invention contains component B, the weight ratio of component A and component B (weight of component A / weight of component B) contained in the composition for forming a coating film of the present invention is: From the viewpoint of reaction efficiency between component A and component B, 0.01 to 50 is preferable, and 0.1 to 40 is more preferable.
When the composition for forming a coating film of the present invention contains component C, the content ratio of component C in the composition for forming a coating film of the present invention (that is, the content of component C based on the composition for forming a coating film) Is preferably from 0.01 to 15% by weight, more preferably from 0.03 to 10% by weight, particularly preferably from 0.05 to 5% by weight, from the viewpoint of reaction efficiency with Component A.
 本発明の塗布膜形成組成物は、本発明の目的を著しく損なわない限り、成分A~D以外に、添加剤を必要に応じて含んでもよい。当該添加剤としては、例えば、界面活性剤、レオロジー調整剤、薬剤、微粒子等が挙げられる。 The coating film-forming composition of the present invention may contain additives as necessary in addition to the components A to D as long as the object of the present invention is not significantly impaired. Examples of the additive include a surfactant, a rheology modifier, a drug, and fine particles.
 本発明の塗布膜形成組成物は、成分A及び成分Dを混合し、所望により成分B及び/又は成分Cを混合するか、或いは、これらに上記の添加剤をさらに混合して調製される。混合方法は特に制限されず、自体公知の方法又はそれに準ずる方法によって混合すればよい。 The composition for forming a coating film of the present invention is prepared by mixing component A and component D, and optionally mixing component B and / or component C, or further mixing the above additives. The mixing method is not particularly limited, and may be mixed by a method known per se or a method analogous thereto.
(塗布膜を有する基材、パターン付き基材、該基材の製造方法およびパターン形成方法)
 本発明の塗布膜形成用組成物を用いて形成された塗布膜を表面の少なくとも一部に有する基材は、本発明の塗布膜形成用組成物を、例えばスピンコート、スリットコート等の方法で基材の表面の少なくとも一部に塗布した後、溶剤を除去することによって、塗布膜を基材の表面の少なくとも一部に形成することで製造できる。本発明は、このような塗布膜を有する基材も提供する。
(Substrate having a coating film, substrate with pattern, method for producing the substrate, and pattern forming method)
The substrate having a coating film formed using the coating film forming composition of the present invention on at least a part of the surface is obtained by applying the coating film forming composition of the present invention by a method such as spin coating or slit coating. It can manufacture by forming a coating film in at least one part of the surface of a base material by apply | coating to at least one part of the surface of a base material, and removing a solvent. The present invention also provides a substrate having such a coating film.
 本発明のパターン付き基材は、基材の表面の少なくとも一部に、成分A、成分B及び成分Dを少なくとも含有する本発明の塗布膜形成用組成物を用いて塗布膜を形成する工程、フォトリソグラフィ法によるパターニング工程(具体的には、塗布膜に光を照射する工程、及び露光後の塗布膜を現像する工程)を含む製造方法により製造することができる。本発明は、このようなパターン付き基材も提供する。本発明のパターン付き基材は、本発明の塗布膜形成用組成物を1種のみ用いて製造した1種のパターンを有する基材であってもよく、本発明の塗布膜形成用組成物を2種以上用いて製造した2種以上のパターンを有する基材であってもよい。 The patterned substrate of the present invention is a step of forming a coating film on at least a part of the surface of the substrate using the coating film forming composition of the present invention containing at least Component A, Component B and Component D, It can be manufactured by a manufacturing method including a patterning step by photolithography (specifically, a step of irradiating the coating film with light and a step of developing the coating film after exposure). The present invention also provides such a patterned substrate. The substrate with a pattern of the present invention may be a substrate having one type of pattern produced using only one type of composition for forming a coating film of the present invention. The base material which has 2 or more types of patterns manufactured using 2 or more types may be sufficient.
 パターンの形状に特に制限は無く、基材の上側から観察した場合、例えば、四角状、丸状、線状、ラインアンドスペース等が挙げられる。2種以上の応答温度の異なるパターンが存在する場合、それらは隣接して形成されていてもよく、離して形成されていてもよい。上側から観察したパターンの大きさおよびパターン断面から観察した高さに特に制限は無い。パターンの大きさ(すなわち、四角の一辺の幅、丸の直径、線の幅、ラインアンドスペースのライン幅とスペース幅等)は、例えば0.1~1000μm、パターンの高さは、例えば5nm~1000μmである。これらパターンの形状は、露光工程時に、透過光の形状が異なる複数のマスクを用いることで制御可能である。 The shape of the pattern is not particularly limited, and when observed from the upper side of the substrate, for example, a square shape, a round shape, a linear shape, a line and space, and the like can be mentioned. When two or more patterns having different response temperatures exist, they may be formed adjacent to each other or may be formed apart from each other. There is no particular limitation on the size of the pattern observed from above and the height observed from the pattern cross section. The size of the pattern (that is, the width of one side of the square, the diameter of the circle, the width of the line, the line and space line width and space width, etc.) is, for example, 0.1 to 1000 μm, and the height of the pattern is, for example, 5 nm to 1000 μm. The shape of these patterns can be controlled by using a plurality of masks having different shapes of transmitted light during the exposure process.
 本発明のパターン付き基材は、自体公知の方法、例えば以下に記載するような方法で製造できる。まず、成分A、成分B及び成分Dを少なくとも含有する本発明の塗布膜形成用組成物をスピンコート、スリットコート等の方法で基材に塗布し、溶剤除去することによって、基材の表面の少なくとも一部に塗布膜を形成する。該塗布膜に例えば、g線(波長436nm)、h線(波長405nm)、i線(波長365nm)、紫外線、深紫外線、電子線、各種レーザー(例、KrFエキシマレーザー(波長248nm)、ArFエキシマレーザー(波長193nm)、F2エキシマレーザー(波長157nm)等のエキシマレーザー等)、水銀ランプ光、LED光等の光を、所望のパターンを得るためにマスクを介して照射すると、露光部分のみで酸が発生し、それによる架橋(硬化)が生ずる。これらの中でも、本発明の塗布膜は、g線(波長436nm)、h線(波長405nm)、i線(波長365nm)、紫外線、深紫外線、電子線が好ましく用いられる。この後、露光後ベーク(PEB)を行なうことが望ましい。露光後の塗布膜を、現像液等で現像を行い、未露光部(塗膜の未硬化部分)を除去してパターン付き基材を製造することができる。
 2種以上のパターンを有する基材は、組成が異なる塗布膜形成用組成物毎に上記操作を繰り返すことによって、製造することができる。
The patterned substrate of the present invention can be produced by a method known per se, for example, the method described below. First, the composition for forming a coating film of the present invention containing at least Component A, Component B, and Component D is applied to a substrate by a method such as spin coating or slit coating, and the solvent is removed to remove the surface of the substrate. A coating film is formed on at least a part. For example, g-line (wavelength 436 nm), h-line (wavelength 405 nm), i-line (wavelength 365 nm), ultraviolet light, deep ultraviolet light, electron beam, various lasers (eg, KrF excimer laser (wavelength 248 nm), ArF excimer) When light such as laser (wavelength 193 nm), excimer laser such as F2 excimer laser (wavelength 157 nm), mercury lamp light, LED light, etc. is irradiated through a mask in order to obtain a desired pattern, the acid is exposed only at the exposed portion. Is generated, thereby causing cross-linking (curing). Among these, g-line (wavelength 436 nm), h-line (wavelength 405 nm), i-line (wavelength 365 nm), ultraviolet rays, deep ultraviolet rays, and electron beams are preferably used for the coating film of the present invention. Thereafter, it is desirable to perform post-exposure baking (PEB). The coated film after exposure is developed with a developer or the like, and an unexposed portion (uncured portion of the coating film) is removed to produce a substrate with a pattern.
The base material which has 2 or more types of patterns can be manufactured by repeating the said operation for every composition for coating film formation from which a composition differs.
 塗布膜を有する基材及びパターン付き基材に用いられる基材の材料としては、例えば、金属、半金属、金属含有化合物、半金属含有化合物、樹脂等が挙げられる。本発明の組成物を用いれば、特に樹脂製基材を侵食することなく、生体適合性塗布膜を形成可能であるため、樹脂製基材を用いる場合に本発明は特に有用である。 Examples of the base material used for the base material having a coating film and the base material with a pattern include metals, metalloids, metal-containing compounds, metalloid-containing compounds, and resins. When the composition of the present invention is used, a biocompatible coating film can be formed without eroding the resin substrate, and therefore the present invention is particularly useful when a resin substrate is used.
 金属または半金属としては、例えば、アルミニウム、ニッケルチタン、ステンレス(SUS304、SUS316、SUS316L等)、シリコン等が挙げられる。 Examples of the metal or semimetal include aluminum, nickel titanium, stainless steel (SUS304, SUS316, SUS316L, etc.), silicon, and the like.
 金属含有化合物または半金属含有化合物としては、例えば、セラミックス、金属酸化物または半金属酸化物(ガラス、酸化ケイ素、アルミナ等)、金属炭化物または半金属炭化物、金属窒化物または半金属窒化物(窒化ケイ素等)、金属ホウ化物または半金属ホウ化物等が挙げられる。 Examples of the metal-containing compound or metalloid-containing compound include ceramics, metal oxide or metalloid oxide (glass, silicon oxide, alumina, etc.), metal carbide or metalloid carbide, metal nitride or metalloid nitride (nitriding). Silicon, etc.), metal borides, metalloid borides and the like.
 樹脂は、天然樹脂、変性天然樹脂および合成樹脂のいずれでもよい。天然樹脂としては、例えば、セルロース等が挙げられる。変性天然樹脂として、例えば、三酢酸セルロース(CTA)、デキストラン硫酸を固定化したセルロース等が挙げられる。合成樹脂としては、例えば、ポリアクリロニトリル(PAN)、ポリエステル系ポリマーアロイ(PEPA)、ポリスチレン(PS)、ポリスルホン(PSF)、ポリエチレンテレフタレート(PET)、ポリメチルメタクリレート(PMMA)、ポリビニルアルコール(PVA)、ポリウレタン(PU)、エチレンビニルアルコール(EVAL)、ポリエチレン(PE)、ポリエステル(PE)、ポリプロピレン(PP)、ポリフッ化ビニリデン(PVDF)、ポリエーテルスルホン(PES)、ポリ-N-イソプロピルアクリルアミド等が挙げられるが、これらの中でも、例えば生体適合性が必要な細胞培養基材等として一般的に使用される、ポリスチレン(PS)が特に望ましい。 The resin may be a natural resin, a modified natural resin, or a synthetic resin. Examples of natural resins include cellulose. Examples of the modified natural resin include cellulose triacetate (CTA), cellulose on which dextran sulfate is immobilized, and the like. Examples of the synthetic resin include polyacrylonitrile (PAN), polyester polymer alloy (PEPA), polystyrene (PS), polysulfone (PSF), polyethylene terephthalate (PET), polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), Examples include polyurethane (PU), ethylene vinyl alcohol (EVAL), polyethylene (PE), polyester (PE), polypropylene (PP), polyvinylidene fluoride (PVDF), polyethersulfone (PES), and poly-N-isopropylacrylamide. Among these, polystyrene (PS), which is generally used as a cell culture substrate that requires biocompatibility, for example, is particularly desirable.
 以下、実施例を挙げて本発明をより具体的に説明するが、本発明は以下の実施例によって制限を受けるものではなく、上記・下記の趣旨に適合し得る範囲で適当に変更を加えて実施することも勿論可能であり、それらはいずれも本発明の技術的範囲に包含される。 EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples. However, the present invention is not limited by the following examples, and appropriate modifications are made within a range that can meet the above and the following purposes. Of course, it is possible to implement them, and they are all included in the technical scope of the present invention.
[重量平均分子量の測定]
 本実施例において、有機重合体1の重量平均分子量は、ゲルパーミエーションクロマトグラフィー(GPC)により測定した。測定に用いた装置、測定条件は次の通りである
  装置:TOSOH HLC-8320GPC system
  カラム:Shodex(登録商標)KF-803L、KF-802及びKF-801
  カラム温度:40℃
  溶離液:DMF
  流量:0.6ml/分
  検出器:RI
  標準試料:ポリスチレン
[Measurement of weight average molecular weight]
In this example, the weight average molecular weight of the organic polymer 1 was measured by gel permeation chromatography (GPC). Equipment used for measurement and measurement conditions are as follows. Equipment: TOSOH HLC-8320GPC system
Column: Shodex® KF-803L, KF-802 and KF-801
Column temperature: 40 ° C
Eluent: DMF
Flow rate: 0.6 ml / min Detector: RI
Standard sample: Polystyrene
<製造例1:有機重合体1の合成>
 N-イソプロピルアクリルアミド20.0g(0.177mol)、2-ヒドロキシエチルアクリレート5.13g(0.044mol)及び2,2’-アゾビスイソブチロニトリル(和光純薬工業株式会社製)0.25gをプロピレングリコールモノメチルエーテル25.1gに溶解させ、窒素雰囲気下80℃で24時間反応させ、有機重合体1を含む溶液を得た。その後、ヘキサンで再沈殿させ、得られた沈殿を真空オーブン下40℃で乾燥させた。仕込み通りに反応が進行しているとすると、有機重合体1の全構造単位に対する、N-イソプロピルアクリルアミドに由来する構造単位の含有割合は80モル%であり、2-ヒドロキシエチルアクリレートに由来する構造単位の含有割合は20モル%である。有機重合体1の重量平均分子量は、ポリスチレン換算で19,000であった。
<Production Example 1: Synthesis of organic polymer 1>
20.0 g (0.177 mol) of N-isopropylacrylamide, 5.13 g (0.044 mol) of 2-hydroxyethyl acrylate, and 0.25 g of 2,2′-azobisisobutyronitrile (manufactured by Wako Pure Chemical Industries, Ltd.) Was dissolved in 25.1 g of propylene glycol monomethyl ether and reacted at 80 ° C. for 24 hours in a nitrogen atmosphere to obtain a solution containing the organic polymer 1. Thereafter, reprecipitation was performed with hexane, and the resulting precipitate was dried at 40 ° C. in a vacuum oven. Assuming that the reaction proceeds as prepared, the content of the structural unit derived from N-isopropylacrylamide with respect to all the structural units of the organic polymer 1 is 80 mol%, and the structure derived from 2-hydroxyethyl acrylate. The content ratio of the unit is 20 mol%. The weight average molecular weight of the organic polymer 1 was 19,000 in terms of polystyrene.
(塗布膜形成用組成物の調製)
<実施例1>
 有機重合体1:0.5gに、架橋剤(1,3,4,6-テトラキス(メトキシメチル)グリコールウリル)0.035g、光酸発生剤(6-(n-ブチルチオ)-2-(トリフルオロメチルスルホニルオキシ)-2-アザ-2H-フェナレン-1,3-ジオン)0.075g、および2-メトキシエタノール50.2gを加え、塗布膜形成用組成物1を得た。
(Preparation of coating film forming composition)
<Example 1>
Organic polymer 1: 0.5 g, crosslinking agent (1,3,4,6-tetrakis (methoxymethyl) glycoluril) 0.035 g, photoacid generator (6- (n-butylthio) -2- (tri Fluoromethylsulfonyloxy) -2-aza-2H-phenalene-1,3-dione) (0.075 g) and 2-methoxyethanol (50.2 g) were added to obtain a coating film forming composition 1.
<比較例1~17>
 実施例1の2-メトキシエタノールを表1記載の溶剤に変えた以外は、実施例1と同様にして塗布膜形成用組成物2~18を得た。
<Comparative Examples 1 to 17>
Coating film-forming compositions 2 to 18 were obtained in the same manner as in Example 1 except that 2-methoxyethanol in Example 1 was changed to the solvents shown in Table 1.
[プラシャーレの溶剤耐性]
 ポリスチレン製アズノールシャーレ(φ(ファイ)40×15)(アズワン株式会社製)へ表1記載の溶剤を1mL入れ24時間室温で放置した。その後プラシャーレ内の溶剤を回収した後、プラシャーレの性状を見ることで当該プラシャーレの溶剤耐性を確認した。プラシャーレへの溶剤試験後性状の評価は、変化のなかったもの(白濁、溶解及び割れが確認されなかったもの)を「○」とし、白濁、溶解及び割れの少なくとも一つが確認されたものを「×」として行った。結果を表1に示す。
[Plastic solvent resistance]
1 mL of the solvent described in Table 1 was added to polystyrene aznole petri dish (φ (Phi) 40 × 15) (manufactured by Azwan Co., Ltd.) and left at room temperature for 24 hours. Then, after recovering the solvent in the plastic dish, the solvent resistance of the plastic dish was confirmed by observing the properties of the plastic dish. Evaluation of the properties after the solvent test on the plastic dish was made with no change (white turbidity, dissolution and cracking were not confirmed), and one with at least one of white turbidity, dissolution and cracking was confirmed. X ". The results are shown in Table 1.
[塗布膜形成用組成物の各種溶剤に対する溶解性]
 実施例1及び比較例1~17の塗布膜形成用組成物中に含まれる固形分の溶解状態を目視観察した。各塗布膜形成用組成物の溶解性は、下記の基準に従って評価した。
 ○;沈殿等が発生せず、透明液体状態。
 ×;組成物中の固形分が完全溶解せず、析出した状態。
 結果を表1に示す。
[Solubility of coating film forming composition in various solvents]
The dissolved state of the solid content contained in the coating film forming compositions of Example 1 and Comparative Examples 1 to 17 was visually observed. The solubility of each coating film forming composition was evaluated according to the following criteria.
○: Precipitation or the like does not occur, and a transparent liquid state
X: The solid content in the composition was not completely dissolved and precipitated.
The results are shown in Table 1.
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008
[感度試験]
 塗布膜形成用組成物1を、シリコンウェハ上にスピンコーターを用いて塗布し、ホットプレート上で80℃で1分間プリベークしてシリコンウェハ上に塗布膜を形成した。次いで、i線アライナーPLA-501(キヤノン(株)製)を用いて、露光量を変化させて塗布膜を露光した。次いで、オーブン中で80℃で20時間、露光後ベーク(PEB)した。露光後ベークした塗布膜をイソプロピルアルコールで1分間曝露し、その後60℃の水で3分間振とうしながらリンスを行った。その後、塗布膜を60℃で10分間乾燥させ、露光エリアの塗布膜の膜厚を測定した。結果を図1に示す。
 なお、露光後ベーク(PEB)の時間を20時間から5時間に変えた以外は上記と同様に行った場合も、上記と同様の結果が得られた。
[Sensitivity test]
The coating film forming composition 1 was applied onto a silicon wafer using a spin coater, and pre-baked on a hot plate at 80 ° C. for 1 minute to form a coating film on the silicon wafer. Next, the coating film was exposed using an i-line aligner PLA-501 (manufactured by Canon Inc.) while changing the exposure amount. It was then post-exposure baked (PEB) in an oven at 80 ° C. for 20 hours. After the exposure, the baked coating film was exposed to isopropyl alcohol for 1 minute, and then rinsed with shaking at 60 ° C. for 3 minutes. Thereafter, the coating film was dried at 60 ° C. for 10 minutes, and the thickness of the coating film in the exposure area was measured. The results are shown in FIG.
In addition, the same result as the above was obtained also when it carried out like the above except having changed the time of post-exposure baking (PEB) from 20 hours to 5 hours.
[パターニング試験]
 塗布膜形成用組成物1を、Nunc Thermanoxカバースリップ(ポリエステル製)(Thermo Fisher Scientific, Inc.社製)上にスピンコーターを用いて塗布し、ホットプレート上において80℃で1分間プリベークしてシリコンウェハ上に塗布膜を形成した。次いで、i線アライナーPLA-501(キヤノン(株)製、露光量:2000mJ/cm)を用いて、間隔20μmのラインパターンのマスク(すなわち、開口部幅20μm、マスク部幅20μmのマスク)を介して露光した。次いで、オーブン中で80℃で20時間露光後ベーク(PEB)した。露光後ベークした塗布膜をイソプロピルアルコールで1分間曝露し、その後60℃の水で3分間振とうしながらリンスを行った。その後、60℃で10分間乾燥させ、パターン付き基材を得た。パターン付き基材の表面を原子間力顕微鏡(Atomic Force Microscope、AFM)(ブルカー・エイエックスエス(株)製「Dimension Icon」)を用いて観察し、パターン(塗布膜)がある部分およびパターンが無い部分の厚さ及び幅を測定した。結果を図2に示す。
[Patterning test]
The coating film forming composition 1 was applied onto a Nunc Thermonox cover slip (made of polyester) (Thermo Fisher Scientific, Inc.) using a spin coater, and prebaked on a hot plate at 80 ° C. for 1 minute. A coating film was formed on the wafer. Next, using an i-line aligner PLA-501 (manufactured by Canon Inc., exposure amount: 2000 mJ / cm 2 ), a line pattern mask with an interval of 20 μm (that is, a mask with an opening width of 20 μm and a mask width of 20 μm) Exposed through. Then, it was post-exposure baked (PEB) at 80 ° C. for 20 hours in an oven. After the exposure, the baked coating film was exposed to isopropyl alcohol for 1 minute, and then rinsed with shaking at 60 ° C. for 3 minutes. Then, it was made to dry at 60 degreeC for 10 minute (s), and the base material with a pattern was obtained. The surface of the substrate with the pattern is observed using an atomic force microscope (AFM) (“Dimension Icon” manufactured by Bruker AXS Co., Ltd.). The thickness and width of the missing part were measured. The results are shown in FIG.
 塗布膜形成用組成物1から、良好なパターン(ライン幅:20μm、スペース幅:20μmのラインアンドスペースのパターン)を有する基材(パターン付き基材)が得られた。 The base material (base material with a pattern) which has a favorable pattern (a line and space pattern with a line width of 20 μm and a space width of 20 μm) was obtained from the coating film forming composition 1.
 本発明の生体適合性塗布形成用組成物は、樹脂製基材上に生体適合性塗布膜を形成する際に特に有用である。 The composition for forming a biocompatible coating of the present invention is particularly useful when a biocompatible coating film is formed on a resin substrate.
 本出願は、日本で出願された特願2015-32149(出願日:2015年2月20日)を基礎としており、その内容は本明細書に全て包含されるものである。 This application is based on Japanese Patent Application No. 2015-32149 (filing date: February 20, 2015) filed in Japan, the contents of which are incorporated in full herein.

Claims (13)

  1.  (A)有機重合体と、溶剤として(D)炭素原子数2~5のメトキシアルコールとを含む、生体適合性塗布膜形成用組成物。 A biocompatible coating film-forming composition comprising (A) an organic polymer and (D) methoxy alcohol having 2 to 5 carbon atoms as a solvent.
  2.  上記(D)炭素原子数2~5のメトキシアルコールが、2-メトキシエタノールである、請求項1記載の組成物。 The composition according to claim 1, wherein (D) the methoxy alcohol having 2 to 5 carbon atoms is 2-methoxyethanol.
  3.  上記(A)有機重合体が、ヒドロキシ基、ヒドロキシメチル基及び炭素原子数1~5のアルコキシメチル基から選ばれる少なくとも1種の有機基を側鎖に有する構造単位を含む有機重合体を含む、請求項1又は2記載の組成物。 The (A) organic polymer includes an organic polymer containing a structural unit having at least one organic group selected from a hydroxy group, a hydroxymethyl group and an alkoxymethyl group having 1 to 5 carbon atoms in the side chain. The composition according to claim 1 or 2.
  4.  上記(A)有機重合体が、
    (A1)一般式(1):
    Figure JPOXMLDOC01-appb-C000001

    〔式中、
     Rは、水素原子又はメチル基を示し、
     Qは、エステル結合又はアミド結合を示し、
     Rは、少なくとも1個の水素原子がヒドロキシ基、ヒドロキシメチル基又は炭素原子数1~5のアルコキシメチル基で置換されている炭素原子数1~10のアルキル基又は炭素原子数6~10の芳香族炭化水素基を示す。〕
    で表される構造単位を含む有機重合体を含む、請求項1~3のいずれか1項に記載の組成物。
    The (A) organic polymer is
    (A1) General formula (1):
    Figure JPOXMLDOC01-appb-C000001

    [Where,
    R 1 represents a hydrogen atom or a methyl group,
    Q 1 represents an ester bond or an amide bond,
    R 2 is an alkyl group having 1 to 10 carbon atoms or 6 to 10 carbon atoms in which at least one hydrogen atom is substituted with a hydroxy group, a hydroxymethyl group or an alkoxymethyl group having 1 to 5 carbon atoms. An aromatic hydrocarbon group is shown. ]
    The composition according to any one of claims 1 to 3, comprising an organic polymer comprising a structural unit represented by:
  5.  上記(A1)有機重合体が、
     一般式(2):
    Figure JPOXMLDOC01-appb-C000002

    〔式中、
     Rは、水素原子又はメチル基を示し、
     RおよびRは、同一または異なっていてもよく、水素原子又はヒドロキシ基若しくはカルボキシ基で置換されていてもよい炭素原子数1~4のアルキル基を示す。〕
    で表される構造単位をさらに含む、請求項4記載の組成物。
    The (A1) organic polymer is
    General formula (2):
    Figure JPOXMLDOC01-appb-C000002

    [Where,
    R 3 represents a hydrogen atom or a methyl group,
    R 4 and R 5 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms which may be substituted with a hydroxy group or a carboxy group. ]
    The composition of Claim 4 which further contains the structural unit represented by these.
  6.  さらに(B)光酸発生剤を含む、請求項1~5のいずれか1項に記載の組成物。 The composition according to any one of claims 1 to 5, further comprising (B) a photoacid generator.
  7.  請求項1~6のいずれか1項に記載の組成物で形成された塗布膜を表面に有する基材。 A substrate having on its surface a coating film formed from the composition according to any one of claims 1 to 6.
  8.  基材がポリスチレンを含む、請求項7記載の基材。 The substrate according to claim 7, wherein the substrate comprises polystyrene.
  9.  基材の表面に、請求項1~6のいずれか1項に記載の組成物を用いて塗布膜を形成する工程を含む、表面に塗布膜を有する基材の製造方法。 A method for producing a substrate having a coating film on the surface, comprising a step of forming a coating film on the surface of the substrate using the composition according to any one of claims 1 to 6.
  10.  基材がポリスチレンを含む、請求項9記載の製造方法。 The manufacturing method according to claim 9, wherein the substrate contains polystyrene.
  11.  請求項6記載の組成物を用いて形成されたパターンを表面に有する基材。 A substrate having on the surface a pattern formed using the composition according to claim 6.
  12.  基材の表面に、請求項6記載の組成物を用いて塗布膜を形成する工程、該塗布膜に光を照射する工程、及び露光後の塗布膜を現像する工程を含む、パターン付き基材の製造方法。 A patterned substrate comprising a step of forming a coating film on the surface of the substrate using the composition according to claim 6, a step of irradiating the coating film with light, and a step of developing the coating film after exposure. Manufacturing method.
  13.  基材の表面に、請求項6記載の組成物を用いて塗布膜を形成する工程、該塗布膜に光を照射する工程、及び露光後の塗布膜を現像する工程を含む、パターン形成方法。 A pattern forming method comprising a step of forming a coating film on the surface of a substrate using the composition according to claim 6, a step of irradiating the coating film with light, and a step of developing the coating film after exposure.
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