WO2016099035A1 - Novel boron carbon-based piezoelectric material, and film and device using same - Google Patents

Novel boron carbon-based piezoelectric material, and film and device using same Download PDF

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WO2016099035A1
WO2016099035A1 PCT/KR2015/012301 KR2015012301W WO2016099035A1 WO 2016099035 A1 WO2016099035 A1 WO 2016099035A1 KR 2015012301 W KR2015012301 W KR 2015012301W WO 2016099035 A1 WO2016099035 A1 WO 2016099035A1
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piezoelectric
piezoelectric material
film
carbon
boron
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PCT/KR2015/012301
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French (fr)
Korean (ko)
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손원배
이상준
김영식
김수진
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주식회사 효성
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity

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  • the present invention relates to a novel boron carbon-based piezoelectric material, a film and a device using the same, and more particularly, is made of boron carbon oxynitrate (BCNO) by intercalating carbon into boron nitride (BN).
  • BCNO boron carbon oxynitrate
  • BN boron nitride
  • the present invention relates to a boron carbon piezoelectric material of an anisotropic material and a novel boron piezoelectric material and a film and a device using the same.
  • Piezoelectric material is a material that converts mechanical energy into electrical energy. Applications of this material include the use of ignition elements, buzzers, resonators, ultrasonic vibrators, piezoelectric speakers, infrared sensors, etc. It is widely used for motors, piezoelectric transformers, medical ultrasonic devices, military sonar, gyroscopes, and optical displacement devices.
  • piezoelectric materials can be divided into two types: the first generator that produces electrical energy using the piezoelectric effect, and the actuator that creates physical displacement such as vibration using the reverse piezoelectric effect. Is second.
  • a piezoelectric thin film is most commonly used as a method of manufacturing an actuator, and mainly has a structure that generates vibration by applying electrical energy.
  • pure piezoelectric thin films are used, they do not have flexibility and transparency. Therefore, in the future, the piezoelectric actuator needs to implement not only vibration but also a bending mode in which the device is bent and a transparent piezoelectric layer that can be used in a display element.
  • JP 2012-211278 discloses a method for producing a BCNO phosphor, comprising a calcined oxidative calcining process of a nitrogen boron compound in an oxidizing atmosphere, wherein the molar ratio of boron and nitrogen constituting the nitrogen boron compound is 0.05: 1 to 0.5:
  • a method for producing a BCNO phosphor composed of boron (B), carbon (C), nitrogen (N) and oxygen (O), which is in the range of 1, has been proposed.
  • JP Published Patent Application No. 2013-010878 discloses a precursor conditioner process for mixing boric acid and / or boric acid derivatives with nitrogen boron polymer compounds having a decomposition temperature of 200 ° C.
  • a method for producing a BCNO phosphor comprising at least a calcined oxidative calcining step has been proposed.
  • Korean Laid-Open Patent Publication No. 2013-139603 discloses forming a first electrode layer on a first flexible substrate; Spin coating a piezoelectric composite layer mixed with a piezoelectric powder and a polymer on the first electrode layer; Hardening the piezoelectric composite layer by heat treatment; And bonding a second flexible substrate having a second electrode layer formed thereon onto the cured piezoelectric composite layer, and in Korean Unexamined Patent Publication No. 2007-69986, a method of manufacturing a flexible piezoelectric energy harvesting device.
  • Patent Document 1 JP JP 2012-211278 A
  • Patent Document 2 JP JP 2013-010878 A
  • Patent Document 3 Korean Patent Publication No. 2013-139603
  • Patent Document 4 Korean Patent Publication No. 2007-69986
  • the present invention is to provide a piezoelectric material capable of implementing a bending mode and a transparent piezoelectric layer in the technology related to piezoelectric elements such as actuators.
  • an object of the present invention is to provide an environment-friendly and low-cost piezoelectric material that solves the problems of chemical instability, hazards to humans and the environment, and low piezoelectric properties, which are disadvantages of conventional piezoelectric materials.
  • another object of the present invention is to provide a new boron carbon-based piezoelectric material that can be applied to the piezoelectric element of the actuator and the flexible bending mode can be implemented.
  • another object of the present invention is to provide a film containing piezoelectric material in an organic polymer, but can be implemented to have flexibility and transparency.
  • another object of the present invention is to provide an actuator device for securing transparency by adjusting the solid solution ratio of the piezoelectric material in the organic polymer.
  • the present invention is the polarization (Polarization) by applying an electric field to an anisotropic material made of boron carbon oxynitrate (BCNO) by intercalation between boron nitride (BN) and carbon It provides a boron carbon-based piezoelectric material, characterized in that made.
  • BCNO boron carbon oxynitrate
  • the present invention provides a film formed in the form of a thick film by mixing the boron carbon-based piezoelectric material as described above.
  • the present invention also provides a device for a piezoelectric actuator comprising the film.
  • the piezoelectric material according to the present invention overcomes the disadvantages of the conventional piezoelectric material and can economically secure an environmentally friendly piezoelectric material that solves all problems such as chemical instability, harmfulness to human body and environment, and low piezoelectric properties.
  • the piezoelectric material of the present invention has a process suitable for mass production through low-temperature synthesis and simple processes, which has the advantage that low-cost piezoelectric material can be manufactured.
  • the piezoelectric material of the present invention is easy to control the particle size and shape from tens of nanometers to several micro, it can be widely used in a wide variety of fields.
  • the piezoelectric element according to the present invention unlike the invention related to the device using the conventional reverse piezoelectric effect, by producing a film having a flexibility and transparency, it can be applied to not only vibration actuators, but also bending actuators and display elements It works.
  • FIG. 1 is a process diagram showing a process for manufacturing a film using BCNO, a boron carbon piezoelectric material according to the present invention.
  • FIG. 2 is a configuration diagram of a piezoelectric actuator device in which an electrode is applied to a film manufactured using BCNO, which is a boron carbon piezoelectric material according to the present invention.
  • Figure 3 is a schematic diagram showing the use of a piezoelectric actuator device manufactured using a boron carbon-based piezoelectric material BCNO according to the present invention.
  • the present invention relates to a technique for forming a boron carbon-based piezoelectric material of boron carbon oxynitrate (BCNO), forming it as a film on a substrate, and using the same to produce a piezoelectric actuator device.
  • BCNO boron carbon oxynitrate
  • BCNO is synthesized into BCNO, an anisotropic material by intercalating carbon into boron nitride (BN) material, which is an isotropic material having a hexagonal plate structure.
  • BN boron nitride
  • Piezoelectric properties are realized by applying polarization to BCNO, an anisotropic material, to generate polarization.
  • a boron carbon piezoelectric material in order to prepare a boron carbon piezoelectric material according to the present invention, after synthesis of BCNO powder through a solid phase method or a hydrothermal synthesis method, the boron carbon oxynitride and the silicon organic binder thus prepared are mixed. . After applying the mixed solution on the electrode, the solution can be cured with heat to produce a film having piezoelectric properties. Through the poling process of applying artificial voltage to the manufactured piezoelectric film, piezoelectric properties may be improved.
  • the BCNO piezoelectric material thus prepared has a melting point and anisotropic wurtzite structure close to 3000 ° C.
  • the BCNO powder may be used to form a film on a substrate.
  • h-BN powder may be mixed with an organic polymer such as UREA in a solvent such as polyethylene glycol (PEG) and coated on the substrate.
  • PEG polyethylene glycol
  • the film can be produced by drying, drying and firing.
  • urea, a silicone-based organic binder, etc. can be used as an organic polymer
  • PEG can be used as a solvent.
  • the amount of piezoelectric material used may have fluidity in order to form a film using the piezoelectric material. If the amount of the piezoelectric material powder used is too small, there is a problem of deterioration of the piezoelectric properties, and if the amount of the piezoelectric material is used too much, there is a problem of difficulty in uniform film production.
  • the organic polymer and BCNO powder may be uniformly mixed, and then coated in a film form on an electrode / substrate to prepare a film.
  • the coated film can be formed to a thickness of 100 ⁇ 500 ⁇ m, it is possible to adjust the solid solution ratio of the piezoelectric material powder and the film thickness according to the use. In addition, it is possible to obtain a vibration (flexible) bending (bending) effect depending on the application method.
  • the film and the device can be preferably manufactured by using the BCNO piezoelectric material according to the present invention.
  • FIG. 1 is a process chart showing a process of manufacturing a film using BCNO, a boron carbon piezoelectric material according to the present invention.
  • BCNO paste is prepared by mixing and dispersing BCNO in an appropriate ratio in an organic polymer, and then applying BCNO paste on an electrode substrate. At this time, the amount of BCNO is appropriately adjusted according to the use and mixed with the organic polymer.
  • the piezoelectric actuator device may be manufactured by connecting the electrode substrate on the BCNO paste layer (film), which is the cured coating layer.
  • the structure of the piezoelectric actuator device thus manufactured may be configured as shown in FIG. 2.
  • FIG. 2 is a configuration diagram of a piezoelectric actuator device in which an electrode is applied to a film manufactured using BCNO, which is a boron carbon piezoelectric material according to the present invention.
  • BCNO a boron carbon piezoelectric material according to the present invention.
  • a device including a film in which the piezoelectric material and the organic polymer according to the present invention are mixed is shown.
  • the piezoelectric actuator to which the film containing the piezoelectric material manufactured according to the present invention is applied has the flexibility and transparency of the film when applied to a display panel and the like, and exhibits very excellent physical properties.
  • Figure 3 is a schematic diagram showing the use of a piezoelectric actuator device manufactured using a boron carbon-based piezoelectric material BCNO according to the present invention.
  • the present invention can be applied to a new piezoelectric material, a film using the same, and a piezoelectric actuator including the same.
  • the invention of an eco-friendly and low-cost novel piezoelectric material that solves the problems of chemical instability, harmful to humans and the environment, and low piezoelectric properties, which are disadvantages of the conventional piezoelectric material, and flexibility and transparency using the same It can manufacture the piezoelectric film which has.
  • the BCNO novel piezoelectric material according to the present invention is manufactured by intercalating carbon into a BN base material of a hexagonal structure, which is BCNO's ceramic raw material, and has a lower manufacturing cost than conventional piezoelectric materials, and is used in Pb-based and non-Pb-based materials, which are conventional piezoelectric materials. Compared with external environment and chemically stable material, it is excellent piezoelectric material.
  • the production of BCNO also has a suitable process for mass production through low-temperature synthesis and simple process has the advantage that low-cost piezoelectric material can be manufactured.
  • the piezoelectric material according to the present invention is easy to control the particle size and shape from tens of nanometers to several microns through a solid phase method, a liquid phase method and a gas phase method, which is a conventional ceramic synthesis method, the complexing device, From buzzers, resonators, ultrasonic vibrators, piezoelectric speakers, and infrared sensors to advanced high value-added inkjet printers, piezoelectric motors, piezoelectric transformers, medical ultrasound devices, military sonars, gyroscopes (horizontal angle controllers), and optical displacement devices. It is a piezoelectric material that can be used in various fields.
  • the piezoelectric material according to the present invention can be applied to an actuator and a display element.
  • the device using a conventional reverse piezoelectric effect by producing a film having a flexibility and transparency, it can be preferably applied as a bending actuator and a display device as well as a vibration actuator.
  • the present invention includes a display manufactured by applying a piezoelectric actuator including a film manufactured using the BCNO piezoelectric element of the present invention as described above.
  • raw materials of boron, carbon, and nitride were fired at a high temperature of 1500 ° C. or higher by a solid phase method to synthesize BCNO piezoelectric powder.
  • raw materials of the three elements were synthesized at a temperature of 150 ° C. or more by hydrothermal synthesis to synthesize piezoelectric powders.
  • Example 1 10 g of BCNO piezoelectric material and 90 g of polydimethyl siloxane were mixed and then coated on a substrate electrode, followed by heat treatment at 100 ° C. to prepare a film.
  • the piezoelectric properties of the piezoelectric film was improved through a poling process to artificially apply a voltage.
  • a piezoelectric device was manufactured, which realized vibration and bending (bending) through a reverse piezoelectric effect.
  • the piezoelectric layer was fabricated in the form of a pure ceramic thin film to realize the characteristics as a surface acoustic wave element, a piezoelectric resonator, and a piezoelectric actuator.
  • the piezoelectric material according to the present invention is an advanced high value-added inkjet printer, piezoelectric motor, piezoelectric transformer, medical ultrasonic device, military SONAR, gyroscope from a ignition element, a buzzer, a resonator, an ultrasonic vibrator, a piezoelectric speaker, an infrared sensor, and the like. Controller), optical displacement device, etc., can be used in a wide variety of fields.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Composite Materials (AREA)
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Abstract

The present invention relates to a novel boron carbon-based piezoelectric material, and a film and a device using the same and, more specifically, to a novel boron-based piezoelectric material, and a film and a device using the same, the present invention being capable of utilizing an anisotropic boron carbon-based piezoelectric material, which is prepared from boron carbon oxynitride (BCNO) through the intercalation of boron nitride (BN) and carbon, a film, which is formed on a substrate by mixing the piezoelectric material with an organic polymer, and a device, which is manufactured using the same can be utilized.

Description

신규한 보론카본계 압전재료와 이를 이용한 필름 및 소자New Boron Carbon Piezoelectric Materials and Films and Devices Using Them
본 발명은 신규한 보론카본계 압전재료와 이를 이용한 필름 및 소자에 관한 것으로서, 더욱 상세하게는 보론나이트라이드(BN)에 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질의 보론카본계 압전재료와 이를 유기중합체와 혼합하여 기판에 형성된 필름 및 이를 이용한 소자를 제조하여 활용할 수 있도록 하는 신규한 보론계 압전재료와 이를 이용하는 필름 및 소자에 관한 것이다.The present invention relates to a novel boron carbon-based piezoelectric material, a film and a device using the same, and more particularly, is made of boron carbon oxynitrate (BCNO) by intercalating carbon into boron nitride (BN). The present invention relates to a boron carbon piezoelectric material of an anisotropic material and a novel boron piezoelectric material and a film and a device using the same.
압전 재료는 기계적 에너지가 전기적 에너지로 변환되는 특성을 갖고 있는 재료로서, 이 물질의 응용 분야로 착화소자, 부저, 레조네이터, 초음파 진동자, 압전 스피커, 적외선 센서 등에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전 모터, 압전 트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프(수평각도제어기), 광변위 소자 등에 이르기까지 매우 다양하게 사용하고 있다. Piezoelectric material is a material that converts mechanical energy into electrical energy. Applications of this material include the use of ignition elements, buzzers, resonators, ultrasonic vibrators, piezoelectric speakers, infrared sensors, etc. It is widely used for motors, piezoelectric transformers, medical ultrasonic devices, military sonar, gyroscopes, and optical displacement devices.
종래의 압전 재료는 크게 Pb 계와 Non-Pb계로 나누어 지며, 대표적인 Pb 계인 PZT(PbZrTiO3)는 우수한 압전성에도 불구하고 불안정한 화학적 특성, 인체 및 환경에 유해성 문제가 있다. 또한, Non-Pb 계 압전 재료인 BaTiO3, Bi 층상 화합물, Tungsten-Bronze 구조 화합물 등은 상대적으로 Pb 계의 PZT 압전 특성에 비해 열위한 단점을 가지고 있다.Conventional piezoelectric materials are largely divided into Pb-based and Non-Pb-based, and PZT (PbZrTiO 3 ), which is a representative Pb-based, has unstable chemical properties, harmful to humans and the environment, despite excellent piezoelectricity. In addition, BaTiO 3 , Bi layered compounds, Tungsten-Bronze structural compounds, etc., which are non-Pb piezoelectric materials, have a relatively weak disadvantage compared to PZT piezoelectric properties of Pb.
따라서, 이러한 Pb 계 및 Non-Pb 계 압전 재료의 단점을 해결하기 위해, 외부 환경에 대해 구조적 및 화학적으로 안정되고 인체 및 환경에 유해성이 없는 우수한 압전 재료에 대한 연구가 필요하다. Therefore, in order to solve the shortcomings of the Pb-based and non-Pb-based piezoelectric materials, it is necessary to study excellent piezoelectric materials that are structurally and chemically stable with respect to the external environment and are not harmful to the human body and the environment.
압전 재료의 사용은 크게 두 가지로 나눌 수가 있는데, 압전 효과를 이용하여 전기 에너지를 생산하는 제네레이터(Generator)가 첫 번째이고, 역압전 효과를 이용하여 진동 등의 물리적 변위를 만들어내는 액튜에이터(Actuator)가 두 번째이다.The use of piezoelectric materials can be divided into two types: the first generator that produces electrical energy using the piezoelectric effect, and the actuator that creates physical displacement such as vibration using the reverse piezoelectric effect. Is second.
그 중에서, 액튜에이터를 제작하는 방법으로는 압전체 박막 형태가 가장 많이 이용되고 있으며, 주로 전기 에너지를 가하여 진동을 발생시키는 구조이다. 그러나 순수 압전체 박막을 사용하기 때문에 유연성과 투명도를 갖지 못한다. 그러므로 향후, 압전 액튜에이터는 진동뿐만이 아니라, 디바이스가 휘어지는 벤딩 모드의 구현, 디스플레이 소자에 이용될 수 있는 투명한 압전층의 구현이 필요한 실정이다.Among them, a piezoelectric thin film is most commonly used as a method of manufacturing an actuator, and mainly has a structure that generates vibration by applying electrical energy. However, since pure piezoelectric thin films are used, they do not have flexibility and transparency. Therefore, in the future, the piezoelectric actuator needs to implement not only vibration but also a bending mode in which the device is bent and a transparent piezoelectric layer that can be used in a display element.
종래 JP 특개 제2012-211278호에서는 B-C-N-O 형광체의 제조방법으로서, 질소붕소 화합물을 산화 분위기 하에서 소성 산화 소성 공정을 포함하고, 상기 질소 붕소 화합물을 구성하는 붕소와 질소의 몰비가 0.05 : 1 ~ 0.5 : 1의 범위인 것을 특징으로 하는 붕소 (B), 탄소 (C), 질소 (N) 및 산소 (O)로 구성된 B-C-N-O 형광체의 제조방법에 관하여 제안하고 있다. 또한 JP 특개 제2013-010878호에서는 붕산 및/또는 붕산 유도체와 분해 온도 200 ℃ 이상의 질소붕소 고분자 화합물을 혼합하여 열분해 공정에 붙이고 형광체 전구체를 제조하는 전구 컨디션 제 공정과, 상기 형광체 전구체를 산화 분위기 하에서 소성 산화 소성 공정을 적어도 포함 B-C-N-O 형광체의 제조방법이 제안되어 있다.Conventional JP 2012-211278 discloses a method for producing a BCNO phosphor, comprising a calcined oxidative calcining process of a nitrogen boron compound in an oxidizing atmosphere, wherein the molar ratio of boron and nitrogen constituting the nitrogen boron compound is 0.05: 1 to 0.5: A method for producing a BCNO phosphor composed of boron (B), carbon (C), nitrogen (N) and oxygen (O), which is in the range of 1, has been proposed. In addition, JP Published Patent Application No. 2013-010878 discloses a precursor conditioner process for mixing boric acid and / or boric acid derivatives with nitrogen boron polymer compounds having a decomposition temperature of 200 ° C. or higher and attaching them to a pyrolysis process to produce a phosphor precursor, and the phosphor precursor in an oxidizing atmosphere. A method for producing a BCNO phosphor comprising at least a calcined oxidative calcining step has been proposed.
그러나 이러한 종래 기술들은 형광체에 관한 기술로서 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드의 구현과 투명한 압전층에 관하여 제시하지 못하고 있다.However, these prior arts do not suggest the implementation of the bending mode and the transparent piezoelectric layer in the technology related to the phosphor and the technology related to the piezoelectric element such as an actuator.
한편, 압전 재료가 사용되는 기술과 관련하여 한국공개특허 제2013-139603호에서는 제 1 플렉서블 기판 상에 제 1 전극층을 형성시키는 단계; 상기 제 1 전극층에 압전 파우더와 중합체를 혼합한 압전 복합체층을 스핀 코팅하는 단계; 상기 압전 복합체층을 열처리하여 경화시키는 단계; 및 상기 경화된 압전 복합체층 상에 제 2 전극층이 형성된 제 2 플렉서블 기판을 접합시키는 단계를 포함하는 플렉서블 압전 에너지 하베스팅 소자의 제조 방법에 제안되어 있으며, 한국공개특허 제2007-69986호에서는 기체와, 상기 기체의 상방에 형성된, 니오븀산 칼륨 나트륨으로 이루어지는 제1 압전체층을 포함하는 압전체 적층체로서, 압전물질로 NKN 물질을 압전 박막으로 사용하는 기술이 제안되어 있다.On the other hand, in relation to a technique in which a piezoelectric material is used, Korean Laid-Open Patent Publication No. 2013-139603 discloses forming a first electrode layer on a first flexible substrate; Spin coating a piezoelectric composite layer mixed with a piezoelectric powder and a polymer on the first electrode layer; Hardening the piezoelectric composite layer by heat treatment; And bonding a second flexible substrate having a second electrode layer formed thereon onto the cured piezoelectric composite layer, and in Korean Unexamined Patent Publication No. 2007-69986, a method of manufacturing a flexible piezoelectric energy harvesting device. As a piezoelectric laminate comprising a first piezoelectric layer formed of sodium potassium niobate formed above the substrate, a technique of using an NKN material as a piezoelectric thin film as a piezoelectric material has been proposed.
따라서 이러한 종래 기술 역시 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드와 투명한 압전층의 구현에 관하여 제시하지 못하고 있다.Therefore, such a prior art also fails to present a bending mode and the implementation of a transparent piezoelectric layer in a technique related to a piezoelectric element such as an actuator.
[선행기술문헌][Preceding technical literature]
[특허문헌][Patent Documents]
(특허문헌 1) JP 특개 제2012-211278호(Patent Document 1) JP JP 2012-211278 A
(특허문헌 2) JP 특개 제2013-010878호(Patent Document 2) JP JP 2013-010878 A
(특허문헌 3) 한국공개특허 제2013-139603호(Patent Document 3) Korean Patent Publication No. 2013-139603
(특허문헌 4) 한국공개특허 제2007-69986호(Patent Document 4) Korean Patent Publication No. 2007-69986
상기와 같은 종래기술의 문제점을 해결하기 위해, 본 발명은 액튜에이터 등의 압전 소자에 관한 기술에 벤딩 모드와 투명한 압전층을 구현할 수 있는 압전재료의 제공을 해결과제로 한다.In order to solve the problems of the prior art as described above, the present invention is to provide a piezoelectric material capable of implementing a bending mode and a transparent piezoelectric layer in the technology related to piezoelectric elements such as actuators.
따라서 본 발명의 목적은 종래 압전재료의 단점인 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 문제들을 해결한 친환경적이며 저 원가의 압전재료를 제공하는데 있다.Accordingly, an object of the present invention is to provide an environment-friendly and low-cost piezoelectric material that solves the problems of chemical instability, hazards to humans and the environment, and low piezoelectric properties, which are disadvantages of conventional piezoelectric materials.
또한, 본 발명의 다른 목적은 액튜에이터의 압전 소자에 적용 가능하고 유연성이 있는 벤딩 모드의 구현이 가능한 새로운 보론카본계 압전재료를 제공하는데 있다.In addition, another object of the present invention is to provide a new boron carbon-based piezoelectric material that can be applied to the piezoelectric element of the actuator and the flexible bending mode can be implemented.
또한, 본 발명의 또 다른 목적은 유기 중합체 내에 압전재료를 함유하되 유연성과 투명성을 가지도록 구현이 가능한 필름을 제공하는데 있다.In addition, another object of the present invention is to provide a film containing piezoelectric material in an organic polymer, but can be implemented to have flexibility and transparency.
또한 본 발명의 또 다른 목적은 유기 중합체 내에 압전 재료의 고용 비율을 조절하여 투명성을 확보한 액튜에이터용 소자를 제공하는데 있다.In addition, another object of the present invention is to provide an actuator device for securing transparency by adjusting the solid solution ratio of the piezoelectric material in the organic polymer.
위와 같은 본 발명의 과제 해결을 위하여, 본 발명은 보론나이트라이드 (BN)와 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질에 전계를 가하여 분극(Polarization)이 이루어진 것을 특징으로 하는 보론카본계 압전재료를 제공한다.In order to solve the problems of the present invention as described above, the present invention is the polarization (Polarization) by applying an electric field to an anisotropic material made of boron carbon oxynitrate (BCNO) by intercalation between boron nitride (BN) and carbon It provides a boron carbon-based piezoelectric material, characterized in that made.
또한, 본 발명은 상기와 같은 보론카본계 압전재료가 유기 중합체에 혼합되어 후막형태로 형성된 필름을 제공한다.In addition, the present invention provides a film formed in the form of a thick film by mixing the boron carbon-based piezoelectric material as described above.
또한 본 발명은 상기 필름을 포함하는 압전 액튜에이터용 소자를 제공한다.The present invention also provides a device for a piezoelectric actuator comprising the film.
본 발명에 따른 압전재료는 종래 압전재료의 단점을 극복한 것으로서 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 등의 문제들을 모두 해결한 친환경적인 압전재료를 경제적으로 확보할 수 있다.The piezoelectric material according to the present invention overcomes the disadvantages of the conventional piezoelectric material and can economically secure an environmentally friendly piezoelectric material that solves all problems such as chemical instability, harmfulness to human body and environment, and low piezoelectric properties.
또한, 본 발명의 압전재료는 저온 합성 및 단순한 공정을 통해 양산에 적합한 공정을 가지고 있어 저 원가 압전 재료 제조가 가능한 장점을 가지고 있다In addition, the piezoelectric material of the present invention has a process suitable for mass production through low-temperature synthesis and simple processes, which has the advantage that low-cost piezoelectric material can be manufactured.
또한 본 발명의 압전재료는 수십나노에서 수마이크로의 입자 크기 및 형상 제어가 용이하여, 매우 다양한 분야에 널리 활용될 수 있다.In addition, the piezoelectric material of the present invention is easy to control the particle size and shape from tens of nanometers to several micro, it can be widely used in a wide variety of fields.
특히, 본 발명에 따른 압전소자는 기존의 역압전 효과를 이용한 소자에 관한 발명품과는 달리, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자에 적용할 수 있는 효과가 있다.In particular, the piezoelectric element according to the present invention, unlike the invention related to the device using the conventional reverse piezoelectric effect, by producing a film having a flexibility and transparency, it can be applied to not only vibration actuators, but also bending actuators and display elements It works.
도 1은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 필름을 제조하는 공정으로 도시한 공정도이다.1 is a process diagram showing a process for manufacturing a film using BCNO, a boron carbon piezoelectric material according to the present invention.
도 2는 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 필름에 전극이 적용된 압전 액튜에이터용 소자의 구성도이다.2 is a configuration diagram of a piezoelectric actuator device in which an electrode is applied to a film manufactured using BCNO, which is a boron carbon piezoelectric material according to the present invention.
도 3은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 압전 액튜에이터용 소자가 사용되는 것을 보여주는 사용 모식도이다.Figure 3 is a schematic diagram showing the use of a piezoelectric actuator device manufactured using a boron carbon-based piezoelectric material BCNO according to the present invention.
이하, 본 발명을 하나의 구현예로서 더욱 상세하게 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail as one embodiment.
본 발명은 보론카본계 압전재료를 보론카본 옥시나이트레이트(BCNO)로 구성하고 이를 기판 위에서 필름으로 형성하고 이를 이용하여 압전 액튜에이터용 소자로 제조하는 기술에 관한 것이다.The present invention relates to a technique for forming a boron carbon-based piezoelectric material of boron carbon oxynitrate (BCNO), forming it as a film on a substrate, and using the same to produce a piezoelectric actuator device.
본 발명의 바람직한 구현예에 따르면, BCNO는 Hexagonal 판상 구조를 갖는 등방성 물질인 보론나이트라이드(BN) 물질에 탄소(Carbon)를 층간삽입 (Intercalation) 하여 이방성 물질인 BCNO로 합성된다. 이러한 이방성 물질인 BCNO에 전계를 가하여 분극(Polarization)을 발생킴으로써 압전 특성이 구현된다.According to a preferred embodiment of the present invention, BCNO is synthesized into BCNO, an anisotropic material by intercalating carbon into boron nitride (BN) material, which is an isotropic material having a hexagonal plate structure. Piezoelectric properties are realized by applying polarization to BCNO, an anisotropic material, to generate polarization.
이에 대해 좀더 구체적으로 설명하면, 예컨대 본 발명에 따른 보론카본계 압전재료 제조를 위해서는 고상법, 혹은 수열합성법을 통하여 BCNO 분말을 합성한 후 이렇게 제조된 보론카본 옥시나이트라이드와 실리콘계 유기 바인더를 혼합한다. 혼합한 용액을 전극위에 도포한 후, 열로써 용액을 경화시켜 압전특성을 갖는 필름을 제조할 수 있다. 제작된 압전필름에 인위적인 전압을 인가하는 poling 공정을 통해 압전특성을 향상시킬 수 있다.In more detail, for example, in order to prepare a boron carbon piezoelectric material according to the present invention, after synthesis of BCNO powder through a solid phase method or a hydrothermal synthesis method, the boron carbon oxynitride and the silicon organic binder thus prepared are mixed. . After applying the mixed solution on the electrode, the solution can be cured with heat to produce a film having piezoelectric properties. Through the poling process of applying artificial voltage to the manufactured piezoelectric film, piezoelectric properties may be improved.
본 발명에 따른 바람직한 구현예에 따르면, 이렇게 제조된 BCNO 압전재료는 3000 ℃ 에 가까운 용융점과 이방성의 wurtzite 구조를 갖는다.According to a preferred embodiment according to the present invention, the BCNO piezoelectric material thus prepared has a melting point and anisotropic wurtzite structure close to 3000 ° C.
본 발명에 따르면 이러한 BCNO 분말을 이용하여 기판 상에서 필름을 형성하여 제조할 수 있는데, 예컨대 h-BN 분말을 폴리에틸렌글리콜(PEG) 등의 용매 중에서 UREA 등과 같은 유기 중합체와 함께 혼합하여 이를 기판상에 코팅하고 건조하고 소성함으로써 필름을 제조할 수 있다. 이때, 유기 중합체로서는 우레아, 실리콘계열의 유기바인더 등을 사용할 수 있으며, 용매로서는 PEG 를 사용할 수 있다. According to the present invention, the BCNO powder may be used to form a film on a substrate. For example, h-BN powder may be mixed with an organic polymer such as UREA in a solvent such as polyethylene glycol (PEG) and coated on the substrate. The film can be produced by drying, drying and firing. At this time, urea, a silicone-based organic binder, etc. can be used as an organic polymer, PEG can be used as a solvent.
본 발명의 바람직한 구현예에 따르면, 압전재료를 사용하여 필름을 구성하기 위해서는 압전재료의 사용량이 유동성을 가질 수 있다. 만일 그 압전재료 분말의 사용량이 너무 소량 첨가되면 압전특성 저하의 문제가 있고, 너무 과량 첨가되면 균일한 필름제작 어려움의 문제가 있다.According to a preferred embodiment of the present invention, the amount of piezoelectric material used may have fluidity in order to form a film using the piezoelectric material. If the amount of the piezoelectric material powder used is too small, there is a problem of deterioration of the piezoelectric properties, and if the amount of the piezoelectric material is used too much, there is a problem of difficulty in uniform film production.
본 발명의 바람직한 구현예에 따르면, 역압전 효과를 이용한 소자를 제작하기 위하여, 유기 중합체와 BCNO 분말을 균일하게 혼합한 후, 전극/기판 위에 필름 형태로 도포하여 필름을 제조할 수 있다.According to a preferred embodiment of the present invention, in order to fabricate a device using a reverse piezoelectric effect, the organic polymer and BCNO powder may be uniformly mixed, and then coated in a film form on an electrode / substrate to prepare a film.
본 발명의 바람직한 구현예에 따르면, 도포된 필름은 100~500 μm 의 두께로 형성할 수 있으며, 용도에 따라 압전재료 분말의 고용 비율과 필름의 두께를 조절할 수 있다. 또한, 적용 방식에 따라 진동 또는 유연성이 있는 휘어짐(벤딩) 효과를 얻을 수 있다.According to a preferred embodiment of the present invention, the coated film can be formed to a thickness of 100 ~ 500 μm, it is possible to adjust the solid solution ratio of the piezoelectric material powder and the film thickness according to the use. In addition, it is possible to obtain a vibration (flexible) bending (bending) effect depending on the application method.
상기와 같이, 본 발명에 따르면 본 발명에 따른 압전재료인 BCNO를 이용하여 필름과 소자를 바람직하게 제조할 수 있다.As described above, according to the present invention, the film and the device can be preferably manufactured by using the BCNO piezoelectric material according to the present invention.
도 1은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 필름을 제조하는 과정을 도시한 공정도이다.1 is a process chart showing a process of manufacturing a film using BCNO, a boron carbon piezoelectric material according to the present invention.
도 1에 의하면, 유기 중합체에 BCNO를 적합한 비율로 혼합하여 분산시켜서 BCNO 페이스트를 제조한 다음, 전극 기판 위에 BCNO 페이스트를 도포한다. 이때 BCNO의 사용량은 용도에 따라 적절하게 조절하여 유기 중합체에 혼합한다.1, BCNO paste is prepared by mixing and dispersing BCNO in an appropriate ratio in an organic polymer, and then applying BCNO paste on an electrode substrate. At this time, the amount of BCNO is appropriately adjusted according to the use and mixed with the organic polymer.
그 다음으로는, BCNO 페이스트가 도포된 코팅층을 예컨대 80~150 ℃ 에서 열처리하여 경화시킨다. 이렇게 하면 BCNO 페이스트로 이루어진 필름이 형성된다. 이렇게 경화된 코팅층인 BCNO 페이스트층(필름) 위에 전극기판을 연결하여 압전 액튜에이터용 소자를 제조할 수 있다. 이렇게 제조된 압전 액튜에이터용 소자의 구조는 도 2에 도시한 바와 같이 구성될 수 있다. Next, the coating layer coated with BCNO paste is cured by, for example, heat treatment at 80 to 150 ° C. This forms a film of BCNO paste. The piezoelectric actuator device may be manufactured by connecting the electrode substrate on the BCNO paste layer (film), which is the cured coating layer. The structure of the piezoelectric actuator device thus manufactured may be configured as shown in FIG. 2.
도 2는 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 필름에 전극이 적용된 압전 액튜에이터용 소자의 구성도이다. 여기서는 본 발명에 따른 압전재료와 유기 중합체가 혼합된 필름을 포함하는 소자를 보여주고 있다.2 is a configuration diagram of a piezoelectric actuator device in which an electrode is applied to a film manufactured using BCNO, which is a boron carbon piezoelectric material according to the present invention. Here, a device including a film in which the piezoelectric material and the organic polymer according to the present invention are mixed is shown.
이와 같이 본 발명에 따라 제조된 압전재료를 포함하는 필름이 적용된 압전 액튜에이터는 디스플레이 패널 등에 적용되는 경우 그 필름이 유연성과 투명성을 확보하고 있으며, 매우 우수한 물성을 나타낸다.As described above, the piezoelectric actuator to which the film containing the piezoelectric material manufactured according to the present invention is applied has the flexibility and transparency of the film when applied to a display panel and the like, and exhibits very excellent physical properties.
도 3은 본 발명에 따른 보론카본계 압전재료인 BCNO를 이용하여 제조된 압전 액튜에이터용 소자가 사용되는 것을 보여주는 사용 모식도이다.Figure 3 is a schematic diagram showing the use of a piezoelectric actuator device manufactured using a boron carbon-based piezoelectric material BCNO according to the present invention.
따라서 본 발명은 새로운 압전재료와 이를 이용한 필름, 그리고 이를 포함하는 압전 액튜에이터로 적용될 수 있는 것이다.Therefore, the present invention can be applied to a new piezoelectric material, a film using the same, and a piezoelectric actuator including the same.
상기한 바와 같이 본 발명에 따르면, 종래 압전 재료의 단점인 화학적 불안정성, 인체 및 환경에 대한 유해성, 낮은 압전 특성 문제들을 해결한 친환경적이며 저 원가의 신규 압전 재료의 발명과 그것을 이용하여 유연성, 투명도를 갖는 압전 필름을 제조할 수 있다.As described above, according to the present invention, the invention of an eco-friendly and low-cost novel piezoelectric material that solves the problems of chemical instability, harmful to humans and the environment, and low piezoelectric properties, which are disadvantages of the conventional piezoelectric material, and flexibility and transparency using the same It can manufacture the piezoelectric film which has.
본 발명에 따른 BCNO 신규 압전 재료는 BCNO의 세라믹 원료인 Hexagonal 구조의 BN 기본 물질에 탄소를 Intercalation하여 제조되며 기존의 압전 재료에 비해 제조원가가 낮고 종래의 압전 재료인 Pb 계 및 Non-Pb계 물질에 비해 외부 환경 및 화학적 안정된 물질로서 우수한 압전 재료이다. 또한, BCNO의 제조 역시 저온 합성 및 단순한 공정을 통해 양산에 적합한 공정을 가지고 있어 저 원가 압전 재료 제조가 가능한 장점을 가지고 있다.The BCNO novel piezoelectric material according to the present invention is manufactured by intercalating carbon into a BN base material of a hexagonal structure, which is BCNO's ceramic raw material, and has a lower manufacturing cost than conventional piezoelectric materials, and is used in Pb-based and non-Pb-based materials, which are conventional piezoelectric materials. Compared with external environment and chemically stable material, it is excellent piezoelectric material. In addition, the production of BCNO also has a suitable process for mass production through low-temperature synthesis and simple process has the advantage that low-cost piezoelectric material can be manufactured.
또한, 본 발명의 바람직한 구현예에 따르면, 본 발명에 따른 압전재료는 종래의 세라믹 합성법인 고상법, 액상법 및 기상법 등을 통해 수십나노에서 수마이크로의 입자 크기 및 형상 제어가 용이하여, 착화소자, 부저, 레조네이터, 초음파진동자, 압전스피커, 적외선 센서 등에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전모터, 압전트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프 (수평각도제어기), 광변위소자 등에 이르기까지 매우 다양한 분야에 활용 할 수 있는 압전 재료이다.In addition, according to a preferred embodiment of the present invention, the piezoelectric material according to the present invention is easy to control the particle size and shape from tens of nanometers to several microns through a solid phase method, a liquid phase method and a gas phase method, which is a conventional ceramic synthesis method, the complexing device, From buzzers, resonators, ultrasonic vibrators, piezoelectric speakers, and infrared sensors to advanced high value-added inkjet printers, piezoelectric motors, piezoelectric transformers, medical ultrasound devices, military sonars, gyroscopes (horizontal angle controllers), and optical displacement devices. It is a piezoelectric material that can be used in various fields.
이러한 본 발명에 따른 압전재료는 액튜에이터와 디스플레이 소자로 적용될 수 있다.The piezoelectric material according to the present invention can be applied to an actuator and a display element.
특히, 기존의 역압전 효과를 이용한 소자와는 달리, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자로서 바람직하게 적용될 수 있다.In particular, unlike the device using a conventional reverse piezoelectric effect, by producing a film having a flexibility and transparency, it can be preferably applied as a bending actuator and a display device as well as a vibration actuator.
따라서 본 발명은 상기와 같은 본 발명의 BCNO 압전 소자를 이용하여 제조된 필름을 포함하는 압전 액튜에이터를 적용하여 제조된 디스플레이를 포함한다.Therefore, the present invention includes a display manufactured by applying a piezoelectric actuator including a film manufactured using the BCNO piezoelectric element of the present invention as described above.
이하, 본 발명을 실시예에 의거 상세하게 설명하겠는 바, 본 발명이 실시예에 의해 한정되는 것은 아니다.EMBODIMENT OF THE INVENTION Hereinafter, although this invention is demonstrated in detail based on an Example, this invention is not limited by an Example.
실시예 1 : BCNO 압전재료의 제조Example 1 Preparation of BCNO Piezoelectric Materials
보론, 카본, 나이트라이드의 원료를 고상법으로 1500 ℃ 이상의 고온에서 소성하여 BCNO 압전분말을 합성하였다. 또는 상기 세가지 원소의 원료를 수열합성법으로 150 ℃ 이상의 온도에서 합성하여 압전분말을 합성하였다.The raw materials of boron, carbon, and nitride were fired at a high temperature of 1500 ° C. or higher by a solid phase method to synthesize BCNO piezoelectric powder. Alternatively, raw materials of the three elements were synthesized at a temperature of 150 ° C. or more by hydrothermal synthesis to synthesize piezoelectric powders.
실시예 2 : 필름의 제조Example 2 Preparation of Film
상기 실시예 1에서 제제돤 BCNO 압전재료 10g 과 폴리다이메틸실록세인 (Polydimethyl siloxane) 90g 을 혼합한 후 이를 기판 전극 위에 도포한 후 100 ℃ 온도에서 열처리하여 필름을 제조하였다.In Example 1, 10 g of BCNO piezoelectric material and 90 g of polydimethyl siloxane were mixed and then coated on a substrate electrode, followed by heat treatment at 100 ° C. to prepare a film.
실시예 3 : 압전 액튜에이터용 소자의 제조Example 3 Fabrication of Devices for Piezoelectric Actuators
상시 실시예 2에서 제제된 필름의 하부와 상부에 유연성을 갖는 전극을 연결한 후, 인위적으로 전압을 인가하는 poling 공정을 통해 압전필름의 압전특성을 향상시켰다. 특성을 향상시킨 압전필름을 소자에 적용하여 역압전 효과를 통한 진동, 밴딩 (휘어짐)을 구현하는 압전 소자를 제조하였다.After connecting the flexible electrode to the lower and upper portions of the film prepared in Example 2 at all times, the piezoelectric properties of the piezoelectric film was improved through a poling process to artificially apply a voltage. By applying a piezoelectric film having improved characteristics to the device, a piezoelectric device was manufactured, which realized vibration and bending (bending) through a reverse piezoelectric effect.
비교예 ; 기존의 압전재료를 이용한 필름과 압전 액튜에이터용 소자의 제조Comparative example; Fabrication of Film and Piezoelectric Actuator Using Existing Piezoelectric Materials
압전층을 순수 세라믹 박막형태로 제작하여 표면탄성파 소자, 압전 공진자, 및 압전 액츄에이터로서의 특성을 구현하였다.The piezoelectric layer was fabricated in the form of a pure ceramic thin film to realize the characteristics as a surface acoustic wave element, a piezoelectric resonator, and a piezoelectric actuator.
본 발명에 따른 압전재료는 착화소자, 부저, 레조네이터, 초음파진동자, 압전스피커, 적외선 센서 등 에서부터 첨단 고 부가 가치형인 잉크젯 프린터, 압전모터, 압전트랜스포머, 의료용 초음파기기, 군수용 SONAR, 자이로스코프 (수평각도제어기), 광변위소자 등에 이르기까지 매우 다양한 분야에 활용 할 수 있는 것이다.The piezoelectric material according to the present invention is an advanced high value-added inkjet printer, piezoelectric motor, piezoelectric transformer, medical ultrasonic device, military SONAR, gyroscope from a ignition element, a buzzer, a resonator, an ultrasonic vibrator, a piezoelectric speaker, an infrared sensor, and the like. Controller), optical displacement device, etc., can be used in a wide variety of fields.
특히, 유연성과 투명도를 확보한 필름을 제작함으로써, 진동 액튜에이터 뿐만 아니라, 벤딩 액튜에이터 및 디스플레이 소자 등에 바람직하게 적용될 수 있다.In particular, by producing a film that ensures flexibility and transparency, it can be preferably applied not only to vibration actuators, but also to bending actuators and display elements.

Claims (7)

  1. 보론나이트라이드(BN)와 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)로 제조된 이방성 물질에 전계를 가하여 분극(Polarization)이 이루어진 것을 특징으로 하는 보론카본계 압전재료.A boron carbon piezoelectric material, characterized in that polarization is made by applying an electric field to an anisotropic material made of boron carbon oxynitrate (BCNO) by intercalating boron nitride (BN) and carbon.
  2. 청구항 1에 있어서 상기 압전재료는 물리적 에너지와 전기적 에너지의 변환을 가능하게 하는 것을 특징으로 하는 보론카본계 압전재료.The boron carbon-based piezoelectric material of claim 1, wherein the piezoelectric material enables conversion of physical energy and electrical energy.
  3. 보론나이트라이드(BN)에 탄소를 층간 삽입(Intercalation)하여 보론카본 옥시나이트레이트(BCNO)를 제조하고 이렇게 제조된 보론카본 옥시나이트레이트에 전계를 가하여 분극(Polarization) 시켜 역압전효과를 구현하는 보론카본계 압전재료의 제조방법.Boron carbon oxynitrate (BCNO) is prepared by intercalation of carbon into boron nitride (BN), and boron, which realizes a reverse piezoelectric effect by applying an electric field to boron carbon oxynitrate, is polarized. Method for producing a carbon piezoelectric material.
  4. 상기 청구항 1 또는 청구항 2에 따른 압전재료가 유기 중합체에 혼합되어 이루어진 것을 특징으로 하는 필름.The piezoelectric material according to claim 1 or 2 is mixed with an organic polymer, characterized in that the film.
  5. 청구항 4에 있어서, 압전재료는 유기 중합체 90 g에 대해 10g 으로 함유된 것을 특징으로 하는 필름.The film according to claim 4, wherein the piezoelectric material is contained in 10 g based on 90 g of the organic polymer.
  6. 상기 청구항 4 또는 청구항 5에 따른 필름을 포함하는 압전 액튜에이터용 소자.A piezoelectric actuator element comprising the film according to claim 4 or 5.
  7. 상기 청구항 6에 따른 압전 액튜에이터용 소자를 포함하는 디스플레이.Display comprising the element for a piezoelectric actuator according to claim 6.
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