WO2016098826A1 - Washing and dehydrating device - Google Patents

Washing and dehydrating device Download PDF

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Publication number
WO2016098826A1
WO2016098826A1 PCT/JP2015/085269 JP2015085269W WO2016098826A1 WO 2016098826 A1 WO2016098826 A1 WO 2016098826A1 JP 2015085269 W JP2015085269 W JP 2015085269W WO 2016098826 A1 WO2016098826 A1 WO 2016098826A1
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WO
WIPO (PCT)
Prior art keywords
cleaning
cleaning liquid
tank
rotating drum
dehydrating
Prior art date
Application number
PCT/JP2015/085269
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French (fr)
Japanese (ja)
Inventor
央 竹野入
一人 富永
亮二 齋藤
Original Assignee
株式会社ニックス
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Publication of WO2016098826A1 publication Critical patent/WO2016098826A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed

Definitions

  • the present invention is a washing and dehydration suitable for washing and dehydration of parts, semi-finished products, products, containers for storing these, etc. (collectively referred to herein as “washed products”) installed in a factory. Relates to the device.
  • a cleaning / drying device for a storage tray for mechanical parts / electrical parts or a storage cassette for semiconductor wafers one or more rotary drums are installed in a cleaning tank and a plurality of parts storage containers are stored in the rotary drums.
  • a detachable basket or storing a parts container or the like directly in the rotating drum, washing while rotating the rotating drum, draining and drying by rotating the rotating drum at high speed.
  • a device characterized by drying with warm air has been proposed (see, for example, the abstract of Patent Document 1).
  • the rotary drum is connected to a rotary shaft that is rotatably held on the side surface of the cleaning tank, and is driven to rotate in a vertical plane around the rotary shaft.
  • the cleaning liquid injection nozzle that injects the cleaning liquid onto the cleaning product is disposed at the rotation center of the rotary drum.
  • the cleaning liquid pure water for primary cleaning, aqueous detergent or alkaline ion water, and ultrapure water for secondary cleaning are used.
  • Patent Document 1 Since the washing and drying apparatus described in Patent Document 1 performs washing and draining and dewatering drying in the same tank, the entire apparatus can be compactly integrated and the area occupied on the floor can be reduced.
  • the cleaning / drying apparatus described in Patent Document 1 rotates the rotating drum in a vertical plane, the cleaning product is easily shaken by the action of gravity when the rotating drum is started and stopped. Prone to the problem of colliding with and damaging the basket. If the cleaning product is fixed to the rotating drum, the cleaning product can be prevented from being damaged. However, since a lot of labor is required to fix the cleaning product, the cleaning efficiency of the cleaning product is deteriorated. In addition, since the cleaning / drying apparatus described in Patent Document 1 rotates the rotary drum in a vertical plane, the cleaning product must be taken in and out of the cleaning drum from the front side of the cleaning tank. Depending on the storage position, it is necessary to put in and out the cleaning product while crouching, so that the physical burden on the worker required to put in and out the cleaning product is great.
  • the cleaning / drying apparatus described in Patent Document 1 since the cleaning / drying apparatus described in Patent Document 1 has the cleaning liquid injection nozzle disposed substantially at the rotation center of the rotary drum, the cleaning liquid can be injected only on one surface of the cleaning product facing the cleaning liquid injection nozzle. It is difficult to clean the entire surface of the substrate uniformly. If the cleaning liquid is stored at the bottom of the cleaning tank, and the cleaning product is immersed in the stored cleaning liquid as the rotating drum rotates, the cleaning liquid can flow along the entire surface of the cleaning product. Since it takes a long time to store the cleaning liquid at the bottom of the cleaning tank, the cleaning efficiency of the cleaning product is deteriorated.
  • Patent Document 1 uses pure water, an aqueous detergent, alkaline ionized water or ultrapure water as the cleaning liquid, the cleaning effect of the cleaning product is weak, and the cleaning product is washed for a long time. Cost.
  • the present invention has been made in view of the actual situation of the prior art, and an object of the present invention is to provide a cleaning / drying apparatus capable of uniformly cleaning the entire product in a short time without damaging the cleaning product. .
  • the present invention provides an exterior case having an openable / closable tank lid, a cleaning / dehydration tank installed in the exterior case, and a rotatable storage in the cleaning / dehydration tank.
  • the rotating drum is formed in a bowl shape, and the rotation center axis of the rotating drum is set to be a rotation center axis of the rotating drum.
  • the cleaning liquid spray nozzle is attached to the inner surface of the cleaning and dehydrating tank with the cleaning liquid spray port facing the rotating drum side while being inclined with respect to the bottom surface of the exterior case.
  • the rotating drum is stored in the washing and dewatering tank with the rotation center shaft inclined with respect to the bottom surface of the outer case, so that the washing product is not subjected to gravity in the low rotation range when the rotating drum starts and stops. Since it does not fall due to the action and slides along the peripheral surface of the rotating drum, it is possible to prevent damage to the cleaning product due to collision with the rotating drum. Therefore, it is not necessary to fix the cleaning product to the rotating drum, so that workability can be improved.
  • the rotation center axis of the rotating drum is tilted with respect to the bottom surface of the outer case, the cleaning product can be stored in the rotating drum from an oblique upper side of the outer case, and work can be performed without crouching.
  • the rotating drum is formed in a bowl shape, and the cleaning liquid injection nozzle is attached to the inner surface of the cleaning dehydration tank with the cleaning liquid injection port facing the rotating drum, so that the cleaning is performed by rotating the rotary drum.
  • the cleaning liquid can be sprayed on the entire surface of the product, and the entire product can be cleaned with high efficiency.
  • the present invention provides the cleaning / dehydrating apparatus having the above-described configuration, wherein the cleaning liquid tank, the cleaning liquid pump that supplies the cleaning liquid stored in the cleaning liquid tank to the cleaning liquid injection nozzle, and the cleaning liquid from the cleaning liquid tank are provided in the exterior case.
  • a microbubble dissolver installed in the cleaning liquid supply line leading to the spray nozzle and an air compressor for supplying compressed air to the microbubble dissolver, and the microbubbles are dissolved from the cleaning liquid spray nozzle toward the cleaning product The cleaning liquid is sprayed, and the cleaning liquid after cleaning the cleaning product is returned to the cleaning liquid tank through the cleaning dehydration tank.
  • the cleaning efficiency of the cleaning product can be remarkably improved as compared with the case of injecting the cleaning liquid that does not dissolve the microbubbles. Further, since the cleaning liquid after cleaning the cleaning product is returned to the cleaning liquid pump, the cleaning liquid can be prevented from being wasted and the cleaning cost of the cleaning product can be reduced.
  • the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a vibration isolation mechanism is installed between the rotating drum and a supporting member of the rotating drum drive motor and the outer case.
  • the vibration of the support member accompanying the rotation of the rotating drum and the rotating drum drive motor can be suppressed by the vibration isolation mechanism, the rotating drum can be rotated smoothly and the entire surface of the cleaning product can be cleaned uniformly.
  • the resonance of the exterior case due to the vibration of the support member can be prevented, the life of the cleaning and dehydrating apparatus can be extended, and the operator's anxiety and fatigue can be reduced.
  • the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a free caster with a stopper is provided on the lower surface of the outer case.
  • the cleaning and dehydrating apparatus can be easily transported and installed to a desired place, it can be applied to a wide range of applications and the operating efficiency of the cleaning and dehydrating apparatus can be increased.
  • the present invention is the cleaning and dehydrating apparatus having the above-described configuration, wherein the tank lid is attached to the upper part of the exterior case via a hinge, and is disposed opposite to the upper opening of the rotating drum when closed, and the hinge is opened when opened. It is characterized by being flipped up above the outer case as the center of rotation.
  • the tank lid since the tank lid is flipped upward when opened, the tank lid does not get in the way when the cleaning product is put in and out, and the workability can be improved.
  • the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a cleaning liquid filter is provided at the outlet of the cleaning liquid tank.
  • the cleaning liquid stored in the cleaning liquid tank can be filtered, the cleaning liquid stored in the cleaning liquid tank can be repeatedly used, and the cleaning operation of the cleaning product can be performed at low cost.
  • the present invention is characterized in that, in the cleaning and dehydrating apparatus having the above-described configuration, pure water to which a surfactant and a preservative are added is used as the cleaning liquid stored in the cleaning liquid tank.
  • the cleaning effect of the cleaned product can be enhanced as compared with the case where pure water is used as the cleaning liquid.
  • a preservative is added to pure water, it is possible to suppress the rot of pure water that is likely to rot, thereby extending the life of the cleaning liquid.
  • the cleaning liquid can be sprayed on the entire surface of the cleaning product, the cleaning product can be cleaned with high efficiency. Further, since the rotating drum is inclined with respect to the outer case, damage to the cleaned product can be prevented without requiring any special labor. Further, since the cleaning product can be easily put in and out of the rotating drum, the physical burden on the operator can be reduced.
  • the plate material storage frame 100 of the present example includes a top plate 101 and a bottom plate 102 that are arranged above and below at regular intervals, and both ends are fixed to one side of the top plate 101 and the bottom plate 102, respectively.
  • the fixed side plate 103 mounted in an upright state between the fixed side plate 103 and the fixed side plate 103 is disposed between the top plate 101 and the bottom plate 102 so as to approach the fixed side plate 103 and away from the fixed side plate 103.
  • a movable side plate 104 that can be translated and fixed at a desired position, a fixing mechanism 105 that fixes the movable side plate 104 to the top plate 101 and the bottom plate 102, and a fixed side plate 103 of the top plate 101 and the bottom plate 102 are provided.
  • the column 106 is provided upright at the corner portion on the non-side.
  • Each member described above constituting the plate material storage frame 100 is a plastic molded product.
  • the top plate 101 and the bottom plate 102 are a plurality of pieces that facilitate the attachment of the fixed side plate 103, the movable side plate 104, the fixing mechanism 105, and the column 106, and increase the rigidity of the top plate 101, the bottom plate 102, and hence the plate material storage frame 100.
  • they In order to exhibit functions such as allowing the plate material storage frames 100 to be stacked up and down, they have a complicated shape having wall surfaces and grooves.
  • the plate material storage frame 100 can store various plate materials having different outer dimensions by changing the setting position of the movable side plate 104 with respect to the fixed side plate 103.
  • the plate material storage frame 100 is configured by combining plastic molded products having complicated shapes, and therefore, each surface constituting the plate material storage frame 100 is uniformly cleaned in the cleaning and dehydrating apparatus for cleaning the plate material storage frame 100.
  • the liquid can be sufficiently dehydrated after cleaning, and that no cleaning liquid remains in the parallel grooves 107 or in the grooves formed in the top plate 101 and the bottom plate 102.
  • the cleaning and dehydrating apparatus 1 includes an outer case 2 formed in a box shape with a steel plate, and a tank lid 3 attached to the front side of the outer case 2 so as to be openable and closable.
  • the exterior case 2 is compact with a width of 800 mm, a height of 1500 mm, and a depth of about 1600 mm.
  • a caster 4 with a stopper is attached to the bottom surface, and it can be moved to a desired location as needed. It can be done.
  • the front surface of the outer case 1 is composed of a lower vertical portion 5 and an upper inclined portion 6.
  • the inclined portion 6 has an opening 7 for taking in and out the cleaning product A such as the plate material storage frame 100. Yes.
  • an operation panel 8 is installed, and an opening / closing lid 9 for maintenance inspection that opens and closes the opening 7 is installed.
  • the opening / closing lid 9 has an upper side attached to the vertical portion 5 of the exterior case 2 via a hinge 10, and the maintenance inspection window 11 is opened by flipping up the lower portion.
  • a control panel room 12 that houses a control panel (not shown) is formed in the upper part on the back side of the exterior case 2, and an opening / closing door 13 is provided in the opening of the control panel room 12.
  • the operation panel 8 will be described in detail later.
  • the tank lid 3 is attached to the inclined portion 6 of the outer case 2 through the hinge 14 at the upper side, and the opening 7 is opened by jumping upward with the grip portion 15 provided at the lower portion. It has become.
  • a weight 16 is attached to one end of the tank lid 3 via a hinge 14 so that the splashed tank lid 3 is stably held at a fixed position. Thereby, the tank lid 3 does not get in the way when the cleaning product A is put in and out, and the operation is facilitated.
  • a latch 17 for fixing the tank lid 3 to the exterior case 2 is provided in the vicinity of the grip portion 15. Further, the tank lid 3 can be formed transparently or a transparent window can be provided at a required portion in order to confirm the storage state and the cleaning state of the cleaning product A.
  • a cleaning / dehydrating tank 21, a rotating drum 22 rotatably stored in the cleaning / dehydrating tank 21, a rotating drum driving motor 23, and a cleaning product A stored in the rotating drum 22 are provided.
  • a cleaning liquid device 24 for ejecting the cleaning liquid is accommodated.
  • the cleaning and dewatering tank 21 is formed in a bottomed cylindrical shape with an upper opening, and the upper opening faces the opening 7 provided in the inclined portion 6 of the exterior case 2.
  • the outer case 2 is fixed to the outer case 2 while being inclined with respect to the bottom surface.
  • the inclination angle of the cleaning / dehydrating tank 21 with respect to the bottom surface of the outer case 2 is preferably about 45 ° in consideration of the miniaturization of the outer case 2 and the balance of the dewatering effect, but is not limited to this angle.
  • a cleaning liquid return pipe 21 a that communicates with a cleaning liquid tank, which will be described later, is provided below the cleaning dehydration tank 21.
  • the rotary drum 22 has a plurality of vertical members 22a arranged in a ring shape with a predetermined interval, and a plurality of horizontal members 22b that connect and integrate the plurality of vertical members 22a. It is formed in a bowl shape.
  • a rotating shaft 25 is connected to the center of the bottom surface of the rotating drum 22, and the rotating shaft 25 is rotatably supported by a bearing 26.
  • the bearing 26 and the rotary drum driving motor 23 are fixed to a support member 27 installed in the exterior case 2. As shown in FIG. 1, the support member 27 is inclinedly supported upright from the lateral support member 27 a so as to face the lateral support member 27 a installed horizontally on the exterior case 2 and the bottom surface of the washing and dewatering tank 21.
  • the bearing 27 and the rotary drum driving motor 23 are fixed to the inclined support member 27b at a predetermined interval.
  • a driving pulley 28 is attached to the main shaft of the rotating drum driving motor 23, a driven pulley 29 is attached to the rotating shaft 25, and a belt 30 is wound around these pulleys 28 and 29. Therefore, when the rotary drum driving motor 23 is started, the driving force is transmitted to the rotary shaft 25 through the driving pulley 28, the belt 30 and the driven pulley 29, and the rotary drum 22 is driven to rotate.
  • the rotating drum 22 is driven to rotate at a low speed of about 500 rpm when the cleaning product A is cleaned, and is driven to rotate at a high speed of about 2500 rpm during dehydration after cleaning.
  • cleaning and dehydration is not limited to the said example, It can set to an appropriate value.
  • the horizontal support member 27a is attached to the exterior case 2 via a vibration isolation member 31, as shown in FIG.
  • a vibration isolation member 31 As shown in FIG. 1, a wire rope vibration isolator is illustrated as the vibration isolation member 31, but the gist of the present invention is not limited to this, and other known members such as vibration isolation rubber are included. Can be used.
  • the cleaning / dehydrating apparatus 1 includes the vibration isolating member 31 between the support member 27 and the outer case 2, so that the rotating drum 22 can be smoothly rotated and the cleaning product A can be cleaned uniformly. .
  • the resonance of the outer case 2 can be suppressed, the life of the cleaning / dehydrating apparatus 1 can be extended, and the operator's anxiety and fatigue can be reduced.
  • the cleaning liquid device 24 includes a cleaning liquid tank 41, a filter case 42 installed on the pumping port side of the cleaning liquid tank 41, a cleaning liquid pump 43 that pumps up the cleaning liquid stored in the cleaning liquid tank 41, and a cleaning liquid tank.
  • a microbubble dissolver 44 for dissolving microbubbles in the cleaning liquid pumped from 41 an air compressor 45 for supplying air to the microbubble dissolving apparatus 44, and a cleaning drum in which the microbubbles are dissolved by the microbubble dissolving apparatus 44
  • a cleaning liquid spray nozzle 46 that sprays toward the cleaning object A in the interior 22.
  • the cleaning liquid tank 41 is installed at the bottom of the outer case 2 as shown in FIG.
  • pure water to which a surfactant and a preservative are added is preferably used.
  • a surfactant is added to pure water
  • the cleaning effect of the cleaned product can be enhanced as compared with a case where pure water is used as the cleaning liquid.
  • a preservative is added to pure water, it is possible to suppress the rot of pure water that is likely to rot, thereby extending the life of the cleaning liquid.
  • the gist of the present invention is not limited to this, and additive-free pure water or ultrapure water, and pure water or ultrapure water added with other chemicals can also be used.
  • the cleaning liquid tank 41 is provided with a liquid level gauge 47, and the detection data of the liquid level gauge 47 is displayed on a display device of an operation panel described later through a control panel (not shown). .
  • the filter case 42 is installed inside the maintenance / inspection window 11, and the operator flips up the opening / closing lid 9, so that the filter case 42 enters the filter case 42 through the maintenance / inspection window 11.
  • the stored cleaning liquid filter can be replaced. If a cleaning liquid filter is provided at the outlet of the cleaning liquid tank 41, the cleaning liquid stored in the cleaning liquid tank can be filtered each time the cleaning liquid pump 43 is driven. Therefore, the cleaning liquid stored in the cleaning liquid tank can be used repeatedly, and the cleaning product is cleaned. Work can be performed at low cost.
  • the cleaning liquid pump 43, the air compressor 44, and the microbubble dissolver 45 are respectively disposed at required positions of the outer case 2 as shown in FIGS. Further, as shown in FIGS. 1 and 5, the cleaning liquid injection nozzle 46 is attached to the inner surface of the cleaning / dehydrating tank 21 with the cleaning liquid injection port 46 a facing the rotary drum 22.
  • the operation panel 8 instructs a driving condition of the cleaning / dehydrating apparatus 1 to a control panel (not shown) housed in the control panel room 12, and displays the driving state of the cleaning / dehydrating apparatus 1 detected by the control panel.
  • a power switch 51 for turning on / off the cleaning / dehydrating apparatus 1 a display device 52 for displaying the driving state of the cleaning / dehydrating apparatus 1 in characters and images, and an injection strength adjustment for adjusting the spray strength of the cleaning liquid from the cleaning liquid spray nozzle 46
  • a plurality of display lamps 54 that display the driving state of the knob 53 and the cleaning / dehydrating apparatus 1 with light are provided.
  • the display lamps 54 are arranged in groups of START, WORKFLOW, ACTION, and WATER, so that the driving state of the cleaning and dehydrating apparatus 1 can be monitored easily and reliably. ing.
  • the START group includes a LOCK OK lamp 61 that indicates that the tank lid 3 is locked to the outer case 2 by the latch 17, and a BUBBLE OK lamp 62 that indicates that bubbles are generated in the microbubble dissolver 44.
  • a WATER OK lamp 63 is provided to indicate that a predetermined amount of cleaning water is stored in the cleaning liquid tank 41.
  • the WORKFLOW group is provided with a WASH lamp 71 indicating that cleaning is being performed, a DRY lamp 72 indicating that dehydration is being performed, and a FIN lamp 73 that indicates that cleaning and dehydration have been completed.
  • a MOTOR lamp 81 indicating that the rotary drum driving motor 23 is operating
  • a BUBBLE / S lamp 82 indicating that the microbubble dissolver 44 is operating
  • a cleaning liquid pump 43 are operating.
  • a PUMP lamp 83 for indicating that the compressor 45 is in operation
  • an AIR lamp 84 for indicating that the compressor 45 is being driven.
  • the WATER group includes a MAX lamp 91 for indicating that the injection intensity is strongest, a HIGH lamp 92 for indicating that the injection intensity is high, a LOW lamp 93 for indicating that the injection intensity is low, and an injection.
  • a MIN lamp 94 for indicating that the intensity is minimum is provided.
  • the tank lid 3 is closed and the power switch 51 of the operation panel 8 is turned on (S1), and a control panel (not shown) reads the processing flow from the storage device (S2). Then, it is checked whether the latch 17 (not shown) is locked, whether the microbubble dissolver 44 is operating normally, and whether the cleaning liquid pump 43 is operating normally.
  • the latch 17 is locked, when the microbubble dissolver 44 is operating normally, and when the cleaning liquid pump 43 is operating normally, the LOCK OK lamp 61 and the BUBBLE OK lamp 62 of the operation panel 8 respectively. And the WATER OK lamp 63 lights up. Thereby, the operator can know that the cleaning / dehydrating apparatus 1 can start the operation.
  • the operator After confirming that each of the lamps 61, 62, and 63 is lit, the operator operates the spray strength adjustment knob 53 to adjust the spray strength of the cleaning liquid sprayed onto the cleaning product A.
  • the operator can confirm whether or not the jetting intensity of the cleaning liquid has been adjusted as intended by observing the MAX lamp 91, the HIGH lamp 92, the LOW lamp 93, and the MIN lamp 94.
  • cleaning of the cleaning product A is executed according to the processing flow read from the storage device by the control panel. That is, the rotary drum 22 is driven to rotate at a low rotation suitable for cleaning the cleaning product A, and the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 are started (S3).
  • the activation of each of these devices can be confirmed by the operator visually observing the MOTOR lamp 81, the BUBBLE / S lamp 82, the PUMP lamp 83, and the AIR lamp 84. Further, it can be confirmed that the worker is in the cleaning process by visually checking the WASH lamp 71.
  • the microbubbles are dissolved in the cleaning liquid in the microbubble dissolver 44, and the cleaning liquid in which the microbubbles are dissolved is sprayed to the cleaning product A from the cleaning liquid spray nozzle 46.
  • the cleaning and dehydrating apparatus sprays the cleaning liquid from the outside of the rotating drum 22, so that the cleaning liquid can be sprayed on the entire surface of the cleaning product A, and the cleaning liquid in which the microbubbles having a high cleaning effect are dissolved is used as the cleaning product A. Therefore, the entire plate storage frame 100 having a complicated structure shown in FIG. 8 can be cleaned with high efficiency.
  • the rotary drum 22 is rotated at a high rotation suitable for dehydration of the cleaning product A, and the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 are stopped (S5).
  • the fact that the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 have been stopped can be confirmed by visual inspection of the BUBBLE / S lamp 82, the PUMP lamp 83, and the AIR lamp 84.
  • S6 the dehydration time previously stored in the storage device has elapsed
  • the rotary drum 22 is stopped and the power supply is shut off (S7).
  • the completion of the cleaning and dehydration can be confirmed by the operator visually observing the FIN lamp 73.
  • the rotating drum 22 is inclined with respect to the bottom surface of the outer case 2, so that no cleaning liquid remains in the groove even for the plate material storage frame 100 having a complicated structure shown in FIG. Can be dehydrated with high efficiency.
  • the present invention can be used for cleaning and dewatering a plate material storage frame for storing a plurality of plate materials such as a printed circuit board, a liquid crystal substrate, a disk-shaped recording medium, and a semiconductor wafer.

Abstract

In the present invention, in order to evenly wash the entirety of an item to be washed in a short period of time without damaging the item, a cylindrical washing and dehydrating tank 21 that has a floor and is slanted with respect to the bottom surface of an exterior case 2 is arranged in the exterior case 2 which is provided with an openable tank lid 3, an opening of the washing and dehydrating tank 21 is positioned to face the tank lid 3, the washing and dehydrating tank 21 rotatably stores a rotating drum 22 which is formed as a basket and is slanted with respect to the bottom surface of the exterior case 2, and a washing liquid spray nozzle 46 is attached to the inner surface of the washing and dehydrating tank 21, with a washing liquid spray opening 46a facing the side of the rotating drum 22.

Description

洗浄脱水装置Washing and dewatering equipment
　本発明は、工場内に設置され、部品、半製品、製品及びこれらを収納する容器等（本明細書では、これらを総称して「洗浄品」という。）の洗浄と脱水に好適な洗浄脱水装置に関する。 The present invention is a washing and dehydration suitable for washing and dehydration of parts, semi-finished products, products, containers for storing these, etc. (collectively referred to herein as “washed products”) installed in a factory. Relates to the device.
　従来、機械部品・電気部品の収納トレイや半導体ウェハの収納カセットの洗浄乾燥装置として、洗浄槽内に回転ドラムを設置し、該回転ドラム内に複数の部品収納容器等を収納した１つ又は複数個の着脱可能なバスケットを設置し、又は該回転ドラム内に直に部品収納容器等を収納し、回転ドラムを回転させながら洗浄した後、回転ドラムを高速回転させることにより水切り脱水乾燥させ、その後、温風乾燥することを特徴とするものが提案されている（例えば、特許文献１の要約書参照）。 Conventionally, as a cleaning / drying device for a storage tray for mechanical parts / electrical parts or a storage cassette for semiconductor wafers, one or more rotary drums are installed in a cleaning tank and a plurality of parts storage containers are stored in the rotary drums. After installing a detachable basket or storing a parts container or the like directly in the rotating drum, washing while rotating the rotating drum, draining and drying by rotating the rotating drum at high speed, A device characterized by drying with warm air has been proposed (see, for example, the abstract of Patent Document 1).
　回転ドラムは、洗浄槽の側面に回転自在に保持された回転軸に連結されており、回転軸を中心として垂直面内で回転駆動される。洗浄品に洗浄液を噴射する洗浄液噴射ノズルは、回転ドラムのほぼ回転中心に配置される。洗浄液としては、一次洗浄用の純水、水成系洗剤又はアルカリイオン水と、二次洗浄用の超純水が用いられる。 The rotary drum is connected to a rotary shaft that is rotatably held on the side surface of the cleaning tank, and is driven to rotate in a vertical plane around the rotary shaft. The cleaning liquid injection nozzle that injects the cleaning liquid onto the cleaning product is disposed at the rotation center of the rotary drum. As the cleaning liquid, pure water for primary cleaning, aqueous detergent or alkaline ion water, and ultrapure water for secondary cleaning are used.
　特許文献１に記載の洗浄乾燥装置は、同一槽内で洗浄と水切り脱水乾燥とを行うため、装置全体をコンパクトに纏めることができて床に占める専有面積を小さなものにできる。 Since the washing and drying apparatus described in Patent Document 1 performs washing and draining and dewatering drying in the same tank, the entire apparatus can be compactly integrated and the area occupied on the floor can be reduced.
特開２００４－６６２１２号公報JP 2004-66212 A
　しかしながら、特許文献１に記載の洗浄乾燥装置は、回転ドラムを垂直面内で回転駆動するので、回転ドラムの起動時及び停止時に洗浄品が重力の作用によって動揺しやすく、洗浄品が回転ドラム又はバスケットに衝突して損傷するという問題を生じやすい。なお、洗浄品を回転ドラムに固定すれば、洗浄品の損傷は防止できるが、洗浄品の固定に多くの労力が必要となるため、洗浄品の洗浄効率が悪くなる。また、特許文献１に記載の洗浄乾燥装置は、回転ドラムを垂直面内で回転駆動することから、回転ドラムに対する洗浄品の出し入れを洗浄槽の前面側から行わなくてはならず、洗浄品の収納位置によっては身をかがめながら洗浄品の出し入れを行わなくてはならないので、洗浄品の出し入れに要する作業者の肉体的負担が大きい。 However, since the cleaning / drying apparatus described in Patent Document 1 rotates the rotating drum in a vertical plane, the cleaning product is easily shaken by the action of gravity when the rotating drum is started and stopped. Prone to the problem of colliding with and damaging the basket. If the cleaning product is fixed to the rotating drum, the cleaning product can be prevented from being damaged. However, since a lot of labor is required to fix the cleaning product, the cleaning efficiency of the cleaning product is deteriorated. In addition, since the cleaning / drying apparatus described in Patent Document 1 rotates the rotary drum in a vertical plane, the cleaning product must be taken in and out of the cleaning drum from the front side of the cleaning tank. Depending on the storage position, it is necessary to put in and out the cleaning product while crouching, so that the physical burden on the worker required to put in and out the cleaning product is great.
　また、特許文献１に記載の洗浄乾燥装置は、洗浄液噴射ノズルを回転ドラムのほぼ回転中心に配置するので、洗浄液噴射ノズルと向き合う洗浄品の一面にしか洗浄液を噴射することができず、洗浄品の全面を均一に洗浄することが難しい。なお、洗浄槽の底部に洗浄液を貯留し、回転ドラムの回転に伴って洗浄品を貯留された洗浄液内に浸漬するようにすれば、洗浄品の全面に沿って洗浄液を流動させることができるが、洗浄槽の底部への洗浄液の貯留に長時間を要するため、洗浄品の洗浄効率が悪くなる。 Moreover, since the cleaning / drying apparatus described in Patent Document 1 has the cleaning liquid injection nozzle disposed substantially at the rotation center of the rotary drum, the cleaning liquid can be injected only on one surface of the cleaning product facing the cleaning liquid injection nozzle. It is difficult to clean the entire surface of the substrate uniformly. If the cleaning liquid is stored at the bottom of the cleaning tank, and the cleaning product is immersed in the stored cleaning liquid as the rotating drum rotates, the cleaning liquid can flow along the entire surface of the cleaning product. Since it takes a long time to store the cleaning liquid at the bottom of the cleaning tank, the cleaning efficiency of the cleaning product is deteriorated.
　さらに、特許文献１に記載の洗浄乾燥装置は、洗浄液として、純水、水成系洗剤、アルカリイオン水又は超純水を用いるので、洗浄品の洗浄効果が弱く、洗浄品の洗浄に長時間を要する。 Furthermore, since the cleaning and drying apparatus described in Patent Document 1 uses pure water, an aqueous detergent, alkaline ionized water or ultrapure water as the cleaning liquid, the cleaning effect of the cleaning product is weak, and the cleaning product is washed for a long time. Cost.
　本発明は、このような従来技術の実情に鑑みてなされたものであり、その目的は、洗浄品を損傷せず、短時間で全体を均一に洗浄可能な洗浄乾燥装置を提供することにある。 The present invention has been made in view of the actual situation of the prior art, and an object of the present invention is to provide a cleaning / drying apparatus capable of uniformly cleaning the entire product in a short time without damaging the cleaning product. .
　本発明は、上述の技術的課題を解決するため、開閉可能な槽蓋を備えた外装ケースと、前記外装ケース内に設置された洗浄脱水槽と、前記洗浄脱水槽内に回転可能に収納された回転ドラムと、前記回転ドラム内に収納された洗浄品に洗浄液を噴射する洗浄液噴射ノズルとを備えた洗浄脱水装置において、前記回転ドラムを籠状に形成し、当該回転ドラムの回転中心軸を前記外装ケースの底面に対して傾斜させて前記洗浄脱水槽内に収納すると共に、前記洗浄脱水槽の内面に、洗浄液噴射口を前記回転ドラム側に向けて、前記洗浄液噴射ノズルを取り付けたことを特徴とする。 In order to solve the above-described technical problem, the present invention provides an exterior case having an openable / closable tank lid, a cleaning / dehydration tank installed in the exterior case, and a rotatable storage in the cleaning / dehydration tank. In the cleaning / dehydrating apparatus, the rotating drum is formed in a bowl shape, and the rotation center axis of the rotating drum is set to be a rotation center axis of the rotating drum. The cleaning liquid spray nozzle is attached to the inner surface of the cleaning and dehydrating tank with the cleaning liquid spray port facing the rotating drum side while being inclined with respect to the bottom surface of the exterior case. Features.
　本構成によると、回転中心軸を外装ケースの底面に対して傾斜させて回転ドラムを洗浄脱水槽内に収納するので、回転ドラムの起動時及び停止時の低回転域において、洗浄品が重力の作用によって落下せず、回転ドラムの周面に沿って滑り落ちるので、回転ドラムとの衝突に起因する洗浄品の損傷を防止できる。従って、洗浄品を回転ドラムに固定する必要がないので、作業性も向上することができる。また、回転ドラムの回転中心軸を外装ケースの底面に対して傾斜させると、外装ケースの斜め上方からの回転ドラム内への洗浄品の収納が可能になり、身をかがめることなく作業を行うことが可能になるので、作業者の肉体的負担を軽減できる。さらに、本構成によると、回転ドラムを籠状に形成すると共に、洗浄液噴射口を回転ドラム側に向けて洗浄液噴射ノズルを洗浄脱水槽の内面に取り付けたので、回転ドラムを回転駆動することにより洗浄品の全面に洗浄液を噴射できて、洗浄品全体を高能率に洗浄できる。 According to this configuration, the rotating drum is stored in the washing and dewatering tank with the rotation center shaft inclined with respect to the bottom surface of the outer case, so that the washing product is not subjected to gravity in the low rotation range when the rotating drum starts and stops. Since it does not fall due to the action and slides along the peripheral surface of the rotating drum, it is possible to prevent damage to the cleaning product due to collision with the rotating drum. Therefore, it is not necessary to fix the cleaning product to the rotating drum, so that workability can be improved. In addition, if the rotation center axis of the rotating drum is tilted with respect to the bottom surface of the outer case, the cleaning product can be stored in the rotating drum from an oblique upper side of the outer case, and work can be performed without crouching. Can reduce the physical burden on the operator. Further, according to this configuration, the rotating drum is formed in a bowl shape, and the cleaning liquid injection nozzle is attached to the inner surface of the cleaning dehydration tank with the cleaning liquid injection port facing the rotating drum, so that the cleaning is performed by rotating the rotary drum. The cleaning liquid can be sprayed on the entire surface of the product, and the entire product can be cleaned with high efficiency.
　また本発明は、前記構成の洗浄脱水装置において、前記外装ケース内に、洗浄液タンクと、当該洗浄液タンク内に貯えられた洗浄液を前記洗浄液噴射ノズルに供給する洗浄液ポンプと、前記洗浄液タンクから前記洗浄液噴射ノズルに至る洗浄液供給管路に設置されたマイクロバブル溶解器と、前記マイクロバブル溶解器に圧縮空気を供給するエアコンプレッサとを備え、前記洗浄液噴射ノズルから前記洗浄品に向けてマイクロバブルを溶解した洗浄液を噴射し、洗浄品洗浄後の洗浄液を前記洗浄脱水槽を通じて前記洗浄液タンクに戻すことを特徴とする。 Further, the present invention provides the cleaning / dehydrating apparatus having the above-described configuration, wherein the cleaning liquid tank, the cleaning liquid pump that supplies the cleaning liquid stored in the cleaning liquid tank to the cleaning liquid injection nozzle, and the cleaning liquid from the cleaning liquid tank are provided in the exterior case. A microbubble dissolver installed in the cleaning liquid supply line leading to the spray nozzle and an air compressor for supplying compressed air to the microbubble dissolver, and the microbubbles are dissolved from the cleaning liquid spray nozzle toward the cleaning product The cleaning liquid is sprayed, and the cleaning liquid after cleaning the cleaning product is returned to the cleaning liquid tank through the cleaning dehydration tank.
　本構成によると、洗浄液としてマイクロバブルを溶解した洗浄液を噴射するので、マイクロバブルを溶解しない洗浄液を噴射する場合に比べて、洗浄品の洗浄効率を格段に高めることができる。また、洗浄品を洗浄した後の洗浄液を洗浄液ポンプに戻すので、洗浄液の無駄を防止できて、洗浄品の洗浄コストを安価なものにできる。 According to this configuration, since the cleaning liquid in which the microbubbles are dissolved is sprayed as the cleaning liquid, the cleaning efficiency of the cleaning product can be remarkably improved as compared with the case of injecting the cleaning liquid that does not dissolve the microbubbles. Further, since the cleaning liquid after cleaning the cleaning product is returned to the cleaning liquid pump, the cleaning liquid can be prevented from being wasted and the cleaning cost of the cleaning product can be reduced.
　また本発明は、前記構成の洗浄脱水装置において、前記回転ドラム及び回転ドラム駆動モータの支持部材と前記外装ケースとの間に、防振機構を設置したことを特徴とする。 Further, the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a vibration isolation mechanism is installed between the rotating drum and a supporting member of the rotating drum drive motor and the outer case.
　本構成によると、回転ドラム及び回転ドラム駆動モータの回転に伴う支持部材の振動を防振機構によって抑制できるので、回転ドラムを円滑に回転できて、洗浄品の全面を均一に洗浄できる。また、支持部材の振動に起因する外装ケースの共振を防止できるので、洗浄脱水装置の寿命を延長できると共に、作業者の不安感や疲労感を軽減できる。 According to this configuration, since the vibration of the support member accompanying the rotation of the rotating drum and the rotating drum drive motor can be suppressed by the vibration isolation mechanism, the rotating drum can be rotated smoothly and the entire surface of the cleaning product can be cleaned uniformly. Moreover, since the resonance of the exterior case due to the vibration of the support member can be prevented, the life of the cleaning and dehydrating apparatus can be extended, and the operator's anxiety and fatigue can be reduced.
　また本発明は、前記構成の洗浄脱水装置において、前記外装ケースの下面にストッパ付きの自在キャスタを備えたことを特徴とする。 Further, the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a free caster with a stopper is provided on the lower surface of the outer case.
　本構成によると、洗浄脱水装置を所望の場所まで容易に搬送して設置できるので、広い用途に適用できて、洗浄脱水装置の稼働効率を高めることができる。 According to this configuration, since the cleaning and dehydrating apparatus can be easily transported and installed to a desired place, it can be applied to a wide range of applications and the operating efficiency of the cleaning and dehydrating apparatus can be increased.
　また本発明は、前記構成の洗浄脱水装置において、前記槽蓋は、前記外装ケースの上部にヒンジを介して取り付けられ、閉止時には前記回転ドラムの上部開口と対向に配置され、開放時には前記ヒンジを回転中心として前記外装ケースの上方に跳ね上げられることを特徴とする。 Further, the present invention is the cleaning and dehydrating apparatus having the above-described configuration, wherein the tank lid is attached to the upper part of the exterior case via a hinge, and is disposed opposite to the upper opening of the rotating drum when closed, and the hinge is opened when opened. It is characterized by being flipped up above the outer case as the center of rotation.
　本構成によると、開放時に槽蓋を上方に跳ね上げるので、洗浄品の出し入れに際して槽蓋が邪魔にならず、作業性を高めることができる。 According to this configuration, since the tank lid is flipped upward when opened, the tank lid does not get in the way when the cleaning product is put in and out, and the workability can be improved.
　また本発明は、前記構成の洗浄脱水装置において、前記洗浄液タンクの出口に洗浄液フィルタを備えたことを特徴とする。 Further, the present invention is characterized in that in the cleaning and dehydrating apparatus having the above-described configuration, a cleaning liquid filter is provided at the outlet of the cleaning liquid tank.
　本構成によると、洗浄液タンクに貯えられた洗浄液を濾過できるので、洗浄液タンクに貯えられた洗浄液を繰り返し使用することができ、洗浄品の洗浄作業を低コストに行うことができる。 According to this configuration, since the cleaning liquid stored in the cleaning liquid tank can be filtered, the cleaning liquid stored in the cleaning liquid tank can be repeatedly used, and the cleaning operation of the cleaning product can be performed at low cost.
　また本発明は、前記構成の洗浄脱水装置において、前記洗浄液タンク内に貯えられる洗浄液として、界面活性剤及び防腐剤を添加した純水を用いたことを特徴とする。 Further, the present invention is characterized in that, in the cleaning and dehydrating apparatus having the above-described configuration, pure water to which a surfactant and a preservative are added is used as the cleaning liquid stored in the cleaning liquid tank.
　純水に界面活性剤を添加すると、単なる純水を洗浄液として用いる場合に比べて、洗浄品の洗浄効果を高めることができる。また、純水に防腐剤を添加すると、腐敗しやすい純水の腐敗を抑制できて、洗浄液の寿命を延長できる。 When a surfactant is added to pure water, the cleaning effect of the cleaned product can be enhanced as compared with the case where pure water is used as the cleaning liquid. In addition, when a preservative is added to pure water, it is possible to suppress the rot of pure water that is likely to rot, thereby extending the life of the cleaning liquid.
　本発明によると、洗浄品の全面に洗浄液を噴射できるので、洗浄品を高能率に洗浄できる。また、回転ドラムを外装ケースに対して傾斜させるので、特別な労力を必要とすることなく、洗浄品の損傷を防止できる。さらに、回転ドラム内への洗浄品の出し入れを容易に行うことができるので、作業者の肉体的負担を軽減できる。 According to the present invention, since the cleaning liquid can be sprayed on the entire surface of the cleaning product, the cleaning product can be cleaned with high efficiency. Further, since the rotating drum is inclined with respect to the outer case, damage to the cleaned product can be prevented without requiring any special labor. Further, since the cleaning product can be easily put in and out of the rotating drum, the physical burden on the operator can be reduced.
実施形態に係る洗浄脱水装置の内部機構を示す正面図である。It is a front view which shows the internal mechanism of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置の内部機構を示す左側面図である。It is a left view which shows the internal mechanism of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置の内部機構を示す右側面図である。It is a right view which shows the internal mechanism of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置の内部機構を示す平面図である。It is a top view which shows the internal mechanism of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置の洗浄液循環経路を示す回路図である。It is a circuit diagram which shows the washing | cleaning-liquid circulation path | route of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置に備えられる操作パネルの拡大図である。It is an enlarged view of an operation panel provided in the cleaning and dehydrating apparatus according to the embodiment. 実施形態に係る洗浄脱水装置の動作手順を示すフローチャートである。It is a flowchart which shows the operation | movement procedure of the washing | cleaning dehydration apparatus which concerns on embodiment. 実施形態に係る洗浄脱水装置を用いて洗浄される板材収納枠の斜視図である。It is a perspective view of the board | plate material storage frame wash | cleaned using the washing | cleaning dehydration apparatus which concerns on embodiment.
　まず、実施形態に係る洗浄脱水装置の説明に先立ち、図８を用いて洗浄品である板材収納枠の構成を説明する。 First, prior to the description of the cleaning and dehydrating apparatus according to the embodiment, the configuration of a plate material storage frame that is a cleaning product will be described with reference to FIG.
　図８に示す板材収納枠１００は、半導体ウェハ、回路基板又は情報記録ディスク等の板材の保管及び運搬に用いられるものであって、便宜的に「マガジンラック」とも称されている。本例の板材収納枠１００は、一定間隔を隔てて上下に配設された天板１０１及び底板１０２と、両端部がそれぞれ天板１０１及び底板１０２の一辺に固定され、天板１０１と底板１０２の間に直立した状態で取り付けられた固定側板１０３と、天板１０１と底板１０２の間において固定側板１０３と向い合せに配置され、固定側板１０３に接近する方向及び固定側板１０３から離隔する方向に平行移動できて、所望の位置で固定される可動側板１０４と、可動側板１０４を天板１０１及び底板１０２に対して固定する固定機構１０５と、天板１０１及び底板１０２の固定側板１０３が配設されていない側の角部に立設された支柱１０６を備えている。 8 is used for storing and transporting a plate material such as a semiconductor wafer, a circuit board, or an information recording disk, and is also referred to as a “magazine rack” for convenience. The plate material storage frame 100 of the present example includes a top plate 101 and a bottom plate 102 that are arranged above and below at regular intervals, and both ends are fixed to one side of the top plate 101 and the bottom plate 102, respectively. The fixed side plate 103 mounted in an upright state between the fixed side plate 103 and the fixed side plate 103 is disposed between the top plate 101 and the bottom plate 102 so as to approach the fixed side plate 103 and away from the fixed side plate 103. A movable side plate 104 that can be translated and fixed at a desired position, a fixing mechanism 105 that fixes the movable side plate 104 to the top plate 101 and the bottom plate 102, and a fixed side plate 103 of the top plate 101 and the bottom plate 102 are provided. The column 106 is provided upright at the corner portion on the non-side.
　板材収納枠１００を構成する上述の各部材は、プラスチック成形品である。このうち、天板１０１及び底板１０２は、固定側板１０３、可動側板１０４、固定機構１０５及び支柱１０６の取り付けを容易にする、天板１０１及び底板１０２ひいては板材収納枠１００の剛性を高める、複数の板材収納枠１００を上下に積み上げられるようにする、等の機能を発揮するため、壁面や溝を有する複雑な形状をしている。 Each member described above constituting the plate material storage frame 100 is a plastic molded product. Among these, the top plate 101 and the bottom plate 102 are a plurality of pieces that facilitate the attachment of the fixed side plate 103, the movable side plate 104, the fixing mechanism 105, and the column 106, and increase the rigidity of the top plate 101, the bottom plate 102, and hence the plate material storage frame 100. In order to exhibit functions such as allowing the plate material storage frames 100 to be stacked up and down, they have a complicated shape having wall surfaces and grooves.
　一方、固定側板１０３及び可動側板１０４の各内面には、板材の外周部を挿入して保持するための一定幅かつ一定深さの平行溝１０７が上下に一定ピッチで形成されており、各段の平行溝１０７の底板１０２からの高さ位置は、固定側板１０３及び可動側板１０４の双方について、同一に調整されている。したがって各段の平行溝１０７内に挿入される板材は、天板１０１及び底板１０２と平行に整列されて、水平に保持される。また、この板材収納枠１００は、固定側板１０３に対する可動側板１０４の設定位置を変更することにより、外形寸法が異なる各種の板材を収納することができる。 On the other hand, on each inner surface of the fixed side plate 103 and the movable side plate 104, parallel grooves 107 having a constant width and a constant depth for inserting and holding the outer peripheral portion of the plate material are formed at a constant pitch in the vertical direction. The height positions of the parallel grooves 107 from the bottom plate 102 are adjusted to be the same for both the fixed side plate 103 and the movable side plate 104. Therefore, the plate material inserted into the parallel grooves 107 of each step is aligned in parallel with the top plate 101 and the bottom plate 102 and is held horizontally. The plate material storage frame 100 can store various plate materials having different outer dimensions by changing the setting position of the movable side plate 104 with respect to the fixed side plate 103.
　このように、板材収納枠１００は、複雑形状のプラスチック成形品を組み合わせて構成されるので、これを洗浄する洗浄脱水装置には、板材収納枠１００を構成する各面が均一に洗浄されること、及び、洗浄後十分に脱水できて、平行溝１０７内や天板１０１及び底板１０２に形成される溝内に洗浄液が残らないことが求められる。 As described above, the plate material storage frame 100 is configured by combining plastic molded products having complicated shapes, and therefore, each surface constituting the plate material storage frame 100 is uniformly cleaned in the cleaning and dehydrating apparatus for cleaning the plate material storage frame 100. In addition, it is required that the liquid can be sufficiently dehydrated after cleaning, and that no cleaning liquid remains in the parallel grooves 107 or in the grooves formed in the top plate 101 and the bottom plate 102.
　次に、実施形態に係る洗浄脱水装置を、図１～図７を用いて説明する。 Next, the cleaning and dehydrating apparatus according to the embodiment will be described with reference to FIGS.
　実施形態に係る洗浄脱水装置１は、図１～図４に示すように、鋼板をもって箱形に形成された外装ケース２と、外装ケース２の前面側に開閉可能に取り付けられた槽蓋３とを有している。外装ケース２は、横幅が８００ｍｍ、高さが１５００ｍｍ、奥行きが１６００ｍｍ程度のコンパクトなもので、底面にはストッパ付きのキャスタ４が取り付けられており、必要に応じて所望の場所に移動して設置できるようになっている。外装ケース１の前面は、下方の垂直部５と上方の傾斜部６とから構成されており、傾斜部６には板材収納枠１００等の洗浄品Ａを出し入れするための開口７が開設されている。 As shown in FIGS. 1 to 4, the cleaning and dehydrating apparatus 1 according to the embodiment includes an outer case 2 formed in a box shape with a steel plate, and a tank lid 3 attached to the front side of the outer case 2 so as to be openable and closable. have. The exterior case 2 is compact with a width of 800 mm, a height of 1500 mm, and a depth of about 1600 mm. A caster 4 with a stopper is attached to the bottom surface, and it can be moved to a desired location as needed. It can be done. The front surface of the outer case 1 is composed of a lower vertical portion 5 and an upper inclined portion 6. The inclined portion 6 has an opening 7 for taking in and out the cleaning product A such as the plate material storage frame 100. Yes.
　外装ケース２の垂直部５には、操作パネル８が設置されると共に、開口７を開閉する保守点検用の開閉蓋９が設置される。開閉蓋９は、上辺がヒンジ１０を介して外装ケース２の垂直部５に取り付けられており、下部を跳ね上げることにより保守点検用窓１１を開放するようになっている。また、外装ケース２の背面側の上部には、図示しない制御盤を収納する制御盤室１２が形成されており、制御盤室１２の開口部には開閉扉１３が備えられている。操作パネル８については、後に詳細に説明する。 In the vertical portion 5 of the exterior case 2, an operation panel 8 is installed, and an opening / closing lid 9 for maintenance inspection that opens and closes the opening 7 is installed. The opening / closing lid 9 has an upper side attached to the vertical portion 5 of the exterior case 2 via a hinge 10, and the maintenance inspection window 11 is opened by flipping up the lower portion. In addition, a control panel room 12 that houses a control panel (not shown) is formed in the upper part on the back side of the exterior case 2, and an opening / closing door 13 is provided in the opening of the control panel room 12. The operation panel 8 will be described in detail later.
　槽蓋３は、上辺がヒンジ１４を介して外装ケース２の傾斜部６に取り付けられており、下部に備えられた把持部１５を持って上方に跳ね上げることにより、開口７を開放するようになっている。ヒンジ１４を介して槽蓋３の一端にはウエイト１６が取り付けられており、跳ね上げられた槽蓋３が一定の位置に安定に保持されるようになっている。これにより、洗浄品Ａの出し入れの際に槽蓋３が邪魔にならず、作業を容易なものにしている。なお、把持部１５の近傍には、槽蓋３を外装ケース２に固定するためのラッチ１７が備えられる。また、槽蓋３は、洗浄品Ａの収納状態や洗浄状態を確認するため、全体を透明に形成したり、所要の部分に透視窓を設けることもできる。 The tank lid 3 is attached to the inclined portion 6 of the outer case 2 through the hinge 14 at the upper side, and the opening 7 is opened by jumping upward with the grip portion 15 provided at the lower portion. It has become. A weight 16 is attached to one end of the tank lid 3 via a hinge 14 so that the splashed tank lid 3 is stably held at a fixed position. Thereby, the tank lid 3 does not get in the way when the cleaning product A is put in and out, and the operation is facilitated. A latch 17 for fixing the tank lid 3 to the exterior case 2 is provided in the vicinity of the grip portion 15. Further, the tank lid 3 can be formed transparently or a transparent window can be provided at a required portion in order to confirm the storage state and the cleaning state of the cleaning product A.
　外装ケース２内には、洗浄脱水槽２１と、洗浄脱水槽２１内に回転可能に収納された回転ドラム２２と、回転ドラム駆動用モータ２３と、回転ドラム２２内に収納された洗浄品Ａに洗浄液を噴射する洗浄液装置２４が収納される。 In the exterior case 2, a cleaning / dehydrating tank 21, a rotating drum 22 rotatably stored in the cleaning / dehydrating tank 21, a rotating drum driving motor 23, and a cleaning product A stored in the rotating drum 22 are provided. A cleaning liquid device 24 for ejecting the cleaning liquid is accommodated.
　洗浄脱水槽２１は、図２に示すように、上部が開口された有底の円筒形に形成されており、上部の開口部を外装ケース２の傾斜部６に設けられた開口７に臨ませ、外装ケース２の底面に対して傾斜した状態で、外装ケース２に固定される。外装ケース２の底面に対する洗浄脱水槽２１の傾斜角度は、外装ケース２の小型化と脱水効果のバランスとを考慮して４５°程度とすることが望ましいが、この角度に限定されるものではない。洗浄脱水槽２１の下部には、図１に示すように、後に説明する洗浄液タンクに連通する洗浄液戻し管２１ａが設けられる。 As shown in FIG. 2, the cleaning and dewatering tank 21 is formed in a bottomed cylindrical shape with an upper opening, and the upper opening faces the opening 7 provided in the inclined portion 6 of the exterior case 2. The outer case 2 is fixed to the outer case 2 while being inclined with respect to the bottom surface. The inclination angle of the cleaning / dehydrating tank 21 with respect to the bottom surface of the outer case 2 is preferably about 45 ° in consideration of the miniaturization of the outer case 2 and the balance of the dewatering effect, but is not limited to this angle. . As shown in FIG. 1, a cleaning liquid return pipe 21 a that communicates with a cleaning liquid tank, which will be described later, is provided below the cleaning dehydration tank 21.
　回転ドラム２２は、図１に示すように、所定の間隔を隔てて輪状に配列された複数の縦部材２２ａと、これら複数の縦部材２２ａを連結して一体化する複数の横部材２２ｂとをもって籠状に形成されている。 As shown in FIG. 1, the rotary drum 22 has a plurality of vertical members 22a arranged in a ring shape with a predetermined interval, and a plurality of horizontal members 22b that connect and integrate the plurality of vertical members 22a. It is formed in a bowl shape.
　回転ドラム２２の底面中心部には回転軸２５が連結されており、当該回転軸２５は軸受２６に回転可能に支持されている。軸受２６及び回転ドラム駆動用モータ２３は、外装ケース２内に設置された支持部材２７に固定される。支持部材２７は、図１に示すように、外装ケース２に水平に設置される横支持部材２７ａと、洗浄脱水槽２１の底面と正対するように横支持部材２７ａから斜めに起立された傾斜支持部材２７ｂと、傾斜支持部材２７ｂの補強部材２７ｃから構成されており、軸受２６及び回転ドラム駆動用モータ２３は、傾斜支持部材２７ｂに所定の間隔を隔てて固定される。回転ドラム駆動用モータ２３の主軸には原動プーリ２８が取り付けられ、回転軸２５には従動プーリ２９が取り付けられていて、これらのプーリ２８、２９にはベルト３０が巻き掛けられている。従って、回転ドラム駆動用モータ２３を起動すると、その駆動力が原動プーリ２８、ベルト３０及び従動プーリ２９を経て回転軸２５に伝達され、回転ドラム２２が回転駆動される。なお、回転ドラム２２は、洗浄品Ａの洗浄時には５００ｒｐｍ程度の低速で回転駆動され、洗浄後の脱水時には、２５００ｒｐｍ程度の高速で回転駆動される。なお、洗浄時及び脱水時における回転ドラム２２の回転数は、前記の例に限定されるものではなく、適宜の値に設定可能である。 A rotating shaft 25 is connected to the center of the bottom surface of the rotating drum 22, and the rotating shaft 25 is rotatably supported by a bearing 26. The bearing 26 and the rotary drum driving motor 23 are fixed to a support member 27 installed in the exterior case 2. As shown in FIG. 1, the support member 27 is inclinedly supported upright from the lateral support member 27 a so as to face the lateral support member 27 a installed horizontally on the exterior case 2 and the bottom surface of the washing and dewatering tank 21. The bearing 27 and the rotary drum driving motor 23 are fixed to the inclined support member 27b at a predetermined interval. A driving pulley 28 is attached to the main shaft of the rotating drum driving motor 23, a driven pulley 29 is attached to the rotating shaft 25, and a belt 30 is wound around these pulleys 28 and 29. Therefore, when the rotary drum driving motor 23 is started, the driving force is transmitted to the rotary shaft 25 through the driving pulley 28, the belt 30 and the driven pulley 29, and the rotary drum 22 is driven to rotate. The rotating drum 22 is driven to rotate at a low speed of about 500 rpm when the cleaning product A is cleaned, and is driven to rotate at a high speed of about 2500 rpm during dehydration after cleaning. In addition, the rotation speed of the rotating drum 22 at the time of washing | cleaning and dehydration is not limited to the said example, It can set to an appropriate value.
　横支持部材２７ａは、図１に示すように、防振部材３１を介して外装ケース２に取り付けられる。図１の例では、防振部材３１としてワイヤロープ防振器が例示されているが、本発明の要旨はこれに限定されるものではなく、防振ゴムなどの他の公知に属する所要の部材を用いることができる。このように実施形態に係る洗浄脱水装置１は、支持部材２７と外装ケース２との間に防振部材３１を備えたので、回転ドラム２２を円滑に回転できて洗浄品Ａを均一に洗浄できる。また、外装ケース２の共振を抑制できるので、洗浄脱水装置１の寿命を延長できると共に、作業者の不安感や疲労感を軽減できる。 The horizontal support member 27a is attached to the exterior case 2 via a vibration isolation member 31, as shown in FIG. In the example of FIG. 1, a wire rope vibration isolator is illustrated as the vibration isolation member 31, but the gist of the present invention is not limited to this, and other known members such as vibration isolation rubber are included. Can be used. As described above, the cleaning / dehydrating apparatus 1 according to the embodiment includes the vibration isolating member 31 between the support member 27 and the outer case 2, so that the rotating drum 22 can be smoothly rotated and the cleaning product A can be cleaned uniformly. . Moreover, since the resonance of the outer case 2 can be suppressed, the life of the cleaning / dehydrating apparatus 1 can be extended, and the operator's anxiety and fatigue can be reduced.
　洗浄液装置２４は、図５に示すように、洗浄液タンク４１と、洗浄液タンク４１の汲み上げ口側に設置されたフィルタケース４２と、洗浄液タンク４１に貯えられた洗浄液を汲み上げる洗浄液ポンプ４３と、洗浄液タンク４１から汲み上げられた洗浄液にマイクロバブルを溶解するマイクロバブル溶解器４４と、マイクロバブル溶解器４４にエアを供給するエアコンプレッサ４５と、マイクロバブル溶解器４４によりマイクロバブルが溶解された洗浄液を回転ドラム２２内の洗浄物Ａに向けて噴射する洗浄液噴射ノズル４６とから構成される。 As shown in FIG. 5, the cleaning liquid device 24 includes a cleaning liquid tank 41, a filter case 42 installed on the pumping port side of the cleaning liquid tank 41, a cleaning liquid pump 43 that pumps up the cleaning liquid stored in the cleaning liquid tank 41, and a cleaning liquid tank. A microbubble dissolver 44 for dissolving microbubbles in the cleaning liquid pumped from 41, an air compressor 45 for supplying air to the microbubble dissolving apparatus 44, and a cleaning drum in which the microbubbles are dissolved by the microbubble dissolving apparatus 44 And a cleaning liquid spray nozzle 46 that sprays toward the cleaning object A in the interior 22.
　洗浄液タンク４１は、図１に示すように、外装ケース２の底部に設置される。洗浄液としては、界面活性剤及び防腐剤を添加した純水が好適に用いられる。純水に界面活性剤を添加すると、単なる純水を洗浄液として用いる場合に比べて、洗浄品の洗浄効果を高めることができる。また、純水に防腐剤を添加すると、腐敗しやすい純水の腐敗を抑制できて、洗浄液の寿命を延長できる。但し、本発明の要旨はこれに限定されるものではなく、無添加の純水や超純水、それに他の薬剤を添加した純水や超純水を用いることもできる。洗浄液タンク４１には、図４に示すように、液面計４７が付設されており、当該液面計４７の検出データは、図示しない制御盤を通じて後に説明する操作パネルの表示装置に表示される。 The cleaning liquid tank 41 is installed at the bottom of the outer case 2 as shown in FIG. As the cleaning liquid, pure water to which a surfactant and a preservative are added is preferably used. When a surfactant is added to pure water, the cleaning effect of the cleaned product can be enhanced as compared with a case where pure water is used as the cleaning liquid. In addition, when a preservative is added to pure water, it is possible to suppress the rot of pure water that is likely to rot, thereby extending the life of the cleaning liquid. However, the gist of the present invention is not limited to this, and additive-free pure water or ultrapure water, and pure water or ultrapure water added with other chemicals can also be used. As shown in FIG. 4, the cleaning liquid tank 41 is provided with a liquid level gauge 47, and the detection data of the liquid level gauge 47 is displayed on a display device of an operation panel described later through a control panel (not shown). .
　また、フィルタケース４２は、図２に示すように、保守点検用窓１１の内側に設置されており、作業者は開閉蓋９を跳ね上げることにより、保守点検用窓１１を通してフィルタケース４２内に収納された洗浄液フィルタの交換を行うことができる。洗浄液タンク４１の出口に洗浄液フィルタを備えると、洗浄液ポンプ４３を駆動する毎に、洗浄液タンクに貯えられた洗浄液を濾過できるので、洗浄液タンクに貯えられた洗浄液を繰り返し使用できて、洗浄品の洗浄作業を低コストに行うことができる。 As shown in FIG. 2, the filter case 42 is installed inside the maintenance / inspection window 11, and the operator flips up the opening / closing lid 9, so that the filter case 42 enters the filter case 42 through the maintenance / inspection window 11. The stored cleaning liquid filter can be replaced. If a cleaning liquid filter is provided at the outlet of the cleaning liquid tank 41, the cleaning liquid stored in the cleaning liquid tank can be filtered each time the cleaning liquid pump 43 is driven. Therefore, the cleaning liquid stored in the cleaning liquid tank can be used repeatedly, and the cleaning product is cleaned. Work can be performed at low cost.
　洗浄液ポンプ４３、エアコンプレッサ４４及びマイクロバブル溶解器４５は、図１～図３に示すように、それぞれ外装ケース２の所要の位置に配置される。さらに、洗浄液噴射ノズル４６は、図１及び図５に示すように、洗浄液噴射口４６ａを回転ドラム２２側に向けて、洗浄脱水槽２１の内面に取り付けられる。 The cleaning liquid pump 43, the air compressor 44, and the microbubble dissolver 45 are respectively disposed at required positions of the outer case 2 as shown in FIGS. Further, as shown in FIGS. 1 and 5, the cleaning liquid injection nozzle 46 is attached to the inner surface of the cleaning / dehydrating tank 21 with the cleaning liquid injection port 46 a facing the rotary drum 22.
　操作パネル８は、制御盤室１２に収納された図示しない制御盤に洗浄脱水装置１の駆動条件を指令したり、制御盤が検出した洗浄脱水装置１の駆動状態を表示するもので、図２に示すように、洗浄脱水装置１をオンオフするパワースイッチ５１、洗浄脱水装置１の駆動状態を文字や画像で表示する表示装置５２、洗浄液噴射ノズル４６からの洗浄液の噴射強度を調整する噴射強度調整つまみ５３及び洗浄脱水装置１の駆動状態を光で表示する複数個の表示ランプ５４を備えている。表示ランプ５４は、図６に拡大して示すように、ＳＴＡＲＴ、ＷＯＲＫＦＬＯＷ、ＡＣＴＩＯＮ、ＷＡＴＥＲの各グループに分けて配置されており、洗浄脱水装置１の駆動状態を容易かつ確実に監視できるようになっている。 The operation panel 8 instructs a driving condition of the cleaning / dehydrating apparatus 1 to a control panel (not shown) housed in the control panel room 12, and displays the driving state of the cleaning / dehydrating apparatus 1 detected by the control panel. As shown in FIG. 4, a power switch 51 for turning on / off the cleaning / dehydrating apparatus 1, a display device 52 for displaying the driving state of the cleaning / dehydrating apparatus 1 in characters and images, and an injection strength adjustment for adjusting the spray strength of the cleaning liquid from the cleaning liquid spray nozzle 46 A plurality of display lamps 54 that display the driving state of the knob 53 and the cleaning / dehydrating apparatus 1 with light are provided. As shown in an enlarged view in FIG. 6, the display lamps 54 are arranged in groups of START, WORKFLOW, ACTION, and WATER, so that the driving state of the cleaning and dehydrating apparatus 1 can be monitored easily and reliably. ing.
　ＳＴＡＲＴグループには、ラッチ１７により外装ケース２に槽蓋３がロックされていることを表示するＬＯＣＫ　ＯＫランプ６１、マイクロバブル溶解器４４に気泡が発生していることを表示するＢＵＢＢＬＥ　ＯＫランプ６２、洗浄液タンク４１内に所定量の洗浄水が貯えられていることを表示するＷＡＴＥＲ　ＯＫランプ６３が備えられる。ＷＯＲＫＦＬＯＷグループには、洗浄中であることを示すＷＡＳＨランプ７１、脱水中であることを示すＤＲＹランプ７２、洗浄及び脱水が終了したことを表示するＦＩＮランプ７３が備えられる。ＡＣＴＩＯＮグループには、回転ドラム駆動用モータ２３が動作中であることを表示するＭＯＴＯＲランプ８１、マイクロバブル溶解器４４が動作中であることを表示するＢＵＢＢＬＥ／Ｓランプ８２、洗浄液ポンプ４３が動作中であることを表示するＰＵＭＰランプ８３、コンプレッサ４５が駆動中であることを表示するＡＩＲランプ８４が備えられる。ＷＡＴＥＲグループには、噴射強度が最強であることを表示するＭＡＸランプ９１、噴射強度が高レベルであることを表示するＨＩＧＨランプ９２、噴射強度が低レベルであることを表示するＬＯＷランプ９３、噴射強度が最小であることを表示するＭＩＮランプ９４を備えている。 The START group includes a LOCK OK lamp 61 that indicates that the tank lid 3 is locked to the outer case 2 by the latch 17, and a BUBBLE OK lamp 62 that indicates that bubbles are generated in the microbubble dissolver 44. A WATER OK lamp 63 is provided to indicate that a predetermined amount of cleaning water is stored in the cleaning liquid tank 41. The WORKFLOW group is provided with a WASH lamp 71 indicating that cleaning is being performed, a DRY lamp 72 indicating that dehydration is being performed, and a FIN lamp 73 that indicates that cleaning and dehydration have been completed. In the ACTION group, a MOTOR lamp 81 indicating that the rotary drum driving motor 23 is operating, a BUBBLE / S lamp 82 indicating that the microbubble dissolver 44 is operating, and a cleaning liquid pump 43 are operating. A PUMP lamp 83 for indicating that the compressor 45 is in operation, and an AIR lamp 84 for indicating that the compressor 45 is being driven. The WATER group includes a MAX lamp 91 for indicating that the injection intensity is strongest, a HIGH lamp 92 for indicating that the injection intensity is high, a LOW lamp 93 for indicating that the injection intensity is low, and an injection. A MIN lamp 94 for indicating that the intensity is minimum is provided.
　次に、上述のように構成された洗浄脱水装置１の動作フローを、図７を参照しながら説明する。 Next, the operation flow of the cleaning and dehydrating apparatus 1 configured as described above will be described with reference to FIG.
　回転ドラム２２内に洗浄品Ａを収納した後、槽蓋３を閉めて操作パネル８のパワースイッチ５１をオン操作する（Ｓ１）と、図示しない制御盤が記憶装置から処理フローを読み出し（Ｓ２）、図示しないラッチ１７がロックされているか、マイクロバブル溶解器４４が正常に動作しているか、洗浄液ポンプ４３が正常に動作しているかをチェックする。ラッチ１７がロックされている場合、マイクロバブル溶解器４４が正常に動作している場合、洗浄液ポンプ４３が正常に動作している場合は、それぞれ操作パネル８のＬＯＣＫ　ＯＫランプ６１、ＢＵＢＢＬＥ　ＯＫランプ６２及びＷＡＴＥＲ　ＯＫランプ６３が点灯する。これにより、作業者は洗浄脱水装置１が作業開始可能であることを知ることができる。上述の各ランプ６１、６２、６３が点灯したことを確認した後、作業者は噴射強度調整つまみ５３を操作して、洗浄品Ａに噴射する洗浄液の噴射強度を調整する。作業者は、ＭＡＸランプ９１、ＨＩＧＨランプ９２、ＬＯＷランプ９３及びＭＩＮランプ９４を目視することにより、洗浄液の噴射強度が目標通り調整されたか否かを確認できる。 After the cleaning product A is stored in the rotary drum 22, the tank lid 3 is closed and the power switch 51 of the operation panel 8 is turned on (S1), and a control panel (not shown) reads the processing flow from the storage device (S2). Then, it is checked whether the latch 17 (not shown) is locked, whether the microbubble dissolver 44 is operating normally, and whether the cleaning liquid pump 43 is operating normally. When the latch 17 is locked, when the microbubble dissolver 44 is operating normally, and when the cleaning liquid pump 43 is operating normally, the LOCK OK lamp 61 and the BUBBLE OK lamp 62 of the operation panel 8 respectively. And the WATER OK lamp 63 lights up. Thereby, the operator can know that the cleaning / dehydrating apparatus 1 can start the operation. After confirming that each of the lamps 61, 62, and 63 is lit, the operator operates the spray strength adjustment knob 53 to adjust the spray strength of the cleaning liquid sprayed onto the cleaning product A. The operator can confirm whether or not the jetting intensity of the cleaning liquid has been adjusted as intended by observing the MAX lamp 91, the HIGH lamp 92, the LOW lamp 93, and the MIN lamp 94.
　しかる後に、制御盤が記憶装置から読み出した処理フローに従って洗浄品Ａの洗浄が実行される。即ち、回転ドラム２２が洗浄品Ａの洗浄に適した低回転で回転駆動されると共に、洗浄液ポンプ４３、マイクロバブル溶解器４４及びエアコンプレッサ４５が起動される（Ｓ３）。これらの各機器が起動されたことは、作業者がＭＯＴＯＲランプ８１、ＢＵＢＢＬＥ／Ｓランプ８２、ＰＵＭＰランプ８３、ＡＩＲランプ８４を目視することにより確認できる。また、洗浄処理中であることは、作業者がＷＡＳＨランプ７１を目視することにより確認できる。 Thereafter, cleaning of the cleaning product A is executed according to the processing flow read from the storage device by the control panel. That is, the rotary drum 22 is driven to rotate at a low rotation suitable for cleaning the cleaning product A, and the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 are started (S3). The activation of each of these devices can be confirmed by the operator visually observing the MOTOR lamp 81, the BUBBLE / S lamp 82, the PUMP lamp 83, and the AIR lamp 84. Further, it can be confirmed that the worker is in the cleaning process by visually checking the WASH lamp 71.
　これにより、マイクロバブル溶解器４４において洗浄液にマイクロバブルが溶解され、マイクロバブルが溶解された洗浄液が洗浄液噴射ノズル４６から洗浄品Ａに噴射される。実施形態に係る洗浄脱水装置は、回転する回転ドラム２２の外側から洗浄液を噴射するので洗浄品Ａの全面に洗浄液を噴射できること、及び、洗浄効果が高いマイクロバブルが溶解された洗浄液を洗浄品Ａに噴射することから、図８に示した複雑構造の板材収納枠１００についても、その全体を高能率に洗浄することができる。予め記憶装置に記憶された洗浄時間が経過すると（Ｓ４）、自動的に脱水工程に移行する。脱水工程に移行したことは、作業者がＤＲＹランプ７２を目視することにより確認できる。 Thereby, the microbubbles are dissolved in the cleaning liquid in the microbubble dissolver 44, and the cleaning liquid in which the microbubbles are dissolved is sprayed to the cleaning product A from the cleaning liquid spray nozzle 46. The cleaning and dehydrating apparatus according to the embodiment sprays the cleaning liquid from the outside of the rotating drum 22, so that the cleaning liquid can be sprayed on the entire surface of the cleaning product A, and the cleaning liquid in which the microbubbles having a high cleaning effect are dissolved is used as the cleaning product A. Therefore, the entire plate storage frame 100 having a complicated structure shown in FIG. 8 can be cleaned with high efficiency. When the cleaning time previously stored in the storage device has elapsed (S4), the process automatically proceeds to the dehydration step. The transition to the dehydration process can be confirmed by the operator visually observing the DRY lamp 72.
　脱水工程に移行すると、回転ドラム２２が洗浄品Ａの脱水に適した高回転で回転駆動されると共に、洗浄液ポンプ４３、マイクロバブル溶解器４４及びエアコンプレッサ４５が停止される（Ｓ５）。洗浄液ポンプ４３、マイクロバブル溶解器４４及びエアコンプレッサ４５が停止したことは、作業者がＢＵＢＢＬＥ／Ｓランプ８２、ＰＵＭＰランプ８３、ＡＩＲランプ８４を目視することにより確認できる。予め記憶装置に記憶された脱水時間が経過すると（Ｓ６）、回転ドラム２２を停止し、電源を遮断する（Ｓ７）。洗浄及び脱水が終了したことは、作業者がＦＩＮランプ７３を目視することにより確認できる。実施形態に係る洗浄脱水装置は、回転ドラム２２を外装ケース２の底面に対して傾斜したので、図８に示した複雑構造の板材収納枠１００についても、溝内に洗浄液が残ることがないので、高能率に脱水することができる。 When the process proceeds to the dehydration process, the rotary drum 22 is rotated at a high rotation suitable for dehydration of the cleaning product A, and the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 are stopped (S5). The fact that the cleaning liquid pump 43, the microbubble dissolver 44, and the air compressor 45 have been stopped can be confirmed by visual inspection of the BUBBLE / S lamp 82, the PUMP lamp 83, and the AIR lamp 84. When the dehydration time previously stored in the storage device has elapsed (S6), the rotary drum 22 is stopped and the power supply is shut off (S7). The completion of the cleaning and dehydration can be confirmed by the operator visually observing the FIN lamp 73. In the cleaning and dehydrating apparatus according to the embodiment, the rotating drum 22 is inclined with respect to the bottom surface of the outer case 2, so that no cleaning liquid remains in the groove even for the plate material storage frame 100 having a complicated structure shown in FIG. Can be dehydrated with high efficiency.
　本発明は、プリント基板、液晶基板、ディスク状記録媒体及び半導体ウェハ等の板材を複数枚収納する板材収納枠の洗浄及び脱水に利用できる。 The present invention can be used for cleaning and dewatering a plate material storage frame for storing a plurality of plate materials such as a printed circuit board, a liquid crystal substrate, a disk-shaped recording medium, and a semiconductor wafer.
　１　　洗浄脱水装置
　２　　外装ケース
　３　　槽蓋
　８　　操作パネル
　９　　開閉蓋
　１２　　制御盤室
　２１　　洗浄脱水槽
　２２　　回転ドラム
　２３　　回転ドラム駆動用モータ
　２４　　洗浄液装置
　２７　　支持部材
　４１　　洗浄液タンク
　４２　　フィルタケース
　４３　　洗浄液ポンプ
　４４　　マイクロバブル溶解器
　４５　　エアコンプレッサ
　４６　　洗浄液噴射ノズル
　５１　　パワースイッチ
　５２　　表示装置
　５３　　噴射強度調整つまみ
　５４　　表示ランプ
  DESCRIPTION OF SYMBOLS 1 Cleaning dehydration apparatus 2 Exterior case 3 Tank lid 8 Operation panel 9 Opening / closing lid 12 Control panel room 21 Cleaning dehydration tank 22 Rotating drum 23 Rotating drum drive motor 24 Cleaning liquid device 27 Support member 41 Cleaning liquid tank 42 Filter case 43 Cleaning liquid pump 44 Micro Bubble dissolver 45 Air compressor 46 Cleaning liquid injection nozzle 51 Power switch 52 Display device 53 Injection strength adjustment knob 54 Display lamp

Claims (7)

  1. 　開閉可能な槽蓋を備えた外装ケースと、前記外装ケース内に設置された洗浄脱水槽と、前記洗浄脱水槽内に回転可能に収納された回転ドラムと、前記回転ドラム内に収納された洗浄品に洗浄液を噴射する洗浄液噴射ノズルとを備えた洗浄脱水装置において、
    　前記回転ドラムを籠状に形成し、当該回転ドラムの回転中心軸を前記外装ケースの底面に対して傾斜させて前記洗浄脱水槽内に収納すると共に、前記洗浄脱水槽の内面に、洗浄液噴射口を前記回転ドラム側に向けて、前記洗浄液噴射ノズルを取り付けたことを特徴とする洗浄脱水装置。     An exterior case having an openable / closable tank lid, a cleaning / dehydrating tank installed in the exterior case, a rotating drum rotatably stored in the cleaning / dehydrating tank, and a cleaning stored in the rotating drum In a cleaning and dehydrating apparatus equipped with a cleaning liquid injection nozzle for injecting a cleaning liquid onto a product,
    The rotating drum is formed in a bowl shape, and the rotation center axis of the rotating drum is inclined with respect to the bottom surface of the outer case and stored in the cleaning / dehydrating tank. A cleaning and dehydrating apparatus, wherein the cleaning liquid spray nozzle is attached so that the nozzle is directed toward the rotating drum.
  2. 　前記外装ケース内に、洗浄液タンクと、当該洗浄液タンク内に貯えられた洗浄液を前記洗浄液噴射ノズルに供給する洗浄液ポンプと、前記洗浄液タンクから前記洗浄液噴射ノズルに至る洗浄液供給管路に設置されたマイクロバブル溶解器と、前記マイクロバブル溶解器に圧縮空気を供給するエアコンプレッサとを備え、前記洗浄液噴射ノズルから前記洗浄品に向けてマイクロバブルを溶解した洗浄液を噴射し、洗浄品洗浄後の洗浄液を前記洗浄脱水槽を通じて前記洗浄液タンクに戻すことを特徴とする請求項１に記載の洗浄脱水装置。 In the outer case, a cleaning liquid tank, a cleaning liquid pump that supplies the cleaning liquid stored in the cleaning liquid tank to the cleaning liquid injection nozzle, and a micro-fluid installed in a cleaning liquid supply line from the cleaning liquid tank to the cleaning liquid injection nozzle. A bubble dissolver and an air compressor that supplies compressed air to the microbubble dissolver, and sprays a cleaning solution in which microbubbles are dissolved from the cleaning solution spray nozzle toward the cleaning product, and the cleaning solution after cleaning the cleaning product 2. The cleaning / dehydrating apparatus according to claim 1, wherein the cleaning / dehydrating apparatus returns to the cleaning liquid tank through the cleaning / dehydrating tank.
  3. 　前記回転ドラム及び回転ドラム駆動モータの支持部材と前記外装ケースとの間に、防振機構を設置したことを特徴とする請求項１に記載の洗浄脱水装置。 The washing and dehydrating apparatus according to claim 1, wherein a vibration isolation mechanism is installed between the rotating drum and a supporting member of the rotating drum drive motor and the outer case.
  4. 　前記外装ケースの下面にストッパ付きの自在キャスタを備えたことを特徴とする請求項１に記載の洗浄脱水装置。 The cleaning and dehydrating apparatus according to claim 1, wherein a free caster with a stopper is provided on the lower surface of the outer case.
  5. 　前記槽蓋は、前記外装ケースの上部にヒンジを介して取り付けられ、閉止時には前記回転ドラムの上部開口と対向に配置され、開放時には前記ヒンジを回転中心として前記外装ケースの上方に跳ね上げられることを特徴とする請求項１に記載の洗浄脱水装置。 The tank lid is attached to the upper part of the outer case via a hinge, and is disposed opposite to the upper opening of the rotating drum when closed, and is flipped up above the outer case with the hinge as a rotation center when opened. The cleaning and dehydrating apparatus according to claim 1.
  6. 　前記洗浄液タンクの出口に洗浄液フィルタを備えたことを特徴とする請求項１に記載の洗浄脱水装置。 The cleaning and dehydrating apparatus according to claim 1, wherein a cleaning liquid filter is provided at an outlet of the cleaning liquid tank.
  7. 　前記洗浄液タンク内に貯えられる洗浄液として、界面活性剤及び防腐剤を添加した純水を用いたことを特徴とする請求項１に記載の洗浄脱水装置。
          The cleaning and dehydrating apparatus according to claim 1, wherein pure water to which a surfactant and a preservative are added is used as the cleaning liquid stored in the cleaning liquid tank.
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JP6363815B1 (en) * 2016-11-14 2018-07-25 株式会社中農製作所 washing machine
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