WO2016088753A1 - Flake graphite, graphite material, and flake graphite dispersion - Google Patents

Flake graphite, graphite material, and flake graphite dispersion Download PDF

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WO2016088753A1
WO2016088753A1 PCT/JP2015/083749 JP2015083749W WO2016088753A1 WO 2016088753 A1 WO2016088753 A1 WO 2016088753A1 JP 2015083749 W JP2015083749 W JP 2015083749W WO 2016088753 A1 WO2016088753 A1 WO 2016088753A1
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graphite
solvent
flaky graphite
dispersion
flaky
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PCT/JP2015/083749
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French (fr)
Japanese (ja)
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誠司 武
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大日本印刷株式会社
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/20Graphite
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/20Graphite
    • C01B32/21After-treatment

Definitions

  • the present invention relates to flaky graphite, graphite material, and flaky graphite dispersion.
  • Graphene which has a single layer structure of graphite (graphite), is a two-dimensional planar crystal in which carbon six-membered rings are connected in a planar direction, and has excellent conductivity, thermal conductivity, and the like.
  • graphite is a two-dimensional planar crystal in which carbon six-membered rings are connected in a planar direction, and has excellent conductivity, thermal conductivity, and the like.
  • it is required to use single-layer graphene or graphene multi-layered in the range of 50 nm or less (hereinafter referred to as flake graphite). Attempts have been made to obtain a high-performance conductive film or heat conductive film by depositing such flaky graphite.
  • a chemical vapor deposition method As a method for depositing flaky graphite, a chemical vapor deposition method (CVD method), a solution coating method, and the like are known. Among these, a solution coating method is attracting attention because it can be formed at a low cost. When flaky graphite is formed by a solution coating method, it is necessary to disperse the flaky graphite in the solution.
  • Patent Document 2 discloses a thin-layer graphite having a high-pressure emulsification treatment step for exfoliating graphite or a graphite compound layer by a high-pressure emulsification method.
  • a method for producing a thin graphite compound is disclosed.
  • the graphite exfoliates during the emulsification process, and the exfoliated graphite also aggregates, and the thickness distribution of the exfoliated graphite is widened similarly to the ultrasonic method, and is sufficiently thinned.
  • untreated graphite remained so much that it could not be ignored.
  • graphite oxide remains or many graphites that are not sufficiently flaked remain, so that it has been difficult to obtain flaky graphite having excellent conductivity.
  • the present invention has been made in view of the above circumstances, and provides a flaky graphite and a graphite material excellent in conductivity and thermal conductivity, and a flaky graphite dispersion containing the flaky graphite.
  • Another object of the present invention is to provide a method for producing the flaky graphite, a method for producing the graphite material, and a method for producing the flaky graphite dispersion excellent in conductivity and thermal conductivity.
  • a third object is to provide a method for producing an excellent graphite material.
  • the flaky graphite according to the first aspect of the present invention for solving the first object is a total count of all ( ⁇ ) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS).
  • TOF-SIMS time-of-flight secondary ion mass spectrometry
  • the ratio of the number of fluorine ( ⁇ ) ions to the number is 0.5% or more, the average (002) plane spacing (d002) by X-ray diffraction is 0.336 nm or less, and the average thickness is 50 nm. It is characterized by the following.
  • the graphite material according to the first present invention for solving the first object is characterized in that the flaky graphite according to the present invention is laminated.
  • the flaky graphite dispersion according to the first aspect of the present invention for solving the first object is characterized in that the flaky graphite according to the present invention is dispersed in a solvent.
  • the method for producing flaky graphite according to at least some embodiments of the second present invention for solving the second object is obtained by adding graphite to a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less. And a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent) and a dispersion treatment.
  • the method for producing a flaky graphite dispersion according to at least some embodiments of the second present invention for solving the second object is applied to a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less.
  • a method for producing a graphite material includes: a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less; Mixing with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and carrying out a dispersion treatment; (I) or (ii) below: (I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment; (Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step, A step of making a flaky graphite dispersion by any step of removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN
  • the method for producing flaky graphite according to at least some embodiments of the third aspect of the present invention for solving the third object includes, in a solvent having a surface tension at a use temperature of 20 mN / m or less, graphite, It has the process of mixing with the dispersing agent whose solubility with respect to the said solvent is less than 0.1 (g / 100g solvent), and carrying out a dispersion process.
  • the method for producing a flaky graphite dispersion according to at least some embodiments of the third aspect of the present invention for solving the third object is characterized in that graphite is used in a solvent having a surface tension at a use temperature of 20 mN / m or less.
  • a method for producing a graphite material according to at least some embodiments of the third aspect of the present invention for solving the third object includes: a solvent having a surface tension at a use temperature of 20 mN / m or less, graphite, Mixing with a dispersant having a solubility in a solvent of less than 0.1 (g / 100 g solvent), and carrying out a dispersion treatment; (I) or (ii) below: (I) removing a solvent having a surface tension of 20 mN / m or less from the mixed solution after the dispersion treatment; (Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step, A step of making a flaky graphite dispersion by any one of steps of removing a solvent having a surface tension of 20 mN / m or less from the mixed solution after addition of the solvent
  • the first aspect of the present invention it is possible to provide flaky graphite and a graphite material excellent in conductivity and thermal conductivity, and a flaky graphite dispersion containing the flaky graphite.
  • a method for producing flaky graphite capable of obtaining flaky graphite excellent in conductivity and thermal conductivity in a high yield, and there is little residual graphite that is insufficiently flaked.
  • a method for producing a flaky graphite dispersion and a method for producing a graphite material excellent in conductivity and thermal conductivity can be provided.
  • a method for producing flaky graphite capable of obtaining flaky graphite excellent in conductivity and thermal conductivity in a high yield, and there is little residual graphite that is insufficiently flaked.
  • a method for producing a flaky graphite dispersion and a method for producing a graphite material excellent in conductivity and thermal conductivity can be provided.
  • FIG. 6 shows the measurement results of the graphite film 1 according to the present invention obtained in Example 1-3 by the X-ray diffraction method.
  • FIG. 3 is a SEM photograph of the graphite film 1 according to the present invention obtained in Example 1-3.
  • 4 is an SEM photograph of comparative graphite film 1 obtained in Comparative Example 1-3.
  • 9 is one of AFM photographs of flaky graphite 1 according to the present invention obtained in Example 8.
  • FIG. 7 is a measurement result of the graphite film 8 according to the present invention obtained in Example 8 by X-ray photoelectron spectroscopy.
  • flaky graphite includes single-layer graphene and graphene that is multilayered in a thickness range of 50 nm or less.
  • the surface tension is defined as free energy per unit area surplus compared to the inside of the liquid, which the liquid surface has.
  • the flaky graphite according to the present invention is a fluorine (-) ion count relative to a total count of all (-) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS).
  • the ratio is 0.5% or more
  • the average interplanar spacing (d002) of (002) planes by an X-ray diffraction method is 0.336 nm or less
  • the average thickness is 50 nm or less.
  • the flaky graphite according to the present invention is a flaky graphite containing at least one of single-layer graphene and multi-layer graphene, wherein the average thickness of the flakes is in the range of 50 nm or less, and is a time-of-flight secondary ion mass spectrometry
  • the ratio of the number of fluorine ( ⁇ ) ions to the total number of all ( ⁇ ) ions measured using the method (TOF-SIMS) is 0.5% or more, and (002) by the X-ray diffraction method. )
  • Surface average surface spacing (d002) is 0.336 nm or less.
  • the flaky graphite of the present invention is a small amount of fluorine that is adsorbed or bound to promote exfoliation between the graphite flakes, so that the single-layer graphene or the average interplanar spacing (d002) is graphite.
  • the graphene is multilayered at 0.336 nm or less, and has an average thickness of 50 nm or less, and has excellent conductivity and thermal conductivity.
  • the flaky graphite of the present invention has the above-mentioned fluorinated graphite and Are clearly distinguished.
  • the above document also describes a carbon material obtained by doping graphite with hydrogen fluoride.
  • the carbon material has an average interplanar spacing (d002) of 0.55 nm to 1.28 nm, which is much wider than that of graphite, the flake graphite of the present invention is clearly different from the carbon material. It is a distinction.
  • the carbon material is conductive, it is poor in stability because it is doped with gas, and there is a problem in workability.
  • the flaky graphite adsorbed or bound by a small amount of fluorine of the present invention is excellent in stability, and the exfoliated flaky graphite is more difficult to reagglomerate and is excellent in workability.
  • the flaky graphite can be laminated as it is without being re-agglomerated, and a laminated body such as an integrated film can be arbitrarily formed. Therefore, a graphite material having excellent conductivity and thermal conductivity can be obtained. Obtainable.
  • Time-of-flight secondary ion mass spectrometry is an apparatus for examining what components (atoms and molecules) exist on the outermost surface of a solid sample. According to time-of-flight secondary ion mass spectrometry, it is possible to detect a trace amount component that cannot be detected by X-ray photoelectron spectroscopy described later.
  • the time-of-flight secondary ion mass spectrometry is detected by irradiating 69 Ga + using a time-of-flight secondary ion mass spectrometer (for example, Physical Electronics, model name: TRIFT II).
  • NEGATIVE secondary ions are detected as secondary ion mass spectra.
  • the total count number of all ( ⁇ ) ions and the count number of fluorine ( ⁇ ) ions, measured by the time-of-flight secondary ion mass spectrometry, are measured.
  • the ratio of the number of fluorine ( ⁇ ) ions can be calculated.
  • the ratio of the fluorine ( ⁇ ) ion count to the total count of all ions measured using time-of-flight secondary ion mass spectrometry is 0.00. Although it is 5% or more, the ratio is preferably 10% or less, more preferably 5% or less, from the viewpoint of making the graphite material or flaky graphite superior in conductivity and thermal conductivity. Further, it is preferably 3% or less. Since the ratio of the count number of fluorine ( ⁇ ) ions that can be regarded as noise may be about 0.2%, it is set to 0.5% or more from the viewpoint of excluding noise. Among them, the ratio of the fluorine ( ⁇ ) ion count is preferably 0.8% or more, and more preferably 1% or more.
  • the flake graphite of the present invention reduces graphene oxide because, as will be described later, fluorine is adsorbed or bonded to promote the exfoliation between flakes of graphite (graphite).
  • the composition of carbon atoms is preferably 80% or more, more preferably 90% or more, and even more preferably 92% or more as measured by X-ray photoelectron spectroscopy. Preferably, it is still more preferably 95% or more.
  • the composition of carbon atoms may be 100% as measured by X-ray photoelectron spectroscopy, but usually it is preferably 99% or less because some oxygen atoms are contained.
  • the composition of oxygen atoms is preferably 10% or less, more preferably less than 10%, more preferably 7% or less, as measured by X-ray photoelectron spectroscopy. More preferably, it is 5% or less.
  • the composition of fluorine atoms may be measured as 0% in the measurement by X-ray photoelectron spectroscopy.
  • the flaky graphite of the present invention contains atoms different from carbon atoms and oxygen atoms, for example, sulfur atoms, nitrogen atoms, etc., as measured by X-ray photoelectron spectroscopy due to the influence of the dispersant described later. May be.
  • the total composition of atoms different from carbon atoms and oxygen atoms is preferably 5% or less, more preferably 3% or less, and more preferably 2% or less, as measured by X-ray photoelectron spectroscopy. Further preferred. That is, in the flaky graphite of the present invention, the sum of the carbon atom composition and the oxygen atom composition is preferably 95% or more, more preferably 97% or more, as measured by X-ray photoelectron spectroscopy. 98% or more is even more preferable.
  • the ratio of the bonds forming sp2 bonds between the carbon atoms is determined by X-ray photoelectron spectroscopy from the viewpoint of excellent conductivity and thermal conductivity. Is preferably 60% or more, more preferably 70% or more, and even more preferably 75% or more. The higher the ratio of bonds that form sp2 bonds between carbon atoms, the better. The upper limit of the ratio of bonds that form sp2 bonds between carbon atoms is 100%. is there.
  • the ratio of oxygen atoms bonded to carbon atoms out of all carbon atoms measured by X-ray photoelectron spectroscopy Is preferably 0.2 or less, more preferably 0.15 or less, and even more preferably 0.1 or less.
  • the measurement by X-ray photoelectron spectroscopy is performed by irradiating the sample with X-rays using an X-ray photoelectron spectrometer such as Thermo Fisher Scientific (VG Theta Probe) or ULVAC-PHI (PHI5000 Versa Probe).
  • the ratio of bonds that form sp2 bonds between carbon atoms is such that the peak of carbon atoms is expanded, and the bonds that form sp2 bonds between carbon atoms (binding energy about 284.6 eV) and carbon atoms
  • the peak separation is performed on the bonds that form sp3 bonds in (bond energy of about 285.5 eV), so that the ratio of the bonds that form sp2 bonds between the carbon atoms among the bonds of the carbon atoms is determined. Can be calculated.
  • the oxygen atom is bonded to the carbon atom.
  • the calculated oxygen atomic ratio can be calculated.
  • the peak shift due to the binding of oxygen atoms to other molecules and the binding energy reference can be made to the books (for example, edited by Someno Dan, “Surface Analysis”, Kodansha (1976) p274).
  • the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and 1580 to 1620 cm ⁇ 1 measured by a Raman spectrum are used.
  • the intensity ratio I D / I G to the peak intensity (I G ) in the range is preferably 0.3 or less, more preferably 0.15 or less, and even more preferably 0.10 or less. preferable.
  • the intensity ratio I D / I G is usually 0 in the case of raw material graphite, and is 0 or more.
  • the intensity ratio I G of the peak intensity (I G) in the range of 1580 ⁇ 1620cm -1 / I peak intensity (I G)' in the range of 2600 ⁇ 2800 cm -1 measured by Raman spectroscopy G is preferably 0.1 or more, more preferably 0.2 or more, and still more preferably 0.3 or more.
  • the intensity ratio I G ′ / I G usually increases as the thickness of the flaky graphite decreases, and becomes 2 when the thickness is about 0.34 nm (graphene monoatomic layer).
  • the spectrum in the range of 1300 to 1400 cm ⁇ 1 measured by the Raman spectroscopic spectrum is a band (D band) that appears when there is a crystal defect, and the spectrum in the range of 1580 to 1620 cm ⁇ 1 is sp2 This is a band (G band) that is commonly observed in the case of a hybrid orbit (the number of C—C bonding hands is three).
  • a spectrum in the range of 2600 to 2800 cm ⁇ 1 is also a band (G ′ band) that is commonly observed in the case of sp2 hybrid orbitals.
  • the flaky graphite of the present invention has a thickness of 1 atom or more of carbon, and has an average thickness of about 0.34 nm to 50 nm.
  • the average thickness of the flaky graphite of the present invention is preferably from about 0.34 nm to about 40 nm, more preferably from about 0.34 nm to about 30 nm, and even more preferably from about 0.34 nm to about 15 nm. desirable.
  • the thickness of the flaky graphite of the present invention refers to the maximum dimension of the flaky graphite in a direction orthogonal to the surface of the flaky graphite when viewed from the direction in which the area of the flaky graphite is maximized.
  • the thickness of the flaky graphite of the present invention can be measured using an atomic force microscope (AFM).
  • the average thickness of the flaky graphite of the present invention is obtained by measuring the thickness with AFM in a state where the flaky graphite is independently dispersed on the substrate, and calculating the average value of the measured values of the thickness of 200 flaky graphites. Can be sought.
  • the average thickness can be obtained as follows.
  • a membrane having a pore size of 0.02 ⁇ m or less after sampling a flake graphite, a mixed liquid containing flake graphite, or a flake graphite dispersion, diluting with a solvent 20 to 2000 times without dispersing flakes
  • the solvent is filtered off by coating on a filter, and the flake graphite is placed on the membrane filter in an independent state without agglomerating.
  • the dispersant may be removed by washing the flaky graphite with a solvent having a solubility of 5 (g / 100 g solvent) or more.
  • the flaky graphite is transferred onto the silicon wafer by pressing and removing the washed silicon wafer against the flaky graphite arranged in an independent state without agglomerating on the membrane filter.
  • the flake graphite adhering to the silicon wafer in an independently dispersed state is measured by AFM, and the thickness of the flake is measured.
  • the AFM measurement uses the scanning probe microscope (SPM) function of the Shimadzu Nano Search Microscope SFT-3500, and the scanning range is set to 10 ⁇ m ⁇ 10 ⁇ m in the contact mode, that is, AFM (Atomic Force Microscope). Measurements can be made.
  • the difference in height between the silicon wafer and the flaky graphite in the flaky graphite adhering to the silicon wafer is defined as the thickness of the flaky graphite.
  • the average thickness of flaky graphite is calculated by repeating the above operation until a total of 200 pieces of flaky graphite can be observed by AFM, and calculating the average value of the measured thickness of 200 pieces of flaky graphite observed by AFM. Can be obtained.
  • the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 70% by number or more.
  • the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above.
  • the content ratio of the flake graphite having a thickness of 0.34 nm or more and less than 10 nm to the whole flake graphite is preferably 10% by number or more, and more preferably 20% by number or more.
  • the number% represents the ratio of the number of flake graphite having the corresponding thickness to the total number of flake graphite.
  • the number% can be calculated by obtaining the number of flake graphite having a corresponding thickness out of 200 observed by AFM, and obtaining the number ratio in the 200 pieces.
  • the plane direction size of the flaky graphite of the present invention refers to the size of the surface of the flaky graphite when viewed from the direction in which the area of the flaky graphite is maximized, and the maximum diameter is 0.05 ⁇ m or more and 100 ⁇ m or less. It is preferably within the range, more preferably within the range of 0.1 ⁇ m to 50 ⁇ m, and even more preferably within the range of 0.5 ⁇ m to 30 ⁇ m.
  • the size in the plane direction can be measured by direct observation with an optical microscope, an electron microscope, an atomic force microscope, or the like. Similarly to the average thickness, the average maximum diameter can be obtained by calculating the average value of the maximum diameters of 200 flake graphite measured with a microscope.
  • Each of the flaky graphites of the present invention preferably has an aspect ratio (maximum diameter / thickness) of 3 or more, more preferably 10 or more.
  • the average aspect ratio (average maximum diameter / average thickness) of the flaky graphite of the present invention is preferably 3 or more, and more preferably 10 or more.
  • the flaky graphite of the present invention can be produced, for example, by the method for producing flaky graphite of the second invention described later.
  • the method for producing flaky graphite according to the second aspect of the present invention comprises a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of less than 0.1 (g / 100 g solvent). It is characterized by having a step of mixing with a dispersant and performing a dispersion treatment (hereinafter sometimes referred to as a dispersion treatment step).
  • the flaky graphite obtained by the method for producing flaky graphite has a high ratio of single-layer graphene and graphene multi-layered in a range of 50 nm or less, and is not oxidized. Also have excellent electrical and thermal conductivity. In addition, since graphite that has not been sufficiently flaked does not remain, the weight of graphite is hardly reduced even after classification, and flaky graphite can be obtained with a high recovery rate.
  • the ratio of single-layer graphene and graphene multi-layered in a range of 50 nm or less is a yield of 20% by mass or more, more preferably a yield of 50% by mass or more. It is possible to obtain flaky graphite with a yield of 70% by mass or more, more preferably with a yield of 75% by mass or more, and obtain flaky graphite with a yield of 100% by mass. It is also possible.
  • Graphite has a structure in which graphene having a two-dimensional structure is laminated in multiple layers. In the graphite, van der Waals force is generated between the respective layers, and it is estimated that the graphite is bonded with a relatively weak force.
  • a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less is presumed to easily enter between the graphite layers because of its relatively low polarity and low surface tension.
  • a dispersion treatment using such a solvent it is presumed that the exfoliation of graphite is promoted and flaky graphite is easily generated.
  • a dispersant having a solubility in a fluorinated solvent having a surface tension of 20 mN / m or less at the use temperature is less than 0.1 (g / 100 g solvent) is used in combination.
  • the mixed solution at the time of the dispersion treatment is divided into two phases: the solvent phase and the dispersant phase.
  • the solvent phase and the dispersant phase.
  • graphite and flaky graphite tend to be present in the dispersant phase having a close polarity.
  • the flaky graphite is prevented from agglomerating immediately.
  • the dispersing agent is highly viscous, the contact between flake graphite will be suppressed by that amount, and as a result, aggregation of flake graphite will be suppressed. Furthermore, in such a production method, since the dispersant phase is separated from the solvent phase, the flake graphite adsorbed by the dispersant moves to the dispersant phase, and reagglomeration is more easily suppressed. It is estimated to be.
  • the dispersant is a solid
  • the mixed solution at the time of the dispersion treatment is a heterogeneous system containing solid graphite and a solid dispersant in the solvent phase, and both the graphite and the dispersant are contained in the solvent.
  • the flake graphite Since the affinity for graphite is relatively high in the solvent phase and the dispersant is present around the flake graphite produced by the dispersion treatment, the flake graphite is It is estimated that aggregation is suppressed and dispersibility is improved. From the above, according to the method for producing flaky graphite, a small amount of fluorine is adsorbed or bonded, and peeling of the graphite easily proceeds to produce flaky graphite. Aggregation hardly occurs, and the flaky graphite according to the present invention can be obtained in a high yield.
  • the method for producing the flaky graphite has at least a dispersion treatment step, and may further include other steps as needed within the range not impairing the effects of the present invention.
  • a method for producing such flaky graphite will be described in detail in order.
  • Examples of the graphite used as a raw material in the present invention include natural graphite, artificial graphite, quiche graphite, and highly oriented pyrolytic graphite, and natural graphite is particularly preferable.
  • Natural graphite is classified into earthy graphite and scaly graphite, but scaly graphite is particularly preferable. This is because scaly graphite has little ash and high purity.
  • Graphene flakes obtained by pulverizing graphite have recently been commercialized by XGscience and can be used as a raw material. Further, expanded graphite in which the interlayer of these graphites is expanded in advance can also be used.
  • the size of the graphite is not particularly limited, but is selected according to the size of the flaky graphite to be finally obtained.
  • the particle diameter of the graphite before the dispersion treatment is not particularly limited as long as it is a size that enables the dispersion treatment, but those having a maximum diameter of 100 ⁇ m or less are preferably used.
  • a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less as the solvent during the dispersion treatment. Since the specific solvent easily enters the graphite layer, the exfoliation of the graphite is likely to proceed.
  • the use temperature here means the solvent temperature at the start of the dispersion treatment.
  • fluorinated solvent having a surface tension at a use temperature of 20 mN / m or less include a fluorinated solvent having a fluorinated alkyl group, a fluorinated alkyl ether group or the like having a surface tension of 20 mN / m or less at 25 ° C. Is mentioned.
  • hydrofluoroether for example, C 4 F 9 OCH 3 : 13.6 mN / m, C 4 F 9 OC 2 H 5 : 13.6 mN / m, C 3 F 7 OCH 3 : 12.4 mN / m, C 2 F 5 CF (OCH 3 ) C 3 F 7 : 15 mN / m
  • hydrofluorocarbon eg, C X
  • a fluorinated solvent having at least one of a fluorinated alkyl group and a fluorinated alkyl ether group from the viewpoint of easily entering between graphite layers and facilitating peeling of the graphite.
  • the solvent is preferably a fluorine-based solvent having a surface tension of 15 mN / m or less at the working temperature because it easily enters the graphite layer and the peeling of the graphite easily proceeds.
  • the fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less can be used alone or in combination of two or more.
  • a dispersant having a solubility in a fluorinated solvent having a surface tension of 20 mN / m or less at a use temperature of less than 0.1 (g / 100 g solvent).
  • the dispersant may be appropriately selected and used from conventionally known dispersants capable of dispersing flaky graphite having a solubility in the solvent of less than 0.1 (g / 100 g solvent).
  • the dispersant include a compound having a hydrophobic group having a high affinity for flaky graphite and a hydrophilic group in one molecule.
  • the hydrophobic group include a hydrocarbon group having 3 or more carbon atoms, more preferably 6 or more.
  • the hydrophilic group include a hydroxyl group, a carboxy group, a sulfonic acid group, an amino group, and salts thereof. Is mentioned.
  • a dispersant for example, cationic, anionic, nonionic, amphoteric surfactants can be used.
  • a polymer surfactant polymer dispersant
  • a polymer dispersant may be used as the dispersant.
  • dispersant examples include fatty acid salts such as sodium dodecanoate, monoalkyl sulfates such as sodium lauryl sulfate, alkylbenzene sulfonates such as sodium dodecylbenzenesulfonate, polyoxyethylene alkyl ether sulfate, and monoalkyl.
  • Anionic surfactants such as phosphates, cationic surfactants such as alkylammonium salts, polyoxyethylene alkyl ethers, sorbitan fatty acid esters, polyoxyethylene sorbitan fatty acid esters, polyoxyethylene sorbitol fatty acid esters, glycerin fatty acid esters, Nonionic surfactants such as polyoxyethylene hydrogenated castor oil; amphoteric surfactants such as alkyldimethylamine oxide and alkylcarboxybetaine.
  • anionic surfactants the metal salts mentioned above are fatty acids, sulfonic acids, sulfuric acids, phosphoric acids, etc.
  • amine structures may be used instead of ammonium salts. It can be used.
  • the polymer dispersant include (co) polymers of unsaturated carboxylic acid esters such as polyacrylic acid esters; (partial) amines of (co) polymers of unsaturated carboxylic acid such as polyacrylic acid. Salts, (partially) ammonium salts and (partially) alkylamine salts; (co) polymers of hydroxyl group-containing unsaturated carboxylic acid esters such as hydroxyl group-containing polyacrylates and their modified products; polyurethanes; polyethyleneimine and derivatives thereof Etc.
  • the polyurethane a structure in which the main skeleton is polyurethane and the side chain has at least one of polyester and polyether chains and an alkylammonium salt is also preferably used.
  • a dispersant having a solubility of less than 0.1 (g / 100 g solvent) can be easily determined by the following evaluation method.
  • the solvent to be used in the production method of the present invention and the dispersant to be evaluated are added so as to have a concentration of 0.1 (g / 100 g solvent).
  • the mass of the remaining dispersant is measured, and the solubility is calculated.
  • the solubility of the dispersant in the solvent is determined to be 0.1 (g / 100 g solvent) or more.
  • the dispersant is, among others, flaky graphite described later that the solubility of the dispersant in the solvent used when preparing the flaky graphite dispersion described later is 5 (g / 100 g solvent) or more. It is preferable from the viewpoints of the dispersibility of the dispersion, and the conductivity and thermal conductivity of the flaky graphite and graphite material.
  • the dispersant dissolves in the graphite dispersion and is uniform. High dispersion.
  • the dispersant is easily removed together with the solvent used in the flaky graphite dispersion, and the dispersant remaining in the graphite material is also removed. It can be easily removed by washing with a solvent, and conductivity and thermal conductivity are improved.
  • the dispersant is solid or liquid at room temperature (25 ° C.), and the produced flake graphite is likely to move to the dispersant phase side, and reagglomeration is easily suppressed.
  • the viscosity of the dispersant is 10 mPa ⁇ s or more at 25 ° C., because the mixed liquid containing the two phases of the solvent and the dispersant becomes a highly viscous liquid and suppresses reaggregation of the flake graphite. Further preferred.
  • the viscosity of the dispersant is more preferably from 100 mPa ⁇ s to 50000 mPa ⁇ s at 25 ° C., and still more preferably from 100 mPa ⁇ s to 3000 mPa ⁇ s at 25 ° C.
  • the viscosity of the said dispersing agent says what is measured according to ASTM D4440 at 25 degreeC.
  • a dispersing agent can be used individually by 1 type or in combination of 2 or more types.
  • the flaky graphite is produced by mixing graphite and a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent) in a fluorine-based solvent having a surface tension of 20 mN / m or less at the operating temperature. Then, by dispersing the mixture using a conventionally known disperser, the exfoliation of the graphite easily proceeds to produce flaky graphite, and the flaky graphite is less likely to re-aggregate. Shaped graphite can be obtained with high yield.
  • Dispersers for performing dispersion processing include ultrasonic dispersers, roll mills such as 2-roll and 3-roll, attritors, Banbury mixers, paint shakers, kneaders, homogenizers, ball mills, sand mills, bead mills, jet mills, and mixers. A mill, mechanical stirring, etc. are mentioned. Among these, it is preferable to select and use a method suitable for dispersing a liquid having a high viscosity, such as a method capable of imparting a shearing force, and a ball mill using a pulverized ball is preferable.
  • the ball shape of the ball mill is not particularly limited, but is preferably 1 mm to 100 mm, more preferably 5 mm to 50 mm.
  • the content ratio of each component of the mixed solution during the dispersion treatment is not particularly limited, and may be adjusted as appropriate.
  • the content ratio of the graphite in the mixed liquid and the dispersant is preferably 1 part by mass or more and 500 parts by mass or less with respect to 1 part by mass of graphite from the viewpoint of suppressing reaggregation. More preferably, it is at least 100 parts by mass.
  • the content ratio of graphite in the mixed solution and the solvent is such that the solvent is 10 masses with respect to 1 mass part of graphite from the viewpoint of increasing the separation efficiency from graphite and improving the yield of flaky graphite. Part or more and 100,000 parts by weight or less, more preferably 20 parts by weight or more and 50,000 parts by weight or less.
  • the method for producing the flaky graphite may further include other steps as long as the effects of the present invention are not impaired.
  • Examples of such a process include a process of removing a fluorine-based solvent having a surface tension of 20 mN / m or less at a use temperature for taking out flaky graphite, a process of dissolving and removing a dispersant, and the like.
  • the step of removing the solvent can be performed in the same manner as the solvent removing step of the method for producing the flaky graphite dispersion described later.
  • the step of dissolving and removing the dispersant is performed by dissolving and washing the dispersant adhering to the surface of the flaky graphite using, for example, a solvent having a solubility of 5 (g / 100 g solvent) or more. This can be done. It is also preferable to produce a flaky graphite dispersion in the same manner as the method for producing a flaky graphite dispersion described later, and obtain the flaky graphite from the flaky graphite dispersion. Furthermore, a classification step for removing graphite that has not been sufficiently thinned may be included. The classification step can be appropriately selected from conventionally known classification methods. On the other hand, the flaky graphite obtained by the production method has almost no graphite that has not been exfoliated sufficiently, so that the flaky graphite of the present invention is excellent in conductivity and thermal conductivity without performing the classification step. Can be obtained.
  • the flaky graphite of the present invention can be applied in various ways as graphene powder in various modes. Although illustrated below, it is not limited to these.
  • the flaky graphite of the present invention may be used as a dispersion containing a solvent, or may be used as a paste-like resin composition mixed with a resin or the like.
  • the dispersion containing the flaky graphite can be used for producing a graphite material as described later, and can also be used as a conductive ink.
  • the resin composition containing the said flaky graphite can be used as a conductive paint or a conductive adhesive as a conductive resin composition.
  • the flaky graphite of the present invention may be used as a film or a sheet or a molded body.
  • the flaky graphite of the present invention may be a polymer composite material, or may be used as a pellet, a wire or the like mixed with a resin.
  • Flaky graphite dispersion The flaky graphite dispersion according to the present invention is characterized in that the flaky graphite according to the present invention is dispersed in a solvent. As described above, since the flaky graphite according to the present invention is excellent in conductivity and thermal conductivity, the flaky graphite dispersion according to the present invention is a graphite material having excellent conductivity and further excellent thermal conductivity. It is excellent as a pre-preparation for producing. Further, a resin or the like may be added to the flaky graphite dispersion and used as a resin composition.
  • the flaky graphite dispersion according to the present invention preferably contains a dispersant.
  • a dispersant similar to that described in the method for producing flaky graphite can be appropriately selected and used, and thus description thereof is omitted here.
  • the solvent contained in the flaky graphite dispersion according to the present invention is not particularly limited as long as it can disperse the flaky graphite according to the present invention.
  • the solubility of the said dispersing agent is 5 (g / 100g solvent) or more solvent.
  • the solvent in which the solubility of the dispersant is 5 (g / 100 g solvent) or more from the viewpoint of dispersion stability of the dispersion, a solvent in which the solubility of the dispersant is 10 (g / 100 g solvent) or more is used. It is preferable to select and use, and it is preferable to select and use a solvent that is 20 (g / 100 g solvent) or more.
  • the solvent having a dispersant solubility of 5 (g / 100 g solvent) or more may be appropriately selected depending on the dispersant.
  • the solvent having a solubility of 5 (g / 100 g solvent) or more can be used alone or in combination of two or more.
  • the flaky graphite dispersion of the present invention can be produced, for example, by the method for producing a flaky graphite dispersion of the second invention described later.
  • the method for producing a flaky graphite dispersion according to the second aspect of the present invention comprises a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of 0.1 (g / 100 g solvent).
  • a step of mixing and dispersing with less than a dispersant (I) or (ii) below: (I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment; (Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step, It has any one of the processes of removing the fluorine-type solvent whose surface tension in the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition.
  • the step (ii) is performed. It may be used. However, among these, it is preferable to have the step (i) because it can be easily obtained in a high yield.
  • the step of removing the fluorine-based solvent having a surface tension of 20 mN / m or less at the use temperature may be hereinafter referred to as a solvent removal step, and the solvent having a solubility of 5 (g / 100 g solvent) or more.
  • the step of adding may be referred to as a solvent addition step.
  • the method for producing a flaky graphite dispersion according to the present invention comprises a mixed solution containing flaky graphite obtained by the method for producing flaky graphite according to the present invention, wherein the surface tension at the use temperature is 20 mN / m or less.
  • the solvent phase and the A dispersion that is a heterogeneous system including two phases of a dispersant phase can be made into a flaky graphite dispersion having a solvent and a dispersant as one phase.
  • the method for producing the flaky graphite dispersion has at least a dispersion treatment step, a solvent removal step, and a solvent addition step, and further other steps as necessary within the range not impairing the effects of the present invention. It may have.
  • the production method of such a flaky graphite dispersion will be described in detail in order, but the dispersion treatment step can be the same as the production method of the flaky graphite, and the description here is omitted. .
  • the fluorinated solvent having a surface tension at the use temperature of 20 mN / m or less is removed from the mixed solution obtained by the dispersion treatment step.
  • a mixture of a dispersant and flaky graphite can be obtained as a residue.
  • the method for removing the solvent may be appropriately selected according to the solvent used.
  • decantation or filtration is preferable from the viewpoint of easy operation, and the solvent may be removed by appropriate heating or reduced pressure treatment.
  • the solvent phase can be removed by liquid separation utilizing the fact that the phases are separated.
  • a dispersion of flaky graphite is added to the mixture from which the solvent has been removed by the solvent removal step by adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more. Can be obtained.
  • a solvent having a solubility of 5 (g / 100 g solvent) or more is added before the solvent removing step.
  • a solvent in which the solubility of the dispersant is 5 (g / 100 g solvent) or more
  • a solvent in which the solubility of the dispersant is 10 (g / 100 g solvent) or more is selected from the viewpoint of dispersion stability of the dispersion. It is preferable to select and use a solvent that is 20 (g / 100 g solvent) or more. Since the solvent having a solubility of 5 (g / 100 g solvent) or more has been described above, the description thereof is omitted here.
  • the method for producing a flaky graphite dispersion of the present invention may further include other steps as long as the effects of the present invention are not impaired.
  • steps include a step of adding a resin and various additives.
  • the additive used in the flaky graphite dispersion include a plasticizer, an antifoaming agent, and a silane coupling agent.
  • the content ratio of each component in the obtained flaky graphite dispersion is not particularly limited, and may be adjusted as appropriate.
  • the graphite content in the flaky graphite dispersion may be adjusted as appropriate, but from the viewpoint of dispersibility, 0.1 to 20 parts by mass with respect to 100 parts by mass of the total solid content of the flaky graphite dispersion. It is preferably no greater than part by mass, and more preferably no less than 0.5 parts by mass and no greater than 10 parts by mass.
  • the content of the solvent in the flaky graphite dispersion is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 97% by mass or less, based on the total amount of the flaky graphite dispersion.
  • the content ratio of the dispersant in the flaky graphite dispersion when the dispersant is contained is 80 parts by mass or more and 99 parts by mass with respect to 100 parts by mass of the total solid content of the flaky graphite dispersion from the viewpoint of dispersibility. Is preferably 9 parts by mass or less, and more preferably 90 parts by mass or more and 99.5 parts by mass or less.
  • the solid content represents all components other than the solvent. For example, even a liquid dispersant is included in the solid content.
  • the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 10% by number or more, and more preferably 50% by number or more. It is preferable that the content is 70% by number or more. From the viewpoint of excellent electrical conductivity and thermal conductivity, the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above. Among them, the content ratio of the flaky graphite having a thickness of 0.34 nm to 10 nm with respect to the whole flaky graphite is preferably 10% by number or more, and more preferably 20% by number or more.
  • the graphite material according to the present invention is characterized in that the flaky graphite according to the present invention is laminated. As described above, since the flaky graphite according to the present invention has an average thickness of 50 nm or less and excellent conductivity and thermal conductivity, the graphite material obtained by laminating the flaky graphite according to the present invention is excellent. It has electrical conductivity and also has excellent thermal conductivity. Since the flaky graphite according to the present invention has been described above, the description thereof is omitted here.
  • the shape of the graphite material according to the present invention is not limited as long as it is a laminate obtained by laminating the flaky graphite according to the present invention.
  • the graphite material according to the present invention may be laminated so that at least a part of each of the flake graphites of the present invention overlaps each other.
  • the graphite material according to the present invention may be one in which at least a part of each of the flake graphites of the present invention is in contact with each other.
  • the graphite material according to the present invention may be one in which the flaky graphites of the present invention are in contact with each other in the thickness direction.
  • the graphite material according to the present invention may be a film or sheet called a graphite film or a graphite sheet, or may be a molded body having a three-dimensional structure.
  • the graphite film according to the present invention can be a self-supporting film having an area of a circle having a diameter of 18 mm or more depending on the thickness distribution of the flaky graphite constituting the film, but may be in the form of a small piece.
  • the thickness is not particularly limited. From the viewpoint of having flexibility, the thickness of the graphite material according to the present invention is preferably 1 mm or less, and more preferably 200 ⁇ m or less when it is in the form of a film or sheet.
  • the graphite film or graphite sheet of the present invention having such a thickness has flexibility, it can be a very thin and light conductor with excellent flexibility. Moreover, since the graphite material according to the present invention is formed by laminating the flaky graphite according to the present invention, it can follow an adherend having a large number of curved surfaces and irregularities.
  • the direction in which at least a part of each of the flake graphites of the present invention overlaps each other is usually the thickness direction of the flakes. Also in the graphite material according to the present invention, it is preferable that an average interplanar spacing (d002) of (002) planes by an X-ray diffraction method is 0.336 nm or less.
  • the total count of all ( ⁇ ) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS), as in the flaky graphite of the present invention is preferably 0.5% or more, more preferably 0.8% or more, and even more preferably 1% or more. Also in the graphite material according to the present invention, the ratio of the fluorine ( ⁇ ) ion count is preferably 10% or less, more preferably 5% or less, and even more preferably 3% or less. Is preferred.
  • the composition of carbon atoms is preferably 80% or more as measured by X-ray photoelectron spectroscopy, and 90% or more. Is more preferably 92% or more, and still more preferably 95% or more.
  • the composition of carbon atoms may be 100% as measured by X-ray photoelectron spectroscopy, but usually it is preferably 99% or less because some oxygen atoms are contained.
  • the composition of oxygen atoms is preferably 10% or less as measured by X-ray photoelectron spectroscopy, and less than 10%.
  • the ratio of the bonds forming sp2 bonds between the carbon atoms is excellent in conductivity. From the viewpoint of thermal conductivity, it is preferably 60% or more, more preferably 70% or more, and even more preferably 75% or more as measured by X-ray photoelectron spectroscopy. The higher the ratio of bonds that form sp2 bonds between carbon atoms, the better. The upper limit of the ratio of bonds that form sp2 bonds between carbon atoms is 100%. is there.
  • the graphite material according to the present invention has good crystallinity as in the flaky graphite of the present invention, and therefore has a peak intensity in the range of 1300 to 1400 cm ⁇ 1 measured by Raman spectroscopy.
  • the intensity ratio I D / I G between (I D ) and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is preferably 0.3 or less, more preferably 0.15 or less. Further, it is preferably 0.10 or less.
  • the intensity ratio I D / I G is usually 0 in the case of raw material graphite, and is 0 or more.
  • the intensity ratio I G of the peak intensity (I G) in the range of 1580 ⁇ 1620cm -1 / I peak intensity (I G)' in the range of 2600 ⁇ 2800 cm -1 measured by Raman spectroscopy G is preferably 0.1 or more, more preferably 0.2 or more, and still more preferably 0.3 or more.
  • the intensity ratio I G ′ / I G usually increases as the thickness of the flaky graphite decreases, and becomes 2 when the thickness is about 0.34 nm (graphene monoatomic layer).
  • the graphite material according to the present invention has excellent conductivity, but the surface resistance value is preferably 200 ⁇ / ⁇ or less, more preferably 100 ⁇ / ⁇ or less.
  • the surface resistance value here can be measured with a resistivity meter (for example, manufactured by Mitsubishi Chemical Analytech Co., Ltd., model name: Loresta GP MCP-T610).
  • the thermal diffusivity measured in the surface direction in the surface whose thickness is 200 micrometers or less is 1. It is preferably 0 ⁇ 10 ⁇ 6 m 2 / s or more, and more preferably 1.0 ⁇ 10 ⁇ 5 m 2 / s or more.
  • the thermal diffusivity can be measured using a periodic heating radiation temperature measuring method, and for example, can be measured using a thermowave analyzer TA3 manufactured by Bethel Co., Ltd.
  • the graphite material according to the present invention is a laminate formed by laminating the flaky graphite according to the present invention, but a flaky graphite having a flake thickness exceeding 50 nm is formed on a part of the flaky graphite constituting the laminate. It may be included.
  • the thickness of the flakes on a part of the flake graphite constituting the laminate is preferably within a range where the surface resistance value is 200 ⁇ / ⁇ or less, more preferably 100 ⁇ / ⁇ or less. Flaky graphite exceeding 50 nm may be contained.
  • the graphite material of the present invention can be produced, for example, by the method for producing a graphite material of the second invention described later.
  • the method for producing a graphite material according to the second aspect of the present invention is the dispersion of graphite and a solubility in the solvent of less than 0.1 (g / 100 g solvent) in a fluorine-based solvent having a surface tension of 20 mN / m or less at the operating temperature.
  • the method for producing the graphite material includes at least a dispersion treatment step, a solvent removal step, a solvent addition step, and a film formation or molding step, and as necessary, within a range not impairing the effects of the present invention. Furthermore, it may have another process.
  • the method for producing such a graphite material will be described in detail in order, but the dispersion treatment step, the solvent removal step, and the solvent addition step can be the same as the method for producing the flaky graphite dispersion. Explanation here is omitted.
  • a method for producing a graphite material using the flaky graphite dispersion can be appropriately selected from conventionally known film forming methods or molding methods.
  • a suitable film forming method of the graphite material there is a method in which the flaky graphite dispersion liquid is dropped on a porous substrate such as a filter paper or a membrane filter and filtered to remove the solvent to form a film.
  • a suitable molding method of the graphite material for example, a method such as casting molding, in which the flaky graphite dispersion liquid is dropped into a porous mold and the solvent is removed by filtration to mold, is used. .
  • the dispersant since the dispersant can be removed together with the solvent, it is suitable for making a graphite material excellent in conductivity and thermal conductivity.
  • a solvent for dissolving the dispersant it is preferable to select and use a solvent having a solubility of 5 (g / 100 g solvent) or more, and further 10 (g / 100 g solvent) or more.
  • the graphite material thus obtained may be peeled off from the porous substrate or the liquid-permeable mold and used as a single substance, or transferred to another substrate such as a glass substrate or a resin substrate. May be. Furthermore, the electrical conductivity and the thermal conductivity can be enhanced by compressing the graphite material using a press or a roll press.
  • the flaky graphite dispersion is applied onto a substrate by a known coating method to form a coating film, and the solvent is removed to form the graphite material. And the like. According to this method, since the graphite material can be directly formed on the desired substrate, it is possible to form a graphite material having excellent adhesion to the substrate.
  • the flaky graphite and the graphite material according to the present invention are excellent in conductivity and thermal conductivity
  • the flaky graphite, the flaky graphite dispersion, and the graphite material according to the present invention include nanoelectronics and nanocomposites.
  • Method for producing flaky graphite comprises a solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of 0.1 (g / g). It is characterized by having a step of mixing with a dispersant (less than 100 g solvent) and carrying out a dispersion treatment (hereinafter sometimes referred to as a dispersion treatment step).
  • a solvent having a surface tension of 20 mN / m or less at the use temperature has a relatively low polarity and a small surface tension, and therefore easily enters between the graphite layers. Dispersion treatment using such a solvent facilitates the exfoliation of graphite and facilitates the production of flaky graphite, as in the method for producing flaky graphite according to the second aspect of the present invention.
  • a solvent having a surface tension of 20 mN / m or less at the use temperature is combined with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent). Use.
  • graphite or flaky graphite is similar in polarity to the dispersant, as in the method for producing flaky graphite according to the second aspect of the present invention. It becomes easy to exist in the phase, and since the dispersant exists around the flaky graphite produced by the dispersion treatment, it is possible to suppress the flaky graphite from being immediately aggregated. Furthermore, in the present invention, since the dispersant phase is separated from the solvent phase, it is estimated that the flake graphite adsorbed by the dispersant moves to the dispersant phase, and reagglomeration is more likely to be suppressed.
  • the exfoliation of graphite easily proceeds to produce flaky graphite, and the flaky graphite hardly re-aggregates.
  • Flake graphite excellent in heat conductivity and heat conductivity can be obtained in high yield.
  • the method for producing flaky graphite according to the third aspect of the present invention has at least a dispersion treatment step, and is within the range not impairing the effects of the present invention, if necessary, the flaky shape according to the second aspect of the present invention. Similar to the method for producing graphite, it may have other steps.
  • the method for producing the flaky graphite of the third aspect of the present invention will be described in detail in order.
  • the graphite, the dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and the dispersion treatment method are as follows. Since it may be the same as the method, description here is abbreviate
  • ⁇ Solvent having a surface tension at a working temperature of 20 mN / m or less a solvent having a surface tension at the use temperature of 20 mN / m or less is used as the solvent during the dispersion treatment. Since the specific solvent easily enters the graphite layer, the exfoliation of the graphite is likely to proceed.
  • the use temperature here means the solvent temperature at the start of the dispersion treatment.
  • the solvent having a surface tension at a working temperature of 20 mN / m or less include hexane (17.9 mN / m, unit omitted), heptane (19. 7), hydrocarbons such as 2,4-dimethylpentane (17.7), alkyl ethers such as diethyl ether (for example, diethyl ether: 16.7), compounds containing a dimethylsiloxane chain (for example, hexamethyldisiloxane: 15 .1, polydimethylsiloxane: 16 to 20 (varies depending on the degree of polymerization, etc.), fluorinated solvents having a fluorinated alkyl group, a fluorinated alkyl ether group, etc.
  • hydrofluoroether for example, C 4 F 9 OCH 3: 13.6mN / m , C 4 F 9 OC 2 H 5: 13.6mN / m, C 3 F 7 OCH 3 12.4mN / m, C 2 F 5 CF (OCH 3) C 3 F 7: 15mN / m , etc.
  • hydrofluorocarbons for example, hydrofluoroether (for example, C 4 F 9 OCH 3: 13.6mN / m , C 4 F 9 OC 2 H 5: 13.6mN / m, C 3 F 7 OCH 3 12.4mN / m, C 2 F 5 CF (OCH 3) C 3 F 7: 15mN / m , etc.), and hydrofluorocarbons), and the like.
  • a fluorinated solvent because it is easy to enter between graphite layers and the exfoliation of graphite easily proceeds, and at least one of a fluorinated alkyl group and a fluorin
  • the solvent is preferably a solvent having a surface tension of 15 mN / m or less at the use temperature because it easily enters the graphite layer and the peeling of the graphite easily proceeds.
  • the solvent having a surface tension at the use temperature of 20 mN / m or less can be used alone or in combination of two or more.
  • the flaky graphite obtained by the method for producing flaky graphite of the third aspect of the invention has a high proportion of single-layer graphene and graphene multi-layered in a range of 50 nm or less, and is not oxidized. Excellent electrical and thermal conductivity without having to In addition, since graphite that has not been sufficiently flaked does not remain, the weight of graphite is hardly reduced even after classification, and flaky graphite can be obtained with a high recovery rate.
  • the ratio of the single-layer graphene and the graphene multi-layered in the range of 50 nm or less is a yield of 20% by mass or more, more preferably 50 masses It is possible to obtain flaky graphite with a yield of 100% by mass or more, more preferably with a yield of 70% by mass or more, and even more preferably with a yield of 75% by mass or more. It is also possible to obtain flaky graphite.
  • the flake graphite obtained by the method for producing flake graphite according to the third aspect of the present invention is, as described above, peeled between the flakes of the flakes of graphite by using a solvent having a surface tension at the operating temperature of 20 mN / m or less. Therefore, oxygen atoms are reduced as compared with flaky graphite produced by reducing graphene oxide, and the proportion of bonds forming sp2 bonds between carbon atoms is increased. It is possible to have high conductivity and heat conductivity.
  • the flaky graphite obtained by the method for producing flaky graphite according to the third aspect of the present invention is the same as the flaky graphite according to the first aspect of the present invention. Becomes 0.336 nm or less.
  • the flaky graphite obtained by the method for producing flaky graphite of the third aspect of the present invention comprises a carbon atom composition, an oxygen atom composition, an atom different from the carbon atom and the oxygen atom as measured by X-ray photoelectron spectroscopy.
  • the composition of the carbon atoms, the sum of the carbon atom composition and the oxygen atom composition, and the ratio of the bonds forming sp2 bonds between the carbon atoms out of the bonds of the carbon atoms is the same as that of the first aspect of the present invention. Similar to those of flaky graphite.
  • the flake graphite obtained by the method for producing flake graphite according to the third aspect of the present invention is, as described above, peeled between the flakes of the flakes of graphite by using a solvent having a surface tension at the operating temperature of 20 mN / m or less. Therefore, the I D / I G and the I G ′ / I G measured by Raman measurement are the same as those of the flaky graphite of the first invention described above.
  • the flaky graphite obtained when the solvent having a surface tension at the operating temperature of 20 mN / m or less contains fluorine is adsorbed by a small amount of fluorine.
  • the flaky graphite obtained by the method for producing the flaky graphite of the third aspect of the present invention can also be applied in various forms and in various forms as graphene powder, like the flaky graphite of the first aspect of the present invention. it can.
  • a method for producing a flaky graphite dispersion according to the third aspect of the present invention comprises a solvent having a surface tension of 20 mN / m or less at the operating temperature, graphite and a solubility in the solvent of 0.00.
  • the step (ii) is used. Also good. However, among these, it is preferable to have the step (i) because it is easy to obtain flaky graphite with high yield.
  • a method for producing a flaky graphite dispersion according to the third aspect of the present invention comprises a mixed liquid containing flaky graphite obtained by the method for producing flaky graphite according to the present invention, wherein the surface tension at the use temperature is 20 mN / It is possible to produce a flaky graphite dispersion with little residual graphite that has not been exfoliated by removing a solvent of m or less and adding a solvent having a solubility of 5 (g / 100 g solvent) or more. it can.
  • the solvent phase and the dispersant A dispersion that is a heterogeneous system including two phases can be made into a flaky graphite dispersion having a solvent and a dispersant as one phase.
  • the method for producing a flaky graphite dispersion according to the third aspect of the present invention includes at least a dispersion treatment step, a solvent removal step, and a solvent addition step, and as necessary without impairing the effects of the present invention. In addition, other steps may be included.
  • the dispersion treatment step, the solvent removal step, and the solvent addition step in the method for producing a flaky graphite dispersion of the third invention the method for producing the flaky graphite of the second invention described above, the second Since it can be the same as that of the manufacturing method of the flaky graphite dispersion liquid of this invention of this invention, description here is abbreviate
  • the content ratio of each component in the flaky graphite dispersion obtained by the method for producing a flaky graphite dispersion of the third invention is not particularly limited, and may be appropriately adjusted.
  • the content of graphite and solvent in the flaky graphite dispersion, and the content of the dispersant when a dispersant is included are the same as those of the flaky graphite dispersion of the first invention described above. Preferably there is.
  • the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 10% by number or more, and more preferably 50% by number or more. It is preferable that the content is 70% by number or more. From the viewpoint of excellent electrical conductivity and thermal conductivity, the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above. Among them, the content ratio of the flaky graphite having a thickness of 0.34 nm to 10 nm with respect to the whole flaky graphite is preferably 10% by number or more, and more preferably 20% by number or more.
  • the flaky graphite dispersion obtained by the production method of the third aspect of the present invention has a high ratio of single-layer graphene and multi-layer graphene within a range of 50 nm or less, and is not oxidized. It is excellent as a preparatory preparation for producing a graphite material having heat conductivity and heat conductivity. Further, a resin or the like can be added to the flaky graphite dispersion obtained by the production method of the third present invention and used as a resin composition.
  • a method for producing a graphite material according to the third aspect of the present invention comprises a solvent having a surface tension of 20 mN / m or less at the operating temperature, a graphite and a solubility in the solvent of 0.1 (g / 100 g solvent).
  • a method for producing a graphite material according to a third aspect of the present invention comprises forming or molding a graphite material using the flaky graphite dispersion obtained by the method for producing a flaky graphite dispersion according to the third aspect of the present invention. Therefore, the graphite material excellent in electroconductivity and heat conductivity can be manufactured.
  • the method for producing a graphite material according to the third aspect of the present invention includes at least a dispersion treatment step, a solvent removal step, a solvent addition step, and a film formation or molding step, and within a range not impairing the effects of the present invention. Further, other steps may be provided as necessary.
  • the dispersion treatment step, the solvent removal step, the solvent addition step, and the film formation or molding step in the method for producing a graphite material of the third invention the production of the flake graphite of the second invention described above Since it can be the same as the method, the method for producing the flaky graphite dispersion of the second invention, and the method for producing the graphite material of the second invention, description thereof is omitted here.
  • the graphite material obtained by the method for producing a graphite material of the third aspect of the present invention can also be applied in various ways in the same manner as the graphite material of the first aspect of the present invention.
  • the outermost surface is converted to SiO 2 using a primary ion beam (69Ga + ). After about 1 nm etching, the measurement was performed.
  • a mixed liquid containing flaky graphite or a flaky graphite dispersion is sampled, diluted 20 to 2000 times with a solvent having a solubility of 5 (g / 100 g solvent) or more, and a membrane having a pore size of 0.02 ⁇ m
  • the solvent was filtered off by coating on the filter, and the flakes were placed on the membrane filter in an independent state without agglomeration. Further, the dispersant is washed with a solvent having a solubility of 5 (g / 100 g solvent) or more (in each example, the solvent used as the dispersion solvent, and only Comparative Examples 2 and 5 are water instead of toluene). Was removed.
  • the flaky graphite was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite placed on the membrane filter.
  • the flake graphite adhering to the silicon wafer in an independently dispersed state was measured by AFM, and the thickness of the flake was measured.
  • the AFM measurement uses the function of the scanning probe microscope (SPM) in the Shimadzu Corporation nanosearch microscope SFT-3500, and the scanning range is 10 ⁇ m ⁇ 10 ⁇ m in the contact mode, that is, AFM (Atomic Force Microscope). The measurement was performed.
  • the difference in height between the silicon wafer and the flaky graphite in the flaky graphite adhering on the silicon wafer was defined as the thickness of the flaky graphite.
  • the average thickness of flaky graphite is calculated by repeating the above operation until a total of 200 pieces of flaky graphite can be observed by AFM, and calculating the average value of the measured thickness of 200 pieces of flaky graphite observed by AFM. I asked for it.
  • a bond in which sp2 bonds are formed between carbon atoms (bond energy: about 284.6 eV) and a bond in which sp3 bonds are formed between carbon atoms (bond energy: about 285.5 eV);
  • ⁇ Conductivity> The surface resistance of the graphite film was measured with a resistivity meter (model name: Loresta GP MCP-T610, manufactured by Mitsubishi Chemical Analytech Co., Ltd.) using a four-probe method.
  • the graphite film was peeled off from the membrane filter used for the filtration, and an attempt was made to form a graphite free-standing film having an area of a circle having a diameter of 18 mm or more. Some were able to form a self-supporting film, while others were not able to form a self-supporting film by being divided into a plurality of small pieces. About the thing in which the self-supporting film
  • Example I series (first and second inventions) (Example 1-1: Production of flaky graphite) Fluorine-based solvent (hydrofluoroether (C 4 F 9 OC 2 H 5 ), 3M Novec7200, surface tension 13.6 mN / m) 10 mL (14.3 g) and graphite (Nippon Graphite Co., Ltd. ACB-100) 2 mg Dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid; solubility in fluorine-based solvent less than 0.1 (g / 100 g solvent), solubility in water 25 (g / 100 g solvent), viscosity at 25 ° C.
  • Dispersant Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid; solubility in fluorine-based solvent less than 0.1 (g / 100 g solvent), solubility in water 25 (g / 100 g solvent), viscosity at 25 °
  • Example 1-2 Production of flaky graphite dispersion
  • the fluorine-based solvent was removed from the mixed solution containing flaky graphite 1 obtained in Example 1-1, and 10 mL of water (solubility of the dispersing agent 25 (g / 100 g solvent)) was added to thereby precipitate.
  • a flaky graphite dispersion 1 was obtained (yield of flaky graphite 100% dispersed in the dispersion). The yield was determined to be 100% because the flaky graphite dispersion was allowed to stand for 1 hour and it was confirmed that precipitation did not occur.
  • flaky graphite dispersion 1 is sampled and applied onto a membrane filter having a pore size of 0.02 micron, so that the fluorinated solvent is filtered and placed in an independent state without agglomerating the flakes on the membrane filter. It was. Further, when fluorine was detected by TOF-SIMS measurement for the flake graphite 1 from which the dispersant was removed by washing with water, the ratio of the number of fluorine ( ⁇ ) ions to the total number of ( ⁇ ) ions was 1. 4%.
  • the average interplanar spacing (d002) of the (002) plane of the flaky graphite by the X-ray diffraction method was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the flaky graphite 1 was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite 1 placed thereon.
  • the flaky graphite 1 existing in an independently dispersed state on this silicon wafer was measured by AFM, and the thickness of the flakes was measured. there were.
  • Example 1-3 Production of graphite film
  • the flaky graphite dispersion 1 obtained in Example 1-2 was filtered and washed with water to obtain a circular graphite film 1 having a diameter of 18 mm and a thickness of 30 ⁇ m.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 1 was measured by the X-ray diffraction method. In FIG. 1, the measurement result by the X-ray-diffraction method of the graphite film 1 is shown.
  • FIG. 2 shows an SEM photograph of the graphite film 1 according to the present invention.
  • Example 2-1 Production of flaky graphite
  • the dispersant was tween 20 (polyoxyethylene (20) sorbitan monolaurate manufactured by Tokyo Chemical Industry Co., Ltd., solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 Except that (g / 100 g solvent) was exceeded and the viscosity at 25 ° C. was changed to 370 mPa ⁇ s, flaky graphite 2 was obtained in the same manner as in Example 1-1.
  • Example 2-2 Production of flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed liquid containing flaky graphite 2 obtained in Example 2-1, and 10 mL of water was added to obtain flaky graphite dispersion 2 without precipitation (into the dispersion).
  • Yield of dispersed flaky graphite 100% Using the flaky graphite dispersion 2, the flaky graphite 2 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 2 was measured by AFM. The range was from 3 nm to 12 nm, and the average thickness was 8 nm.
  • Example 2-3 Production of graphite film
  • the flaky graphite dispersion 2 obtained in Example 2-2 was filtered and washed with water to obtain a graphite film 2.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.3%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 2 was measured by the X-ray diffraction method, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
  • Example 3-1 Production of flaky graphite
  • the dispersant was span20 (Sorbitan monolaurate, a solubility in the fluorine-based solvent of less than 0.1 (g / 100 g solvent) manufactured by Tokyo Chemical Industry Co., Ltd., and a solubility in isopropyl alcohol of 10 (g / 100 g solvent). Except that the viscosity at 25 ° C. was changed to 4200 mPa ⁇ s), flaky graphite 3 was obtained in the same manner as in Example 1-1.
  • Example 3-2 Production of flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed liquid containing the flaky graphite 3 obtained in Example 3-1, and 10 mL of isopropyl alcohol was added to obtain a flaky graphite dispersion 3 without precipitation (dispersion liquid).
  • the flaky graphite dispersion 3 the flaky graphite 3 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 3 was measured by AFM. The range was 5 nm to 41 nm, and the average thickness was 33 nm.
  • Example 3-3 Production of graphite film
  • the flaky graphite dispersion 3 obtained in Example 3-2 was filtered and washed with isopropyl alcohol to obtain a graphite film 3.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 3 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
  • Example 4-1 Production of flaky graphite
  • the dispersing agent was BYK-9076 manufactured by Big Chemie Japan (polyurethane-containing, alkylammonium salt of high molecular weight copolymer, solubility in fluorine-based solvent was less than 0.1 (g / 100 g solvent), and into water.
  • Exfoliated graphite 4 was obtained in the same manner as in Example 1-1 except that the solubility was 15 (g / 100 g solvent) and the viscosity at 25 ° C. was 1050 mPa ⁇ s.
  • Example 4-2 Production of flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed solution containing the flaky graphite 4 obtained in Example 4-1, and 10 mL of water was added to obtain a flaky graphite dispersion 4 without precipitation (into the dispersion).
  • Yield of dispersed flaky graphite 100% Using flaky graphite dispersion 4, flaky graphite 4 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of flaky graphite 4 was measured by AFM. The range was from 3 nm to 11 nm, and the average thickness was 8 nm.
  • Example 4-3 Production of graphite film
  • the flaky graphite dispersion 4 obtained in Example 4-2 was filtered and washed with water to obtain a graphite film 4.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 4 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
  • Example 5-1 Production of flaky graphite
  • the dispersant was a branched polyethyleneimine (number average molecular weight Mn 60000, 50% aqueous solution) manufactured by Sigma-Aldrich (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 ( Except that the viscosity was changed to over 10,000 gPa ⁇ s) at 25 ° C., flake graphite 5 was obtained in the same manner as in Example 1-1.
  • Example 5-2 Production of flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed solution containing the flake graphite 5 obtained in Example 5-1, and 10 mL of water was added to obtain a flake graphite dispersion 5 (the flakes dispersed in the dispersion). Yield of glassy graphite 100%).
  • the flaky graphite dispersion 5 the flaky graphite 5 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 5 was measured by AFM. The range was 7 nm to 48 nm, and the average thickness was 35 nm.
  • Example 5-3 Production of graphite film
  • the comparative flaky graphite dispersion 5 obtained in Example 5-2 was filtered and washed with water to obtain a graphite film 5.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 5 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
  • Example 6-1 Production of flaky graphite
  • a dispersant was sodium dodecylbenzenesulfonate (hard type) manufactured by Tokyo Chemical Industry Co., Ltd.
  • solubility in water 20 g / Exfoliated graphite 6 was obtained in the same manner as in Example 1-1 except that it was changed to 100 g solvent) and solid at 25 ° C.
  • Example 6-2 Production of flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed solution containing the flaky graphite 6 obtained in Example 6-1 and 10 mL of water was added to obtain a flaky graphite dispersion 6 without precipitation (into the dispersion).
  • Yield of dispersed flaky graphite 100% Using flaky graphite dispersion 6, flaky graphite 6 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of flaky graphite 6 was measured by AFM. The range was 3 nm to 11 nm, and the average thickness was 9 nm.
  • Example 6-3 Production of graphite film
  • the flaky graphite dispersion 6 obtained in Example 6-2 was filtered and washed with water to obtain a graphite film 6.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.5%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 6 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 80%.
  • Comparative Example 1-1 Production of comparative flaky graphite
  • the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical (solubility 0.7 (g / 100 g solvent) in the fluorinated solvent, and isopropyl alcohol.
  • Comparative flaky graphite 1 was obtained in the same manner as in Example 1-1 except that the solubility was changed to 10 (g / 100 g solvent) excess and the viscosity at 25 ° C. was 800 mPa ⁇ s.
  • Comparative Example 1-2 Production of comparative flaky graphite dispersion
  • the fluorinated solvent was removed from the mixed liquid containing the comparative flaky graphite 1 obtained in Comparative Example 1-1, and 10 mL of isopropyl alcohol was added to obtain a comparative flaky graphite dispersion 1.
  • the comparative flaky graphite dispersion 1 had a precipitate.
  • comparative flaky graphite 1 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2. When the thickness was measured, it was in the range of 63 nm to 260 nm, and the average thickness was 198 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
  • Comparative Example 1-3 Production of comparative graphite film
  • the comparative flaky graphite dispersion liquid 1 obtained in Comparative Example 1-2 was filtered and washed with isopropyl alcohol to obtain a comparative graphite film 1.
  • FIG. 3 shows an SEM photograph of the comparative graphite film 1.
  • Comparative Example 2-2 Production of comparative flaky graphite dispersion
  • a comparative flaky graphite dispersion 2 was obtained in the same manner as in Example 1-2, except that toluene (solubility of the dispersant is 1 (g / 100 g solvent)) was used instead of water in Example 1-2. .
  • toluene solubility of the dispersant is 1 (g / 100 g solvent)
  • the comparative flaky graphite dispersion 2 precipitation occurred.
  • the comparative flaky graphite 2 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2.
  • the thickness was measured, it was in the range of 75 to 230 nm, and the average thickness was 177 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
  • Comparative Example 2-3 Production of comparative graphite film
  • the comparative flaky graphite dispersion 2 obtained in Comparative Example 2-2 was filtered and washed with water to obtain a comparative graphite film 2.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 0 excluding noise.
  • the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 2 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • Example 3-1 Production of comparative flaky graphite
  • the fluorinated solvent was changed to water (surface tension (25 ° C.) 72 mN / m)
  • the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical.
  • Surflon S-420 surfactant having a perfluoroalkyl group
  • Comparative flaky graphite 3 was thus obtained.
  • Comparative Example 3-2 Production of Comparative Flaky Graphite Dispersion
  • Water was removed from the mixed solution containing the comparative flaky graphite 3 obtained in Comparative Example 3-1, and 10 mL of isopropyl alcohol was added to obtain a comparative flaky graphite dispersion 3.
  • the comparative flaky graphite dispersion 3 had a precipitate.
  • the comparative flaky graphite 3 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2. When the thickness was measured, it was in the range of 70 nm to 250 nm, and the average thickness was 182 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
  • Comparative Example 3-3 Production of comparative graphite film
  • the comparative flaky graphite dispersion 3 obtained in Comparative Example 3-2 was filtered and washed with isopropyl alcohol to obtain a comparative graphite film 3.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 0 excluding noise.
  • the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 3 was measured by the X-ray diffraction method, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • Table 1 shows the evaluation results of Examples 1 to 6 and Comparative Examples 1 to 3.
  • a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent for dispersing graphite.
  • TOF-SIMS secondary ion mass spectrometry
  • the obtained comparative graphite film 1 has a high resistance value and is inferior in conductivity.
  • the ratio of the number of fluorine ( ⁇ ) ions to the total number of ( ⁇ ) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained.
  • the dispersion when the dispersion was prepared, the dispersion was prepared by adding a solvent having a dispersant solubility of less than 5 (g / 100 g solvent), so that precipitation occurred and the dispersion was 50 nm or less dispersed in the dispersion. The yield of flaky graphite was 0%.
  • Comparative Example 3 in which a solvent having a surface tension at a working temperature of more than 20 mN / m in combination with a dispersant having low solubility in the solvent was used as a solvent for dispersing the graphite, precipitation occurred in the dispersion, resulting in dispersion.
  • the yield of flaky graphite of 50 nm or less dispersed in the liquid was 0%.
  • the obtained comparative graphite film 3 has a high resistance value and is inferior in conductivity.
  • Example 8-1, 2 Production of flaky graphite and flaky graphite dispersion
  • Fluorine solvent hydrofluoroether (C 4 F 9 OC 2 H 5 ), 3M Novec 7200, surface tension 13.6 mN / m) 14 mL (20.0 g) and graphite (Nippon Graphite Co., Ltd. ACB-100) 20 mg
  • Dispersant Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid; solubility in fluorine-based solvent less than 0.1 (g / 100 g solvent), solubility in water 25 (g / 100 g solvent), viscosity at 25 ° C. 1200 mPa ⁇ s) 100 mg was mixed, and flaky graphite 8 was obtained by processing with a stainless steel ball at 20 Hz for 30 minutes in a ball mill (a mixer mill manufactured by Lecce).
  • the fluorine solvent was removed from the mixture containing flaky graphite 8 by decantation and reduced pressure treatment, and 20 mL of water was added to prepare flaky graphite dispersion 8 (yield of flaky graphite dispersed in dispersion 100% ).
  • the flake graphite dispersion 8 is diluted 200 times with water and then applied onto a membrane filter having a pore size of 0.02 microns to separate the water and place the flakes on the membrane filter in an independent state without agglomeration. It was. Further, regarding the flaky graphite 8 from which the dispersant was removed by washing with water, fluorine was detected by TOF-SIMS measurement.
  • the ratio of the number of fluorine ( ⁇ ) ions to the total number of ( ⁇ ) ions was It was 1.4%.
  • an average interplanar spacing (d002) of the (002) plane of the flaky graphite 8 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the flaky graphite 8 was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite 8 placed thereon.
  • the flake graphite 8 existing in a state of being dispersed independently on the silicon wafer was measured by AFM, and the thickness of the flake was measured.
  • FIG. 4 shows an AFM photograph of the flaky graphite 8.
  • Example 8-3 Production of graphite film
  • the flaky graphite dispersion 8 obtained in Example 8-2 was filtered and washed with water to obtain a circular graphite film 8 having a diameter of 36 mm and a thickness of 20 ⁇ m.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 8 was measured by the X-ray diffraction method.
  • the graphite film 8 was measured by X-ray photoelectron spectroscopy.
  • FIG. 5 the measurement result by the X-ray photoelectron spectroscopy of the graphite film 8 is shown.
  • the composition of carbon atoms was 95.2% and the composition of oxygen atoms was 4.2%.
  • FIG. 6 shows an enlarged view of the peak of the carbon atom in the measurement result by X-ray photoelectron spectroscopy. Of the bonds possessed by the carbon atoms, the ratio of the bonds forming sp2 bonds between the carbon atoms was 81%. According to X-ray photoelectron spectroscopy, the composition of fluorine atoms was measured as 0%.
  • Raman measurement was performed on the graphite film 8.
  • FIG. 7 an example of the measurement result by the Raman spectroscopy of the graphite film 8 is shown.
  • the Raman measurement was performed 10 times while changing the position of the graphite film to be measured, and the peak intensity described later showed an average value thereof.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is 0.08, The results confirming that there are few defects were obtained.
  • Example 9-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the dispersant was tween 20 (polyoxyethylene (20) sorbitan monolaurate manufactured by Tokyo Chemical Industry Co., Ltd., solubility in the fluorinated solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 Except that (g / 100 g solvent) was exceeded and the viscosity at 25 ° C. was changed to 370 mPa ⁇ s, flaky graphite 9 was obtained in the same manner as in Example 8-1.
  • Example 8-2 the fluorinated solvent was removed from the mixed solution containing flaky graphite 9 obtained above, and water was added to obtain flaky graphite dispersion 9 without precipitation. (Yield 100% of flaky graphite dispersed in dispersion).
  • the flaky graphite dispersion 9 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 9 was measured by AFM. The average thickness of the flaky graphite 9 was 31 nm.
  • the number of flakes having a thickness of less than 10 nm is 28%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 65%
  • the number of flakes having a thickness exceeding 50 nm is 7%. confirmed.
  • Example 9-3 Production of graphite film
  • the flaky graphite dispersion 9 obtained in Example 9-2 was filtered and washed with water to obtain a graphite film 9.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.3%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 9 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 79%.
  • the intensity ratio I D / I G of the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.10, and the result which supports that there are few defects was obtained.
  • Example 10-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the dispersant was span 20 (Sorbitan monolaurate, solubility in the fluorine-based solvent less than 0.1 (g / 100 g solvent), Tokyo Chemical Industry Co., Ltd., solubility in isopropyl alcohol 10 (g / 100 g solvent) Except that the viscosity at 25 ° C. was changed to 4200 mPa ⁇ s), flaky graphite 10 was obtained in the same manner as in Example 8-1.
  • the fluorinated solvent is removed from the mixed liquid containing flaky graphite 10 obtained as described above in the same manner as in Example 8-2, and 10 mL of isopropyl alcohol is added, whereby flaky graphite dispersion 10 having no precipitation is added. (100% yield of flaky graphite dispersed in the dispersion).
  • the flaky graphite dispersion 10 Using the flaky graphite dispersion 10, the flaky graphite 10 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 10 was measured by AFM. The average thickness of the flaky graphite 10 was 43 nm.
  • the number of flakes having a thickness of less than 10 nm is 8%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 76%
  • the number of flakes having a thickness exceeding 50 nm is 16%. It was confirmed.
  • Example 10-3 Production of graphite film
  • the flaky graphite dispersion 10 obtained in Example 10-2 was filtered and washed with isopropyl alcohol to obtain a graphite film 10.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 10 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.15, and a result supporting that there were few defects was obtained.
  • Example 11-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the dispersing agent was BYK-9076 manufactured by Big Chemie Japan (polyurethane-containing, alkylammonium salt of high molecular weight copolymer, solubility in fluorine-based solvent was less than 0.1 (g / 100 g solvent), into water.
  • Exfoliated graphite 11 was obtained in the same manner as in Example 8-1, except that the solubility was 15 (g / 100 g solvent) and the viscosity at 25 ° C. was 1050 mPa ⁇ s.
  • flaky graphite dispersion without precipitation is added. 11 was obtained (yield of flaky graphite 100% dispersed in the dispersion).
  • flaky graphite dispersion 11 flaky graphite 11 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 8-2, and when the thickness of flaky graphite 11 was measured by AFM, The average thickness of the flaky graphite 11 was 34 nm.
  • the number of flakes having a thickness of less than 10 nm is 9%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 86%
  • the number of flakes having a thickness exceeding 50 nm is 5%. It was confirmed.
  • Example 11-3 Production of graphite film
  • the flaky graphite dispersion 11 obtained in Example 11-2 was filtered and washed with water to obtain a graphite film 11.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 11 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 79%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.08, and the results supporting the few defects were obtained.
  • Example 12-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the dispersant was a branched polyethyleneimine (number average molecular weight Mn 60000, 50% aqueous solution) manufactured by Sigma-Aldrich (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 ( Except that the viscosity was changed to more than g / 100 g solvent) and a viscosity at 25 ° C. (10000 mPa ⁇ s), flaky graphite 12 was obtained in the same manner as in Example 8-1.
  • the fluorinated solvent is removed from the mixed solution containing the flaky graphite 12 obtained in Example 12-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 12.
  • Yield of flaky graphite dispersed in dispersion liquid 100%.
  • the flaky graphite 12 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 12 was measured by AFM. The average thickness of the flaky graphite 12 was 45 nm.
  • the number of flakes having a thickness of less than 10 nm is 4%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 75%
  • the number of flakes having a thickness exceeding 50 nm is 21%. It was confirmed.
  • Example 12-3 Production of graphite film
  • the comparative flaky graphite dispersion 12 obtained in Example 12-2 was filtered and washed with water to obtain a graphite film 12.
  • fluorine was detected in the graphite film 12 by TOF-SIMS measurement, the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 12 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.16 and the result which supports that there are few defects was obtained.
  • Example 13-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the dispersant was sodium dodecylbenzene sulfonate (hard type) manufactured by Tokyo Chemical Industry Co., Ltd.
  • solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent)
  • solubility in water was 20 (g / Exfoliated graphite 13 was obtained in the same manner as in Example 8-1, except that it was changed to 100 g solvent) and solid at 25 ° C.
  • the fluorinated solvent is removed from the mixed solution containing the flaky graphite 13 obtained in Example 13-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 13. (Yield of flaky graphite dispersed in dispersion liquid: 100%).
  • the flaky graphite dispersion 13 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 13 was measured by AFM.
  • the average thickness of the flaky graphite 12 was 38 nm.
  • the number of flakes having a thickness of less than 10 nm is 36%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 58%
  • the number of flakes having a thickness exceeding 50 nm is 6%. It was confirmed.
  • Example 13-3 Production of graphite film
  • the flaky graphite dispersion 13 obtained in Example 13-2 was filtered and washed with water to obtain a graphite film 13.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.5%.
  • the average interplanar spacing (d002) of the (002) planes of the graphite film 13 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 82%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.13 and the result which supports that there are few defects was obtained.
  • Example 14-1 2: Production of flaky graphite and flaky graphite dispersion
  • flaky graphite 14 was obtained.
  • the solubility of the dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid) in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), and the solubility in water was 25 (g / 100 g solvent).
  • the fluorinated solvent is removed from the mixed solution containing the flaky graphite 14 obtained in Example 14-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 14.
  • Yield of flaky graphite dispersed in dispersion liquid 100%.
  • the flaky graphite 14 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 14 was measured by AFM.
  • the average thickness of the flaky graphite 14 was 22 nm.
  • the number of flakes having a thickness of less than 10 nm is 15%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 87%
  • the number of flakes having a thickness exceeding 50 nm is 7%. It was confirmed.
  • Example 14-3 Production of graphite film
  • the flaky graphite dispersion 14 obtained in Example 14-2 was filtered and washed with water to obtain a graphite film 14.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 14 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 75%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.09, and a result supporting that there were few defects was obtained.
  • Example 15-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the surface tension 13.4MN / m) Exfoliated graphite 15 was obtained in the same manner as in Example 8-1, except that the volume was changed to 10 mL (16.7 g).
  • the solubility of the dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid) in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), and the solubility in water was 25 (g / 100 g solvent).
  • the fluorinated solvent is removed from the mixed solution containing the flaky graphite 15 obtained in Example 15-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 15. (Yield of flaky graphite dispersed in dispersion liquid: 100%).
  • flaky graphite dispersion 15 flaky graphite 15 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of flaky graphite 15 was measured by AFM. The average uniform thickness of the flaky graphite 15 was 20 nm.
  • the number of flakes having a thickness of less than 10 nm is 30%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 64%
  • the number of flakes having a thickness exceeding 50 nm is 6%. It was confirmed.
  • Example 15-3 Production of graphite film
  • the flaky graphite dispersion 15 obtained in Example 15-2 was filtered and washed with water to obtain a graphite film 15.
  • the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 1.4%.
  • an average interplanar spacing (d002) of (002) planes of the graphite film 15 by X-ray diffraction method was measured, it was 0.3356 nm, which was the same as that of ACB-100 of raw material graphite.
  • the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 80%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.08, and the results supporting the few defects were obtained.
  • Example 8-1 the dispersant is Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical Co., Ltd. (solubility 0.7 (g / 100 g solvent) in the fluorinated solvent, and isopropyl alcohol.
  • Comparative flaky graphite 4 was obtained in the same manner as in Example 8-1, except that the solubility was increased to 10 (g / 100 g solvent) and the viscosity at 25 ° C. was 800 mPa ⁇ s.
  • a comparative flaky graphite dispersion was prepared by removing the fluorinated solvent from the mixed liquid containing the comparative flaky graphite 4 obtained in Comparative Example 4-1, and adding isopropyl alcohol in the same manner as in Example 8-2. 4 was obtained.
  • the comparative flaky graphite dispersion 4 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered off with a nylon mesh having a mesh size of 100 ⁇ m, dried and dried using a heating vacuum oven, and the mass of the precipitate is 74% by mass with respect to the raw material. there were.
  • the proportion of flaky graphite having a thickness of 50 nm or less is at least 26% by mass or less.
  • the mass is lighter by the thickness. In the dispersion 4, it can be said that it is at least 26% by number or less.
  • Comparative Example 4-3 Production of Comparative Graphite Film
  • the comparative flaky graphite dispersion 4 obtained in Comparative Example 4-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with isopropyl alcohol to obtain a comparative graphite film 4. It was.
  • the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 4, the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 0 except for noise (0.2%). there were.
  • the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 4 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the comparative graphite film 4 was subjected to Raman measurement.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is 0.08, The results confirming that there are few defects were obtained.
  • Comparative Example 5-2 Production of Comparative Flaky Graphite Dispersion
  • Comparative flaky graphite dispersion 5 was obtained in the same manner as in Example 8-2, except that toluene (solubility of the dispersant is 1 (g / 100 g solvent)) was used instead of water in Example 8-2.
  • the comparative flaky graphite dispersion 5 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered through a nylon mesh having a mesh size of 100 ⁇ m and dried using a heating vacuum oven to measure the mass. The mass of the precipitate is 80% by mass with respect to the raw material. there were.
  • the proportion of flaky graphite having a thickness of 50 nm or less is at least 20% by mass or less.
  • the mass is lighter by the thickness. In the dispersion 5, it can be said that it is at least 20% by number or less.
  • Comparative Example 5-3 Production of Comparative Graphite Film
  • the comparative flaky graphite dispersion 5 obtained in Comparative Example 5-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with water to obtain a comparative graphite film 5.
  • the ratio of the fluorine ( ⁇ ) ion count to the total count of all ( ⁇ ) ions was 0 excluding noise (0.2%). It was.
  • the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 5 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the comparative graphite film 5 was subjected to Raman measurement.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is 0.17, The results confirming that there are few defects were obtained.
  • Example 8-1 Production of comparative flaky graphite and comparative flaky graphite dispersion
  • the fluorine-based solvent was changed to water (surface tension (25 ° C.) 72 mN / m)
  • the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical.
  • Surflon S-420 surfactant having a perfluoroalkyl group
  • Comparative flaky graphite 6 was thus obtained.
  • the comparative flaky graphite dispersion 6 was obtained. Obtained.
  • the comparative flaky graphite dispersion 6 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered through a nylon mesh having a mesh size of 100 ⁇ m and dried using a heating vacuum oven to measure the mass. The mass of the precipitate is 80% by mass with respect to the raw material. there were.
  • flaky graphite having a thickness of 50 nm or less does not precipitate, the proportion of flaky graphite having a thickness of 50 nm or less is at least 20% by mass or less. Considering that flaky graphite having a thickness of 50 nm or less often has the same or smaller size in the surface direction than flaky graphite having a thickness exceeding 50 nm, the mass is light by the thickness, so at least 20% by number The following can be said.
  • Comparative Example 6-3 Production of comparative graphite film
  • the comparative flaky graphite dispersion 6 obtained in Comparative Example 6-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with isopropyl alcohol to obtain a comparative graphite film 6. It was.
  • the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 6, the ratio of the count number of fluorine ( ⁇ ) ions to the total count number of all ( ⁇ ) ions was 0 except for noise (0.2%). It was.
  • the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 6 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the comparative graphite film 6 was subjected to Raman measurement.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is 0.16, The results confirming that there are few defects were obtained.
  • Table 2 shows the evaluation results of Examples 8 to 15 and Comparative Examples 4 to 6.
  • a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent for dispersing graphite.
  • the time-of-flight type 2 No flaky graphite with a ratio of fluorine (-) ion count to 0.5% or more of the total count of all (-) ions measured using secondary ion mass spectrometry (TOF-SIMS) It was.
  • TOF-SIMS secondary ion mass spectrometry
  • Comparative Example 5 the ratio of the number of fluorine ( ⁇ ) ions to the total number of ( ⁇ ) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained.
  • TOF-SIMS time-of-flight secondary ion mass spectrometry
  • Comparative Example 5 when the dispersion was prepared, precipitation was generated because the dispersion was prepared by adding a solvent having a solubility of the dispersant less than 5 (g / 100 g solvent). Moreover, it was shown that the obtained comparative graphite film 5 has a high resistance value and is inferior in conductivity.
  • Comparative Example 6 the ratio of the number of fluorine ( ⁇ ) ions to the total number of ( ⁇ ) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained.
  • Comparative Example 6 in which a solvent having a surface tension at an operating temperature of more than 20 mN / m and a dispersant having a low solubility in the solvent were used in combination as a solvent for dispersing graphite, precipitation occurred in the dispersion. Moreover, it was shown that the obtained comparative graphite film 6 has a high resistance value and is inferior in conductivity.
  • Example II series Examples of the third aspect of the present invention will be described below.
  • Examples 1 to 6 and 8 to 15 and Comparative Examples 1 to 6 are the first examples of the Example I series.
  • Example 7-1 Production of flaky graphite
  • the fluorine-based solvent was changed to 10 mL (6.8 g) of heptane (surface tension 19.65 mN / m), and the dispersant was tween 20 (polyoxyethylene (20) sorbitan mono) manufactured by Tokyo Chemical Industry Co., Ltd.
  • Example 1-1 with the exception that the solubility in laurate and heptane was less than 0.1 (g / 100 g solvent), the solubility in water was more than 50 (g / 100 g solvent), and the viscosity at 25 ° C. was 370 mPa ⁇ s.
  • flaky graphite 7 was obtained.
  • Example 7-2 Production of flaky graphite dispersion
  • Heptane was removed from the mixed solution containing flaky graphite 7 obtained in Example 7-1, and 10 mL of water was added to obtain flaky graphite dispersion 7.
  • Yield 100% of flaky graphite dispersed in dispersion Using the flaky graphite dispersion 7, the flaky graphite 7 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 7 was measured by AFM. The range was 4 nm to 37 nm, and the average thickness was 30 nm.
  • Example 7-3 Production of graphite film
  • the flaky graphite dispersion 7 obtained in Example 7-2 was filtered and washed with water to obtain a graphite film 7.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 7 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the graphite film 7 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 74%.
  • the dispersion of Comparative Example 2 in which the dispersion was prepared by adding a solvent having a solubility of the dispersant less than 5 (g / 100 g solvent) resulted in precipitation.
  • the yield of flaky graphite having a thickness of 50 nm or less dispersed in was 0%.
  • the obtained comparative graphite film 2 has a high resistance value and is inferior in conductivity.
  • precipitation occurred in the dispersion of Comparative Example 3 in which a solvent having a surface tension at the operating temperature exceeding 20 mN / m and a dispersant having a low solubility in the solvent were used in combination.
  • the yield of flaky graphite of 50 nm or less dispersed in the dispersion was 0%.
  • the obtained comparative graphite film 3 has a high resistance value and is inferior in conductivity.
  • Example 16-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the fluorine-based solvent was changed to 20 mL (13.6 g) of heptane (surface tension 19.65 mN / m), and the dispersant was tween 20 (polyoxyethylene (20) sorbitan mono) manufactured by Tokyo Chemical Industry Co., Ltd.
  • Example 8-1 with the exception that the solubility in laurate and heptane was less than 0.1 (g / 100 g solvent), the solubility in water was more than 50 (g / 100 g solvent), and the viscosity at 25 ° C. was 370 mPa ⁇ s.
  • flaky graphite 16 was obtained.
  • Heptane was removed from the mixed solution containing flaky graphite 16 obtained in Example 16-1 in the same manner as in Example 8-2, and water was added to obtain flaky graphite dispersion 16 ( Yield of flaky graphite dispersed in dispersion (100%).
  • the flaky graphite 16 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 16 was measured by AFM. The average thickness of the flaky graphite 16 was 45 nm.
  • the number of flakes having a thickness of less than 10 nm is 2%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 74%
  • the number of flakes having a thickness exceeding 50 nm is 24%. It was confirmed.
  • Example 16-3 Production of graphite film
  • the flaky graphite dispersion liquid 16 obtained in Example 16-2 was filtered and washed with water to obtain a graphite film 16.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 16 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the graphite film 16 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 70%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.08, and the results supporting the few defects were obtained.
  • the / I G 'intensity ratio I G of the peak intensity in the range of 1580 ⁇ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ⁇ 2800 cm -1 is 0.43, The result which proves that the thickness of flaky graphite is thin was obtained.
  • Example 17-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the fluorine-based solvent was changed to 2,4-dimethylpentane (surface tension 17.7 mN / m) 20 mL (13.4 g), and the dispersant was tween 20 (polyoxyethylene manufactured by Tokyo Chemical Industry Co., Ltd.).
  • Sorbitan monolaurate, solubility in 2,4-dimethylpentane is less than 0.1 (g / 100 g solvent), solubility in water is more than 50 (g / 100 g solvent), viscosity is changed to 370 mPa ⁇ s at 25 ° C.
  • flaky graphite 17 was obtained in the same manner as in Example 8-1.
  • Example 17 By removing 2,4-dimethylpentane from the mixed liquid containing flaky graphite 17 obtained in Example 17-1 and adding water in the same manner as in Example 8-2, a flaky graphite dispersion was obtained. 17 was obtained (yield of flaky graphite dispersed in the dispersion, 100%). Using the flaky graphite dispersion 17, the flaky graphite 17 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 17 was measured by AFM. The average thickness of the flaky graphite 17 was 44 nm.
  • the number of flakes having a thickness of less than 10 nm is 4%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 76%
  • the number of flakes having a thickness exceeding 50 nm is 20%. It was confirmed.
  • Example 17-3 Production of graphite film
  • the flaky graphite dispersion liquid 17 obtained in Example 17-2 was filtered and washed with water to obtain a graphite film 17.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 17 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the graphite film 17 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 73%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.08, and the results supporting the few defects were obtained.
  • the / I G 'intensity ratio I G of the peak intensity in the range of 1580 ⁇ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ⁇ 2800 cm -1 is 0.43, The result which proves that the thickness of flaky graphite is thin was obtained.
  • Example 18-1, 2 Production of flaky graphite and flaky graphite dispersion
  • the fluorinated solvent was changed to 20 mL (16.4 g) of polydimethylsiloxane (KF-96L-1cs, surface tension 16.9 mN / m, manufactured by Shin-Etsu Chemical Co., Ltd.), and the dispersant was changed to Tokyo Kasei.
  • Industrial tween 20 polyoxyethylene (20) sorbitan monolaurate, solubility in polydimethylsiloxane less than 0.1 (g / 100 g solvent), solubility in water over 50 (g / 100 g solvent), viscosity at 25 ° C. 370 mPa Except for the change to s), flaky graphite 18 was obtained in the same manner as in Example 8-1.
  • the number of flakes having a thickness of less than 10 nm is 10%
  • the number of flakes having a thickness in the range of 10 nm to 50 nm is 69%
  • the number of flakes having a thickness exceeding 50 nm is 21%. It was confirmed.
  • Example 18-3 Production of graphite film
  • the flaky graphite dispersion liquid 18 obtained in Example 18-2 was filtered and washed with water to obtain a graphite film 18.
  • the average interplanar spacing (d002) of the (002) plane of the graphite film 18 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
  • the graphite film 18 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 73%.
  • the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm ⁇ 1 and the peak intensity (I G ) in the range of 1580 to 1620 cm ⁇ 1 is It was 0.07, and the result which proves that there are few defects was obtained.
  • the / I G 'intensity ratio I G of the peak intensity in the range of 1580 ⁇ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ⁇ 2800 cm -1 is 0.46, The result which proves that the thickness of flaky graphite is thin was obtained.
  • the yield of flaky graphite of 50 nm or less dispersed in was low.
  • the obtained comparative graphite film 5 has a high resistance value and is inferior in conductivity.
  • precipitation occurred in the dispersion of Comparative Example 6 using a combination of a solvent having a surface tension exceeding 20 mN / m at the use temperature and a dispersant having low solubility in the solvent.
  • the yield of flaky graphite of 50 nm or less dispersed in the dispersion was low.
  • the obtained comparative graphite film 6 has a high resistance value and is inferior in conductivity.

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Abstract

Provided are flake graphite having excellent conductivity and a flake graphite dispersion and flake graphite material including the flake graphite. The flake graphite has a percentage of counts of fluorine (-) ions to the total count of all (-) ions measured using Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) of 0.5% or more, an average spacing (d002) between (002) planes according to X-ray diffraction of 0.336 nm or less, and an average thickness of 50 nm or less.

Description

薄片状黒鉛、黒鉛材料、及び薄片状黒鉛分散液Flaky graphite, graphite material, and flaky graphite dispersion
 本発明は、薄片状黒鉛、黒鉛材料、及び薄片状黒鉛分散液に関する。 The present invention relates to flaky graphite, graphite material, and flaky graphite dispersion.
 黒鉛(グラファイト)の単層構造であるグラフェンは、炭素六員環が平面方向に連なった二次元平面結晶であり、優れた導電性、熱伝導性等を有する。グラフェンの優れた導電性、熱伝導性を引き出すためには、単層のグラフェン又は50nm以下の範囲で複層化したグラフェン(以下、薄片状黒鉛という)を用いることが求められている。
 このような薄片状黒鉛を成膜して、高性能の導電膜や熱伝導膜を得る試みが検討されている。
Graphene, which has a single layer structure of graphite (graphite), is a two-dimensional planar crystal in which carbon six-membered rings are connected in a planar direction, and has excellent conductivity, thermal conductivity, and the like. In order to draw out the excellent conductivity and thermal conductivity of graphene, it is required to use single-layer graphene or graphene multi-layered in the range of 50 nm or less (hereinafter referred to as flake graphite).
Attempts have been made to obtain a high-performance conductive film or heat conductive film by depositing such flaky graphite.
 薄片状黒鉛の成膜方法としては、化学蒸着法(CVD法)や、溶液塗布法等が知られており、中でも低コストで成膜可能な点から溶液塗布法が注目されている。
 溶液塗布法により薄片状黒鉛を成膜する場合、溶液内で薄片状黒鉛を分散しておく必要がある。
As a method for depositing flaky graphite, a chemical vapor deposition method (CVD method), a solution coating method, and the like are known. Among these, a solution coating method is attracting attention because it can be formed at a low cost.
When flaky graphite is formed by a solution coating method, it is necessary to disperse the flaky graphite in the solution.
 黒鉛から剥離して薄片状黒鉛を得る方法としては、黒鉛を酸化して、層間剥離が容易な酸化黒鉛として剥離処理を行った後、当該酸化黒鉛を還元処理する方法が知られている(例えば、特許文献1)。しかしながら、当該方法では、酸化黒鉛を還元処理しても酸化黒鉛が残留したり、還元後に元のグラフェン構造に戻らないという問題があった。酸化黒鉛は絶縁性を有するため、またπ電子が二次元的に広がったsp2構造でなければ電子が移動しないため、当該方法により得られた薄片状黒鉛を成膜しても導電性が低いという問題があった。 As a method of exfoliating from graphite to obtain flaky graphite, a method is known in which graphite is oxidized and subjected to exfoliation treatment as graphite oxide that can be easily exfoliated, and then the graphite oxide is reduced (for example, Patent Document 1). However, in this method, there is a problem that even if the graphite oxide is reduced, the graphite oxide remains or does not return to the original graphene structure after the reduction. Since graphite oxide has insulating properties, and electrons do not move unless the sp2 structure has two-dimensionally spread π electrons, it is said that the conductivity is low even when the flaky graphite obtained by this method is formed. There was a problem.
 酸化せずに黒鉛から剥離して薄片状黒鉛を得る方法としては、水などの極性溶媒中に黒鉛を添加し、超音波を用いて分散処理する方法が知られている(例えば、非特許文献1、2)。しかしながらこれらの方法では、剥離された黒鉛の厚みの分布が広くなり、充分に薄片化されていない黒鉛が無視できないほど残留するという問題があった。
 また、酸化せずに黒鉛から剥離して薄片状黒鉛を得る別の方法として、特許文献2には、黒鉛または黒鉛化合物の層間を高圧乳化法により剥離する高圧乳化処理工程を有する薄層黒鉛又は薄層黒鉛化合物の製造方法が開示されている。しかしながら特許文献2の方法では、乳化処理時に黒鉛が剥離すると共に、剥離した黒鉛同士の凝集も生じてしまい、超音波法と同様に剥離された黒鉛の厚みの分布が広くなり、充分に薄片化されていない黒鉛が無視できないほど残留するという問題があった。
 このように従来の製造方法では、酸化黒鉛が残留したり、充分に薄片化されていない黒鉛が数多く残留することから、導電性に優れた薄片状黒鉛を得ることが困難であった。
 従来の製造方法では、電気伝導性や熱伝導性に優れた膜を成膜するためには、充分に薄片化されていない黒鉛を取り除くために分級等の処理を行う必要があり、優れた導電性を得るのに使用可能な薄片状黒鉛の収率は低いものであった。
As a method for exfoliating graphite without oxidization to obtain flaky graphite, a method is known in which graphite is added in a polar solvent such as water and dispersed using ultrasonic waves (for example, non-patent literature). 1, 2). However, these methods have a problem in that the thickness distribution of the exfoliated graphite is widened, and graphite that is not sufficiently flaked remains so that it cannot be ignored.
Further, as another method for exfoliating graphite without oxidization to obtain flake graphite, Patent Document 2 discloses a thin-layer graphite having a high-pressure emulsification treatment step for exfoliating graphite or a graphite compound layer by a high-pressure emulsification method. A method for producing a thin graphite compound is disclosed. However, in the method of Patent Document 2, the graphite exfoliates during the emulsification process, and the exfoliated graphite also aggregates, and the thickness distribution of the exfoliated graphite is widened similarly to the ultrasonic method, and is sufficiently thinned. There was a problem that untreated graphite remained so much that it could not be ignored.
As described above, in the conventional manufacturing method, graphite oxide remains or many graphites that are not sufficiently flaked remain, so that it has been difficult to obtain flaky graphite having excellent conductivity.
In the conventional manufacturing method, in order to form a film having excellent electrical conductivity and thermal conductivity, it is necessary to perform a treatment such as classification in order to remove graphite that has not been sufficiently exfoliated. The yield of flaky graphite that can be used to obtain the properties was low.
特表2011-500488号公報Japanese Translation of PCT International Publication No. 2011-500488 特開2014-9151号公報JP 2014-9151 A
 本発明は上記実情に鑑みてなされたものであり、導電性及び熱伝導性に優れた薄片状黒鉛及び黒鉛材料、並びに前記薄片状黒鉛を含む薄片状黒鉛分散液を提供することを第一の目的とする。
 また、導電性及び熱伝導性に優れた前記薄片状黒鉛の製造方法、前記黒鉛材料の製造方法、及び前記薄片状黒鉛分散液の製造方法を提供することを第二の目的とする。
 更に、薄片状黒鉛を高収率で得ることができる薄片状黒鉛の製造方法、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液の製造方法、及び、導電性及び熱伝導性に優れた黒鉛材料の製造方法を提供することを第三の目的とする。
The present invention has been made in view of the above circumstances, and provides a flaky graphite and a graphite material excellent in conductivity and thermal conductivity, and a flaky graphite dispersion containing the flaky graphite. Objective.
Another object of the present invention is to provide a method for producing the flaky graphite, a method for producing the graphite material, and a method for producing the flaky graphite dispersion excellent in conductivity and thermal conductivity.
Further, a method for producing flaky graphite capable of obtaining flaky graphite in a high yield, a method for producing a flaky graphite dispersion with little residual graphite that is insufficiently flaked, and conductivity and thermal conductivity A third object is to provide a method for producing an excellent graphite material.
 前記第一の目的を解決するための第一の本発明に係る薄片状黒鉛は、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であり、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下であって、平均厚みが50nm以下であることを特徴とする。
 前記第一の目的を解決するための第一の本発明に係る黒鉛材料は、前記本発明に係る薄片状黒鉛が積層されてなることを特徴とする。
 また、前記第一の目的を解決するための第一の本発明に係る薄片状黒鉛分散液は、前記本発明に係る薄片状黒鉛が溶媒に分散されてなることを特徴とする。
The flaky graphite according to the first aspect of the present invention for solving the first object is a total count of all (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS). The ratio of the number of fluorine (−) ions to the number is 0.5% or more, the average (002) plane spacing (d002) by X-ray diffraction is 0.336 nm or less, and the average thickness is 50 nm. It is characterized by the following.
The graphite material according to the first present invention for solving the first object is characterized in that the flaky graphite according to the present invention is laminated.
The flaky graphite dispersion according to the first aspect of the present invention for solving the first object is characterized in that the flaky graphite according to the present invention is dispersed in a solvent.
 前記第二の目的を解決するための第二の本発明の少なくとも幾つかの実施形態に係る薄片状黒鉛の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程を有することを特徴とする。 The method for producing flaky graphite according to at least some embodiments of the second present invention for solving the second object is obtained by adding graphite to a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less. And a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent) and a dispersion treatment.
 前記第二の目的を解決するための第二の本発明の少なくとも幾つかの実施形態に係る薄片状黒鉛分散液の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程
のいずれかの工程を有することを特徴とする。
The method for producing a flaky graphite dispersion according to at least some embodiments of the second present invention for solving the second object is applied to a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less. Mixing graphite with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and carrying out a dispersion treatment;
(I) or (ii) below:
(I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
It has any one of the processes of removing the fluorine-type solvent whose surface tension in the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition.
 前記第二の目的を解決するための第二の本発明の少なくとも幾つかの実施形態に係る黒鉛材料の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程
のいずれかの工程により薄片状黒鉛分散液とする工程と、
 前記薄片状黒鉛分散液を成膜又は成形する工程とを有することを特徴とする。
In order to solve the second object, a method for producing a graphite material according to at least some embodiments of the present invention includes: a fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less; Mixing with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and carrying out a dispersion treatment;
(I) or (ii) below:
(I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
A step of making a flaky graphite dispersion by any step of removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the addition of the solvent;
And a step of forming or molding the flaky graphite dispersion.
 前記第三の目的を解決するための第三の本発明の少なくとも幾つかの実施形態に係る薄片状黒鉛の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程を有することを特徴とする。 The method for producing flaky graphite according to at least some embodiments of the third aspect of the present invention for solving the third object includes, in a solvent having a surface tension at a use temperature of 20 mN / m or less, graphite, It has the process of mixing with the dispersing agent whose solubility with respect to the said solvent is less than 0.1 (g / 100g solvent), and carrying out a dispersion process.
 前記第三の目的を解決するための第三の本発明の少なくとも幾つかの実施形態に係る薄片状黒鉛分散液の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程
のいずれかの工程を有することを特徴とする。
The method for producing a flaky graphite dispersion according to at least some embodiments of the third aspect of the present invention for solving the third object is characterized in that graphite is used in a solvent having a surface tension at a use temperature of 20 mN / m or less. Mixing with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and a dispersion treatment;
(I) or (ii) below:
(I) removing a solvent having a surface tension of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
It has one of the processes of removing the solvent whose surface tension at the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition.
 前記第三の目的を解決するための第三の本発明の少なくとも幾つかの実施形態に係る黒鉛材料の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程
のいずれかの工程により薄片状黒鉛分散液とする工程と、
 前記薄片状黒鉛分散液を成膜又は成形する工程とを有することを特徴とする。
A method for producing a graphite material according to at least some embodiments of the third aspect of the present invention for solving the third object includes: a solvent having a surface tension at a use temperature of 20 mN / m or less, graphite, Mixing with a dispersant having a solubility in a solvent of less than 0.1 (g / 100 g solvent), and carrying out a dispersion treatment;
(I) or (ii) below:
(I) removing a solvent having a surface tension of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
A step of making a flaky graphite dispersion by any one of steps of removing a solvent having a surface tension of 20 mN / m or less from the mixed solution after addition of the solvent;
And a step of forming or molding the flaky graphite dispersion.
 第一の本発明によれば、導電性及び熱伝導性に優れた薄片状黒鉛及び黒鉛材料、並びに前記薄片状黒鉛を含む薄片状黒鉛分散液を提供することができる。
 また、第二の本発明によれば、導電性及び熱伝導性に優れた薄片状黒鉛を高収率で得ることができる薄片状黒鉛の製造方法、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液の製造方法、及び、導電性及び熱伝導性に優れた黒鉛材料の製造方法を提供することができる。
 更に、第三の本発明によれば、導電性及び熱伝導性に優れた薄片状黒鉛を高収率で得ることができる薄片状黒鉛の製造方法、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液の製造方法、及び、導電性及び熱伝導性に優れた黒鉛材料の製造方法を提供することができる。
According to the first aspect of the present invention, it is possible to provide flaky graphite and a graphite material excellent in conductivity and thermal conductivity, and a flaky graphite dispersion containing the flaky graphite.
In addition, according to the second aspect of the present invention, a method for producing flaky graphite capable of obtaining flaky graphite excellent in conductivity and thermal conductivity in a high yield, and there is little residual graphite that is insufficiently flaked. A method for producing a flaky graphite dispersion and a method for producing a graphite material excellent in conductivity and thermal conductivity can be provided.
Furthermore, according to the third aspect of the present invention, a method for producing flaky graphite capable of obtaining flaky graphite excellent in conductivity and thermal conductivity in a high yield, and there is little residual graphite that is insufficiently flaked. A method for producing a flaky graphite dispersion and a method for producing a graphite material excellent in conductivity and thermal conductivity can be provided.
実施例1-3で得られた本発明に係る黒鉛膜1のX線回折法による測定結果である。FIG. 6 shows the measurement results of the graphite film 1 according to the present invention obtained in Example 1-3 by the X-ray diffraction method. FIG. 実施例1-3で得られた本発明に係る黒鉛膜1のSEM写真である。3 is a SEM photograph of the graphite film 1 according to the present invention obtained in Example 1-3. 比較例1-3で得られた比較黒鉛膜1のSEM写真である。4 is an SEM photograph of comparative graphite film 1 obtained in Comparative Example 1-3. 実施例8で得られた本発明に係る薄片状黒鉛1のAFM写真の一つである。9 is one of AFM photographs of flaky graphite 1 according to the present invention obtained in Example 8. FIG. 実施例8で得られた本発明に係る黒鉛膜8のX線光電子分光法による測定結果である。7 is a measurement result of the graphite film 8 according to the present invention obtained in Example 8 by X-ray photoelectron spectroscopy. 実施例8で得られた本発明に係る黒鉛膜8のX線光電子分光法による測定結果のうち、炭素原子のピークの拡大図である。It is an enlarged view of the peak of a carbon atom among the measurement results by X-ray photoelectron spectroscopy of the graphite film 8 according to the present invention obtained in Example 8. 実施例8で得られた本発明に係る黒鉛膜8のラマン分光法による測定結果の一つである。It is one of the measurement results by the Raman spectroscopy of the graphite film 8 according to the present invention obtained in Example 8.
 次に、本発明の実施の形態について詳細に説明するが、本発明は以下の実施の形態に限定されるものではなく、その趣旨の範囲内で種々変形して実施することができる。また、本発明の実施の形態の説明において「本発明に係る」との記載は、「本発明の少なくとも幾つかの実施形態に係る」を表す。
I.第一及び第二の本発明
 以下、第一の本発明に係る薄片状黒鉛、薄片状黒鉛分散液、及び黒鉛材料、並びに、これらの第一の本発明の物を製造するのに適した、第二の本発明に係る薄片状黒鉛の製造方法、薄片状黒鉛分散液の製造方法、及び黒鉛材料の製造方法について順に説明する。
 なお、本発明において、薄片状黒鉛とは、単層のグラフェン、及び、厚みが50nm以下の範囲で複層化したグラフェンを含むものである。
 また、本発明において表面張力は、液体表面の有する、液体内部と比較して余剰な単位面積当たりの自由エネルギーと定義される。
Next, embodiments of the present invention will be described in detail. However, the present invention is not limited to the following embodiments, and various modifications can be made within the scope of the spirit thereof. Further, in the description of the embodiments of the present invention, the description “according to the present invention” means “according to at least some embodiments of the present invention”.
I. First and second inventions Hereinafter, flaky graphite according to the first invention, flaky graphite dispersion, and graphite material, and suitable for producing these products of the first invention, A method for producing flaky graphite, a method for producing a flaky graphite dispersion, and a method for producing a graphite material according to the second aspect of the present invention will be described in order.
In the present invention, flaky graphite includes single-layer graphene and graphene that is multilayered in a thickness range of 50 nm or less.
Further, in the present invention, the surface tension is defined as free energy per unit area surplus compared to the inside of the liquid, which the liquid surface has.
1.薄片状黒鉛
 本発明に係る薄片状黒鉛は、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であり、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下であって、平均厚みが50nm以下であることを特徴とする。
1. Flake-like graphite The flaky graphite according to the present invention is a fluorine (-) ion count relative to a total count of all (-) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS). The ratio is 0.5% or more, the average interplanar spacing (d002) of (002) planes by an X-ray diffraction method is 0.336 nm or less, and the average thickness is 50 nm or less.
 本発明に係る薄片状黒鉛は、単層のグラフェン、及び、複層グラフェンの少なくとも一方を含み、薄片の平均厚みが50nm以下の範囲の薄片状黒鉛であって、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であり、且つ、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下である。
 本発明の薄片状黒鉛は、微量ではあるがフッ素が吸着または結合し、グラファイトの薄片間の剥離が促進されてなるものであることから、単層のグラフェン又は前記平均面間隔(d002)が黒鉛と同様の0.336nm以下で複層化したグラフェンであって平均厚みが50nm以下であり、優れた導電性及び熱伝導性を有する。フッ素が結合した薄片状黒鉛(グラフェン)としては、組成が(CF)(m=1~20)で表されるフッ素化グラファイトが知られている(渡辺信淳著、「グラファイト層間化合物」、近代編集社、(1986))。しかしながら、フッ素化グラファイトは前記平均面間隔(d002)が0.809nmと黒鉛よりずっと広い面間隔を有するものであり、且つ絶縁性であるため、本発明の薄片状黒鉛は、上記フッ素化グラファイトとは明確に区別されるものである。また、前記文献には、黒鉛にフッ化水素をドーピングした炭素材料も記載されている。しかしながら、当該炭素材料は前記平均面間隔(d002)が0.55nm~1.28nmと黒鉛よりずっと広い面間隔を有するものであるため、本発明の薄片状黒鉛は、上記炭素材料とは明確に区別されるものである。上記炭素材料は導電性であるが、ガスをドーピングしていることから安定性が悪く、加工性にも問題がある。
 それに対して、本発明の微量のフッ素が吸着又は結合した薄片状黒鉛は、安定性に優れ、剥離した薄片状黒鉛がより再凝集し難く、加工性にも優れるものである。本発明によれば、前記薄片状黒鉛が再凝集せずに薄片のまま積層し、集積膜等の積層体を任意に形成することができるため、導電性や熱伝導性に優れた黒鉛材料を得ることができる。
The flaky graphite according to the present invention is a flaky graphite containing at least one of single-layer graphene and multi-layer graphene, wherein the average thickness of the flakes is in the range of 50 nm or less, and is a time-of-flight secondary ion mass spectrometry The ratio of the number of fluorine (−) ions to the total number of all (−) ions measured using the method (TOF-SIMS) is 0.5% or more, and (002) by the X-ray diffraction method. ) Surface average surface spacing (d002) is 0.336 nm or less.
The flaky graphite of the present invention is a small amount of fluorine that is adsorbed or bound to promote exfoliation between the graphite flakes, so that the single-layer graphene or the average interplanar spacing (d002) is graphite. The graphene is multilayered at 0.336 nm or less, and has an average thickness of 50 nm or less, and has excellent conductivity and thermal conductivity. As flaky graphite (graphene) bonded with fluorine, fluorinated graphite having a composition represented by (C m F) n (m = 1 to 20) is known (by Shingo Watanabe, “Graphite Intercalation Compound”). Modern Editor, (1986)). However, since the fluorinated graphite has an average interplanar spacing (d002) of 0.809 nm, which is much wider than that of graphite and is insulative, the flaky graphite of the present invention has the above-mentioned fluorinated graphite and Are clearly distinguished. The above document also describes a carbon material obtained by doping graphite with hydrogen fluoride. However, since the carbon material has an average interplanar spacing (d002) of 0.55 nm to 1.28 nm, which is much wider than that of graphite, the flake graphite of the present invention is clearly different from the carbon material. It is a distinction. Although the carbon material is conductive, it is poor in stability because it is doped with gas, and there is a problem in workability.
On the other hand, the flaky graphite adsorbed or bound by a small amount of fluorine of the present invention is excellent in stability, and the exfoliated flaky graphite is more difficult to reagglomerate and is excellent in workability. According to the present invention, the flaky graphite can be laminated as it is without being re-agglomerated, and a laminated body such as an integrated film can be arbitrarily formed. Therefore, a graphite material having excellent conductivity and thermal conductivity can be obtained. Obtainable.
 本発明の薄片状黒鉛に吸着または結合しているフッ素は微量であることから、飛行時間型二次イオン質量分析法を用いることが有効であることが判明した。飛行時間型二次イオン質量分析法は、固体試料の最表面にどのような成分(原子や分子)が存在するかを調べるための装置である。飛行時間型二次イオン質量分析法によれば、後述のX線光電子分光法では検出できないような極微量成分を検出することができる。
 前記飛行時間型二次イオン質量分析(TOF-SIMS)は、飛行時間型二次イオン質量分析計(例えば、Physical Electronics社製、型名:TRIFTII)を用いて、69Gaを照射することで検出されるNEGATIVE2次イオンを、2次イオンマススペクトルとして検出することにより行う。当該飛行時間型二次イオン質量分析法により測定された、全(-)イオンの総カウント数と、フッ素(-)イオンのカウント数とを計測し、上記全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合を算出することができる。
 また、本発明の薄片状黒鉛は、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であるが、導電性及び熱伝導性により優れた黒鉛材料乃至薄片状黒鉛とする点から、前記割合は10%以下であることが好ましく、更に5%以下であることが好ましく、より更に3%以下であることが好ましい。ノイズとみなせるフッ素(-)イオンのカウント数の割合が0.2%程度となる場合があるため、ノイズを除く点から、0.5%以上としている。中でも前記フッ素(-)イオンのカウント数の割合が0.8%以上であることが好ましく、1%以上であることが更に好ましい。
Since the amount of fluorine adsorbed or bonded to the flaky graphite of the present invention is very small, it has been proved effective to use time-of-flight secondary ion mass spectrometry. Time-of-flight secondary ion mass spectrometry is an apparatus for examining what components (atoms and molecules) exist on the outermost surface of a solid sample. According to time-of-flight secondary ion mass spectrometry, it is possible to detect a trace amount component that cannot be detected by X-ray photoelectron spectroscopy described later.
The time-of-flight secondary ion mass spectrometry (TOF-SIMS) is detected by irradiating 69 Ga + using a time-of-flight secondary ion mass spectrometer (for example, Physical Electronics, model name: TRIFT II). NEGATIVE secondary ions are detected as secondary ion mass spectra. The total count number of all (−) ions and the count number of fluorine (−) ions, measured by the time-of-flight secondary ion mass spectrometry, are measured. The ratio of the number of fluorine (−) ions can be calculated.
In the flaky graphite of the present invention, the ratio of the fluorine (−) ion count to the total count of all ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0.00. Although it is 5% or more, the ratio is preferably 10% or less, more preferably 5% or less, from the viewpoint of making the graphite material or flaky graphite superior in conductivity and thermal conductivity. Further, it is preferably 3% or less. Since the ratio of the count number of fluorine (−) ions that can be regarded as noise may be about 0.2%, it is set to 0.5% or more from the viewpoint of excluding noise. Among them, the ratio of the fluorine (−) ion count is preferably 0.8% or more, and more preferably 1% or more.
 また、本発明の薄片状黒鉛は、後述するように、微量ではあるがフッ素が吸着または結合し、黒鉛(グラファイト)の薄片間の剥離が促進されてなるものであることから、酸化グラフェンを還元して生成された薄片状黒鉛と比べて酸素原子が低減され、炭素原子間でsp2結合を形成している結合の割合を高くすることが可能であり、導電性及び熱伝導性が高いものである。
 本発明の薄片状黒鉛において、炭素原子の組成は、X線光電子分光法による測定で80%以上であることが好ましく、90%以上であることがより好ましく、92%以上であることがより更に好ましく、95%以上であることがより更に好ましい。炭素原子の組成は、X線光電子分光法による測定で100%であっても良いが、通常、若干酸素原子が含まれていることから、99%以下であることが好ましい。
 本発明の薄片状黒鉛において、酸素原子の組成は、X線光電子分光法による測定で10%以下であることが好ましく、10%未満であることがより好ましく、7%以下であることがより好ましく、5%以下であることがより更に好ましい。
In addition, the flake graphite of the present invention reduces graphene oxide because, as will be described later, fluorine is adsorbed or bonded to promote the exfoliation between flakes of graphite (graphite). As compared with the flaky graphite produced in this way, the number of oxygen atoms is reduced, the proportion of bonds forming sp2 bonds between carbon atoms can be increased, and the conductivity and thermal conductivity are high. is there.
In the flaky graphite of the present invention, the composition of carbon atoms is preferably 80% or more, more preferably 90% or more, and even more preferably 92% or more as measured by X-ray photoelectron spectroscopy. Preferably, it is still more preferably 95% or more. The composition of carbon atoms may be 100% as measured by X-ray photoelectron spectroscopy, but usually it is preferably 99% or less because some oxygen atoms are contained.
In the flaky graphite of the present invention, the composition of oxygen atoms is preferably 10% or less, more preferably less than 10%, more preferably 7% or less, as measured by X-ray photoelectron spectroscopy. More preferably, it is 5% or less.
 本発明の薄片状黒鉛において、フッ素原子は微量しか存在しないため、X線光電子分光法による測定ではフッ素原子の組成は0%と測定されても良い。
 また、本発明の薄片状黒鉛において、後述する分散剤等の影響により、X線光電子分光法による測定で、炭素原子及び酸素原子とは異なる原子、例えば、硫黄原子、窒素原子等が含まれていても良い。炭素原子及び酸素原子とは異なる原子の合計の組成は、X線光電子分光法による測定で5%以下であることが好ましく、3%以下であることがより好ましく、2%以下であることがより更に好ましい。
 すなわち、本発明の薄片状黒鉛において、X線光電子分光法による測定で、炭素原子の組成と酸素原子の組成との和が95%以上であることが好ましく、97%以上であることがより好ましく、98%以上であることがより更に好ましい。
In the flaky graphite of the present invention, since only a very small amount of fluorine atoms is present, the composition of fluorine atoms may be measured as 0% in the measurement by X-ray photoelectron spectroscopy.
Further, the flaky graphite of the present invention contains atoms different from carbon atoms and oxygen atoms, for example, sulfur atoms, nitrogen atoms, etc., as measured by X-ray photoelectron spectroscopy due to the influence of the dispersant described later. May be. The total composition of atoms different from carbon atoms and oxygen atoms is preferably 5% or less, more preferably 3% or less, and more preferably 2% or less, as measured by X-ray photoelectron spectroscopy. Further preferred.
That is, in the flaky graphite of the present invention, the sum of the carbon atom composition and the oxygen atom composition is preferably 95% or more, more preferably 97% or more, as measured by X-ray photoelectron spectroscopy. 98% or more is even more preferable.
 本発明の薄片状黒鉛において、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、優れた導電性及び熱伝導性の点から、X線光電子分光法による測定で60%以上であることが好ましく、70%以上であることがより好ましく、75%以上であることがより更に好ましい。炭素原子間でsp2結合を形成している結合の割合は高ければ高いほど好ましく、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合の上限は100%である。 In the flaky graphite of the present invention, among the bonds of the carbon atoms, the ratio of the bonds forming sp2 bonds between the carbon atoms is determined by X-ray photoelectron spectroscopy from the viewpoint of excellent conductivity and thermal conductivity. Is preferably 60% or more, more preferably 70% or more, and even more preferably 75% or more. The higher the ratio of bonds that form sp2 bonds between carbon atoms, the better. The upper limit of the ratio of bonds that form sp2 bonds between carbon atoms is 100%. is there.
 また、本発明の薄片状黒鉛において、X線光電子分光法により測定した全炭素原子当たりの、酸素原子のうち炭素原子と結合した酸素原子比(炭素原子と結合した酸素原子数/全炭素原子数)は、0.2以下であることが好ましく、更に0.15以下であることが好ましく、より更に0.1以下であることが好ましい。
 なお、ここでX線光電子分光法による測定は、Thermo Fisher Scientific 社製(VG Theta Probe)、アルバックファイ社製(PHI5000 Versa Probe)等のX線光電子分光装置を用い、X線を試料に照射して検出される二次電子のスペクトルを解析して行うことができる。前記パーセントは、原子百分率を表す。
 また、炭素原子間でsp2結合を形成している結合の割合は、炭素原子のピークを拡大し、炭素原子間でsp2結合を形成している結合(結合エネルギー約284.6eV)と炭素原子間でsp3結合を形成している結合(結合エネルギー約285.5eV)とにピーク分離を行うことにより、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合を算出することができる。同様に、酸素原子のピークを拡大し、酸素原子のうち炭素原子との結合と例えば、酸素原子のうち硫黄原子との結合とにピーク分離を行うことにより、前記酸素原子のうち炭素原子と結合した酸素原子比を算出することができる。なお、酸素原子の他分子との結合によるピークシフト、及び結合エネルギーは、成書(例えば、染野壇編、「表面分析」、講談社(1976年)p274)を参照することができる。
In the flaky graphite of the present invention, the ratio of oxygen atoms bonded to carbon atoms out of all carbon atoms measured by X-ray photoelectron spectroscopy (number of oxygen atoms bonded to carbon atoms / total number of carbon atoms) ) Is preferably 0.2 or less, more preferably 0.15 or less, and even more preferably 0.1 or less.
Here, the measurement by X-ray photoelectron spectroscopy is performed by irradiating the sample with X-rays using an X-ray photoelectron spectrometer such as Thermo Fisher Scientific (VG Theta Probe) or ULVAC-PHI (PHI5000 Versa Probe). This can be done by analyzing the spectrum of secondary electrons detected. The percentage represents an atomic percentage.
In addition, the ratio of bonds that form sp2 bonds between carbon atoms is such that the peak of carbon atoms is expanded, and the bonds that form sp2 bonds between carbon atoms (binding energy about 284.6 eV) and carbon atoms The peak separation is performed on the bonds that form sp3 bonds in (bond energy of about 285.5 eV), so that the ratio of the bonds that form sp2 bonds between the carbon atoms among the bonds of the carbon atoms is determined. Can be calculated. Similarly, by expanding the peak of the oxygen atom and performing peak separation into the bond between the oxygen atom and the carbon atom and, for example, the bond between the oxygen atom and the sulfur atom, the oxygen atom is bonded to the carbon atom. The calculated oxygen atomic ratio can be calculated. For the peak shift due to the binding of oxygen atoms to other molecules and the binding energy, reference can be made to the books (for example, edited by Someno Dan, “Surface Analysis”, Kodansha (1976) p274).
 また、本発明の薄片状黒鉛は、結晶性が良好なものであることから、ラマン分光スペクトルで測定される1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.3以下であることが好ましく、更に0.15以下であることが好ましく、より更に0.10以下であることが好ましい。当該強度比I/Iは、通常、原料黒鉛の場合0であることから、0以上となる。
 また、ラマン分光スペクトルで測定される2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.1以上であることが好ましく、更に0.2以上であることが好ましく、より更に0.3以上であることが好ましい。当該強度比IG’/Iは、通常、薄片状黒鉛の厚みが薄いほど大きくなり、厚みが約0.34nm(グラフェン単原子層)の時に2となることから、2以下となる。
 ラマン分光スペクトルで測定される1300~1400cm-1の範囲にあるスペクトルは、結晶の欠陥がある場合に現れるバンド(Dバンド)とされており、1580~1620cm-1の範囲にあるスペクトルは、sp2混成軌道(C-C 間の結合の手が3本)である場合に共通で観測されるバンド(Gバンド)である。また、2600~2800cm-1の範囲にあるスペクトルも、sp2混成軌道である場合に共通で観測されるバンド(G’バンド)である。
In addition, since the flaky graphite of the present invention has good crystallinity, the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and 1580 to 1620 cm −1 measured by a Raman spectrum are used. The intensity ratio I D / I G to the peak intensity (I G ) in the range is preferably 0.3 or less, more preferably 0.15 or less, and even more preferably 0.10 or less. preferable. The intensity ratio I D / I G is usually 0 in the case of raw material graphite, and is 0 or more.
Further, 'the intensity ratio I G of the peak intensity (I G) in the range of 1580 ~ 1620cm -1 / I peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 measured by Raman spectroscopy G is preferably 0.1 or more, more preferably 0.2 or more, and still more preferably 0.3 or more. The intensity ratio I G ′ / I G usually increases as the thickness of the flaky graphite decreases, and becomes 2 when the thickness is about 0.34 nm (graphene monoatomic layer).
The spectrum in the range of 1300 to 1400 cm −1 measured by the Raman spectroscopic spectrum is a band (D band) that appears when there is a crystal defect, and the spectrum in the range of 1580 to 1620 cm −1 is sp2 This is a band (G band) that is commonly observed in the case of a hybrid orbit (the number of C—C bonding hands is three). A spectrum in the range of 2600 to 2800 cm −1 is also a band (G ′ band) that is commonly observed in the case of sp2 hybrid orbitals.
 本発明の薄片状黒鉛は、炭素の1原子厚み以上の厚みを有するものであり、平均厚みが約0.34nm以上50nm以下である。本発明の薄片状黒鉛の平均厚みは、好ましくは約0.34nm以上約40nm以下、より好ましくは約0.34nm以上約30nm以下、より更に好ましくは約0.34nm以上約15nm以下であることが望ましい。なお、本発明の薄片状黒鉛の厚みは、薄片状黒鉛の面積が最大になる方向から見た時の薄片状黒鉛の表面に対して直交する方向の薄片状黒鉛の最大寸法をいう。
 本発明の薄片状黒鉛の厚みは、原子間力顕微鏡(AFM)を用いて測定することができる。
 本発明の薄片状黒鉛の平均厚みは、基板上に薄片状黒鉛を独立分散させた状態で厚みをAFMで測定し、200個の薄片状黒鉛の厚みの測定値の平均値を算出することで求めることができる。
The flaky graphite of the present invention has a thickness of 1 atom or more of carbon, and has an average thickness of about 0.34 nm to 50 nm. The average thickness of the flaky graphite of the present invention is preferably from about 0.34 nm to about 40 nm, more preferably from about 0.34 nm to about 30 nm, and even more preferably from about 0.34 nm to about 15 nm. desirable. In addition, the thickness of the flaky graphite of the present invention refers to the maximum dimension of the flaky graphite in a direction orthogonal to the surface of the flaky graphite when viewed from the direction in which the area of the flaky graphite is maximized.
The thickness of the flaky graphite of the present invention can be measured using an atomic force microscope (AFM).
The average thickness of the flaky graphite of the present invention is obtained by measuring the thickness with AFM in a state where the flaky graphite is independently dispersed on the substrate, and calculating the average value of the measured values of the thickness of 200 flaky graphites. Can be sought.
 より具体的には以下のようにして平均厚みを求めることができる。
 薄片状黒鉛、薄片状黒鉛を含む混合液、又は薄片状黒鉛分散液をサンプリングし、溶媒で20~2000倍に希釈して薄片を凝集させずに分散させた後に、孔径0.02μm以下のメンブレンフィルター上に塗布することで溶媒を濾別しメンブレンフィルター上に薄片状黒鉛を凝集させずに独立した状態で配置させる。分散剤が付着している場合には、分散剤の溶解度が5(g/100g溶媒)以上の溶媒で薄片状黒鉛を洗浄することにより分散剤を除去しても良い。メンブレンフィルター上に凝集させずに独立した状態で配置された薄片状黒鉛に、洗浄済みのシリコンウエハーを押し付け、剥がすことでシリコンウエハー上に薄片状黒鉛を転写する。このシリコンウエハー上に独立分散した状態で付着している薄片状黒鉛をAFMで測定し、薄片の厚みを測定する。AFM測定は、島津製作所製ナノサーチ顕微鏡SFT-3500における走査型プローブ顕微鏡(SPM)の機能を用い、コンタクトモード、即ちAFM(Atomic Force Microscope:原子間力顕微鏡)で走査範囲を10μm×10μmにして測定を行うことができる。シリコンウエハーに付着している薄片状黒鉛におけるシリコンウエハーと薄片状黒鉛の高さの差を薄片状黒鉛の厚みとする。
 薄片状黒鉛の平均厚みは、AFMにより、薄片状黒鉛を合計200個観測できるまで上記操作を繰り返し、AFMで観測された200個分の薄片状黒鉛の厚みの測定値の平均値を算出することで求めることができる。
More specifically, the average thickness can be obtained as follows.
A membrane having a pore size of 0.02 μm or less after sampling a flake graphite, a mixed liquid containing flake graphite, or a flake graphite dispersion, diluting with a solvent 20 to 2000 times without dispersing flakes The solvent is filtered off by coating on a filter, and the flake graphite is placed on the membrane filter in an independent state without agglomerating. When the dispersant is adhered, the dispersant may be removed by washing the flaky graphite with a solvent having a solubility of 5 (g / 100 g solvent) or more. The flaky graphite is transferred onto the silicon wafer by pressing and removing the washed silicon wafer against the flaky graphite arranged in an independent state without agglomerating on the membrane filter. The flake graphite adhering to the silicon wafer in an independently dispersed state is measured by AFM, and the thickness of the flake is measured. The AFM measurement uses the scanning probe microscope (SPM) function of the Shimadzu Nano Search Microscope SFT-3500, and the scanning range is set to 10 μm × 10 μm in the contact mode, that is, AFM (Atomic Force Microscope). Measurements can be made. The difference in height between the silicon wafer and the flaky graphite in the flaky graphite adhering to the silicon wafer is defined as the thickness of the flaky graphite.
The average thickness of flaky graphite is calculated by repeating the above operation until a total of 200 pieces of flaky graphite can be observed by AFM, and calculating the average value of the measured thickness of 200 pieces of flaky graphite observed by AFM. Can be obtained.
 本発明の薄片状黒鉛は、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合が、70個数%以上であることが好ましい。導電性及び熱伝導性に優れる点から、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は多ければ多いほど好ましく、80個数%以上であることがより好ましく、90個数%以上であることがより更に好ましい。中でも、厚みが0.34nm以上10nm未満の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は、10個数%以上であることが好ましく、更に20個数%以上であることが好ましい。
 前記個数%は、薄片状黒鉛の全個数に対する、該当する厚みの薄片状黒鉛の個数の割合を表す。前記個数%は、AFMで観測された200個のうち、該当する厚みを有する薄片状黒鉛の個数を求め、200個中の個数割合を求めることで、算出することができる。
In the flaky graphite of the present invention, the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 70% by number or more. From the viewpoint of excellent electrical conductivity and thermal conductivity, the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above. Among them, the content ratio of the flake graphite having a thickness of 0.34 nm or more and less than 10 nm to the whole flake graphite is preferably 10% by number or more, and more preferably 20% by number or more.
The number% represents the ratio of the number of flake graphite having the corresponding thickness to the total number of flake graphite. The number% can be calculated by obtaining the number of flake graphite having a corresponding thickness out of 200 observed by AFM, and obtaining the number ratio in the 200 pieces.
 また、本発明の薄片状黒鉛の面方向サイズは、薄片状黒鉛の面積が最大になる方向から見た時の薄片状黒鉛の表面の大きさをいい、最大径が0.05μm以上100μm以下の範囲内であることが好ましく、更に0.1μm以上50μm以下の範囲内であることが好ましく、より更に0.5μm以上30μm以下の範囲内であることが好ましい。前記面方向サイズは、光学顕微鏡、電子顕微鏡、原子間力顕微鏡等で直接観察により測定できる。平均最大径は、平均厚みと同様に、顕微鏡で測定した200個の薄片状黒鉛の最大径の平均値を算出することで求めることができる。
 本発明の薄片状黒鉛は各々、アスペクト比(最大径/厚み)が3以上であることが好ましく、10以上であることがより好ましい。本発明の薄片状黒鉛の平均アスペクト比(平均最大径/平均厚み)は3以上であることが好ましく、10以上であることがより好ましい。
The plane direction size of the flaky graphite of the present invention refers to the size of the surface of the flaky graphite when viewed from the direction in which the area of the flaky graphite is maximized, and the maximum diameter is 0.05 μm or more and 100 μm or less. It is preferably within the range, more preferably within the range of 0.1 μm to 50 μm, and even more preferably within the range of 0.5 μm to 30 μm. The size in the plane direction can be measured by direct observation with an optical microscope, an electron microscope, an atomic force microscope, or the like. Similarly to the average thickness, the average maximum diameter can be obtained by calculating the average value of the maximum diameters of 200 flake graphite measured with a microscope.
Each of the flaky graphites of the present invention preferably has an aspect ratio (maximum diameter / thickness) of 3 or more, more preferably 10 or more. The average aspect ratio (average maximum diameter / average thickness) of the flaky graphite of the present invention is preferably 3 or more, and more preferably 10 or more.
 本発明の薄片状黒鉛は、例えば、後述の第二の本発明の薄片状黒鉛の製造方法により製造することができる。 The flaky graphite of the present invention can be produced, for example, by the method for producing flaky graphite of the second invention described later.
[薄片状黒鉛の製造方法]
 第二の本発明の薄片状黒鉛の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程(以下、分散処理工程ということがある)を有することを特徴とする。
[Method for producing flaky graphite]
The method for producing flaky graphite according to the second aspect of the present invention comprises a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of less than 0.1 (g / 100 g solvent). It is characterized by having a step of mixing with a dispersant and performing a dispersion treatment (hereinafter sometimes referred to as a dispersion treatment step).
 前記薄片状黒鉛の製造方法により得られる薄片状黒鉛は、単層のグラフェン、及び、50nm以下の範囲で複層化したグラフェンの割合が高く、酸化もされていないため、分級処理をしなくても優れた導電性及び熱伝導性を有する。また、充分に薄片化されていない黒鉛がほとんど残留しないため、分級処理をしても黒鉛の質量はほとんど低下せず、薄片状黒鉛が高回収率で得られる。前記薄片状黒鉛の製造方法を用いると、単層のグラフェン、及び、50nm以下の範囲で複層化したグラフェンの割合が20質量%以上の収率で、より好ましくは50質量%以上の収率で、より好ましくは70質量%以上の収率で、より更に好ましくは75質量%以上の収率で、薄片状黒鉛を得ることが可能であり、100質量%の収率で薄片状黒鉛を得ることも可能である。 The flaky graphite obtained by the method for producing flaky graphite has a high ratio of single-layer graphene and graphene multi-layered in a range of 50 nm or less, and is not oxidized. Also have excellent electrical and thermal conductivity. In addition, since graphite that has not been sufficiently flaked does not remain, the weight of graphite is hardly reduced even after classification, and flaky graphite can be obtained with a high recovery rate. When the method for producing flaky graphite is used, the ratio of single-layer graphene and graphene multi-layered in a range of 50 nm or less is a yield of 20% by mass or more, more preferably a yield of 50% by mass or more. It is possible to obtain flaky graphite with a yield of 70% by mass or more, more preferably with a yield of 75% by mass or more, and obtain flaky graphite with a yield of 100% by mass. It is also possible.
 前記薄片状黒鉛の製造方法によれば、黒鉛の薄片間の剥離が容易に進行して薄片状黒鉛が生成され、且つ、薄片状黒鉛が再凝集しにくいため、導電性及び熱伝導性に優れた薄片状黒鉛を高収率で得ることができる。
 黒鉛(グラファイト)は、二次元構造を有するグラフェンが多層に積層した構造を有している。当該黒鉛において、各層間にはファンデルワールス力が生じており、比較的弱い力で結合しているものと推定される。
 使用温度での表面張力が20mN/m以下のフッ素系溶媒は、比較的低極性であり、表面張力が小さいため、前記黒鉛の層間に浸入しやすいものと推定される。このような溶媒を用いて分散処理することにより、黒鉛の剥離が促進されて薄片状黒鉛が生成されやすいものと推定される。
 また、前記薄片状黒鉛の製造方法においては、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤を組み合わせて用いる。このように前記フッ素系溶媒に対する溶解度の低い分散剤を選択して用いることにより、分散剤が液体の場合には、分散処理時の混合液は、前記溶媒相と、前記分散剤相の2相を含む不均一系となり、黒鉛や薄片状黒鉛は極性の近い前記分散剤相に存在し易い。
 このような不均一の液体中においては、分散処理により生成した薄片状黒鉛の周囲に分散剤が存在するために、薄片状黒鉛同士が直ちに凝集することを抑制する。また、分散剤が高粘性であれば、その分、薄片状黒鉛同士の接触が抑制され、その結果、薄片状黒鉛の凝集は抑制される。更にこのような製造方法においては、前記分散剤相が前記溶媒相と分離しているため、分散剤が吸着した薄片状黒鉛は前記分散剤相へ移行して、より再凝集が抑制されやすいものと推定される。
 また、分散剤が固体の場合には、分散処理時の混合液は、前記溶媒相中に固体の黒鉛と固体の分散剤を含む不均一系となり、黒鉛と分散剤は、どちらも前記溶媒に対して親和性が低いため、前記溶媒相中では相対的に黒鉛と分散剤の親和性が高まり、分散処理により生成した薄片状黒鉛の周囲に分散剤が存在するために、薄片状黒鉛同士の凝集を抑制し、分散性が向上すると推定される。
 以上のことから、前記薄片状黒鉛の製造方法によれば、微量ではあるがフッ素が吸着または結合し、黒鉛の剥離が容易に進行して薄片状黒鉛が生成され、且つ、薄片状黒鉛が再凝集しにくくなり、前記本発明に係る薄片状黒鉛を高収率で得ることができる。
According to the method for producing flaky graphite, exfoliation between graphite flakes easily proceeds to produce flaky graphite, and the flaky graphite is less likely to re-aggregate, so that it has excellent conductivity and thermal conductivity. The flake graphite can be obtained with high yield.
Graphite (graphite) has a structure in which graphene having a two-dimensional structure is laminated in multiple layers. In the graphite, van der Waals force is generated between the respective layers, and it is estimated that the graphite is bonded with a relatively weak force.
A fluorine-based solvent having a surface tension at a use temperature of 20 mN / m or less is presumed to easily enter between the graphite layers because of its relatively low polarity and low surface tension. By performing a dispersion treatment using such a solvent, it is presumed that the exfoliation of graphite is promoted and flaky graphite is easily generated.
In the method for producing flaky graphite, a dispersant having a solubility in a fluorinated solvent having a surface tension of 20 mN / m or less at the use temperature is less than 0.1 (g / 100 g solvent) is used in combination. Thus, by selecting and using a dispersant having low solubility in the fluorinated solvent, when the dispersant is a liquid, the mixed solution at the time of the dispersion treatment is divided into two phases: the solvent phase and the dispersant phase. Thus, graphite and flaky graphite tend to be present in the dispersant phase having a close polarity.
In such a non-uniform liquid, since a dispersing agent exists around the flaky graphite produced by the dispersion treatment, the flaky graphite is prevented from agglomerating immediately. Moreover, if a dispersing agent is highly viscous, the contact between flake graphite will be suppressed by that amount, and as a result, aggregation of flake graphite will be suppressed. Furthermore, in such a production method, since the dispersant phase is separated from the solvent phase, the flake graphite adsorbed by the dispersant moves to the dispersant phase, and reagglomeration is more easily suppressed. It is estimated to be.
When the dispersant is a solid, the mixed solution at the time of the dispersion treatment is a heterogeneous system containing solid graphite and a solid dispersant in the solvent phase, and both the graphite and the dispersant are contained in the solvent. Since the affinity for graphite is relatively high in the solvent phase and the dispersant is present around the flake graphite produced by the dispersion treatment, the flake graphite is It is estimated that aggregation is suppressed and dispersibility is improved.
From the above, according to the method for producing flaky graphite, a small amount of fluorine is adsorbed or bonded, and peeling of the graphite easily proceeds to produce flaky graphite. Aggregation hardly occurs, and the flaky graphite according to the present invention can be obtained in a high yield.
 前記薄片状黒鉛の製造方法は、少なくとも分散処理工程を有するものであり、本発明の効果を損なわない範囲で、必要に応じて更に他の工程を有していてもよい。以下、このような薄片状黒鉛の製造方法について順に詳細に説明する。 The method for producing the flaky graphite has at least a dispersion treatment step, and may further include other steps as needed within the range not impairing the effects of the present invention. Hereinafter, a method for producing such flaky graphite will be described in detail in order.
<黒鉛>
 本発明において原料となる黒鉛は、例えば、天然黒鉛、人造黒鉛、キッシュ黒鉛、高配向性熱分解黒鉛等を使用でき、特に天然黒鉛が好ましい。天然黒鉛は、土状黒鉛と鱗状黒鉛とに分類されるが、特に鱗状黒鉛が好ましい。鱗状黒鉛は、灰分が少なく、純度が高いためである。黒鉛を粉砕したグラフェンフレークが近年XGscience社から商品化されており、これを原料に用いることもできる。また、これらの黒鉛の層間を予め広げた膨張黒鉛を用いることもできる。黒鉛の大きさは、特に限定されないが、最終的に得ようとする薄片状黒鉛の大きさに応じて選択される。
 当該黒鉛の分散処理前における粒径は、分散処理が可能な大きさであれば特に限定されないが、通常、最大径が100μm以下のものが好ましく用いられる。
<Graphite>
Examples of the graphite used as a raw material in the present invention include natural graphite, artificial graphite, quiche graphite, and highly oriented pyrolytic graphite, and natural graphite is particularly preferable. Natural graphite is classified into earthy graphite and scaly graphite, but scaly graphite is particularly preferable. This is because scaly graphite has little ash and high purity. Graphene flakes obtained by pulverizing graphite have recently been commercialized by XGscience and can be used as a raw material. Further, expanded graphite in which the interlayer of these graphites is expanded in advance can also be used. The size of the graphite is not particularly limited, but is selected according to the size of the flaky graphite to be finally obtained.
The particle diameter of the graphite before the dispersion treatment is not particularly limited as long as it is a size that enables the dispersion treatment, but those having a maximum diameter of 100 μm or less are preferably used.
<使用温度での表面張力が20mN/m以下のフッ素系溶媒>
 本発明においては、分散処理時の溶媒として、使用温度での表面張力が20mN/m以下のフッ素系溶媒が用いられることが好ましい。当該特定の溶媒は黒鉛の層間に入り込みやすいため、黒鉛の剥離が進行しやすくなる。なお、ここでの使用温度とは、分散処理開始時の溶媒温度をいう。
<Fluorine-based solvent with surface tension at operating temperature of 20 mN / m or less>
In the present invention, it is preferable to use a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less as the solvent during the dispersion treatment. Since the specific solvent easily enters the graphite layer, the exfoliation of the graphite is likely to proceed. In addition, the use temperature here means the solvent temperature at the start of the dispersion treatment.
 使用温度での表面張力が20mN/m以下のフッ素系溶媒の具体例としては、25℃において表面張力が20mN/m以下の、フッ素化アルキル基、フッ素化アルキルエーテル基等を有するフッ素系溶媒等が挙げられる。例えば、パーフルオロカーボン(例えば、C(2X+2):x=12の場合約16mN/m)、ハイドロフルオロエーテル(例えば、C49OCH:13.6mN/m、C49OC25:13.6mN/m、COCH:12.4mN/m、CCF(OCH)C:15mN/m等)、及びハイドロフルオロカーボン(例えば、C(2X+2―y):x=12、y=1~12の場合約16mN/m)から使用温度での表面張力が20mN/m以下の溶媒を適宜選択して用いることができる。本発明においては、黒鉛の層間に入り込みやすく、黒鉛の剥離が進行しやすい点から、中でも、フッ素化アルキル基、及びフッ素化アルキルエーテル基の少なくとも1種を有するフッ素系溶剤を用いることが好ましい。
 また、当該溶媒としては、黒鉛の層間に入り込みやすく、黒鉛の剥離が進行しやすい点から、中でも、使用温度での表面張力が15mN/m以下のフッ素系溶媒であることが好ましい。
 本発明において使用温度での表面張力が20mN/m以下のフッ素系溶媒は、1種単独で、又は2種以上を組み合わせて用いることができる。
Specific examples of the fluorinated solvent having a surface tension at a use temperature of 20 mN / m or less include a fluorinated solvent having a fluorinated alkyl group, a fluorinated alkyl ether group or the like having a surface tension of 20 mN / m or less at 25 ° C. Is mentioned. For example, perfluorocarbon (for example, C X F (2X + 2) : about 16 mN / m when x = 12), hydrofluoroether (for example, C 4 F 9 OCH 3 : 13.6 mN / m, C 4 F 9 OC 2 H 5 : 13.6 mN / m, C 3 F 7 OCH 3 : 12.4 mN / m, C 2 F 5 CF (OCH 3 ) C 3 F 7 : 15 mN / m, and hydrofluorocarbon (eg, C X A solvent having a surface tension of 20 mN / m or less at the working temperature can be appropriately selected from H y F (2X + 2−y) : about 16 mN / m when x = 12, y = 1 to 12. In the present invention, it is preferable to use a fluorinated solvent having at least one of a fluorinated alkyl group and a fluorinated alkyl ether group, from the viewpoint of easily entering between graphite layers and facilitating peeling of the graphite.
In addition, the solvent is preferably a fluorine-based solvent having a surface tension of 15 mN / m or less at the working temperature because it easily enters the graphite layer and the peeling of the graphite easily proceeds.
In the present invention, the fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less can be used alone or in combination of two or more.
<分散剤>
 本発明において分散剤は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に対する溶解度が0.1(g/100g溶媒)未満のものを用いることが好ましい。
 このような分散剤を選択して用いることにより、薄片状黒鉛の再凝集を抑制し、当該薄片状黒鉛を高収率で得ることができる。
<Dispersant>
In the present invention, it is preferable to use a dispersant having a solubility in a fluorinated solvent having a surface tension of 20 mN / m or less at a use temperature of less than 0.1 (g / 100 g solvent).
By selecting and using such a dispersant, re-aggregation of the flaky graphite can be suppressed and the flaky graphite can be obtained in a high yield.
 前記分散剤は、薄片状黒鉛を分散可能な従来公知の分散剤の中から、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満のものを適宜選択して用いればよい。
 分散剤としては、薄片状黒鉛に対して親和性の高い疎水性基と、親水性基とを1分子内に有する化合物が挙げられる。当該疎水性基としては炭素数が3以上、より好ましくは6以上の炭化水素基が挙げられ、親水性基としては、例えば、水酸基、カルボキシ基、スルホン酸基、アミノ基、及びこれらの塩等が挙げられる。このような分散剤としては、例えば、カチオン系、アニオン系、ノニオン系、両性等の界面活性剤を使用できる。また、分散剤としては、高分子界面活性剤(高分子分散剤)を用いても良い。
The dispersant may be appropriately selected and used from conventionally known dispersants capable of dispersing flaky graphite having a solubility in the solvent of less than 0.1 (g / 100 g solvent).
Examples of the dispersant include a compound having a hydrophobic group having a high affinity for flaky graphite and a hydrophilic group in one molecule. Examples of the hydrophobic group include a hydrocarbon group having 3 or more carbon atoms, more preferably 6 or more. Examples of the hydrophilic group include a hydroxyl group, a carboxy group, a sulfonic acid group, an amino group, and salts thereof. Is mentioned. As such a dispersant, for example, cationic, anionic, nonionic, amphoteric surfactants can be used. Further, as the dispersant, a polymer surfactant (polymer dispersant) may be used.
 分散剤としては、例えば、ドデカン酸ナトリウムのような脂肪酸塩、ラウリル硫酸ナトリウムのようなモノアルキル硫酸塩、ドデシルベンゼンスルホン酸ナトリウムのようなアルキルベンゼンスルホン酸塩、ポリオキシエチレンアルキルエーテル硫酸塩、モノアルキルリン酸塩等のアニオン系界面活性剤、アルキルアンモニウム塩類などのカチオン系界面活性剤、ポリオキシエチレンアルキルエーテル、ソルビタン脂肪酸エステル、ポリオキシエチレンソルビタン脂肪酸エステル、ポリオキシエチレンソルビトール脂肪酸エステル、グリセリン脂肪酸エステル、ポリオキシエチレン硬化ヒマシ油等のノニオン系界面活性剤;アルキルジメチルアミンオキシド,アルキルカルボキシベタイン等の両性界面活性剤等が挙げられる。上述した金属塩は、アニオン系界面活性剤の場合は塩の代わりに金属イオンの無い脂肪酸やスルホン酸、硫酸、リン酸等で、カチオン系の場合はアンモニウム塩の代わりにアミン構造であっても使用可能である。
 また、高分子分散剤としては、例えば、ポリアクリル酸エステル等の不飽和カルボン酸エステルの(共)重合体類;ポリアクリル酸等の不飽和カルボン酸の(共)重合体の(部分)アミン塩、(部分)アンモニウム塩や(部分)アルキルアミン塩類;水酸基含有ポリアクリル酸エステル等の水酸基含有不飽和カルボン酸エステルの(共)重合体やそれらの変性物;ポリウレタン類;ポリエチレンイミン及びその誘導体等が挙げられる。ポリウレタン類としては、主骨格がポリウレタンで側鎖にポリエステル及びポリエーテル鎖の少なくとも1種及びアルキルアンモニウム塩を有する構造も好適に用いられる。
Examples of the dispersant include fatty acid salts such as sodium dodecanoate, monoalkyl sulfates such as sodium lauryl sulfate, alkylbenzene sulfonates such as sodium dodecylbenzenesulfonate, polyoxyethylene alkyl ether sulfate, and monoalkyl. Anionic surfactants such as phosphates, cationic surfactants such as alkylammonium salts, polyoxyethylene alkyl ethers, sorbitan fatty acid esters, polyoxyethylene sorbitan fatty acid esters, polyoxyethylene sorbitol fatty acid esters, glycerin fatty acid esters, Nonionic surfactants such as polyoxyethylene hydrogenated castor oil; amphoteric surfactants such as alkyldimethylamine oxide and alkylcarboxybetaine. In the case of anionic surfactants, the metal salts mentioned above are fatty acids, sulfonic acids, sulfuric acids, phosphoric acids, etc. without metal ions instead of salts, and in the case of cationic systems, amine structures may be used instead of ammonium salts. It can be used.
Examples of the polymer dispersant include (co) polymers of unsaturated carboxylic acid esters such as polyacrylic acid esters; (partial) amines of (co) polymers of unsaturated carboxylic acid such as polyacrylic acid. Salts, (partially) ammonium salts and (partially) alkylamine salts; (co) polymers of hydroxyl group-containing unsaturated carboxylic acid esters such as hydroxyl group-containing polyacrylates and their modified products; polyurethanes; polyethyleneimine and derivatives thereof Etc. As the polyurethane, a structure in which the main skeleton is polyurethane and the side chain has at least one of polyester and polyether chains and an alkylammonium salt is also preferably used.
 なお、本発明において、溶解度が0.1(g/100g溶媒)未満の分散剤は、以下の評価方法により簡易的に判定することができる。
 サンプル管瓶に、本発明の製造方法に用いる溶媒と評価しようとする分散剤を0.1(g/100g溶媒)の濃度になる様に投入し、撹拌後、遠心分離により溶媒と残存する分散剤を分離後、残存する分散剤の質量を測定し、溶解度を算出する。分散剤が前記溶媒に全て溶解した場合には当該分散剤の前記溶媒に対する溶解度は0.1(g/100g溶媒)以上と判断される。
In the present invention, a dispersant having a solubility of less than 0.1 (g / 100 g solvent) can be easily determined by the following evaluation method.
Into the sample tube, the solvent to be used in the production method of the present invention and the dispersant to be evaluated are added so as to have a concentration of 0.1 (g / 100 g solvent). After separating the agent, the mass of the remaining dispersant is measured, and the solubility is calculated. When the dispersant is completely dissolved in the solvent, the solubility of the dispersant in the solvent is determined to be 0.1 (g / 100 g solvent) or more.
 本発明において分散剤は、中でも、後述する薄片状黒鉛分散液を調製する際に用いられる溶媒に対する前記分散剤の溶解度が、5(g/100g溶媒)以上であることが、後述する薄片状黒鉛分散液の分散性、及び、薄片状黒鉛及び黒鉛材料の導電性及び熱伝導性向上の点から好ましい。後述する薄片状黒鉛分散液を調製する際に用いられる溶媒に対して、前記のように溶解度が高い分散剤を選択して用いると、当該分散剤は黒鉛分散液中では溶解して均一性の高い分散液となる。更に、薄片状黒鉛分散液を用いて黒鉛材料を調製する際には、当該分散剤は薄片状黒鉛分散液に用いられた溶媒と共に除去されやすく、更に、黒鉛材料に残留した分散剤も、当該溶媒を用いて洗浄することにより容易に除去可能で、導電性及び熱伝導性が向上する。 In the present invention, the dispersant is, among others, flaky graphite described later that the solubility of the dispersant in the solvent used when preparing the flaky graphite dispersion described later is 5 (g / 100 g solvent) or more. It is preferable from the viewpoints of the dispersibility of the dispersion, and the conductivity and thermal conductivity of the flaky graphite and graphite material. When a dispersant having a high solubility as described above is selected and used with respect to the solvent used in preparing the flaky graphite dispersion described later, the dispersant dissolves in the graphite dispersion and is uniform. High dispersion. Furthermore, when preparing a graphite material using a flaky graphite dispersion, the dispersant is easily removed together with the solvent used in the flaky graphite dispersion, and the dispersant remaining in the graphite material is also removed. It can be easily removed by washing with a solvent, and conductivity and thermal conductivity are improved.
 また、本発明において分散剤は、室温(25℃)において固体であっても、液状であっても、生成された薄片状黒鉛が、分散剤相側に移行しやすく再凝集が抑制されやすい点から好ましい。
 中でも、分散剤の粘度が25℃において10mPa・s以上であることが、前記溶媒と当該分散剤の2相を含む混合液が高粘性の液体となり、薄片状黒鉛の再凝集を抑制する点から更に好ましい。分散剤の粘度は、25℃において100mPa・s以上50000mPa・s以下であることが更に好ましく、25℃において100mPa・s以上3000mPa・s以下であることがより更に好ましい。
 なお、当該分散剤の粘度は、25℃において、ASTMD4440に準じて測定するものをいう。
 本発明において分散剤は、1種単独で、又は2種以上を組み合わせて用いることができる。
Further, in the present invention, the dispersant is solid or liquid at room temperature (25 ° C.), and the produced flake graphite is likely to move to the dispersant phase side, and reagglomeration is easily suppressed. To preferred.
Among them, the viscosity of the dispersant is 10 mPa · s or more at 25 ° C., because the mixed liquid containing the two phases of the solvent and the dispersant becomes a highly viscous liquid and suppresses reaggregation of the flake graphite. Further preferred. The viscosity of the dispersant is more preferably from 100 mPa · s to 50000 mPa · s at 25 ° C., and still more preferably from 100 mPa · s to 3000 mPa · s at 25 ° C.
In addition, the viscosity of the said dispersing agent says what is measured according to ASTM D4440 at 25 degreeC.
In this invention, a dispersing agent can be used individually by 1 type or in combination of 2 or more types.
<分散処理>
 前記薄片状黒鉛の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、当該混合液を、従来公知の分散機を用いて分散処理することにより、黒鉛の剥離が容易に進行して薄片状黒鉛が生成され、且つ、薄片状黒鉛が再凝集しにくくなり、薄片状黒鉛を高収率で得ることができる。
 分散処理を行うための分散機としては、超音波分散機、2本ロール、3本ロール等のロールミル、アトライター、バンバリーミキサー、ペイントシェイカー、ニーダー、ホモジナイザー、ボールミル、サンドミル、ビーズミル、ジェットミル、ミキサーミル、機械的撹拌等が挙げられる。これらの中でも、せん断力を付与できる方法等、粘度が高い液体を分散させるのに適した方法を選択して用いることが好ましく、粉砕ボールを用いたボールミルとすることが好ましい。ボールミルのボール形は特に限定されないが、1mm~100mmが好ましく、5mm~50mmがより好ましい。
<Distributed processing>
The flaky graphite is produced by mixing graphite and a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent) in a fluorine-based solvent having a surface tension of 20 mN / m or less at the operating temperature. Then, by dispersing the mixture using a conventionally known disperser, the exfoliation of the graphite easily proceeds to produce flaky graphite, and the flaky graphite is less likely to re-aggregate. Shaped graphite can be obtained with high yield.
Dispersers for performing dispersion processing include ultrasonic dispersers, roll mills such as 2-roll and 3-roll, attritors, Banbury mixers, paint shakers, kneaders, homogenizers, ball mills, sand mills, bead mills, jet mills, and mixers. A mill, mechanical stirring, etc. are mentioned. Among these, it is preferable to select and use a method suitable for dispersing a liquid having a high viscosity, such as a method capable of imparting a shearing force, and a ball mill using a pulverized ball is preferable. The ball shape of the ball mill is not particularly limited, but is preferably 1 mm to 100 mm, more preferably 5 mm to 50 mm.
 分散処理時における混合液の各成分の含有割合は特に限定されず、適宜調整すればよい。混合液中の黒鉛と、前記分散剤との含有比は、再凝集を抑制する点から、黒鉛1質量部に対して、分散剤が1質量部以上500質量部以下であることが好ましく、2質量部以上100質量部以上であることがより好ましい。
 また、混合液中の黒鉛と、前記溶媒との含有比は、黒鉛からの剥離効率を上げて、薄片状黒鉛の収率を向上する点から、黒鉛1質量部に対して、溶媒が10質量部以上100000質量部以下であることが好ましく、20質量部以上50000質量部以下であることがより好ましい。
The content ratio of each component of the mixed solution during the dispersion treatment is not particularly limited, and may be adjusted as appropriate. The content ratio of the graphite in the mixed liquid and the dispersant is preferably 1 part by mass or more and 500 parts by mass or less with respect to 1 part by mass of graphite from the viewpoint of suppressing reaggregation. More preferably, it is at least 100 parts by mass.
Further, the content ratio of graphite in the mixed solution and the solvent is such that the solvent is 10 masses with respect to 1 mass part of graphite from the viewpoint of increasing the separation efficiency from graphite and improving the yield of flaky graphite. Part or more and 100,000 parts by weight or less, more preferably 20 parts by weight or more and 50,000 parts by weight or less.
<その他の工程>
 前記薄片状黒鉛の製造方法は、本発明の効果を損なわない範囲で更に他の工程を有していてもよい。このような工程としては、例えば、薄片状黒鉛を取り出すための使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程や、分散剤を溶解して除去する工程等が挙げられる。前記溶媒を除去する工程は、後述する薄片状黒鉛分散液の製造方法の溶媒除去工程と同様にして行うことができる。また、分散剤を溶解して除去する工程は、例えば前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を用いて、薄片状黒鉛の表面に付着している分散剤を溶解、洗浄することにより行うことができる。
 また、後述する薄片状黒鉛分散液の製造方法と同様にして薄片状黒鉛分散液を製造し、当該薄片状黒鉛分散液から前記薄片状黒鉛を得ることも好ましい。
 更に、充分に薄片化されなかった黒鉛を除去するための分級工程を含んでいても良い。
 上記分級工程は、従来公知の分級方法の中から適宜選択して用いることができる。一方、前記製造方法により得られる薄片状黒鉛は、充分に薄片化されていない黒鉛がほとんど残留しないため、当該分級工程を行うことなく、導電性や熱伝導性に優れた本発明の薄片状黒鉛を得ることができる。
<Other processes>
The method for producing the flaky graphite may further include other steps as long as the effects of the present invention are not impaired. Examples of such a process include a process of removing a fluorine-based solvent having a surface tension of 20 mN / m or less at a use temperature for taking out flaky graphite, a process of dissolving and removing a dispersant, and the like. . The step of removing the solvent can be performed in the same manner as the solvent removing step of the method for producing the flaky graphite dispersion described later. In addition, the step of dissolving and removing the dispersant is performed by dissolving and washing the dispersant adhering to the surface of the flaky graphite using, for example, a solvent having a solubility of 5 (g / 100 g solvent) or more. This can be done.
It is also preferable to produce a flaky graphite dispersion in the same manner as the method for producing a flaky graphite dispersion described later, and obtain the flaky graphite from the flaky graphite dispersion.
Furthermore, a classification step for removing graphite that has not been sufficiently thinned may be included.
The classification step can be appropriately selected from conventionally known classification methods. On the other hand, the flaky graphite obtained by the production method has almost no graphite that has not been exfoliated sufficiently, so that the flaky graphite of the present invention is excellent in conductivity and thermal conductivity without performing the classification step. Can be obtained.
 本発明の薄片状黒鉛は、グラフェン粉末として、種々の態様で、種々に応用することができる。下記に例示するが、これらに限定されるものではない。
 本発明の薄片状黒鉛は、溶媒を含む分散液として用いても良く、更に樹脂等と混合したペースト状の樹脂組成物として用いてもよい。前記薄片状黒鉛を含む分散液は、後述するような黒鉛材料の製造に用いることができるほか、導電性インクとして用いることができる。また、前記薄片状黒鉛を含む樹脂組成物は、導電性樹脂組成物として、導電性塗料や導電性接着剤として用いることができる。
 また、本発明の薄片状黒鉛は、膜乃至シート状、成形体として用いても良い。
 更に、本発明の薄片状黒鉛は、高分子複合材料としても良いし、樹脂と混合したペレット、ワイヤー等として用いても良い。
The flaky graphite of the present invention can be applied in various ways as graphene powder in various modes. Although illustrated below, it is not limited to these.
The flaky graphite of the present invention may be used as a dispersion containing a solvent, or may be used as a paste-like resin composition mixed with a resin or the like. The dispersion containing the flaky graphite can be used for producing a graphite material as described later, and can also be used as a conductive ink. Moreover, the resin composition containing the said flaky graphite can be used as a conductive paint or a conductive adhesive as a conductive resin composition.
Further, the flaky graphite of the present invention may be used as a film or a sheet or a molded body.
Furthermore, the flaky graphite of the present invention may be a polymer composite material, or may be used as a pellet, a wire or the like mixed with a resin.
2.薄片状黒鉛分散液
 本発明に係る薄片状黒鉛分散液は、前記本発明に係る薄片状黒鉛が溶媒に分散されてなることを特徴とする。
 前述のように、本発明に係る薄片状黒鉛は導電性及び熱伝導性に優れるため、本発明に係る薄片状黒鉛分散液は、優れた導電性、更には優れた熱伝導性を有する黒鉛材料を製造するための予備調製物として優れている。
 また、薄片状黒鉛分散液に樹脂等を添加して、樹脂組成物として用いても良い。
2. Flaky graphite dispersion The flaky graphite dispersion according to the present invention is characterized in that the flaky graphite according to the present invention is dispersed in a solvent.
As described above, since the flaky graphite according to the present invention is excellent in conductivity and thermal conductivity, the flaky graphite dispersion according to the present invention is a graphite material having excellent conductivity and further excellent thermal conductivity. It is excellent as a pre-preparation for producing.
Further, a resin or the like may be added to the flaky graphite dispersion and used as a resin composition.
 本発明に係る薄片状黒鉛としては、前述しているため、ここでの説明を省略する。
 また、本発明に係る薄片状黒鉛分散液は、分散剤を含有していることが好ましい。当該分散剤としては、前記薄片状黒鉛の製造方法において説明したものと同様の分散剤を適宜選択して用いることができるため、ここでの説明を省略する。
Since the flaky graphite according to the present invention has been described above, description thereof is omitted here.
The flaky graphite dispersion according to the present invention preferably contains a dispersant. As the dispersant, a dispersant similar to that described in the method for producing flaky graphite can be appropriately selected and used, and thus description thereof is omitted here.
 また、本発明に係る薄片状黒鉛分散液に含まれる溶媒は、前記本発明に係る薄片状黒鉛を分散することができる溶媒であれば、特に限定されず用いることができる。中でも、前記分散剤を含有する場合に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒であることが好ましい。
 当該前記分散剤の溶解度が、5(g/100g溶媒)以上となる溶媒としては、分散液の分散安定性の点から、前記分散剤の溶解度が10(g/100g溶媒)以上となる溶媒を選択して用いることが好ましく、更に20(g/100g溶媒)以上となる溶媒を選択して用いることが好ましい。
The solvent contained in the flaky graphite dispersion according to the present invention is not particularly limited as long as it can disperse the flaky graphite according to the present invention. Especially, when the said dispersing agent is contained, it is preferable that the solubility of the said dispersing agent is 5 (g / 100g solvent) or more solvent.
As the solvent in which the solubility of the dispersant is 5 (g / 100 g solvent) or more, from the viewpoint of dispersion stability of the dispersion, a solvent in which the solubility of the dispersant is 10 (g / 100 g solvent) or more is used. It is preferable to select and use, and it is preferable to select and use a solvent that is 20 (g / 100 g solvent) or more.
 前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒としては、分散剤に応じて適宜選択されれば良く、例えば、水、メタノール、フェノール、アセトニトリル、イソプロピルアルコール、アセトン、ベンゼン、酢酸エチル等が挙げられる。
 本発明において前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒は、1種単独で、又は2種以上を組み合わせて用いることができる。
The solvent having a dispersant solubility of 5 (g / 100 g solvent) or more may be appropriately selected depending on the dispersant. For example, water, methanol, phenol, acetonitrile, isopropyl alcohol, acetone, benzene, ethyl acetate Etc.
In the present invention, the solvent having a solubility of 5 (g / 100 g solvent) or more can be used alone or in combination of two or more.
 本発明の薄片状黒鉛分散液は、例えば、後述の第二の本発明の薄片状黒鉛分散液の製造方法により製造することができる。 The flaky graphite dispersion of the present invention can be produced, for example, by the method for producing a flaky graphite dispersion of the second invention described later.
[薄片状黒鉛分散液の製造方法]
 第二の本発明の薄片状黒鉛分散液の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程
のいずれかの工程を有することを特徴とする。
[Method for producing flaky graphite dispersion]
The method for producing a flaky graphite dispersion according to the second aspect of the present invention comprises a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of 0.1 (g / 100 g solvent). A step of mixing and dispersing with less than a dispersant,
(I) or (ii) below:
(I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
It has any one of the processes of removing the fluorine-type solvent whose surface tension in the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition.
 前記使用温度での表面張力が20mN/m以下のフッ素系溶媒と前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒とが相分離する場合などには、前記(ii)の工程を用いても良い。しかし、中でも高収率で得られやすい点から、上記(i)の工程を有することが好ましい。
 なお、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程を、以下、溶媒除去工程ということがあり、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程を、以下、溶媒添加工程ということがある。
When the fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less and the solvent having a solubility of 5 (g / 100 g solvent) or more are phase-separated, the step (ii) is performed. It may be used. However, among these, it is preferable to have the step (i) because it can be easily obtained in a high yield.
The step of removing the fluorine-based solvent having a surface tension of 20 mN / m or less at the use temperature may be hereinafter referred to as a solvent removal step, and the solvent having a solubility of 5 (g / 100 g solvent) or more. Hereinafter, the step of adding may be referred to as a solvent addition step.
 本発明の薄片状黒鉛分散液の製造方法は、前記本発明に係る薄片状黒鉛の製造方法により得られた薄片状黒鉛を含む混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去し、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加することにより、薄片化されていない黒鉛の残留が少ない薄片状黒鉛分散液の製造することができる。前記分散処理時に含まれていた使用温度での表面張力が20mN/m以下のフッ素系溶媒を、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒に入れ替えることにより、溶媒相と前記分散剤相の2相を含む不均一系であった分散液を、溶媒及び分散剤を1相とした薄片状黒鉛分散液とすることができる。 The method for producing a flaky graphite dispersion according to the present invention comprises a mixed solution containing flaky graphite obtained by the method for producing flaky graphite according to the present invention, wherein the surface tension at the use temperature is 20 mN / m or less. By removing the fluorinated solvent and adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more, it is possible to produce a flaky graphite dispersion liquid with little residual graphite. . By replacing the fluorine-based solvent having a surface tension of 20 mN / m or less at the use temperature included in the dispersion treatment with a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more, the solvent phase and the A dispersion that is a heterogeneous system including two phases of a dispersant phase can be made into a flaky graphite dispersion having a solvent and a dispersant as one phase.
 前記薄片状黒鉛分散液の製造方法は、少なくとも分散処理工程と、溶媒除去工程と、溶媒添加工程とを有するものであり、本発明の効果を損なわない範囲で、必要に応じて更に他の工程を有していてもよいものである。以下、このような薄片状黒鉛分散液の製造方法について順に詳細に説明するが、分散処理工程については、前記薄片状黒鉛の製造方法と同様とすることができるので、ここでの説明は省略する。 The method for producing the flaky graphite dispersion has at least a dispersion treatment step, a solvent removal step, and a solvent addition step, and further other steps as necessary within the range not impairing the effects of the present invention. It may have. Hereinafter, the production method of such a flaky graphite dispersion will be described in detail in order, but the dispersion treatment step can be the same as the production method of the flaky graphite, and the description here is omitted. .
<溶媒除去工程>
 上記(i)の工程においては、前述の分散処理工程により得られた分散処理後の混合液から、使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する。当該溶媒を除去することにより、残渣として分散剤と薄片状黒鉛との混合物を得ることができる。
 溶媒を除去する方法は、用いた溶媒に応じて適宜選択すればよい。溶媒を除去する方法としては、操作の簡便性の点から、デカンテーションや濾過が好ましく、適宜加熱や減圧処理することにより溶媒を除去してもよい。
 また、上記(ii)の工程においては、例えば、相分離していることを利用して分液により溶媒相を除去することができる。
<Solvent removal step>
In the step (i), the fluorinated solvent having a surface tension at the use temperature of 20 mN / m or less is removed from the mixed solution obtained by the dispersion treatment step. By removing the solvent, a mixture of a dispersant and flaky graphite can be obtained as a residue.
The method for removing the solvent may be appropriately selected according to the solvent used. As a method for removing the solvent, decantation or filtration is preferable from the viewpoint of easy operation, and the solvent may be removed by appropriate heating or reduced pressure treatment.
In the step (ii), for example, the solvent phase can be removed by liquid separation utilizing the fact that the phases are separated.
<溶媒添加工程>
 上記(i)の工程においては、前記溶媒除去工程により溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加することにより、薄片状黒鉛の分散液を得ることができる。上記(ii)の工程においては、前記溶媒除去工程の前に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する。
 前記分散剤の溶解度が、5(g/100g溶媒)以上となる溶媒としては、分散液の分散安定性の点から、前記分散剤の溶解度が10(g/100g溶媒)以上となる溶媒を選択して用いることが好ましく、更に20(g/100g溶媒)以上となる溶媒を選択して用いることが好ましい。
 前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒としては、前述したのでここでの説明を省略する。
<Solvent addition process>
In the step (i), a dispersion of flaky graphite is added to the mixture from which the solvent has been removed by the solvent removal step by adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more. Can be obtained. In the step (ii), a solvent having a solubility of 5 (g / 100 g solvent) or more is added before the solvent removing step.
As the solvent in which the solubility of the dispersant is 5 (g / 100 g solvent) or more, a solvent in which the solubility of the dispersant is 10 (g / 100 g solvent) or more is selected from the viewpoint of dispersion stability of the dispersion. It is preferable to select and use a solvent that is 20 (g / 100 g solvent) or more.
Since the solvent having a solubility of 5 (g / 100 g solvent) or more has been described above, the description thereof is omitted here.
 本発明の薄片状黒鉛分散液の製造方法は、本発明の効果を損なわない範囲で、更に他の工程を有していてもよい。他の工程としては、例えば、樹脂や、各種添加剤を添加する工程等が挙げられる。
 薄片状黒鉛分散液に用いられる添加剤としては、例えば、可塑剤、消泡剤、シランカップリング剤等が挙げられる。
The method for producing a flaky graphite dispersion of the present invention may further include other steps as long as the effects of the present invention are not impaired. Examples of other steps include a step of adding a resin and various additives.
Examples of the additive used in the flaky graphite dispersion include a plasticizer, an antifoaming agent, and a silane coupling agent.
 得られた薄片状黒鉛分散液中の各成分の含有割合は特に限定されず、適宜調整すればよい。薄片状黒鉛分散液中の黒鉛の含有割合は、適宜調整されれば良いが、分散性の点から、薄片状黒鉛分散液の固形分全量100質量部に対して、0.1質量部以上20質量部以下であることが好ましく、0.5質量部以上10質量部以下であることがより好ましい。
 また、薄片状黒鉛分散液中の溶媒の含有割合は、薄片状黒鉛分散液全量中に80質量%以上99質量%以下であることが好ましく、更に90質量%以上97質量%以下であることが好ましい。
 また、分散剤が含まれる場合の薄片状黒鉛分散液中の分散剤の含有割合は、分散性の点から、薄片状黒鉛分散液の固形分全量100質量部に対して、80質量部以上99.9質量部以下であることが好ましく、90質量部以上99.5質量部以下であることがより好ましい。
 なお、本発明において固形分とは、溶媒以外の全ての成分を表し、例えば、液状の分散剤であっても固形分に含まれるものとする。
The content ratio of each component in the obtained flaky graphite dispersion is not particularly limited, and may be adjusted as appropriate. The graphite content in the flaky graphite dispersion may be adjusted as appropriate, but from the viewpoint of dispersibility, 0.1 to 20 parts by mass with respect to 100 parts by mass of the total solid content of the flaky graphite dispersion. It is preferably no greater than part by mass, and more preferably no less than 0.5 parts by mass and no greater than 10 parts by mass.
In addition, the content of the solvent in the flaky graphite dispersion is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 97% by mass or less, based on the total amount of the flaky graphite dispersion. preferable.
Further, the content ratio of the dispersant in the flaky graphite dispersion when the dispersant is contained is 80 parts by mass or more and 99 parts by mass with respect to 100 parts by mass of the total solid content of the flaky graphite dispersion from the viewpoint of dispersibility. Is preferably 9 parts by mass or less, and more preferably 90 parts by mass or more and 99.5 parts by mass or less.
In the present invention, the solid content represents all components other than the solvent. For example, even a liquid dispersant is included in the solid content.
 このように得られた薄片状黒鉛分散液は、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合が、10個数%以上であることが好ましく、更に50個数%以上であることが好ましく、より更に70個数%以上であることが好ましい。導電性及び熱伝導性に優れる点から、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は多ければ多いほど好ましく、80個数%以上であることがより好ましく、90個数%以上であることがより更に好ましい。中でも、厚みが0.34nm以上10nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は、10個数%以上であることが好ましく、更に20個数%以上であることが好ましい。 In the flaky graphite dispersion thus obtained, the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 10% by number or more, and more preferably 50% by number or more. It is preferable that the content is 70% by number or more. From the viewpoint of excellent electrical conductivity and thermal conductivity, the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above. Among them, the content ratio of the flaky graphite having a thickness of 0.34 nm to 10 nm with respect to the whole flaky graphite is preferably 10% by number or more, and more preferably 20% by number or more.
3.黒鉛材料
 本発明に係る黒鉛材料は、前記本発明に係る薄片状黒鉛が積層されてなることを特徴とする。
 前述のように、本発明に係る薄片状黒鉛は平均厚みが50nm以下であって導電性及び熱伝導性に優れるため、前記本発明に係る薄片状黒鉛が積層されてなる黒鉛材料は、優れた導電性を有し、更には優れた熱伝導性を有する。
 なお、本発明に係る薄片状黒鉛としては、前述しているため、ここでの説明を省略する。
3. Graphite Material The graphite material according to the present invention is characterized in that the flaky graphite according to the present invention is laminated.
As described above, since the flaky graphite according to the present invention has an average thickness of 50 nm or less and excellent conductivity and thermal conductivity, the graphite material obtained by laminating the flaky graphite according to the present invention is excellent. It has electrical conductivity and also has excellent thermal conductivity.
Since the flaky graphite according to the present invention has been described above, the description thereof is omitted here.
 本発明に係る黒鉛材料は、前記本発明に係る薄片状黒鉛が積層されてなる積層体であれば、形状は限定されるものではない。本発明に係る黒鉛材料は、前記本発明の薄片状黒鉛の各々の少なくとも一部が互いに重なり合って積層されていれば良い。
 また、本発明に係る黒鉛材料は、前記本発明の薄片状黒鉛の各々の少なくとも一部が互いに接触しているものであっても良い。本発明に係る黒鉛材料は、前記本発明の薄片状黒鉛の各々が、厚み方向の側面同士で接触しているものであっても良い。
The shape of the graphite material according to the present invention is not limited as long as it is a laminate obtained by laminating the flaky graphite according to the present invention. The graphite material according to the present invention may be laminated so that at least a part of each of the flake graphites of the present invention overlaps each other.
The graphite material according to the present invention may be one in which at least a part of each of the flake graphites of the present invention is in contact with each other. The graphite material according to the present invention may be one in which the flaky graphites of the present invention are in contact with each other in the thickness direction.
 本発明に係る黒鉛材料は、黒鉛膜乃至黒鉛シートと呼称される、膜乃至シート状であっても良いし、立体構造を有する成形体であっても良い。
 本発明に係る黒鉛膜は、構成する薄片状黒鉛の厚みの分布により、直径18mmの円以上の面積を有する自立膜とすることも可能であるが、小片状であっても良い。
 本発明に係る黒鉛材料が膜乃至シート状である場合、厚みは特に限定されるものではない。可撓性を有するようにする点から、本発明に係る黒鉛材料が膜乃至シート状である場合の厚みは1mm以下であることが好ましく、更に200μm以下であることが好ましい。このような厚みを有する本発明の黒鉛膜乃至黒鉛シートは、可撓性を有することから、非常に薄く軽い且つ屈曲性に優れた導電体となり得る。
 また、本発明に係る黒鉛材料は、前記本発明に係る薄片状黒鉛が積層されてなるものであることから、曲面や凹凸の多い被着体に対しても追従させることができる。
The graphite material according to the present invention may be a film or sheet called a graphite film or a graphite sheet, or may be a molded body having a three-dimensional structure.
The graphite film according to the present invention can be a self-supporting film having an area of a circle having a diameter of 18 mm or more depending on the thickness distribution of the flaky graphite constituting the film, but may be in the form of a small piece.
When the graphite material according to the present invention is a film or a sheet, the thickness is not particularly limited. From the viewpoint of having flexibility, the thickness of the graphite material according to the present invention is preferably 1 mm or less, and more preferably 200 μm or less when it is in the form of a film or sheet. Since the graphite film or graphite sheet of the present invention having such a thickness has flexibility, it can be a very thin and light conductor with excellent flexibility.
Moreover, since the graphite material according to the present invention is formed by laminating the flaky graphite according to the present invention, it can follow an adherend having a large number of curved surfaces and irregularities.
 本発明に係る黒鉛材料において、前記本発明の薄片状黒鉛の各々の少なくとも一部が互いに重なり合って積層される方向は、通常、薄片の厚み方向である。
 本発明に係る黒鉛材料においても、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下であることが好ましい。
In the graphite material according to the present invention, the direction in which at least a part of each of the flake graphites of the present invention overlaps each other is usually the thickness direction of the flakes.
Also in the graphite material according to the present invention, it is preferable that an average interplanar spacing (d002) of (002) planes by an X-ray diffraction method is 0.336 nm or less.
 また、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であることが好ましく、0.8%以上であることがより好ましく、1%以上であることがより更に好ましい。また、本発明に係る黒鉛材料においても、前記フッ素(-)イオンのカウント数の割合は10%以下であることが好ましく、更に5%以下であることが好ましく、より更に3%以下であることが好ましい。 Also, in the graphite material according to the present invention, the total count of all (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS), as in the flaky graphite of the present invention. The ratio of the number of fluorine (−) ions to the hydrogen atom is preferably 0.5% or more, more preferably 0.8% or more, and even more preferably 1% or more. Also in the graphite material according to the present invention, the ratio of the fluorine (−) ion count is preferably 10% or less, more preferably 5% or less, and even more preferably 3% or less. Is preferred.
 また、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、炭素原子の組成は、X線光電子分光法による測定で80%以上であることが好ましく、90%以上であることがより好ましく、92%以上であることがより更に好ましく、95%以上であることがより更に好ましい。炭素原子の組成は、X線光電子分光法による測定で100%であっても良いが、通常、若干酸素原子が含まれていることから、99%以下であることが好ましい。
 更に、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、酸素原子の組成は、X線光電子分光法による測定で10%以下であることが好ましく、10%未満であることがより好ましく、7%以下であることがより好ましく、5%以下であることがより更に好ましい。
 また、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、フッ素原子は微量しか存在しないため、X線光電子分光法による測定ではフッ素原子の組成は0%と測定されても良い。
Further, in the graphite material according to the present invention, as in the flaky graphite of the present invention, the composition of carbon atoms is preferably 80% or more as measured by X-ray photoelectron spectroscopy, and 90% or more. Is more preferably 92% or more, and still more preferably 95% or more. The composition of carbon atoms may be 100% as measured by X-ray photoelectron spectroscopy, but usually it is preferably 99% or less because some oxygen atoms are contained.
Further, also in the graphite material according to the present invention, like the flaky graphite of the present invention, the composition of oxygen atoms is preferably 10% or less as measured by X-ray photoelectron spectroscopy, and less than 10%. Is more preferable, 7% or less is more preferable, and 5% or less is even more preferable.
Also, in the graphite material according to the present invention, as in the flaky graphite of the present invention, only a very small amount of fluorine atoms is present, and therefore the composition of fluorine atoms is measured as 0% in the measurement by X-ray photoelectron spectroscopy. good.
 また、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、優れた導電性及び熱伝導性の点から、X線光電子分光法による測定で60%以上であることが好ましく、70%以上であることがより好ましく、75%以上であることがより更に好ましい。炭素原子間でsp2結合を形成している結合の割合は高ければ高いほど好ましく、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合の上限は100%である。 Further, in the graphite material according to the present invention, as in the flaky graphite of the present invention, among the bonds of the carbon atoms, the ratio of the bonds forming sp2 bonds between the carbon atoms is excellent in conductivity. From the viewpoint of thermal conductivity, it is preferably 60% or more, more preferably 70% or more, and even more preferably 75% or more as measured by X-ray photoelectron spectroscopy. The higher the ratio of bonds that form sp2 bonds between carbon atoms, the better. The upper limit of the ratio of bonds that form sp2 bonds between carbon atoms is 100%. is there.
 また、本発明に係る黒鉛材料においても前記本発明の薄片状黒鉛と同様に、結晶性が良好なものであることから、ラマン分光スペクトルで測定される1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.3以下であることが好ましく、更に0.15以下であることが好ましく、より更に0.10以下であることが好ましい。当該強度比I/Iは、通常、原料黒鉛の場合0であることから、0以上となる。
 また、ラマン分光スペクトルで測定される2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.1以上であることが好ましく、更に0.2以上であることが好ましく、より更に0.3以上であることが好ましい。当該強度比IG’/Iは、通常薄片状黒鉛の厚みが薄いほど大きくなり、厚みが約0.34nm(グラフェン単原子層)の時に2となることから、2以下となる。
Also, the graphite material according to the present invention has good crystallinity as in the flaky graphite of the present invention, and therefore has a peak intensity in the range of 1300 to 1400 cm −1 measured by Raman spectroscopy. The intensity ratio I D / I G between (I D ) and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is preferably 0.3 or less, more preferably 0.15 or less. Further, it is preferably 0.10 or less. The intensity ratio I D / I G is usually 0 in the case of raw material graphite, and is 0 or more.
Further, 'the intensity ratio I G of the peak intensity (I G) in the range of 1580 ~ 1620cm -1 / I peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 measured by Raman spectroscopy G is preferably 0.1 or more, more preferably 0.2 or more, and still more preferably 0.3 or more. The intensity ratio I G ′ / I G usually increases as the thickness of the flaky graphite decreases, and becomes 2 when the thickness is about 0.34 nm (graphene monoatomic layer).
 また、本発明に係る黒鉛材料は、優れた導電性を有するものであるが、表面抵抗値は、200Ω/□以下であることが好ましく、更に100Ω/□以下であることが好ましい。ここでの表面抵抗値は、4探針法による抵抗率計(例えば、株式会社三菱化学アナリテック製、型名:ロレスタGP MCP-T610)によって測定することができる。 The graphite material according to the present invention has excellent conductivity, but the surface resistance value is preferably 200Ω / □ or less, more preferably 100Ω / □ or less. The surface resistance value here can be measured with a resistivity meter (for example, manufactured by Mitsubishi Chemical Analytech Co., Ltd., model name: Loresta GP MCP-T610).
 また、本発明に係る黒鉛材料は、優れた熱伝導性を有するものであるが、例えば厚みが200μm以下である場合の厚みが200μm以下の面における面方向で測定された熱拡散率が1.0×10-6/s以上であることが好ましく、更に1.0×10-5/s以上であることが好ましい。
 熱拡散率は、周期加熱放射測温法を用いて測定することができ、例えば、株式会社ベテルのサーモウエイブアナライザTA3を用いて測定することができる。
Moreover, although the graphite material which concerns on this invention has the outstanding heat conductivity, when the thickness is 200 micrometers or less, for example, the thermal diffusivity measured in the surface direction in the surface whose thickness is 200 micrometers or less is 1. It is preferably 0 × 10 −6 m 2 / s or more, and more preferably 1.0 × 10 −5 m 2 / s or more.
The thermal diffusivity can be measured using a periodic heating radiation temperature measuring method, and for example, can be measured using a thermowave analyzer TA3 manufactured by Bethel Co., Ltd.
 本発明に係る黒鉛材料は、前記本発明に係る薄片状黒鉛が積層されてなる積層体であるが、積層体を構成する薄片状黒鉛の一部に薄片の厚みが50nm超過の薄片状黒鉛が含まれていても良い。
 本発明に係る黒鉛材料においては、好ましくは表面抵抗値が、200Ω/□以下、より好ましくは100Ω/□以下である範囲内で、積層体を構成する薄片状黒鉛の一部に薄片の厚みが50nm超過の薄片状黒鉛が含まれていても良い。
The graphite material according to the present invention is a laminate formed by laminating the flaky graphite according to the present invention, but a flaky graphite having a flake thickness exceeding 50 nm is formed on a part of the flaky graphite constituting the laminate. It may be included.
In the graphite material according to the present invention, the thickness of the flakes on a part of the flake graphite constituting the laminate is preferably within a range where the surface resistance value is 200Ω / □ or less, more preferably 100Ω / □ or less. Flaky graphite exceeding 50 nm may be contained.
 本発明の黒鉛材料は、例えば、後述の第二の本発明の黒鉛材料の製造方法により製造することができる。 The graphite material of the present invention can be produced, for example, by the method for producing a graphite material of the second invention described later.
[黒鉛材料の製造方法]
 第二の本発明の黒鉛材料の製造方法は、使用温度での表面張力が20mN/m以下のフッ素系溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程と、
  下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下のフッ素系溶媒を除去する工程
のいずれかの工程により薄片状黒鉛分散液とする工程と、
 前記薄片状黒鉛分散液を成膜又は成形する工程とを有することを特徴とする。
[Method for producing graphite material]
The method for producing a graphite material according to the second aspect of the present invention is the dispersion of graphite and a solubility in the solvent of less than 0.1 (g / 100 g solvent) in a fluorine-based solvent having a surface tension of 20 mN / m or less at the operating temperature. Mixing the agent and dispersing,
(I) or (ii) below:
(I) removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment;
(Ii) adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed; g / 100 g solvent) or higher step,
A step of making a flaky graphite dispersion by any step of removing a fluorine-based solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the addition of the solvent;
And a step of forming or molding the flaky graphite dispersion.
 前記黒鉛材料の製造方法は、少なくとも分散処理工程と、溶媒除去工程と、溶媒添加工程と、成膜又は成形工程とを有するものであり、本発明の効果を損なわない範囲で、必要に応じて更に他の工程を有していてもよいものである。以下、このような黒鉛材料の製造方法について順に詳細に説明するが、分散処理工程、溶媒除去工程、及び溶媒添加工程については、前記薄片状黒鉛分散液の製造方法と同様とすることができるので、ここでの説明は省略する。 The method for producing the graphite material includes at least a dispersion treatment step, a solvent removal step, a solvent addition step, and a film formation or molding step, and as necessary, within a range not impairing the effects of the present invention. Furthermore, it may have another process. Hereinafter, the method for producing such a graphite material will be described in detail in order, but the dispersion treatment step, the solvent removal step, and the solvent addition step can be the same as the method for producing the flaky graphite dispersion. Explanation here is omitted.
<成膜又は成形工程>
 前記薄片状黒鉛分散液を用いて、黒鉛材料を製造する方法は、従来公知の成膜方法又は成形方法の中から適宜選択することができる。
 黒鉛材料の好適な成膜方法としては、濾紙、メンブレンフィルター等の多孔質基材上に前記薄片状黒鉛分散液を滴下し、濾過することにより溶媒を除去して成膜する方法が挙げられる。また、黒鉛材料の好適な成形方法としては、例えば、多孔質の型に前記薄片状黒鉛分散液を滴下し、濾過することにより溶媒を除去して成形する、鋳込み成形のような方法が挙げられる。これらの方法によれば、分散剤を溶媒と共に除去することが可能であることから、導電性及び熱伝導性に優れた黒鉛材料とするのに適している。
 当該方法においては、更に、前記分散剤を溶解する溶媒で黒鉛材料を洗浄することが好ましい。分散剤を溶解する溶媒で洗浄することにより、分散剤が除去されて高純度の黒鉛材料を得ることができるため、導電性及び熱伝導性に優れた黒鉛材料とすることができる。当該分散剤を溶解する溶媒としては、前記分散剤の溶解度が、5(g/100g溶媒)以上、更に10(g/100g溶媒)以上となる溶媒を選択して用いることが好ましい。
 このようにして得られた黒鉛材料は、前記多孔質基材又は透液性の型から剥がして単体として用いてもよく、ガラス基材や樹脂基材等、他の基材に転写して用いてもよい。
 更に黒鉛材料をプレス機やロールプレス機等を用いて圧縮処理することで、導電性や熱伝導性を高めることができる。
<Film formation or molding process>
A method for producing a graphite material using the flaky graphite dispersion can be appropriately selected from conventionally known film forming methods or molding methods.
As a suitable film forming method of the graphite material, there is a method in which the flaky graphite dispersion liquid is dropped on a porous substrate such as a filter paper or a membrane filter and filtered to remove the solvent to form a film. Further, as a suitable molding method of the graphite material, for example, a method such as casting molding, in which the flaky graphite dispersion liquid is dropped into a porous mold and the solvent is removed by filtration to mold, is used. . According to these methods, since the dispersant can be removed together with the solvent, it is suitable for making a graphite material excellent in conductivity and thermal conductivity.
In the method, it is preferable to further wash the graphite material with a solvent that dissolves the dispersant. By washing with a solvent that dissolves the dispersant, the dispersant can be removed and a high-purity graphite material can be obtained. Therefore, a graphite material having excellent conductivity and thermal conductivity can be obtained. As a solvent for dissolving the dispersant, it is preferable to select and use a solvent having a solubility of 5 (g / 100 g solvent) or more, and further 10 (g / 100 g solvent) or more.
The graphite material thus obtained may be peeled off from the porous substrate or the liquid-permeable mold and used as a single substance, or transferred to another substrate such as a glass substrate or a resin substrate. May be.
Furthermore, the electrical conductivity and the thermal conductivity can be enhanced by compressing the graphite material using a press or a roll press.
 また、黒鉛材料の他の成膜方法としては、基材上に、前記薄片状黒鉛分散液を公知の塗布法により塗布して塗布膜を形成し、溶媒を除去することにより黒鉛材料を成膜する方法、等が挙げられる。当該方法によれば、所望の基材上に黒鉛材料を直接形成することができるため、基材との密着性に優れた黒鉛材料を形成することができる。 Further, as another film forming method of the graphite material, the flaky graphite dispersion is applied onto a substrate by a known coating method to form a coating film, and the solvent is removed to form the graphite material. And the like. According to this method, since the graphite material can be directly formed on the desired substrate, it is possible to form a graphite material having excellent adhesion to the substrate.
 本発明に係る薄片状黒鉛、及び黒鉛材料は、導電性及び熱伝導性に優れているため、本発明に係る薄片状黒鉛、薄片状黒鉛分散液、及び黒鉛材料は、ナノエレクトロニクス、ナノ複合材料、透明導電性フィルム、電極、電池、キャパシタ、水素貯蔵、生体への応用、放熱シート、航空宇宙産業、センサー、トランジスタ等の様々な分野の用途に好適に適用することができる。 Since the flaky graphite and the graphite material according to the present invention are excellent in conductivity and thermal conductivity, the flaky graphite, the flaky graphite dispersion, and the graphite material according to the present invention include nanoelectronics and nanocomposites. , Transparent conductive films, electrodes, batteries, capacitors, hydrogen storage, application to living bodies, heat dissipation sheets, aerospace industry, sensors, transistors, and the like.
II.第三の本発明
 以下、第三の本発明に係る薄片状黒鉛の製造方法、薄片状黒鉛分散液の製造方法、及び黒鉛材料の製造方法について順に説明する。
 1.薄片状黒鉛の製造方法
 第三の本発明に係る薄片状黒鉛の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程(以下、分散処理工程ということがある)を有することを特徴とする。
II. Third Invention Hereinafter, a method for producing flaky graphite, a method for producing a flaky graphite dispersion, and a method for producing a graphite material according to the third invention will be described in order.
1. Method for producing flaky graphite A method for producing flaky graphite according to the third aspect of the present invention comprises a solvent having a surface tension at a working temperature of 20 mN / m or less, graphite and a solubility in the solvent of 0.1 (g / g). It is characterized by having a step of mixing with a dispersant (less than 100 g solvent) and carrying out a dispersion treatment (hereinafter sometimes referred to as a dispersion treatment step).
 使用温度での表面張力が20mN/m以下の溶媒は、比較的低極性であり、表面張力が小さいため、前記黒鉛の層間に浸入しやすい。このような溶媒を用いて分散処理することにより、前記第二の本発明に係る薄片状黒鉛の製造方法と同様に、黒鉛の剥離が促進されて薄片状黒鉛が生成されやすい。
 また、第三の本発明の製造方法においては、前記使用温度での表面張力が20mN/m以下の溶媒に、当該溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤を組み合わせて用いる。このような特定の分散剤を特定の溶媒と組み合わせて分散処理することにより、前記第二の本発明に係る薄片状黒鉛の製造方法と同様に、黒鉛や薄片状黒鉛は極性の近い前記分散剤相に存在し易くなり、分散処理により生成した薄片状黒鉛の周囲に分散剤が存在するために、薄片状黒鉛同士が直ちに凝集することが抑制される。更に本発明においては、前記分散剤相が前記溶媒相と分離しているため、分散剤が吸着した薄片状黒鉛は前記分散剤相へ移行して、より再凝集が抑制されやすいものと推定される。
 以上のことから、第三の本発明の薄片状黒鉛の製造方法によれば、黒鉛の剥離が容易に進行して薄片状黒鉛が生成され、且つ、薄片状黒鉛が再凝集しにくいため、導電性及び熱伝導性に優れた薄片状黒鉛を高収率で得ることができる。
A solvent having a surface tension of 20 mN / m or less at the use temperature has a relatively low polarity and a small surface tension, and therefore easily enters between the graphite layers. Dispersion treatment using such a solvent facilitates the exfoliation of graphite and facilitates the production of flaky graphite, as in the method for producing flaky graphite according to the second aspect of the present invention.
In the production method of the third aspect of the present invention, a solvent having a surface tension of 20 mN / m or less at the use temperature is combined with a dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent). Use. By dispersing such a specific dispersant in combination with a specific solvent, graphite or flaky graphite is similar in polarity to the dispersant, as in the method for producing flaky graphite according to the second aspect of the present invention. It becomes easy to exist in the phase, and since the dispersant exists around the flaky graphite produced by the dispersion treatment, it is possible to suppress the flaky graphite from being immediately aggregated. Furthermore, in the present invention, since the dispersant phase is separated from the solvent phase, it is estimated that the flake graphite adsorbed by the dispersant moves to the dispersant phase, and reagglomeration is more likely to be suppressed. The
From the above, according to the method for producing flaky graphite of the third aspect of the present invention, the exfoliation of graphite easily proceeds to produce flaky graphite, and the flaky graphite hardly re-aggregates. Flake graphite excellent in heat conductivity and heat conductivity can be obtained in high yield.
 第三の本発明に係る薄片状黒鉛の製造方法は、少なくとも分散処理工程を有するものであり、本発明の効果を損なわない範囲で、必要に応じて、前記第二の本発明に係る薄片状黒鉛の製造方法と同様に、更に他の工程を有していてもよいものである。以下、このような第三の本発明の薄片状黒鉛の製造方法について順に詳細に説明する。 The method for producing flaky graphite according to the third aspect of the present invention has at least a dispersion treatment step, and is within the range not impairing the effects of the present invention, if necessary, the flaky shape according to the second aspect of the present invention. Similar to the method for producing graphite, it may have other steps. Hereinafter, the method for producing the flaky graphite of the third aspect of the present invention will be described in detail in order.
[分散処理工程]
 当該分散処理工程において、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤と、分散処理の方法とについては、前記第二の本発明に係る薄片状黒鉛の製造方法と同様であって良いので、ここでの説明を省略する。
[Distributed processing step]
In the dispersion treatment step, the graphite, the dispersant having a solubility in the solvent of less than 0.1 (g / 100 g solvent), and the dispersion treatment method are as follows. Since it may be the same as the method, description here is abbreviate | omitted.
<使用温度での表面張力が20mN/m以下の溶媒>
 本発明においては、分散処理時の溶媒として、使用温度での表面張力が20mN/m以下の溶媒が用いられる。当該特定の溶媒は黒鉛の層間に入り込みやすいため、黒鉛の剥離が進行しやすくなる。なお、ここでの使用温度とは、分散処理開始時の溶媒温度をいう。
<Solvent having a surface tension at a working temperature of 20 mN / m or less>
In the present invention, a solvent having a surface tension at the use temperature of 20 mN / m or less is used as the solvent during the dispersion treatment. Since the specific solvent easily enters the graphite layer, the exfoliation of the graphite is likely to proceed. In addition, the use temperature here means the solvent temperature at the start of the dispersion treatment.
 使用温度での表面張力が20mN/m以下の溶媒の具体例としては、25℃における表面張力が20mN/m以下の溶媒として、ヘキサン(17.9mN/m、以下単位省略)、ヘプタン(19.7)、2,4-ジメチルペンタン(17.7)等の炭化水素、ジエチルエーテル等のアルキルエーテル(例えばジエチルエーテル:16.7)、ジメチルシロキサン鎖を含む化合物(例えば、ヘキサメチルジシロキサン:15.1、ポリジメチルシロキサン:16~20(重合度等により変動))、前述したようなフッ素化アルキル基、フッ素化アルキルエーテル基等を有するフッ素系溶媒(例えば、ハイドロフルオロエーテル(例えば、C49OCH:13.6mN/m、C49OC25:13.6mN/m、COCH:12.4mN/m、CCF(OCH)C:15mN/m等)、及びハイドロフルオロカーボン)等が挙げられる。本発明においては、黒鉛の層間に入り込みやすく、黒鉛の剥離が進行しやすい点から、中でも、フッ素系溶媒を用いることが好ましく、更に、フッ素化アルキル基、及びフッ素化アルキルエーテル基の少なくとも1種を有するフッ素系溶剤を用いることが好ましい。
 また、当該溶媒としては、黒鉛の層間に入り込みやすく、黒鉛の剥離が進行しやすい点から、中でも、使用温度での表面張力が15mN/m以下の溶媒であることが好ましい。
 第三の本発明において使用温度での表面張力が20mN/m以下の溶媒は、1種単独で、又は2種以上を組み合わせて用いることができる。
Specific examples of the solvent having a surface tension at a working temperature of 20 mN / m or less include hexane (17.9 mN / m, unit omitted), heptane (19. 7), hydrocarbons such as 2,4-dimethylpentane (17.7), alkyl ethers such as diethyl ether (for example, diethyl ether: 16.7), compounds containing a dimethylsiloxane chain (for example, hexamethyldisiloxane: 15 .1, polydimethylsiloxane: 16 to 20 (varies depending on the degree of polymerization, etc.), fluorinated solvents having a fluorinated alkyl group, a fluorinated alkyl ether group, etc. as described above (for example, hydrofluoroether (for example, C 4 F 9 OCH 3: 13.6mN / m , C 4 F 9 OC 2 H 5: 13.6mN / m, C 3 F 7 OCH 3 12.4mN / m, C 2 F 5 CF (OCH 3) C 3 F 7: 15mN / m , etc.), and hydrofluorocarbons), and the like. In the present invention, it is preferable to use a fluorinated solvent because it is easy to enter between graphite layers and the exfoliation of graphite easily proceeds, and at least one of a fluorinated alkyl group and a fluorinated alkyl ether group is preferred. It is preferable to use a fluorine-based solvent having
In addition, the solvent is preferably a solvent having a surface tension of 15 mN / m or less at the use temperature because it easily enters the graphite layer and the peeling of the graphite easily proceeds.
In the third aspect of the present invention, the solvent having a surface tension at the use temperature of 20 mN / m or less can be used alone or in combination of two or more.
 第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛は、単層のグラフェン、及び、50nm以下の範囲で複層化したグラフェンの割合が高く、酸化もしていないため、分級処理をしなくても優れた導電性、熱伝導性を有する。また、充分に薄片化されていない黒鉛がほとんど残留しないため、分級処理をしても黒鉛の質量はほとんど低下せず、薄片状黒鉛が高回収率で得られる。第三の本発明の薄片状黒鉛の製造方法を用いると、単層のグラフェン、及び、50nm以下の範囲で複層化したグラフェンの割合が20質量%以上の収率で、より好ましくは50質量%以上の収率で、より好ましくは70質量%以上の収率で、より更に好ましくは75質量%以上の収率で、薄片状黒鉛を得ることが可能であり、100質量%の収率で薄片状黒鉛を得ることも可能である。 The flaky graphite obtained by the method for producing flaky graphite of the third aspect of the invention has a high proportion of single-layer graphene and graphene multi-layered in a range of 50 nm or less, and is not oxidized. Excellent electrical and thermal conductivity without having to In addition, since graphite that has not been sufficiently flaked does not remain, the weight of graphite is hardly reduced even after classification, and flaky graphite can be obtained with a high recovery rate. When the method for producing flaky graphite of the third aspect of the present invention is used, the ratio of the single-layer graphene and the graphene multi-layered in the range of 50 nm or less is a yield of 20% by mass or more, more preferably 50 masses It is possible to obtain flaky graphite with a yield of 100% by mass or more, more preferably with a yield of 70% by mass or more, and even more preferably with a yield of 75% by mass or more. It is also possible to obtain flaky graphite.
 また、第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛は、前述のように、使用温度での表面張力が20mN/m以下の溶媒によって、黒鉛の剥離の薄片間の剥離が促進されてなるものであることから、酸化グラフェンを還元して生成された薄片状黒鉛と比べて酸素原子が低減され、炭素原子間でsp2結合を形成している結合の割合を高くすることが可能であり、導電性及び熱伝導性が高いものである。
 第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛は、前記第一の本発明の薄片状黒鉛と同様に、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下となる。
In addition, the flake graphite obtained by the method for producing flake graphite according to the third aspect of the present invention is, as described above, peeled between the flakes of the flakes of graphite by using a solvent having a surface tension at the operating temperature of 20 mN / m or less. Therefore, oxygen atoms are reduced as compared with flaky graphite produced by reducing graphene oxide, and the proportion of bonds forming sp2 bonds between carbon atoms is increased. It is possible to have high conductivity and heat conductivity.
The flaky graphite obtained by the method for producing flaky graphite according to the third aspect of the present invention is the same as the flaky graphite according to the first aspect of the present invention. Becomes 0.336 nm or less.
 また、第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛は、X線光電子分光法による測定での炭素原子の組成、酸素原子の組成、炭素原子及び酸素原子とは異なる原子の合計の組成、炭素原子の組成と酸素原子の組成との和、炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、前述した第一の本発明の薄片状黒鉛のそれらと同様になる。 Further, the flaky graphite obtained by the method for producing flaky graphite of the third aspect of the present invention comprises a carbon atom composition, an oxygen atom composition, an atom different from the carbon atom and the oxygen atom as measured by X-ray photoelectron spectroscopy. The composition of the carbon atoms, the sum of the carbon atom composition and the oxygen atom composition, and the ratio of the bonds forming sp2 bonds between the carbon atoms out of the bonds of the carbon atoms is the same as that of the first aspect of the present invention. Similar to those of flaky graphite.
 また、第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛は、前述のように、使用温度での表面張力が20mN/m以下の溶媒によって、黒鉛の剥離の薄片間の剥離が促進されてなるものであることから、ラマン測定による前記I/Iや前記IG’/Iは、前述した第一の本発明の薄片状黒鉛のそれらと同様になる。
 また、第三の本発明の薄片状黒鉛の製造方法において、前記使用温度での表面張力が20mN/m以下の溶媒がフッ素を含む場合に得られる薄片状黒鉛は、微量ではあるがフッ素が吸着または結合し、薄片間の剥離を促進されてなるものであることから、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は、前述した第一の本発明の薄片状黒鉛のそれらと同様になる。
 更に、第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛の厚み、及び面方向サイズはそれぞれ、前述した第一の本発明の薄片状黒鉛のそれらと同様になる。
In addition, the flake graphite obtained by the method for producing flake graphite according to the third aspect of the present invention is, as described above, peeled between the flakes of the flakes of graphite by using a solvent having a surface tension at the operating temperature of 20 mN / m or less. Therefore, the I D / I G and the I G ′ / I G measured by Raman measurement are the same as those of the flaky graphite of the first invention described above.
In the method for producing flaky graphite according to the third aspect of the present invention, the flaky graphite obtained when the solvent having a surface tension at the operating temperature of 20 mN / m or less contains fluorine is adsorbed by a small amount of fluorine. Or, since it is bonded and promoted to exfoliate between the flakes, fluorine relative to the total count of all (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) The ratio of the (−) ion count number is the same as that of the flaky graphite of the first invention described above.
Further, the thickness and the surface direction size of the flaky graphite obtained by the method for producing the flaky graphite of the third invention are the same as those of the flaky graphite of the first invention described above.
 第三の本発明の薄片状黒鉛の製造方法により得られる薄片状黒鉛も、前述した第一の本発明の薄片状黒鉛と同様に、グラフェン粉末として、種々の態様で、種々に応用することができる。 The flaky graphite obtained by the method for producing the flaky graphite of the third aspect of the present invention can also be applied in various forms and in various forms as graphene powder, like the flaky graphite of the first aspect of the present invention. it can.
2.薄片状黒鉛分散液の製造方法
 第三の本発明に係る薄片状黒鉛分散液の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程(分散処理工程)と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程(以下、溶媒除去工程ということがある)と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程(以下、溶媒添加工程ということがある)
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程(溶媒添加工程)と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程(溶媒除去工程)
のいずれかの工程を有することを特徴とする。
2. Method for Producing Flaky Graphite Dispersion A method for producing a flaky graphite dispersion according to the third aspect of the present invention comprises a solvent having a surface tension of 20 mN / m or less at the operating temperature, graphite and a solubility in the solvent of 0.00. A step (dispersion treatment step) of mixing and dispersing a dispersant less than 1 (g / 100 g solvent);
(I) or (ii) below:
(I) a step of removing a solvent having a surface tension at the use temperature of 20 mN / m or less from the mixed solution after the dispersion treatment (hereinafter sometimes referred to as a solvent removal step);
A step of adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed (hereinafter sometimes referred to as a solvent addition step).
(Ii) adding a solvent having a solubility of 5 (g / 100 g solvent) or more to the mixed solution after the dispersion treatment (solvent addition step);
The process of removing the solvent whose surface tension at the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition (solvent removal process)
It has any one of these processes.
 前記使用温度での表面張力が20mN/m以下の溶媒と前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒とが相分離する場合などには、前記(ii)の工程を用いても良い。しかし、中でも高収率で薄片状黒鉛を得られやすい点から、上記(i)の工程を有することが好ましい。 When the phase tension of the solvent having a surface tension at the use temperature of 20 mN / m or less and the solvent having the solubility of the dispersant of 5 (g / 100 g solvent) or more is used, the step (ii) is used. Also good. However, among these, it is preferable to have the step (i) because it is easy to obtain flaky graphite with high yield.
 第三の本発明の薄片状黒鉛分散液の製造方法は、前記本発明に係る薄片状黒鉛の製造方法により得られた薄片状黒鉛を含む混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去し、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加することにより、薄片化されていない黒鉛の残留が少ない薄片状黒鉛分散液の製造することができる。前記分散処理時に含まれていた使用温度での表面張力が20mN/m以下の溶媒を、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒に入れ替えることにより、溶媒相と前記分散剤相の2相を含む不均一系であった分散液を、溶媒及び分散剤を1相とした薄片状黒鉛分散液とすることができる。 A method for producing a flaky graphite dispersion according to the third aspect of the present invention comprises a mixed liquid containing flaky graphite obtained by the method for producing flaky graphite according to the present invention, wherein the surface tension at the use temperature is 20 mN / It is possible to produce a flaky graphite dispersion with little residual graphite that has not been exfoliated by removing a solvent of m or less and adding a solvent having a solubility of 5 (g / 100 g solvent) or more. it can. By replacing the solvent having a surface tension of 20 mN / m or less at the use temperature included in the dispersion treatment with a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more, the solvent phase and the dispersant A dispersion that is a heterogeneous system including two phases can be made into a flaky graphite dispersion having a solvent and a dispersant as one phase.
 第三の本発明の薄片状黒鉛分散液の製造方法は、少なくとも分散処理工程と、溶媒除去工程と、溶媒添加工程とを有するものであり、本発明の効果を損なわない範囲で、必要に応じて更に他の工程を有していてもよいものである。第三の本発明の薄片状黒鉛分散液の製造方法における、分散処理工程と、溶媒除去工程と、溶媒添加工程とについては、前述した第二の本発明の薄片状黒鉛の製造方法、第二の本発明の薄片状黒鉛分散液の製造方法と同様とすることができるので、ここでの説明は省略する。 The method for producing a flaky graphite dispersion according to the third aspect of the present invention includes at least a dispersion treatment step, a solvent removal step, and a solvent addition step, and as necessary without impairing the effects of the present invention. In addition, other steps may be included. Regarding the dispersion treatment step, the solvent removal step, and the solvent addition step in the method for producing a flaky graphite dispersion of the third invention, the method for producing the flaky graphite of the second invention described above, the second Since it can be the same as that of the manufacturing method of the flaky graphite dispersion liquid of this invention of this invention, description here is abbreviate | omitted.
 第三の本発明の薄片状黒鉛分散液の製造方法により得られた薄片状黒鉛分散液中の各成分の含有割合は特に限定されず、適宜調整すればよい。薄片状黒鉛分散液中の黒鉛、溶媒の含有割合、また、分散剤が含まれる場合の分散剤の含有割合は、それぞれ、前述した第一の本発明の薄片状黒鉛分散液のそれらと同様であることが好ましい。 The content ratio of each component in the flaky graphite dispersion obtained by the method for producing a flaky graphite dispersion of the third invention is not particularly limited, and may be appropriately adjusted. The content of graphite and solvent in the flaky graphite dispersion, and the content of the dispersant when a dispersant is included are the same as those of the flaky graphite dispersion of the first invention described above. Preferably there is.
 このように得られた薄片状黒鉛分散液は、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合が、10個数%以上であることが好ましく、更に50個数%以上であることが好ましく、より更に70個数%以上であることが好ましい。導電性及び熱伝導性に優れる点から、薄片の厚みが50nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は多ければ多いほど好ましく、80個数%以上であることがより好ましく、90個数%以上であることがより更に好ましい。中でも、厚みが0.34nm以上10nm以下の薄片状黒鉛の薄片状黒鉛全体に対する含有割合は、10個数%以上であることが好ましく、更に20個数%以上であることが好ましい。 In the flaky graphite dispersion thus obtained, the content ratio of the flaky graphite having a flake thickness of 50 nm or less to the whole flaky graphite is preferably 10% by number or more, and more preferably 50% by number or more. It is preferable that the content is 70% by number or more. From the viewpoint of excellent electrical conductivity and thermal conductivity, the content ratio of the flake graphite having a flake thickness of 50 nm or less to the whole flake graphite is preferably as large as possible, more preferably 80% by number or more, and 90% by number. It is still more preferable that it is above. Among them, the content ratio of the flaky graphite having a thickness of 0.34 nm to 10 nm with respect to the whole flaky graphite is preferably 10% by number or more, and more preferably 20% by number or more.
 第三の本発明の製造方法により得られた薄片状黒鉛分散液は、単層のグラフェン、及び、50nm以下の範囲で複層化したグラフェンの割合が高く、酸化もしていないため、優れた導電性及び熱伝導性を有する黒鉛材料を製造するための予備調製物として優れている。また、第三の本発明の製造方法により得られた薄片状黒鉛分散液に樹脂等を添加して樹脂組成物として用いることができる。 The flaky graphite dispersion obtained by the production method of the third aspect of the present invention has a high ratio of single-layer graphene and multi-layer graphene within a range of 50 nm or less, and is not oxidized. It is excellent as a preparatory preparation for producing a graphite material having heat conductivity and heat conductivity. Further, a resin or the like can be added to the flaky graphite dispersion obtained by the production method of the third present invention and used as a resin composition.
3.黒鉛材料の製造方法
 第三の本発明に係る黒鉛材料の製造方法は、使用温度での表面張力が20mN/m以下の溶媒に、黒鉛と、前記溶媒に対する溶解度が0.1(g/100g溶媒)未満の分散剤とを混合し、分散処理する工程(分散処理工程)と、
 下記(i)又は(ii): 
(i)前記分散処理後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程(溶媒除去工程)と、
 前記溶媒が除去された混合物に、前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程(溶媒添加工程)
(ii)前記分散処理後の混合液に、更に前記分散剤の溶解度が5(g/100g溶媒)以上の溶媒を添加する工程(溶媒添加工程)と、
 前記溶媒添加後の混合液から、前記使用温度での表面張力が20mN/m以下の溶媒を除去する工程(溶媒除去工程)
のいずれかの工程により薄片状黒鉛分散液とする工程と、
 前記薄片状黒鉛分散液を成膜又は成形する工程(成膜又は成形工程)とを有することを特徴とする。
3. Method for Producing Graphite Material A method for producing a graphite material according to the third aspect of the present invention comprises a solvent having a surface tension of 20 mN / m or less at the operating temperature, a graphite and a solubility in the solvent of 0.1 (g / 100 g solvent). ) Less than the dispersant, and a dispersion process (dispersion process);
(I) or (ii) below:
(I) a step of removing a solvent having a surface tension of 20 mN / m or less at the use temperature from the mixed solution after the dispersion treatment (solvent removal step);
A step of adding a solvent having a solubility of the dispersant of 5 (g / 100 g solvent) or more to the mixture from which the solvent has been removed (solvent addition step)
(Ii) adding a solvent having a solubility of 5 (g / 100 g solvent) or more to the mixed solution after the dispersion treatment (solvent addition step);
The process of removing the solvent whose surface tension at the said use temperature is 20 mN / m or less from the liquid mixture after the said solvent addition (solvent removal process)
A step of making a flaky graphite dispersion by any of the steps,
And a step of forming or forming the flaky graphite dispersion (film formation or forming step).
 第三の本発明の黒鉛材料の製造方法は、前記第三の本発明に係る薄片状黒鉛分散液の製造方法により得られた薄片状黒鉛分散液を用いて黒鉛材料を成膜又は成形しているため、導電性及び熱伝導性に優れた黒鉛材料を製造することができる。 A method for producing a graphite material according to a third aspect of the present invention comprises forming or molding a graphite material using the flaky graphite dispersion obtained by the method for producing a flaky graphite dispersion according to the third aspect of the present invention. Therefore, the graphite material excellent in electroconductivity and heat conductivity can be manufactured.
 第三の本発明の黒鉛材料の製造方法は、少なくとも分散処理工程と、溶媒除去工程と、溶媒添加工程と、成膜又は成形工程とを有するものであり、本発明の効果を損なわない範囲で、必要に応じて更に他の工程を有していてもよいものである。第三の本発明の黒鉛材料の製造方法における、分散処理工程と、溶媒除去工程と、溶媒添加工程と、成膜又は成形工程とについては、前述した第二の本発明の薄片状黒鉛の製造方法、第二の本発明の薄片状黒鉛分散液の製造方法、及び第二の本発明の黒鉛材料の製造方法と同様とすることができるので、ここでの説明は省略する。 The method for producing a graphite material according to the third aspect of the present invention includes at least a dispersion treatment step, a solvent removal step, a solvent addition step, and a film formation or molding step, and within a range not impairing the effects of the present invention. Further, other steps may be provided as necessary. Regarding the dispersion treatment step, the solvent removal step, the solvent addition step, and the film formation or molding step in the method for producing a graphite material of the third invention, the production of the flake graphite of the second invention described above Since it can be the same as the method, the method for producing the flaky graphite dispersion of the second invention, and the method for producing the graphite material of the second invention, description thereof is omitted here.
 第三の本発明の黒鉛材料の製造方法により得られる黒鉛材料も、前述した第一の本発明の黒鉛材料と同様に、種々の態様で、種々に応用することができる。 The graphite material obtained by the method for producing a graphite material of the third aspect of the present invention can also be applied in various ways in the same manner as the graphite material of the first aspect of the present invention.
 以下、本発明について実施例を示して具体的に説明する。これらの記載により本発明を制限するものではない。また、特に別途記載のない限り、25℃で実施した。
[評価方法]
<TOF-SIMSによるフッ素検出>
 薄片状黒鉛または黒鉛膜に対して、TOF-SIMS(飛行時間型二次イオン質量分析 Physical Electronics社製、型名:TRIFTII)を使用して、69Gaを照射することで検出されるNEGATIVE2次イオンを、2次イオンマススペクトルとして検出した。
 試料は薄片状黒鉛作製後6カ月以上経過する等、薄片状黒鉛表面への分子吸着の影響が考慮される場合には、1次イオンビーム(69Ga)を用いて最表面をSiO換算にて約1nmエッチングした後、測定を行った。
Hereinafter, the present invention will be specifically described with reference to examples. These descriptions do not limit the present invention. Moreover, it implemented at 25 degreeC unless there was particular description.
[Evaluation methods]
<Fluorine detection by TOF-SIMS>
NEGATIVE secondary ions detected by irradiating 69Ga + on flaky graphite or graphite film using TOF-SIMS (time-of-flight secondary ion mass spectrometry, Physical Electronics, model name: TRIFT II) Was detected as a secondary ion mass spectrum.
When the influence of molecular adsorption on the flaky graphite surface is considered, such as when 6 months or more have passed after the flaky graphite is produced, the outermost surface is converted to SiO 2 using a primary ion beam (69Ga + ). After about 1 nm etching, the measurement was performed.
<X線回折法による(002)面の平均面間隔(d002)測定>
 薄片状黒鉛または黒鉛材料に対して、XRD(粉末X線回折 株式会社リガク製、型名:Miniflex II)を用いて、CuKα線(λ=0.15418nm)による回折パターンから、ピーク位置の2θを特定し、Braggの回折式:λ=2d・sinθより、平均面間隔:dを算出した。通常、黒鉛の平均面間隔(d002)は0.3356nmである。
<Measurement of average spacing (d002) of (002) planes by X-ray diffraction method>
Using XRD (powder X-ray diffraction, manufactured by Rigaku Corporation, model name: Miniflex II) for flake graphite or graphite material, the peak position 2θ is determined from the diffraction pattern by CuKα ray (λ = 0.15418 nm). The average distance between planes: d was calculated from Bragg diffraction formula: λ = 2d · sin θ. Usually, the average interplanar spacing (d002) of graphite is 0.3356 nm.
<薄片状黒鉛の厚み>
 薄片状黒鉛を含む混合液、又は薄片状黒鉛分散液をサンプリングし、使用した分散剤の溶解度が5(g/100g溶媒)以上の溶媒で20~2000倍に希釈した後に孔径0.02μmのメンブレンフィルター上に塗布することで溶媒を濾別しメンブレンフィルター上に薄片を凝集させずに独立した状態で配置させた。更に分散剤の溶解度が5(g/100g溶媒)以上の溶媒(各例において、分散液溶媒に用いた溶媒、比較例2及び5のみは、トルエンの代わりに水)で洗浄することにより分散剤を除去した。薄片状黒鉛を載せた状態でメンブレンフィルターの上に洗浄済みのシリコンウエハーを押し付け、剥がすことでシリコンウエハー上に薄片状黒鉛を転写した。このシリコンウエハー上に独立分散した状態で付着している薄片状黒鉛をAFMで測定し、薄片の厚みを測定した。尚、AFM測定は、島津製作所製ナノサーチ顕微鏡SFT-3500における走査型プローブ顕微鏡(SPM)の機能を用い、コンタクトモード、即ちAFM(Atomic Force Microscope:原子間力顕微鏡)で走査範囲を10μm×10μmにして測定を行った。シリコンウエハー上に付着している薄片状黒鉛におけるシリコンウエハーと薄片状黒鉛の高さの差を薄片状黒鉛の厚みとした。
 薄片状黒鉛の平均厚みは、AFMにより、薄片状黒鉛を合計200個観測できるまで上記操作を繰り返し、AFMで観測された200個分の薄片状黒鉛の厚みの測定値の平均値を算出することで求めた。
<Thickness of flaky graphite>
A mixed liquid containing flaky graphite or a flaky graphite dispersion is sampled, diluted 20 to 2000 times with a solvent having a solubility of 5 (g / 100 g solvent) or more, and a membrane having a pore size of 0.02 μm The solvent was filtered off by coating on the filter, and the flakes were placed on the membrane filter in an independent state without agglomeration. Further, the dispersant is washed with a solvent having a solubility of 5 (g / 100 g solvent) or more (in each example, the solvent used as the dispersion solvent, and only Comparative Examples 2 and 5 are water instead of toluene). Was removed. The flaky graphite was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite placed on the membrane filter. The flake graphite adhering to the silicon wafer in an independently dispersed state was measured by AFM, and the thickness of the flake was measured. The AFM measurement uses the function of the scanning probe microscope (SPM) in the Shimadzu Corporation nanosearch microscope SFT-3500, and the scanning range is 10 μm × 10 μm in the contact mode, that is, AFM (Atomic Force Microscope). The measurement was performed. The difference in height between the silicon wafer and the flaky graphite in the flaky graphite adhering on the silicon wafer was defined as the thickness of the flaky graphite.
The average thickness of flaky graphite is calculated by repeating the above operation until a total of 200 pieces of flaky graphite can be observed by AFM, and calculating the average value of the measured thickness of 200 pieces of flaky graphite observed by AFM. I asked for it.
 <X線光電子分光法による組成分析>
 X線光電子分光法による測定は、X線光電子分光装置(実施例1~7と比較例1~3がThermo Fisher Scientific 社製、製品名VG Theta Probe、実施例8~18と比較例4~6がアルバックファイ社製、製品名PHI5000 Versa Probe)を用い、X線を試料に照射して検出される二次電子のスペクトルを解析して行った。
 なお、照射X線としては単結晶分光AlKα線を用い、中和電子銃を使用した。
炭素原子のピークを拡大し、炭素原子間でsp2結合を形成している結合(結合エネルギー約284.6eV)と炭素原子間でsp3結合を形成している結合(結合エネルギー約285.5eV)とにピーク分離を行うことにより、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合を算出することができる(図6参照)。
<Composition analysis by X-ray photoelectron spectroscopy>
Measurement by X-ray photoelectron spectroscopy was carried out using an X-ray photoelectron spectrometer (Examples 1 to 7 and Comparative Examples 1 to 3 manufactured by Thermo Fisher Scientific, product name VG Theta Probe, Examples 8 to 18 and Comparative Examples 4 to 6). Using a product name PHI5000 Versa Probe manufactured by ULVAC-PHI, Inc. and analyzing the spectrum of secondary electrons detected by irradiating the sample with X-rays.
As the irradiation X-ray, a single crystal spectral AlKα ray was used, and a neutralizing electron gun was used.
A bond in which sp2 bonds are formed between carbon atoms (bond energy: about 284.6 eV) and a bond in which sp3 bonds are formed between carbon atoms (bond energy: about 285.5 eV); By performing peak separation, it is possible to calculate the proportion of bonds that form sp2 bonds between carbon atoms among the bonds of the carbon atoms (see FIG. 6).
<ラマン分光法による分析>
 ラマン分光法による分析は、堀場製作所製のラマン分光分析装置(型名:XploRA)を用いて行った。光源は532nmレーザーを使用した。得られたチャートのベースライン補正を行った後、1300~1400cm-1(I)、1580~1620cm-1(I)、2600~2800cm-1(IG’)の各ピーク強度を算出し、ピーク強度比I/I、IG’/Iを求めた。ラマン測定は、測定する黒鉛膜の位置を変えて10回測定し、後述するピーク強度はそれらの平均値を示した。
 なお、詳細な測定条件は以下の通りで行った。
分光器:焦点距離=200mmのCzerny Turner型
検出器:分解能(100μmのスリット幅)2~15cm-1
レーザー出力:20~25mW
<Analysis by Raman spectroscopy>
Analysis by Raman spectroscopy was performed using a Raman spectroscopy analyzer (model name: XploRA) manufactured by Horiba. A 532 nm laser was used as the light source. After the baseline correction of the obtained chart, the peak intensities of 1300 to 1400 cm −1 (I D ), 1580 to 1620 cm −1 (I G ), and 2600 to 2800 cm −1 (I G ′ ) are calculated. The peak intensity ratios I D / I G and I G ′ / I G were determined. The Raman measurement was performed 10 times while changing the position of the graphite film to be measured, and the peak intensity described later showed an average value thereof.
Detailed measurement conditions were as follows.
Spectrometer: Czerny Turner type detector with focal length = 200 mm: Resolution (100 μm slit width) 2 to 15 cm −1
Laser power: 20-25mW
<導電性>
 黒鉛膜について、4探針法による抵抗率計(株式会社三菱化学アナリテック製、型名:ロレスタGP MCP-T610)によって表面抵抗値を測定した。
<Conductivity>
The surface resistance of the graphite film was measured with a resistivity meter (model name: Loresta GP MCP-T610, manufactured by Mitsubishi Chemical Analytech Co., Ltd.) using a four-probe method.
<熱伝導性>
 黒鉛膜を濾過の際に使用したメンブレンフィルターから剥離し、直径18mmの円以上の面積を有する黒鉛自立膜の形成を試みた。自立膜が形成できたものもあれば、複数の小片に分かれて自立膜が形成できなかったものがあった。自立膜が形成できたものについて、膜の面内方向の熱拡散率を株式会社ベテルのサーモウエイブアナライザTA3(周期加熱放射測温法)を用いて測定した。
<Thermal conductivity>
The graphite film was peeled off from the membrane filter used for the filtration, and an attempt was made to form a graphite free-standing film having an area of a circle having a diameter of 18 mm or more. Some were able to form a self-supporting film, while others were not able to form a self-supporting film by being divided into a plurality of small pieces. About the thing in which the self-supporting film | membrane was able to be formed, the thermal diffusivity of the surface direction of the film | membrane was measured using the thermowave analyzer TA3 (period heating radiation temperature measuring method) of Bethel.
1.実施例Iシリーズ(第一及び第二の発明)
(実施例1-1:薄片状黒鉛の製造)
 フッ素系溶剤(ハイドロフルオロエーテル(C49OC25)、3M社製Novec7200、表面張力13.6mN/m)10mL(14.3g)に黒鉛(日本黒鉛社製ACB-100)2mgと分散剤(東京化成工業社製ドデシルベンゼンスルホン酸;前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 25(g/100g溶媒)、25℃における粘度 1200mPa・s)50mgを混合し、ボールミル(レッチェ社製ミキサーミル)にてステンレスボールと共に10Hz30分処理することにより、薄片状黒鉛1を得た。
 薄片状黒鉛1を含む混合液から少量サンプリングし、孔径0.02ミクロンのメンブレンフィルター(GEヘルスケアジャパン社製、アノディスク、材質:アルミナ、以下別途記載のない限り同様)でフッ素系溶媒を濾別し水で洗浄することにより分散剤を除去した薄片状黒鉛1についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、薄片状黒鉛1のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
1. Example I series (first and second inventions)
(Example 1-1: Production of flaky graphite)
Fluorine-based solvent (hydrofluoroether (C 4 F 9 OC 2 H 5 ), 3M Novec7200, surface tension 13.6 mN / m) 10 mL (14.3 g) and graphite (Nippon Graphite Co., Ltd. ACB-100) 2 mg Dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid; solubility in fluorine-based solvent less than 0.1 (g / 100 g solvent), solubility in water 25 (g / 100 g solvent), viscosity at 25 ° C. 1200 mPa · s) 50 mg was mixed, and flaky graphite 1 was obtained by processing with a stainless steel ball at 10 Hz for 30 minutes in a ball mill (mixer mill manufactured by Lecce).
Sample a small amount from the mixture containing flaky graphite 1 and filter the fluorine-based solvent with a membrane filter with a pore size of 0.02 microns (GE Healthcare Japan, Anodisco, material: alumina, unless otherwise stated). Separately, fluorine was detected by TOF-SIMS measurement for the flake graphite 1 from which the dispersant was removed by washing with water, and the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was It was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the flaky graphite 1 by the X-ray diffraction method was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
(実施例1-2:薄片状黒鉛分散液の製造)
 実施例1-1で得られた薄片状黒鉛1を含む混合液から、フッ素系溶剤を除去し、水(前記分散剤の溶解度 25(g/100g溶媒))10mLを添加することにより、沈殿の無い薄片状黒鉛分散液1を得た(分散液に分散した薄片状黒鉛の収率100%)。
 なお当該収率は、薄片状黒鉛分散液を1時間静置し、沈殿の生じないことを確認することで、沈殿するほど粗大な黒鉛は残存しないこと、から収率100%と判断した。
 また、薄片状黒鉛分散液1を少量サンプリングし、孔径0.02ミクロンのメンブレンフィルター上に塗布することでフッ素系溶媒を濾別しメンブレンフィルター上に薄片を凝集させずに独立した状態で配置させた。更に水で洗浄することにより分散剤を除去した薄片状黒鉛1についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、薄片状黒鉛のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 更に、当該薄片状黒鉛1を載せた状態でメンブレンフィルターの上に洗浄済みのシリコンウエハーを押し付け、剥がすことでシリコンウエハー上に薄片状黒鉛1を転写した。このシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛1をAFMで測定し、薄片の厚みを測定したところ、測定した薄片の厚みは、2nm~10nmの範囲であり、平均厚みは7nmであった。
(Example 1-2: Production of flaky graphite dispersion)
The fluorine-based solvent was removed from the mixed solution containing flaky graphite 1 obtained in Example 1-1, and 10 mL of water (solubility of the dispersing agent 25 (g / 100 g solvent)) was added to thereby precipitate. A flaky graphite dispersion 1 was obtained (yield of flaky graphite 100% dispersed in the dispersion).
The yield was determined to be 100% because the flaky graphite dispersion was allowed to stand for 1 hour and it was confirmed that precipitation did not occur.
In addition, a small amount of flaky graphite dispersion 1 is sampled and applied onto a membrane filter having a pore size of 0.02 micron, so that the fluorinated solvent is filtered and placed in an independent state without agglomerating the flakes on the membrane filter. It was. Further, when fluorine was detected by TOF-SIMS measurement for the flake graphite 1 from which the dispersant was removed by washing with water, the ratio of the number of fluorine (−) ions to the total number of (−) ions was 1. 4%. Further, when the average interplanar spacing (d002) of the (002) plane of the flaky graphite by the X-ray diffraction method was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, the flaky graphite 1 was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite 1 placed thereon. The flaky graphite 1 existing in an independently dispersed state on this silicon wafer was measured by AFM, and the thickness of the flakes was measured. there were.
(実施例1-3:黒鉛膜の製造)
 実施例1-2で得られた薄片状黒鉛分散液1を濾過し、水で洗浄することにより、直径18mm、厚み30μmの円形の黒鉛膜1を得た。
 黒鉛膜1についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜1のX線回折法による(002)面の平均面間隔(d002)を測定した。図1に、黒鉛膜1のX線回折法による測定結果を示す。黒鉛膜1のピークは2θ=26.56°に位置し、平均面間隔(d002)は0.3356nmと算出され、原料黒鉛のACB-100と同様であった。
 また、黒鉛膜1についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、81%であった。
 図2に、本発明に係る黒鉛膜1のSEM写真を示す。
(Example 1-3: Production of graphite film)
The flaky graphite dispersion 1 obtained in Example 1-2 was filtered and washed with water to obtain a circular graphite film 1 having a diameter of 18 mm and a thickness of 30 μm.
When fluorine was detected by TOF-SIMS measurement on the graphite film 1, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, the average interplanar spacing (d002) of the (002) plane of the graphite film 1 was measured by the X-ray diffraction method. In FIG. 1, the measurement result by the X-ray-diffraction method of the graphite film 1 is shown. The peak of graphite film 1 was located at 2θ = 26.56 °, and the average interplanar spacing (d002) was calculated to be 0.3356 nm, which was the same as that of ACB-100 of raw material graphite.
Further, when the graphite film 1 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 81%.
FIG. 2 shows an SEM photograph of the graphite film 1 according to the present invention.
(実施例2-1:薄片状黒鉛の製造)
 実施例1-1において、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)に変更した以外は、実施例1-1と同様にして薄片状黒鉛2を得た。
(Example 2-1: Production of flaky graphite)
In Example 1-1, the dispersant was tween 20 (polyoxyethylene (20) sorbitan monolaurate manufactured by Tokyo Chemical Industry Co., Ltd., solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 Except that (g / 100 g solvent) was exceeded and the viscosity at 25 ° C. was changed to 370 mPa · s, flaky graphite 2 was obtained in the same manner as in Example 1-1.
(実施例2-2:薄片状黒鉛分散液の製造)
 実施例2-1で得られた薄片状黒鉛2を含む混合液から、フッ素系溶剤を除去し、水10mLを添加することにより、沈殿の無い薄片状黒鉛分散液2を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液2を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛2を作製し、AFMにより薄片状黒鉛2の厚みを測定したところ、3nm~12nmの範囲であり、平均厚みは8nmであった。
(Example 2-2: Production of flaky graphite dispersion)
The fluorinated solvent was removed from the mixed liquid containing flaky graphite 2 obtained in Example 2-1, and 10 mL of water was added to obtain flaky graphite dispersion 2 without precipitation (into the dispersion). (Yield of dispersed flaky graphite 100%). Using the flaky graphite dispersion 2, the flaky graphite 2 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 2 was measured by AFM. The range was from 3 nm to 12 nm, and the average thickness was 8 nm.
(実施例2-3:黒鉛膜の製造)
 実施例2-2で得られた薄片状黒鉛分散液2を濾過し、水で洗浄することにより、黒鉛膜2を得た。
 黒鉛膜2についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.3%であった。また、黒鉛膜2のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜2についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、78%であった。
(Example 2-3: Production of graphite film)
The flaky graphite dispersion 2 obtained in Example 2-2 was filtered and washed with water to obtain a graphite film 2.
When the fluorine was detected in the graphite film 2 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.3%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 2 was measured by the X-ray diffraction method, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 2 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
(実施例3-1:薄片状黒鉛の製造)
 実施例1-1において、分散剤を東京化成工業社製span20(ソルビタンモノラウレート、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 4200mPa・s)に変更した以外は、実施例1-1と同様にして薄片状黒鉛3を得た。
(Example 3-1: Production of flaky graphite)
In Example 1-1, the dispersant was span20 (Sorbitan monolaurate, a solubility in the fluorine-based solvent of less than 0.1 (g / 100 g solvent) manufactured by Tokyo Chemical Industry Co., Ltd., and a solubility in isopropyl alcohol of 10 (g / 100 g solvent). Except that the viscosity at 25 ° C. was changed to 4200 mPa · s), flaky graphite 3 was obtained in the same manner as in Example 1-1.
(実施例3-2:薄片状黒鉛分散液の製造)
 実施例3-1で得られた薄片状黒鉛3を含む混合液から、フッ素系溶剤を除去し、イソプロピルアルコール10mLを添加することにより、沈殿の無い薄片状黒鉛分散液3を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液3を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛3を作製し、AFMにより薄片状黒鉛3の厚みを測定したところ、5nm~41nmの範囲であり、平均厚みは33nmであった。
(Example 3-2: Production of flaky graphite dispersion)
The fluorinated solvent was removed from the mixed liquid containing the flaky graphite 3 obtained in Example 3-1, and 10 mL of isopropyl alcohol was added to obtain a flaky graphite dispersion 3 without precipitation (dispersion liquid). The yield of flaky graphite dispersed in 100%). Using the flaky graphite dispersion 3, the flaky graphite 3 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 3 was measured by AFM. The range was 5 nm to 41 nm, and the average thickness was 33 nm.
(実施例3-3:黒鉛膜の製造)
 実施例3-2で得られた薄片状黒鉛分散液3を濾過し、イソプロピルアルコールで洗浄することにより、黒鉛膜3を得た。
 黒鉛膜3についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜3のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜3についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、76%であった。
(Example 3-3: Production of graphite film)
The flaky graphite dispersion 3 obtained in Example 3-2 was filtered and washed with isopropyl alcohol to obtain a graphite film 3.
When fluorine was detected in the graphite film 3 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 3 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 3 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
(実施例4-1:薄片状黒鉛の製造)
 実施例1-1において、分散剤をビックケミージャパン製BYK-9076(ポリウレタン含有、高分子量共重合物のアルキルアンモニウム塩、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 15(g/100g溶媒)、25℃における粘度 1050mPa・s)に変更した以外は、実施例1-1と同様にして薄片状黒鉛4を得た。
(Example 4-1: Production of flaky graphite)
In Example 1-1, the dispersing agent was BYK-9076 manufactured by Big Chemie Japan (polyurethane-containing, alkylammonium salt of high molecular weight copolymer, solubility in fluorine-based solvent was less than 0.1 (g / 100 g solvent), and into water. Exfoliated graphite 4 was obtained in the same manner as in Example 1-1 except that the solubility was 15 (g / 100 g solvent) and the viscosity at 25 ° C. was 1050 mPa · s.
(実施例4-2:薄片状黒鉛分散液の製造)
 実施例4-1で得られた薄片状黒鉛4を含む混合液から、フッ素系溶剤を除去し、水10mLを添加することにより、沈殿の無い薄片状黒鉛分散液4を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液4を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛4を作製し、AFMにより薄片状黒鉛4の厚みを測定したところ、3nm~11nmの範囲であり、平均厚みは8nmであった。
(Example 4-2: Production of flaky graphite dispersion)
The fluorinated solvent was removed from the mixed solution containing the flaky graphite 4 obtained in Example 4-1, and 10 mL of water was added to obtain a flaky graphite dispersion 4 without precipitation (into the dispersion). (Yield of dispersed flaky graphite 100%). Using flaky graphite dispersion 4, flaky graphite 4 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of flaky graphite 4 was measured by AFM. The range was from 3 nm to 11 nm, and the average thickness was 8 nm.
(実施例4-3:黒鉛膜の製造)
 実施例4-2で得られた薄片状黒鉛分散液4を濾過し、水で洗浄することにより、黒鉛膜4を得た。
 黒鉛膜4についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜4のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜4についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、78%であった。
(Example 4-3: Production of graphite film)
The flaky graphite dispersion 4 obtained in Example 4-2 was filtered and washed with water to obtain a graphite film 4.
When fluorine was detected in the graphite film 4 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 4 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 4 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
(実施例5-1:薄片状黒鉛の製造)
 実施例1-1において、分散剤をシグマアルドリッチ製 分岐ポリエチレンイミン(数平均分子量Mn60000、50%水溶液)(前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 10000mPa・s)に変更した以外は、実施例1-1と同様にして薄片状黒鉛5を得た。
(Example 5-1: Production of flaky graphite)
In Example 1-1, the dispersant was a branched polyethyleneimine (number average molecular weight Mn 60000, 50% aqueous solution) manufactured by Sigma-Aldrich (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 ( Except that the viscosity was changed to over 10,000 gPa · s) at 25 ° C., flake graphite 5 was obtained in the same manner as in Example 1-1.
(実施例5-2:薄片状黒鉛分散液の製造)
 実施例5-1で得られた薄片状黒鉛5を含む混合液から、フッ素系溶剤を除去し、水10mLを添加することにより、薄片状黒鉛分散液5を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液5を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛5を作製し、AFMにより薄片状黒鉛5の厚みを測定したところ、7nm~48nmの範囲であり、平均厚みは35nmであった。
(Example 5-2: Production of flaky graphite dispersion)
The fluorinated solvent was removed from the mixed solution containing the flake graphite 5 obtained in Example 5-1, and 10 mL of water was added to obtain a flake graphite dispersion 5 (the flakes dispersed in the dispersion). Yield of glassy graphite 100%). Using the flaky graphite dispersion 5, the flaky graphite 5 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 5 was measured by AFM. The range was 7 nm to 48 nm, and the average thickness was 35 nm.
(実施例5-3:黒鉛膜の製造)
 実施例5-2で得られた比較薄片状黒鉛分散液5を濾過し、水で洗浄することにより、黒鉛膜5を得た。
 黒鉛膜5についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜5のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜5についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、76%であった。
(Example 5-3: Production of graphite film)
The comparative flaky graphite dispersion 5 obtained in Example 5-2 was filtered and washed with water to obtain a graphite film 5.
When fluorine was detected in the graphite film 5 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 5 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 5 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
(実施例6-1:薄片状黒鉛の製造)
 実施例1-1において、分散剤を東京化成工業社製ドデシルベンゼンスルホン酸ナトリウム(ハード型)(前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 20(g/100g溶媒)、25℃で固体)に変更した以外は、実施例1-1と同様にして薄片状黒鉛6を得た。
(Example 6-1: Production of flaky graphite)
In Example 1-1, a dispersant was sodium dodecylbenzenesulfonate (hard type) manufactured by Tokyo Chemical Industry Co., Ltd. (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 20 (g / Exfoliated graphite 6 was obtained in the same manner as in Example 1-1 except that it was changed to 100 g solvent) and solid at 25 ° C.
(実施例6-2:薄片状黒鉛分散液の製造)
 実施例6-1で得られた薄片状黒鉛6を含む混合液から、フッ素系溶剤を除去し、水10mLを添加することにより、沈殿の無い薄片状黒鉛分散液6を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液6を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛6を作製し、AFMにより薄片状黒鉛6の厚みを測定したところ、3nm~11nmの範囲であり、平均厚みは9nmであった。
(Example 6-2: Production of flaky graphite dispersion)
The fluorinated solvent was removed from the mixed solution containing the flaky graphite 6 obtained in Example 6-1 and 10 mL of water was added to obtain a flaky graphite dispersion 6 without precipitation (into the dispersion). (Yield of dispersed flaky graphite 100%). Using flaky graphite dispersion 6, flaky graphite 6 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of flaky graphite 6 was measured by AFM. The range was 3 nm to 11 nm, and the average thickness was 9 nm.
(実施例6-3:黒鉛膜の製造)
 実施例6-2で得られた薄片状黒鉛分散液6を濾過し、水で洗浄することにより、黒鉛膜6を得た。
 黒鉛膜6についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.5%であった。また、黒鉛膜6のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜6についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、80%であった。
(Example 6-3: Production of graphite film)
The flaky graphite dispersion 6 obtained in Example 6-2 was filtered and washed with water to obtain a graphite film 6.
When fluorine was detected in the graphite film 6 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.5%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 6 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 6 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 80%.
(比較例1-1:比較薄片状黒鉛の製造)
 実施例1-1において、分散剤をAGCセイミケミカル製サーフロンS-420(パーフルオロアルキル基を有する界面活性剤)(前記フッ素系溶剤に対する溶解度 0.7(g/100g溶媒)、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 800mPa・s)に変更した以外は、実施例1-1と同様にして比較薄片状黒鉛1を得た。
(Comparative Example 1-1: Production of comparative flaky graphite)
In Example 1-1, the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical (solubility 0.7 (g / 100 g solvent) in the fluorinated solvent, and isopropyl alcohol. Comparative flaky graphite 1 was obtained in the same manner as in Example 1-1 except that the solubility was changed to 10 (g / 100 g solvent) excess and the viscosity at 25 ° C. was 800 mPa · s.
(比較例1-2:比較薄片状黒鉛分散液の製造)
 比較例1-1で得られた比較薄片状黒鉛1を含む混合液から、フッ素系溶剤を除去し、イソプロピルアルコール10mLを添加することにより、比較薄片状黒鉛分散液1を得た。当該比較薄片状黒鉛分散液1は沈殿が生じていた。比較薄片状黒鉛分散液1の上澄み液を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する比較薄片状黒鉛1を作製し、AFMにより比較薄片状黒鉛1の厚みを測定したところ、63nm~260nmの範囲であり、平均厚みは198nmであった。沈殿を含めると、実際はより厚い薄片状黒鉛が存在すると考えられる。
(Comparative Example 1-2: Production of comparative flaky graphite dispersion)
The fluorinated solvent was removed from the mixed liquid containing the comparative flaky graphite 1 obtained in Comparative Example 1-1, and 10 mL of isopropyl alcohol was added to obtain a comparative flaky graphite dispersion 1. The comparative flaky graphite dispersion 1 had a precipitate. Using the supernatant of comparative flaky graphite dispersion 1, comparative flaky graphite 1 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 1-2. When the thickness was measured, it was in the range of 63 nm to 260 nm, and the average thickness was 198 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
(比較例1-3:比較黒鉛膜の製造)
 比較例1-2で得られた比較薄片状黒鉛分散液1を濾過し、イソプロピルアルコールで洗浄することにより、比較黒鉛膜1を得た。図3に、比較黒鉛膜1のSEM写真を示す。
 比較黒鉛膜1についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合はノイズを除くと0であった。また、比較黒鉛膜1のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
(Comparative Example 1-3: Production of comparative graphite film)
The comparative flaky graphite dispersion liquid 1 obtained in Comparative Example 1-2 was filtered and washed with isopropyl alcohol to obtain a comparative graphite film 1. FIG. 3 shows an SEM photograph of the comparative graphite film 1.
When the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 1, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 0 excluding noise. Further, when the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 1 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
(比較例2-2:比較薄片状黒鉛分散液の製造)
 実施例1-2において水の代わりにトルエン(前記分散剤の溶解度が1(g/100g溶媒))を用いた以外は実施例1-2と同様にして比較薄片状黒鉛分散液2を得た。当該比較薄片状黒鉛分散液2は沈殿が生じていた。比較薄片状黒鉛分散液2の上澄み液を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する比較薄片状黒鉛2を作製し、AFMにより比較薄片状黒鉛2の厚みを測定したところ、75~230nmの範囲であり、平均厚みは177nmであった。沈殿を含めると、実際はより厚い薄片状黒鉛が存在すると考えられる。
(Comparative Example 2-2: Production of comparative flaky graphite dispersion)
A comparative flaky graphite dispersion 2 was obtained in the same manner as in Example 1-2, except that toluene (solubility of the dispersant is 1 (g / 100 g solvent)) was used instead of water in Example 1-2. . In the comparative flaky graphite dispersion 2, precipitation occurred. Using the supernatant of the comparative flaky graphite dispersion 2, the comparative flaky graphite 2 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2. When the thickness was measured, it was in the range of 75 to 230 nm, and the average thickness was 177 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
(比較例2-3:比較黒鉛膜の製造)
 比較例2-2で得られた比較薄片状黒鉛分散液2を濾過し、水で洗浄することにより、比較黒鉛膜2を得た。
 比較黒鉛膜2についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は、ノイズを除くと0であった。また、比較黒鉛膜2のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
(Comparative Example 2-3: Production of comparative graphite film)
The comparative flaky graphite dispersion 2 obtained in Comparative Example 2-2 was filtered and washed with water to obtain a comparative graphite film 2.
When the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 2, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 0 excluding noise. Further, when the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 2 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
(比較例3-1:比較薄片状黒鉛の製造)
 実施例1-1において、前記フッ素系溶剤を水(表面張力(25℃)72mN/m)に変更し、分散剤をAGCセイミケミカル製サーフロンS-420(パーフルオロアルキル基を有する界面活性剤)(水に対する溶解度 0.1(g/100g溶媒)未満、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 800mPa・s)に変更した以外は、実施例1-1と同様にして比較薄片状黒鉛3を得た。
(Comparative Example 3-1: Production of comparative flaky graphite)
In Example 1-1, the fluorinated solvent was changed to water (surface tension (25 ° C.) 72 mN / m), and the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical. (Soluble in water less than 0.1 (g / 100 g solvent), solubility in isopropyl alcohol more than 10 (g / 100 g solvent), viscosity at 25 ° C. 800 mPa · s) Comparative flaky graphite 3 was thus obtained.
(比較例3-2:比較薄片状黒鉛分散液の製造)
 比較例3-1で得られた比較薄片状黒鉛3を含む混合液から、水を除去し、イソプロピルアルコール10mLを添加することにより、比較薄片状黒鉛分散液3を得た。当該比較薄片状黒鉛分散液3は沈殿が生じていた。比較薄片状黒鉛分散液3の上澄み液を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する比較薄片状黒鉛3を作製し、AFMにより比較薄片状黒鉛3の厚みを測定したところ、70nm~250nmの範囲であり、平均厚みは182nmであった。沈殿を含めると、実際はより厚い薄片状黒鉛が存在すると考えられる。
(Comparative Example 3-2: Production of Comparative Flaky Graphite Dispersion)
Water was removed from the mixed solution containing the comparative flaky graphite 3 obtained in Comparative Example 3-1, and 10 mL of isopropyl alcohol was added to obtain a comparative flaky graphite dispersion 3. The comparative flaky graphite dispersion 3 had a precipitate. Using the supernatant of the comparative flaky graphite dispersion 3, the comparative flaky graphite 3 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2. When the thickness was measured, it was in the range of 70 nm to 250 nm, and the average thickness was 182 nm. Including precipitation, it is believed that there is actually a thicker flake graphite.
(比較例3-3:比較黒鉛膜の製造)
 比較例3-2で得られた比較薄片状黒鉛分散液3を濾過し、イソプロピルアルコールで洗浄することにより、比較黒鉛膜3を得た。
 比較黒鉛膜3についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は、ノイズを除くと0であった。比較黒鉛膜3のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
(Comparative Example 3-3: Production of comparative graphite film)
The comparative flaky graphite dispersion 3 obtained in Comparative Example 3-2 was filtered and washed with isopropyl alcohol to obtain a comparative graphite film 3.
When fluorine was detected in the comparative graphite film 3 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 0 excluding noise. When the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 3 was measured by the X-ray diffraction method, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
 実施例1~6及び比較例1~3の評価結果を表1に示す。 Table 1 shows the evaluation results of Examples 1 to 6 and Comparative Examples 1 to 3.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 表1の結果から、実施例1~6においては、薄片状黒鉛を収率100%と高収率で得ることができ、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液を得ることができ、導電性及び熱伝導性に優れた黒鉛膜を得ることができた。
 自立膜が形成された実施例1,2,4及び6の黒鉛膜について熱拡散率を測定したところ、鉄(1.4×10-5/s)、SUS304(ステンレス)(0.4×10-5/s)等に比べて同等または高い値を示し、熱伝導性に優れていることが確認された。
 一方、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m以下のフッ素系溶媒を用いたが、当該溶媒に溶解性が高い分散剤を用いた比較例1では、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。比較例1の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜1は抵抗値が高く、導電性に劣ることが示された。
 また、比較例2でも、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。比較例2では、分散液を調製する際に、分散剤の溶解度が5(g/100g溶媒)未満の溶媒を添加して分散液を調製したため沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜2は抵抗値が高く、導電性に劣ることが示された。
 また、比較例3でも、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m超過の溶媒と、当該溶媒に溶解度が低い分散剤を組み合わせて用いた比較例3では、分散液に沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜3は抵抗値が高く、導電性に劣ることが示された。
From the results of Table 1, in Examples 1 to 6, flaky graphite can be obtained at a high yield of 100%, and a flaky graphite dispersion with little residual graphite that is not flaky is obtained. And a graphite film excellent in conductivity and thermal conductivity could be obtained.
When the thermal diffusivity was measured for the graphite films of Examples 1, 2, 4 and 6 in which a self-supporting film was formed, iron (1.4 × 10 −5 m 2 / s), SUS304 (stainless steel) (0.4 × 10 −5 m 2 / s) or the like, which is equal or higher than that, and was confirmed to be excellent in thermal conductivity.
On the other hand, a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent for dispersing graphite. In Comparative Example 1 using a dispersant having high solubility in the solvent, the time-of-flight type 2 No flaky graphite with a ratio of fluorine (-) ion count to 0.5% or more of the total count of all (-) ions measured using secondary ion mass spectrometry (TOF-SIMS) It was. In the dispersion of Comparative Example 1, precipitation occurred, and the yield of flaky graphite having a thickness of 50 nm or less dispersed in the dispersion was 0%. Moreover, it was shown that the obtained comparative graphite film 1 has a high resistance value and is inferior in conductivity.
Also in Comparative Example 2, the ratio of the number of fluorine (−) ions to the total number of (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained. In Comparative Example 2, when the dispersion was prepared, the dispersion was prepared by adding a solvent having a dispersant solubility of less than 5 (g / 100 g solvent), so that precipitation occurred and the dispersion was 50 nm or less dispersed in the dispersion. The yield of flaky graphite was 0%. Moreover, it was shown that the obtained comparative graphite film 2 has a high resistance value and is inferior in conductivity.
Also in Comparative Example 3, the ratio of the number of fluorine (−) ions to the total number of (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained. In Comparative Example 3 in which a solvent having a surface tension at a working temperature of more than 20 mN / m in combination with a dispersant having low solubility in the solvent was used as a solvent for dispersing the graphite, precipitation occurred in the dispersion, resulting in dispersion. The yield of flaky graphite of 50 nm or less dispersed in the liquid was 0%. Moreover, it was shown that the obtained comparative graphite film 3 has a high resistance value and is inferior in conductivity.
(実施例8-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 フッ素系溶剤(ハイドロフルオロエーテル(C49OC25)、3M社製Novec7200、表面張力13.6mN/m)14mL(20.0g)に黒鉛(日本黒鉛社製ACB-100)20mgと分散剤(東京化成工業社製ドデシルベンゼンスルホン酸;前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 25(g/100g溶媒)、25℃における粘度 1200mPa・s)100mgを混合し、ボールミル(レッチェ社製ミキサーミル)にてステンレスボールと共に20Hz30分処理することにより、薄片状黒鉛8を得た。
(Example 8-1, 2: Production of flaky graphite and flaky graphite dispersion)
Fluorine solvent (hydrofluoroether (C 4 F 9 OC 2 H 5 ), 3M Novec 7200, surface tension 13.6 mN / m) 14 mL (20.0 g) and graphite (Nippon Graphite Co., Ltd. ACB-100) 20 mg Dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid; solubility in fluorine-based solvent less than 0.1 (g / 100 g solvent), solubility in water 25 (g / 100 g solvent), viscosity at 25 ° C. 1200 mPa · s) 100 mg was mixed, and flaky graphite 8 was obtained by processing with a stainless steel ball at 20 Hz for 30 minutes in a ball mill (a mixer mill manufactured by Lecce).
 薄片状黒鉛8を含む混合液からフッ素溶媒をデカンテーション及び減圧処理により除去し、水を20mL添加して薄片状黒鉛分散液8を作製した(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液8を水で200倍に希釈した後に孔径0.02ミクロンのメンブレンフィルター上に塗布することで水を濾別しメンブレンフィルター上に薄片を凝集させずに独立した状態で配置させた。更に水で洗浄することにより分散剤を除去した薄片状黒鉛8について、TOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、薄片状黒鉛8のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 更に、当該薄片状黒鉛8を載せた状態でメンブレンフィルターの上に洗浄済みのシリコンウエハーを押し付け、剥がすことでシリコンウエハー上に薄片状黒鉛8を転写した。このシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛8をAFMで測定し、薄片の厚みを測定した。この操作を繰り返し、薄片状黒鉛8の平均厚みを求めたところ、26nmであった。また、測定した薄片の内10nm未満の厚みの薄片が32個数%であり、10nm以上50nm以下の範囲の厚みの薄片が62個数%であり、50nm超過の厚みの薄片は6個数%であることを確認した。
 図4に、薄片状黒鉛8のAFM写真を示す。
The fluorine solvent was removed from the mixture containing flaky graphite 8 by decantation and reduced pressure treatment, and 20 mL of water was added to prepare flaky graphite dispersion 8 (yield of flaky graphite dispersed in dispersion 100% ). The flake graphite dispersion 8 is diluted 200 times with water and then applied onto a membrane filter having a pore size of 0.02 microns to separate the water and place the flakes on the membrane filter in an independent state without agglomeration. It was. Further, regarding the flaky graphite 8 from which the dispersant was removed by washing with water, fluorine was detected by TOF-SIMS measurement. As a result, the ratio of the number of fluorine (−) ions to the total number of (−) ions was It was 1.4%. Further, when an average interplanar spacing (d002) of the (002) plane of the flaky graphite 8 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Furthermore, the flaky graphite 8 was transferred onto the silicon wafer by pressing and removing the washed silicon wafer on the membrane filter with the flaky graphite 8 placed thereon. The flake graphite 8 existing in a state of being dispersed independently on the silicon wafer was measured by AFM, and the thickness of the flake was measured. This operation was repeated, and the average thickness of the flaky graphite 8 was determined to be 26 nm. Of the measured flakes, flakes having a thickness of less than 10 nm are 32% by number, flakes having a thickness in the range of 10 nm to 50 nm are 62%, and flakes having a thickness exceeding 50 nm are 6%. It was confirmed.
FIG. 4 shows an AFM photograph of the flaky graphite 8.
(実施例8-3:黒鉛膜の製造)
 実施例8-2で得られた薄片状黒鉛分散液8を濾過し、水で洗浄することにより、直径36mm、厚み20μmの円形の黒鉛膜8を得た。
 黒鉛膜8についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。
(Example 8-3: Production of graphite film)
The flaky graphite dispersion 8 obtained in Example 8-2 was filtered and washed with water to obtain a circular graphite film 8 having a diameter of 36 mm and a thickness of 20 μm.
When fluorine was detected in the graphite film 8 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%.
 また、黒鉛膜8のX線回折法による(002)面の平均面間隔(d002)を測定した。黒鉛8のピークは2θ=26.56°に位置し、平均面間隔(d002)は0.3356nmと算出され、原料黒鉛のACB-100と同様であった。 Further, the average interplanar spacing (d002) of the (002) plane of the graphite film 8 was measured by the X-ray diffraction method. The peak of graphite 8 was located at 2θ = 26.56 °, and the average interplanar spacing (d002) was calculated to be 0.3356 nm, which was the same as that of ACB-100 of raw material graphite.
 黒鉛膜8についてX線光電子分光法による測定を行った。図5に、黒鉛膜8のX線光電子分光法による測定結果を示す。炭素原子の組成は95.2%であり、酸素原子の組成は4.2%であった。図6にX線光電子分光法による測定結果のうち、炭素原子のピークの拡大図を示す。前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、81%であった。X線光電子分光法によればフッ素原子の組成は0%と測定された。 The graphite film 8 was measured by X-ray photoelectron spectroscopy. In FIG. 5, the measurement result by the X-ray photoelectron spectroscopy of the graphite film 8 is shown. The composition of carbon atoms was 95.2% and the composition of oxygen atoms was 4.2%. FIG. 6 shows an enlarged view of the peak of the carbon atom in the measurement result by X-ray photoelectron spectroscopy. Of the bonds possessed by the carbon atoms, the ratio of the bonds forming sp2 bonds between the carbon atoms was 81%. According to X-ray photoelectron spectroscopy, the composition of fluorine atoms was measured as 0%.
 また、黒鉛膜8についてラマン測定を行った。図7に、黒鉛膜8のラマン分光法による測定結果の一例を示す。ラマン測定は、測定する黒鉛膜の位置を変えて10回測定し、後述するピーク強度はそれらの平均値を示した。その結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.43であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。 Further, Raman measurement was performed on the graphite film 8. In FIG. 7, an example of the measurement result by the Raman spectroscopy of the graphite film 8 is shown. The Raman measurement was performed 10 times while changing the position of the graphite film to be measured, and the peak intensity described later showed an average value thereof. As a result, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is 0.08, The results confirming that there are few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.43, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例9-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)に変更した以外は、実施例8-1と同様にして薄片状黒鉛9を得た。
(Example 9-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the dispersant was tween 20 (polyoxyethylene (20) sorbitan monolaurate manufactured by Tokyo Chemical Industry Co., Ltd., solubility in the fluorinated solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 Except that (g / 100 g solvent) was exceeded and the viscosity at 25 ° C. was changed to 370 mPa · s, flaky graphite 9 was obtained in the same manner as in Example 8-1.
 上記で得られた薄片状黒鉛9を含む混合液から、実施例8-2と同様にして、フッ素系溶剤を除去し、水を添加して、沈殿の無い薄片状黒鉛分散液9を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液9を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛9を作製し、AFMにより薄片状黒鉛9の厚みを測定したところ、薄片状黒鉛9の平均厚みは、31nmであった。また測定した薄片の内10nm未満の厚みの薄片が28個数%であり、10nm以上50nm以下の範囲の厚みの薄片が65個数%であり、50nm超過の厚みの薄片は7個数%であることを確認した。 In the same manner as in Example 8-2, the fluorinated solvent was removed from the mixed solution containing flaky graphite 9 obtained above, and water was added to obtain flaky graphite dispersion 9 without precipitation. (Yield 100% of flaky graphite dispersed in dispersion). Using the flaky graphite dispersion 9, the flaky graphite 9 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 9 was measured by AFM. The average thickness of the flaky graphite 9 was 31 nm. Further, of the measured flakes, the number of flakes having a thickness of less than 10 nm is 28%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 65%, and the number of flakes having a thickness exceeding 50 nm is 7%. confirmed.
(実施例9-3:黒鉛膜の製造)
 実施例9-2で得られた薄片状黒鉛分散液9を濾過し、水で洗浄することにより、黒鉛膜9を得た。
 黒鉛膜9についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.3%であった。また、黒鉛膜9のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜9についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、79%であった。
 黒鉛膜9のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.10であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.39であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 9-3: Production of graphite film)
The flaky graphite dispersion 9 obtained in Example 9-2 was filtered and washed with water to obtain a graphite film 9.
When fluorine was detected in the graphite film 9 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.3%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 9 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 9 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 79%.
As a result of Raman measurement of the graphite film 9, the intensity ratio I D / I G of the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.10, and the result which supports that there are few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.39, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例10-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤を東京化成工業社製span20(ソルビタンモノラウレート、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 4200mPa・s)に変更した以外は、実施例8-1と同様にして薄片状黒鉛10を得た。
(Example 10-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the dispersant was span 20 (Sorbitan monolaurate, solubility in the fluorine-based solvent less than 0.1 (g / 100 g solvent), Tokyo Chemical Industry Co., Ltd., solubility in isopropyl alcohol 10 (g / 100 g solvent) Except that the viscosity at 25 ° C. was changed to 4200 mPa · s), flaky graphite 10 was obtained in the same manner as in Example 8-1.
 上記で得られた薄片状黒鉛10を含む混合液から、実施例8-2と同様にして、フッ素系溶剤を除去し、イソプロピルアルコール10mLを添加することにより、沈殿の無い薄片状黒鉛分散液10を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液10を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛10を作製し、AFMにより薄片状黒鉛10の厚みを測定したところ、薄片状黒鉛10の平均厚みは、43nmであった。また、測定した薄片の内10nm未満の厚みの薄片が8個数%であり、10nm以上50nm以下の範囲の厚みの薄片が76個数%であり、50nm超過の厚みの薄片は16個数%であることを確認した。 The fluorinated solvent is removed from the mixed liquid containing flaky graphite 10 obtained as described above in the same manner as in Example 8-2, and 10 mL of isopropyl alcohol is added, whereby flaky graphite dispersion 10 having no precipitation is added. (100% yield of flaky graphite dispersed in the dispersion). Using the flaky graphite dispersion 10, the flaky graphite 10 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 10 was measured by AFM. The average thickness of the flaky graphite 10 was 43 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 8%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 76%, and the number of flakes having a thickness exceeding 50 nm is 16%. It was confirmed.
(実施例10-3:黒鉛膜の製造)
 実施例10-2で得られた薄片状黒鉛分散液10を濾過し、イソプロピルアルコールで洗浄することにより、黒鉛膜10を得た。
 黒鉛膜10についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜10のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜10についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、76%であった。
 黒鉛膜10のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.15であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.33であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 10-3: Production of graphite film)
The flaky graphite dispersion 10 obtained in Example 10-2 was filtered and washed with isopropyl alcohol to obtain a graphite film 10.
When fluorine was detected in the graphite film 10 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 10 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 10 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 76%.
As a result of the Raman measurement of the graphite film 10, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.15, and a result supporting that there were few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.33, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例11-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤をビックケミージャパン製BYK-9076(ポリウレタン含有、高分子量共重合物のアルキルアンモニウム塩、前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 15(g/100g溶媒)、25℃における粘度 1050mPa・s)に変更した以外は、実施例8-1と同様にして薄片状黒鉛11を得た。
(Example 11-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the dispersing agent was BYK-9076 manufactured by Big Chemie Japan (polyurethane-containing, alkylammonium salt of high molecular weight copolymer, solubility in fluorine-based solvent was less than 0.1 (g / 100 g solvent), into water. Exfoliated graphite 11 was obtained in the same manner as in Example 8-1, except that the solubility was 15 (g / 100 g solvent) and the viscosity at 25 ° C. was 1050 mPa · s.
 実施例11-1で得られた薄片状黒鉛11を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、水を添加することにより、沈殿の無い薄片状黒鉛分散液11を得た(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液11を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛11を作製し、AFMにより薄片状黒鉛11の厚みを測定したところ、薄片状黒鉛11の平均厚みは、34nmであった。また、測定した薄片の内10nm未満の厚みの薄片が9個数%であり、10nm以上50nm以下の範囲の厚みの薄片が86個数%であり、50nm超過の厚みの薄片は5個数%であることを確認した。 By removing the fluorinated solvent from the mixed solution containing flaky graphite 11 obtained in Example 11-1 and adding water in the same manner as in Example 8-2, flaky graphite dispersion without precipitation is added. 11 was obtained (yield of flaky graphite 100% dispersed in the dispersion). Using flaky graphite dispersion 11, flaky graphite 11 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 8-2, and when the thickness of flaky graphite 11 was measured by AFM, The average thickness of the flaky graphite 11 was 34 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 9%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 86%, and the number of flakes having a thickness exceeding 50 nm is 5%. It was confirmed.
(実施例11-3:黒鉛膜の製造)
 実施例11-2で得られた薄片状黒鉛分散液11を濾過し、水で洗浄することにより、黒鉛膜11を得た。
 黒鉛膜11についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜11のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜11についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、79%であった。
 黒鉛膜11のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.38であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 11-3: Production of graphite film)
The flaky graphite dispersion 11 obtained in Example 11-2 was filtered and washed with water to obtain a graphite film 11.
When fluorine was detected in the graphite film 11 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 11 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 11 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 79%.
As a result of Raman measurement of the graphite film 11, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.08, and the results supporting the few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.38, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例12-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤をシグマアルドリッチ製 分岐ポリエチレンイミン(数平均分子量Mn60000、50%水溶液)(前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 10000mPa・s)に変更した以外は、実施例8-1と同様にして薄片状黒鉛12を得た。
(Example 12-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the dispersant was a branched polyethyleneimine (number average molecular weight Mn 60000, 50% aqueous solution) manufactured by Sigma-Aldrich (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), solubility in water 50 ( Except that the viscosity was changed to more than g / 100 g solvent) and a viscosity at 25 ° C. (10000 mPa · s), flaky graphite 12 was obtained in the same manner as in Example 8-1.
 実施例12-1で得られた薄片状黒鉛12を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、水を添加することにより、薄片状黒鉛分散液12を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液12を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛12を作製し、AFMにより薄片状黒鉛12の厚みを測定したところ、薄片状黒鉛12の平均厚みは、45nmであった。また、測定した薄片の内10nm未満の厚みの薄片が4個数%であり、10nm以上50nm以下の範囲の厚みの薄片が75個数%であり、50nm超過の厚みの薄片は21個数%であることを確認した。 The fluorinated solvent is removed from the mixed solution containing the flaky graphite 12 obtained in Example 12-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 12. (Yield of flaky graphite dispersed in dispersion liquid: 100%). Using the flaky graphite dispersion 12, the flaky graphite 12 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 12 was measured by AFM. The average thickness of the flaky graphite 12 was 45 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 4%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 75%, and the number of flakes having a thickness exceeding 50 nm is 21%. It was confirmed.
(実施例12-3:黒鉛膜の製造)
 実施例12-2で得られた比較薄片状黒鉛分散液12を濾過し、水で洗浄することにより、黒鉛膜12を得た。
 黒鉛膜12についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜12のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜12についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、78%であった。
 黒鉛膜12のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.16であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.31であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 12-3: Production of graphite film)
The comparative flaky graphite dispersion 12 obtained in Example 12-2 was filtered and washed with water to obtain a graphite film 12.
When fluorine was detected in the graphite film 12 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 12 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 12 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 78%.
As a result of Raman measurement of the graphite film 12, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.16 and the result which supports that there are few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.31, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例13-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤を東京化成工業社製ドデシルベンゼンスルホン酸ナトリウム(ハード型)(前記フッ素系溶剤に対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 20(g/100g溶媒)、25℃で固体)に変更した以外は、実施例8-1と同様にして薄片状黒鉛13を得た。
(Example 13-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the dispersant was sodium dodecylbenzene sulfonate (hard type) manufactured by Tokyo Chemical Industry Co., Ltd. (solubility in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), and solubility in water was 20 (g / Exfoliated graphite 13 was obtained in the same manner as in Example 8-1, except that it was changed to 100 g solvent) and solid at 25 ° C.
 実施例13-1で得られた薄片状黒鉛13を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、水を添加することにより、薄片状黒鉛分散液13を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液13を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛13を作製し、AFMにより薄片状黒鉛13の厚みを測定したところ、薄片状黒鉛12の平均厚みは、38nmであった。また、測定した薄片の内10nm未満の厚みの薄片が36個数%であり、10nm以上50nm以下の範囲の厚みの薄片が58個数%であり、50nm超過の厚みの薄片は6個数%であることを確認した。 The fluorinated solvent is removed from the mixed solution containing the flaky graphite 13 obtained in Example 13-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 13. (Yield of flaky graphite dispersed in dispersion liquid: 100%). Using the flaky graphite dispersion 13, the flaky graphite 13 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 13 was measured by AFM. The average thickness of the flaky graphite 12 was 38 nm. Further, of the measured flakes, the number of flakes having a thickness of less than 10 nm is 36%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 58%, and the number of flakes having a thickness exceeding 50 nm is 6%. It was confirmed.
(実施例13-3:黒鉛膜の製造)
 実施例13-2で得られた薄片状黒鉛分散液13を濾過し、水で洗浄することにより、黒鉛膜13を得た。
 黒鉛膜13についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.5%であった。また、黒鉛膜13のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜13についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、82%であった。
 黒鉛膜13のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.13であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.40であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 13-3: Production of graphite film)
The flaky graphite dispersion 13 obtained in Example 13-2 was filtered and washed with water to obtain a graphite film 13.
When fluorine was detected in the graphite film 13 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.5%. Further, when the average interplanar spacing (d002) of the (002) planes of the graphite film 13 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 13 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 82%.
As a result of the Raman measurement of the graphite film 13, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.13 and the result which supports that there are few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.40, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例14-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、フッ素系溶剤をパーフルオロカーボン(C2x+2、x=12)、3M社製フロリナートFC-43、表面張力16mN/m)10mL(18.7g)に変更した以外は、実施例8-1と同様にして薄片状黒鉛14を得た。分散剤(東京化成工業社製ドデシルベンゼンスルホン酸)の前記フッ素系溶剤に対する溶解度は0.1(g/100g溶媒)未満、水への溶解度は25(g/100g溶媒)であった。
(Example 14-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, except that the fluorine-based solvent was changed to 10 mL (18.7 g) of perfluorocarbon (C x F 2x + 2, x = 12), 3M Fluorinert FC-43, surface tension 16 mN / m, In the same manner as in Example 8-1, flaky graphite 14 was obtained. The solubility of the dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid) in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), and the solubility in water was 25 (g / 100 g solvent).
 実施例14-1で得られた薄片状黒鉛14を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、水を添加することにより、薄片状黒鉛分散液14を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液14を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛14を作製し、AFMにより薄片状黒鉛14の厚みを測定したところ、薄片状黒鉛14の平均厚みは、22nmであった。また、測定した薄片の内10nm未満の厚みの薄片が15個数%であり、10nm以上50nm以下の範囲の厚みの薄片が87個数%であり、50nm超過の厚みの薄片は7個数%であることを確認した。 The fluorinated solvent is removed from the mixed solution containing the flaky graphite 14 obtained in Example 14-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 14. (Yield of flaky graphite dispersed in dispersion liquid: 100%). Using the flaky graphite dispersion 14, the flaky graphite 14 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 14 was measured by AFM. The average thickness of the flaky graphite 14 was 22 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 15%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 87%, and the number of flakes having a thickness exceeding 50 nm is 7%. It was confirmed.
(実施例14-3:黒鉛膜の製造)
 実施例14-2で得られた薄片状黒鉛分散液14を濾過し、水で洗浄することにより、黒鉛膜14を得た。
 黒鉛膜14についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜14のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜14についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、75%であった。
 黒鉛膜14のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.09であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.35であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 14-3: Production of graphite film)
The flaky graphite dispersion 14 obtained in Example 14-2 was filtered and washed with water to obtain a graphite film 14.
When fluorine was detected in the graphite film 14 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when the average interplanar spacing (d002) of the (002) plane of the graphite film 14 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 14 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 96% and the composition of oxygen atoms was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 75%.
As a result of Raman measurement of the graphite film 14, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.09, and a result supporting that there were few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.35, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例15-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、フッ素系溶剤をハイドロフルオロカーボン(Cxy(2x+2-y)x=12(主成分))、旭硝子社製アサヒクリンAC-2000、表面張力13.4mN/m)10mL(16.7g)に変更した以外は、実施例8-1と同様にして薄片状黒鉛15を得た。分散剤(東京化成工業社製ドデシルベンゼンスルホン酸)の前記フッ素系溶剤に対する溶解度は0.1(g/100g溶媒)未満、水への溶解度は25(g/100g溶媒)であった。
(Example 15-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Examples 8-1, a fluorine-based solvent hydrofluorocarbon (C x H y F (2x + 2-y) x = 12 ( main component)), manufactured by Asahi Glass Company ASAHIKLIN AC-2000, the surface tension 13.4MN / m) Exfoliated graphite 15 was obtained in the same manner as in Example 8-1, except that the volume was changed to 10 mL (16.7 g). The solubility of the dispersant (Tokyo Chemical Industry Co., Ltd. dodecylbenzenesulfonic acid) in the fluorine-based solvent was less than 0.1 (g / 100 g solvent), and the solubility in water was 25 (g / 100 g solvent).
 実施例15-1で得られた薄片状黒鉛15を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、水を添加することにより、薄片状黒鉛分散液15を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液15を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛15を作製し、AFMにより薄片状黒鉛15の厚みを測定したところ、薄片状黒鉛15の平均均厚みは、20nmであった。また、測定した薄片の内10nm未満の厚みの薄片が30個数%であり、10nm以上50nm以下の範囲の厚みの薄片が64個数%であり、50nm超過の厚みの薄片は6個数%であることを確認した。 The fluorinated solvent is removed from the mixed solution containing the flaky graphite 15 obtained in Example 15-1 in the same manner as in Example 8-2, and water is added to obtain a flaky graphite dispersion 15. (Yield of flaky graphite dispersed in dispersion liquid: 100%). Using flaky graphite dispersion 15, flaky graphite 15 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of flaky graphite 15 was measured by AFM. The average uniform thickness of the flaky graphite 15 was 20 nm. Further, of the measured flakes, the number of flakes having a thickness of less than 10 nm is 30%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 64%, and the number of flakes having a thickness exceeding 50 nm is 6%. It was confirmed.
(実施例15-3:黒鉛膜の製造)
 実施例15-2で得られた薄片状黒鉛分散液15を濾過し、水で洗浄することにより、黒鉛膜15を得た。
 黒鉛膜15についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は1.4%であった。また、黒鉛膜15のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜15についてX線光電子分光法による測定を行ったところ、炭素原子の組成は96%であり、酸素原子の組成は4%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、80%であった。
 黒鉛膜15のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.44であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 15-3: Production of graphite film)
The flaky graphite dispersion 15 obtained in Example 15-2 was filtered and washed with water to obtain a graphite film 15.
When fluorine was detected in the graphite film 15 by TOF-SIMS measurement, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 1.4%. Further, when an average interplanar spacing (d002) of (002) planes of the graphite film 15 by X-ray diffraction method was measured, it was 0.3356 nm, which was the same as that of ACB-100 of raw material graphite.
Further, when the graphite film 15 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 96% and the oxygen atom composition was 4%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 80%.
As a result of Raman measurement of the graphite film 15, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.08, and the results supporting the few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.44, The result which proves that the thickness of flaky graphite is thin was obtained.
(比較例4-1、2:比較薄片状黒鉛、比較薄片状黒鉛分散液の製造)
 実施例8-1において、分散剤をAGCセイミケミカル製サーフロンS-420(パーフルオロアルキル基を有する界面活性剤)(前記フッ素系溶剤に対する溶解度 0.7(g/100g溶媒)、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 800mPa・s)に変更した以外は、実施例8-1と同様にして比較薄片状黒鉛4を得た。
(Comparative Examples 4-1 and 2: Production of comparative flaky graphite and comparative flaky graphite dispersion)
In Example 8-1, the dispersant is Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical Co., Ltd. (solubility 0.7 (g / 100 g solvent) in the fluorinated solvent, and isopropyl alcohol. Comparative flaky graphite 4 was obtained in the same manner as in Example 8-1, except that the solubility was increased to 10 (g / 100 g solvent) and the viscosity at 25 ° C. was 800 mPa · s.
 比較例4-1で得られた比較薄片状黒鉛4を含む混合液から、実施例8-2と同様にしてフッ素系溶剤を除去し、イソプロピルアルコールを添加することにより、比較薄片状黒鉛分散液4を得た。当該比較薄片状黒鉛分散液4は沈殿が生じていた。混合液をデカンテーションして上澄み液を除去後、沈殿を目開き100μmのナイロンメッシュで濾別し加熱真空オーブンを用いて乾燥後に質量を測定すると、沈殿の質量は原料に対して74質量%であった。厚みが50nm以下の薄片状黒鉛は沈殿しないので、厚みが50nm以下の薄片状黒鉛の割合は少なくとも26質量%以下である。厚みが50nm以下の薄片状黒鉛は、厚みが50nm超過の薄片状黒鉛に比べて面方向のサイズが同じか小さい場合が多いことを考慮すると、厚みの分だけ質量は軽いので、比較薄片状黒鉛分散液4において少なくとも26個数%以下と言える。 A comparative flaky graphite dispersion was prepared by removing the fluorinated solvent from the mixed liquid containing the comparative flaky graphite 4 obtained in Comparative Example 4-1, and adding isopropyl alcohol in the same manner as in Example 8-2. 4 was obtained. The comparative flaky graphite dispersion 4 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered off with a nylon mesh having a mesh size of 100 μm, dried and dried using a heating vacuum oven, and the mass of the precipitate is 74% by mass with respect to the raw material. there were. Since flaky graphite having a thickness of 50 nm or less does not precipitate, the proportion of flaky graphite having a thickness of 50 nm or less is at least 26% by mass or less. In view of the fact that the flaky graphite having a thickness of 50 nm or less is often the same or smaller in size in the plane direction than the flaky graphite having a thickness exceeding 50 nm, the mass is lighter by the thickness. In the dispersion 4, it can be said that it is at least 26% by number or less.
(比較例4-3:比較黒鉛膜の製造)
 比較例4-2で得られた比較薄片状黒鉛分散液4を、沈殿を含めた状態で孔径0.02ミクロンのメンブレンフィルターで濾過し、イソプロピルアルコールで洗浄することにより、比較黒鉛膜4を得た。
 比較黒鉛膜4についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合は、ノイズ(0.2%)を除くと0であった。また、比較黒鉛膜4のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 比較黒鉛膜4についてラマン測定を行った。その結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.18であり、薄片状黒鉛の厚みがそれほど薄くないことを裏付ける結果を得た。
(Comparative Example 4-3: Production of Comparative Graphite Film)
The comparative flaky graphite dispersion 4 obtained in Comparative Example 4-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with isopropyl alcohol to obtain a comparative graphite film 4. It was.
When the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 4, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 0 except for noise (0.2%). there were. Further, when the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 4 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
The comparative graphite film 4 was subjected to Raman measurement. As a result, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is 0.08, The results confirming that there are few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.18, The result which proves that the thickness of flaky graphite is not so thin was obtained.
(比較例5-2:比較薄片状黒鉛分散液の製造)
 実施例8-2において水の代わりにトルエン(前記分散剤の溶解度が1(g/100g溶媒))を用いた以外は実施例8-2と同様にして比較薄片状黒鉛分散液5を得た。当該比較薄片状黒鉛分散液5は沈殿が生じていた。混合液をデカンテーションして上澄み液を除去後、沈殿を目開き100μmのナイロンメッシュで濾別し加熱真空オーブンを用いて乾燥後に質量を測定すると、沈殿の質量は原料に対して80質量%であった。厚みが50nm以下の薄片状黒鉛は沈殿しないので、厚みが50nm以下の薄片状黒鉛の割合は少なくとも20質量%以下である。厚みが50nm以下の薄片状黒鉛は、厚みが50nm超過の薄片状黒鉛に比べて面方向のサイズが同じか小さい場合が多いことを考慮すると、厚みの分だけ質量は軽いので、比較薄片状黒鉛分散液5において少なくとも20個数%以下と言える。
(Comparative Example 5-2: Production of Comparative Flaky Graphite Dispersion)
Comparative flaky graphite dispersion 5 was obtained in the same manner as in Example 8-2, except that toluene (solubility of the dispersant is 1 (g / 100 g solvent)) was used instead of water in Example 8-2. . The comparative flaky graphite dispersion 5 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered through a nylon mesh having a mesh size of 100 μm and dried using a heating vacuum oven to measure the mass. The mass of the precipitate is 80% by mass with respect to the raw material. there were. Since flaky graphite having a thickness of 50 nm or less does not precipitate, the proportion of flaky graphite having a thickness of 50 nm or less is at least 20% by mass or less. In view of the fact that the flaky graphite having a thickness of 50 nm or less is often the same or smaller in size in the plane direction than the flaky graphite having a thickness exceeding 50 nm, the mass is lighter by the thickness. In the dispersion 5, it can be said that it is at least 20% by number or less.
(比較例5-3:比較黒鉛膜の製造)
 比較例5-2で得られた比較薄片状黒鉛分散液5を、沈殿を含めた状態で孔径0.02ミクロンのメンブレンフィルターで濾過し、水で洗浄することにより、比較黒鉛膜5を得た。
 比較黒鉛膜5についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合はノイズ(0.2%)を除くと0であった。また、比較黒鉛膜5のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 比較黒鉛膜5についてラマン測定を行った。その結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.17であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.18であり、薄片状黒鉛の厚みがそれほど薄くないことを裏付ける結果を得た。
(Comparative Example 5-3: Production of Comparative Graphite Film)
The comparative flaky graphite dispersion 5 obtained in Comparative Example 5-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with water to obtain a comparative graphite film 5. .
When the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 5, the ratio of the fluorine (−) ion count to the total count of all (−) ions was 0 excluding noise (0.2%). It was. Further, when the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 5 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
The comparative graphite film 5 was subjected to Raman measurement. As a result, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is 0.17, The results confirming that there are few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.18, The result which proves that the thickness of flaky graphite is not so thin was obtained.
(比較例6-1、2:比較薄片状黒鉛、比較薄片状黒鉛分散液の製造)
 実施例8-1において、前記フッ素系溶剤を水(表面張力(25℃)72mN/m)に変更し、分散剤をAGCセイミケミカル製サーフロンS-420(パーフルオロアルキル基を有する界面活性剤)(水に対する溶解度 0.1(g/100g溶媒)未満、イソプロピルアルコールへの溶解度 10(g/100g溶媒)超過、25℃における粘度 800mPa・s)に変更した以外は、実施例8-1と同様にして比較薄片状黒鉛6を得た。
(Comparative Examples 6-1 and 2: Production of comparative flaky graphite and comparative flaky graphite dispersion)
In Example 8-1, the fluorine-based solvent was changed to water (surface tension (25 ° C.) 72 mN / m), and the dispersant was Surflon S-420 (surfactant having a perfluoroalkyl group) manufactured by AGC Seimi Chemical. (Soluble in water less than 0.1 (g / 100 g solvent), solubility in isopropyl alcohol exceeding 10 (g / 100 g solvent), viscosity at 25 ° C. 800 mPa · s) Comparative flaky graphite 6 was thus obtained.
 比較例6-1で得られた比較薄片状黒鉛6を含む混合液から、実施例8-2と同様にして水を除去し、イソプロピルアルコールを添加することにより、比較薄片状黒鉛分散液6を得た。当該比較薄片状黒鉛分散液6は沈殿が生じていた。混合液をデカンテーションして上澄み液を除去後、沈殿を目開き100μmのナイロンメッシュで濾別し加熱真空オーブンを用いて乾燥後に質量を測定すると、沈殿の質量は原料に対して80質量%であった。厚みが50nm以下の薄片状黒鉛は沈殿しないので、厚みが50nm以下の薄片状黒鉛の割合は少なくとも20質量%以下である。厚みが50nm以下の薄片状黒鉛は、厚みが50nm超過の薄片状黒鉛に比べて面方向のサイズが同じか小さい場合が多いことを考慮すると、厚みの分だけ質量は軽いので、少なくとも20個数%以下と言える。 By removing water from the mixed solution containing the comparative flaky graphite 6 obtained in Comparative Example 6-1 in the same manner as in Example 8-2, and adding isopropyl alcohol, the comparative flaky graphite dispersion 6 was obtained. Obtained. The comparative flaky graphite dispersion 6 had a precipitate. After decanting the mixture and removing the supernatant, the precipitate is filtered through a nylon mesh having a mesh size of 100 μm and dried using a heating vacuum oven to measure the mass. The mass of the precipitate is 80% by mass with respect to the raw material. there were. Since flaky graphite having a thickness of 50 nm or less does not precipitate, the proportion of flaky graphite having a thickness of 50 nm or less is at least 20% by mass or less. Considering that flaky graphite having a thickness of 50 nm or less often has the same or smaller size in the surface direction than flaky graphite having a thickness exceeding 50 nm, the mass is light by the thickness, so at least 20% by number The following can be said.
(比較例6-3:比較黒鉛膜の製造)
 比較例6-2で得られた比較薄片状黒鉛分散液6を、沈殿を含めた状態で孔径0.02ミクロンのメンブレンフィルターで濾過し、イソプロピルアルコールで洗浄することにより、比較黒鉛膜6を得た。
 比較黒鉛膜6についてTOF-SIMS測定によりフッ素を検出したところ、全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合はノイズ(0.2%)を除くと0であった。また、比較黒鉛膜6のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 比較黒鉛膜6についてラマン測定を行った。その結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.16であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.17であり、薄片状黒鉛の厚みがそれほど薄くないことを裏付ける結果を得た。
(Comparative Example 6-3: Production of comparative graphite film)
The comparative flaky graphite dispersion 6 obtained in Comparative Example 6-2 was filtered through a membrane filter having a pore size of 0.02 micron including precipitates, and washed with isopropyl alcohol to obtain a comparative graphite film 6. It was.
When the fluorine was detected by TOF-SIMS measurement for the comparative graphite film 6, the ratio of the count number of fluorine (−) ions to the total count number of all (−) ions was 0 except for noise (0.2%). It was. Further, when the average interplanar spacing (d002) of the (002) plane of the comparative graphite film 6 was measured by X-ray diffraction, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
The comparative graphite film 6 was subjected to Raman measurement. As a result, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is 0.16, The results confirming that there are few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.17, The result which proves that the thickness of flaky graphite is not so thin was obtained.
 実施例8~15及び比較例4~6の評価結果を表2に示す。 Table 2 shows the evaluation results of Examples 8 to 15 and Comparative Examples 4 to 6.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2の結果から、実施例8~15においては、平均厚みが50nm以下の薄片状黒鉛を高収率で得ることができ、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液を得ることができ、導電性及び熱伝導性に優れた黒鉛膜を得ることができた。
 自立膜が形成された実施例8、9、11、13、14及び15の黒鉛膜について熱拡散率を測定したところ、鉄(1.4×10-5/s)、SUS304(ステンレス)(0.4×10-5/s)等に比べて同等または高い値を示し、熱伝導性に優れていることが確認された。
 一方、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m以下のフッ素系溶媒を用いたが、当該溶媒に溶解性が高い分散剤を用いた比較例4では、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。また、得られた比較黒鉛膜4は抵抗値が高く、導電性に劣ることが示された。
 また、比較例5でも、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。比較例5では、分散液を調製する際に、分散剤の溶解度が5(g/100g溶媒)未満の溶媒を添加して分散液を調製したため沈殿が生じてしまった。また、得られた比較黒鉛膜5は抵抗値が高く、導電性に劣ることが示された。
 また、比較例6でも、飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上の薄片状黒鉛は得られなかった。黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m超過の溶媒と、当該溶媒に溶解度が低い分散剤を組み合わせて用いた比較例6では、分散液に沈殿が生じてしまった。また、得られた比較黒鉛膜6は抵抗値が高く、導電性に劣ることが示された。
From the results of Table 2, in Examples 8 to 15, flaky graphite dispersions with an average thickness of 50 nm or less can be obtained in high yield, and there is little residual graphite that is insufficiently flaked. It was possible to obtain a graphite film excellent in conductivity and thermal conductivity.
When the thermal diffusivity was measured for the graphite films of Examples 8, 9, 11, 13, 14 and 15 in which a self-supporting film was formed, iron (1.4 × 10 −5 m 2 / s), SUS304 (stainless steel) Compared to (0.4 × 10 −5 m 2 / s) or the like, the value was equal to or higher, and it was confirmed that the thermal conductivity was excellent.
On the other hand, a fluorine-based solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent for dispersing graphite. In Comparative Example 4 using a dispersant having high solubility in the solvent, the time-of-flight type 2 No flaky graphite with a ratio of fluorine (-) ion count to 0.5% or more of the total count of all (-) ions measured using secondary ion mass spectrometry (TOF-SIMS) It was. Moreover, it was shown that the obtained comparative graphite film 4 has a high resistance value and is inferior in conductivity.
Also in Comparative Example 5, the ratio of the number of fluorine (−) ions to the total number of (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained. In Comparative Example 5, when the dispersion was prepared, precipitation was generated because the dispersion was prepared by adding a solvent having a solubility of the dispersant less than 5 (g / 100 g solvent). Moreover, it was shown that the obtained comparative graphite film 5 has a high resistance value and is inferior in conductivity.
Also in Comparative Example 6, the ratio of the number of fluorine (−) ions to the total number of (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0. No more than 5% flaky graphite was obtained. In Comparative Example 6 in which a solvent having a surface tension at an operating temperature of more than 20 mN / m and a dispersant having a low solubility in the solvent were used in combination as a solvent for dispersing graphite, precipitation occurred in the dispersion. Moreover, it was shown that the obtained comparative graphite film 6 has a high resistance value and is inferior in conductivity.
2.実施例IIシリーズ(第三の発明)
 以下第三の本発明の実施例を示すが、第三の本発明の実施例のうち、実施例1~6及び8~15並びに比較例1~6は、前記実施例Iシリーズの前記第一及び第二の発明の実施例1~6及び8~15並びに比較例1~6と同じものである。そのため、第三の本発明の実施例のうち、実施例1~6及び8~15並びに比較例1~6のここでの詳細な記載は省略する。
2. Example II series (third invention)
Examples of the third aspect of the present invention will be described below. Among the examples of the third aspect of the present invention, Examples 1 to 6 and 8 to 15 and Comparative Examples 1 to 6 are the first examples of the Example I series. The same as Examples 1 to 6 and 8 to 15 and Comparative Examples 1 to 6 of the second invention. Therefore, of the third embodiment of the present invention, detailed description of Examples 1 to 6 and 8 to 15 and Comparative Examples 1 to 6 is omitted here.
(実施例7-1:薄片状黒鉛の製造)
 実施例1-1において、前記フッ素系溶剤をヘプタン(表面張力19.65mN/m)10mL(6.8g)へ変更し、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、ヘプタンに対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)へ変更した以外は、実施例1-1と同様にして薄片状黒鉛7を得た。
(Example 7-1: Production of flaky graphite)
In Example 1-1, the fluorine-based solvent was changed to 10 mL (6.8 g) of heptane (surface tension 19.65 mN / m), and the dispersant was tween 20 (polyoxyethylene (20) sorbitan mono) manufactured by Tokyo Chemical Industry Co., Ltd. Example 1-1 with the exception that the solubility in laurate and heptane was less than 0.1 (g / 100 g solvent), the solubility in water was more than 50 (g / 100 g solvent), and the viscosity at 25 ° C. was 370 mPa · s. Similarly, flaky graphite 7 was obtained.
(実施例7-2:薄片状黒鉛分散液の製造)
 実施例7-1で得られた薄片状黒鉛7を含む混合液から、ヘプタンを除去し、水10mLを添加することにより、薄片状黒鉛分散液7を得た。(分散液に分散した薄片状黒鉛の収率100%)。薄片状黒鉛分散液7を用いて、実施例1-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛7を作製し、AFMにより薄片状黒鉛7の厚みを測定したところ、4nm~37nmの範囲であり、平均厚みは30nmであった。
(Example 7-2: Production of flaky graphite dispersion)
Heptane was removed from the mixed solution containing flaky graphite 7 obtained in Example 7-1, and 10 mL of water was added to obtain flaky graphite dispersion 7. (Yield 100% of flaky graphite dispersed in dispersion). Using the flaky graphite dispersion 7, the flaky graphite 7 existing in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 1-2, and the thickness of the flaky graphite 7 was measured by AFM. The range was 4 nm to 37 nm, and the average thickness was 30 nm.
(実施例7-3:黒鉛膜の製造)
 実施例7-2で得られた薄片状黒鉛分散液7を濾過し、水で洗浄することにより、黒鉛膜7を得た。黒鉛膜7のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜7についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、74%であった。
(Example 7-3: Production of graphite film)
The flaky graphite dispersion 7 obtained in Example 7-2 was filtered and washed with water to obtain a graphite film 7. When the average interplanar spacing (d002) of the (002) plane of the graphite film 7 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 7 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 74%.
Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003
 実施例1~7においては、50nm以下の薄片状黒鉛を収率100%と高収率で得ることができ、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液を得ることができ、導電性及び熱伝導性に優れた黒鉛膜を得ることができた。
 自立膜が形成された実施例1,2,4及び6の黒鉛膜について熱拡散率を測定したところ、鉄(1.4×10-5/s)、SUS304(ステンレス)(0.4×10-5/s)等に比べて同等または高い値を示し、熱伝導性に優れていることが確認された。
 一方、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m以下の溶媒を用いたが、当該溶媒に溶解性が高い分散剤を用いた比較例1の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜1は抵抗値が高く、導電性に劣ることが示された。
 また、分散液を調製する際に、分散剤の溶解度が5(g/100g溶媒)未満の溶媒を添加して分散液を調製した比較例2の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜2は抵抗値が高く、導電性に劣ることが示された。
 また、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m超過の溶媒と、当該溶媒に溶解度が低い分散剤を組み合わせて用いた比較例3の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は0%であった。また、得られた比較黒鉛膜3は抵抗値が高く、導電性に劣ることが示された。
In Examples 1 to 7, flaky graphite having a thickness of 50 nm or less can be obtained at a high yield of 100%, and a flaky graphite dispersion having little residual graphite that is insufficiently flaked can be obtained. Further, a graphite film excellent in conductivity and thermal conductivity could be obtained.
When the thermal diffusivity was measured for the graphite films of Examples 1, 2, 4 and 6 in which a self-supporting film was formed, iron (1.4 × 10 −5 m 2 / s), SUS304 (stainless steel) (0.4 × 10 −5 m 2 / s) or the like, which is equal or higher than that, and was confirmed to be excellent in thermal conductivity.
On the other hand, a solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent at the time of graphite dispersion, but the dispersion of Comparative Example 1 using a dispersant having high solubility in the solvent caused precipitation. Thus, the yield of flaky graphite of 50 nm or less dispersed in the dispersion was 0%. Moreover, it was shown that the obtained comparative graphite film 1 has a high resistance value and is inferior in conductivity.
Further, when preparing the dispersion, the dispersion of Comparative Example 2 in which the dispersion was prepared by adding a solvent having a solubility of the dispersant less than 5 (g / 100 g solvent) resulted in precipitation. The yield of flaky graphite having a thickness of 50 nm or less dispersed in was 0%. Moreover, it was shown that the obtained comparative graphite film 2 has a high resistance value and is inferior in conductivity.
In addition, as a solvent for dispersing graphite, precipitation occurred in the dispersion of Comparative Example 3 in which a solvent having a surface tension at the operating temperature exceeding 20 mN / m and a dispersant having a low solubility in the solvent were used in combination. The yield of flaky graphite of 50 nm or less dispersed in the dispersion was 0%. Moreover, it was shown that the obtained comparative graphite film 3 has a high resistance value and is inferior in conductivity.
(実施例16-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、前記フッ素系溶剤をヘプタン(表面張力19.65mN/m)20mL(13.6g)へ変更し、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、ヘプタンに対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)へ変更した以外は、実施例8-1と同様にして薄片状黒鉛16を得た。
(Example 16-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the fluorine-based solvent was changed to 20 mL (13.6 g) of heptane (surface tension 19.65 mN / m), and the dispersant was tween 20 (polyoxyethylene (20) sorbitan mono) manufactured by Tokyo Chemical Industry Co., Ltd. Example 8-1 with the exception that the solubility in laurate and heptane was less than 0.1 (g / 100 g solvent), the solubility in water was more than 50 (g / 100 g solvent), and the viscosity at 25 ° C. was 370 mPa · s. Similarly, flaky graphite 16 was obtained.
 実施例16-1で得られた薄片状黒鉛16を含む混合液から、実施例8-2と同様にしてヘプタンを除去し、水を添加することにより、薄片状黒鉛分散液16を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液16を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛16を作製し、AFMにより薄片状黒鉛16の厚みを測定したところ、薄片状黒鉛16の平均厚みは、45nmであった。また、測定した薄片の内10nm未満の厚みの薄片が2個数%であり、10nm以上50nm以下の範囲の厚みの薄片が74個数%であり、50nm超過の厚みの薄片は24個数%であることを確認した。 Heptane was removed from the mixed solution containing flaky graphite 16 obtained in Example 16-1 in the same manner as in Example 8-2, and water was added to obtain flaky graphite dispersion 16 ( Yield of flaky graphite dispersed in dispersion (100%). Using the flaky graphite dispersion 16, the flaky graphite 16 present in an independently dispersed state on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 16 was measured by AFM. The average thickness of the flaky graphite 16 was 45 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 2%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 74%, and the number of flakes having a thickness exceeding 50 nm is 24%. It was confirmed.
(実施例16-3:黒鉛膜の製造)
 実施例16-2で得られた薄片状黒鉛分散液16を濾過し、水で洗浄することにより、黒鉛膜16を得た。黒鉛膜16のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜16についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、70%であった。
 黒鉛膜16のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.43であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 16-3: Production of graphite film)
The flaky graphite dispersion liquid 16 obtained in Example 16-2 was filtered and washed with water to obtain a graphite film 16. When the average interplanar spacing (d002) of the (002) plane of the graphite film 16 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 16 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 70%.
As a result of Raman measurement of the graphite film 16, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.08, and the results supporting the few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.43, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例17-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、前記フッ素系溶剤を2,4-ジメチルペンタン(表面張力17.7mN/m)20mL(13.4g)へ変更し、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、2,4-ジメチルペンタンに対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)へ変更した以外は、実施例8-1と同様にして薄片状黒鉛17を得た。
(Example 17-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the fluorine-based solvent was changed to 2,4-dimethylpentane (surface tension 17.7 mN / m) 20 mL (13.4 g), and the dispersant was tween 20 (polyoxyethylene manufactured by Tokyo Chemical Industry Co., Ltd.). (20) Sorbitan monolaurate, solubility in 2,4-dimethylpentane is less than 0.1 (g / 100 g solvent), solubility in water is more than 50 (g / 100 g solvent), viscosity is changed to 370 mPa · s at 25 ° C. Except that, flaky graphite 17 was obtained in the same manner as in Example 8-1.
 実施例17-1で得られた薄片状黒鉛17を含む混合液から、実施例8-2と同様にして2,4-ジメチルペンタンを除去し、水を添加することにより、薄片状黒鉛分散液17を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液17を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛17を作製し、AFMにより薄片状黒鉛17の厚みを測定したところ、薄片状黒鉛17の平均厚みは、44nmであった。また、測定した薄片の内10nm未満の厚みの薄片が4個数%であり、10nm以上50nm以下の範囲の厚みの薄片が76個数%であり、50nm超過の厚みの薄片は20個数%であることを確認した。 By removing 2,4-dimethylpentane from the mixed liquid containing flaky graphite 17 obtained in Example 17-1 and adding water in the same manner as in Example 8-2, a flaky graphite dispersion was obtained. 17 was obtained (yield of flaky graphite dispersed in the dispersion, 100%). Using the flaky graphite dispersion 17, the flaky graphite 17 existing in a state of being independently dispersed on the silicon wafer was prepared in the same manner as in Example 8-2, and the thickness of the flaky graphite 17 was measured by AFM. The average thickness of the flaky graphite 17 was 44 nm. Of the measured flakes, the number of flakes having a thickness of less than 10 nm is 4%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 76%, and the number of flakes having a thickness exceeding 50 nm is 20%. It was confirmed.
(実施例17-3:黒鉛膜の製造)
 実施例17-2で得られた薄片状黒鉛分散液17を濾過し、水で洗浄することにより、黒鉛膜17を得た。黒鉛膜17のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜17についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、73%であった。
 黒鉛膜17のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.08であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.43であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 17-3: Production of graphite film)
The flaky graphite dispersion liquid 17 obtained in Example 17-2 was filtered and washed with water to obtain a graphite film 17. When the average interplanar spacing (d002) of the (002) plane of the graphite film 17 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 17 was measured by X-ray photoelectron spectroscopy, the carbon atom composition was 95% and the oxygen atom composition was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 73%.
As a result of the Raman measurement of the graphite film 17, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.08, and the results supporting the few defects were obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.43, The result which proves that the thickness of flaky graphite is thin was obtained.
(実施例18-1、2:薄片状黒鉛、薄片状黒鉛分散液の製造)
 実施例8-1において、前記フッ素系溶剤をポリジメチルシロキサン(信越化学工業社製KF-96L-1cs、表面張力16.9mN/m)20mL(16.4g)へ変更し、分散剤を東京化成工業社製tween20(ポリオキシエチレン(20)ソルビタンモノラウレート、ポリジメチルシロキサンに対する溶解度 0.1(g/100g溶媒)未満、水への溶解度 50(g/100g溶媒)超過、25℃における粘度 370mPa・s)へ変更した以外は、実施例8-1と同様にして薄片状黒鉛18を得た。
(Example 18-1, 2: Production of flaky graphite and flaky graphite dispersion)
In Example 8-1, the fluorinated solvent was changed to 20 mL (16.4 g) of polydimethylsiloxane (KF-96L-1cs, surface tension 16.9 mN / m, manufactured by Shin-Etsu Chemical Co., Ltd.), and the dispersant was changed to Tokyo Kasei. Industrial tween 20 (polyoxyethylene (20) sorbitan monolaurate, solubility in polydimethylsiloxane less than 0.1 (g / 100 g solvent), solubility in water over 50 (g / 100 g solvent), viscosity at 25 ° C. 370 mPa Except for the change to s), flaky graphite 18 was obtained in the same manner as in Example 8-1.
 実施例18-1で得られた薄片状黒鉛18を含む混合液から、実施例8-2と同様にしてポリジメチルシロキサンを除去し、水を添加することにより、薄片状黒鉛分散液18を得た(分散液に分散した薄片状黒鉛の収率 100%)。薄片状黒鉛分散液18を用いて、実施例8-2と同様にシリコンウエハー上に独立分散した状態で存在する薄片状黒鉛18を作製し、AFMにより薄片状黒鉛18の厚みを測定したところ、薄片状黒鉛18の平均厚みは43nmであった。また、測定した薄片の内10nm未満の厚みの薄片が10個数%であり、10nm以上50nm以下の範囲の厚みの薄片が69個数%であり、50nm超過の厚みの薄片は21個数%であることを確認した。 From the mixed solution containing the flaky graphite 18 obtained in Example 18-1, polydimethylsiloxane was removed in the same manner as in Example 8-2, and water was added to obtain a flaky graphite dispersion 18. (Yield of flaky graphite dispersed in dispersion liquid: 100%). Using flaky graphite dispersion 18, flaky graphite 18 existing in a state of being independently dispersed on a silicon wafer was prepared in the same manner as in Example 8-2, and when the thickness of flaky graphite 18 was measured by AFM, The average thickness of the flaky graphite 18 was 43 nm. Further, of the measured flakes, the number of flakes having a thickness of less than 10 nm is 10%, the number of flakes having a thickness in the range of 10 nm to 50 nm is 69%, and the number of flakes having a thickness exceeding 50 nm is 21%. It was confirmed.
(実施例18-3:黒鉛膜の製造)
 実施例18-2で得られた薄片状黒鉛分散液18を濾過し、水で洗浄することにより、黒鉛膜18を得た。黒鉛膜18のX線回折法による(002)面の平均面間隔(d002)を測定したところ、原料黒鉛のACB-100と同様の0.3356nmを示した。
 また、黒鉛膜18についてX線光電子分光法による測定を行ったところ、炭素原子の組成は95%であり、酸素原子の組成は5%であった。そして前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は、73%であった。
 黒鉛膜18のラマン測定の結果、1300~1400cm-1の範囲にあるピーク強度(I)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比I/Iが0.07であり、欠陥の少ないことを裏づける結果を得た。また2600~2800cm-1の範囲にあるピーク強度(IG’)と1580~1620cm-1の範囲にあるピーク強度(I)との強度比IG’/Iが0.46であり、薄片状黒鉛の厚みが薄いことを裏付ける結果を得た。
(Example 18-3: Production of graphite film)
The flaky graphite dispersion liquid 18 obtained in Example 18-2 was filtered and washed with water to obtain a graphite film 18. When the average interplanar spacing (d002) of the (002) plane of the graphite film 18 by X-ray diffraction was measured, it was 0.3356 nm, which was the same as that of ACB-100 of the raw graphite.
Further, when the graphite film 18 was measured by X-ray photoelectron spectroscopy, the composition of carbon atoms was 95% and the composition of oxygen atoms was 5%. And the ratio of the bond which has formed the sp2 bond between carbon atoms among the bonds which the said carbon atom has was 73%.
As a result of Raman measurement of the graphite film 18, the intensity ratio I D / I G between the peak intensity (I D ) in the range of 1300 to 1400 cm −1 and the peak intensity (I G ) in the range of 1580 to 1620 cm −1 is It was 0.07, and the result which proves that there are few defects was obtained. The / I G 'intensity ratio I G of the peak intensity in the range of 1580 ~ 1620cm -1 (I G) peak intensity (I G)' in the range of 2600 ~ 2800 cm -1 is 0.46, The result which proves that the thickness of flaky graphite is thin was obtained.
Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004
 実施例8~18においては、薄片化が不十分な黒鉛の残留が少ない薄片状黒鉛分散液を得ることができ、導電性及び熱伝導性に優れた黒鉛膜を得ることができた。
 自立膜が形成された実施例8、9、11、13、14及び15の黒鉛膜について熱拡散率を測定したところ、鉄(1.4×10-5/s)、SUS304(ステンレス)(0.4×10-5/s)等に比べて同等または高い値を示し、熱伝導性に優れていることが確認された。
 一方、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m以下の溶媒を用いたが、当該溶媒に溶解性が高い分散剤を用いた比較例4の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は低かった。また、得られた比較黒鉛膜4は抵抗値が高く、導電性に劣ることが示された。
 また、分散液を調製する際に、分散剤の溶解度が5(g/100g溶媒)未満の溶媒を添加して分散液を調製した比較例5の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は低かった。また、得られた比較黒鉛膜5は抵抗値が高く、導電性に劣ることが示された。
 また、黒鉛分散時の溶媒として、使用温度での表面張力が20mN/m超過の溶媒と、当該溶媒に溶解度が低い分散剤を組み合わせて用いた比較例6の分散液は、沈殿が生じてしまい、分散液に分散した50nm以下の薄片状黒鉛の収率は低かった。また、得られた比較黒鉛膜6は抵抗値が高く、導電性に劣ることが示された。
In Examples 8 to 18, it was possible to obtain a flaky graphite dispersion with insufficient residual graphite, and a graphite film excellent in conductivity and thermal conductivity.
When the thermal diffusivity was measured for the graphite films of Examples 8, 9, 11, 13, 14 and 15 in which a self-supporting film was formed, iron (1.4 × 10 −5 m 2 / s), SUS304 (stainless steel) Compared to (0.4 × 10 −5 m 2 / s) or the like, the value was equal to or higher, and it was confirmed that the thermal conductivity was excellent.
On the other hand, a solvent having a surface tension at a working temperature of 20 mN / m or less was used as a solvent for dispersing graphite, but the dispersion of Comparative Example 4 using a dispersant having high solubility in the solvent caused precipitation. Thus, the yield of flaky graphite of 50 nm or less dispersed in the dispersion was low. Moreover, it was shown that the obtained comparative graphite film 4 has a high resistance value and is inferior in conductivity.
Further, when preparing the dispersion, the dispersion of Comparative Example 5 in which the dispersion was prepared by adding a solvent having a solubility of the dispersant of less than 5 (g / 100 g solvent) caused precipitation, and the dispersion The yield of flaky graphite of 50 nm or less dispersed in was low. Moreover, it was shown that the obtained comparative graphite film 5 has a high resistance value and is inferior in conductivity.
In addition, as a solvent for dispersing graphite, precipitation occurred in the dispersion of Comparative Example 6 using a combination of a solvent having a surface tension exceeding 20 mN / m at the use temperature and a dispersant having low solubility in the solvent. The yield of flaky graphite of 50 nm or less dispersed in the dispersion was low. Moreover, it was shown that the obtained comparative graphite film 6 has a high resistance value and is inferior in conductivity.

Claims (4)

  1.  飛行時間型二次イオン質量分析法(TOF-SIMS)を用いて測定される全(-)イオンの総カウント数に対するフッ素(-)イオンのカウント数の割合が0.5%以上であり、X線回折法による(002)面の平均面間隔(d002)が0.336nm以下であって、平均厚みが50nm以下である薄片状黒鉛。 The ratio of the number of fluorine (−) ions to the total number of (−) ions measured using time-of-flight secondary ion mass spectrometry (TOF-SIMS) is 0.5% or more, and X Flaky graphite having an average interplanar spacing (d002) of (002) planes of 0.336 nm or less and an average thickness of 50 nm or less by line diffraction method.
  2.  X線光電子分光法による測定で、炭素原子の組成は80%以上99%以下であり、酸素原子の組成は10%以下であり、前記炭素原子の有する結合のうち、炭素原子間でsp2結合を形成している結合の割合は60%以上である、請求項1に記載の薄片状黒鉛。 As measured by X-ray photoelectron spectroscopy, the composition of carbon atoms is 80% or more and 99% or less, the composition of oxygen atoms is 10% or less, and among the bonds of the carbon atoms, sp2 bonds are present between the carbon atoms. The flaky graphite according to claim 1, wherein the proportion of bonds formed is 60% or more.
  3.  前記請求項1又は2に記載の薄片状黒鉛が積層されてなる、黒鉛材料。 A graphite material in which the flaky graphite according to claim 1 or 2 is laminated.
  4.  前記請求項1又は2に記載の薄片状黒鉛が溶媒に分散されてなる、薄片状黒鉛分散液。 A flaky graphite dispersion obtained by dispersing the flaky graphite according to claim 1 or 2 in a solvent.
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