WO2016068171A1

WO2016068171A1 - Filler-filled film, sheet film, laminate film, bonded body, and method for producing filler-filled film

Info

Publication number: WO2016068171A1
Application number: PCT/JP2015/080344
Authority: WO
Inventors: 穣村本; 正尚菊池
Original assignee: デクセリアルズ株式会社
Priority date: 2014-10-28
Filing date: 2015-10-28
Publication date: 2016-05-06
Also published as: CN111168984A; CN114083860A; CN114103279A; CN111168984B

Abstract

[Problem] To provide a filler-filled film, a sheet film, a laminate film, a bonded body, and a method for producing a filler-filled film. [Solution] In order to solve the problem, the present invention provides, according to one aspect of the invention, a filler-filled film that is provided with a film main body, a plurality of recesses formed on the surface of the film main body, and a filler that is filled into the recesses, wherein the diameter of an opening surface in the recesses is at least larger than the wavelength of visible light, the array pattern of the recesses has a periodicity along the length direction of the film main body, and the difference between the filler filling ratio at one end of the film main body and the filler filling ratio at another portion of the film main body is less than 0.5%.

Description

Filler-filled film, sheet-fed film, laminated film, bonded body, and method for producing filler-filled film

The present invention relates to a filler-filled film, a sheet-fed film, a laminated film, a bonded body, and a method for producing a filler-filled film.

In recent years, various embossed films have been developed and used. As such an embossed film, a film having a recess having a diameter of 1 μm or more and having an array pattern of the recess having a periodicity along the length direction of the embossed film is known. That is, in such an embossed film, the same arrangement pattern is repeatedly formed in the length direction of the embossed film.

Such an embossed film is used as a filler-filled film, for example. The filler-filled film is obtained by filling a concave portion of an embossed film with a filler.

Also, such an embossed film is produced using a stamper master. The stamper master is obtained by forming a reverse shape (that is, a plurality of convex portions) of the arrangement pattern on the surface (transfer surface) of a flat substrate. Then, the embossed film is produced by sequentially transferring the transfer surface shape of the stamper master to the film to be transferred.

JP 2009-258751 A

However, the method of producing an embossed film using a stamper master has a problem that it is very difficult to accurately position the stamper master with respect to the transfer film. For this reason, in the embossed film produced by this method, there was a problem that a defect of a concave portion (position shift, deficiency, distortion, etc.) was likely to occur. There may be a case where the defective concave portion is not filled with the filler. Moreover, the defect of a recessed part tends to become large, so that a filler filling film becomes long. For this reason, the problem that the filling rate of a filler varies in the length direction of a filler filling film may arise.

Note that Patent Document 1 discloses a method for producing a moth-eye film by roll-to-roll. In this method, first, a cylindrical master having a reversal shape of a moth-eye film formed on the peripheral surface is prepared. And the moth-eye film is produced by transferring the peripheral surface shape of the master to the film. However, in this moth-eye film, since the uneven diameter is very small (less than 1 μm), the above problem cannot be solved at all.

Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a novel and improved filler-filled film, single-wafer film, and laminated film in which the filler filling rate is more stable. It is providing the manufacturing method of a bonding body and a filler filling film.

In order to solve the above-described problems, according to one aspect of the present invention, a film body, a plurality of recesses formed on the surface of the film body, and a filler filled in each of the recesses, the opening of the recesses is provided. The diameter of the surface is at least larger than the visible light wavelength, the arrangement pattern of the recesses has a periodicity along the length direction of the film body, the filling rate of the filler at one end of the film body, and the other of the film body A filler-filled film is provided in which the difference from the filler filling rate in this portion is less than 0.5%.

Here, the film body may be a long film.

Further, the filling rate of the filler may have periodicity along the length direction of the film body.

Further, all the recesses may have substantially the same shape.

Further, the number of fillers filled per unit area of the film body may be 50,000,000 pieces / cm ² or less.

Further, the filler may be integrated with the film body in the recess.

Further, a coating layer formed on at least a part of the surface of the film body may be provided.

Further, the coating layer may be formed on at least a part of the surface of the concave portion, the surface of the convex portion between the concave portions, and the exposed surface of the filler.

Moreover, the coating layer may contain an inorganic material.

The film body may be formed of a curable resin or a plastic resin.

According to another aspect of the present invention, there is provided a single wafer film produced by cutting the filler-filled film into a plurality of sheets.

According to another aspect of the present invention, there is provided a laminated film in which the above films are laminated.

Here, an adhesive layer formed on the back surface of the film body may be provided.

According to another aspect of the present invention, there is provided a bonded body comprising the above film and a substrate on which the above film is bonded.

According to another aspect of the present invention, a step of preparing a cylindrical or columnar master having a plurality of convex portions formed on the peripheral surface, and a long master film while being conveyed by roll-to-roll, The step of producing a film body by transferring the peripheral surface shape of the film to a film to be transferred, and the step of filling a plurality of recesses formed on the surface of the film body with a filler, the diameter of the opening surface of the recesses Of the filler-filled film, wherein the difference between the filler filling rate at one end of the film body and the filler filling rate at the other part of the film body is less than 0.5%. A manufacturing method is provided.

In the filler-filled film according to the above aspects of the present invention, the difference between the filler filling rate at one end of the film body and the filler filling rate at the other part of the film body is less than 0.5%. Therefore, the filling rate of the filler becomes more stable.

As described above, according to the present invention, the filling rate of the filler is more stable.

It is a top view which shows typically the structure of the filler filling film which concerns on embodiment of this invention. It is a sectional side view which shows typically the structure of the filler filling film which concerns on the same embodiment. It is a graph which shows typically the correspondence of the distance from each part of a filler filling film to a film starting point, and the filler filling rate of each part. It is a sectional side view which shows the modification of a filler filling film typically. It is a sectional side view which shows the modification of a filler filling film typically. It is a sectional side view which shows the modification of a filler filling film typically. It is a sectional side view which shows the modification of a filler filling film typically. It is a sectional side view which shows the modification of a filler filling film typically. It is a sectional side view which shows the modification of a filler filling film typically. It is explanatory drawing which shows typically the structure of the transfer apparatus for producing a film main body. It is a block diagram which shows the structural example of an exposure apparatus. It is a perspective view which shows the example of a structure of a master disk typically. It is a SEM (scanning electron microscope) photograph which shows an example of a film main body. It is a SEM photograph which shows an example of a film main body.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, in this specification and drawing, about the component which has the substantially same function structure, duplication description is abbreviate | omitted by attaching | subjecting the same code | symbol.

<1. Configuration of Filler Filled Film>
First, the configuration of the filler-filled film 1 according to this embodiment will be described with reference to FIGS. As shown in FIG. 1, the filler-filled film 1 includes a film body 2, a plurality of recesses 3 formed on the surface of the film body 2, and a filler 4 filled in each of the recesses 3.

The film body 2 is a film in which a plurality of recesses 3 are formed. The material constituting the film body 2 is not particularly limited. For example, the film body 2 may be formed of any curable resin or plastic resin. Here, examples of the curable resin include a photocurable resin and a thermosetting resin. Examples of the plastic resin include thermoplastic resins (more specifically, crystalline resins that melt by heat). Therefore, the film body 2 may be formed of at least one or more of a photocurable resin, a thermosetting resin, and a thermoplastic resin, for example. When the film body 2 is formed of a photocurable resin or a thermosetting resin, the film body 2 includes a sheet-like transferred substrate film 161 and a cured resin layer 162a formed on the transferred substrate film 161. (See FIG. 10). The cured resin layer 162a is a layer obtained by curing a photocurable resin or a thermosetting resin. The concave portion 3 is formed on the surface of the cured resin layer 162a. The film body 2 may be formed in a state where the curable resin and the resin constituting the transfer base film are mixed.

Also, the thickness of the film body 2 is not particularly limited. The thickness of the film body 2 may be adjusted depending on the presence / absence of the above-described transfer target substrate film 161. For example, the thickness of the film body 2 may be 10 to 300 μm when the film body 2 has the transferred substrate film 161. In this case, the thickness of the cured resin layer 162a may be 1 to 50 μm, and the thickness of the transferred substrate film 161 may be 9 to 250 μm. On the other hand, when the film body 2 does not have the transfer base film 161, the thickness of the film body 2 may be 8 to 200 μm.

The width of the film body 2 is not particularly limited. For example, the width of the film body 2 may be 0.05 to 300 cm. The length of the film body 2 is not particularly limited. However, when the film body 2 is a long film, the variation in filler filling rate described later tends to increase. Therefore, when the film body 2 is a long film, the effect of the present embodiment appears more remarkably. For example, the lower limit of the length of the film body 2 may be any of 5 m, 10 m, 30 m, 50 m, 100 m, 200 m, 300 m, and 500 m.

A plurality of recesses 3 are formed on the surface of the film body 2. The diameter of the opening surface of the recess 3 is at least larger than the visible light wavelength. Here, the diameter of the opening surface of the recess 3 is, for example, the diameter of the smallest circle that includes the opening surface of the recess 3 (for example, the circumscribed circle of the opening surface of the recess 3). Specifically, the diameter of the opening surface of the recess 3 is preferably 0.8 to 500 μm, more preferably 1.0 to 300 μm, and even more preferably larger than 1.6 μm and smaller than 300 μm. preferable. That is, the lower limit is preferably 0.8 μm or more, more preferably 1.0 μm or more, and even more preferably larger than 1.6 μm. The upper limit is preferably 500 μm or less, more preferably 300 μm or less, and even more preferably less than 300 μm.

The shape of the opening surface of the recess 3 is not particularly limited and may be any shape. For example, the shape of the opening surface of the recess 3 may be a circle, an ellipse, a polygon, or the like. When the shape of the opening surface of the recess 3 is a polygon, the diameter of the opening surface may be the longest one of the lengths of one side constituting the polygon. The opening surface of the recess 3 may have a shape having a curve in part. Further, the area of the opening surface does not have to be constant as long as the above-described conditions of the opening surface are satisfied. In addition, regarding the shape of the opening surface, the opening surface having the smallest area may be regarded as a point, and the opening surface having an area larger than that may be classified as a line or a surface depending on the shape. The linear opening surface is formed by connecting the recesses 3 having the opening surface with the minimum area in a linear manner (that is, in a one-dimensional direction). The planar opening surface is formed by connecting concave portions 3 having an opening surface with a minimum area in a planar shape (that is, in a two-dimensional direction). Therefore, the linear and planar recesses 3 can be regarded as an aggregate of the recesses 3 having an opening surface with a minimum area. The shape of the line or surface is not particularly limited. The aggregate of the recesses 3 may be a combination of a surface and a line. The aggregate of the recesses 3 is measured as one recess 3. Moreover, the uneven | corrugated shape shown in FIG. 1 may be reversed. That is, the concave portion 3 may be a convex portion, and the convex portion 3b (see FIG. 2) between the concave portions 3 may be a concave portion.

The depth d of the recess 3 (see FIG. 2) is not particularly limited. For example, the depth d may be 0.08 to 30 μm. The depth d is preferably 0.08 to 15 μm. Further, when the opening surface of the recess 3 is rectangular (square or rectangular) or substantially circular (perfect circle, ellipse, or a circle that can approximate them), the aspect ratio of the recess 3 is about 0.1 to 10. Also good. Here, the aspect ratio is a value obtained by dividing the diameter of the opening surface by the depth d.

If the depth of the recess 3 exceeds 30 μm or the aspect ratio of the recess 3 exceeds 10, it is not preferable because the formation of the recess 3 becomes difficult. Moreover, when the depth of the recessed part 3 is less than 0.08 μm, or the aspect ratio of the recessed part 3 is less than 0.1, filling of the filler 4 may be difficult.

Further, when the film body 2 has the transfer base film 161, the recess 3 may penetrate the cured resin layer 162a. However, it is preferable that the recess 3 does not penetrate the film body 2 regardless of whether or not the film body 2 has the substrate film 161 to be transferred.

Moreover, it is preferable that the shape (opening surface shape, cross-sectional shape (cross-sectional shape shown in FIG. 2)) of each recess 3 is substantially the same throughout the film body 2. When the cross-sectional shape of the recessed part 3 or the shape of an opening surface is substantially the same, since the grasping state of the recessed part 3 in the filler filling film 1 becomes easier, it is preferable.

Further, the arrangement pattern of the recesses 3 has a periodicity along the length direction P of the film body 2. Specifically, the arrangement pattern of the recesses 3 is an arrangement pattern in which the unit arrangement pattern M is repeated in the length direction of the film body 2. In the example of FIG. 1, the unit array pattern M is composed of two rows of recesses 3 arranged in a direction perpendicular to the length direction P. The recesses 3 in each row are arranged at equal intervals. Moreover, the recessed part 3 of each row | line | column is arrange | positioned between the recessed parts 3 of the other row | line | column. Then, by repeating the unit array pattern M along the length direction P, a hexagonal lattice array pattern is formed. The hexagonal lattice arrangement pattern is an example of a pattern in which the concave portions 3 are arranged in a close-packed manner. Of course, the arrangement pattern is not limited to this example. For example, the array pattern may be a square lattice array pattern. In this case, the unit array pattern is composed of a single row of recesses 3 arranged in a direction perpendicular to the length direction P. The recesses 3 in the row are arranged at equal intervals. Other arrangement patterns include lattice shapes such as an orthorhombic lattice and a parallel lattice. Further, it may be arbitrarily drawn (stipulated).

Also, the width MW of the unit arrangement pattern M matches the width of the film body 2. On the other hand, the length ML of the unit array pattern M is not particularly limited. For example, when the arrangement pattern of the protrusions 113 formed on the peripheral surface of the master 110 (see FIG. 10) described later has no periodicity, the length ML matches the circumference of the master 110. On the other hand, when the arrangement pattern of the convex portions 113 has periodicity along the circumferential direction of the master 110, that is, when the unit arrangement pattern of the convex portions 113 is repeated in the circumferential direction of the master 110, the length ML is set to the convex 113. To the length of the unit array pattern (the length in the circumferential direction of the master 110). The length ML of the unit array pattern M is the minimum when the unit array pattern M is composed of one row of the recesses 3. That is, in this case, the length ML is about the diameter of the recess 3. On the other hand, the maximum is obtained when the arrangement pattern of the protrusions 113 has no periodicity. In this case, the length ML matches the circumferential length of the master 110. Therefore, the range of the length ML of the unit array pattern M is very wide. The diameter of the master 110 is not particularly limited, but is, for example, 50 to 300 mm.

Here, the arrangement pattern of the recesses 3 may have periodicity with respect to a direction perpendicular to the length direction of the film body 2 (width direction of the film body 2). That is, the same arrangement pattern may be repeated along the width direction of the film body 2. The periodicity along the length direction P of the film body 2 and the periodicity in the direction orthogonal thereto may be the same or different. This is because when the filler-filled film 1 is made into a single sheet, substantially the same single-sheet film can be obtained.

Further, the surface density of the recesses 3, that is, the number of the recesses 3 formed per unit area of the film body 2 is not particularly limited. For example, the number may be 50,000,000 pieces / cm ² or less. When the surface density of the recesses 3 exceeds 50,000,000 pieces / cm ² , the contact area between the master 110 and the film body 2 increases when the recesses 3 are formed, and the master 110 and the film body 2 are separated from each other. This is not preferable because the moldability is lowered and the concave portion 3 is hardly formed. In addition, the lower limit value of the surface density of the recesses 3 is not particularly limited, but may be, for example, 100 pieces / cm ² or more.

When one filler 4 is filled in one recess 3, the surface density of the recess 3 matches the surface density of the filler 4, that is, the number of fillers 4 filled per unit area of the film body 2. Further, the distance between the recesses 3 is not particularly limited. For example, the lower limit value of the distance between the recesses 3 may be 0.5 μm. More specifically, the lower limit value of the distance between the recesses 3 is preferably 5/8 or more, more preferably 1/2 or more, of the minimum diameter of the filler 4. The upper limit of the distance between the recesses 3 is not particularly limited, but may be about 1000 μm. Here, the distance between the recesses 3 may be the distance between the center points of the opening surfaces.

Moreover, although the defect | deletion of the recessed part 3 may arise continuously in the length direction P, even in such a case, there are very few continuous defect | deletions. Here, the defect of the concave portion 3 means that the concave portion 3 was not formed (in other words, the shape of the convex portion 113 (see FIG. 10) was not transferred to the film body 2). Moreover, the defect | deletion continuous in the length direction P means the defect | deletion which generate | occur | produces continuously on the straight line parallel to the length direction P. FIG. In the present embodiment, the number of defects continuous in the length direction P is 10 or less, preferably 5 or less.

An example of the film body 2 is shown in FIGS. 13 and 14 are SEM photographs of the film body 2. 13A and 14A are SEM images obtained by observing the surface of the film body 2, and FIGS. 13B and 14B are SEMs obtained by observing a cross section obtained by cutting the transcript shown in FIGS. 13A and 14A along the line XX. It is an image. 13A and 14A is the length direction P in FIG. 1, and the left-right direction is the width direction of the film body 2. In FIG. 13A, the shape of the opening surface is circular, and the arrangement pattern of the recesses 3 is a hexagonal lattice arrangement pattern. Moreover, in FIG. 14A, the shape of the opening surface is a square, and the arrangement pattern of the recesses 3 is a square lattice arrangement pattern.

The filler 4 is filled in the recess 3. Filling refers to a state in which a majority of the filler is embedded in the recess 3. Note that one recess 4 is preferably filled with one filler 4. However, the aggregate of the recesses 3 may be filled with a plurality of fillers 4. The material (composition) constituting the filler 4 is not particularly limited and may be appropriately selected depending on the use of the filler-filled film 1. For example, the filler 4 is an inorganic material, an organic material, an inorganic material having a multilayer structure, or a mixture of an inorganic material (inorganic material) and an organic material (organic material) (for example, a fine solid material made of an organic material coated with an inorganic material). Etc. can be used. Specifically, the filler 4 may be a pigment, a dye, a crystalline inorganic substance, or the like. The filler 4 may be a material obtained by crushing a crystalline organic material or an inorganic material. Moreover, the same filler 4 may be filled in all the recessed parts 3, and a different kind of filler 4 may be filled. For example, when the diameter of the opening surface of the recessed part 3 differs, you may fill with the filler 4 of the diameter according to them. The shape of the filler 4 is not particularly limited. The filler 4 may have an isotropic shape, for example, a spherical shape. The specific gravity of the filler is not particularly limited, but may be 0.8 to 23, for example. As for the size of the filler, it is preferable that the maximum length of the filler is not more than the minimum length of the opening surface of the recess 3. The filler may be provided with various physical properties and functionality.

Further, the filler 4 may be integrated with the film body 2 in the recess 3. The integration with the film body 2 may be performed by, for example, filling the recess 3 with the filler 4 in a state where only a part of the recess 3 is cured, and then completely curing the recess 3. Alternatively, after filling the concave portion 3 with the filler 4, an uncured curable resin may be applied or dispersed on the surface of the filler-filled film 1 to cure the curable resin.

In this embodiment, the filling rate of the filler 4 (hereinafter also referred to as “filler filling rate”) is very stable. That is, the difference between the filler filling rate at one end F of the film body 2 and the filler filling rate at the other part of the film body 2 is less than 0.5%, preferably 0.3% or less, more preferably 0. .1% or less.

Here, one end F is an end on the side where the concave portion 3 is first formed by the master 110 described later, that is, a transfer start point. On the other hand, the other end R is an end on the side where the concave portion 3 is finally formed by the master 110, that is, an end point of transfer. In the present embodiment, the direction from one end F toward the other end F is defined as the positive direction of the length direction P. And the filler filling rate in each part (point) of the film main body 2 is calculated as follows, for example.

That is, a unit array pattern M including a focused portion is extracted, and a predetermined number m (m is an arbitrary integer greater than or equal to 0) units arranged on the positive side of the length direction P with respect to the unit array pattern M. An arrangement pattern M is extracted. The extracted unit array pattern M is set as a measurement target region.

Then, a plurality of representative areas are set in the measurement target area, and the number of fillers 4 in each representative area is measured by optical microscope observation or the like. Then, the filler filling rate is measured by dividing the sum of the measured values of each representative region by the sum of the ideal number of fillers 4 present in each representative region. Here, the ideal number of fillers 4 present in the representative region is the number of fillers 4 that should be present in the representative region. That is, this is the number of fillers 4 measured when it is assumed that there are no defects in the recesses 3 in the representative region and that all the recesses 3 in the representative region are filled with the filler 4 without excess or deficiency.

The filler filling rate may be less than 100 (%) for some reason. Causes of this include misalignment of the concave portion 3 (the concave portion 3 is formed at a position different from the position where it should originally be formed), defects and distortion of the concave portion 3 (being a shape different from the original shape), etc. Is mentioned. When the position shift or distortion of the recess 3 occurs, the filler 4 may not be filled in the recess 3. When the defect of the recess 3 occurs, there is no recess 3 to be filled with the filler 4. Accordingly, in any case, the filler filling rate decreases. In FIG. 1, two recesses 3 a are missing in the unit array pattern M at the point X. Further, one recess 3a is missing in the unit array pattern M at the other end R.

The distribution of filler filling rate can have various modes. For example, the filler filling rate may have periodicity along the length direction P. Specifically, as illustrated by a graph L1 in FIG. 3, the filler filling rate in each portion may have a distribution that undulates along the length direction P.

Here, the horizontal axis of FIG. 3 indicates the distance from the starting point of the film body 2 to each part on the film body 2 (that is, the distance in the length direction), and the vertical axis indicates the filler filling rate. The graph L1 shows the correspondence between the distance in the length direction of the filler-filled film 1 according to this embodiment and the filler filling rate. On the other hand, the graph L2 shows the correspondence between the distance in the length direction of the conventional filler-filled film (that is, produced using the stamper master) and the filler filling rate.

As shown by the graphs L1 and L2, in both the filler-filled film 1 according to the present embodiment and the conventional filler-filled film, the filler filling rate has a distribution that undulates along the length direction. However, the filler-filled film 1 according to this embodiment has a small variation in the filler filling rate, whereas the conventional filler-filled film has a very large variation in the filler filling rate. And in the conventional filler-filled film, the variation of the filler filling rate increases as the film body becomes longer. On the other hand, in this embodiment, as shown in the Example mentioned later, even if the film main body 2 becomes long, the dispersion | variation in a filler filling rate can be suppressed. That is, in this embodiment, the difference between the filler filling rate at each portion and the filler filling rate at one end F is suppressed to less than 0.5%.

<2. Various modifications>
Next, various modified examples of the filler-filled film 1 will be described with reference to FIGS. A filler-filled film 1a shown in FIG. 4 is obtained by adding a coating layer 5 to the filler-filled film 1 described above. The covering layer 5 covers the surface of the film body 2, that is, the surface (wall surface and bottom surface) of the recess 3 and the surface (tip surface) of the protrusion 3 b between the recesses 3. The covering layer 5 may cover only one of the surface of the concave portion 3 and the surface of the convex portion 3b. The filler 4 is filled in the concave portion 3 covered with the coating layer 5.

Here, the material (composition) constituting the coating layer 5 is not particularly limited, and may be an organic material or an inorganic material. Although the material which comprises the coating layer 5 should just be selected suitably according to the use of the filler filling film 1a, it is preferable to comprise with the material different from the film main body 2. FIG. For example, the coating layer 5 may be an inorganic layer. The coating layer 5 is formed, for example, by vapor-depositing the material constituting the coating layer 5 on the film body 2. The layer thickness of the covering layer 5 is not particularly limited, but is preferably substantially uniform on the surface of the film body 2 regardless of the shape of the recess 3. Moreover, it is preferable that the part formed in the surface of the recessed part 3 is formed in the surface of the recessed part 3 in the ratio of 30 volume% or less of the hollow part of the recessed part 3. FIG. Further, the vapor deposition method is not particularly limited. For example, the coating layer 5 may be formed only on a part of the recess 3 (that is, inclined) by performing oblique deposition. In this case, since the wall surface of the recessed part 3 can be inclined, it becomes easy to fill the recessed part 3 with the filler 4. When the coating layer 5 is made of an organic material, the coating layer 5 may be formed by applying or spraying an organic material. Also at this time, the opening surface and the spraying direction may be inclined.

A filler-filled film 1b shown in FIG. 5 is obtained by further forming a coating layer 6 on the surface of the filler-filled film 1a shown in FIG. The coating layer 6 covers a portion of the coating layer 5 that covers the convex portion 3 b and an exposed surface of the filler 4. Here, the exposed surface of the filler 4 means a surface exposed to the outside through the opening surface of the recess 3. The material constituting the coating layer 6 is not particularly limited, and may be an organic material or an inorganic material. The material which comprises the coating layer 6 should just be suitably selected according to the use of the filler filling film 1b. For example, the covering layer 6 may be made of the same inorganic material as the covering layer 5 or may be made of a different inorganic material. The covering layer 6 is formed by the same method as the covering layer 5.

A filler-filled film 1c shown in FIG. 6 is obtained by forming a coating layer 7 on the surface of the filler-filled film 1. The covering layer 7 covers the surface of the convex portion 3 b and the exposed surface of the filler 4. The material (composition) constituting the coating layer 7 is not particularly limited, and may be an organic material or an inorganic material. The material which comprises the coating layer 7 should just be suitably selected according to the use of the filler filling film 1c. For example, the coating layer 7 may be an inorganic layer. The covering layer 7 is formed by the same method as the covering layer 5.

A filler-filled film 1d shown in FIG. 7 is obtained by forming an adhesive layer 8 on the back surface of the film body 2 (the surface opposite to the surface on which the recesses 3 are formed). The filler-filled film 1d may be bonded to another object (for example, another filler-filled film according to the present embodiment, an arbitrary base material, or the like) via the adhesive layer 8. Needless to say, the adhesive layer 8 may be formed on the filler-filled films 1a to 1c shown in FIGS.

8 is a laminate film 20 in which two filler-filled films 1 are bonded together with an adhesive layer 8 interposed therebetween. In the laminated film 20 shown in FIG. 8, the number of laminated layers is two, but the number of laminated layers is not limited to this. Moreover, the arrangement pattern of the recessed part 3 of each filler filling film 1 may be the same, or may differ. For example, the arrangement pattern of the recesses 3 of each filler-filled film 1 may be similar to each other. Each filler-filled film 1 may be filled with the same filler 4, or a different filler 4 may be filled for each filler-filled film 1.

The laminated film 20 may be produced by laminating the filler-filled film 1d shown in FIG. The laminated film 20 may be produced by repeating the process of applying the adhesive layer 8 on the surface of the filler-filled film 1 and attaching another filler-filled film 1 thereon. Of course, the filler-filled films 1a to 1c shown in FIGS. 4 to 6 may be laminated.

9 is obtained by bonding the filler-filled film 1 to the surface of the base material 31 with the adhesive layer 8 interposed therebetween. The type of the base material 31 is not particularly limited. The base material 31 may be a planar member (for example, a film or a plate), or may be a three-dimensional member (for example, various housings). Further, the filler-filled films 1a to 1d, the laminated film 20, and a sheet film described later may be bonded to the base material 31.

<3. Sheet-fed film>
The filler-filled film 1 described above may be a single wafer film by being cut into a plurality of sheets. In the filler-filled film 1 according to the present embodiment, the filler filling rate can be stabilized over the entire region, so that a plurality of homogeneous sheet films can be produced. In addition, the film which concerns on each modification mentioned above may also be made into a single wafer film.

The use of each film is not particularly limited, but may be used in, for example, printed electronics and its application fields (related fields). Moreover, you may use not only the above-mentioned field | area but as a functional film (device). For example, it may be used for medical treatment such as a biosensor or a diagnostic device, biotechnology, healthcare, life science, or the like, or may be an optical element. Moreover, you may use for a battery, energy relation, vehicle-mounted (automobile) relation.

<4. Configuration of transfer device>
The film body 2 can be manufactured by a roll-to-roll type transfer device. Below, with reference to FIG. 10, the structure of the transfer apparatus 100 which is an example of a transfer apparatus is demonstrated. In the transfer apparatus 100 shown in FIG. 10, the film main body 2 is produced using a photocurable resin.

The transfer device 100 includes a master 110, a base material supply roll 151, a winding roll 152, guide rolls 153 and 154, a nip roll 155, a peeling roll 156, a coating device 157, and a light source 158.

The master 110 is a cylindrical or columnar member, and a plurality of convex portions 113 are formed on the peripheral surface of the master 110. These convex portions 113 have the inverted shape of the concave portion 3 described above. That is, in the transfer apparatus 100, the film main body 2 is produced by transferring the arrangement pattern of the convex portions 113 formed on the peripheral surface of the master 110 to the transferred film 2a.

The material constituting the master 110 and the size (diameter, etc.) of the master 110 are not particularly limited. For example, the master 110 may be made of quartz glass (SiO ₂ ) such as fused silica glass or synthetic quartz glass, stainless steel, or the like. The diameter (outer diameter) of the master 110 may be 50 to 300 mm. When the master 110 has a cylindrical shape, the thickness may be 2 to 50 mm.

The method of forming the convex 113 on the peripheral surface of the master 110 is not particularly limited. For example, the convex part 113 may be produced by mechanically cutting the peripheral surface of the master 110 or may be produced by etching. The outline of the process for producing the master 110 by etching is as follows. That is, the peripheral surface of a cylindrical or columnar substrate is covered with a resist layer. Next, a portion of the resist layer where the convex portion 113 is not formed (a portion that becomes a concave portion) is irradiated with laser light to form a latent image on the resist layer. A configuration example of an exposure apparatus that irradiates the substrate with laser light will be described later. Next, the latent image portion is removed by developing the resist layer. Next, the substrate is etched using the resist layer as a mask. Thereby, since the part between the convex parts 113 is etched, the convex part 113 is formed. Further, a marking indicating a position on the peripheral surface of the master 110 may be provided on the peripheral surface of the master 110. The transfer progress can be confirmed by transferring such a marking to the transfer film 2a. Instead of marking the master 110, a part of the protrusion 113 formed on the master 110 may be intentionally shifted. In this case, since the position of the concave portion 3 corresponding to the convex portion 113 is also shifted, the concave portion 3 serves as a marking. In addition, it is preferable that the positional deviation of the convex part 113 is set within a range that does not affect the quality of the film body 2.

FIG. 12 shows an example of the master 110. A plurality of convex portions 113 are formed on the peripheral surface of the master 110. The arrangement pattern of the convex portions 113 is an inverted shape of the arrangement pattern of the concave portions 3 shown in FIG. That is, the arrangement pattern of the convex portions 113 is a hexagonal lattice arrangement pattern, and has periodicity in both the axial direction A and the circumferential direction B of the master 110.

The base material supply roll 151 is a roll in which a long substrate film 161 to be transferred is wound in a roll shape, and the winding roll 152 is a roll that winds up the film body 2. Further, the guide rolls 153 and 154 are rolls that transport the transfer base film 161. The nip roll 155 is a roll for bringing the transfer substrate film 161 on which the uncured resin layer 162 is laminated, that is, the transfer film 2 a into close contact with the master 110. The peeling roll 156 is a roll for peeling the transfer base film 161 on which the cured resin layer 162 a is laminated, that is, the film body 2 from the master 110.

The coating device 157 includes coating means such as a coater, and applies an uncured photocurable resin composition to the transfer base film 161 to form an uncured resin layer 162. The coating device 157 may be, for example, a gravure coater, a wire bar coater, or a die coater. The light source 158 is a light source that emits light having a wavelength capable of curing the photocurable resin composition, and may be, for example, an ultraviolet lamp.

The photo-curable resin composition is a resin that is hardened due to a decrease in fluidity when irradiated with light having a predetermined wavelength. Specifically, the photocurable resin composition may be an ultraviolet curable resin such as an acrylic resin. Moreover, the photocurable resin composition may contain an initiator, a filler, a functional additive, a solvent, an inorganic material, a pigment, an antistatic agent, a sensitizing dye, or the like, if necessary.

In the transfer apparatus 100, first, the transferred substrate film 161 is continuously sent from the substrate supply roll 151 through the guide roll 153. In addition, you may change the base material supply roll 151 into the base material supply roll 151 of another lot in the middle of sending out. An uncured photocurable resin composition is applied to the transferred substrate film 161 by the coating device 157, and the uncured resin layer 162 is laminated on the substrate film 161 to be transferred. Thereby, the to-be-transferred film 2a is produced. The transferred film 2 a is brought into close contact with the master 110 by the nip roll 155. The light source 158 cures the uncured resin layer 162 by irradiating light to the uncured resin layer 162 that is in close contact with the master 110. As a result, the arrangement pattern of the convex portions 113 formed on the outer peripheral surface of the master 110 is transferred to the uncured resin layer 162. That is, the cured resin layer 162a in which the recess 3 is formed is formed. Here, the light source 158 may irradiate the recess 3 with light obliquely. In this case, only a part of the recess 3 is cured. Subsequently, the transfer base film 161 on which the cured resin layer 162 a is laminated, that is, the film body 2 is peeled from the master 110 by the peeling roll 156. Next, the film body 2 is wound up by the winding roll 152 through the guide roll 154.

As described above, in the transfer device 100, the transfer film 2a is conveyed by roll-to-roll, while the peripheral surface shape of the master 110 is transferred to the transfer film 2a. Thereby, the film main body 2 is produced.

In addition, when producing the film main body 2 with a thermoplastic resin, the coating device 157 and the light source 158 are unnecessary. In addition, the substrate film 161 to be transferred is a thermoplastic resin film, and a heating device is disposed upstream of the master 110. The transferred substrate film 161 is heated and softened by this heating device, and then the transferred substrate film 161 is pressed against the master 110. As a result, the arrangement pattern of the convex portions 113 formed on the peripheral surface of the master 110 is transferred to the substrate film 161 to be transferred. The transferred substrate film 161 may be a film made of a resin other than a thermoplastic resin, and the transferred substrate film 161 and the thermoplastic resin film may be laminated. In this case, the laminated film is pressed by the master 110 after being heated by the heating device.

Therefore, the transfer device 100 can continuously manufacture the transfer product, that is, the film body 2 to which the arrangement pattern of the convex portions 113 formed on the master 110 is transferred. Moreover, the film main body 2 produced using the transfer device 100 can suppress the occurrence of defects in the recesses 3 and, in turn, can suppress variations in the filler filling rate.

<5. Configuration of exposure apparatus>
Next, the configuration of the exposure apparatus 200 will be described based on FIG. The exposure apparatus 200 is an apparatus that forms the master 110. The exposure apparatus 200 includes a laser light source 221, a first mirror 223, a photodiode (Photodiode: PD) 224, a deflection optical system 225, a control mechanism 237, a second mirror 231, a moving optical table 232, and a spindle. A motor 235 and a turntable 236 are provided. The substrate 110a is placed on the turntable 236 and can rotate.

The laser light source 221 is a light source that emits laser light 220, and is, for example, a solid-state laser or a semiconductor laser. The wavelength of the laser light 220 emitted from the laser light source 221 is not particularly limited, but may be, for example, a wavelength in a blue light band of 400 nm to 500 nm. Further, the spot diameter of the laser beam 220 (the diameter of the spot irradiated on the resist layer) may be smaller than the diameter of the opening surface of the recess 3, and may be about 200 nm, for example. The laser light 220 emitted from the laser light source 221 is controlled by the control mechanism 237.

The laser light 220 emitted from the laser light source 221 travels straight as a parallel beam, is reflected by the first mirror 223, and is guided to the deflection optical system 225.

The first mirror 223 is composed of a polarization beam splitter, and has a function of reflecting one of the polarization components and transmitting the other of the polarization components. The polarization component transmitted through the first mirror 223 is received by the photodiode 224 and subjected to photoelectric conversion. Further, the light reception signal photoelectrically converted by the photodiode 224 is input to the laser light source 221, and the laser light source 221 performs phase modulation of the laser light 220 based on the input light reception signal.

The deflection optical system 225 includes a condenser lens 226, an electro-optic deflector (EOD) 227, and a collimator lens 228.

In the deflection optical system 225, the laser light 220 is condensed on the electro-optic deflection element 227 by the condenser lens 226. The electro-optic deflection element 227 is an element that can control the irradiation position of the laser light 220. The exposure apparatus 200 can also change the irradiation position of the laser beam 220 guided onto the moving optical table 232 by the electro-optic deflection element 227. After the irradiation position of the laser beam 220 is adjusted by the electro-optic deflection element 227, the laser beam 220 is converted into a parallel beam again by the collimator lens 228. The laser light 220 emitted from the deflection optical system 225 is reflected by the second mirror 231 and guided horizontally and parallel onto the moving optical table 232.

The moving optical table 232 includes a beam expander (BEX) 233 and an objective lens 234. The laser light 220 guided to the moving optical table 232 is shaped into a desired beam shape by the beam expander 233 and then irradiated to the resist layer of the substrate 110 a through the objective lens 234. Further, the moving optical table 232 moves by one feed pitch in the arrow R direction (feed pitch direction) every time the substrate 110a rotates once. A base material 110 a is installed on the turntable 236. The spindle motor 235 rotates the base 110a by rotating the turntable 236.

The control mechanism 237 includes a formatter 240 and a driver 230, and controls the irradiation of the laser light 220. The formatter 240 generates a modulation signal that controls the irradiation of the laser light 220, and the driver 230 controls the laser light source 221 based on the modulation signal generated by the formatter 240. Thereby, irradiation of the laser beam 220 to the base material 110a is controlled.

The formatter 240 generates a control signal for irradiating the master 110 with the laser light 220 based on an input image on which an arbitrary pattern to be drawn on the master 110 is drawn. Specifically, first, the formatter 240 acquires an input image on which an arbitrary pattern to be drawn on the master 110 is drawn. The input image is an image corresponding to a developed view of the outer peripheral surface of the master disk 110 that is cut out in the axial direction and extended to one plane. Next, the formatter 240 divides the input image into small areas of a predetermined size (for example, in a grid pattern), and determines whether or not a drawing pattern is included in each of the small areas. Subsequently, the formatter 240 generates a control signal for controlling to irradiate the laser light 220 to each small area determined to include a drawing pattern. Further, the driver 230 controls the output of the laser light source 221 based on the control signal generated by the formatter 240. Thereby, irradiation of the laser beam 220 onto the master 110 is controlled.

<6. Method for producing filler-filled film>
Next, the manufacturing method of the filler filling film 1 is demonstrated. First, the master 110 described above is prepared. Next, using the transfer device 100, the shape of the peripheral surface of the master 110 is transferred to the film 2a to be transferred. Thereby, the film main body 2 is produced. Next, the filler 4 is filled into the plurality of recesses 3 formed on the surface of the film body 2. Here, the method of filling the recess 3 with the filler 4 is not particularly limited. For example, the filler 4 is dispersed on the surface of the film body 2. Next, the surface of the film body 2 is wiped with a cloth or the like. Thereby, the filler 4 can be filled into the recess 3 formed on the surface of the film body 2. When only a part of the recess 3 is cured, the recess 3 may be completely cured after the filler 4 is filled in the recess 3. Thereby, the filler 4 is integrated with the film body 2 in the recess 3. Note that the filler 4 filled in the filler-filled film 1 may be transferred to another film or the like. Further, such transfer films may be sequentially laminated. Moreover, you may laminate | stack with another film. That is, by repeating the transfer and lamination, a part or all of the filler is provided at a predetermined position on the other film.

(Example)
Next, examples of the present invention will be described. In the example, the film body 2 was produced using the transfer device 100. The master 110 was produced by the following process. Specifically, a DLC (Diamond Like Carbon) film having a thickness of 800 nm is formed on the outer peripheral surface of the base 110a made of cylindrical quartz glass having a thickness of 4.5 mm by CVD (Chemical Vapor Deposition) using a hydrocarbon-based gas. A film was formed as an intermediate layer. Next, a tungsten oxide film was formed on the intermediate layer with a film thickness of 55 nm by a sputtering method to form a resist layer.

Subsequently, thermal lithography using laser light was performed by the exposure apparatus 100 to form a latent image on the resist layer. Note that a blue semiconductor laser that emits laser light having a wavelength of 405 nm was used as the laser light source of the exposure apparatus 100. As the exposure pattern, an array pattern in which circles having a diameter of 7 μm were arranged in a hexagonal lattice at a pitch of 10 μm (distance between the centers of the circles) was used. Further, the exposure apparatus 100 is configured to apply a portion other than the circle having the diameter of 7 μm so that the circle having the diameter of 7 μm becomes a convex portion on the master (that is, the circle having the diameter of 7 μm becomes the concave portion 3 in the transferred film body 2). And exposed.

Subsequently, the base material 110a on which the resist layer was exposed was developed using a 2.38 mass% aqueous solution of TMAH (tetramethylammonium hydroxide) to dissolve the exposed portion of the resist.

Further, the intermediate layer was etched by reactive ion etching with O ₂ gas using the developed resist layer as a mask. Subsequently, the substrate 110a was etched by reactive ion etching with a CF-based gas using the resist layer and the intermediate layer as a mask. Etching of the base material 110a was performed until the height of the convex portion 113 became 7 μm so that the aspect ratio of the concave portion 3 in the film body 2 was 1. Through the above steps, a cylindrical master 110 having a concavo-convex structure formed on the outer peripheral surface was produced.

Subsequently, a photocurable resin composition containing 100 parts by mass of an acrylate resin (M208, Toagosei) and 2 parts by mass of a photopolymerization initiator (IRGCUR184, BASF) in a base film (thickness 50 μm) made of 50 cm wide PET. The product was applied at a film thickness of 30 μm. Furthermore, using the transfer device 100, the master was pressed against the base film, and the concavo-convex structure was transferred to the base film having a strength of 1000 m. Light irradiation was performed at 1000 mJ with a high-pressure mercury lamp. As a result, a film body 2 was produced in which circular recesses having a diameter of 7 μm and a depth of 7 μm (aspect ratio 1) were arranged in a hexagonal lattice pattern with a distance between the centers of the recesses of 10 μm.

Further, 100 representative areas of 1 mm ² were extracted arbitrarily, and the number of recesses in each representative area was measured with an optical microscope. Then, the surface density of the recesses 3 (the number of recesses 3 formed per unit area of the film body 2) was calculated by dividing the total number of the numbers measured in each representative region by the total area of the representative regions. As a result, the surface density of the recesses 3 was 11,500 / mm ² = 11,50,000 / cm ² . Here, the concave portions 3 to be counted are the concave portions 3 that are not connected to each other (the convex portions 3b exist between the concave portions 3). That is, in this embodiment, the recessed portions 3 connected to each other are determined to be defective. Such a defect may be caused by a displacement of the recess 3 or the like.

Further, Eposta MA1006 manufactured by Nippon Shokubai Co., Ltd. was prepared, and this resin filler was classified so as to have an average diameter of 5 μm. The diameter of the resin filler is a diameter when each particle of the resin filler is regarded as a sphere, that is, a sphere equivalent diameter. The average diameter is an arithmetic average value of the diameters of the resin fillers. Classification was performed using an image type particle size distribution analyzer FPIA3000 (manufactured by Sysmex Corporation, Malvern). The resin filler after classification was used as the filler 4. Filling the filler 4 was performed by the method described above. That is, the filler 4 was dispersed on the surface of the film body 2. Subsequently, the filler 4 was filled in the concave portion 3 by wiping the filler 4 with a cloth. Thereby, the filler filling film 1 was produced.

Moreover, 100 representative areas of 1 mm ² were extracted arbitrarily, and the number of fillers 4 in each representative area was measured with an optical microscope. Then, the surface density of the filler 4 (the number of recesses 3 formed per unit area of the film body 2) was calculated by dividing the total number of the numbers measured in each representative region by the total area of the representative region. As a result, the surface density of the filler 4 was 11,500 pieces / mm ² = 11,50,000 pieces / cm ² . The filler 4 to be counted was a filler 4 that is completely filled in the recess 3. Even when the recesses 3 are connected to each other, when the filler 4 is completely filled in the recesses 3, the filler 4 is also counted. The counting target was the same in the measurement of the filler filling rate described later. When two recesses 3 are connected, the recess 3 can be filled with a maximum of two fillers 4.

Then, a point 1 m from the leading edge (the edge that is first introduced into the master 110) in the length direction P of the filler-filled film 1 is one end F (starting point), and a point 1000 m from the leading edge is the other end. The filler filling rate at each point of 1 m, 250 m, 500 m, 750 m, and 1000 m from the tip edge was calculated as part R (end point).

Specifically, a unit array pattern M including each point is extracted, and a unit array existing within a range of 10 cm (20% of the film width) on the positive side in the length direction P with respect to the unit array pattern M. Pattern M was extracted. These unit array patterns M were used as measurement target areas.

Then, a representative region of 200 μm * 200 μm was set for about 25 cm ² in the measurement target region, and the number of fillers 4 in each representative region was measured by optical microscope observation. And the filler filling rate was measured by dividing the sum total of the measured value of each representative area | region by the sum total of the ideal number of the fillers 4 which exist in each representative area | region. The filler filling rate at each point is shown in Table 1 below. As shown in Table 1, when the length of the filler-filled film 1 is 1000 m, the filler filling rate of 1 m from the leading edge is almost the same as the filler filling rate at each point of 250 m, 500 m, 750 m, and 1000 m. It was. Therefore, a stable (ie, highly reproducible) filler filling rate was obtained at points of 0.1%, 25%, 50%, 75%, and 100% with respect to the entire length of the filler-filled film 1. Become.

In addition, when the filler filling rate was measured in the same manner at a point about 100 m from the tip edge, a value almost the same as Table 1 was obtained. Thus, in this example, it is clear that the difference between the filler filling rate at one end F of the film body 2 and the filler filling rate at the other part of the film body 2 is 0.1% or less. became. In addition, the filler-filled film 1 has the recesses 3 arranged in a hexagonal lattice pattern, that is, in the most dense arrangement pattern. That is, the filler-filled film 1 is filled with the fillers 4 in the densest arrangement pattern. And even if it is such an arrangement | sequence pattern, the filler filling rate very stable (namely, very reproducible) in the length direction of the filler filling film 1 is obtained. Accordingly, the filler 4 can be expected to have the same effect as long as it is in a range in which the recesses 3 can be provided, regardless of the arrangement pattern.

Further, when the defect of the concave portion 3 continuous in the length direction P was observed in the representative region, a location where the number of continuous defects was 10 or more could not be confirmed.

(Comparative example)
A SUS plate having a size of 10 cm * 10 cm was mechanically cut to obtain a stamper master on which convex portions having the same arrangement pattern as in the example were formed. Further, a fluorine-based mold release agent (Die Free GA70500 manufactured by Daikin Industries, Ltd.) was sprayed on the surface (uneven surface) on which the convex portions of the stamper master were formed. Then, a film body was manufactured by performing the same process except that the master 110 of the transfer device 100 was replaced with a stamper master.

When the shape of the concave portion of the film body was observed with an optical microscope, a defective concave portion (connection between the concave portions) could be confirmed at a point where the stamper was repeated 200 times (a point 20 m from the leading edge). Therefore, when the stamper was repeated 200 times, the stamper was stopped and the filler was filled in the recess. The filler was the same as in the example. And when the filler filling rate in a 200-m point from a front-end edge was measured, the filler filling rate became 99.5%. Thereafter, as the number of stampers increased, the number of recess defects increased. Therefore, it is estimated that as the number of stampers increases, the variation of the filler filling rate becomes large, and the filler filling rate becomes a value lower than 99.5%.

From the above results, it was clarified that the filler filling rate can be maintained in a higher range in the example than in the comparative example.

As described above, in the filler-filled film 1 according to the present embodiment, the filler filling rate is more stable. Here, the film body 2 may be a long film. In the conventional filler-filled film, the filler filling rate becomes less stable as the film body 2 becomes longer, so that the effect of the present embodiment is more likely to appear.

Further, the filler filling rate may have periodicity along the length direction of the film body 2. Even in this case, the filler filling rate is stable.

Further, all the recesses 3 may have substantially the same shape. In this case, the filler filling rate can be further stabilized.

Further, the number of fillers filled per unit area of the film body 2 may be 50,000,000 pieces / cm ² or less. Even in this case, the filler filling rate is stable.

Further, the filler 4 may be integrated with the film body 2 in the recess 3. In this case, wasteful removal of the filler 4 is suppressed, so that the filler filling rate is more stable.

Moreover, you may provide the coating layers 5, 6, and 7 formed in at least one part among the surfaces of the film main body 2. FIG. Even in this case, the filler filling rate is stable. Furthermore, the use of the filler-filled film 1 is expanded by forming the coating layers 5, 6, and 7 according to the use of the filler-filled film 1.

Further, the coating layer may be formed on at least a part of the surface of the concave portion, the surface of the convex portion between the concave portions, and the exposed surface of the filler. Even in this case, the filler filling rate is stable.

Moreover, the coating layer may contain an inorganic material. Even in this case, the filler filling rate is stable.

The film body may be formed of a curable resin or a plastic resin. Even in this case, the filler filling rate is stable.

In the present embodiment, the filler-filled film 1 may be a single wafer film. In this case, the quality of the sheet film is stabilized.

Also, a laminated film in which a plurality of films are laminated may be formed. In this case, the quality of the laminated film is stabilized.

Also, an adhesive layer formed on the back surface of the film body may be provided. Thereby, the filler filling film 1 can be easily bonded to the other base material 31 or the like.

Moreover, in this embodiment, you may produce the bonding body 30 by bonding each said film to the base material 31. FIG. In this case, the function of the bonded body 30 can be stabilized. This is because the filler filling rate of the filler-filled film 1 or the like is stable.

The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to such examples. It is obvious that a person having ordinary knowledge in the technical field to which the present invention pertains can come up with various changes or modifications within the scope of the technical idea described in the claims. Of course, it is understood that these also belong to the technical scope of the present invention.

1, 1a to 1d Filler-filled film 2 Film body 3 Recess 4

Filler

5, 6, 7 Cover layer 8 Adhesive layer

Claims

The film body;
A plurality of recesses formed on the surface of the film body;
A filler filled in each of the recesses,
The diameter of the opening surface of the recess is at least larger than the visible light wavelength,
The array pattern of the recesses has a periodicity along the length direction of the film body,
The filler-filled film, wherein a difference between the filling rate of the filler at one end of the film body and the filling rate of the filler at the other part of the film body is less than 0.5%.
The filler-filled film according to claim 1, wherein the film body is a long film.
The filler filling film according to claim 1 or 2, wherein the filling rate of the filler has a periodicity along a length direction of the film body.
The filler-filled film according to any one of claims 1 to 3, wherein all the concave portions have substantially the same shape.
The filler-filled film according to any one of claims 1 to 4, wherein the number of fillers filled per unit area of the film body is 50,000,000 pieces / cm 2 or less.
The filler-filled film according to any one of claims 1 to 5, wherein the filler is integrated with the film body in the recess.
The filler-filled film according to any one of claims 1 to 6, comprising a coating layer formed on at least a part of the surface of the film body.
The filler-filled film according to claim 7, wherein the coating layer is formed on at least a part of a surface of the concave portion, a surface of the convex portion between the concave portions, and an exposed surface of the filler.
The filler-filled film according to claim 7 or 8, wherein the coating layer contains an inorganic material.
The filler-filled film according to any one of claims 1 to 9, wherein the film body is formed of a curable resin or a plastic resin.
A single wafer film produced by cutting the filler-filled film according to any one of claims 1 to 10 into a plurality of sheets.
A laminated film in which the film according to any one of claims 1 to 11 is laminated.
The film according to any one of claims 1 to 12, further comprising an adhesive layer formed on a back surface of the film body.
A film according to any one of claims 1 to 13,
A bonded body comprising: a substrate on which the film is bonded.
Preparing a cylindrical or columnar master having a plurality of convex portions formed on the peripheral surface;
While transporting a long transfer film by roll-to-roll, transferring the peripheral surface shape of the master to the transfer film, thereby producing a film body,
Filling a plurality of recesses formed on the surface of the film body with a filler,
The diameter of the opening surface of the recess is at least larger than the visible light wavelength,
The method for producing a filler-filled film, wherein a difference between the filler filling rate at one end of the film body and the filler filling rate at the other part of the film body is less than 0.5%.