WO2016067452A1 - Component-mounting machine and nozzle tool used therefor - Google Patents

Component-mounting machine and nozzle tool used therefor Download PDF

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Publication number
WO2016067452A1
WO2016067452A1 PCT/JP2014/079070 JP2014079070W WO2016067452A1 WO 2016067452 A1 WO2016067452 A1 WO 2016067452A1 JP 2014079070 W JP2014079070 W JP 2014079070W WO 2016067452 A1 WO2016067452 A1 WO 2016067452A1
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WO
WIPO (PCT)
Prior art keywords
nozzle
clamp member
nozzle tool
mounting head
tool
Prior art date
Application number
PCT/JP2014/079070
Other languages
French (fr)
Japanese (ja)
Inventor
力茂 手嶋
Original Assignee
富士機械製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士機械製造株式会社 filed Critical 富士機械製造株式会社
Priority to PCT/JP2014/079070 priority Critical patent/WO2016067452A1/en
Priority to JP2016556157A priority patent/JP6438043B2/en
Publication of WO2016067452A1 publication Critical patent/WO2016067452A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components

Definitions

  • the present invention relates to a component mounter and a nozzle tool used therefor.
  • Patent Document 1 proposes a component mounter that performs production while automatically exchanging a plurality of types of nozzle tools.
  • the component mounter includes a mounting head that is detachably provided on a moving table that moves in the X axis and the Y axis, and a nozzle tool that is detachably provided on the mounting head and holds a suction nozzle.
  • nozzle tools include a large single nozzle tool that holds one suction nozzle, a general-purpose 4 multi-nozzle tool that holds four suction nozzles, and a high-speed 12 multi-nozzle tool that holds 12 suction nozzles. To do. That is, component mounting using each nozzle tool is automatically switched in one component mounting machine.
  • an L-shaped clamp member is provided for making the mounting head and the nozzle tool detachable.
  • the nozzle tool can be detached from the mounting head downward. In other words, the nozzle tool does not fall off the mounting head even in the unclamped state, simply by moving the L-shaped clamp member downward from the housing of the mounting head.
  • the present invention provides a component mounter capable of preventing the nozzle tool from falling off the mounting head using a member different from the clamp member when the clamp member cannot hook the nozzle tool, and a nozzle tool used therefor. For the purpose.
  • a component mounter includes a mounting head and a nozzle tool that is detachably provided below the mounting head and holds a suction nozzle.
  • the mounting head is a housing and a clamp member that is movably provided in the housing. The mounting state restricts movement of the nozzle tool relative to the housing, and allows the nozzle tool to be detached from the housing. And the clamp member that switches in an unclamped state that is not locked to the nozzle tool when the nozzle tool moves downward from the clamped state.
  • the housing includes a locking portion that locks the nozzle tool when the nozzle tool moves downward when the clamp member transitions from the clamped state to the unclamped state.
  • the nozzle tool according to the present invention is a nozzle tool used in a component mounting machine, provided detachably on the mounting head, and holding a suction nozzle.
  • the nozzle tool is a clamp member of the mounting head.
  • a state in which movement is restricted with respect to the mounting head by locking is a clamped state, and the nozzle tool is allowed to be detached from the mounting head and the nozzle tool is not locked to the clamp member.
  • the nozzle tool In the unclamped state, the nozzle tool is locked to the clamp member in the clamped state and is not locked to the clamp member in the unclamped state, and the clamp member is clamped When the nozzle tool is moved from the state to the unclamped state, And a be-engaged portion to be engaged with the locking portions when moving to.
  • the locking portion locks the nozzle tool when the nozzle tool moves downward. Therefore, when the clamp member cannot hook the nozzle tool, it is possible to prevent the nozzle tool from dropping from the mounting head by using a locking portion different from the clamp member.
  • the nozzle tool according to the present invention has the same effect.
  • FIG. 2 is an axial sectional view of a portion including a mounting head constituting the component mounting machine of FIG. 1 and a nozzle tool clamped by the mounting head.
  • the mounting head shown in FIG. 2 is a cross-sectional view including a first air connection path (right side) and a second air connection path (left side) with the nozzle tool.
  • FIG. 2 It is the perspective view which looked at a part of mounting head of Drawing 2 from the lower part.
  • FIG. 2 is an axial sectional view of a portion including a mounting head constituting the component mounting machine of FIG. 1 and a nozzle tool clamped by the mounting head.
  • the mounting head shown in FIG. 2 is a cross-sectional view including a first air connection path (right side) and a second air connection path (left side) with the nozzle tool.
  • FIG. 4 is an axial partial sectional view including a mounting head and a nozzle tool in a clamped state, and an air supply circuit.
  • the mounting head shown in FIG. 6 is a cross section (right side) including an air filter interposed in the first air connection path and a cross section (left side) including a separation air supply path. It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of a clamped state.
  • FIG. 7 is a cross-sectional view including an air supply path to each chamber of the cylinder. It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of an unclamp state, Comprising: It is sectional drawing containing the clamp member of a mounting head.
  • the component mounter 1 is a model of a nozzle tool automatic replacement system.
  • the component mounter 1 includes a substrate transfer device 2, a component supply device 3, a component transfer device 4 and a component camera 5.
  • the substrate transport device 2 transports the circuit board K in the X-axis direction and holds it at a predetermined mounting position.
  • the component supply device 3 supplies components of a plurality of component types. 1 exemplifies a type in which a plurality of tape feeders are arranged on the base 9 in the X-axis direction.
  • the component transfer device 4 transfers the component supplied from the component supply device 3 to the circuit board K held by the substrate transfer device 2.
  • the component transfer device 4 includes, for example, an XY robot, and includes a moving table (X-axis slider 43) that can move in the X-axis direction and the Y-axis direction with respect to the base 9.
  • the component transfer device 4 is provided above the substrate transfer device 2 and the component supply device 3.
  • the component transfer device 4 includes a guide rail 41, a Y-axis slider 42, an X-axis slider 43 as a moving table, a mounting head 44, a nozzle tool 45, and a substrate camera 46.
  • the guide rail 41 is provided on the base 9 so as to extend in the Y-axis direction.
  • the Y-axis slider 42 is provided so as to be movable in the Y-axis direction along the guide rail 41 and is driven by a servo motor.
  • An X-axis slider 43 as a moving table is guided and supported by the Y-axis slider 42 so as to be movable in the X-axis direction, and is driven by a servo motor.
  • the mounting head 44 is detachably provided on the X-axis slider 43 as a moving table.
  • the mounting head 44 holds the nozzle tool 45 detachably below.
  • the nozzle tool 45 includes, for example, a single nozzle tool that holds one large suction nozzle, a general-purpose 4 multi-nozzle tool that holds four suction nozzles, and a high-speed 12 multi-tool that holds 12 suction nozzles.
  • the mounting head 44 further includes an R-axis drive mechanism (not shown) for turning the entire nozzle tool 45, and a suction nozzle 240 with respect to the main body of the nozzle tool 45 in a nozzle tool 45 that holds a plurality of suction nozzles. And a Z-axis drive mechanism (not shown) for moving the suction nozzle 240 in the Z-axis direction.
  • the mounting head 44 has a mechanism (shown in FIG. 2 and FIG. 3 and the like) that sucks and detaches parts by circulating air (positive pressure air and negative pressure air) between the mounting tool 44 and the air. And a clamping mechanism (shown in FIGS. 2 and 3, etc.) of the nozzle tool 45. A mechanism for sucking and releasing parts and a clamp mechanism will be described later.
  • the board camera 46 is provided downward on the bottom surface of the X-axis slider 43 and images the circuit board K. The image picked up by the board camera 46 is used to control the position where the component is mounted.
  • the component camera 5 is provided upward on a base 9 between the substrate transfer device 2 and the component supply device 3. The component camera 5 images the state of the component held by the suction nozzle 240 while the mounting head 44 and the nozzle tool 45 are moving.
  • mounting head 44 (2. Detailed configuration of mounting head 44 and nozzle tool 45) Detailed configurations of the mounting head 44 and the nozzle tool 45 will be described with reference to FIGS.
  • the nozzle tool 45 exemplifies a single nozzle tool that holds one suction nozzle 240.
  • the mounting head 44 includes an R-axis housing 110, a branch path forming unit 130, a piston mechanism 140, a plurality of clamp members 150, an air filter unit 160, a plurality of seal members 171, 172, and a plurality of position references.
  • a pin 180, a ⁇ -axis housing 190, a negative pressure source 191, a valve 193, and a flow meter 194 are provided.
  • the R-axis housing 110 is provided so as to protrude below the mounting head 44 as shown in FIG.
  • the R-axis housing 110 is provided on the main body (not shown) of the mounting head 44 so as to be rotatable around the central axis.
  • the R-axis housing 110 includes a first housing 110a and a second housing 110b when classified as parts.
  • the R-axis housing 110 includes a shaft-shaped portion 111, a small-diameter cylindrical portion 112, a plurality of locking portions 113, and a plurality of reference marks 114 when classified as functions.
  • the shaft-shaped portion 111 is formed in a cylindrical shape having a through hole in the center, and is rotatable around the central axis with respect to the main body portion of the mounting head 44.
  • the shaft portion 111 includes a first housing 110a and a part of the second housing 110b.
  • the shaft-like portion 111 is formed by two members (first housing 110a and second housing 110b) in order to form a cylinder 111d (described later), but can also be formed by one member.
  • the shaft portion 111 has a cylindrical outer peripheral surface and a circular end surface.
  • the shaft portion 111 includes a head reference surface 111a and an escape groove 111b on the end surface.
  • the head reference surface 111 a is formed in a planar shape, and is provided in an annular shape on the outermost peripheral surface of the end surface of the shaft-like portion 111.
  • the head reference surface 111a is a surface that comes into contact with a tool reference surface 212 (described later) of the nozzle tool 45.
  • the escape groove 111b is formed in an annular shape on the inner peripheral side of the head reference surface 111a.
  • the relief concave groove 111b functions as a region for accommodating a part of the claw portion 213 when the claw portion 213 (described later) of the nozzle tool 45 is deformed by the pressing force of the clamp member 150 (described later).
  • the through-hole formed inside the shaft-like portion 111 includes an upper hole 111c, a cylinder 111d, and a lower hole 111e.
  • the upper hole 111c is formed to extend downward from the upper end of the shaft-like portion 111, and has a cylindrical inner peripheral surface.
  • the upper hole 111 c is formed at the center of the shaft-like portion 111.
  • the cylinder 111d is continuously formed below the upper hole 111c, is coaxial with the upper hole 111c, and has a cylindrical inner peripheral surface having a diameter larger than that of the upper hole 111c.
  • the upper hole 111c and the cylinder 111d are formed in the first housing 110a.
  • the lower hole 111e is formed continuously below the cylinder 111d and opens below the shaft-like portion 111.
  • the lower hole 111e is formed in the second housing 110b.
  • the shaft portion 111 includes a first air connection path 111f, a second air connection path 111g, a filter mounting hole 111h, a first chamber flow path 111i, a second chamber flow path 111j, and an air discharge path 111k.
  • the first air connection path 111f communicates between the cylinder 111d and the outside of the end surface of the shaft-like portion 111 (the outer peripheral portion of the end surface of the second housing 110b) as shown in the right part of the central axis in FIGS. Circulate air.
  • One of the first air connection paths 111f opens to the outer peripheral side of the upper hole 111c in the upper end of the cylinder 111d, and the other of the first air connection paths 111f is a head reference positioned on the outer peripheral side of the end surface of the shaft-shaped portion 111. Open to the surface 111a. That is, the first air connection path 111 f is formed on the outer peripheral side inside the shaft-like portion 111.
  • the first air connection path 111f extends upward from the opening on the cylinder 111d side, subsequently turns back in a U shape in the circumferential direction, and then continues downward to become the head reference of the shaft-like portion 111. Open to the surface 111a.
  • the second air connection path 111g communicates the upper hole 111c with the outside of the end surface of the shaft-like portion 111 (the outer peripheral portion of the end surface of the second housing 110b), as shown in the left part of the central axis in FIG. Circulate.
  • One of the second air connection paths 111g opens to the inner peripheral surface of the upper hole 111c
  • the other of the second air connection paths 111g opens to the head reference surface 111a located on the outer peripheral side of the end surface of the shaft-shaped portion 111.
  • the second air connection path 111 g is formed on the outer peripheral side inside the shaft-like portion 111. More specifically, the second air connection path 111g extends radially outward from the opening on the upper hole 111c side, and then opens downward to the head reference surface 111a of the shaft-shaped portion 111.
  • the filter mounting hole 111 h is formed in the U-shaped folded portion of the first air connection path 111 f and opens on the cylindrical outer peripheral surface of the shaft-shaped portion 111.
  • the filter mounting hole 111h is a portion where an air filter 161 described later is mounted.
  • the first chamber flow path 111 i is formed on the outer peripheral side of the shaft-like portion 111, communicates the upper hole 111 c and the cylinder 111 d, and circulates air. Specifically, one of the first chamber flow paths 111i opens on the inner peripheral surface of the upper hole 111c, and the other of the first chamber flow paths 111i opens upward on the inner peripheral surface of the cylinder 111d.
  • the second chamber flow path 111j is formed on the outer peripheral side of the shaft-shaped portion 111, communicates the upper hole 111c and the cylinder 111d, and circulates air. Specifically, one of the second chamber flow paths 111j opens on the inner peripheral surface of the upper hole 111c, and the second chamber flow path 111j is below the inner peripheral surface of the cylinder 111d, that is, the first chamber flow path 111i. Open below the opening.
  • the air discharge path 111k is formed on the outer peripheral side of the shaft-shaped portion 111, and communicates the air through the upper hole 111c and the lower hole 111e. Specifically, one of the air discharge paths 111k opens to the inner peripheral surface of the upper hole 111c, and the other of the air discharge paths 111k opens to the inner peripheral surface of the lower hole 111e. More specifically, the air discharge path 111k includes a first air discharge path 111k1 formed in the first housing 110a, and a second air discharge path 111k2 formed in the second housing 110b and communicating with the first air discharge path 111k1. Is provided.
  • the small-diameter cylindrical portion 112 is formed with a through hole in the center and protrudes downward from the central portion of the end surface of the shaft-shaped portion 111.
  • the inner peripheral side of the small diameter cylindrical portion 112 communicates with the prepared hole 111e of the shaft-shaped portion 111.
  • the small diameter cylindrical portion 112 is formed with a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface. In the present embodiment, four window portions 112a are formed at equal intervals in the small diameter cylindrical portion 112.
  • the window 112a is formed in a circular shape.
  • the plurality of locking portions 113 are formed to protrude radially outward from the outer peripheral surface of the small diameter cylindrical portion 112. As shown in FIG. 4, the plurality of locking portions 113 are formed below the window portion 112a of the small-diameter cylindrical portion 112 and are formed so as to be shifted in the circumferential direction with respect to the window portion 112a.
  • the plurality of reference marks 114 are provided on the end surface of the small diameter cylindrical portion 112. From the relative positional relationship between the plurality of reference marks 114, the center position of the R-axis housing 110 is detected.
  • the branch path forming unit 130 is disposed in the upper region 111 c of the shaft-like portion 111 and the region above the cylinder 111 d.
  • the branch path forming unit 130 includes a first branch path forming section 131, a plurality of partition pipes 132, 133, 134, 135, a second branch path forming section 136, and a lid section 137.
  • the first branch path forming part 131 is disposed below the upper hole 111c.
  • the first branch path forming part 131 is formed in a cylindrical shape.
  • Four annular grooves for arranging four O-rings are formed on the outer peripheral surface of the first branch path forming portion 131.
  • the inner peripheral surface of the first branch path forming portion 131 is formed in a stepped shape that decreases in diameter as it goes downward.
  • the first branch path forming portion 131 communicates with the inner peripheral side and each of the second air connection path 111g, the first chamber flow path 111i, the second chamber flow path 111j, and the air discharge path 111k.
  • a plurality of through holes are formed in the radial direction.
  • the plurality of partition pipes 132, 133, 134, and 135 are arranged in a region above the first branch path forming portion 131 in the upper hole 111c.
  • the plurality of partition tubes 132, 133, 134, and 135 are formed so that the diameter becomes smaller in order and that there are radial gaps. Accordingly, gaps are formed between the outer peripheral surface of the partition tube 132 and the inner peripheral surface of the upper hole 111c, between the partition tubes 132 and 133, between the partition tubes 133 and 134, and between the partition tubes 133 and 134. .
  • the second branch path forming portion 136 is formed in a disk shape having a center hole. Further, a groove extending in the radial direction is formed on one end surface of the second branch path forming portion 136.
  • the second branch path forming portion 136 is provided in the cylinder 111d so that the end surface on the side where no groove is formed contacts the lower surface of the first branch path forming portion 131.
  • the lid portion 137 is formed in a disc shape, and is fixed to the first housing 110a so as to close the lower surface side of the second branch path forming portion 136.
  • the piston mechanism 140 includes a piston 141 and a spring 142.
  • the piston 141 is formed in a top-hat shape, that is, a bottomed cylindrical shape having a disk-like collar portion. Of the outer peripheral surface of the cylindrical portion of the piston 141, the opposite side of the collar portion is formed in a tapered shape.
  • the piston 141 is disposed so as to be relatively movable in the axial direction (vertical direction) inside the cylinder 111d and the lower hole 111e so that the flange portion is positioned on the upper hole 111c side.
  • the outer peripheral edge of the flange portion of the piston 141 slides on the inner peripheral side of the cylinder 111d via an O-ring. That is, the piston 141 partitions the upper first chamber and the lower second chamber in the cylinder 111d.
  • the first chamber is a region where the first chamber flow path 111i opens.
  • the second chamber is a region where the second chamber flow path 111j opens.
  • the outer peripheral surface of the cylindrical portion of the piston 141 slides on the inner peripheral side of the lower hole 111e via an O-ring.
  • the air discharge path 111k opens in the axial movement range of the piston 141. That is, when the cylindrical portion of the piston 141 moves downward, the opening of the air discharge path 111k that opens to the lower hole 111e is closed. When the cylindrical shape of the piston 141 is moving upward, the opening of the air discharge path 111k that opens to the lower hole 111e is opened.
  • the spring 142 is disposed between the lower surface of the lid portion 137 and the bottom surface of the piston 141. The spring 142 urges the piston 141 downward with respect to the lid portion 137.
  • the plurality of clamp members 150 are spheres.
  • the plurality of clamp members 150 are disposed in each of the plurality of window portions 112 a of the small diameter cylindrical portion 112.
  • the plurality of clamp members 150 move between a position protruding from the outer peripheral surface of the small diameter cylindrical portion 112 and a position radially inward from the outer peripheral surface of the small diameter cylindrical portion 112.
  • the air filter unit 160 is detachably provided in a filter mounting hole 111h that opens on the outer peripheral surface of the shaft-shaped portion 111.
  • the air filter unit 160 includes an air filter 161 and a filter fixing part 162.
  • the air filter 161 is disposed at a position interposed in the first air connection path 111f.
  • the filter fixing part 162 is a member for fixing the air filter 161.
  • the seal member 171 is detachably provided at the opening portion of the first air connection path 111f.
  • the seal member 171 is, for example, a cylindrical elastic member.
  • the plurality of seal members 172 are detachably provided at the opening portion of the second air connection path 111g.
  • the plurality of seal members 172 are, for example, O-rings.
  • a plurality of position reference pins 180 (corresponding to the phase reference portion) are provided on the head reference surface 111a of the end surface of the shaft-like portion 111 so as to extend downward.
  • a plurality of position reference pins 180 are provided at intervals of 180 degrees.
  • the ⁇ -axis housing 190 is provided on the outer peripheral side of the shaft-shaped portion 111 of the R-axis housing 110 so as to be relatively rotatable as shown in FIG.
  • the ⁇ -axis housing 190 includes a concave and convex annular clutch 190a at the lower end.
  • the ⁇ -axis housing 190 is not used in the case of the nozzle tool 45 that holds one suction nozzle 240.
  • the ⁇ -axis housing 190 is used in the case of the nozzle tool 45 that holds a plurality of suction nozzles 240.
  • the negative pressure source 191 is a pump provided in the main body of the component mounting machine 1. Furthermore, the mounting head 44 has a flow path that communicates the negative pressure source 191 and the inside of the partition pipe 135 located at the center. Further, as shown in FIG. 6, the mounting head 44 has a flow path communicating between the positive pressure source 192 and each flow path formed by each of the plurality of partition pipes 132 to 135.
  • the valve 193 is disposed between the negative pressure source 191 and the positive pressure source 192 and each flow path formed by each of the plurality of partition pipes 132 to 135, and the flow path and the negative pressure to which positive pressure air is supplied. Switch the flow path to which air is supplied.
  • the positive pressure air supplied between the upper hole 111c and the partition pipe 132 is supplied to the second chamber of the cylinder 111d as shown in the right part of FIG.
  • the positive pressure air supplied between the partition pipes 132 and 133 is supplied to the air discharge path 111k as shown in the left part of FIG.
  • the positive pressure air supplied between the partition pipes 133 and 134 is supplied to the first chamber of the cylinder 111d as shown in the right part of FIG.
  • the negative pressure air supplied between the partition pipes 134 and 135 is supplied to the second air connection path 111g.
  • the positive pressure air or the negative pressure air supplied to the inside of the partition pipe 135 is supplied to the first air connection path 111f as shown in FIG.
  • the flow meter 194 is provided between the flow path between the partition pipes 132 and 133 and the valve 193, and as shown in the flow path between the partition pipes 132 and 133, that is, the left portion of FIG. Measure the flow rate of air flowing through.
  • the component mounting machine 1 includes a control unit (corresponding to a piston position determination unit) 6 as shown in FIG.
  • the control unit 6 performs switching control of the valve 193 and determines the position of the piston 141 based on the flow rate measured by the flow meter 194. Details of the position determination of the piston 141 will be described later.
  • the nozzle tool 45 includes a tool main body part 210, a lid part 220, a nozzle fixing part 230, a suction nozzle 240 and a spring 250.
  • the tool main body 210 is formed in a cylindrical shape having a through hole, and is formed in a stepped shape such that the outer diameter decreases as it goes downward.
  • the upper surface side of the tool main body 210 is a surface facing the end surface of the shaft-shaped portion 111 of the mounting head 44.
  • a recess 211 that accommodates the small-diameter cylindrical portion 112 of the R-axis housing 110 is formed at the center of the upper end surface of the tool main body 210.
  • the outer peripheral side of the upper end surface of the tool main body 210 includes an annular tool reference surface 212 formed in a planar shape.
  • the tool reference surface 212 is a part that contacts the head reference surface 111a.
  • the tool main body 210 includes an annular claw 213 that is formed to project radially inward from the opening edge of the recess 211. That is, the claw portion 213 is provided at the center portion of the tool main body portion 210.
  • the claw portion 213 is a clamped portion that is locked to the clamp member 150 when the clamp member 150 is located at a clamp position, that is, a position that protrudes from the outer peripheral surface of the small diameter cylindrical portion 112.
  • the inner peripheral surface of the claw portion 213 is formed in a tapered shape that decreases in diameter from the back side of the recess 211 toward the tool reference surface 212 side.
  • a plurality of notches 213 a are formed on the inner peripheral edge of the claw portion 213.
  • the plurality of notches 213 a are formed so as to be able to pass through the locking portions 113 of the mounting head 44.
  • portions of the claw portion 213 other than the plurality of notches 213 a are locked to the locking portion 113. That is, the claw portion 213 is a locked portion that is locked to the locking portion 113.
  • the tool body 210 further includes a first air connected path 214 and a positioning hole 216 (phase attached part).
  • the first air connected path 214 is provided on the upper surface side of the tool main body 210 so as to open to the outer peripheral side from the claw portion 213.
  • the first air connected path 214 communicates the tool reference surface 212 with the central hole below the recess 211.
  • the opening on the tool reference surface 212 side of the first air connected path 214 is connected to the first air connecting path 111 f of the shaft-shaped part 111.
  • the first air connected path 214 circulates air with the first air connecting path 111f.
  • the plurality of positioning holes 216 are formed in the tool reference surface 212 and are formed at positions corresponding to the plurality of position reference pins 180.
  • the nozzle tool 45 that holds one suction nozzle 240 does not have a flow path that is connected to the second air connection path 111g.
  • the multi-nozzle tool that holds the plurality of suction nozzles 240 includes a second air connected path connected to the second air connecting path 111g.
  • the lid 220 closes the bottom of the recess 211 of the tool body 210. That is, the lid 220 defines the recess 211 and the through hole on the tapered side of the tool main body 210.
  • the nozzle fixing part 230 is formed in a cylindrical shape. A part of the nozzle fixing portion 230 is inserted into the through hole on the tapered side of the tool main body portion 210 so as to be movable in the axial direction. However, the nozzle fixing part 230 is locked so as not to drop down below the tool main body part 210.
  • the suction nozzle 240 is attached to the tip of the nozzle fixing portion 230.
  • the suction nozzle 240 includes a flange portion 241 that protrudes radially outward at a position away from the end portion.
  • the spring 250 is disposed between the stepped outer peripheral surface of the tool main body 210 and the flange portion 241 of the suction nozzle 240, and urges them in the direction of separating them.
  • the control unit 6 drives the X-axis slider 43 and the Y-axis slider 42.
  • the control unit 6 recognizes the positions of the plurality of reference marks 114 and moves the mounting head 44 to a position where the mounting head 44 can clamp the nozzle tool 45 stored in the tool station.
  • the small diameter cylindrical portion 112 of the mounting head 44 is located above the recess 211 of the nozzle tool 45.
  • the locking portion 113 of the mounting head 44 and the notch 213a of the claw portion 213 of the nozzle tool 45 are phase aligned.
  • control unit 6 moves the R-axis housing 110 downward to bring the R-axis housing 110 closer to the nozzle tool 45 stored in the tool station.
  • the locking part 113 passes through the notch 213a.
  • a part of the small diameter cylindrical portion 112 of the mounting head 44 enters the recess 211 of the nozzle tool 45.
  • the control unit 6 rotates the R-axis housing 110 to shift the phases of the locking unit 113 and the notch 213 a.
  • the positions of the position reference pin 180 and the positioning hole 216 are matched.
  • the clamp member 150 is positioned at a phase other than the notch 213a.
  • the control unit 6 moves down the R-axis housing 110, the small-diameter cylindrical portion 112 of the mounting head 44 is accommodated in the recess 211 of the nozzle tool 45 as shown in FIG.
  • the position reference pin 180 is fitted into the positioning hole 216.
  • the positive pressure air is supplied between the partition pipes 133 and 134 by switching the valve 193. Accordingly, positive pressure air passes through the first chamber flow path 111i and is supplied to the first chamber of the cylinder 111d (the region above the piston 141). On the other hand, by switching the valve 193, the air in the second chamber of the cylinder 111d (the region below the piston 141) passes through the second chamber flow path 111j and is discharged to the outside.
  • the piston 141 moves downward as shown in FIG. 2, FIG. 6 and FIG.
  • the tapered portion of the outer peripheral surface of the piston 141 comes into contact with the clamp member 150.
  • the clamp member 150 moves radially outward. That is, the clamp member 150 protrudes from the outer peripheral surface of the small diameter cylindrical portion 112.
  • the claw portion 213 of the nozzle tool 45 is located above the protruding clamp member 150.
  • the clamp member 150 presses the tapered portion of the claw portion 213 as the clamped portion, and the nozzle tool 45 is the axis of the R-axis housing 110. It is drawn to the shape part 111 side.
  • This state is a clamped state in which the movement of the nozzle tool 45 with respect to the shaft-like portion 111 is restricted.
  • the position of the clamp member 150 in the clamped state is the clamp position. That is, as the piston 141 moves downward, the nozzle tool 45 is reliably clamped to the R-axis housing 110 by the clamp member 150.
  • the tip side of the claw portion 213 is deformed so as to protrude from the tool reference surface 212.
  • the front end side of the claw portion 213 enters an escape concave groove 111 b formed on the end surface of the shaft-like portion 111. Therefore, the head reference surface 111a and the tool reference surface 212 are reliably brought into surface contact while the clamp member 150 reliably pulls the claw portion 213 toward the shaft-shaped portion 111. That is, the nozzle tool 45 is always positioned on the mounting head 44 in a stable state.
  • the flow meter 194 measures the flow rate flowing through the air discharge path 111k. Therefore, the flow meter 194 shows zero or a value close to zero.
  • the control unit 6 receives the flow rate measured by the flow meter 194 and determines the position of the piston 141. Since the flow rate measured by the flow meter 194 is a value close to zero, the control unit 6 determines that the piston 141 is positioned below. In other words, the control unit 6 can determine that the clamp member 150 is in the clamped state when the flow rate is a value close to zero.
  • the air filter 161 is interposed in the first air connection path 111f. Therefore, the air flowing from the suction nozzle 240 to the first air connection path 111f through the first air connected path 214 passes through the air filter 161. That is, the air filter 161 suppresses entry of foreign matter further into the back side than the first air connection path 111f.
  • the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction, and moves the suction nozzle 240 to a predetermined position on the circuit board K.
  • the supply of negative pressure air is stopped by switching the valve 193.
  • positive pressure air is supplied to the inside of the partition pipe 135 by switching the valve 193. Accordingly, the positive pressure air passes through the first air connection path 111f and is supplied to the first air connected path 214. As a result, the component is reliably detached from the suction nozzle 240.
  • Control unit 6 drives X-axis slider 43 and Y-axis slider 42 to set nozzle tool 45 in the tool station.
  • the clamp member 150 is located at the clamp position.
  • the control part 6 switches the valve 193, and positive pressure air is supplied between the upper hole 111c and the division pipe 132.
  • FIG. Accordingly, positive pressure air passes through the second chamber flow path 111j and is supplied to the second chamber of the cylinder 111d (a region below the piston 141).
  • the valve 193 the air in the first chamber of the cylinder 111d (the region above the piston 141) passes through the first chamber flow path 111i and is discharged to the outside.
  • the piston 141 moves upward as shown in FIG. Along with the upward movement of the piston 141, the radially outward pressing force on the clamp member 150 decreases. At this time, the clamp member 150 itself does not have power to move inward in the radial direction. Therefore, as shown in FIG. 11, even if the piston 141 moves upward, the clamp member 150 may be positioned at the clamp position. However, since the piston 141 moves upward, the clamp member 150 is allowed to move radially inward, that is, to the unclamping position. This state is an unclamping allowable state as one aspect of the separation allowable state.
  • the disengagement allowable state is a state in which the nozzle tool 45 is allowed to be disengaged from the shaft-shaped portion 111, and includes an unclamped state described later in addition to the unclamped allowable state.
  • positive pressure air continues to be supplied to the air discharge path 111k.
  • the piston 141 moves upward. Therefore, the opening of the air discharge path 111k is not closed by the piston 141 and is opened. That is, positive pressure air is discharged from the opening of the air discharge path 111k.
  • the positive pressure air is discharged from the lower opening of the small-diameter cylindrical portion 112 toward the bottom surface of the recess 211 of the nozzle tool 45 due to the presence of the piston 141. That is, the nozzle tool 45 is subjected to a force for detaching from the shaft portion 111.
  • the control unit 6 moves the R-axis housing 110 upward. Then, the nozzle tool 45 is separated from the shaft-like portion 111 due to the influence of positive pressure air discharged from the air discharge path 111k. At the same time, the clamp member 150 moves inward in the radial direction and is positioned on the inner side of the outer peripheral surface of the small diameter cylindrical portion 112. Therefore, the latching to the claw part 213 by the clamp member 150 is reliably released.
  • This state is an unclamped state as another mode of the separation allowance state.
  • the unclamped state is a state in which the clamp member 150 is positioned at the unclamp position and the clamp member 150 is not locked to the claw portion 213 as the clamped portion when the nozzle tool 45 moves downward from the clamped state. .
  • the locking portion 113 is locked to the claw portion 213 as the locked portion as shown in FIGS. It becomes a state to do. Therefore, the control unit 6 rotates the R-axis housing 110 so that the phases of the locking portion 113 and the notch 213a coincide with each other. Subsequently, the control unit 6 further moves the R-axis housing 110 upward, so that the locking portion 113 passes through the notch 213 a and the R-axis housing 110 is completely detached from the nozzle tool 45.
  • the positive pressure air discharged from the air discharge path 111k is discharged from the central portion of the end surface of the shaft-like portion 111 through the small diameter cylindrical portion 112, and then the head reference surface It flows out radially outward through the gap between 111a and the tool reference surface 212.
  • the flow meter 194 measures the flow rate flowing through the air discharge path 111k.
  • the piston 141 moves upward. Therefore, the opening of the air discharge path 111k is not closed by the piston 141 and is opened. Therefore, the flow meter 194 shows a larger value than that in the clamped state.
  • the control unit 6 receives the flow rate measured by the flow meter 194 and determines the position of the piston 141. Since the flow rate measured by the flow meter 194 is a large value, the control unit 6 determines that the piston 141 is positioned above. In other words, the control unit 6 can determine that the clamp member 150 is in the disengagement allowable state (unclamped state or unclampable state) because the flow rate is a large value.
  • the abnormal stop in this case is a type of abnormal stop that allows manual replacement of the nozzle tool 45.
  • the clamp member 150 changes from the clamped state to the unclamped state. That is, the nozzle tool 45 moves below the shaft portion 111.
  • the clamp member 150 temporarily changes from the clamped state to the unclamped allowable state.
  • the clamp member 150 is in the unclamping allowable state, since the positive pressure air is discharged from the air discharge path 111k, immediately after the nozzle tool 45 moves below the shaft-shaped portion 111, the clamp member 150 is unclamped. From the allowable state to the unclamped state. That is, the nozzle tool 45 is in the state shown in FIGS.
  • the seal members 171 and 172 may be attached to the first air connection path 111f or the second air connection path 111g due to frictional force.
  • the clamp member 150 is in an unclamped state, but the nozzle tool 45 is in a state of sticking to the mounting head 44.
  • the nozzle tool 45 moves immediately below the shaft-shaped portion 111 immediately after that, as shown in FIGS. It becomes a state.
  • An operator may replace the air filter 161 as a consumable part as maintenance of the mounting head 44.
  • the operator removes the filter fixing part 162 and the air filter 161 arranged on the outer peripheral surface of the shaft-like part 111 from the R-axis housing 110. Then, the operator attaches a new air filter 161 and a filter fixing part 162 to the shaft-like part 111. Therefore, the operator can easily replace the air filter 161.
  • the worker may replace the consumable seal members 171 and 172 as maintenance of the mounting head 44.
  • the operator removes the seal members 171 and 172 from the outer peripheral side of the shaft-like portion 111 on the end surface of the shaft-like portion 111.
  • the operator attaches new seal members 171 and 172 to the shaft-shaped portion 111.
  • the seal members 171 and 172 are provided on the outer peripheral side of the end surface of the shaft-like portion 111 with respect to the clamp member 150 and the small-diameter cylindrical portion 112. Therefore, the clamp member 150 and the small diameter cylindrical portion 112 do not get in the way when the operator replaces the seal members 171 and 172. Therefore, the operator can easily replace the seal members 171 and 172.
  • the nozzle tool 45 in the above holds one suction nozzle 240. Since the nozzle tool 45 is automatically replaceable, another nozzle tool 300 that can be attached to and detached from the mounting head 44 will be described with reference to FIG.
  • the nozzle tool 300 shown in FIG. 13 is a 12 multi-nozzle tool that holds 12 suction nozzles.
  • the nozzle tool 300 includes a tool main body 301, a cylindrical gear 302, twelve nozzle holders 303, twelve suction nozzles 304, a ⁇ -axis gear 305, a locking piece 306, and a valve operation piece 307.
  • the tool body 301 is clamped to the shaft 111 of the mounting head 44.
  • the recess 211 a on the upper surface side of the nozzle tool 45, the tool reference surface 212, and the claw portion 213 are connected to the first air in the center recess 301 a of the upper surface of the tool main body 301.
  • a path 214 is provided.
  • a second air connected path connected to the second air connecting path 111g of the shaft-shaped portion 111 is formed in the central recess 301a on the upper surface of the tool main body 301.
  • the cylindrical gear 302 is provided on the outer peripheral side of the recess 301a so as to be rotatable relative to the tool main body 301.
  • Gear teeth (not shown) extending in the axial length direction are formed on the outer peripheral surface of the cylindrical gear 302.
  • a concave and convex annular clutch 302a that meshes with the concave and convex annular clutch 190a of the ⁇ -axis housing 190 (shown in FIG. 3) is formed. That is, the cylindrical gear 302 rotates together with the ⁇ -axis housing 190 by the engagement of the annular clutches 190 a and 302 a.
  • the twelve nozzle holders 303 hold the twelve suction nozzles 304 on the tip side.
  • the twelve nozzle holders 303 are independently provided so as to be movable in the vertical direction with respect to the tool main body 301. Further, the twelve nozzle holders 303 are provided so as to be able to rotate with respect to the tool main body 301.
  • the ⁇ -axis gear 305 is provided at the upper end of the nozzle holder 303 and meshes with the gear teeth on the outer peripheral surface of the cylindrical gear 302.
  • the ⁇ -axis gear 305 maintains a state where it is meshed with the gear teeth of the cylindrical gear 302. That is, when the ⁇ -axis housing 190 rotates, the nozzle holder 303 and the suction nozzle 304 rotate.
  • the locking piece 306 is provided on the nozzle holder 303 and is driven up and down by a Z-axis drive mechanism (not shown) provided on the mounting head 44. That is, the suction nozzle 304 is raised and lowered by the raising and lowering drive of the locking piece 306.
  • the valve operation piece 307 performs a switching operation of a valve (not shown) provided inside the tool main body 301.
  • the valve supplies air to the suction nozzle 304 with positive pressure air supplied via the first air connection path 111 f of the mounting head 44 and negative air supplied via the second air connection path 111 g of the mounting head 44. Switch between pressure and air.
  • the valve operation piece 307 operates by engaging with a valve switching mechanism (not shown) provided in the mounting head 44. That is, in the mounting head 44, positive pressure air is always supplied to the first air connection path 111f and negative pressure air is always supplied to the second air connection path 111g by the valve 193 (shown in FIG. 6).
  • the clamping operation When applying the nozzle tool 300, the clamping operation, the unclamping operation, the operation at the time of manual replacement of the nozzle tool, and the maintenance operation are the same as in the case of the nozzle tool 45 described above.
  • the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction, and moves the suction nozzle 304 to the position of the component in the component supply device 3.
  • negative pressure air is supplied to the suction nozzle 304 by operating the valve operating piece 307, so that the component is sucked to the suction nozzle 304.
  • the negative pressure air passes through the second air connection path 111g and is supplied to the second air connected path (not shown).
  • the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction to move the suction nozzle 304 to a predetermined position on the circuit board K.
  • the supply of negative pressure air to the suction nozzle 304 is blocked by the operation of the valve operating piece 307.
  • supply of positive pressure air to the suction nozzle 304 is started by operating the valve operating piece 307.
  • the component is reliably detached from the suction nozzle 304.
  • the positive pressure air passes through the first air connection path 111f and is supplied to the first air connected path (not shown).
  • the component mounting machine 1 of this embodiment includes a mounting head 44 and nozzle tools 45 and 300 that are detachably provided on the mounting head 44 and hold suction nozzles 240 and 304.
  • the mounting head 44 includes an R-axis housing 110 having a rotatable shaft-shaped portion 111 and a clamp member 150 provided at the center of the end surface of the shaft-shaped portion 111 of the R-axis housing 110.
  • the shaft-shaped portion 111 of the R-axis housing 110 includes air connection paths 111f and 111g that open to the outer peripheral side from the clamp member 150 at the end surface of the shaft-shaped portion 111 and circulate air.
  • the nozzle tools 45 and 300 are connected to a clamped portion (corresponding to the claw portion 213) locked to the clamp member 150 of the mounting head 44 and the air connection paths 111f and 111g, and between the air connection paths 111f and 111g. And an air connected path 214 through which air is circulated.
  • the clamp member 150 of the mounting head 44 is provided at the center of the end surface of the shaft-shaped portion 111 of the R-axis housing 110. Air connection paths 111 f and 111 g of the mounting head 44 open outward in the radial direction from the clamp member 150 at the end face of the shaft-shaped portion 111. Therefore, the clamp member 150 does not get in the way when the operator performs maintenance of the openings of the air connection paths 111f and 111g. Therefore, the maintainability is greatly improved.
  • the mounting head 44 includes seal members 171 and 172 that are detachably provided at the opening portions of the air connection paths 111f and 111g.
  • the seal members 171 and 172 are located radially outward from the clamp member 150. Therefore, the replacement of the seal members 171 and 172 by the operator is easily performed.
  • the air connection paths 111f and 111g are formed on the outer peripheral side inside the shaft-shaped portion 111 of the R-axis housing 110.
  • the mounting head 44 is detachably provided from the outer peripheral surface of the shaft-shaped portion 111 of the R-axis housing 110, and the air filter 161 interposed in the air connection path 111f that circulates inside the shaft-shaped portion 111 of the R-axis housing 110. Is provided. Therefore, the operator can replace the air filter 161 very easily.
  • the R-axis housing 110 is formed so as to protrude from the central portion of the end surface of the shaft-shaped portion 111 and has a cylindrical portion (into the small-diameter cylindrical portion 112 formed with a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface. Equivalent) and a cylinder 111d formed at the center of the shaft-like portion 111 and communicating with the inner peripheral side of the cylindrical portion (112). Furthermore, the mounting head 44 includes a piston 141 provided so as to be relatively movable on the inner peripheral side of the cylindrical portion (112) of the R-axis housing 110 and the inner peripheral side of the cylinder 111d.
  • the clamp member 150 is provided in each of the plurality of window portions 112a, and protrudes from the outer peripheral surface of the small diameter cylindrical portion 112 by being pressed against the outer peripheral surface of the piston 141 as the piston 141 moves in the axial direction.
  • the nozzle tool 45 is formed with a recess 211 that accommodates the cylindrical portion (112) and an opening edge of the concave portion 211 so as to protrude radially inward, and the clamp member 150 protrudes from the outer peripheral surface of the cylindrical portion (112). Accordingly, a claw portion 213 for drawing the nozzle tool 45 toward the R-axis housing 110 is provided.
  • the clamp mechanism disposed in the central portion of the shaft-shaped portion 111 contributes to the stability of the clamp. And since a clamp mechanism is provided in the center part of the shaft-shaped part 111, the air connection paths 111f and 111g opened to the outer peripheral side rather than the clamp member 150 in the end surface of the shaft-shaped part 111 can be formed easily. That is, with the above configuration, the stability of the clamp is achieved, and the maintainability is greatly improved.
  • the R-axis housing 110 includes a reference mark 114 that is provided on the end surface of the cylindrical portion (112) and detects the center position of the R-axis housing 110.
  • the end surface of the cylindrical portion (112) is not a portion that is brought into contact with the tool reference surface 212 of the nozzle tool 45. Since the head reference surface 111a is provided radially outward from the cylindrical portion (112), an area in contact with the tool reference surface 212 is sufficiently secured. Therefore, the provision of the reference mark 114 does not cause a decrease in clamp stability.
  • the end surface of the cylinder part (112) is separated from the center of the cylinder part (112) by a certain distance. Therefore, the center detection accuracy by the reference mark 114 can be sufficiently ensured.
  • the R-axis housing 110 includes a convex or concave phase reference portion (corresponding to the position reference pin 180), and the nozzle tool 45 has a concave or convex phase mounted portion (positioning hole) corresponding to the phase reference portion. 216).
  • the relative phase between the mounting head 44 and the nozzle tool 45 is positioned with high accuracy.
  • the position reference pin 180 is convex and the positioning hole 216 is concave.
  • the irregularities may be reversed.
  • the nozzle tools 45 and 300 of the present embodiment are used in the component mounting machine 1 and are detachably provided on the mounting head 44 and hold the suction nozzles 240 and 304.
  • the nozzle tools 45 and 300 are provided at the center of the surface facing the mounting head 44, and the clamped portion (213) locked to the clamp member 150 of the mounting head 44 and the surface to be mounted on the surface facing the mounting head 44 are covered.
  • An air connection path 214 that opens to the outer peripheral side from the clamp portion (213), is connected to the air connection paths 111f and 111g of the mounting head 44, and circulates air between the air connection paths 111f and 111g. In this case, maintainability is greatly improved.
  • the mounting head 44 includes an R-axis housing 110 having a rotatable shaft-shaped portion 111 and a clamp member 150 that is movably provided on the shaft-shaped portion 111 of the R-axis housing 110.
  • a clamp state (state shown in FIG. 2) that restricts movement with respect to the shaft-like portion 111 and a disengagement-permitted state that allows the nozzle tools 45 and 300 to be detached from the shaft-like portion 111 (states of FIGS. 10, and the state shown in FIG. 11), and the positive pressure air is discharged from the shaft-shaped portion 111 toward the nozzle tools 45 and 300 when the clamp member 150 is in a disengagement-permitted state.
  • the shaft portion 111 includes a head reference surface 111a provided on the outer peripheral side of the end surface, and the nozzle tools 45 and 300 include a tool reference surface 212 that comes into contact with the head reference surface 111a.
  • the positive pressure air discharged from the air discharge path 111k is discharged from the central portion of the end surface of the shaft-shaped portion 111, passes through the gap between the head reference surface 111a and the tool reference surface 212, and flows out radially outward.
  • the shaft-shaped portion 111 includes a cylinder 111d
  • the mounting head 44 includes a piston 141 that is provided so as to be relatively movable on the inner peripheral side of the cylinder 111d and moves the clamp member 150 relative to the shaft-shaped portion 111.
  • the air discharge path 111k opens in the axial movement range of the piston 141 in the shaft-like portion 111.
  • the piston 141 closes the opening of the air discharge path 111k when the clamp member 150 is put into a clamped state, and opens the opening of the air discharge path 111k when the clamp member is put into a release-permitted state.
  • the nozzle tools 45 and 300 are detached from the shaft-shaped portion 111 when the clamp member 150 is in the separation-permitted state.
  • air can be discharged from the air discharge path 111k when in the separation-permitted state.
  • the piston 141 as a valve for the air discharge path 111k, the structure can be simplified and the number of parts can be reduced.
  • the component mounting machine 1 includes a piston position determination unit (corresponding to the control unit 6) that determines the position of the piston 141 based on the flow rate of the air discharge path 111k.
  • a piston position determination unit corresponding to the control unit 6 that determines the position of the piston 141 based on the flow rate of the air discharge path 111k.
  • the piston 141 is moving downward.
  • the piston 141 is moving upward. That is, the position of the piston 141 is accurately grasped by using the flow rate of the air discharge path 111k.
  • the shaft-shaped portion 111 includes a cylinder 111d formed at a central portion inside the shaft-shaped portion 111, and the mounting head 44 can move relative to the inner peripheral side of the cylinder 111d at the central portion of the shaft-shaped portion 111.
  • a piston 141 that moves the clamp member 150 relative to the shaft-like portion 111.
  • the air discharge path 111k opens in the axial movement range of the piston 141 in the shaft-like portion 111.
  • the positive pressure air supplied by the air discharge path 111k flows from the opening provided at the center of the end surface of the shaft-shaped portion 111 through the gap between the head reference surface 111a and the tool reference surface 212 to the outside in the radial direction. . That is, positive pressure air is supplied from the central portion by using the central cylinder 111d.
  • the R-axis housing 110 is formed so as to protrude from the center of the end surface of the shaft-shaped portion 111, and has a cylindrical portion (112) in which a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface are formed, and the shaft And a cylinder 11d that is formed in the central portion inside the cylindrical portion 111 and communicates with the inner peripheral side of the cylindrical portion (112).
  • the mounting head 44 includes a piston 141 provided so as to be relatively movable on the inner peripheral side of the cylindrical portion (112) of the R-axis housing 110 and the inner peripheral side of the cylinder 111d.
  • the clamp member 150 is provided in each of the plurality of window portions 112a and protrudes from the outer peripheral surface of the cylindrical portion (112) by being pressed against the outer peripheral surface of the piston 141 as the piston 141 moves in the axial direction.
  • the nozzle tools 45 and 300 are formed with a recess 211 that accommodates the cylindrical portion (112), and an opening edge of the concave portion 211 that protrudes radially inward, and the clamp member 150 is an outer peripheral surface of the cylindrical portion (112). And a claw portion 213 that draws the nozzle tools 45 and 300 toward the R-axis housing 110 in association with the protrusion.
  • the clamp member 150 is positioned at the clamp position as a clamp state in which the movement is restricted at the clamp position (the state shown in FIG. 2) and a disengagement allowable state, and is allowed to move from the clamp position to the unclamp position.
  • the state is switched between the state (the state shown in FIG. 11) and the unclamped state (the state shown in FIGS. 8 and 9) located at the unclamping position.
  • the air discharge path 111k discharges positive pressure air toward the nozzle tools 45 and 300 when the clamp member 150 is in an unclamping allowable state. With this configuration, when the clamp member 150 is in the unclamping allowable state, the nozzle tools 45 and 300 are reliably detached from the shaft-shaped portion 111 by the positive pressure air.
  • the mounting head 44 includes an R-axis housing 110 and a clamp member 150 movably provided on the R-axis housing 110.
  • the clamp member 150 allows the nozzle tools 45 and 300 to move with respect to the R-axis housing 110, and allows the nozzle tools 45 and 300 to be detached from the R-axis housing 110. When moving downward from the clamped state, it is switched in an unclamped state where the nozzle tools 45 and 300 are not locked.
  • the R-axis housing 110 includes a locking portion 113 that locks the nozzle tool 45, 300 when the nozzle tool 45, 300 moves downward when the clamp member 150 shifts from the clamped state to the unclamped state. Therefore, when the clamp member 150 cannot hook the nozzle tools 45 and 300, it is possible to prevent the nozzle tools 45 and 300 from falling off the mounting head 44 by using the locking portion 113 different from the clamp member 150.
  • the R-axis housing 110 includes a cylindrical portion (112).
  • the clamp member 150 is located at a clamp position protruding radially outward from the outer peripheral surface of the cylindrical portion (112) in the clamped state, and is unclamped radially inward from the outer peripheral surface of the cylindrical portion (112) in the unclamped state.
  • the locking portion 113 protrudes radially outward from the outer peripheral surface of the cylindrical portion (112) and is locked to the claw portion 213.
  • the claw portion 213 is used as a portion to be locked to the locking portion 113 in addition to being used as a portion to be locked to the clamp member 150.
  • the claw part 213 is used for both the clamp function and the drop-off prevention function. Therefore, the structure can be made very easy.
  • the locking portion 113 is formed in a phase different from that of the clamp member 150. Further, in the claw portion 213, the phase contacting the clamp member 150 and the phase locked by the locking portion 113 are different. Thereby, in the cylinder part (112), the formation position of the window part 112a and the formation position of the latching
  • the claw portion 213 includes a notch 213a that can pass through the locking portion 113 on the inner peripheral edge.
  • the locking part 113 is locked to a part other than the notch 213a of the claw part 213, and the clamp member 150 contacts the part other than the notch 213a of the claw part 213 in the clamped state.
  • the nozzle tools 45 and 300 of the present embodiment are used in the component mounting machine 1 and are detachably provided on the mounting head 44 and hold the suction nozzles 240 and 304.
  • the state in which the movement of the nozzle tools 45 and 300 with respect to the mounting head 44 by the engagement of the mounting head 44 with the clamp member 150 is clamped, and the nozzle tools 45 and 300 are detached from the mounting head 44.
  • the state in which the nozzle tools 45 and 300 are not locked to the clamp member 150 is allowed to be performed, and this is the unclamped state.
  • the nozzle tools 45 and 300 are locked to the clamp member 150 in the clamped state and are not locked to the clamp member 150 in the unclamped state, and the clamp member 150 is changed from the clamped state to the unclamped state.
  • a locked portion (213) that is locked to the locking portion 113 of the mounting head 44 is provided.
  • the nozzle tool 45, 300 can be prevented from falling off the mounting head 44 by using the engaging portion 113 different from the clamp member 150.
  • the clamp member 150 is located at a clamp position that protrudes radially outward from the outer peripheral surface of the cylindrical portion (corresponding to the small-diameter cylindrical portion 112) of the mounting head 44 in the clamped state, and the cylindrical portion (112) in the unclamped state. It is located at an unclamping position radially inward from the outer peripheral surface of the.
  • the nozzle tools 45 and 300 are formed so as to project inward in the radial direction at the opening edge of the recess 211 for accommodating the cylindrical portion (112) and the recess 211, and when the clamp member 150 is positioned at the clamp position And an annular claw portion 213 for bringing the tools 45 and 300 into contact with the R-axis housing 110.
  • the clamped portion (213) and the locked portion (213) are claw portions 213.
  • the claw portion 213 is used as a locked portion that is locked to the locking portion 113 in addition to being used as a clamped portion that is locked to the clamp member 150.
  • the claw part 213 is used for both the clamp function and the drop-off prevention function. Therefore, the structure can be made very easy.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

Provided is a component-mounting machine (1) which uses a member different from a clamping member (150) thereof to ensure that a nozzle tool (45, 300) will not fall off a mounting head (44) when the clamping member (150) is unable to latch on to the nozzle tool (45, 300). A housing (110) is provided with locking parts (113) that engage the nozzle tool (45, 300) during downward movement of the nozzle tool (45, 300) when the clamping members (150) transition from a clamping state to an unclamped state.

Description

部品実装機及びそれに用いるノズルツールComponent mounter and nozzle tool used therefor
　本発明は、部品実装機及びそれに用いるノズルツールに関するものである。 The present invention relates to a component mounter and a nozzle tool used therefor.
　回路基板の実装ラインでは、市場における需要の変化に柔軟に対応できる生産システムが要求されると共に、さらなる段取り替え時間の削減と生産効率の向上が重要な課題となっている。そこで、特許文献１には、複数種のノズルツールを自動交換しながら生産を行う部品実装機が提案されている。当該部品実装機は、Ｘ軸及びＹ軸に移動する移動台に着脱可能に設けられる装着ヘッドと、装着ヘッドに着脱可能に設けられると共に吸着ノズルを保持するノズルツールとを備える。ノズルツールには、例えば、１個の吸着ノズルを保持する大型シングルノズルツール、４個の吸着ノズルを保持する汎用４マルチノズルツール、１２個の吸着ノズルを保持する高速１２マルチノズルツールなどが存在する。つまり、１つの部品実装機において、それぞれのノズルツールを用いる部品実装が自動で切り替えられる。 In circuit board mounting lines, production systems that can flexibly respond to changes in market demand are required, and further reduction of setup change time and improvement of production efficiency are important issues. Therefore, Patent Document 1 proposes a component mounter that performs production while automatically exchanging a plurality of types of nozzle tools. The component mounter includes a mounting head that is detachably provided on a moving table that moves in the X axis and the Y axis, and a nozzle tool that is detachably provided on the mounting head and holds a suction nozzle. Examples of nozzle tools include a large single nozzle tool that holds one suction nozzle, a general-purpose 4 multi-nozzle tool that holds four suction nozzles, and a high-speed 12 multi-nozzle tool that holds 12 suction nozzles. To do. That is, component mounting using each nozzle tool is automatically switched in one component mounting machine.
国際公開第２０１３／１０８３９４号International Publication No. 2013/108394
　当該部品実装機においては、装着ヘッドとノズルツールとを着脱可能にするためのＬ字型のクランプ部材が設けられる。Ｌ字型のクランプ部材が装着ヘッドのハウジングから下方に移動し、さらに装着ヘッドとノズルツールとが相対回転することによって、ノズルツールが装着ヘッドから下方へ離脱できる状態となる。つまり、Ｌ字型のクランプ部材が装着ヘッドのハウジングから下方へ移動しただけでは、アンクランプ状態であっても、ノズルツールは装着ヘッドから脱落することはない。 In the component mounter, an L-shaped clamp member is provided for making the mounting head and the nozzle tool detachable. When the L-shaped clamp member moves downward from the housing of the mounting head and the mounting head and the nozzle tool rotate relative to each other, the nozzle tool can be detached from the mounting head downward. In other words, the nozzle tool does not fall off the mounting head even in the unclamped state, simply by moving the L-shaped clamp member downward from the housing of the mounting head.
　ところで、クランプ機構は、上記のＬ字型のクランプ部材を用いる機構の他、種々の機構を適用される。上記とは異なるクランプ機構によっては、クランプ部材がアンクランプ状態になると、直ちに、ノズルツールが装着ヘッドから落下し得る状態になるおそれがある。 By the way, as the clamp mechanism, various mechanisms can be applied in addition to the mechanism using the L-shaped clamp member. Depending on the clamp mechanism different from the above, when the clamp member is in an unclamped state, there is a possibility that the nozzle tool may immediately fall from the mounting head.
　本発明は、クランプ部材がノズルツールを引っ掛けることができない場合において、クランプ部材とは異なる部材を用いて、ノズルツールが装着ヘッドから脱落することを防止できる部品実装機及びそれに用いるノズルツールを提供することを目的とする。 The present invention provides a component mounter capable of preventing the nozzle tool from falling off the mounting head using a member different from the clamp member when the clamp member cannot hook the nozzle tool, and a nozzle tool used therefor. For the purpose.
　本発明に係る部品実装機は、装着ヘッドと、前記装着ヘッドの下方に着脱可能に設けられると共に吸着ノズルを保持するノズルツールとを備える。
　前記装着ヘッドは、ハウジングと、前記ハウジングに移動可能に設けられるクランプ部材であり、前記ノズルツールを前記ハウジングに対して移動規制するクランプ状態、及び、前記ノズルツールを前記ハウジングから離脱することを許容すると共に前記ノズルツールが前記クランプ状態から下方へ移動する際に前記ノズルツールに係止されないアンクランプ状態で切り替わる前記クランプ部材とを備える。 A component mounter according to the present invention includes a mounting head and a nozzle tool that is detachably provided below the mounting head and holds a suction nozzle.
The mounting head is a housing and a clamp member that is movably provided in the housing. The mounting state restricts movement of the nozzle tool relative to the housing, and allows the nozzle tool to be detached from the housing. And the clamp member that switches in an unclamped state that is not locked to the nozzle tool when the nozzle tool moves downward from the clamped state.
　前記ハウジングは、前記クランプ部材が前記クランプ状態から前記アンクランプ状態に移行したときに、前記ノズルツールが下方へ移動する際に前記ノズルツールを係止する係止部を備える。 The housing includes a locking portion that locks the nozzle tool when the nozzle tool moves downward when the clamp member transitions from the clamped state to the unclamped state.
　また、本発明に係るノズルツールは、部品実装機に用いられ、装着ヘッドに着脱可能に設けられると共に、吸着ノズルを保持するノズルツールであって、前記ノズルツールが前記装着ヘッドのクランプ部材との係止によって前記装着ヘッドに対して移動規制される状態をクランプ状態とし、且つ、前記ノズルツールが前記装着ヘッドから離脱することを許容されると共に前記ノズルツールが前記クランプ部材に係止されない状態をアンクランプ状態とした場合に、前記ノズルツールは、前記クランプ状態において前記クランプ部材に係止され、且つ、前記アンクランプ状態において前記クランプ部材に係止されない被クランプ部と、前記クランプ部材が前記クランプ状態から前記アンクランプ状態に移行したときに、前記ノズルツールが下方へ移動する際に前記係止部に係止される被係止部とを備える。 The nozzle tool according to the present invention is a nozzle tool used in a component mounting machine, provided detachably on the mounting head, and holding a suction nozzle. The nozzle tool is a clamp member of the mounting head. A state in which movement is restricted with respect to the mounting head by locking is a clamped state, and the nozzle tool is allowed to be detached from the mounting head and the nozzle tool is not locked to the clamp member. In the unclamped state, the nozzle tool is locked to the clamp member in the clamped state and is not locked to the clamp member in the unclamped state, and the clamp member is clamped When the nozzle tool is moved from the state to the unclamped state, And a be-engaged portion to be engaged with the locking portions when moving to.
　本発明に係る部品実装機によれば、クランプ部材がクランプ状態からアンクランプ状態に移行したときに、ノズルツールが下方へ移動する際に、係止部がノズルツールを係止する。従って、クランプ部材がノズルツールを引っ掛けることができない場合において、クランプ部材とは異なる係止部を用いて、ノズルツールが装着ヘッドから脱落することを防止できる。また、本発明に係るノズルツールは、同様の効果を奏する。 According to the component mounting machine according to the present invention, when the clamp member shifts from the clamped state to the unclamped state, the locking portion locks the nozzle tool when the nozzle tool moves downward. Therefore, when the clamp member cannot hook the nozzle tool, it is possible to prevent the nozzle tool from dropping from the mounting head by using a locking portion different from the clamp member. The nozzle tool according to the present invention has the same effect.
本発明の実施の形態に係る部品実装機の全体を示す斜視図である。It is a perspective view showing the whole component mounting machine concerning an embodiment of the invention. 図１の部品実装機を構成する装着ヘッドと装着ヘッドにクランプされた状態のノズルツールとを含む部分の軸方向断面図である。ただし、図２に示す装着ヘッドは、ノズルツールとの第一エア接続路（右側）及び第二エア接続路（左側）を含む断面図である。FIG. 2 is an axial sectional view of a portion including a mounting head constituting the component mounting machine of FIG. 1 and a nozzle tool clamped by the mounting head. However, the mounting head shown in FIG. 2 is a cross-sectional view including a first air connection path (right side) and a second air connection path (left side) with the nozzle tool. 図２の装着ヘッドの一部を下方から見た斜視図である。It is the perspective view which looked at a part of mounting head of Drawing 2 from the lower part. 図３の装着ヘッドの一部を下方から見た図である。It is the figure which looked at a part of mounting head of Drawing 3 from the lower part. 図２のノズルツールを上方から見た図である。It is the figure which looked at the nozzle tool of FIG. 2 from upper direction. クランプ状態の装着ヘッド及びノズルツールを含む軸方向部分断面図及びエア供給回路である。ただし、図６に示す装着ヘッドは、第一エア接続路に介在するエアフィルタを含む断面（右側）、及び、離脱用エア供給路を含む断面（左側）の図である。FIG. 4 is an axial partial sectional view including a mounting head and a nozzle tool in a clamped state, and an air supply circuit. However, the mounting head shown in FIG. 6 is a cross section (right side) including an air filter interposed in the first air connection path and a cross section (left side) including a separation air supply path. クランプ状態の装着ヘッド及びノズルツールを含む軸方向部分断面図である。ただし、図７の装着ヘッドは、シリンダの各室へのエア供給路を含む断面図である。It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of a clamped state. However, the mounting head of FIG. 7 is a cross-sectional view including an air supply path to each chamber of the cylinder. アンクランプ状態の装着ヘッド及びノズルツールを含む軸方向部分断面図であって、装着ヘッドのクランプ部材を含む断面図である。It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of an unclamp state, Comprising: It is sectional drawing containing the clamp member of a mounting head. アンクランプ状態の装着ヘッド及びノズルツールを含む軸方向部分断面図であって、装着ヘッドの係止部を含み、ノズルツールの爪部を含む断面図である。It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of an unclamp state, Comprising: It is sectional drawing containing the nail | claw part of a nozzle tool including the latching | locking part of a mounting head. アンクランプ状態の装着ヘッド及びノズルツールを含む軸方向部分断面図であって、装着ヘッドの係止部を含み、ノズルツールの切欠を含む断面図である。It is an axial direction fragmentary sectional view containing the mounting head and nozzle tool of an unclamp state, Comprising: It is sectional drawing containing the notch of a nozzle tool including the latching | locking part of a mounting head. アンクランプ許容状態の装着ヘッド及びノズルツールを含む軸方向部分断面図である。It is an axial direction fragmentary sectional view including the mounting head and nozzle tool of an unclamp permissible state. 離脱した装着ヘッド及びノズルツールを含む軸方向部分断面図である。It is an axial fragmentary sectional view including the mounting head and nozzle tool which have detached. 装着ヘッドに着脱される他のノズルツールの斜視図である。It is a perspective view of the other nozzle tool attached to or detached from the mounting head.
　（１．部品実装機１の全体構成）
　本実施形態の部品実装機１の全体構成について、図１を参照して説明する。部品実装機１は、ノズルツール自動交換方式の機種である。部品実装機１は、基板搬送装置２、部品供給装置３、部品移載装置４及び部品カメラ５を備える。 (1. Overall configuration of component mounting machine 1)
The overall configuration of the component mounter 1 of the present embodiment will be described with reference to FIG. The component mounter 1 is a model of a nozzle tool automatic replacement system. The component mounter 1 includes a substrate transfer device 2, a component supply device 3, a component transfer device 4 and a component camera 5.
　基板搬送装置２は、回路基板ＫをＸ軸方向に搬送すると共に、所定の実装位置にて保持する。部品供給装置３は、複数の部品種の部品を供給する。図１の部品供給装置３は、基台９上に複数のテープフィーダをＸ軸方向に並設したタイプを例示する。 The substrate transport device 2 transports the circuit board K in the X-axis direction and holds it at a predetermined mounting position. The component supply device 3 supplies components of a plurality of component types. 1 exemplifies a type in which a plurality of tape feeders are arranged on the base 9 in the X-axis direction.
　部品移載装置４は、部品供給装置３から供給される部品を、基板搬送装置２に保持された回路基板Ｋに移載する。部品移載装置４は、例えば、ＸＹロボットにより構成され、基台９に対してＸ軸方向及びＹ軸方向に移動可能な移動台（Ｘ軸スライダ４３）を備える。部品移載装置４は、基板搬送装置２及び部品供給装置３の上方に設けられる。 The component transfer device 4 transfers the component supplied from the component supply device 3 to the circuit board K held by the substrate transfer device 2. The component transfer device 4 includes, for example, an XY robot, and includes a moving table (X-axis slider 43) that can move in the X-axis direction and the Y-axis direction with respect to the base 9. The component transfer device 4 is provided above the substrate transfer device 2 and the component supply device 3.
　部品移載装置４は、ガイドレール４１、Ｙ軸スライダ４２、移動台としてのＸ軸スライダ４３、装着ヘッド４４、ノズルツール４５及び基板カメラ４６を備える。ガイドレール４１は、基台９にＹ軸方向に延びるように設けられる。Ｙ軸スライダ４２は、ガイドレール４１に沿ってＹ軸方向に移動可能に設けられ、サーボモータにより駆動される。移動台としてのＸ軸スライダ４３は、Ｙ軸スライダ４２にＸ軸方向に移動可能に案内支持され、サーボモータにより駆動される。 The component transfer device 4 includes a guide rail 41, a Y-axis slider 42, an X-axis slider 43 as a moving table, a mounting head 44, a nozzle tool 45, and a substrate camera 46. The guide rail 41 is provided on the base 9 so as to extend in the Y-axis direction. The Y-axis slider 42 is provided so as to be movable in the Y-axis direction along the guide rail 41 and is driven by a servo motor. An X-axis slider 43 as a moving table is guided and supported by the Y-axis slider 42 so as to be movable in the X-axis direction, and is driven by a servo motor.
　装着ヘッド４４は、移動台としてのＸ軸スライダ４３に着脱可能に設けられる。装着ヘッド４４は、下方に、ノズルツール４５を着脱可能に保持する。ここで、ノズルツール４５には、例えば、１個の大型の吸着ノズルを保持するシングルノズルツール、４個の吸着ノズルを保持する汎用４マルチノズルツール、１２個の吸着ノズルを保持する高速１２マルチノズルツールなどがある。つまり、装着ヘッド４４は、移載する部品に応じて、複数のノズルツール４５を自動交換する。 The mounting head 44 is detachably provided on the X-axis slider 43 as a moving table. The mounting head 44 holds the nozzle tool 45 detachably below. Here, the nozzle tool 45 includes, for example, a single nozzle tool that holds one large suction nozzle, a general-purpose 4 multi-nozzle tool that holds four suction nozzles, and a high-speed 12 multi-tool that holds 12 suction nozzles. There are nozzle tools. That is, the mounting head 44 automatically replaces the plurality of nozzle tools 45 according to the parts to be transferred.
　装着ヘッド４４は、さらに、ノズルツール４５全体を旋回するためのＲ軸駆動機構（図示せず）、複数個の吸着ノズルを保持するノズルツール４５においてノズルツール４５の本体部に対して吸着ノズル２４０を旋回するためのθ軸駆動機構（図示せず）、吸着ノズル２４０をＺ軸方向に移動させるＺ軸駆動機構（図示せず）などを備える。 The mounting head 44 further includes an R-axis drive mechanism (not shown) for turning the entire nozzle tool 45, and a suction nozzle 240 with respect to the main body of the nozzle tool 45 in a nozzle tool 45 that holds a plurality of suction nozzles. And a Z-axis drive mechanism (not shown) for moving the suction nozzle 240 in the Z-axis direction.
　さらに、装着ヘッド４４は、ノズルツール４５との間でエア（正圧エア及び負圧エア）を流通させることにより部品の吸着及び離脱を行う機構（図２及び図３等に示す）と、エアを用いたノズルツール４５のクランプ機構（図２及び図３等に示す）とを備える。部品の吸着及び離脱を行う機構、並びに、クランプ機構は、後述する。 Further, the mounting head 44 has a mechanism (shown in FIG. 2 and FIG. 3 and the like) that sucks and detaches parts by circulating air (positive pressure air and negative pressure air) between the mounting tool 44 and the air. And a clamping mechanism (shown in FIGS. 2 and 3, etc.) of the nozzle tool 45. A mechanism for sucking and releasing parts and a clamp mechanism will be described later.
　基板カメラ４６は、Ｘ軸スライダ４３の底面に下向きに設けられ、回路基板Ｋを撮像する。基板カメラ４６により撮像される画像は、部品を装着する位置を制御するために用いられる。部品カメラ５は、基板搬送装置２と部品供給装置３との間の基台９上に、上向きに設けられる。部品カメラ５は、装着ヘッド４４及びノズルツール４５が移動する途中に、吸着ノズル２４０に保持されている部品の状態を撮像する。 The board camera 46 is provided downward on the bottom surface of the X-axis slider 43 and images the circuit board K. The image picked up by the board camera 46 is used to control the position where the component is mounted. The component camera 5 is provided upward on a base 9 between the substrate transfer device 2 and the component supply device 3. The component camera 5 images the state of the component held by the suction nozzle 240 while the mounting head 44 and the nozzle tool 45 are moving.
　（２．装着ヘッド４４及びノズルツール４５の詳細構成）
　装着ヘッド４４及びノズルツール４５の詳細構成について、図２～図７を参照して説明する。ここでは、装着ヘッド４４のうち、部品の吸着及び離脱を行うための機構、並びに、ノズルツールをクランプする機構を主として説明する。なお、ノズルツール４５は、１個の吸着ノズル２４０を保持するシングルノズルツールを例示する。 (2. Detailed configuration of mounting head 44 and nozzle tool 45)
Detailed configurations of the mounting head 44 and the nozzle tool 45 will be described with reference to FIGS. Here, in the mounting head 44, a mechanism for sucking and releasing components and a mechanism for clamping the nozzle tool will be mainly described. The nozzle tool 45 exemplifies a single nozzle tool that holds one suction nozzle 240.
　（２－１．装着ヘッド４４の構成）
　図２に示すように、装着ヘッド４４は、Ｒ軸ハウジング１１０、分岐路形成ユニット１３０、ピストン機構１４０、複数のクランプ部材１５０、エアフィルタユニット１６０、複数のシール部材１７１，１７２、複数の位置基準ピン１８０、θ軸ハウジング１９０、負圧源１９１、弁１９３及び流量計１９４を備える。 (2-1. Configuration of Mounting Head 44)
As shown in FIG. 2, the mounting head 44 includes an R-axis housing 110, a branch path forming unit 130, a piston mechanism 140, a plurality of clamp members 150, an air filter unit 160, a plurality of seal members 171, 172, and a plurality of position references. A pin 180, a θ-axis housing 190, a negative pressure source 191, a valve 193, and a flow meter 194 are provided.
　Ｒ軸ハウジング１１０は、図３に示すように、装着ヘッド４４の下方に突出して設けられる。Ｒ軸ハウジング１１０は、装着ヘッド４４の本体部（図示せず）に、中心軸周りに回転可能に設けられる。Ｒ軸ハウジング１１０は、部品としての分類では、第一ハウジング１１０ａと第二ハウジング１１０ｂとを備える。Ｒ軸ハウジング１１０は、機能として分類では、軸状部１１１、小径筒部１１２、複数の係止部１１３及び複数の基準マーク１１４を備える。 The R-axis housing 110 is provided so as to protrude below the mounting head 44 as shown in FIG. The R-axis housing 110 is provided on the main body (not shown) of the mounting head 44 so as to be rotatable around the central axis. The R-axis housing 110 includes a first housing 110a and a second housing 110b when classified as parts. The R-axis housing 110 includes a shaft-shaped portion 111, a small-diameter cylindrical portion 112, a plurality of locking portions 113, and a plurality of reference marks 114 when classified as functions.
　軸状部１１１は、図２及び図３に示すように、中央に貫通孔を有する円筒状に形成され、装着ヘッド４４の本体部に対して中心軸周りに回転可能である。軸状部１１１は、第一ハウジング１１０ａと第二ハウジング１１０ｂの一部とを含む。ここで、軸状部１１１は、シリンダ１１１ｄ（後述する）を形成するために２部材（第一ハウジング１１０ａと第二ハウジング１１０ｂ）により形成するが、１部材により形成することもできる。 As shown in FIGS. 2 and 3, the shaft-shaped portion 111 is formed in a cylindrical shape having a through hole in the center, and is rotatable around the central axis with respect to the main body portion of the mounting head 44. The shaft portion 111 includes a first housing 110a and a part of the second housing 110b. Here, the shaft-like portion 111 is formed by two members (first housing 110a and second housing 110b) in order to form a cylinder 111d (described later), but can also be formed by one member.
　軸状部１１１は、円筒外周面及び円形の端面を有する。軸状部１１１は、端面に、ヘッド基準面１１１ａ及び逃がし凹溝１１１ｂを備える。ヘッド基準面１１１ａは、平面状に形成され、軸状部１１１の端面の最外周面に環状に設けられる。ヘッド基準面１１１ａは、ノズルツール４５のツール基準面２１２（後述する）に当接する面となる。 The shaft portion 111 has a cylindrical outer peripheral surface and a circular end surface. The shaft portion 111 includes a head reference surface 111a and an escape groove 111b on the end surface. The head reference surface 111 a is formed in a planar shape, and is provided in an annular shape on the outermost peripheral surface of the end surface of the shaft-like portion 111. The head reference surface 111a is a surface that comes into contact with a tool reference surface 212 (described later) of the nozzle tool 45.
　逃がし凹溝１１１ｂは、ヘッド基準面１１１ａの内周側に環状に形成される。逃がし凹溝１１１ｂは、ノズルツール４５の爪部２１３（後述する）がクランプ部材１５０（後述する）の押圧力によって変形する場合に、爪部２１３の一部を収容する領域として機能する。 The escape groove 111b is formed in an annular shape on the inner peripheral side of the head reference surface 111a. The relief concave groove 111b functions as a region for accommodating a part of the claw portion 213 when the claw portion 213 (described later) of the nozzle tool 45 is deformed by the pressing force of the clamp member 150 (described later).
　軸状部１１１の内部に形成される貫通孔は、上孔１１１ｃ、シリンダ１１１ｄ及び下孔１１１ｅを備える。上孔１１１ｃは、軸状部１１１の上端から下方に延びるように形成され、円筒内周面を有する。上孔１１１ｃは、軸状部１１１の中央に形成される。シリンダ１１１ｄは、上孔１１１ｃの下方に連続して形成され、上孔１１１ｃと同軸状であり上孔１１１ｃより大径の円筒内周面を有する。上孔１１１ｃ及びシリンダ１１１ｄは、第一ハウジング１１０ａに形成される。下孔１１１ｅは、シリンダ１１１ｄの下方に連続して形成され、軸状部１１１の下方に開口する。下孔１１１ｅは、第二ハウジング１１０ｂに形成される。 The through-hole formed inside the shaft-like portion 111 includes an upper hole 111c, a cylinder 111d, and a lower hole 111e. The upper hole 111c is formed to extend downward from the upper end of the shaft-like portion 111, and has a cylindrical inner peripheral surface. The upper hole 111 c is formed at the center of the shaft-like portion 111. The cylinder 111d is continuously formed below the upper hole 111c, is coaxial with the upper hole 111c, and has a cylindrical inner peripheral surface having a diameter larger than that of the upper hole 111c. The upper hole 111c and the cylinder 111d are formed in the first housing 110a. The lower hole 111e is formed continuously below the cylinder 111d and opens below the shaft-like portion 111. The lower hole 111e is formed in the second housing 110b.
　軸状部１１１は、第一エア接続路１１１ｆ、第二エア接続路１１１ｇ、フィルタ装着孔１１１ｈ、第一室流路１１１ｉ、第二室流路１１１ｊ及びエア排出路１１１ｋを備える。 The shaft portion 111 includes a first air connection path 111f, a second air connection path 111g, a filter mounting hole 111h, a first chamber flow path 111i, a second chamber flow path 111j, and an air discharge path 111k.
　第一エア接続路１１１ｆは、図２及び図６の中心軸線より右部分に示すように、シリンダ１１１ｄと軸状部１１１の端面（第二ハウジング１１０ｂの端面の外周部）の外部とを連通し、エアを流通する。第一エア接続路１１１ｆの一方は、シリンダ１１１ｄの上端のうち上孔１１１ｃの外周側に開口し、第一エア接続路１１１ｆの他方は、軸状部１１１の端面の外周側に位置するヘッド基準面１１１ａに開口する。つまり、第一エア接続路１１１ｆは、軸状部１１１の内部の外周側に形成される。より詳細には、第一エア接続路１１１ｆは、シリンダ１１１ｄ側の開口部から上方に延び、続いて周方向にＵ字状に折り返し、さらに続いて下方へ向かうことで軸状部１１１のヘッド基準面１１１ａに開口する。 The first air connection path 111f communicates between the cylinder 111d and the outside of the end surface of the shaft-like portion 111 (the outer peripheral portion of the end surface of the second housing 110b) as shown in the right part of the central axis in FIGS. Circulate air. One of the first air connection paths 111f opens to the outer peripheral side of the upper hole 111c in the upper end of the cylinder 111d, and the other of the first air connection paths 111f is a head reference positioned on the outer peripheral side of the end surface of the shaft-shaped portion 111. Open to the surface 111a. That is, the first air connection path 111 f is formed on the outer peripheral side inside the shaft-like portion 111. More specifically, the first air connection path 111f extends upward from the opening on the cylinder 111d side, subsequently turns back in a U shape in the circumferential direction, and then continues downward to become the head reference of the shaft-like portion 111. Open to the surface 111a.
　第二エア接続路１１１ｇは、図２の中心軸線より左部分に示すように、上孔１１１ｃと軸状部１１１の端面（第二ハウジング１１０ｂの端面の外周部）の外部とを連通し、エアを流通する。第二エア接続路１１１ｇの一方は、上孔１１１ｃの内周面に開口し、第二エア接続路１１１ｇの他方は、軸状部１１１の端面の外周側に位置するヘッド基準面１１１ａに開口する。つまり、第二エア接続路１１１ｇは、軸状部１１１の内部の外周側に形成される。より詳細には、第二エア接続路１１１ｇは、上孔１１１ｃ側の開口部から径方向外方に延び、続いて下方へ向かうことで軸状部１１１のヘッド基準面１１１ａに開口する。 The second air connection path 111g communicates the upper hole 111c with the outside of the end surface of the shaft-like portion 111 (the outer peripheral portion of the end surface of the second housing 110b), as shown in the left part of the central axis in FIG. Circulate. One of the second air connection paths 111g opens to the inner peripheral surface of the upper hole 111c, and the other of the second air connection paths 111g opens to the head reference surface 111a located on the outer peripheral side of the end surface of the shaft-shaped portion 111. . That is, the second air connection path 111 g is formed on the outer peripheral side inside the shaft-like portion 111. More specifically, the second air connection path 111g extends radially outward from the opening on the upper hole 111c side, and then opens downward to the head reference surface 111a of the shaft-shaped portion 111.
　フィルタ装着孔１１１ｈは、図６に示すように、第一エア接続路１１１ｆのＵ字状の折り返し部分に形成され、軸状部１１１の円筒外周面に開口する。フィルタ装着孔１１１ｈは、後述するエアフィルタ１６１が装着される部位である。 As shown in FIG. 6, the filter mounting hole 111 h is formed in the U-shaped folded portion of the first air connection path 111 f and opens on the cylindrical outer peripheral surface of the shaft-shaped portion 111. The filter mounting hole 111h is a portion where an air filter 161 described later is mounted.
　第一室流路１１１ｉは、図７の右部分に示すように、軸状部１１１の外周側に形成され、上孔１１１ｃとシリンダ１１１ｄとを連通し、エアを流通する。詳細には、第一室流路１１１ｉの一方は、上孔１１１ｃの内周面に開口し、第一室流路１１１ｉの他方は、シリンダ１１１ｄの内周面のうち上方に開口する。 As shown in the right part of FIG. 7, the first chamber flow path 111 i is formed on the outer peripheral side of the shaft-like portion 111, communicates the upper hole 111 c and the cylinder 111 d, and circulates air. Specifically, one of the first chamber flow paths 111i opens on the inner peripheral surface of the upper hole 111c, and the other of the first chamber flow paths 111i opens upward on the inner peripheral surface of the cylinder 111d.
　第二室流路１１１ｊは、図７の左部分に示すように、軸状部１１１の外周側に形成され、上孔１１１ｃとシリンダ１１１ｄとを連通し、エアを流通する。詳細には、第二室流路１１１ｊの一方は、上孔１１１ｃの内周面に開口し、第二室流路１１１ｊは、シリンダ１１１ｄの内周面のうち下方、すなわち第一室流路１１１ｉの開口部より下方に開口する。 As shown in the left part of FIG. 7, the second chamber flow path 111j is formed on the outer peripheral side of the shaft-shaped portion 111, communicates the upper hole 111c and the cylinder 111d, and circulates air. Specifically, one of the second chamber flow paths 111j opens on the inner peripheral surface of the upper hole 111c, and the second chamber flow path 111j is below the inner peripheral surface of the cylinder 111d, that is, the first chamber flow path 111i. Open below the opening.
　エア排出路１１１ｋは、軸状部１１１の外周側に形成され、上孔１１１ｃと下孔１１１ｅとを連通し、エアを流通する。詳細には、エア排出路１１１ｋの一方は、上孔１１１ｃの内周面に開口し、エア排出路１１１ｋの他方は、下孔１１１ｅの内周面に開口する。より詳細には、エア排出路１１１ｋは、第一ハウジング１１０ａに形成される第一エア排出路１１１ｋ１と、第二ハウジング１１０ｂに形成され第一エア排出路１１１ｋ１に連通する第二エア排出路１１１ｋ２とを備える。 The air discharge path 111k is formed on the outer peripheral side of the shaft-shaped portion 111, and communicates the air through the upper hole 111c and the lower hole 111e. Specifically, one of the air discharge paths 111k opens to the inner peripheral surface of the upper hole 111c, and the other of the air discharge paths 111k opens to the inner peripheral surface of the lower hole 111e. More specifically, the air discharge path 111k includes a first air discharge path 111k1 formed in the first housing 110a, and a second air discharge path 111k2 formed in the second housing 110b and communicating with the first air discharge path 111k1. Is provided.
　小径筒部１１２は、中央に貫通孔が形成され、軸状部１１１の端面の中央部から下方へ突出形成される。小径筒部１１２の内周側は、軸状部１１１の下孔１１１ｅに連通する。小径筒部１１２には、内周面から外周面に亘って貫通する複数の窓部１１２ａが形成される。本実施形態においては、小径筒部１１２には、４個の窓部１１２ａが等間隔で形成される。窓部１１２ａは、円形に形成される。 The small-diameter cylindrical portion 112 is formed with a through hole in the center and protrudes downward from the central portion of the end surface of the shaft-shaped portion 111. The inner peripheral side of the small diameter cylindrical portion 112 communicates with the prepared hole 111e of the shaft-shaped portion 111. The small diameter cylindrical portion 112 is formed with a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface. In the present embodiment, four window portions 112a are formed at equal intervals in the small diameter cylindrical portion 112. The window 112a is formed in a circular shape.
　複数の係止部１１３は、図３に示すように、小径筒部１１２の外周面から径方向外方に突出形成される。複数の係止部１１３は、図４に示すように、小径筒部１１２の窓部１１２ａより下方に形成され、且つ、窓部１１２ａに対して周方向にずれて形成される。 As shown in FIG. 3, the plurality of locking portions 113 are formed to protrude radially outward from the outer peripheral surface of the small diameter cylindrical portion 112. As shown in FIG. 4, the plurality of locking portions 113 are formed below the window portion 112a of the small-diameter cylindrical portion 112 and are formed so as to be shifted in the circumferential direction with respect to the window portion 112a.
　複数の基準マーク１１４は、小径筒部１１２の端面に設けられる。複数の基準マーク１１４の相対的な位置関係から、Ｒ軸ハウジング１１０の中心位置が検出される。 The plurality of reference marks 114 are provided on the end surface of the small diameter cylindrical portion 112. From the relative positional relationship between the plurality of reference marks 114, the center position of the R-axis housing 110 is detected.
　分岐路形成ユニット１３０は、図６に示すように、軸状部１１１の上孔１１１ｃ及びシリンダ１１１ｄの上方領域に配置される。分岐路形成ユニット１３０は、第一分岐路形成部１３１、複数の区画管１３２，１３３，１３４，１３５、第二分岐路形成部１３６及び蓋部１３７を備える。 As shown in FIG. 6, the branch path forming unit 130 is disposed in the upper region 111 c of the shaft-like portion 111 and the region above the cylinder 111 d. The branch path forming unit 130 includes a first branch path forming section 131, a plurality of partition pipes 132, 133, 134, 135, a second branch path forming section 136, and a lid section 137.
　第一分岐路形成部１３１は、上孔１１１ｃの下方に配置される。第一分岐路形成部１３１は、筒状に形成される。第一分岐路形成部１３１の外周面には、４個のＯリングを配置するための４個の環状溝が形成される。第一分岐路形成部１３１の内周面は、下方に行くに従って、縮径するような階段状に形成される。さらに、第一分岐路形成部１３１には、内周側と、第二エア接続路１１１ｇ、第一室流路１１１ｉ、第二室流路１１１ｊ、エア排出路１１１ｋのそれぞれと連通するように、径方向に複数の貫通穴が形成される。 The first branch path forming part 131 is disposed below the upper hole 111c. The first branch path forming part 131 is formed in a cylindrical shape. Four annular grooves for arranging four O-rings are formed on the outer peripheral surface of the first branch path forming portion 131. The inner peripheral surface of the first branch path forming portion 131 is formed in a stepped shape that decreases in diameter as it goes downward. Furthermore, the first branch path forming portion 131 communicates with the inner peripheral side and each of the second air connection path 111g, the first chamber flow path 111i, the second chamber flow path 111j, and the air discharge path 111k. A plurality of through holes are formed in the radial direction.
　複数の区画管１３２，１３３，１３４，１３５は、上孔１１１ｃのうち第一分岐路形成部１３１の上方の領域に配置される。複数の区画管１３２，１３３，１３４，１３５は、順に径が小さくなるように、且つ、径方向隙間を有するように形成される。従って、区画管１３２の外周面と上孔１１１ｃの内周面との間、区画管１３２，１３３の間、区画管１３３，１３４の間、区画管１３３，１３４の間には隙間が形成される。 The plurality of partition pipes 132, 133, 134, and 135 are arranged in a region above the first branch path forming portion 131 in the upper hole 111c. The plurality of partition tubes 132, 133, 134, and 135 are formed so that the diameter becomes smaller in order and that there are radial gaps. Accordingly, gaps are formed between the outer peripheral surface of the partition tube 132 and the inner peripheral surface of the upper hole 111c, between the partition tubes 132 and 133, between the partition tubes 133 and 134, and between the partition tubes 133 and 134. .
　第二分岐路形成部１３６は、中心孔を有する円盤状に形成される。さらに、第二分岐路形成部１３６の一方端面には、径方向に延びる溝が形成される。第二分岐路形成部１３６は、溝が形成されていない側の端面が第一分岐路形成部１３１の下面に当接するように、シリンダ１１１ｄ内に設けられる。蓋部１３７は、円盤状に形成され、第二分岐路形成部１３６の下面側を閉塞するように第一ハウジング１１０ａに固定される。 The second branch path forming portion 136 is formed in a disk shape having a center hole. Further, a groove extending in the radial direction is formed on one end surface of the second branch path forming portion 136. The second branch path forming portion 136 is provided in the cylinder 111d so that the end surface on the side where no groove is formed contacts the lower surface of the first branch path forming portion 131. The lid portion 137 is formed in a disc shape, and is fixed to the first housing 110a so as to close the lower surface side of the second branch path forming portion 136.
　ピストン機構１４０は、ピストン１４１とスプリング１４２とを備える。ピストン１４１は、シルクハット形状、すなわち円盤状鍔部を有する有底筒状に形成される。ピストン１４１の筒状部分の外周面のうち鍔部の反対側は、先細テーパ状に形成される。 The piston mechanism 140 includes a piston 141 and a spring 142. The piston 141 is formed in a top-hat shape, that is, a bottomed cylindrical shape having a disk-like collar portion. Of the outer peripheral surface of the cylindrical portion of the piston 141, the opposite side of the collar portion is formed in a tapered shape.
　ピストン１４１は、鍔部が上孔１１１ｃ側に位置するように、シリンダ１１１ｄ及び下孔１１１ｅの内側に軸方向（上下方向）に相対移動可能に配置される。ピストン１４１の鍔部の外周縁が、シリンダ１１１ｄの内周側にＯリングを介して摺動する。つまり、ピストン１４１は、シリンダ１１１ｄ内を、上方の第一室と下方の第二室とを区画する。第一室は、第一室流路１１１ｉが開口する領域である。第二室は、第二室流路１１１ｊが開口する領域である。 The piston 141 is disposed so as to be relatively movable in the axial direction (vertical direction) inside the cylinder 111d and the lower hole 111e so that the flange portion is positioned on the upper hole 111c side. The outer peripheral edge of the flange portion of the piston 141 slides on the inner peripheral side of the cylinder 111d via an O-ring. That is, the piston 141 partitions the upper first chamber and the lower second chamber in the cylinder 111d. The first chamber is a region where the first chamber flow path 111i opens. The second chamber is a region where the second chamber flow path 111j opens.
　さらに、ピストン１４１の筒状部分の外周面が、下孔１１１ｅの内周側に、Ｏリングを介して摺動する。特に、ピストン１４１の軸方向の移動範囲に、エア排出路１１１ｋが開口する。つまり、ピストン１４１の筒状部分が下方に移動しているときには、下孔１１１ｅに開口するエア排出路１１１ｋの開口部を閉塞する。ピストン１４１の筒状が上方に移動しているときには、下孔１１１ｅに開口するエア排出路１１１ｋの開口部を開放する。 Furthermore, the outer peripheral surface of the cylindrical portion of the piston 141 slides on the inner peripheral side of the lower hole 111e via an O-ring. In particular, the air discharge path 111k opens in the axial movement range of the piston 141. That is, when the cylindrical portion of the piston 141 moves downward, the opening of the air discharge path 111k that opens to the lower hole 111e is closed. When the cylindrical shape of the piston 141 is moving upward, the opening of the air discharge path 111k that opens to the lower hole 111e is opened.
　スプリング１４２は、蓋部１３７の下面とピストン１４１の底面との間に配置される。スプリング１４２は、蓋部１３７に対してピストン１４１を下方向に付勢する。 The spring 142 is disposed between the lower surface of the lid portion 137 and the bottom surface of the piston 141. The spring 142 urges the piston 141 downward with respect to the lid portion 137.
　複数のクランプ部材１５０は、球体である。複数のクランプ部材１５０は、小径筒部１１２の複数の窓部１１２ａのそれぞれに配置される。複数のクランプ部材１５０は、小径筒部１１２の外周面から突出する位置と、小径筒部１１２の外周面より径方向内方の位置との間で、移動する。 The plurality of clamp members 150 are spheres. The plurality of clamp members 150 are disposed in each of the plurality of window portions 112 a of the small diameter cylindrical portion 112. The plurality of clamp members 150 move between a position protruding from the outer peripheral surface of the small diameter cylindrical portion 112 and a position radially inward from the outer peripheral surface of the small diameter cylindrical portion 112.
　エアフィルタユニット１６０は、軸状部１１１の外周面に開口するフィルタ装着孔１１１ｈに着脱可能に設けられる。エアフィルタユニット１６０は、エアフィルタ１６１及びフィルタ固定部１６２を備える。エアフィルタ１６１は、第一エア接続路１１１ｆに介在する位置に配置される。フィルタ固定部１６２は、エアフィルタ１６１を固定するための部材である。 The air filter unit 160 is detachably provided in a filter mounting hole 111h that opens on the outer peripheral surface of the shaft-shaped portion 111. The air filter unit 160 includes an air filter 161 and a filter fixing part 162. The air filter 161 is disposed at a position interposed in the first air connection path 111f. The filter fixing part 162 is a member for fixing the air filter 161.
　シール部材１７１は、第一エア接続路１１１ｆの開口部位に着脱可能に設けられる。シール部材１７１は、例えば、筒状弾性部材である。複数のシール部材１７２は、第二エア接続路１１１ｇの開口部位に着脱可能に設けられる。複数のシール部材１７２は、例えば、Ｏリングである。 The seal member 171 is detachably provided at the opening portion of the first air connection path 111f. The seal member 171 is, for example, a cylindrical elastic member. The plurality of seal members 172 are detachably provided at the opening portion of the second air connection path 111g. The plurality of seal members 172 are, for example, O-rings.
　複数の位置基準ピン１８０（位相基準部に相当）は、軸状部１１１の端面のヘッド基準面１１１ａに、下方に延びるように設けられる。複数の位置基準ピン１８０は、１８０度間隔に２つ設けられる。 A plurality of position reference pins 180 (corresponding to the phase reference portion) are provided on the head reference surface 111a of the end surface of the shaft-like portion 111 so as to extend downward. A plurality of position reference pins 180 are provided at intervals of 180 degrees.
　θ軸ハウジング１９０は、図３に示すように、Ｒ軸ハウジング１１０の軸状部１１１の外周側に相対回転可能に設けられる。θ軸ハウジング１９０は、下端に凹凸状の環状クラッチ１９０ａを備える。θ軸ハウジング１９０は、１個の吸着ノズル２４０を保持するノズルツール４５の場合には、使用されない。θ軸ハウジング１９０は、複数個の吸着ノズル２４０を保持するノズルツール４５の場合に使用される。 The θ-axis housing 190 is provided on the outer peripheral side of the shaft-shaped portion 111 of the R-axis housing 110 so as to be relatively rotatable as shown in FIG. The θ-axis housing 190 includes a concave and convex annular clutch 190a at the lower end. The θ-axis housing 190 is not used in the case of the nozzle tool 45 that holds one suction nozzle 240. The θ-axis housing 190 is used in the case of the nozzle tool 45 that holds a plurality of suction nozzles 240.
　負圧源１９１は、部品実装機１の本体に設けられるポンプである。さらに、装着ヘッド４４は、負圧源１９１と中央に位置する区画管１３５の内部とを連通する流路を有する。さらに、図６に示すように、装着ヘッド４４は、正圧源１９２と複数の区画管１３２～１３５のそれぞれにより形成される各流路との間で連通される流路を有する。 The negative pressure source 191 is a pump provided in the main body of the component mounting machine 1. Furthermore, the mounting head 44 has a flow path that communicates the negative pressure source 191 and the inside of the partition pipe 135 located at the center. Further, as shown in FIG. 6, the mounting head 44 has a flow path communicating between the positive pressure source 192 and each flow path formed by each of the plurality of partition pipes 132 to 135.
　弁１９３は、負圧源１９１及び正圧源１９２と、複数の区画管１３２～１３５のそれぞれにより形成される各流路との間に配置され、正圧エアが供給される流路及び負圧エアが供給される流路を切り替える。 The valve 193 is disposed between the negative pressure source 191 and the positive pressure source 192 and each flow path formed by each of the plurality of partition pipes 132 to 135, and the flow path and the negative pressure to which positive pressure air is supplied. Switch the flow path to which air is supplied.
　上孔１１１ｃと区画管１３２との間に供給される正圧エアは、図７の右部分に示すように、シリンダ１１１ｄの第二室に供給される。区画管１３２，１３３の間に供給される正圧エアは、図６の左部分に示すようにエア排出路１１１ｋに供給される。区画管１３３，１３４の間に供給される正圧エアは、図７の右部分に示すように、シリンダ１１１ｄの第一室に供給される。区画管１３４，１３５の間に供給される負圧エアは、図２に示すように、第二エア接続路１１１ｇに供給される。区画管１３５の内側に供給される正圧エア又は負圧エアは、図２に示すように、第一エア接続路１１１ｆに供給される。 The positive pressure air supplied between the upper hole 111c and the partition pipe 132 is supplied to the second chamber of the cylinder 111d as shown in the right part of FIG. The positive pressure air supplied between the partition pipes 132 and 133 is supplied to the air discharge path 111k as shown in the left part of FIG. The positive pressure air supplied between the partition pipes 133 and 134 is supplied to the first chamber of the cylinder 111d as shown in the right part of FIG. As shown in FIG. 2, the negative pressure air supplied between the partition pipes 134 and 135 is supplied to the second air connection path 111g. The positive pressure air or the negative pressure air supplied to the inside of the partition pipe 135 is supplied to the first air connection path 111f as shown in FIG.
　流量計１９４は、区画管１３２，１３３の間の流路と弁１９３との間に設けられ、区画管１３２，１３３の間の流路、すなわち図６の左部分に示すようにエア排出路１１１ｋを流通するエア流量を計測する。 The flow meter 194 is provided between the flow path between the partition pipes 132 and 133 and the valve 193, and as shown in the flow path between the partition pipes 132 and 133, that is, the left portion of FIG. Measure the flow rate of air flowing through.
　ここで、部品実装機１は、図６に示すように、制御部（ピストン位置判定部に相当）６を備える。制御部６は、弁１９３の切替制御を行うと共に、流量計１９４により計測される流量に基づいて、ピストン１４１の位置を判定する。ピストン１４１の位置判定についての詳細は後述する。 Here, the component mounting machine 1 includes a control unit (corresponding to a piston position determination unit) 6 as shown in FIG. The control unit 6 performs switching control of the valve 193 and determines the position of the piston 141 based on the flow rate measured by the flow meter 194. Details of the position determination of the piston 141 will be described later.
　（２－２．ノズルツール４５の構成）
　ノズルツール４５は、図２に示すように、ツール本体部２１０、蓋部２２０、ノズル固定部２３０、吸着ノズル２４０及びスプリング２５０を備える。ツール本体部２１０は、貫通孔を有する筒状に形成されると共に、外径が下方に行くに従って小さくなるような階段状に形成される。ツール本体部２１０の上面側は、装着ヘッド４４の軸状部１１１の端面に対向する面である。ツール本体部２１０の上端面の中央部には、Ｒ軸ハウジング１１０の小径筒部１１２を収容する凹所２１１が形成される。ツール本体部２１０の上端面の外周側は、平面状に形成される環状のツール基準面２１２を備える。ツール基準面２１２は、ヘッド基準面１１１ａに当接する部位である。 (2-2. Configuration of nozzle tool 45)
As shown in FIG. 2, the nozzle tool 45 includes a tool main body part 210, a lid part 220, a nozzle fixing part 230, a suction nozzle 240 and a spring 250. The tool main body 210 is formed in a cylindrical shape having a through hole, and is formed in a stepped shape such that the outer diameter decreases as it goes downward. The upper surface side of the tool main body 210 is a surface facing the end surface of the shaft-shaped portion 111 of the mounting head 44. A recess 211 that accommodates the small-diameter cylindrical portion 112 of the R-axis housing 110 is formed at the center of the upper end surface of the tool main body 210. The outer peripheral side of the upper end surface of the tool main body 210 includes an annular tool reference surface 212 formed in a planar shape. The tool reference surface 212 is a part that contacts the head reference surface 111a.
　ツール本体部２１０は、凹所２１１の開口縁に径方向内方に向かって突出形成される環状の爪部２１３を備える。つまり、爪部２１３は、ツール本体部２１０の中央部に設けられる。爪部２１３は、クランプ部材１５０がクランプ位置、すなわち小径筒部１１２の外周面より突出する位置に位置するときに、クランプ部材１５０に係止される被クランプ部である。爪部２１３の内周面は、凹所２１１の奥側からツール基準面２１２側に向かって、縮径するテーパ状に形成される。 The tool main body 210 includes an annular claw 213 that is formed to project radially inward from the opening edge of the recess 211. That is, the claw portion 213 is provided at the center portion of the tool main body portion 210. The claw portion 213 is a clamped portion that is locked to the clamp member 150 when the clamp member 150 is located at a clamp position, that is, a position that protrudes from the outer peripheral surface of the small diameter cylindrical portion 112. The inner peripheral surface of the claw portion 213 is formed in a tapered shape that decreases in diameter from the back side of the recess 211 toward the tool reference surface 212 side.
　爪部２１３の内周縁には、図５に示すように、複数の切欠２１３ａが形成される。複数の切欠２１３ａは、装着ヘッド４４の係止部１１３を通過可能に形成される。一方、爪部２１３のうち複数の切欠２１３ａ以外の部位は、係止部１１３に係止される。つまり、爪部２１３は、係止部１１３に係止される被係止部である。 As shown in FIG. 5, a plurality of notches 213 a are formed on the inner peripheral edge of the claw portion 213. The plurality of notches 213 a are formed so as to be able to pass through the locking portions 113 of the mounting head 44. On the other hand, portions of the claw portion 213 other than the plurality of notches 213 a are locked to the locking portion 113. That is, the claw portion 213 is a locked portion that is locked to the locking portion 113.
　ツール本体部２１０は、さらに、第一エア被接続路２１４及び位置決め孔２１６（位相被装着部）を備える。第一エア被接続路２１４は、ツール本体部２１０の上面側において、爪部２１３より外周側に開口するように設けられる。第一エア被接続路２１４は、ツール基準面２１２と凹所２１１より下方の中央孔とを連通する。第一エア被接続路２１４のツール基準面２１２側の開口部は、軸状部１１１の第一エア接続路１１１ｆに接続される。第一エア被接続路２１４は、第一エア接続路１１１ｆとの間でエアを流通する。 The tool body 210 further includes a first air connected path 214 and a positioning hole 216 (phase attached part). The first air connected path 214 is provided on the upper surface side of the tool main body 210 so as to open to the outer peripheral side from the claw portion 213. The first air connected path 214 communicates the tool reference surface 212 with the central hole below the recess 211. The opening on the tool reference surface 212 side of the first air connected path 214 is connected to the first air connecting path 111 f of the shaft-shaped part 111. The first air connected path 214 circulates air with the first air connecting path 111f.
　複数の位置決め孔２１６は、ツール基準面２１２に形成され、複数の位置基準ピン１８０に対応する位置に形成される。なお、１個の吸着ノズル２４０を保持するノズルツール４５は、第二エア接続路１１１ｇに接続される流路を有しない。後述するが、複数個の吸着ノズル２４０を保持するマルチノズルツールは、第二エア接続路１１１ｇに接続される第二エア被接続路を備える。 The plurality of positioning holes 216 are formed in the tool reference surface 212 and are formed at positions corresponding to the plurality of position reference pins 180. The nozzle tool 45 that holds one suction nozzle 240 does not have a flow path that is connected to the second air connection path 111g. As will be described later, the multi-nozzle tool that holds the plurality of suction nozzles 240 includes a second air connected path connected to the second air connecting path 111g.
　蓋部２２０は、ツール本体部２１０の凹所２１１の底部を閉塞する。つまり、蓋部２２０は、凹所２１１と、ツール本体部２１０の先細側の貫通孔とを区画する。ノズル固定部２３０は、筒状に形成される。ノズル固定部２３０の一部は、ツール本体部２１０の先細側の貫通孔に、軸方向に移動可能に挿入される。ただし、ノズル固定部２３０は、ツール本体部２１０の下方へ脱落しないように係止される。 The lid 220 closes the bottom of the recess 211 of the tool body 210. That is, the lid 220 defines the recess 211 and the through hole on the tapered side of the tool main body 210. The nozzle fixing part 230 is formed in a cylindrical shape. A part of the nozzle fixing portion 230 is inserted into the through hole on the tapered side of the tool main body portion 210 so as to be movable in the axial direction. However, the nozzle fixing part 230 is locked so as not to drop down below the tool main body part 210.
　吸着ノズル２４０は、ノズル固定部２３０の先端に取り付けられる。吸着ノズル２４０は、端部から離れた位置に、径方向外方に突出するフランジ部２４１を備える。スプリング２５０は、ツール本体部２１０の階段状外周面と吸着ノズル２４０のフランジ部２４１との間に配置され、両者を離間する方向に付勢する。 The suction nozzle 240 is attached to the tip of the nozzle fixing portion 230. The suction nozzle 240 includes a flange portion 241 that protrudes radially outward at a position away from the end portion. The spring 250 is disposed between the stepped outer peripheral surface of the tool main body 210 and the flange portion 241 of the suction nozzle 240, and urges them in the direction of separating them.
　（３．装着ヘッド４４の動作）
　（３－１．クランプ動作）
　装着ヘッド４４がノズルツール４５をクランプする動作について、図２，図６及び図７を参照して説明する。ノズルツール４５がツールステーション（図示しない）に保管されている状態で、制御部６が、装着ヘッド４４を移動して、装着ヘッド４４にノズルツール４５をクランプさせる。 (3. Operation of mounting head 44)
(3-1. Clamping operation)
An operation in which the mounting head 44 clamps the nozzle tool 45 will be described with reference to FIGS. In a state where the nozzle tool 45 is stored in a tool station (not shown), the control unit 6 moves the mounting head 44 and causes the mounting head 44 to clamp the nozzle tool 45.
　まず、制御部６は、Ｘ軸スライダ４３及びＹ軸スライダ４２を駆動する。制御部６は、複数の基準マーク１１４の位置を認識して、装着ヘッド４４がツールステーションに保管されているノズルツール４５をクランプ可能な位置に装着ヘッド４４を移動する。このとき、装着ヘッド４４の小径筒部１１２がノズルツール４５の凹所２１１の上方に位置する。この状態において、装着ヘッド４４の係止部１１３とノズルツール４５の爪部２１３の切欠２１３ａとが位相合わせされている。 First, the control unit 6 drives the X-axis slider 43 and the Y-axis slider 42. The control unit 6 recognizes the positions of the plurality of reference marks 114 and moves the mounting head 44 to a position where the mounting head 44 can clamp the nozzle tool 45 stored in the tool station. At this time, the small diameter cylindrical portion 112 of the mounting head 44 is located above the recess 211 of the nozzle tool 45. In this state, the locking portion 113 of the mounting head 44 and the notch 213a of the claw portion 213 of the nozzle tool 45 are phase aligned.
　続いて、制御部６が、Ｒ軸ハウジング１１０を下方へ移動させることにより、Ｒ軸ハウジング１１０をツールステーションに保管されているノズルツール４５に近づける。図１０に示すように、係止部１１３が切欠２１３ａを通過する。そして、装着ヘッド４４の小径筒部１１２の一部が、ノズルツール４５の凹所２１１に入り込む。 Subsequently, the control unit 6 moves the R-axis housing 110 downward to bring the R-axis housing 110 closer to the nozzle tool 45 stored in the tool station. As shown in FIG. 10, the locking part 113 passes through the notch 213a. A part of the small diameter cylindrical portion 112 of the mounting head 44 enters the recess 211 of the nozzle tool 45.
　続いて、図８及び図９に示すように、制御部６は、Ｒ軸ハウジング１１０を回転させて、係止部１１３と切欠２１３ａの位相をずらす。位置基準ピン１８０と位置決め孔２１６との位置が合わせられる。このとき、クランプ部材１５０が、切欠２１３ａ以外の位相に位置する。この状態で、制御部６がＲ軸ハウジング１１０を下方へ移動することにより、図２に示すように、装着ヘッド４４の小径筒部１１２がノズルツール４５の凹所２１１に収容される。同時に、位置基準ピン１８０が位置決め孔２１６に嵌め込まれる。 Subsequently, as shown in FIGS. 8 and 9, the control unit 6 rotates the R-axis housing 110 to shift the phases of the locking unit 113 and the notch 213 a. The positions of the position reference pin 180 and the positioning hole 216 are matched. At this time, the clamp member 150 is positioned at a phase other than the notch 213a. In this state, when the control unit 6 moves down the R-axis housing 110, the small-diameter cylindrical portion 112 of the mounting head 44 is accommodated in the recess 211 of the nozzle tool 45 as shown in FIG. At the same time, the position reference pin 180 is fitted into the positioning hole 216.
　続いて、図７に示すように、弁１９３の切替によって、正圧エアが区画管１３３，１３４の間に供給される。従って、正圧エアが、第一室流路１１１ｉを通過して、シリンダ１１１ｄの第一室（ピストン１４１の上方領域）に供給される。一方、弁１９３の切替によって、シリンダ１１１ｄの第二室（ピストン１４１の下方領域）内のエアが、第二室流路１１１ｊを通過して外部へ排出される。 Subsequently, as shown in FIG. 7, the positive pressure air is supplied between the partition pipes 133 and 134 by switching the valve 193. Accordingly, positive pressure air passes through the first chamber flow path 111i and is supplied to the first chamber of the cylinder 111d (the region above the piston 141). On the other hand, by switching the valve 193, the air in the second chamber of the cylinder 111d (the region below the piston 141) passes through the second chamber flow path 111j and is discharged to the outside.
　そうすると、ピストン１４１が、図２、図６及び図７に示すように、下方へ移動する。ピストン１４１が下方へ移動すると、ピストン１４１の外周面のテーパ状部分が、クランプ部材１５０に当接する。ピストン１４１がさらに下方へ移動すると、クランプ部材１５０が径方向外方へ移動する。つまり、クランプ部材１５０が小径筒部１１２の外周面から突出する状態となる。 Then, the piston 141 moves downward as shown in FIG. 2, FIG. 6 and FIG. When the piston 141 moves downward, the tapered portion of the outer peripheral surface of the piston 141 comes into contact with the clamp member 150. When the piston 141 further moves downward, the clamp member 150 moves radially outward. That is, the clamp member 150 protrudes from the outer peripheral surface of the small diameter cylindrical portion 112.
　ここで、ノズルツール４５の爪部２１３は、突出するクランプ部材１５０より上方に位置している。クランプ部材１５０が小径筒部１１２の外周面から突出することに伴って、クランプ部材１５０は、被クランプ部としての爪部２１３のテーパ状部分を押圧し、ノズルツール４５がＲ軸ハウジング１１０の軸状部１１１側へ引き込まれる。 Here, the claw portion 213 of the nozzle tool 45 is located above the protruding clamp member 150. As the clamp member 150 protrudes from the outer peripheral surface of the small-diameter cylindrical portion 112, the clamp member 150 presses the tapered portion of the claw portion 213 as the clamped portion, and the nozzle tool 45 is the axis of the R-axis housing 110. It is drawn to the shape part 111 side.
　さらに、クランプ部材１５０がさらに径方向外方へ突出すると、ツール基準面２１２がヘッド基準面１１１ａに面接触する状態となる。この状態が、ノズルツール４５を軸状部１１１に対して移動規制するクランプ状態である。そして、クランプ状態におけるクランプ部材１５０の位置が、クランプ位置である。つまり、ピストン１４１が下方に移動することで、クランプ部材１５０によりノズルツール４５が確実にＲ軸ハウジング１１０にクランプされる。 Further, when the clamp member 150 further protrudes radially outward, the tool reference surface 212 comes into surface contact with the head reference surface 111a. This state is a clamped state in which the movement of the nozzle tool 45 with respect to the shaft-like portion 111 is restricted. The position of the clamp member 150 in the clamped state is the clamp position. That is, as the piston 141 moves downward, the nozzle tool 45 is reliably clamped to the R-axis housing 110 by the clamp member 150.
　ここで、クランプ状態において、爪部２１３がクランプ部材１５０に押圧されることにより、爪部２１３の先端側がツール基準面２１２より突出するように変形する。爪部２１３の先端側は、軸状部１１１の端面に形成される逃がし凹溝１１１ｂに入り込む。従って、クランプ部材１５０が爪部２１３を軸状部１１１側に確実に引き込みつつ、ヘッド基準面１１１ａとツール基準面２１２とが確実に面接触する。つまり、ノズルツール４５が装着ヘッド４４に常に安定した状態で位置決めされる。 Here, in the clamped state, when the claw portion 213 is pressed by the clamp member 150, the tip side of the claw portion 213 is deformed so as to protrude from the tool reference surface 212. The front end side of the claw portion 213 enters an escape concave groove 111 b formed on the end surface of the shaft-like portion 111. Therefore, the head reference surface 111a and the tool reference surface 212 are reliably brought into surface contact while the clamp member 150 reliably pulls the claw portion 213 toward the shaft-shaped portion 111. That is, the nozzle tool 45 is always positioned on the mounting head 44 in a stable state.
　また、クランプ状態において、図６に示すように、正圧エアが区画管１３２，１３３の間に常時供給され続けている。従って、正圧エアが、エア排出路１１１ｋに供給され続ける。ここで、クランプ状態では、ピストン１４１が下方に移動している。そのため、エア排出路１１１ｋの開口部は、ピストン１４１により閉塞されている。つまり、正圧エアはエア排出路１１１ｋを流通しない。 Further, in the clamped state, as shown in FIG. 6, positive pressure air is continuously supplied between the partition pipes 132 and 133. Accordingly, positive pressure air continues to be supplied to the air discharge path 111k. Here, in the clamped state, the piston 141 moves downward. Therefore, the opening of the air discharge path 111k is closed by the piston 141. That is, the positive pressure air does not flow through the air discharge path 111k.
　流量計１９４は、エア排出路１１１ｋを流通する流量を計測する。従って、流量計１９４は、ゼロ又はゼロに近い値を示す。制御部６は、流量計１９４により計測される流量を受け取り、ピストン１４１の位置を判定する。流量計１９４により計測される流量がゼロに近い値であるため、制御部６は、ピストン１４１が下方に位置していると判定する。言い換えると、制御部６は、流量がゼロに近い値であることにより、クランプ部材１５０がクランプ状態であると判定できる。 The flow meter 194 measures the flow rate flowing through the air discharge path 111k. Therefore, the flow meter 194 shows zero or a value close to zero. The control unit 6 receives the flow rate measured by the flow meter 194 and determines the position of the piston 141. Since the flow rate measured by the flow meter 194 is a value close to zero, the control unit 6 determines that the piston 141 is positioned below. In other words, the control unit 6 can determine that the clamp member 150 is in the clamped state when the flow rate is a value close to zero.
　（３－２．部品の吸着及び離脱）
　吸着ノズル２４０が部品を吸着する場合の装着ヘッド４４の動作について、図２を参照して説明する。クランプ状態において、制御部６が、Ｘ軸スライダ４３をＸ軸方向及びＹ軸方向に移動させて、吸着ノズル２４０を部品供給装置３における部品の位置に移動させる。この位置において、図２に示すように、弁１９３の切替によって、負圧エアが区画管１３５の内側に供給される。従って、負圧エアが、第一エア接続路１１１ｆを通過して、第一エア被接続路２１４に供給される。その結果、部品が吸着ノズル２４０に吸着される。 (3-2. Adsorption and separation of parts)
The operation of the mounting head 44 when the suction nozzle 240 sucks components will be described with reference to FIG. In the clamped state, the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction, and moves the suction nozzle 240 to the position of the component in the component supply device 3. In this position, as shown in FIG. 2, negative pressure air is supplied to the inside of the partition pipe 135 by switching the valve 193. Therefore, negative pressure air passes through the first air connection path 111f and is supplied to the first air connected path 214. As a result, the component is sucked by the suction nozzle 240.
　ここで、エアフィルタ１６１が第一エア接続路１１１ｆに介在している。従って、吸着ノズル２４０から第一エア被接続路２１４を介して第一エア接続路１１１ｆへ流通するエアは、エアフィルタ１６１を通過する。つまり、エアフィルタ１６１により、第一エア接続路１１１ｆよりさらに奥側への異物の侵入が抑制される。 Here, the air filter 161 is interposed in the first air connection path 111f. Therefore, the air flowing from the suction nozzle 240 to the first air connection path 111f through the first air connected path 214 passes through the air filter 161. That is, the air filter 161 suppresses entry of foreign matter further into the back side than the first air connection path 111f.
　次に、吸着ノズル２４０が吸着した部品を離脱する場合の装着ヘッド４４の動作について、図２を参照して説明する。クランプ状態において、制御部６が、Ｘ軸スライダ４３をＸ軸方向及びＹ軸方向に移動させて、吸着ノズル２４０を回路基板Ｋの所定位置に移動させる。この位置において、図２に示すように、弁１９３の切替によって、負圧エアの供給が停止される。さらに、弁１９３の切替によって、正圧エアが区画管１３５の内側に供給される。従って、正圧エアが、第一エア接続路１１１ｆを通過して、第一エア被接続路２１４に供給される。その結果、部品が吸着ノズル２４０から確実に離脱する。 Next, the operation of the mounting head 44 when the component picked up by the suction nozzle 240 is removed will be described with reference to FIG. In the clamped state, the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction, and moves the suction nozzle 240 to a predetermined position on the circuit board K. In this position, as shown in FIG. 2, the supply of negative pressure air is stopped by switching the valve 193. Furthermore, positive pressure air is supplied to the inside of the partition pipe 135 by switching the valve 193. Accordingly, the positive pressure air passes through the first air connection path 111f and is supplied to the first air connected path 214. As a result, the component is reliably detached from the suction nozzle 240.
　（３－３．アンクランプ動作）
　装着ヘッド４４がノズルツール４５をアンクランプする動作について、図８，図９，図１１及び図１２を参照して説明する。ノズルツール４５を自動交換する際に、装着ヘッド４４が現在クランプしているノズルツール４５がツールステーションに戻される。そこで、制御部６は、ノズルツール４５を保持している状態の装着ヘッド４４を移動して、装着ヘッド４４にノズルツール４５をアンクランプさせる。 (3-3. Unclamping operation)
The operation of the mounting head 44 unclamping the nozzle tool 45 will be described with reference to FIGS. 8, 9, 11 and 12. When the nozzle tool 45 is automatically replaced, the nozzle tool 45 currently clamped by the mounting head 44 is returned to the tool station. Therefore, the control unit 6 moves the mounting head 44 in a state where the nozzle tool 45 is held, and causes the mounting head 44 to unclamp the nozzle tool 45.
　制御部６は、Ｘ軸スライダ４３及びＹ軸スライダ４２を駆動して、ノズルツール４５をツールステーションにセットする。このとき、クランプ部材１５０はクランプ位置に位置する。そして、制御部６は弁１９３を切り替えて、正圧エアが上孔１１１ｃと区画管１３２との間に供給される。従って、正圧エアが、第二室流路１１１ｊを通過して、シリンダ１１１ｄの第二室（ピストン１４１の下方領域）に供給される。一方、弁１９３の切替によって、シリンダ１１１ｄの第一室（ピストン１４１の上方領域）内のエアが、第一室流路１１１ｉを通過して外部へ排出される。 Control unit 6 drives X-axis slider 43 and Y-axis slider 42 to set nozzle tool 45 in the tool station. At this time, the clamp member 150 is located at the clamp position. And the control part 6 switches the valve 193, and positive pressure air is supplied between the upper hole 111c and the division pipe 132. FIG. Accordingly, positive pressure air passes through the second chamber flow path 111j and is supplied to the second chamber of the cylinder 111d (a region below the piston 141). On the other hand, by switching the valve 193, the air in the first chamber of the cylinder 111d (the region above the piston 141) passes through the first chamber flow path 111i and is discharged to the outside.
　そうすると、ピストン１４１が、図１１に示すように、上方へ移動する。ピストン１４１の上方への移動に伴って、クランプ部材１５０への径方向外方への押圧力が低下する。このとき、クランプ部材１５０自身は、径方向内方へ移動する動力を有していない。そのため、図１１に示すように、ピストン１４１が上方へ移動したとしても、クランプ部材１５０がクランプ位置に位置する状態となることがある。ただし、ピストン１４１は上方へ移動しているため、クランプ部材１５０は径方向内方、すなわちアンクランプ位置への移動が許容される状態となる。この状態が、離脱許容状態の一態様としてのアンクランプ許容状態である。なお、離脱許容状態は、ノズルツール４５を軸状部１１１から離脱することを許容する状態であって、アンクランプ許容状態の他に、後述するアンクランプ状態を含む意味である。 Then, the piston 141 moves upward as shown in FIG. Along with the upward movement of the piston 141, the radially outward pressing force on the clamp member 150 decreases. At this time, the clamp member 150 itself does not have power to move inward in the radial direction. Therefore, as shown in FIG. 11, even if the piston 141 moves upward, the clamp member 150 may be positioned at the clamp position. However, since the piston 141 moves upward, the clamp member 150 is allowed to move radially inward, that is, to the unclamping position. This state is an unclamping allowable state as one aspect of the separation allowable state. The disengagement allowable state is a state in which the nozzle tool 45 is allowed to be disengaged from the shaft-shaped portion 111, and includes an unclamped state described later in addition to the unclamped allowable state.
　ここで、エア排出路１１１ｋには、正圧エアが供給され続けている。アンクランプ許容状態では、ピストン１４１は、上方に移動している。そのため、エア排出路１１１ｋの開口部は、ピストン１４１により閉塞されておらず開放されている。つまり、正圧エアは、エア排出路１１１ｋの開口部から排出される。正圧エアは、ピストン１４１の存在により、小径筒部１１２の下方の開口からノズルツール４５の凹所２１１の底面に向けて排出される。つまり、ノズルツール４５には、軸状部１１１から離脱させる力が作用する。 Here, positive pressure air continues to be supplied to the air discharge path 111k. In the unclamping allowable state, the piston 141 moves upward. Therefore, the opening of the air discharge path 111k is not closed by the piston 141 and is opened. That is, positive pressure air is discharged from the opening of the air discharge path 111k. The positive pressure air is discharged from the lower opening of the small-diameter cylindrical portion 112 toward the bottom surface of the recess 211 of the nozzle tool 45 due to the presence of the piston 141. That is, the nozzle tool 45 is subjected to a force for detaching from the shaft portion 111.
　この状態で、制御部６は、Ｒ軸ハウジング１１０を上方へ移動させる。そうすると、エア排出路１１１ｋから排出される正圧エアの影響により、ノズルツール４５が軸状部１１１から離れる。同時に、クランプ部材１５０が径方向内方へ移動し、小径筒部１１２の外周面より内側に位置する。従って、クランプ部材１５０による爪部２１３への係止が、確実に解除される。この状態が、離脱許容状態のもう一つの態様としてのアンクランプ状態である。つまり、アンクランプ状態は、クランプ部材１５０がアンクランプ位置に位置し、ノズルツール４５がクランプ状態から下方へ移動する際にクランプ部材１５０が被クランプ部としての爪部２１３に係止されない状態である。 In this state, the control unit 6 moves the R-axis housing 110 upward. Then, the nozzle tool 45 is separated from the shaft-like portion 111 due to the influence of positive pressure air discharged from the air discharge path 111k. At the same time, the clamp member 150 moves inward in the radial direction and is positioned on the inner side of the outer peripheral surface of the small diameter cylindrical portion 112. Therefore, the latching to the claw part 213 by the clamp member 150 is reliably released. This state is an unclamped state as another mode of the separation allowance state. That is, the unclamped state is a state in which the clamp member 150 is positioned at the unclamp position and the clamp member 150 is not locked to the claw portion 213 as the clamped portion when the nozzle tool 45 moves downward from the clamped state. .
　クランプ状態からアンクランプ状態に移行して軸状部１１１とノズルツール４５とが離れると、図８及び図９に示すように、係止部１１３が被係止部としての爪部２１３に係止する状態になる。そこで、制御部６はＲ軸ハウジング１１０を回転し、係止部１１３と切欠２１３ａとの位相が一致する状態にする。続いて、制御部６は、さらにＲ軸ハウジング１１０を上方へ移動することにより、係止部１１３が切欠２１３ａを通過し、Ｒ軸ハウジング１１０がノズルツール４５から完全に離脱する。 When the shaft portion 111 and the nozzle tool 45 are separated from the clamped state to the unclamped state, the locking portion 113 is locked to the claw portion 213 as the locked portion as shown in FIGS. It becomes a state to do. Therefore, the control unit 6 rotates the R-axis housing 110 so that the phases of the locking portion 113 and the notch 213a coincide with each other. Subsequently, the control unit 6 further moves the R-axis housing 110 upward, so that the locking portion 113 passes through the notch 213 a and the R-axis housing 110 is completely detached from the nozzle tool 45.
　また、アンクランプ許容状態及びアンクランプ状態において、エア排出路１１１ｋから排出された正圧エアは、軸状部１１１の端面の中央部から小径筒部１１２を介して排出し、その後にヘッド基準面１１１ａとツール基準面２１２との隙間を通過して径方向外方へ流出する。ヘッド基準面１１１ａとツール基準面２１２との隙間を正圧エアが通過することで、両面に異物の付着を防止できると共に、付着した異物を除去できる。 Further, in the unclamping allowable state and the unclamping state, the positive pressure air discharged from the air discharge path 111k is discharged from the central portion of the end surface of the shaft-like portion 111 through the small diameter cylindrical portion 112, and then the head reference surface It flows out radially outward through the gap between 111a and the tool reference surface 212. By allowing positive pressure air to pass through the gap between the head reference surface 111a and the tool reference surface 212, it is possible to prevent foreign matter from adhering to both surfaces and remove the attached foreign matter.
　また、流量計１９４は、エア排出路１１１ｋを流通する流量を計測する。ここで、アンクランプ許容状態又はアンクランプ状態では、ピストン１４１が上方に移動している。そのため、エア排出路１１１ｋの開口部は、ピストン１４１により閉塞されておらず開放されている。従って、流量計１９４は、クランプ状態のときと比べて大きな値を示す。制御部６は、流量計１９４により計測される流量を受け取り、ピストン１４１の位置を判定する。流量計１９４により計測される流量が大きな値であるため、制御部６は、ピストン１４１が上方に位置していると判定する。言い換えると、制御部６は、流量が大きな値であることにより、クランプ部材１５０が離脱許容状態（アンクランプ状態又はアンクランプ許容状態）であると判定できる。 Further, the flow meter 194 measures the flow rate flowing through the air discharge path 111k. Here, in the unclamping allowable state or the unclamping state, the piston 141 moves upward. Therefore, the opening of the air discharge path 111k is not closed by the piston 141 and is opened. Therefore, the flow meter 194 shows a larger value than that in the clamped state. The control unit 6 receives the flow rate measured by the flow meter 194 and determines the position of the piston 141. Since the flow rate measured by the flow meter 194 is a large value, the control unit 6 determines that the piston 141 is positioned above. In other words, the control unit 6 can determine that the clamp member 150 is in the disengagement allowable state (unclamped state or unclampable state) because the flow rate is a large value.
　（３－４．ノズルツール手動交換時の動作）
　作業者がノズルツール４５を手動交換する際の装着ヘッド４４の動作について、図８，図９及び図１１を参照して説明する。通常時には、ノズルツール４５は自動交換される。装着ヘッド４４が異常停止した場合などに、ノズルツール４５を装着ヘッド４４から取り外したい場合がある。この場合、作業者が、手動によりノズルツール４５を装着ヘッド４４から取り外す。 (3-4. Operation during manual replacement of nozzle tool)
The operation of the mounting head 44 when the operator manually replaces the nozzle tool 45 will be described with reference to FIGS. Normally, the nozzle tool 45 is automatically replaced. There is a case where the nozzle tool 45 is desired to be removed from the mounting head 44 when the mounting head 44 is abnormally stopped. In this case, the operator manually removes the nozzle tool 45 from the mounting head 44.
　まず、異常停止により、装着ヘッド４４が停止したとする。ただし、この場合の異常停止は、ノズルツール４５の手動交換を許容する種別の異常停止である。この状態で、図８又は図９に示すように、クランプ部材１５０はクランプ状態からアンクランプ状態となる。つまり、ノズルツール４５が、軸状部１１１の下方に移動する。 First, it is assumed that the mounting head 44 has stopped due to an abnormal stop. However, the abnormal stop in this case is a type of abnormal stop that allows manual replacement of the nozzle tool 45. In this state, as shown in FIG. 8 or FIG. 9, the clamp member 150 changes from the clamped state to the unclamped state. That is, the nozzle tool 45 moves below the shaft portion 111.
　若しくは、一時的に、図１１に示すように、クランプ部材１５０がクランプ状態からアンクランプ許容状態となる。クランプ部材１５０がアンクランプ許容状態のときには、正圧エアがエア排出路１１１ｋから排出されているため、直後にはノズルツール４５が軸状部１１１の下方に移動すると共に、クランプ部材１５０はアンクランプ許容状態からアンクランプ状態となる。つまり、ノズルツール４５は、図８及び図９に示す状態となる。 Alternatively, as shown in FIG. 11, the clamp member 150 temporarily changes from the clamped state to the unclamped allowable state. When the clamp member 150 is in the unclamping allowable state, since the positive pressure air is discharged from the air discharge path 111k, immediately after the nozzle tool 45 moves below the shaft-shaped portion 111, the clamp member 150 is unclamped. From the allowable state to the unclamped state. That is, the nozzle tool 45 is in the state shown in FIGS.
　若しくは、シール部材１７１，１７２が、摩擦力により第一エア接続路１１１ｆ又は第二エア接続路１１１ｇに付着した状態となることがある。このとき、クランプ部材１５０はアンクランプ状態ではあるが、ノズルツール４５は装着ヘッド４４にくっついた状態となる。クランプ部材１５０がアンクランプ状態のときには、正圧エアがエア排出路１１１ｋから排出されているため、直後にはノズルツール４５は、軸状部１１１の下方に移動して図８及び図９に示す状態となる。 Alternatively, the seal members 171 and 172 may be attached to the first air connection path 111f or the second air connection path 111g due to frictional force. At this time, the clamp member 150 is in an unclamped state, but the nozzle tool 45 is in a state of sticking to the mounting head 44. When the clamp member 150 is in the unclamped state, since the positive pressure air is discharged from the air discharge path 111k, the nozzle tool 45 moves immediately below the shaft-shaped portion 111 immediately after that, as shown in FIGS. It becomes a state.
　つまり、図８及び図９に示すように、クランプ部材１５０がクランプ状態からアンクランプ状態に移行したときに、ノズルツール４５が下方へ移動する際に、被係止部としての爪部２１３が係止部１１３に係止される。従って、異常停止のときに、ノズルツール４５が装着ヘッド４４から落下することはなく、装着ヘッド４４に引っ掛けられている状態となる。つまり、この時点までにおいて、作業者がノズルツール４５を保持しておく必要はない。続いて、作業者は、ノズルツール４５を回転して係止部１１３と切欠２１３ａとの位相を合わせ、ノズルツール４５を装着ヘッド４４から取り外す。 That is, as shown in FIGS. 8 and 9, when the clamp member 150 shifts from the clamped state to the unclamped state, the claw portion 213 as the locked portion is engaged when the nozzle tool 45 moves downward. Locked to the stop 113. Therefore, the nozzle tool 45 does not fall from the mounting head 44 when it stops abnormally, but is in a state of being caught by the mounting head 44. That is, it is not necessary for the operator to hold the nozzle tool 45 up to this point. Subsequently, the operator rotates the nozzle tool 45 to adjust the phases of the locking portion 113 and the notch 213 a and removes the nozzle tool 45 from the mounting head 44.
　（３－５．メンテナンス動作）
　作業者は、装着ヘッド４４のメンテナンスとして、消耗品であるエアフィルタ１６１を交換することがある。この場合、作業者は、軸状部１１１の外周面に配置されているフィルタ固定部１６２及びエアフィルタ１６１をＲ軸ハウジング１１０から取り外す。そして、作業者は、新しいエアフィルタ１６１とフィルタ固定部１６２を軸状部１１１に取り付ける。従って、作業者は、容易にエアフィルタ１６１を交換できる。 (3-5. Maintenance operation)
An operator may replace the air filter 161 as a consumable part as maintenance of the mounting head 44. In this case, the operator removes the filter fixing part 162 and the air filter 161 arranged on the outer peripheral surface of the shaft-like part 111 from the R-axis housing 110. Then, the operator attaches a new air filter 161 and a filter fixing part 162 to the shaft-like part 111. Therefore, the operator can easily replace the air filter 161.
　また、作業者は、装着ヘッド４４のメンテナンスとして、消耗品であるシール部材１７１，１７２を交換することがある。この場合、作業者は、軸状部１１１の端面において、軸状部１１１の外周側からシール部材１７１，１７２を取り外す。そして、作業者は、新しいシール部材１７１，１７２を軸状部１１１に取り付ける。シール部材１７１，１７２は、軸状部１１１の端面のうちクランプ部材１５０及び小径筒部１１２より外周側に設けられている。そのため、作業者によるシール部材１７１，１７２の交換時に、クランプ部材１５０及び小径筒部１１２が邪魔になることはない。従って、作業者は、容易にシール部材１７１，１７２を交換できる。 Also, the worker may replace the consumable seal members 171 and 172 as maintenance of the mounting head 44. In this case, the operator removes the seal members 171 and 172 from the outer peripheral side of the shaft-like portion 111 on the end surface of the shaft-like portion 111. Then, the operator attaches new seal members 171 and 172 to the shaft-shaped portion 111. The seal members 171 and 172 are provided on the outer peripheral side of the end surface of the shaft-like portion 111 with respect to the clamp member 150 and the small-diameter cylindrical portion 112. Therefore, the clamp member 150 and the small diameter cylindrical portion 112 do not get in the way when the operator replaces the seal members 171 and 172. Therefore, the operator can easily replace the seal members 171 and 172.
　（４．ノズルツール３００の構成）
　上記におけるノズルツール４５は、１個の吸着ノズル２４０を保持する。ノズルツール４５は、自動交換可能であるため、装着ヘッド４４に着脱可能な他のノズルツール３００について、図１３を参照して説明する。 (4. Configuration of the nozzle tool 300)
The nozzle tool 45 in the above holds one suction nozzle 240. Since the nozzle tool 45 is automatically replaceable, another nozzle tool 300 that can be attached to and detached from the mounting head 44 will be described with reference to FIG.
　図１３に示すノズルツール３００は、１２個の吸着ノズルを保持する１２マルチノズルツールである。ノズルツール３００は、ツール本体部３０１、円筒ギヤ３０２、１２個のノズルホルダ３０３、１２個の吸着ノズル３０４、θ軸ギヤ３０５、係止片３０６及びバルブ操作片３０７を備える。 The nozzle tool 300 shown in FIG. 13 is a 12 multi-nozzle tool that holds 12 suction nozzles. The nozzle tool 300 includes a tool main body 301, a cylindrical gear 302, twelve nozzle holders 303, twelve suction nozzles 304, a θ-axis gear 305, a locking piece 306, and a valve operation piece 307.
　ツール本体部３０１は、装着ヘッド４４の軸状部１１１にクランプされる。ここで、図１３には図示しないが、ツール本体部３０１の上面の中央の凹所３０１ａには、ノズルツール４５の上面側の凹所２１１、ツール基準面２１２、爪部２１３第一エア被接続路２１４を備える。さらに、図示しないが、ツール本体部３０１の上面の中央の凹所３０１ａには、軸状部１１１の第二エア接続路１１１ｇに接続される第二エア被接続路が形成される。 The tool body 301 is clamped to the shaft 111 of the mounting head 44. Here, although not shown in FIG. 13, the recess 211 a on the upper surface side of the nozzle tool 45, the tool reference surface 212, and the claw portion 213 are connected to the first air in the center recess 301 a of the upper surface of the tool main body 301. A path 214 is provided. Further, although not shown, a second air connected path connected to the second air connecting path 111g of the shaft-shaped portion 111 is formed in the central recess 301a on the upper surface of the tool main body 301.
　円筒ギヤ３０２は、凹所３０１ａの外周側に、ツール本体部３０１に相対回転可能に設けられる。円筒ギヤ３０２の外周面には、軸長方向に延びるギヤ歯（図示せず）が形成される。円筒ギヤ３０２の上端面には、θ軸ハウジング１９０（図３に示す）の凹凸状の環状クラッチ１９０ａに噛み合う凹凸状の環状クラッチ３０２ａが形成される。つまり、環状クラッチ１９０ａ，３０２ａが噛み合うことで、円筒ギヤ３０２はθ軸ハウジング１９０と共に回転する。 The cylindrical gear 302 is provided on the outer peripheral side of the recess 301a so as to be rotatable relative to the tool main body 301. Gear teeth (not shown) extending in the axial length direction are formed on the outer peripheral surface of the cylindrical gear 302. On the upper end surface of the cylindrical gear 302, a concave and convex annular clutch 302a that meshes with the concave and convex annular clutch 190a of the θ-axis housing 190 (shown in FIG. 3) is formed. That is, the cylindrical gear 302 rotates together with the θ-axis housing 190 by the engagement of the annular clutches 190 a and 302 a.
　１２個のノズルホルダ３０３は、１２個の吸着ノズル３０４を先端側に保持する。１２個のノズルホルダ３０３は、それぞれ独立して、ツール本体部３０１に対して上下方向に移動可能に設けられる。さらに、１２個のノズルホルダ３０３は、ツール本体部３０１に対して自転可能に設けられる。 The twelve nozzle holders 303 hold the twelve suction nozzles 304 on the tip side. The twelve nozzle holders 303 are independently provided so as to be movable in the vertical direction with respect to the tool main body 301. Further, the twelve nozzle holders 303 are provided so as to be able to rotate with respect to the tool main body 301.
　θ軸ギヤ３０５は、ノズルホルダ３０３の上端に設けられ、円筒ギヤ３０２の外周面のギヤ歯に噛合する。そして、ノズルホルダ３０３が上下方向に移動する場合、θ軸ギヤ３０５は、円筒ギヤ３０２のギヤ歯に噛合した状態を維持する。つまり、θ軸ハウジング１９０が回転することで、ノズルホルダ３０３及び吸着ノズル３０４が自転する。 The θ-axis gear 305 is provided at the upper end of the nozzle holder 303 and meshes with the gear teeth on the outer peripheral surface of the cylindrical gear 302. When the nozzle holder 303 moves in the vertical direction, the θ-axis gear 305 maintains a state where it is meshed with the gear teeth of the cylindrical gear 302. That is, when the θ-axis housing 190 rotates, the nozzle holder 303 and the suction nozzle 304 rotate.
　係止片３０６は、ノズルホルダ３０３に設けられ、装着ヘッド４４に設けられるＺ軸駆動機構（図示せず）によって昇降駆動される。つまり、係止片３０６の昇降駆動により、吸着ノズル３０４が昇降する。 The locking piece 306 is provided on the nozzle holder 303 and is driven up and down by a Z-axis drive mechanism (not shown) provided on the mounting head 44. That is, the suction nozzle 304 is raised and lowered by the raising and lowering drive of the locking piece 306.
　バルブ操作片３０７は、ツール本体部３０１の内部に設けられるバルブ（図示せず）の切替操作を行う。バルブは、吸着ノズル３０４へ供給するエアを、装着ヘッド４４の第一エア接続路１１１ｆを介して供給される正圧エアと、装着ヘッド４４の第二エア接続路１１１ｇを介して供給される負圧エアとを何れかで切り替える。バルブ操作片３０７は、装着ヘッド４４に設けられるバルブ切替機構（図示せず）に係合することで動作する。つまり、装着ヘッド４４において、弁１９３（図６に示す）によって、第一エア接続路１１１ｆには常に正圧エアが供給され、第二エア接続路１１１ｇには常に負圧エアが供給される。 The valve operation piece 307 performs a switching operation of a valve (not shown) provided inside the tool main body 301. The valve supplies air to the suction nozzle 304 with positive pressure air supplied via the first air connection path 111 f of the mounting head 44 and negative air supplied via the second air connection path 111 g of the mounting head 44. Switch between pressure and air. The valve operation piece 307 operates by engaging with a valve switching mechanism (not shown) provided in the mounting head 44. That is, in the mounting head 44, positive pressure air is always supplied to the first air connection path 111f and negative pressure air is always supplied to the second air connection path 111g by the valve 193 (shown in FIG. 6).
　ノズルツール３００を適用する場合において、クランプ動作、アンクランプ動作、ノズルツール手動交換時の動作及びメンテナンス動作は、上記のノズルツール４５の場合と同様である。 When applying the nozzle tool 300, the clamping operation, the unclamping operation, the operation at the time of manual replacement of the nozzle tool, and the maintenance operation are the same as in the case of the nozzle tool 45 described above.
　ただし、吸着した部品の吸着及び離脱が異なる。クランプ状態において、制御部６が、Ｘ軸スライダ４３をＸ軸方向及びＹ軸方向に移動させて、吸着ノズル３０４を部品供給装置３における部品の位置に移動させる。この位置において、バルブ操作片３０７の操作によって、吸着ノズル３０４へ負圧エアが供給されることにより、部品が吸着ノズル３０４に吸着される。この場合、負圧エアは、第二エア接続路１１１ｇを通過して、第二エア被接続路（図示せず）に供給される。 However, adsorption and detachment of the adsorbed parts are different. In the clamped state, the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction, and moves the suction nozzle 304 to the position of the component in the component supply device 3. At this position, negative pressure air is supplied to the suction nozzle 304 by operating the valve operating piece 307, so that the component is sucked to the suction nozzle 304. In this case, the negative pressure air passes through the second air connection path 111g and is supplied to the second air connected path (not shown).
　また、クランプ状態において、制御部６が、Ｘ軸スライダ４３をＸ軸方向及びＹ軸方向に移動させて、吸着ノズル３０４を回路基板Ｋの所定位置に移動させる。この位置において、バルブ操作片３０７の操作によって、吸着ノズル３０４への負圧エアの供給が遮断される。さらに、バルブ操作片３０７の操作によって、吸着ノズル３０４への正圧エアの供給が開始される。その結果、部品が吸着ノズル３０４から確実に離脱する。この場合、正圧エアは、第一エア接続路１１１ｆを通過して、第一エア被接続路（図示せず）に供給される。 In the clamped state, the control unit 6 moves the X-axis slider 43 in the X-axis direction and the Y-axis direction to move the suction nozzle 304 to a predetermined position on the circuit board K. At this position, the supply of negative pressure air to the suction nozzle 304 is blocked by the operation of the valve operating piece 307. Furthermore, supply of positive pressure air to the suction nozzle 304 is started by operating the valve operating piece 307. As a result, the component is reliably detached from the suction nozzle 304. In this case, the positive pressure air passes through the first air connection path 111f and is supplied to the first air connected path (not shown).
　（５．実施形態の効果）
　（Ａ）本実施形態の効果を以下に説明する。本実施形態の部品実装機１は、装着ヘッド４４と、装着ヘッド４４に着脱可能に設けられると共に吸着ノズル２４０，３０４を保持するノズルツール４５，３００とを備える。 (5. Effects of the embodiment)
(A) The effect of this embodiment will be described below. The component mounting machine 1 of this embodiment includes a mounting head 44 and nozzle tools 45 and 300 that are detachably provided on the mounting head 44 and hold suction nozzles 240 and 304.
　装着ヘッド４４は、回転可能な軸状部１１１を有するＲ軸ハウジング１１０と、Ｒ軸ハウジング１１０の軸状部１１１の端面の中央部に設けられるクランプ部材１５０とを備える。Ｒ軸ハウジング１１０の軸状部１１１は、軸状部１１１の端面においてクランプ部材１５０より外周側に開口し、エアを流通するエア接続路１１１ｆ，１１１ｇを備える。ノズルツール４５，３００は、装着ヘッド４４のクランプ部材１５０に係止される被クランプ部（爪部２１３に相当）と、エア接続路１１１ｆ，１１１ｇに接続され、エア接続路１１１ｆ，１１１ｇとの間でエアを流通するエア被接続路２１４とを備える。 The mounting head 44 includes an R-axis housing 110 having a rotatable shaft-shaped portion 111 and a clamp member 150 provided at the center of the end surface of the shaft-shaped portion 111 of the R-axis housing 110. The shaft-shaped portion 111 of the R-axis housing 110 includes air connection paths 111f and 111g that open to the outer peripheral side from the clamp member 150 at the end surface of the shaft-shaped portion 111 and circulate air. The nozzle tools 45 and 300 are connected to a clamped portion (corresponding to the claw portion 213) locked to the clamp member 150 of the mounting head 44 and the air connection paths 111f and 111g, and between the air connection paths 111f and 111g. And an air connected path 214 through which air is circulated.
　上記のとおり、装着ヘッド４４のクランプ部材１５０が、Ｒ軸ハウジング１１０の軸状部１１１の端面の中央部に設けられる。装着ヘッド４４のエア接続路１１１ｆ，１１１ｇが、軸状部１１１の端面においてクランプ部材１５０より径方向外方に開口する。従って、作業者がエア接続路１１１ｆ，１１１ｇの開口のメンテナンスを行う際に、クランプ部材１５０が邪魔にならない。そのため、メンテナンス性が非常に向上する。 As described above, the clamp member 150 of the mounting head 44 is provided at the center of the end surface of the shaft-shaped portion 111 of the R-axis housing 110. Air connection paths 111 f and 111 g of the mounting head 44 open outward in the radial direction from the clamp member 150 at the end face of the shaft-shaped portion 111. Therefore, the clamp member 150 does not get in the way when the operator performs maintenance of the openings of the air connection paths 111f and 111g. Therefore, the maintainability is greatly improved.
　また、装着ヘッド４４は、エア接続路１１１ｆ，１１１ｇの開口部位に着脱可能に設けられるシール部材１７１，１７２を備える。シール部材１７１，１７２は、クランプ部材１５０より径方向外方に位置する。従って、作業者によるシール部材１７１，１７２の交換が、容易に行われる。 Also, the mounting head 44 includes seal members 171 and 172 that are detachably provided at the opening portions of the air connection paths 111f and 111g. The seal members 171 and 172 are located radially outward from the clamp member 150. Therefore, the replacement of the seal members 171 and 172 by the operator is easily performed.
　また、エア接続路１１１ｆ，１１１ｇは、Ｒ軸ハウジング１１０の軸状部１１１の内部の外周側に形成される。さらに、装着ヘッド４４は、Ｒ軸ハウジング１１０の軸状部１１１の外周面から着脱可能に設けられ、Ｒ軸ハウジング１１０の軸状部１１１の内部を流通するエア接続路１１１ｆに介在するエアフィルタ１６１を備える。従って、作業者は、エアフィルタ１６１の交換を非常に容易に行うことができる。 Further, the air connection paths 111f and 111g are formed on the outer peripheral side inside the shaft-shaped portion 111 of the R-axis housing 110. Further, the mounting head 44 is detachably provided from the outer peripheral surface of the shaft-shaped portion 111 of the R-axis housing 110, and the air filter 161 interposed in the air connection path 111f that circulates inside the shaft-shaped portion 111 of the R-axis housing 110. Is provided. Therefore, the operator can replace the air filter 161 very easily.
　また、Ｒ軸ハウジング１１０は、軸状部１１１の端面の中央部から突出形成され、内周面から外周面に亘って貫通する複数の窓部１１２ａが形成される筒部（小径筒部１１２に相当）と、軸状部１１１の内部の中央部に形成され、筒部（１１２）の内周側に連通するシリンダ１１１ｄとを備える。さらに、装着ヘッド４４は、Ｒ軸ハウジング１１０の筒部（１１２）の内周側及びシリンダ１１１ｄの内周側を相対移動可能に設けられるピストン１４１を備える。クランプ部材１５０は、複数の窓部１１２ａのそれぞれに設けられ、ピストン１４１の軸方向移動に伴ってピストン１４１の外周面に押圧されることにより小径筒部１１２の外周面から突出する。ノズルツール４５は、筒部（１１２）を収容する凹所２１１と、凹所２１１の開口縁に径方向内方に向かって突出形成され、クランプ部材１５０が筒部（１１２）の外周面から突出することに伴いノズルツール４５をＲ軸ハウジング１１０側へ引き込む爪部２１３とを備える。クランプ機構が上記のような構成を採用する場合、クランプ機構が軸状部１１１の中央部に配置することが、クランプの安定性に寄与する。そして、クランプ機構が軸状部１１１の中央部に設けられるため、軸状部１１１の端面においてクランプ部材１５０より外周側に開口するエア接続路１１１ｆ，１１１ｇが容易に形成できる。つまり、上記構成により、クランプの安定性が図られると共に、メンテナンス性が非常に向上する。 The R-axis housing 110 is formed so as to protrude from the central portion of the end surface of the shaft-shaped portion 111 and has a cylindrical portion (into the small-diameter cylindrical portion 112 formed with a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface. Equivalent) and a cylinder 111d formed at the center of the shaft-like portion 111 and communicating with the inner peripheral side of the cylindrical portion (112). Furthermore, the mounting head 44 includes a piston 141 provided so as to be relatively movable on the inner peripheral side of the cylindrical portion (112) of the R-axis housing 110 and the inner peripheral side of the cylinder 111d. The clamp member 150 is provided in each of the plurality of window portions 112a, and protrudes from the outer peripheral surface of the small diameter cylindrical portion 112 by being pressed against the outer peripheral surface of the piston 141 as the piston 141 moves in the axial direction. The nozzle tool 45 is formed with a recess 211 that accommodates the cylindrical portion (112) and an opening edge of the concave portion 211 so as to protrude radially inward, and the clamp member 150 protrudes from the outer peripheral surface of the cylindrical portion (112). Accordingly, a claw portion 213 for drawing the nozzle tool 45 toward the R-axis housing 110 is provided. When the clamp mechanism adopts the above-described configuration, the clamp mechanism disposed in the central portion of the shaft-shaped portion 111 contributes to the stability of the clamp. And since a clamp mechanism is provided in the center part of the shaft-shaped part 111, the air connection paths 111f and 111g opened to the outer peripheral side rather than the clamp member 150 in the end surface of the shaft-shaped part 111 can be formed easily. That is, with the above configuration, the stability of the clamp is achieved, and the maintainability is greatly improved.
　また、Ｒ軸ハウジング１１０は、筒部（１１２）の端面に設けられ、Ｒ軸ハウジング１１０の中心位置を検出する基準マーク１１４を備える。筒部（１１２）の端面は、ノズルツール４５のツール基準面２１２に接触させる部位ではない。ヘッド基準面１１１ａが筒部（１１２）より径方向外方に設けられるため、ツール基準面２１２と接触する面積は、十分確保されている。そこで、基準マーク１１４が設けられることが、クランプの安定性の低下の要因とはならない。また、筒部（１１２）の端面は、筒部（１１２）の中心から一定の距離だけ離れている。従って、基準マーク１１４による中心検出精度は、十分に確保できる。 The R-axis housing 110 includes a reference mark 114 that is provided on the end surface of the cylindrical portion (112) and detects the center position of the R-axis housing 110. The end surface of the cylindrical portion (112) is not a portion that is brought into contact with the tool reference surface 212 of the nozzle tool 45. Since the head reference surface 111a is provided radially outward from the cylindrical portion (112), an area in contact with the tool reference surface 212 is sufficiently secured. Therefore, the provision of the reference mark 114 does not cause a decrease in clamp stability. Moreover, the end surface of the cylinder part (112) is separated from the center of the cylinder part (112) by a certain distance. Therefore, the center detection accuracy by the reference mark 114 can be sufficiently ensured.
　また、Ｒ軸ハウジング１１０は、凸状又は凹状の位相基準部（位置基準ピン１８０に相当）を備え、ノズルツール４５は、位相基準部に対応する凹状又は凸状の位相被装着部（位置決め孔２１６に相当）を備える。これにより、装着ヘッド４４とノズルツール４５との相対位相が高精度に位置決めされる。なお、上記実施形態においては、位置基準ピン１８０が凸状とし、位置決め孔２１６が凹状としたが、凹凸を逆にしてもよい。 The R-axis housing 110 includes a convex or concave phase reference portion (corresponding to the position reference pin 180), and the nozzle tool 45 has a concave or convex phase mounted portion (positioning hole) corresponding to the phase reference portion. 216). As a result, the relative phase between the mounting head 44 and the nozzle tool 45 is positioned with high accuracy. In the above embodiment, the position reference pin 180 is convex and the positioning hole 216 is concave. However, the irregularities may be reversed.
　また、本実施形態のノズルツール４５，３００は、部品実装機１に用いられ、装着ヘッド４４に着脱可能に設けられると共に、吸着ノズル２４０，３０４を保持する。ノズルツール４５，３００は、装着ヘッド４４に対向する面の中央部に設けられ、装着ヘッド４４のクランプ部材１５０に係止される被クランプ部（２１３）と、装着ヘッド４４に対向する面において被クランプ部（２１３）より外周側に開口し、装着ヘッド４４のエア接続路１１１ｆ，１１１ｇに接続され、エア接続路１１１ｆ，１１１ｇとの間でエアを流通するエア被接続路２１４とを備える。この場合、メンテナンス性が非常に向上する。 Further, the nozzle tools 45 and 300 of the present embodiment are used in the component mounting machine 1 and are detachably provided on the mounting head 44 and hold the suction nozzles 240 and 304. The nozzle tools 45 and 300 are provided at the center of the surface facing the mounting head 44, and the clamped portion (213) locked to the clamp member 150 of the mounting head 44 and the surface to be mounted on the surface facing the mounting head 44 are covered. An air connection path 214 that opens to the outer peripheral side from the clamp portion (213), is connected to the air connection paths 111f and 111g of the mounting head 44, and circulates air between the air connection paths 111f and 111g. In this case, maintainability is greatly improved.
　（Ｂ）装着ヘッド４４は、回転可能な軸状部１１１を有するＲ軸ハウジング１１０と、Ｒ軸ハウジング１１０の軸状部１１１に移動可能に設けられるクランプ部材１５０であり、ノズルツール４５，３００を軸状部１１１に対して移動規制するクランプ状態（図２に示す状態）、及び、ノズルツール４５，３００を軸状部１１１から離脱することを許容する離脱許容状態（図８及び図９の状態、図１０の状態、並びに、図１１の状態）で切り替わるクランプ部材１５０と、クランプ部材１５０が離脱許容状態のときにノズルツール４５，３００に向けて軸状部１１１から正圧エアを排出し、ノズルツール４５，３００をＲ軸ハウジングの軸状部１１１から離脱させるエア排出路１１１ｋとを備える。
　これにより、クランプ部材１５０が離脱許容状態のときに、正圧エアにより、ノズルツール４５，３００が確実にＲ軸ハウジング１１０の軸状部１１１から離脱する。 (B) The mounting head 44 includes an R-axis housing 110 having a rotatable shaft-shaped portion 111 and a clamp member 150 that is movably provided on the shaft-shaped portion 111 of the R-axis housing 110. A clamp state (state shown in FIG. 2) that restricts movement with respect to the shaft-like portion 111 and a disengagement-permitted state that allows the nozzle tools 45 and 300 to be detached from the shaft-like portion 111 (states of FIGS. 10, and the state shown in FIG. 11), and the positive pressure air is discharged from the shaft-shaped portion 111 toward the nozzle tools 45 and 300 when the clamp member 150 is in a disengagement-permitted state. And an air discharge path 111k for detaching the nozzle tools 45 and 300 from the shaft-shaped portion 111 of the R-axis housing.
As a result, when the clamp member 150 is in the separation-permitted state, the nozzle tools 45 and 300 are reliably detached from the shaft-shaped portion 111 of the R-axis housing 110 by the positive pressure air.
　また、軸状部１１１は、端面の外周側に設けられるヘッド基準面１１１ａを備え、ノズルツール４５，３００は、ヘッド基準面１１１ａに当接するツール基準面２１２を備える。エア排出路１１１ｋが排出した正圧エアは、軸状部１１１の端面の中央部から排出し、ヘッド基準面１１１ａとツール基準面２１２との隙間を通過して径方向外方へ流出する。ヘッド基準面１１１ａとツール基準面２１２との隙間を正圧エアが通過することで、両面に異物の付着を防止できると共に、付着した異物を除去できる。 Further, the shaft portion 111 includes a head reference surface 111a provided on the outer peripheral side of the end surface, and the nozzle tools 45 and 300 include a tool reference surface 212 that comes into contact with the head reference surface 111a. The positive pressure air discharged from the air discharge path 111k is discharged from the central portion of the end surface of the shaft-shaped portion 111, passes through the gap between the head reference surface 111a and the tool reference surface 212, and flows out radially outward. By allowing positive pressure air to pass through the gap between the head reference surface 111a and the tool reference surface 212, it is possible to prevent foreign matter from adhering to both surfaces and remove the attached foreign matter.
　また、軸状部１１１は、シリンダ１１１ｄを備え、装着ヘッド４４は、シリンダ１１１ｄの内周側を相対移動可能に設けられ、クランプ部材１５０を軸状部１１１に対して移動させるピストン１４１を備える。エア排出路１１１ｋは、軸状部１１１におけるピストン１４１の軸方向の移動範囲に開口する。ピストン１４１は、クランプ部材１５０をクランプ状態にするときにエア排出路１１１ｋの開口部を閉塞し、クランプ部材を離脱許容状態にするときにエア排出路１１１ｋの開口部を開放する。ノズルツール４５，３００が軸状部１１１から離脱されるときは、クランプ部材１５０が離脱許容状態のときである。そこで、上記構成により、離脱許容状態のときに、エア排出路１１１ｋからエアが排出されるようにできる。また、ピストン１４１をエア排出路１１１ｋのバルブとして兼用することで、構造の簡易化及び部品点数の削減が図られる。 Further, the shaft-shaped portion 111 includes a cylinder 111d, and the mounting head 44 includes a piston 141 that is provided so as to be relatively movable on the inner peripheral side of the cylinder 111d and moves the clamp member 150 relative to the shaft-shaped portion 111. The air discharge path 111k opens in the axial movement range of the piston 141 in the shaft-like portion 111. The piston 141 closes the opening of the air discharge path 111k when the clamp member 150 is put into a clamped state, and opens the opening of the air discharge path 111k when the clamp member is put into a release-permitted state. The nozzle tools 45 and 300 are detached from the shaft-shaped portion 111 when the clamp member 150 is in the separation-permitted state. Thus, with the above-described configuration, air can be discharged from the air discharge path 111k when in the separation-permitted state. In addition, by using the piston 141 as a valve for the air discharge path 111k, the structure can be simplified and the number of parts can be reduced.
　また、部品実装機１は、エア排出路１１１ｋの流量に基づいてピストン１４１の位置を判定するピストン位置判定部（制御部６に相当）を備える。流量がゼロに近い値のときには、ピストン１４１が下方に移動している状態になる。一方、流量が大きな値のときには、ピストン１４１が上方に移動している状態になる。つまり、エア排出路１１１ｋの流量を用いることにより、ピストン１４１の位置が正確に把握される。 Further, the component mounting machine 1 includes a piston position determination unit (corresponding to the control unit 6) that determines the position of the piston 141 based on the flow rate of the air discharge path 111k. When the flow rate is close to zero, the piston 141 is moving downward. On the other hand, when the flow rate is a large value, the piston 141 is moving upward. That is, the position of the piston 141 is accurately grasped by using the flow rate of the air discharge path 111k.
　また、軸状部１１１は、軸状部１１１の内部の中央部に形成されるシリンダ１１１ｄを備え、装着ヘッド４４は、軸状部１１１の中央部にシリンダ１１１ｄの内周側を相対移動可能に設けられ、クランプ部材１５０を軸状部１１１に対して移動させるピストン１４１を備える。エア排出路１１１ｋは、軸状部１１１におけるピストン１４１の軸方向の移動範囲に開口する。エア排出路１１１ｋが供給した正圧エアは、軸状部１１１の端面の中央部に設けられる開口から、ヘッド基準面１１１ａとツール基準面２１２との隙間を通過して径方向外方へ流出する。つまり、中央のシリンダ１１１ｄを利用することで、正圧エアが中央部から供給される。 Further, the shaft-shaped portion 111 includes a cylinder 111d formed at a central portion inside the shaft-shaped portion 111, and the mounting head 44 can move relative to the inner peripheral side of the cylinder 111d at the central portion of the shaft-shaped portion 111. Provided is a piston 141 that moves the clamp member 150 relative to the shaft-like portion 111. The air discharge path 111k opens in the axial movement range of the piston 141 in the shaft-like portion 111. The positive pressure air supplied by the air discharge path 111k flows from the opening provided at the center of the end surface of the shaft-shaped portion 111 through the gap between the head reference surface 111a and the tool reference surface 212 to the outside in the radial direction. . That is, positive pressure air is supplied from the central portion by using the central cylinder 111d.
　また、Ｒ軸ハウジング１１０は、軸状部１１１の端面の中央部から突出形成され、内周面から外周面に亘って貫通する複数の窓部１１２ａが形成される筒部（１１２）と、軸状部１１１の内部の中央部に形成され、筒部（１１２）の内周側に連通するシリンダ１１ｄとを備える。装着ヘッド４４は、Ｒ軸ハウジング１１０の筒部（１１２）の内周側及びシリンダ１１１ｄの内周側を相対移動可能に設けられるピストン１４１を備える。クランプ部材１５０は、複数の窓部１１２ａのそれぞれに設けられ、ピストン１４１の軸方向移動に伴ってピストン１４１の外周面に押圧されることにより筒部（１１２）の外周面から突出する。ノズルツール４５，３００は、筒部（１１２）を収容する凹所２１１と、凹所２１１の開口縁に径方向内方に向かって突出形成され、クランプ部材１５０が筒部（１１２）の外周面から突出することに伴いノズルツール４５，３００をＲ軸ハウジング１１０側へ引き込む爪部２１３とを備える。 Further, the R-axis housing 110 is formed so as to protrude from the center of the end surface of the shaft-shaped portion 111, and has a cylindrical portion (112) in which a plurality of window portions 112a penetrating from the inner peripheral surface to the outer peripheral surface are formed, and the shaft And a cylinder 11d that is formed in the central portion inside the cylindrical portion 111 and communicates with the inner peripheral side of the cylindrical portion (112). The mounting head 44 includes a piston 141 provided so as to be relatively movable on the inner peripheral side of the cylindrical portion (112) of the R-axis housing 110 and the inner peripheral side of the cylinder 111d. The clamp member 150 is provided in each of the plurality of window portions 112a and protrudes from the outer peripheral surface of the cylindrical portion (112) by being pressed against the outer peripheral surface of the piston 141 as the piston 141 moves in the axial direction. The nozzle tools 45 and 300 are formed with a recess 211 that accommodates the cylindrical portion (112), and an opening edge of the concave portion 211 that protrudes radially inward, and the clamp member 150 is an outer peripheral surface of the cylindrical portion (112). And a claw portion 213 that draws the nozzle tools 45 and 300 toward the R-axis housing 110 in association with the protrusion.
　さらに、クランプ部材１５０は、クランプ位置にて移動規制されるクランプ状態（図２の状態）、離脱許容状態としてクランプ位置に位置し且つクランプ位置からアンクランプ位置への移動が許容されるアンクランプ許容状態（図１１の状態）、及び、アンクランプ位置に位置するアンクランプ状態（図８及び図９の状態）で切り替わる。エア排出路１１１ｋは、クランプ部材１５０がアンクランプ許容状態のときにノズルツール４５，３００に向けて正圧エアを排出する。この構成により、クランプ部材１５０がアンクランプ許容状態のときに、確実に、ノズルツール４５，３００が正圧エアにより軸状部１１１から離脱される。 Furthermore, the clamp member 150 is positioned at the clamp position as a clamp state in which the movement is restricted at the clamp position (the state shown in FIG. 2) and a disengagement allowable state, and is allowed to move from the clamp position to the unclamp position. The state is switched between the state (the state shown in FIG. 11) and the unclamped state (the state shown in FIGS. 8 and 9) located at the unclamping position. The air discharge path 111k discharges positive pressure air toward the nozzle tools 45 and 300 when the clamp member 150 is in an unclamping allowable state. With this configuration, when the clamp member 150 is in the unclamping allowable state, the nozzle tools 45 and 300 are reliably detached from the shaft-shaped portion 111 by the positive pressure air.
　（Ｃ）装着ヘッド４４は、Ｒ軸ハウジング１１０と、Ｒ軸ハウジング１１０に移動可能に設けられるクランプ部材１５０を備える。クランプ部材１５０は、ノズルツール４５，３００をＲ軸ハウジング１１０に対して移動規制するクランプ状態、及び、ノズルツール４５，３００をＲ軸ハウジング１１０から離脱することを許容すると共にノズルツール４５，３００がクランプ状態から下方へ移動する際にノズルツール４５，３００に係止されないアンクランプ状態で切り替わる。 (C) The mounting head 44 includes an R-axis housing 110 and a clamp member 150 movably provided on the R-axis housing 110. The clamp member 150 allows the nozzle tools 45 and 300 to move with respect to the R-axis housing 110, and allows the nozzle tools 45 and 300 to be detached from the R-axis housing 110. When moving downward from the clamped state, it is switched in an unclamped state where the nozzle tools 45 and 300 are not locked.
　Ｒ軸ハウジング１１０は、クランプ部材１５０がクランプ状態からアンクランプ状態に移行したときに、ノズルツール４５，３００が下方へ移動する際にノズルツール４５，３００を係止する係止部１１３を備える。従って、クランプ部材１５０がノズルツール４５，３００を引っ掛けることができない場合において、クランプ部材１５０とは異なる係止部１１３を用いて、ノズルツール４５，３００が装着ヘッド４４から脱落することを防止できる。 The R-axis housing 110 includes a locking portion 113 that locks the nozzle tool 45, 300 when the nozzle tool 45, 300 moves downward when the clamp member 150 shifts from the clamped state to the unclamped state. Therefore, when the clamp member 150 cannot hook the nozzle tools 45 and 300, it is possible to prevent the nozzle tools 45 and 300 from falling off the mounting head 44 by using the locking portion 113 different from the clamp member 150.
　また、Ｒ軸ハウジング１１０は、筒部（１１２）を備える。クランプ部材１５０は、クランプ状態において筒部（１１２）の外周面から径方向外方に突出するクランプ位置に位置し、アンクランプ状態において筒部（１１２）の外周面より径方向内方のアンクランプ位置に位置する。ノズルツール４５，３００、筒部（１１２）を収容する凹所２１１と、凹所２１１の開口縁に径方向内方に向かって突出形成され、クランプ部材１５０がクランプ位置に位置するときにノズルツール４５，３００をＲ軸ハウジング１１０に当接させる環状の爪部２１３とを備える。係止部１１３は、筒部（１１２）の外周面から径方向外方に突出し、且つ、爪部２１３に係止する。 Moreover, the R-axis housing 110 includes a cylindrical portion (112). The clamp member 150 is located at a clamp position protruding radially outward from the outer peripheral surface of the cylindrical portion (112) in the clamped state, and is unclamped radially inward from the outer peripheral surface of the cylindrical portion (112) in the unclamped state. Located in position. Nozzle tools 45 and 300, a recess 211 that accommodates the cylindrical portion (112), and an opening edge of the recess 211 that protrudes radially inward, and when the clamp member 150 is located at the clamp position, the nozzle tool And an annular claw portion 213 for bringing 45 and 300 into contact with the R-axis housing 110. The locking portion 113 protrudes radially outward from the outer peripheral surface of the cylindrical portion (112) and is locked to the claw portion 213.
　つまり、爪部２１３は、クランプ部材１５０に係止する部位として用いられることに加えて、係止部１１３に係止する部位としても用いられる。このように、爪部２１３が、クランプ機能及び脱落防止機能の兼用で用いられる。従って、構造が非常に容易にできる。 That is, the claw portion 213 is used as a portion to be locked to the locking portion 113 in addition to being used as a portion to be locked to the clamp member 150. Thus, the claw part 213 is used for both the clamp function and the drop-off prevention function. Therefore, the structure can be made very easy.
　また、係止部１１３は、クランプ部材１５０とは異なる位相に形成される。さらに、爪部２１３において、クランプ部材１５０に当接する位相と係止部１１３に係止される位相とは異なる。これにより、筒部（１１２）において、窓部１１２ａの形成位置と係止部１１３の形成位置とが、異なる位相となる。従って、筒部（１１２）の軸方向長さが短くできる。 Further, the locking portion 113 is formed in a phase different from that of the clamp member 150. Further, in the claw portion 213, the phase contacting the clamp member 150 and the phase locked by the locking portion 113 are different. Thereby, in the cylinder part (112), the formation position of the window part 112a and the formation position of the latching | locking part 113 become a different phase. Accordingly, the axial length of the cylindrical portion (112) can be shortened.
　また、爪部２１３は、内周縁に係止部１１３を通過可能な切欠２１３ａを備える。係止部１１３は、爪部２１３の切欠２１３ａ以外の部位に係止し、クランプ部材１５０は、クランプ状態において爪部２１３の切欠２１３ａ以外の部位に当接する。これにより、係止部１１３の突出量及びクランプ位置に位置するクランプ部材１５０の突出量が少なくても、確実に、係止部１１３による係止、及び、クランプ部材１５０による係止が実現できる。 Further, the claw portion 213 includes a notch 213a that can pass through the locking portion 113 on the inner peripheral edge. The locking part 113 is locked to a part other than the notch 213a of the claw part 213, and the clamp member 150 contacts the part other than the notch 213a of the claw part 213 in the clamped state. Thereby, even if there is little protrusion amount of the latching | locking part 113, and the projection amount of the clamp member 150 located in a clamp position, the latching by the latching | locking part 113 and the latching by the clamp member 150 are reliably realizable.
　また、本実施形態のノズルツール４５，３００は、部品実装機１に用いられ、装着ヘッド４４に着脱可能に設けられると共に、吸着ノズル２４０，３０４を保持する。ここで、ノズルツール４５，３００が装着ヘッド４４のクランプ部材１５０との係止によって装着ヘッド４４に対して移動規制される状態がクランプ状態とし、且つ、ノズルツール４５，３００が装着ヘッド４４から離脱することを許容されると共にノズルツール４５，３００がクランプ部材１５０に係止されない状態がアンクランプ状態とする。 Further, the nozzle tools 45 and 300 of the present embodiment are used in the component mounting machine 1 and are detachably provided on the mounting head 44 and hold the suction nozzles 240 and 304. Here, the state in which the movement of the nozzle tools 45 and 300 with respect to the mounting head 44 by the engagement of the mounting head 44 with the clamp member 150 is clamped, and the nozzle tools 45 and 300 are detached from the mounting head 44. The state in which the nozzle tools 45 and 300 are not locked to the clamp member 150 is allowed to be performed, and this is the unclamped state.
　ノズルツール４５，３００は、クランプ状態においてクランプ部材１５０に係止され、且つ、アンクランプ状態においてクランプ部材１５０に係止されない被クランプ部（２１３）と、クランプ部材１５０がクランプ状態からアンクランプ状態に移行したときに、ノズルツール４５，３００が下方へ移動する際に装着ヘッド４４の係止部１１３に係止される被係止部（２１３）とを備える。 The nozzle tools 45 and 300 are locked to the clamp member 150 in the clamped state and are not locked to the clamp member 150 in the unclamped state, and the clamp member 150 is changed from the clamped state to the unclamped state. When the nozzle tools 45 and 300 are moved downward, a locked portion (213) that is locked to the locking portion 113 of the mounting head 44 is provided.
　クランプ部材１５０がノズルツール４５，３００を引っ掛けることができない場合において、クランプ部材１５０とは異なる係止部１１３を用いて、ノズルツール４５，３００が装着ヘッド４４から脱落することを防止できる。 When the clamp member 150 cannot catch the nozzle tool 45, 300, the nozzle tool 45, 300 can be prevented from falling off the mounting head 44 by using the engaging portion 113 different from the clamp member 150.
　また、クランプ部材１５０は、クランプ状態において装着ヘッド４４の筒部（小径筒部１１２に相当）の外周面から径方向外方に突出するクランプ位置に位置し、アンクランプ状態において筒部（１１２）の外周面より径方向内方のアンクランプ位置に位置する。ノズルツール４５，３００は、筒部（１１２）を収容する凹所２１１と、凹所２１１の開口縁に径方向内方に向かって突出形成され、クランプ部材１５０がクランプ位置に位置するときにノズルツール４５，３００をＲ軸ハウジング１１０に当接させる環状の爪部２１３とを備える。被クランプ部（２１３）及び被係止部（２１３）は、爪部２１３である。 The clamp member 150 is located at a clamp position that protrudes radially outward from the outer peripheral surface of the cylindrical portion (corresponding to the small-diameter cylindrical portion 112) of the mounting head 44 in the clamped state, and the cylindrical portion (112) in the unclamped state. It is located at an unclamping position radially inward from the outer peripheral surface of the. The nozzle tools 45 and 300 are formed so as to project inward in the radial direction at the opening edge of the recess 211 for accommodating the cylindrical portion (112) and the recess 211, and when the clamp member 150 is positioned at the clamp position And an annular claw portion 213 for bringing the tools 45 and 300 into contact with the R-axis housing 110. The clamped portion (213) and the locked portion (213) are claw portions 213.
　つまり、爪部２１３は、クランプ部材１５０に係止する被クランプ部として用いられることに加えて、係止部１１３に係止する被係止部としても用いられる。このように、爪部２１３が、クランプ機能及び脱落防止機能の兼用で用いられる。従って、構造が非常に容易にできる。 That is, the claw portion 213 is used as a locked portion that is locked to the locking portion 113 in addition to being used as a clamped portion that is locked to the clamp member 150. Thus, the claw part 213 is used for both the clamp function and the drop-off prevention function. Therefore, the structure can be made very easy.
１：部品実装機、　２：基板搬送装置、　３：部品供給装置、　４：部品移載装置、　５：部品カメラ、　６：制御部、　９：基台、　４３：Ｘ軸スライダ（移動台）、　４４：装着ヘッド、　４５：ノズルツール、　１１０：Ｒ軸ハウジング、　１１１：軸状部、　１１１ａ：ヘッド基準面、　１１１ｂ：逃がし凹溝、　１１１ｃ：上孔、　１１１ｄ：シリンダ、　１１１ｅ：下孔、　１１１ｆ：第一エア接続路、　１１１ｇ：第二エア接続路、　１１１ｈ：フィルタ装着孔、　１１１ｉ：第一室流路、　１１１ｊ：第二室流路、　１１１ｋ：エア排出路、　１１２：小径筒部、　１１２ａ：窓部、　１１３：係止部、　１１４：基準マーク、　１４１：ピストン、　１５０：クランプ部材、　１６１：エアフィルタ、　１７１，１７２：シール部材、　１８０：位置基準ピン（位相基準部）、　１９４：流量計、　２１０：ツール本体部、　２１１：凹所、　２１２：ツール基準面、　２１３：爪部（被クランプ部、被係止部）、　２１３ａ：切欠、　２１４：第一エア被接続路、　２１６：位置決め孔（位相被装着部）、　２４０：吸着ノズル、　３００：ノズルツール、　３０１：ツール本体部、　３０１ａ：凹所、　３０４：吸着ノズル、　Ｋ：回路基板 1: component mounting machine, 2: substrate transfer device, 3: component supply device, 4: component transfer device, 5: component camera, 6: control unit, 9: base, 43: X-axis slider (moving table), 44: Mounting head, 45: Nozzle tool, 110: R-axis housing, 111: Shaft-shaped portion, 111a: Head reference surface, 111b: Escape groove, 111c: Upper hole, 111d: Cylinder, 111e: Lower hole, 111f: First air connection path, 111g: second air connection path, 111h: filter mounting hole, 111i: first chamber flow path, 111j: second chamber flow path, 111k: air discharge path, 112: small diameter cylindrical portion, 112a: Window part, 113: Locking part, 114: Reference mark, 141: Piston, 150: Clamp member, 161: Air filter, 171, 172: 180: Position reference pin (phase reference part), 194: Flow meter, 210: Tool body part, 211: Recess, 212: Tool reference surface, 213: Claw part (clamped part, locked part) ), 213a: notch, 214: first air connected path, 216: positioning hole (phase mounted portion), 240: suction nozzle, 300: nozzle tool, 301: tool main body, 301a: recess, 304: suction Nozzle, K: Circuit board

Claims (6)

  1. 　装着ヘッドと、前記装着ヘッドの下方に着脱可能に設けられると共に吸着ノズルを保持するノズルツールと、を備える部品実装機であって、
    　前記装着ヘッドは、
    　ハウジングと、
    　前記ハウジングに移動可能に設けられるクランプ部材であり、前記ノズルツールを前記ハウジングに対して移動規制するクランプ状態、及び、前記ノズルツールを前記ハウジングから離脱することを許容すると共に前記ノズルツールが前記クランプ状態から下方へ移動する際に前記ノズルツールに係止されないアンクランプ状態で切り替わる前記クランプ部材と、
    　を備え、
    　前記ハウジングは、前記クランプ部材が前記クランプ状態から前記アンクランプ状態に移行したときに、前記ノズルツールが下方へ移動する際に前記ノズルツールを係止する係止部を備える、部品実装機。     A mounting machine comprising: a mounting head; and a nozzle tool that is detachably provided below the mounting head and holds a suction nozzle,
    The mounting head is
    A housing;
    A clamp member movably provided in the housing, wherein the nozzle tool is restricted from moving relative to the housing; and the nozzle tool is allowed to be detached from the housing, and the nozzle tool is clamped The clamp member that switches in an unclamped state that is not locked to the nozzle tool when moving downward from the state; and
    With
    The housing includes a locking portion that locks the nozzle tool when the nozzle tool moves downward when the clamp member transitions from the clamped state to the unclamped state.
  2. 　前記ハウジングは、筒部を備え、
    　前記クランプ部材は、前記クランプ状態において前記筒部の外周面から径方向外方に突出するクランプ位置に位置し、前記アンクランプ状態において前記筒部の外周面より径方向内方のアンクランプ位置に位置し、
    　前記ノズルツールは、
    　前記筒部を収容する凹所と、
    　前記凹所の開口縁に径方向内方に向かって突出形成され、前記クランプ部材が前記クランプ位置に位置するときに前記ノズルツールを前記ハウジングに当接させる環状の爪部と、
    　を備え、
    　前記係止部は、前記筒部の外周面から径方向外方に突出し、且つ、前記爪部に係止する、請求項１に記載の部品実装機。     The housing includes a cylindrical portion,
    The clamp member is positioned at a clamp position that protrudes radially outward from the outer peripheral surface of the cylindrical portion in the clamped state, and is positioned at an unclamp position radially inward from the outer peripheral surface of the cylindrical portion in the unclamped state. Position to,
    The nozzle tool is
    A recess for accommodating the cylindrical portion;
    An annular claw portion that is formed to project radially inward from the opening edge of the recess, and causes the nozzle tool to contact the housing when the clamp member is located at the clamp position;
    With
    The component mounting machine according to claim 1, wherein the locking portion protrudes radially outward from an outer peripheral surface of the cylindrical portion and is locked to the claw portion.
  3. 　前記係止部は、前記クランプ部材とは異なる位相に形成され、
    　前記爪部において、前記クランプ部材に当接する位相と前記係止部に係止される位相とは異なる、請求項２に記載の部品実装機。     The locking portion is formed in a phase different from that of the clamp member,
    The component mounting machine according to claim 2, wherein in the claw portion, a phase in contact with the clamp member is different from a phase locked in the locking portion.
  4. 　前記爪部は、内周縁に前記係止部を通過可能な切欠を備え、
    　前記係止部は、前記爪部の前記切欠以外の部位に係止し、
    　前記クランプ部材は、前記クランプ状態において前記爪部の前記切欠以外の部位に当接する、請求項２又は３に記載の部品実装機。     The claw portion includes a notch that can pass through the locking portion on an inner peripheral edge,
    The locking portion is locked to a portion other than the notch of the claw portion,
    The component mounting machine according to claim 2, wherein the clamp member is in contact with a portion other than the notch of the claw portion in the clamped state.
  5. 　部品実装機に用いられ、装着ヘッドに着脱可能に設けられると共に、吸着ノズルを保持するノズルツールであって、
    　前記ノズルツールが前記装着ヘッドのクランプ部材との係止によって前記装着ヘッドに対して移動規制される状態をクランプ状態とし、且つ、前記ノズルツールが前記装着ヘッドから離脱することを許容されると共に前記ノズルツールが前記クランプ部材に係止されない状態をアンクランプ状態とした場合に、
    　前記ノズルツールは、
    　前記クランプ状態において前記クランプ部材に係止され、且つ、前記アンクランプ状態において前記クランプ部材に係止されない被クランプ部と、
    　前記クランプ部材が前記クランプ状態から前記アンクランプ状態に移行したときに、前記ノズルツールが下方へ移動する際に前記装着ヘッドの係止部に係止される被係止部と、
    　を備える、ノズルツール。     A nozzle tool that is used in a component mounting machine, is detachably provided on a mounting head, and holds a suction nozzle,
    A state in which the nozzle tool is restricted from moving with respect to the mounting head by locking with the clamp member of the mounting head is set to a clamped state, and the nozzle tool is allowed to be detached from the mounting head and the When the state in which the nozzle tool is not locked to the clamp member is unclamped,
    The nozzle tool is
    A clamped portion that is locked to the clamp member in the clamped state and that is not locked to the clamp member in the unclamped state;
    When the clamp member moves from the clamped state to the unclamped state, a locked portion that is locked to the locking portion of the mounting head when the nozzle tool moves downward;
    A nozzle tool comprising:
  6. 　前記クランプ部材は、前記クランプ状態において前記装着ヘッドの筒部の外周面から径方向外方に突出するクランプ位置に位置し、前記アンクランプ状態において前記筒部の外周面より径方向内方のアンクランプ位置に位置し、
    　前記ノズルツールは、
    　前記筒部を収容する凹所と、
    　前記凹所の開口縁に径方向内方に向かって突出形成され、前記クランプ部材が前記クランプ位置に位置するときに前記ノズルツールを前記ハウジングに当接させる環状の爪部と、
    　を備え、
    　前記被クランプ部及び前記被係止部は、前記爪部である、請求項５に記載のノズルツール。     The clamp member is located at a clamp position that protrudes radially outward from the outer peripheral surface of the cylindrical portion of the mounting head in the clamped state, and unclamped radially inward from the outer peripheral surface of the cylindrical portion in the unclamped state. Located in the clamping position,
    The nozzle tool is
    A recess for accommodating the cylindrical portion;
    An annular claw portion that is formed to project radially inward from the opening edge of the recess, and causes the nozzle tool to contact the housing when the clamp member is located at the clamp position;
    With
    The nozzle tool according to claim 5, wherein the clamped portion and the locked portion are the claw portions.
PCT/JP2014/079070 2014-10-31 2014-10-31 Component-mounting machine and nozzle tool used therefor WO2016067452A1 (en)

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