WO2016067423A1

WO2016067423A1 - Image measurement device, structure manufacturing method, image measurement method, and image measurement program

Info

Publication number: WO2016067423A1
Application number: PCT/JP2014/078967
Authority: WO
Inventors: 伸吾門元
Original assignee: 株式会社ニコン
Priority date: 2014-10-30
Filing date: 2014-10-30
Publication date: 2016-05-06

Abstract

An image measurement device of the present invention measures the shape of an object to be measured on the basis of an image obtained by performing image pickup of the object to be measured. The image measurement device has a storage control unit that stores an image corresponding to at least one among a plurality of teaching procedures for producing a procedure for measuring the object to be measured.

Description

Image measuring apparatus, structure manufacturing method, image measuring method, and image measuring program

The present invention relates to an image measurement device, a structure manufacturing method, an image measurement method, and an image measurement program.

2. Description of the Related Art Conventionally, an image measuring apparatus that measures the shape of a measurement object using a captured image obtained by imaging the measurement object is known (see Patent Document 1). In the image measuring device described in Patent Document 1, the shape of the object to be measured is measured according to the procedure generated by the teaching process.

Japanese Patent No. 3887807

It is hoped that the measurement procedure generated by teaching can be understood as follows.

According to the first aspect of the present invention, an image measuring apparatus that measures the shape of a measurement object based on an image obtained by imaging the measurement object, and creates a procedure for measuring the measurement object. And a storage control unit for storing an image corresponding to at least one teaching procedure among the plurality of teaching procedures.
According to the second aspect of the present invention, the design information related to the shape of the structure is created, the structure is created based on the design information, and the shape of the created structure is converted into the image measuring apparatus according to the first aspect. The shape information is obtained by measurement using the obtained information, and the obtained shape information is compared with the design information.
According to the third aspect of the present invention, an image measurement method for measuring the shape of a measurement object based on an image obtained by imaging the measurement object, and creating a procedure for measuring the measurement object An image corresponding to at least one teaching procedure among a plurality of teaching procedures is stored.
According to a fourth aspect of the present invention, there is provided an image measurement program for use in an image measurement apparatus for measuring a shape of a measurement object based on an image obtained by imaging the measurement object, and imaging the measurement object. The computer executes a storage control process for storing an image corresponding to at least one teaching procedure among a plurality of teaching procedures for creating the procedure to be performed.

According to the present invention, it is possible to easily grasp the measurement contents along the measurement procedure.

The figure which shows the whole structure of the image measuring device by 1st Embodiment. Diagram showing the functional configuration of the control device The figure which shows an example of the display display at the time of teaching processing Figure showing an example of teaching procedure list Flow chart explaining the teaching process The figure which shows an example of the display display at the time of a display process Flowchart explaining display processing Flow chart explaining teaching procedure change processing The block diagram which shows the structure of the structure manufacturing system by 2nd Embodiment. The flowchart explaining operation | movement of the structure manufacturing system by 2nd Embodiment. Diagram showing how the program is offered

-First embodiment-
An image measurement apparatus according to a first embodiment of the present invention will be described with reference to the drawings. An image measurement apparatus is an apparatus that measures the shape of a measurement object using a captured image obtained by imaging a measurement object (for example, a mechanical part, a semiconductor chip, a liquid crystal display panel, a biological / biological sample, etc.) is there.
The embodiments are specifically described for understanding the gist of the invention, and do not limit the invention unless otherwise specified.

FIG. 1 is a diagram illustrating an example of the overall configuration of an image measurement apparatus 100 according to the present embodiment. The image measuring apparatus 100 includes an imaging unit 1, a light source unit 2, an interface unit 3, and a host computer 4. For convenience of explanation, a coordinate system consisting of the X axis, the Y axis, and the Z axis along the vertical direction is set for the imaging unit 1 as shown in the figure.
The imaging unit 1 includes a base 10, an XY stage 11, a support column 12, and an optical system unit 13. The XY stage 11 is capable of two-dimensional movement on the base 10 on which the measurement object S that is an object to be measured is placed. Above the XY stage 11, an optical system unit 13 is fixed to a support column 12 provided integrally with the base 10.

The XY stage 11 includes a Y stage 11Y that can move in the Y-axis direction and an X stage 11X that can move in the X-axis direction on the Y stage 11Y. An object to be measured S is placed on the X stage 11X. The X stage 11X and the Y stage 11Y are driven by a drive system including a linear actuator (not shown). The positions of the X stage 11X and the Y stage 11Y are measured by a position detection device such as a laser interferometer or an encoder (not shown). An output signal of this position detection device is sent into the host computer 4 via the control unit 30. The drive system is controlled by a control unit 30 in the interface unit 3 described later.

The optical system unit 13 houses an imaging optical system 14 such as an objective lens that forms an image of the object S to be measured on the imaging surface, an imaging device 15, and an epi-illumination optical system 16. . In the imaging device 15, an imaging element such as a CCD or a CMOS is disposed on the imaging plane of the imaging optical system 14, and the imaging element is an image of the object S to be measured that is imaged on the imaging plane by the imaging optical system 14. And the imaging signal is output to the imaging control unit 31 in the interface unit 3 to be described later. The imaging device 15 is controlled in an imaging enabled state, an imaging stopped state, and the like by an imaging control unit 31 in the interface unit 3 described later based on a control signal from the host computer 4.
Note that the imaging device 15 for the object S to be measured is not limited to the above example, and an imaging tube may be used, or a one-dimensional image sensor (a so-called line sensor) for imaging a very large object S to be measured. ) Can also be used. In this case, the XY stage 11 is moved, and the object S and the line sensor are moved relative to each other, and the image of the object S to be measured is sequentially read one line at a time. Combine multiple images. In the present embodiment, for example, a focus position detection device that detects the height position of the measurement object S may be provided. In this case, a captured image of the measurement object S may be captured using the detection result of the height position of the measurement object S.
In the present embodiment, the optical system is arranged in the + Z direction with respect to the object S to be measured, but the arrangement location is not limited to this, and the optical system may be provided in the −Z direction.
In the present embodiment, the object to be measured S is placed on a stage that can move in the directions orthogonal to each other in the X direction and the Y direction, but the directions of movement are orthogonal, that is, 90 °. It is not limited, and may be 80 °, 70 °, 60 °, 50 °, 40 °, 30 °, 20 °, 10 °, 5 °. Further, the stage on which the object to be measured S can be moved is not limited to the biaxial direction, and may be movable in the three axial directions of the X, Y, and Z directions. A stage that rotates in the θX direction around the X direction may be used. Of course, the stage is not limited to the X direction, and a stage that rotates about the Y direction and the Z direction may be used. In the present embodiment, the XY stage on which the object to be measured S is placed is driven to move the object to be measured S and the optical system unit 13 relative to each other. However, the optical system unit 13 is driven to move the stage. The object S to be measured and the optical system unit 13 may be moved relative to each other.

In the imaging unit 1, a transmission illumination optical system 17 is provided inside the base 10. The object S to be measured is illuminated with epi-illumination from above via epi-illumination optical system 16 by light from a light source (not shown) in light source unit 2 to be described later, or through trans-illumination optical system 17. Then, it is illuminated with transmitted illumination from below. Then, an image of the object S to be measured is formed on the image forming surface by the image forming optical system 14 in the optical system unit 13.
In addition to the epi-illumination optical system 16, an illumination light source that irradiates the measurement object S with illumination light may be provided. In this case, a plurality of illumination light sources may be provided. In this case, a plurality of illumination light sources may be provided in a ring shape. When a plurality of illumination light sources are provided, illumination light from all illumination light sources may be emitted toward the measurement object S, or only illumination light from some of the illumination light sources may be emitted. .

The light source unit 2 outputs incident or transmitted illumination light to the imaging unit 1 through an optical fiber or the like. The light source unit 2 includes a light control device that includes a light source and can adjust the amount of light, and an optical system that guides light from the light control device to an optical fiber. The selection of epi-illumination and transmission illumination and the adjustment of the amount of light of these lights are controlled by the control unit 30 in the interface unit 3 described later.

The interface unit 3 includes a control unit 30 and an imaging control unit 31. The control unit 30 includes a microprocessor and its firmware. The control unit 30 receives a control signal from the host computer 4, controls the linear actuator of the XY stage 11 to move the XY stage 11, selects epi-illumination and transmitted illumination, and outputs from the light source unit 2. Control the amount of light. The imaging control unit 31 controls the imaging device 15 to be in an imaging enabled state or an imaging stopped state based on a control signal from the host computer 4 or performs A / D conversion on the imaging signal from the imaging device 15 to generate an image. Or output to the host computer 4 as data.

The host computer 4 is configured using a personal computer that operates with a predetermined operating system that can be operated with a pointing device such as a mouse. The host computer 4 has a configuration in which a keyboard 41 and a mouse 42 as input devices and a display 43 as a display unit are connected to a computer main body 40.

The computer main body 40 includes a control device 44 including a microprocessor, a memory 45, a keyboard interface (keyboard controller) 46 for connecting a keyboard 41 and a mouse 42, and a video interface 47 for connecting a display 43. A serial interface 48, a hard disk 49, and an image input board 50.

The control device 44 controls the entire image measuring device 100 and measures the shape of the device under test S using a captured image obtained by imaging the device under test S with the imaging device 15. Specifically, the control device 44 sends a control signal to the control unit 30 of the interface unit 3 via the serial interface 48 by loading the control program stored in the hard disk 49 into the memory 45 and starting the program. Control of the linear actuator of the XY stage 11, magnification control of the imaging optical system 14, light amount control, and the like are performed. Further, the control device 44 performs imaging control of the imaging device 15 via the image input board 50 and the imaging control unit 31, and is obtained by A / D converting the imaging signal from the imaging device 15 by the imaging control unit 31. The captured image data is transferred to the memory 45 and stored. The hard disk 49 stores various programs for performing various measurement processes on the captured image data of the measurement object S such as edge detection and pitch measurement. The control device 44 performs various measurement processes by loading these programs into the memory 45 and starting the programs.

The control device 44 sends a control command to the video interface 47 and transfers the captured image data in the memory 45 and information on the result of the measurement process to the display 43 via the video interface 47 to capture the captured image of the object S to be measured. And the result of the measurement process is displayed on the display 43. The control device 44 performs teaching (teaching) for determining a procedure for measuring the workpiece S in advance. In this specification, a procedure determined by teaching is called a teaching procedure. Information of a series of a plurality of teaching procedures determined by teaching is stored in the memory 45 as a teaching procedure program. The control device 44 executes measurement processing according to a series of teaching procedures stored in the memory 45. In the image measuring apparatus 100, by performing teaching in advance, it is possible to automatically execute a measurement process on the object S having the same shape in accordance with the teaching procedure. Therefore, a large number of objects S having the same shape can be obtained. Useful when measuring.

In the present embodiment, as a method of measuring the measurement object S, there is an edge detection process using captured image data of the measurement object S. The edge detection process is a process for detecting the edge of the measurement object S, such as an edge, from the captured image data. Based on the result of the edge detection process, a plurality of points on the contour of the measurement object S are extracted, and various measurement processes such as measurement of the length of a predetermined part and area measurement are performed. The setting of the edge detection parameter used for the edge detection processing is performed at the time of teaching processing described later. The edge detection parameters include a measurement area (caliper) that is an area for detecting the edge, a threshold value for detecting the edge (hereinafter referred to as edge detection threshold), and a detection direction with respect to the edge (hereinafter referred to as edge). Detection direction) is set. In the edge detection process, the luminance information is extracted from the data in the measurement region in the captured image data, and the edge of the measurement object S is detected by analyzing the luminance information. In addition, when the to-be-measured object S has a several level | step difference structure, an edge part exists between the level | step difference in which each height direction differs. That is, in this case, the device under test S has a plurality of end portions. A boundary line is formed by connecting the end portions between the different steps. Accordingly, in this case, the object to be measured S has a plurality of boundary portions between the different steps. In addition, although the part from which a height direction differs was made into the edge part, an edge part may exist in the surface of the same height direction. In this case, the components of the DUT S are different. Moreover, it does not matter as the end portion based on the difference in the surface structure within the same height direction.

FIG. 2 is a diagram illustrating a functional configuration of the control device 44 according to the present embodiment. The control device 44 functionally includes a teaching processing device 60 and a measuring unit 61. As described above, the control device 44 also has a function of controlling each part of the image measurement device 100, but the configuration relating to this function is not shown in FIG. The teaching processing device 60 functionally includes a teaching procedure creation unit 410, an image display control unit 413, a storage control unit 414, a selection unit 415, and a teaching procedure change unit 416. The hard disk 49 (FIG. 1) stores an image processing program for realizing each function of the teaching processing device 60. Each function of the teaching processing device 60 is realized by the control device 44 loading the image processing program stored in the hard disk 49 into the memory 45 (FIG. 1) and executing it. The measurement unit 61 controls the imaging unit 1 and the light source unit 2 to measure the shape of the object to be measured S according to the result of teaching processing described later created by the image processing unit 60. The function of each unit will be described in detail later.

The teaching procedure creation unit 410 sets measurement conditions for measuring the measurement object S and images obtained by imaging the measurement object S in accordance with the operation of the input device such as the keyboard 41 and the mouse 42 by the operator. A measurement position and a measurement region for executing edge detection processing on the data are set, and a procedure for measuring the measurement object S is created as a teaching procedure. In this case, on the display screen of the display 43, a measurement condition setting menu using a task bar, a toolbar, a tool box, or the like, and the measurement object S based on the image data acquired by imaging the measurement object S with the imaging device 15 are displayed. An image is displayed. The operator operates the input device such as the keyboard 41 and the mouse 42, sets the measurement conditions from the setting menu, specifies the position on the image of the measurement object S displayed on the display screen of the display 43, and the measurement position. Set the measurement area. As described above, the measurement region is a region from which luminance information is extracted in order to perform edge detection processing from the image data captured and acquired by the imaging device 15 during measurement of the measurement object S.
Items that can be set as measurement conditions include magnification of the imaging optical system 14, selection of transmitted illumination / epi-illumination, adjustment of illumination light, measurement coordinate system (origin, axis, reference plane (height from the XY stage 11) )), Comments such as explanations of measurement contents.

The storage control unit 414 stores a series of teaching procedure data corresponding to a series of teaching procedures created by the teaching procedure creation unit 410 in the memory 45 as a teaching procedure program. The storage control unit 414 stores in the memory 45 the image data of the measurement object S that has a corresponding relationship with the teaching procedure data relating to the measurement position and measurement area setting of the measurement object S in association with the teaching procedure data.
Note that the present invention is not limited to storing image data obtained by imaging the device under test S with the imaging device 15 in association with teaching procedure data. For example, design information such as CAD data is associated with teaching procedure data. What is stored in the memory is also included in one embodiment of the present invention.

The selection unit 415 selects any teaching procedure data from the teaching procedure data constituting the series of teaching procedures created by the teaching procedure creation unit 410 and stored in the memory 45. The image display control unit 413 causes the display screen of the display 43 to display an image of the measurement object S that has a correspondence relationship with the teaching procedure data selected by the selection unit 415. In other words, the image display control unit 413 causes the display 43 to display the image of the measurement object S acquired during teaching. The teaching procedure change unit 416 changes the teaching procedure data created by the teaching procedure creation unit 410 in accordance with the operation of the operator, and creates new teaching procedure data.
Hereinafter, the teaching process, the display process, and the procedure change process will be described in detail.

-Teaching process-
During the teaching process, the operator continuously captures images by the imaging device 15 and observes the monitor image displayed on the display 43 while displaying the desired measurement position on the object S to be measured. The stage 11 is driven to adjust the position. The operator adjusts the measurement conditions such as the illumination conditions and the imaging magnification, and repeats the operation of setting the measurement position of the measurement object S on the monitor image. A teaching procedure as information indicating measurement conditions and measurement positions is created for each of the above operations, and a monitor image when the measurement position is set is associated with teaching procedure data as a teaching image and stored in the memory 45. Details will be described below.

FIG. 3 schematically shows an example of display on the display 43 during teaching processing. As shown in FIG. 3, during the teaching process, the image display control unit 413 displays a teaching procedure creation screen 431 on the display 43. The teaching procedure creation screen 431 has an image display area 432 and a measurement condition input area 433. The image display area 432 is a display area for displaying a monitor image monitored by the imaging device 15. The measurement condition input area 433 includes an operator's comments on the magnification, illumination selection, adjustment of illumination light quantity, measurement coordinate system, explanation of measurement contents, etc. as items that can be set as the measurement conditions described above. Is an input area for inputting by operating the keyboard 41 or the mouse 42. At the same time, it also serves as a display area for displaying the result input by the operator.

The operator inputs measurement conditions to each item in the measurement condition input area 433 by operating the keyboard 41 and the mouse 42 while viewing the monitor image displayed in the image display area 432. The operator selects desired setting contents from the setting contents menu displayed on the teaching procedure creation screen 431 with the mouse 42 or the like while viewing the monitor image displayed in the image display area 432. In the present embodiment, as the setting contents, a process for setting the measurement position in the above-described end detection process for detecting the position of the end of the boundary portion, contour, etc. of the measurement object S, the measurement object S Processing for setting a measurement coordinate system for measurement (origin setting, coordinate axis setting, reference plane setting, etc.) is included.
In the following description, a teaching procedure relating to setting of a measurement coordinate system for measuring the workpiece S is referred to as an alignment procedure. Further, the teaching procedure relating to the setting of the measurement position of the DUT S is called a measurement procedure. That is, the teaching procedure includes an alignment procedure and a measurement procedure.

--Alignment procedure--
The operator operates the mouse 42 to move a pointer or cursor in the monitor image displayed in the image display area 432 to set a desired measurement coordinate system, and on or near the object S to be measured. Click on the required position. The teaching procedure creation unit 410 is an alignment procedure that is a teaching procedure for teaching setting of an origin, a coordinate axis direction, a reference plane (a Z-direction position from the XY stage 11), etc. as a measurement coordinate system in accordance with an operation of an operator. Create
When actually measuring the object to be measured S, the image measuring apparatus 100 executes the alignment procedure, thereby associating the coordinate system (apparatus coordinate system) on the XY stage 11 with the measurement coordinate system of the object to be measured S. , So-called alignment is performed.

--Measurement procedure--
The operator adjusts the position, magnification ratio, illumination condition, etc. of the monitor image of the object S displayed in the image display area 432 and then operates the input device such as the mouse 42 to input the measurement position and the measurement content. To do. In this case, the measurement position of the measurement object S is set by moving the pointer or cursor to the position where measurement is desired on the measurement object S on the monitor image and performing a click operation or the like. When the measurement position is designated according to the click operation by the operator, the teaching procedure creation unit 410 converts the coordinate value in the image display area 432 clicked by the operator into the coordinate value of the measurement coordinate system, and the object to be measured The measurement position of S is calculated. The teaching procedure creation unit 410 reads design values and tolerances at the measurement position of the device under test S based on design information such as CAD of the device under test S.

The operator confirms the specified measurement position by clicking the enter button 434. When the determination button 434 is operated, the teaching procedure creation unit 410 causes the measurement condition input by the operator from the measurement condition input area 433 prior to the input of the measurement position, the edge detection condition, and the measurement object S described above. One measurement procedure including the measurement position, the comment, the design value / tolerance as information is created. By repeating the above processing, measurement procedures for the number of measurement positions desired by the operator are created. The measurement conditions include magnification of the imaging optical system 14, illumination selection, and adjustment of illumination light. The edge detection condition is a condition for detecting the edge of the measurement object S during the edge detection process. The condition for detecting the edge includes the edge detection threshold value and the edge detection direction of the edge detection parameter described above.

The storage control unit 414 stores the teaching procedure (alignment procedure or measurement procedure) in the same teaching folder in the memory 45 each time a teaching procedure (alignment procedure or measurement procedure) is created. The storage control unit 414 creates a series of teaching procedure data to which a teaching procedure name (origin setting, X-axis setting, reference plane setting, measurement position, etc.) corresponding to the setting contents is assigned for each teaching procedure, and teaching is performed. Store in a folder. The ID is, for example, a number assigned according to the order in which the teaching procedure is generated.

The storage control unit 414 stores the monitor image displayed in the image display area 432 when the determination button 434 is operated in the teaching folder as a teaching image. In this case, the storage control unit 414 stores the teaching procedure data created when the determination button 434 is operated and the teaching image in association with each other. By repeating the above operation and processing until a series of teaching procedure data relating to all measurement contents desired for the object to be measured S is stored and teaching procedure data is stored, the teaching folder finally has 1 A series of teaching procedure data relating to all the measurement contents for one measurement object S is stored. Note that teaching procedure data and teaching images for all the teaching procedures may be stored in association with each other, or teaching procedure data and teaching images for some of the teaching procedures may be stored in association with each other. For example, the teaching procedure data for the measurement procedure and the teaching image may be stored in association with each other among the alignment procedure and the measurement procedure of the teaching procedure. Of course, the teaching procedure data for the alignment procedure and the teaching image may be stored in association with each other. Further, teaching procedure data and teaching images for a part of the alignment procedure or measurement procedure may be stored in association with each other.

The image display control unit 413 displays a series of teaching procedure data included in the teaching folder on the display 43 in a list format.
FIG. 4 shows an example of a teaching procedure list 440 that displays teaching procedures in a list format. The teaching procedure list 440 shown in FIG. 4 includes an ID column, a teaching procedure name column, and a coordinate value column. An ID and a teaching procedure name corresponding to each teaching procedure data are displayed in the ID column and the teaching procedure name column. In the coordinate value column, when the measurement position is included as teaching procedure data, the coordinate value of the measurement position is displayed. Note that measurement conditions such as the magnification of the imaging optical system 14, illumination selection, and adjustment of illumination light may be displayed. The teaching procedure list 440 may be updated so that the teaching procedure is added each time the teaching procedure data is stored in the teaching folder of the memory 45, or after a series of teaching procedure data is created. It may be displayed.

The teaching process will be described with reference to the flowchart of FIG. Each process in the flowchart of FIG. 5 is performed by executing a program by the teaching processing device 60. This program is stored in the hard disk 49 and is activated and executed by the teaching processing device 60.
In step S1, the image display control unit 413 displays the teaching procedure creation screen 431 on the display 43, and proceeds to step S2. In step S <b> 2, the imaging device 15 performs monitor imaging of the measurement object S via the imaging control unit 31, and the image display control unit 413 displays a monitor image in the image display area 432 of the teaching procedure creation screen 431 of the display 43. The display proceeds to step S3.

In step S3, the teaching procedure creation unit 410 creates the above-described alignment procedure or measurement procedure as a teaching procedure based on the operation by the operator, and proceeds to step S4. In step S4, the storage control unit 414 creates teaching procedure data to which an ID and a teaching procedure name corresponding to the set content are assigned for each teaching procedure, stores the teaching procedure data in the teaching folder, and proceeds to step S5. At this time, the storage control unit 414 stores the image data of the monitor image used at the time of teaching in the teaching folder of the memory 45 as the teaching image in association with the teaching procedure data. In step S5, it is determined whether or not the teaching process is finished. If the teaching process is finished, the determination in step S5 is affirmative and the process ends. If the teaching process is not finished, the determination in step S5 is negative and the process returns to step S2.

-Display processing-
FIG. 6 schematically shows an example of display on the display screen of the display 43 during display processing. As shown in FIG. 6, the teaching result display screen 441 displayed on the display 43 includes an image display area 442, a measurement condition display area 443, and a comment display area 444.

The image display area 442 is an area for displaying a teaching image of the object S to be measured. As will be described later, the image display area 442 stores the teaching procedure data selected from the series of teaching procedure data included in the teaching procedure list 440 and the memory 45 in association with the selected teaching procedure data. The teaching image is displayed on the same display 43. The teaching image of the measurement object S displayed in the image display area 442 shows an index 500 indicating the measurement position included in the teaching procedure data stored in association with the teaching image, and the area used for the edge detection process. An indicator 501 is displayed in a superimposed manner. The index 501 indicates the position and size of a measurement region for extracting luminance information for performing edge detection out of image data captured and acquired by the imaging device 15 during measurement of the measurement object S. . In FIG. 6, the index 501 shows an example in which a frame is displayed according to the size and shape set as the measurement region.
Note that the index 500 and the index 501 are not limited to be displayed together, and the display of only one of the index 500 and the index 501 is also included in one embodiment of the present invention. In addition, an indicator 500 that displays symbols such as “◯”, “x”, and arrows is also included in one embodiment of the present invention.

The measurement condition display area 443 is an area in which the magnification, illumination selection, and adjustment of illumination light of the imaging optical system 14, which are measurement conditions included in the teaching procedure data, are displayed. The comment display area 444 is an area for displaying comments included in the teaching procedure data, the coordinates of the measurement position, and the design value / tolerance of the measurement position. In FIG. 6, “right side of the object to be measured S” is displayed as an example of the comment. This is because the measurement corresponding to this teaching procedure is the shape measurement of the right side surface of the structure of the object to be measured S. It shows that it is.

Instead of displaying in all of the image display area 442, the measurement condition display area 443, and the comment display area 444, the image display area 442 and the measurement condition display area 443 are displayed without displaying the comment display area 444. Those that display or display only the image display area 442 are also included in one embodiment of the present invention. Further, instead of displaying the teaching image in which the index 500 or the index 501 is superimposed on the measurement object S as the display of the image display area 442, only the teaching image of the measurement object S is displayed without displaying these indices. What is displayed is also included in one embodiment of the present invention.

Next, display processing by the image display control unit 413 will be described. The selection unit 415 selects any one teaching procedure data from a series of teaching procedure data included in the teaching folder and reads it from the memory 45.

The image display control unit 413 displays the measurement conditions included in the teaching procedure data selected and read out by the selection unit 415 from the series of teaching procedure data, the measurement condition display area 443 on the teaching result display screen 441, and a comment. It is displayed on the equal display area 444. The image display control unit 413 causes the image display area 442 to display a teaching image corresponding to the image data associated with the read teaching procedure data. When the teaching procedure data corresponding to the measurement procedure is read, the image display control unit 413 generates image data in which the index 500 or the index 501 is superimposed on the measurement position on the teaching image, and the corresponding image is displayed. It is displayed in the image display area 442.
When image data corresponding to an image obtained by superimposing the index 500 or the index 501 on the teaching image is stored in association with the teaching procedure data, the image display control unit 413 performs the above processing on the read image data. The image is displayed in the image display area 442 without performing it.

The selection unit 415 has a different teaching procedure data selection method depending on which of the first display mode and the second display mode is set as the display mode of the teaching result display screen 441. In the first mode, teaching procedure data selected by the operator from a series of teaching procedure data and a teaching image corresponding to the teaching procedure data are displayed. That is, in response to the operator changing the selection of the teaching procedure data, the teaching procedure data and the teaching image corresponding to the teaching procedure data are switched. In the second mode, each teaching procedure data and a teaching image corresponding to the teaching procedure data are automatically and sequentially switched at predetermined time intervals for a series of teaching procedure data. The mode in which the teaching image is displayed in either the first mode or the second mode can be set from the setting screen (not shown) by the operator operating the mouse 42 or the like.
Note that display in only one of the first mode and the second mode is also included in one embodiment of the present invention.

--First mode--
When the first mode is set, the image display control unit 413 stores the teaching procedure data corresponding to the teaching procedure selected by the operator in the series of teaching procedures, and is associated with the teaching procedure data. The read image data is read from the memory 45, and the display process described above is performed. In this case, the image display control unit 413 displays the teaching procedure list 440 on the display 43. The operator operates the mouse 42 and the like to select desired teaching procedure data from a series of teaching procedure data displayed in the teaching procedure list 440 displayed on the display 43. The image display control unit 413 continues displaying the teaching image until the operator performs an operation of selecting another teaching procedure data or performs an operation of ending the display of the teaching image.

--- Second mode ---
When the second mode is set, the selection unit 415 sequentially selects a series of a plurality of teaching procedure data in the teaching folder according to a series of measurement orders every time a predetermined time elapses. In this case, the selection unit 415 selects the teaching procedure data in ascending order or descending order based on the ID, for example. Each time the teaching procedure data is sequentially selected at a predetermined time interval, the image display control unit 413 reads the selected teaching procedure data and the image data stored in association with the teaching procedure data from the memory 45, The display process described above is performed. Therefore, the teaching image is switched and displayed every time a predetermined time elapses.
The predetermined time is preferably configured to be settable by an operator from a setting screen (not shown).
In the first mode and the second mode, it has been described that the selected teaching procedure data and the teaching image corresponding to the image data stored in association with the teaching procedure data are displayed together. However, an aspect in which only the teaching image corresponding to the image data stored in association with the selected teaching procedure data is displayed is also included in one aspect of the present invention.

The display process will be described with reference to the flowchart of FIG. Each process shown in the flowchart of FIG. 7 is performed by executing a program by the teaching processing device 60. This program is stored in the hard disk 49 and is activated and executed by the teaching processing device 60.
In step S20, it is determined whether or not the first mode is set. When the first mode is set, an affirmative determination is made in step S20 and the process proceeds to step S21. If the first mode is not set, a negative determination is made in step S20 and the process proceeds to step S25 described later. This case corresponds to the second mode being set.

In step S21, the image display control unit 413 displays the teaching procedure list 440 on the display 43, and proceeds to step S22. In step S22, it is determined whether or not an operation for selecting a teaching procedure has been performed by the operator. When the selection operation by the operator is performed, an affirmative determination is made in step S22 and the process proceeds to step S23. If the selection operation by the operator has not been performed, a negative determination is made in step S22 and the process proceeds to step S24.

In step S23, the selection unit 415 selects teaching procedure data corresponding to the operation by the operator, and the image display control unit 413 displays the selected teaching procedure data, the measurement conditions included in the teaching procedure data, and the teaching procedure data. The teaching image corresponding to the associated image data is displayed, and the process proceeds to step S24. In step S24, it is determined whether or not to end the display process. If the display process is to end, an affirmative determination is made in step S24 to end the process, and if the display process is to be continued, a negative determination is made to step S24 and the process returns to step S22.

In step S25, in which the determination in step S20 is negative and the process proceeds, the selection unit 415 selects one teaching procedure data from a series of a plurality of teaching procedure data included in the teaching procedure program, and proceeds to step S26. In step S26, the image display control unit 413 performs display in the same manner as in step S23, and proceeds to step S27.

In step S27, it is determined whether or not a predetermined time has elapsed since the display in step S26 was started. If the predetermined time has elapsed, an affirmative determination is made in step S27 and the process proceeds to step S28. If the predetermined time has not elapsed, a negative determination is made in step S27 and the determination process is performed. In step S28, it is determined whether or not to end the display process. When the display process ends, an affirmative determination is made in step S28 and the process ends. When the display process is continued, a negative determination is made in step S28, and the process proceeds to step S29.

In step S29, it is determined whether or not processing has been performed on the last teaching procedure data in the series of teaching procedure data included in the teaching procedure program. When the display process is performed on the last teaching procedure data, an affirmative determination is made in step S29 and the process ends. If there is a teaching procedure for which display processing has not yet been performed, a negative determination is made in step S29 and the process returns to step S25.

-Procedure change processing-
The image measuring apparatus 1 according to the present embodiment is configured to be able to change the contents of already created teaching procedure data using a displayed teaching image. That is, the measurement position and measurement conditions included in the teaching procedure data associated with the teaching image being displayed can be changed, updated to new teaching procedure data corresponding thereto, and stored (overwritten) in the memory 45. it can. When changing the contents of the teaching procedure data, the operator clicks the change button 445 (see FIG. 6) on the screen while the teaching image is displayed. Accordingly, the image display control unit 413 switches the teaching result display screen 441 displayed on the display 43 to the teaching procedure creation screen 431 shown in FIG. The image display control unit 413 causes the image display area 432 to display teaching procedure data when the change button 445 is clicked and teaching images corresponding to the image data associated with the teaching procedure data.

The operator changes the measurement position by operating the mouse 42 and moving the pointer or cursor to the position of the object S to be measured in the teaching image displayed in the image display area 432 and performing a click operation or the like. To do. Alternatively, even if the measurement position is not changed, measurement conditions such as illumination conditions are changed. The teaching procedure changing unit 416 sets a new measurement position or new measurement condition when the operator operates the enter button 434. When a new measurement position is set, the teaching procedure change unit 416 reads design values and tolerances at the measurement position of the measurement object S based on design information such as CAD of the measurement object S. The teaching procedure changing unit 416 overwrites the calculated measurement position and the design value / intersection at the measurement position of the read object S to the measurement position and design value / intersection included in the original teaching procedure data. , Updated to new teaching procedure data.

The storage control unit 414 overwrites the original teaching procedure data with the new teaching procedure data updated by the teaching procedure change unit 416 and stores it in the teaching folder of the memory 45. In this case, the storage control unit 414 adds the ID of the original teaching procedure data to the updated teaching procedure data, and converts the image data associated with the original teaching procedure data into the updated teaching procedure data. Associate.

The procedure change process will be described with reference to the flowchart of FIG. Each process in the flowchart of FIG. 8 is performed by executing a program by the teaching processing device 60. This program is stored in the hard disk 49 and is activated and executed by the teaching processing device 60.
In step S30, the image display control unit 413 switches the display on the display 43 to the teaching procedure creation screen 431, and proceeds to step S31. In step S31, the teaching procedure change unit 416 creates new teaching procedure data according to the operation of the operator, and proceeds to step S32. In step S32, the storage control unit 414 overwrites the original teaching procedure data with the new teaching procedure data updated by the teaching procedure change unit 416, stores it in the teaching folder of the memory 45, and ends the process.
In the above description, the teaching procedure data that already exists is changed. However, it is possible to add a measurement.

In accordance with the teaching procedure created by performing the teaching process as described above, the measuring unit 61 controls the imaging unit 1 and the light source unit 2 to measure the shape of a plurality of objects to be measured S having the same shape. I do. Note that one embodiment of the present invention includes changing the teaching procedure data by interrupting the measurement of the shape of the object S to be measured and performing the teaching procedure changing process described above according to the operation of the operator.

According to the image measuring apparatus according to the first embodiment described above, the following operational effects can be obtained.
(1) The storage control unit 414 stores image data corresponding to at least one teaching procedure data among a series of a plurality of teaching procedure data for creating a procedure for measuring the object S to be measured. Then, the image display control unit 413 displays the teaching image corresponding to the image data stored by the storage control unit 414 and the teaching procedure data in an overlapping manner. Therefore, since the contents of the teaching procedure can be visually confirmed using the teaching image corresponding to the teaching procedure, the operator can easily determine whether or not the desired measurement is performed.

(2) The storage control unit 414 stores various measurement conditions of the teaching procedure together with the teaching image. Accordingly, since the lighting conditions and the like can be confirmed at the same time as the measurement location, the measurement contents can be easily grasped.

(3) The teaching procedure change unit 416 changes the conditions included in the teaching procedure data, that is, the measurement position of the object S to be measured, using the teaching image. Therefore, the operator can change the teaching procedure data by performing a simple operation such as a click operation on the teaching image displayed on the display 43, so that convenience is improved.

(4) The selection unit 415 selects any teaching procedure data from the series of teaching procedure data, and the image display control unit 413 displays a teaching image corresponding to the teaching procedure data selected by the selection unit 415. Therefore, it is possible to visually determine the quality of the measurement position by using the teaching image for teaching procedure data requiring confirmation from a series of teaching procedure data.

(5) The selection unit 415 sequentially selects a series of teaching procedure data, and the image display control unit 415 selects the selected teaching procedure each time the series of teaching procedure data selected by the selection unit 413 is sequentially selected. The teaching image corresponding to the data is displayed. Therefore, since the teaching images are switched and displayed like a slide show, the operator can grasp a series of flow of measurement of the object S to be measured.

-Second Embodiment-
A structure manufacturing system according to an embodiment of the present invention will be described with reference to the drawings. The structure manufacturing system of the present embodiment creates a molded product such as an electronic component including, for example, an automobile door portion, an engine portion, a gear portion, and a circuit board.

FIG. 9 is a block diagram showing an example of the configuration of the structure manufacturing system 600 according to the present embodiment. The structure manufacturing system 600 includes the image measurement device 100 described in the first embodiment, the design device 610, the molding device 620, the control system 630, and the repair device 640.

The design device 610 is a device used by a user when creating design information related to the shape of a structure, and performs design processing for creating and storing design information. The design information is information indicating the coordinates of each position of the structure. The design information is output to the molding apparatus 620 and a control system 630 described later. The molding apparatus 620 performs a molding process for creating and molding a structure using the design information created by the design apparatus 610. In this case, the molding apparatus 620 includes an apparatus that performs at least one of laminating, casting, forging, and cutting represented by 3D printer technology.

The image measuring device 100 performs a measurement process for measuring the shape of the structure formed by the forming device 620. The image measuring apparatus 100 outputs information indicating the coordinates of the structure, which is a measurement result of measuring the structure (hereinafter referred to as shape information), to the control system 630. The control system 630 includes a coordinate storage unit 631 and an inspection unit 632. The coordinate storage unit 631 stores design information created by the design apparatus 610 described above.

The inspection unit 632 determines whether the structure molded by the molding device 620 is molded according to the design information created by the design device 610. In other words, the inspection unit 632 determines whether or not the molded structure is a non-defective product. In this case, the inspection unit 632 reads the design information stored in the coordinate storage unit 631 and performs an inspection process for comparing the design information with the shape information input from the image measurement apparatus 100. For example, the inspection unit 632 compares the coordinates indicated by the design information with the coordinates indicated by the corresponding shape information as the inspection process, and if the coordinates of the design information and the coordinates of the shape information match as a result of the inspection process. It is determined that the product is a non-defective product molded according to the design information. If the coordinates of the design information and the coordinates of the corresponding shape information do not match, the inspection unit 632 determines whether or not the coordinate difference is within a predetermined range, and if it is within the predetermined range, it can be restored. Judged as a defective product.

When it is determined that the defective product can be repaired, the inspection unit 632 outputs repair information indicating the defective portion and the repair amount to the repair device 640. The defective part is the coordinate of the shape information that does not match the coordinate of the design information, and the repair amount is the difference between the coordinate of the design information and the coordinate of the shape information in the defective part. The repair device 640 performs a repair process for reworking a defective portion of the structure based on the input repair information. The repair device 640 performs the same process as the molding process performed by the molding apparatus 620 in the repair process again.

Processing performed by the structure manufacturing system 600 will be described with reference to the flowchart shown in FIG.
In step S111, the design apparatus 610 is used when the structure is designed by the user. The design information on the shape of the structure is created and stored by the design process, and the process proceeds to step S112. Note that the present invention is not limited to only the design information created by the design apparatus 610. If design information already exists, the design information is acquired by inputting the design information, and is included in one aspect of the present invention. It is. In step S112, the molding apparatus 620 creates and molds a structure based on the design information by a molding process, and proceeds to step S113. In step S113, the image measuring apparatus 100 performs a measurement process, measures the shape of the structure, outputs shape information, and proceeds to step S114.

In step S114, the inspection unit 632 performs inspection processing for comparing the design information created by the design apparatus 610 with the shape information measured and output by the image measurement apparatus 100, and the process proceeds to step S115. In step S115, based on the result of the inspection process, the inspection unit 632 determines whether the structure molded by the molding apparatus 620 is a non-defective product. If the structure is a non-defective product, that is, if the coordinates of the design information coincide with the coordinates of the shape information, an affirmative determination is made in step S115 and the process ends. If the structure is not a non-defective product, that is, if the coordinates of the design information do not match the coordinates of the shape information, or if coordinates that are not in the design information are detected, a negative determination is made in step S115 and the process proceeds to step S116.

In step S116, the inspection unit 632 determines whether or not the defective portion of the structure can be repaired. If the defective part cannot be repaired, that is, if the difference between the coordinates of the design information and the coordinates of the shape information in the defective part exceeds the predetermined range, a negative determination is made in step 116 and the process ends. If the defective part can be repaired, that is, if the difference between the coordinates of the design information and the shape information in the defective part is within a predetermined range, an affirmative determination is made in step S116 and the process proceeds to step S117. In this case, the inspection unit 632 outputs repair information to the repair device 640. In step S117, the repair device 640 performs a repair process on the structure based on the input repair information, and returns to step S113. As described above, the repair device 640 performs the same process as the molding process performed by the molding apparatus 620 in the repair process.

According to the structure manufacturing system of the second embodiment described above, the following operational effects can be obtained.
(1) The image measuring apparatus 100 of the structure manufacturing system 600 performs a measurement process for acquiring shape information of the structure created by the molding apparatus 620 based on the design process of the design apparatus 610, and performs an inspection unit of the control system 630. Reference numeral 632 performs an inspection process for comparing the shape information acquired in the measurement process with the design information created in the design process. Therefore, it is possible to determine whether a structure is a non-defective product created according to the design information by acquiring defect inspection of the structure or information inside the structure by nondestructive inspection. Contribute to.

(2) The repair device 640 performs the repair process for performing the molding process again on the structure based on the comparison result of the inspection process. Therefore, when the defective portion of the structure can be repaired, the same processing as the molding process can be performed again on the structure, which contributes to the manufacture of a high-quality structure close to design information.

The following modifications are also within the scope of the present invention, and one or a plurality of modifications can be combined with the above-described embodiment.
(Modification 1)
In one aspect of the present invention, a series of teaching procedure data selected by an operator is switched and displayed at predetermined time intervals during display processing. In this case, the operator selects a desired series of teaching procedure data from the teaching procedure list 440 by operating the mouse 42 or the like in the same manner as when the first mode is set. The selection unit 415 sequentially selects teaching procedure data every predetermined time based on an ID given to a series of teaching procedure data selected by the operator. The image display control unit 413 switches the display of the teaching result display screen 441 each time teaching procedure data is sequentially selected by the selection unit 415.

(Modification 2)
The teaching procedure data is not limited to the one stored in the memory 45 of the computer main body 40 of the image measuring apparatus 100. The present invention also relates to what is stored in a portable storage medium removable from the computer main body 40 of the image measuring apparatus 100 and what is stored in a storage area on a network connected to the computer main body 40 of the image measuring apparatus 100. Included in embodiments.

(Modification 3)
The present invention is not limited to the display of the teaching procedure creation screen 431 and the teaching result display screen 441 on the display 43 connected to the computer main body 40. The teaching procedure creation screen 431 and the teaching result display screen 441 may be displayed on a display provided in another computer not connected to the image measuring apparatus 100.

(Modification 4)
Instead of displaying one teaching image on the teaching result display screen 441 during display processing, a plurality of teaching images may be displayed simultaneously. In this case, the operator selects desired teaching procedure data from the teaching procedure list 440 by operating the mouse 42 or the like in the same manner as when the first mode is set. The selection unit 415 reads out all the teaching procedure data selected by the operator and image data associated with each teaching procedure data. The image display control unit 413 divides the teaching result display screen 441 into divided areas according to the number of selected teaching procedure data, and displays any one of the teaching images corresponding to the read image data in each divided area. As a result, the operator can compare the teaching images corresponding to the different teaching procedure data on the same screen, and determine whether the set measurement position is acceptable.

(Modification 5)
In the above-described embodiment, the teaching means for determining the measurement procedure of the object S to be measured in the image measuring apparatus using an image is taken as an example, but the present invention is not limited to this. For example, a measuring apparatus using X-rays may be used. A measurement apparatus using X-rays is disclosed in, for example, US Pat. No. 2013-0083896. Of course, a measuring device using infrared rays may be used. That is, the wavelength used for measurement is not limited to the above-described embodiment. In the present embodiment, a measurement apparatus using an image reflected by the object to be measured S is taken as an example. However, an image that passes through the object to be measured S like an apparatus using X-rays may be used. . Moreover, although the case where the surface shape of the to-be-measured object S was measured using an image was mentioned as an example, the apparatus which measures distance may be used. An apparatus for measuring the distance is disclosed in, for example, US Patent Publication No. 2013-0335749. For example, in an apparatus for measuring a distance, the measurement conditions may be stored in association with the image information of the point for measuring the distance.

(Modification 6)
In the above embodiment, the example in which various programs executed by the control device 44 of the host computer 4 of the image measuring device 100 are stored in the hard disk 49 in advance has been described. The above program can be provided to the host computer 4 through a recording medium such as a CD-ROM or a data signal such as the Internet. FIG. 11 is a diagram showing this state. The host computer 4 is provided with a program via, for example, the CD-ROM 104. Further, the host computer 4 has a connection function with the communication line 101. The server computer 102 is a computer that provides the program, and stores the program in a recording medium such as the hard disk 103. The communication line 101 is a communication line such as the Internet or a dedicated communication line. The server computer 102 reads the program using the hard disk 103 and transmits the program to the host computer 4 via the communication line 101. That is, the program is transmitted as a data signal on a carrier wave via the communication line 101. As described above, the program can be supplied as a computer-readable computer program product in various forms such as a recording medium and a data signal (carrier wave).

As long as the characteristics of the present invention are not impaired, the present invention is not limited to the above-described embodiments, and other forms conceivable within the scope of the technical idea of the present invention are also included in the scope of the present invention. .
Note that the requirements of the above-described embodiments or modifications can be combined as appropriate. Some components may not be used. In addition, as long as it is permitted by law, the disclosure of all published publications and US patents related to the detection devices and the like cited in the above-described embodiments or modifications are incorporated herein by reference.

DESCRIPTION OF SYMBOLS 1 ... Imaging unit, 2 ... Light source unit, 3 ... Interface unit, 4 ... Host computer, 13 ... Optical system unit, 14 ... Imaging optical system, 15 ... Imaging apparatus, 40 ... Computer main body, 41 ... Keyboard, 42 ... Mouse 43 ... Display, 44 ... Control device, 45 ... Memory, 49 ... Hard disk, 60 ... Teaching processing device, 61 ... Measurement unit, 100 ... Image measurement device, 410 ... Teaching procedure creation unit, 413 ... Image display control unit, 414 ... storage control unit, 415 ... selection unit, 416 ... teaching procedure change unit, 600 ... structure manufacturing system, 610 ... design device, 620 ... molding device, 630 ... control system, 632 ... inspection unit, 640 ... repair device

Claims

An image measuring device that measures the shape of the measurement object based on an image obtained by imaging the measurement object,
An image measurement apparatus comprising a storage control unit that stores an image corresponding to at least one teaching procedure among a plurality of teaching procedures for creating a procedure for measuring a measurement object.
The image measurement apparatus according to claim 1,
The image measurement apparatus, wherein the image is a captured image used when creating the teaching procedure.
The image measurement apparatus according to claim 2,
The storage control unit is an image measurement apparatus that stores the teaching procedure condition taught when the image is created together with the image.
The image measurement device according to claim 3,
The condition of the teaching procedure includes at least one of a condition of illumination light applied to the measurement object, a magnification when imaging the measurement object, and a measurement position on the measurement object.
The image measuring device according to claim 4,
An image measurement apparatus further comprising a display control unit that displays the image stored by the storage control unit and the teaching procedure condition in an overlapping manner.
The image measurement apparatus according to claim 5,
An image measurement apparatus further comprising a changing unit that changes the condition of the teaching procedure using the image.
The image measurement device according to claim 6,
The said change part is an image measuring apparatus which changes the measurement position to the said measurement target object using the said image.
In the image measuring device according to any one of claims 1 to 7,
A display unit for displaying the stored information;
An image measuring device in which a list of the plurality of teaching procedures is displayed together with the image on the display unit.
The image measurement device according to claim 8,
A selection unit that selects any teaching procedure from the plurality of teaching procedures;
The display control unit is an image measurement device that displays the image corresponding to the teaching procedure selected by the selection unit.
The image measurement device according to claim 9,
The selection unit sequentially selects the plurality of teaching procedures,
The display control unit displays the image corresponding to the selected teaching procedure every time the plurality of teaching procedures selected by the selection unit are sequentially selected.
In the image measuring device according to any one of claims 8, 9, or 10, which refers to claim 1, claim 1,
The image measurement apparatus, wherein the image is design information of the measurement object.
In the image measuring device according to any one of claims 1 to 11,
An image measurement apparatus further comprising a measurement unit that measures a shape of the measurement object based on images of the measurement object corresponding to the plurality of teaching procedures.
Create design information about the shape of the structure,
Create the structure based on the design information,
The shape of the created structure is measured using the image measuring device according to any one of claims 1 to 12 to acquire shape information,
A structure manufacturing method for comparing the acquired shape information and the design information.
In the manufacturing method of the structure according to claim 13,
A method of manufacturing a structure, which is executed based on a comparison result between the shape information and the design information, and reworks the structure.
In the manufacturing method of the structure according to claim 14,
The reworking of the structure is a structure manufacturing method in which the structure is created again based on the design information.
An image measurement method for measuring the shape of the measurement object based on an image obtained by imaging the measurement object,
An image measurement method for storing an image corresponding to at least one teaching procedure among a plurality of teaching procedures for creating a procedure for measuring a measurement object.
An image measurement program for use in an image measurement apparatus for measuring the shape of the measurement object based on an image obtained by imaging the measurement object,
An image measurement program for causing a computer to execute a storage control process for storing an image corresponding to at least one teaching procedure among a plurality of teaching procedures for creating a procedure for imaging a measurement object.