WO2016059503A1 - Détecteur sensible au rayonnement, d'accumulation, basé sur un condensateur mos pour une dosimétrie professionnelle, environnementale et médicale - Google Patents

Détecteur sensible au rayonnement, d'accumulation, basé sur un condensateur mos pour une dosimétrie professionnelle, environnementale et médicale Download PDF

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Publication number
WO2016059503A1
WO2016059503A1 PCT/IB2015/057533 IB2015057533W WO2016059503A1 WO 2016059503 A1 WO2016059503 A1 WO 2016059503A1 IB 2015057533 W IB2015057533 W IB 2015057533W WO 2016059503 A1 WO2016059503 A1 WO 2016059503A1
Authority
WO
WIPO (PCT)
Prior art keywords
radiation
sensitive
moscaps
capacitance
present
Prior art date
Application number
PCT/IB2015/057533
Other languages
English (en)
Inventor
Sean M. Scott
Daniel John VALENTINO
P. Alexander Walerow
Mark Raymond SALASKY
Dimitrios Peroulis
Original Assignee
Landauer, Inc.
Purdue Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/870,629 external-priority patent/US9804273B2/en
Application filed by Landauer, Inc., Purdue Research Foundation filed Critical Landauer, Inc.
Publication of WO2016059503A1 publication Critical patent/WO2016059503A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/02—Dosimeters
    • G01T1/026—Semiconductor dose-rate meters

Definitions

  • FIG. 6 is a graph illustrating the radiation sensitivity of a radiation-sensitive MOSCAP represented as the amount of radiation-induced shift in the device threshold voltage parameter as a function of the POA temperature, according to one embodiment of the present invention.
  • FIG. 20 illustrates an exemplary measurement block represented by a signal trace and a waveform, according to one embodiment of the present invention.
  • the post-oxidation annealing (POA) temperature plays an important role in the buildup of oxygen vacancies, which is the primary type of defect responsible for oxide trapping of holes. This is attributed to the out-diffusion of oxygen at high temperatures, thus, leaving behind oxygen vacancy defects. High POA temperatures result in vacancies that lead to significantly increased radiation-induced oxide charge buildup.
  • the application of a positive external bias to increase the rate and density of the radiation-induced hole build up near the Si/Si0 2 interface may place the MOSCAP in the inversion region 1401, as illustrated in FIG. 14.
  • Measurement of the MOSCAP capacitance response induced by the radiation-induced charge buildup near Si/Si02 interface, post external bias application, may require shifting the operating point of the MOSCAP device into the depletion region prior to measuring the induced capacitance response.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mobile Radio Communication Systems (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)

Abstract

L'invention concerne un système de mesure de rayonnement ionisant sans fil de faible puissance qui est destiné à être utilisé dans un dosimètre portable de surveillance de rayonnement professionnel. L'élément détecteur est un condensateur MOS personnalisé qui piège des trous proportionnellement à la quantité de rayonnement ionisant incidente sur le détecteur, entraînant ainsi de façon permanente un décalage latéral dans la courbe CV (vers une tension seuil plus négative). Le circuit mesure la valeur de capacité de plusieurs capteurs redondants à une tension donnée dans la région d'appauvrissement, enregistre cette valeur dans le temps et transmet occasionnellement les valeurs stockées à une station de base. À partir du changement de capacité, la dose qui a été distribuée peut être déterminée.
PCT/IB2015/057533 2014-10-17 2015-10-01 Détecteur sensible au rayonnement, d'accumulation, basé sur un condensateur mos pour une dosimétrie professionnelle, environnementale et médicale WO2016059503A1 (fr)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US201462065087P 2014-10-17 2014-10-17
US62/065,087 2014-10-17
US14/870,629 US9804273B2 (en) 2014-10-17 2015-09-30 Combined n-type and p-type MOS-based radiation sensors for environmental compensations
US14/870,236 2015-09-30
US14/870,267 US20160187492A1 (en) 2014-10-17 2015-09-30 Electronic system for measurement of radiation-sensitive mos devices
US14/870,298 US9927531B2 (en) 2014-10-17 2015-09-30 Variable metal multi-gate metal oxide semiconductor capacitor radiation sensor for improved gain and tissue equivalence
US14/870,320 2015-09-30
US14/870,320 US9823358B2 (en) 2014-10-17 2015-09-30 Low-noise surface level MOS capacitor for improved sensor quality factor
US14/870,267 2015-09-30
US14/870,629 2015-09-30
US14/870,298 2015-09-30
US14/870,236 US20160187491A1 (en) 2014-10-17 2015-09-30 Mos capacitor-based, accumulating, radiation-sensitive detector for occupational, environmental and medical dosimetry

Publications (1)

Publication Number Publication Date
WO2016059503A1 true WO2016059503A1 (fr) 2016-04-21

Family

ID=55746198

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/IB2015/057534 WO2016059504A1 (fr) 2014-10-17 2015-10-01 Système électronique pour la mesure de dispositifs mos sensibles au rayonnement
PCT/IB2015/057533 WO2016059503A1 (fr) 2014-10-17 2015-10-01 Détecteur sensible au rayonnement, d'accumulation, basé sur un condensateur mos pour une dosimétrie professionnelle, environnementale et médicale

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/IB2015/057534 WO2016059504A1 (fr) 2014-10-17 2015-10-01 Système électronique pour la mesure de dispositifs mos sensibles au rayonnement

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WO (2) WO2016059504A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111247454A (zh) * 2017-10-30 2020-06-05 深圳帧观德芯科技有限公司 具有基于mems开关的dc-dc转换器的辐射检测器
WO2022029457A1 (fr) * 2020-08-06 2022-02-10 Fragkopoulou Marianthi Système portatif de capteurs polarisés pour la détection, la mesure et la séparation simultanées de différents types de rayonnement et la transmission de données

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100164534A1 (en) * 2007-06-04 2010-07-01 Anatoly Rozenfeld Radiation Sensor and Dosimeter
US20100219494A1 (en) * 2009-03-02 2010-09-02 Barnaby Hugh J Sub-mm Wireless Ionizing Radiation Detector
US20110121980A1 (en) * 2003-07-12 2011-05-26 Radiation Watch Limited, LLC Ionising radiation detector
EP2381273A2 (fr) * 2010-04-22 2011-10-26 Uryupin, Oleg Dosimètre personnel sur la base de circuit intégré à rayonnement
US20140299783A1 (en) * 2012-06-01 2014-10-09 Landauer, Inc. Energy harvester for wireless, motion and position-sensing, integrating radiation sensor for occupational and environmental dosimetry

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1188431A (fr) * 1981-10-02 1985-06-04 Canadian Astronautics Limited Dosimetre a lecture directe
US7129714B2 (en) * 2002-07-02 2006-10-31 Baxter Larry K Capacitive measurement system
JP4902759B2 (ja) * 2010-03-10 2012-03-21 株式会社日立製作所 放射線計測装置および核医学診断装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110121980A1 (en) * 2003-07-12 2011-05-26 Radiation Watch Limited, LLC Ionising radiation detector
US20100164534A1 (en) * 2007-06-04 2010-07-01 Anatoly Rozenfeld Radiation Sensor and Dosimeter
US20100219494A1 (en) * 2009-03-02 2010-09-02 Barnaby Hugh J Sub-mm Wireless Ionizing Radiation Detector
EP2381273A2 (fr) * 2010-04-22 2011-10-26 Uryupin, Oleg Dosimètre personnel sur la base de circuit intégré à rayonnement
US20140299783A1 (en) * 2012-06-01 2014-10-09 Landauer, Inc. Energy harvester for wireless, motion and position-sensing, integrating radiation sensor for occupational and environmental dosimetry

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111247454A (zh) * 2017-10-30 2020-06-05 深圳帧观德芯科技有限公司 具有基于mems开关的dc-dc转换器的辐射检测器
CN111247454B (zh) * 2017-10-30 2023-11-10 深圳帧观德芯科技有限公司 具有基于mems开关的dc-dc转换器的辐射检测器
WO2022029457A1 (fr) * 2020-08-06 2022-02-10 Fragkopoulou Marianthi Système portatif de capteurs polarisés pour la détection, la mesure et la séparation simultanées de différents types de rayonnement et la transmission de données

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WO2016059504A1 (fr) 2016-04-21

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