WO2016058295A1

WO2016058295A1 - Straight cavity-type ultra-long gas storage tube for carbon dioxide laser

Info

Publication number: WO2016058295A1
Application number: PCT/CN2015/071955
Authority: WO
Inventors: 殷卫援
Original assignee: 成都微深科技有限公司
Priority date: 2014-10-15
Filing date: 2015-01-30
Publication date: 2016-04-21
Also published as: CN104242023A

Abstract

A straight cavity-type ultra-long gas storage tube for a carbon dioxide laser, comprising a gas storage tube (1). A water cooling tube (4) is sleeved within the gas storage tube (1), a discharge tube (5) is sleeved within the water cooling tube (4), and the gas storage tube (1) has a greater diameter at a middle portion thereof than the diameters of the two ends thereof. Since the length of the laser is far more than the length of current common laser, the diameter of the middle portion of the gas storage tube (1) is designed to be greater than the diameters of the two ends of the gas storage tube, namely a structure having a thick middle portion and two thin ends. Firstly, the structural strength of the gas storage tube is improved, and meanwhile, after the laser is supported by supporting components (21, 22), the two ends of the gas storage tube (1) respectively go beyond the two supporting components (21, 22) and are in suspension states, and the length of the suspended portion of the gas storage tube (1) can be decided by the actual size of the laser, so that stress balance on the gas storage tube (1) is ensured and the bending amount of the gas storage tube (1) is maximized.

Description

Straight cavity type long gas storage tube for carbon dioxide laser

Technical field

The invention relates to the technical field of lasers, and in particular to a straight cavity type ultra-long gas storage tube for a carbon dioxide laser.

Background technique

Because the carbon dioxide laser has relatively large power and high energy conversion efficiency, the spectral line is also abundant, and there are dozens of spectral lines of laser output near 10 micrometers, so it has been obtained in industrial, military, medical, scientific research, etc. A wide range of applications.

The current carbon dioxide laser generally includes a discharge tube, a water-cooled tube sleeved outside the discharge tube, a gas storage tube disposed outside the water-cooled tube, a cathode electrode and an anode electrode respectively disposed at two ends of the discharge tube, and two disposed in the gas storage tube. The output window and the reflection window of the end, the reflection window comprises a reflection lens and a reflection lens cooling device, and the output window comprises an output lens and an output lens cooling device, wherein the discharge tube is filled with carbon dioxide gas and other auxiliary gas, and the electrode at the two ends of the discharge tube When the voltage is applied upward, the anode electrode and the cathode electrode are discharged, and a glow discharge is generated in the discharge tube. After the reflection lens and the output lens are reflected, a laser beam is formed, and the final laser beam is emitted from the output lens.

It is known that the carbon dioxide laser of the above structure has an output power proportional to the length of the discharge tube, more precisely proportional to the distance between the cathode electrode and the anode electrode, so in order to obtain a higher output power, the current carbon dioxide Lasers are usually designed as elongated structures.

In order to further increase the output power of the laser, it is common practice to further increase the length of the discharge tube to increase the distance between the cathode electrode and the anode electrode. However, in actual production, the inventors have found that in this way Increasing the power of the laser is not applicable to actual production. Specifically, on the one hand, when the distance between the cathode electrode and the anode electrode is increased, the discharge difficulty between the cathode electrode and the anode electrode is sharply increased, in order to satisfy the discharge. In order to increase the power supply voltage, the current laser has to reach the limit of the conventional power supply voltage in order to obtain a large output power. Further increasing the distance between the cathode electrode and the anode electrode requires the use of a higher voltage power source. This requirement directly limits the environment in which the carbon dioxide laser is used, and requires a large amount of cost for the company to be used. In order to increase the voltage of the original power supply; and, when the voltage applied to the anode and cathode electrodes of the laser is greatly increased, the safety and reliability of the laser itself are lowered, which poses a serious danger to the production; on the other hand, Due to the large increase in the length of the discharge tube, the length of the gas storage tube and the water-cooled tube of the laser is also increased, and the laser is usually mounted and fixed by a support member disposed outside the gas storage tube. When the length of the gas storage tube is greatly increased, The winding is also increased, which directly affects the strength of the gas storage pipe, and since the output lens and the reflecting lens are respectively arranged at the two ends of the gas storage pipe, when the winding of the gas storage pipe is increased, the output lens and the reflecting lens are directly caused. Positive alignment accuracy reduces laser output accuracy and output power.

Therefore, based on the above, there is a need for an air storage tube that can be applied to a carbon dioxide laser having an extremely long length.

Summary of the invention

SUMMARY OF THE INVENTION It is an object of the present invention to provide an air storage duct suitable for a carbon dioxide laser having an extremely long length in view of the above-described deficiencies of the present CO 2 laser.

In order to achieve the above object, the technical solution adopted by the present invention is:

A straight-cavity ultra-long gas storage pipe for a carbon dioxide laser, comprising a gas storage pipe, wherein the gas storage pipe is sleeved with a water-cooling pipe, and the water-cooling pipe is sleeved with a discharge pipe, and a diameter of a middle portion of the gas storage pipe is larger than The diameter of the ends at both ends. The diameter of the middle portion of the gas storage pipe is larger than the diameter of the end portions, that is, a structure with a thick intermediate portion and a thinner end portion. Firstly, the structural strength of the gas storage pipe is improved. Due to the laser of the present invention, the length thereof is far more than the current one. The laser, because the laser itself is of an elongated structure, because its length is excessively increased, and when installed, the laser supports the entire laser by two supporting members spaced apart from each other outside the gas storage tube, so when the length is increased, As the degree of winding of the gas storage pipe increases, the structural strength of the gas storage pipe also decreases, resulting in an increase in the amount of bending on the gas storage pipe, which sharply reduces the accuracy of the laser, and also causes inconvenience in manufacturing, transportation, and use. The inventor designed the middle two The fine end gas storage pipe structure firstly increases the structural strength of the gas storage pipe; meanwhile, when the support member supports the laser, the two end portions of the gas storage pipe are suspended above the two support members, and the length of the suspended portion thereof According to the actual size of the laser, the balance of the force on the gas storage pipe can be ensured, and the bending amount of the gas storage pipe can be minimized.

Preferably, the portion of the gas storage tube having the largest diameter is smoothly connected to the portion having the smallest diameter. The large diameter portion in the middle of the gas storage pipe is smoothly connected with the small diameter portions at both ends, so that the force of each part on the gas storage pipe is more optimized, and the structural strength of the gas storage pipe is further improved.

Preferably, the gas storage tube is stepped down from the middle to the both ends in a stepwise manner, and the diameters of the end portions at both ends are the smallest. Since the laser is an elongated structure, especially for the laser of the present invention, the length is longer than that of the conventional laser. If the straight tubular structure of the conventional laser structure is used, after the installation is in place, the length is long and the span is large, resulting in The winding is increased, and thus has a lower bending strength, which directly reduces the coaxiality accuracy of the end portions of the gas storage pipe. Therefore, in the present invention, the gas storage pipe is set to have a diameter from the middle to the both ends. Gradually shrinking, so that when the laser is supported, the entire gas storage tube has a small degree of winding, greatly improving the bending strength, ensuring the alignment precision of the output window and the reflection window, thereby ensuring the quality of the laser beam output by the laser; Since the gas storage pipe is stepped down from the middle to the both ends step by step, the installation of the gas storage pipe is facilitated while satisfying the structural strength of the gas storage pipe.

Preferably, the gas storage pipe comprises a large diameter section located at a middle portion, a middle diameter section located at two sides of the large diameter section, and a small diameter section connected to the middle diameter section, the large diameter section, the middle diameter section and The small diameter section is set concentrically. The gas storage pipe is set to a large diameter section, a medium diameter section and a small diameter section, so that the gas storage pipe has a thin structure at both ends of the middle, which improves the structural strength of the gas storage pipe, reduces the winding degree of the gas storage pipe, and ensures that the laser outputs the laser beam. quality.

Preferably, the two ends of the gas storage pipe are respectively arranged with a reflection window and an output window, wherein the gas storage pipe is sleeved with a water-cooling pipe, and the water-cooling pipe is sleeved with a discharge pipe, and the two ends of the discharge pipe are respectively provided with a first An electrode, a second electrode is disposed in a middle portion of the discharge tube, and the first electrode and the second electrode are opposite in polarity, and the first electrode and the second electrode are respectively connected to an external power source. When at the first electrode and second When a voltage is applied to the electrode, since the polarities of the first electrode and the second electrode are opposite, the first electrode and the second electrode are discharged, since both ends of the discharge tube are provided with the first electrode, and the second electrode is disposed at the discharge The middle of the tube, so that the second electrode and the first electrode on both sides are simultaneously discharged, so the output power of the laser is directly improved, and compared with the conventional laser, since the cathode electrode and the anode electrode are not increased Distance, so when using, there is no need to increase the power supply voltage, and thus, the output power of the laser is significantly improved without new requirements for the current power supply; in addition, since the two first electrodes and the second electrode are respectively connected to the external power source Connecting so that the discharge between the second electrode and the first electrodes on both sides is performed independently, that is, when the first electrode on one side fails and does not work normally, the first one on the other side The normal discharge between the electrode and the second electrode enables the laser to operate normally, thus improving the reliability of the laser; meanwhile, the invention also The optical device has two output powers. When a smaller laser output power is required, only one of the first electrode and the second electrode needs to be normally discharged, and when a large laser output power is required, two The first electrode is simultaneously discharged with the second electrode, which can be realized, and the use range of the laser is increased.

Preferably, the first electrode is a cathode electrode and the second electrode is an anode electrode. When the laser is working, the anode electrode is at a high potential, and the cathode electrode is at a low potential. In the laser, the two first electrodes are respectively adjacent to the reflection window and the output window, and the second electrode is located at the middle of the water-cooling tube, so the first electrode is It is set as a cathode electrode, and the second electrode is an anode electrode, so that the first electrode is at a low potential, and the second electrode is set to a high potential, thereby avoiding a high potential at a position close to the reflection window and the output window, thereby avoiding the first The danger of one electrode to the external discharge of the laser, and the second electrode of the high potential is located at an intermediate portion farther from the end of the laser, so that the discharge between the first electrode and the second electrode is stabilized, thereby ensuring discharge during operation of the laser. Stability, while ensuring laser output laser quality, while improving the safety of the laser

Preferably, a portion of the discharge tube corresponding to the second electrode is disconnected, a disconnecting end thereof extends toward an inner wall of the water-cooling tube, and is closedly connected to an inner portion of the water-cooling tube to form a first closed end and a first a second closed end, the water-cooled tube is divided into a first water-cooled tube and a second water-cooled tube, and an electrode chamber accommodating the second electrode is formed between the first closed end and the second closed end, the first closed End and second closed end The distance between the two matches the length of the second electrode. An electrode chamber for partitioning the water-cooling tube is disposed in the middle of the discharge tube, and the second electrode is disposed in the electrode chamber, firstly ensuring that the second electrode can be safely and reliably installed, and more importantly, since the inner diameter of the electrode chamber is larger than The inner diameter of the discharge tube can prevent the second electrode from blocking the path of the laser beam reflection in the discharge tube after the second electrode is disposed in the electrode chamber, thereby ensuring the output quality of the laser; and, since the water-cooled tube is divided into the first water-cooled tube and the first The two water cooling pipe, the first water cooling pipe and the second water cooling pipe form a separate cooling system, which can well cool the discharge pipe; at the same time, the inventor found in the actual production process that when the electrode temperature is too low, the discharge efficiency is directly weakened. Therefore, in the present application, since the outer side of the electrode chamber is not covered with the water-cooled tube, but only at both ends and the water-cooled tube, that is, after the second electrode is disposed in the electrode chamber, the outer wall of the second electrode is not It will be cooled by the water-cooled tube, but it will be cooled at the position of the water-cooled tube at both ends. This cooling method ensures the second electrode. And it will have an excessively high temperature, but also to avoid excessive cooling of the second electrode caused by the discharge efficiency is lowered, so further ensure the quality of the laser.

Preferably, the first water-cooling pipe is provided with a first inlet pipe and a first outlet pipe connected thereto, and the second water-cooling pipe is provided with a second inlet pipe and a second outlet pipe connected thereto. The distance between the first inlet pipe and the second outlet pipe is 1/2 of the length of the water-cooled pipe, and the distance between the first inlet pipe and one end of the water-cooling pipe is the length of the water-cooled pipe 1/4. Since the water-cooled pipe is suspended inside the gas storage pipe, it is supported in the gas storage pipe through the inlet pipe and the outlet pipe. Since the two ends of the water-cooled pipe are suspended, the distance between the first inlet pipe and the second outlet pipe is set. It is 1/2 of the water-cooled pipe, and the distance between the first inlet pipe and the end of the water-cooled pipe is 1/4 of the length of the water-cooled pipe. During use, the water-cooled pipe between the first inlet pipe and the second outlet pipe is self-weight. When bending, the portion of the water-cooled pipe that is suspended at the end is also bent downward due to its own weight, and the first inlet pipe and the second outlet pipe that serve as the support also function as a lever, so the first inlet pipe and the second outlet pipe The bending of the water-cooled pipe between the water pipes and the bending of the suspended portion at the end of the water-cooled pipe cancel each other, reducing the overall bending amount of the water-cooled pipe, ensuring the accuracy of the concentricity of the water-cooled pipe, and ensuring the discharge pipe disposed inside the water-cooled pipe. The accuracy of the concentricity ensures the output quality of the laser.

Preferably, a first sleeve is disposed between the first water-cooling tube and the discharge tube, and the first One end of the sleeve is suspended, and the other end of the first sleeve extends toward the first water-cooling tube and is closedly connected with the inner wall of the first water-cooling tube to form a first partition, the first inlet pipe and the first outlet Water pipes are respectively located on both sides of the first partition. The first water-cooling pipe is separated into a double-layer structure by providing a first casing, and the cooling water enters the outer layer of the first water-cooling pipe from the first water inlet pipe, and the cooling water is suspended from the first casing due to the existence of the first partition. The end portion enters the inner layer of the first water-cooling tube, then flows along the outer wall of the discharge tube, and then is discharged from the first outlet pipe. The double-layer structure makes the cooling water in contact with the discharge tube be in a flowing state, ensuring the pair The cooling efficiency of the discharge tube.

Preferably, a second sleeve is disposed between the second water-cooling tube and the discharge tube, one end of the second sleeve is suspended, and the other end of the second sleeve extends toward the second water-cooled tube And sealingly connecting with the inner wall of the second water-cooling tube to form a second partition, and the second inlet pipe and the second outlet pipe are respectively located on two sides of the second partition. The second water-cooling tube is set to the same structure as the first water-cooling tube, firstly ensuring the cooling effect on the discharge tube, and also facilitating the processing and manufacturing, simplifying the production process, saving the cost, and more importantly, the first water-cooling The structure of the tube and the second water-cooled tube are the same, so that the internal structure of the entire laser has good stability and improves the quality of the laser beam outputted by the laser.

Preferably, the first outlet pipe and the second inlet pipe are in communication. The laser of the invention has only one inlet pipe and one outlet pipe, which simplifies the accessory equipment outside the laser and facilitates its use.

Preferably, a first support is disposed between the first water-cooling pipe and the gas storage pipe, and the first support and the first water inlet pipe are located in the same radial direction along the gas storage pipe. The inventor found in the actual research and development work that when the laser is in working state, the temperature of each component inside it will increase to some extent, due to a certain degree of temperature difference between the components, and the thermal expansion coefficient between the components is inconsistent, The deformation of each component in the laser is inconsistent, causing the components to pull each other, resulting in a decrease in the accuracy of the coaxiality at both ends of the gas storage tube, thereby causing a decrease in the alignment accuracy of the output window and the reflection window, and finally directly reducing the laser. The quality of the output laser beam. The inventors found that the most influential one is the inlet and outlet pipes between the gas storage pipe and the water-cooled pipe, because in the current laser, the water-cooled pipe is passed through. The water pipe and the water outlet pipe are supported inside the gas storage pipe. When the laser is working, the portion between the gas storage pipe and the water discharge pipe on the inlet pipe and the outlet pipe may pull the gas storage pipe in the radial direction due to its own deformation, which seriously affects the storage. The coaxiality of the two ends of the trachea; moreover, the laser of the present invention has a longer length, and the effect is more obvious. Therefore, by the above structure, the first outlet pipe and the second inlet pipe are connected to make the first outlet pipe and the first The second inlet pipe is not in contact with the gas storage pipe, but the first support is disposed at a position opposite to the first inlet pipe. Since the first support and the first inlet pipe are located in the same radial direction of the gas storage pipe, the first inlet pipe is operated when the laser is working. The portion between the gas storage pipe and the water-cooled pipe will have a certain amount of elongation, and the first support will also have a certain amount of elongation. Since it is in the same radial direction along the gas storage pipe, the extension of the two portions is caused. The long amount offsets each other, and the deformation amount is also located symmetrically in the radial direction of the gas storage pipe, so it does not affect the concentricity of the two ends of the gas storage pipe, thereby ensuring the precision of the laser. Ensure the quality of the laser output laser beam.

Preferably, a second support is disposed between the second water-cooling pipe and the gas storage pipe, and the second support and the second water outlet pipe are located in the same radial direction along the gas storage pipe.

Preferably, a plurality of support frames are disposed between the first sleeve and the discharge tube, and the support frame is provided with a passage for electrically connecting the spaces on both sides, the first sleeve and the first sleeve a plurality of the support frames are disposed at intervals between the water-cooling tubes, and the plurality of the support frames are disposed between the second sleeve and the discharge tube, and between the second sleeve and the second water-cooled tube A plurality of said support frames are provided at intervals. By providing a support frame, the first sleeve, the second sleeve and the discharge tube are supported to ensure the relative position between the tubes, thereby improving the structural strength of the laser, and also ensuring the accuracy of the laser and improving the quality of the output laser beam; Importantly, due to the presence of the plurality of support frames, there is a multi-point multilayer between the discharge tube and the first sleeve and the second sleeve, and between the first sleeve, the second sleeve and the water-cooled tube. The support state enables the discharge tube, the first sleeve, the second sleeve and the water-cooled tube to be coordinated and supported with each other, which directly improves the structural strength of the discharge tube, the first sleeve, the second sleeve and the water-cooled tube.

Preferably, the first electrode and the second electrode have a hollow cylindrical shape. The first electrode and the second electrode are arranged in a hollow cylindrical shape to prevent the first electrode and the second electrode from blocking the reflection path of the laser beam in the discharge tube The diameter ensures that the laser is the output quality.

In summary, due to the adoption of the above technical solutions, the beneficial effects of the present invention are:

1. The carbon dioxide laser invented by the present method, the diameter of the middle portion of the gas storage pipe is larger than the diameter of the end portions of the conventional gas, that is, a structure with a thick intermediate portion and a thinner end, and the structure of the gas storage pipe is firstly improved. The strength improves the alignment precision of the output lens and the reflective lens, and improves the quality of the output laser beam of the carbon dioxide laser;

2. When the support member supports the laser, the two ends of the gas storage tube are suspended beyond the two support members, and the length of the suspended portion can be determined according to the actual size of the laser to ensure the balance of the force on the gas storage pipe. Limit the amount of bending of the gas storage pipe.

DRAWINGS

Figure 1 is a schematic view showing the structure of the present invention,

Marked in the figure: 1-air storage tube, 2-reflection window, 3-output window, 4-water-cooled tube, 5-discharge tube, 6-first electrode, 7-second electrode, 8-first closed end, 9- Second closed end, 10-electrode chamber, 11-first inlet pipe, 12-first outlet pipe, 13-second inlet pipe, 14-second outlet pipe, 15-first casing, 16-first partition , 17-second sleeve, 18-second partition, 19-support frame, 20-electrode column, 21-first support, 22-second support, 41-first water-cooled tube, 42-second water-cooled tube.

DETAILED DESCRIPTION OF THE INVENTION A carbon dioxide laser using the gas storage tube of the present invention

The present invention will be described in detail below with reference to the accompanying drawings.

The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

As shown in the figure, a straight cavity type ultra-long segment discharge carbon dioxide laser includes an air storage tube 1, a reflection window 2 and an output window 3, and the reflection window 2 and the output window 3 are respectively arranged in the gas storage tube 1. At both ends, the gas storage pipe 1 is sleeved with a water-cooling pipe 4, and the water-cooling pipe 4 is sleeved with a discharge pipe 5, A first electrode 6 is disposed at each end of the discharge tube 5, and a second electrode 7 is disposed at a middle portion of the discharge tube 5. The first electrode 6 and the second electrode 7 have opposite polarities, and the first electrode The 6 and second electrodes 7 are respectively connected to an external power source. When a voltage is applied to the first electrode 6 and the second electrode 7, since the polarities of the first electrode 6 and the second electrode 7 are opposite, the discharge between the first electrode 6 and the second electrode 7 is due to the two discharge tubes 5 The first electrode 6 is disposed at the end, and the second electrode 7 is disposed at the middle of the discharge tube 5. Therefore, the second electrode 7 and the first electrode 6 on both sides are simultaneously discharged, so that the output power of the laser is directly improved. Compared with the conventional laser, since the distance between the cathode electrode and the anode electrode is not increased, it is not necessary to increase the power supply voltage during use, and thus, the multiplication is not increased under the new requirement of the current power source. The output power of the laser; in addition, since the two first electrodes 6 and the second electrodes 7 are respectively connected to an external power source, the discharge between the second electrode 7 and the first electrodes 6 on both sides is performed independently, That is to say, when the first electrode 6 on one side fails to operate normally, the first electrode 6 on the other side and the second electrode 7 can still be normally discharged to make the laser work normally, and thus Improved laser At the same time, the laser of the present invention also has two kinds of output powers. When a smaller laser output power is required, only one of the first electrode 6 and the second electrode 7 needs to be normally discharged. When a large laser output power is required, the two first electrodes 6 are simultaneously discharged with the second electrode 7, which can be realized.

Preferably, the first electrode 6 is a cathode electrode and the second electrode 7 is an anode electrode. When the laser is operated, the anode electrode is at a high potential, and the cathode electrode is at a low potential. In the laser, the two first electrodes 6 are respectively adjacent to the reflection window 2 and the output window 3, and the second electrode 7 is located at the middle of the water-cooling tube 4, so The first electrode 6 is set as the cathode electrode, and the second electrode 7 is the anode electrode, so that the first electrode 6 is at a low potential, and the second electrode 7 is set to a high potential, so as to be close to the reflection window 2 and the output window 3 The position of the high potential is high, which avoids the danger of the first electrode 6 being discharged to the outside of the laser, and the second electrode 7 of the high potential is located at an intermediate portion farther from the end of the laser, so that the first electrode 6 and the second electrode 7 The discharge between the two is stable, which ensures the stability of the discharge when the laser is in operation. While ensuring the laser output quality of the laser, it also improves the safety performance of the laser.

Preferably, a portion of the discharge tube 5 corresponding to the second electrode 7 is disconnected, and a disconnected end thereof Extending to the inner wall of the water-cooling tube 4 and being closedly connected to the inner wall of the water-cooling tube 4, forming a first closed end 8 and a second closed end 9, dividing the water-cooled tube 4 into a first water-cooling tube 41 and a water-cooling tube 42 , between the first closed end 8 and the second closed end 9 forming an electrode chamber 10 accommodating the second electrode 7 , a distance between the first closed end 8 and the second closed end 9 Cooperating with the length of the second electrode 7. An electrode chamber 10 partitioning the water-cooling tube 4 is disposed in the middle of the discharge tube 5, and the second electrode 7 is disposed in the electrode chamber 10. First, it is ensured that the second electrode 7 can be safely and reliably mounted, and, more importantly, Since the inner diameter of the electrode chamber 10 is larger than the inner diameter of the discharge tube 5, after the second electrode 7 is disposed in the electrode chamber 10, the second electrode 7 can be prevented from blocking the path of the laser beam reflection in the discharge tube 5, and the output quality of the laser is ensured; Moreover, since the water-cooling pipe 4 is divided into the first water-cooling pipe 41 and the second water-cooling pipe 42, the first water-cooling pipe 41 and the second water-cooling pipe 42 form a separate cooling system, which can cool the discharge pipe 5 well; It is found in the actual production process that when the electrode temperature is too low, the discharge efficiency will be directly weakened, so in the present application, since the outer side of the electrode chamber 10 is not covered with the water-cooling tube 4, but only at both ends and the water-cooled tube 4, that is, after the second electrode 7 is disposed in the electrode chamber 10, the outer wall of the second electrode 7 is not surrounded by the water-cooling tube 4 to be cooled, but is cooled at a position near the water-cooling tube 4 at both ends. This cold Manner, while ensuring the second electrode 7 do not have an excessively high temperature, but also to avoid excessive cooling of the second electrode 7 is caused by the discharge efficiency is lowered, so further ensure the quality of the laser.

Preferably, the first water-cooling pipe 41 is provided with a first inlet pipe 11 and a first outlet pipe 12 communicating therewith, and the second water-cooling pipe 42 is provided with a second inlet pipe 13 and a communicating therewith. a second outlet pipe 14, a distance between the first inlet pipe 11 and the second outlet pipe 14 is 1/2 of a length of the water-cooling pipe 4, and the first inlet pipe 11 and the water-cooling pipe 4 are The distance of one end is 1/4 of the length of the water-cooled tube 4. Since the water-cooling pipe 4 is suspended inside the gas storage pipe 1, it is supported in the gas storage pipe 1 through the inlet pipe and the outlet pipe. Since both ends of the water-cooling pipe 4 are suspended, the first inlet pipe 11 and the second outlet pipe are passed. The distance between 14 is set to 1/2 of the water-cooled pipe 4, and the distance between the first inlet pipe 11 and the end of the water-cooling pipe 4 is 1/4 of the length of the water-cooled pipe 4, and the first inlet pipe 11 is used during use. When the water-cooling pipe 4 between the second outlet pipes 14 is bent by its own weight, the end portion of the water-cooling pipe 4 is suspended The minute also bends downward due to its own weight, and the first inlet pipe 11 and the second outlet pipe 14 that serve as the support also function as a lever, so the water is cooled between the first inlet pipe 11 and the second outlet pipe 14. The bending of the tube 4 and the bending of the suspended portion at the end of the water-cooled tube 4 cancel each other, reducing the amount of bending of the water-cooled tube 4 as a whole, ensuring the accuracy of the concentricity of the water-cooled tube 4, and ensuring the discharge tube disposed inside the water-cooled tube 4. The accuracy of the concentricity of 5, in turn, guarantees the output quality of the laser.

Preferably, a first sleeve 15 is disposed between the first water-cooling tube 41 and the discharge tube 5, one end of the first sleeve 15 is suspended, and the other end of the first sleeve 15 is The first water-cooling pipe 41 extends and is closedly connected to the inner wall of the first water-cooling pipe 41 to form a first partition 16 , and the first water inlet pipe 11 and the first water outlet pipe 12 are respectively located at two sides of the first partition 16 . The first water-cooling pipe 41 is partitioned into a two-layer structure by providing the first casing 15, and the cooling water enters the outer layer of the first water-cooling pipe 41 from the first inlet pipe 11, and the cooling water is discharged from the first partition 16 A suspended end of the sleeve 15 enters the inner layer of the first water-cooling tube 41, then flows along the outer wall of the discharge tube 5, and is then discharged from the first outlet pipe 12, such a double-layer structure, making contact with the discharge tube 5 The cooling water is in a flowing state, and the cooling efficiency of the discharge tube 5 is ensured.

Preferably, a second sleeve 17 is disposed between the second water-cooling tube 42 and the discharge tube 5, one end of the second sleeve 17 is suspended, and the other end of the second sleeve 17 is The second water-cooling tube 42 extends and is closedly connected to the inner wall of the second water-cooling tube 42 to form a second partition 18, and the second inlet pipe 13 and the second outlet pipe 14 are respectively located at two sides of the second partition 18. The second water-cooling pipe 42 is disposed in the same structure as the first water-cooling pipe 41. Firstly, the cooling effect on the discharge pipe 5 is ensured, and the manufacturing process is facilitated, the production process is simplified, the cost is saved, and more importantly, The first water-cooling tube 41 and the second water-cooling tube 42 have the same structure, so that the internal structure of the entire laser has good stability and improves the quality of the laser output laser beam.

Preferably, the first outlet pipe 12 and the second inlet pipe 13 communicate with each other. The laser of the invention has only one inlet pipe and one outlet pipe, which simplifies the accessory equipment outside the laser and facilitates its use.

Preferably, a first support 21 is disposed between the first water-cooling pipe 41 and the gas storage pipe 1, and the first support 21 and the first water inlet pipe 11 are located in the same radial direction of the gas storage pipe 1. The inventor found in the actual research and development work that when the laser is in working state, the temperature of each component inside it will increase to some extent, due to a certain degree of temperature difference between the components, and the thermal expansion coefficient between the components is inconsistent, The deformation amount of each component in the laser is inconsistent, causing the components to pull each other, so that the accuracy of the coaxiality of the two ends of the gas storage pipe 1 is lowered, thereby causing the alignment precision of the output window 2 and the reflection window 3 to be reduced, and finally The quality of the laser output laser beam is reduced. The inventors have found that the most influential one is the inlet pipe and the outlet pipe between the gas storage pipe 1 and the water-cooling pipe 4, since in the current laser, the water-cooling pipe 4 is supported inside the gas storage pipe 1 through the inlet pipe and the outlet pipe, When the laser is working, the portion of the inlet pipe and the outlet pipe between the gas storage pipe 1 and the water-cooling pipe 4 may pull the gas storage pipe 1 in the radial direction due to its own deformation, which seriously affects the coaxiality of the two ends of the gas storage pipe 1. Moreover, the laser of the present invention has a longer length, and the influence is more remarkable. Therefore, by the above structure, the first water outlet pipe 12 and the second water inlet pipe 13 are connected, so that the first water outlet pipe 12 and the second water inlet pipe are provided. 13 is not in contact with the gas storage pipe 1, but a first support 21 is disposed at a position opposite to the first inlet pipe 11, since the first support 21 and the first inlet pipe 11 are located in the same radial direction of the gas storage pipe 1, when the laser is operated, The portion of the first inlet pipe 11 between the gas storage pipe 1 and the water-cooling pipe 4 generates a certain amount of elongation, and the first support 21 also generates a certain amount of elongation due to its same along the gas storage pipe 1. Radially, so The partial elongations cancel each other out, and the deformation amount is also located symmetrically in the radial direction of the gas storage pipe 1, so that the concentricity of the two ends of the gas storage pipe 1 is not affected, thereby ensuring the accuracy of the laser and ensuring the laser output. The quality of the laser beam.

Preferably, a second support 22 is disposed between the second water-cooling pipe 14 and the gas storage pipe 1, and the second support 22 and the second water outlet pipe 14 are located in the same radial direction of the gas storage pipe 1.

Preferably, the central portion of the gas storage tube 1 is convexly outwardly to form a large diameter section of the gas storage tube 1 , and the gas storage tube 1 of the large diameter section is provided with an electrode column 20 connected to the second electrode 7 , the electrode The column 20 and the second outlet pipe 14 are equal in height in the radial direction of the gas storage pipe 1, and the second outlet pipe 14 and the first inlet pipe 11 are equal in height in the radial direction of the gas storage pipe 1. In the usual laser structure, the inlet pipe and The height of the outlet pipe exceeds the outer wall of the gas storage pipe 1 and becomes the control size of the entire laser installation process, that is, it is necessary to have enough space in the installation position to install the laser, and the entire space is determined by the inlet pipe and the outlet pipe. In the present invention, the gas storage pipe 1 of the large diameter section is disposed such that the electrode column 20 and the second outlet pipe 14 on the gas storage pipe 1 of the large diameter section are equal in the radial direction of the gas storage pipe 1, Firstly, the gas storage capacity of the gas storage pipe 1 is increased, the service life of the laser is increased, and the structural strength of the gas storage pipe 1 is also improved, the reliability of the laser product structure is ensured, and the installation space and installation of the laser are not increased. size.

Preferably, a plurality of support frames 19 are disposed between the first sleeve 15 and the discharge tube 5, and the support frame 19 is provided with a passage for electrically connecting the spaces on both sides, and the first sleeve 15 is A plurality of the support frames 19 are disposed at intervals from the first water-cooling tube 41. The second sleeves 18 and the discharge tube 5 are spaced apart from each other by a plurality of the support frames 19, and the second set A plurality of the support frames 19 are disposed between the tube 18 and the second water-cooling tube 42. By providing the support frame 19, the first sleeve 15, the second sleeve 18 and the discharge tube 5 are supported, the relative position between the tubes is ensured, the structural strength of the laser is improved, the precision of the laser is also ensured, and the output laser beam is improved. Quality; more importantly, due to the presence of the plurality of support frames 19, between the discharge tube 5 and the first sleeve 15 and the second sleeve 18, and the first sleeve 15, the second sleeve 18 and The water-cooled tubes 4 are in a multi-layered support state, so that the discharge tube 5, the first sleeve 15, the second sleeve 18 and the water-cooled tube 4 are coordinated and supported by each other, and the discharge tube 5 is directly improved. The structural strength of a sleeve 15, a second sleeve 18 and a water-cooled tube 4.

Preferably, the first electrode 6 and the second electrode 7 have a hollow cylindrical shape. The first electrode 6 and the second electrode 7 are arranged in a hollow cylindrical shape, and the first electrode 6 and the second electrode 7 are prevented from blocking the reflection path of the laser beam in the discharge tube 5, ensuring that the laser is of output quality.

Preferably, the diameter of the intermediate portion of the gas storage tube 1 is larger than the diameter of the end portions thereof. The diameter of the middle portion of the gas storage pipe 1 is larger than the diameter of the end portions, that is, a structure having a thick intermediate portion and a thinner end portion. First, the structural strength of the gas storage pipe 1 is improved. Since the laser of the present invention has a length far exceeding the present Pass A common laser, since the laser itself has an elongated structure, the length of the laser is excessively increased, and at the time of installation, the laser supports the entire laser by two supporting members spaced apart from each other outside the gas storage pipe 1, so that the length is increased. When the time is large, the winding of the gas storage pipe 1 is increased, and the structural strength of the gas storage pipe 1 is also lowered, so that the amount of bending on the gas storage pipe 1 is increased, the precision of the laser is sharply reduced, and the manufacturing, transportation and use are also caused. The inconvenience is caused, so the inventor designed the structure of the gas storage pipe 1 with the thin ends at both ends. When the supporting member supports the laser, the two ends of the gas storage pipe 1 are suspended beyond the two supporting members, and the suspended portions thereof are suspended. The length can be determined according to the actual size of the laser, and the balance of the force on the gas storage pipe 1 is ensured, and the bending amount of the gas storage pipe 1 is minimized.

Preferably, the diameter of the gas storage pipe 1 is gradually reduced from the middle to the both ends, and the diameters of the end portions are the smallest, and respectively correspond to the reflection window 2 and the output window 3. Since the laser is an elongated structure, especially for the laser of the present invention, the length is longer than that of the conventional laser. If the straight tubular air storage tube 1 adopting the conventional laser structure is installed, the length is long and the span is large. As a result, the winding is increased, so that it has a lower bending strength, and the coaxiality accuracy of the end portions of the gas storage pipe 1 is directly reduced. Therefore, in the present invention, the gas storage pipe 1 is set to have a diameter from the middle to the two. The end is gradually reduced in a stepwise manner, so that when the central large diameter section supports the laser, the entire gas storage tube 1 has a small degree of winding, which ensures the alignment precision of the output window 2 and the reflection window 3, thereby ensuring the laser output laser. The quality of the bundle.

Preferably, the gas storage pipe 1 includes a large diameter section located at a middle portion, a middle diameter section located at both sides of the large diameter section, and a small diameter section connected to the middle diameter section. The gas storage pipe 1 is set as a large diameter section, a medium diameter section and a small diameter section, so that the gas storage pipe 1 has a structure with a thin intermediate end, which improves the structural strength of the gas storage pipe 1, reduces the winding degree of the gas storage pipe, and ensures the laser output. The quality of the laser beam.

Any modifications, equivalent substitutions and improvements made within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims

A straight-cavity ultra-long gas storage pipe for a carbon dioxide laser, comprising a gas storage pipe, wherein the gas storage pipe is sleeved with a water-cooling pipe, and the water-cooling pipe is sleeved with a discharge pipe, and a diameter of a middle portion of the gas storage pipe is larger than The diameter of the ends at both ends.
The gas storage tube according to claim 1, wherein a smooth transitional connection between the portion having the largest diameter on the gas storage tube and the portion having the smallest diameter is provided.
The gas storage pipe according to claim 1, wherein the gas storage pipe is stepwisely reduced from a central portion toward a both ends, and a diameter of both end portions thereof is the smallest.
The gas storage pipe according to claim 3, wherein the gas storage pipe comprises a large diameter section located at a middle portion, a middle diameter section located at both sides of the large diameter section, and a small diameter section connected to the middle diameter section The large diameter section, the middle diameter section, and the small diameter section are disposed concentrically.
The gas storage pipe according to any one of claims 1 to 4, wherein a reflective window and an output window are respectively disposed at two ends of the gas storage pipe, and the first electrode is respectively disposed at two ends of the discharge pipe, A second electrode is disposed in a middle portion of the discharge tube, and the first electrode and the second electrode are opposite in polarity, and the first electrode and the second electrode are respectively connected to an external power source.
The gas storage tube according to claim 5, wherein a portion of the discharge tube corresponding to the second electrode is disconnected, a disconnecting end thereof extends toward an inner wall of the water-cooling tube, and is coupled to the water-cooling tube The inner closed connection forms a first closed end and a second closed end, and the water-cooled tube is divided into a first water-cooled tube and a second water-cooled tube, and the first closed end and the second closed end are formed to accommodate the first The electrode chamber of the two electrodes, the distance between the first closed end and the second closed end is matched with the length of the second electrode.
The gas storage pipe according to claim 6, wherein the first water-cooling pipe is provided with a first inlet pipe and a first outlet pipe connected thereto, and the second water-cooling pipe is provided with a communication pipe connected thereto. a second inlet pipe and a second outlet pipe, wherein the first outlet pipe communicates with the second inlet pipe.
The air storage tube according to claim 7, wherein a first sleeve is disposed between the first water-cooling tube and the discharge tube, and one end of the first sleeve is suspended, the first sleeve The other end of the first water-cooling pipe extends to the first water-cooling pipe and is closedly connected with the inner wall of the first water-cooling pipe to form a first partition, and the first water inlet pipe and the first water outlet pipe are respectively located at two sides of the first partition. Between the second water-cooling tube and the discharge tube, a second sleeve is disposed, one end of the second sleeve is suspended, and the other end of the second sleeve extends toward the second water-cooling tube and The inner wall of the second water-cooling pipe is closedly connected to form a second partition, and the second inlet pipe and the second outlet pipe are respectively located on two sides of the second partition.
The gas storage pipe according to claim 7, wherein a first support is disposed between the first water-cooling pipe and the gas storage pipe, and the first support and the first water inlet pipe are located at the same diameter along the gas storage pipe. Upward, a second support is disposed between the second water-cooling pipe and the gas storage pipe, and the second support and the second water outlet pipe are located in the same radial direction along the gas storage pipe.
The air storage tube according to claim 8, wherein a plurality of support frames are disposed between the first sleeve and the discharge tube, and the support frame is provided with a passage to open spaces on both sides. a plurality of the support frames are disposed between the first sleeve and the first water-cooling tube, and a plurality of the support racks are disposed at intervals between the second sleeve and the discharge tube, and the second A plurality of the support frames are disposed between the sleeve and the second water-cooling tube.