WO2016035628A1 - Vibration device - Google Patents

Vibration device Download PDF

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Publication number
WO2016035628A1
WO2016035628A1 PCT/JP2015/073949 JP2015073949W WO2016035628A1 WO 2016035628 A1 WO2016035628 A1 WO 2016035628A1 JP 2015073949 W JP2015073949 W JP 2015073949W WO 2016035628 A1 WO2016035628 A1 WO 2016035628A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric ceramic
diaphragm
vibration
piezoelectric
presentation device
Prior art date
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PCT/JP2015/073949
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French (fr)
Japanese (ja)
Inventor
橋本順一
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株式会社村田製作所
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Priority to JP2016546576A priority Critical patent/JP6187703B2/en
Publication of WO2016035628A1 publication Critical patent/WO2016035628A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0487Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser
    • G06F3/0488Interaction techniques based on graphical user interfaces [GUI] using specific features provided by the input device, e.g. functions controlled by the rotation of a mouse with dual sensing arrangements, or of the nature of the input device, e.g. tap gestures based on pressure sensed by a digitiser using a touch-screen or digitiser, e.g. input of commands through traced gestures

Definitions

  • the present invention relates to a vibration device that generates vibration.
  • Patent Document 1 describes a configuration of a tactile sensation presentation device in which a piezoelectric bimorph element having a configuration in which piezoelectric ceramics and a rigid plate are bonded together is connected to a part of a touch sensor panel.
  • a piezoelectric bimorph element having a configuration in which piezoelectric ceramics and a rigid plate are bonded together is connected to a part of a touch sensor panel.
  • an AC signal is applied to the piezoelectric bimorph element, and the piezoelectric bimorph element is vibrated so as to bend in the thickness direction. Then, by transmitting this vibration to the user's finger via the touch sensor panel, tactile feedback is given to the user.
  • the touch sensor panel itself is vibrated greatly by adopting a bimorph structure or unimorph structure in which piezoelectric ceramics are directly attached to the touch sensor panel.
  • piezoelectric ceramics it has been difficult to construct a piezoelectric ceramic with a large area and a thin area with the same area as the touch sensor panel. For this reason, only piezoelectric ceramics having a smaller area than the touch sensor panel can be attached to the touch sensor panel, and it is difficult to vibrate the portion of the touch sensor panel where the piezoelectric ceramics are not attached.
  • the tactile sense presentation device needs to have a complicated configuration. Furthermore, since the piezoelectric ceramic is brittle and easily damaged by an impact load, it is difficult to prevent the piezoelectric ceramic from being damaged in the configuration in which the piezoelectric ceramic is directly attached to the touch sensor panel.
  • an object of the present invention is to provide a vibration device that can generate a sufficiently large vibration, is not easily damaged, and has a simple configuration.
  • the vibration device is connected to the vibration plate, a connection film in which an end portion is connected to the vibration plate, and the vibration plate is in a state in which bending stress is generated, and the vibration plate is connected to the vibration plate through the connection film
  • a piezoelectric ceramic that vibrates along a direction in which the connection film receives a tensile force from the diaphragm.
  • the vibration of the diaphragm can be amplified by transmitting the expansion and contraction of the piezoelectric ceramics to both ends of the diaphragm to change the bending stress, and the diaphragm can be vibrated over a wide area.
  • Piezoelectric ceramics have a large piezoelectric constant, and even if the piezoelectric ceramic is configured with a smaller area than the diaphragm, the diaphragm can be vibrated with a sufficient amount of vibration. Therefore, when this vibration device is used as a tactile sensation presentation device, a sufficiently large tactile feedback can be more reliably given to a user who touches the diaphragm with a finger or the like.
  • the piezoelectric ceramic has a plate shape having one main surface facing the vibration plate and the other main surface facing the one main surface.
  • one main surface of the piezoelectric ceramic can be covered with a diaphragm to protect it from contact with the outside, and the piezoelectric ceramic can be made difficult to break.
  • the vibration device further includes a protective plate facing the surface of the piezoelectric ceramic in a direction orthogonal to a direction in which the connection film receives a tensile force with a slight space therebetween.
  • the vibration device may include a first protective plate facing the main surface of the piezoelectric ceramic with a slight space therebetween.
  • the vibration device includes a second protective plate opposed to the other main surface of the piezoelectric ceramic with a slight space therebetween.
  • the protective plate includes a first connecting portion that connects to a central portion of the piezoelectric ceramic in a direction in which the connecting film receives a tensile force.
  • the protective plate includes a second connecting portion that is connected in the vicinity of a place that becomes a vibration node of the diaphragm.
  • the piezoelectric ceramics connected to the diaphragm via the connection film by vibrating the piezoelectric ceramics connected to the diaphragm via the connection film, a sufficiently large vibration can be generated, and the piezoelectric ceramics can be hardly damaged.
  • 1 is an external perspective view of a vibration device according to a first embodiment. It is a side view of the vibration device according to the first embodiment. It is an external appearance perspective view of the vibration apparatus which concerns on 2nd Embodiment. It is a side view of the vibration apparatus which concerns on 2nd Embodiment. It is a side view of the vibration device concerning the 1st modification. It is a side view of the vibration device concerning the 2nd modification. It is a side view of the vibration device concerning the 3rd modification.
  • FIG. 1 is an external perspective view of the tactile sense presentation device 10.
  • FIG. 2 is a side view of the tactile sense presentation device 10.
  • the curved state of the diaphragm is exaggerated for the sake of explanation.
  • the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .
  • the tactile sense presentation device 10 includes a piezoelectric ceramic 11, connection films 12 and 13, protective plates 14 and 15, connecting portions 16 and 17, a vibration plate 18, a touch panel 19, and a control unit 21 (see FIG. 2). And a drive unit 22 (see FIG. 2).
  • the tactile sense presentation device 10 is configured as a touch-type keyboard.
  • the tactile sense presentation device 10 is configured to be thin in the thickness direction and to be a rectangle having a short side direction and a long side direction when viewed in plan from the thickness direction.
  • the tactile sense presentation apparatus 10 is comprised so that the installation surface of the tactile sense presentation apparatus 10 may be contacted by the both ends of a transversal direction.
  • the piezoelectric ceramic 11 has a flat plate shape and has a piezoelectric property that generates vibration in the in-plane direction.
  • the piezoelectric ceramic 11 is caused to vibrate at least in the short direction of the tactile sense presentation device 10.
  • electrodes formed of a conductive material are provided on both main surfaces of the piezoelectric ceramic 11 so that a driving voltage can be applied to the piezoelectric ceramic 11. ing.
  • the piezoelectric ceramic 11 has a larger piezoelectric constant than other piezoelectric materials such as an organic piezoelectric film, and a sufficient amount of vibration can be obtained even if the piezoelectric ceramic 11 has a smaller area than the diaphragm 18.
  • the piezoelectric ceramics 11 may be configured in a rectangular shape having the same direction as the tactile sense presentation device 10 in the short direction, the long direction, and the thickness direction, or in the form of a strip having the short direction in the tactile sense presentation device 10 as the long direction.
  • a plurality of the tactile sense presentation devices 10 may be arranged side by side in the longitudinal direction.
  • a protective plate 14 is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 11, and a protective plate 15 is provided on the one main surface (top surface) side of the piezoelectric ceramic 11.
  • the protection plates 14 and 15 each have a rectangular flat plate shape in plan view, and have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. And the protection plates 14 and 15 are made to oppose the piezoelectric ceramic 11 in the thickness direction of the tactile sense presentation apparatus 10 so that a space
  • one main surface (top surface) of the piezoelectric ceramic 11 is protected by the protection plate 14, and the other main surface (bottom surface) of the piezoelectric ceramic 11 is protected by the protection plate 15. Therefore, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside or the impact load from acting indirectly through the diaphragm 18.
  • a connecting portion 16 is provided between the protective plate 14 and the piezoelectric ceramic 11
  • a connecting portion 17 is provided between the protective plate 15 and the piezoelectric ceramic 11.
  • the connecting portions 16 and 17 are elongated shapes extending in the longitudinal direction in plan view, or a plurality of columnar members arranged in the longitudinal direction, and the space between the protective plates 14 and 15 and the piezoelectric ceramics 11. They are connected to each other in the center in the short direction. In this way, by connecting the connecting portions 16 and 17 to the central portion in the short direction of the piezoelectric ceramic 11, the protection plates 14 and 15 are connected to the piezoelectric ceramic 11 without substantially inhibiting vibration of the piezoelectric ceramic 11. be able to.
  • connection films 12 and 13 each have a flat film shape.
  • the connection films 12 and 13 have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction, respectively.
  • These connection films 12 and 13 are made of, for example, a resin film made of PET or the like, or a metal foil such as stainless steel.
  • connection films 12 and 13 are arranged on one main surface (top surface) side of the piezoelectric ceramic 11.
  • the connection film 12 has one end (front side) in the short direction attached to the other (back side) end of the piezoelectric ceramic 11 by a predetermined length.
  • the connection film 13 is attached to one (front side) end of the piezoelectric ceramic 11 by a predetermined length on the other side (back side) in the short direction.
  • connection films 12 and 13 are made of metal foil
  • the electrodes of the piezoelectric ceramic 11 and the connection films 12 and 13 may be set to be electrically insulated.
  • at least one of the connection films 12 and 13 made of metal foil may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11.
  • the connection film 12 and the connection film 13 made of metal foil may be connected to different main surfaces of the piezoelectric ceramic 11, and each may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11.
  • the connection film 12 or the connection film 13 is used as an electrode for applying a driving voltage
  • the diaphragm 18 is made of a non-conductive material or the connection film 12 is made of the diaphragm 18 made of a conductive material.
  • 13 may be bonded with a non-conductive adhesive so that the connection film 12 and the connection film 13 are not directly connected to each other.
  • the diaphragm 18 is provided on one main surface (top surface) side of the piezoelectric ceramic 11 and the connection films 12 and 13.
  • the diaphragm 18 has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction.
  • the diaphragm 18 can be made of, for example, acrylic resin PMMA.
  • the diaphragm 18 can also be comprised with other materials, such as a metal plate, PET, a polycarbonate (PC), a glass epoxy resin, glass, for example.
  • the diaphragm 18 is bent in such a manner that the central portion in the short direction is convex on the one main surface (top surface) side and concave on the other main surface (bottom surface) side.
  • the piezoelectric ceramics 11 are connected via connecting films 12 and 13 between both ends in the short direction in FIG.
  • the diaphragm 18 has one end (front side) of the connection film 13 pasted to one end (front side) in the short direction and the other end (rear side) in the short direction.
  • the other (back side) end of the connection film 12 is pasted by a predetermined length. Accordingly, the diaphragm 18 is held in a state where the diaphragm 18 is bent in a bow shape due to a bending stress from the piezoelectric ceramic 11 and the connection films 12 and 13.
  • the diaphragm 18 has a central portion in the short direction that is lifted from the installation surface, and a lower space is provided between the central portion in the short direction and the installation surface.
  • the piezoelectric ceramic 11 is supported in a hollow state by the connection films 12 and 13 in this lower space. Also by this, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside and the impact load from acting indirectly through the diaphragm 18. Therefore, it is possible to make it difficult to damage the piezoelectric ceramic 11.
  • a touch panel 19 is pasted on one main surface (top surface) of the diaphragm 18.
  • the touch panel 19 has a rectangular flat plate shape in plan view, and has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction.
  • the touch panel 19 is exposed on one main surface (top surface) of the tactile presentation device 10, and a plurality of touch detection units 20 are attached to the one main surface (top surface).
  • Each of the plurality of touch detection units 20 is arranged at a position corresponding to the key arrangement, and has a function of detecting a user's touch operation.
  • Each touch detection unit 20 can be configured using various methods such as a membrane method, a capacitance method, and a piezoelectric film method.
  • the control unit 21 is electrically connected to each of the plurality of touch detection units 20.
  • the drive unit 22 is electrically connected to the piezoelectric ceramic 11.
  • the control unit 21 and the drive unit 22 are also electrically connected.
  • the control unit 21 detects that the user's finger or the like is in contact with the touch detection unit 20, the control unit 21 outputs a detection signal to the drive unit 22.
  • the drive unit 22 applies a drive signal having a frequency near the structural resonance frequency of the diaphragm 18 to the piezoelectric ceramic 11.
  • the frequency of the drive signal may not be near the structural resonance frequency of the diaphragm 18.
  • the piezoelectric ceramic 11 is vibrated along the short direction of the tactile presentation device 10.
  • the connection films 12 and 13 are pulled toward the vibration plate 18 due to the bending stress of the vibration plate 18. Move in the direction.
  • the connection films 12 and 13 move so as to be attracted to the piezoelectric ceramic 11.
  • vibration in the thickness direction of the diaphragm 18 can be transmitted to the finger of the user who touches the touch panel 19 to give tactile feedback to the user. Since the vibration of the piezoelectric ceramic 11 having a large piezoelectric constant is amplified and transmitted to the center of the diaphragm 18 and the diaphragm 18 vibrates in the thickness direction over a wide range, a large tactile feedback can be more reliably given to the user. it can. Then, the piezoelectric ceramic 11 is supported in a hollow space in the lower space of the diaphragm 18, and the protective plates 14 and 15 that are opposed to each other are provided on both main surfaces of the piezoelectric ceramic 11. It can be protected and made difficult to break.
  • FIG. 3 is an external perspective view of the tactile sense presentation device 30.
  • FIG. 4 is a side view of the tactile sense presentation device 30.
  • the curved state of the diaphragm is exaggerated for the sake of explanation. Actually, the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .
  • the tactile sense presentation device 30 includes a piezoelectric ceramic 31, connection films 32 and 33, a protection plate 34, a coupling unit 40, a vibration plate 35, a touch panel 36, a control unit 38 (see FIG. 4), and a drive unit 39. (See FIG. 4).
  • the tactile sense presentation device 30 here is also configured as a touch-type keyboard.
  • the tactile sense presentation device 30 is configured to contact the installation surface of the tactile sense presentation device 30 with a protective plate 34 having a configuration different from that of the first embodiment.
  • the piezoelectric ceramic 31 has a flat plate shape and vibrates at least in the short direction of the tactile sense presentation device 30.
  • the connection film 32 has one end (front side) in the lateral direction attached to the other end (back side) of the main surface (top surface) side of the piezoelectric ceramic 31 by a predetermined length.
  • the connection film 33 is attached to one (front side) end of the other main surface (bottom surface) side of the piezoelectric ceramic 31 by a predetermined length on the other (back side) end in the short side direction.
  • each of the connection films 32 and 33 is composed of one unit film that does not have piezoelectricity.
  • each of the connection films 32 and 33 is composed of two unit films that are bonded together. You may connect with the piezoelectric ceramic 11 so that both the main surfaces of the ceramic 11 may be inserted
  • the diaphragm 35 is provided on one main surface (top surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the connection films 32 and 33 are interposed between both ends of the other main surface (bottom surface) in the short direction.
  • the piezoelectric ceramics 31 are connected.
  • the protective plate 34 has a flat plate shape, is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the thickness direction of the tactile sense presentation device 30 is set so as to be spaced from the piezoelectric ceramic 31. It faces the piezoelectric ceramic 31.
  • the protection plate 34 has a flat plate shape and is arranged on the other main surface (bottom surface) side of the piezoelectric ceramic 31 so as to be spaced from the piezoelectric ceramic 31.
  • the connecting portion 40 is connected at one end (upper end) to a position where the vibration plate 35 becomes a bending vibration node (near both ends in the short direction of the vibrating plate 35), and is connected to the protection plate 34 at the other end (lower end). ). Thereby, the connecting portion 40 connects the vibration plate 35 and the protection plate 34.
  • a touch panel 36 is pasted on one main surface (top surface) of the diaphragm 35.
  • the touch panel 36 includes a plurality of touch detection units 37 on one main surface (top surface).
  • the control unit 38 is electrically connected to each of the plurality of touch detection units 37.
  • the drive unit 39 is electrically connected to the piezoelectric ceramic 31.
  • the control unit 38 and the drive unit 39 are also electrically connected.
  • this tactile sense presentation device 30 when a user's finger or the like contacts the touch detection unit 37, a drive signal is applied to the piezoelectric ceramic 31. Then, as illustrated by an arrow in FIG. 4, vibration occurs along the short direction of the tactile presentation device 30 in the piezoelectric ceramic 31. As a result, force acts on both end portions (connecting portions) of the diaphragm 35 in the short direction via the connection films 32 and 33, and the bending stress of the diaphragm 35 varies. For this reason, the amount of bending of the diaphragm 35 changes, and the diaphragm 35 vibrates in the thickness direction over a wide range.
  • this tactile sensation presentation apparatus 30 can reliably give a large tactile feedback to the user by transmitting vibration in the thickness direction of the diaphragm 35 to the finger of the user who touches the touch panel 36.
  • the piezoelectric ceramic 31 is supported in a hollow space in the hollow space between the vibration plate 35 and the protective plate 34, and the main surfaces of the piezoelectric ceramic 31 are spaced from each other. Since the protective plate 34 and the vibration plate 35 face each other in this state, the piezoelectric ceramic 31 is more protected from an impact load than the first embodiment, and can be further prevented from being damaged.
  • the vibration device of the present invention can also be configured as shown in this embodiment.
  • connection films 32 and 33 are formed of a flexible printed circuit board
  • electrode patterns to be connected to the piezoelectric ceramics 31 can be formed on the connection films 32 and 33, and the circuit arrangement positions of the control unit 38 and the drive unit 39, and The degree of freedom for the connection structure with the piezoelectric ceramic 31 is improved.
  • circuits of the control unit 38 and the driving unit 39 are formed on the flexible printed circuit board that constitutes the connection films 32 and 33, and space saving of the tactile sense presentation device 30 can be achieved.
  • FIG. 5 is a side view of the tactile sense presentation device 40.
  • the tactile sensation presentation device 40 has almost the same configuration as that of the first embodiment, but omits a protective plate that covers the one main surface (top surface) side of the piezoelectric ceramic 11 provided in the first embodiment. It was the composition that was. Even if the tactile sense presentation device 40 is configured as described above, the one main surface (top surface) side of the piezoelectric ceramic 11 is covered with the diaphragm 18, so that one main surface (top surface) of the piezoelectric ceramic 11 is externally connected to the outside. It is possible to prevent the impact load from acting directly. Therefore, the piezoelectric ceramic 11 can be hardly damaged.
  • FIG. 6 is a side view of the tactile sense presentation device 50.
  • the tactile sense presentation device 50 has a configuration almost similar to the configuration according to the first embodiment, but includes a single connection film 51, and both ends of the connection film 51 are coupled to both ends of the diaphragm 18. The entire surface of the piezoelectric ceramic 11 is attached to the central portion of the connection film 51 in the short direction.
  • the tactile sense presentation device 50 is configured as described above, the piezoelectric ceramic 11 and the connection film 51 are deformed into an arcuate shape due to the restraint of the piezoelectric ceramic 11.
  • both ends of the diaphragm 18 can be moved similarly to the above-described embodiment, and tactile feedback can be given to the user.
  • one main surface (top surface) of the piezoelectric ceramic 11 is covered with the diaphragm 18 and the connection film 51, an impact load acts directly on the one main surface (top surface) of the piezoelectric ceramic 11 from the outside. Can be prevented. Therefore, the piezoelectric ceramic 11 can be hardly damaged.
  • FIG. 7 is a side view of the tactile sense presentation device 60.
  • the tactile sensation presentation device 60 has a configuration that is almost the same as the configuration according to the first embodiment, except that the two protective plates that cover both sides of the piezoelectric ceramic 11 provided in the first embodiment are omitted. Even if the tactile sense presentation device 60 is configured as described above, the piezoelectric ceramic 11 is covered with the vibration plate 18 on one side (top surface) side of the piezoelectric ceramic 11 and is supported in a hollow state. It can be made difficult to break.
  • the vibration device according to the present invention can be implemented.
  • the vibration apparatus of this invention can also be implemented with other various forms.
  • the diaphragm may be formed in a curved shape in advance so as to be flat as a whole in a state where it is connected to the connection film and the piezoelectric ceramic.
  • the specific configuration of the vibration device is not limited to the keyboard, and may be other devices that transmit tactile feedback to the touch operation, such as a display device having a touch panel and an operation panel having a touch sensor.
  • the above-mentioned diaphragm can also be used as a vibrating member such as a speaker, and the present invention can also be implemented in other electronic devices that generate vibration such as an acoustic device.

Abstract

Provided is a vibration device that can generate a sufficient magnitude of vibration, is less susceptible to damage, and has a simple configuration. A vibration device (10) includes: a vibration plate (18); connection films (12, 13) that each have an end thereof coupled to the vibration plate (18) so as to generate bending stress in the vibration plate (18); and a piezoceramic (11) that is coupled to the vibration plate (18) via the connection films (12, 13), and that vibrates along a direction in which the connection films (12, 13) receive tensile stress from the vibration plate (18).

Description

振動装置Vibration device
 本発明は、振動を生じる振動装置に関する。 The present invention relates to a vibration device that generates vibration.
 近年、圧電材料を利用して振動を生じる各種の振動装置が開発されている。例えば、タッチセンサ式のキーボード等において、利用者がキーをタッチした時に振動を伝えることで触覚フィードバックを与える触覚提示装置が提案されている。 In recent years, various vibration devices that generate vibrations using piezoelectric materials have been developed. For example, in a touch sensor type keyboard or the like, a tactile presentation device that provides tactile feedback by transmitting vibrations when a user touches a key has been proposed.
 例えば、特許文献1には、圧電セラミックスと剛体板とを貼り合わせた構成の圧電バイモルフ素子をタッチセンサパネルの一部に連結した触覚提示装置の構成が記載されている。特許文献1の構成では、利用者がタッチセンサパネルに触れた場合に圧電バイモルフ素子に交流信号を印加し、圧電バイモルフ素子を厚み方向に撓むように振動させる。そして、この振動をタッチセンサパネルを介してユーザの指に伝えることで、ユーザに触覚フィードバックを与える。 For example, Patent Document 1 describes a configuration of a tactile sensation presentation device in which a piezoelectric bimorph element having a configuration in which piezoelectric ceramics and a rigid plate are bonded together is connected to a part of a touch sensor panel. In the configuration of Patent Literature 1, when a user touches the touch sensor panel, an AC signal is applied to the piezoelectric bimorph element, and the piezoelectric bimorph element is vibrated so as to bend in the thickness direction. Then, by transmitting this vibration to the user's finger via the touch sensor panel, tactile feedback is given to the user.
特開2005-303937号公報JP 2005-303937 A
 特許文献1に記載の触覚提示装置では、圧電バイモルフ素子のサイズや振動量が小さく、また、圧電バイモルフ素子の振動がタッチセンサパネルを介して利用者に伝わるため、利用者に与える触覚フィードバックをあまり大きくすることができなかった。 In the tactile sense presentation device described in Patent Document 1, the size and vibration amount of the piezoelectric bimorph element are small, and the vibration of the piezoelectric bimorph element is transmitted to the user via the touch sensor panel. I couldn't make it bigger.
 そこで、タッチセンサパネルに対して圧電セラミックスを直接貼り付けたバイモルフ構造やユニモルフ構造とすることで、タッチセンサパネル自身を大きく振動させることが考えられる。しかしながら、圧電セラミックスは、タッチセンサパネルと同程度の面積で大判、かつ、薄手に構成することが困難であった。このため、タッチセンサパネルには、タッチセンサパネルよりも小さな面積の圧電セラミックスしか貼り付けることができず、タッチセンサパネルの圧電セラミックスが貼り付けられていない部分を振動させることが困難であった。したがって、タッチセンサパネルを広い面積で振動させるためには、タッチセンサパネルの略全面に多数の圧電セラミックスを貼り付けて振動させる必要があり、触覚提示装置を複雑な構成にする必要があった。更には、圧電セラミックスは脆く衝撃荷重によって簡単に損壊してしまうために、タッチセンサパネルに対して圧電セラミックスを直接貼り付ける構成では、圧電セラミックスの損壊を防ぐことが難しかった。 Therefore, it is conceivable that the touch sensor panel itself is vibrated greatly by adopting a bimorph structure or unimorph structure in which piezoelectric ceramics are directly attached to the touch sensor panel. However, it has been difficult to construct a piezoelectric ceramic with a large area and a thin area with the same area as the touch sensor panel. For this reason, only piezoelectric ceramics having a smaller area than the touch sensor panel can be attached to the touch sensor panel, and it is difficult to vibrate the portion of the touch sensor panel where the piezoelectric ceramics are not attached. Therefore, in order to vibrate the touch sensor panel over a wide area, it is necessary to attach a large number of piezoelectric ceramics to the substantially entire surface of the touch sensor panel and vibrate, and the tactile sense presentation device needs to have a complicated configuration. Furthermore, since the piezoelectric ceramic is brittle and easily damaged by an impact load, it is difficult to prevent the piezoelectric ceramic from being damaged in the configuration in which the piezoelectric ceramic is directly attached to the touch sensor panel.
 また、圧電セラミックスに替えて、タッチセンサパネルと同程度の面積で大判、かつ、薄手に構成することが可能な有機圧電フィルムを用いることも考えられる。しかしながら、有機圧電フィルムは圧電セラミックスと比べて圧電定数が大幅に小さいために、有機圧電フィルムをタッチセンサパネルに直接貼り付けてバイモルフ構造やユニモルフ構造としても、利用者に与える触覚フィードバックを大きくすることが難しかった。 Also, instead of piezoelectric ceramics, it is also possible to use an organic piezoelectric film that can be configured to be large and thin with the same area as the touch sensor panel. However, since the piezoelectric constant of organic piezoelectric film is significantly smaller than that of piezoelectric ceramics, the tactile feedback given to the user should be increased even if the organic piezoelectric film is directly attached to the touch sensor panel to form a bimorph structure or a unimorph structure. It was difficult.
 そこで本発明の目的は、十分な大きさの振動を生じることができ、損壊し難く、簡易な構成の振動装置を提供することにある。 Therefore, an object of the present invention is to provide a vibration device that can generate a sufficiently large vibration, is not easily damaged, and has a simple configuration.
 この発明の振動装置は、振動板と、前記振動板に端部を連結して、前記振動板を曲げ応力が生じる状態にした接続フィルムと、前記接続フィルムを介して前記振動板に連結した、前記振動板から前記接続フィルムが引っ張り力を受ける方向に沿って振動する圧電セラミックスと、を備える。 The vibration device according to the present invention is connected to the vibration plate, a connection film in which an end portion is connected to the vibration plate, and the vibration plate is in a state in which bending stress is generated, and the vibration plate is connected to the vibration plate through the connection film A piezoelectric ceramic that vibrates along a direction in which the connection film receives a tensile force from the diaphragm.
 この構成では、圧電セラミックスの伸縮を振動板の両端に伝えて曲げ応力を変化させることにより、振動板の振動を増幅することができ、その上、振動板を広い面積で振動させられる。また、圧電セラミックスは圧電定数が大きく、振動板よりも小さな面積で構成しても、振動板を十分な振動量で振動させることができる。したがって、この振動装置を触覚提示装置として用いる場合には、振動板に指等を接触させる利用者に、十分な大きさの触覚フィードバックをより確実に与えることができる。 In this configuration, the vibration of the diaphragm can be amplified by transmitting the expansion and contraction of the piezoelectric ceramics to both ends of the diaphragm to change the bending stress, and the diaphragm can be vibrated over a wide area. Piezoelectric ceramics have a large piezoelectric constant, and even if the piezoelectric ceramic is configured with a smaller area than the diaphragm, the diaphragm can be vibrated with a sufficient amount of vibration. Therefore, when this vibration device is used as a tactile sensation presentation device, a sufficiently large tactile feedback can be more reliably given to a user who touches the diaphragm with a finger or the like.
 また、前記圧電セラミックスは、前記振動板に対向する一方主面と、前記一方主面に対向する他方主面とを有する板状であることが好ましい。この構成により、圧電セラミックスの一方主面を振動板で覆って外部との接触から保護することができ、圧電セラミックスを損壊し難くすることができる。 Further, it is preferable that the piezoelectric ceramic has a plate shape having one main surface facing the vibration plate and the other main surface facing the one main surface. With this configuration, one main surface of the piezoelectric ceramic can be covered with a diaphragm to protect it from contact with the outside, and the piezoelectric ceramic can be made difficult to break.
 また、前記振動装置は、前記接続フィルムが引っ張り力を受ける方向に対して直交する方向での前記圧電セラミックスの表面に、わずかな間隔を空けた状態で対向する保護板を更に備えることが好ましい。この構成により、圧電セラミックスを外部や振動板との接触から保護することができ、圧電セラミックスをさらに損壊し難くすることができる。 Further, it is preferable that the vibration device further includes a protective plate facing the surface of the piezoelectric ceramic in a direction orthogonal to a direction in which the connection film receives a tensile force with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the outside or the diaphragm, and the piezoelectric ceramic can be further prevented from being damaged.
 また、前記振動装置は、前記圧電セラミックスの一方主面にわずかな間隔を空けた状態で対向する第1の保護板を備えても良い。この構成により、圧電セラミックスを振動板との接触から保護することができ、圧電セラミックスをさらに損壊し難くすることができる。 Further, the vibration device may include a first protective plate facing the main surface of the piezoelectric ceramic with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the diaphragm, and the piezoelectric ceramic can be further prevented from being damaged.
 同時に、前記振動装置は、前記圧電セラミックスの他方主面にわずかな間隔を空けた状態で対向する第2の保護板を備えることが好ましい。この構成により、圧電セラミックスを外部との接触から保護することができ、圧電セラミックスをさらに損壊し難くすることができる。 At the same time, it is preferable that the vibration device includes a second protective plate opposed to the other main surface of the piezoelectric ceramic with a slight space therebetween. With this configuration, the piezoelectric ceramic can be protected from contact with the outside, and the piezoelectric ceramic can be further prevented from being damaged.
 また、前記保護板は、前記接続フィルムが引っ張り力を受ける方向での前記圧電セラミックスの中央部に連結する第1の連結部を備えることが好ましい。この構成により、圧電セラミックスの伸縮を第1の連結部が阻害することを防ぎながら、保護板を圧電セラミックスに連結することができる。 Further, it is preferable that the protective plate includes a first connecting portion that connects to a central portion of the piezoelectric ceramic in a direction in which the connecting film receives a tensile force. With this configuration, it is possible to connect the protective plate to the piezoelectric ceramic while preventing the first connecting portion from inhibiting the expansion and contraction of the piezoelectric ceramic.
 また、前記保護板は、前記振動板の振動の節となる場所付近に連結する第2の連結部を備えることが好ましい。この構成により、振動板の屈曲振動を第2の連結部が阻害することを防ぎながら、保護板を振動板に連結することができる。 Further, it is preferable that the protective plate includes a second connecting portion that is connected in the vicinity of a place that becomes a vibration node of the diaphragm. With this configuration, it is possible to connect the protective plate to the diaphragm while preventing the second coupling portion from inhibiting the bending vibration of the diaphragm.
 本発明によれば、接続フィルムを介して振動板に連結した圧電セラミックスを振動させることで、十分な大きさの振動を生じることができ、また、圧電セラミックスを損壊し難くすることができる。 According to the present invention, by vibrating the piezoelectric ceramics connected to the diaphragm via the connection film, a sufficiently large vibration can be generated, and the piezoelectric ceramics can be hardly damaged.
第1の実施形態に係る振動装置の外観斜視図である。1 is an external perspective view of a vibration device according to a first embodiment. 第1の実施形態に係る振動装置の側面図である。It is a side view of the vibration device according to the first embodiment. 第2の実施形態に係る振動装置の外観斜視図である。It is an external appearance perspective view of the vibration apparatus which concerns on 2nd Embodiment. 第2の実施形態に係る振動装置の側面図である。It is a side view of the vibration apparatus which concerns on 2nd Embodiment. 第1の変形例に係る振動装置の側面図である。It is a side view of the vibration device concerning the 1st modification. 第2の変形例に係る振動装置の側面図である。It is a side view of the vibration device concerning the 2nd modification. 第3の変形例に係る振動装置の側面図である。It is a side view of the vibration device concerning the 3rd modification.
 以下、本発明の振動装置を、利用者に触覚フィードバックとして振動を伝える触覚提示装置として構成する場合の実施形態について説明する。なお、本発明の振動装置は、圧電セラミックスにより振動を生じる構成であればよく、触覚提示装置に限られるものではない。まず、第1の実施形態に係る触覚提示装置10について説明する。図1は触覚提示装置10の外観斜視図である。図2は触覚提示装置10の側面図である。なお、図2中では説明のために振動板の湾曲状態を誇張して示しており、実際には、振動板は圧電セラミックスと略平行になるように微小な撓み量で保持されることになる。 Hereinafter, an embodiment in which the vibration device of the present invention is configured as a haptic presentation device that transmits vibration as haptic feedback to a user will be described. Note that the vibration device of the present invention is not limited to a tactile sense presentation device as long as it is configured to generate vibration by piezoelectric ceramics. First, the tactile sense presentation device 10 according to the first embodiment will be described. FIG. 1 is an external perspective view of the tactile sense presentation device 10. FIG. 2 is a side view of the tactile sense presentation device 10. In FIG. 2, the curved state of the diaphragm is exaggerated for the sake of explanation. Actually, the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .
 触覚提示装置10は、圧電セラミックス11と、接続フィルム12,13と、保護板14,15と、連結部16,17と、振動板18と、タッチパネル19と、制御部21(図2参照)と、駆動部22(図2参照)と、を備えている。ここでは、触覚提示装置10は、タッチ式のキーボードとして構成している。このため、触覚提示装置10は、厚み方向に薄く、厚み方向から平面視して短手方向と長手方向とを有する長方形となるように構成している。そして、触覚提示装置10は、短手方向の両端部で触覚提示装置10の設置面に接触するように構成されている。 The tactile sense presentation device 10 includes a piezoelectric ceramic 11, connection films 12 and 13, protective plates 14 and 15, connecting portions 16 and 17, a vibration plate 18, a touch panel 19, and a control unit 21 (see FIG. 2). And a drive unit 22 (see FIG. 2). Here, the tactile sense presentation device 10 is configured as a touch-type keyboard. For this reason, the tactile sense presentation device 10 is configured to be thin in the thickness direction and to be a rectangle having a short side direction and a long side direction when viewed in plan from the thickness direction. And the tactile sense presentation apparatus 10 is comprised so that the installation surface of the tactile sense presentation apparatus 10 may be contacted by the both ends of a transversal direction.
 圧電セラミックス11は、平板状であり、面内方向に振動が生じる圧電性を有している。ここでは、圧電セラミックス11は、少なくとも触覚提示装置10の短手方向に振動が生じるようにしている。そして、図1および図2中に図示していないが、圧電セラミックス11の両主面には、圧電セラミックス11に駆動電圧を印加することができるように、導電性材料で形成した電極が設けられている。圧電セラミックス11は、有機圧電フィルムのような他の圧電材料に比べて圧電定数が大きく、振動板18よりも小さな面積で構成しても、十分な振動量が得られる。なお、圧電セラミックス11は、触覚提示装置10と同じ方向を短手方向および長手方向ならびに厚み方向とする長方形状に構成してもよく、触覚提示装置10の短手方向を長手とする短冊状として構成し、触覚提示装置10の長手方向に並べて複数設けるようにしてもよい。 The piezoelectric ceramic 11 has a flat plate shape and has a piezoelectric property that generates vibration in the in-plane direction. Here, the piezoelectric ceramic 11 is caused to vibrate at least in the short direction of the tactile sense presentation device 10. Although not shown in FIGS. 1 and 2, electrodes formed of a conductive material are provided on both main surfaces of the piezoelectric ceramic 11 so that a driving voltage can be applied to the piezoelectric ceramic 11. ing. The piezoelectric ceramic 11 has a larger piezoelectric constant than other piezoelectric materials such as an organic piezoelectric film, and a sufficient amount of vibration can be obtained even if the piezoelectric ceramic 11 has a smaller area than the diaphragm 18. The piezoelectric ceramics 11 may be configured in a rectangular shape having the same direction as the tactile sense presentation device 10 in the short direction, the long direction, and the thickness direction, or in the form of a strip having the short direction in the tactile sense presentation device 10 as the long direction. A plurality of the tactile sense presentation devices 10 may be arranged side by side in the longitudinal direction.
 また、ここでは、圧電セラミックス11の他方主面(底面)側に保護板14を設け、圧電セラミックス11の一方主面(天面)側に保護板15を設けている。保護板14,15は、それぞれ、平面視して長方形の平板状であり、触覚提示装置10と同じ方向を短手方向および長手方向ならびに厚み方向としている。そして、保護板14,15は、圧電セラミックス11との間に間隔が空くように、触覚提示装置10の厚み方向に圧電セラミックス11と対向させている。これにより、圧電セラミックス11の一方主面(天面)を保護板14により保護し、圧電セラミックス11の他方主面(底面)を保護板15により保護している。したがって、圧電セラミックス11に外部から直接的に衝撃荷重が作用することや、振動板18を介して間接的に衝撃荷重が作用することを防ぐことができる。 Further, here, a protective plate 14 is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 11, and a protective plate 15 is provided on the one main surface (top surface) side of the piezoelectric ceramic 11. The protection plates 14 and 15 each have a rectangular flat plate shape in plan view, and have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. And the protection plates 14 and 15 are made to oppose the piezoelectric ceramic 11 in the thickness direction of the tactile sense presentation apparatus 10 so that a space | interval may be provided between the piezoelectric ceramic 11. Thereby, one main surface (top surface) of the piezoelectric ceramic 11 is protected by the protection plate 14, and the other main surface (bottom surface) of the piezoelectric ceramic 11 is protected by the protection plate 15. Therefore, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside or the impact load from acting indirectly through the diaphragm 18.
 また、保護板14と圧電セラミックス11との間に連結部16を設け、保護板15と圧電セラミックス11との間に連結部17を設けている。連結部16,17は、平面視して長手方向に延びる長尺形状、または、長手方向に配列して設けられた複数の柱状部材としており、保護板14,15と圧電セラミックス11との間をそれぞれの短手方向の中央部同士で連結させている。このように、連結部16,17を圧電セラミックス11の短手方向の中央部に連結することにより、圧電セラミックス11の振動を殆ど阻害することなく、圧電セラミックス11に保護板14,15を連結することができる。 Further, a connecting portion 16 is provided between the protective plate 14 and the piezoelectric ceramic 11, and a connecting portion 17 is provided between the protective plate 15 and the piezoelectric ceramic 11. The connecting portions 16 and 17 are elongated shapes extending in the longitudinal direction in plan view, or a plurality of columnar members arranged in the longitudinal direction, and the space between the protective plates 14 and 15 and the piezoelectric ceramics 11. They are connected to each other in the center in the short direction. In this way, by connecting the connecting portions 16 and 17 to the central portion in the short direction of the piezoelectric ceramic 11, the protection plates 14 and 15 are connected to the piezoelectric ceramic 11 without substantially inhibiting vibration of the piezoelectric ceramic 11. be able to.
 接続フィルム12,13は、それぞれ平膜状である。ここでは、接続フィルム12,13は、それぞれ触覚提示装置10と同じ方向を短手方向および長手方向ならびに厚み方向としている。これらの接続フィルム12,13は、例えば、PET等からなる樹脂フィルム、あるいはステンレス等の金属箔で構成する。 The connection films 12 and 13 each have a flat film shape. Here, the connection films 12 and 13 have the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction, respectively. These connection films 12 and 13 are made of, for example, a resin film made of PET or the like, or a metal foil such as stainless steel.
 そして、接続フィルム12,13は、圧電セラミックス11の一方主面(天面)側に配置している。接続フィルム12は、短手方向の一方(正面側)端を所定長さだけ、圧電セラミックス11の他方(背面側)端に貼り付けている。接続フィルム13は、短手方向の他方(背面側)端を所定長さだけ、圧電セラミックス11の一方(正面側)端に貼り付けている。 The connection films 12 and 13 are arranged on one main surface (top surface) side of the piezoelectric ceramic 11. The connection film 12 has one end (front side) in the short direction attached to the other (back side) end of the piezoelectric ceramic 11 by a predetermined length. The connection film 13 is attached to one (front side) end of the piezoelectric ceramic 11 by a predetermined length on the other side (back side) in the short direction.
 なお、接続フィルム12,13を金属箔で構成する場合には、圧電セラミックス11の電極と接続フィルム12,13との間を電気的に絶縁するように設定するとよい。または、金属箔で構成した接続フィルム12,13の少なくとも一方を、圧電セラミックス11に駆動電圧を印加するための電極として用いてもよい。更には、金属箔で構成した接続フィルム12と接続フィルム13とを、圧電セラミックス11の異なる主面に接続し、それぞれを圧電セラミックス11に駆動電圧を印加するための電極として用いてもよい。接続フィルム12や接続フィルム13を駆動電圧を印加するための電極とする場合には、振動板18を非導電性材料で構成したり、導電性材料で構成した振動板18に対して接続フィルム12,13を非導電性の接着剤で接着したりして、接続フィルム12と接続フィルム13との間が直接導通しないようにするとよい。 When the connection films 12 and 13 are made of metal foil, the electrodes of the piezoelectric ceramic 11 and the connection films 12 and 13 may be set to be electrically insulated. Alternatively, at least one of the connection films 12 and 13 made of metal foil may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11. Furthermore, the connection film 12 and the connection film 13 made of metal foil may be connected to different main surfaces of the piezoelectric ceramic 11, and each may be used as an electrode for applying a driving voltage to the piezoelectric ceramic 11. When the connection film 12 or the connection film 13 is used as an electrode for applying a driving voltage, the diaphragm 18 is made of a non-conductive material or the connection film 12 is made of the diaphragm 18 made of a conductive material. , 13 may be bonded with a non-conductive adhesive so that the connection film 12 and the connection film 13 are not directly connected to each other.
 振動板18は、圧電セラミックス11および接続フィルム12,13の一方主面(天面)側に設けている。ここでは、振動板18は、触覚提示装置10と同じ方向を短手方向および長手方向ならびに厚み方向としている。この振動板18は、例えば、アクリル樹脂PMMAで構成することができる。また、振動板18は、例えば、金属板、PET、ポリカーボネイト(PC)、ガラスエポキシ樹脂、ガラス等の他の材料で構成することもできる。 The diaphragm 18 is provided on one main surface (top surface) side of the piezoelectric ceramic 11 and the connection films 12 and 13. Here, the diaphragm 18 has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. The diaphragm 18 can be made of, for example, acrylic resin PMMA. Moreover, the diaphragm 18 can also be comprised with other materials, such as a metal plate, PET, a polycarbonate (PC), a glass epoxy resin, glass, for example.
 そして、振動板18は、短手方向での中央部が一方主面(天面)側に凸、他方主面(底面)側に凹となるように撓ませた状態で、他方主面(底面)における短手方向の両端それぞれの間に、接続フィルム12,13を介して圧電セラミックス11を連結している。具体的には、振動板18は、短手方向の一方(正面側)端に、所定長さだけ接続フィルム13の一方(正面側)端を貼り付け、短手方向の他方(背面側)端に、所定長さだけ接続フィルム12の他方(背面側)端を貼り付けている。これにより、振動板18は、圧電セラミックス11および接続フィルム12,13から曲げ応力が作用して弓状に撓む状態で保持されている。 The diaphragm 18 is bent in such a manner that the central portion in the short direction is convex on the one main surface (top surface) side and concave on the other main surface (bottom surface) side. The piezoelectric ceramics 11 are connected via connecting films 12 and 13 between both ends in the short direction in FIG. Specifically, the diaphragm 18 has one end (front side) of the connection film 13 pasted to one end (front side) in the short direction and the other end (rear side) in the short direction. In addition, the other (back side) end of the connection film 12 is pasted by a predetermined length. Accordingly, the diaphragm 18 is held in a state where the diaphragm 18 is bent in a bow shape due to a bending stress from the piezoelectric ceramic 11 and the connection films 12 and 13.
 したがって、この振動板18は、短手方向の中央部が設置面から浮き上がり、短手方向の中央部と設置面との間には下方空間が設けられる。そして、圧電セラミックス11は、この下方空間で接続フィルム12,13により中空な状態で支持されている。このことによっても、圧電セラミックス11に外部から直接的に衝撃荷重が作用することや、振動板18を介して間接的に衝撃荷重が作用することを防ぐことができる。したがって、圧電セラミックス11を損壊し難くすることができる。 Therefore, the diaphragm 18 has a central portion in the short direction that is lifted from the installation surface, and a lower space is provided between the central portion in the short direction and the installation surface. The piezoelectric ceramic 11 is supported in a hollow state by the connection films 12 and 13 in this lower space. Also by this, it is possible to prevent the impact load from acting directly on the piezoelectric ceramic 11 from the outside and the impact load from acting indirectly through the diaphragm 18. Therefore, it is possible to make it difficult to damage the piezoelectric ceramic 11.
 また、振動板18の一方主面(天面)には、タッチパネル19を貼り付けている。タッチパネル19は、平面視して長方形の平板状であり、触覚提示装置10と同じ方向を短手方向および長手方向ならびに厚み方向としている。そして、タッチパネル19は、触覚提示装置10の一方主面(天面)に露出しており、一方主面(天面)に複数のタッチ検出部20を付設している。複数のタッチ検出部20は、それぞれ、キー配列に対応した位置に配されており、ユーザのタッチ操作を検出する機能を有している。各タッチ検出部20は、メンブレン方式、静電容量方式、圧電フィルム方式等の様々な方式を用いて構成することができる。 Further, a touch panel 19 is pasted on one main surface (top surface) of the diaphragm 18. The touch panel 19 has a rectangular flat plate shape in plan view, and has the same direction as the tactile sense presentation device 10 as the short direction, the long direction, and the thickness direction. The touch panel 19 is exposed on one main surface (top surface) of the tactile presentation device 10, and a plurality of touch detection units 20 are attached to the one main surface (top surface). Each of the plurality of touch detection units 20 is arranged at a position corresponding to the key arrangement, and has a function of detecting a user's touch operation. Each touch detection unit 20 can be configured using various methods such as a membrane method, a capacitance method, and a piezoelectric film method.
 制御部21は、複数のタッチ検出部20それぞれと電気的に接続している。駆動部22は、圧電セラミックス11と電気的に接続している。そして、制御部21と駆動部22との間も電気的に接続している。制御部21は、利用者の指等がタッチ検出部20に接触することを検出すると、駆動部22に検出信号を出力する。駆動部22は、制御部21から検出信号が入力されると、振動板18の構造共振周波数近辺の周波数の駆動信号を圧電セラミックス11に印加する。なお、駆動信号の周波数は振動板18の構造共振周波数近辺でなくてもよい。 The control unit 21 is electrically connected to each of the plurality of touch detection units 20. The drive unit 22 is electrically connected to the piezoelectric ceramic 11. The control unit 21 and the drive unit 22 are also electrically connected. When the control unit 21 detects that the user's finger or the like is in contact with the touch detection unit 20, the control unit 21 outputs a detection signal to the drive unit 22. When the detection signal is input from the control unit 21, the drive unit 22 applies a drive signal having a frequency near the structural resonance frequency of the diaphragm 18 to the piezoelectric ceramic 11. The frequency of the drive signal may not be near the structural resonance frequency of the diaphragm 18.
 即ち、利用者の指等がタッチ検出部20に接触すると、圧電セラミックス11に駆動信号が印加される。これにより、図2中に矢印で例示するように、圧電セラミックス11に触覚提示装置10の短手方向に沿った振動が生じる。そして、圧電セラミックス11が触覚提示装置10の短手方向に伸びる際には、振動板18の曲げ応力によって、接続フィルム12,13は、振動板18に引き寄せられるように触覚提示装置10の短手方向に移動する。また、圧電セラミックス11が触覚提示装置10の短手方向に縮む際には、接続フィルム12,13は、圧電セラミックス11に引き寄せられるように移動する。したがって、振動板18の短手方向の両端部に、接続フィルム12,13を介して力が作用し、振動板18の曲げ応力に変動が生じる。このため、振動板18の撓み量が変化し、圧電セラミックス11の振動が振動板18の中央部に増幅して伝わり、振動板18が広い範囲で厚み方向に振動することになる。 That is, when a user's finger or the like touches the touch detection unit 20, a drive signal is applied to the piezoelectric ceramic 11. Thereby, as illustrated by an arrow in FIG. 2, the piezoelectric ceramic 11 is vibrated along the short direction of the tactile presentation device 10. When the piezoelectric ceramic 11 extends in the short direction of the tactile presentation device 10, the connection films 12 and 13 are pulled toward the vibration plate 18 due to the bending stress of the vibration plate 18. Move in the direction. Further, when the piezoelectric ceramic 11 is contracted in the short direction of the tactile sense presentation device 10, the connection films 12 and 13 move so as to be attracted to the piezoelectric ceramic 11. Therefore, a force acts on both ends of the diaphragm 18 in the short direction via the connection films 12 and 13, and the bending stress of the diaphragm 18 varies. For this reason, the amount of deflection of the diaphragm 18 changes, and the vibration of the piezoelectric ceramic 11 is amplified and transmitted to the central portion of the diaphragm 18, and the diaphragm 18 vibrates in the thickness direction over a wide range.
 このように触覚提示装置10では、タッチパネル19をタッチ操作する利用者の指に振動板18の厚み方向の振動を伝えて、利用者に触覚フィードバックを与えることができる。圧電定数の大きな圧電セラミックス11の振動が振動板18の中央部に増幅して伝わり、振動板18が広い範囲で厚み方向に振動するので、利用者には大きな触覚フィードバックをより確実に与えることができる。そして、圧電セラミックス11を振動板18の下方空間で中空に支持し、圧電セラミックス11の両主面に間隔を空けた状態で対向する保護板14,15を設けるので、圧電セラミックス11を衝撃荷重から保護して損壊し難くすることができる。 As described above, in the tactile sense presentation device 10, vibration in the thickness direction of the diaphragm 18 can be transmitted to the finger of the user who touches the touch panel 19 to give tactile feedback to the user. Since the vibration of the piezoelectric ceramic 11 having a large piezoelectric constant is amplified and transmitted to the center of the diaphragm 18 and the diaphragm 18 vibrates in the thickness direction over a wide range, a large tactile feedback can be more reliably given to the user. it can. Then, the piezoelectric ceramic 11 is supported in a hollow space in the lower space of the diaphragm 18, and the protective plates 14 and 15 that are opposed to each other are provided on both main surfaces of the piezoelectric ceramic 11. It can be protected and made difficult to break.
 次に、本発明の第2の実施形態に係る触覚提示装置30について説明する。図3は触覚提示装置30の外観斜視図である。図4は触覚提示装置30の側面図である。なお、図4中では説明のために振動板の湾曲状態を誇張して示しており、実際には、振動板は圧電セラミックスと略平行になるように微小な撓み量で保持されることになる。 Next, a tactile sense presentation device 30 according to a second embodiment of the present invention will be described. FIG. 3 is an external perspective view of the tactile sense presentation device 30. FIG. 4 is a side view of the tactile sense presentation device 30. In FIG. 4, the curved state of the diaphragm is exaggerated for the sake of explanation. Actually, the diaphragm is held with a small amount of bending so as to be substantially parallel to the piezoelectric ceramic. .
 触覚提示装置30は、圧電セラミックス31と、接続フィルム32,33と、保護板34と、連結部40と、振動板35と、タッチパネル36と、制御部38(図4参照)と、駆動部39(図4参照)と、を備えている。ここでの触覚提示装置30も、タッチ式のキーボードとして構成している。そして、触覚提示装置30は、第1の実施形態とは相違する構成の保護板34により、触覚提示装置30の設置面に接触するように構成されている。 The tactile sense presentation device 30 includes a piezoelectric ceramic 31, connection films 32 and 33, a protection plate 34, a coupling unit 40, a vibration plate 35, a touch panel 36, a control unit 38 (see FIG. 4), and a drive unit 39. (See FIG. 4). The tactile sense presentation device 30 here is also configured as a touch-type keyboard. The tactile sense presentation device 30 is configured to contact the installation surface of the tactile sense presentation device 30 with a protective plate 34 having a configuration different from that of the first embodiment.
 圧電セラミックス31は、平板状であり、少なくとも触覚提示装置30の短手方向に振動が生じるようにしている。接続フィルム32は、短手方向の一方(正面側)端を所定長さだけ、圧電セラミックス31の一方主面(天面)側の他方(背面側)端に貼り付けている。また、接続フィルム33は、短手方向の他方(背面側)端を所定長さだけ、圧電セラミックス31の他方主面(底面)側の一方(正面側)端に貼り付けている。 The piezoelectric ceramic 31 has a flat plate shape and vibrates at least in the short direction of the tactile sense presentation device 30. The connection film 32 has one end (front side) in the lateral direction attached to the other end (back side) of the main surface (top surface) side of the piezoelectric ceramic 31 by a predetermined length. In addition, the connection film 33 is attached to one (front side) end of the other main surface (bottom surface) side of the piezoelectric ceramic 31 by a predetermined length on the other (back side) end in the short side direction.
 ここでは、接続フィルム32,33をそれぞれ圧電性を有していない1枚の単位フィルムで構成しているが、接続フィルム32,33は、それぞれ2枚の単位フィルムを貼り合わせた構成として、圧電セラミックス11の両主面を挟み込むように圧電セラミックス11と連結してもよい。 Here, each of the connection films 32 and 33 is composed of one unit film that does not have piezoelectricity. However, each of the connection films 32 and 33 is composed of two unit films that are bonded together. You may connect with the piezoelectric ceramic 11 so that both the main surfaces of the ceramic 11 may be inserted | pinched.
 振動板35は、圧電セラミックス31および接続フィルム32,33の一方主面(天面)側に設け、他方主面(底面)における短手方向の両端それぞれの間に、接続フィルム32,33を介して圧電セラミックス31を連結している。 The diaphragm 35 is provided on one main surface (top surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the connection films 32 and 33 are interposed between both ends of the other main surface (bottom surface) in the short direction. The piezoelectric ceramics 31 are connected.
 保護板34は、平板状であり、圧電セラミックス31および接続フィルム32,33の他方主面(底面)側に設け、圧電セラミックス31との間に間隔が空くように、触覚提示装置30の厚み方向に圧電セラミックス31と対向させている。保護板34は平板状であり、圧電セラミックス31の他方主面(底面)側に圧電セラミックス31と間隔が空くように配されている。連結部40は、振動板35において撓み振動の節となる位置(振動板35の短手方向の両端部近傍)に一端部(上端部)で連結され、保護板34に他端部(下端部)で連結されている。これにより、連結部40は、振動板35と保護板34とを連結している。 The protective plate 34 has a flat plate shape, is provided on the other main surface (bottom surface) side of the piezoelectric ceramic 31 and the connection films 32 and 33, and the thickness direction of the tactile sense presentation device 30 is set so as to be spaced from the piezoelectric ceramic 31. It faces the piezoelectric ceramic 31. The protection plate 34 has a flat plate shape and is arranged on the other main surface (bottom surface) side of the piezoelectric ceramic 31 so as to be spaced from the piezoelectric ceramic 31. The connecting portion 40 is connected at one end (upper end) to a position where the vibration plate 35 becomes a bending vibration node (near both ends in the short direction of the vibrating plate 35), and is connected to the protection plate 34 at the other end (lower end). ). Thereby, the connecting portion 40 connects the vibration plate 35 and the protection plate 34.
 このような構成でも、圧電セラミックス31の両主面を振動板35と保護板34とで覆うので、圧電セラミックス31に外部から直接的に衝撃荷重が作用することや、振動板35や保護板34を介して間接的に衝撃荷重が作用することを防ぐことができる。したがって、圧電セラミックス31を損壊し難くすることができる。 Even in such a configuration, since both main surfaces of the piezoelectric ceramic 31 are covered with the vibration plate 35 and the protection plate 34, an impact load acts directly on the piezoelectric ceramic 31 from the outside, or the vibration plate 35 and the protection plate 34. It is possible to prevent an impact load from acting indirectly through the. Therefore, it is possible to make it difficult to damage the piezoelectric ceramic 31.
 また、振動板35の一方主面(天面)には、タッチパネル36を貼り付けている。そして、タッチパネル36は、一方主面(天面)に複数のタッチ検出部37を付設している。制御部38は、複数のタッチ検出部37それぞれと電気的に接続している。駆動部39は、圧電セラミックス31と電気的に接続している。そして、制御部38と駆動部39との間も電気的に接続している。 Further, a touch panel 36 is pasted on one main surface (top surface) of the diaphragm 35. The touch panel 36 includes a plurality of touch detection units 37 on one main surface (top surface). The control unit 38 is electrically connected to each of the plurality of touch detection units 37. The drive unit 39 is electrically connected to the piezoelectric ceramic 31. The control unit 38 and the drive unit 39 are also electrically connected.
 この触覚提示装置30においても、利用者の指等がタッチ検出部37に接触すると、圧電セラミックス31に駆動信号が印加される。そして、図4中に矢印で例示するように、圧電セラミックス31に触覚提示装置30の短手方向に沿った振動が生じる。これにより、振動板35の短手方向の両端部(連結部分)に、接続フィルム32,33を介して力が作用し、振動板35の曲げ応力に変動が生じる。このため、振動板35の撓み量が変化し、振動板35が広い範囲で厚み方向に振動することになる。 Also in this tactile sense presentation device 30, when a user's finger or the like contacts the touch detection unit 37, a drive signal is applied to the piezoelectric ceramic 31. Then, as illustrated by an arrow in FIG. 4, vibration occurs along the short direction of the tactile presentation device 30 in the piezoelectric ceramic 31. As a result, force acts on both end portions (connecting portions) of the diaphragm 35 in the short direction via the connection films 32 and 33, and the bending stress of the diaphragm 35 varies. For this reason, the amount of bending of the diaphragm 35 changes, and the diaphragm 35 vibrates in the thickness direction over a wide range.
 したがって、この触覚提示装置30でも、タッチパネル36をタッチ操作する利用者の指に振動板35の厚み方向の振動を伝えて、利用者に大きな触覚フィードバックを確実に与えることができる。そして、この第2の実施形態に係る触覚提示装置30では、圧電セラミックス31が振動板35と保護板34との間の中空空間で中空に支持され、圧電セラミックス31の両主面に間隔を空けた状態で保護板34と振動板35とが対向するので、第1の実施形態と比較して、圧電セラミックス31がより衝撃荷重から保護されることになり、更に損壊し難くすることができる。 Therefore, this tactile sensation presentation apparatus 30 can reliably give a large tactile feedback to the user by transmitting vibration in the thickness direction of the diaphragm 35 to the finger of the user who touches the touch panel 36. In the haptic presentation device 30 according to the second embodiment, the piezoelectric ceramic 31 is supported in a hollow space in the hollow space between the vibration plate 35 and the protective plate 34, and the main surfaces of the piezoelectric ceramic 31 are spaced from each other. Since the protective plate 34 and the vibration plate 35 face each other in this state, the piezoelectric ceramic 31 is more protected from an impact load than the first embodiment, and can be further prevented from being damaged.
 本発明の振動装置は、この実施形態で示したように構成することもできる。なお、この実施形態で示した触覚提示装置30に対して、更に、第1の実施形態で示した保護板の構造を追加するようにしてもよい。すなわち、保護板34と振動板35との間に挟まれる中空空間の内部に、第1の実施形態で示した保護板14および連結部16や保護板15および連結部17を追加して設けるようにしてもよい。また、この実施形態で示した接続フィルム32,33は、フレキシブルプリント基板により構成することが好ましい。接続フィルム32,33をフレキシブルプリント基板で構成する場合、圧電セラミックス31に接続する電極パターンを接続フィルム32,33に形成することができ、制御部38や駆動部39の回路の配置位置やそれらと圧電セラミックス31との接続構造についての自由度が向上する。また、接続フィルム32,33を構成するフレキシブルプリント基板に制御部38や駆動部39の回路を形成することも可能になり、触覚提示装置30の省スペース化を図ることができる。 The vibration device of the present invention can also be configured as shown in this embodiment. In addition, you may make it add the structure of the protective plate shown in 1st Embodiment further to the tactile sense presentation apparatus 30 shown in this embodiment. That is, the protective plate 14 and the connecting portion 16, the protective plate 15, and the connecting portion 17 shown in the first embodiment are additionally provided in the hollow space sandwiched between the protective plate 34 and the vibration plate 35. It may be. Moreover, it is preferable to comprise the connection films 32 and 33 shown by this embodiment with a flexible printed circuit board. When the connection films 32 and 33 are formed of a flexible printed circuit board, electrode patterns to be connected to the piezoelectric ceramics 31 can be formed on the connection films 32 and 33, and the circuit arrangement positions of the control unit 38 and the drive unit 39, and The degree of freedom for the connection structure with the piezoelectric ceramic 31 is improved. In addition, it is possible to form circuits of the control unit 38 and the driving unit 39 on the flexible printed circuit board that constitutes the connection films 32 and 33, and space saving of the tactile sense presentation device 30 can be achieved.
 次に、本発明の第1の変形例に係る触覚提示装置40について説明する。図5は触覚提示装置40の側面図である。触覚提示装置40は、第1の実施形態に係る構成と殆ど同様な構成であるが、第1の実施形態で設けていた圧電セラミックス11の一方主面(天面)側を覆う保護板を省いた構成である。このように触覚提示装置40を構成していても、圧電セラミックス11の一方主面(天面)側は振動板18によって覆われているので、圧電セラミックス11の一方主面(天面)に外部から直接的に衝撃荷重が作用することを防ぐことができる。したがって、やはり圧電セラミックス11を損壊し難くすることができる。 Next, a tactile sensation presentation device 40 according to a first modification of the present invention will be described. FIG. 5 is a side view of the tactile sense presentation device 40. The tactile sensation presentation device 40 has almost the same configuration as that of the first embodiment, but omits a protective plate that covers the one main surface (top surface) side of the piezoelectric ceramic 11 provided in the first embodiment. It was the composition that was. Even if the tactile sense presentation device 40 is configured as described above, the one main surface (top surface) side of the piezoelectric ceramic 11 is covered with the diaphragm 18, so that one main surface (top surface) of the piezoelectric ceramic 11 is externally connected to the outside. It is possible to prevent the impact load from acting directly. Therefore, the piezoelectric ceramic 11 can be hardly damaged.
 次に、本発明の第2の変形例に係る触覚提示装置50について説明する。図6は触覚提示装置50の側面図である。触覚提示装置50は、第1の実施形態に係る構成と殆ど同様な構成であるが、単一の接続フィルム51を備え、接続フィルム51の両端それぞれを振動板18の両端に連結している。そして、圧電セラミックス11の全面を接続フィルム51の短手方向の中央部に貼り付けている。このように触覚提示装置50を構成する場合、圧電セラミックス11の拘束により、圧電セラミックス11と接続フィルム51とが弓状に変形する。これにより、振動板18の両端を上述した実施形態と同様に動かすことができ、利用者に触覚フィードバックを与えることができる。また、圧電セラミックス11の一方主面(天面)は振動板18および接続フィルム51によって覆われているので、圧電セラミックス11の一方主面(天面)に外部から直接的に衝撃荷重が作用することを防ぐことができる。したがって、やはり圧電セラミックス11を損壊し難くすることができる。 Next, a tactile sensation presentation device 50 according to a second modification of the present invention will be described. FIG. 6 is a side view of the tactile sense presentation device 50. The tactile sense presentation device 50 has a configuration almost similar to the configuration according to the first embodiment, but includes a single connection film 51, and both ends of the connection film 51 are coupled to both ends of the diaphragm 18. The entire surface of the piezoelectric ceramic 11 is attached to the central portion of the connection film 51 in the short direction. When the tactile sense presentation device 50 is configured as described above, the piezoelectric ceramic 11 and the connection film 51 are deformed into an arcuate shape due to the restraint of the piezoelectric ceramic 11. Thereby, both ends of the diaphragm 18 can be moved similarly to the above-described embodiment, and tactile feedback can be given to the user. In addition, since one main surface (top surface) of the piezoelectric ceramic 11 is covered with the diaphragm 18 and the connection film 51, an impact load acts directly on the one main surface (top surface) of the piezoelectric ceramic 11 from the outside. Can be prevented. Therefore, the piezoelectric ceramic 11 can be hardly damaged.
 次に、本発明の第3の変形例に係る触覚提示装置60について説明する。図7は触覚提示装置60の側面図である。触覚提示装置60は、第1の実施形態に係る構成と殆ど同様な構成であるが、第1の実施形態で設けていた圧電セラミックス11の両面を覆う2つの保護板を省いた構成である。このように触覚提示装置60を構成していても、圧電セラミックス11の一方主面(天面)側が振動板18によって覆われ、圧電セラミックス11が中空に支持されているので、やはり圧電セラミックス11を損壊し難くすることができる。 Next, a tactile sense presentation device 60 according to a third modification of the present invention will be described. FIG. 7 is a side view of the tactile sense presentation device 60. The tactile sensation presentation device 60 has a configuration that is almost the same as the configuration according to the first embodiment, except that the two protective plates that cover both sides of the piezoelectric ceramic 11 provided in the first embodiment are omitted. Even if the tactile sense presentation device 60 is configured as described above, the piezoelectric ceramic 11 is covered with the vibration plate 18 on one side (top surface) side of the piezoelectric ceramic 11 and is supported in a hollow state. It can be made difficult to break.
 以上に説明したように本発明に係る振動装置は実施することができる。なお、特許請求の範囲に記載した構成の範囲内であれば、本発明の振動装置はその他の多様な形態で実施することもできる。例えば、振動板は、接続フィルムおよび圧電セラミックスと連結した状態で全体が平坦になるように、予め湾曲した形状で形成しておいてもよい。また、振動装置の具体的な構成もキーボードに限られるものでは無く、タッチパネルを備える表示装置や、タッチセンサを備える操作盤など、タッチ操作に対して触覚フィードバックを伝えるその他の装置であってもよい。また、上記した振動板を、スピーカなどの振動部材とすることもでき、この発明は、音響装置など振動を生じる他の電子機器等で実施することもできる。 As described above, the vibration device according to the present invention can be implemented. In addition, if it is in the range of the structure described in the claim, the vibration apparatus of this invention can also be implemented with other various forms. For example, the diaphragm may be formed in a curved shape in advance so as to be flat as a whole in a state where it is connected to the connection film and the piezoelectric ceramic. Further, the specific configuration of the vibration device is not limited to the keyboard, and may be other devices that transmit tactile feedback to the touch operation, such as a display device having a touch panel and an operation panel having a touch sensor. . Moreover, the above-mentioned diaphragm can also be used as a vibrating member such as a speaker, and the present invention can also be implemented in other electronic devices that generate vibration such as an acoustic device.
10,30,40,50,60…触覚提示装置
11,31…圧電セラミックス
12,13,32,33,51…接続フィルム
14,15,34…保護板
16,17…連結部
18,35…振動板
19,36…タッチパネル
20,37…タッチ検出部
21,38…制御部
22,39…駆動部
10, 30, 40, 50, 60 ... tactile sense presentation device 11, 31 ... piezoelectric ceramics 12, 13, 32, 33, 51 ... connection films 14, 15, 34 ... protective plates 16, 17 ... connecting portions 18, 35 ... vibration Plates 19, 36 ... touch panel 20, 37 ... touch detection unit 21, 38 ... control unit 22, 39 ... drive unit

Claims (7)

  1.  振動板と、
     前記振動板に端部を連結して、前記振動板を曲げ応力が生じる状態にした接続フィルムと、
     前記接続フィルムを介して前記振動板に連結した、前記振動板から前記接続フィルムが引っ張り力を受ける方向に沿って振動する圧電セラミックスと、
     を備える振動装置。
    A diaphragm,
    A connecting film in which an end portion is coupled to the diaphragm, and the diaphragm is in a state in which bending stress is generated,
    Piezoelectric ceramics that vibrates along a direction in which the connection film receives a tensile force from the diaphragm, coupled to the diaphragm via the connection film;
    A vibration device comprising:
  2.  前記圧電セラミックスは、前記振動板に対向する一方主面と、前記一方主面に対向する他方主面とを有する、
     請求項1に記載の振動装置。
    The piezoelectric ceramic has one main surface facing the diaphragm and the other main surface facing the one main surface.
    The vibration device according to claim 1.
  3.  前記接続フィルムが引っ張り力を受ける方向に対して直交する方向での前記圧電セラミックスの表面に、間隔を空けた状態で対向する保護板を更に備える、
     請求項1または請求項2に記載の振動装置。
    A protective plate facing the surface of the piezoelectric ceramic in a direction perpendicular to the direction in which the connection film receives a tensile force, with a space therebetween;
    The vibration device according to claim 1 or 2.
  4.  前記圧電セラミックスの一方主面に間隔を空けた状態で対向する第1の保護板を備える、
     請求項2に記載の振動装置。
    A first protection plate facing the main surface of the piezoelectric ceramic with a space therebetween;
    The vibration device according to claim 2.
  5.  前記圧電セラミックスの他方主面に間隔を空けた状態で対向する第2の保護板を備える、
     請求項2または請求項4に記載の振動装置。
    A second protective plate facing the other main surface of the piezoelectric ceramic with a space therebetween;
    The vibration device according to claim 2 or 4.
  6.  前記保護板は、前記接続フィルムが引っ張り力を受ける方向での前記圧電セラミックスの中央部に連結する第1の連結部を備える、
     請求項3乃至請求項5のいずれかに記載の振動装置。
    The protective plate includes a first connecting portion that connects to a central portion of the piezoelectric ceramic in a direction in which the connecting film receives a tensile force.
    The vibration device according to any one of claims 3 to 5.
  7.  前記保護板は、前記振動板における振動の節となる位置に連結する第2の連結部を備える、請求項3乃至請求項6のいずれかに記載の振動装置。 The vibration device according to any one of claims 3 to 6, wherein the protective plate includes a second connecting portion that is connected to a position serving as a vibration node in the diaphragm.
PCT/JP2015/073949 2014-09-04 2015-08-26 Vibration device WO2016035628A1 (en)

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US10564839B2 (en) 2016-03-31 2020-02-18 Sensel Inc. Method for detecting and characterizing inputs on a touch sensor surface
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