WO2016011761A1

WO2016011761A1 - Upper cover opening mechanism of reaction chamber, and reaction chamber

Info

Publication number: WO2016011761A1
Application number: PCT/CN2014/093105
Authority: WO
Inventors: 张鹏
Original assignee: 北京北方微电子基地设备工艺研究中心有限责任公司
Priority date: 2014-07-22
Filing date: 2014-12-05
Publication date: 2016-01-28
Also published as: CN105280520A; CN105280520B; TWI582883B; TW201604985A

Abstract

Provided are a reaction chamber and an upper cover opening mechanism thereof. The upper cover opening mechanism is located on one side of the reaction chamber (20) and comprises at least one driving unit (23). Each driving unit (23) comprises a first fixed member (230), a second fixed member (231), a first connection member (232), and a driving apparatus (233). The first fixed member (230) is fixed on the upper cover (22), and is hingedly connected to the first end of the first connection member (232). The driving apparatus (233) is hingedly connected to the second end of the first connection member (232). The second fixed member (231) is fixed to a cavity (21) of the reaction chamber (20), and is hingedly connected to the first connection member (232) between the first end and the second end of the first connection member (232).

Description

Upper cover opening mechanism and reaction chamber of reaction chamber

Technical field

The present invention relates to the field of semiconductor device manufacturing, and in particular to an upper cover opening mechanism and a reaction chamber of a reaction chamber.

Background technique

The reaction chamber of the semiconductor processing equipment is used for etching, depositing and the like of the workpiece to be processed, and mainly comprises a cavity, an upper cover and an upper cover driving device, wherein a sealing ring is generally arranged between the upper cover and the cavity. a process environment for sealing the two to form a vacuum in the reaction chamber; an upper cover driving device for driving the upper cover to open or close to transfer the workpiece to be processed between the outside and the reaction chamber, and to the reaction chamber The components in the interior are maintained.

Figure 1 is a schematic view showing the structure of a conventional reaction chamber. As shown in Figure 1, the reaction chamber includes a cavity 1, an upper cover 2, a sealing ring 3, and an upper cover driving device. The upper cover driving device includes a plurality of driving units, each of which includes a guide post 4, a slider 5, a turning lever 6, a driving rod 7, a cylinder 8 and a support rod 9, wherein the guide post 4 is disposed in a vertical direction, The lower end is fixed on the cavity 1; the slider 5 is sleeved on the guide post 4, and can be moved up and down along the guide post 4; the flip lever 6 is hinged to the slider 5 through the first hinge 10, and the upper cover 2 is fixed to the flip The rod 8 is fixed on the cavity 1; one end of the driving rod 7 is hinged to the slider 5 and the turning rod 6 through the first hinge 10, and the other end is hinged to the piston rod of the cylinder 8 through a separate hinge; the support rod Both ends of the 9 are hinged to the cavity 1 and the drive rod 7 through separate hinges.

During the opening of the upper cover 2, the driving rod 7 drives the support rod 9 to rotate under the driving of the cylinder 8, thereby driving the flip lever 6, the slider 5 and the upper cover 2 fixed on the flip lever 6 along the guide post 4 Sliding; after the support rod 9 is rotated to its maximum angle, it stops rotating, and the flip lever 6, the slider 5 and the upper cover 2 stop sliding; and the drive rod 7 continues to drive the flip lever 6 under the driving of the cylinder 8. And the upper cover 2 rotates around the first hinge 10 until it is rotated to a preset opening The angle is turned on to complete the opening of the upper cover 2. The closing process of the upper cover 2 is similar to the opening process of the upper cover 2 described above, and will not be described herein.

In the above reaction chamber, the opening and closing process of the upper cover 2 includes two steps of lifting up and down the guide post 4 and rotating around the first hinge 10, wherein the lifting of the upper cover 2 along the guide post 4 can be avoided when the upper cover 2 is rotated. Friction is generated with the sealing ring 3, and the resulting wear of the sealing ring 3 (especially the portion of the sealing ring 3 close to the first hinge 10) is prevented, so that the sealing ring 3 can have a good sealing effect during the process. In addition, the lifting of the upper cover 2 along the guide post 4 can also compensate for the deformation of the sealing ring 3 due to the difference in air pressure between the inside and outside of the reaction chamber, so that the sealing ring 3 can achieve a good sealing of the reaction chamber.

However, the above-mentioned upper cover driving device inevitably has the following problems in practical applications:

First, each driving unit of the upper cover driving device includes a guide post-slider mechanism composed of a guide post 4, a slider 5, and a multi-link hinge mechanism composed of a flip lever 6, a drive rod 7 and a support rod 9, The guide post-slider mechanism and the multi-link hinge mechanism cooperate with each other to realize the lifting and rotating of the upper cover 2, which requires the above components to have high machining precision and assembly precision.

Secondly, the structure of the upper cover driving device is relatively complicated, and the force of each component is complicated, and the force of each component is relatively uneven. For example, the support rod 9 not only has to bear the gravity of the upper cover 2, but also bears the role of the driving rod 7. For example, the guide post 4 not only has to bear the force of the drive rod 7, but also needs to bear the force from the support rod 9; in practical applications, the above-mentioned upper cover drive device only has limited load carrying capacity to prevent the above components from being The force is too large and deformed, causing the mechanism to become stuck, which makes it unsuitable for heavy load applications.

In addition, limited by the height of the pillar-slider mechanism and the angle of movement of the multi-link hinge mechanism, the maximum angle at which the upper cover driving device drives the upper cover to be opened is small, which is generally less than 60 degrees, which makes it unsuitable for The maximum opening angle is required.

Summary of the invention

The present invention aims to at least solve one of the technical problems existing in the prior art, and proposes a The upper cover opening mechanism and the reaction chamber of the reaction chamber have greater load carrying capacity, a simpler structure, and a larger opening angle of the upper cover.

To achieve the object of the present invention, there is provided an upper cover opening mechanism for a reaction chamber for opening or closing an upper cover for driving a reaction chamber, the upper cover opening mechanism being located at one side of the reaction chamber, which includes At least one driving unit; each driving unit includes a first fixing member, a second fixing member, a first connecting member and a driving device; the first fixing member is fixed to an upper cover of the reaction chamber, and the The first end of the first connecting member is hinged; the driving device is hinged with the second end of the first connecting member; the second fixing member is fixed to the cavity of the reaction chamber, and the A connector is hinged between the first end and the second end of the first connector.

Wherein the first fixing member and the first end of the first connecting member are hinged by a fixing pin and a movable pin, and the fixing pin and the movable pin are sequentially arranged away from the first end of the first connecting member. And the second fixing member and the first connecting member are hinged between the movable pin and the second end of the first connecting member.

Wherein the diameter of the pin hole of the first fixing member and the first connecting member that cooperates with the fixing pin is the same as the diameter of the fixing pin; the first fixing member or the first connecting member The diameter of the pin hole of the movable pin is larger than the diameter of the movable pin.

Wherein the fixing pin is equal in diameter to the movable pin.

Wherein, the difference between the diameter of the pin hole of the first connecting member or the first fixing member that cooperates with the movable pin and the diameter of the movable pin ranges from 3 to 5 mm.

Wherein, the upper cover opening mechanism comprises two driving units, and the two driving units are symmetrically mounted on one side of the reaction chamber.

Wherein the driving device comprises a cylinder, a sliding rod and a second connecting member; the piston rod of the cylinder is connected with the sliding rod; the sliding rod is provided with a sliding portion; the second connecting member and the second connecting member A second end of the connecting member is hinged, and a through hole is formed on the sliding portion of the sliding rod so that the second connecting member surrounds the sliding portion of the sliding rod.

Wherein the length of the sliding portion is greater than the length of the through hole on the second connecting member that cooperates with the sliding portion.

The difference between the length of the sliding portion and the length of the through hole on the second connecting member ranges from 5 to 10 mm.

Wherein the difference between the length of the sliding portion and the through hole of the second connecting member that matches the sliding portion is greater than the gap between the cavity and the upper cover of the back pressure chamber The maximum amount of deformation of the seal during opening and closing of the upper cover.

Wherein the difference between the length of the sliding portion and the through hole of the second connecting member that matches the sliding portion and the maximum deformation of the sealing member during the opening and closing of the upper cover The difference between the two ranges from 3 to 5 mm.

As another technical solution, the present invention further provides a reaction chamber including a cavity, an upper cover and an upper cover opening mechanism, the upper cover being located above the cavity and provided with a sealing member therebetween, the upper cover being opened The mechanism is located outside the cavity and is connected to the upper cover. The upper cover opening mechanism adopts the above-mentioned upper cover opening mechanism provided by the present invention.

The invention has the following beneficial effects:

The upper cover opening mechanism of the reaction chamber provided by the present invention, the driving device is driven to open or close by the hinge connection with the first connecting member and the hinge connection of the first connecting member and the first fixing member and the second fixing member, and The seal disposed between the cavity of the reaction chamber and the upper cover is not worn during the process. Compared with the prior art, during the opening or closing of the upper cover, the gravity of the upper cover is received by the hinge mechanism, so that the bearing capacity is greater, and the force of each component is simpler and more reasonable; and the structure is also simple. , with fewer parts; and, it also allows the upper cover to have a larger opening angle, making it suitable for more applications.

The reaction chamber provided by the present invention adopts the above-mentioned upper cover opening mechanism provided by the present invention, which can reduce the wear of the sealing member disposed between the cavity and the upper cover of the reaction chamber during the opening and closing of the upper cover. Moreover, during the opening or closing process of the upper cover, the gravity of the upper cover is received by the hinge mechanism, so that the bearing capacity is greater, and the force of each component is simpler and more reasonable; Because the structure of the upper cover opening mechanism is simple and the parts are reduced, the reaction chamber provided by the invention also has the characteristics of simple structure and few parts; in addition, the reaction chamber provided by the invention can also make the upper cover have a larger Open the angle so that it can be used in more situations.

DRAWINGS

Figure 1 is a schematic view showing the structure of a conventional reaction chamber;

2 is a schematic structural view of an upper cover opening mechanism of a reaction chamber according to an embodiment of the present invention;

Figure 3 is an enlarged view of a region A in Figure 2;

Figure 4 is a schematic view showing the connection between the first fixing member and the first connecting member;

Figure 5 is a schematic view showing the connection between the second connecting member and the sliding member;

Figure 6 is a schematic view of the upper cover opening mechanism opening or closing the upper cover;

Figure 7 is a schematic view of the upper cover before opening or after the upper cover is closed;

Figure 8 is a schematic view of the opening angle of the upper cover.

detailed description

In order to enable those skilled in the art to better understand the technical solutions of the present invention, the upper cover opening mechanism and the reaction chamber of the reaction chamber provided by the present invention will be described in detail below with reference to the accompanying drawings.

2 and FIG. 3, FIG. 2 is a schematic structural view of an upper cover opening mechanism of a reaction chamber according to an embodiment of the present invention; and FIG. 3 is an enlarged view of a region A in FIG. The reaction chamber 20 includes a cavity 21, an upper cover 22, and an upper cover opening mechanism. The upper cover opening mechanism is for driving the upper cover 22 of the reaction chamber 20 to be opened or closed, and is located at one side of the reaction chamber 20 and includes at least one driving unit 23. A seal 24 such as a seal ring is provided between the cavity 21 and the upper cover 22 for sealing the cavity 21 and the upper cover 22 when the upper cover 22 is closed; preferably, the seal 24 is provided On the top surface of the cavity 21.

Each of the driving units 23 includes a first fixing member 230, a second fixing member 231, a first connecting member 232, and a driving device 233. The first fixing member 230 is fixed on the upper cover 22 of the reaction chamber 20 and is hinged to the first end of the first connecting member 232. The driving device 233 is hinged to the second end of the first connecting member 232. The second fixing member 231 is fixed on the cavity 21 of the reaction chamber 20, and is hinged with the first connecting member 232 between the first end and the second end of the first connecting member 231; specifically, as shown in FIG. 3 and As shown in FIG. 4, the first fixing member 230 and the first end of the first connecting member 232 are hinged by the fixing pin 234 and the movable pin 235, and the fixing pin 234 and the movable pin 235 are away from the first end of the first connecting member 232. The second fixing member 231 and the first connecting member 232 are hinged between the movable pin 235 and the second end of the first connecting member 232. Preferably, as shown in FIG. 2, in the embodiment, the upper cover opening mechanism includes two driving units, and the two driving units are symmetrically disposed on one side of the reaction chamber to open and close the upper cover 22 The force is evenly applied to switch the upper cover 22 more smoothly.

Specifically, the diameter of the pin hole of the first fixing member 230 and the first connecting member 232 that cooperates with the fixing pin 234 is the same as the diameter of the fixing pin 234; the movable pin on the first fixing member 230 or the first connecting member 232 The diameter of the pin hole of the 235 is larger than the diameter of the movable pin 235, so that the upper cover 22 can be rotated by the fixing pin 234 as a rotating shaft, and the angle of rotation is in accordance with the movable pin 235 in the pin hole of the movable pin 235. Depending on the scope of the activity. Further, the diameter of the fixing pin 234 or the diameter of the movable pin 235 is equal. Preferably, in the present embodiment, the diameter of the pin hole on the first fixing member 230 that cooperates with the movable pin 235 is equal to the diameter of the movable pin 235, and the diameter of the pin hole on the first connecting member 232 that cooperates with the movable pin 235. The diameter of the pin hole 235 is larger than that of the pin hole 235, so that the upper cover 22 can be rotated by the fixing pin 234 as a rotating shaft, and the rotating motion can have a certain range of rotation angle. Further preferably, the difference between the diameter of the pin hole of the first connecting member 232 that cooperates with the movable pin 235 and the diameter of the movable pin 235 ranges from 3 to 5 mm, so that the upper cover 22 can be secured to the fixing pin 234. Flexibly rotating within a certain range of angles for rotating the shaft without excessively causing redundancy and waste of unnecessary structure and space.

In the present embodiment, the first end of the first fixing member 230 and the first connecting member 232 are hinged by the fixing pin 234 and the movable pin 235 to constitute a biaxial hinge mechanism. Moreover, since the diameter of the pin hole on the first fixing member 230 that cooperates with the movable pin 235 is the same as the diameter of the movable pin 235, the diameter of the pin hole on the first end of the first connecting member 232 that cooperates with the movable pin 235 is larger than The diameter of the movable pin 235, under the action of the gravity of the upper cover 22, during the opening process of the upper cover 22, the end of the upper cover 22 close to the upper cover opening mechanism will rise before the end away from the upper cover opening mechanism, and Disengaged from the sealing member 24; during the closing process of the upper cover 22, the end of the upper cover 22 away from the upper cover opening mechanism is lowered before the end close to the upper cover opening mechanism, so that the end of the upper cover 22 close to the upper cover opening mechanism Finally, it is in contact with the sealing member 24. Therefore, during the opening and closing of the upper cover 22, the upper cover opening mechanism provided by the embodiment avoids the friction between the upper cover 22, especially the end of the upper cover 22 close to the upper cover opening mechanism and the sealing member 24, Thereby the wear of the seal 24 is avoided.

In the present embodiment, the driving device 233 includes a cylinder or a motor; preferably, the driving device 233 includes a cylinder 2330, a sliding rod 2331, and a second connecting member 2332. The piston rod of the cylinder 2330 is connected to the sliding rod 2331; the sliding rod 2331 is provided with a sliding portion 2331a, and the two ends of the sliding portion 2331a are a limiting portion 2331b, as shown in FIG. 5; the second connecting member 2332 and the first connecting member The second end of the 232 is hinged, and a through hole is formed on the sliding portion 2331a of the sliding rod 2331 so that the second connecting member 2332 surrounds the sliding portion 2331a of the sliding rod 2331 and is at the limit of the two ends of the sliding portion 2331a. The bit portions 2331b slide along the sliding portion 2331a. Preferably, in the present embodiment, the length of the sliding portion 2331a is greater than the length of the through hole on the second connecting member 2332 that cooperates with the sliding portion 2331a.

The principle and process of opening and closing the upper cover 22 of the upper cover opening mechanism of the reaction chamber provided by the embodiment of the present invention will be described in detail below with reference to FIGS. 6 and 7.

The opening process of the upper cover 22 can be divided into two stages. In the first stage of the opening process of the upper cover 22, the piston rod of the cylinder 2330 drives the sliding rod 2331 and the second connecting member 2332 to move downward, so that the first connecting member 232 is pivoted with the hinge shaft of the second fixing member 231. Turn, also That is, the second end of the first link 232 moves downwardly and the first end moves upward. During the upward movement of the first end of the first connecting member 232, since the diameter of the pin hole of the first connecting member 232 that cooperates with the movable pin 235 is larger than the diameter of the movable pin 235, under the gravity of the upper cover 22 The upper cover 22 will first rotate with the fixing pin 234 as a rotating shaft. During the rotation of the upper cover 22, the side of the movable pin 235 will move upward until its state is matched with the movable pin 235 on the first connecting member 232. The bottom contact of the pin hole gradually becomes in contact with the top of the pin hole; when the movable pin 235 is in contact with the top of the pin hole, the upper cover 22 cannot continue to rotate with the fixing pin 234 as the rotating shaft, and the first stage ends. In this process, the end of the upper cover 22 close to the upper cover opening mechanism is raised to a predetermined height and is out of contact with the sealing member 24.

In the second stage of the opening process of the upper cover 22, the piston rod of the cylinder 2330 continues to drive the sliding rod 2331, the second connecting member 2332 to move downward, and the first connecting member 232 is pivoted with the second fixing member 231 The shaft rotates. Since the movable pin 235 has already contacted the top of the pin hole of the first connecting member 232 that cooperates with the movable pin 235 in the first stage, the fixing pin 234 and the movable pin 235 are rotated when the first connecting member 232 is rotated. At the same time, the upper cover 22 is driven to rotate synchronously with the first connecting member 232, thereby achieving the opening of the upper cover 22.

According to the above, during the opening process of the upper cover 22, the end of the upper cover 22 close to the upper cover opening mechanism will first move upward by a predetermined distance to make it out of contact with the sealing member 24, and the subsequent opening process of the upper cover 22 In this case, it is not in contact with the sealing member 24, so that the upper cover 22 is opened without friction between the sealing member 24, so that the sealing member 24 is not worn and the reaction chamber 20 is not affected by the wear thereof. Sealing.

The opening angle of the upper cover 22 is generally less than 90°, as shown in FIG. 8. Therefore, when the upper cover 22 is in the open state, under the influence of the gravity of the upper cover 22, the second connecting member 2332 is located with the sliding member 2331. The stopper portion 2331b above the sliding portion 2331a is in contact.

The closing process of the upper cover 22 can be divided into three stages. In the first stage of the closing process of the upper cover 22, under the action of the gravity of the upper cover 22 and the driving of the cylinder 2330, the second connecting member 2332 moves upward and drives the first connecting member 232 with the second fixing member 231. Hinged The rotation of the rotating shaft further drives the upper cover 22 to rotate toward the top end of the cavity 21 until the end of the upper cover 22 remote from the upper cover opening mechanism comes into contact with the cavity 21 and the sealing member 24. In this process, the movable pin 235 comes into contact with the tip end of the pin hole of the first connecting member 232 that engages with the movable pin 235 due to the gravity of the upper cover 22.

In the second stage of the closing process of the upper cover 22, under the driving of the gravity of the upper cover 22 and the driving of the cylinder 2330, the first connecting member 232 continues to rotate, and the upper cover 22 is driven to rotate with the fixing pin 234 as a rotating shaft, that is, the upper cover The upper end of the upper cover opening mechanism is moved downwardly until it comes into contact with the sealing member 24, thereby achieving the closing of the upper cover 22.

In the third stage of the closing process of the upper cover 22, the cylinder 2330 continues to drive the sliding rod 2331 to move upward to relatively slide the second connecting member 2332 and the sliding rod 2331, and the second connecting member 232 and the lower portion of the sliding portion 2331a. The limiting portion 2331b is in contact. During the process, when the sealing member 24 is deformed by the vacuum in the reaction chamber 20, the contact of the second connecting member 2332 and the limiting portion 2331b under the sliding portion 2331a can compensate for the upper cover 22 and The seals 24 are sealed to ensure a good seal of the reaction chamber 20.

Preferably, in the present embodiment, the difference between the length of the sliding portion 2331a and the length of the through hole on the second connecting member 2332 ranges from 5 to 10 mm. Moreover, the difference between the length of the sliding portion 2331a and the through hole of the second connecting member 2332 that cooperates with the sliding portion 2331a is greater than the maximum amount of deformation of the sealing member 24 during the opening and closing of the upper cover, preferably The difference between the two ranges from 3 to 5 mm. Thus, it is possible to ensure that the sliding portion 2331a smoothly slides in the through hole in the second connecting member 2332 without causing unnecessary redundancy and waste of structure and space.

In this embodiment, each of the driving units 23 further includes a first cushion 236. The first cushion 236 is disposed on the second fixing member 231 and is hinged around the first connecting member 232 and the second connecting member 2332. On the path of rotation, it is used to buffer the upper cover 22 when the upper cover 22 is opened to the maximum angle.

In this embodiment, the upper cover opening mechanism further includes a second cushion 25, and the second cushion 25 is provided on the surface of the cavity 21 in contact with the upper cover 22 for buffering the impact force between the upper cover 22 and the cavity 21 during the opening and closing of the upper cover 22. Since the linear velocity of the upper cover 21 away from the first fixing member 230 during the rotation is the largest, and during the closing of the upper cover 21, the side of the upper cover 22 is first brought into contact with the cavity 21, that is: During the closing process of the upper cover 21, the impact force between the side of the upper cover 21 away from the first fixing member 230 and the cavity is the largest. Therefore, preferably, the second cushion 25 is disposed on the cavity 21 away from the second. One side of the fixing member 231.

The upper cover opening mechanism of the reaction chamber provided by the embodiment is driven by the hinge of the first connecting member 232 and the first connecting member 232 and the first fixing member 230 and the second fixing member 231. The lid 22 is opened or closed, and the seal 24 disposed between the cavity 21 of the reaction chamber 20 and the upper cover 22 is not worn during the process. Compared with the prior art, during the opening or closing of the upper cover 22, the gravity of the upper cover 22 is received by the hinge mechanism, so that the bearing capacity is greater, and the force of each component is simpler and more reasonable; The structure is simple and has fewer parts; and the upper cover 22 can also have a larger opening angle, so that it can be applied to more occasions.

It should be noted that, in this embodiment, the diameter of the pin hole of the first fixing member 230 that cooperates with the movable pin 235 is equal to the diameter of the movable pin 235, and the pin of the first connecting member 232 that cooperates with the movable pin 235. The diameter of the hole is larger than the diameter of the movable pin 235, but the invention is not limited thereto. In practical applications, the diameter of the pin hole on the first fixing member 230 that cooperates with the movable pin 235 may be larger than the diameter of the movable pin 235, and The diameter of the pin hole on the first connecting member 232 that cooperates with the movable pin 235 is equal to the diameter of the movable pin 235.

As another aspect of the present invention, the present invention also provides a reaction chamber including a cavity, an upper cover and an upper cover opening mechanism, the upper cover being located above the cavity with a sealing member such as a sealing ring therebetween In order to seal the inside of the cavity when the upper cover is closed on the cavity. The upper cover opening mechanism is located outside the cavity and connected to the upper cover, and the upper cover opening mechanism can be any one of the upper cover opening mechanisms provided by the foregoing embodiments of the present invention.

The reaction chamber provided by the embodiment of the invention adopts the upper cover opening mechanism provided by the foregoing embodiment, which can reduce the wear of the sealing member disposed between the cavity and the upper cover of the reaction chamber during the opening and closing of the upper cover. Compared with the prior art, in the embodiment, during the opening or closing of the upper cover, the gravity of the upper cover is received by the hinge mechanism, so that the bearing capacity is greater, and the force of each component is simpler and more reasonable; The reaction chamber provided by the embodiment of the present invention has the characteristics of simple structure and few parts due to the simple structure and the reduction of the parts of the upper cover opening mechanism. In addition, the reaction chamber provided by the embodiment of the present invention can also make the upper cover It has a larger opening angle and can be used in more situations.

It is to be understood that the above embodiments are merely exemplary embodiments employed to explain the principles of the invention, but the invention is not limited thereto. Various modifications and improvements can be made by those skilled in the art without departing from the spirit and scope of the invention. These modifications and improvements are also considered to be within the scope of the invention.

Claims

An upper cover opening mechanism of a reaction chamber for driving an upper cover of the reaction chamber to be opened or closed, characterized in that the upper cover opening mechanism is located at one side of the reaction chamber, and includes at least one driving unit ;

Each driving unit includes a first fixing member, a second fixing member, a first connecting member and a driving device;

The first fixing member is fixed on the upper cover of the reaction chamber, and is hinged to the first end of the first connecting member;

The driving device is hinged to the second end of the first connecting member;

The second fixing member is fixed to the cavity of the reaction chamber, and is hinged to the first connecting member between the first end and the second end of the first connecting member.
The upper cover opening mechanism of the reaction chamber according to claim 1, wherein the first fixing member and the first end of the first connecting member are hinged by a fixing pin and a movable pin, and the fixing pin And the movable pin are sequentially disposed in a direction away from the first end of the first connecting member; and

The second fixing member and the first connecting member are hinged between the movable pin and the second end of the first connecting member.
The upper cover opening mechanism of the reaction chamber according to claim 2, wherein a diameter of the pin hole of the first fixing member and the first connecting member that engages with the fixing pin is different from that of the fixing pin The diameter of the pin hole of the first fixing member or the first connecting member engaged with the movable pin is larger than the diameter of the movable pin.
The upper cover opening mechanism of a reaction chamber according to claim 3, wherein said fixing pin is equal in diameter to said movable pin.
The upper cover opening mechanism of the reaction chamber according to claim 3, wherein The difference between the diameter of the pin hole of the first connecting member or the first fixing member that engages with the movable pin and the diameter of the movable pin ranges from 3 to 5 mm.
The upper cover opening mechanism of a reaction chamber according to claim 1, wherein said upper cover opening mechanism comprises two driving units, and said two driving units are symmetrically mounted on one side of said reaction chamber .
The upper cover opening mechanism of the reaction chamber according to claim 1, wherein the driving device comprises a cylinder, a sliding rod, and a second connecting member; and a piston rod of the cylinder is connected to the sliding rod;

The sliding rod is provided with a sliding portion;

The second connecting member is hinged with the second end of the first connecting member, and is provided with a through hole that cooperates with the sliding portion of the sliding rod, so that the second connecting member surrounds the sliding rod The sliding part.
The upper cover opening mechanism of the reaction chamber according to claim 7, wherein the length of the sliding portion is larger than the length of the through hole on the second connecting member that matches the sliding portion.
The upper cover opening mechanism of the reaction chamber according to claim 8, wherein a difference between a length of the sliding portion and a length of the through hole in the second connecting member ranges from 5 to 10 mm.
The upper cover opening mechanism of the reaction chamber according to claim 8, wherein a difference between the sliding portion and a length of the through hole in the second connecting member that matches the sliding portion A maximum amount of deformation of the seal between the cavity and the upper cover disposed between the reaction chamber during opening and closing of the upper cover.
The upper cover opening mechanism of the reaction chamber according to claim 10, wherein a difference between the length of the sliding portion and the through hole of the second connecting member that matches the sliding portion And the difference between the seal and the maximum deformation amount during the opening and closing of the upper cover ranges from 3 to 5 mm.
A reaction chamber includes a cavity, an upper cover and an upper cover opening mechanism, the upper cover is located above the cavity and is provided with a sealing member therebetween, and the upper cover opening mechanism is located outside the cavity and connected to the upper cover The upper cover opening mechanism adopts the upper cover opening mechanism according to any one of claims 1-11.