WO2015147367A1

WO2015147367A1 - Heat shield cooling apparatus for ingot growing device using water-cooled tube

Info

Publication number: WO2015147367A1
Application number: PCT/KR2014/003419
Authority: WO
Inventors: 박진섭; 김진노; 이경석; 이성호; 이재식
Original assignee: (주)에스테크
Priority date: 2014-03-26
Filing date: 2014-04-18
Publication date: 2015-10-01
Also published as: KR101523504B1

Abstract

The present invention relates to a heat shield cooling apparatus of an ingot growing device using a water-cooled tube, the apparatus comprising: a heat shield installed on the top of a crucible of an ingot growing device; and a water-cooled tube of a cooling apparatus which is in surface contact with the surface of the heat shield and in which a cooling water forcedly circulates, wherein the heat shield comprises: an inner shield and an outer cover which consist of graphite having excellent heat resistance and heat conductivity; and an insulation disposed between the inner shield and the outer cover, to thereby be able to efficiently emit the high-temperature heat energy radiated from the ingot (S) and reduce the ingot pulling speed such that the productivity (yield) can significantly increase.

Description

Heat shield member cooling device of ingot growth device using water cooling tube

The present invention relates to a heat shield cooling device (heat shield) of the ingot growth apparatus using a water-cooled tube, in detail, the heat shield member is installed in the top of the crucible (hot zone) of the ingot growth apparatus in a double structure, the heat shield member By contacting the surface of the water cooling tube with the forced circulation of the cooling water to ensure that the heat shield member is cooled efficiently, the ingot pulling speed is shortened to increase the productivity (yield) significantly.

Generally, ingot growth apparatus using Czochralski crystal growth method is a silicon ingot growth furnace (hereinafter referred to as a 'growth furnace'), for example, a crucible installed in a hot zone area. Solid raw materials such as polysilicon (or gallium arsenide) and impurities are introduced (supplied), heated and melted with an electrothermal heater to form a silicon melt, and then a single crystal seed is contacted with the silicon melt. When it is pulled up gradually, a silicon ingot of a predetermined length and a predetermined diameter is obtained.

Looking at the growth process of the silicon ingot, stacking (filling) of polysilicon and dopant in a quartz crucible → vacuum (vacuum) to maintain the growth furnace at high vacuum → melting (melting) of polysilicon → Dipping the seed into contact with the melt → Necking to raise the diameter while reducing the diameter to avoid defects → Shouldering to grow the diameter of the ingot → Body gross to grow the length of the ingot Growth Ingot is grown through various processes such as tailing to reduce the diameter of the ingot and cooling down to cool the ingot.

On the other hand, there have been many attempts to increase the productivity and stabilize the yield by improving the cooling rate of the growing ingot when growing silicon single crystal by Czochralski crystal growth method.

For example, a water cooling jacket may be installed around an ingot in order to efficiently radiate thermal energy radiated from a growing ingot, or a heat shield may be formed of a material having excellent cooling efficiency, or a heat shield. However, various methods and means such as mounting a cooling structure were devised, but they did not efficiently radiate the thermal energy radiated from the ingot, and most of them were not suitable for high temperature environments. Was leaking, or a number of other problems occurred.

According to the present invention, the ingot pulling speed is reduced by surface contacting a water cooling tube (or a water cooling jacket) through which cooling water is forced to circulate on the surface of the heat shield member installed on the crucible of the ingot growth apparatus, thereby greatly increasing productivity and yield. It is characterized by providing a heat shield member cooling device of an ingot growth apparatus using an improved water cooling tube.

Another object of the present invention is characterized in that the heat shield member is configured in a dual structure to reduce the speed of pulling up the ingot and greatly improve productivity and yield.

Another object of the present invention is characterized in that the heat shield member is efficiently cooled by contacting the upper surface of the heat shield member with the water cooling tube (or the water cooling jacket) through which the coolant is forcedly circulated.

Another object of the present invention is to form a cross-sectional shape of the water cooling tube in the shape of a square, circle, ellipse, etc. in order to increase the contact area with the heat shield member, and also the shape of the contact portion of the heat shield member in contact with the water cooling tube. Characterized in that the tube shape.

The heat shield member cooling apparatus of the ingot growth apparatus using the water cooling tube of the present invention may include a heat shield member installed on the crucible upper portion of the ingot growth apparatus, and a water cooling tube of the cooling apparatus in surface contact with the surface of the heat shield member and forced to circulate the cooling water. have.

The heat shield member may be formed of only graphite (Graphite) having excellent heat resistance and heat conductivity, and constitutes an inner shield and an outer cover with graphite, and installs an insulator between the inner shield and the outer cover to form an ingot (S). It can also be configured to effectively release the high temperature thermal energy radiated from.

The insulation may be carbon felt.

The water cooling tube of the cooling device may be installed on the lifting means of the heat shielding member to move up and down along the heat shielding member lifting means.

The cooling device is in contact with the surface of the inner shield 41, for example, the upper surface 46 of the inner shield 41, or in the receiving groove 46a formed in the upper surface 46 of the inner shield 41; Outer circumference of the water cooling tube 21 of the circular tube structure formed with a hollow 23 to the surface contact, the circulation path 22 formed inside the water cooling tube 21 to circulate the cooling water (W), the water cooling tube 21 Fixing part 25 which protrudes to both sides, the support part 24 which is fitted and fixed to the lower end of both lifting bar 61, respectively, the connection member 26 which connects the fixing part 25 and the support part 24, both lifting bars Flow hole 67 formed in each of the longitudinal direction of the (61), the flexible pipe 50 connecting the lower and both sides of the water hole 67 and the circulation path 22, the water flow hole (67) of both lifting rods 61

Circulation pipes

34 and 38 connecting the upper portion, and the cooling means 35 and the circulation pump 36 is connected between the circulation pipes (34, 38).

The flexible pipe may be connected to both side holes and the circulation path by a nipple.

The circulation pipe may further include a temperature sensor for sensing the temperature of the cooling water (W) to control the cooling means.

The cross-sectional shape of the water cooling tube may be either circular, elliptical, or square.

The water cooling tube may further include a separator installed in each of the cooling water (W) inlet and outlet.

The present invention comprises a heat shield member installed in the top of the crucible (Hot Zone) of the ingot growth apparatus in a double structure, and the heat shield member is cooled efficiently by contacting the surface of the heat shield member with the water cooling tube forced to circulate the cooling water ingot pulling speed Is shortened and productivity (yield) is greatly improved.

In the present invention, since the coolant (W) is forced to circulate by the circulation pump 36 to absorb the high heat of the inner shield 41 which is in surface contact, the heat shield member 4 is further cooled by about 10 ~ 100 ℃, the ingot ( S) Productivity is greatly improved by reducing the increase time by 10 ~ 30%, and the overall process time including the increase time is also reduced by about 5 ~ 10%.

The present invention has a simple structure, easy to manufacture, install and maintain, and can be operated at low cost.

In the present invention, both ends of the connection member 26 of the water cooling tube 21 are connected to the fixing part 25 and the support part 24 by

pins

27 and 28, respectively, so as to position (contact surface with the inner shield 41). There is an effect that a certain contact area with the inner shield 41 is achieved without departing.

Since the cooling device 20 of the present invention is installed in the heat shield member elevating means 6, there is an effect of raising or lowering together along the heat shield member 4 by the heat shield member elevating means 6.

The cooling device 20 of the present invention is installed on the upper surface 46 of the inner shield 41 or accommodated in the receiving groove 46a, thus affecting the visibility of the diameter control device and not interfering with the growth of the ingot S. It works.

Since the cooling device 20 of the present invention is located above the heat shielding member 4, the distance from the melt M is considerably spaced apart, thereby avoiding a high temperature environment. By being installed there is an effect that can prevent the contamination of the growing ingot.

The water-cooled tube 21 of the present invention absorbs and releases heat energy radiated from the ingot S while the heat is generated by the cooling water W forced to circulate in contact with the inner shield 41 made of graphite. It is a very useful invention with the effect that the high ingot (S) cooling efficiency is greatly improved.

1 is a cross-sectional view of the cooling device shown as an example of the present invention.

2 is a cross-sectional view showing a heat shield member as an example of the present invention.

3 is a plan cross-sectional view of the cooling device shown as an example of the present invention.

4 is a cross-sectional view of a cooling device shown as an example of the present invention.

5 is a cross-sectional view of the cooling water (W) circulation state of the cooling device shown as an example of the present invention.

6 is a cross-sectional plan view of a cooling water (W) circulation state of the cooling device according to another embodiment of the present invention.

7 is a cross-sectional view of a heat shield member as shown in an example of the present invention.

8 is a cross-sectional view of the heat shield member in a raised state according to another embodiment of the present invention.

9 is a cross-sectional view of the water cooling tube receiving groove showing another example of the present invention.

(1)-Crude (2)-Main Chamber

(3)-dome chamber (4)-heat shield

(5)-water cooling pipes (6)-heat shield member lifting means

(7)-Electric Heater (8)-Heat Shield

(9) --The Crucible Pedestal (10)-Pedestal

(11)-drive shaft (12)-drive means

(13)-Exhaust Pipe (14)-Filter

(15)-vacuum pump (20)-chiller

(21) (21a)-Water cooling tube (22)-Circulation furnace

(24)-support (25) (47)-government

(26)-connection member (27) (28)-pin

(31)-lifting port (32)-sealing member

(34) (38)-Circulation tube (35)-Cooling means

(36)-Circulation pump (37)-Temperature sensor

(41)-Inner Shield (42)-Outer Cover

(43)-Insulation (44) (45)-Open

(46)-Top Side (46a)-Receiving Groove

(48)-Tightening member (50)-Flexible tube

(51) (53)-Nipple (61)-Heel Bar

(62)-Ballbush (64)-Ballscrew

(65) (63)-Shaft Member (66)-Motor

(67)-Water well (M)-Melt

(S)-Ingot (W)-Coolant

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the embodiments of the present invention, the same components are denoted by the same reference numerals as much as possible, and detailed descriptions of related well-known structures and functions will be omitted so as not to obscure the subject matter of the present invention. The matters expressed in the following may be different from the form actually embodied in the schematic diagram for easily explaining the embodiments of the present invention.

According to the present invention, the ingot pulling speed is greatly shortened by surface contacting a water cooling tube through which cooling water is forced to circulate on the surface or upper surface of a heat shield installed on the crucible upper portion of the ingot growth apparatus.

FIG. 1 is a configuration diagram of an ingot growth apparatus using a Czochralski crystal growth method as an example of the present invention. The crucible 1 is installed in a main chamber 2 and an upper portion of the main chamber 2. The dome chamber (3) to be installed, the full chamber (not shown) installed above the dome chamber (3), the elevating means (6) for moving the dome chamber (3) and the full chamber up and down, and the silicon ingot Impression means (not shown) for pulling up at a speed, a heat shield member 4 and a water cooling tube 5 installed in a hot zone above the crucible 1, and a heat shield member for moving the heat shield member 4 up and down. Lifting means (6), heat transfer heater (7) installed in the outside of the crucible (1), heat shield (8) installed outside the heat transfer heater (7), pedestal installed on the bottom of the crucible pedestal (9) (Pedestal) 10, the drive shaft 11 and the drive means 12, the filter 14, the vacuum pump 15, the power supply unit, and the cooling unit installed in the exhaust pipe 13 below the main chamber (2) My In the present invention, by using a graphite (Graphite) excellent heat resistance and thermal conductivity properties in the present invention by configuring the heat shield member 4 in a double structure, the high temperature heat energy radiated from the ingot (S) is effectively released, By installing the water cooling tube 21 of the cooling device 20 in which the coolant is forced to circulate on the surface of the heat shield member 4, the heat shield member 4 is cooled more efficiently, and thus the pulling speed of the ingot S is greatly shortened and the productivity ( Yield) is also greatly improved.

Figure 2 is a cross-sectional configuration of the heat shield member 4 of the present invention shown as an example, it is configured in a dual structure to effectively discharge the high temperature thermal energy radiated from the ingot (S).

The heat shield member 4 may be formed of only graphite (Graphite) having excellent heat resistance and thermal conductivity, and constitutes an inner shield and an outer cover with graphite, and installs an insulator between the inner shield and the outer cover to form an ingot. It can also be configured to effectively release the high temperature thermal energy radiated from (S).

In addition, the heat shield member 4 is formed of an inner shield 41 and an outer shield 42 made of graphite having excellent heat resistance and thermal conductivity, and the inner shield 41. Insulation material 43, such as carbon felt is coupled or filled between the outer cover and the outer cover 42, the high-temperature thermal energy radiated from the ingot (S) is effectively released, the ingot (S) in the upper and lower centers grow and

Opening portions

44 and 45 are formed to be pulled up, and outward fixing portions 47 are formed at both sides of the upper portion, and are connected to the elevating rods 61 of the heat shield member elevating means 6 to be melted. The polysilicon is replenished or raised or lowered as needed.

The heat shield member elevating means 6 includes an elevating port 31 formed on both sides of the dome chamber 3, a sealing member 32 installed in a vertical hole of the elevating port 31, and a sealing member 32. Lifting rod 31 coupled to move up and down, the ball bush 62 is installed on the upper end of the lifting rod 31, the ball screw 64 is fastened to the ball bush 62, the ball screw 64 And upper and

lower shaft members

65 and 63 supporting the upper and lower ends of the upper and lower ends, respectively, the motor 66 fixed to the upper shaft member 65 and axially connected to the upper end of the ball screw 64, and the elevating rod 31. It is composed of the fixing part 47 of the heat shield member 5 fixed to the lower end by the fastening member 48, the lifting rod when the ball screw 64 is rotated forward / reverse according to the forward or reverse rotation state of the motor 66 Since 31 is also raised or lowered, the heat shield member 4 fixed to the lower end of the elevating rod 31 is also moved up or down. The upper and

lower shaft members

65 and 63 are fixed to the upper surface of the lifting port 31 or one end of the dome chamber 3, and the sealing member 32 maintains the airtightness (vacuum) inside the chamber. Will guide the lifting movement.

The heat shield member 4 is raised by the heat shield member elevating means 6 when melting or polysilicon is injected, and is lowered when the ingot grows.

According to the present invention, the water cooling tube 21 of the cooling device 20 is brought into contact with the inner shield 41 surface of the heat shield member 4, preferably the upper surface of the inner shield 41, thereby greatly improving the heat dissipation effect.

The cooling device 20 is placed on the surface of the inner shield 41 of a circular structure, for example, the upper surface 46 of the inner shield 41, the surface contact, or indented in the upper surface 46 of the inner shield 41 The water cooling tube 21 having a circular tube structure having a hollow 23 formed therein so as to be in surface contact with the receiving groove 46a formed therein, and a circulation path formed inside the water cooling tube 21 to allow the cooling water W to circulate. (22), a fixing portion (25) projecting on both sides of the outer periphery of the water cooling tube (21), a supporting portion (24) fitted and fixed to the lower end portions of both lifting rods (61), and a fixing portion (25) and a supporting portion. A connecting member 26 for connecting the 24, and a water hole 67 formed in each of the longitudinal direction of the elevating rods 61, and connecting the lower side of the both water holes 67 and the circulation path 22, respectively The cooling means 35 and the circulation pump 36 are connected between the flexible pipe 50 and the

circulation pipes

34 and 38 connecting upper portions of the running holes 67 of both elevating rods 61, thus cooling water. (W) Since the forced circulation by the circulation pump 36 absorbs the high heat of the inner shield 41 which is in surface contact, the heat shield member 4 is further cooled by about 10 to 100 ° C., and the pulling time of the ingot S is 10 to 30. By reducing the%, productivity (yield) is greatly improved, and the overall process time including the increase time can be reduced by about 5 to 10%.

The flexible pipe 50 may be connected to both side drains 67 and the circulation path 22 using

nipples

51 and 53.

The cooling water (W) circulation pipe 38 may further include a temperature sensor 37 for sensing the temperature of the cooling water (W) to control the cooling means (35).

The temperature of the forced circulation cooling water W sensed by the temperature sensor 37 is input to the cooling means 35, and the cooling means 35 has a temperature value input from the temperature sensor 37 exceeding a set temperature value. When the cooling operation is performed to maintain the water temperature of the forced cooling water (W) in the set temperature range.

The cross-sectional shape of the water cooling tube 21 of the cooling device 20 may be configured in a circular, oval or polygonal shape as shown in Figs. 1, 4 and 7, the cross-sectional shape of the water cooling tube 21a as shown in FIG. It is preferable that the cooling efficiency is further improved by forming a rectangular shape to expand the contact area with the inner shield 41.

When the cross-sectional shape of the water cooling tube 21 of the cooling device 20 is circular, elliptical, polygonal or the like, as illustrated in FIG. 9, the upper surface 46 of the heat shield member 4 to which the water cooling tube 21 is in contact By forming the receiving groove 46a having the same shape and being accommodated, the contact area with the inner shield 41 is expanded to further improve the cooling efficiency.

5 is a cross-sectional plan view of a state in which the cooling water (W) of the cooling device 20 is circulated, and FIG. 6 is a cross-sectional plan view of a cooling water (W) circulation state of the cooling device shown in another example of the present invention, and the cooling water (W) flows in. Separator plates are provided in predetermined sections of the portion (inflow portion) and the portion (outflow portion) to be discharged so that the cooling water (W) is reliably nutrientd when the water is circulated along the circulation path.

The parts or parts constituting the cooling device 20 of the present invention have heat resistance to sufficiently withstand the ambient temperature.

The cooling device 20 of the present invention is simple in construction, easy to manufacture, install and maintain, and can be operated at low cost.

In the present invention, both ends of the connection member 26 are fixed parts 25 so as to achieve a reliable contact area with the inner shield 41 without departing from the position (the contact surface with the inner shield 41) of the water cooling tube 21. And pins 27 and 28 to the support 24, respectively.

The water cooling tube 21 of the present invention cooling device 20 is placed on the inner surface of the upper surface 46 of the inner shield 41, or is accommodated in the receiving groove (46a), so that the heat shield member (4) by the lifting means It rises or falls together along the member 4, and also affects the visibility of the diameter control device during the ingot S growth and does not interfere.

Since the cooling device 20 of the present invention is positioned above the heat shielding member 4, the distance from the melt M is considerably spaced apart, thereby avoiding a high temperature environment. By installing it, contamination of a growing ingot can be prevented.

In the present invention, the cooling water circulation of the water cooling tube 5 and the water cooling tube 21 may be interlocked or simultaneously achieved.

The water cooling tube 21 of the present invention is brought into contact with the inner shield 41 made of graphite (heat) is generated by the forced circulation cooling water (W), which is the effect of the absorption and release of heat energy radiated from the ingot (S) Raising the cooling efficiency of the ingot (S) is also improved.

The present invention described above is not limited to the present embodiment and the accompanying drawings, and various substitutions, modifications, and changes are possible without departing from the technical spirit of the present invention, and this is in the technical field to which the present invention belongs. It is self-evident for those of ordinary knowledge.

Claims

A heat shield member installed above the crucible of the ingot growth apparatus;

A water cooling tube of the cooling apparatus in surface contact with the surface of the heat shielding member and forcibly circulating cooling water;

Heat shield member cooling device of the ingot growth apparatus using a water cooling tube comprising a.
The method of claim 1:

The heat shield member,

The inner shield and the outer cover are composed of graphite having excellent heat resistance and thermal conductivity, and an insulating material is installed between the inner shield and the outer cover to effectively discharge high-temperature heat energy radiated from the ingot S. Cooling member cooling device of the ingot growth apparatus using a water-cooled tube characterized in that.
The method of claim 2 wherein:

The heat insulating member cooling device of the ingot growth apparatus using a water cooling tube, characterized in that the carbon felt.
The method according to claim 1 or 2, wherein:

The water cooling tube of the chiller,

The heat shield member cooling device of the ingot growth apparatus using a water-cooled tube, characterized in that installed in the inner shield of the heat shield member to move up and down along the heat shield member lifting means.
The method according to claim 1 or 2, wherein:

Chiller,

A water-cooled tube 21 having a circular tube structure in which a hollow 23 is formed to be in surface contact with the inner shield 41 surface;

A circulation path 22 formed inside the water cooling tube 21 to allow the cooling water W to circulate;

Fixing portion 25 protruding to both sides of the outer periphery of the water cooling tube 21;

Support portions 24 are fitted to each of the lower end of the elevating bar (61) fixed;

A connection member 26 connecting the fixing part 25 and the support part 24;

Flowing water holes 67 respectively formed in the longitudinal direction of both lifting bars 61;

Flexible pipes (50) connecting the lower both sides of the water hole (67) and the circulation path (22), respectively;

Circulation pipes 34 and 38 connecting upper portions of the flowing holes 67 of both elevating rods 61;

A cooling means 35 and a circulation pump 36 connected between the circulation pipes 34 and 38;

Heat shield member cooling device of the ingot growth apparatus using a water cooling tube comprising a.
The method of claim 5:

A temperature sensor which senses the temperature of the cooling water W in the circulation pipe so that the cooling means is controlled;

Heat shield member cooling device of the ingot growth apparatus using a water cooling tube further comprising.
The method of claim 5:

The cross-sectional shape of the water cooling tube is circular, elliptical, the heat shield member cooling device of the ingot growth apparatus using a water cooling tube, characterized in that any one.
The method of claim 5:

Separators are respectively installed in the inlet and outlet of the cooling water (W) of the water cooling tube;

Heat shield member cooling device of the ingot growth apparatus using a water cooling tube further comprising.