WO2015137691A1

WO2015137691A1 - Micro mixer using taylor-gortler vortex and method for manufacturing same

Info

Publication number: WO2015137691A1
Application number: PCT/KR2015/002285
Authority: WO
Inventors: 조형희; 김범석; 최지홍; 송지운; 김태환
Original assignee: 연세대학교 산학협력단
Priority date: 2014-03-10
Filing date: 2015-03-10
Publication date: 2015-09-17
Also published as: KR20150105856A

Abstract

Disclosed are a micro mixer using a Taylor-Gortler vortex and a method for manufacturing the same. The micro mixer according to an embodiment of the present invention, as a micro mixer (500A, 500B) which is supplied with different kinds of fluids and has a micro channel for mixing the different kinds of fluids, comprises: a supply channel (100) which is of a straight line shape and has a first supply channel (110) on one end into which a first fluid flows and a second supply channel (120) on the other end into which a second fluid flows; a mixing channel (300) which is in communication with the central part of the supply channel (100), and has a plurality of bent channel parts (310) which are separately arranged at a predetermined distance and are curved at a predetermined angle; and a discharge channel (400) which is formed on the other end of the mixing channel (300), and discharges the mixed fluid of the first fluid and the second fluid, wherein the first fluid and the second fluid form a Taylor-Gortler vortex while passing through the bent channel parts (310).

Description

Micro Mixer Using Taylor Gotler Vortex and Its Manufacturing Method

The present invention relates to a micromixer and a method of manufacturing the same, and more particularly, by generating a Taylor-Gotrler Vortex inside a flow path, a micro-molecule capable of improving the mixing efficiency of heterogeneous fluids. A mixer and a method of manufacturing the same.

Recently, researches on the development of integrated biological analysis systems for biomedical research such as point-of-care diagnostics, pathogen detection, environmental monitoring and new drug development have been actively conducted.

Among them, Nano-Bio technologies such as Bio MEMS or Bio Nano Information Technology (BINT) are the mainstream.

In particular, the interest in the detection of biomolecules is extremely high, but since biomolecules can have a great effect on the human body even with a very small amount, sensing technology capable of detecting them will be the core of the next-generation nanobiotechnology. .

To this end, the development of new types of biosensors, lab-on-a-chip (LOC) and micro-total-analysis-system using them are active.

LOC literally scales down the components of biological and chemical laboratories and implements them on one chip, allowing existing experiments to be performed on one chip. Micro-fluidic devices (micro valves, micro pumps, micro channels, micro filters, mixers, etc.) for collecting, transporting, processing, and measuring trace amounts of biological samples; , The reactor and sensor (immune sensor, biochemical sensor, etc.) for analyzing and detecting the sample, the actuator for driving the microfluidic device, the peripheral circuit part, etc. are integrated by using the MEMS process It is a small chemical / biological microprocessor. That is, the pretreatment, transportation, control, analysis, etc. of the biological sample are all performed on one chip of several cm ² .

The LOC concept, which can be carried out at hand by miniaturizing and integrating complex chemical processes, can reduce the amount of expensive samples used, minimize the waste, and provide excellent mobility and field adaptability for miniaturization. It's a revolution.

Miniature devices, such as LOCs and micro integrated analysis systems, contain multiple channels or microstructures so that all the processes required for analysis can be performed on a single chip. In such an ultra-compact device, effective mixing of reagents with samples carried by microchannels for analytical or biochemical reactions will be essential. In particular, in the field of bio-applied LOC, minimizing the amount of sample consumed is very important in terms of the design of the instrument and the cost in consideration of sampling. This requires a technique for minimizing the reaction time between chemicals in the LOC chip, which requires a mixing technique to mix the chemical reaction between samples. That is, there is a need for a mixing technique for smoothly reacting samples within the shortest flow path length.

However, microfluidic fluid flow shows unique characteristics that are different from existing large-scale systems, and fluid flow control and mixing to solve this problem have a profound effect on product performance.

In the existing large-scale system, the Reynolds number is expressed as a dimensionless number that can be represented in consideration of the size and flow characteristics of the system and the viscous effect by turning the propeller in the fluid. It is possible to induce turbulent flow by sufficiently increasing (the characteristic length of the system-fluid density-fluid velocity / viscosity), thereby obtaining a mixture of fluids.

However, in the case of microfluidic systems, since the Reynolds number is small, no turbulence is formed and only laminar flow is achieved, only mixing by diffusion can be expected, resulting in difficulty in obtaining a uniform mixture of fluids. Lose. Compared to mixing by convection (convection or advection) between flows, mixing by diffusion is very slow and inefficient because the diffusion occurs only at the interface where different fluids are in contact. This requires a technique for inducing mixing through the generation of vortex inside the channel. In general, increasing the inflow rate of the sample (increasing the number of Reynolds) can promote mixing between the samples, but this means that the consumption of the sample to be used soon increases. As mentioned, the reaction of LOC-based biosamples requires minimizing the consumption of the sample. In addition, if the number of Reynolds is increased to more than several hundreds by increasing the injection rate of the sample, it causes a rapid increase in pressure in the flow path. Will occur. In this regard, increasing the number of Reynolds to hundreds or more for mixing in real LOC applications is not a realistic approach. Considering the actual environment and conditions used, it is possible to set the area of the appropriate number of Reynolds applicable to the actual LOC to a maximum of several hundreds (≤ 200).

As a countermeasure for mixing in the low-speed low Reynolds number region, the mixing performance is improved through the active mixing method using a flow generating means inside the microchannel. Along with the possibility of leaking small amounts of fluid inside the microchannel, there is a problem of increased manufacturing cost and integration with other micro devices.

1 is a perspective view showing a micromixer according to the prior art.

Unlike the aforementioned microdevices, as shown in FIG. 1, there is also a passive mixing method in which fluids are mixed by introducing various static microstructures inside the microchannel.

In this case, the mixing performance may be lower than the above active mixing method, but many problems of the active mixing method may be solved, in particular, the manufacturing cost may be greatly reduced, and the integration with other micro devices may be easy, and the mixing ( It may have the advantage that no additional power source (e.g., current, electric field, magnetic field, etc.) required to effect mixing takes place.

In response to these needs, micromixers using various manual mixing methods have been reported.

However, in the case of the manual mixing methods of the existing technology, the mixing is performed by installing a lot of obstacles or partition walls in the microchannel, which causes a large pressure loss, and as more complex obstacles are inserted, The manufacturing process is complicated and the manufacturing cost is increased.

It is an object of the present invention to provide a microstructure having a structure capable of improving the mixing efficiency between heterogeneous fluids by causing advective motion in laminar conditions without inserting a structure for additional vortex generation. It is an object to provide a mixer.

Micro mixer according to an aspect of the present invention for achieving this object,

A micromixer having a fine flow path for receiving a heterogeneous fluid and mixing the heterogeneous fluid,

A straight supply passage having a first supply passage through which a first fluid flows into one end and a second supply passage through which a second fluid flows into the other end;

A mixing flow passage communicating with a central portion of the supply flow passage, the mixing flow passage having a plurality of flow path bent portions disposed spaced apart by a predetermined distance and bent at a predetermined angle; And

A discharge flow path formed at the other end of the mixing flow path, through which the mixed fluid of the first fluid and the second fluid is discharged;

Including,

The first fluid and the second fluid may be configured to form a Taylor-Gortler Vortex while passing through the flow path bent portion.

In this case, the pressure for supplying the first fluid to the first supply channel may be the same as the pressure for supplying the second fluid to the second supply channel.

In addition, between the supply passage and the mixed passage,

A straight inflow passage 200 may be formed having one end vertically communicating with the central portion of the supply flow passage and the other end communicating with the mixing flow passage.

In an embodiment, the angles a1 and a2 formed by the mixed flow passages bent by the flow path bending portion may be 20 degrees to 120 degrees.

In one embodiment, the ratio aspect ratio of the vertical heights H1 and H2 of the side surfaces of the mixing channel to the planar widths W1 and W2 of the mixing channel may be 1.0 to 10.0.

In one embodiment, the planar length (L1, L2) ratio (L1 / W1, L2 / W2) between the planar width (W1, W2) of the mixing flow path between the passage bends of the mixing flow path, 1.0 to 10.0 Can be.

Micro mixer according to another aspect of the present invention,

A first supply passage that supplies the first fluid, is formed in a direction opposite to the formation direction of the second supply passage, and communicates with one end of the mixing passage;

A second supply passage which supplies a second fluid, is formed in a direction opposite to the forming direction of the first supply passage, and is in communication with one end of the mixing passage;

A mixing passage communicating with one end of the first supply passage and the second supply passage, the mixing passage having a plurality of passage bends disposed at a predetermined distance and bent at a predetermined angle; And

Including,

The first fluid and the second fluid may be configured to form a Taylor-Gortler Vortex inside the mixing flow path while passing through the flow path bent portion.

In this case, the first supply passage and the second supply passage may have a structure forming an angle a0 of 120 degrees to 180 degrees.

In addition, the pressure for supplying the first fluid to the first supply passage may be the same as the pressure for supplying the second fluid to the second supply passage.

In one embodiment, between the supply channel and the mixed channel,

A straight inflow passage may be formed having one end portion communicating with the first supply passage and the second supply passage, and the other end portion communicating with the mixing passage.

In an embodiment, the angles a3 and a4 formed by the mixed flow passages bent by the flow path bending portion may be 20 degrees to 120 degrees.

In one embodiment, the ratio (Duct aspect ratio, H3 / W3, H4 / W4) of the planar widths (W3, W4) of the mixing channel to the lateral vertical heights (H3, H4) of the mixing channel, 1.0 to 10.0 Can be.

In one embodiment, the planar length (L3, L4) ratio (L3 / W3, L4 / W4) between the planar width (W3, W4) of the mixing flow path of each flow path bent portion of the mixing flow path, 1.0 to 10.0 Can be.

The present invention can provide a method for manufacturing the micro mixer, the method for manufacturing a micro mixer according to an aspect of the present invention,

a) a mold preparation step of preparing a mold insert having a shape of a supply passage, a mixing passage and a discharge passage;

b) a molding step of molding a polymer on the mold insert;

c) a takeout step of taking out the polymer molded in the molding step;

It may be a configuration including a.

Micro mixer manufacturing method according to another aspect of the present invention,

a) a substrate preparation step of preparing a substrate comprising a material constituting the micromixer and having a thickness corresponding to the side height of the micromixer; And

b) a flow path forming step of directly etching the surface of the substrate to directly form a flow path of the micromixer;

It may be a configuration including a.

It may be a configuration including an imprinting method using a polymer material.

The present invention can provide an analysis system comprising the micro mixer.

1 is a perspective view showing a micromixer according to the prior art.

2 is a perspective view showing a micro mixer according to a first embodiment of the present invention.

3 is a plan view of the micromixer shown in FIG. 2.

FIG. 4 is a schematic diagram for explaining a Taylor-Gortler Vortex occurring inside a curved flow path.

5 is a cross-sectional view taken along line AA ′ of FIG. 3.

6 is a perspective view showing a micro mixer according to a second embodiment of the present invention.

FIG. 7 is a plan view of the micro mixer shown in FIG. 6.

8 is a perspective view illustrating a micromixer according to a third embodiment of the present invention.

9 is a plan view of the micromixer shown in FIG. 6.

10 is a perspective view showing a micro mixer according to a fourth embodiment of the present invention.

FIG. 11 is a plan view of the micro mixer shown in FIG. 10.

FIG. 12 is a diagram illustrating a Taylor-Gortler Vortex generated inside a mixing passage among heterogeneous fluid mixing performances of a micromixer according to an embodiment of the present invention.

13 is a diagram showing the degree of mixing among the results of experimenting heterogeneous fluid mixing performance for the micromixer according to an embodiment of the present invention.

14 is a graph illustrating results of experiments on heterogeneous fluid mixing performance of a micromixer according to various embodiments of the present disclosure.

15 is a flowchart illustrating a method of manufacturing a micromixer according to an embodiment of the present invention.

16 is a flowchart illustrating a method of manufacturing a micromixer according to still another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, but the scope of the present invention is not limited thereto. In the description of the present invention, a detailed description of known configurations will be omitted, and a detailed description thereof will be omitted for configurations that may unnecessarily obscure the subject matter of the present invention.

2 is a perspective view showing a micromixer according to a first embodiment of the present invention, and FIG. 3 is a plan view of the micromixer shown in FIG. 2. In addition, FIG. 4 is a schematic diagram for explaining a Taylor-Gortler Vortex occurring inside a curved flow path, and FIG. 5 is a cross-sectional view taken along line AA ′ of FIG. 3. .

Referring to these drawings, the micromixer 500A according to the present embodiment is a micromixer having a microchannel for receiving heterogeneous fluid and mixing the heterogeneous fluid. The micromixer 500A includes a supply channel 100 and a mixing channel ( 300) and the discharge passage 400 may be configured.

Specifically, the supply passage 100 may have a straight shape including a first supply passage 110 through which the first fluid flows in one end and a second supply passage 120 through which the second fluid flows in the other end. . At this time, the pressure for supplying the first fluid to the first supply passage 110 is preferably the same as the pressure for supplying the second fluid to the second supply passage 120.

The discharge passage 400 is formed at the other end of the mixing passage 300 and may have a structure in which the mixed fluid of the first fluid and the second fluid is discharged.

In some cases, as shown in FIG. 1, between the supply passage 100 and the mixing passage 300, one end portion perpendicularly communicating with the central portion of the supply passage 100, and communicating with the mixing passage 300. A straight inflow passage 200 having the other end may be formed.

The mixing passage 300 may have a structure in communication with the central portion of the supply passage 100 and provided with a plurality of passage bending portions 310 spaced apart by a predetermined distance and bent at a predetermined angle.

At this time, the first fluid and the second fluid, as shown in FIG. 5, may form a Taylor-Gortler Vortex while passing through the flow path bent portion 310.

Taylor-Gortler Vortex, as shown in FIG. 4, refers to a vortex generated due to flow instability inside the bent flow path 4, in which two or more fluids flow from each other. Form counter-rotating vortex structures facing each other. This vortex structure allows the flow of two or more fluids to mix with each other.

As shown in FIG. 5, in the flow path according to the present embodiment, a vortex in which a first fluid 10 and a second fluid 20 rotate to face each other by a Taylor-Gortler Vortex A counter-rotating vortex structure can be formed. By the vortex structure, the mixing efficiency of the first fluid 10 and the second fluid 20 can be improved.

In order to form a Taylor-Gortler Vortex inside the flow path, as shown in FIGS. 1 and 2, the width, the length, the height of the mixing flow path 300, and the respective mixing flow paths 300 are formed. The angle should be limited within a certain range.

For example, the angle a1 formed by each mixing passage 300 bent by the passage bending portion 310 may be 20 degrees to 120 degrees.

In addition, the ratio (Duct aspect ratio, H1 / W1) of the vertical height H1 on the side of the mixing channel 300 to the planar width W1 of the mixing channel 300 may be 1.0 to 10.0.

In addition, the planar length L1 ratio L1 / W1 between the planar width W1 of the mixing channel 300 and the respective channel bends 310 of the mixing channel 300 may be 1.0 to 10.0. .

Therefore, according to the micromixer of the present invention according to the present embodiment, by generating a pair of counter-rotating vortex structure to face each other inside the flow path to improve the mixing efficiency of heterogeneous fluids You can.

6 is a perspective view showing a micromixer according to a second embodiment of the present invention, and FIG. 7 is a plan view of the micromixer shown in FIG. 6.

Referring to these drawings, the micro mixer 500B according to the present embodiment has a structure in which the inflow passage 200 is omitted, unlike the micro mixer 500A according to the first embodiment mentioned above.

In detail, the micro mixer 500B according to the present exemplary embodiment may have a structure in which the first fluid and the second fluid supplied to the supply channel 100 directly enter the mixing channel 300.

Detailed description of the other configuration is the same as the description of the micromixer 500A according to the first embodiment will be omitted.

8 is a perspective view showing a micromixer according to a third embodiment of the present invention, and FIG. 9 is a plan view of the micromixer shown in FIG. 8.

Referring to these drawings, the micromixer 500C according to the present embodiment is a micromixer having a microchannel for receiving heterogeneous fluids and mixing the heterogeneous fluids. 2 may be configured to include a supply passage 120, the mixing passage 300 and the discharge passage (400).

Specifically, the first supply passage 110 is configured to supply a first fluid, and is formed in a direction opposite to the formation direction of the second supply passage 120, and communicate with one end of the mixing passage 300. The second supply passage 120 may supply a second fluid, may be formed in a direction opposite to the formation direction of the first supply passage 110, and may be in communication with one end of the mixing passage 300. In this case, as shown in FIG. 8, the first supply channel 110 and the second supply channel 120 may have a structure that forms an angle a0 of 90 degrees to 180 degrees. In addition, the pressure for supplying the first fluid to the first supply passage 110 is preferably the same as the pressure for supplying the second fluid to the second supply passage 120.

The discharge passage 400 may be formed at the other end of the mixing passage 300 and may have a structure in which the mixed fluid of the first fluid and the second fluid is discharged.

In some cases, as illustrated in FIGS. 7 and 8, a straight line having one end portion communicating with the first supply passage 110 and the second supply passage 120 and the other end portion communicating with the mixing passage. An inflow passage 200 may be formed.

The mixing channel 300 communicates with one end of the first supply channel 110 and the second supply channel 120, and is disposed to be spaced apart by a predetermined distance and bent at a predetermined angle. It may be a structure having a.

In this case, the first fluid and the second fluid may form a Taylor-Gortler Vortex while passing through the flow path bent portion 310 (see FIG. 4). As shown in FIG. 4, in the flow path according to the present embodiment, a vortex in which the first fluid 10 and the second fluid 20 rotate to face each other by a Taylor-Gortler Vortex A counter-rotating vortex structure can be formed. By the vortex structure, the mixing efficiency of the first fluid 10 and the second fluid 20 can be improved.

In order to form a Taylor-Gortler Vortex inside the flow path, as shown in FIGS. 8 and 9, the width, the length, the height of the mixing flow path 300 and the respective mixing flow paths 300 are formed. The angle should be limited within a certain range.

For example, the angle a3 formed by each mixing channel 300 bent by the channel bending unit 310 may be 20 degrees to 120 degrees.

In addition, the ratio (Duct aspect ratio, H3 / W3) of the vertical height H3 on the side surface of the mixing channel 300 to the planar width W3 of the mixing channel 300 may be 1.0 to 10.0.

In addition, the planar length L3 ratio L3 / W3 between the planar width W3 of the mixed channel 300 and the respective channel bends 310 of the mixed channel 300 may be 1.0 to 10.0. .

10 is a perspective view showing a micromixer according to a fourth embodiment of the present invention, and FIG. 11 is a plan view of the micromixer shown in FIG. 10.

Referring to these drawings, the micro mixer 500D according to the present embodiment has a structure in which the inflow passage 200 is omitted, unlike the micro mixer 500C according to the third embodiment.

In detail, the micro mixer 500D according to the present exemplary embodiment may have a structure in which the first fluid and the second fluid supplied to the supply channel 100 directly enter the mixing channel 300.

Detailed description of the other configuration is the same as the description of the micromixer 500C according to the third embodiment will be omitted.

FIG. 12 is a diagram showing a Taylor-Gortler Vortex generated inside a mixing flow path among heterogeneous fluid mixing performances of a micromixer according to an embodiment of the present invention. 13 is a diagram showing the degree of mixing among the results of experiments on heterogeneous fluid mixing performance of the micromixer according to the embodiment of the present invention.

First, referring to FIG. 12, when supplying heterogeneous fluid to a micromixer composed of a total of 30 (15 pairs) of channel bends, a Taylor-Gortler Vortex generated inside the mixing channel of the micromixer is used. You can check it.

The color shown in FIG. 12 shows the vortex pattern generated inside the flow path of the micromixer as a helicity value.

In addition, the notation of # 1-# 15 is a number which shows each flow path bending part, and is written sequentially from a supply flow path to a discharge flow path.

As shown in FIG. 12, it can be seen that a counter-rotating vortex structure is clearly generated as the pairs face each other and rotate from the cross section # 1 to the cross section # 15.

Specifically, from the cross section # 1 to the cross section # 2, one or two counter-rotating vortex structures are generated, and from the third cross section, three counter-rotating vortex structures are generated. It can be seen that a rotating vortex structure is generated.

Next, referring to FIG. 13, when supplying heterogeneous fluid to a micromixer composed of a total of 30 (15 pairs) flow path bends, it is possible to check the degree of mixing of heterogeneous fluids generated inside the mixing channel of the micromixer.

The color shown in FIG. 13 shows the degree of mixing of heterogeneous fluid generated inside the flow path of the micromixer as a helicity value. That is, the helicity value shown in FIG. 13 is a value representing the degree of mixing while passing through the mixing channel after the first fluid having a mass fraction of 1 and the two fluids having a mass fraction of 0 are injected into the supply channel.

As shown in FIG. 13, it can be seen that mixing of heterogeneous fluid becomes more apparent from the cross section # 1 to # 15.

14 is a graph showing a result of experimenting with heterogeneous fluid mixing performance for a micromixer according to various embodiments of the present invention.

Referring to FIG. 14 together with FIG. 2, the angle a1 formed by each mixing channel 300 bent by the channel bending unit 310 is set to 30 degrees, 45 degrees, 60 degrees, 90 degrees, or 120 degrees. Heterogeneous fluids can be injected into five different micromixers to determine the degree of mixing of heterogeneous fluids along the length of the mixing channel.

The height (H1), length (L1), and width (W1) of the mixing channel of each micromixer used in the experiment were limited to specific values. Here, the ratio (Duct aspect ratio, H1 / W1) of the vertical height H1 on the side of the mixing channel 300 to the planar width W1 of the mixing channel 300 is limited to 5.0. In addition, the planar length (L1) ratio (L1 / W1) between the planar width W1 of the mixing channel 300 and each channel bent portion 310 of the mixing channel 300 was limited to 4.0.

The X axis of the graph shown in FIG. 14 represents the length of the mixing channel, and the Y axis of the graph represents the mixing ratio. Specifically, 0% of the Y axis means that the heterogeneous fluid is not mixed at all, and 100% of the Y axis means the heterogeneous fluid is completely mixed.

As shown in the graph shown in FIG. 14, in the case where the angle a1 formed by each mixing channel 300 bent by the channel bending unit 310 is 120 degrees, a Taylor-Gortler Vortex ) Is not generated, so that the mixing efficiency is very low.

In addition, when the angle a1 formed by each of the mixing passages 300 bent by the passage bending portion 310 is 45 degrees, it is sufficient that the length of the mixing passage is only about 600 μm in order to obtain a mixing ratio of 95% or more. You can see that.

Referring to FIG. 15, in the method of manufacturing a micromixer according to the present embodiment (S100), a mold preparation step (S110) of preparing a mold insert having a shape of a supply flow path, a mixing flow path, and a discharge flow path may include a polymer in the mold insert. Molding step (S120) for molding, and may include a configuration including a take-out step (S130) for taking out the polymer molded in the molding step.

Referring to FIG. 16, the method for manufacturing a micromixer according to the present embodiment (S200) includes a substrate preparation step of preparing a substrate having a thickness corresponding to the side height of the micromixer, which is made of a material forming the micromixer. And a flow path forming step (S220) of directly etching the surface of the substrate to directly form a flow path of the micromixer.

Therefore, according to the micromixer of the present invention according to the present embodiment, by generating a pair of counter-rotating vortex structure to face each other inside the flow path to improve the mixing efficiency of heterogeneous fluids You can. Further, according to the micromixer of the present invention, in laminar conditions, the mixing efficiency between heterogeneous fluids can be improved by causing advective motion without inserting a structure for generating additional vortex. have. In addition, according to the micromixer of the present invention, since it is a structure that does not need any protrusions or protrusions formed in the flow path or recessed, it can be manufactured by a simple manufacturing process.

In the foregoing detailed description of the invention, only specific embodiments thereof have been described. It is to be understood, however, that the present invention is not limited to the specific forms referred to in the description, but rather includes all modifications, equivalents, and substitutions within the spirit and scope of the invention as defined by the appended claims. Should be.

As described above, according to the micromixer of the present invention, by generating a pair of counter-rotating vortex structure in the flow path to improve the mixing efficiency of heterogeneous fluids Can be.

Further, according to the micromixer of the present invention, in laminar conditions, the mixing efficiency between heterogeneous fluids can be improved by causing advective motion without inserting a structure for generating additional vortex. have.

In addition, according to the micromixer of the present invention, since it is a structure that does not need any protrusions or protrusions formed in the flow path or recessed, it can be manufactured by a simple manufacturing process.

Claims

As a micro mixer (500A, 500B) having a fine flow path for receiving a heterogeneous fluid and mixing the heterogeneous fluid,

A first supply passage 100 having a first supply passage 110 through which the first fluid flows in one end and a second supply passage 120 through which the second fluid flows in the other end;

A mixing passage 300 communicating with a central portion of the supply passage 100 and having a plurality of passage bending portions 310 disposed to be spaced apart by a predetermined distance and bent at a predetermined angle; And

A discharge passage 400 formed at the other end of the mixing passage 300 and for discharging the mixed fluid of the first fluid and the second fluid;

Including,

And the first fluid and the second fluid form a Taylor-Gortler Vortex while passing through the flow path bends (310).
The method of claim 1,

The pressure for supplying the first fluid to the first supply channel (110) is the same as the pressure for supplying the second fluid to the second supply channel (120).
The method of claim 1,

Between the supply passage 100 and the mixing passage 300,

Micro-mixer, characterized in that the inlet flow passage of the straight form having a one end portion vertically communicated to the central portion of the supply passageway (100) and the other end communicated with the mixing passageway (300) is formed.
The method of claim 1,

Micro-mixer, characterized in that the angle (a1, a2) formed by each mixing flow path 300 bent by the flow path bending portion 310 is 20 degrees to 120 degrees.
The method of claim 1,

The ratio (Duct aspect ratio, H1 / W1, H2 / W2) of the vertical heights H1, H2 on the side of the mixing channel 300 with respect to the planar widths W1, W2 of the mixing channel 300 is 1.0 to 10.0, characterized in that the micromixer.
The method of claim 1,

The ratio of the planar length L1 (L1 / W1, L2 / W2) between the planar widths W1 and W2 of the mixing channel 300 and the passage bends 310 of the mixing channel 300 is 1.0. To 10.0, characterized in that the micromixer.
As a micro mixer (500C, 500D) having a fine flow path for receiving a heterogeneous fluid and mixing the heterogeneous fluid,

A first supply passage 110 which supplies a first fluid and is formed in a direction opposite to the formation direction of the second supply passage 120 and communicates with one end of the mixing passage 300;

A second supply passage 120 which supplies a second fluid, is formed in a direction opposite to the formation direction of the first supply passage 110, and is in communication with one end of the mixing passage 300;

The mixing passage having a plurality of flow path bent portion 310 communicated at one end with the first supply passage 110 and the second supply passage 120, spaced by a predetermined distance, and bent at a predetermined angle ( 300); And

A discharge passage 400 formed at the other end of the mixing passage 300 and for discharging the mixed fluid of the first fluid and the second fluid;

Including,

And the first fluid and the second fluid form a Taylor-Gortler Vortex inside the mixing flow path (300) while passing through the flow path bend (310).
The method of claim 7, wherein

And the first supply passageway (110) and the second supply passageway (120) form an angle a0 of 90 degrees to 180 degrees.
The method of claim 7, wherein

The pressure for supplying the first fluid to the first supply channel (110) is the same as the pressure for supplying the second fluid to the second supply channel (120).
The method of claim 7, wherein

Between the supply passage 100 and the mixing passage 300,

The micro mixer, characterized in that the inlet flow path 200 of the straight form having one end portion communicating with the first supply passage 110 and the second supply passage 120, and the other end communicating with the mixing passage is formed. .
The method of claim 7, wherein

Micro-mixer, characterized in that the angle (a3, a4) formed by each mixing flow path 300 bent by the flow path bending portion 310 is 20 degrees to 120 degrees.
The method of claim 7, wherein

Duct aspect ratio (H3 / W3, H4 / W4) of the vertical height (H3, H4) on the side of the mixing channel 300 to the planar width (W3, W4) of the mixing channel 300 is 1.0 to 10.0, characterized in that the micromixer.
The method of claim 7, wherein

The ratio (L3 / W3, L4 / W4) of the planar lengths (L3, L4) between the planar widths (W3, W4) of the mixing channel (300) between each channel bent portion 310 of the mixing channel (300) is , 1.0 to 10.0, characterized in that the micromixer.
A method (S100) of manufacturing a micromixer according to any one of claims 1 to 13,

a) a mold preparation step of preparing a mold insert having a shape of a supply passage, a mixing passage and a discharge passage;

b) a molding step of molding a polymer on the mold insert;

c) a takeout step of taking out the polymer molded in the molding step;

Micro mixer manufacturing method comprising a.
A method (S200) of manufacturing a micromixer according to any one of claims 1 to 13,

a) a substrate preparation step of preparing a substrate comprising a material constituting the micromixer and having a thickness corresponding to the side height of the micromixer; And

b) a flow path forming step of directly etching the surface of the substrate to directly form a flow path of the micromixer;

Micro mixer manufacturing method comprising a.
As a method (S300) of manufacturing a micromixer according to any one of claims 1 to 13,

A micromixer manufacturing method comprising an imprinting method using a polymer material.
An analysis system comprising the micromixer according to any one of claims 1 to 13.