WO2015126004A1

WO2015126004A1 - Device for measuring parallel alignment of guide rollers

Info

Publication number: WO2015126004A1
Application number: PCT/KR2014/003812
Authority: WO
Inventors: 김용덕; 한영식; 이영준; 이승주; 정재훈; 최효일; 정승구
Original assignee: 웅진에너지 주식회사
Priority date: 2014-02-21
Filing date: 2014-04-29
Publication date: 2015-08-27
Also published as: KR20150099657A

Abstract

The present invention relates to a device for measuring parallel alignment of guide rollers, and more specifically, to a device for measuring parallel alignment of guide rollers, capable of conveniently measuring the degree of incline, the degree of straightness, and the degree of parallel alignment of the guide rollers using a measuring means, which is moved linearly while in contact with a mounting plate.

Description

Guide Roller Parallelism Measuring Device

The present invention relates to a device for measuring the parallelism of the guide roller, and more particularly, a guide roller that can easily measure the inclination, straightness and parallelism of the guide roller through the measuring means which is in linear contact with the mounting plate It relates to a parallelism measuring device.

In general, in order to manufacture a wafer after the ingot growth process is completed, a slicing process of cutting the ingot into sheets.

This slicing process has a variety of methods, a typical method is to reciprocate the wire at high speed in the chamber while spraying a slurry solution or coolant thereon to the friction of the slurry or coolant and the single crystal ingot on the wire By a wire saw method or a diamond wire saw method.

This approach is now widely used because ingots can be cut into several wafers at the same time, thereby increasing the yield per unit time.

Korean Patent No. 0887494 discloses a wire saw system for cutting ingots. In the wire saw system of the patent, the wire is wound hundreds or thousands of times on the main roller as shown in FIG. 1, and the wire travels at high speed due to the rotation of the main roller. And the fixing unit for fixing the ingot descends to cut the ingot by the wire running at high speed.

In order to maintain the stable rotation of the main roller, the weight balance of the main roller should be adjusted to the center of the rotation axis according to the rotation of the main roller.

However, in the conventional wire saw system, there is no method for simply measuring the parallelism of the main roller.

The present invention is to solve the above problems, to provide a guide roller parallelism measuring device that can easily measure all the inclination, straightness and parallelism of the guide roller through a measuring means that is in linear contact with the mounting plate There is.

In order to achieve the above object, the present invention is a device for measuring the parallelism of the guide roller through a plurality of measuring means linearly moved on the X-axis, Y-axis and Z-axis orthogonal to each other, having a certain area and the Y A plate-like mounting plate having a plurality of insertion holes formed to penetrate a predetermined length along an axial direction and disposed to contact the upper side of the guide roller; A pair of contact plates inserted into the insertion holes and protruding a predetermined length downward from the mounting plate and having one surface contacting the guide roller; At least one first measuring means disposed on an upper side of the mounting plate and moved in an X-axis direction along an upper surface of the mounting plate; And second measuring means disposed on an upper side of the mounting plate and moved in the Y-axis direction along an upper surface of the mounting plate.

Preferably, the contact plate includes a horizontal plate having a predetermined area and a vertical plate extending vertically downward from the horizontal plate, the contact plate to be inserted into the insertion hole so that the horizontal plate is caught on the edge side of the insertion hole Can be.

Preferably, the thickness of the vertical plate may be provided to have a size smaller than the width of the insertion hole.

Preferably, a pair of cross bars having a first rail portion on the bottom surface and arranged in the X-axis direction and a pair of cross bars arranged on the Y axis direction with a second rail portion on the bottom surface are configured vertically to connect the pair of cross bars. The first measuring means is moved in the X-axis direction along the first rail unit via a first slider, and the second measuring means is Y along the second rail unit via a second slider. Can be moved axially.

Preferably, the first slider includes a first vertical bar extending downward from the second slider to pass through the insertion hole, and a pair of first vertical bars disposed to contact the pair of contact plates on both sides of the first vertical bar. A third measuring means may be provided to measure the separation distance between the pair of contact plates when the second slider moves in the Y-axis direction.

Preferably, the first slider and the second slider include a horizontal bar extending in the X-axis direction, respectively, and the first measuring means and the second measurement unit are coupled to the first holder slidably movable along the horizontal bar. Means can be combined.

Preferably, the first holder is a pair of first blade pieces arranged to surround the horizontal bar is spaced at a predetermined interval and the first to the horizontal bar through a fixing member which is fastened simultaneously to the pair of first blade pieces The movement of the holder can be constrained.

Preferably, a second vertical bar having a predetermined length coupled to the first holder in the Z-axis direction, wherein the first measuring means and the second measuring means are slidably coupled along the second vertical bar. Can be coupled to two holders.

Preferably, the second holder is the second vertical through a fixing member which is arranged to surround the second vertical bar a pair of second blade pieces are spaced at a predetermined interval and fastened to the pair of second blade pieces at the same time Constrain the movement of the second holder with respect to the bar.

According to the present invention, the inclination, straightness and parallelism of the guide rollers can be easily measured through the measuring means which are moved linearly in contact with the mounting plate, so that the guide rollers can be optimally adjusted.

1 is a schematic representation of a typical wire saw system.

Figure 2 is a perspective view showing a guide roller parallelism measuring apparatus according to the present invention.

3 is a bottom perspective view of FIG. 2.

Figure 4 is a perspective view showing a state in which the mounting plate is removed in FIG.

5 is a bottom perspective view of FIG. 4.

Figure 6 is a perspective view showing the coupling relationship between the holder and the first and second measuring means used in FIG.

7 is a perspective view illustrating a coupling relationship between the third and fourth holders and the third measuring means used in FIG. 2;

Figure 8 is a side view showing a state in which the guide roller parallelism measuring device according to the invention mounted on the guide roller.

Figure 9 is a front view showing a state in which the guide roller parallelism measuring device according to the invention mounted on the guide roller.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.

In the following description, the same reference numerals will be used to refer to the same elements even though they are shown in different drawings in order to add reference numerals to help understand the present invention.

In addition, in the following description, it is assumed that the X-axis, Y-axis, and Z-axis are three axes perpendicular to each other, the X-axis is parallel to the mounting plate and perpendicular to the longitudinal direction of the guide roller, and the Y-axis is parallel to the mounting plate and the guide roller. It refers to the direction parallel to the longitudinal direction of, Z-axis is defined in the direction perpendicular to the mounting plate.

The parallelism measuring device 100 of the guide roller according to the preferred embodiment of the present invention simply measures both the parallelism and the straightness of the guide roller 10 through the measuring means 140, 150 and 160 which are in linear contact with the mounting plate 110. There are technical features that can be done.

Hereinafter, for the convenience of description, measuring the parallelism of the guide roller mounted on the wire saw system shown in FIG. 1 using the parallelism adjusting device 100 of the guide roller according to the present invention will be exemplarily described. . However, the use of the guide roller parallelism adjusting device 100 according to the present invention is not limited to the wire saw system, but it should be understood as illustrative, and the parallelism and straightness of two members arranged side by side with each other. It should be noted that management can be applied to the measurement of all equipment required.

Guide roller parallelism measuring device 100 according to the present invention is the mounting plate 110, the contact plate 120, the first measuring means 140 and the second measuring means 150 as shown in Figs. It includes.

The mounting plate 110 is disposed on the upper side of the guide roller 10 provided in the wire saw device to provide a path in which the first measuring means 140 and the second measuring means 150 are linearly moved. . The mounting plate 110 is formed of a plate-like member having a predetermined area, the lower surface is in contact with the upper surface of the guide roller 10 to measure the parallelism and straightness of the guide roller 10.

As a result, the first measuring means 140 and the second measuring means 150 move in the X-axis direction or the Y-axis direction while being in contact with the upper surface of the mounting plate 110 of the mounting plate 110. It is possible to measure the parallelism and straightness of the guide roller 10 in contact with the lower surface.

At this time, the mounting plate 110 is provided with at least two insertion holes 112 formed in a predetermined length through the Y-axis direction. The insertion hole 112 is for inserting a pair of contact plates 120 disposed perpendicular to the lower side of the mounting plate 110. That is, the pair of contact plates 120 is provided as a plate-like member having a predetermined area is coupled to the mounting plate 110 to protrude a predetermined length downward from the lower surface of the mounting plate 110, one surface is It is arranged to contact the side of the guide roller 10.

To this end, the contact plate 120 includes a horizontal plate 122 having a predetermined area and a vertical plate 124 extending vertically downward from the horizontal plate 122, the horizontal plate 122 is the It is inserted into the insertion hole 112 to be caught by the edge of the insertion hole (112).

Here, the pair of contact plates 120 are for measuring the parallelism between the pair of guide rollers 10 which are spaced apart at regular intervals through the third measuring means 160. That is, the third measuring means 160 is provided in pairs to contact the opposite surfaces of the pair of contact plates 120 facing each other. Accordingly, the pair of third measuring means 160 measures the separation distance of the pair of contact plates 120 while linearly moving in the Y-axis direction while the end thereof is in contact with the contact plate 120. The distance of the guide roller 10 is measured. As a result, when the separation distance between the contact plates 120 becomes constant along the Y-axis direction, the pair of guide rollers 10 are in parallel with each other, and the separation distance between the contact plates 120 is not constant. Otherwise, the pair of guide rollers 10 are not parallel and are displaced so that the operator can easily recognize that the adjustment work is required.

At this time, the thickness of the vertical plate 124 is provided to have a size smaller than the width of the insertion hole 112 to the pressure applied from the third measuring means 160 when the linear movement of the third measuring means 160. As a result, one surface of the vertical plate 124 may always be in contact with the side of the guide roller 10.

On the other hand, the lower surface of the mounting plate 110 is provided with a plurality of locking projections 114 at the edge to protrude a predetermined height from the lower surface of the mounting plate. The locking step 114 is such that the locking step 114 is caught on the guide roller 10 side when the mounting plate 110 is disposed on the upper side of the guide roller 10 to measure the parallelism of the guide roller. This is to prevent the mounting plate 110 from flowing when the first measuring means 140 and the second measuring means 150 are linearly moved.

The first measuring means 140 and the second measuring means 150 are linearly moved in the X-axis direction and the Y-axis direction on the upper surface of the mounting plate 110 to measure the parallelism and straightness of the guide roller 10 It is to.

To this end, the first measuring means 140 and the second measuring means 150 is guided in the moving direction along the support 130 disposed on the upper side of the mounting plate 110, the upper portion of the mounting plate 110 It is linearly moved on the plane.

That is, the upper side of the mounting plate 110 is provided with a first rail portion 132a on the lower surface and one crosspiece 132 and a second rail portion 134a on the lower surface which are spaced apart in the X-axis direction. The support 130 is disposed in the Y-axis direction and consists of a longitudinal bar 134 connecting the pair of cross bars 132.

In addition, the first measuring unit 140 is mounted to the first rail unit 132a via a first slider 133 sliding along the first rail unit 132a and mounted on the first rail unit 132a. The parallelism of the guide roller 10 is measured by linearly moving in the X-axis direction along 132a. In addition, the second measuring means 150 is mounted to the second rail part 134a via a second slider 135 which is slid along the second rail part 134a to be mounted on the second rail part (134a). The straightness of the guide roller 10 is measured by linearly moving in the Y-axis direction along 134a.

To this end, the first slider 133 and the second slider 135 includes

horizontal bars

133a and 135a extending in the X-axis direction, respectively, and the

horizontal bars

133a and 135a have the horizontal bars ( The

first holders

133b and 135b which are slidably moved along the 133a and 135a are respectively coupled. At this time, the first holder (133b, 135b) is a pair of first blade pieces (133c, 135c) arranged to surround the horizontal bar (133a, 135a) spaced at a predetermined interval and the pair of first blade piece Constraining or releasing sliding movement of the

first holders

133b and 135b with respect to the

horizontal bars

133a and 135a through the fixing part 315 simultaneously fastened to the 133c and 135c. In addition, the

first holders

133b and 135b are provided with second

vertical bars

133d and 135d that have a predetermined length and are coupled in the Z-axis direction, and the second

vertical bars

133d and 135d have second vertical bars (133d and 135d). The

second holders

133e and 135e which are slidably moved up and down along the 133d and 135d are coupled to each other, and the first measuring means 140 and the second measuring means are formed at one side of the second holder 133e and 135e. 150 are coupled respectively.

Here, the second holder (133e, 135e) is a pair of second blade pieces (133f, 135f) arranged to surround the second vertical bar (133d, 135d) is spaced at a predetermined interval, the pair of Constrains or releases the movement of the

second holders

133e and 135e with respect to the second

vertical bars

133d and 135d through the fixing member 2 which is simultaneously fastened to the

second blade pieces

133f and 135f.

As described above, in the guide roller parallelism measuring apparatus 100 according to the present invention, the first measuring means 140 and the second measuring means 150 may use the

first holders

133b and 135b and the

second holders

133e and 135e. Sliding movement in the X-axis direction and the Z-axis direction with respect to the horizontal bar (133a, 135a) and the second vertical bar (133d, 135d) through the so as to be easily set to contact the upper surface of the mounting plate 110 do.

On the other hand, the second slider 135 sliding along the second rail portion 134a provided on the lower surface of the vertical pole 134 extends a predetermined length to the bottom is disposed to pass through the insertion hole 112 A pair of third measuring means 160 including one vertical bar 136 and disposed on both sides of the first vertical bar 136 to be in contact with the pair of contact plates 120 are provided. The third measuring means 160 is a pair of guide rollers 10 spaced apart from each other by measuring the separation distance between the pair of contact plates 120 during the reciprocating movement of the second slider (135) It is measured whether the separation distance between them is constant.

Here, a third holder 136a slidably movable along the first vertical bar 136 is coupled to the first vertical bar 136, and X from the third holder 136a is connected to the third holder 136a. And a support bar 136b extending in the axial direction. In addition, a fourth holder 136c is coupled to the support bar 136b so as to slide along the support bar 136b. In addition, the fourth measuring means 160 is provided in the fourth holder 136c in the Z-axis direction. Accordingly, by adjusting the positions of the third holder 136a and the fourth holder 136c, the third measuring means 160 can be easily set in contact with the pair of contact plates 120. do.

Thus, the guide roller parallelism measuring device 100 according to the present invention is the first measuring means 140 and the second measuring means 150 to be linearly moved in the X-axis and Y-axis direction, respectively, on the upper surface of the mounting plate 110 Not only can measure both the inclination and the straightness of the guide roller 10 through the spaced apart from each other through the third measuring means 160 which is linearly moved in the Y-axis direction between the pair of contact plates 120 Parallelism of the guide roller 10 also has the advantage that can be easily measured.

On the other hand, the first measuring means 140, the second measuring means 150 and the third measuring means 160 of the present invention may be used a roller gauge commonly used, it is possible to measure the height deviation through a linear movement It is noted that various known gauges can be used.

The first slider 133 and the second slider 135 sliding along the first rail part 132a and the second rail part 134a may be driven through a known linear motor. .

Although specific embodiments of the present invention have been described in detail with reference to the drawings, the present invention is not limited to such specific structures. Those skilled in the art will be able to easily modify or change without departing from the technical spirit described in the claims below. However, equivalents, modifications, and replacements through such simple design modifications or modifications are all clearly within the scope of the present invention.

Claims

In the apparatus for measuring the parallelism of the guide roller through a plurality of measuring means that are linearly moved on the X, Y and Z axis perpendicular to each other,

A plate-like mounting plate having a predetermined area and having a plurality of insertion holes formed to penetrate a predetermined length along the Y-axis direction and in contact with the upper side of the guide roller;

A pair of contact plates inserted into the insertion holes and protruding a predetermined length downward from the mounting plate and having one surface contacting the guide roller;

At least one first measuring means disposed on an upper side of the mounting plate and moved in an X-axis direction along an upper surface of the mounting plate; And

And second measuring means disposed on an upper side of the mounting plate and moving in a Y-axis direction along an upper surface of the mounting plate.
The method of claim 1,

The contact plate includes a horizontal plate having a predetermined area and a vertical plate extending vertically downward from the horizontal plate, characterized in that the horizontal plate is inserted into the insertion hole so as to be caught on the edge side of the insertion hole Guide roller parallelism adjuster.
The method of claim 2,

The thickness of the vertical plate is guide roller parallelism adjusting device, characterized in that it is provided to have a size smaller than the width of the insertion hole.
The method of claim 1,

A pair of cross bars having a first rail portion at a lower surface thereof and disposed in the X-axis direction, and a support having a second rail portion at a lower surface thereof and vertically arranged in the Y-axis direction and configured to vertically connect the pair of cross bars; and,

The first measuring means is moved in the X-axis direction along the first rail portion via the first slider, and the second measuring means is moved in the Y-axis direction along the second rail portion via the second slider. A guide roller parallelism measuring device.
The method of claim 4, wherein

A first vertical bar extending downward from the second slider and arranged to pass through the insertion hole, and a pair of third measuring means disposed on both sides of the first vertical bar to be in contact with the pair of contact plates; Is provided with a guide roller parallelism measuring device, characterized in that for measuring the separation distance between the pair of contact plates during the movement in the Y-axis direction of the second slider.
The method of claim 4, wherein

The first slider and the second slider each include a horizontal bar extending in the X-axis direction, and the first measuring means and the second measuring means are coupled to a first holder coupled to each other so as to be slidably movable along the horizontal bar. Guide roller parallelism measuring device, characterized in that.
The method of claim 6,

The first holder is a pair of first blade pieces arranged to surround the horizontal bar is arranged to be spaced apart at a predetermined interval and the movement of the first holder with respect to the horizontal bar through a fixing member that is fastened to the pair of first blade pieces at the same time Guide roller parallelism adjusting device, characterized in that the restraint.
The method of claim 6,

A second vertical bar having a predetermined length and coupled to the first holder in the Z-axis direction, wherein the first measuring means and the second measuring means are coupled to the second holder slidably coupled along the second vertical bar. Guide roller parallelism measuring device, characterized in that the.
The method of claim 8,

The second holder has a pair of second blade pieces arranged to surround the second vertical bar is spaced apart a predetermined interval and the second to the second vertical bar through a fixing member which is simultaneously fastened to the pair of second blade pieces Guide roller parallelism adjusting device, characterized in that to restrain the movement of the holder.
The method of claim 1,

The mounting plate is a guide roller parallelism adjusting device, characterized in that provided with a plurality of locking projections protruding a predetermined height from the lower surface.