WO2015052972A1

WO2015052972A1 - Conveyance device equipped with gripper and vibration-damping method for gripper

Info

Publication number: WO2015052972A1
Application number: PCT/JP2014/069413
Authority: WO
Inventors: 誠小林
Original assignee: 村田機械株式会社
Priority date: 2013-10-07
Filing date: 2014-07-23
Publication date: 2015-04-16
Also published as: JPWO2015052972A1; TWI574905B; TW201524876A; JP6041234B2

Abstract

The present invention enables the use of a vibration-damping member having a large area and capable of achieving a sufficient vibration-damping effect and provides a safety mechanism in the event of breakage of the vibration-damping member. A gripper of this conveyance device is equipped with multiple hands. The hand comprises: a fixed member that is attached to an opening/closing member; a finger member that supports an article from below; vibration-damping members that are made of a vibration-damping material, are disposed between the fixed member and the finger member, are mounted on the fixed member, and mount the finger member thereon; and restricting members that restrict the relative position of the finger member with respect to the fixed member. Transmission of vibrations of the fixed member to the finger member is suppressed by the vibration-damping members, and the finger member is restricted by the restricting members from moving toward the fixed member beyond an allowable range.

Description

Conveying device equipped with gripper and gripper vibration damping method

The present invention relates to a conveyance device including a gripper and a vibration control method for the gripper.

Patent Documents 1 and 2 disclose that vibrations applied to an article are suppressed by providing viscoelasticity at an article support portion in the transport device. Patent document 1 (JP2001-298065) shows damping of a hand provided at the tip of a SCARA arm of an automatic guided vehicle, and discloses that the hand is composed of two layers and a viscoelastic body is disposed between the two layers. ing. Patent Document 2 (JP2006-298535) discloses disposing a damping material between a gripper of an overhead traveling vehicle, that is, a lifting platform having a hand for gripping an article, and a lifting drive unit of the gripper. . It also discloses that the contact surface of the hand with the article is made of viscoelasticity.

JP2001-298065 JP2006-298535

However, in the configuration of Patent Document 2, since the range in which the damping material can be arranged is limited to the contact surface with the article, it is difficult to use a damping material that can obtain a sufficient damping effect in a large area. In addition, a safety mechanism has not been studied in the event that the damping material is damaged.

An object of the present invention is to provide a safety mechanism in the event that a vibration damping member is damaged, while making it possible to use a vibration damping member capable of obtaining a sufficient vibration damping effect in a large area.

The present invention is a transport device including a gripper for supporting an article from below,
The gripper includes a plurality of hands and an opening / closing member that opens and closes the plurality of hands in synchronization.
Hand
A fixing member fixed to the opening and closing member;
A finger member for supporting the article from below;
A damping member made of a damping material, disposed between the fixed member and the finger member, and placed on the fixed member, and on which the finger member is placed;
And a restricting member for restricting movement of the finger member beyond the allowable range relative to the fixed member.

The present invention is also a vibration damping method for a gripper in a transport device including a gripper for supporting an article from below,
The gripper includes a plurality of hands and an opening / closing member that opens and closes the plurality of hands in synchronization.
Hand
A fixing member fixed to the opening and closing member;
A finger member for supporting the article from below;
A damping member made of a damping material, disposed between the fixed member and the finger member, and placed on the fixed member, and on which the finger member is placed;
A regulating member that regulates the relative position of the finger member to the fixing member,
The damping member suppresses the vibration of the fixing member from being transmitted to the finger member,
The restricting member restricts the finger member from moving beyond an allowable range with respect to the fixed member.

In this invention, since it is not necessary to arrange the damping member within the range of the surface in contact with the article, the damping member having a large area and easily deformed can be used, and the damping can be effectively performed. Further, if the damping member is damaged, the position of the finger member can be regulated by the regulating member. Therefore, a damping material that easily absorbs vibrations can be used. In this specification, the description related to the conveying device is also applied to the gripper vibration damping method as it is.

Preferably, the damping member has a vertical through hole, and the regulating member is disposed in the through hole. In this way, an extra space for arranging the regulating member is unnecessary, and the hand can be made compact. For example, the second through hole is provided in one member of the fixing member or the finger member so as to overlap the through hole of the damping member in the vertical direction. The restricting member is attached to the other member of the fixing member or the finger member and extends into the second through hole, and is attached to the first member and the first member for restricting relative movement in the horizontal direction, and the second member And a flange that is larger in diameter than the second through-hole and restricts relative movement in the vertical direction.

Preferably, the finger member is an attachment member placed on the damping member, a support member that is lower than the attachment member and supports the article, and a connecting member that connects the attachment member and the support member; It has. In this way, a hand that is compact in the height direction can be obtained as compared with the case where the fixing member, the damping member, and the finger member are simply stacked one above the other. For example, at least a pair of vibration damping members are provided, a pair of attachment members and connection members are also provided, and a support member is disposed between the pair of attachment members.

Side view of the overhead traveling vehicle of the embodiment It is a top view which shows the decomposition | disassembly state of the gripper of an Example, A dashed line shows the connection relation of a member, and the damping member is arrange | positioned between the finger member of the upper part of a figure, and the fixing member of the lower part. Front view of gripper of an embodiment Cross-sectional view of the main part of the gripper of the embodiment Cross-sectional view of the principal part of a gripper of a modified example

The following is an optimum embodiment for carrying out the present invention. The scope of the present invention should be determined according to the understanding of those skilled in the art based on the description of the scope of the claims, taking into account the description of the specification and well-known techniques in this field.

1 to 5 show an embodiment and its modifications. FIG. 1 shows an overhead traveling vehicle 2 as an example of a transfer device, 4 is a traveling rail provided in the ceiling space of the clean room, and 6 is a traveling drive unit of the overhead traveling vehicle 2, which is arranged in the traveling rail 4. . An overhead traveling vehicle main body including a lateral movement unit 8, a rotation drive unit 9, a lift drive unit 10, a gripper 14 and the like is suspended from the travel drive unit 6 through a shaft 7. The lateral movement unit 8 laterally moves the rotation drive unit 9 and the elevation drive unit 10 to the traveling rail 4 in a direction perpendicular to the horizontal plane, and the rotation drive unit 9 rotates the elevation drive unit 10 around the vertical axis. The lateral movement unit 8 and the rotation driving unit 9 may not be provided.

The raising / lowering drive part 10 raises / lowers the gripper 14 via the suspension materials 12, such as a belt, a rope, and a wire. The gripper 14 supports the flange portion of the article 17 such as FOUP from below by opening and closing the pair of

hands

16 and 16 in the XX direction in FIG. 1 (direction parallel to the traveling direction of the overhead traveling vehicle 2). To do. The number of hands is not limited to one pair, but may be three or four. An opening / closing member 18 opens and closes the

hands

16 and 16 by moving the

hands

16 and 16 forward and backward in the XX direction synchronously.

Reference numerals

19 and 19 denote a pair of front and rear fall prevention covers, which prevent the article 17 from falling off the

hands

16 and 16 by moving the

fall prevention pieces

19a and 19a back and forth. The transport device may be any device that supports the lower portion of the flange portion of the article 17 and includes a gripper having a plurality of hands that can be opened and closed in the horizontal direction, and may or may not have a carriage.

FIG. 2 shows the structure of the

hands

16 and 16, and the pair of

hands

16 and 16 have the same structure. Reference numeral 20 denotes a fixing member attached to the opening / closing member 18 and located at the lower part of the

hand

16, 22 denotes a finger member located at the upper part of the fixing member 20 and supports the flange portion of the

article

17, and 24 and 26 denote control members. The vibration member is located between the finger member 22 and the fixing member 20 and supports the finger member 22 and prevents the vibration of the fixing member 20 from being transmitted to the finger member 22. The damping

members

24 and 26 are viscoelastic bodies such as a sheet shape and a rectangular parallelepiped shape, but may be a vibration damping rubber, a damping alloy, or the like. If the damping member 24 is damaged, the position of the finger member 22 is regulated within an allowable range by a regulating member composed of the cylindrical piece 30 and the flange 51. For this reason, the damping member 24 can be selected in terms of vibration absorption capability rather than strength and rigidity. The vibration damping member 26 is less likely to break than the vibration damping member 24. The damping member 24 includes a through-hole 25, and a cylindrical piece 30 is disposed in the through-hole 25, and the finger member 22 is positioned with respect to the fixing member 20 in any direction above and below the flange 51 and the cylindrical piece 30. However, it is possible to prevent shifting beyond the allowable length. The cylindrical piece 30 is a cylindrical member provided with an internal thread on the inner periphery, and is fixed to both end portions 28. However, it may be a simple cylindrical member that does not include an internal thread. The cylindrical piece 30 and the flange 51 constitute a regulating member.

2 indicates the positional relationship between the fixing member 20 and the finger member 22, and the positions of the damping

members

24 and 26 on the fixing member 20 and the finger member 22. The finger member 22 is at the upper part and the fixing member 20 is at the lower part, and the damping

members

24 and 26 are disposed therebetween. The article 17 such as FOUP has a structure in which a larger load is applied to one of the pair of

hands

16 and 16 than the other. Therefore, if the elastic modulus of the damping

members

24 and 26 on the side with the larger load is made larger than that on the side with the smaller load, the article 17 such as FOUP can be supported horizontally. Instead of changing the elastic modulus, the area of the damping

members

24 and 26 may be increased on the side where the load is large and decreased on the small side.

The fixing member 20 is provided with both

end portions

28 and 28 projecting toward the article 17 side such as FOUP on the left and right sides of the central portion 27. The cylindrical piece 30 is provided on the upper surface of the both end portions 28, and the protruding

portions

32, 32 are provided at the tips of the both

end portions

28, 28 on the article 17 side. The taper surfaces 34 and 34 descend toward the surface. The attachment member 36 attaches the hand 16 to the opening / closing member 18 on the gripper main body side. The cable 38 connects the seating sensor 54 of the finger member 22 and the gripper body.

The finger member 22 includes a support member 40 at the center in the left-right direction, and the support member 40 is in contact with the flange portion of the article 17 such as FOUP and supported from below. Note that the left and right in this specification are the left and right directions in FIG. 2 and the longitudinal direction of the central portion 27 and the support member 40. Attachment members 44 are provided on both the left and right sides of the support member 40, the attachment member 44 is positioned higher than the support member 40, and a connecting member 42 is provided between the support member 40 and the attachment member 44. The attachment member 44 is connected. The mounting member 44 has a through hole 46, and the bottom surface of the mounting member 44 is supported by the top surfaces of the

vibration damping members

24 and 26, and the bottom surfaces of the

vibration damping members

24 and 26 are supported by both end portions 28. A screw 50 is screwed to the female screw portion of the cylindrical piece 30.

The role of the cylindrical piece 30 and the flange 51 is to limit the movement range of the mounting member 44 with respect to both end portions 28 within an allowable range, and may be simply fitted together instead of screwing. In the embodiment, the cylindrical piece 30 is provided in the fixing member 20, and the flange 51 and the through hole 46 are provided in the finger member 22. However, these arrangements are reversed, and the cylindrical piece 30 is provided in the finger member 22 and the flange 51 and the through hole. The hole 46 may be provided in the fixing member 20. Reference numeral 52 denotes a swinging piece that rotates when the bottom surface of the flange portion of the article 17 comes into contact with the support member 40. Then, wiring is made to the mounting member 36.

3 and 4 show details of the hand 16, and the seating sensor 54, the mounting member 36, and the like are omitted in FIG. A cylindrical piece 30 is disposed in the through hole 25, and a flange 51 is screwed to the cylindrical piece 30 with a screw 50. The mounting member 44 can be shifted in the horizontal direction within the range of the difference in outer diameter between the through hole 46 and the cylindrical piece 30, and the finger member 22 can move vertically with respect to the fixed member 20 by deformation of the damping

members

24 and 26. It can be shifted and can be shifted in the horizontal direction within the range of the difference in outer diameter between the through hole 46 and the cylindrical piece 30.

If the vibration damping member 24 is damaged, the finger member 22 is locked by the flange 51 and the cylindrical piece 30 to prevent the finger member 22 from shifting beyond the allowable range with respect to the fixed member 20. Is done. Also, if the damping member 24 is damaged, the protruding piece 48 descends downward in FIG. 4 and rides on the tapered surface 34, thereby limiting the retreat range of the protruding piece 48 to the right in FIG. For this reason, it is prevented by the protruding piece 48 and the taper surface 34 that the finger member 22 moves backward beyond the allowable range and comes off from the article 17. Note that the mounting member 44 is prevented from tilting forward with the left side in FIG. 4 as the front due to the load from the article 17 by the vibration damping member 26 being extended upward.

The signal of the seating sensor 54 is output by the harness 58 via the socket 60. Each time the article 17 is seated, the finger member 22 descends with respect to the fixed member 20, so that the harness 58 is repeatedly bent. Since the harness 58 may be disconnected by this, the harness 58 is bound at the lower side by the binding band 62 and the harness 58 is fixed to the bracket 56 by the fixing ring 64 above the harness 58, thereby preventing the harness 58 from being disconnected. .

FIG. 5 shows a modified hand, which is the same as the embodiment shown in FIGS. 1 to 4 except for a point to be particularly pointed out, and the same reference numerals denote the same parts. Both end portions 29 are the same as the both end portions 28 except that they do not have the protruding portion 32 at the tip, and the mounting member 45 is the same as the mounting member 44 except that the through hole 70 has a tapered surface that extends downward. It is. The cylindrical piece 66 is the same as the cylindrical piece 30 except that it has a tapered surface 68 that narrows upward. In the modification of FIG. 5, if the damping member 24 is damaged, the tapered surface 68 comes into contact with the tapered surface 71 and is locked, and the position and posture of the mounting member 45 are fixed.

Explain about vibration control. Due to the traveling of the overhead traveling vehicle 2, vibrations in the vertical direction, the traveling direction, the left-right direction, and the like are applied from the traveling drive unit 6 to the

hands

16 and 16, and the vibrations in any direction are suppressed by the

vibration control members

24 and 26. Since the damping member 24 has a large area and has a small elastic modulus and is easily deformed, the damping member 24 can be effectively damped. For this reason, the influence of vibration on the semiconductor wafer or the like in the article 17 can be reduced.

The embodiment has the following characteristics.
1) The specific elastic modulus is small, that is, soft, and the damping members 24 can be used to support the mounting

members

44 and 45 with a large area. For this reason, the finger member 22 can be effectively damped as compared with the case where the damping member having a large specific elastic modulus, that is, a hard and small area is used.
2) By configuring the finger member 22 with the support member 40 at the lower position, the mounting member 44 at the higher position, and the connecting member 42 for connecting them, the hand 16 can be made compact in the height direction.
3) The movement range of the finger member 22 is limited by the cylindrical piece 30, the flange 51, and the through hole 46, and the position of the finger member 22 can be limited even when the vibration damping member 24 is damaged.
4) Since the cylindrical piece 30 and the flange 51 are disposed in the through hole 25, it is compact.
5) The taper surface 34 and the protruding piece 48 or the taper surfaces 68 and 71 can prevent the finger member 22 from retreating carelessly.
6) The forward tilt of the finger member 22 can be suppressed by the damping member 26.
7) Since the

vibration damping members

24 and 26 do not come into contact with the article 17, they are difficult to get dirty or damaged.
8) When the lower part of the harness 58 is bound by the binding band 62 and is fixed to the bracket 56 by the fixing ring 64 above the binding band 62, the harness 58 is not disconnected even if it is repeatedly raised and lowered.
9) When the load from the article 17 is applied to the pair of

hands

16 and 16 in an unbalanced manner, if the elastic modulus of the damping

members

24 and 26 on the large load side is set higher than that on the small load side, the article 17 is horizontally placed. I can support it.

DESCRIPTION OF SYMBOLS 2 Overhead traveling vehicle 4 Travel rail 6 Travel drive part 7 Axis 8 Lateral movement part 9 Rotation drive part 10 Lift drive part 12 Suspension material 14 Gripper 16 Hand 17 Article 18 Opening and closing member 19 Fall prevention cover 20 Fixing member 22 Finger member 24 26 Damping member 25 Through hole 27 Center portion 28 Both ends 30 Tubular piece 32 Projection portion 34 Tapered surface 36 Mounting member 38 Cable
40 Supporting member 42 Connecting member 44 Mounting member
46 Through-hole 48 Protruding piece 50 Screw 51 Flange 52 Oscillating piece 54 Seating sensor 56 Bracket 58 Harness 60 Socket 62 Binding band 64 Fixing ring 66

Cylindrical piece

68, 71 Tapered surface 70 Through-hole

Claims

A transport device comprising a gripper for supporting an article from below,
The gripper includes a plurality of hands and an opening / closing member that opens and closes the plurality of hands in synchronization.
The hand is
A fixing member fixed to the opening and closing member;
A finger member for supporting the article from below;
A damping member made of a damping material, disposed between the fixed member and the finger member, and placed on the fixed member, and on which the finger member is placed;
And a restricting member for restricting the finger member from moving beyond an allowable range relative to the fixed member when the vibration damping member is damaged.
The conveying device having a gripper according to claim 1, wherein the vibration damping member has a vertical through hole, and the regulating member is disposed in the through hole.
A second through hole is provided in one member of the fixing member or the finger member so as to overlap the through hole of the damping member vertically,
The restricting member is attached to the other member of the fixing member or the finger member and extends into the second through hole, and is attached to the first member for restricting relative movement in the horizontal direction, and the first member. 3. A conveying apparatus having a gripper according to claim 2, comprising a flange penetrating through the second through hole and having a diameter larger than that of the second through hole and restricting relative movement in the vertical direction.
The finger member is
A mounting member placed on the damping member;
A support member that is lower than the mounting member and supports the article;
The transport apparatus comprising the gripper according to any one of claims 1 to 3, further comprising a connecting member that connects the mounting member and the support member.
At least a pair of the damping members are provided,
A pair of the mounting member and the connecting member are provided,
The conveying apparatus comprising the gripper according to claim 4, wherein the support member is disposed between a pair of attachment members.
A vibration control method for a gripper in a conveying device including a gripper for supporting an article from below,
The gripper includes a plurality of hands and an opening / closing member that opens and closes the plurality of hands in synchronization.
The hand is
A fixing member fixed to the opening and closing member;
A finger member for supporting the article from below;
A damping member made of a damping material, disposed between the fixed member and the finger member, and placed on the fixed member, and on which the finger member is placed;
A regulating member that regulates the relative position of the finger member with respect to the fixed member when the damping member is damaged,
The vibration damping member suppresses the vibration of the fixed member from being transmitted to the finger member,
The gripper vibration damping method, wherein the restricting member restricts the finger member from moving beyond an allowable range relative to the fixed member.