WO2015036161A1

WO2015036161A1 - Flashlamp, lamp arrangement and method for suppressing self-ignition

Info

Publication number: WO2015036161A1
Application number: PCT/EP2014/066295
Authority: WO
Inventors: Harald Gross; Enno Mirring
Original assignee: Von Ardenne Gmbh
Priority date: 2013-09-13
Filing date: 2014-07-29
Publication date: 2015-03-19

Abstract

The invention relates to various embodiments of a lamp arrangement which comprises the following: a gas discharge lamp (2), the automatic ignition of a gas discharge being triggered when the applied voltage is equal to or greater than a self-ignition voltage of the gas discharge lamp; a shielding structure (6) which is arranged outside the gas discharge lamp (2) such and is configured in such a way that the self-ignition voltage of the gas discharge lamp (2) can be electrically modified by means of the shielding structure (6). In particular, the gas discharge lamp is a flashlamp the discharge tube (112r) of which is surrounded by a tubular sleeve (5) that is filled with a cooling medium. The shielding structure (6) can be electrically connected to a shielding circuit (102) to supply electric energy to the shielding structure (6), particularly to increase the self-ignition voltage of the gas discharge lamp (2) and to thereby suppress self-ignition.

Description

description

Flash lamp, lamp assembly and method of suppressing auto-ignition

The invention relates to a flash lamp, a lamp assembly and a method for suppressing auto-ignition.

In general, a substrate may be processed by light, e.g. be processed or heated. For this purpose, the light can be generated by means of a gas discharge lamp and the substrate can be irradiated with the generated light.

A gas discharge lamp conventionally has a cathode and an anode within a gas-filled transparent discharge vessel, wherein it ignites during ignition of the

Gas discharge lamp to a gas discharge while emitting light (visible light, UV light and / or infrared light) comes. In general, a gas discharge lamp as

Flash lamp operated by, for example, a

Pulsed discharge through the gas discharge lamp pulsed (pulsed gas discharge), wherein by means of the flash lamp, a flash of light can be generated. The longer the gas discharge lamp is, the larger can be a peak electric power converted by the gas discharge lamp, which is emitted in part as radiation power in the form of light from the gas discharge lamp.

For example, by means of the capacitor, an electrical peak power in the kilowatt range or megawatt range can be provided, by means of which the gas discharge in the gas discharge lamp is fed.

When the capacitor is charged, it can generate a voltage between the anode and the cathode, so that the anode and the cathode have a potential difference and an electric field is generated within the gas discharge lamp between the anode and the cathode. Conventionally, the capacitor is up to a

Operating voltage loaded, which is below a

theoretical self - igniting voltage of the gas discharge lamp, so that uncontrolled ignition of the

Gas discharge lamp can be avoided. The theoretical Selbstuzündspannung describes the electrical voltage that is needed between the cathode and anode to a gas discharge in the gas discharge lamp independently

initiate. In other words, an automatic ignition of the gas discharge lamp takes place when between the anode and the cathode, a voltage greater than the theoretical

Auto ignition voltage applied. The field strengths associated with the self-firing voltage depend, among others, on the

Electrode geometry, the doping of the electrodes or the nature of all involved in the ignition process

Surfaces together. At the same time, the fluctuating number of naturally occurring charge carriers is another factor which determines the magnitude of the self-ignition voltage

influenced.

For controlled ignition of the gas discharge lamp is

conventionally generates an electric ignition pulse by means of an ignition generator when the capacitor is fully charged, and in the gas discharge lamp such

coupled to stimulate the formation of a plasma thread within the gas discharge lamp. The educated one

Plasmafaden lowers the impedance of the gas discharge lamp, so that the voltage applied between the anode and the cathode

Operating voltage leads to a discharge current in the lamp. The longer a gas discharge lamp, the greater the required operating voltage for operating the

Gas discharge lamp. For example, a

Gas discharge lamp with a length of more than 1 m require an operating voltage of more than 10 kV, so that a controlled ignition can be done by means of a firing pulse. The theoretical self-ignition voltage may be defined by the geometry and design of the gas discharge lamp.

For example, the theoretical auto-ignition voltage may depend on the geometry of the anode and / or the cathode, the distance of the anode to the cathode, the pressure and / or the pressure

Composition of the gas within the discharge vessel and / or be defined by the diameter of the discharge vessel. Clearly, the theoretical self-ignition voltage can be a design-specific size of the gas discharge lamp, which describes the ignition behavior of the gas discharge lamp. For example, the gas within the discharge vessel may have a pressure such that the gas discharge lamp can be operated in the minimum of the Paschen curve, provided by the driver circuit

Operating voltage can be less than the minimum of

Paschen curve.

Will the gas discharge lamp in an operating environment

operated, additional components of the

Operating environment in the vicinity of the gas discharge lamp, e.g. a light reflector, cooling water or components of a process chamber in which the gas discharge lamp is operated (for performing a process by means of the gas discharge lamp) with the

Gas discharge lamp interact. Due to the interaction, e.g. the electric field between the anode and the cathode are affected when the anode and the cathode are brought to a potential difference, e.g. on the operating voltage. As a result, the electric field, e.g.

be inhomogeneous (eg, have a field swell) and have an electric field strength which is large enough to ionize at least a portion of the gas in the gas discharge lamp, whereby a gas discharge can be excited before the theoretical self-ignition voltage is reached and the gas discharge lamp ignites uncontrollably (autoignition) ,

In other words, the operating environment affects the

Gas discharge lamp, the theoretical Selbstuzündspannung can be clearly reduced to an effective Selbstuzündspannung so that ignites the gas discharge lamp at a voltage which is smaller than the theoretical

Auto ignition voltage of the gas discharge lamp. Traditionally, this interference affects the ignition behavior of the

Gas discharge lamp. The smaller the difference between the operating voltage and the (effective) self-igniting voltage, the greater the probability that the gas-discharge lamp prematurely ignites when the operating voltage is applied, e.g. before the ignition pulse to ignite the

Gas discharge lamp is generated. For example, the capacitor feeding the gas discharge may be prematurely discharged, e.g. before the capacitor is fully charged, the maximum producible

Radiation line can be significantly reduced. Become several flashlamps for generating overlapping

If flashes are used, e.g. a synchronous ignition of the multiple flash lamps in the operating environment be difficult. With the arc length, which is defined by the distance of the cathode to the anode, the theoretical

Autoignition voltage increase, with increasing

Arc length the influence of the environment of the flash lamp on the effective self-ignition voltage, especially at high

Voltages between cathode and anode can rise.

Traditionally, the influence of the

To minimize the operational environment consuming, e.g. By placing components of the operating environment at a greater distance from the

Gas discharge lamp to be brought. Will the

Gas discharge lamp cooled by means of a cooling liquid, this can not readily in a larger

Arrange distance to the gas discharge lamp without affecting the cooling of the gas discharge lamp. Therefore, the reduced self-ignition voltage is conventionally accepted and an associated impairment of the maximum generatable radiation power (or the producible Light distribution) costly compensated (eg by means of additional gas discharge lamps).

One aspect of various embodiments can be seen illustratively in providing a shield (shielding structure) which minimizes the influence of the operating environment on that formed between the anode and the cathode

reduces electric field so that effects which reduce the self-ignition voltage can be reduced.

Clearly, the interaction of the operating environment and the gas discharge lamp can be reduced with each other, so that the self-igniting voltage of the gas discharge lamp is as large as possible, e.g. ideally corresponds essentially to the theoretical Selbstuzündspannung. This may make it possible to arrange the components of the operating environment (e.g., reflectors) so as to obtain the most advantageous effect, e.g. a homogeneous intensity distribution on a substrate. This can, among other things, help one

to increase the radiation power that can be generated.

The gas discharge lamp can be set up such that a predefined light distribution is generated when the gas discharge lamp, for example by means of

Operating voltage is fed. The operating voltage may for example be smaller than the theoretical

Auto ignition voltage of the gas discharge lamp, allowing a

Ignition pulse for igniting the gas discharge lamp is needed. This can be achieved, for example, that the

Time at which the gas discharge lamp is ignited, is defined by the generation of the ignition pulse.

By means of a flash lamp assembly according to various

Embodiments, multiple flash lamps can be controlled (eg at the same time) ignited, so that the light flashes generated by the multiple gas discharge lamps can be efficiently superimposed, so that, for example, the light intensity the superimposed flashes of light as large as possible and homogeneous on a substrate surface.

A gas discharge lamp by means of which an electric

Peak power can be discharged in the kilowatt range or megawatt range, can heat up during discharge heavily, so that cooling of the gas discharge lamp is required so that an adverse effect of the heating on the life of the gas discharge lamp can be avoided. Cooling by means of the cooling liquid (e.g., water) can significantly reduce the ignition voltage of the cooled gas discharge lamp.

Another aspect of various embodiments is clearly based on the finding that the cooling liquid, by means of which a gas discharge lamp is cooled, as

Shielding can be used. This can be the

Conductivity of the cooling liquid can be increased, so that the cooling liquid has an electric potential such

can be provided that the cooling liquid, the gas discharge lamp from the operating environment efficiently

shields. This can be clearly achieved a shield with a particularly simple and inexpensive construction, which has the highest possible Selbstuzündspannung

allows. For example, an existing

Processing system inexpensively retrofitted or can a new processing plant cost-effective with a shield

be equipped. This can help the

Compared to the efficiency of a processing plant

to increase conventional processing equipment.

The invention relates, for example, to a flashlamp, comprising an elongated discharge tube, which is surrounded on the outside by a jacket tube spaced from the discharge tube, wherein the space between the jacket tube and the

Discharge tube is filled by a cooling medium, wherein in the discharge tube one lying at a high voltage potential Electrode and a counter electrode are arranged, which are each connected to a connecting line, and wherein outside of the discharge tube, an ignition electrode is arranged.

The invention also relates to a method for suppressing auto-ignition of a flashlamp, comprising an elongated discharge tube with an electrode and a counter electrode, wherein the discharge tube is introduced into a jacket tube and cooled by a cooling medium, wherein outside of the discharge tube, an ignition electrode is attached, and wherein a high voltage with respect to ground potential is applied to the electrode. Such a flashlamp consists of a gas-filled discharge tube with two arranged in the discharge tube

Electrodes so that upon application of a charging voltage between two electrodes, a gas discharge with emission of electromagnetic radiation (e.g., light) occurs. Such flash lamps are typically in one

Substrate treatment plant used for exposing or heating substrates.

For exposure of large area substrates, long axial flashlamps (e.g., longer than 1 m in length) are used which are typically operated at high operating voltages or charging voltages, respectively. The operating voltage of the flash lamp increases in a first approximation linear with their length. For flash lamps with an arc length of about 4 m, the operating voltage may be 10 kV-50 kV, for example. For such flashlamps, it is necessary to use a cooling jacket (for example, a cooling medium surrounding the flashlamp in a jacket tube) to ensure a long life of the flashlamps. The cooling jacket can

be designed for example as a water or gas flowed glass tube, in which the discharge tube is arranged. For high, time-averaged services of flash lamps Typically, a water jacket is used so that water can be pumped through the cooling jacket to cool the discharge tube. This applies in particular to the use of flash lamps in a vacuum, since the heat in the vacuum can only be dissipated by radiation.

For firing a long flashlamp, in practice, on the outside of the flashlamp, a firing electrode is applied, which is supplied with an ignition voltage (for example by means of a firing pulse) (external firing). After ignition, the gas discharge is maintained at the operating voltage. The ignition voltage can be significantly lower than the self-ignition voltage with external ignition. For water-cooled flashlamps with an arc length greater than about 1 m, e.g. about 4 m and one

Inner diameter greater than about 10 mm, e.g. about 22 mm it comes from a certain charging voltage, the

typically above 20 kV, to one

Auto-ignition of the flash lamp, in which the ignition is not by means of the ignition voltage but, for example, by an undesirable, parasitic electric field between the high-voltage electrode of the flash lamp and the earth potential environment such. a vacuum chamber or a (e.g., metallic) light reflector (reflector). This behavior is typically observed above 35kV when cooled with air or nitrogen, or at ideal geometry, i. All electrically conductive surfaces are arranged at a great distance from the high-voltage electrodes, only above 45 kV. The cause of the great difference between water and air in terms of self-ignition voltage is the permittivity of about 81 compared to about 1 in combination with the polarization of the

Water, i. Alignment of water molecules in electric fields. In the case of water, the permittivity generates a very high electric potential gradient at the

Interface between water and the glass wall of the Flash lamp and leads to self-ignition voltages below 20 kV.

The invention is therefore based on the object to provide a cooled long flash lamp, in which the

Auto ignition voltage can be increased and thus unwanted auto-ignition can be avoided. These

The object is achieved by a flashlamp with the features of claim 1, claim 17 and / or claim 20 and a method with the features of

Claim 14 solved. Advantageous embodiments of

Invention are given in the dependent claims.

The invention is based on a flash lamp, the one

elongate discharge tube comprising an electrode (e.g., a cathode) and a counter electrode (e.g., anode) disposed in the discharge tube (in a tubular tube)

Discharge vessel) at opposite ends of the

Discharge tube are arranged, wherein the electrode is at a high voltage potential with respect to ground potential (when the operating voltage is applied), wherein the discharge tube is externally surrounded by a tube spaced from the discharge tube for receiving cooling medium between the jacket tube and the discharge tube, and wherein outside the

Discharge tube an ignition electrode is arranged. The flash lamp typically has an arc length of at least 1 m.

For example, the cooling medium (coolant) may include a cooling gas (eg, air, precooled air, nitrogen, or other suitable gas) or a cooling fluid (eg, water or other suitable fluid) for absorbing heat. For example, the cooling medium may be transparent (translucent), so that light generated by the flash lamp may traverse the cooling medium. To dissipate the heat absorbed, the cooling medium can flow around the flash lamp. The cooling medium can be part of a cooling circuit be, for example, a pump for circulating the

Cooling medium and a heat exchanger, which of the

Coolant can be flowed through, may have. The electrode and the counter electrode are each electrically connected to a connecting line. To operate the flash lamp, for example, the electrode (cathode) is connected via the connecting lead to a voltage / current source (or a driver circuit). Thus, the cathode is at a negative high voltage and the counter electrode

(Anode) is then at ground potential (when the power source generates the operating voltage). Alternatively, the electrode (anode) is subjected to a positive high voltage and the counter electrode (cathode) is at ground potential.

The flash lamp is typically used for exposure

Substrates in a treatment chamber, in particular in a vacuum chamber, used and can be designed for example with a reflector. The surrounding the flash lamp

Components, such as chamber wall or reflector, are typically at ground potential.

The jacket tube can be made with circular, rectangular, oval or other cross sections. For cooling the discharge tube, for example, the intermediate space between the jacket tube and the discharge tube is filled with cooling water. The cooling water flows through the gap.

For cooling the discharge tube is usually

deionized water with a pH of 7 used. Consequently

- 7

is an equilibrium of 10 mol / 1 OH and just as much of H ⁺ ions. For example, when applying a negative operating voltage or negative charging voltage to the cathode and ground potential to the anode, it is due to the permittivity and polarization of the water in the electric field between the cathode and the ground potential

lying environment of the flash lamp, such as chamber wall or reflector, to a high electrical

Potential gradients on the outside of the discharge tube, in particular the outside of the discharge tube in the region of the cathode. As a result, in the region of the cathode a

generated electric Feldüberhöhung, which then to

Auto-ignition of the flash lamp can result. At the same time an alignment of the water molecules in the external electric field takes place, which can enhance this effect, or the field swelling still. In other words, in one

Operating environment, the ignition of the flash lamp prematurely

respectively .

A similar behavior results on the anode side, if it is acted upon by a positive operating voltage and the cathode is at ground potential. At a

so-called symmetrization of the operating voltage, i. an equal magnitude of voltage is applied across the cathode as at the anode, e.g. -15 kV at the cathode or +15 kV at the anode, the potential gradient between the grounded vacuum chamber and the operating voltages

reduced lying electrode. Technically, this is very difficult to implement, especially in tensions in the

Kilovolt range with simultaneous currents in the kiloampere range. In addition, higher operating voltages than about +/- 15 kV lead to auto-ignition of the flash lamp again.

To suppress this undesirable auto-ignition is according to the invention at least one shield

(Shielding structure) provided outside the

Discharge tube is arranged and on a

Shielding potential is. In this case, the shielding potential can reduce or prevent the electric field between the electrode and the shield. In one embodiment of

The invention provides an electrically conductive shielding element as a shield, which is arranged outside the discharge tube at least in the region of the electrode, ie the shielding element is located in an electrode circumferential space, which extends from the discharge tube radially outward and in the width of the electrode in the axial direction. The shielding element lies on the shielding potential,

preferably at the same potential as the electrode. Thus, no electric field or only a very small field arises between the electrode and the shielding element, so that it does not lead to a high potential gradient at the

Discharge tube in the region of the electrode can come and thus no more self-ignition occurs. The electrode is thus shielded from the ground potential. The shielding element must not extend over the entire length of the flash lamp, otherwise high potential gradients would form on the counterelectrode side. It is advantageous that the shielding element surrounds the outside of the discharge tube. For example, the shielding element can be embodied as a wire (shielding wire) which is located on the negative

Potential is located and surrounds the outside of the discharge tube at least in the region of the cathode. For example, the wire is wound around the discharge tube in the region of the cathode. In one embodiment of the invention, the shielding element is at the same time designed as an ignition electrode and can be connected as an ignition electrode to an ignition voltage source. Thus, the shielding element acts as ignition electrode during ignition for applying the ignition voltage. In this case, to ensure reliable ignition of the flash lamp, the shielding element must extend over the largest possible area between the anode and the cathode. To avoid self-ignition, for example, at the cathode, the shielding element with a voltage or a

To apply shielding voltage between the

Operating voltage and ground is. Is that the

Operating voltage, for example, -30 kV, so can the

Shielding voltage in a range of -10 kV to -20 kV. For example, the shield voltage may be greater than about 10% of the operating voltage, eg, greater than about 30% of the operating voltage, eg, greater than about 50% of the operating voltage, eg, greater than about 70% of the operating voltage

Operating voltage, e.g. greater than about 90% of the

Operating voltage. For example, the shield voltage may range from about 70% of the operating voltage to about 100% of the operating voltage. The smaller the difference of the shielding voltage to the

Operating voltage is, the greater self-ignition voltage shielded by the shielding voltage

Be gas discharge lamp. The larger the shielding voltage, the larger the shielding potential that is provided to the shielding member (in other words, the shielding potential to which the shielding member is brought).

Similarly, for example, the shield potential may be greater than about 10% of the potential (cathode potential) applied to the cathode, e.g. greater than about 30% of the cathode potential, e.g. greater than about 50% of the

Cathode potential, e.g. greater than about 70% of the

Cathode potential, e.g. greater than about 90% of the

Cathode potential. For example, the shield potential may range from about 70% of the cathode potential to about 100% of the cathode potential.

Similarly, the shielding potential may be provided depending on the anode potential, e.g. for shielding the anode, e.g. at a symmetrization of the operating voltage.

To enhance the effect of the shielding member, i. the outgoing from the shielding electric field

reinforce is at the discharge tube in the area of

Electrode provided a wide-mesh grid, which is connected to the shielding. The mesh size hangs typically from the penetration of the ground potential of the

Treatment chamber from, so the potential distribution and the distances from. In this case, for example, a grid with a mesh size of about 10 mm or smaller can be used.

For applying the shielding potential to the shielding element, the arrangement can be designed in various ways. The shielding element can be connected to an independent, controllable resistor via a high-impedance resistor (which can act as a protective resistor, in particular for fault currents)

Voltage / current source connected. Alternatively, the shielding element can electrically via a high-impedance

Resistance divider may be connected to the electrode, so that the voltage applied to the shielding element between ground and electrode can be adjusted. The shielding element may, for example, be at the same potential as the electrode or at the operating voltage. The shielding element may for example be electrically connected directly to the electrode.

For use as a starting electrode, the shielding element is set to an ignition voltage only during ignition. The shielding element is permanently connected to the ignition voltage source via a coupling capacitor, e.g. an ignition transformer, connected. The shielding can therefore on the

Auto ignition voltage or at the operating voltage.

Once the ignition voltage source is active, i. the flash lamp at the ignition, the ignition voltage is over the

Coupling capacitor supplied to the shielding and thus dominates the ignition voltage on the shielding.

In another embodiment of the invention is the

Outside of the jacket tube at least in the area of

Electrode surrounded by the shielding element, which on the

Shielding potential, preferably the operating voltage of the

Electrode, lies. For example, a wire around the Coiled outside of the jacket tube in the region of the cathode and subjected to the same voltage as the cathode.

It is advantageous that the shielding element is surrounded by an electrical insulation layer. For example, an insulated wire can be used as a shielding element, so that the shielding element is at the shielding potential and is electrically insulated from the environment, for example chamber wall.

In a further embodiment of the invention, a light reflector surrounding the flash lamp is used and as

Shielding element used, which is at the shielding potential. The light reflector can also act as ignition electrode.

Alternatively, a shielding element is mounted on the inside of the jacket tube at least in the region of the electrode. In another embodiment of the invention is a

low-induction, high-resistance sheet resistance is used, which is arranged in the vicinity of the flash lamp and designed as a shielding element. The sheet resistance along the flash lamp generates a potential distribution which of

Edge fields apart from the potential distribution between the cathode and the anode corresponds. The sheet resistance can be applied, for example, on the entire surface of the jacket tube.

Alternatively, one or more sheet resistors

used concentrically around the jacket tube

are arranged. With the help of capacitors, the

Sheet resistance, for example, with a

Ignition voltage source, or a high-voltage ignition coil are connected. The sheet resistance also acts as ignition electrode for igniting the flash lamp. In another

Embodiment of the invention, the sheet resistance can be integrated into the jacket tube. It will ignite the Flash lamp used an ignition electrode on the

Outside of the jacket tube between the cathode and the anode is arranged. In a simple embodiment of the invention, deionized cooling water (di-water) may be added with minimal addition of ions, e.g. Sodium hydrogen carbonate, can be used so that the electrical conductivity or conductivity of the cooling water is increased. The electrical conductivity of the cooling water is preferably greater than 0.1 yS / cm, more preferably greater than 0.5 yS / cm. Of the

Interspace between the jacket tube and the discharge tube is thereby filled by the electrically conductive cooling water, which in the region of the electrode, i. in the area of

Electrode on which shielding potential lies. According to various embodiments, other suitable substances, such as salts may be added to the cooling water as ion donors, the greater the conductivity of the cooling water, the more ions are or are added to the cooling water or the more salt

Cooling water is or will be added.

This forms analogous to the sheet resistance

Potential gradient in the cooling water, which completely surrounds the flash lamp and has a shielding effect on external fields. The electrode is over the

Connecting cable connected to a voltage / current source. This connection line can, for example, in direct

Contact with the cooling water stand. Thus, the cooling water can be set in the region of the electrode via the connecting line to the shielding potential. Alternatively, the

Connecting line electrically connected via a supply line with the electrically conductive cooling water.

This supply line can be referred to as a water electrode. The cooling water is placed on the shielding potential via the water electrode. The water electrode can

for example, with the connecting line via a electrical resistance to the current limit in case of failure, so at an electrical conductivity well above 10 yS / cm, are connected. The Abschirmpotential in the region of the electrode is then depending on the choice of the resistance value smaller than the high voltage potential of the electrode. The

Water electrode can for example via a

Coupling capacitor to be connected to the ignition voltage source. Thus, the water electrode is during the

Ignition on ignition voltage. To ignite the cooled by the electrically conductive cooling water flash lamp can

For example, an ignition electrode are applied to the outside of the jacket tube. Alternatively, for igniting the flash lamp, an electrically insulated against the high voltage of the electrode ignition electrode, or ignition wire can be introduced into the conductive cooling water and thus a

Ignition of the flash lamp at any ambient pressure

enable. In practice, allows an electrical

Conductivity example, of about 1.0 yS / cm safe suppression of auto-ignition at operating voltages greater than about -50 kV and a low current flow between the ignition electrode and the cathode. At a

On the other hand, if the electrical conductivity is lower (for example less than 0.1 yS / cm), the flash lamp may self-ignite. When a (e.g., metallic) water electrode and / or a (e.g., metallic) ignition wire is used to supply electrical energy to the cooling water, it may be used as

Ion donors are executed and / or act as ion donors for influencing, e.g. to increase the conductivity of de-ionized water. Illustratively, the

Water electrode and / or the ignition wire be set up so that metal ions (eg cations or anions) from the water electrode and / or the ignition wire can go into the cooling water, so that the conductivity of the cooling water is increased. For this purpose, the water electrode and / or the ignition wire may comprise a metal, eg iron, steel, copper and / or aluminum, or be coated with a metal, which is suitable for delivering the corresponding metal ions to the cooling water.

When ions are added to the cooling water to affect the conductivity of the cooling water, it may be necessary to control and / or stabilize the proportion of ions (e.g., metal ions and / or dissolved in the cooling water of a salt) in the cooling water. For this purpose, at least a portion of the cooling water can be passed through a suitable filter system. The filter system can e.g. an osmotic filter, e.g. a reverse osmosis cartridge. For example, the filter system may be connected by means of a bypass line with a cooling circuit for cooling a flashlamp, so that a portion of the cooling water is passed through the filter system when the flashlamp is cooled with the cooling water. The filter system can

for example, be part of the refrigeration cycle and be arranged to remove some of the ions dissolved in the water from the cooling water, e.g.

filters out or absorbs. Vividly that can

Cooling water, for example, e.g. be desalted or e.g. be deionized.

A flashlamp or multiple flashlamps may be part of a flashlamp assembly that is used to generate

Flashes can be operated. The plurality of flash lamps may e.g. Be part of a common lamp array for generating flashes of light and / or for processing a substrate. According to various embodiments, a

Flash lamp assembly having a plurality of flash lamps, e.g.

two, three, four, five flashlights or more than five

Flash lamps, e.g. more than ten flash lamps or e.g. more than twenty flashlamps. For producing flashes of light, the flash lamps of a flash lamp assembly can be individually, in

Groups or ignited together, with the light flashes generated by each ignited flash lamps can overlap to form a light distribution. A flashlamp may include a gas discharge lamp which may be operated by the driver circuit as a flashlamp, in other words to generate a flash of light. In general, a gas discharge lamp can be operated as a flash lamp, for example by a

Capacitor (main capacitor) is pulsed discharged through the gas discharge lamp, wherein by means of the flash lamp, a flash of light can be generated. In other words, a gas discharge lamp can be operated in such a way that a pulsed gas discharge occurs when the gas discharge lamp is ignited. The discharge duration of a pulsed gas discharge may be short, e.g. less than 50 ms, e.g. less than about 10 ms, e.g. less than about 1 ms, e.g. less than about 0.5 ms, e.g. less than about 250 ys.

By means of the capacitor can be an electrical

Peak power in the kilowatt range or megawatt range can be provided, by means of which the gas discharge is fed in the gas discharge lamp. For example, the capacitor may be configured such that this one

Provides peak power of up to 1.2 gigawatts. The greater the peak power, the lower the

Lifetime of the flash lamp. For example, at high peak powers (e.g., in the gigawatt range), it may allow one to a few flashes until the glass body bursts.

When the gas discharge lamp is operated as a flashlamp, the gas discharge lamp may emit light (in other words a flash of light) for a period shorter than about 50 ms, eg for a period shorter than about 10 ms, eg shorter than about 1 ms, eg shorter than about 0 , 5 ms, for example, shorter than about 250 ys. For this purpose, the driver circuit may have a capacitor which can be discharged in a pulse-like manner by means of the gas discharge lamp (for example when the gas discharge lamp is ignited) for supplying the gas discharge with electrical energy. The ignition of a gas discharge lamp (flash lamp) can be understood such that from the time of ignition, a gas discharge in the gas discharge lamp expires below

Emission (in other words, delivery) of light (e.g., UV light, visible light and / or infrared light). The necessary electrical energy for generating the gas discharge may be by means of the capacitor (which part of a

Driver circuit for operating the gas discharge lamp can be provided). Clearly, the electrical energy necessary for generating the gas discharge can be stored in the capacitor. During the gas discharge, the capacitor can be discharged through the gas discharge lamp, whereby the electrical energy of the

Capacitor by means of the gas discharge lamp in

Radiation energy is converted. The radiation energy can be emitted (emitted) by the gas discharge lamp in the form of the generated light. With the emitted light, e.g. a substrate is irradiated to process the substrate, e.g. for heating the substrate.

The light generated by a flash lamp may be, for example, ultraviolet (UV) light, visible light and / or

have infrared (IR) light. Furthermore, the wavelength of the light or the wavelength spectrum of the light can be in the UV range, in the visible range and / or in the IR range.

According to various embodiments, a

Gas discharge lamp with a light source (eg a gas or a gas mixture) filled discharge vessel, eg a tubular discharge vessel, (eg glass, quartz glass, or an alumina ceramic). When discharging the capacitor by means of the gas discharge lamp, the light bulb enclosed in the discharge vessel can be made to shine by means of the current flow through the light source and thereby emit light. The tubular Discharge vessel (discharge tube), for example

be cylindrical, have a diameter and along a (perpendicular to the diameter direction) (axis of the tubular discharge vessel) to be longitudinally extending, or extending along the axis

Have longitudinal extent.

A gas discharge lamp may according to various

Embodiments include a longitudinal extent or length of the discharge vessel (e.g., along the axis of a discharge vessel)

Discharge tube) in a range of about 0.1 m to about 5 m, e.g. in a range of

about 1 m to about 4.5 m, e.g. in a range of about 3 m to about 4.5 m. Alternatively, a tubular gas discharge lamp may have a longitudinal extent in a range of about 0.1 m to about 2 m, e.g. in a range of about 0.1 m to about 1 m.

According to various embodiments, the

Discharge vessel of a gas discharge lamp and / or the

Gas discharge lamp has a diameter (across the

Longitudinal extent of the discharge vessel) in a range of about 0.2 cm to about 10 cm, e.g. in a range of about 1.0 cm to about 5.0 cm, e.g. in a range of about 1.5 cm to about 2.0 cm.

The larger the extent (e.g., the length or the

Diameter) of a gas discharge lamp, the greater the radiation power can be, which by means of

Gas discharge lamp can be generated when the

Gas discharge lamp is ignited. Further, an exposure profile generated by a gas discharge lamp (in other words, a spatial distribution of light intensity) may be more uniform the longer the gas discharge lamp is.

According to various embodiments, a

A lamp assembly comprising: a gas discharge lamp for generating a flash of light by means of a gas discharge, wherein the gas discharge lamp is adapted to be ignited at an applied Selbstzündspannung (and / or at an applied voltage equal to or greater than the

Self-ignition voltage); a shielding structure which is arranged outside of the gas discharge lamp and is arranged such that the SelbstZündspannung the

Gas discharge lamp is electrically changeable by means of the shielding structure; and one electrically with the

Shield structure coupled shielding circuit for supplying electrical energy to the shielding structure for changing the self-igniting voltage of the gas discharge lamp.

For example, the shielding circuit may be configured to supply a voltage to the shielding structure to change the self-igniting voltage of the gas discharge lamp.

According to various embodiments, a

Lamp assembly comprising: a gas discharge lamp, wherein an automatic ignition of a gas discharge at an applied voltage equal to or greater than one

SelbstZündspannung the gas discharge lamp takes place; a

Shielding structure which outside of the

Gas discharge lamp is arranged and arranged such that the self-ignition voltage of the gas discharge lamp by means of the shielding structure is electrically variable; an electrically coupled to the shield structure

Shielding circuit for supplying electric power to the shielding structure for changing the self-igniting voltage of the gas discharge lamp.

An automatic ignition of a gas discharge can be demonstrated when the voltage applied to the gas discharge voltage to an electric field between the anode and the cathode (or within the gas discharge lamp) leads, which causes ionization of the gas in the gas discharge lamp, so that the Anode and the cathode applied voltage discharged through the gas discharge lamp (as a gas discharge). The Selbstzündspannung can be understood as the voltage applied to the gas discharge lamp voltage at which the gas discharge is triggered (in other words, the gas discharge lamp is ignited). The electric field generated between the anode and the cathode within the gas discharge lamp may be due to the proximity of the

Gas discharge lamp to other components of the operating environment changed (clearly deformed), which has an effect on the Selbstzündspannung the gas discharge lamp.

Clearly, a parasitic electric field may be present between a voltage, e.g. Operating voltage, laid electrode of the gas discharge lamp and the other components (which may for example be based on electrical ground) form, which is superimposed on the generated within the gas discharge lamp (clearly primary) electric field and thus affects the Selbstzündspannung the gas discharge lamp.

The influence of the parasitic electric field on the self-ignition voltage of the gas discharge lamp can be greater, the smaller the distance between the electrodes of the

Gas discharge lamp to the other components compared to the distance of the electrodes of the gas discharge lamp is.

Clearly, the influence of the parasitic electric field can increase the longer the gas discharge lamp is. Therefore, with long gas discharge lamps, it may be necessary to form the parasitic electric field

reduce, so that the gas discharge lamp with a

Operating voltage can be operated.

Is the self-ignition voltage of the environment of

As described above, for example, the gas discharge lamp may be smaller than the gas discharge lamp

theoretical Selbstuzündspannung, so that ignition of the gas discharge lamp takes place at a voltage applied to the gas discharge lamp voltage, which is smaller than that theoretical self-ignition voltage and equal to or greater than the self-ignition voltage. By means of the shielding structure, the formation of the parasitic electric field can clearly be reduced, so that the influence of the further components on the self-ignition voltage of the gas discharge lamp can be reduced by means of the shielding structure. For example, the self-igniting voltage of the gas-discharge lamp can be prevented from being smaller than that provided by the driver circuit by means of the shielding structure

Operating voltage when the gas discharge lamp in a

Operating environment is operated, which has the other components.

According to various embodiments, the

Shielding be configured to influence a provided within the gas discharge lamp

electric field (which may be, for example, primary electric field and the superimposed parasitic electric field). For example, the shielding structure may be configured to reduce parasitic

electric field between the gas discharge lamp and the operating environment of the gas discharge lamp.

In other words, the shielding structure can be designed to influence an electric field provided within the gas discharge lamp.

According to various embodiments, a

Lamp assembly further comprise a sheath tube surrounding the gas discharge lamp, wherein for cooling the

Gas discharge lamp between the sheath tube and the

Gas discharge lamp is a cooling medium is added.

The shell tube may be configured to receive the cooling medium (eg cooling water) for cooling the gas discharge lamp with the cooling medium. For example, the gas discharge lamp may be water-cooled, the gas discharge lamp being inside of the shell tube flows around and / or rinsed by cooling water.

According to various embodiments, the

Gas discharge lamp having an electrode and a counter electrode (anode), wherein the shielding structure is adapted to influence an electric field provided between the anode and the cathode. Clearly, the gas discharge lamp can be operated such that the

Electrode is used as a cathode and the counter electrode as the anode, wherein between the anode and the cathode, an electric field is generated when connected to the

An electric voltage is applied to the gas discharge lamp (e.g., to the cathode or to the anode). In other words, an electric field can be generated within the gas discharge lamp when the gas discharge lamp a

electrical voltage is applied.

A lamp assembly can be made according to various

Embodiments comprise: an elongate discharge tube, which may be surrounded on the outside by a shell tube spaced from the discharge tube, wherein the

Interspace between the shell tube and the discharge tube may be filled by a cooling medium, wherein in the

Discharge tube on a first electrical potential (eg, a high voltage potential) lying electrode and a counter electrode may be arranged, which may each be connected to a connecting line, the lamp assembly may be provided with at least one self-ignition suppressing shielding structure, which may be arranged outside of the discharge tube can and can be at an electrical potential (eg a shielding potential). According to various embodiments, a

A lamp assembly further comprising: a shielding circuit for supplying electrically coupled to the shielding structure electric power to the shielding structure for changing the self-igniting voltage of the gas discharge lamp. through

Supplying electrical energy, the shielding structure can be brought to a shielding potential, for example.

According to various embodiments, a

Lamp assembly further comprise: one outside the

Discharge tube arranged ignition electrode and a

Ignition circuit, wherein by means of the ignition circuit, an electric ignition pulse for igniting the gas discharge lamp is transferable to the ignition electrode.

According to various embodiments, the ignition

electrically, e.g. by means of a firing pulse, which e.g. from outside the gas discharge lamp in the

Gas discharge lamp can be coupled. To inject the electrical firing pulse into the gas discharge lamp, the firing pulse may be transmitted to a firing electrode (e.g., a firing wire or alternatively a reflector or shielding structure) such that the firing electrode forms a time varying electric field which acts on the gas discharge lamp to cause a plasma filament

can be formed within the gas discharge lamp. For generating the electric field and for coupling the electric ignition pulse into the gas discharge lamp, the ignition electrode may be electrically conductive and e.g. have a metal, e.g. Molybdenum, aluminum or steel.

In other words, the shielding structure as

Ignition electrode are operated to ignite the gas discharge lamp, e.g. by transmitting the ignition pulse to the shielding structure.

The formed plasma thread reduces the impedance of the

Gas discharge lamp, so that a voltage applied to the gas discharge lamp voltage to a discharge current in the

Gas discharge lamp leads. In other words, by means of the electrical ignition pulse a pulsed gas discharge are excited.

According to various embodiments, the ignition voltage may be generated inductively, e.g. by means of a

High voltage transformer (ignition transformer), which is connected to an AC generator.

According to various embodiments, the ignition

electrically, e.g. by means of a firing pulse, which e.g. is transferred to the cathode and / or the anode.

In the same way as described above, plasma and / or a plasma thread can be formed, which leads to a discharge current in the gas discharge lamp. In other words, the flash lamp can be fired serially via the electrodes (connection electrodes) of the flash lamp. This can be achieved with a flash lamp of great length (e.g., longer than 100mm) with appropriate firing voltages in excess of the auto-ignition voltage of the flashlamp. Illustratively, for example, the

Operating voltage and the ignition voltage are superimposed so that these together equal to or greater than the

Auto ignition voltage are. For example, the

required ignition voltage for a flash lamp with serial ignition and an arc length of about 150 mm already be more than 20 kV. To achieve a comparable field strength for a much longer flash lamp would be a

Ignition voltage required in the MV range. Generating an ignition voltage in the MV range can be technically very complex, since this may require, for example, a complex isolation of the live components. To reduce this expense, an external ignition can be used for a long flashlamp. For example, a flashlamp with an arc length of 3800 mm can also be operated or ignited with an ignition voltage of approximately 20 kV with external ignition. The required ignition voltage in the case of external ignition, for example, may be smaller than the self-ignition voltage of the flash lamp, or the required ignition voltage in the case of the serial ignition. The AC voltage generated by the ignition transformer can be externally ignited to an electrical conductor, eg a wire, extending parallel to the flash lamp

(Ignition), which generates an electromagnetic field in the flash lamp, which stimulates a plasma formation in the gas discharge lamp and thus lowers the impedance of the gas discharge lamp, so that at the

Gas discharge lamp voltage applied to one

Discharge current in the gas discharge lamp leads. According to various embodiments, the

Gas discharge lamp have a length of more than 1 m.

According to various embodiments, a

Lamp assembly further comprise: a with the

Gas discharge lamp electrically coupled driver circuit for supplying the gas discharge lamp with a

Operating voltage such that the electrode, a first electrical potential is provided and the

Counter electrode a second electrical potential

is provided for providing the electrical

Field.

Clearly, the operating voltage between the electrode and the counter electrode can be or be provided.

For example, the operating voltage may be about 25 kV or more than about 25 kV, for example, in a range of about 10 kV to about 50 kV. The difference between the first electrical potential and the second electrical potential (potential difference between anode and cathode) may correspond to the operating voltage. According to various embodiments, the

Driver circuit having a capacitor which may be electrically coupled to the power source, so that the capacitor by means of the power source (power supply) can be charged. When charging the capacitor, a charging current can be supplied to the capacitor by means of the current source, wherein the capacitor stores electrical energy. Is the

Capacitor charged (in other words in a charged state of the capacitor), this can provide the operating voltage. Clearly, the capacitor as

Energy storage act, which can store and provide a necessary energy for generating a flash of light.

According to various embodiments, the

Driver circuit (e.g., the capacitance of the capacitor or the power supply) may be sufficiently dimensioned or so that it can provide the operating voltage. For example, the power supply for charging the capacitor may provide a charging voltage for charging the capacitor. The charging voltage may for example be greater than the operating voltage. Clearly, the capacitor can be charged as quickly as possible.

According to various embodiments, the

Driver circuit may be configured to provide an electrical current (e.g., a peak current) of greater than about 1 kA, e.g. greater than about 5 kA, e.g. greater than about 10 kA. This can be the

Driver circuit a correspondingly sized

Have condenser.

According to various embodiments, the

Driver circuit to be set up accordingly, a

To provide voltage (eg, the operating voltage) of about 25 kV or more than about 25 kV cyclic, for example, with a frequency of about 0.5 Hz or more than about 0.5 Hz, or more than about 5 Hz or more than about 50 Hz. For short flash lamps (eg shorter than 100 mm) it may be necessary to be able to ignite them very frequently, eg with a frequency of approximately 100 Hz, whereby the driver circuit can be set up accordingly, the operating voltage with a frequency of more than to provide about 100 Hz.

The faster the capacitor can be charged, the faster it can supply the operating voltage at the

Provide gas discharge lamp, so that a discharge of the capacitor can be done at shorter intervals and thus more often.

According to various embodiments, the power source may provide electrical power and / or electrical voltage such that the capacitor may be connected to a capacitor

Frequency greater than a predefined frequency (e.g., several times per second) can be fully loaded. This can be achieved, for example, that the

Gas discharge lamp can be detonated as often as possible, each time the gas discharge lamp ignited, the energy stored in the capacitor can be at least partially converted into radiation energy by means of the gas discharge lamp. In this case, an electric current (the discharge current) through the gas within the

Discharge vessel flow (gas discharge) and the gas thereby be ionized, whereby the ionized gas can emit light. The discharge current can be a time-dependent electrical

Amperage (in other words, an electric current pulse), wherein the electric current can have a maximum (in other words, a peak current). The peak power that can be supplied to a gas discharge lamp may or may not be defined by the peak current. According to various embodiments, the

Driver circuit such that a current (e.g., a peak current) of greater than about 1 kA can be provided by means of the capacitor, e.g. greater than about 10 kA, e.g. greater than about

50 kA. For this purpose, the driver circuit may have a suitably dimensioned capacitor. According to various embodiments, the driver circuit may be such

be established that by means of the capacitor a

electrical peak power in the kilowatt range or

Megawatt range can be provided, by means of which the gas discharge is fed in the gas discharge lamp.

Alternatively, a capacitor assembly 110c with multiple capacitors may be used. According to different

Embodiments, the capacitor 110c or the

Capacitor assembly 110c have a capacitance in a range of about 20 yF to about 2000 yF (depending on the desired pulse duration). According to various embodiments, the capacitor 110c or the capacitor arrangement 110c may have a withstand voltage up to a voltage of more than 25 kV.

According to various embodiments, the

Gas discharge lamp and the driver circuit such

be set up such that upon ignition of the gas discharge lamp, a peak electric power of more than about 1 kW is converted, e.g. a peak electrical power greater than about 100 kW, e.g. an electrical

Peak power of more than about 10 MW, e.g. electrical power of more than about 1 GW.

Depending on the efficiency of the gas discharge lamp and the driver circuit when igniting the

Gas discharge lamp, a portion of the converted by the gas discharge lamp power are converted into a corresponding radiant power, which from the gas discharge lamp by means of Light can be emitted. For example, a radiation power of more than about 0.4 MW may be emitted by the gas discharge lamp, for example a

Radiant power greater than about 0.4 kW, e.g. a radiant power greater than about 40 kW, e.g. a radiant power greater than about 4 MW, e.g. a radiant power of more than about 400 MW.

For example, for an optimized resonant circuit, approximately 40% of the electrical energy which is supplied to the gas discharge lamp can be converted into light.

Clearly, the driver circuit can form a resonant circuit, which can perform electrical oscillations (periodic charging and discharging of the capacitor), wherein the resonant circuit or the electrical oscillation can be damped by means of the gas discharge lamp. According to various embodiments, the components of the

Driver circuit (e.g., a coil, an electrical resistor, or a capacitor) such that a change in direction of the voltage across the capacitor (in other words, overshoot of the capacitor)

Resonant circuit) can be avoided. It is thus a strongly damped oscillation up to the aperiodic limit case. The components of the

Driver circuit interact with each other such that the capacitor is discharged once in the shortest possible time. In other words, the components of the driver circuit can be matched relative to the gas discharge lamp, that an aperiodic limiting case is set, which allows a maximum light output.

For example, the capacitor of the driver circuit may be dimensioned accordingly and / or one with the

Capacitor electrically coupled inductance of the

Driver circuit, which may affect the discharge rate of the capacitor (and thus the discharge time) may be provided accordingly. According to In various embodiments, the inductance coupled to the capacitor may be, for example, by means of an air coil

be provided. Further, the driver circuitry may be implemented by means of additional passive (e.g., in series in the

Switched driver circuit) inductors may be modified or.

For example, the pulse duration of the gas discharge may be greater, the greater the impedance of the coil through which the capacitor is discharged, with others

Words the greater the inductance of the coil.

According to various embodiments, the

Gas discharge lamp to be water cooled, the

Gas discharge lamp and the driver circuit such

may be configured such that upon discharge of a capacitor of the driver circuit through the

Gas discharge lamp through an energy of more than

about 1 kJ, e.g. greater than about 10 kJ, e.g. of more than about 100 kJ.

According to various embodiments, the

Shielding circuit be configured such that the supplied electrical energy to an electric

Potential (shield potential) of the shielding leads, which lies between the first electrical potential and the second electrical potential.

Are the gas discharge lamp surrounding components of the

Operating environment of the gas discharge lamp on electric

Ground, the shielding circuit may be arranged such that the supplied electrical energy leads to an electrical shielding potential of the shielding structure, which differs from the electrical ground. According to various embodiments, the

Abschirmpotential the shielding leads, which differs from the electrical ground. This can vividly the influence of lying on electrical ground components of the operating environment of the gas discharge lamp on the

SelbstZündspannung the gas discharge lamp can be reduced.

According to various embodiments, the

Shielding be arranged outside the sheath tube. This can be achieved, for example, that the

Visually, the shielding structure does not necessarily have to be insulated from the cooling medium (e.g., water). Furthermore, this can be a wait and / or replace the

To facilitate shielding structure, as this is easier to access.

According to various embodiments, the

Shielding structure between the gas discharge lamp and the sheath tube be arranged. This can be achieved, for example, that the shielding structure clearly has a small distance from the gas discharge lamp, so that influencing the SelbstZündspannung can be done as efficiently as possible.

According to various embodiments, the

Shielding structure comprise a metal, e.g. Molybdenum,

Aluminum or steel. This can be a high electrical

Conductivity of the shielding structure can be achieved so that it can transport high electric currents and / or provides a uniform electric field as possible, when the shielding structure on the

Shielding potential is brought.

According to various embodiments, the

Shielding structure at least a part of the cooling medium exhibit. For example, the shielding structure may comprise at least a part of the cooling water.

According to various embodiments, the

Shielding structure have an electrical conductivity greater than 0.5 yS / cm, e.g. in a range of about

0.5 yS / cm to about 10 yS / cm, e.g. in a range of about 2 yS / cm to about 10 yS / cm, e.g. in a range of about 5 yS / cm to about 10 yS / cm.

According to various embodiments, the cooling water may have a pH in a range of about 6 to about 8, e.g. about 7. This can be, for example

be achieved that the cooling water has the least possible corrosive effect on components which are arranged in the cooling water. For adjusting and / or influencing the pH, suitable chemical compounds, e.g. Salts, bases, acids and / or buffer solutions are added. To increase the electrical conductivity of the

Cooling water, for example, a salt can be added, which the pH of the cooling water only slightly

affected. Alternatively, the water electrode or the ignition wire may serve as the ion source as described above.

Does the shield structure at least a part of

Cooling water, the (eg deionized) cooling water, a chemical compound (eg a solid, eg a salt) are added, which is soluble in the cooling water and the cooling water charge carrier (eg ions) supplies, so that the electrical conductivity of the cooling water adjusted accordingly be or can be.

To set the conductance, a bypass valve on a filter unit, e.g. with a reverse osmosis cartridge (for de-ionizing the cooling water), by means of a

Leitwertsensors be regulated. For this, the electric Conductance of the cooling water can be measured by means of the conductivity sensor and the flow of cooling water through the

Filter system through by means of the by-pass valve

Basis of the electrical conductance are regulated.

Clearly, by means of the by-pass valve, the flow of cooling water through the filter system can be controlled such that the filter system stores the ions in the

Cooling water is not completely absorbed, e.g. by means of

Reverse osmosis cartridge, so that the electrical conductance of the cooling water can be stabilized. The water electrode or the ignition wire may be so configured (e.g., a suitable metal has a sufficiently large surface area

have) supply enough ions to allow conductivity of the cooling water to be increased, e.g. so that a conductivity of the cooling water greater than about 0.1 yS / cm can be permanently provided or can be.

According to various embodiments, the

Shielding structure have an electrical resistance (for example, an ohmic resistance), which may be provided for example by means of a coating or a wire resistor. The electrical conductivity of the shielding structure, for example by means of

Material composition of electrical resistance

be or be. For example, the

Shielding structure a ceramic or a semiconductor

exhibit . If the shielding structure has the coating, the electrical conductivity of the shielding structure can also be determined by means of the layer thickness of the coating or the coating layer

Material composition of the coating (layer)

be or be. For example, the

Shielding structure, a metal film resistor, a

Carbon film resistor, metal oxide film resistor, one Film resistance or a transparent, conductive oxide such as ITO (indium-tin oxide) have.

According to various embodiments, a

A lamp assembly comprising: a gas discharge lamp for generating a flash of light by means of a gas discharge; a tube surrounding the gas discharge lamp for receiving a cooling liquid for cooling the gas discharge lamp with the cooling liquid; where the SelbstZündspannung the

Chilled gas discharge lamp is less than the theoretical Selbstuzündspannung; a shielding structure arranged outside the gas discharge lamp for increasing the

SelbstZündspannung; a shielding circuit electrically coupled to the shielding structure for providing the

Abschirmpotentials.

According to various embodiments, the

Self-ignition voltage may be increased when the shielding structure is at the shielding potential.

A gas discharge lamp may be configured to generate light having a predefined light distribution (e.g., a predefined light intensity distribution or a predefined spatial light field). For example, by means of the lamp arrangement, light with the predefined light distribution can be emitted in the direction of an exposure area for exposing a substrate.

According to various embodiments, the

Shielding structure capacitively coupled to the anode and / or the cathode.

For example, a lamp assembly may include one or more gas discharge lamps (eg, a lamp array) for generating light having a light distribution (eg, a distribution of light intensity or a spatial light field). For example, by means of the lamp assembly Light with a light distribution in the direction of a

Exposure area are emitted for exposing a substrate. Components which the generated light of the

Exposed gas discharge lamp (for example, the

Shielding structure, the shielding element, the ignition wire and / or the light reflector), for increasing the stability of the components relative to the generated light

Resistant material and / or a coating of resistant material, e.g. Steel, a UV resistant ceramic or other suitable material.

For example, the components that are exposed to the generated light of the gas discharge lamp, a high

Thermal shock stability, in other words a high

Resistivity to the emitted light from the gas discharge lamp.

Components which between shell tube and

Gas discharge lamp are arranged (for example, the

Shielding structure, the shielding element, the ignition wire and / or the light reflector), may be or may be lapped by the cooling medium (e.g., cooling water). This can be it

make the components necessary between

Sheath tube and gas discharge lamp are arranged,

Corrosion resistant set so that they react as little as possible with the cooling medium chemically. These can be the

Components which between shell tube and

Gas discharge lamp are arranged, for example, a corrosion-resistant material, e.g. corrosion-resistant steel (in other words, stainless steel), e.g. a chrome-steel alloy, or a corrosion-resistant coating

Material, e.g. a coating of a ceramic or glass, have.

According to various embodiments, a

Lamp assembly operated as a flash lamp assembly, For example, by a gas discharge lamp of the lamp assembly is operated such that this one

Flash produced as described above. A method of operating a flash lamp assembly may include, in accordance with various embodiments: increasing an effective self-firing voltage of the

Gas discharge lamp to an auto-ignition voltage by means of a shielding structure; and driving the gas discharge lamp by means of an operating voltage smaller than that

Auto ignition voltage, for supplying the electrical power

Gas discharge.

According to various embodiments, increasing the effective self-ignition voltage may include transmitting a

Have shielding potential on the shielding structure.

According to various embodiments, the method may further comprise: igniting the gas discharge lamp by means of an ignition pulse, so that a gas discharge in the

Gas discharge lamp is generated.

According to various embodiments, the driving of the gas discharge lamp by means of an operating voltage, the

Provide the operating voltage to the electrodes of the gas discharge lamp.

According to various embodiments, the driving of the gas discharge lamp (by means of the operating voltage) and the ignition of the gas discharge lamp may take place within a time interval which is e.g. is less than 10 s. For example, driving the gas discharge lamp and igniting the gas discharge lamp within a time interval may be in a range of about 0.001 seconds to about 10 seconds.

Clearly, the driving of the gas discharge lamp and the ignition of the gas discharge lamp from the clock frequency (the frequency) with which the gas discharge lamp is ignited depend, wherein the time interval may be the smaller, the greater the clock frequency. For example, the clock frequency of the gas discharge lamp up to about 1 kHz

be, wherein the time interval may be about 0.001 s.

According to various embodiments, the increase of the effective Selbstuzündspannung can take place while the

Gas discharge lamp by means of a cooling liquid (e.g.

Water) is cooled.

According to various embodiments, increasing the ignition voltage may include: arranging the

Shielding structure, wherein the arranging of the shielding structure may be such that the ignition voltage is increased when the shielding structure is at a shielding potential; and establishing a shield circuit for providing the shield potential. For example, the establishment of a shielding circuit can be iterative, for example by means of an iterative measuring method.

According to various embodiments, the increasing may include influencing an electric field provided by an anode and a cathode of the gas discharge lamp.

According to various embodiments, a

Processing arrangement comprising: at least one process chamber; a lamp assembly (or a

Flash lamp assembly) according to various embodiments or multiple flash lamp assemblies according to various

Embodiments for processing a substrate within the process chamber. In general, one can

Flash lamp arrangement can be used, for example

To irradiate substrates or other carriers of a processing arrangement for processing substrates or for Processing other carriers, eg so that they can be heated or structurally changed.

For example, the process chamber a

Have exposure range and the lamp assembly (or the flash lamp assembly) may be configured such that the substrate can be exposed within the exposure range by means of the lamp assembly. For processing the substrate within the process chamber, the process chamber may be configured such that the environmental conditions (the process conditions), e.g. one

Pressure, a temperature and / or a gas composition within the process chamber during the processing of the substrate can be adjusted or regulated. For this, the process chamber may be e.g. airtight, dustproof and / or

be vacuum-tight or can be. According to

In various embodiments, the process chamber may be configured as a vacuum process chamber or atmospheric pressure process chamber.

The process chamber can be used as an overpressure process chamber

be set so that a gas and / or a gas mixture with a pressure of several atmospheres within the

Process chamber can be provided, e.g. with a

Pressure greater than about 1 bar, e.g. greater than about 10 bar, or greater than about 100 bar. For example, a gas and / or gas mixture having a pressure of several atmospheres may be used for applications in the chemical industry.

Within the atmospheric pressure process chamber can

For example, a gas and / or a gas mixture may be provided at a pressure in a range from about 900 mbar to about 1100 mbar. The vacuum process chamber may be used to provide a vacuum or at least a vacuum within the vacuum chamber. Be set up process chamber, for example, so stable that the process chamber can be evacuated without the

Process chamber irreversibly deformed and / or damaged. For evacuating the vacuum process chamber, the vacuum process chamber may be coupled, for example, with a pump system.

Furthermore, a process chamber may be part of a

Forming processing plant (for example, a vacuum processing plant, a vacuum processing plant or a

Atmospheric pressure processing plant). Such

Processing plant, for example, as so-called in-line processing plant, by means of which substrates can be processed continuously, or as a so-called batch processing plant, by means of which substrates in batches

be processed.

Embodiments of the invention are illustrated in the figures and are explained in more detail below.

Show it

1A to 1D each show a lamp arrangement and / or a flash lamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view;

2A and 2B each show a lamp arrangement and / or a flash lamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view;

3A to 3C each show a lamp arrangement and / or a flashlamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view; 4A and 4B each show a lamp arrangement and / or a flashlamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view;

5A to 5C each show a lamp arrangement and / or a flash lamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view;

6A to 6C each show a lamp arrangement and / or a flashlamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view; and

7A and 7B each show a lamp arrangement and / or a flashlamp arrangement according to various embodiments in a schematic

Side view or schematic cross-sectional view.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is specifically shown by way of illustration

Embodiments are shown in which the invention can be practiced. In this regard will

Directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. used with reference to the orientation of the described figure (s). There

Components of embodiments in number

different orientations can be positioned, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of those described herein various exemplary embodiments may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be construed in a limiting sense, and the

Scope of the present invention is defined by the appended claims.

In the context of this description, the terms

"connected", "connected" and "coupled" used to describe both a direct and indirect connection, a direct or indirect connection and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

FIG. 1A illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

The flash lamp assembly 100 (or the lamp assembly 100) may include a gas discharge lamp 2 for generating a flash of light by means of a gas discharge. The

Selbstzündspannung the gas discharge lamp, for example, be smaller than the theoretical Selbstuzündspannung the gas discharge lamp 2, due to the interaction of the

Gas discharge lamp with an operating environment, such as

has been described above. Further, the flash lamp assembly 100 may include a

Shielding structure 6, which outside of

Gas discharge lamp 2 may be arranged. The

Shielding structure 6 may be arranged, for example, at a distance from the gas discharge lamp 2, which is so low that the shielding structure 6 the

Self-igniting voltage of the gas discharge lamp 2 can influence. For example, the shielding structure 6 in a Distance to the gas discharge lamp be less than 1 m, for example, less than 0.5 m, for example, less than 0.2 m, for example, less than 0.1 m, for example, less than 5 cm, for example, less than 1 cm, or in physical Contact to the gas discharge lamp 2.

According to various embodiments, the

Shielding structure 6 between a on electric

Ground potential (on electrical ground) lying component in the vicinity of the gas discharge lamp 2 may be arranged.

For example, the shielding structure 6 between a light reflector of the flash lamp assembly 100 and the

Gas discharge lamp 2 or between a chamber wall of the

Flash lamp assembly 100 and the gas discharge lamp 2 may be arranged. For example, the chamber wall may be part of a process chamber of the flash lamp assembly 100, e.g. a vacuum chamber of the flash lamp assembly 100.

Furthermore, the shielding structure 6 can be configured such that the self-ignition voltage of the gas discharge lamp can be changed electrically by means of the shielding structure 6.

For example, the shielding structure 6, the

Shield gas discharge lamp 2 as effectively as possible in front of a lying on electrical ground potential component. For this purpose, the shielding structure 6 can be electrically conductive

be set up so that this is an electric field

(Shielding field) can form.

The shielding field can with the gas discharge lamp. 2

interact, so that the SelbstZündspannung the

Gas discharge lamp can be changed. According to various embodiments, the self-ignition voltage of the

Gas discharge lamp can be reduced, for example, when the shielding structure 6 is at a first electrical potential (first shielding potential) and can

Auto ignition voltage of the gas discharge lamp can be increased if the shielding structure 6 on a second electrical

Potential (second shielding potential) is.

The flash lamp assembly 100 may further include a

Shield circuit 102 which is adapted to provide electrical energy. The shield circuit 102 may be electrically coupled to the shield structure 6d for supplying electrical energy. For example, the shielding circuit 102 may be frequency-dependent, capacitive, inductive or electrically conductive coupled to the shielding structure 6, so that the electrical energy of the

Shielding circuit 102 can be 102d transferred to the shielding structure 6. The shielding circuit 102 may include, for example

Provide time-dependent electrical signal, which can be transmitted to the shielding structure 6.

FIG. 1B illustrates a lamp assembly 100 and / or a flashlamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

The flash lamp assembly 100 (or the lamp assembly 100) may include a driver circuit 104 which

be configured to provide an operating voltage for supplying the gas discharge lamp 2 with the

Operating voltage such that a gas discharge in the

Gas discharge lamp 2 can be supplied with the operating voltage.

To supply the gas discharge lamp 2 with the

Operating voltage, the driver circuit may be electrically coupled to the gas discharge lamp 2, for example by means of an electrical supply line 31, 41 for the transport of electrical energy. The electrical supply line 31, 41 of the driver circuit 104, for example, a copper wire, a copper cable or an electrical cable made of another suitable material, for example, have a multi-core composite, so that the

Supplying the gas discharge, a discharge current and / or electrical energy by means of the electrical supply line 31, 41 of the gas discharge lamp 2 can be supplied.

FIG. 1C illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

According to various embodiments, the

Flash lamp assembly 100 (or lamp assembly 100)

Sheath tube 5, wherein the gas discharge lamp 2 may be disposed within the sheath tube 5. The

Sheath tube 5 may be configured such, e.g. be waterproof and / or gas-tight, that the

Gas discharge lamp 2 with a in the sheath tube. 5

introduced cooling medium 108k can be cooled. To the

Providing the sheath tube 5 with the cooling medium 108k, the sheath tube 5 waterproof and / or gas-tight with a

Piping be connected so that by means of the pipe to the shell tube 5, the cooling medium 108k can be supplied and / or the cooling medium 108k can be removed from the shell tube 5, wherein the gas discharge lamp 2 flows around within the shell tube 5 of the cooling medium 108k and / or rinsed , The pipeline can be part of a cooling circuit.

The cooling circuit may be configured to control or change the state of the cooling medium (eg temperature, pH, conductivity, pressure, flow velocity, etc.). For example, the cooling circuit may include sensors for measuring the state of the cooling medium and a corresponding control loop for controlling the state of the cooling medium Cooling medium based on the measured state of

Cooling medium. For example, the cooling circuit can be set up and / or adjusted such that it regulates and / or adjusts the temperature of the cooling medium and / or the conductivity of the cooling medium in accordance with a desired value.

According to various embodiments, the

Gas discharge tube 112r (see, for example, Fig. 2A) of the gas discharge lamp 2 are arranged coaxially with the shell tube 5, so that between the gas discharge tube 112r and the

Sheath tube 5 may remain a uniform distance, e.g. an annular gap through which the cooling fluid 108k can be passed. This can clearly be achieved a uniform flow behavior of the cooling liquid 108k, so that a uniform cooling of the

Gas discharge lamp can be done.

According to various embodiments, the sheath tube 5 (sheath tube 5) may comprise a transparent material, e.g. Quartz glass, or consist of quartz glass.

The shielding structure 6 may vary according to various

Embodiments between the gas discharge lamp 2 and the sheath tube 5 may be arranged. For example, the shielding structure 6 in the space between

Gas discharge lamp 2 and the sheath tube 5 along the

Longitudinal extension of the gas discharge lamp 2 extend.

The shielding structure 6 may, for example, a coating on an inner wall of the shell tube 5 and / or a

Exterior wall of the gas discharge lamp 2 have. The

Coating 6 may be formed, for example, by means of a foil, for example a metal foil or a metal oxide foil, or it may be deposited on the gas discharge lamp 2 and / or the sheath tube 5. The coating 6 may, for example, have a layer thickness of less than 1 mm, for example less than 0.1 mm, for example less than 10 μm, for example less than 1 μm. Similarly, the shielding structure 6 may comprise a foil, which is arranged at a distance from the gas discharge lamp 2 and the sheath tube 5. For this purpose, the shielding structure 6 can be held for example by means of a suitable holder in a stationary position relative to the gas discharge lamp 2.

Analogous to the above described can the

Shielding structure 6, for example, a wire, a cable, a wire mesh or a fabric of an electric

have conductive material, which in physical

Contact with the sheath tube 5 and / or the gas discharge lamp 2 or at a distance from the sheath tube 5 and / or the

Gas discharge lamp can be arranged.

The shielding structure 6 may include a portion of

Gas discharge lamp 2 at least partially surrounded. For this, the shielding structure 6 may have a curved shape, e.g. a curved surface or extending along a curved path.

FIG. 1D illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view, wherein the shielding structure 6 can be arranged outside of the sheath tube 5. The

Shielding structure 6 can be configured analogously to the previously described.

FIG. 2A illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view. According to various embodiments, the

Gas discharge lamp 2 has two electrodes 3, 4, which can be operated as an anode 4 and a cathode 3. The electrical supply line 31, 41 can through the

Gas discharge vessel 112 (for example, a discharge tube 112) of the gas discharge lamp 2 may be extended, so that the electrical supply line 31, 41 may be connected to the anode 4 and the cathode 3. This can be achieved vividly that the operating voltage between the cathode 3 and the anode 4 can rest.

As described above, the operating voltage may be provided so as to provide the cathode 3 with a first electric potential (cathode potential) and provide the anode 4 with a second electric potential (anode potential).

According to various embodiments, the ignition circuit 102 may include an electrical power supply 11 (voltage source 11) for generating an electrical voltage.

Further, the ignition circuit 102 may include an electrical lead 202d (e.g., an electrical cable 202d) by means of which the electrical voltage source 11 may be electrically connected 202d to the shield structure 6. It can thus be achieved that the shielding structure 6 can be brought to a shielding potential by means of the electrical voltage source 11. For example, the shielding structure 6 a

Shielding wire 6 have. The shielding wire 6 may e.g.

be elongated and a metal (e.g., aluminum or

Steel). By means of the shielding wire 6 can

For example, a wire resistor 6 may be formed.

For example, the shielding structure 6 a

Light reflector 6 (or at least a portion and / or a Segment of a light reflector 6, for example, a segmented light reflector 6). This can be achieved, for example, that the reflector can be brought to a shielding potential. The light reflector can for

Reflecting a flash of light having a light-reflecting surface, which the gas discharge lamp. 2

may be facing.

The voltage source 11 may be e.g. have a control circuit, by means of which of the electrical

Voltage source 11 can be adjusted and / or regulated, so that e.g. the

Shielding potential can be set and / or regulated. For example, by means of the control circuit, the

Shielding potential depending on the first potential and / or the second potential to be set and / or regulated, e.g. time-dependent. So that can

be achieved, for example, that the SelbstZündspannung the gas discharge lamp 2 is only increased when between the cathode 3 and the anode 4, an electric field is formed or is.

For example, by means of the control circuit, the

Shielding potential depending on another suitable

Command variable, e.g. be set to be generated radiation power, the operating voltage, a state of charge of the capacitor of the driver circuit 104 and / or an operating state of the gas discharge lamp 2 and / or be regulated.

For example, the generated voltage can be iteratively adjusted and / or regulated by means of the control circuit, so that the affected Selbstzündspannung the

Gas discharge lamp 2 is clearly as large as possible. For this purpose, a shielding potential can be provided by means of the control circuit, and the resulting Change the SelbstZündspannung be measured for example by means of a sensor. Alternatively, the Selbstzündspannung can be measured by, for example, is determined at which between anode 4 and cathode 3 voltage applied

Gas discharge lamp 2 ignites. Measured on the basis of

SelbstZündspannung then the shielding potential can be changed.

According to various embodiments, the

Voltage source 11 to the shielding element 6 specify a permanent potential, e.g. during a process which is operated by the gas discharge lamp. For example, the voltage source 11, the shielding 6 on

Set cathode potential.

FIG. 2B illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view, wherein between the

Voltage source 11, an electrical resistance 10 may be connected or can.

The electrical lead 202d of the shielding circuit 102 may be e.g. be guided through the sheath tube 5 or be so that the voltage source 11 outside the

Sheath tube 5 and the shielding structure within the

Sheath tube 5 may be arranged.

The electrical supply line 202d of the shielding circuit 102 can be guided laterally into the sheath tube 5 or be, for example, by a holding structure for holding the sheath tube 5 and / or a sealing structure for sealing the sheath tube 5 therethrough. The electrical resistance 10 can be, for example, an impedance (eg a frequency-dependent electrical resistance), for example a capacitor or a coil, or an ohmic resistance, eg a ceramic resistor. The electrical resistor 10 may be formed of multiple electrical resistors (resistor assembly 10) according to various embodiments. By means of the electrical resistance 10 (or the resistance arrangement 10), the electric current can be influenced, which is supplied to the shielding element 6 by means of the electrical supply line 202d or removed from the shielding element 6. For example, a time dependence of the shielding potential can be influenced by means of the electrical resistor 10.

The electrical resistance 10 and / or the

Resistor assembly 10 may be at DC or

Low frequency AC voltage (e.g., less than

100 Hz) has a value (resistance value) in a range of about 10 Ω to about 500 Ω, e.g. in a range of about 30 Ω to about 300 Ω, in a range of about 50 Ω to about 200 Ω. According to various embodiments, the electrical resistor 10 (or the resistor assembly 10) may be switchably configured to provide a plurality of resistance values, and by switching the resistor 10, a resistance of the resistor 10 may be affected. This can be achieved, for example, that the resistor 10 to different operating conditions

can be adjusted. For example, by means of switching of the resistor 10, the shielding potential can be changed, and thus the self-igniting voltage of the gas discharge lamp.

Alternatively, the feed line 202d of the shielding circuit 102 may connect the shielding structure 6 to cathode potential. This can be achieved, for example, that a

automatic adjustment of the shielding potential can take place. For example, the electrical resistance 10 may be set sufficiently large, so that an electrical current flow through the electrical resistance 10 through is limited. For example, frequency dependence of the electrical resistance 10 may be set up such that charge equalization through the electrical resistance 10 may be slow (eg, slower than 1 second or slower than 10 seconds). This can be achieved, for example, that the shielding element 6 can be configured approximately floating.

For example, a reflector 6, e.g. by means of

electrical lead 202 d be coupled to the cathode, wherein between the reflector 6 and the cathode a

electrical resistance 10 is connected.

FIG. 3A illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view, wherein the

Shield circuit 102 is electrically coupled to the ignition circuit 12 12d, so that from the ignition circuit 12, an electric ignition pulse and / or an electrical ignition voltage can be transmitted to the shield structure 6, for igniting the gas discharge lamp 2 by means of the electric ignition pulse and / or the electrical ignition voltage. The electrical coupling 12d may vary according to various

Embodiments electrically conductive, capacitive and / or inductive take place.

In Fig.3B is a lamp assembly 100 and / or a

Flash lamp assembly 100 shown (in a schematic view), which consists of a gas-filled discharge tube 112r with a cathode 3 and an anode 4. The discharge tube 2 is surrounded by a jacket tube 5 for receiving cooling water. The cooling water flows through the jacket tube 5 from the cathode 3 to the anode 4. The flow direction of the cooling water has no significant effect on the operation of the invention. The cathode 3 is connected to a connecting line 31 and the anode 4 to a connecting line 41. The cathode 3 is connected via the connecting line 31 to a current source, not shown here (the driver circuit 104). Thus, the cathode 3 is in the operating state (in other words, when the operating voltage is applied) at a negative operating voltage or negative charging voltage and the anode 4 is then at ground potential.

Typically, deionized water with a pH of 7 is used to cool the flashlamp by one

To prevent current flow in the cooling water. In practice, alternatively, the leads 31, 41 of the flashlamp 1 may be electrically isolated from the cooling water, for example in an atmospheric environment, without affecting the self-ignition voltage. Alternatively, the leads 31, 41 of the flashlamp 1 may be provided with electrical insulation (e.g., jacketed), which is in the cooling water and allows electrical isolation of the leads 31, 41 of the flashlamp 1 from the cooling water.

Outside the discharge tube 2 is an ignition electrode 6, for example, a trigger wire 6, for applying a

Auto ignition voltage attached. The ignition wire 6 is connected to the secondary side of an ignition transformer 8 via a coupling capacitor 7 (which may be part of the shielding circuit 102) having, for example, a capacitance of 100 nF (or in a range of about 10 nF to about 1 yF). The primary side of the transformer 8 is connected to an ignition voltage generator 9. The ignition wire 6 is further connected via a resistor 10, which has a value of 100 Ω, for example, to a voltage source 11.

Alternatively, the ignition wire 6 via the resistor 10 and a voltage divider, not shown, of high impedance Resistors are electrically connected to the cathode 3. Thus, for example, the ignition wire 6 is at the ignition voltage only during ignition, otherwise at a negative voltage that is between the voltage at the cathode 3 and ground. As soon as the ignition voltage generator 9 is activated, the ignition voltage (eg, by means of an ignition pulse generated by the ignition voltage generator 9) is supplied via the coupling capacitor 7 to the ignition wire 6, and thus the ignition voltage dominates during the ignition on the ignition

Ignition wire 6. The ignition voltage is only needed to trigger a flash.

The cathode 3 is connected to a not shown here

Main capacitor connected to the needed

Charging voltage can be charged. During charging of the main capacitor, i. the ignition voltage generator 9 is not active, a negative voltage, for example, half as high as the charging voltage of the cathode 3, from the

Voltage source 11 is supplied via the resistor 10 to the ignition wire 6. Thus, the ignition wire 6 is at half as high potential as the cathode 3. The ignition wire 6 can

be elongated and surrounds the cathode 3 and almost the entire discharge tube 2. The ignition wire 6 then serves as

Shielding element 6, since a reduced electric field between the ignition wire 6 and the cathode 3 is located. The

Autoignition voltage is thus increased.

For example, if the shielding structure is electrically coupled to the ignition voltage source 12 (ignition circuit 12) (e.g., by the coupling capacitor 7), additional components (e.g., an additional ignition electrode for igniting the gas discharge lamp 2) may be dispensed with. For example, an existing system can be inexpensively converted by the shielding circuit 102 between the

Ignition voltage source 12 and a conventional ignition wire 6 is switched. Alternatively, the shielding structure 6 can generate electric power for forming the shielding potential by means of the shielding potential

Ignition circuit 102 are supplied, wherein the

Ignition circuit 102 electrically conductive with the

Driver circuit is connected.

FIG. 3C illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

The flash lamp arrangement 100 (or lamp arrangement 100) may have sealing elements 302 which seal the electrical leads 31, 41 of the gas discharge lamp 2 with respect to the cooling medium. The sealing elements 302 may, for example, the passages of the electrical

Feed lines 31, 41 through the gas discharge vessel 112r therethrough seal against the cooling medium. Within the sealing elements 302, a material 102g having a permittivity less than the permittivity of the cooling medium, e.g. smaller than the permittivity of water (at approximately equal measurement conditions).

For example, the material 102g may be a relative

Permittivity (at 18 ° C and a frequency of 50 Hz) less than 80, e.g. less than 20, e.g. less than 10, e.g. smaller than 2. For example, within

Sealing elements 302 air or other gas arranged with suitable properties (e.g.

Permittivity).

This can be achieved, for example, that the

Cooling medium in the vicinity of the cathode 3 and the environment of the anode 4 is displaced, so that the permittivity in the vicinity of the cathode 3 and the anode 4 is clearly as low as possible. Thus, an interaction between the cooling medium (eg, a polar cooling medium, such as water) and the formed between the cathode 3 and the anode 4

electric field can be reduced, so that field increases can be reduced. In Fig.4A is a lamp assembly 100 and / or a

Flash lamp assembly 100 (in a schematic view) with one ignition electrode 61 (e.g., one electrical conductor 61) and one shielding member 6 according to another

Embodiment shown. To suppress an unwanted electric field increase in the area of

The cathode 3, the shielding element 6 is inserted,

For example, an insulated wire 6, which is wound on the jacket tube 5 in the region of the cathode 3 and subjected to the same voltage as the cathode 3. In this case, the shielding element 6 can be at the same voltage as

Cathode 3 are brought to increase the self-ignition voltage. The ignition electrode 61 is retracted at the same time by at least one distance in the direction of the anode 4, so that no overlap of the ignition electrode 61 and shield 6 is present.

In Fig.4B is a lamp assembly 100 and / or a

Flash lamp assembly 100 shown (in a schematic view) with an ignition electrode 61 and a shielding element 6 according to another embodiment. In contrast to FIG. 4A, the shielding element 6 is mounted on the inside of the jacket tube 5.

FIG. 5A illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Shield circuit 102 is electrically coupled to driver circuit 104, 104d, for electrically energizing shield circuit 102 via driver circuit 104. For example, coupling 104d may be performed to provide electrical power to shield circuit 102 is supplied when the gas discharge lamp is electrically supplied by the driver circuit 104.

For example, the coupling 104d may be such that electric power is supplied to the shield circuit 102 when the cathode 3 and the anode 3 are turned on

Potential difference is provided by the driver circuit 104.

The electrical coupling 104d can take place in such a way that electrical energy can be supplied to the shielding structure 6 by means of the shielding circuit 102, wherein the

supplied electrical energy to an electric

Shielding potential of the shielding structure 6 results so that the self-igniting voltage of the gas discharge lamp 2 changes, e.g. enlarged, can be or become.

The electrical coupling 104d may vary according to various

Embodiments electrically conductive, capacitive and / or inductive take place.

Analogous to FIG. 3A, the shielding circuit 102

additionally be electrically coupled to the ignition circuit 12. FIG. 5B illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or a schematic cross-sectional view. The ignition circuit 102 may include an electrical lead 202d which interconnects the cathode 3 and the anode 4 via a shield member 6. It can thus be achieved that a current flows through the shielding element 6 between the cathode 3 and the anode 4 when the cathode 3 and the anode 4 are brought to a potential difference. The shielding element 6 can, for example, have an electrical resistance 6, for example a sheet resistance 6.

If electrical current flows through the film resistor 6, this can generate a shielding potential, which adjusts itself along the film resistor 6 in the direction of the anode 4 to the anode potential and along the film

Sheet resistance 6 in the direction of the cathode 3 the

Equalizes cathode potential. Vividly that can

Abschirmpotential a gradient (potential gradient), which the voltage drop in the

Sheet resistance 6 corresponds when electric current flows through the sheet resistance 6.

This can be achieved that the Abschirmpotential depending on the electric field, which between the

Anode 4 and the cathode 3 is generated is provided. For example, if the main capacitor of the

Driver circuit 104 can load the

Potential difference between anode 4 and the cathode 3 to be greater, the greater the state of charge of the

Main capacitor is. Analog can be the electric

Amperage of the electrical current flowing through the sheet resistor 6, the greater the potential difference between the anode 4 and the cathode 3, i. the larger the electric field between the anode 4 and the cathode 3, wherein the shielding potential can be adapted to the electric field between the anode 4 and the cathode 3. If the shielding potential has a gradient, this can

Shielding potential at the end portions of the shielding structure 6, for example, the cathode potential or the

Anode potential (electric potential of the anode)

correspond .

If the shield potential has a gradient, the magnitude of the average of the shield potential may be greater than for example, greater than about 30% of the magnitude of the cathode potential, eg greater than about 50% of the magnitude of the cathode potential, eg, greater than about 70% of the magnitude of the cathode potential

Cathode potential, e.g. greater than about 90% of the amount of cathode potential. For example, the amount of the average of the shield potential may be in a range of about 70% of the amount of the cathode potential to about 100% of the amount of the cathode potential.

The mean value of the shielding potential can be, for example, between the anode potential and the cathode potential or between the cathode potential and the electrical ground or between the anode potential and the electrical ground.

If the shielding potential has a gradient and / or a (spatially or temporally) fluctuating potential profile, the value of the shielding potential of the shielding structure can be understood as a (spatial or temporal) mean value of the gradient (for example, can be averaged over a period of time that begins when the

Operating voltage is applied to the gas discharge lamp, and ends when the gas discharge lamp is ignited).

The voltage dropping across the shielding structure 6 may, for example, be less than or equal to the voltage

Potential difference between the anode 4 and the cathode 3, e.g. less than 80% of the potential difference between the anode 4 and the cathode 3, e.g. less than 50% of the

Potential difference between the anode 4 and the cathode 3, for example, less than 20% of the potential difference between the anode 4 and the cathode 3. The shield circuit 102 may be arranged such that the gradient of the shielding potential is greater than or equal to / as the operating voltage. In other words, the At the shielding structure 6, the voltage drop across the shielding structure 6 may be greater than or equal to the potential difference between the anode 4 and the cathode 3. It can thus be clearly shown that the shielding structure 6 can be arranged in such a way that the gas discharge lamp 2 lies between the

Shield structure 6 and a component of the operating environment (e.g., the reflector) extends.

If the operating environment (e.g., the reflector) of the

For example, when the gas discharge lamp is at an electric ground, the self-ignition voltage of the gas discharge lamp may be increased when the electric power supplied by the shield circuit 102 results in an electric shield potential of the shield structure different from the electric ground.

If the operating environment (e.g., the reflector) of the

Gas discharge lamp, for example, on one

Ambient potential is located, the self-ignition voltage of the gas discharge lamp can be increased if the electrical energy supplied by the shielding circuit 102 leads to an electrical shielding potential of the shielding structure, which differs from the ambient potential. Similarly, the shielding structure 6 more electrical

Have resistors 6, which are arranged along the longitudinal extent of the gas discharge lamp 2 and a

Resistor assembly 6. The resistors of

(Resistor assembly 6 can by means of the electrical

Feed line 202 d of the shielding circuit 102 is electrically connected to each other and connected in series (connected in series). For example, between each of two of the plurality of electrical resistors 6, a wire or a fabric as described above may be connected, so that the plurality of electrical resistors 6 and the wire (or the fabric) act as a shield. Analogous to the wire 6 of the shielding structure 6, the

Sheet resistor 6 and the resistor assembly 6 may be connected to the ignition voltage source 12, as in Fig.3

is shown.

The shielding structure 6 can be supplied with electrical energy for forming the shielding potential by means of the driver circuit 104, wherein the ignition circuit 102 is electrically conductively connected to the driver circuit 104.

In Fig.5C is a lamp assembly 100 and / or a

Flash lamp assembly 100 (shown in a schematic view) with a low-induction, high-resistance sheet resistance 6 according to a fourth embodiment. Of the

Sheet resistor 6 is connected to the lead 31 and the lead 41, and thus generates a

Potential distribution along the flash lamp 2, the

Potential distribution between cathode 3 and anode 4

equivalent. The generated with the sheet resistor 6

(electric) field shields external (electric) fields and thus prevents self-ignition of the flash lamp. With the aid of coupling capacitors 7, the sheet resistance 6 can be connected to an ignition voltage source 12. Of the

Sheet resistance 6 then also serves as ignition electrode for igniting the flash lamp.

In one embodiment, not shown, the sheet resistance 6 can be integrated into the jacket tube 5, for example, be mounted directly on the inside of the jacket tube 5. In this case, a firing wire is used, which is arranged on the outside of the jacket tube between the cathode 4 and anode 3. The ignition wire and the

Sheet resistor 6 form a capacitor which the

Jacket tube 5 or quartz glass tube 5 as a dielectric

includes. There are no coupling capacitors. 7

needed. 6A shows a lamp arrangement 100 and / or a

Flash lamp assembly 100 (in a schematic view) similar to the flash lamp in Fig. 6B (or Fig. 3A).

However, in the casing tube 5 is a retracted

Ignition electrode 61 is integrated, which is electrically isolated from the high voltage of the cathode 3. This will be the

desired ignition regardless of the ambient conditions, i. the outer region of the jacket tube 5 can assume any atmospheric pressure, even at the minimum of the Paschen curve, without the desired ignition thereby

being affected. In principle, in this case the

Jacket tube 5 are embedded in water for sterilization with UV light. The ignition electrode 61 may have a minimum distance from the cathode 3, so that the shielding of the cathode 3 is ensured with respect to external fields and the current flow between the electrical connection of the cathode 3 and the ignition electrode 61 lying at ground potential via the ignition transformer 8 can be minimized.

For example, in a flash lamp with an arc length of four meters, the ignition electrode 61 may be significantly more than 0.5 m away from the cathode 3 and still ensure a reliable ignition.

FIG. 6B illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

According to various embodiments, the electrical lead 31 of the cathode 3 may be electrically conductive with the

A portion 32 of the electrical lead 31 of the cathode 3 (a portion 32 of the cathode lead 31) may be uninsulated and a

make physical contact with the cooling water 108k. To the

Reducing the electrical resistance between the portion 32 of the cathode lead 31 and the cooling water may be

Section 32 with a corrosion-resistant and electrical conductive material (eg aluminum, silver, platinum or gold) or have a large surface area (or form a large interface with the cooling water 108k), and may be flattened for example. The section 32 of the cathode feed line 31 can act as a so-called water electrode 32, which is electrically conductively connected to the cooling water.

It can be a high impedance protective resistor between the

Water electrode 32 and the cathode feed line 31 (not shown) to be switched in the event of an error, e.g. at very high conductivity of the cooling water, to limit an electric current into the cooling water. In such an error case, limiting the electrical current (or the electric current strength) into the cooling water may be necessary in order to reduce the risk of blistering, which may increase with increasing electrical current. Such an error can occur, for example, if an unresolved

Salt crystal between water electrode 32 and ignition wire 61 embeds or sets and increases the conductance in this area greatly.

Due to the coupling of the cathode potential with the

Water electrode 32 can be achieved that in the

Cooling 108k ions are influenced so that they shield the cathode 4 against external potentials.

Furthermore, the ignition wire 61 may be electrically connected in an electrically conductive manner to cooling water 108k. It can thus be achieved that an electric current can flow through the cooling water 6 through a part 6 of the cooling water 108k between the cathode feed line 31 and the ignition wire 61, when the cathode has a different potential from the ignition wire 61. The cooling water 6 through which the electric current flows can have an electrical resistance and form a shielding potential, analogous to the preceding one

Described. For example, a potential gradient may be similar to that of the sheet resistor, which has a shielding effect against external fields and / or the operating environment. In other words, the cooling water 6 between the cathode lead 31 and the ignition wire 61 may form part of the shielding structure 6.

For example, a current in a range of about 1 μΑ to about 10 mA between cathode 3 and anode 4 via the cooling water between the cathode lead 31 and the ignition wire 61 (cooling water of the shield structure 6) flow, e.g. in a range of about 10 μΑ to about 1 mA, e.g. in a range of about 50 μΑ to about 0.2 mA.

The electrical resistance of the cooling water of

Shielding structure 6 (or between ignition electrode 61 and

Cathode 3) and thus the formation of the Abschirmpotentials can by means of the distance of the ignition electrode 61 to the cathode

3 and the cathode feed line 31 are influenced.

For example, the electrical resistance of the

Cooling water between the ignition electrode 61 and cathode 3 to be smaller, the smaller the distance between the ignition electrode 61 is arranged to the cathode 3.

Alternatively, the electrical resistance between

Ignition electrode 61 (for example, the ignition wire 61) and cathode 3 are influenced by the electrical conductivity of the cooling water 108k is influenced. For this, 108k of ions may be added to the cooling water, e.g. by adding a salt (e.g.

Sodium bicarbonate) is dissolved in the cooling water 108k. For example, the electrical resistance between

Ignition electrode 61 and cathode 3 to be smaller, the greater than the proportion of dissolved sodium bicarbonate (or generally salt) in the cooling water is 108k.

The shielding structure 6 may be supplied with electric power for forming the shielding potential, if any

electric current flows through the cooling water of the shielding structure 6. Vivid then can the

Shield circuit 102, the ignition wire 61, the electrical connection of the ignition wire 61 and the section 32 of

Have cathode feed line 31 (the water electrode 32), which are electrically connected to the cooling water of the shielding structure 6.

The shielding potential of the shielding structure may then have a gradient along the flow of current through the cooling water (or through the shielding structure).

In Fig.6C is a lamp assembly 100 and / or a

Flash lamp assembly 100 (shown in a schematic view) according to another embodiment.

Instead of a sheet resistance, or one

Shielding element is here with deionized cooling water

Addition of ions and thus electrically conductive water 108k used as a shield 6, so that, for example, a current (with a current intensity) of 0.1 mA between the cathode 3 and anode 4 can flow through the conductive cooling water 13.

As a result, a potential gradient similar to that of the sheet resistance forms, which has a shielding effect

opposite outer fields has. To ignite the flash lamp 1, a firing wire 61 is used, which is mounted on the outside of the jacket tube 5 and connected to a Zündspannungsquelle 12. In the event that the connection lines 31, 41 are electrically insulated from the cooling water 108k, the connection lines 31, 41 are electrically conductively connected to the conductive cooling water 108k by means of additional supply lines 32, 42. Thus, the additional leads 32, 42 are electrically connected electrically connected to the cooling water, these can be an electrical conductor (eg molybdenum, steel or

Aluminum), which forms a direct physical contact with the cooling water 108k. To reduce the electrical resistance between the additional leads 32, 42, they may be provided with a corrosion resistant and electrically conductive material (e.g., silver, platinum, or gold).

be coated or form a large surface (interface with the cooling water 108k). For example, the additional leads 32, 42 may be formed as a sheet. The additional supply lines 32, 42 may act as so-called water electrodes 32, 42, which the cooling water

to supply electrical energy.

Analogously to the above described can by means of

additional supply lines 32, 42 flow an electric current through the cooling water 108k between the anode 4 and the cathode 3 when the anode 4 and the cathode 3 a

Have potential difference. Due to the electric current flow, the shielding potential of the cooling water 108k may be formed between the anode 4 and the cathode 3. In other words, the cooling water 108k between the anode 4 and the cathode 3 may be part of the shielding structure 6.

In this case, the shielding circuit 102, the additional

Leads 32, 42 (the water electrodes 32, 42), which are e.g. can be coupled to the driver circuit.

FIG. 7A illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various

Embodiments in a schematic side view or schematic cross-sectional view.

Analogous to the previously described (cf.

For example, Fig.6B and Fig.6C), the cooling water by means of a water electrode 32 electrically conductive with the

Cathode lead 31 connected. For electrically isolating the water electrode 32 and the cathode feed line 31

each other, the shielding circuit 102 a

Have capacitor 32k. This can be achieved, for example, that the water electrode 32 capacitively with the

Cathode lead, or is connected to the driver circuit 104. This may allow the shield potential to be provided for a period of time during which the main capacitor is being charged. For example, that can

Shielding potential depending on the speed at which the main capacitor is charged to be provided.

The shielding potential and / or a gradient of the shielding potential can be greater, the faster the shielding potential

Main capacitor is charged, or the faster one

Cathode potential is provided. Provided that the main capacitor

(Charging capacitor) of the driver circuit 104 (e.g., a pulse circuit 104) for flash lamps 2 is only rapidly charged just prior to a controlled ignition, it may be sufficient according to various embodiments

previously described water electrode 32 capacitively connect to the cathode potential. For example, fast charging of the main capacitor may occur within one second, e.g. within a period of less than 2 seconds, e.g. within a period of less than 0.1 s, e.g. within a period of less than 0.01 s, e.g. within a period of less than 0.001 s.

For example, it was clearly recognized that a

Self-igniting the gas discharge lamp 2 within a

Time window occurs after the main capacitor is charged (and, for example, provides the operating voltage). In this case, the self-ignition of the gas discharge lamp 2 with a time interval to the time when the main capacitor is charged. This circumstance can be exploited to shield the gas discharge lamp 2, for example by capacitively coupling the shielding structure 6 to the cathode, and thus to implement it cost-effectively. The ignition of the gas discharge lamp can then take place within the time window, for example by means of an ignition pulse, so that a

Controlled ignition of the gas discharge lamp 2 is or becomes possible.

Thus, a similar effect can be achieved compared to a water electrode 32, e.g. permanently and directly connected to the cathode potential (see

for example Fig.6C). Due to the capacitive coupling of the cathode potential with the water electrode 32, it is possible to influence the ions present in the cooling water 108k, so that they shield the cathode 4 from external potentials. The capacitively generated ions in the cooling water can the

Cathode 4 e.g. for a relatively short time against external potentials, e.g. for a period of less than 1 second, e.g. a period of less than 0.5 s, e.g. a period of less than 0.1 s. So that a reliable ignition of the gas discharge lamp 2 can take place, immediately after the charging capacitor its

Target voltage has reached (for example, within the period) the controlled ignition of the flash lamp, ie by means of a

Ignition voltage source 12 (igniter 12) take place.

For this purpose, the electrical conductivity of the cooling medium can be set or be such that the

SelbstZündspannung the gas discharge lamp 2 is clearly as high as possible. The electrical conductivity of the

Cooling medium, for example, depending on the

required operating voltage, which for operating the Gas discharge lamp 2 is used and / or will be, be set or be.

For example, the electrical conductivity of

Cooling water 108k in a range of 0.5 yS / cm approximately to about 2 yS / cm, when an operating voltage ranging from -40 kV to about 60 kV

is used. Will larger (or smaller)

Operating voltages used can be the electrical

Conductivity of cooling water 108k reduced accordingly

(or enlarged). For example, the electrical conductivity of the cooling water can be doubled if the operating voltages are halved, so that e.g. a flowing through the cooling water 108k electrical

Amperage in a range of about 50 μΑ to about 0.2 mA sets.

According to various embodiments, the electrical conductivity of the shielding structure (6) (or cooling water 108k) may be greater than about 0.5 yS / cm, e.g. greater than about 1 yS / cm, e.g. greater than about 2 yS / cm, e.g.

greater than about 4 yS / cm, e.g. bigger than about

8 yS / cm. Analogous to Fig. 6C, additional leads 32, 42 may be used, e.g. when the ignition wire is disposed outside of the jacket tube 5.

Alternatively, a first water electrode may be used which is electrically (e.g., capacitively) connected to the cathode 4

be coupled or can be and a second

Water electrode can be used, which can be electrically (eg capacitively) coupled to the anode 3 or. FIG. 7B illustrates a lamp assembly 100 and / or a flash lamp assembly 100 according to various Embodiments in a schematic side view or schematic cross-sectional view.

If the water electrode 32 capacitive with the

Coupled to cathode feed line 31, the water electrode 32 may be formed by a portion of the cooling water 108k, which flows around the cathode feed line 31. For this purpose, a capacitive coupling can take place by means of a suitable dielectric 32d between the cooling water 108k and the cathode feed line 31. For example, the dielectric 32d may have a permittivity greater than the cooling water 108k (e.g., the ionized cooling water 108k), e.g. For example, dielectric 32d may have a relative permittivity (at 18 ° C and a frequency of

50 Hz) of greater than about 10, e.g. greater than about 20, e.g. greater than about 40, e.g. greater than about 80, e.g. greater than about 100.

Illustratively, the capacitor 32k of a part of the

Cooling water 32, the dielectric 32d and the of the

Dielectric 32d surrounded portion of the cathode lead 31 are formed. In this case, a first electrode of the

Capacitor 32k from the water electrode 32 and a second electrode of the capacitor 32k from the portion of

Cathode lead 31 are formed, wherein between the first electrode of the capacitor 32 k and the second

Electrode of the capacitor 32k, the dielectric 32d

is arranged.

The capacitance of the capacitor 32k may be different from the dielectric 32d, the thickness of the dielectric 32d and the length of the dielectric

Cathode feed line 31, which is surrounded by the dielectric 32d defined. For example, the greater the capacitance of the capacitor 32k, the greater the length of the cathode feed line 31 which is surrounded by the dielectric 32d. For example, the entire length of the

Kathodenzuleitung 31, which is located in the cooling water, be surrounded by the dielectric 32 d or be. The capacitance of capacitor 32k may be greater than 100 pF, eg greater than 1 nF, according to various embodiments. For example, the capacitance of capacitor 32k may range from about 10 pF to about 10 nF. The thickness of the dielectric 32d may be in a range of about 10 ym to about 10 mm, eg, in a range of about 0.1 mm to about 1 mm. The length of the cathode feed line 31, which is surrounded by the dielectric 32d, may be greater than 10 mm, for example greater than 100 mm, greater than 1000 mm.

According to various embodiments, the dielectric 32d may be made of an electrically insulating material

(Insulator material) with a suitable permittivity

be formed. The dielectric 32d may be, for example, a plastic (e.g., shrink tubing), e.g. a polymer, a thermoset, silicone, a varnish (e.g., polyurethane varnish), a thermoplastic, a polyesterimide, epoxy, a polyamide (e.g., Kapton), polyethylene, PTFE, a ceramic (e.g., steatite, alumina), mica, or air. For example, an air-filled one may be used to form the capacitor

Seal element 302 can be used (see

for example Fig.3B).

An insulating material may have a dielectric strength greater than about 10 kV / mm (e.g., DC).

have, e.g. greater than about 20 kV / mm, e.g. greater than about 30 kV / mm, e.g. of more than about 40 kV / mm. Illustratively, the insulating coating such

be established that an electrical breakdown (in other words a voltage breakdown) between the

Cooling water 108k and the cathode feed line 31 (and / or the anode feed line 41) can be prevented.

Thus, clearly an efficient suppression of

Auto-ignition of the gas discharge lamp 2 by means of a suitable dielectric 32d in combination with a

suitable wiring of the cathode feed line 31 in

Cooling water and a controlled ignition immediately after a brief charging of the charging capacitor

(Main capacitor). For example, the

Driver circuit 104 and the ignition circuit 102 may be configured such that charging the main capacitor and igniting the gas discharge lamp 2 within a

Time interval, e.g. within 2 seconds, e.g.

within 1 second, e.g. within 0.1 s, e.g. within 0.01 s, e.g. within 0.001 s.

By means of the flash lamp arrangement 100 (or lamp arrangement 100) shown in FIG

Auto-ignition of the flash lamp 2 can be suppressed without requiring additional components forming the water electrode 32 (e.g., an electrical conductor such as a metal). Instead of a capacitively coupled water electrode 32, the dielectric 32d or another electrical

Isolation of the lying in the cooling water cathode feed line 31 act as a dielectric 32d of a capacitor, so that a capacitive coupling of the cathode feed line 31 with the

Cooling water 108k is reached.

Claims

claims

Flash lamp (2), comprising:

an elongate discharge tube (112r) disposed externally of a jacket tube spaced apart from the discharge tube (112r)

(5), wherein the space between the jacket tube (5) and the discharge tube (112r) is filled by a cooling medium, wherein in the discharge tube

(112r) a high-voltage potential electrode (3) and a counter electrode (4) are arranged, which are each connected to a connecting line (31, 41), wherein the flash lamp (2) with at least one self-ignition suppressing shield (6) is provided, which is disposed outside of the discharge tube (112r) and is at a shielding potential.

The flash lamp (2) of claim 1, further comprising:

an ignition electrode (61) arranged outside the discharge tube (112r).

Flash lamp (2) according to claim 1 or 2,

wherein the space between the jacket tube (5) and the discharge tube (112r) of electrically conductive cooling water (108k) is filled, which is located as a shield (6) on the shielding potential.

Flash lamp (2) according to claim 1,

wherein outside of the discharge tube (112r) at least in the region of the electrode (3) an electrically conductive shielding element (6) is provided as a shield.

Flash lamp (2) according to claim 3,

where the conductance of the electrically conductive

Cooling water (108k) in the range of 0.1 S / cm to 10 S / cm.

6. flashlamp (2) according to claim 3, where the conductance of the electrically conductive

Cooling water (108k) in the range of 0.5 S / cm to 10 S / cm. 7. flashlamp (2) according to claim 3,

wherein the ignition electrode (61) in the electrically

conductive cooling water (108k) between the jacket tube (5) and the discharge tube (112r) is arranged, wherein the ignition electrode (61) in the direction of the lamp axis at a distance from the electrode (3).

8. flashlamp (2) according to claim 3,

wherein the connecting line (31) has an electrical

Contact with the electrically conductive cooling water (108k) has.

9. flashlamp (2) according to claim 3,

wherein the connecting line (31) via a feed line (32) with the electrically conductive cooling water (108k)

electrically connected.

10. flashlamp (2) according to claim 9,

wherein the supply line (32) via a coupling capacitor (7) to an ignition voltage source (12) can be connected.

11. flashlamp (2) according to claim 4,

the shielding element (6) being the outside of the

Discharge tube (112r) surrounds. 12. flashlamp (2) according to claim 4,

the shielding element (6) being the outside of the

Casing tube (5) surrounds.

13. flashlamp (2) according to claim 4,

wherein the shielding element (6) is arranged on the inside of the jacket tube (5).

14. flash lamp (2) according to claim 4,

wherein the shielding element (6) as a high-impedance

Sheet resistance is formed. 15. flashlamp (2) according to one of claims 1 to 14,

further comprising:

an electrically connected to the shielding structure (6)

coupled shield circuit (102) for supplying electrical energy to the shield (6) for

To suppress self-ignition of the flash lamp (2).

16. A method for suppressing auto-ignition of a flashlamp (2), consisting of an elongated discharge tube (112r) with an electrode (3) and a counter electrode (4), wherein the discharge tube (112r) in a jacket tube (5) and introduced by a Cooling medium (108k) is cooled, being outside the

Discharge tube (112r) an ignition electrode (61)

is attached, wherein the electrode (3) has a

High voltage is applied with respect to ground potential, wherein outside of the discharge tube (112r) a

Shield (6) is inserted, to the one

Abschirmpotential is applied, with which the electric field between the electrode (3) and the shield (6) is reduced.

17. The method according to claim 16,

wherein electrically conductive cooling water (108k) is used as the shield (6) to which the

Shielding potential is applied and that a

Potential gradient in the conductive cooling water (108k) along the discharge tube (112r) is generated.

18. The method according to claim 16,

wherein outside of the discharge tube (112r) at least in the region of the electrode (3) an electrically conductive shielding element (6) is inserted and that between the shielding element (6) and the electrode (3) an electric field is prevented.

A lamp assembly (100) comprising:

A gas discharge lamp (2), wherein an automatic ignition of a gas discharge at an applied

Tension equal to or greater than one

SelbstZündspannung the gas discharge lamp takes place;

A shielding structure (6) which is arranged outside the gas discharge lamp (2) and is set up in such a way that the self-ignition voltage of the gas discharge lamp (2) is electrically variable by means of the shielding structure (6);

Electrically connected to the shielding structure (6)

coupled (102d) shield circuit (102) for supplying electrical energy to the

Shielding structure (6) for changing the

Self-igniting voltage of the gas discharge lamp (2). 20. The lamp assembly (100) of claim 19, further

comprising:

a sheath tube (5) which surrounds the gas discharge lamp (2), wherein a cooling medium (108k) is received between the sheath tube (5) and the gas discharge lamp (2) for cooling the gas discharge lamp (2).

A lamp assembly (100) according to claim 19 or 20, wherein the shielding structure (6) is arranged to influence an electric field provided within the gas discharge lamp.

The lamp assembly (100) of any one of claims 19 to 21, further comprising:

one with the gas discharge lamp (2) electrically

coupled driver circuit (104) for supplying the gas discharge lamp (2) with an operating voltage such that the electrode (3) is a first electrical Potential is provided and the counter electrode (4) is provided a second electrical potential for providing an electric field between the electrode (3) and the counter electrode (4).

Lamp assembly (100) according to claim 22,

wherein the shielding circuit (102) is arranged such that the supplied electrical energy leads to an electrical shielding potential of the shielding structure (6) extending from the electrical ground

differentiates.

24. Lamp arrangement (100) according to one of claims 19

until 23,

wherein the gas discharge lamp (2) has a length of more than

1 m.

A lamp assembly (100) according to any one of claims 19 to 24, further comprising:

an ignition electrode (61) arranged outside the gas discharge lamp (2).

A lamp assembly (100) according to claim 25, further

comprising:

an ignition circuit (12) arranged to transmit an electric ignition pulse to ignite the

Gas discharge lamp (2) on the ignition electrode (61).

Lamp assembly (100) according to one of claims 19 to 26,

wherein the shielding structure (6) between the

Gas discharge lamp (2) and the sheath tube (5) is arranged.

Lamp assembly (100) according to one of claims 19 to 26, wherein the shielding structure (6) is disposed outside of the sheath tube (5).

Lamp arrangement (100) according to one of claims 19 to 28,

wherein the shielding structure (6) comprises a metal.

30. Lamp arrangement (100) according to one of claims 19

to 27,

wherein the shielding structure (6) comprises at least a part of the cooling medium (108k).

31. Lamp arrangement (100) according to one of claims 19

until 30,

wherein the shielding structure (6) has an electrical

Conductivity in a range of about 0.5 yS / cm to about 10 yS / cm.