WO2015002484A1 - Dispositif de lévitation magnétique, dispositif de transfert utilisant le dispositif de lévitation magnétique, et dispositif de guidage utilisant le dispositif de lévitation magnétique - Google Patents

Dispositif de lévitation magnétique, dispositif de transfert utilisant le dispositif de lévitation magnétique, et dispositif de guidage utilisant le dispositif de lévitation magnétique Download PDF

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Publication number
WO2015002484A1
WO2015002484A1 PCT/KR2014/005964 KR2014005964W WO2015002484A1 WO 2015002484 A1 WO2015002484 A1 WO 2015002484A1 KR 2014005964 W KR2014005964 W KR 2014005964W WO 2015002484 A1 WO2015002484 A1 WO 2015002484A1
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WIPO (PCT)
Prior art keywords
permanent magnet
partial
magnet
magnetic
magnetic levitation
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PCT/KR2014/005964
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English (en)
Korean (ko)
Inventor
진형일
이성준
Original Assignee
Jin Hyoung Il
Lee Sung Joon
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Application filed by Jin Hyoung Il, Lee Sung Joon filed Critical Jin Hyoung Il
Publication of WO2015002484A1 publication Critical patent/WO2015002484A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Definitions

  • the present disclosure relates to a magnetic levitation device, a transfer device using a magnetic levitation device, and a guide device using a magnetic levitation device, and more particularly, a magnetic levitation device using a permanent magnet, a transfer device using a magnetic levitation device, and magnetic levitation A guide device using the device.
  • the magnetic levitation device is a device that floats an object using magnetic force without mechanical contact and friction, and by applying the same to a conveying device, the object can be realized without noise and ultra-clean transportation system.
  • a repulsion or suction injury by a permanent magnet As a method of magnetically floating a target object, there are a repulsion or suction injury by a permanent magnet, a superconductor rebound injury, a rebound injury by induced eddy currents, an injury by a magnetic field and an electric force, and a suction injury by an electromagnet.
  • the magnetic levitation device using the recoil flotation force by the permanent magnet uses an auxiliary restraint mechanism to maintain posture, and as such auxiliary restraint mechanisms, active control of a guide electromagnet or roller bearing is mainly used.
  • the magnetic levitation device using the permanent magnet has many advantages, it is not practically used.
  • there are studies that prove the feasibility of stable magnetic levitation using only the recoil levitation force caused by the permanent magnet but it has not been applied to the actual industry.
  • a separate electromagnetic controller or a mechanical supplement is supplemented with a roller or the like. This is because the magnetic levitation and the left and right control cannot be performed at the same time through the simple arrangement of the permanent magnets or a combination thereof, or the condition is very sensitive even if this is done at the same time.
  • Korean Patent Publication No. 10-2006-0005724 discloses a magnetic levitation device using a permanent magnet.
  • the magnetic levitation apparatus includes a rail 10 having a long cross section and a triangular cross section and a groove-shaped conveying body 20 having a long cross section and a concave cross section.
  • Permanent magnets 11 having a rectangular cross section are arranged on the outer surfaces 10a and 10b of the rail 10, and the permanent magnets 21 are also arranged on the inner surfaces 20a and 20b of the conveying body 20.
  • the two permanent magnets 11 and 21 are arranged so that the surfaces magnetized with the same polarity (for example, N pole) face each other.
  • the concave groove of the conveying body 20 is engaged with the projecting structure of the rail 10, and the conveying body 20 is lifted by the magnetic repulsive force acting between the permanent magnets 11 and 21 disposed therebetween. .
  • the two permanent magnets 11 and 21 may be magnetic pole surfaces in which surfaces opposite to each other are magnetized to the N pole.
  • the sides of the permanent magnets 11 and 21 are also magnetized to the N pole and the S pole in the vicinity of the corner.
  • the magnetic field lines are perpendicular to the magnetic pole faces of the permanent magnets 11 and 21 and are formed as closed loops. Therefore, the magnetic field lines have a distribution that diverges away from the magnetic pole.
  • the line of magnetic force has a distribution that is rapidly divergent toward the edge of the magnetic pole face of the permanent magnet (11, 21). This magnetic force line is a line indicating the direction in which the magnetic force acts in the magnetic field.
  • Magnetic repulsive force 30 acts between the permanent magnets 11 and 21 to which magnetic pole faces of the same polarity are opposed.
  • the center of the magnetic pole surface acts as the magnitude of the magnetic repulsive force 30 acting on the edge and the edge 21a is changed, and the permanent magnet 21 on the conveying body 20 is returned to its original position.
  • the rotation 24 slides sideways as shown in FIG. 2C along the direction in which the direction of the magnetic force is diverted by the distribution of the magnetic force lines rapidly radiating near the corners 21a.
  • the conveying body 20 rotates 25 in the lateral direction, so that the control in the left and right directions becomes unstable.
  • the present invention is to provide a magnetic levitation device, a transfer device using a magnetic levitation device, and a guide device using a magnetic levitation device that solves the problem that the control of the left and right direction is unstable in the magnetic levitation device according to the prior art.
  • the first permanent magnet ; And a second permanent magnet disposed to be spaced apart from each other in the first direction of the first permanent magnet, wherein the first permanent magnet and the second permanent magnet are magnetized with the same magnetic poles on opposite sides of the first permanent magnet.
  • the magnetic force line formed by the second permanent magnet converges in one region between the permanent magnet and the first permanent magnet.
  • the first permanent magnet has a peak surface protruding in the first direction and extending in the longitudinal direction perpendicular to the first direction
  • the second permanent magnet is Inner surfaces extending in the longitudinal direction on the surface opposite to the first permanent magnets and having concave grooves formed concave in the first direction, the inner surfaces forming the peak surface of the first permanent magnets and the concave grooves of the second permanent magnets are the same magnetic pole.
  • Each of the first permanent magnet and the second permanent magnet may be integrally formed. In some cases, each of the first permanent magnets and the second permanent magnets may be manufactured by seamlessly combining a plurality of permanent magnets.
  • the magnetic force lines generated by the magnetization of the inner surfaces forming the concave groove of the second permanent magnet may have a distribution that converges inside or near the inlet of the concave groove.
  • the peak surface of the first permanent magnet may be disposed in the magnetic force line convergence region or adjacent to the magnetic force line convergence region having a distribution in which magnetic force lines generated by magnetization of the inner surfaces of the second permanent magnet concave grooves converge.
  • Inner surfaces forming the concave groove of the second permanent magnet include a bottom surface extending in the longitudinal direction and first and second inner surfaces extending in the longitudinal direction, wherein the first and second inner surfaces are the first It may be inclined at an obtuse angle or a perpendicular angle with respect to the surface opposite to the permanent magnet. At this time, an inner angle between the first inner surface and the surface opposing the first permanent magnet in the concave groove, and between the second inner surface and the surface opposing the first inner surface and the first permanent magnet. Cabinets may be the same or different.
  • the first permanent magnet includes the peak surface extending in the longitudinal direction and the first and second outer surfaces extending in the longitudinal direction, wherein the first and second outer surfaces are obtuse or perpendicular to the peak surface. It may be formed to be inclined to the cabinet. In this case, in the protrusion, an inner angle between the peak surface and the first outer surface and an inner angle between the peak surface and the second outer surface may be the same as or different from each other.
  • the first permanent magnet When viewed in a cross section perpendicular to the longitudinal direction, the first permanent magnet may have a trapezoidal shape that becomes narrower toward the end.
  • the concave groove of the second permanent magnet may have a concave trapezoidal shape that becomes narrower in the depth direction.
  • the first permanent magnet has a first flat surface orthogonal to the first direction
  • the second permanent magnet has a first flat surface of the first permanent magnet.
  • the first flat surface of the permanent magnet includes a first partial surface positioned centrally in the width direction and extending in the longitudinal direction, and second and third partial surfaces on both sides of the first partial surface.
  • the magnetic strength at is greater than the magnetic strength at the second and third partial surfaces, and the second flat surface of the second permanent magnet is centrally located in the width direction and extends in the length direction in the fourth partial surface. And fifth and sixth sides of the fourth partial surface. Include quadrants, and may be a magnetic intensity in the fourth surface portion is low than the magnetic intensity at the above-mentioned fifth and sixth surface portion.
  • the magnetic force lines generated by magnetization of the second flat surface of the second permanent magnet are spaced apart from the fourth partial surface of the second flat surface in the first permanent magnet direction. It can have a distribution that converges at.
  • the first partial surface of the first plate surface of the first permanent magnet is in a magnetic field line converging region having a distribution in which magnetic force lines generated by magnetization of the second plate surface of the second permanent magnet converges or adjacent to the magnetic force protruding region. Can be arranged.
  • the first permanent magnet includes a first partial magnet including the first partial surface, a second partial magnet including the second partial surface, and a third partial magnet including the third partial surface
  • the second permanent magnet may include a fourth partial magnet including the fourth partial surface, a fifth partial magnet including the fifth partial surface, and a sixth partial magnet including the sixth partial surface.
  • the first interface between the first partial magnet and the second partial magnet is inclined at an obtuse angle or at a right angle with respect to the first partial surface of the first partial magnet, and is formed of the first partial magnet and the third partial magnet.
  • the boundary surface may be inclined at an obtuse angle or a perpendicular angle with respect to the first partial surface of the first partial magnet.
  • the third boundary surface of the fourth partial magnet and the fifth partial magnet is inclined at an obtuse angle or a right angle to the fourth partial surface of the fourth partial magnet, and is formed of the fourth partial magnet and the sixth partial magnet.
  • the fourth boundary surface may be inclined at an obtuse angle or a perpendicular angle with respect to the fourth partial surface of the fourth partial magnet.
  • the first partial magnet When viewed in a cross section perpendicular to the longitudinal direction, the first partial magnet may have a trapezoidal shape that becomes narrower toward the first partial surface.
  • the fourth partial magnet When viewed in a cross-section perpendicular to the longitudinal direction, the fourth partial magnet may have a trapezoidal shape that becomes wider toward the fourth partial surface.
  • the first and fourth partial magnets When viewed in a cross section perpendicular to the longitudinal direction, the first and fourth partial magnets may each have a symmetrical shape.
  • the magnetic composition of the first partial magnet may be different from the magnetic composition of the second and third partial magnets.
  • the first to third partial magnets may be magnetized after being molded integrally or may be combined after being individually magnetized.
  • the magnetic compositions of the first to third partial magnets are all the same, and each of the first to third partial magnets may be combined in a separately magnetized state.
  • the magnet strength in the second partial surface may be equal to the magnet strength in the third partial surface, and the magnet strength in the fifth partial surface may be the same as the magnet strength in the sixth partial surface.
  • the first permanent magnet is a flat plate having a first flat surface orthogonal to the first direction, and the second permanent magnet is opposite to the first permanent magnet.
  • a concave groove extending in a longitudinal direction and concave in the first direction, and inner surfaces of the first flat surface of the first permanent magnet and the concave groove of the second permanent magnet are magnetized with the same polarity
  • the first flat surface of the first permanent magnet includes a first partial surface which is located at the center in the width direction and extends in the longitudinal direction, and second and third partial surfaces on both sides of the first partial surface.
  • the magnet strength in one partial surface may be stronger than the magnet strength in the second and third partial surfaces.
  • the magnetic force lines generated by the magnetization of the inner surfaces forming the concave groove of the second permanent magnet may have a distribution that converges inside or near the inlet of the concave groove.
  • the first planar surface of the first permanent magnet is disposed in a magnetic field line converging region having a distribution in which magnetic force lines converged by magnetization of inner surfaces of the second permanent magnet concave grooves, or are disposed adjacent to the magnetic field line converging region. Can be.
  • Inner surfaces forming the concave groove of the second permanent magnet include a bottom surface extending in the longitudinal direction and first and second inner surfaces extending in the longitudinal direction, wherein the first and second inner surfaces are the first It may be inclined at an obtuse angle or a perpendicular angle with respect to the surface opposite to the permanent magnet.
  • the concave groove of the second permanent magnet may have a concave trapezoidal shape that becomes narrower in the depth direction.
  • the first permanent magnet may include a first partial magnet including the first partial surface, a second partial magnet including the second partial surface, and a third partial magnet including the third partial surface. have.
  • the first interface between the first partial magnet and the second partial magnet is inclined at an obtuse angle or at a right angle with respect to the first partial surface of the first partial magnet, and is formed of the first partial magnet and the third partial magnet.
  • the boundary surface may be inclined at an obtuse angle or a perpendicular angle with respect to the first partial surface of the first partial magnet.
  • the first partial magnet When viewed in a cross section perpendicular to the longitudinal direction, the first partial magnet may have a trapezoidal shape that becomes narrower toward the first partial surface.
  • the recessed grooves of the first partial magnets and the second permanent magnets may each have a symmetrical shape.
  • the magnet strength in the second partial surface may be equal to the magnet strength in the third partial surface.
  • the first permanent magnet has a peak surface protruding in the first direction and extending in the longitudinal direction orthogonal to the first direction
  • the second permanent magnet A flat plate shape having a second flat surface orthogonal to the first direction and opposing the peak surface of the first permanent magnet, wherein the peak surface of the first permanent magnet and the second flat surface of the second permanent magnet have the same polarity
  • the second flat surface of the second permanent magnet is located in the center in the width direction and includes a fourth partial surface extending in the longitudinal direction and the fifth and sixth partial surfaces on both sides of the fourth partial surface.
  • the magnetic strength of the fourth partial surface may be weaker than that of the fifth and sixth partial surfaces.
  • the magnetic force lines generated by magnetization of the second flat surface of the second permanent magnet are spaced apart from the fourth partial surface of the second flat surface in the first permanent magnet direction. It can have a distribution that converges at.
  • the peak surface of the first permanent magnet may be disposed in a magnetic force line convergence region having a distribution in which magnetic force lines generated by magnetization of the second flat surface of the second permanent magnet converge, or may be disposed adjacent to the magnetic force line convergence region.
  • the first permanent magnet includes the peak surface extending in the longitudinal direction and the first and second outer surfaces extending in the longitudinal direction, wherein the first and second outer surfaces are obtuse or perpendicular to the peak surface. It may be formed to be inclined to the cabinet.
  • the first permanent magnet When viewed in a cross section perpendicular to the longitudinal direction, the first permanent magnet may have a trapezoidal shape that becomes narrower toward the end.
  • the second permanent magnet may include a fourth partial magnet including the fourth partial surface, a fifth partial magnet including the fifth partial surface, and a sixth partial magnet including the sixth partial surface. have.
  • the third boundary surface of the fourth partial magnet and the fifth partial magnet is inclined at an obtuse angle or a right angle to the fourth partial surface of the fourth partial magnet, and is formed of the fourth partial magnet and the sixth partial magnet.
  • the fourth interface may be inclined at an obtuse angle or a right angle to the fourth partial surface of the fourth partial magnet.
  • the fourth partial magnet When viewed in a cross-section perpendicular to the longitudinal direction, the fourth partial magnet may have a trapezoidal shape that becomes wider toward the fourth partial surface.
  • the fourth partial magnets of the first permanent magnet and the second permanent magnet may each have a symmetrical shape.
  • the magnet strength in the fifth partial surface may be equal to the magnet strength in the sixth partial surface.
  • the first and second permanent magnets When viewed in a cross-section perpendicular to the longitudinal direction, the first and second permanent magnets may each have a symmetrical line of magnetic force lines.
  • the first direction is vertically upward
  • the second permanent magnet is located above the first permanent magnet and is caused by magnetic repulsion in the first direction. It may be a magnetic levitation body that simultaneously receives the floating force and the magnetic restoring force by the side force in the second direction perpendicular to the first direction.
  • the first direction is vertically downward, and the first permanent magnet is located above the second permanent magnet and is caused by magnetic repulsion in the first direction. It may be a magnetic levitation body that simultaneously receives the floating force and the magnetic restoring force by the side force in the second direction perpendicular to the first direction.
  • the first direction is a horizontal direction
  • the first permanent magnet and the second permanent magnet is arranged side by side in the first direction to the magnetic in the first direction Can receive side force from enemy repulsion.
  • the transfer device includes a first permanent magnet and a second permanent magnet disposed to be spaced apart in the first direction of the first permanent magnet, wherein the first permanent magnet and the second permanent magnet
  • the transfer apparatus using the magnetic levitation device having a distribution in which faces facing each other are magnetized with the same magnetic pole, and a magnetic force line formed by the second permanent magnet converges on a region between the second permanent magnet and the first permanent magnet.
  • a magnetic levitation conveying body magnetically floating to the upper portion of the support, wherein any one of the first permanent magnet and the second permanent magnet of the magnetic levitation device is provided to extend in the longitudinal direction on the upper portion of the support, The other of the first permanent magnet and the second permanent magnet is provided on the lower surface of the magnetic levitation carrier, the magnetic levitation carrier is spaced apart from the support the first permanent magnet and the second permanent magnet.
  • the support may further include a disconnection portion in which the first permanent magnet is not disposed in the longitudinal direction, and an auxiliary magnet module may be provided to assist the magnetic levitation of the magnetic levitation carrier when the magnetic levitation carrier passes the disconnection.
  • the auxiliary magnet module the first auxiliary magnet provided on the upper surface of the magnetic levitation transfer body; And a support frame extending upward of an upper surface of the magnetic levitation conveying body, and a second auxiliary magnet provided in the supporting frame such that the magnetic levitation conveying body faces upwardly with the first auxiliary magnet when passing through the disconnection portion.
  • the first auxiliary magnet and the second auxiliary magnet may have magnetic attraction due to magnetization with opposite polarities on opposite surfaces.
  • the first auxiliary magnet and the second auxiliary magnet may have magnetic repulsive force by magnetizing the opposite surfaces of each other with the same polarity.
  • the first auxiliary magnets are respectively provided at the front and rear ends in the longitudinal direction of the upper surface of the magnetic levitation conveying body, and the second auxiliary magnets are respectively located at positions immediately before and immediately after the start of the disconnection portion of the support frame. Can be prepared.
  • the magnetic levitation conveying device may be a semiconductor processing device.
  • Guide device includes a first permanent magnet and a second permanent magnet disposed to be spaced apart in the first direction of the first permanent magnet, the first permanent magnet and the second permanent magnet
  • the guide device using a magnetic levitation device having a distribution in which faces facing each other are magnetized with the same magnetic pole and a magnetic force line formed by the second permanent magnet converges on one region between the second permanent magnet and the first permanent magnet.
  • a magnetic levitation carrier body which is magnetically floating and movable in the longitudinal direction; And a guide module for preventing side deflection of the magnetic levitation conveying body, wherein the guide module is opposed to the first guide members provided on both sides of the magnetic levitation conveying body and the first guide members.
  • Second guide members disposed to be spaced apart and extended in a longitudinal direction, and a supporting frame supporting the second guide members, wherein either one of the first guide members and the second guide members is provided.
  • a first permanent magnet of the magnetic levitation device the other of the first guide members and the second guide members is a second permanent magnet of the magnetic levitation device, and the magnetic levitation conveying body is the first permanent magnet.
  • the first guide members may be eccentrically disposed downwardly with respect to the second guide members to receive a floating force in the vertical direction.
  • the magnetic levitation carrier may be floated by a permanent magnet or an electromagnet provided separately.
  • the magnetic levitation apparatus according to the disclosed embodiments can achieve stable magnetic levitation with only permanent magnets without mechanical or electronic guides for lateral control.
  • the magnetic levitation apparatus according to the disclosed embodiments can be controlled stably without being sensitive to the conditions, such as the height and distance of the magnetic levitation body.
  • the magnetic levitation device according to the disclosed embodiments implements both the floating force and the side restoring force by using the permanent magnet, the maintenance cost is very low.
  • the magnetic levitation conveying apparatus using the magnetic levitation device according to the disclosed embodiments improves energy efficiency by combining with a non-contact propulsion linear motor, and also suppresses generation of dust, frictional heat and static electricity according to the existing contact method. The performance of the linear motor can be greatly improved.
  • the magnetic levitation guide device using the magnetic levitation device according to the disclosed embodiments can be a stable guide to the swing, and further by the eccentric arrangement of the permanent magnet on the magnetic levitation side can be obtained further rise force.
  • FIG. 1 shows an example of a magnetic levitation apparatus according to the prior art.
  • FIG. 3 illustrates the movement in the lateral direction in the magnetic levitation apparatus of FIG.
  • FIG. 4 is a schematic perspective view of a magnetic levitation apparatus according to an embodiment of the present invention.
  • FIG. 5 shows magnetic force line distributions of a first permanent magnet of the magnetic levitation apparatus of FIG. 4.
  • FIG. 6 shows magnetic force line distributions of a second permanent magnet of the magnetic levitation apparatus of FIG. 4.
  • FIG. 7 shows the relationship of the magnetic forces in the first arrangement of the magnetic levitation apparatus of FIG. 4.
  • FIG. 8 shows the relationship of the magnetic force to the lateral movement in the first arrangement of the magnetic levitation device of FIG. 4.
  • FIG. 9 shows the relationship of the magnetic forces in the second arrangement of the magnetic levitation apparatus of FIG. 4.
  • FIG. 10 shows the relationship of the magnetic force to the lateral movement in the second arrangement of the magnetic levitation device of FIG. 4.
  • FIG. 11 is a schematic perspective view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 12 is a schematic perspective view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 13 shows magnetic force line distribution of the magnetic levitation apparatus of FIG. 12.
  • FIG. 14 shows the relationship of the magnetic force of the magnetic levitation apparatus of FIG.
  • FIG. 15 shows the relationship of the magnetic force to the lateral movement of the magnetic levitation device of FIG. 12.
  • FIG. 16 is a schematic perspective view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 17 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 18 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 19 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 20 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • 21 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 22 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 23 is a schematic front view of a magnetic levitation apparatus according to another embodiment of the present invention.
  • FIG. 24 is a chart showing the lifting force and side force according to the height of the injury of the second permanent magnet in the magnetic levitation apparatus according to an embodiment of the present invention.
  • 25 is a schematic plan view of a magnetic levitation conveying apparatus according to another embodiment of the present invention.
  • FIG. 26 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus of FIG. 25 along line I-II.
  • FIG. 26 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus of FIG. 25 along line I-II.
  • FIG. 27 is a schematic front view of the magnetic levitation conveying apparatus of FIG. 25.
  • FIG. 28 is a schematic plan view of a magnetic levitation conveying apparatus according to another embodiment of the present invention.
  • FIG. 29 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus of FIG. 29 taken along line I-II.
  • FIG. 29 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus of FIG. 29 taken along line I-II.
  • FIG. 30 is a schematic front view of the magnetic levitation conveying apparatus of FIG. 29.
  • 31A to 31F describe the operation of the magnetic levitation conveying apparatus of FIG.
  • FIG. 32 is a schematic front view of a magnetic levitation conveying apparatus to which the magnetic levitation guide apparatus according to another embodiment of the present invention is applied.
  • FIG. 33 is an enlarged view of the magnetic levitation guide device in the magnetic levitation conveying apparatus of FIG.
  • FIG. 4 is a schematic perspective view of the magnetic levitation apparatus 100 according to an embodiment of the present invention.
  • the magnetic levitation apparatus 100 of the present embodiment is positioned on the first permanent magnet 110 and the first permanent magnet 110, and the second permanent magnet 120 floated by the magnetic levitation force. ).
  • the first permanent magnet 110 serves as a support that magnetically floats the second permanent magnet 120.
  • the first permanent magnet 110 is formed to extend in the longitudinal direction (X-axis direction).
  • the first permanent magnet 110 when viewed in a cross section perpendicular to the longitudinal direction (X-axis direction), the first permanent magnet 110 may have a trapezoidal shape in which the width thereof becomes narrower toward the end. That is, the first permanent magnet 110 has a peak surface 111 protruding upward (Z-axis direction) and the first and second outer surfaces 112 and 113 on the left and right sides.
  • the width W1 of the peak surface 111 of the first permanent magnet 110 may be narrower than the width (W2 of FIG. 6) of the inlet of the concave groove 124 of the second permanent magnet 120.
  • the left and right first and second outer surfaces 112 and 113 may be inclined at an obtuse angle with respect to the peak surface 111. That is, the inner angle ⁇ 1 between the peak surface 111 and the first outer surface 112 of the first permanent magnet 110 and the inner angle ⁇ 2 between the peak surface 111 and the second outer surface 113 are: Each may be greater than 90 degrees and less than 180 degrees.
  • the first permanent magnet 110 may be symmetric in the lateral direction (Y-axis direction). That is, the inner angle ⁇ 1 between the peak surface 111 and the first outer surface 112 of the first permanent magnet 110 and the inner angle ⁇ 2 between the peak surface 111 and the second outer surface 113 are Can be the same as each other.
  • the first permanent magnet 110 is magnetized so that the peak surface 111 becomes the magnetic pole surface of the N pole or the S pole.
  • the back surface 115 of the peak surface 111 of the first permanent magnet 110 becomes the polarity opposite to the polarity of the peak surface 111.
  • the first permanent magnet 110 may be formed by being magnetized after being molded in the above-described shape.
  • the peak surface 111 is the N pole
  • the back surface 115 of the peak surface 111 is S pole
  • the explanation will be made based on the case of magnetization.
  • the second permanent magnet 120 in a cross section perpendicular to the longitudinal direction (X-axis direction).
  • the second permanent magnet 120 is positioned vertically upward (+ Z-axis direction) of the first permanent magnet (110 in FIG. 4) to provide a magnetic repulsive force vertically upward (+ Z-axis direction).
  • It is a magnetic levitation body that simultaneously receives the floating force and the side restoring force by the magnetic repulsive force in the left and right directions ( ⁇ Y axis direction).
  • the second permanent magnet 120 may have a concave groove 124 formed extending in the longitudinal direction (X-axis direction) between the first and second lower surfaces 128 and 129.
  • the first and second lower surfaces 128 and 129 of the second permanent magnet 120 are surfaces facing the first permanent magnet 110.
  • the concave groove 124 of the second permanent magnet 120 may have a concave trapezoidal shape that becomes narrower in the depth direction (Z-axis direction). That is, the concave groove 124 of the second permanent magnet 120, when viewed in a cross section perpendicular to the longitudinal direction (X-axis direction), the width at the bottom surface 121 may be formed narrower than the width near the entrance. have.
  • the second permanent magnet 120 has a concave bottom surface 121 and left and right first and second inner surfaces 122 and 123.
  • the left and right first and second inner surfaces 122 and 123 may be inclined at an obtuse angle with respect to the first and second lower surfaces 128 and 129 having the concave grooves 124 formed therein. That is, an inner angle ⁇ 3 between the first lower surface 128 and the first inner surface 122 of the second permanent magnet 120 and the second lower surface 129 and the second outer surface of the second permanent magnet 120.
  • the interior angles ⁇ 4 between 123 may be greater than 90 degrees and less than 180 degrees, respectively.
  • the concave groove 124 of the second permanent magnet 120 may be symmetrical in the lateral direction (Y-axis direction).
  • the inner angle ⁇ 3 between the first lower surface 128 and the first inner side surface 122 and the inner angle ⁇ 4 between the second lower surface 129 and the second outer side surface 123 may be equal to each other.
  • the inner angle ⁇ 3 between the first lower surface 128 and the first inner side surface 122 and the inner angle ⁇ 4 between the second lower surface 129 and the second inner side surface 123 are different from each other. It is not excluded.
  • the inner surfaces of the concave groove 124 of the second permanent magnet 120 are the peak surface 111 of the first permanent magnet 110. It is magnetized to the same type as the polarity of. Further, the first and second surfaces 128 and 129 of the second permanent magnet 120 may also be magnetized in the same shape as the polarity of the peak surface 111 of the first permanent magnet 110.
  • the rear surface 125 of the first and second surfaces 128 and 129 having the concave grooves 124 of the second permanent magnet 120 have the polarities of the inner surfaces 121, 122, and 123 of the concave grooves 124. The opposite polarity.
  • the second permanent magnet 120 may be molded in the above-described shape and then magnetized to form a single body. In some cases, the second permanent magnet 120 may be formed by a plurality of pieces are first magnetically molded and then adhered to each other without gaps. As described above, when the peak surface 111 of the first permanent magnet 110 becomes the N pole, the second permanent magnet 120 is the inner surface (121, 122, 123) of the concave groove 124 is N It may be the pole, and the back surface 125 may be magnetized to be the S pole. Of course, the peak surface 111 of the first permanent magnet 110 may be the S pole, and the inner surfaces 121, 122, 123 of the concave groove 124 of the second permanent magnet 120 may be the S pole. have.
  • FIG. 5 shows the distribution of the magnetic force lines B of the first permanent magnets 110 in a cross section perpendicular to the longitudinal direction (X-axis direction).
  • the peak surface 111 of the first permanent magnet 110 is magnetized to the N pole, and thus the magnetic force line B generated at the peak surface 111 is vertically upward (+ Z axis direction). And divergence in the left and right directions ( ⁇ Y axis direction).
  • the magnetic force line B generated at the peak surface 111 of the first permanent magnet 110 returns to the rear surface 115 of the first permanent magnet 110 to form a closed loop.
  • FIG. 6 shows the distribution of the magnetic force lines B of the second permanent magnet 120 of this embodiment in a cross section perpendicular to the longitudinal direction (X-axis direction).
  • the inner surfaces 121, 122, and 123 forming the concave grooves 124 of the second permanent magnet 120 are magnetized to the N pole, and thus occur at the inner surfaces 121, 122, and 123.
  • the magnetic force line B to be distributed has a distribution that converges inside or near the inlet of the concave groove 124.
  • the inner surfaces 121, 122, and 123 forming the concave grooves 124 become magnetic poles of the same polarity (N pole), the inner surfaces 121, 122, and 123 forming the concave grooves 124 are perpendicular to each other.
  • the magnetic force line B is discharged to the outside of the concave groove 124 after convergence near the inlet of the concave groove 124. Since the surface area of the concave groove 124 (ie, the area of the bottom surface 121 and the first and second inner surfaces 122 and 123) is larger than the cross-sectional area of the inlet of the concave groove 124, the concave groove 124.
  • the magnetic force line convergence region 126 may be located inside or near the entrance of the concave groove 124.
  • the magnetic force line convergence region 126 is emitted from the left and right first and second inner surfaces 122 and 123 even though the magnetic force lines B on the bottom surface 121 of the concave groove 124 have a diverging distribution. Since the magnetic force lines B to be directed toward the central portion of the concave groove 124, it may be understood that they are formed by their vector sum.
  • the magnetic field line convergence region 126 of the second permanent magnet 120 can ensure the stability of the side control as described later.
  • the S pole ie, the magnetic pole to which the magnetic force line B enters
  • the inner surfaces 121, 122, 123 of the concave groove 124 are formed in some of the inner surfaces 121, 122, 123 of the concave groove 124, the inner surfaces 121, 122 of the concave groove 124. If the majority of the magnetic force lines B emitted from the 123 is to go out through the inlet of the concave groove 124, the magnetic force line is still in the vicinity of the inlet of the concave groove 124. Therefore, in this embodiment, some of the inner surfaces 121, 122, and 123 of the concave groove 124 are not excluded from having a locally different polarity.
  • the position at which the magnetic field line convergence region 126 is formed is the intensity of magnetic poles magnetized on the inner surfaces 121, 122, and 123 forming the concave groove 124, or the inclination angles of the first and second inner surfaces 122 and 123. It may vary depending on the degrees ⁇ 3, ⁇ 4, and the like. In addition, the inclination angles ⁇ 3 and ⁇ 4 of the first and second inner surfaces 122 and 123 are designed to be different from each other so that the converging region 126 may be eccentrically formed at one side of the concave groove 124. It may be.
  • the term “converge” refers to inner surfaces 121, 122, and 123 forming the concave groove 124 of the second permanent magnet 120 and the peak surface 111 of the first permanent magnet 110.
  • the magnetic force line (B) out of the concave groove 124 is used as a reference.
  • the inner surfaces 121, 122, 123 of the concave groove 124 of the second permanent magnet 120 and the peak surface 111 of the first permanent magnet 110 are all magnetized to the S pole (that is, When the magnetic force line B enters from the outside of the concave groove 124 to the inside, the direction of the magnetic force line by definition of the S pole is opposite to the direction of the above description, but the first permanent magnet 110 and the second permanent magnet ( Since the magnetic force between the 120 acts as a repulsive force in any case, the inner surfaces 121, 122, 123 forming the concave groove 124 of the second permanent magnet 120 because they have the same direction of force (reverse line).
  • the peak surface 111 of the first permanent magnet 110 may be understood to be substantially the same magnetic force line distribution as when magnetized to the N pole. Therefore, the present specification, when the inner surface 121, 122, 123 of the concave groove 124 of the second permanent magnet 120 is magnetized to the S pole within the meaning that there is no confusion to the person skilled in the art Also, it will be described as having the magnetic field line convergence region at the same position as the position of the magnetic field line convergence region 126 when magnetized to the N pole.
  • the first arrangement is a case where the peak surface 111 of the first permanent magnet 110 is located in the concave groove 124 of the second permanent magnet 120.
  • the second permanent magnet 120 is injured by the floating force 131 due to magnetic repulsion with the first permanent magnet 110.
  • the floating equilibrium position of the second permanent magnet 120 may be designed such that the peak surface 111 of the first permanent magnet 110 is located inside the concave groove 124 of the second permanent magnet 120.
  • the floating equilibrium position of the second permanent magnet 120 may be determined at the position where the balance of the force of the weight of the floating force 131 and the second permanent magnet 120 is made.
  • the magnetic force line converging region 126 of the second permanent magnet 120 may also be designed to be positioned inside the concave groove 124. Furthermore, the floating equilibrium position of the second permanent magnet 120 may be designed such that the peak surface 111 of the first permanent magnet 110 is located in the magnetic field line convergence region 126.
  • first and second inner surfaces 122 and 123 of the second permanent magnet 120 are also magnetized with the same polarity as that of the peak surface 111 of the first permanent magnet 110, the first permanent magnet 110
  • the second permanent magnet 120 is subjected to the side reaction force (132, 133) in an injured state.
  • the side repulsive force 132, 133 acts as a side restoring force to suppress the movement of the second permanent magnet 120 in the left and right directions.
  • the second permanent magnet 120 is in the left direction (-Y) with respect to the horizontal position of the equilibrium position (in the symmetrical structure, the center line 116 of the first permanent magnet 110). Axial direction), the distance between the first outer surface 112 of the first permanent magnet 110 and the first inner surface 122 of the second permanent magnet 120 is the first permanent magnet 110.
  • the second permanent magnet 120 receives the side restoring force 127 that returns to the left and right equilibrium position. Similarly, when the second permanent magnet 120 moves in the vertical direction ( ⁇ Z axis direction), the floating force 131 'is changed, and accordingly, the second permanent magnet 120 receives a force to return to the floating equilibrium position. do.
  • Magnetic repulsive force between the first permanent magnet 110 and the second permanent magnet 120 may be understood as the magnetic force received by the first permanent magnet 110 placed in the magnetic field by the second permanent magnet 120,
  • the first permanent magnet 110 (particularly, the peak surface 111) of the magnetic force line by the second permanent magnet 120 may be obtained by integration in the boundary region.
  • the magnetic force lines by the second permanent magnet 120 are in the vicinity of the concave groove 124 in this embodiment.
  • the magnetic levitation apparatus 100 of the present embodiment is transferred to the transfer apparatus as described later. If used, it can be stably controlled side by side.
  • the first arrangement is a case where the peak surface 111 of the first permanent magnet 110 is located inside the concave groove 124 of the second permanent magnet 120. Accordingly, the protruding structure of the first permanent magnet 110 may act as a physical structure that restrains the movement of the second permanent magnet 120 in the left and right directions ( ⁇ Y axis direction).
  • the peak surface 111 of the first permanent magnet 110 is located outside the entrance of the concave groove 124 of the second permanent magnet 120.
  • This second arrangement is a case where the converging region 126 of the second permanent magnet 120 is formed near the inlet of the concave groove 124, especially outside the inlet of the concave groove 124.
  • the formation position of the converging region 126 may be determined according to the strength of the magnetic pole magnetized on the inner surfaces 121, 122, and 123 constituting the concave groove 124, or the shape of the concave groove 124.
  • the floating equilibrium position of the second permanent magnet 120 is the peak surface 111 of the first permanent magnet 110. It may be designed to be located outside the inlet of the concave groove 124 of the second permanent magnet 120.
  • the floating equilibrium position of the second permanent magnet 120 may be determined at the position where the balance of the force of the weight of the floating force 134 and the second permanent magnet 120 is made.
  • the surface 128 adjacent to the concave groove 124 of the second permanent magnet 120 and the first and second inner surfaces 122 and 123 of the concave groove 124 are also attached to the first permanent magnet 110. Since the magnets are magnetized to the same polarity as the polarities of the two surfaces 111, the second permanent magnets 120 are subjected to the side reaction forces 135 and 136 in the injured state with respect to the first permanent magnets 110. These side repulsive forces 135 and 136 act as side restoring forces (127 in FIG. 10) which suppress the movement of the second permanent magnet 120 in the left and right directions ( ⁇ Y axis direction).
  • the second permanent magnet 120 when the second permanent magnet 120 is deflected to the left direction (-Y axis direction) with respect to the center line 116 of the first permanent magnet 110, the second permanent magnet ( The right side reaction force 135 'that pushes the 120 in the right direction (+ Y axis direction) is greater than the left side reaction force 136' that pushes the second permanent magnet 120 in the left direction (-Y axis direction). Thus, the side restoring force 127 in the right direction (+ Y axis direction) is generated.
  • the second permanent magnet 120 moves in the left and right directions ( ⁇ Y axis direction) with respect to the center line 116 of the first permanent magnet 110, the first permanent magnet 110 and the second permanent magnet ( As the left and right side reaction forces 135 'and 136' acting between the 120 are changed, the second permanent magnet 120 receives the side return force 127 to return to the left and right equilibrium position. Similarly, when the second permanent magnet 120 moves in the vertical direction ( ⁇ Z axis direction), the floating force 134 'is changed, and accordingly, the second permanent magnet 120 receives a force to return to the floating equilibrium position. do.
  • the peak surface 111 of the first permanent magnet 110 in the second arrangement is located outside the entrance of the concave groove 124 of the second permanent magnet 120, so that the left and right directions of the second permanent magnet 120 ( ⁇ There is no physical structure to constrain the movement of the Y axis. Therefore, when the second permanent magnet 120 receives an external force in the lateral direction ( ⁇ Y axis direction) more than the side restoring force by the left and right side reaction forces 135 'and 136', the second permanent magnet 120 is the first permanent magnet.
  • the magnet 110 or the second permanent magnet 120 may be moved in a left or right direction ( ⁇ Y axis direction) without damage.
  • the first permanent magnet 110 of the present embodiment has been described as an example of a trapezoidal shape whose width is narrowed toward the end, but is not limited thereto.
  • the cross-sectional shape of the first permanent magnet 110 is not excluded.
  • each of the first and second outer surfaces 112 and 113 on the left and right sides of the first permanent magnet 110 may be a curved surface, a plurality of planes, or a combination of a curved surface and a flat surface.
  • the cross-sectional shape of the first permanent magnet 110 may be a polyhedron shape or a semi-circular shape.
  • the second permanent magnet 120 of the present embodiment is described as an example in which the cross section of the concave groove 124 has a trapezoidal shape that becomes narrower toward the bottom surface 121, but is not limited thereto.
  • the cross sectional shape of the concave groove 124 of the second permanent magnet 120 is not excluded.
  • the corner where the bottom surface 121 and the first inner surface 122 meet and the corner where the bottom surface 121 and the second inner surface 123 meet in the concave groove 124 may be treated as a curved surface.
  • each of the first and second inner surfaces 122 and 123 of the concave groove 124 may be a curved surface, a plurality of planes, or a combination of a curved surface and a flat surface.
  • the angle ⁇ 1 between the peak surface 111 and the first outer surface 112 of the first permanent magnet 110 of the present embodiment and the angle between the peak surface 111 and the second outer surface 113 (although the case where ⁇ 2) is the same as each other is described as an example, the present invention is not limited thereto.
  • the angles ⁇ 1 and ⁇ 2 of the first and second outer surfaces 112 and 113 may be different from each other.
  • the angle ⁇ 3 between the bottom surface 121 and the first inner surface 122 of the second permanent magnet 120 of the present embodiment and the angle between the bottom surface 121 and the second inner surface 123 (although the case where ⁇ 4) is the same as each other has been described as an example, the present invention is not limited thereto.
  • angles ⁇ 3 and ⁇ 4 of the first and second inner surfaces 122 and 123 may be different from each other. These angles ⁇ 1, ⁇ 2, ⁇ 3, and ⁇ 4 may be appropriately determined according to the magnitude of the floating force required and the magnitude of the left and right side repulsive forces.
  • the cross-sectional shape of each of the first and second permanent magnets 110 and 120 is symmetric in the lateral direction ( ⁇ Y axis direction) so that the left side reaction force and the right side reaction force are designed to be in equilibrium with each other at the center position. It is not limited thereto. In some cases, the left side reaction force and the right side reaction force may be designed to be different from each other.
  • the cross-sectional shapes of the first and second permanent magnets 110 and 120 may be asymmetric in the lateral direction.
  • FIG. 11 is a schematic perspective view of a magnetic levitation apparatus 200 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 200 includes a first permanent magnet 210 and a second permanent magnet 220.
  • the first permanent magnet 210 is positioned above the second permanent magnet 220 and is floated by the magnetic levitation force. That is, in the present embodiment, the first permanent magnet 210 corresponds to the magnetically levitated body, and the second permanent magnet 220 serves as a support for supporting the magnetic levitation of the first permanent magnet 210.
  • the first and second permanent magnets 210 and 220 are cases where the upper and lower positions of the first and second permanent magnets 110 and 120 of the magnetic levitation apparatus 100 of the above-described embodiment are changed.
  • the relation of the force due to the magnetic repulsive force is substantially the same. That is, all of the inner surfaces 221, 222, and 223 forming the concave groove 224 of the first permanent magnet 210 and the concave groove 224 of the second permanent magnet 220 are magnetized with the same polarity.
  • the permanent magnet 210 receives the floating force in the vertical direction and the side restoring force in the horizontal direction by magnetic repulsion in a state spaced apart from the second permanent magnet 220.
  • FIG. 12 is a schematic perspective view of a magnetic levitation apparatus 300 according to another embodiment of the present invention
  • Figure 13 shows the magnetic levitation apparatus 300 of the present embodiment in a cross section perpendicular to the longitudinal direction (X-axis direction). do.
  • the magnetic levitation apparatus 300 of the present embodiment is positioned on the first permanent magnet 310 and the first permanent magnet 310 and is second permanently injured by magnetic levitation force. Magnet 320.
  • the first permanent magnet 310 serves as a support that magnetically floats the second permanent magnet 320.
  • the first permanent magnet 310 may have a flat plate shape.
  • the first permanent magnet 310 may include a first partial magnet 311 extending in the longitudinal direction (X-axis direction), a second partial magnet 312 and a first position positioned at left and right sides of the first partial magnet 311. It may include three partial magnets (313).
  • the first partial surface 311a of the first partial magnet 311, the second partial surface 312a of the second partial magnet 312, and the third partial surface 313a of the third partial magnet 313 are As shown in the figure, it can be understood as areas divided into three flat plates.
  • the first partial surface 311a of the first partial magnet 311, the second partial surface 312a of the second partial magnet 312, and the third partial surface 313a of the third partial magnet 313 are It is magnetized with the same polarity.
  • the first to third partial surfaces 311a, 312a, and 313a of the first to third partial magnets 311, 312, and 313 are magnetized to the north pole, and the first to third portions.
  • Back surfaces 311b, 312b, and 313b of the magnets 311, 312, and 313 may be magnetized to the S pole.
  • the first to third partial magnets 311, 312, and 313 may have a magnetic strength of the first partial surface 311a of the first partial magnet 311 and the second partial surface 312a of the second partial magnet 312.
  • the magnet is magnetized to have a value greater than the magnet strength of the third partial surface 313a of the third partial magnet 313.
  • the magnet strength of the second partial surface 312a of the second partial magnet 312 and the magnet strength of the third partial surface 313a of the third partial magnet 313 may be equal to each other. It is well known in the art that by varying the magnetic composition of the magnetic material or by changing the strength of the magnetic field applied when magnetizing, the magnetic strength of the magnetic material can be changed.
  • the magnetization as described above may be achieved by changing the magnetic composition of the first partial magnet 311 and the magnetic composition of the second and third partial magnets 312 and 313. That is, when the first partial magnets 311 having different magnetic compositions and the second and third partial magnets 312 and 313 are combined in a flat plate shape and then magnetized by applying an external magnetic field, the first partial magnets 311 May be magnetized to have a value greater than that of the second partial magnet 312 and the third partial magnet 313.
  • the first partial magnets 311 and the second and third partial magnets 312 and 313 may be individually magnetized and then combined into a flat plate shape.
  • first partial magnets 311 and the second and third partial magnets 312 and 313 are individually magnetized in different magnet strengths and then combined into a flat plate shape, the first partial magnets 311 and the second and third magnets 311 and 313 are magnetized.
  • the third partial magnets 312 and 313 may have the same magnetic composition.
  • the first boundary surface 310A of the first partial magnet 311 and the second partial magnet 312 is inclined at an obtuse or perpendicular angle ⁇ 1 with respect to the first partial surface 311a of the first partial magnet 311.
  • the second boundary surface 310B of the first partial magnet 311 and the third partial magnet 313 is also obtuse or perpendicular to the first partial surface 311a of the first partial magnet 311. It may be formed to be inclined. That is, when viewed in a cross section perpendicular to the longitudinal direction (X-axis direction), the first partial magnets 311 of the first permanent magnets 310 have a trapezoidal shape that becomes narrower in the vertically upward direction (+ Z-axis direction). Can be.
  • the width W3 of the first partial surface 311a of the first partial magnet 311 may be smaller than the width W4 of the fourth partial surface 321a of the fourth partial magnet 321.
  • the entire width of the first permanent magnets 310 is shown to be longer than the overall width of the second permanent magnets 320 in FIGS. 12 to 15, the present invention is not limited thereto.
  • one of the first and second permanent magnets 310 and 320 may have a different width. Longer than the width is preferable, and by reducing the weight of the second permanent magnet 320 can reduce the size of the floating force required.
  • the magnetic field line distribution of the first permanent magnet 310 is , It has a distribution similar to the magnetic force line distribution of the first permanent magnet 110 of the embodiment described with reference to FIG.
  • the second permanent magnet 320 is a magnetic levitation body located vertically above the first permanent magnet 310 (+ Z axis direction).
  • the second permanent magnet 320 may also have a flat plate shape.
  • the second permanent magnets 320 may include a fourth partial magnet 321 extending in the longitudinal direction (X-axis direction), and fifth partial magnets 322 and the first and second partial magnets 322 located on the left and right sides of the fourth partial magnet 321. It may include six partial magnets (323).
  • the fourth partial surface 321a of the fourth partial magnet 321, the fifth partial surface 322a of the fifth partial magnet 322, and the sixth partial surface 323a of the sixth partial magnet 323 As shown in the figure, it can be understood as areas divided into three flat plates.
  • the fourth partial surface 321a of the fourth partial magnet 321, the fifth partial surface 322a of the fifth partial magnet 322, and the sixth partial surface 323a of the sixth partial magnet 323 It is magnetized with the same polarity.
  • the fourth to sixth partial surfaces 321a, 322a, and 323a of the fourth to sixth partial magnets 321, 322, and 323 are magnetized to the north pole, and the fourth to sixth portions.
  • Back surfaces 321b, 322b, and 323b of the magnets 321, 322, and 323 may be magnetized to the S pole.
  • the fourth to sixth partial magnets 321, 322, and 323 have a magnetic strength of the fourth partial surface 321a of the fourth partial magnet 321 and the fifth partial surface 322a of the fifth partial magnet 322.
  • the magnet is magnetized to have a smaller value than the magnet strength of the sixth partial surface 323a of the sixth partial magnet 323.
  • Magnetic strength of the fifth partial surface 322a of the fifth partial magnet 322 and magnetic strength of the sixth partial surface 323a of the sixth partial magnet 323 may be the same.
  • the magnetization is achieved by changing the magnetic composition of the fourth partial magnet 321 and the magnetic composition of the fifth and sixth partial magnets 322 and 323, or the fourth to sixth partial magnets ( 321, 322, 323 can be achieved by individually magnetizing and then combining them into a flat plate shape.
  • the third boundary surface 320A of the fourth partial magnet 321 and the fifth partial magnet 322 is inclined at an obtuse or perpendicular angle ⁇ 3 with respect to the fifth partial surface 322a of the fifth partial magnet 322.
  • the fourth boundary surface 320B of the fourth partial magnet 321 and the sixth partial magnet 323 is also obtuse or perpendicular to the sixth partial surface 323a of the sixth partial magnet 323. It may be formed to be inclined. That is, when viewed in a cross section perpendicular to the longitudinal direction (X-axis direction), the fourth partial magnet 321 of the second permanent magnet 320 has a trapezoidal shape that becomes narrower in the vertically upward direction (+ Z-axis direction). Can be.
  • the magnetic force line distribution of the second permanent magnet 320 is 6 has a distribution similar to that of the magnetic force line of the second permanent magnet 120 of the embodiment described with reference to FIG. 6.
  • the magnetic force line distribution of the second permanent magnet 120 may be understood as a vector sum of the magnetic force lines of the fourth to sixth partial magnets 321, 322, and 323.
  • the magnetic force lines B emitted from the fifth partial surface 322a of the fifth partial magnet 322 and the sixth partial surface 323a of the sixth partial magnet 323 become more divergent toward the edges.
  • the magnetic force line B emitted from the fourth partial surface 321a of the fourth partial magnet 321 also becomes stronger as it is diverted toward the edge.
  • the magnetic strength of the fifth partial surface 322a of the fifth partial magnet 322 and the sixth partial surface 323a of the sixth partial magnet 323 is the fourth partial surface 321a of the fourth partial magnet 321. Since it is relatively larger than the magnet strength of, the magnetic field line B near the boundary between the fourth partial surface 321a of the fourth partial magnet 321 and the fifth partial surface 322a of the fifth partial magnet 322 is It has a tendency toward the center of the second permanent magnet 320.
  • the magnetic force line B near the boundary between the fourth partial surface 321a of the fourth partial magnet 321 and the sixth partial surface 323a of the sixth partial magnet 323 is the second permanent magnet 320. It tends to be downward towards the center of the. That is, under the second permanent magnet 320, the magnetic force line B converges toward the center (that is, the magnetic force line convergence region 326. Of course, the magnetic force line B that has passed through the magnetic force line convergence region 326). ) Will diverge and return to the rear surfaces 321b, 322b, and 323b of the second permanent magnet 320 to form a closed loop.
  • the position at which the magnetic field line convergence region 326 is formed is a relationship between the magnetic strength of the fourth partial magnet 321 and the magnetic strength of the fifth partial magnet 322 and the sixth partial magnet 323, and the first and second boundary surfaces 320A. , 320B) may vary depending on the inclination angles ⁇ 3 and ⁇ 4.
  • the magnet strength of the fifth partial magnet 322 and the magnet strength of the sixth partial magnet 323 are different from each other, or the inclination angles ⁇ 3 and ⁇ 4 of the first and second boundary surfaces 320A and 320B are different from each other.
  • the magnetic force line convergence region 326 may be eccentrically formed from the lower center of the second permanent magnet 320 to one side.
  • the term 'converge' is used when the fourth to sixth partial surfaces 321a, 322a, and 323a of the second permanent magnet 320 are magnetized to the north pole (that is, the magnetic force line ( B) is used as a reference when exiting from the fourth to sixth partial surfaces 321a, 322a, and 323a). If the fourth to sixth partial surfaces 321a, 322a, and 323a of the second permanent magnet 320 are magnetized to the S pole, the direction of the magnetic force lines by definition of the S pole is opposite to that of the above description.
  • the magnetic force acts as a repulsive force, and thus may be understood as substantially the same magnetic force line distribution. Therefore, the magnetic field line convergence region when the fourth to sixth partial surfaces 321a, 322a, and 323a of the second permanent magnet 320 are magnetized to the S pole within a range that is not confusing to those skilled in the art.
  • the position may be understood to be the same as the position of the magnetic field line convergence region 326 when magnetized to the north pole.
  • the second permanent magnet 320 is injured by the floating force 331 due to the magnetic repulsion with the first permanent magnet 310.
  • the floating force received by the second permanent magnets 320 may include the magnetic repulsive force between the first partial surface 311a of the first permanent magnet 310 and the fourth partial surface 321a of the second permanent magnet 320. Together, magnetic repulsion between the second and third partial surfaces 312a and 313a of the first permanent magnet 310 and the fifth and sixth partial surfaces 322a and 323a of the second permanent magnet 320). Can be obtained by
  • the floating equilibrium position of the second permanent magnet 320 may be determined at the position where the balance of the force of the floating force 331 and the weight of the second permanent magnet 320 is made, and the center of the lower portion of the second permanent magnet 320 is lower.
  • the first partial surface 311a of the first permanent magnet 310 is determined to be located in the magnetic force line converging region 326 located below or spaced downward from the magnetic line converging region 326. Since the first partial surface 311a of the first permanent magnet 310 has a stronger magnetic force than the second and third partial surfaces 312a and 313a, the magnetic pole toward the first partial surface 311a is the second permanent magnet ( The main contribution will be made in magnetic interaction with 310).
  • the second permanent magnet 320 is a left side reaction force 332 in the left direction (+ Y axis direction) and a right side reaction force 333 in the right direction ( ⁇ Y axis direction) by magnetic repulsion with the first partial surface 312a. ) Will be received.
  • the second permanent magnet 320 when the second permanent magnet 320 is deflected to the left direction (-Y axis direction) with respect to the center line 316 of the first permanent magnet 310, the second permanent magnet ( The right side repulsive force 332 'that pushes the 320 in the right direction is greater than the left side repulsive force 333' that pushes the second permanent magnet 320 in the left direction, and thus, in the right direction (+ Y axis direction). Lateral restoring force 327 is generated.
  • the second permanent magnet 320 when the second permanent magnet 320 is moved in the left and right direction ( ⁇ Y axis direction) with respect to the center line 316 of the first permanent magnet 310, the first permanent magnet 310 and the second permanent magnet ( As the left and right side reaction forces 332 ′ and 333 ′ acting between 320 are changed, the second permanent magnet 320 receives the side restoring force 327 to return to the left and right equilibrium position.
  • the magnetic force line by the second permanent magnet 320 has a direction that converges near the fourth partial surface 321a, when the magnetic levitation apparatus 300 of the present embodiment is used as a transfer device, as described below, Can be side controlled.
  • the magnetic levitation apparatus 300 of this embodiment does not have a physical structure for restraining the left and right movement of the second permanent magnet 320 between the first permanent magnet 310 and the second permanent magnet 320. Therefore, when the second permanent magnet 320 receives an external force in the lateral direction greater than the side restoring force by the left and right side repulsive forces 335 'and 336', the second permanent magnet 320 is the first permanent magnet 310 or the first. 2 It may be moved in the left or right direction without damaging the permanent magnet (320).
  • first and second boundary surfaces 310A and 310B of the first permanent magnet 310 or the third and fourth boundary surfaces 320A and 320B of the second permanent magnet 320 are planar. It does not exclude the case of curved surface.
  • an additional magnet may be attached to the rear surfaces 311b, 312b and 313b of the first permanent magnet 310 and / or the rear surfaces 321b, 322b and 323b of the second permanent magnet 320.
  • the case where the inclination angles ⁇ 1 and ⁇ 2 of the first and second boundary surfaces 310A and 310B of the first permanent magnet 310 of the present embodiment are the same as each other is described as an example, but is not limited thereto.
  • the angles ⁇ 1 and ⁇ 2 of the first and second outer surfaces 312 and 313 may be different from each other.
  • the cross-sectional shape of each of the first and second permanent magnets 310 and 320 is symmetrical in the lateral direction (Y-axis direction), so that the left side reaction force and the right side reaction force are designed to be equal to each other at the center position. It is not limited to this. In some cases, the left side reaction force and the right side reaction force may be designed to be different from each other.
  • cross-sectional shapes of the first and second permanent magnets 310 and 320 may be asymmetric in the lateral direction.
  • the first and second permanent magnets 310 and 320 are described as examples having a flat plate shape, but the flat plate shape is not limited to the case where the surface is a smooth plane.
  • some of the first to third partial magnets 311, 312, and 313 of the first permanent magnet 310 may slightly enter or protrude.
  • the first partial surface 311a of the first partial magnet 311 slightly protrudes from the second and third partial surfaces 312a and 313a of the neighboring second and third partial magnets 312 and 313. Or it may be a bit pulled in.
  • some of the fourth to sixth partial magnets 321, 322, and 323 of the second permanent magnet 320 may be slightly protruded.
  • the fourth partial surface 321a of the fourth partial magnet 321 may slightly protrude from the fifth and sixth partial surfaces 322a and 323a of the neighboring fifth and sixth partial magnets 322 and 323. Or it may be a bit pulled in. In this case, the protruding or drawing of the first partial magnet 311 of the first permanent magnet 310 and the protruding or drawing of the fourth partial magnet 321 of the second permanent magnet 320 need not correspond to each other.
  • the second and third partial surfaces 312a and 313a may be slightly inclined with respect to the first partial surface 311a.
  • the second and third partial surfaces 312a and 313a may be formed to be symmetrically inclined toward the first partial surface 311a.
  • the fifth and sixth partial surfaces 322a, 323a may be slightly inclined with respect to the fourth partial surface 321a.
  • the fifth and sixth partial surfaces 322a and 323a may be formed to be symmetrically inclined toward the fourth partial surface 321a.
  • the inclination directions of the second and third partial surfaces 312a and 313a of the first permanent magnet 310 and the inclination directions of the fifth and sixth partial surfaces 322a and 323a of the second permanent magnet 320 are There is no need to correspond.
  • 16 is a schematic perspective view of a magnetic levitation apparatus 400 according to another embodiment of the present invention.
  • the magnetic levitation device 400 of the present embodiment includes a first permanent magnet 410 and a second permanent magnet 420.
  • the first permanent magnet 410 is located vertically above the second permanent magnet 420 (+ Z axis direction) and is floated by the magnetic levitation force. That is, in this embodiment, the first permanent magnet 410 corresponds to the magnetically levitated body, and the second permanent magnet 420 serves as a support for supporting the magnetic levitation of the first permanent magnet 410.
  • the first and second permanent magnets 410 and 420 are cases where the upper and lower positions of the first and second permanent magnets 310 and 320 of the magnetic levitation apparatus 300 of the above-described embodiment are changed.
  • the second permanent magnet 420 magnetizes as the magnetic strength of the fourth partial magnet 421 is smaller than the magnetic strength of the fifth and sixth partial magnets 422 and 423.
  • the magnetic field line convergence region is formed above the fourth partial surface 421a of the fourth partial magnet 421 of the second permanent magnet 420.
  • the first partial surface 411a of the first partial magnet 411 is positioned to be spaced apart from the magnetic force line converging region or upwards by a predetermined distance
  • the first permanent magnet 410 is the second permanent magnet 420. In the state spaced apart by the magnetic repulsive force to receive the vertical flotation force in the vertical direction and the horizontal side restoring force at the same time.
  • FIG. 17 is a schematic perspective view of a magnetic levitation apparatus 500 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 500 of the present embodiment includes a first permanent magnet 510 and a second permanent magnet 520.
  • the second permanent magnet 520 is located vertically above the first permanent magnet 510 (+ Z axis direction) and is floated by the magnetic levitation force. That is, in the present embodiment, the first permanent magnet 510 corresponds to the support, and the second permanent magnet 520 serves as a magnetic flotation body.
  • the first permanent magnet 510 may be the first permanent magnet 310 in the embodiment described with reference to FIGS. 12 to 15.
  • the second permanent magnet 520 may be the second permanent magnet 120 in the embodiment described with reference to FIG. 6.
  • the width of the first partial surface 511 of the first partial magnet 511 of the first permanent magnet 51 may be smaller than the width of the inlet of the concave groove 524 of the second permanent magnet 520.
  • the bottom surface 521 and the first and second inner surfaces 522 and 523 constituting the concave groove 524 of the second permanent magnet 520 may be magnetized to the north pole. have.
  • the inner surfaces 521, 522, 523 of the concave groove 524 become magnetic poles of the same polarity (N-pole), they are formed perpendicularly to the inner surfaces 521, 522, 523 of the concave groove 524.
  • the magnetic force line B is converged near the inlet of the concave groove 524 and then goes out of the concave groove 524, the number of magnetic force lines B per unit area in the vicinity of the inlet of the concave groove 524, that is, magnetic flux density becomes dense, and the magnetic field line convergence region 526 can be located inside or near the entrance of the concave groove 524. Therefore, when the first partial surface 511a of the first partial magnet 511 of the first permanent magnet 510 is positioned in the magnetic field line convergence region, the second permanent magnet 520 is connected to the first permanent magnet 510. In the spaced apart state, the magnetic repulsive force receives the floating force 531 in the vertical direction and the side reaction forces 532 and 533 in the horizontal direction. When the second permanent magnet 520 is deflected in one direction from the center 516 of the first permanent magnet 510, the difference in the horizontal repulsive forces 532 and 533 acts as a side restoring force.
  • FIG. 18 is a schematic perspective view of a magnetic levitation apparatus 600 according to another embodiment of the present invention.
  • the magnetic levitation device 600 of the present embodiment includes a first permanent magnet 610 and a second permanent magnet 620.
  • the first permanent magnet 610 is located vertically above the second permanent magnet 620 (+ Z axis direction) and is floated by the magnetic levitation force.
  • the first and second permanent magnets 610 and 620 are cases where the upper and lower positions of the first and second permanent magnets 510 and 520 of the magnetic levitation apparatus 500 of the embodiment described with reference to FIG. 17 are changed. That is, in the present embodiment, the first permanent magnet 610 corresponds to the magnetically levitated body, and the second permanent magnet 620 serves as a support for supporting the magnetic levitation of the first permanent magnet 610.
  • the permanent magnet 610 receives the floating force in the vertical direction and the side restoring force in the horizontal direction at the same time by the magnetic repulsion in a state spaced apart from the second permanent magnet 620.
  • FIG. 19 is a schematic perspective view of a magnetic levitation apparatus 700 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 700 of the present embodiment includes a first permanent magnet 710 and a second permanent magnet 720.
  • the second permanent magnet 720 is positioned vertically above the first permanent magnet 710 (+ Z axis direction) and is floated by the magnetic levitation force. That is, in the present embodiment, the first permanent magnet 710 corresponds to the support, and the second permanent magnet 720 serves as a magnetically levitated body.
  • the first permanent magnet 710 may be the first permanent magnet 110 in the embodiment described with reference to FIG. 5.
  • the second permanent magnet 720 may be the second permanent magnet 320 in the embodiment described with reference to FIGS. 12 to 15.
  • the width of the peak surface 711 of the first permanent magnet 710 may be smaller than the width of the fourth partial surface 721a of the second permanent magnet 720.
  • the second permanent magnet 720 magnetizes as the magnetic strength of the fourth partial magnet 721 is smaller than the magnetic strength of the fifth and sixth partial magnets 722 and 723.
  • a magnetic field line convergence region is formed below the fourth partial surface 721a of the fourth partial magnet 721 of the second permanent magnet 720. Accordingly, the first partial surface 711a of the first partial magnet 711 of the first permanent magnet 710 in the magnetic field line convergence region of the second permanent magnet 720 by properly determining the floating position of the second permanent magnet 720. ),
  • the second permanent magnet 720 is spaced apart from the first permanent magnet 710 by the magnetic repulsive force and the vertical flotation force 731 and the horizontal repulsion force 732 and 733. Receive.
  • the difference between the side repulsive forces 732 and 733 in the horizontal direction acts as a side restoring force.
  • FIG. 20 is a schematic perspective view of a magnetic levitation apparatus 800 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 800 of the present embodiment includes a first permanent magnet 810 and a second permanent magnet 820.
  • the first permanent magnet 810 is located vertically above the second permanent magnet 820 (+ Z axis direction) and is floated by the magnetic levitation force.
  • the first and second permanent magnets 810 and 820 are cases where the upper and lower positions of the first and second permanent magnets 710 and 720 of the magnetic levitation apparatus 700 of the embodiment described with reference to FIG. 19 are changed. That is, in the present embodiment, the first permanent magnet 810 corresponds to the magnetically levitated body, and the second permanent magnet 820 serves as a support for supporting the magnetic levitation of the first permanent magnet 810.
  • the first permanent magnet 810 is In the state spaced apart from the second permanent magnet 820 is simultaneously received the floating force in the vertical direction and the side restoring force in the horizontal direction by the magnetic repulsive force.
  • FIG. 21 is a schematic perspective view of a magnetic levitation apparatus 900 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 900 of the present embodiment includes a first permanent magnet 910, a second permanent magnet 920, and a first auxiliary magnet 930.
  • the first permanent magnet 910 and the second permanent magnet 920 may be the first permanent magnet 110 and the second permanent magnet 120 in the embodiment described with reference to FIGS. 4 to 10.
  • the first permanent magnet 910 may have a trapezoidal shape that becomes narrower toward the peak surface 911 when viewed in a cross section perpendicular to the longitudinal direction (X-axis direction).
  • the first permanent magnet 910 is magnetized so that the peak surface 911 becomes the magnetic pole surface of the N pole or the S pole.
  • the rear surface 915 of the peak surface 911 of the first permanent magnet 910 becomes a polarity opposite to the polarity of the peak surface 911.
  • the second permanent magnet 920 is positioned vertically above the first permanent magnet 910 (+ Z-axis direction) to serve as a magnetic floating body injured by the magnetic levitation force. As described with reference to FIG. 6, an area in which magnetic force lines generated at inner surfaces 921, 922, and 923 constituting the concave groove 924 of the second permanent magnet 920 converges within the concave groove 924. It can be located near the entrance.
  • the first auxiliary magnet 930 is a flat permanent magnet, which is disposed on the rear surface 915 of the first permanent magnet 910 and supports the second permanent magnet 920 together with the first permanent magnet 910. Plays the role of.
  • a portion of the upper surface 931 of the first auxiliary magnet 930 is located outside the first permanent magnet 910 to face the second permanent magnet 920. That is, the width of the first auxiliary magnet 930 is larger than the width of the lower end of the first permanent magnet 910.
  • the upper surface 931 of the first auxiliary magnet 930 is magnetized to a polarity opposite to that of the rear surface 915 of the first permanent magnet 910, so that the first auxiliary magnet 930 is the first permanent magnet 910. It can be magnetically coupled with.
  • the first permanent magnet 910 and the first auxiliary magnet 930 may be additionally fixed by an adhesive or the like.
  • the inner surfaces 921, 922, and 923 of the peak surface 911 of the first permanent magnet 910 and the concave groove 924 of the second permanent magnet 920 are magnetized with the same polarity to form the second permanent magnet.
  • the 920 receives the floating force in the vertical direction and the side restoring force in the horizontal direction by magnetic repulsion while being spaced apart from the first permanent magnet 910. Furthermore, as the line of magnetic force converges in the vicinity of the concave groove 924 of the second permanent magnet 920, the side restoring force received by the second permanent magnet 920 may be controlled in a more stable side direction.
  • first and second lower surfaces 928 and 929 having the concave groove 924 of the second permanent magnet 920 are positioned to face the upper surface 931 of the first auxiliary magnet 930.
  • the first and second lower surfaces 928 and 929 having the concave groove 924 of the permanent magnet 920 are also magnetized with the same polarity as the upper surface 931 of the first auxiliary magnet 930, thereby allowing the first permanent
  • the magnet 910 may receive additional floating force in the vertical direction by magnetic repulsion in a state spaced apart from the first auxiliary magnet 930. Thanks to this additional flotation force, the burden of the magnet strength required on the second permanent magnet 920 is reduced, and the shape of the concave groove 924 associated with the magnetic field line convergence region and the degree of freedom of design for magnetization can be improved. have.
  • the first auxiliary magnet 930 has a width W6 longer than the width W5 of the width direction (Y direction) of the second permanent magnet 920, so that the second permanent magnet 920 has a width direction (Y direction). Even if it moves a predetermined distance can be to stably float.
  • the relationship of the width W6 of the first auxiliary magnet 930 to the width W5 of the second permanent magnet 920 is such that the width of the second permanent magnet 920 is allowed to move in the width direction (Y direction). It can be determined according to.
  • the first auxiliary magnet 930 is coupled to the first permanent magnet 910 as an example, but is not limited thereto.
  • the first auxiliary magnet 930 is a permanent magnet (220, 310, 420, 510, 620 located below the magnetic levitation apparatus 200, 300, 400, 500, 600, 700, 800 of the above embodiments) , 710 and 820 may be attached to the bottom surface.
  • FIG. 22 is a schematic perspective view of a magnetic levitation apparatus 1000 according to another embodiment of the present invention.
  • the magnetic levitation apparatus 1000 includes a first permanent magnet 1010, a second permanent magnet 1020, and a second auxiliary magnet 1030.
  • the first permanent magnet 1010 and the second permanent magnet 1020 may be the first permanent magnet 310 and the second permanent magnet 320 in the embodiment described with reference to FIGS. 12 to 15.
  • the first permanent magnet 1010 includes a first partial magnet 1011 extending in the longitudinal direction (X-axis direction), a second partial magnet 1012 and a third position positioned at left and right sides of the first partial magnet 1011. It may have a flat plate shape including the partial magnet 1013, the shape of the first to third partial magnets (1011, 1012, 1013), magnetic strength, and the magnetic pole direction of the first permanent magnet 310 with reference to FIG. May be substantially the same.
  • the second permanent magnet 1020 may include a fourth partial magnet 1021 extending in the longitudinal direction (X-axis direction), a fifth partial magnet 1022 positioned on the left and right sides of the fourth partial magnet 1021, and It may have a flat plate shape including the sixth partial magnet (1023), the shape of the fourth to fifth partial magnets 1021, 1022, 1023, magnetic strength, and magnetic pole direction of the second permanent magnet with reference to FIG. Substantially the same as 320.
  • the second auxiliary magnet 1030 is a flat permanent magnet and is attached to the rear surface 1020b of the second permanent magnet 1020.
  • the width W7 of the second auxiliary magnet 1030 may be greater than the width W8 of the second permanent magnet 1020 and may be smaller than the width W9 of the first permanent magnet 1010. Accordingly, the lower surface 1030a of the second auxiliary magnet 1030 is outside the area attached to the second permanent magnet 1020 and faces the first permanent magnet 1010.
  • the lower surface 1030a of the second auxiliary magnet 1030 is magnetized with a polarity opposite to that of the back surface 1020b of the second permanent magnet 1020, so that the second auxiliary magnet 1030 is the second permanent magnet 1020. It can be magnetically coupled with.
  • the second permanent magnet 1020 and the second auxiliary magnet 1030 may be additionally fixed by an adhesive or the like.
  • the upper surface 1010a of the first permanent magnet 1010 and the lower surface 1020a of the second permanent magnet 1020 are magnetized with the same polarity, so that the second permanent magnet 1020 is spaced apart from the first permanent magnet 1010.
  • the magnetic repulsive force receives the vertical floating force and the horizontal side restoring force at the same time.
  • the second permanent magnet 1020 magnetizes the magnetic strength of the fourth partial magnet 1021 to be smaller than that of the fifth and sixth partial magnets 1022 and 1023. Accordingly, as the line of converging magnetic force lines is formed below the fourth partial magnet 1021 of the second permanent magnet 1020, the side restoring force received by the second permanent magnet 1020 is in the direction of convergence. Can be controlled.
  • the flotation force caused by magnetic repulsion between the first and second permanent magnets 1010 and 1020 may also be formed.
  • the magnet is magnetized with the same magnetic pole as the upper surface 1010a of the permanent magnet 1010 to generate additional flotation force in the magnetic repulsive force. Thanks to this additional flotation force, the burden of magnet strength required on the second permanent magnet 1020 is reduced, and the shape and magnetization of the fourth to sixth partial magnets 1021, 1022, and 2023 associated with the magnetic field line convergence region are reduced. The degree of freedom of design can be improved.
  • the second auxiliary magnet 1030 is coupled to the second permanent magnet 1020 as an example, but is not limited thereto.
  • the second auxiliary magnet 1030 is a permanent magnet 120, 210, 410, 520, 610 located above the magnetic levitation apparatus (100, 200, 400, 500, 600, 700, 800) of the above embodiments , 720, 810 may be attached to the upper surface.
  • the first auxiliary magnet 930 and the second auxiliary magnet 1030 of the present embodiment are the first and the first of the magnetic levitation apparatus 100, 200, 400, 500, 600, 700, 800. 2 may be attached to the permanent magnet at the same time.
  • the magnetic levitation apparatus 1100 includes a support 1130, a first permanent magnet 1110 extending in a longitudinal direction (X-axis direction) on an upper surface of the support 1130, and A second permanent magnet 1120 spaced apart and opposed to the first permanent magnet 1110, and a floating body 1150 attached to an upper surface of the second permanent magnet 1120.
  • the support 1130 is provided with a third auxiliary magnet 1140, the fourth auxiliary magnet 1160 spaced apart and opposed to the third auxiliary magnet 1140 is attached to the lower surface to the floating body 1150.
  • the first and second permanent magnets 1110 and 1120 are the first and second permanent magnets of the magnetic levitation apparatuses 100, 200, 300, 400, 500, 600, 700, 800, 900 and 1000 of the above-described embodiments.
  • the first auxiliary magnet 930 or the second auxiliary magnet 1030 may be coupled thereto.
  • the first permanent magnet 1110 is a permanent magnet with a protruding peak 1111
  • the second permanent magnet 1120 is a permanent magnet having a concave groove 1124. Can be.
  • the first and second permanent magnets 1110 and 1120 give the second permanent magnets 1120 a side restoring force together with the flotation force 1171.
  • the third auxiliary magnet 1140 may include left and right third auxiliary magnets 1141 and 1142 disposed on both sides of the first permanent magnet 1110.
  • the left and right third auxiliary magnets 1141 and 1142 may be formed to extend in the longitudinal direction (X-axis direction).
  • the fourth auxiliary magnet 1160 may include left and right fourth auxiliary magnets 1161 and 1162 disposed on both sides of the second permanent magnet 1120.
  • the left and right fourth auxiliary magnets 1161 and 1162 may be formed to extend in the longitudinal direction (X-axis direction).
  • Each of the left and right fourth auxiliary magnets 1161 and 1162 may have a width shorter than that of each of the left and right third auxiliary magnets 1141 and 1142.
  • the present embodiment need not be limited to this.
  • the left and right third auxiliary magnets 1141 and 1142 and the left and right third auxiliary magnets 1141 and 1142 are respectively reduced.
  • the width of any one of the fourth auxiliary magnets 1161 and 1162 is longer than the width of the other, and the width of each of the left and right fourth auxiliary magnets 1161 and 1162 is shown in FIG. 23 in order to reduce the weight of the upper side. As shown, it may be formed shorter than the width of each of the left and right third auxiliary magnets (1141, 1142).
  • the third auxiliary magnet 1140 and the fourth auxiliary magnet 1160 have opposing surfaces magnetized by the same magnetic pole (for example, the N pole as shown in FIG. 23), so that an additional flotation force 1174 due to magnetic repulsion is applied. 1175) may be generated. Thanks to this additional flotation force, it is possible to improve the shape of the first and second permanent magnets 1110 and 1120 and the degree of freedom of design for magnetization.
  • the third and fourth auxiliary magnets 1140 and 1160 are provided as two examples, but the present invention is not limited thereto.
  • one or more third and fourth auxiliary magnets 1140 and 1160 may be provided.
  • any one of the first auxiliary magnet 930, the second auxiliary magnet 1030, and the third and fourth auxiliary magnets 1140 and 1160 which give additional floating force may be used in part or in whole. It may be.
  • the first auxiliary magnet 930, the second auxiliary magnet 1030, or the third and fourth auxiliary magnets 1140 and 1160 which give additional floating force are permanent.
  • the case of a magnet has been described as an example, but may be an electromagnet.
  • the additional floating force may be electrically controlled to control the total floating force. will be.
  • FIG. 24 is a chart in which the magnetic levitation device of one embodiment according to the present invention (specifically, the embodiment with reference to FIG. 21) is actually manufactured to measure the floating force and side reaction force according to the floating height of the second permanent magnet.
  • the magnetic repulsive force that is, the flotation force
  • the lift height of the second permanent magnet will be determined at the point where the weight of the second permanent magnet is balanced with the lift force.
  • the side reaction force applied to one side of the second permanent magnet is gradually reduced to 9mm height and then can be seen to increase again.
  • the vicinity of the height of 9 mm can be understood as the aforementioned magnetic force line convergence region. Therefore, it will be understood that by setting the floating height of the second permanent magnet to the vicinity of the height of 9 mm, it is possible to secure the side restoring force restraining the movement in the lateral direction of the second permanent magnet.
  • FIG. 25 is a schematic plan view of the magnetic levitation conveying apparatus 1200 according to another embodiment of the present invention
  • Figure 26 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus 1200 of Figure 25 along the line I-II
  • 27 is a schematic front view of the magnetic levitation conveying apparatus 1200 of FIG. 25.
  • the magnetic levitation conveying apparatus 1200 includes a rail 1210 for magnetic levitation and a conveying body 1220 on which an object to be processed is mounted.
  • the rail 1210 is formed to extend in the longitudinal direction (X-axis direction).
  • the transfer member 1220 may include a body 1221 on which the target object can be mounted, and a floating magnet 1222 provided at a position opposite to the rail 1210 of the lower surface of the body 1221.
  • the magnetic levitation apparatus 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, or 1100 may be applied to the rail 1210 and the carrier 1220.
  • the rail 1210 and the floating magnet 1222 are the first and second of the magnetic levitation apparatus 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100 of the above-described embodiments.
  • Permanent magnets, or auxiliary magnets may be combined to them.
  • the rail 1210 may be the first permanent magnet 110 described with reference to FIGS. 4 through 11
  • the floating magnet 1222 may be the second permanent magnet 120 described with reference to FIGS. 4 through 11. have.
  • the magnetic field line convergence region (see 126 in FIG. 6) formed by the floating magnet 1222 is at the height where the peak surface (see 111 in FIG. 4) of the rail 1210 is located, whereby the conveying body 1220 is In the state spaced apart from the injured magnet 1222 by the magnetic repulsive force in the vertical direction and the horizontal side restoring force at the same time.
  • the magnetic levitation conveying apparatus 1200 of the present embodiment may be a semiconductor manufacturing apparatus.
  • the object to be processed may be, for example, a semiconductor substrate, a glass substrate, a plastic substrate, or the like.
  • the housing 1290 of the magnetic levitation feeder 1200 may be sealed by the inlet switch 1240 and the outlet switch 1270.
  • the space enclosed by the inlet switch 1240 and the outlet switch 1270 of the housing 1290 may be understood as a chamber in which semiconductor processing processes such as deposition and etching are performed.
  • the rail 1210 may be provided in a sealed interior by the inlet switch 1240 and the outlet switch 1270 of the housing 1290.
  • the waiting unit 1230 In front of the inlet switch 1240, the waiting unit 1230 is waiting for the object, and the loading unit 1280 on which the object is loaded may be positioned outside the outlet switch 1270.
  • the conveyance of the conveying body 1220 that is, the conveying from the atmospheric portion 1230 onto the rail 1210, the conveying on the rail 1210, and the conveying from the rail 1210 to the loading portion 1280 are known conveying means (eg, For example, it may be made using a contact transfer using a jig or the like, or a non-connected transfer using an electromagnet.
  • the conveying member 1220 is in the standby state 1230, and when the inlet switch 1240 is opened, it is sequentially moved on the rail 1210, and moves on the rail 1210.
  • the conveying member 1220 is conveyed along the rail 1210 while simultaneously receiving the floating force and the side restoring force by the magnetic repulsive force with the rail 1210.
  • semiconductor processing such as deposition and etching is performed on the workpiece.
  • the outlet switch 1270 is opened and loaded in the stacking unit 1280.
  • Reference numerals 1231 and 1281 denote bearings placed on the atmospheric portion 1230 and the loading portion 1280.
  • FIG. 28 is a schematic plan view of the magnetic levitation conveying apparatus 1300 according to another embodiment of the present invention
  • Figure 29 is a schematic side cross-sectional view of the magnetic levitation conveying apparatus 1300 of Figure 28 along the line I-II
  • 30 is a schematic front view of the magnetic levitation conveying apparatus 1300 of FIG.
  • the magnetic levitation conveying apparatus 1300 of the present embodiment includes a rail 1310 for magnetic levitation and a conveying body 1320 for mounting an object to be processed.
  • the conveying body 1320 may include a body 1321 capable of mounting the object to be processed and a floating magnet 1322 provided at a position opposite to the rail 1310 of the lower surface of the body 1321.
  • the housing 1390 of the magnetic levitation conveying apparatus 1300 may be sealed by the inlet switch 1340 and the outlet switch 1370.
  • the waiting unit 1330 In front of the inlet switch 1340, the waiting unit 1330 is waiting for the object, and the loading unit 1380 on which the object is loaded may be positioned outside the outlet switch 1370.
  • the space enclosed by the inlet switch 1340 and the outlet switch 1370 of the housing 1390 may be understood as a chamber 1360 in which semiconductor processing processes such as deposition and etching are performed.
  • the chamber 1360 may be a plurality of spaces that are spatially separated by the intermediate attenuator 1350.
  • the rail 1310 may be provided in the chambers 1360.
  • the conveyance of the conveying body 1320 that is, the conveyance from the atmospheric section 1330 onto the rail 1310, the conveying on the rail 1310, the conveying from the rail 1310 to the loading section 1380, is a known conveying means (e.g., For example, it may be made using a contact transfer using a jig or the like, or a non-connected transfer using an electromagnet.
  • the rail 1310 and the conveying body 1320 of the present embodiment have the magnetic levitation apparatus 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100 may be applied. That is, the rail 1310 and the floating magnet 1322 are the first and second of the magnetic levitation apparatus 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 1100 of the above-described embodiments. Permanent magnets, or auxiliary magnets may be combined to them.
  • the rail 1310 may be the first permanent magnet 110 of the magnetic levitation apparatus 100 described with reference to FIGS. 4 to 11, and the floating magnet 1322 is illustrated in FIG. 4.
  • the second permanent magnet 120 of the magnetic levitation apparatus 100 described with reference to FIG. 11 may be used.
  • the magnetic force line convergence region (see 126 in FIG. 6) formed by the floating magnet 1322 is at the height where the peak surface (see 111 in FIG. 4) of the rail 1310 is located, whereby the conveying member 1320 is In the state spaced apart from the injured magnet 1322, the magnetic force in the vertical direction and the horizontal restoring force in the horizontal direction at the same time.
  • First and second auxiliary magnets 1323 and 1324 are respectively provided at the front and rear ends of the upper surface of the conveying member 1320 in the longitudinal direction (the X-axis direction).
  • third and fourth auxiliary magnets 1393 and 1394 are provided at adjacent positions before and after the intermediate switch 1350 in the upper surface 1391 of the housing 1390 in each chamber 1360, respectively.
  • the first and second auxiliary magnets 1323 and 1324 and the third and fourth auxiliary magnets 1393 and 1394 are magnetized in polarities opposite to each other.
  • upper surfaces of the first and second auxiliary magnets 1323 and 1324 may be magnetized to the N pole
  • lower surfaces of the third and fourth auxiliary magnets 1393 and 1394 may be magnetized to the S pole.
  • auxiliary magnets (1323, 1324, 1393, 1394) of the conveying body 1320 when the conveying body 1320 passes where the intermediate switch 1350 is located, that is, the disconnection of the rail (1310) It becomes an auxiliary magnet module to assist magnetic injuries.
  • 31A to 31F explain the operation of the magnetic levitation conveying apparatus 1300 of this embodiment.
  • the transfer body 1320 is in the standby state in the standby unit 1330, and when the inlet switch 1340 is opened, the transfer body 1320 is sequentially moved onto the rail 1310 and transferred into the chamber 1360.
  • the conveying member 1320 is conveyed along the rail 1310 while simultaneously receiving the floating force and the side restoring force by the magnetic repulsive force with the rail 1310.
  • a semiconductor processing process such as deposition and etching may be performed on the target object.
  • An intermediate switch 1350 is interposed between the chambers 1360 to be closed while the semiconductor processing process is performed. Where the intermediate switch 1350 is located there is no rail.
  • the upstream side chamber is referred to as the first chamber 1361 and the downstream side chamber is referred to as the second chamber 1332 based on the conveying direction 1325 of the transfer body 1320.
  • the first rail 1311 and the downstream rail are referred to as a second rail 1312.
  • the transfer body 1320 when the transfer body 1320 is positioned on the first rail 1311 in the first chamber 1361, the transfer body 1320 is provided with the floating magnet 1322 and the first rail 1311. It is injured by the magnetic levitation force 1315 between.
  • the intermediate opening and closing part 1350 when the transfer body 1320 enters the intermediate opening and closing part 1350, the intermediate opening and closing part 1350 is located, that is, between the first rail 1311 and the second rail 1312.
  • the magnetic levitation force 1315 between the floating magnet 1322 and the first rail 1311 becomes small in the intermittent region of.
  • the third auxiliary magnet 1393 located in front of the intermediate opening and closing part 1350 and the fourth auxiliary magnet 1394 located behind the intermediate opening and closing part 1350 and the first auxiliary magnet 1323 of the conveying member 1320 Since the enemy attraction 1327 acts in sequence, by assisting the small magnetic levitation force 1315, the carrier 1320 is stably floated.
  • the front end of the transfer body 1320 may be subjected to magnetic repulsion by the second rail 1312. 1316) to maintain the magnetic levitation state.
  • the second auxiliary magnet 1324 located at the rear end of the conveying body 1320 and the third auxiliary magnet located in front of the intermediate opening and closing part 1350 ( The magnetic attraction force 1328 between 1393 assists the magnetic levitation forces 1315 and 1316 reduced by the intermittent regions of the first and second rails 1311 and 1312.
  • the conveying body 1310 when the rear end of the conveying body 1320 passes the intermediate opening and closing part 1350, the conveying body 1310 is no longer subjected to the magnetically levitating force 1315 by the first rail 1311.
  • the second chamber 1320 is stably entered while receiving the magnetic attraction force 1329 by the third and fourth auxiliary magnets 1393 and 1394 positioned at the front and rear of the intermediate opening and closing part 1350.
  • the first and second auxiliary magnets 1323 and 1324 are disposed at both the front end and the rear end in the longitudinal direction (X-axis direction) of the upper surface of the conveying body 1320.
  • the first and second auxiliary magnets 1323 and 1324 may be arrange
  • the third and fourth auxiliary magnets 1393 and 1394 are disposed in the front and rear ends of the longitudinal direction (X-axis direction) of the upper surface 1391 of the housing 1390 in each chamber 1360.
  • the auxiliary magnet may be disposed above the inlet switch 1340 or above the rear switch 1370.
  • the positions where the third and fourth auxiliary magnets 1393 and 1394 are installed are not limited to the upper surface 1391 of the housing 1390.
  • the third and fourth auxiliary magnets 1393 and 1394 may be provided at an upper side of the intermediate switch 1350 or may be provided in a separate support unit.
  • the magnetic levitation conveying apparatus 1300 of the present embodiment has magnetic poles in which the first and second auxiliary magnets 1323 and 1324 and the third and fourth auxiliary magnets 1393 and 1394 have opposite magnetic poles.
  • an auxiliary magnet is provided at the rear end of the conveying body 1320, and is further provided on the upper surface of the housing 1390 such that the conveying body 1320 is opposed to the auxiliary magnet at the moment passing through the disconnection portion of the rail 1310.
  • the magnet may be magnetized to generate magnetic repulsion on the opposing auxiliary magnets.
  • the magnetic repulsive force between the auxiliary magnets pushes the rear end of the conveying body 1320 downward at the moment when the conveying body 1320 passes through the disconnection part of the rail 1310, and thus the front end of the conveying body 1320 is It acts as a force directed upward so as not to be directed down from the disconnection portion of the rail 1310.
  • the magnetic levitation transfer apparatus (1200, 1300) of the above-described embodiments is described with a semiconductor processing apparatus as an example, but is not limited thereto.
  • the magnetic levitation apparatuses 100 and 200 of the above-described embodiments are used for transportation systems such as magnetic levitation trains and linear elevators, and transportation systems such as in-factory transport, clean room transport, three-dimensional transport in buildings, and high speed sorting devices, and work.
  • transportation systems such as magnetic levitation trains and linear elevators
  • transportation systems such as in-factory transport, clean room transport, three-dimensional transport in buildings, and high speed sorting devices, and work.
  • the conveying device the magnetic levitation conveying device, such as a rotating shaft, the window, the swing door.
  • FIG. 32 is a schematic front view of the magnetic levitation conveying apparatus 1400 to which the magnetic levitation guide apparatus 1430 is applied according to another embodiment of the present invention
  • FIG. 33 is an enlarged view of the magnetic levitation guide apparatus 1430 according to the present embodiment. Drawing.
  • the magnetic levitation conveying apparatus 1400 of the present embodiment includes a support 1410 and a conveying body 1420 magnetically levitation on the support 1410.
  • Rails 1411 and 1412 and floating magnets 1421 and 1422 are provided at positions where the support body 1410 and the conveying member 1420 face each other.
  • the rails 1411 and 1412 and the floating magnets 1421 and 1422 may be the above-described magnetic levitation device or a known magnetic levitation device.
  • the support 1410 extends to both sides of the conveying body 1420.
  • FIG. 32 exemplarily illustrates a structure in which the support 1410 is integrally formed, but support frames positioned at both side surfaces of the carrier 1420 may be provided separately from the support 1410.
  • Magnetic levitation guide device 1430 is provided on both sides of the conveying member 1420 and the support 1410 opposite thereto.
  • the magnetic levitation guide device 1430 has first guide magnets 1431 provided on both sides of the conveying body 1410 and second guide magnets 1432 provided in the longitudinal direction on the side of the support body 1410 opposite thereto. ).
  • the magnetic levitation apparatuses 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, and 1100 of the above-described embodiments may be applied to the first and second guide magnets 1431 and 1432.
  • the first guide magnets 1431 are the first permanent magnets 110, 210, 310, 410, 510, 610, 710, 810, 910, 1010, and 1110 and the second permanent magnets in the above-described embodiments. Any one of (120, 220, 320, 420, 520, 620, 720, 820, 920, 1020, 1120) or the auxiliary magnets are superimposed thereon, and the second guide magnets 1132 are the other one or Auxiliary magnets may be combined.
  • the first guide magnets 1431 may be the first permanent magnets 110 of the magnetic levitation device 100 described with reference to FIGS. 4 to 11, and the second guide magnets.
  • the field 1432 may be the second permanent magnet 120 of the magnetic levitation device 100 described with reference to FIGS. 4 to 11.
  • the magnetic repulsive force 1435 is applied to the first and second guide magnets 1431 and 1432 in opposite directions, that is, in the lateral direction in this embodiment. Since the magnetic levitation guide device 1430 is provided on both sides of the conveying body 1420, the movement of the conveying body 1420 to the left and right by the magnetic repulsion force 1435 in the lateral direction of the magnetic levitation guide device 1430 Limited. When the conveying body 1420 is conveyed in the state of being magnetically injured, since the movement to the left and right is limited by the magnetic levitation guide device 1430, stable conveyance can be made.
  • Magnetic repulsive forces 1436 and 1437 also act on the first and second permanent magnets 1431 and 1432 in a direction perpendicular to each other, that is, in the vertical direction in this embodiment.
  • the first permanent magnet 1431 receives the magnetic repulsive force 1434 upward from the lower surface of the second permanent magnet 1432, and magnetically downward from the upper surface of the second permanent magnet 1432.
  • Repulsive force (1437) is received.
  • the first permanent magnet 1431 is upwardly eccentrically disposed downward from the center line C of the second permanent magnet 1432.
  • Magnetic repulsive force (1436) is greater than the magnetic repulsive force (1437) downwards, and is additionally subjected to the upward force.
  • This upward floating force may act as a force for floating the conveying member 1420. If the weight of the conveying member 1420 is sufficiently light, magnetic levitation means such as the rails 1411 and 1112 and the floating magnets 1421 and 1122 may be omitted and may be injured only by the floating force in the magnetic levitation guide device 1430. There will be.
  • the eccentric arrangement of the first permanent magnet 1431 is an example in which the magnetic repulsive force 1436 upwards is larger than the magnetic repulsive force 1437 downwards, but is not limited thereto.
  • each of the first and second permanent magnets 1431 and 1432 may have an asymmetrical structure, and in this case, the magnetic repulsive force 1436 upwards is caused by the magnetic repulsive force downwards by the asymmetrical structure. 1437).

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Abstract

L'invention concerne un dispositif de lévitation magnétique, un dispositif de transfert utilisant le dispositif de lévitation magnétique, et un dispositif de guidage utilisant le dispositif de lévitation magnétique. Le dispositif à lévitation magnétique de l'invention comprend: un premier aimant permanent, et un second aimant permanent disposé à distance du premier aimant permanent, dans une première direction. La surface du premier aimant permanent et la surface du second aimant permanent se font face et sont magnétisées en un même pôle magnétique, et des lignes de champ magnétique formées par le second aimant permanent sont créées de manière à converger dans une zone située entre le second aimant permanent et le premier aimant permanent.
PCT/KR2014/005964 2013-07-04 2014-07-03 Dispositif de lévitation magnétique, dispositif de transfert utilisant le dispositif de lévitation magnétique, et dispositif de guidage utilisant le dispositif de lévitation magnétique WO2015002484A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20130078439A KR20150005110A (ko) 2013-07-04 2013-07-04 자기부상장치, 자기부상장치를 이용한 이송장치, 및 자기부상장치를 이용한 가이드장치
KR10-2013-0078439 2013-07-04

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WO2015002484A1 true WO2015002484A1 (fr) 2015-01-08

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CN107758351A (zh) * 2016-08-16 2018-03-06 阳程科技股份有限公司 磁性传动的输送方法
CN113023372A (zh) * 2019-12-24 2021-06-25 佳能株式会社 传送设备和物品的制造方法
CN113352295A (zh) * 2020-12-11 2021-09-07 浙江清华柔性电子技术研究院 柔性机械臂
CN115140103A (zh) * 2022-07-01 2022-10-04 中铁二院工程集团有限责任公司 一种常导高速磁浮车辆及轨道系统
US11842848B1 (en) * 2021-05-18 2023-12-12 Eric Werbelow Decorative magnetic cover and method of manufacture

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KR101883950B1 (ko) * 2016-10-06 2018-08-29 한국기계연구원 자기부상 이송 장치

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KR20100004494U (ko) * 2008-10-23 2010-05-03 정은균 평면형 자기부상 장치
US20100109448A1 (en) * 2007-09-04 2010-05-06 Kabushiki Kaisha Yaskawa Denki Magnetic levitation system
KR20130063901A (ko) * 2011-12-07 2013-06-17 한국기계연구원 무동력 트레이를 갖는 자기부상 반송장치

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KR20060005724A (ko) * 2004-07-14 2006-01-18 주식회사 야스 자기 부상식 직선운동 가이드
US20100109448A1 (en) * 2007-09-04 2010-05-06 Kabushiki Kaisha Yaskawa Denki Magnetic levitation system
KR20100004494U (ko) * 2008-10-23 2010-05-03 정은균 평면형 자기부상 장치
KR20130063901A (ko) * 2011-12-07 2013-06-17 한국기계연구원 무동력 트레이를 갖는 자기부상 반송장치

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Publication number Priority date Publication date Assignee Title
CN107758351A (zh) * 2016-08-16 2018-03-06 阳程科技股份有限公司 磁性传动的输送方法
CN107758351B (zh) * 2016-08-16 2019-11-22 阳程科技股份有限公司 磁性传动的输送方法
CN113023372A (zh) * 2019-12-24 2021-06-25 佳能株式会社 传送设备和物品的制造方法
US11851274B2 (en) 2019-12-24 2023-12-26 Canon Kabushiki Kaisha Conveyance apparatus and manufacturing method of article
CN113352295A (zh) * 2020-12-11 2021-09-07 浙江清华柔性电子技术研究院 柔性机械臂
US11842848B1 (en) * 2021-05-18 2023-12-12 Eric Werbelow Decorative magnetic cover and method of manufacture
CN115140103A (zh) * 2022-07-01 2022-10-04 中铁二院工程集团有限责任公司 一种常导高速磁浮车辆及轨道系统
CN115140103B (zh) * 2022-07-01 2024-03-22 中铁二院工程集团有限责任公司 一种常导高速磁浮车辆及轨道系统

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