WO2014198409A1 - Integrated optical waveguide sensor system - Google Patents
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- WO2014198409A1 WO2014198409A1 PCT/EP2014/001579 EP2014001579W WO2014198409A1 WO 2014198409 A1 WO2014198409 A1 WO 2014198409A1 EP 2014001579 W EP2014001579 W EP 2014001579W WO 2014198409 A1 WO2014198409 A1 WO 2014198409A1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N2021/4166—Methods effecting a waveguide mode enhancement through the property being measured
Abstract
The present invention relates to an integrated optical waveguide sensor system comprising: a light source, a planar and/or linear waveguide with sensing area, first and second Bragg gratings (BR) within the waveguide, light detection means, wherein the Bragg gratings are spaced apart in such a way that they form, together with the waveguide parts between the Bragg gratings, a resonator (R). Bragg gratings (BR) and waveguide thereby form a Fabry-Perot resonator (R) whereas coupling gratings (iCG, oCG) outside this resonator are used to couple light into and out of the waveguide.
Description
Integrated optical waveguide sensor system
The present invention relates to the design and use of an integrated optical sensor system or a multiple arrangement of a plurality of such sensors for the detection of the effective refractive index and/or attenuation at or near the interface of the sensor, e.g. of refractive index changes of liquids on the surface, or for the detection of ad- and desorption of (bio-) chemical substances and/or pH changes, as well as monitoring of stress/strain and temperature acting on the sensing device.
In this document, the term "sensor" stands for sensing elements used for measuring the abovementioned effects directly or relative changes thereof, as well as for referencing elements used for reference measurements. In this document the term "light" stands for electromagnetic waves in general and is not limited to visible electromagnetic waves.
For example commercial label-free biosensors are commonly used in the fields of pharmaceutical drug screening, environmental monitoring, biotechnology, food and feed quality monitoring as well as medicine and health care.
State of the Art
Surface plasmon resonance (SPR), waveguide grating (WGG), total internal reflectance (TIR), ellipsometric (ELLI), multilayer dielectric systems (MDS), photonic bandgap crystal (PBC) and Bragg grating (BG) biosensors are well known and available in different sensing configurations on the Life Science market for the detection of (bio-) chemical substances at the sensor surface. These sensors are not only capable of revealing the amount of substance present at the surface, but also give insight into the time dependent binding/adsorption behavior (kinetics) of the substances ("analyte") to the surface or to a present substance ("Ngand") at the surface.
In the event of binding of an analyte to the sensor surface/ad layer formation at the sensor surface, the effective refractive-index of the sensor changes. This can be monitored by the abovementioned systems. In the case of BG sensors, often also physical quantities like stress, strain or temperature are commonly measured.
In SPR sensors, the relative position of a sharp decrease or 'dip' in the intensity of light which is reflected at a thin metal surface is detected. In WGG and BG sensors, the relative position of an increase or 'peak' (also dip, depending on the measurement configuration (transmission/reflection)) in the intensity of light which is coupled into and out of a waveguide (e.g. by a grating coupler (GC)) is detected. The position of this dip/peak depends not only on the quantity of bound biomolecules, but also on other factors such as the wavelength of the incident light, bulk refractive index of the cover liquid, temperature and sensor material properties.
SPR, BG and/or WGG systems rely on various sensing configurations:
CONFIRMATION' COPY
Most frequently, a monochromatic light source is used and the angular shift of the SPR minimum (dip) detected. Another, more elementary setup, measures the intensity of the reflected light at a fixed angle, which changes when the SPR minimum shifts. Finally, one can exploit the wavelength dependency of the SPR phenomenon, irradiate the chip surface with white light at a fixed angle and detect the wavelength at which the resonance occurs. In this case, the shift occurs not in the resonance angle, but in the resonant wavelength upon a binding event at the sensor chip surface. Other configurations are feasible.
Amongst other, WGG sensors rely on the same detection modes as the abovementioned for SPR, but instead of a metal surface, one illuminates a waveguide grating structure in a dielectric substrate. The latter is responsible to couple the light into a waveguide and thereinafter to couple the light out onto a photo sensor to monitor the coupling efficiency. Light will only be coupled into the waveguide at the so called resonance conditions, given by several parameters like the grating structure, substrate and waveguide material and thickness, wavelength, polarization and angle of incidence. The resonance conditions change as the effective refractive-index at the sensor surface changes due to bulk refractive- index changes or due to adsorption of molecules. These refractive-index changes can be interrogated by monitoring the maximal coupling efficiency versus coupling angle and/or wavelength for WGG and SPR and angle of deflection for TIR. BG sensors rely on similar sensing principles as the abovementioned methods. Due to changes of the effective refractive index at the BG itself, the transmission and/or reflection spectrum of the latter changes. These changes or spectral shifts can either be monitored by a broadband optical spectrum analyzer or be interrogated by a tunable light source. Often, BGs are implemented in optical fibers and form a so called fiber BG sensor. The same quasi-one-dimensional configuration can be achieved in a planar waveguide with a confined ridge structure. In contrast to the WGGs, the BG has no angular but only spectral dependence. Decoupling of the two effects allows fabricating sensors with an increased finesse (q-factor) as well as sensitivity. The coupling into the planar ridge waveguide could either be accomplished by edge-, prism- or grating coupling.
In the context of optical processing Bragg reflectors are known to be used in a Fabry-Perot resonator configuration based on a silicon strip waveguide. In this context optical bistability could be observed related to thermal expansion. Similar to the abovementioned systems, using a second measurement channel as a reference could be used as a method to increase the SNR and to decrease the influences of external or internal factors acting as drift sources. Unstable temperature, wavelength, angle of incidence, polarization, bulk refractive index, substrate and waveguide swelling effects can be regarded as sources of drift and/or noise.
One BG could be used as a sensor by looking at one of the transmission peaks, but then the tolerance has to be excellent. A short cavity could also be used as a sensor, but again manufacturing tolerances have to be excellent.
95 There is therefore a need for an integrated optical waveguide sensor system which can be realized with acceptable production tolerances which however shows the same sensitivity as Bragg gratings offer.
It is the object of the present invention to disclose such an improved sensor system.
100
Summary of the invention
According to the present invention an integrated optical waveguide sensor system is based on a pair of BGs spaced apart for the detection of the effective refractive index and/or 105 attenuation at or near the interface of the sensor. The Bragg gratings are spaced apart in such a way that together with the waveguide they form an optical resonator.
Changing the sensors effective refractive index (induced by at least one of the abovementioned effects) alters the optical characteristics of the BG. The said optical 110 characteristics include change(s) in the transmission/reflection spectrum or transmission/reflection power at one or several distinct wavelengths and/or changes in polarization state. Coupling in and out of the waveguide at the near and/or far side of the BG can be accomplished by GCs, coupling prisms, fiber coupling and/or face/butt-end coupling.
115 In contrary to GC (sensors), the BG allows to decouple angular and wavelength related effects: whereas the coupling of a GC is dependent on both angle of incidence on the GC and wavelength, the BG has no angular dependency. Latter fact allows creating BGs with defined transmission/reflection spectra. Said spectrum changes by changing the effective refractive index.
120
Resonant BG cavity structures comprising at least two BGs allow introducing distinct transmission/reflection peaks within abovementioned spectrum with high finesse/Q-factor with a defined or tunable free spectral range. The abovementioned decoupling also allows to have BGs with an increased effective refractive index modulation (e.g. in the case of surface 125 corrugation in the form of deeper groove depths), hereby increasing the sensitivity of the device.
By using longer cavities where the free spectral range of the cavity is smaller than the tuning 130 range of the source the tolerance problem as mentioned above is eliminated.
The presented invention relies on an integrated preferably resonant pair of BGs embedded in either a linear or a planar dielectric waveguide. Since the coupling efficiency and the sensitivity of the sensor are inversely proportional, i.e. high coupling efficiency yields low 135 sensitivity and vice versa, according to a preferred embodiment of the present invention the BGs are not used to couple the light in and out of the waveguide. Instead, grating couplers are added to couple the light in- and out- of the waveguide and to act as pre-filters to the system (this pre-filtering is helpful) allowing the BG to be solely used as a sensor by monitoring one of its transmission peaks.
In this geometry, the width of the mode can be independently tuned by using better BGs while the coupling can be tailored by adapting the GC without impacting each other. This way the limits in the state of the art concerning waveguide biosensors can be overcome.
1 5 Finally the gain can be added to improve sensitivity and then one GC can be used to couple the pump laser while the second GC can be used to extract the lasing light.
The present invention will be described in more detail below. It is understood that the various embodiments, preferences and ranges as provided/disclosed in this specification may be 150 combined at will. Further, depending of the specific embodiment, selected definitions, embodiments or ranges may not apply.
An integrated optical sensor system for example to measure effective refractive index changes according to the invention comprises at least two Bragg gratings (BGs) spaced 155 apart that form an optical cavity embedded in at least one waveguide. This waveguide may be linear or planar. The waveguide may be a ridge waveguide which preferably is tapered. By adjusting the resonator length the free spectral range of the resonant mode(s) can be tuned in the, preferably resonant, optical cavity.
160 Adding doping elements to the waveguide layer (e.g. Erbium or Neodymium) can lead to an amplification of the light intensity and signal of the optical transducer. In this case, the abovementioned resonant cavity acts a laser cavity.
According to one preferred embodiment a grating coupler (GC) is used to couple light into 165 the waveguide. According to another preferred embodiment a grating coupler (GC) is used to couple light out of the waveguide. Preferably a first GC is used to couple light into the waveguide and a second GC is used to couple light out of the waveguide. Such grating couplers may act as pre-filter of the optical system. One of the major advantages of such a setup is that apart from pre-filtering the BG are decoupled from the angular effects of the 170 GC.
As sensor field it is possible to use the BGs, however preferably an unstructured resonator part is used between the BGs.
175 The at least two BGs can be constructed by surface corrugation and/or by laterally alternating refractive indices.
In the integrated optical sensor system according to the present invention the at least two BGs can be used as optical elements in transmission and/or reflection mode.
180 It is possible to design the optical cavity in such a way that one or several transmission/ reflection peaks within a certain spectral range are created. This allows to overcome stringent manufacturing tolerances.
The integrated optical sensor system can be designed in such a way that the tuning of the 185 free spectral range of the cavity modes is smaller than the tuning range or bandwidth of the light source
In integrated optical sensor system according to the present invention the sensitive part of the sensor itself could be any part of the waveguide structure, e.g. one or several GCs, BGs, 190 as well as unstructured regions, e.g. the spacing between the BGs or any combination of the aforementioned areas
According to a preferred embodiment of the present invention at least one part of the waveguide structure is coated and hence passivated e.g. by using a metal or dielectric 195 coating.
There are several possibilities to introduce effective refractive index changes. This can be for example:
a. changes of the refractive index of the cover material
b. Ad-/desorption of (bio)molecules
c. induced stress/strain
d. temperature changes
e. pH changes
or a combination of the abovementioned effects
Such index changes result into changes in the transmission and/or reflection of the at least two BGs. This can be for example altered transmission/reflection spectra, transmission/reflection power and transmission/reflection polarization or a combination thereof. The changes in the transmission and/or reflection spectrum can be measured by either spatial, temporal, polarization or colorimetric means, or a combination of them.
As illumination means for example a broadband light source may be used. It is as well possible to use a tunable light source, such as a VCSEL for example. As detection means a spectrum analyzer (or similar) may be used. It is as well possible to measure the spectral 215 response in the time-domain with a simple photodiode by repetitive wavelength tuning.
With the setup as discussed above, the optical transmission and/or reflection spectrum may show some distinct features such as a minimum or a maximum. If a laser is used as illumination source, the laser current may be adopted in such a way that the response 220 remains within such distinct feature.
The spectral and/or temporal shift and/or amplitude change of one or several transmission/reflection peaks can be made continuously
According to one embodiment of the present invention it is possible to realize a plurality of integrated optical sensor systems to measure effective refractive index changes comprising at least two BGs that form an optical cavity embedded in at least one waveguide. Within the plurality of the integrated optical sensor systems the sensor systems can be mounted in parallel on one or several substrates. One or several sensor systems can for example be used as reference channels. One or several reference channels can be passivated by coating with a material with known optical properties. For measurement the differential signal between the uncoated measurement and the coated sensing region can be monitored to decrease drift and increase signal-to-noise ratio.
235 The invention is now described in more detail with the help of an example and the figures.
Figure 1 shows a possible configuration of the sensor with in-coupling grating (iCG), Bragg grating (BG), resonator (R), out-coupling grating (oCG), taper and ridge structure from the side and top view.
240
Figure 2 shows an example of a transmission spectrum of a resonant BG waveguide sensor with defined transmission peaks.
Example of sensor according to the present invention:
245
The substrate of the example of the integrated optical waveguide sensor system to be described here is a Schott D263T glass plate with an index of refraction of ns=1.5156. This substrate is covered by a Ta205 layer which is 85 nm thick and which has an index of refraction of nf=2.097. Into this layer first and second rectangular surface gratings are etched
250 which have a height of 15 nm, a grating period of 272 nm and a length of 50pm each. These surface gratings form the Bragg gratings and they are spaced apart by lOOpm. Between the first and the second Bragg grating and with the exception of a ridge with a width of 5 μητι, the Ta205 layer height is reduced by 15nm. The resulting ridge forms together with the Bragg gratings the resonator as discussed above. This resonator is located between two grating
255 couplers which are spaced apart by 700μπι. The grating couplers have a grating period of 360 nm. From the Bragg gratings to the grating couplers the width of the ridge widens in tapered form up to 300μηη.
In order to produce such a waveguide system, first, the substrate (Schott D263T) is cleaned.
260 Then, the thin film deposition of the Ta205 waveguide layer is done for example by the use of a reactive sputtering system. Next, a photoresist (positive photosensitive) is deposited on the waveguide layer, e.g. by spin coating. The next step contains the photoresist exposure through the different masks in order related to Bragg gratings, grating couplers and the ridge. Appropriate alignment marks are required for this step. The fifth step contains the
265 photoresist development. In this step, the photoresist at the locations which were not exposed will be removed. Following to this, the thin film will be etched by a dry etching process. Due to the sensor parameters, e.g. equal values for ridge height, grating depth and taper height, only one etch step is needed. Finally, the remaining photoresist is stripped off and the device cleaned.
270
As light source a broadband infrared lamp irradiating light at wavelengths from about 800nm to about 900nm is used. For example a LED or S-LED may be used. A spectrum analyzer forms the detector as required.
275 In this example the ridge between the Bragg gratings forms the sensor areas. The transmission spectrum shows several transmission peaks. Changing the refractive index of the covering medium from 1.24 to 1.36 shifts such transmission spectrum by about 10nm.
280 What was described according to the present invention is an integrated optical waveguide sensor system, comprising:
- a light source
- a planar and/or linear waveguide with sensing area
- first and second Bragg gratings within the waveguide
285 - light detection means,
characterized in that said Bragg gratings are spaced apart in such a way that together with the waveguide parts between the Bragg gratings form a resonator.
Outside the resonator means can be foreseen to couple light into the waveguide. Such 290 means to couple light into the waveguide can realized by at least one first grating coupler.
Ouside the resonator means can be foreseen to couple light out of the waveguide. Such means to couple light out of the waveguide can be realized by at least one second grating coupler.
295
The resonator can be realized between a first grating coupler and the second grating coupler.
The waveguide can be a ridge waveguide. However it is as well possible to realize a slab 300 waveguide or just a two dimensional layer with the layer thickness chosen in such a way to allow light to propagate.
If the waveguide is realized as ridge waveguide a taper can be realized between at least one grating coupler and the neighboring Bragg grating.
305
With the exception of the sensing area the waveguide can be covered by a passivation layer.
It is possible to build the system in such a way that at least part of the waveguide comprises material which is doped, thereby forming a laser gain medium to amplify the light intensity 310 and signal by forming an active (laser)-cavity. The doping can be for example an Erbium and/or Niobium doping.
As light source a tunable VCSEL can be chosen. If so it is preferable and the resonator layout is designed in such a way that the free spectral range of the resonator is smaller than 315 the tuning range of the VCSEL. This has the advantage that manufacturing tolerances can be chosen less restrictive as there will be always a peak within the tuning range, irrespective of the exact position of such peak.
An optical sensor is disclosed comprising a first integrated optical waveguide sensor system 320 according to one of the previous claims as well as at least a second waveguide with third and fourth Bragg gratings within the second waveguide, said third and fourth Bragg gratings being spaced apart in such a way that they form together with the waveguide parts between the third and fourth Bragg gratings a second resonator.
325 An optical sensor may be realized as multichannel configuration where at least a multitude of channels are comprised of integral optical waveguide sensor systems according to the previous paragraphs and preferably two or more channels receive light from the same light source and most preferable the output of two or more channels is measured by one detection means.
330
Claims
1. Integrated optical waveguide sensor system comprising:
335
- a planar and/or linear waveguide with sensing area
- first and second Bragg gratings within the waveguide
characterized in that said Bragg gratings are spaced apart in such a way that together with the waveguide parts between the Bragg gratings form a resonator.
340
2. Integrated optical waveguide sensor system according to claim 1 characterized in that the system comprises a light source and light detection means
3. Integrated optical waveguide sensor system according to claim 1 or claim 2 characterized 345 in that outside the resonator means are foreseen to couple light into the waveguide.
4. Integrated optical waveguide sensor system according to claim 3, characterized in that the means to couple light into the waveguide are realized by at least one first grating coupler.
350 5. Integrated optical waveguide sensor system according to one of the previous claims, characterized in that outside the resonator means are foreseen to couple light out of the waveguide.
6. Integrated optical Waveguide sensor system according to claim 5, characterized in that the 355 means to couple light out of the waveguide are realized by at least one second grating coupler.
7. Integrated optical waveguide sensor system according to claim 6 characterized that the resonator is realized between a first grating coupler and the second grating coupler.
360
8. Integrated optical waveguide sensor system according to one of the previous claims characterized in that the waveguide is a ridge waveguide.
9. Integrated optical waveguide sensor system according to one of the claims 3 to 8 365 characterized in that a taper is realized between at least one grating coupler and the neighboring Bragg grating.
10. Integrated optical waveguide sensor system according to one of the previous claims characterized in that with the exception of the sensing area the waveguide is covered by a
370 passivation layer.
11. Integrated optical waveguide sensor system according to one of the previous claims characterized in that at least part of the waveguide comprises material which is doped, thereby forming a laser gain medium to amplify the light intensity and signal by forming an
375 active (laser)-cavity.
12. Integrated optical waveguide sensor system according to claim 1 1 , characterized in that such doping is an Erbium and/or Niobium doping.
380 13. Integrated optical waveguide sensor system according to one of the previous claims, characterized in that the light source is a tunable VCSEL and the resonator layout is designed in such a way that the free spectral range of the resonator is smaller than the tuning range of the VCSEL.
385 14. Optical sensor comprising a first integrated optical waveguide sensor system according to one of the previous claims as well as at least a second waveguide with third and fourth Bragg gratings within the second waveguide, said third and fourth Bragg gratings being spaced apart in such a way that they form together with the waveguide parts between the third and fourth Bragg gratings a second resonator.
390
15. Optical sensor realized as multichannel configuration where a multitude of channels are comprised of integral optical waveguide sensor systems according to one of the claims 1 to 13 and preferably two or more channels receive light from the same light source and most preferable the output of two or more channels is measured by one detection means.
395
400
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH01113/13 | 2013-06-12 | ||
| CH11132013 | 2013-06-12 |
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| WO2014198409A1 true WO2014198409A1 (en) | 2014-12-18 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107677390A (en) * | 2017-09-21 | 2018-02-09 | 西安交通大学 | A kind of melting cone type optical fiber mach increases the preparation method of Dare sensor |
| CN109188606A (en) * | 2018-10-17 | 2019-01-11 | 华中科技大学 | A kind of flexible extensible optical waveguide perception device and preparation method thereof |
| US20190219423A1 (en) * | 2016-01-14 | 2019-07-18 | Sew-Eurodrive Gmbh & Co. Kg | System comprising a first part and a second part |
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| CN112179537A (en) * | 2020-10-10 | 2021-01-05 | 中国计量大学 | Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide |
| CN113974634A (en) * | 2021-11-28 | 2022-01-28 | 天津大学 | Optical chip for detecting bioelectricity signal |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20190219423A1 (en) * | 2016-01-14 | 2019-07-18 | Sew-Eurodrive Gmbh & Co. Kg | System comprising a first part and a second part |
| CN107677390A (en) * | 2017-09-21 | 2018-02-09 | 西安交通大学 | A kind of melting cone type optical fiber mach increases the preparation method of Dare sensor |
| CN109188606A (en) * | 2018-10-17 | 2019-01-11 | 华中科技大学 | A kind of flexible extensible optical waveguide perception device and preparation method thereof |
| CN109188606B (en) * | 2018-10-17 | 2024-01-05 | 华中科技大学 | Flexible stretchable optical waveguide sensing device and preparation method thereof |
| US10884193B2 (en) * | 2019-01-11 | 2021-01-05 | National Chung Cheng University | Dual grating sensing system, dual grating sensor and detecting method thereof |
| CN110160567A (en) * | 2019-04-22 | 2019-08-23 | 西北工业大学 | Integrated MEMS optical fiber F-P sensitive chip and preparation method thereof in a kind of face |
| CN112179537A (en) * | 2020-10-10 | 2021-01-05 | 中国计量大学 | Fabry-Perot interferometer optical fiber sensor based on optical fiber surface waveguide |
| CN113974634A (en) * | 2021-11-28 | 2022-01-28 | 天津大学 | Optical chip for detecting bioelectricity signal |
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