WO2014173035A1 - Deviation correction method and device - Google Patents

Deviation correction method and device Download PDF

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Publication number
WO2014173035A1
WO2014173035A1 PCT/CN2013/080846 CN2013080846W WO2014173035A1 WO 2014173035 A1 WO2014173035 A1 WO 2014173035A1 CN 2013080846 W CN2013080846 W CN 2013080846W WO 2014173035 A1 WO2014173035 A1 WO 2014173035A1
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Prior art keywords
offset
rotation angle
displacement
deviation correction
graph
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PCT/CN2013/080846
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French (fr)
Chinese (zh)
Inventor
张思凯
汪栋
黎敏
姜晶晶
吴洪江
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京东方科技集团股份有限公司
北京京东方显示技术有限公司
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Publication of WO2014173035A1 publication Critical patent/WO2014173035A1/en

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/04—Apparatus for electrographic processes using a charge pattern for exposing, i.e. imagewise exposure by optically projecting the original image on a photoconductive recording material
    • G03G15/043—Apparatus for electrographic processes using a charge pattern for exposing, i.e. imagewise exposure by optically projecting the original image on a photoconductive recording material with means for controlling illumination or exposure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133308—Support structures for LCD panels, e.g. frames or bezels
    • G02F1/133322—Mechanical guidance or alignment of LCD panel support components

Definitions

  • the present disclosure relates to the field of liquid crystal display, and in particular to a method and apparatus for offset correction. Background technique
  • the liquid crystal display field adopts a stepwise exposure mode.
  • the exposure machine cooperates with the mask to form a pattern on the glass substrate.
  • the pattern formed by the actual exposure will deviate from the position of the design pattern.
  • the current common deviation correction method is the four-point four-sided deviation correction method, and the correction value is It includes the X direction correction value, the Y direction correction value, and the rotation angle ⁇ correction value.
  • the X direction correction value is set to ⁇
  • the Y direction correction value is ⁇
  • the ⁇ direction correction value is ⁇ .
  • the coordinates of the four points A, ⁇ , C, and D at the four corners of the design figure are (X 1 , y 1 ), (x2, y2), (x3 , Y3) , (x4, y4).
  • the coordinates of the four corners of the graph formed after the actual exposure, ⁇ ', C, D, and the coordinates of the four points are (xl,, yl,), (x2, y2,), (x3, y3) ,), (x4,, y4,).
  • the calculation method of ⁇ is to calculate the angle between ⁇ , the angle e ⁇ B'C with AB, the angle ⁇ 2 , C, D with BC, the angle ⁇ 3 , A'D with CD, and the angle of AD. ⁇ 4 , and then calculate the average of the above four angles.
  • the calculation is as follows:
  • the above-mentioned deviation correction method is established under the assumption that the shape ABCD is a regular rectangle, and AB and CD are parallel to the Y-axis, and AD and BC are parallel to the X-axis.
  • the above H is not usually satisfied, so the accuracy of the current bias correction method is better than ⁇
  • the main object of the present disclosure is to provide a deviation correction method and apparatus for improving the accuracy of deviation correction.
  • An embodiment of the present disclosure provides a method for offset correction, including: calculating a displacement offset of at least one point on a graph formed after exposure in the X and Y directions, and calculating a rotation angle of at least one diagonal on the graph. Offset; The offset is corrected based on the obtained displacement offset and the rotation angle offset.
  • the displacement offsets of the two or more points on the graph in the X and Y directions are calculated.
  • the displacement offsets of two, three or more, or even all of the points in the X and Y directions can be calculated, and the corresponding two, three or more, or even all points in the X and Y directions are obtained.
  • the displacement offset on the upper is averaged, and the obtained average value is taken as the displacement offset of the entire graph.
  • the graphic when the graphic includes a plurality of diagonal lines, calculate a rotation angle offset of two, three or more or even all of the diagonal lines, and obtain corresponding two, three or The rotation angle offsets of a plurality of or even all diagonal lines are averaged, and the obtained average value is taken as the rotation angle offset of the entire figure.
  • a mathematical calculation method based on the angle of the vector calculates the rotation angle offset of the diagonal.
  • a point on the graph is a point at which the two sides of the graph intersect or a point at other locations.
  • the embodiment of the present disclosure further provides a deviation correction device, including a deviation correction unit, and an execution unit; wherein the deviation correction unit is configured to calculate a displacement deviation of at least one point on the graph formed after exposure in the X and Y directions.
  • the shift amount is further calculated by calculating a rotation angle offset of at least one diagonal line on the graphic; the execution unit is configured to perform offset correction according to the displacement offset amount and the rotation angle offset amount obtained by the deviation correction unit.
  • the deviation correction unit includes a displacement deviation correction unit for: in the case of calculating only the displacement offset of a point on the graph in the X and Y directions, the point is at X and Y The displacement offset in the direction as the displacement offset of the entire graph; or in the case of calculating the displacement offset of two or more points in the X and Y directions on the graph, calculate two of them The displacement offset of one, three or more or even all points in the X and Y directions, and the displacement offsets of the corresponding two, three or more or even all points in the X and Y directions On average, the average value obtained is taken as the displacement offset of the entire graph.
  • the deviation correction unit includes a rotation angle deviation correction unit for: In the case of calculating only the rotation angle offset of one diagonal in the graphic, the rotation angle offset of the diagonal is used as the rotation angle offset of the entire graphic; or when the graphic includes multiple For the diagonal, calculate the rotation angle offset of two, three or more or even all of the diagonals, and the rotation angle offset of the corresponding two, three or more or even all diagonals To average, the average value obtained is taken as the rotation angle offset of the entire graph.
  • the deviation correction unit is configured to calculate a rotation angle offset of the diagonal based on a mathematical calculation method of the vector angle.
  • a point on the graph is a point at which the two sides of the graph intersect or a point at other locations.
  • the deviation correction technique of the present disclosure utilizes the rotation angle of the diagonal of the pattern formed after exposure to perform offset correction, which is more reactive than the rotation angle of the four sides in the prior art, and reflects the rotation tendency of the pattern after exposure, thereby effectively improving the deviation correction. Accuracy; and, because there is no shape and position requirement for the design pattern, it is possible to calculate the rotation angle of the pattern after the exposure for the pattern; and the specific calculation times when the rotation angle deviation is corrected from the prior art It becomes twice in four times, so the operation of deviation correction is more convenient and quick.
  • FIG. 1 is a schematic diagram showing the principle of a four-point four-sided deviation correction method in the prior art
  • FIG. 2 is a schematic diagram of a principle of a four-point two-line offset correction method according to an embodiment of the present disclosure
  • FIG. 3 is a flow chart of a deviation correction method according to an embodiment of the present disclosure. detailed description
  • a four-point two-line deviation correction method is proposed. By calculating a rotation angle of two diagonal lines of a figure, a deviation correction is performed on a pattern formed by exposure, and the deviation correction method is compared with the prior art.
  • the four-point and four-sided deviation correction method is more compact and more widely used.
  • calculating the rotation angle of the diagonal line is more responsive to the rotation angle of the four sides calculated in the prior art, and the rotation tendency of the pattern is formed after the exposure, thereby effectively improving the accuracy of the deviation correction; and, because there is no shape for the design pattern And the position requirements, so which kind of graph can calculate the rotation angle of the pattern after the exposure;
  • the specific calculation number when the deviation correction is performed is changed from the prior art four times to two times, so the deviation correction operation is more The tube is quick and fast.
  • a cylinder is described in accordance with an embodiment of the present disclosure, a four-point two-line deviation correction method, a shape ABCD is a design pattern, A'B'C'D, which is a pattern formed after actual exposure. Specifically, you can The coordinate positions (xr, yr), (x2, y2,), (x3, y3,) in the coordinate system of the four points on the glass substrate are obtained by the measuring device, A, B, C, D, (x4,, y4,).
  • the deviation correction in the X and Y directions can be realized by a calculation unit such as a displacement deviation correction unit.
  • the deviation correction of the rotation angle can be realized by a calculation unit such as a rotation angle deviation correction unit.
  • the displacement deviation correction unit and the rotation angle deviation correction unit may be separately set or combined, and the displacement deviation correction unit and the rotation angle deviation correction unit may be collectively referred to as a deviation correction unit.
  • the deviation correction method according to an embodiment of the present disclosure applies the diagonal of the figure, it is not necessary to assume that the shape ABCD is a regular rectangle as in the prior art, and AB, CD are parallel to the Y axis, AD and BC are parallel to the X-axis, which avoids the possibility that the deviation correction accuracy is low due to the assumption that the assumption cannot be satisfied. Moreover, whether it is a regular figure or an irregular figure, it usually has a diagonal line, and thus the deviation correction method of the embodiment of the present disclosure can be applied to the deviation correction of various figures.
  • the design pattern to be referred to when performing the offset correction should be based on the actual pattern of the mask exposure, rather than the regular pattern of the design. That is, when the deviation correction is performed, the actual pattern of the exposure is corrected by the calculated displacement deviation correction value and the rotation angle deviation correction value, instead of correcting the designed rule pattern.
  • the shape ABCD in the above description is only taking the quadrilateral as an example.
  • the graphic that needs to be offset-corrected may be a polygon such as a triangle or a pentagon, and whether the graphic is a regular graphic or an irregular graphic.
  • the displacement offset of at least one point on the graph in the X and Y directions may be calculated, and the point on the graph may be a point at which the two sides of the graph intersect or Points on other locations.
  • the specific calculation method has the same principle as the above-described offset calculation method for the corresponding X and Y directions.
  • the displacement offset of a point on the graph in the X and Y directions can be used as the displacement offset of the entire graph;
  • the displacement offsets of two or more points in the X and Y directions the displacement offsets of two, three or more or even all of the points in the X and Y directions can be calculated and obtained.
  • the displacement offsets of the corresponding two, three or more, or even all points in the X and Y directions are averaged, and the average value obtained is taken as the displacement offset of the entire figure.
  • the rotation angle offset of at least one diagonal line on the graphic can be calculated.
  • the specific calculation method has the same principle as the aforementioned offset calculation method of the corresponding rotation angle.
  • the rotation angle offset of the diagonal line can be used as the rotation angle offset of the entire graph; when the graph includes multiple diagonals For the line, you can calculate the rotation angle offset of two, three or more or even all of the diagonals, and find the rotation angle offset of the corresponding two, three or more or even all diagonals. On average, the average value obtained is taken as the rotation angle offset of the entire graph.
  • the deviation correction method according to an embodiment of the present disclosure can be realized by the flow shown in FIG.
  • step 310 a displacement offset of at least one point on the graph formed after exposure in the X and Y directions is calculated, and a rotation angle offset of at least one diagonal on the graph is also calculated.
  • step 320 the offset correction is performed based on the obtained displacement offset and the rotation angle offset.
  • This step can be implemented by an execution unit such as a logical processor.
  • the deviation correction technique of the present disclosure utilizes the rotation angle of the diagonal of the pattern formed after the exposure to perform deviation correction, which is higher than the prior art. Calculating the rotation angle of the four sides in the middle can more reflect the rotation tendency of the pattern formed after exposure, effectively improving the accuracy of the deviation correction; and, because there is no shape and position requirement for the design pattern, it is possible to calculate which type of pattern can be calculated after exposure.
  • the rotation angle of the pattern is formed.
  • the number of calculations for the deviation correction is changed from four times in the prior art to two times, so that the operation of the deviation correction is more convenient and quick.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

A deviation correction method and device. The method comprises: calculating the displacement offsets on the X and Y directions of at least one point in the image formed after an exposure and calculating the rotation angle offset of at least one diagonal of the image; and correcting the deviation according to the calculated displacement offsets and rotation angle offset.

Description

偏差补正方法和装置 技术领域  Deviation correction method and device
本公开涉及液晶显示领域， 具体涉及一种偏差补正方法和装置。 背景技术  The present disclosure relates to the field of liquid crystal display, and in particular to a method and apparatus for offset correction. Background technique
目前液晶显示领域多采用分步式曝光方式， 在曝光过程中， 曝光机配合 掩膜板在玻璃基板上形成图形。 通常， 实际曝光形成的图形会与设计图形的 位置有偏差， 为了使形成的图形与设计图形一致， 需要对曝光机进行偏差补 目前通用的偏差补正方式为四点四边偏差补正方式， 补正值包括 X方向 补正值、 Y方向补正值以及旋转角度 Θ补正值。此处设置 X方向补正值为 ΔΧ, Y方向补正值为 ΔΥ, Θ方向的补正值为 Δθ。 如图 1所示， 在坐标系中， 假设 设计图形的四个角上的 A , Β , C , D四点的坐标分别为（X 1 ,y 1 ) , (x2,y2) , (x3 ,y3) , (x4,y4)。 实际曝光后形成的图形的四个角上的 Α，， Β' , C，， D，四点的坐标分 别为（xl，,yl，）, (x2，,y2，）, (x3，,y3，）, (x4，,y4，）。  At present, the liquid crystal display field adopts a stepwise exposure mode. During the exposure process, the exposure machine cooperates with the mask to form a pattern on the glass substrate. Generally, the pattern formed by the actual exposure will deviate from the position of the design pattern. In order to make the formed pattern conform to the design pattern, it is necessary to compensate the exposure machine. The current common deviation correction method is the four-point four-sided deviation correction method, and the correction value is It includes the X direction correction value, the Y direction correction value, and the rotation angle Θ correction value. Here, the X direction correction value is set to ΔΧ, the Y direction correction value is ΔΥ, and the Θ direction correction value is Δθ. As shown in Fig. 1, in the coordinate system, it is assumed that the coordinates of the four points A, Β, C, and D at the four corners of the design figure are (X 1 , y 1 ), (x2, y2), (x3 , Y3) , (x4, y4). The coordinates of the four corners of the graph formed after the actual exposure, Β', C, D, and the coordinates of the four points are (xl,, yl,), (x2, y2,), (x3, y3) ,), (x4,, y4,).
ΔΧ和 ΔΥ的计算方法相似， 计算方法如下式所示：  The calculation methods of ΔΧ and ΔΥ are similar, and the calculation method is as follows:
(Xl/ +x2 +x3i +x4') -(xl+x2 +x3+x4) (yl'+y2' +y3' +y4')-(yl+y2 +y3 +y4)(Xl / +x2 +x3 i +x4') -(xl+x2 +x3+x4) (yl'+y2'+y3'+y4')-(yl+y2 +y3 +y4)
Δχ = Δχ =
ΔΘ的计算方法为先分别计算 ΑΈ，与 AB的夹角 e^ B'C，与 BC的夹角 θ2, C，D，与 CD的夹角 θ3 , A'D，与 AD的夹角 θ4, 再计算上述四个夹角的平均值。 计算方式如下：
Figure imgf000002_0001
The calculation method of ΔΘ is to calculate the angle between ΑΈ, the angle e^B'C with AB, the angle θ 2 , C, D with BC, the angle θ 3 , A'D with CD, and the angle of AD. θ 4 , and then calculate the average of the above four angles. The calculation is as follows:
Figure imgf000002_0001
上述的偏差补正方法的成立条件为假设形状 ABCD为规则矩形，且 AB、 CD平行于 Y轴， AD、 BC平行于 X轴。 但由于条件限定， 上述的 H没通常 无法满足， 因此目前的偏差补正方法的准确性较^^ 发明内容  The above-mentioned deviation correction method is established under the assumption that the shape ABCD is a regular rectangle, and AB and CD are parallel to the Y-axis, and AD and BC are parallel to the X-axis. However, due to the limited conditions, the above H is not usually satisfied, so the accuracy of the current bias correction method is better than ^^
有鉴于此， 本公开的主要目的在于提供一种偏差补正方法和装置， 用以 提高偏差补正准确性。 本公开实施例提供了一种偏差补正方法， 包括： 计算曝光后形成的图形 上至少一个点在 X和 Y方向上的位移偏移量，还计算所述图形上至少一条对 角线的旋转角度偏移量； 根据得到的位移偏移量以及旋转角度偏移量进行偏 差补正。 In view of this, the main object of the present disclosure is to provide a deviation correction method and apparatus for improving the accuracy of deviation correction. An embodiment of the present disclosure provides a method for offset correction, including: calculating a displacement offset of at least one point on a graph formed after exposure in the X and Y directions, and calculating a rotation angle of at least one diagonal on the graph. Offset; The offset is corrected based on the obtained displacement offset and the rotation angle offset.
在一个示例中，只计算所述图形上一个点在 X和 Y方向上的位移偏移量， 并且将该点在 X和 Y方向上的位移偏移量作为整个图形的位移偏移量。  In one example, only the displacement offset of one point on the graph in the X and Y directions is calculated, and the displacement offset of the point in the X and Y directions is taken as the displacement offset of the entire graph.
在另一示例中，计算所述图形上两个或两个以上的点在 X和 Y方向上的 位移偏移量。 例如， 可以计算其中的两个、 三个或多个甚至全部点在 X和 Y 方向上的位移偏移量， 并对得到的相应两个、 三个或多个甚至全部点在 X和 Y方向上的位移偏移量求平均，将得到的平均值作为整个图形的位移偏移量。  In another example, the displacement offsets of the two or more points on the graph in the X and Y directions are calculated. For example, the displacement offsets of two, three or more, or even all of the points in the X and Y directions can be calculated, and the corresponding two, three or more, or even all points in the X and Y directions are obtained. The displacement offset on the upper is averaged, and the obtained average value is taken as the displacement offset of the entire graph.
在一个示例中， 只计算所述图形中一条对角线的旋转角度偏移量， 并且 将该对角线的旋转角度偏移量作为整个图形的旋转角度偏移量。  In one example, only the rotational angular offset of one diagonal in the graph is calculated, and the rotational angular offset of the diagonal is taken as the rotational angular offset of the entire graph.
在另一示例中， 当所述图形包括多条对角线时， 计算其中的两条、 三条 或多条甚至全部对角线的旋转角度偏移量， 并对得到的相应两条、 三条或多 条甚至全部对角线的旋转角度偏移量求平均， 将得到的平均值作为整个图形 的旋转角度偏移量。  In another example, when the graphic includes a plurality of diagonal lines, calculate a rotation angle offset of two, three or more or even all of the diagonal lines, and obtain corresponding two, three or The rotation angle offsets of a plurality of or even all diagonal lines are averaged, and the obtained average value is taken as the rotation angle offset of the entire figure.
基于向量夹角的数学计算方法计算对角线的旋转角度偏移量。  A mathematical calculation method based on the angle of the vector calculates the rotation angle offset of the diagonal.
所述图形上的点是该图形上两条边相交的点或其它位置上的点。  A point on the graph is a point at which the two sides of the graph intersect or a point at other locations.
本公开实施例还提供了一种偏差补正装置， 包括偏差补正单元、 以及执 行单元； 其中， 所述偏差补正单元用于计算曝光后形成的图形上至少一个点 在 X和 Y方向上的位移偏移量，还计算所述图形上至少一条对角线的旋转角 度偏移量； 所述执行单元用于根据所述偏差补正单元得到的位移偏移量以及 旋转角度偏移量进行偏差补正。  The embodiment of the present disclosure further provides a deviation correction device, including a deviation correction unit, and an execution unit; wherein the deviation correction unit is configured to calculate a displacement deviation of at least one point on the graph formed after exposure in the X and Y directions. The shift amount is further calculated by calculating a rotation angle offset of at least one diagonal line on the graphic; the execution unit is configured to perform offset correction according to the displacement offset amount and the rotation angle offset amount obtained by the deviation correction unit.
在一个示例中， 所述偏差补正单元包括位移偏差补正单元， 用于： 在只 计算所述图形上一个点在 X和 Y方向上的位移偏移量的情况下，将该点在 X 和 Y方向上的位移偏移量作为整个图形的位移偏移量； 或在计算所述图形上 两个或两个以上的点在 X和 Y方向上的位移偏移量的情况下，计算其中的两 个、 三个或多个甚至全部点在 X和 Y方向上的位移偏移量， 并对得到的相应 两个、 三个或多个甚至全部点在 X和 Y方向上的位移偏移量求平均， 将得到 的平均值作为整个图形的位移偏移量。  In one example, the deviation correction unit includes a displacement deviation correction unit for: in the case of calculating only the displacement offset of a point on the graph in the X and Y directions, the point is at X and Y The displacement offset in the direction as the displacement offset of the entire graph; or in the case of calculating the displacement offset of two or more points in the X and Y directions on the graph, calculate two of them The displacement offset of one, three or more or even all points in the X and Y directions, and the displacement offsets of the corresponding two, three or more or even all points in the X and Y directions On average, the average value obtained is taken as the displacement offset of the entire graph.
在另一示例中， 所述偏差补正单元包括旋转角度偏差补正单元， 用于： 在只计算所述图形中一条对角线的旋转角度偏移量的情况下， 将该对角线的 旋转角度偏移量作为整个图形的旋转角度偏移量； 或当所述图形包括多条对 角线时， 计算其中的两条、 三条或多条甚至全部对角线的旋转角度偏移量， 并对得到的相应两条、三条或多条甚至全部对角线的旋转角度偏移量求平均， 将得到的平均值作为整个图形的旋转角度偏移量。 In another example, the deviation correction unit includes a rotation angle deviation correction unit for: In the case of calculating only the rotation angle offset of one diagonal in the graphic, the rotation angle offset of the diagonal is used as the rotation angle offset of the entire graphic; or when the graphic includes multiple For the diagonal, calculate the rotation angle offset of two, three or more or even all of the diagonals, and the rotation angle offset of the corresponding two, three or more or even all diagonals To average, the average value obtained is taken as the rotation angle offset of the entire graph.
所述偏差补正单元用于基于向量夹角的数学计算方法计算对角线的旋转 角度偏移量。  The deviation correction unit is configured to calculate a rotation angle offset of the diagonal based on a mathematical calculation method of the vector angle.
所述图形上的点是该图形上两条边相交的点或其它位置上的点。  A point on the graph is a point at which the two sides of the graph intersect or a point at other locations.
本公开的偏差补正技术利用曝光后形成的图形的对角线的旋转角度进行 偏差补正， 比现有技术中计算四条边的旋转角度更能反应曝光后形成图形的 旋转趋势， 有效提高了偏差补正准确性； 并且， 由于对设计图形没有形状和 位置的要求， 因此对何种图形均能够计算出曝光后形成图形的旋转角度； 另 外， 进行旋转角度偏差补正时的具体计算次数从现有技术的四次变为两次， 因此偏差补正的操作更加筒便、 快捷。 附图说明  The deviation correction technique of the present disclosure utilizes the rotation angle of the diagonal of the pattern formed after exposure to perform offset correction, which is more reactive than the rotation angle of the four sides in the prior art, and reflects the rotation tendency of the pattern after exposure, thereby effectively improving the deviation correction. Accuracy; and, because there is no shape and position requirement for the design pattern, it is possible to calculate the rotation angle of the pattern after the exposure for the pattern; and the specific calculation times when the rotation angle deviation is corrected from the prior art It becomes twice in four times, so the operation of deviation correction is more convenient and quick. DRAWINGS
图 1为现有技术的四点四边偏差补正方法的原理示意图；  1 is a schematic diagram showing the principle of a four-point four-sided deviation correction method in the prior art;
图 2为本公开实施例的四点两线偏差补正方法的原理示意图；  2 is a schematic diagram of a principle of a four-point two-line offset correction method according to an embodiment of the present disclosure;
图 3为本公开实施例的偏差补正方法的流程筒图。 具体实施方式  FIG. 3 is a flow chart of a deviation correction method according to an embodiment of the present disclosure. detailed description
根据本公开实施例， 提出了一种四点两线的偏差补正方法， 通过计算图 形的两条对角线的旋转角度， 对曝光形成的图形进行偏差补正， 这种偏差补 正方法比现有技术的四点四边偏差补正方法更筒单， 应用更加广泛。  According to an embodiment of the present disclosure, a four-point two-line deviation correction method is proposed. By calculating a rotation angle of two diagonal lines of a figure, a deviation correction is performed on a pattern formed by exposure, and the deviation correction method is compared with the prior art. The four-point and four-sided deviation correction method is more compact and more widely used.
具体而言， 计算对角线的旋转角度， 比现有技术中计算四条边的旋转角 度更能反应曝光后形成图形的旋转趋势， 有效提高了偏差补正准确性； 并且， 由于对设计图形没有形状和位置的要求， 因此对何种图形均能够计算出曝光 后形成图形的旋转角度； 另外， 进行偏差补正时的具体计算次数从现有技术 的四次变为两次， 因此偏差补正的操作更加筒便、 快捷。  Specifically, calculating the rotation angle of the diagonal line is more responsive to the rotation angle of the four sides calculated in the prior art, and the rotation tendency of the pattern is formed after the exposure, thereby effectively improving the accuracy of the deviation correction; and, because there is no shape for the design pattern And the position requirements, so which kind of graph can calculate the rotation angle of the pattern after the exposure; In addition, the specific calculation number when the deviation correction is performed is changed from the prior art four times to two times, so the deviation correction operation is more The tube is quick and fast.
参见图 2, 筒要描述根据本公开实施例的四点两线的偏差补正方法， 形 状 ABCD为设计图形， A'B'C'D，为实际曝光后形成的图形。 具体而言， 可以 通过测量设备得到 A，,B，,C，,D，四点在玻璃基板上的坐标系中的坐标位置 (xr,yr),(x2，,y2，),(x3，,y3，),(x4，,y4，）。 相对于 ABCD四点所对应的坐标值 (xl,yl),(x2,y2),(x3,y3),(x4,y4) , A，,B，,C，,D，四点不仅在 X和 Y方向有偏移量， 而且还有旋转角度的偏移量， 在根据公开实施例的偏差补正方法中， 偏差补 正需要针对上述三个偏移量进行。 Referring to Fig. 2, a cylinder is described in accordance with an embodiment of the present disclosure, a four-point two-line deviation correction method, a shape ABCD is a design pattern, A'B'C'D, which is a pattern formed after actual exposure. Specifically, you can The coordinate positions (xr, yr), (x2, y2,), (x3, y3,) in the coordinate system of the four points on the glass substrate are obtained by the measuring device, A, B, C, D, (x4,, y4,). Relative to the coordinates of the four points of ABCD (xl, yl), (x2, y2), (x3, y3), (x4, y4), A, B, C, D, four points are not only in X There is an offset from the Y direction, and there is also an offset of the rotation angle. In the deviation correction method according to the disclosed embodiment, the offset correction needs to be performed for the above three offsets.
在进行 X和 Y方向的偏差补正时， 可以将 ，,：6，,(，,0，四点的 ， Y坐标 对应地与 A , B , C, D四点 X, Y坐标相减， 对相减后得到的四个差值取平 均数， 将该平均数作为 X和 Y方向的偏移量。 具体公式如下：
Figure imgf000005_0001
When performing the offset correction in the X and Y directions, you can subtract , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The four differences obtained after subtraction are averaged, and the average is taken as the offset in the X and Y directions. The specific formula is as follows:
Figure imgf000005_0001
X和 Y方向的偏差补正可以由位移偏差补正单元等计算单元实现。  The deviation correction in the X and Y directions can be realized by a calculation unit such as a displacement deviation correction unit.
在进行旋转角度 Θ的偏差补正时， 可以基于向量夹角的数学计算方法， 计算图形 A'B'C'D'的两条对角线相对于图形 ABCD的两条对角线的旋转角度 偏移量。 设定 A，C，与 AC的夹角为 ΘΛ B，D，与 BD的夹角为 θ2，， ΔΘ为 与 θ2'的平均值。 判定： 如果
Figure imgf000005_0002
When the deviation of the rotation angle Θ is corrected, the rotation angles of the two diagonal lines of the graphic A'B'C'D' with respect to the two diagonal lines of the graphic ABCD can be calculated based on the mathematical calculation method of the vector angle. Transfer amount. Set A, C, and the angle between AC and AC B, D, and the angle between BD and BD is θ 2 , and ΔΘ is the average value of θ 2 '. Judging:
Figure imgf000005_0002
CxS' -x X S-xD +CyS'-yl yS-yl) CxS' -x X S-xD +CyS'-yl yS-yl)
'—  '—
一 1 One 1
Figure imgf000005_0003
否则, 如果
Figure imgf000005_0004
Figure imgf000005_0003
Otherwise, if
Figure imgf000005_0004
(x4' -x2')<x4-x2)+(y4'-y2 *(y4-y2)  (x4' -x2')<x4-x2)+(y4'-y2 *(y4-y2)
Θ· = COS  Θ· = COS
则 ' - x2 ')2 + (y4'- y2')2、 ., /· ( ' x4-x2)2 +(y4-y2): Then ' - x2 ') 2 + (y4'- y2') 2 , ., /· ( ' x4-x2) 2 +(y4-y2) :
Figure imgf000005_0005
Figure imgf000005_0005
旋转角度的偏差补正可以由旋转角度偏差补正单元等计算单元实现。 位移偏差补正单元与旋转角度偏差补正单元可以分别设置或合并设置， 可以将位移偏差补正单元与旋转角度偏差补正单元统称为偏差补正单元。  The deviation correction of the rotation angle can be realized by a calculation unit such as a rotation angle deviation correction unit. The displacement deviation correction unit and the rotation angle deviation correction unit may be separately set or combined, and the displacement deviation correction unit and the rotation angle deviation correction unit may be collectively referred to as a deviation correction unit.
由于根据本公开实施例的偏差补正方法应用了图形的对角线， 因此不需 要像现有技术那样假设形状 ABCD为规则矩形， 且 AB、 CD平行于 Y轴， AD、 BC平行于 X轴， 避免了可能出现的由于假设无法满足而导致偏差补正 准确性低的情况。 并且， 无论是规则图形还是不规则图形， 通常都具有对角 线， 因此本公开实施例的偏差补正方法可以应用于各种图形的偏差补正。 另 外， 在进行偏差补正时所参照的设计图形应该以掩膜曝光的实际图形为准， 而不是以设计的规则图形为准。 即， 在进行偏差补正时， 利用所计算的位移 偏差补正值与旋转角度偏差补正值对曝光的实际图形进行补正， 而不是对设 计的规则图形进行补正。 Since the deviation correction method according to an embodiment of the present disclosure applies the diagonal of the figure, it is not necessary to assume that the shape ABCD is a regular rectangle as in the prior art, and AB, CD are parallel to the Y axis, AD and BC are parallel to the X-axis, which avoids the possibility that the deviation correction accuracy is low due to the assumption that the assumption cannot be satisfied. Moreover, whether it is a regular figure or an irregular figure, it usually has a diagonal line, and thus the deviation correction method of the embodiment of the present disclosure can be applied to the deviation correction of various figures. In addition, the design pattern to be referred to when performing the offset correction should be based on the actual pattern of the mask exposure, rather than the regular pattern of the design. That is, when the deviation correction is performed, the actual pattern of the exposure is corrected by the calculated displacement deviation correction value and the rotation angle deviation correction value, instead of correcting the designed rule pattern.
需要说明的是， 以上描述中的形状 ABCD只是以四边形为例， 在实际应 用中， 需要进行偏差补正的图形可能是三角形或者五边形等多边形， 并且无 论该图形是规则图形还是不规则图形， 在进行 X、 Y方向的位移偏差补正时， 可以计算该图形上至少一个点在 X和 Y方向上的位移偏移量，所述图形上的 点可以是该图形上两条边相交的点或其它位置上的点。 具体的计算方法与前 述的相应 X和 Y方向的偏移量计算方法具有相同原理。  It should be noted that the shape ABCD in the above description is only taking the quadrilateral as an example. In practical applications, the graphic that needs to be offset-corrected may be a polygon such as a triangle or a pentagon, and whether the graphic is a regular graphic or an irregular graphic, When the displacement deviation correction in the X and Y directions is performed, the displacement offset of at least one point on the graph in the X and Y directions may be calculated, and the point on the graph may be a point at which the two sides of the graph intersect or Points on other locations. The specific calculation method has the same principle as the above-described offset calculation method for the corresponding X and Y directions.
比如： 以所述图形上的点是该图形上两条边相交的点为例 （所述图形上 的点是该图形上其它位置上的点时， 具体的计算方法亦同 ), 在只计算图形上 一个点在 X和 Y方向上的位移偏移量的情况下， 可以将该点在 X和 Y方向 上的位移偏移量作为整个图形的位移偏移量； 在计算图形上两个或两个以上 的点在 X和 Y方向上的位移偏移量的情况下， 可以计算其中的两个、 三个或 多个甚至全部点在 X和 Y方向上的位移偏移量， 并对得到的相应两个、 三个 或多个甚至全部点在 X和 Y方向上的位移偏移量求平均，将得到的平均值作 为整个图形的位移偏移量。  For example: taking the point on the graph as the point where the two sides of the graph intersect (the point on the graph is the point at other positions on the graph, the specific calculation method is the same), In the case of a displacement offset of a point on the graph in the X and Y directions, the displacement offset of the point in the X and Y directions can be used as the displacement offset of the entire graph; In the case of displacement displacements of two or more points in the X and Y directions, the displacement offsets of two, three or more or even all of the points in the X and Y directions can be calculated and obtained. The displacement offsets of the corresponding two, three or more, or even all points in the X and Y directions are averaged, and the average value obtained is taken as the displacement offset of the entire figure.
同理， 无论所述多边形是规则图形还是不规则图形， 在进行旋转角度的 偏差补正时， 可以计算该图形上至少一条对角线的旋转角度偏移量。 具体的 计算方法与前述的相应旋转角度的偏移量计算方法具有相同原理。  Similarly, whether the polygon is a regular graphic or an irregular graphic, when the deviation of the rotation angle is corrected, the rotation angle offset of at least one diagonal line on the graphic can be calculated. The specific calculation method has the same principle as the aforementioned offset calculation method of the corresponding rotation angle.
比如： 在只计算图形中一条对角线的旋转角度偏移量的情况下， 可以将 该对角线的旋转角度偏移量作为整个图形的旋转角度偏移量； 当图形包括多 条对角线时， 可以计算其中的两条、 三条或多条甚至全部对角线的旋转角度 偏移量， 并对得到的相应两条、 三条或多条甚至全部对角线的旋转角度偏移 量求平均， 将得到的平均值作为整个图形的旋转角度偏移量。  For example: In the case of calculating only the rotation angle offset of a diagonal line in the graph, the rotation angle offset of the diagonal line can be used as the rotation angle offset of the entire graph; when the graph includes multiple diagonals For the line, you can calculate the rotation angle offset of two, three or more or even all of the diagonals, and find the rotation angle offset of the corresponding two, three or more or even all diagonals. On average, the average value obtained is taken as the rotation angle offset of the entire graph.
在进行旋转角度的偏差补正时， 有一个特例， 那就是三角形。 由于三角 形没有对角线， 因此在针对三角形的图形进行旋转角度的偏差补正时， 可以 计算该图形上至少一条边的旋转角度偏移量， 计算所述边的旋转角度偏移量 的方法与上述的计算对角线的旋转角度偏移量的方法相同。 需要说明的是， 需要进行偏差补正的图形基本上是规则或不规则的多边形， 一般不会出现绝 对标准的三角形。 There is a special case when correcting the deviation of the rotation angle, that is, a triangle. Since the triangle has no diagonal lines, when the deviation of the rotation angle is corrected for the triangle pattern, The method of calculating the rotation angle offset of at least one side of the graph and calculating the rotation angle offset of the edge is the same as the method of calculating the rotation angle offset of the diagonal. It should be noted that the graphs that need to be corrected for deviations are basically regular or irregular polygons, and generally no absolute standard triangles appear.
结合以上描述可知， 根据本公开实施例的偏差补正方法可以通过如图 3 所示的流程实现。  As can be seen from the above description, the deviation correction method according to an embodiment of the present disclosure can be realized by the flow shown in FIG.
在步骤 310中，计算曝光后形成的图形上至少一个点在 X和 Y方向上的 位移偏移量， 还计算所述图形上至少一条对角线的旋转角度偏移量。  In step 310, a displacement offset of at least one point on the graph formed after exposure in the X and Y directions is calculated, and a rotation angle offset of at least one diagonal on the graph is also calculated.
在步骤 320中， 根据得到的位移偏移量以及旋转角度偏移量进行偏差补 正。 本步骤可以由逻辑处理器等执行单元实现。  In step 320, the offset correction is performed based on the obtained displacement offset and the rotation angle offset. This step can be implemented by an execution unit such as a logical processor.
综上所述可见， 无论是根据本公开实施例的偏差补正方法还是偏差补正 装置， 本公开的偏差 卜正技术利用曝光后形成的图形的对角线的旋转角度进 行偏差补正， 比现有技术中计算四条边的旋转角度更能反应曝光后形成图形 的旋转趋势， 有效提高了偏差补正准确性； 并且， 由于对设计图形没有形状 和位置的要求， 因此对何种图形均能够计算出曝光后形成图形的旋转角度； 另外， 进行偏差补正时的具体计算次数从现有技术的四次变为两次， 因此偏 差补正的操作更加筒便、 快捷。  As described above, whether the deviation correction method or the deviation correction device according to the embodiment of the present disclosure, the deviation correction technique of the present disclosure utilizes the rotation angle of the diagonal of the pattern formed after the exposure to perform deviation correction, which is higher than the prior art. Calculating the rotation angle of the four sides in the middle can more reflect the rotation tendency of the pattern formed after exposure, effectively improving the accuracy of the deviation correction; and, because there is no shape and position requirement for the design pattern, it is possible to calculate which type of pattern can be calculated after exposure. The rotation angle of the pattern is formed. In addition, the number of calculations for the deviation correction is changed from four times in the prior art to two times, so that the operation of the deviation correction is more convenient and quick.
以上所述， 仅为本公开的较佳实施例而已， 并非用于限定本公开的保护 范围。  The above description is only for the preferred embodiments of the present disclosure, and is not intended to limit the scope of the disclosure.

Claims

权 利 要 求 书 claims
1、 一种偏差补正方法， 包括： 1. A deviation correction method, including:
计算曝光后形成的图形上至少一个点在 X和 Y方向上的位移偏移量； 计算所述图形上至少一条对角线的旋转角度偏移量； 以及 Calculate the displacement offset in the X and Y directions of at least one point on the figure formed after exposure; Calculate the rotation angle offset of at least one diagonal line on the figure; and
根据得到的位移偏移量以及旋转角度偏移量进行偏差补正。 Deviation correction is performed based on the obtained displacement offset and rotation angle offset.
2、 根据权利要求 1所述的方法， 其中， 2. The method according to claim 1, wherein,
在只计算所述图形上一个点在 X和 Y方向上的位移偏移量的情况下，将 该点在 X和 Y方向上的位移偏移量作为整个图形的位移偏移量； 或者 In the case where only the displacement offset of a point on the graph in the X and Y directions is calculated, the displacement offset of the point in the X and Y directions is used as the displacement offset of the entire graph; or
在计算所述图形上两个或两个以上的点在 X和 Y方向上的位移偏移量的 情况下， 计算其中的两个、 三个或多个甚至全部点在 X和 Y方向上的位移偏 移量， 并对得到的相应两个、 三个或多个甚至全部点在 X和 Y方向上的位移 偏移量求平均， 将得到的平均值作为整个图形的位移偏移量。 When calculating the displacement and offset of two or more points on the graph in the X and Y directions, calculate the displacement of two, three or more or even all of the points in the X and Y directions. Displacement offset, and average the obtained displacement offset of two, three or more or even all points in the X and Y directions, and use the average value as the displacement offset of the entire graphic.
3、 根据权利要求 1所述的方法， 其中， 3. The method according to claim 1, wherein,
在只计算所述图形中一条对角线的旋转角度偏移量的情况下， 将该对角 线的旋转角度偏移量作为整个图形的旋转角度偏移量； 或者 In the case where only the rotation angle offset of one diagonal line in the figure is calculated, the rotation angle offset of the diagonal line is used as the rotation angle offset of the entire figure; or
当所述图形包括多条对角线时， 计算其中的两条、 三条或多条甚至全部 对角线的旋转角度偏移量， 并对得到的相应两条、 三条或多条甚至全部对角 线的旋转角度偏移量求平均， 将得到的平均值作为整个图形的旋转角度偏移 量。 When the figure includes multiple diagonals, calculate the rotation angle offset of two, three or more or even all diagonals, and calculate the corresponding two, three or more or even all diagonals obtained. The rotation angle offset of the line is averaged, and the average value is used as the rotation angle offset of the entire graphic.
4、 根据权利要求 1至 3任一项所述的方法， 其中， 基于向量夹角的数学 计算方法计算对角线的旋转角度偏移量。 4. The method according to any one of claims 1 to 3, wherein the rotation angle offset of the diagonal is calculated based on a mathematical calculation method of the vector angle.
5、 根据权利要求 1所述的方法， 其中， 所述图形上的点是该图形上两条 边相交的点或其它位置上的点。 5. The method according to claim 1, wherein the point on the graph is a point where two sides of the graph intersect or a point at another position.
6、 一种偏差补正装置， 包括偏差补正单元、 以及执行单元； 其中， 所述偏差补正单元用于计算曝光后形成的图形上至少一个点在 X和 Y方 向上的位移偏移量， 还用于计算所述图形上至少一条对角线的旋转角度偏移 量； 6. A deviation correction device, including a deviation correction unit and an execution unit; wherein the deviation correction unit is used to calculate the displacement offset of at least one point in the X and Y directions on the pattern formed after exposure, and is also used Calculate the rotation angle offset of at least one diagonal line on the graph;
所述执行单元用于根据所述偏差补正单元得到的位移偏移量以及旋转角 度偏移量进行偏差补正。 The execution unit is configured to perform deviation correction according to the displacement offset and rotation angle offset obtained by the deviation correction unit.
7、 根据权利要求 6所述的装置， 其中， 所述偏差补正单元包括位移偏差 补正单元， 用于： 7. The device according to claim 6, wherein the deviation correction unit includes a displacement deviation correction unit for:
在只计算所述图形上一个点在 X和 γ方向上的位移偏移量的情况下，将 该点在 X和 Y方向上的位移偏移量作为整个图形的位移偏移量； 或， In the case where only the displacement offset of a point on the graph in the X and γ directions is calculated, the displacement offset of the point in the X and Y directions is regarded as the displacement offset of the entire graph; or,
在计算所述图形上两个或两个以上的点在 X和 Y方向上的位移偏移量的 情况下， 计算其中的两个、 三个或多个甚至全部点在 X和 Y方向上的位移偏 移量， 并对得到的相应两个、 三个或多个甚至全部点在 X和 Y方向上的位移 偏移量求平均， 将得到的平均值作为整个图形的位移偏移量。 When calculating the displacement and offset of two or more points on the graph in the X and Y directions, calculate the displacement of two, three or more or even all of the points in the X and Y directions. Displacement offset, and average the obtained displacement offset of two, three or more or even all points in the X and Y directions, and use the average value as the displacement offset of the entire graphic.
8、 根据权利要求 6所述的装置， 其中， 所述偏差补正单元包括旋转角度 偏差补正单元， 用于： 8. The device according to claim 6, wherein the deviation correction unit includes a rotation angle deviation correction unit for:
在只计算所述图形中一条对角线的旋转角度偏移量的情况下， 将该对角 线的旋转角度偏移量作为整个图形的旋转角度偏移量； 或者 In the case where only the rotation angle offset of one diagonal line in the figure is calculated, the rotation angle offset of the diagonal line is used as the rotation angle offset of the entire figure; or
当所述图形包括多条对角线时， 计算其中的两条、 三条或多条甚至全部 对角线的旋转角度偏移量， 并对得到的相应两条、 三条或多条甚至全部对角 线的旋转角度偏移量求平均， 将得到的平均值作为整个图形的旋转角度偏移 量。 When the figure includes multiple diagonals, calculate the rotation angle offset of two, three or more or even all diagonals, and calculate the corresponding two, three or more or even all diagonals obtained. The rotation angle offset of the line is averaged, and the average value is used as the rotation angle offset of the entire graphic.
9、 根据权利要求 6至 8任一项所述的装置， 其中， 所述偏差补正单元用 于基于向量夹角的数学计算方法计算对角线的旋转角度偏移量。 9. The device according to any one of claims 6 to 8, wherein the deviation correction unit is used to calculate the rotation angle offset of the diagonal line based on a mathematical calculation method of the vector angle.
10、 根据权利要求 6所述的装置， 其中， 所述图形上的点是该图形上两 条边相交的点或其它位置上的点。 10. The device according to claim 6, wherein the point on the graph is a point where two sides of the graph intersect or a point at another position.
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