WO2014125095A1 - Phase shift device - Google Patents

Phase shift device Download PDF

Info

Publication number
WO2014125095A1
WO2014125095A1 PCT/EP2014/052964 EP2014052964W WO2014125095A1 WO 2014125095 A1 WO2014125095 A1 WO 2014125095A1 EP 2014052964 W EP2014052964 W EP 2014052964W WO 2014125095 A1 WO2014125095 A1 WO 2014125095A1
Authority
WO
WIPO (PCT)
Prior art keywords
phase shift
shift device
signal electrode
pieces
tunable
Prior art date
Application number
PCT/EP2014/052964
Other languages
French (fr)
Inventor
Rolf Jakoby
Onur Hamza KARABEY
Hu WENJUAN
Original Assignee
Technische Universität Darmstadt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universität Darmstadt filed Critical Technische Universität Darmstadt
Priority to CN201480021255.4A priority Critical patent/CN105308789B/en
Priority to ES14707670.7T priority patent/ES2623252T3/en
Priority to US14/767,131 priority patent/US10141620B2/en
Priority to EP14707670.7A priority patent/EP2956986B1/en
Priority to KR1020157024272A priority patent/KR102326919B1/en
Priority to JP2015557448A priority patent/JP6362624B2/en
Publication of WO2014125095A1 publication Critical patent/WO2014125095A1/en
Priority to US16/196,570 priority patent/US10629973B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/18—Phase-shifters
    • H01P1/184—Strip line phase-shifters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/06—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied voltage, i.e. ferroelectric capacitors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/18—Phase-shifters
    • H01P1/181—Phase-shifters using ferroelectric devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q13/00—Waveguide horns or mouths; Slot antennas; Leaky-waveguide antennas; Equivalent structures causing radiation along the transmission path of a guided wave
    • H01Q13/10—Resonant slot antennas
    • H01Q13/106—Microstrip slot antennas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04—Resonant antennas
    • H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q9/00—Electrically-short antennas having dimensions not more than twice the operating wavelength and consisting of conductive active radiating elements
    • H01Q9/04—Resonant antennas
    • H01Q9/0407—Substantially flat resonant element parallel to ground plane, e.g. patch antenna
    • H01Q9/045—Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means
    • H01Q9/0457—Substantially flat resonant element parallel to ground plane, e.g. patch antenna with particular feeding means electromagnetically coupled to the feed line

Definitions

  • the present invention relates a phase shift device with at least one tunable component.
  • This phase shift is frequency independent (phase shifter) or frequency dependent
  • radio frequency is meant a rate of oscillation in the range of about 3 kHz to 300 GHz, which corresponds to the frequency of radio waves and of the alternating currents which carry and transmit radio signals.
  • phase shift devices like e.g. semiconductors, MEMS or tunable dielectrics to design agile RF components.
  • Phase shift devices are one of the key elements for
  • Microwave components such as phase shift devices can be formed from microstrip lines.
  • a microstrip line is a type of electrical planar transmission line which can be
  • fabricated using printed circuit board technology It consists of a conducting strip shaped electrode that is separated from a planar ground electrode by a dielectric layer known as the substrate.
  • the substrate can be formed by liquid crystal polymers (LCPs) .
  • LCPs liquid crystal polymers
  • the LCP material is not tunable with respect to the relative permittivity of this material. Therefore, due to the lack of tunable characteristic features that are relevant for the configuration of a tunable RF device, making use of LCPs is not convenient for designing of a tunable device such as a varactor.
  • Liquid crystals exhibits features and properties of conventional liquids as well as of solid crystals. For instance, an LC may flow like a liquid, but its molecules may be orientated in a crystal-like way. In contrast to liquid crystal polymers (LCPs), the relative permittivity of liquid crystals (LCs) may be affected by e.g. a voltage applied to the LC material.
  • LCPs liquid crystal polymers
  • coplanar waveguides have been loaded with shunt LC varactors.
  • the tuning speed of such an LC devices is affected by its topology.
  • One of the known drawbacks of such devices is the high metallic loss of the CPW.
  • the varactors were implemented by patches as floating electrodes bridging the center conductor and the ground plane. This results in reduced tuning efficiency and high insertion loss of such an artificial transmission line.
  • Task of the invention Therefore it is the task of the invention to reduce
  • phase shift devices according to prior art and to provide for a favorable phase shift device with low response time as well as with a high performance, that comprises both features simultaneously in a compact and planar configuration.
  • the invention relates to a phase shift device that is formed by a signal electrode an a ground electrode which are separated by a dielectric substance, and further comprising a liquid crystal material, characterized in that the signal electrode of the planar transmission line is divided into several pieces and comprises overlapping areas of adjacent pieces that are filled with a tunable liquid crystal material, thereby forming a dielectric tunable component (varactor) with a metal-insulator-metal type capacitor .
  • a transmission line is formed by two electrodes: A signal electrode and a ground electrode.
  • the material of the electrodes is preferably low resistive RF electrode material such as Ag, Cu or Au . Other materials or alloys with similar conductive properties are possible.
  • the signal electrode is divided into several pieces along the length, i.e. along the propagation direction. These pieces are e.g. implemented as top side pieces on the top side of bottom glass and as bottom side pieces on the bottom side of top glass.
  • the top glass and the bottom glass are stacked in such a way that a in plan view, i.e. when viewed perpendicular to the propagation of the signal a continuous signal electrode is formed.
  • the terms top glass and bottom glass do not indicate that other suitable materials are waived.
  • there are some sections where the top side pieces and the bottom side pieces of the signal electrode are overlapping. At least, these overlapping areas between the two glasses and the top side piece and the respective bottom side piece of the signal electrode are filled with a tunable liquid crystal material.
  • each overlapping area forms a metal-insulator- metal type capacitor.
  • the insulator is the tunable liquid crystal material
  • this area forms a dielectric tunable component (varactor) .
  • This tunable component enables to construct this phase shift device in a very compact way.
  • the varactors Due to LC technology, the varactors feature low losses compared to other technologies such as semiconductors for frequencies higher than 5 GHz preferably frequencies higher than 10 GHz. Additionally, since microstrip line is used, the phase shifter losses would be much less than compared to [6,7].
  • the several pieces of the signal electrode are arranged at two or more different distance levels with respect to the ground electrode. Arrangement of the several pieces of the signal electrode at two different levels allows for easy and cost- saving fabrication of such a device, as the two different levels can be on two surfaces of substrate layers. Three or more different distance levels allow for complex
  • the tunable liquid crystal material can be arranged as a single and continuous layer between several pieces of the signal electrode that are arranged at two different
  • this continuous, i.e. unbroken layer can be adapted and limited to the shape and extension of the signal electrode that is defined as a composed covering of the several pieces.
  • This continuous layer can completely cover the usually larger ground electrode.
  • the continuous layer can be arranged between two adjacent layers of either
  • the tunable liquid crystal material in order to save tunable liquid crystal material or to allow for separate control of confined spatial regions of the tunable liquid crystal material it is possible to arrange the tunable liquid crystal material as several confined layer areas between the overlapping areas of adjacent pieces of the signal electrode at two different distance levels.
  • the pieces of the signal electrode are arranged in a straight line.
  • the transmission line may be meandered, e.g. in an N-shape or in spiral shape. This allows for a transmission line length that is much longer than the physical dimension of the phase shift device.
  • the phase shift along the transmission line is exclusively or at least predominantly due to the tunable varactors that are of the metal-insulator-metal capacitor type and that are arranged along the signal electrode.
  • the configuration, shape and arrangement of the pieces of the signal electrode should not result in resonant structures that significantly affects the time delay for the signal propagation along the transmission line.
  • a phase shift device can be characterized in that the signal electrode is divided into several pieces along the length of the transmission line, whereby said several pieces are
  • a LC mixture is used, whose relative dielectric constant is continuously tunable between 2.4 and 3.2 by application of a tuning voltage and surface alignment method.
  • the maximum dielectric loss tangent tan ⁇ of this material is less than 0.006 for all tuning states.
  • the LC layer (from metal to metal) is specified to 3 pm to obtain a fast response time that is less than 25 ms .
  • the device provides for a 367°
  • FoM frequency-dependent figure of merit
  • the FoM of the exemplary embodiment is 60°/dB at 20 GHz .
  • the planar transmission line comprises at least two serially connected dielectric tunable components that are connected by a non-overlapping section of the signal electrode.
  • the signal transmission along the planar transmission line is dominantly and basically solely affected be the number and configuration of the varactors, i.e. the tunable dielectric components that are arranged along the signal electrode.
  • the phase shift is easily controlled and modified by application of a tuning bias voltage to the tunable liquid crystal material that forms the tunable dielectric material between the overlapping areas of adjacent pieces of the signal
  • electrode i.e. the parallel plate like tunable capacitor that acts as the varactor.
  • the tuning is performed by control electrodes. These electrodes operate as control element. These electrodes transmit the different bias voltages to drive the varactors through bias lines.
  • the bias lines are preferably made of a low conductive material in order not to affect the RF circuitry. For this purpose, low conductive electrodes can be used since they become transparent for the RF signal. Typical materials for the bias lines are preferably ITO (indium tin oxide) , NiCr (nickel chromium) or some other alloys having a conductivity of less than 10e5 S/m.
  • the phase shift device is combined with a radiating element to transmit the RF signal.
  • a radiating element are also referred to as patch antennas.
  • the radiating elements and the feed lines are usually photoetched on the dielectric substrate.
  • the radiating elements, i.e. the patch antennas are configured as square, rectangular, thin strip (dipole) , circular, elliptical, triangular, or any other formation.
  • LC liquid crystals
  • LC can be employed as a tunable dielectric, specifically optimized LC mixtures offer high performance at microwave frequencies with a loss tangent below 0.006.
  • the relative tunability defined as the ratio of the tuning range of the minimum permittivity to the maximum
  • permittivity is preferably between 5% and 30% or between 10% and 25% or between 15% and 30% or between 5% and 14%.
  • LC based planar phase shift devices are usually customized depending on desired antenna performance.
  • the phase shift device is configured and adapted in order to reduce insertion loss, to increase beam steering speed and to allow for wide range scans.
  • a LC mixture optimized for RF applications is used.
  • a possibility to realize tunable RF components with LC is presented in Fig. 3. It shows the cross section of an inverted microstrip line using LC as a tunable substrate for different bias voltages.
  • the setup consists of two stacked substrates, the top one carrying the microstrip line and the lower one the ground plane. In between the two substrates, a thin LC layer is encapsulated.
  • the phase shift device according to the invention can be combined with a radiating element e.g. in order to provide for phased array antenna.
  • a radiating element e.g. in order to provide for phased array antenna.
  • the planar transmission line and the antenna are coupled by using an aperture coupling method.
  • the planar transmission line and the antenna are coupled by using a proximity coupling method.
  • the planar transmission line and the antenna are coupled directly, e.g. using a inset-fed technique or through an vertical interconnect .
  • Fig. 1 a schematic view of a typical LC molecule and its temperature dependency
  • FIG. 2 a schematic view of a planar transmission line according to prior art
  • Fig. 3a to 3d a schematic perspective view, a cross- sectional view and a topside view of a phase shift device with several LC varactors according to the invention and a schematic representation of tunable LC varactors that are arranged within the signal electrode of the phase shift device,
  • FIG. 4a and 4b a cross-sectional enlarged view of a single overlapping area of adjacent pieces of the signal electrode within the phase shift device according to Figures 3a to
  • Fig. 5 a schematic cross-section view of a first
  • FIG. 6 a schematic cross-section view of a second
  • FIG. 7 a schematic cross-section view of a third
  • Fig. 8 a schematic cross-section view of a different configuration of the phase shift device according to
  • FIG. 3a to 3d whereby the several pieces of the signal electrode are arranged on three different distance levels with respect to the ground electrode.
  • liquid crystal (LC) materials are anisotropic. This property stems from the rod-like shape of the
  • the molecules Since the material is liquid, the molecules feature only a weak molecular adhesion, and thus their orientation in the bulk can be changed. Owing to the rod- like shape, the molecules in a bulk tend to orient
  • the relative permittivity parallel to the molecule long axis is denoted as ⁇ ⁇ , i i and perpendicular to the long axis as s r ,L. If such a liquid crystal material is arranged between a signal electrode and a ground electrode of a strip shaped transmission line, the transmission speed of a radio frequency signal along the transmission line will be affected by the permittivity of the liquid crystal
  • An electric field can be generated e.g. by application of a control voltage to the liquid crystal material and will affect the orientation of the rod-like shaped liquid crystal molecules.
  • a control voltage to affect the orientation of the rod-like shaped liquid crystal molecules.
  • Fig. 2 shows a prior art planar transmission line formed as a microstrip line. It consist of a ground electrode 1 and a continuous, i.e. unbroken signal electrode 2 which are separated by a layer of a dielectric substrate 3. The propagation direction is along the direction of the signal electrode 2 and indicated by an arrow.
  • Figures 3a, 3b and 3c show a perspective view, a cross- section view and a schematic representation of main
  • phase shift device line comprises a ground electrode 1 and a signal electrode 2 which form a planar transmission line.
  • the signal electrode 2 is composed of several pieces 4 and 5 of low resistive RF electrode material that are arranged at two different distance levels perpendicular to and with respect to the ground electrode 1.
  • the several pieces 4, 5 are aligned along the transmission line, i.e. the signal propagation path as defined by the direction of the signal electrode 2 and indicated by an arrow.
  • the several pieces 4, 5 of the signal electrode 2 are arranged with respect to each other in order to create overlapping areas 6 of adjacent pieces 4, 5.
  • the space between the several pieces 4, 5 of the signal electrode 2 is filled with a tunable liquid crystal
  • each adjacent piece 4, 5 there are overlapping areas 6.
  • the pieces 4, 5 are stacked and arranged in such a manner that apparently a continuous signal electrode 2 is formed when viewed from the top view, i.e. perpendicular to the ground electrode 1.
  • On top of the tunable liquid crystal 7 is a second layer 3 ' of a non- tunable dielectric substrate.
  • the several pieces 4, 5 of the signal electrode 2 can be e.g. printed or coated or laminated onto the corresponding surfaces of the layers 3 and 3' of the non-tunable dielectric substrate.
  • the pieces 4, 5 of the signal electrode 2 are connected with control elements 8 (only shown in Figures 3b and 3c) that consist of a low conductive material, preferably ITO (indium tin oxide), which is transparent for RF .
  • control elements 8 transmit the bias voltage that can be applied in order to tune the liquid crystal material 7 in the overlapping areas 6, i.e. in order to modify the relative permittivity of the liquid crystal material 7 that is between the overlapping areas 6 of adjacent pieces 4, 5 of the signal electrode 2 which affects the transmission properties of a RF signal that is transmitted along the planar transmission line.
  • the time delay of signal transmission along the planar transmission line i.e. the phase shift of a signal that is transmitted along the transmission line of the phase shift device according to the invention is generated by the successive time delays for each signal jump between the adjacent pieces 4, 5 of the signal electrode 2 that are arranged at different distance levels with respect to the ground electrode 1.
  • the total time delay mainly depends on the number of signal jumps during the
  • Each single jump causes a certain time delay that can be modified by tuning the tunable liquid crystal material 7 at the corresponding overlapping area 6.
  • the total time delay is the small time delay of a single jump multiplied by the number of jumps along the planar transmission line.
  • the planar transmission line of the phase shift device comprises at least two but preferably many serially connected dielectric tunable components (varactors) that are connected by a non- overlapping section of the signal electrode 2.
  • a schematic representation of the planar transmission line is shown in Fig. 3d.
  • Figures 4a and 4b show a more detailed cross-section view and a corresponding schematic representation of a single varactor configuration, i.e. the overlapping area 6 between two adjacent pieces 4, 5 of the signal electrode 2 and the ground electrode 1 in the phase shift device as shown in Figures 3a to 3d.
  • FIGS. 5, 6 and 7 show different embodiments for a
  • Fig. 5 the several pieces 4, 5 of the signal electrode 2 of the planar transmission line and the antenna patch 9 are coupled by using an aperture coupling method.
  • the antenna patch 9 is separated from the ground electrode 1 by a layer 10 of a non-tunable dielectric substrate. The energy that is transmitted along the
  • the transmission line i.e. along the signal electrode 2 and ground electrode 1 is coupled to the antenna patch 9 through a nearby slot 11 within the ground electrode 1.
  • the planar transmission line and the antenna patch 9 are coupled by using a proximity coupling method.
  • the planar transmission line and the antenna patch 9 are coupled by using an insert feed coupling method.
  • Fig. 8 shows a different embodiment of the phase shift device according to the invention.
  • some additional pieces 12 of the several pieces 4, 5 and 12 are arranged at a third distance level with respect to the ground electrode 1.
  • the additional pieces 12 are mounted on another surface of the layer 3' of the non-tunable dielectric substrate that is opposed to the surface on which the pieces 5 of the second distance level are mounted.
  • the time delay for a signal jump between the additional pieces 12 and the adjacent pieces 5 cannot be modified, as the layer 3' that separates the second distance level with pieces 5 from the third distance level with additional pieces 5 is made of a non-tunable dielectric substrate.
  • the dielectric tunable varactor wherever an overlapping area 6 exist between pieces 5 and additional pieces 12. Therefore, in order to be able to tune the phase shift it might be advantageous to achieve an overlapping area between 12 and 4. Nevertheless, the additional signal jumps will add a fixed time delay that only depends on the number of these signal jumps, resulting in e.g. an offset that can be manufactured in a very cost-saving manner.
  • the sequence of overlapping pieces at three different distance levels may differ and e.g. a first piece 4 on the lowest distance level may overlap with a subsequent piece 12 on the highest distance level, followed by another piece on the middle distance level.
  • the RF signal then jumps from the lowest distance level to the highest distance level and
  • a second layer of a tunable dielectric material between the several pieces 4, 5 and the additional pieces 12 of the signal electrode 2.
  • Such a second layer may consist of a completely different tunable dielectric material or of the same liquid crystal material that is used for the first layer of the tunable liquid crystal material 7. Even when the second layer equals the first layer of liquid crystal material 7, by use of
  • the time delay for signals jumps between the second and the third distance level may by controlled differently and result in many more possibilities for controlling the phase shift device and the resulting phase shift .

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Waveguide Aerials (AREA)
  • Waveguides (AREA)

Abstract

A phase shift device comprises a planar transmission line that is formed by a signal electrode (2) an a ground electrode (1) which are separated by a dielectric substance, whereby the signal electrode (2) of the planar transmission line is divided into several pieces (4, 5) and comprises overlapping areas (6) of adjacent pieces (4, 5) that are filled with a tunable liquid crystal material (7), thereby forming a dielectric tunable component (varactor) with a metal-insulator-metal type capacitor. The several pieces (4, 5) of the signal electrode (2) are arranged at two or more different distance levels with respect to the ground electrode (1). The tunable liquid crystal material (7) is arranged as a continuous layer between several pieces (4, 5) of the signal electrode (2) that are arranged at two different distance levels.

Description

Technische Universitat Darmstadt
Phase shift device
Description
The present invention relates a phase shift device with at least one tunable component. This phase shift is frequency independent (phase shifter) or frequency dependent
(variable delay line) .
The shortage in the available frequency spectrum for radio communications and the requirement for more functionality in smaller volume increase the demand for reconfigurable components. Hereinafter radio frequency (RF) is meant a rate of oscillation in the range of about 3 kHz to 300 GHz, which corresponds to the frequency of radio waves and of the alternating currents which carry and transmit radio signals. Depending on the device requirements there are different possible solutions for phase shift devices like e.g. semiconductors, MEMS or tunable dielectrics to design agile RF components. Phase shift devices are one of the key elements for
reconfigurable electronic beam steering antennas.
State of the Art / Prior Art From the state of the art the following documents are cited as examples of the above mentioned phase shift devices: 1. US patent US 8,305,259 B2
2. US patent US 8,022,861 B2
3. US patent US 8,013,688 B2
4. PCT patent application WO 2012/123072 Al
5. US patent application US 2009/0302976 Al
6. F. Goelden, A. Gaebler, M. Goebel, A. Manabe, S.
Mueller, and R. Jakoby, "Tunable liquid crystal phase shifter for microwave frequencies , "Electronics Letters, vol. 45, no. 13, pp. 686-687, 2009.
7. O. H. Karabey, F. Goelden, A. Gaebler, S. Strunck, and R. Jakoby, "Tunable 5 loaded line phase shifters for microwave applications," inProc. IEEE MTT-S Int. Microwave Symp. Digest (MTT) , 2011, pp. 1-4.
8. US patent application US 5,936,484 A
9. Japanese patent application JP 2003/008310 A
10. Onur Hamza Karabey et al . , "Continuously
Polarization Agile Antenna by Using Liquid Crystal- Based Tunable Variable Delay Lines", IEEE vol. 61, no. 1, 1. January 2013, pages 70-76, ISSN: 0018-926X
11. US patent application US 2009/073332 Al
Microwave components such as phase shift devices can be formed from microstrip lines. A microstrip line is a type of electrical planar transmission line which can be
fabricated using printed circuit board technology. It consists of a conducting strip shaped electrode that is separated from a planar ground electrode by a dielectric layer known as the substrate.
As in [1, 3], the substrate can be formed by liquid crystal polymers (LCPs) . However, the LCP material is not tunable with respect to the relative permittivity of this material. Therefore, due to the lack of tunable characteristic features that are relevant for the configuration of a tunable RF device, making use of LCPs is not convenient for designing of a tunable device such as a varactor.
Liquid crystals (LCs) exhibits features and properties of conventional liquids as well as of solid crystals. For instance, an LC may flow like a liquid, but its molecules may be orientated in a crystal-like way. In contrast to liquid crystal polymers (LCPs), the relative permittivity of liquid crystals (LCs) may be affected by e.g. a voltage applied to the LC material.
In prior art [6], coplanar waveguides (CPW) have been loaded with shunt LC varactors. The tuning speed of such an LC devices is affected by its topology. One of the known drawbacks of such devices is the high metallic loss of the CPW. Additionally, due to the CPW, the varactors were implemented by patches as floating electrodes bridging the center conductor and the ground plane. This results in reduced tuning efficiency and high insertion loss of such an artificial transmission line.
Similarly in [7], the tuning efficiency of the LC varactors is improved by using a parallel plate capacitor topology. However, there a slotline was loaded with these LC
varactors in shunts. Indeed, loading a microstrip line results in higher performance because microstrip lines feature system-inherently low losses.
Task of the invention Therefore it is the task of the invention to reduce
disadvantages of phase shift devices according to prior art and to provide for a favorable phase shift device with low response time as well as with a high performance, that comprises both features simultaneously in a compact and planar configuration.
Summary of the invention The invention relates to a phase shift device that is formed by a signal electrode an a ground electrode which are separated by a dielectric substance, and further comprising a liquid crystal material, characterized in that the signal electrode of the planar transmission line is divided into several pieces and comprises overlapping areas of adjacent pieces that are filled with a tunable liquid crystal material, thereby forming a dielectric tunable component (varactor) with a metal-insulator-metal type capacitor .
A transmission line (microstrip line) is formed by two electrodes: A signal electrode and a ground electrode. The material of the electrodes is preferably low resistive RF electrode material such as Ag, Cu or Au . Other materials or alloys with similar conductive properties are possible. The signal electrode is divided into several pieces along the length, i.e. along the propagation direction. These pieces are e.g. implemented as top side pieces on the top side of bottom glass and as bottom side pieces on the bottom side of top glass. The top glass and the bottom glass are stacked in such a way that a in plan view, i.e. when viewed perpendicular to the propagation of the signal a continuous signal electrode is formed. The terms top glass and bottom glass do not indicate that other suitable materials are waived. Additionally, there are some sections where the top side pieces and the bottom side pieces of the signal electrode are overlapping. At least, these overlapping areas between the two glasses and the top side piece and the respective bottom side piece of the signal electrode are filled with a tunable liquid crystal material.
Therefore, each overlapping area forms a metal-insulator- metal type capacitor. In this case, since the insulator is the tunable liquid crystal material, this area forms a dielectric tunable component (varactor) . This tunable component enables to construct this phase shift device in a very compact way.
Due to LC technology, the varactors feature low losses compared to other technologies such as semiconductors for frequencies higher than 5 GHz preferably frequencies higher than 10 GHz. Additionally, since microstrip line is used, the phase shifter losses would be much less than compared to [6,7].
According to an embodiment of the invention the several pieces of the signal electrode are arranged at two or more different distance levels with respect to the ground electrode. Arrangement of the several pieces of the signal electrode at two different levels allows for easy and cost- saving fabrication of such a device, as the two different levels can be on two surfaces of substrate layers. Three or more different distance levels allow for complex
configurations and e.g. different layers of LC material that is located between two adjacent distance levels.
The tunable liquid crystal material can be arranged as a single and continuous layer between several pieces of the signal electrode that are arranged at two different
distance levels. The boundaries of this continuous, i.e. unbroken layer can be adapted and limited to the shape and extension of the signal electrode that is defined as a composed covering of the several pieces. This continuous layer can completely cover the usually larger ground electrode. For many applications the continuous layer can be arranged between two adjacent layers of either
electrodes or substrate layers and completely fill a cavity between those dielectric substrate layers. This allows for fast and cheap fabrication of such an arrangement e.g. by use of well-established liquid crystal display technology.
However, in order to save tunable liquid crystal material or to allow for separate control of confined spatial regions of the tunable liquid crystal material it is possible to arrange the tunable liquid crystal material as several confined layer areas between the overlapping areas of adjacent pieces of the signal electrode at two different distance levels.
For most applications arranging the pieces of the signal electrode parallel to the propagation direction, e.g.
linearly along the propagation direction of a radio frequency signal is advantageous, since this prevents any discontinues, resulting in less losses. If required or feasible, the pieces of the signal electrode are arranged in a straight line. However, for some applications that require many varactors along the transmission line, the transmission line may be meandered, e.g. in an N-shape or in spiral shape. This allows for a transmission line length that is much longer than the physical dimension of the phase shift device.
The phase shift along the transmission line is exclusively or at least predominantly due to the tunable varactors that are of the metal-insulator-metal capacitor type and that are arranged along the signal electrode. The configuration, shape and arrangement of the pieces of the signal electrode should not result in resonant structures that significantly affects the time delay for the signal propagation along the transmission line.
A phase shift device according to an embodiment of the invention can be characterized in that the signal electrode is divided into several pieces along the length of the transmission line, whereby said several pieces are
alternatingly implemented as top side pieces on the top side and as bottom side pieces on the bottom side of a non- tunable dielectric substrate and whereby at some sections there are overlapping areas between an top side piece and an adjacent bottom side piece of the signal electrode, and whereby these overlapping areas are filled with a tunable liquid crystal material and these overlapping areas form a dielectric tunable component (varactor) with a metal- insulator-metal type capacitor.
In a exemplary embodiment the non-tunable dielectric substrate that supports the several pieces of the signal electrode is chosen to be a 700 pm thick borofloat glass from Schott AG with sr, glas s = 4.6 and its loss tangent tan5 = 0.0037 at 25°C and at 1 MHz. A LC mixture is used, whose relative dielectric constant is continuously tunable between 2.4 and 3.2 by application of a tuning voltage and surface alignment method. The maximum dielectric loss tangent tan δ of this material is less than 0.006 for all tuning states. The LC layer (from metal to metal) is specified to 3 pm to obtain a fast response time that is less than 25 ms . The device provides for a 367°
differential phase shift at 20 GHz with 6.1 dB insertion loss at maximum.
An important parameter for quantifying the RF performance of these devices is a frequency-dependent figure of merit (FoM) . This is defined by the ratio of the maximum
differential phase shift and the highest insertion loss over all tuning states. Hence, the FoM of the exemplary embodiment is 60°/dB at 20 GHz .
In a further embodiment the planar transmission line comprises at least two serially connected dielectric tunable components that are connected by a non-overlapping section of the signal electrode. The signal transmission along the planar transmission line is dominantly and basically solely affected be the number and configuration of the varactors, i.e. the tunable dielectric components that are arranged along the signal electrode. The phase shift is easily controlled and modified by application of a tuning bias voltage to the tunable liquid crystal material that forms the tunable dielectric material between the overlapping areas of adjacent pieces of the signal
electrode, i.e. the parallel plate like tunable capacitor that acts as the varactor.
The tuning is performed by control electrodes. These electrodes operate as control element. These electrodes transmit the different bias voltages to drive the varactors through bias lines. The bias lines are preferably made of a low conductive material in order not to affect the RF circuitry. For this purpose, low conductive electrodes can be used since they become transparent for the RF signal. Typical materials for the bias lines are preferably ITO (indium tin oxide) , NiCr (nickel chromium) or some other alloys having a conductivity of less than 10e5 S/m.
In further embodiments the phase shift device is combined with a radiating element to transmit the RF signal. Often radiating element are also referred to as patch antennas. The radiating elements and the feed lines are usually photoetched on the dielectric substrate. The radiating elements, i.e. the patch antennas are configured as square, rectangular, thin strip (dipole) , circular, elliptical, triangular, or any other formation.
In further embodiments the radiating element is an
arbitrarily shaped microstrip patch antenna or a microstrip slot antenna. Liquid crystals (LC) are suitable to realize tunable RF devices. LC can be employed as a tunable dielectric, specifically optimized LC mixtures offer high performance at microwave frequencies with a loss tangent below 0.006. The relative tunability, defined as the ratio of the tuning range of the minimum permittivity to the maximum
permittivity, is preferably between 5% and 30% or between 10% and 25% or between 15% and 30% or between 5% and 14%.
LC based planar phase shift devices are usually customized depending on desired antenna performance. For this purpose the phase shift device is configured and adapted in order to reduce insertion loss, to increase beam steering speed and to allow for wide range scans. According to this invention, a LC mixture optimized for RF applications is used. A possibility to realize tunable RF components with LC is presented in Fig. 3. It shows the cross section of an inverted microstrip line using LC as a tunable substrate for different bias voltages. The setup consists of two stacked substrates, the top one carrying the microstrip line and the lower one the ground plane. In between the two substrates, a thin LC layer is encapsulated.
The phase shift device according to the invention can be combined with a radiating element e.g. in order to provide for phased array antenna. In a first embodiment of such a combination the planar transmission line and the antenna are coupled by using an aperture coupling method. In a second embodiment the planar transmission line and the antenna are coupled by using a proximity coupling method. In a third embodiment the planar transmission line and the antenna are coupled directly, e.g. using a inset-fed technique or through an vertical interconnect . Brief Description of the Drawings
The various objects and characteristics of the invention will emerge more clearly in the description which follows and which describes non-limiting embodiments of the invention, as well as in the attached figures which represent : Fig. 1, a schematic view of a typical LC molecule and its temperature dependency
Fig. 2, a schematic view of a planar transmission line according to prior art
Fig. 3a to 3d, a schematic perspective view, a cross- sectional view and a topside view of a phase shift device with several LC varactors according to the invention and a schematic representation of tunable LC varactors that are arranged within the signal electrode of the phase shift device,
Fig. 4a and 4b, a cross-sectional enlarged view of a single overlapping area of adjacent pieces of the signal electrode within the phase shift device according to Figures 3a to
3d, and a schematic representation of the LC varactor shown in Fig. 4a,
Fig. 5, a schematic cross-section view of a first
embodiment of the phase shift device with a coupled
antenna, Fig. 6, a schematic cross-section view of a second
embodiment of the phase shift device with a coupled
antenna, Fig. 7, a schematic cross-section view of a third
embodiment of the phase shift device with a coupled
antenna, and
Fig. 8, a schematic cross-section view of a different configuration of the phase shift device according to
Figures 3a to 3d, whereby the several pieces of the signal electrode are arranged on three different distance levels with respect to the ground electrode. In general liquid crystal (LC) materials are anisotropic. This property stems from the rod-like shape of the
molecules, as shown in an example structure of a typical LC molecule in Fig. 1. Here it is shown how the phase
configuration of a LC material changes with increasing temperature. Together with the molecule in Fig. 1 the corresponding anisotropic dielectric properties are
indicated. Since the material is liquid, the molecules feature only a weak molecular adhesion, and thus their orientation in the bulk can be changed. Owing to the rod- like shape, the molecules in a bulk tend to orient
themselves in parallel order. The relative permittivity parallel to the molecule long axis is denoted as εΓ, i i and perpendicular to the long axis as sr,L. If such a liquid crystal material is arranged between a signal electrode and a ground electrode of a strip shaped transmission line, the transmission speed of a radio frequency signal along the transmission line will be affected by the permittivity of the liquid crystal
material . With these two permittivities sr, i and sr,L the loss
tangents tan δ, | | and tan δ,Ι_ for the signal transmission are associated.
An electric field can be generated e.g. by application of a control voltage to the liquid crystal material and will affect the orientation of the rod-like shaped liquid crystal molecules. Thus, by application of a predetermined control voltage the relative permittivity of the liquid crystal material can be controlled.
There are other tunable dielectric materials with similar properties, i.e. with a tunable relative permittivity that can be controlled and adjusted by application of an
electric field. It will be well understood by a person skilled in the art that even though the following
description focuses on tunable liquid crystal material, many different materials with tunable relative permittivity can be used for the purpose of this invention and are included .
Fig. 2 shows a prior art planar transmission line formed as a microstrip line. It consist of a ground electrode 1 and a continuous, i.e. unbroken signal electrode 2 which are separated by a layer of a dielectric substrate 3. The propagation direction is along the direction of the signal electrode 2 and indicated by an arrow. Figures 3a, 3b and 3c show a perspective view, a cross- section view and a schematic representation of main
components of a phase shift device line according to the invention. It comprises a ground electrode 1 and a signal electrode 2 which form a planar transmission line. The signal electrode 2 is composed of several pieces 4 and 5 of low resistive RF electrode material that are arranged at two different distance levels perpendicular to and with respect to the ground electrode 1. The several pieces 4, 5 are aligned along the transmission line, i.e. the signal propagation path as defined by the direction of the signal electrode 2 and indicated by an arrow. The several pieces 4, 5 of the signal electrode 2 are arranged with respect to each other in order to create overlapping areas 6 of adjacent pieces 4, 5.
Between the ground and the signal electrode is a layer of the non-tunable dielectric substrate 3, preferably glass. The space between the several pieces 4, 5 of the signal electrode 2 is filled with a tunable liquid crystal
material 7. Between each adjacent pieces 4, 5 there are overlapping areas 6. The pieces 4, 5 are stacked and arranged in such a manner that apparently a continuous signal electrode 2 is formed when viewed from the top view, i.e. perpendicular to the ground electrode 1. On top of the tunable liquid crystal 7 is a second layer 3 ' of a non- tunable dielectric substrate. The several pieces 4, 5 of the signal electrode 2 can be e.g. printed or coated or laminated onto the corresponding surfaces of the layers 3 and 3' of the non-tunable dielectric substrate. The pieces 4, 5 of the signal electrode 2 are connected with control elements 8 (only shown in Figures 3b and 3c) that consist of a low conductive material, preferably ITO (indium tin oxide), which is transparent for RF . These control elements 8 transmit the bias voltage that can be applied in order to tune the liquid crystal material 7 in the overlapping areas 6, i.e. in order to modify the relative permittivity of the liquid crystal material 7 that is between the overlapping areas 6 of adjacent pieces 4, 5 of the signal electrode 2 which affects the transmission properties of a RF signal that is transmitted along the planar transmission line.
The time delay of signal transmission along the planar transmission line, i.e. the phase shift of a signal that is transmitted along the transmission line of the phase shift device according to the invention is generated by the successive time delays for each signal jump between the adjacent pieces 4, 5 of the signal electrode 2 that are arranged at different distance levels with respect to the ground electrode 1.
Contrary to the phase shift devices of prior art that comprise a layer of tunable LC material between the ground electrode 1 and the microstrip like signal electrode 2 (e.g. similar to Fig. 2), the total time delay mainly depends on the number of signal jumps during the
propagation of the signal along the planar transmission line. Each single jump causes a certain time delay that can be modified by tuning the tunable liquid crystal material 7 at the corresponding overlapping area 6. The total time delay is the small time delay of a single jump multiplied by the number of jumps along the planar transmission line.
Accordingly, the planar transmission line of the phase shift device according to the invention comprises at least two but preferably many serially connected dielectric tunable components (varactors) that are connected by a non- overlapping section of the signal electrode 2. A schematic representation of the planar transmission line is shown in Fig. 3d.
Figures 4a and 4b show a more detailed cross-section view and a corresponding schematic representation of a single varactor configuration, i.e. the overlapping area 6 between two adjacent pieces 4, 5 of the signal electrode 2 and the ground electrode 1 in the phase shift device as shown in Figures 3a to 3d.
Figures 5, 6 and 7 show different embodiments for a
radiation element comprising a phase shift device according to Figures 3a to 3d that is coupled with an antenna patch 9.
In Fig. 5 the several pieces 4, 5 of the signal electrode 2 of the planar transmission line and the antenna patch 9 are coupled by using an aperture coupling method. For such a coupling the antenna patch 9 is separated from the ground electrode 1 by a layer 10 of a non-tunable dielectric substrate. The energy that is transmitted along the
transmission line, i.e. along the signal electrode 2 and ground electrode 1 is coupled to the antenna patch 9 through a nearby slot 11 within the ground electrode 1. In Fig 6 the planar transmission line and the antenna patch 9 are coupled by using a proximity coupling method. In Fig 7 the planar transmission line and the antenna patch 9 are coupled by using an insert feed coupling method.
Fig. 8 shows a different embodiment of the phase shift device according to the invention. Other than previously described, in addition to the several pieces 4, 5 of the signal electrode 2 that are arranged at two different distance levels, some additional pieces 12 of the several pieces 4, 5 and 12 are arranged at a third distance level with respect to the ground electrode 1. The additional pieces 12 are mounted on another surface of the layer 3' of the non-tunable dielectric substrate that is opposed to the surface on which the pieces 5 of the second distance level are mounted. With the exemplary embodiment of Figure 8, the time delay for a signal jump between the additional pieces 12 and the adjacent pieces 5 cannot be modified, as the layer 3' that separates the second distance level with pieces 5 from the third distance level with additional pieces 5 is made of a non-tunable dielectric substrate. Hence there is no
dielectric tunable varactor wherever an overlapping area 6 exist between pieces 5 and additional pieces 12. Therefore, in order to be able to tune the phase shift it might be advantageous to achieve an overlapping area between 12 and 4. Nevertheless, the additional signal jumps will add a fixed time delay that only depends on the number of these signal jumps, resulting in e.g. an offset that can be manufactured in a very cost-saving manner.
In yet another embodiment of the phase shift device that differs from the one shown in Fig. 8, the sequence of overlapping pieces at three different distance levels may differ and e.g. a first piece 4 on the lowest distance level may overlap with a subsequent piece 12 on the highest distance level, followed by another piece on the middle distance level. The RF signal then jumps from the lowest distance level to the highest distance level and
subsequently to a middle level and back to the lowest level. It will be understood that the respective signal jumps that each cause a certain time delay can be
predetermined and arranged in many different ways,
resulting in the total phase shift of the signal. A skilled person in art can also electrically connect some pieces on different distance levels through vertical interconnects as well .
It is also possible to add a second layer of a tunable dielectric material between the several pieces 4, 5 and the additional pieces 12 of the signal electrode 2. Such a second layer may consist of a completely different tunable dielectric material or of the same liquid crystal material that is used for the first layer of the tunable liquid crystal material 7. Even when the second layer equals the first layer of liquid crystal material 7, by use of
different control elements or by application of a different bias voltage the time delay for signals jumps between the second and the third distance level may by controlled differently and result in many more possibilities for controlling the phase shift device and the resulting phase shift .
It is also possible to arrange the several pieces 4, 5, and 12 of the signal electrode 2 at more than two or three distance levels with respect to the ground electrode 1.
[References in the figures]
1 ground electrode
2 signal electrode
3 layer of non-tunable dielectric substrate
4 pieces of signal electrode 2 at lower distance level
5 pieces of signal electrode 2 at higher distance level
6 overlapping area
7 tunable liquid crystal material
8 control element
9 antenna patch
10 layer of non-tunable dielectric substrate
11 slot
12 additional pieces of signal electrode 2

Claims

Phase shift device comprising a planar transmission line that is formed by a signal electrode (2) an a ground electrode (1) which are separated by a
dielectric substance, and further comprising a tunable dielectric material (7), characterized in that the signal electrode (2) of the planar transmission line is divided into several pieces (4, 5) and comprises overlapping areas (6) of adjacent pieces (4, 5) that are filled with a tunable dielectric material (7), thereby forming a dielectric tunable component
(varactor) with a metal-insulator-metal type
capacitor .
Phase shift device according to claim 1, characterized in that the tunable dielectric material (7) is a liquid crystal material.
Phase shift device according to claim 1 or claim 2, characterized in that the several pieces (4, 5) of the signal electrode (2) are arranged at two or more different distance levels with respect to the ground electrode ( 1 ) .
Phase shift device according to claim 3, characterized in that the tunable dielectric material (7) is arranged as a single and continuous layer between several pieces (4, 5) of the signal electrode (2) that are arranged at two different distance levels. Phase shift device according to claim 3, characterized in that the tunable dielectric material (7) is
arranged as at least several confined layer areas between the overlapping areas (6) of adjacent pieces (4, 5) of the signal electrode (2) at two different distance levels.
Phase shift device according to one of the preceding claims, characterized in that the pieces (4, 5) of the signal electrode (2) are linearly arranged along the propagation direction of a radio frequency signal.
Phase shift device according to one of the preceding claims, characterized in that the pieces (4, 5) of the signal electrode (2) are arranged in a straight line.
A phase shift device according to one of the preceding claims, characterized in that the signal electrode (2) is divided into several pieces (4, 5) along the length of the transmission line, whereby said several pieces
(4, 5) are alternatingly implemented as top side pieces (5) on the top side and as bottom side pieces
(4) on the bottom side of a non-tunable dielectric substrate and whereby at some sections there are overlapping areas (6) between an top side piece (5) and an adjacent bottom side piece (4) of the signal electrode (2), and whereby these overlapping areas (6) are filled with a tunable liquid crystal material (7) and these overlapping areas (6) form a dielectric tunable component (varactor) with a metal-insulator- metal type capacitor. Phase shift device according to one of the preceding claims, characterized in that the planar transmission line comprises at least two serially connected
dielectric tunable components that are connected by a non-overlapping section of the signal electrode (2) .
Phase shift device according to one of the preceding claims, characterized in that it comprises liquid crystal material (7) with tunability of relative permittivity, defined as the ratio of the tuning range of the permittivity to the maximum permittivity between 5% and 30%.
Phase shift device according to one of the preceding claims, characterized in that it comprises at least one control element (8) that is connected with some of the pieces (4, 5) of the signal electrode (2) and that transmit a bias voltage in order to tune the liquid crystal material (7) in the overlapping areas (6) .
Phase shift device according to claim 11,
characterized in that the at least one control element (8) consists of ITO (indium-tin-oxide).
Phase shift device according to one of the preceding claims, characterized in that the planar transmission line is coupled with a radiating element.
14. Phase shift device according to claim 13,
characterized in that the radiating element is an arbitrary shaped microstrip patch antenna (9) or microstrip slot antenna.
15. Phase shift device according to one of the claims 13 or 14, characterized in that the planar transmission line and the radiating element are coupled by using an aperture coupling method.
16. Phase shift device according to one of the claims 13 or 14, characterized in that the planar transmission line and the radiating element are coupled by using a proximity coupling method.
17. Phase shift device according to one of the claims 13 to 16, characterized in that planar transmission line and the radiating element can be connected directly, e.g. using a inset-fed technique or
through an vertical interconnect.
PCT/EP2014/052964 2013-02-15 2014-02-14 Phase shift device WO2014125095A1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
CN201480021255.4A CN105308789B (en) 2013-02-15 2014-02-14 Phase shifting devices
ES14707670.7T ES2623252T3 (en) 2013-02-15 2014-02-14 Phase shift device
US14/767,131 US10141620B2 (en) 2013-02-15 2014-02-14 Phase shift device
EP14707670.7A EP2956986B1 (en) 2013-02-15 2014-02-14 Phase shift device
KR1020157024272A KR102326919B1 (en) 2013-02-15 2014-02-14 Phase shift device
JP2015557448A JP6362624B2 (en) 2013-02-15 2014-02-14 Phase shifter
US16/196,570 US10629973B2 (en) 2013-02-15 2018-11-20 Phase shift device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13155432.1A EP2768072A1 (en) 2013-02-15 2013-02-15 Phase shifting device
EP13155432.1 2013-02-15

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP2014/052964 Continuation WO2014125095A1 (en) 2013-02-15 2014-02-14 Phase shift device
US14/767,131 Continuation US10141620B2 (en) 2013-02-15 2014-02-14 Phase shift device

Related Child Applications (4)

Application Number Title Priority Date Filing Date
PCT/EP2014/052964 Continuation WO2014125095A1 (en) 2013-02-15 2014-02-14 Phase shift device
US14/767,131 A-371-Of-International US10141620B2 (en) 2013-02-15 2014-02-14 Phase shift device
US14/767,131 Continuation US10141620B2 (en) 2013-02-15 2014-02-14 Phase shift device
US16/196,570 Continuation US10629973B2 (en) 2013-02-15 2018-11-20 Phase shift device

Publications (1)

Publication Number Publication Date
WO2014125095A1 true WO2014125095A1 (en) 2014-08-21

Family

ID=47715909

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/052964 WO2014125095A1 (en) 2013-02-15 2014-02-14 Phase shift device

Country Status (7)

Country Link
US (2) US10141620B2 (en)
EP (2) EP2768072A1 (en)
JP (1) JP6362624B2 (en)
KR (1) KR102326919B1 (en)
CN (1) CN105308789B (en)
ES (1) ES2623252T3 (en)
WO (1) WO2014125095A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3745144A1 (en) 2019-05-29 2020-12-02 ALCAN Systems GmbH A method of inspecting a radio frequency device and a radio frequency device
TWI730700B (en) * 2019-04-04 2021-06-11 大陸商信利半導體有限公司 Manufacturing method of liquid crystal phase shifter
US20220216621A1 (en) * 2021-01-05 2022-07-07 Au Optronics Corporation Antenna structure and array antenna module

Families Citing this family (78)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2768072A1 (en) * 2013-02-15 2014-08-20 Technische Universität Darmstadt Phase shifting device
US9755286B2 (en) * 2014-12-05 2017-09-05 Huawei Technologies Co., Ltd. System and method for variable microwave phase shifter
CN108604735B (en) * 2016-02-16 2020-02-07 夏普株式会社 Scanning antenna
US10811784B2 (en) * 2016-03-01 2020-10-20 Kymeta Corporation Broadband RF radial waveguide feed with integrated glass transition
US10411349B2 (en) 2016-03-22 2019-09-10 Elwha Llc Systems and methods for reducing intermodulation for electronically controlled adaptive antenna arrays
US10535923B2 (en) * 2016-03-22 2020-01-14 Elwha Llc Systems and methods for reducing intermodulation for electronically controlled adaptive antenna arrays
CN105914470B (en) * 2016-05-03 2019-01-25 上海交通大学 The liquid crystal paster antenna of electric tuning variable range and its preparation, application method
US11109451B2 (en) * 2016-07-20 2021-08-31 Kymeta Corporation Internal heater for RF apertures
CN106154603B (en) * 2016-07-29 2019-12-06 合肥工业大学 Liquid crystal phase-shifting unit and phase-controlled antenna formed by same
US10199710B2 (en) * 2016-09-01 2019-02-05 Wafer Llc Variable dielectric constant-based devices
US10326205B2 (en) * 2016-09-01 2019-06-18 Wafer Llc Multi-layered software defined antenna and method of manufacture
CN106773338B (en) * 2017-01-16 2020-02-18 京东方科技集团股份有限公司 Liquid crystal microwave phase shifter
CN106684551B (en) * 2017-01-24 2019-07-23 京东方科技集团股份有限公司 A kind of phase-shifting unit, antenna array, display panel and display device
CN110235301B (en) * 2017-01-31 2022-04-22 三星电子株式会社 Liquid crystal-based high-frequency device and high-frequency switch
RU2653084C1 (en) * 2017-01-31 2018-05-07 Самсунг Электроникс Ко., Лтд. High-frequency device based on liquid crystals
CN106961008B (en) * 2017-04-06 2019-03-29 京东方科技集团股份有限公司 Antenna structure and its driving method and antenna system
CN206602182U (en) * 2017-04-06 2017-10-31 京东方科技集团股份有限公司 A kind of antenna structure and communication apparatus
CN106932933B (en) * 2017-05-09 2019-08-27 京东方科技集团股份有限公司 A kind of liquid crystal antenna and preparation method thereof
US10651549B2 (en) 2017-07-06 2020-05-12 Innolux Corporation Microwave device
CN113013609B (en) * 2017-07-06 2023-08-15 群创光电股份有限公司 Microwave device
US10705391B2 (en) * 2017-08-30 2020-07-07 Wafer Llc Multi-state control of liquid crystals
US10497774B2 (en) 2017-10-23 2019-12-03 Blackberry Limited Small-gap coplanar tunable capacitors and methods for manufacturing thereof
US10332687B2 (en) 2017-10-23 2019-06-25 Blackberry Limited Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof
US11233310B2 (en) * 2018-01-29 2022-01-25 The Boeing Company Low-profile conformal antenna
CN108321541B (en) * 2018-02-22 2021-10-15 京东方科技集团股份有限公司 Antenna structure, driving method thereof and communication device
CN108398816B (en) 2018-03-26 2020-12-29 北京京东方专用显示科技有限公司 Liquid crystal phase shifter and manufacturing method and phase shifting method thereof
CN108539331B (en) * 2018-04-13 2021-01-15 合肥工业大学 Terahertz slotting phase-shifting unit based on liquid crystal and phased array antenna formed by same
CN108598631B (en) * 2018-04-19 2020-10-23 合肥工业大学 Reflective double-layer liquid crystal phase-shifting unit based on patterned graphene electrode
CN110416668A (en) * 2018-04-26 2019-11-05 北京超材信息科技有限公司 A kind of liquid crystal phase shifter
CA3101948A1 (en) * 2018-05-01 2019-11-07 Wafer Llc Low cost dielectric for electrical transmission and antenna using same
CN108493592B (en) * 2018-05-03 2019-12-20 京东方科技集团股份有限公司 Microstrip antenna, preparation method thereof and electronic equipment
DE102018112069A1 (en) * 2018-05-18 2019-11-21 Schott Ag Use of a flat glass in electronic components
CN208655852U (en) * 2018-05-21 2019-03-26 京东方科技集团股份有限公司 A kind of phase shifter, antenna, communication equipment
WO2019223647A1 (en) 2018-05-21 2019-11-28 京东方科技集团股份有限公司 Phase shifter and operation method therefor, antenna, and communication device
CN108615966B (en) * 2018-05-28 2020-06-30 京东方科技集团股份有限公司 Antenna and manufacturing method thereof
CN108711669B (en) 2018-05-28 2021-04-23 京东方科技集团股份有限公司 Frequency-adjustable antenna and manufacturing method thereof
CN108563050B (en) * 2018-05-31 2020-10-30 成都天马微电子有限公司 Liquid crystal phase shifter and antenna
CN108490270B (en) * 2018-07-02 2020-01-24 京东方科技集团股份有限公司 Measuring device, measuring system and measuring method for liquid crystal dielectric constant
CN108615962B (en) 2018-07-18 2020-06-30 成都天马微电子有限公司 Liquid crystal phase shifter and antenna
CN108710232B (en) * 2018-07-20 2020-10-13 成都天马微电子有限公司 Liquid crystal phase-shifting unit and manufacturing method thereof, liquid crystal phase shifter and antenna
CN108808181B (en) * 2018-07-20 2020-05-29 成都天马微电子有限公司 Liquid crystal phase shifter and antenna
CN109193081B (en) * 2018-08-06 2022-11-08 艾尔康系统有限责任公司 Radio frequency phase-shifting device
EP3609017A1 (en) * 2018-08-06 2020-02-12 ALCAN Systems GmbH Radio frequency phase shifting device
US10862182B2 (en) 2018-08-06 2020-12-08 Alcan Systems Gmbh RF phase shifter comprising a differential transmission line having overlapping sections with tunable dielectric material for phase shifting signals
CN110658646A (en) * 2018-08-10 2020-01-07 北京京东方传感技术有限公司 Phase shifter and liquid crystal antenna
DE102018119508A1 (en) * 2018-08-10 2020-02-13 Alcan Systems Gmbh Group antenna made of a dielectric material
CN110824734A (en) 2018-08-10 2020-02-21 北京京东方传感技术有限公司 Liquid crystal phase shifter and liquid crystal antenna
CN109193162B (en) * 2018-09-20 2020-11-20 合肥工业大学 Terahertz reflection type phase-shifting unit and rapid regulation and control method of liquid crystal inside terahertz reflection type phase-shifting unit
CN109164608B (en) * 2018-09-25 2022-02-25 京东方科技集团股份有限公司 Phase shifter, antenna, and phase shifter control method
CN111146588B (en) * 2018-11-06 2022-04-29 艾尔康系统有限责任公司 Phased array antenna
US10854970B2 (en) 2018-11-06 2020-12-01 Alcan Systems Gmbh Phased array antenna
EP3664215B1 (en) 2018-12-07 2022-09-21 ALCAN Systems GmbH Radio frequency phase shifting device
TWI696315B (en) * 2019-01-30 2020-06-11 友達光電股份有限公司 Antenna device and antenna system
CN110137636B (en) * 2019-05-23 2021-08-06 京东方科技集团股份有限公司 Phase shifter and liquid crystal antenna
CN110197939B (en) * 2019-06-03 2024-04-19 北京华镁钛科技有限公司 Metamaterial adjustable capacitor structure
KR102670834B1 (en) * 2019-07-25 2024-05-29 엘지디스플레이 주식회사 Flat Panel Antenna Having Liquid Crystal
US11342657B2 (en) * 2019-08-12 2022-05-24 Innolux Corporation Antenna device
CN112448105B (en) * 2019-08-29 2022-02-25 京东方科技集团股份有限公司 Phase shifter and antenna
CN112448106B (en) * 2019-08-30 2022-04-26 京东方科技集团股份有限公司 Feed structure, microwave radio frequency device and antenna
CN112731715B (en) * 2019-10-14 2022-11-11 京东方科技集团股份有限公司 Liquid crystal phase shifter and antenna
EP3809517A1 (en) * 2019-10-17 2021-04-21 ALCAN Systems GmbH Transmission line for radio frequency signals
US11276933B2 (en) 2019-11-06 2022-03-15 The Boeing Company High-gain antenna with cavity between feed line and ground plane
CN110943299B (en) * 2019-11-29 2021-01-08 北京京东方传感技术有限公司 Phase shifter and phased array antenna
US11811121B2 (en) 2019-11-29 2023-11-07 Beijing Boe Sensor Technology Co., Ltd. Electronic device comprising a dielectric substrate having a voltage adjustable phase shifter disposed with respect to the substrate and a manufacturing method
EP3859985A1 (en) * 2020-01-30 2021-08-04 Nokia Solutions and Networks Oy Apparatus comprising a transmission line for radio frequency signals
CN116315588A (en) * 2020-02-05 2023-06-23 群创光电股份有限公司 Electronic device
CN111176036B (en) * 2020-02-26 2023-06-02 京东方科技集团股份有限公司 Tuner, preparation method and control method thereof, and electronic device
US11411544B2 (en) * 2020-03-24 2022-08-09 Boe Technology Group Co., Ltd. Phase shifter and antenna
CN113540767B (en) * 2020-04-15 2022-12-16 上海天马微电子有限公司 Phased array antenna and control method thereof
US11415820B2 (en) * 2020-05-04 2022-08-16 Taiwan Semiconductor Manufacturing Company, Ltd. Waveguide structure
TWI737307B (en) * 2020-05-22 2021-08-21 大陸商北京華鎂鈦科技有限公司 Metamaterial adjustable capacitor structure
TWI728826B (en) * 2020-06-03 2021-05-21 友達光電股份有限公司 Planar tunable antenna with frequency filtering functionality
WO2022178805A1 (en) * 2021-02-26 2022-09-01 京东方科技集团股份有限公司 Phase shifter and antenna
KR102467623B1 (en) * 2021-07-05 2022-11-17 서울대학교산학협력단 Liquid crystal based reflectarray antenna
CN113611991B (en) * 2021-07-28 2022-12-23 北京华镁钛科技有限公司 Liquid crystal phase shifter, liquid crystal antenna and phase shifting method
CN117136467A (en) * 2022-02-17 2023-11-28 京东方科技集团股份有限公司 Phase shifter, antenna and electronic equipment
WO2023155185A1 (en) * 2022-02-21 2023-08-24 京东方科技集团股份有限公司 Phase shifter, antenna, and electronic device
WO2024174224A1 (en) * 2023-02-24 2024-08-29 京东方科技集团股份有限公司 Phase shifter and manufacturing method therefor, and antenna

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936484A (en) 1995-02-24 1999-08-10 Thomson-Csf UHF phase shifter and application to an array antenna
US20020051334A1 (en) * 2000-05-02 2002-05-02 Yongfei Zhu Voltage tuned dielectric varactors with bottom electrodes
JP2003008310A (en) 2001-06-27 2003-01-10 Sumitomo Electric Ind Ltd High-frequency transmission line coupling structure and variable phase shifter using the same
US20090073332A1 (en) 2004-12-20 2009-03-19 Kyocera Corporation Liquid Crystal Component Module and Method of Controlling Dielectric Constant
US20090302976A1 (en) 2008-06-09 2009-12-10 Shu-Ying Cho Microstrip Lines with Tunable Characteristic Impedance and Wavelength
US8013688B2 (en) 2004-02-23 2011-09-06 Georgia Tech Research Corporation Liquid crystalline polymer and multilayer polymer-based passive signal processing components for RF/wireless multi-band applications
US8022861B2 (en) 2008-04-04 2011-09-20 Toyota Motor Engineering & Manufacturing North America, Inc. Dual-band antenna array and RF front-end for mm-wave imager and radar
WO2012123072A1 (en) 2011-03-16 2012-09-20 Alcatel Lucent Phase shifting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090278744A1 (en) 2005-10-11 2009-11-12 Panasonic Corporation Phased array antenna
JP4376873B2 (en) * 2006-04-28 2009-12-02 京セラ株式会社 Dielectric waveguide device, phase shifter including the same, high-frequency switch and attenuator, and high-frequency transmitter, high-frequency receiver, high-frequency transceiver and radar device, array antenna device, and method for manufacturing dielectric waveguide device
US8766855B2 (en) * 2010-07-09 2014-07-01 Semiconductor Components Industries, Llc Microstrip-fed slot antenna
EP2768072A1 (en) * 2013-02-15 2014-08-20 Technische Universität Darmstadt Phase shifting device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936484A (en) 1995-02-24 1999-08-10 Thomson-Csf UHF phase shifter and application to an array antenna
US20020051334A1 (en) * 2000-05-02 2002-05-02 Yongfei Zhu Voltage tuned dielectric varactors with bottom electrodes
JP2003008310A (en) 2001-06-27 2003-01-10 Sumitomo Electric Ind Ltd High-frequency transmission line coupling structure and variable phase shifter using the same
US8013688B2 (en) 2004-02-23 2011-09-06 Georgia Tech Research Corporation Liquid crystalline polymer and multilayer polymer-based passive signal processing components for RF/wireless multi-band applications
US20090073332A1 (en) 2004-12-20 2009-03-19 Kyocera Corporation Liquid Crystal Component Module and Method of Controlling Dielectric Constant
US8022861B2 (en) 2008-04-04 2011-09-20 Toyota Motor Engineering & Manufacturing North America, Inc. Dual-band antenna array and RF front-end for mm-wave imager and radar
US8305259B2 (en) 2008-04-04 2012-11-06 Toyota Motor Engineering & Manufacturing North America, Inc. Dual-band antenna array and RF front-end for mm-wave imager and radar
US20090302976A1 (en) 2008-06-09 2009-12-10 Shu-Ying Cho Microstrip Lines with Tunable Characteristic Impedance and Wavelength
WO2012123072A1 (en) 2011-03-16 2012-09-20 Alcatel Lucent Phase shifting device

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
F. GOELDEN; A. GAEBLER; M. GOEBEL; A. MANABE; S. MUELLER; R. JAKOBY: "Tunable liquid crystal phase shifter for microwave frequencies", ELECTRONICS LETTERS, vol. 45, no. 13, 2009, pages 686 - 687, XP006033429, DOI: doi:10.1049/EL:20091168
O. H. KARABEY; F. GOELDEN; A. GAEBLER; S. STRUNCK; R. JAKOBY: "Tunable 5 loaded line phase shifters for microwave applications", PROC. IEEE MTT-S INT. MICROWAVE SYMP. DIGEST (MTT, 2011, pages 1 - 4, XP032006583, DOI: doi:10.1109/MWSYM.2011.5972634
ONUR HAMZA KARABEY ET AL.: "Continuously Polarization Agile Antenna by Using Liquid Crystal-Based Tunable Variable Delay Lines", IEEE, vol. 61, no. 1, 1 January 2013 (2013-01-01), pages 70 - 76, XP011484553, DOI: doi:10.1109/TAP.2012.2213232
ONUR HAMZA KARABEY ET AL: "Continuously Polarization Agile Antenna by Using Liquid Crystal-Based Tunable Variable Delay Lines", IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 61, no. 1, 1 January 2013 (2013-01-01), pages 70 - 76, XP011484553, ISSN: 0018-926X, DOI: 10.1109/TAP.2012.2213232 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730700B (en) * 2019-04-04 2021-06-11 大陸商信利半導體有限公司 Manufacturing method of liquid crystal phase shifter
EP3745144A1 (en) 2019-05-29 2020-12-02 ALCAN Systems GmbH A method of inspecting a radio frequency device and a radio frequency device
WO2020240022A1 (en) 2019-05-29 2020-12-03 Alcan Systems Gmbh A method of inspecting a radio frequency device and a radio frequency device
US20220216621A1 (en) * 2021-01-05 2022-07-07 Au Optronics Corporation Antenna structure and array antenna module
US11664606B2 (en) * 2021-01-05 2023-05-30 Au Optronics Corporation Antenna structure and array antenna module

Also Published As

Publication number Publication date
CN105308789A (en) 2016-02-03
US20190103644A1 (en) 2019-04-04
EP2768072A1 (en) 2014-08-20
US10629973B2 (en) 2020-04-21
KR20150117701A (en) 2015-10-20
KR102326919B1 (en) 2021-11-17
EP2956986B1 (en) 2017-02-01
EP2956986A1 (en) 2015-12-23
JP2016508697A (en) 2016-03-22
US10141620B2 (en) 2018-11-27
ES2623252T3 (en) 2017-07-10
CN105308789B (en) 2018-11-16
US20150380789A1 (en) 2015-12-31
JP6362624B2 (en) 2018-07-25

Similar Documents

Publication Publication Date Title
US10629973B2 (en) Phase shift device
US11152714B2 (en) Electronically steerable planar phase array antenna
Yaghmaee et al. Electrically tuned microwave devices using liquid crystal technology
US6531936B1 (en) Voltage tunable varactors and tunable devices including such varactors
Karabey et al. Continuously polarization agile antenna by using liquid crystal-based tunable variable delay lines
KR20020035578A (en) Voltage tunable coplanar phase shifters
EP3745526A1 (en) Radio frequency phase shift device
Maune et al. Tunable microwave component technologies for SatCom-platforms
Wang et al. Liquid crystal enabled substrate integrated waveguide variable phase shifter for millimeter-wave application at 60ghz and beyond
Shu et al. A dual polarized pattern reconfigurable antenna array using liquid crystal phase shifter
Li et al. Electrical biasing substrate integrated waveguide tunable band-pass filter with liquid crystal technology
Karabey et al. Liquid crystal based reconfigurable antenna arrays
Wang et al. Compact and fast response phase shifter based on liquid crystal
Bildik et al. Recent advances on liquid crystal based reconfigurable antenna arrays
Karabey et al. 2D Electronic Beam Steering Phased Array
ALQuaiti et al. SIMULATION OF CO-PLANAR WAVEGUIDE LIQUID CRYSTAL BASED PHASE SHIFTER

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201480021255.4

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 14707670

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 14767131

Country of ref document: US

ENP Entry into the national phase

Ref document number: 2015557448

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

REEP Request for entry into the european phase

Ref document number: 2014707670

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2014707670

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 20157024272

Country of ref document: KR

Kind code of ref document: A