WO2014119773A1

WO2014119773A1 - Liquid discharge apparatus and manufacturing method thereof

Info

Publication number: WO2014119773A1
Application number: PCT/JP2014/052372
Authority: WO
Inventors: Youichi FUKAYA; Hidehiko Fujimura
Original assignee: Canon Kabushiki Kaisha
Priority date: 2013-02-01
Filing date: 2014-01-28
Publication date: 2014-08-07
Also published as: JP2014148091A; JP6041693B2; US9365037B2; US20150343782A1

Abstract

To reduce a liquid discharge amount by vibrating meniscuses at high acceleration with displacement of partitions, a plurality of partitions each composed of a piezoelectric material, thereby forming a plurality of pressure chambers. Each of electrode pairs for shear-deforming each partition is arranged on both sides of the each partition. A nozzle plate having nozzles each connected to the each pressure chamber is arranged on the side of a first end of the each pressure chamber. The each pressure chamber is formed such that the width of the pressure chamber becomes long as it approaches, from the first end, a second end on the opposite side.

Description

DESCRIPTION

Title of Invention:

LIQUID DISCHARGE APPARATUS AND MANUFACTURING

METHOD THEREOF

Technical Field

[0001] he present invention relates to a liquid discharge apparatus in which pressure chambers partitioned by partitions each composed of a piezoelectric material are formed, and a manufacturing method of the liquid discharge apparatus.

Background Art

[0002] As a liquid discharge head serving as a liquid

discharge apparatus, a type of head of changing

pressure of ink in a pressure chamber, causing a flow in the ink, and discharging the ink from a nozzle, thereby discharging droplets has spread. Particularly, a drop-on-demand head has most spread in general.

Incidentally, there are roughly two methods of applying pressure to ink. Namely, one is the method of changing the pressure of the ink by changing the pressure in a pressure chamber in response to a driving signal supplied to a piezoelectric material, and the other is the method of applying the pressure to the ink by generating air bubbles in the pressure chamber in response to a driving signal supplied to a resistor.

[0003] The liquid discharge head in which the piezoelectric material is used has adopted various kinds of methods. In these methods, a shear mode method which can be easily achieved comparatively by machining a bulk piezoelectric material has been often adopted. In the shear mode method, the piezoelectric material which has been polarized is shear-deformed by application of an electric field in its orthogonal direction. Here, the piezoelectric material to be deformed serves as a partition which is formed by processing ink grooves and the like on the polarized bulk piezoelectric material by using a dicing blade. An electrode pair (i.e., a pair of electrodes) is formed on both the sides of each partition to drive the piezoelectric material, and the liquid discharge head is finally constituted by forming a nozzle plate having nozzles thereon and an ink supply system (Patent Literature 1) .

[0004] Besides, the liquid discharge head adopting the shear mode method has an advantage that restrictions on inks are relatively few and it is thus possible to

selectively apply inks of wide-range materials to a recording _. medium. From this viewpoint, in recent years, an attempt to utilize the liquid discharge head for industrial applications such as color filter

manufacturing, wiring patterning and the like has been often made. Moreover, to achieve further high- definition patterning, a further minute amount of droplet to.be discharge by the liquid discharge head has been required.

Citation Lists

Patent Literature

[0005] PTL 1: Japanese Patent Application Publication No. H06- 6375

Summary of Invention

Technical Problem

[0006] To obtain a minute liquid discharge amount of the

liquid discharge head, it is necessary to make minute droplets by minutely tearing or nipping a liquid column discharged from the nozzle. Thus, it is necessary to enlarge vibration acceleration of meniscuses of the liquid in the nozzle. To achieve this, it is necessary to transfer, in a moment, the pressure generated by the displacement of the partitions to the meniscuses of the liquid. On such a premise, when the liquid discharge head adopting the shear mode method is used, a

displacement amount of the partition serving as an actuator is generally small. For this reason, the pressure chamber is made long toward the nozzle, so as to secure a displacement volume amount of the pressure chamber.

[0007] In case of pressurizing the liquid in the pressure

chamber like this, the center of pressure of the liquid is located substantially at the central portion of the pressure chamber in the longitudinal direction. That is, since the pressure chamber is prolonged in the longitudinal direction, the distance from the meniscus position to the center of pressure of the liquid is also prolonged, and thus there is a problem that

responsiveness is deteriorated.

[0008 ] Moreover, in the liquid discharge head adopting the

shear mode method, the cross-section area of the cross section along the face perpendicular to the

longitudinal direction of the pressure chamber is made small so as to be able to generate pressure even by a small displacement amount of the piezoelectric material, This contrarily implies that flow channel resistance in the case where the liquid flows in the longitudinal direction is large. That is, in the liquid discharge head adopting the shear mode method, flowing speed of the liquid flowing into or from the pressure chamber is restricted. In addition, since the center of pressure is far from the meniscus position, it is impossible to transfer, in a moment, the pressure generated by

displacement of the piezoelectric material to the meniscus .

[0009] In consideration of the above problems, the present

invention aims to reduce the liquid discharge amount by vibrating at high acceleration the meniscuses with the displacement of partitions.

Solution to Problem

[0010] A liquid discharge apparatus according to the present invention is characterized by comprising: a plurality of pressure chambers formed by a plurality of partitions each composed of a piezoelectric material; a plurality of electrode pairs each of which is arranged on both sides of each partition and shear-deforms each partition; and a nozzle member which is arranged on a side of a first end of each pressure chamber and on which each nozzle connected to each pressure chamber has been formed, wherein each pressure chamber is formed such that a relatively shorter one of a height and a width of the pressure chamber at the first end becomes long as it approaches, from the first end, a second end on the opposite side.

[0011] Further features of the present invention will become apparent from the following description of an exemplary embodiment with reference to the attached drawings.

Brief Description of Drawings

[0012] Fig. 1 is an exploded perspective diagram illustrating an inkjet head as an example of a liquid discharge head serving as a liquid discharge apparatus according to the present embodiment.

Fig. 2 is a cross-section perspective diagram of ink channels for describing a flow of ink as liquid in the inkjet head.

Figs. 3A and 3B are cross-section diagrams respectively illustrating faces perpendicular to a longitudinal direction of a discharge unit.

Fig. 4 is a diagram for describing a manufacturing method of the inkjet head.

Fig. 5 is a diagram for describing the manufacturing method of the inkjet head.

Fig. 6 is a diagram for describing the manufacturing method of the inkjet head.

Fig. 7 is a diagram for describing the manufacturing method of the inkjet head.

Fig. 8 is a perspective diagram illustrating a pressure chamber of the inkjet head. Description of Embodiment

[0013] Hereinafter , an exemplary embodiment of the present

invention will be described in detail with reference to the attached drawings. Fig. 1 is an exploded

perspective diagram illustrating an inkjet head as an example of a liquid discharge head serving as a liquid discharge apparatus according to the present embodiment. An inkjet head 100 illustrated in Fig. 1 has a

discharge unit 10, where a plurality of pressure

chambers 1 provided in parallel in one row in the width direction B orthogonal to the longitudinal direction A2 parallel with the liquid discharge direction Al are formed. A nozzle plate 30 serving as a nozzle member, where respective nozzles 30a are formed corresponding to the respective pressure chambers 1, is arranged at the liquid discharge side face (front face) of the discharge unit 10. The discharge unit 10 and the nozzle plate 30 are aligned and bonded to each other such that the positions of the pressure chambers 1 coincide with the positions of the nozzles 30a (that is, the pressure chambers 1 communicate with the nozzles 30a) . Accordingly, each of the nozzles 30a is

connected with each of the pressure chambers 1.

[0014] The pressure chambers 1 extend to the liquid supply

side face (back face) of the discharge unit 10 along the longitudinal direction A2. A back plate 40 is arranged at the back face of the discharge unit 10.

Respective ink supply ports 40a are formed at the back plate 40 corresponding to the respective pressure chambers 1. As just described, the discharge unit 10 and the back plate 40 are aligned and bonded to each other such that the positions of the pressure chambers 1 coincide with the positions of the ink supply ports 40a. In addition, a manifold 50 serving as a common liquid chamber forming member, which has an ink supply port 51 and an ink recovery port 52 communicated with an ink tank (not illustrated), is bonded to the back plate 40. Further, flexible substrates 60, on which a plurality of signal wirings 61 are formed respectively, are bonded to the both-side faces of the discharge unit 10 in the height direction C orthogonal to the liquid discharge direction Al (longitudinal direction A2) and the width direction B.

[0015] Fig. 2 is a cross-section perspective diagram of ink channels for describing a flow of ink as liquid in the inkjet head 100. Figs. 3A and 3B are cross-section diagrams respectively illustrating faces perpendicular to the longitudinal direction of the discharge unit 10. More specifically, Fig. 3A is the cross-section diagram along the 3A-3A face relatively close to the back-face side in Fig. 2, and Fig. 3B is the cross-section diagram along the 3B-3B face relatively close to the front-face side in Fig. 2.

[0016] s illustrated in Figs. 3A and 3B, the discharge unit

10 has two substrates 11 and 12 (first substrate 11 and second substrate 12) which face each other and a plurality of partitions 3 provided in parallel with space in the width direction B orthogonal to the height direction C between the first substrate 11 and the second substrate 12. These partitions 3 are formed lengthwise, and the plurality of pressure chambers 1 extended to the longitudinal direction A2 are formed by the plurality of partitions 3. Each of the partitions 3 is composed of a piezoelectric material polarized in the height direction C. Incidentally, in Figs. 3A and 3B, the height in the height direction C of the each pressure chamber 1 is represented by "h", and the width in the width direction B of the each pressure chamber 1 is represented by "Wx" and "Wy" .

[0017] The discharge unit 10 has a plurality of electrode

pairs (plurality of pairs of electrodes) 13 each of which is arranged at both sides of each of the partitions 3, and by which each of the partitions 3 is shear-deformed. That is, the electrode pairs 13 are respectively provided on the respective partitions 3. More specifically, the electrode pair 13 composed of a signal electrode 14 and a common electrode 15 is provided on both the sides of each partition 3 in the direction orthogonal to the liquid discharge direction Al (longitudinal direction A2), that is, in the width direction B. The electrode 14 is arranged on the air- chamber side and the electrode 15 is arranged on the pressure-chamber side.

[0018] The signal electrode 14 is electrically connected to an extraction electrode 4 through a front electrode 71 formed inside a front groove 5 illustrated in Fig. 1. The common electrode 15 is grounded. An electric field is applied to the partition 3 in the direction (width direction) orthogonal to the polarization direction by a process that the voltage is applied to the electrode pairs 13 and then the partition 3 functions as a piezoelectric device for shear-deforming the partition in the width direction B. More specifically, the potential of the common electrode 15 is set to the ground potential, and the voltage is applied to the signal electrode 14 for the common electrode 15.

[0019]As illustrated in Fig. 2, the nozzle plate 30 is

arranged on the side of a first end la in the

longitudinal direction A2 corresponding to the liquid discharge side of the pressure chamber 1. On the other hand, the manifold 50 is arranged on the side of a second end lb in the longitudinal direction A2 which is the opposite side for the first end la corresponding to the liquid supply side of the pressure chamber 1, and a common liquid chamber 53 is formed. Ink I (not

illustrated) is supplied to the common liquid chamber 53 from a not-illustrated ink tank through the ink supply port 51. The ink I supplied to the common liquid chamber 53 is filled up into the respective pressure chambers 1 through the ink supply ports 40a. Then, the volume of the pressure chamber 1 is varied by a fact that the partition 3 is shear-deformed, whereby the ink (ink droplets) I, which is liquid (droplets), is discharged from the nozzles 30a.

[0020] As illustrated in Figs. 3A and 3B, the plurality of partitions 3 are composed of a plurality of first partitions 3Ά protrusively provided on the one face 11a of the first substrate 11 and a plurality of second partitions 3B protrusively provided on the one face 12a of the second substrate 12.

[0021]A tip 3a of the first partition 3A is bonded to the one face 12a of the second substrate 12 and also a tip 3a of the second partition 3B is bonded to the one face 11a of the first substrate 11 such that the first partition 3A and the second partition 3B are

alternately provided in parallel with space in the width direction B. Thus, a space is partitioned by the first partition 3A and the second partition 3B which are adjacent to each other, and the pressure chamber 1 is formed.

[0022JA first groove 17, which is interdigitated with the tip 3a of the second partition 3B, is formed on the one face 11a of the first substrate 11. A groove 18, which is interdigitated with the tip 3a of the first

partition 3A, is formed on the one face 12a of the second substrate 12.

[0023] The first partition 3A, which protrudes from the one face 11a of the first substrate 11, is integrally formed with the first substrate 11 and has a first base-side piezoelectric material 31A polarized in the height direction C. In addition, the first partition 3A, which is bonded to the first base-side

piezoelectric material 31A, has a first tip-side piezoelectric material 32A polarized in the direction opposite to the first base-side piezoelectric material 31A.

[0024] The second partition 3B, which protrudes from the one face 12a of the second substrate 12, is integrally formed with the second substrate 12 and has a second base-side piezoelectric material 31B polarized in the height direction C. In addition, the second partition 3B, which is bonded to the second base-side

piezoelectric material 31B, has a second tip-side piezoelectric material 32B polarized in the direction opposite to the second base-side piezoelectric material 31B.

[0025] An air chamber 6 is formed between the two pressure chambers 1 and 1, which are adjacent to each other, among the plural pressure chambers 1. The air chamber 6 is not communicated with the nozzle 30a and the ink supply port 40a but is communicated with the front groove 5 formed on the front face. Therefore, it is structured that the ink, which is liquid, is not filled up into the air chamber 6.

[0026] Specifically, the air chamber 6 is formed by the

partitioning with the two partitions 3 which form the pressure chamber 1. More specifically, the air chamber 6 is formed by the partitioning with the first

partition 3A and the second partition 3B. In the present embodiment, the pressure chambers 1 and the air chambers 6 are alternately formed in the width

direction B.

[0027] In the present embodiment, although the air chamber 6 is arranged to independently control the adjacent pressure chambers 1, and improve the operation of the partition 3 composed of the piezoelectric material by providing air space, it may not be arranged.

[0028] Each of the pressure chambers 1 is formed such that the relatively shorter one of the height and the width of the pressure chamber 1 at the first end la, i.e., the width of the pressure chamber 1 in the present embodiment, becomes gradually long from the first end la to the second end lb. In other words, the pressure chamber 1 is formed such that the width thereof becomes wide as it approaches, from the first end la, the second end lb. That is, each of the pressure chambers 1 is formed such that the width of the pressure chamber 1 at the second end lb is longer than the width of the pressure chamber 1 at the first end la. In other words, each of the pressure chambers 1 is formed such that the width thereof becomes gradually long from the first end la toward the second end lb. Further, in other words, the pressure chamber 1 is formed such that the width thereof becomes wide as it approaches the second end lb from the first end la.

[0029] In the present embodiment, the first partition 3A

extends from the front face, to which the nozzle plate 30 is attached, to the back face, to which the back plate 40 is attached, illustrated in Fig. 2 along the direction inclined by a predetermined angle Θ to the liquid discharge direction Al (longitudinal direction A2). The second partition 3B, of which the direction is opposite to that of the first partition 3A, extends in the direction inclined by a predetermined angle Θ to the liquid discharge direction Al (longitudinal

direction A2 ) . According to this structure, a width Wy on the liquid discharge side of the pressure chamber 1. becomes narrow as compared with a width x on the liquid supply side of the pressure chamber 1. In other words, the width Wx on the liquid supply side of the pressure chamber 1 becomes wide as compared with the width Wy on the liquid discharge side of the pressure chamber 1.

[0030] Each of the pressure chambers 1 is formed such that the shape of the cross section along the face perpendicular to the longitudinal direction A2 at the second end lb of the pressure chamber 1 substantially becomes a square.

[0031] Even if a displacement amount of the partition 3

serving as the piezoelectric device is the same, a change rate of the cross-section area is larger when the cross-section area of the pressure chamber 1 is smaller. Therefore, the pressurizing efficiency of the ink I to be supplied into the pressure chamber 1 is higher in case of the smaller cross-section area than that in case of the larger cross-section area.

[0032] The width W of the pressure chamber 1 becomes narrow as it approaches the nozzle 30a as illustrated in Fig. 2. That is, the pressurizing efficiency of the ink I becomes high as it approaches the nozzle 30a.

Therefore, since the pressurization is performed at the position closer to the meniscus of the ink formed at the nozzle 30a, the vibration responsiveness of the meniscus for the displacement of the partition 3 is improved .

[0033] In the inkjet head 100 adopting the shear mode method, if a height h of the partition 3 (pressure chamber 1) becomes higher, the displacement amount becomes larger. Therefore, it is preferable that the height h of the partition 3 is higher as much as possible in order to pressurize the ink I inside the pressure chamber 1 more efficiently. Furthermore, since it is preferable to narrow the width W of the pressure chamber 1 as much as possible, it is preferable that a relationship between the height h and the width W satisfies h >> .

[0034] On the other hand, flow channel resistance R of the fluid, which flows at an arbitrary cross section of the pressure chamber 1 toward the liquid discharge

direction Al, having viscosity μ is expressed by the following expression (1).

[0035]R = [8·μ(ϊί + h)²]/(W-h)³ ... (1)

[0036] hen the ink inside the pressure chamber is made to flow at high speed, the flow channel resistance R has to be reduced. However, in case of the inkjet head adopting the shear mode method, the flow channel cross- section area W-h is small from the viewpoint of the pressurizing efficiency, and it can be understood from the above expression (1) that the flow channel

resistance R is large. In addition, when h >> W, the value of (W + h) in the above expression is large as compared with a case of h = W, in case of performing a comparison with the same flow channel cross-section area W-h, and also it can be understood that the flow channel resistance becomes high.

[0037] herefore, in the present embodiment, as illustrated in Fig. 2, the width W of the pressure chamber 1 becomes wide as it approaches the side of the second end lb from the side of the first end la. Further, the shape of cross section of the pressure chamber 1

substantially becomes a , square, that is, the

relationship between the height h and the width W approximates to h = W due to expansion of the width W.

[ 0038 ] Therefore, the flow channel resistance R can be

efficiently reduced as it approaches the second end lb of the pressure chamber 1. With that situation, the flow channel resistance can be reduced also. as the whole system of the pressure chamber 1. As a result, the flow speed of the ink I inside the pressure chamber 1 is improved.

[0039] According to the present embodiment, since the cross- section area of the pressure chamber 1 at the second end lb is larger than that of the pressure chamber 1 at the first end la, the flow channel resistance when the ink flows into the center of pressure can be reduced. In addition, since the cross-section area of the pressure chamber 1 at the first end la is smaller than that of the pressure chamber 1 at the second end lb,, the pressurizing efficiency of the liquid to the displacement of the partition 3 is improved. That is, the center of pressure of the liquid inside the

pressure chamber 1 can be shifted to the side of the nozzle 30a, and the distance between the meniscus and the center of pressure can be shortened. Therefore, since the time required to fill the liquid into the pressure chamber 1 can be shortened and the liquid can be pressurized at the position eloser to the meniscus, the meniscus can be vibrated at high acceleration. As a result of this, since the ink I discharged from the nozzle 30a can be minutely cut, it is possible to discharge minute droplets.

[0040] Especially, in the present embodiment, to efficiently apply the pressure to the ink at the first end la of the pressure chamber 1, the width of the pressure chamber 1 is set to be shorter than the height of the pressure chamber 1, and the width is varied to become long toward the second end lb while fixing the height of the pressure chamber 1 constant. Therefore, in the present embodiment, the meniscus can be effectively vibrated at high acceleration, and it becomes possible to discharge the minute droplets effectively. In addition, since the cross-section shape of the pressure chamber 1 is substantially a square at the second end lb, the flow channel resistance of the ink can further effectively be reduced, and it is thus possible to discharge the minute droplets more effectively.

[0041] ext, a manufacturing method of the inkjet head 100 in the present embodiment will be described. First, two polarized piezoelectric plates 24 and 24 are reversed and bonded to each other such that the polarization directions thereof become opposite to each other as illustrated in Fig. 4, thereafter the plates are

processed into a desired size by processing such as grinding or the like to provide the piezoelectric plate. As to this piezoelectric plate, two piezoelectric plates are formed, and the one plate is treated as a first piezoelectric plate 25Ά and the other plate is treated as a second piezoelectric plate 25B.

[0042] Subsequently, the plurality of first partitions 3A

composed of the piezoelectric material (actuator) are formed on the first piezoelectric plate 25A by

processing partition grooves 26 as illustrated in Fig. 5 (first partition forming process) . Herewith, the plural first partitions 3A were formed on the one face 11a of the first substrate 11. Here, the partition grooves 26 are processed to the direction along a straight line Lll illustrated in Fig. 5 inclined by the predetermined angle Θ for a straight line A extending to the liquid discharge direction Al on the first piezoelectric plate 25A. That is, in the first

partition forming process, the first partitions 3A are formed such that the width of the pressure chamber 1 to be formed in a later-described pressure chamber forming process at the second end lb is longer than that at the first end la to be connected to the nozzle 30a.

[0043] In addition, the front groove 5 is processed on the piezoelectric plate 25A. As for the processing of these grooves, it is preferable to used, for example, a cutting process by a diamond blade which seems that a temperature of the piezoelectric plate 25A does not exceed Curie temperature when performing the process.

[0044] ext, a conductive layer 27 is applied on the entire surface of the first piezoelectric plate 25A, to which the partition grooves 26 have been processed. This process can be easily realized by electroless plating or the like. Thereafter, as illustrated in Fig. 6, the conductive layer 27 on an upper face (a tip) 3a of the partition 3 is selectively eliminated by the grinding or the like, and further, a first groove 17 is

processed inside the partition groove 26 such that the conductive layer 27 is divided.. That is, in the first piezoelectric plate 25A, the first groove 17, to which the tip 3a of the second partition 3B is bonded, is formed on the one face which becomes the first

substrate 11 (first groove forming process). In this case, the groove 17 is processed to the direction along a straight line L12 illustrated in Fig. 6 inclined by the predetermined angle Θ to the opposite direction, when the partition groove 26 was formed, for the straight line A extending to the liquid discharge direction Al of the piezoelectric plate 25A.

[0045] As for the first groove 17 to be processed, it is

preferable that the width thereof is set to become substantially identical with the width of the first partition 3A, and it is preferable that this groove is formed by the cutting process with the diamond blade as above. Thereafter, although it is not illustrated, a protecting insulation film is applied on the entire surface of the formed face of the first partition 3A by a sputtering method or the like.

[0046] Accordingly, a first substrate unit 28A, which includes the first substrate 11 and the plural first partitions 3A erectly provided on the first substrate 11,

illustrated in Fig. 6 is manufactured.

[0047] In the present embodiment, a second substrate unit 28B, which includes the second substrate 12 and the plural second partitions 3B erectly provided on the second substrate 12, is also manufactured by the same

manufacturing method as that of the first substrate unit 28A.

[0048] That is, the plural second partitions 3B composed of the piezoelectric material (actuator) are formed on the second piezoelectric plate 25B by processing the partition grooves 26 as illustrated in Fig. 5 (second partition forming process) . Next, the conductive layer 27 is applied on the entire surface of the second piezoelectric plate 25B, to which the partition grooves 26 were processed. Next, the second groove 18 is processed inside the partition groove 26 such that the conductive layer 27 is divided. That is, in the second piezoelectric plate 25B, the second groove 18, to which the tip 3a of the first partition 3A is bonded, is formed on the one face which becomes the second

substrate 12 (second groove forming process) . As just described, the second substrate unit 28B, of which the constitution is similar to that of the first substrate unit 28A, is manufactured by the same manufacturing method as that of the first substrate unit 28A.

[0049] Subsequently, an adhesive is applied to the tips 3a and 3a of the partitions 3A and 3B, and the substrates 11 and 12 are faced each other, and then the tip 3a of the partition 3A is interdigitated with the groove 18 and the tip 3a of the partition 3B is interdigitated with the groove 17 as illustrated in Fig. 7. Thus, the first partitions 3A and the second partitions 3B are alternately provided in parallel in the width direction. Then, the tips 3a of the partitions 3A are bonded to the grooves 18 and the tips 3a of the partitions 3B are bonded to the grooves 17, thereby obtaining the

discharge unit 10. That is, the tips 3a of the first partitions 3A are bonded to the one face of the second substrate 12 and the tips 3a of the second partitions 3B are bonded to the one face of the first substrate 11, thereby forming the pressure chambers 1 partitioned by the respective partitions 3A and 3B extending toward the longitudinal direction (pressure chamber forming process ) .

[0050] After then, the front and back faces of the discharge unit 10 are grinded and polished to eliminate the conductive layer 27 and adjust to have the desired shape and size. Further, extraction electrode division grooves 29 are processed on the upper face of the discharge unit 10, thereby obtaining individual extraction electrodes 4 electrically divided and separated respectively.

[0051] After forming the discharge unit 10 by the above series of processes, the nozzle plate 30, the back plate 40, the manifold 50, the flexible substrates_.60 and 60 and the like are combined with others as illustrated in Fig. 1, thereby obtaining the inkjet head 100 according to the present embodiment.

[0052] In the present embodiment, the structure of the first substrate unit 28A is identical with the structure of the second substrate unit 28B. That is, as the second substrate unit 28B, the substrate unit having the same structure as that of the first substrate unit 28A rotated by 90 degrees is used. As just described, since it is unnecessary to manufacture the different- structure substrate units in order to manufacture the two substrate units 28A and 28B, the manufacturing process can be simplified and thus manufacturing costs can be reduced.

[0053] [Examples]

[0054] As to the discharge unit 10 described in the above

embodiment, it was formed with such the structure, where the partition grooves 26 and the grooves 17 (18) respectively have the predetermined angle Θ = 0.25°, for the liquid discharge direction Al, by using the piezoelectric ceramics C-6 made by Fuji Ceramics

Corporation as the piezoelectric material.

[0055] Fig. 8 is a structural schematic diagram illustrating the pressure chamber. Related to Fig. 8, the pressure chamber 1 having the length L = 7 [mm] in the liquid discharge direction Al, the width l = 30 [μιτι] of the first end la on the side of the nozzle 30a and the width W2 = 90 [μπι] of the second end lb on the side of the common liquid chamber 53 was obtained. Note that both the height hi of the first end la on the side of the nozzle 30a and the height h2 of the _. second end lb on the side of the common liquid chamber 53 were 210

[pm] .

[0056] Similarly, for the purpose of comparison, the partition groove 26 and the groove 17 were formed along the liquid discharge direction Al, and the discharge unit having the comparative structure set as l = W2 was also manufactured as a comparative example. As to the discharge units of the comparative examples, the

discharge units of which the widths Wl and W2 were respectively 30 [μιη] (comparative example 1) , 60 [μπι] (comparative example 2) and 90 [urn] (comparative

example 3) were prepared.

[0057] In addition, for the purpose of further comparison, the discharge unit of which the pressure chamber had the constant width W and which had the variable height h was prepared as a comparative, example 4. Specifically, in the pressure chamber illustrated in Fig. 8, the width Wl and the width W2 were set to 30 [μπι] , the height hi was set to 210 [μπι] , and the height h2 was set to 630 [μπι] by deepening it as advancing to the direction opposite to the liquid discharge direction Al .

[0058] ext, the inkjet heads were formed by using the

respective prepared discharge units, the target ink discharge amount was set to 1 [pi] or less, and then the discharge performance was evaluated. Note that the diameter of the nozzle was set to 10 [μιη] in all the inkjet heads, and the solution of ethylene glycol, of which the concentration was 80 [wt%], was used as the ink to be used for the evaluation.

[0059] First, the voltage of 10 [V] was applied to the

respective partitions, and the frequency of the

meniscus generated in that case was evaluated. Next, the voltage of 15 [V] was applied with the pulse width corresponding to half of the obtained frequency, and the discharge amount of ink to be discharged in that case was evaluated. The results according to the series of these evaluations are indicated in Table 1.

[0060] [Table 1]

[0061] In the comparative examples 1 to 3, it was understood that when the width W of the pressure chamber was narrowed, the amplitude of the meniscus became large, on the other hand, the vibration frequency of the meniscus reduced. Consequently, since the vibration frequency of the meniscus was low in the comparative example 1, where the width W of the pressure chamber was narrow, the discharge ink could not be minutely cut and thus the discharge amount became large.

Incidentally, to reduce the discharge amount, when the voltage to be applied was reduced, the ink was not discharged, and the ink droplets of 1 [pi] or less could not be obtained.

[0062] Also, as to the comparative example 2, although it was observed that the discharge amount was slightly reduced as compared with the comparative example 1, the vibration frequency of the meniscus was low, and the ink droplets of 1 [pi] or less could not be obtained. In the comparative example 3, where the width of the pressure chamber was wide, although the frequency of the meniscus was high, the ink could not be discharged at any voltage conditions.

[0063] In the comparative example 4, the ink was not

discharged when applying the voltage of 15 [V] .

Although it was confirmed that the ink was discharged by increasing the voltage, the discharge amount at that time was 1 [pi] or more, and the ink droplets of 1 [pi] or less could not be obtained.

] Whereas, in the present example, the minute ink

droplets, of which the amount is 0.9 [pi], could be discharged when applying the voltage of 15 [V] . From the above result, the meniscus could be vibrated at high acceleration and the minute amount of ink could be discharged by the constitution of the inkjet head in this example.

] The present invention is not limited to the above embodiment, but many variations and modification can be adopted by a person skilled in this field within the scope of the technical idea according to the present invention .

] In the above embodiment, although the width of the pressure chamber 1 is set to become long continuously toward the second end lb from the first end la, it may be set to become long stepwise. In addition, a section where the width of the pressure chamber 1 does not vary may exist on the way toward the second end lb from the first end la.

] In the above embodiment, although the case that the width of the pressure chamber 1 is relatively shorter than the height of the pressure chamber 1 at the first end la has been described, a case that the height of the pressure chamber 1 is relatively shorter than the width of the pressure chamber 1 at the first end la is also acceptable. Also in that case, the height of the pressure chamber 1 is allowed to become high

continuously or stepwise as it approaches the second end lb, and a section, where the height does not vary, may exist.

] In the above embodiment, the partitions 3A and 3B are respectively provided erectly on the first substrate 11 and the second substrate 12, and the partitions 3A and 3B are alternately arranged. However, it may be constituted that the partitions 3 are erectly provided on any one of the substrates and these partitions are bonded to the other substrate.

[0069] In the above embodiment, although the piezoelectric material constituted by bonding the base piezoelectric material, of which the partitions 3 are polarized in the height direction C, to the tip piezoelectric material polarized in the direction opposite to the polarized direction of the base piezoelectric material has been described, it may be constituted by a

piezoelectric material polarized only in one direction, i.e., its height direction.

Effects of Invention

[ 0070 ] According to the present invention, since the cross- section area of the pressure chamber at the second end is larger than the cross-section area of the pressure chamber at the first end, it is possible to reduce the flow channel resistance when the liquid flows into the center of pressure. Moreover, since the cross-section area of the pressure chamber at the first end is smaller than the cross-section area of the pressure chamber at the second end, it is possible to improve the pressurizing efficiency of the liquid to the displacement of the partition. That is, it is possible to shift the center of pressure of the liquid in the pressure chamber to the side of the nozzle, and it is thus possible to reduce the distance between the meniscus and the center of pressure. For this reason, it is possible to shorten the time required to fill the liquid into the pressure chamber and pressurize the liquid at the position closer to the meniscus.

Consequently, it is possible to vibrate the meniscus at high acceleration, and it is thus possible to discharge the minute amount of the liquid.

[0071] While the present invention has been described with reference to the exemplary embodiment, it is to be understood that the invention is not limited to the disclosed exemplary embodiment. -The scope of the following claims is to be accorded the broadest

interpretation so as to encompass all such

modifications and equivalent structures and functions.

[0072] This application claims the benefit of Japanese Patent Application No. 2013-018081, filed February 01, 2013, which is hereby incorporated by reference herein in its entirety.

Reference Signs List

[0073] 1 ... pressure chamber, la ... first end, lb ... second end, 3 ... partition, 11 ... first substrate, 12 ... second substrate, 13 ... electrode pair, 30 ... nozzle plate

(nozzle member) , 30a ... nozzle, 100 ... inkjet head

(liquid discharge apparatus)

Claims

[Claim 1]A liquid discharge apparatus comprising:

a plurality of pressure chambers which are formed by a plurality of partitions each composed of a

piezoelectric material;

a plurality of electrode pairs each of which is arranged on both sides of each partition and shear- deforms each partition; and

a nozzle member which is arranged on a side of a first end of each pressure chamber and on which each nozzle connected to each pressure chamber has been formed, wherein each pressure chamber is formed such that a relatively shorter one of a height and a width of the pressure chamber at the first end becomes long as it approaches, from the first end, a second end on the opposite side.

[Claim 2 ] he liquid discharge apparatus according to Claim 1,

wherein, at the first end, the width of the pressure chamber is relatively shorter than the height of the pressure chamber.

[Claim 3] The liquid discharge apparatus according to Claim 1 or

2, wherein a cross-section shape of each pressure chamber at the second end is substantially a square.

[Claim 4 ] he liquid discharge apparatus according to any one of

Claims 1 to 3, wherein

the plurality of partitions include a plurality of first partitions protrusively provided on one face of a first substrate and a plurality of second partitions protrusively provided on one face of a second substrate, and

the pressure chamber is formed by bonding a tip of the first partition to the one face of the second substrate and bonding a tip of the second partition to the one face of the first substrate.

[Claim 5] The liquid discharge apparatus according to Claim 4,

wherein a first groove with which the tip of the second partition is interdigitated is formed on the one face of the first substrate, and a second groove with which the tip of the first partition is interdigitated is formed on the one face of the second substrate.

[Claim 6] The liquid discharge apparatus according to Claim 4 or

5, wherein

the first partition includes a first base-side

piezoelectric material protruding from the one face of the first substrate, integrally formed with the first substrate and polarized in a height direction, and a first tip-side piezoelectric material bonded to the first base-side piezoelectric material and polarized in a direction opposite to the polarization direction of the first base-side piezoelectric material, and the second partition includes a second base-side piezoelectric material protruding from the one face of the second substrate, integrally formed with the second substrate and polarized in the height direction, and a second tip-side piezoelectric material bonded to the second base-side piezoelectric material and polarized in a direction opposite to the polarization direction of the second base-side piezoelectric material.

[Claim 7] he liquid discharge apparatus according to any one of

Claims 1 to 6, wherein an air chamber which is

partitioned by the partitions and is not filled with liquid is formed between the adjacent two pressure chambers among the plurality of pressure chambers.

[Claim 8] A manufacturing method of a liquid discharge apparatus, comprising:

a first partition forming step of forming a plurality of partitions each composed of a piezoelectric material, on one face of a first substrate;

a second partition forming step of forming a plurality of partitions each composed of a piezoelectric material, on one face of a second substrate; and

a pressure chamber forming step of forming a pressure chamber by bonding a tip of the first partition to the one face of the second substrate and bonding a tip of the second partition to the one face of the first substrate,

wherein, in the first partition forming step and the second partition forming step, the first partition and the second partition are formed such that a width of the pressure chamber formed in the pressure chamber forming step at a second end opposite to a first end connected to a nozzle for discharging liquid is longer than the width of the pressure chamber at the first end. [Claim 9] he manufacturing method of the liquid discharge

apparatus according to Claim 8, further comprising:

a first groove forming step of forming a first groove to which the tip of the second partition is bonded, on the one face of the first substrate; and

a second groove forming step of forming a second groove to which the tip of the first partition is bonded, on the one face of the second substrate.